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错误 #2001 » 技物所.json

唐飞, 2023-12-14 06:22

 
{
"CCD2DMD_X": 0.0,
"CaliCCDToDMD_X": 0.0,
"CCD2DMD_Y": 0.0,
"CaliCCDToDMD_Y": 0.0,
"CaliCCDToDMD_DeltaX": 0.0,
"CaliCCDToDMD_DeltaY": 0.0,
"Orth_X": 11.236216372,
"Orth_Y": 11.236216372,
"Orth_X_Test": 4.9727792778844462,
"ScanAngleCompensate": 0.0,
"Orth_Y_Test": 4.9727792778844462,
"CaliOrth_X": 11.236216372,
"CaliOrth_Y": 11.236216372,
"CaliOrth_DeltaX": 0.0,
"CaliOrth_DeltaY": 0.0,
"CaliOrth_StageXScale": 1.00001728404335,
"CaliOrth_StageYScale": 1.00001271458068,
"AngleAL": -17.15147308,
"OffsetXAL": 0.193833157937,
"OffsetYAL": 0.383795891833,
"OffsetXALRotate": 0.0,
"OffsetYALRotate": 0.0,
"Parallel_X": 0.0,
"Parallel_Y": 0.0,
"CaliParallel_X": 0.0,
"CaliParallel_Y": 0.0,
"CaliParallel_DeltaX": 0.0,
"CaliParallel_DeltaY": 0.0,
"X": 0.0,
"Theta": 0.0,
"Y": 0.0,
"Z": 0.0,
"ChuckOrgin_X": 103.25,
"ChuckOrgin_Y": 93.585,
"Modified": false,
"BaseZ3D": -6.653,
"BaseZDarkStage": 0.0,
"BaseZDarkObject": 0.0,
"DustThd": 3,
"Orth_Y_BeforR": 0.0,
"SelfCheckingCoordinate_X": 86.0,
"SelfCheckingCoordinate_Y": -43.0,
"SelfCheckingCoordinate_Z": 0.0,
"SubstrateMeasurementCoordinate_X": 0.0,
"SubstrateMeasurementCoordinate_Y": 0.0,
"SubstrateMeasurementCoordinate_Z": 0.0,
"SelfCheckingTargetValue": 32000,
"ZLimit": true
}
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