2022-09-08 13:53:59,111 [Thread=19] INFO - 该轴是Z 2022-09-08 13:53:59,262 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 13:53:59,262 [Thread=19] INFO - 该轴是Z,目标位置是-7.4974999999905 2022-09-08 13:53:59,262 [Thread=19] INFO - 步进失败 2022-09-08 13:53:59,302 [Thread=20] INFO - 单轴触发了 2022-09-08 13:53:59,303 [Thread=20] INFO - 该轴是Z 2022-09-08 13:53:59,303 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 13:53:59,303 [Thread=20] INFO - 该轴是Z,目标位置是-7.4972999999905 2022-09-08 13:53:59,303 [Thread=20] INFO - 步进失败 2022-09-08 13:54:03,792 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 13:54:03,847 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 13:54:03,847 [Thread=5] INFO - Measure angle is 0 2022-09-08 13:54:03,848 [Thread=5] INFO - Measure StartPoint:974.204467773438,1026, EndPoint:1003.24334716797,1026, PixelDistance:29.038879 2022-09-08 13:54:03,848 [Thread=5] INFO - DerivativeMeasure timespan = 0.4445 2022-09-08 13:54:07,633 [Thread=29] INFO - SwitchIndex index:0 2022-09-08 13:54:08,104 [Thread=29] INFO - Switch Lens:Broadcast Event 2022-09-08 13:54:08,116 [Thread=15] INFO - 单轴触发了 2022-09-08 13:54:08,116 [Thread=15] INFO - 该轴是Z 2022-09-08 13:54:08,116 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 13:54:08,117 [Thread=15] INFO - 该轴是Z,目标位置是-7.44610000095367 2022-09-08 13:54:08,117 [Thread=15] INFO - 步进失败 2022-09-08 13:54:08,117 [Thread=15] INFO - SwitchOffsetZ:0.051 2022-09-08 13:54:08,121 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 13:54:08,121 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 13:54:08,121 [Thread=15] INFO - Longth长度127 2022-09-08 13:54:08,121 [Thread=15] INFO - 进入getLongth 2022-09-08 13:54:08,121 [Thread=15] INFO - 目标坐标X-13.63514Y7.85257 2022-09-08 13:54:08,121 [Thread=15] INFO - 晶圆的大小5 2022-09-08 13:54:08,121 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 13:54:08,122 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 13:54:08,122 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 13:54:08,122 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 13:54:08,122 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 13:54:08,122 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 13:54:08,122 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 13:54:09,140 [Thread=29] INFO - stageout currentPos:-7.4463, currentVelocity:2, delayTime:3773, point.Z:-0.5 2022-09-08 13:54:09,140 [Thread=29] INFO - stage out homez 2022-09-08 13:54:14,936 [Thread=29] INFO - stage out home ok 2022-09-08 13:54:14,940 [Thread=29] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 13:54:14,940 [Thread=29] INFO - stagein homez 2022-09-08 13:54:14,940 [Thread=29] INFO - stagein home ok 2022-09-08 13:54:14,940 [Thread=29] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 13:54:14,940 [Thread=29] INFO - Longth长度127 2022-09-08 13:54:14,941 [Thread=29] INFO - 进入getLongth 2022-09-08 13:54:14,941 [Thread=29] INFO - 目标坐标X-100Y-90 2022-09-08 13:54:14,941 [Thread=29] INFO - 晶圆的大小5 2022-09-08 13:54:14,941 [Thread=29] INFO - 晶圆的宽高127 2022-09-08 13:54:14,941 [Thread=29] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 13:54:14,941 [Thread=29] INFO - X+安全坐标-118.61 2022-09-08 13:54:14,941 [Thread=29] INFO - X-安全坐标18.39 2022-09-08 13:54:14,942 [Thread=29] INFO - Y上安全坐标-16.7307 2022-09-08 13:54:14,942 [Thread=29] INFO - Y下安全坐标120.2693 2022-09-08 13:54:14,942 [Thread=29] INFO - 双轴-目标点不在范围内 2022-09-08 13:54:14,942 [Thread=29] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:03:12,853 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 14:03:12,858 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 14:03:12,858 [Thread=30] INFO - 单轴触发了 2022-09-08 14:03:12,858 [Thread=30] INFO - 该轴是Z 2022-09-08 14:03:12,858 [Thread=30] INFO - 进入MoveSingleAxis_1 2022-09-08 14:03:12,859 [Thread=30] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:03:12,859 [Thread=30] INFO - 步进失败 2022-09-08 14:03:12,859 [Thread=30] INFO - SwitchOffsetZ:0 2022-09-08 14:03:12,868 [Thread=30] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:03:12,869 [Thread=30] INFO - stagein homez 2022-09-08 14:03:12,869 [Thread=30] INFO - stagein home ok 2022-09-08 14:03:12,869 [Thread=30] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:03:12,869 [Thread=30] INFO - Longth长度127 2022-09-08 14:03:12,870 [Thread=30] INFO - 进入getLongth 2022-09-08 14:03:12,870 [Thread=30] INFO - 目标坐标X-100Y-90 2022-09-08 14:03:12,870 [Thread=30] INFO - 晶圆的大小5 2022-09-08 14:03:12,870 [Thread=30] INFO - 晶圆的宽高127 2022-09-08 14:03:12,870 [Thread=30] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:03:12,870 [Thread=30] INFO - X+安全坐标-118.61 2022-09-08 14:03:12,871 [Thread=30] INFO - X-安全坐标18.39 2022-09-08 14:03:12,871 [Thread=30] INFO - Y上安全坐标-16.7307 2022-09-08 14:03:12,871 [Thread=30] INFO - Y下安全坐标120.2693 2022-09-08 14:03:12,871 [Thread=30] INFO - 双轴-目标点不在范围内 2022-09-08 14:03:12,871 [Thread=30] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:03:13,879 [Thread=13] INFO - stagein currentPos:0.0486, currentVelocity:2, delayTime:574, point.Z:-0.5 2022-09-08 14:03:13,879 [Thread=13] INFO - stagein homez 2022-09-08 14:03:16,474 [Thread=13] INFO - stagein home ok 2022-09-08 14:03:16,477 [Thread=13] INFO - StageBack: waferSize = 5 2022-09-08 14:03:16,480 [Thread=13] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:03:16,480 [Thread=13] INFO - stagein homez 2022-09-08 14:03:16,480 [Thread=13] INFO - stagein home ok 2022-09-08 14:03:16,480 [Thread=13] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:03:16,481 [Thread=13] INFO - Longth长度127 2022-09-08 14:03:16,481 [Thread=13] INFO - 进入getLongth 2022-09-08 14:03:16,481 [Thread=13] INFO - 目标坐标X13.39Y115.2693 2022-09-08 14:03:16,481 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:03:16,481 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:03:16,481 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:03:16,481 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:03:16,481 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:03:16,481 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:03:16,481 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:03:16,481 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 14:03:24,738 [Thread=13] INFO - 单轴触发了 2022-09-08 14:03:24,739 [Thread=13] INFO - 该轴是Z 2022-09-08 14:03:24,739 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:03:24,739 [Thread=13] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 14:03:24,739 [Thread=13] INFO - 步进失败 2022-09-08 14:03:36,081 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:03:36,081 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:03:36,081 [Thread=1] INFO - Longth长度127 2022-09-08 14:03:36,081 [Thread=1] INFO - 进入getLongth 2022-09-08 14:03:36,081 [Thread=1] INFO - 目标坐标X-17.745Y21.6303 2022-09-08 14:03:36,082 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:03:36,082 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:03:36,082 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:03:36,082 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:03:36,082 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:03:36,082 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:03:36,082 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:03:36,082 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:03:42,522 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:03:42,634 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:03:47,967 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:03:47,968 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:03:50,745 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:03:50,745 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:03:50,745 [Thread=1] INFO - Longth长度127 2022-09-08 14:03:50,745 [Thread=1] INFO - 进入getLongth 2022-09-08 14:03:50,745 [Thread=1] INFO - 目标坐标X-18.098524Y21.816592 2022-09-08 14:03:50,745 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:03:50,745 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:03:50,746 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:03:50,746 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:03:50,746 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:03:50,746 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:03:50,746 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:03:50,746 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:03:54,148 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:03:54,151 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:03:54,162 [Thread=27] INFO - 单轴触发了 2022-09-08 14:03:54,163 [Thread=27] INFO - 该轴是Z 2022-09-08 14:03:54,163 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:03:54,163 [Thread=27] INFO - 该轴是Z,目标位置是-7.57720000138283 2022-09-08 14:03:54,163 [Thread=27] INFO - 步进失败 2022-09-08 14:03:54,163 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:03:54,168 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:03:54,168 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:03:54,168 [Thread=27] INFO - Longth长度127 2022-09-08 14:03:54,168 [Thread=27] INFO - 进入getLongth 2022-09-08 14:03:54,168 [Thread=27] INFO - 目标坐标X-18.145524Y21.738592 2022-09-08 14:03:54,169 [Thread=27] INFO - 晶圆的大小5 2022-09-08 14:03:54,169 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 14:03:54,169 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:03:54,169 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:03:54,169 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 14:03:54,169 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 14:03:54,169 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:03:54,169 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:03:56,157 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:04:02,738 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:04:02,738 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:04:02,739 [Thread=1] INFO - Longth长度127 2022-09-08 14:04:02,739 [Thread=1] INFO - 进入getLongth 2022-09-08 14:04:02,739 [Thread=1] INFO - 目标坐标X-18.176538Y21.744237 2022-09-08 14:04:02,739 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:04:02,739 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:04:02,739 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:04:02,739 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:04:02,739 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:04:02,739 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:04:02,739 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:04:02,739 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:04:07,764 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:04:07,766 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:04:07,778 [Thread=15] INFO - 单轴触发了 2022-09-08 14:04:07,778 [Thread=15] INFO - 该轴是Z 2022-09-08 14:04:07,778 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:04:07,778 [Thread=15] INFO - 该轴是Z,目标位置是-7.5723999976635 2022-09-08 14:04:07,778 [Thread=15] INFO - 步进失败 2022-09-08 14:04:07,778 [Thread=15] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:04:07,783 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:04:07,783 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:04:07,783 [Thread=15] INFO - Longth长度127 2022-09-08 14:04:07,784 [Thread=15] INFO - 进入getLongth 2022-09-08 14:04:07,785 [Thread=15] INFO - 目标坐标X-18.186538Y21.741237 2022-09-08 14:04:07,785 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:04:07,785 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:04:07,785 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:04:07,785 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:04:07,785 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:04:07,785 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:04:07,785 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:04:07,785 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:04:09,789 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:04:15,592 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:04:15,675 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.3596245231868 2022-09-08 14:04:15,675 [Thread=28] INFO - Measure angle is -90.359625 2022-09-08 14:04:15,679 [Thread=28] INFO - Measure StartPoint:1151.22900390625,626.876892089844, EndPoint:1147.1435546875,1277.76477050781, PixelDistance:650.9007 2022-09-08 14:04:15,679 [Thread=28] INFO - DerivativeMeasure timespan = 4.2248 2022-09-08 14:04:17,210 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:04:17,262 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.1993110918938 2022-09-08 14:04:17,263 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.0364540553665 2022-09-08 14:04:17,263 [Thread=28] INFO - Measure angle is -90.117883 2022-09-08 14:04:17,267 [Thread=28] INFO - Measure StartPoint:1262.75866699219,627.266357421875, EndPoint:1261.41857910156,1278.5830078125, PixelDistance:651.318029 2022-09-08 14:04:17,267 [Thread=28] INFO - DerivativeMeasure timespan = 3.8837 2022-09-08 14:05:03,534 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:05:03,592 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.2865747741806 2022-09-08 14:05:03,592 [Thread=7] INFO - Measure angle is -90.286575 2022-09-08 14:05:03,597 [Thread=7] INFO - Measure StartPoint:1167.28637695313,626.878784179688, EndPoint:1164.03051757813,1277.8408203125, PixelDistance:650.970178 2022-09-08 14:05:03,597 [Thread=7] INFO - DerivativeMeasure timespan = 4.9708 2022-09-08 14:05:04,538 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:05:04,596 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.1695680297633 2022-09-08 14:05:04,597 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.02742890976 2022-09-08 14:05:04,597 [Thread=7] INFO - Measure angle is -90.098498 2022-09-08 14:05:04,604 [Thread=7] INFO - Measure StartPoint:985.644226074219,626.260559082031, EndPoint:984.524658203125,1277.49035644531, PixelDistance:651.23076 2022-09-08 14:05:04,604 [Thread=7] INFO - DerivativeMeasure timespan = 6.8186 2022-09-08 14:05:09,798 [Thread=30] INFO - SwitchIndex index:0 2022-09-08 14:05:09,800 [Thread=30] INFO - Switch Lens:Broadcast Event 2022-09-08 14:05:09,812 [Thread=13] INFO - 单轴触发了 2022-09-08 14:05:09,812 [Thread=13] INFO - 该轴是Z 2022-09-08 14:05:09,812 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:05:09,812 [Thread=13] INFO - 该轴是Z,目标位置是-7.51820000095367 2022-09-08 14:05:09,812 [Thread=13] INFO - 步进失败 2022-09-08 14:05:09,812 [Thread=13] INFO - SwitchOffsetZ:0.051 2022-09-08 14:05:09,817 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:05:09,817 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:05:09,817 [Thread=13] INFO - Longth长度127 2022-09-08 14:05:09,817 [Thread=13] INFO - 进入getLongth 2022-09-08 14:05:09,817 [Thread=13] INFO - 目标坐标X-18.129538Y21.822237 2022-09-08 14:05:09,817 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:05:09,817 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:05:09,817 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:05:09,818 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:05:09,818 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:05:09,818 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:05:09,818 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:05:09,818 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 14:05:11,252 [Thread=30] INFO - stageout currentPos:-7.5184, currentVelocity:2, delayTime:3809, point.Z:-0.5 2022-09-08 14:05:11,252 [Thread=30] INFO - stage out homez 2022-09-08 14:05:17,070 [Thread=30] INFO - stage out home ok 2022-09-08 14:05:17,086 [Thread=30] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:05:17,087 [Thread=30] INFO - stagein homez 2022-09-08 14:05:17,087 [Thread=30] INFO - stagein home ok 2022-09-08 14:05:17,087 [Thread=30] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:05:17,088 [Thread=30] INFO - Longth长度127 2022-09-08 14:05:17,088 [Thread=30] INFO - 进入getLongth 2022-09-08 14:05:17,088 [Thread=30] INFO - 目标坐标X-100Y-90 2022-09-08 14:05:17,088 [Thread=30] INFO - 晶圆的大小5 2022-09-08 14:05:17,088 [Thread=30] INFO - 晶圆的宽高127 2022-09-08 14:05:17,088 [Thread=30] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:05:17,088 [Thread=30] INFO - X+安全坐标-118.61 2022-09-08 14:05:17,088 [Thread=30] INFO - X-安全坐标18.39 2022-09-08 14:05:17,088 [Thread=30] INFO - Y上安全坐标-16.7307 2022-09-08 14:05:17,089 [Thread=30] INFO - Y下安全坐标120.2693 2022-09-08 14:05:17,089 [Thread=30] INFO - 双轴-目标点不在范围内 2022-09-08 14:05:17,089 [Thread=30] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:09:28,086 [Thread=3] INFO - SwitchIndex index:0 2022-09-08 14:09:28,089 [Thread=3] INFO - Switch Lens:Broadcast Event 2022-09-08 14:09:28,089 [Thread=13] INFO - 单轴触发了 2022-09-08 14:09:28,089 [Thread=13] INFO - 该轴是Z 2022-09-08 14:09:28,089 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:09:28,090 [Thread=13] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:09:28,090 [Thread=13] INFO - 步进失败 2022-09-08 14:09:28,090 [Thread=13] INFO - SwitchOffsetZ:0 2022-09-08 14:09:28,097 [Thread=13] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:09:28,097 [Thread=13] INFO - stagein homez 2022-09-08 14:09:28,098 [Thread=13] INFO - stagein home ok 2022-09-08 14:09:28,098 [Thread=13] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:09:28,098 [Thread=13] INFO - Longth长度127 2022-09-08 14:09:28,098 [Thread=13] INFO - 进入getLongth 2022-09-08 14:09:28,098 [Thread=13] INFO - 目标坐标X-100Y-90 2022-09-08 14:09:28,098 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:09:28,098 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:09:28,098 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:09:28,099 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:09:28,099 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:09:28,099 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:09:28,099 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:09:28,099 [Thread=13] INFO - 双轴-目标点不在范围内 2022-09-08 14:09:28,099 [Thread=13] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:09:29,110 [Thread=3] INFO - stagein currentPos:-0.2359, currentVelocity:2, delayTime:432, point.Z:-0.5 2022-09-08 14:09:29,110 [Thread=3] INFO - stagein homez 2022-09-08 14:09:31,565 [Thread=3] INFO - stagein home ok 2022-09-08 14:09:31,568 [Thread=3] INFO - StageBack: waferSize = 5 2022-09-08 14:09:31,571 [Thread=3] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:09:31,572 [Thread=3] INFO - stagein homez 2022-09-08 14:09:31,572 [Thread=3] INFO - stagein home ok 2022-09-08 14:09:31,572 [Thread=3] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:09:31,572 [Thread=3] INFO - Longth长度127 2022-09-08 14:09:31,572 [Thread=3] INFO - 进入getLongth 2022-09-08 14:09:31,572 [Thread=3] INFO - 目标坐标X13.39Y115.2693 2022-09-08 14:09:31,572 [Thread=3] INFO - 晶圆的大小5 2022-09-08 14:09:31,572 [Thread=3] INFO - 晶圆的宽高127 2022-09-08 14:09:31,573 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:09:31,573 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:09:31,573 [Thread=3] INFO - X-安全坐标18.39 2022-09-08 14:09:31,573 [Thread=3] INFO - Y上安全坐标-16.7307 2022-09-08 14:09:31,573 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:09:31,573 [Thread=3] INFO - 双轴-目标点在范围内 2022-09-08 14:09:37,770 [Thread=3] INFO - 单轴触发了 2022-09-08 14:09:37,771 [Thread=3] INFO - 该轴是Z 2022-09-08 14:09:37,771 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:09:37,771 [Thread=3] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 14:09:37,771 [Thread=3] INFO - 步进失败 2022-09-08 14:09:41,939 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:09:41,939 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:09:41,939 [Thread=1] INFO - Longth长度127 2022-09-08 14:09:41,939 [Thread=1] INFO - 进入getLongth 2022-09-08 14:09:41,940 [Thread=1] INFO - 目标坐标X-17.682Y21.9693 2022-09-08 14:09:41,940 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:09:41,940 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:09:41,940 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:09:41,940 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:09:41,940 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:09:41,940 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:09:41,940 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:09:41,940 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:09:49,151 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:09:49,262 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:09:53,308 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:09:53,308 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:09:55,321 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:09:55,321 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:09:55,322 [Thread=1] INFO - Longth长度127 2022-09-08 14:09:55,322 [Thread=1] INFO - 进入getLongth 2022-09-08 14:09:55,322 [Thread=1] INFO - 目标坐标X-18.116066Y22.069516 2022-09-08 14:09:55,322 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:09:55,322 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:09:55,322 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:09:55,322 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:09:55,322 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:09:55,322 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:09:55,323 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:09:55,323 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:09:58,731 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:09:58,733 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:09:58,745 [Thread=15] INFO - 单轴触发了 2022-09-08 14:09:58,745 [Thread=15] INFO - 该轴是Z 2022-09-08 14:09:58,745 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:09:58,746 [Thread=15] INFO - 该轴是Z,目标位置是-7.49070000138283 2022-09-08 14:09:58,746 [Thread=15] INFO - 步进失败 2022-09-08 14:09:58,746 [Thread=15] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:09:58,749 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:09:58,750 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:09:58,750 [Thread=15] INFO - Longth长度127 2022-09-08 14:09:58,750 [Thread=15] INFO - 进入getLongth 2022-09-08 14:09:58,750 [Thread=15] INFO - 目标坐标X-18.163066Y21.991516 2022-09-08 14:09:58,750 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:09:58,750 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:09:58,750 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:09:58,750 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:09:58,750 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:09:58,750 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:09:58,751 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:09:58,751 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:10:00,739 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:10:03,512 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:10:03,512 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:10:03,512 [Thread=1] INFO - Longth长度127 2022-09-08 14:10:03,512 [Thread=1] INFO - 进入getLongth 2022-09-08 14:10:03,512 [Thread=1] INFO - 目标坐标X-18.175286Y21.950019 2022-09-08 14:10:03,513 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:10:03,513 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:10:03,513 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:10:03,513 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:10:03,513 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:10:03,513 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:10:03,513 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:10:03,513 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:10:07,291 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:10:07,295 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:10:07,306 [Thread=13] INFO - 单轴触发了 2022-09-08 14:10:07,306 [Thread=13] INFO - 该轴是Z 2022-09-08 14:10:07,306 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:10:07,306 [Thread=13] INFO - 该轴是Z,目标位置是-7.4871999976635 2022-09-08 14:10:07,307 [Thread=13] INFO - 步进失败 2022-09-08 14:10:07,307 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:10:07,311 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:10:07,311 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:10:07,311 [Thread=13] INFO - Longth长度127 2022-09-08 14:10:07,311 [Thread=13] INFO - 进入getLongth 2022-09-08 14:10:07,311 [Thread=13] INFO - 目标坐标X-18.185286Y21.947019 2022-09-08 14:10:07,311 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:10:07,311 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:10:07,311 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:10:07,312 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:10:07,312 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:10:07,312 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:10:07,312 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:10:07,312 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 14:10:09,301 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:10:12,187 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:10:12,240 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.4277559381851 2022-09-08 14:10:12,240 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.3310192245766 2022-09-08 14:10:12,240 [Thread=28] INFO - Measure angle is -90.379388 2022-09-08 14:10:12,245 [Thread=28] INFO - Measure StartPoint:1007.09747314453,545.217834472656, EndPoint:1000.66754150391,1516.26989746094, PixelDistance:971.073351 2022-09-08 14:10:12,245 [Thread=28] INFO - DerivativeMeasure timespan = 4.7328 2022-09-08 14:10:13,365 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:10:13,449 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.1026186972838 2022-09-08 14:10:13,449 [Thread=28] INFO - Measure angle is -90.102619 2022-09-08 14:10:13,454 [Thread=28] INFO - Measure StartPoint:1113.00366210938,546.641479492188, EndPoint:1111.26452636719,1517.62805175781, PixelDistance:970.98813 2022-09-08 14:10:13,455 [Thread=28] INFO - DerivativeMeasure timespan = 5.7163 2022-09-08 14:10:15,841 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:10:15,903 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:10:15,903 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:10:15,903 [Thread=28] INFO - Measure angle is -90 2022-09-08 14:10:15,907 [Thread=28] INFO - Measure StartPoint:998,546.660278320313, EndPoint:998,1518.14074707031, PixelDistance:971.480469 2022-09-08 14:10:15,907 [Thread=28] INFO - DerivativeMeasure timespan = 3.6322 2022-09-08 14:10:16,894 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:10:16,968 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.1710806515418 2022-09-08 14:10:16,969 [Thread=28] INFO - Measure angle is -90.171081 2022-09-08 14:10:16,975 [Thread=28] INFO - Measure StartPoint:1180.54345703125,548.071350097656, EndPoint:1177.64404296875,1519.111328125, PixelDistance:971.044307 2022-09-08 14:10:16,975 [Thread=28] INFO - DerivativeMeasure timespan = 6.1223 2022-09-08 14:10:18,546 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 14:10:18,549 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 14:10:18,561 [Thread=13] INFO - 单轴触发了 2022-09-08 14:10:18,561 [Thread=13] INFO - 该轴是Z 2022-09-08 14:10:18,561 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:10:18,562 [Thread=13] INFO - 该轴是Z,目标位置是-7.43180000095367 2022-09-08 14:10:18,562 [Thread=13] INFO - 步进失败 2022-09-08 14:10:18,562 [Thread=13] INFO - SwitchOffsetZ:0.051 2022-09-08 14:10:18,566 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:10:18,567 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:10:18,567 [Thread=13] INFO - Longth长度127 2022-09-08 14:10:18,567 [Thread=13] INFO - 进入getLongth 2022-09-08 14:10:18,567 [Thread=13] INFO - 目标坐标X-18.128286Y22.028019 2022-09-08 14:10:18,567 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:10:18,567 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:10:18,567 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:10:18,567 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:10:18,567 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:10:18,567 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:10:18,567 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:10:18,568 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 14:10:20,391 [Thread=15] INFO - stageout currentPos:-7.432, currentVelocity:2, delayTime:3766, point.Z:-0.5 2022-09-08 14:10:20,391 [Thread=15] INFO - stage out homez 2022-09-08 14:10:26,181 [Thread=15] INFO - stage out home ok 2022-09-08 14:10:26,184 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:10:26,185 [Thread=15] INFO - stagein homez 2022-09-08 14:10:26,185 [Thread=15] INFO - stagein home ok 2022-09-08 14:10:26,185 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:10:26,185 [Thread=15] INFO - Longth长度127 2022-09-08 14:10:26,185 [Thread=15] INFO - 进入getLongth 2022-09-08 14:10:26,185 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 14:10:26,185 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:10:26,185 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:10:26,185 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:10:26,185 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:10:26,186 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:10:26,186 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:10:26,186 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:10:26,186 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 14:10:26,186 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:14:38,061 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 14:14:38,066 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 14:14:38,066 [Thread=28] INFO - 单轴触发了 2022-09-08 14:14:38,066 [Thread=28] INFO - 该轴是Z 2022-09-08 14:14:38,066 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:14:38,067 [Thread=28] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:14:38,067 [Thread=28] INFO - 步进失败 2022-09-08 14:14:38,067 [Thread=28] INFO - SwitchOffsetZ:0 2022-09-08 14:14:38,072 [Thread=28] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:14:38,073 [Thread=28] INFO - stagein homez 2022-09-08 14:14:38,073 [Thread=28] INFO - stagein home ok 2022-09-08 14:14:38,073 [Thread=28] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:14:38,073 [Thread=28] INFO - Longth长度127 2022-09-08 14:14:38,073 [Thread=28] INFO - 进入getLongth 2022-09-08 14:14:38,073 [Thread=28] INFO - 目标坐标X-100Y-90 2022-09-08 14:14:38,073 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:14:38,073 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:14:38,074 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:14:38,074 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:14:38,074 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:14:38,074 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:14:38,074 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:14:38,074 [Thread=28] INFO - 双轴-目标点不在范围内 2022-09-08 14:14:38,074 [Thread=28] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:14:39,104 [Thread=27] INFO - stagein currentPos:-0.3903, currentVelocity:2, delayTime:354, point.Z:-0.5 2022-09-08 14:14:39,104 [Thread=27] INFO - stagein homez 2022-09-08 14:14:41,471 [Thread=27] INFO - stagein home ok 2022-09-08 14:14:41,474 [Thread=27] INFO - StageBack: waferSize = 5 2022-09-08 14:14:41,478 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:14:41,478 [Thread=27] INFO - stagein homez 2022-09-08 14:14:41,478 [Thread=27] INFO - stagein home ok 2022-09-08 14:14:41,478 [Thread=27] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:14:41,478 [Thread=27] INFO - Longth长度127 2022-09-08 14:14:41,479 [Thread=27] INFO - 进入getLongth 2022-09-08 14:14:41,479 [Thread=27] INFO - 目标坐标X13.39Y115.2693 2022-09-08 14:14:41,479 [Thread=27] INFO - 晶圆的大小5 2022-09-08 14:14:41,479 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 14:14:41,479 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:14:41,479 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:14:41,479 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 14:14:41,479 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 14:14:41,480 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:14:41,480 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:14:47,682 [Thread=27] INFO - 单轴触发了 2022-09-08 14:14:47,682 [Thread=27] INFO - 该轴是Z 2022-09-08 14:14:47,682 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:14:47,683 [Thread=27] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 14:14:47,683 [Thread=27] INFO - 步进失败 2022-09-08 14:14:50,369 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:14:50,370 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:14:50,370 [Thread=1] INFO - Longth长度127 2022-09-08 14:14:50,370 [Thread=1] INFO - 进入getLongth 2022-09-08 14:14:50,370 [Thread=1] INFO - 目标坐标X-17.682Y22.5693 2022-09-08 14:14:50,370 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:14:50,370 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:14:50,370 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:14:50,370 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:14:50,370 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:14:50,371 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:14:50,371 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:14:50,371 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:14:56,096 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:14:56,211 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:14:57,624 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:14:57,624 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:14:59,857 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:14:59,857 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:14:59,857 [Thread=1] INFO - Longth长度127 2022-09-08 14:14:59,857 [Thread=1] INFO - 进入getLongth 2022-09-08 14:14:59,857 [Thread=1] INFO - 目标坐标X-18.160334Y22.371326 2022-09-08 14:14:59,857 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:14:59,857 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:14:59,858 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:14:59,858 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:14:59,858 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:14:59,858 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:14:59,858 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:14:59,858 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:15:02,680 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:15:02,682 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:15:02,695 [Thread=27] INFO - 单轴触发了 2022-09-08 14:15:02,695 [Thread=27] INFO - 该轴是Z 2022-09-08 14:15:02,696 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:02,696 [Thread=27] INFO - 该轴是Z,目标位置是-7.50560000138283 2022-09-08 14:15:02,696 [Thread=27] INFO - 步进失败 2022-09-08 14:15:02,696 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:15:02,702 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:15:02,703 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:15:02,703 [Thread=27] INFO - Longth长度127 2022-09-08 14:15:02,703 [Thread=27] INFO - 进入getLongth 2022-09-08 14:15:02,703 [Thread=27] INFO - 目标坐标X-18.207334Y22.293326 2022-09-08 14:15:02,703 [Thread=27] INFO - 晶圆的大小5 2022-09-08 14:15:02,703 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 14:15:02,703 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:15:02,703 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:15:02,703 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 14:15:02,703 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 14:15:02,704 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:15:02,704 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:15:04,689 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:15:06,418 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:15:06,419 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:15:06,419 [Thread=1] INFO - Longth长度127 2022-09-08 14:15:06,419 [Thread=1] INFO - 进入getLongth 2022-09-08 14:15:06,419 [Thread=1] INFO - 目标坐标X-18.203612Y22.253814 2022-09-08 14:15:06,419 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:15:06,419 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:15:06,419 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:15:06,420 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:15:06,420 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:15:06,420 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:15:06,420 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:15:06,420 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:15:08,233 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:15:08,235 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:15:08,247 [Thread=13] INFO - 单轴触发了 2022-09-08 14:15:08,247 [Thread=13] INFO - 该轴是Z 2022-09-08 14:15:08,248 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:08,248 [Thread=13] INFO - 该轴是Z,目标位置是-7.5002999976635 2022-09-08 14:15:08,248 [Thread=13] INFO - 步进失败 2022-09-08 14:15:08,249 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:15:08,254 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:15:08,254 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:15:08,254 [Thread=13] INFO - Longth长度127 2022-09-08 14:15:08,255 [Thread=13] INFO - 进入getLongth 2022-09-08 14:15:08,255 [Thread=13] INFO - 目标坐标X-18.213612Y22.250814 2022-09-08 14:15:08,255 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:15:08,255 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:15:08,255 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:15:08,255 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:15:08,255 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:15:08,255 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:15:08,256 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:15:08,256 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 14:15:10,245 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:15:12,505 [Thread=21] INFO - 单轴触发了 2022-09-08 14:15:12,506 [Thread=21] INFO - 该轴是Z 2022-09-08 14:15:12,506 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:12,506 [Thread=21] INFO - 该轴是Z,目标位置是-7.4985000000095 2022-09-08 14:15:12,506 [Thread=21] INFO - 步进失败 2022-09-08 14:15:12,785 [Thread=19] INFO - 单轴触发了 2022-09-08 14:15:12,785 [Thread=19] INFO - 该轴是Z 2022-09-08 14:15:12,785 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:12,785 [Thread=19] INFO - 该轴是Z,目标位置是-7.4987000000095 2022-09-08 14:15:12,785 [Thread=19] INFO - 步进失败 2022-09-08 14:15:13,256 [Thread=20] INFO - 单轴触发了 2022-09-08 14:15:13,256 [Thread=20] INFO - 该轴是Z 2022-09-08 14:15:13,256 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:13,257 [Thread=20] INFO - 该轴是Z,目标位置是-7.4989000000095 2022-09-08 14:15:13,257 [Thread=20] INFO - 步进失败 2022-09-08 14:15:13,456 [Thread=21] INFO - 单轴触发了 2022-09-08 14:15:13,457 [Thread=21] INFO - 该轴是Z 2022-09-08 14:15:13,457 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:13,457 [Thread=21] INFO - 该轴是Z,目标位置是-7.4989000000095 2022-09-08 14:15:13,457 [Thread=21] INFO - 步进失败 2022-09-08 14:15:17,197 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:15:17,250 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.4579012607836 2022-09-08 14:15:17,250 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.0837524079149 2022-09-08 14:15:17,250 [Thread=11] INFO - Measure angle is -90.270827 2022-09-08 14:15:17,259 [Thread=11] INFO - Measure StartPoint:1057.48620605469,286.477569580078, EndPoint:1051.42687988281,1568.37048339844, PixelDistance:1281.907235 2022-09-08 14:15:17,259 [Thread=11] INFO - DerivativeMeasure timespan = 8.7471 2022-09-08 14:15:18,591 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:15:18,657 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.1847708229875 2022-09-08 14:15:18,657 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.0444769947912 2022-09-08 14:15:18,658 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.3184914075573 2022-09-08 14:15:18,658 [Thread=11] INFO - Measure angle is -90.18258 2022-09-08 14:15:18,683 [Thread=11] INFO - Measure StartPoint:1107.25695800781,286.750762939453, EndPoint:1103.17163085938,1568.74584960938, PixelDistance:1282.001596 2022-09-08 14:15:18,683 [Thread=11] INFO - DerivativeMeasure timespan = 25.2543 2022-09-08 14:15:20,365 [Thread=3] INFO - SwitchIndex index:0 2022-09-08 14:15:20,368 [Thread=3] INFO - Switch Lens:Broadcast Event 2022-09-08 14:15:20,381 [Thread=15] INFO - 单轴触发了 2022-09-08 14:15:20,381 [Thread=15] INFO - 该轴是Z 2022-09-08 14:15:20,381 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:15:20,381 [Thread=15] INFO - 该轴是Z,目标位置是-7.44810000095367 2022-09-08 14:15:20,382 [Thread=15] INFO - 步进失败 2022-09-08 14:15:20,382 [Thread=15] INFO - SwitchOffsetZ:0.051 2022-09-08 14:15:20,389 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:15:20,389 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:15:20,389 [Thread=15] INFO - Longth长度127 2022-09-08 14:15:20,389 [Thread=15] INFO - 进入getLongth 2022-09-08 14:15:20,389 [Thread=15] INFO - 目标坐标X-18.156612Y22.331814 2022-09-08 14:15:20,389 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:15:20,389 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:15:20,389 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:15:20,389 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:15:20,390 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:15:20,390 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:15:20,390 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:15:20,390 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:15:21,404 [Thread=3] INFO - stageout currentPos:-7.4483, currentVelocity:2, delayTime:3774, point.Z:-0.5 2022-09-08 14:15:21,404 [Thread=3] INFO - stage out homez 2022-09-08 14:15:27,205 [Thread=3] INFO - stage out home ok 2022-09-08 14:15:27,208 [Thread=3] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:15:27,208 [Thread=3] INFO - stagein homez 2022-09-08 14:15:27,208 [Thread=3] INFO - stagein home ok 2022-09-08 14:15:27,208 [Thread=3] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:15:27,209 [Thread=3] INFO - Longth长度127 2022-09-08 14:15:27,209 [Thread=3] INFO - 进入getLongth 2022-09-08 14:15:27,209 [Thread=3] INFO - 目标坐标X-100Y-90 2022-09-08 14:15:27,209 [Thread=3] INFO - 晶圆的大小5 2022-09-08 14:15:27,209 [Thread=3] INFO - 晶圆的宽高127 2022-09-08 14:15:27,209 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:15:27,209 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:15:27,209 [Thread=3] INFO - X-安全坐标18.39 2022-09-08 14:15:27,209 [Thread=3] INFO - Y上安全坐标-16.7307 2022-09-08 14:15:27,209 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:15:27,210 [Thread=3] INFO - 双轴-目标点不在范围内 2022-09-08 14:15:27,210 [Thread=3] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:16:15,196 [Thread=28] INFO - SwitchIndex index:0 2022-09-08 14:16:15,199 [Thread=28] INFO - Switch Lens:Broadcast Event 2022-09-08 14:16:15,199 [Thread=4] INFO - 单轴触发了 2022-09-08 14:16:15,200 [Thread=4] INFO - 该轴是Z 2022-09-08 14:16:15,200 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:16:15,200 [Thread=4] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:16:15,200 [Thread=4] INFO - 步进失败 2022-09-08 14:16:15,200 [Thread=4] INFO - SwitchOffsetZ:0 2022-09-08 14:16:15,220 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:16:15,222 [Thread=4] INFO - stagein homez 2022-09-08 14:16:15,222 [Thread=4] INFO - stagein home ok 2022-09-08 14:16:15,222 [Thread=4] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:16:15,222 [Thread=4] INFO - Longth长度127 2022-09-08 14:16:15,222 [Thread=4] INFO - 进入getLongth 2022-09-08 14:16:15,222 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 14:16:15,222 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:16:15,223 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:16:15,223 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:15,223 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:16:15,223 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:16:15,223 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:15,223 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:16:15,223 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 14:16:15,223 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:16:16,229 [Thread=28] INFO - stagein currentPos:-0.3657, currentVelocity:2, delayTime:367, point.Z:-0.5 2022-09-08 14:16:16,229 [Thread=28] INFO - stagein homez 2022-09-08 14:16:18,617 [Thread=28] INFO - stagein home ok 2022-09-08 14:16:18,620 [Thread=28] INFO - StageBack: waferSize = 5 2022-09-08 14:16:18,624 [Thread=28] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:16:18,624 [Thread=28] INFO - stagein homez 2022-09-08 14:16:18,624 [Thread=28] INFO - stagein home ok 2022-09-08 14:16:18,625 [Thread=28] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:16:18,625 [Thread=28] INFO - Longth长度127 2022-09-08 14:16:18,625 [Thread=28] INFO - 进入getLongth 2022-09-08 14:16:18,625 [Thread=28] INFO - 目标坐标X13.39Y115.2693 2022-09-08 14:16:18,625 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:16:18,625 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:16:18,625 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:18,625 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:16:18,625 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:16:18,626 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:18,626 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:16:18,626 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:16:26,826 [Thread=28] INFO - 单轴触发了 2022-09-08 14:16:26,826 [Thread=28] INFO - 该轴是Z 2022-09-08 14:16:26,826 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:16:26,827 [Thread=28] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 14:16:26,827 [Thread=28] INFO - 步进失败 2022-09-08 14:16:35,307 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:16:35,307 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:16:35,307 [Thread=1] INFO - Longth长度127 2022-09-08 14:16:35,307 [Thread=1] INFO - 进入getLongth 2022-09-08 14:16:35,307 [Thread=1] INFO - 目标坐标X-24.36Y39.2503 2022-09-08 14:16:35,307 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:16:35,307 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:16:35,307 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:35,307 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:16:35,307 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:16:35,308 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:35,308 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:16:35,308 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:16:40,074 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:16:40,187 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:16:41,138 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:16:41,139 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:16:44,528 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:16:44,528 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:16:44,528 [Thread=1] INFO - Longth长度127 2022-09-08 14:16:44,528 [Thread=1] INFO - 进入getLongth 2022-09-08 14:16:44,528 [Thread=1] INFO - 目标坐标X-24.655731Y39.350516 2022-09-08 14:16:44,528 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:16:44,528 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:16:44,529 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:44,529 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:16:44,529 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:16:44,529 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:44,529 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:16:44,529 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:16:47,663 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:16:47,665 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:16:47,677 [Thread=13] INFO - 单轴触发了 2022-09-08 14:16:47,678 [Thread=13] INFO - 该轴是Z 2022-09-08 14:16:47,678 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 14:16:47,679 [Thread=13] INFO - 该轴是Z,目标位置是-7.59510000138283 2022-09-08 14:16:47,679 [Thread=13] INFO - 步进失败 2022-09-08 14:16:47,679 [Thread=13] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:16:47,683 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:16:47,683 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:16:47,683 [Thread=13] INFO - Longth长度127 2022-09-08 14:16:47,684 [Thread=13] INFO - 进入getLongth 2022-09-08 14:16:47,684 [Thread=13] INFO - 目标坐标X-24.702731Y39.272516 2022-09-08 14:16:47,684 [Thread=13] INFO - 晶圆的大小5 2022-09-08 14:16:47,684 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 14:16:47,685 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:47,685 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 14:16:47,685 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 14:16:47,686 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:47,686 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 14:16:47,686 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 14:16:49,676 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:16:50,925 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:16:50,926 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:16:50,926 [Thread=1] INFO - Longth长度127 2022-09-08 14:16:50,926 [Thread=1] INFO - 进入getLongth 2022-09-08 14:16:50,926 [Thread=1] INFO - 目标坐标X-24.707569Y39.22829 2022-09-08 14:16:50,926 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:16:50,926 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:16:50,926 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:50,926 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:16:50,927 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:16:50,927 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:50,927 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:16:50,927 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:16:56,244 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:16:56,246 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:16:56,257 [Thread=27] INFO - 单轴触发了 2022-09-08 14:16:56,257 [Thread=27] INFO - 该轴是Z 2022-09-08 14:16:56,258 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:16:56,258 [Thread=27] INFO - 该轴是Z,目标位置是-7.5866999976635 2022-09-08 14:16:56,258 [Thread=27] INFO - 步进失败 2022-09-08 14:16:56,258 [Thread=27] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:16:56,262 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:16:56,263 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:16:56,263 [Thread=27] INFO - Longth长度127 2022-09-08 14:16:56,263 [Thread=27] INFO - 进入getLongth 2022-09-08 14:16:56,263 [Thread=27] INFO - 目标坐标X-24.717569Y39.22529 2022-09-08 14:16:56,263 [Thread=27] INFO - 晶圆的大小5 2022-09-08 14:16:56,263 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 14:16:56,263 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:16:56,263 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:16:56,263 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 14:16:56,264 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 14:16:56,264 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:16:56,264 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:16:58,253 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:17:00,576 [Thread=19] INFO - 单轴触发了 2022-09-08 14:17:00,576 [Thread=19] INFO - 该轴是Z 2022-09-08 14:17:00,576 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:00,577 [Thread=19] INFO - 该轴是Z,目标位置是-7.5852000000095 2022-09-08 14:17:00,577 [Thread=19] INFO - 步进失败 2022-09-08 14:17:00,856 [Thread=20] INFO - 单轴触发了 2022-09-08 14:17:00,856 [Thread=20] INFO - 该轴是Z 2022-09-08 14:17:00,856 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:00,857 [Thread=20] INFO - 该轴是Z,目标位置是-7.5852000000095 2022-09-08 14:17:00,857 [Thread=20] INFO - 步进失败 2022-09-08 14:17:01,082 [Thread=21] INFO - 单轴触发了 2022-09-08 14:17:01,082 [Thread=21] INFO - 该轴是Z 2022-09-08 14:17:01,082 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:01,083 [Thread=21] INFO - 该轴是Z,目标位置是-7.5854000000095 2022-09-08 14:17:01,083 [Thread=21] INFO - 步进失败 2022-09-08 14:17:01,293 [Thread=19] INFO - 单轴触发了 2022-09-08 14:17:01,293 [Thread=19] INFO - 该轴是Z 2022-09-08 14:17:01,294 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:01,294 [Thread=19] INFO - 该轴是Z,目标位置是-7.5854000000095 2022-09-08 14:17:01,294 [Thread=19] INFO - 步进失败 2022-09-08 14:17:01,805 [Thread=20] INFO - 单轴触发了 2022-09-08 14:17:01,806 [Thread=20] INFO - 该轴是Z 2022-09-08 14:17:01,806 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:01,806 [Thread=20] INFO - 该轴是Z,目标位置是-7.5860000000095 2022-09-08 14:17:01,806 [Thread=20] INFO - 步进失败 2022-09-08 14:17:02,693 [Thread=21] INFO - 单轴触发了 2022-09-08 14:17:02,693 [Thread=21] INFO - 该轴是Z 2022-09-08 14:17:02,693 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:02,694 [Thread=21] INFO - 该轴是Z,目标位置是-7.5862000000095 2022-09-08 14:17:02,694 [Thread=21] INFO - 步进失败 2022-09-08 14:17:05,166 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:17:05,221 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.1004594699211 2022-09-08 14:17:05,221 [Thread=11] INFO - Measure angle is -90.100459 2022-09-08 14:17:05,230 [Thread=11] INFO - Measure StartPoint:1010.97705078125,572.765319824219, EndPoint:1009.28668212891,1536.8154296875, PixelDistance:964.051592 2022-09-08 14:17:05,231 [Thread=11] INFO - DerivativeMeasure timespan = 9.4765 2022-09-08 14:17:06,437 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:17:06,491 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.1530374097677 2022-09-08 14:17:06,492 [Thread=11] INFO - Measure angle is -90.153037 2022-09-08 14:17:06,510 [Thread=11] INFO - Measure StartPoint:1032.61926269531,572.774047851563, EndPoint:1030.0439453125,1536.923828125, PixelDistance:964.15322 2022-09-08 14:17:06,511 [Thread=11] INFO - DerivativeMeasure timespan = 18.4552 2022-09-08 14:17:07,871 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:17:07,934 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.1615851817173 2022-09-08 14:17:07,934 [Thread=11] INFO - Measure angle is -90.161585 2022-09-08 14:17:07,950 [Thread=11] INFO - Measure StartPoint:1072.75158691406,572.90283203125, EndPoint:1070.03259277344,1537.04895019531, PixelDistance:964.149952 2022-09-08 14:17:07,950 [Thread=11] INFO - DerivativeMeasure timespan = 15.3508 2022-09-08 14:17:09,540 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 14:17:09,544 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 14:17:09,560 [Thread=28] INFO - 单轴触发了 2022-09-08 14:17:09,560 [Thread=28] INFO - 该轴是Z 2022-09-08 14:17:09,560 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:17:09,560 [Thread=28] INFO - 该轴是Z,目标位置是-7.53520000095367 2022-09-08 14:17:09,560 [Thread=28] INFO - 步进失败 2022-09-08 14:17:09,561 [Thread=28] INFO - SwitchOffsetZ:0.051 2022-09-08 14:17:09,565 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:17:09,566 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:17:09,566 [Thread=28] INFO - Longth长度127 2022-09-08 14:17:09,566 [Thread=28] INFO - 进入getLongth 2022-09-08 14:17:09,566 [Thread=28] INFO - 目标坐标X-24.660569Y39.30629 2022-09-08 14:17:09,566 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:17:09,566 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:17:09,566 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:17:09,566 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:17:09,566 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:17:09,566 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:17:09,567 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:17:09,567 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:17:10,573 [Thread=27] INFO - stageout currentPos:-7.5354, currentVelocity:2, delayTime:3817, point.Z:-0.5 2022-09-08 14:17:10,574 [Thread=27] INFO - stage out homez 2022-09-08 14:17:16,408 [Thread=27] INFO - stage out home ok 2022-09-08 14:17:16,411 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:17:16,412 [Thread=27] INFO - stagein homez 2022-09-08 14:17:16,412 [Thread=27] INFO - stagein home ok 2022-09-08 14:17:16,412 [Thread=27] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:17:16,412 [Thread=27] INFO - Longth长度127 2022-09-08 14:17:16,413 [Thread=27] INFO - 进入getLongth 2022-09-08 14:17:16,413 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 14:17:16,413 [Thread=27] INFO - 晶圆的大小5 2022-09-08 14:17:16,413 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 14:17:16,413 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:17:16,413 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:17:16,413 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 14:17:16,413 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 14:17:16,413 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:17:16,413 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 14:17:16,414 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:18:39,676 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 14:18:39,680 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 14:18:39,680 [Thread=3] INFO - 单轴触发了 2022-09-08 14:18:39,681 [Thread=3] INFO - 该轴是Z 2022-09-08 14:18:39,681 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:18:39,682 [Thread=3] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:18:39,682 [Thread=3] INFO - 步进失败 2022-09-08 14:18:39,682 [Thread=3] INFO - SwitchOffsetZ:0 2022-09-08 14:18:39,690 [Thread=3] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:18:39,690 [Thread=3] INFO - stagein homez 2022-09-08 14:18:39,691 [Thread=3] INFO - stagein home ok 2022-09-08 14:18:39,691 [Thread=3] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:18:39,691 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:18:39,691 [Thread=3] INFO - 进入getLongth 2022-09-08 14:18:39,691 [Thread=3] INFO - 目标坐标X-100Y-90 2022-09-08 14:18:39,691 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:18:39,691 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:18:39,691 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:18:39,691 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:18:39,692 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:18:39,692 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:18:39,692 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:18:39,692 [Thread=3] INFO - 双轴-目标点不在范围内 2022-09-08 14:18:39,692 [Thread=3] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:18:40,698 [Thread=4] INFO - stagein currentPos:-0.4998, currentVelocity:2, delayTime:300, point.Z:-0.5 2022-09-08 14:18:40,698 [Thread=4] INFO - stagein homez 2022-09-08 14:18:43,011 [Thread=4] INFO - stagein home ok 2022-09-08 14:18:43,016 [Thread=4] INFO - StageBack: waferSize = 6 2022-09-08 14:18:43,019 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:18:43,020 [Thread=4] INFO - stagein homez 2022-09-08 14:18:43,020 [Thread=4] INFO - stagein home ok 2022-09-08 14:18:43,020 [Thread=4] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:18:43,020 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:18:43,020 [Thread=4] INFO - 进入getLongth 2022-09-08 14:18:43,021 [Thread=4] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:18:43,021 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:18:43,021 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:18:43,021 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:18:43,021 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:18:43,021 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:18:43,021 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:18:43,021 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:18:43,022 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:18:51,587 [Thread=4] INFO - 单轴触发了 2022-09-08 14:18:51,587 [Thread=4] INFO - 该轴是Z 2022-09-08 14:18:51,587 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:18:51,587 [Thread=4] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:18:51,587 [Thread=4] INFO - 步进失败 2022-09-08 14:19:00,232 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:00,232 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:00,232 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:19:00,232 [Thread=1] INFO - 进入getLongth 2022-09-08 14:19:00,232 [Thread=1] INFO - 目标坐标X-36.41Y42.1123 2022-09-08 14:19:00,232 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:19:00,233 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:19:00,233 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:00,233 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:19:00,233 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:19:00,233 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:00,233 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:19:00,233 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:19:06,070 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:19:06,171 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:19:16,569 [Thread=19] INFO - 单轴触发了 2022-09-08 14:19:16,574 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:16,574 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:16,574 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:19:16,575 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:16,575 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:19:16,575 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:19:16,575 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:19:17,107 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:19:17,107 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:19:17,108 [Thread=19] INFO - 该轴是X,目标位置是-37.41 2022-09-08 14:19:17,108 [Thread=19] INFO - 步进失败 2022-09-08 14:19:18,583 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:19:18,583 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:19:20,524 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:20,525 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:20,525 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:19:20,525 [Thread=1] INFO - 进入getLongth 2022-09-08 14:19:20,525 [Thread=1] INFO - 目标坐标X-37.77705Y42.307814 2022-09-08 14:19:20,525 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:19:20,525 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:19:20,525 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:20,525 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:19:20,525 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:19:20,526 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:20,526 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:19:20,526 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:19:23,748 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:19:23,751 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:19:23,763 [Thread=15] INFO - 单轴触发了 2022-09-08 14:19:23,763 [Thread=15] INFO - 该轴是Z 2022-09-08 14:19:23,763 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:23,764 [Thread=15] INFO - 该轴是Z,目标位置是-2.48220000138283 2022-09-08 14:19:23,764 [Thread=15] INFO - 步进失败 2022-09-08 14:19:23,764 [Thread=15] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:19:23,768 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:23,768 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:23,768 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:19:23,768 [Thread=15] INFO - 进入getLongth 2022-09-08 14:19:23,768 [Thread=15] INFO - 目标坐标X-37.82405Y42.229814 2022-09-08 14:19:23,769 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:19:23,769 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:19:23,769 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:23,769 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:19:23,769 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:19:23,769 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:23,769 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:19:23,769 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:19:25,757 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:19:26,872 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:26,872 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:26,872 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:19:26,872 [Thread=1] INFO - 进入getLongth 2022-09-08 14:19:26,872 [Thread=1] INFO - 目标坐标X-37.839185Y42.203452 2022-09-08 14:19:26,873 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:19:26,873 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:19:26,873 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:26,873 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:19:26,873 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:19:26,873 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:26,873 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:19:26,873 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:19:31,303 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:19:31,306 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:19:31,317 [Thread=28] INFO - 单轴触发了 2022-09-08 14:19:31,317 [Thread=28] INFO - 该轴是Z 2022-09-08 14:19:31,317 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:31,317 [Thread=28] INFO - 该轴是Z,目标位置是-2.4679999976635 2022-09-08 14:19:31,317 [Thread=28] INFO - 步进失败 2022-09-08 14:19:31,318 [Thread=28] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:19:31,322 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:31,322 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:31,323 [Thread=28] INFO - Longth长度152.4 2022-09-08 14:19:31,323 [Thread=28] INFO - 进入getLongth 2022-09-08 14:19:31,323 [Thread=28] INFO - 目标坐标X-37.849185Y42.200452 2022-09-08 14:19:31,323 [Thread=28] INFO - 晶圆的大小6 2022-09-08 14:19:31,323 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 14:19:31,323 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:31,323 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:19:31,323 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 14:19:31,323 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:31,323 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:19:31,323 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:19:33,315 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:19:35,893 [Thread=20] INFO - 单轴触发了 2022-09-08 14:19:35,893 [Thread=20] INFO - 该轴是Z 2022-09-08 14:19:35,893 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:35,894 [Thread=20] INFO - 该轴是Z,目标位置是-2.4667000000095 2022-09-08 14:19:35,894 [Thread=20] INFO - 步进失败 2022-09-08 14:19:36,388 [Thread=21] INFO - 单轴触发了 2022-09-08 14:19:36,388 [Thread=21] INFO - 该轴是Z 2022-09-08 14:19:36,388 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:36,388 [Thread=21] INFO - 该轴是Z,目标位置是-2.4669000000095 2022-09-08 14:19:36,389 [Thread=21] INFO - 步进失败 2022-09-08 14:19:36,629 [Thread=19] INFO - 单轴触发了 2022-09-08 14:19:36,629 [Thread=19] INFO - 该轴是Z 2022-09-08 14:19:36,629 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:36,630 [Thread=19] INFO - 该轴是Z,目标位置是-2.4669000000095 2022-09-08 14:19:36,630 [Thread=19] INFO - 步进失败 2022-09-08 14:19:39,304 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:19:39,358 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.223898207718125 2022-09-08 14:19:39,358 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.237486601501971 2022-09-08 14:19:39,358 [Thread=5] INFO - Measure angle is -0.230692 2022-09-08 14:19:39,372 [Thread=5] INFO - Measure StartPoint:782.139282226563,1033.82482910156, EndPoint:1299.33850097656,1035.90734863281, PixelDistance:517.203411 2022-09-08 14:19:39,372 [Thread=5] INFO - DerivativeMeasure timespan = 13.9194 2022-09-08 14:19:40,319 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:19:40,374 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.199536278062897 2022-09-08 14:19:40,374 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.24721249264934 2022-09-08 14:19:40,374 [Thread=5] INFO - Measure angle is -0.223374 2022-09-08 14:19:40,392 [Thread=5] INFO - Measure StartPoint:782.061889648438,1058.80725097656, EndPoint:1299.26635742188,1060.82360839844, PixelDistance:517.208398 2022-09-08 14:19:40,392 [Thread=5] INFO - DerivativeMeasure timespan = 18.1084 2022-09-08 14:19:41,963 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 14:19:41,967 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 14:19:41,979 [Thread=27] INFO - 单轴触发了 2022-09-08 14:19:41,979 [Thread=27] INFO - 该轴是Z 2022-09-08 14:19:41,979 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:19:41,979 [Thread=27] INFO - 该轴是Z,目标位置是-2.41610000095367 2022-09-08 14:19:41,979 [Thread=27] INFO - 步进失败 2022-09-08 14:19:41,980 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 14:19:41,984 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:19:41,984 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:19:41,984 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:19:41,984 [Thread=27] INFO - 进入getLongth 2022-09-08 14:19:41,984 [Thread=27] INFO - 目标坐标X-37.792185Y42.281452 2022-09-08 14:19:41,984 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:19:41,984 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:19:41,984 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:41,985 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:19:41,985 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:19:41,985 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:41,985 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:19:41,985 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:19:43,001 [Thread=4] INFO - stageout currentPos:-2.4163, currentVelocity:2, delayTime:1258, point.Z:-0.5 2022-09-08 14:19:43,002 [Thread=4] INFO - stage out homez 2022-09-08 14:19:46,278 [Thread=4] INFO - stage out home ok 2022-09-08 14:19:46,281 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:19:46,282 [Thread=4] INFO - stagein homez 2022-09-08 14:19:46,282 [Thread=4] INFO - stagein home ok 2022-09-08 14:19:46,282 [Thread=4] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:19:46,282 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:19:46,282 [Thread=4] INFO - 进入getLongth 2022-09-08 14:19:46,282 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 14:19:46,282 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:19:46,283 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:19:46,283 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:19:46,283 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:19:46,283 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:19:46,283 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:19:46,283 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:19:46,283 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 14:19:46,283 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:20:42,313 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 14:20:42,316 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 14:20:42,316 [Thread=15] INFO - 单轴触发了 2022-09-08 14:20:42,316 [Thread=15] INFO - 该轴是Z 2022-09-08 14:20:42,316 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:20:42,319 [Thread=15] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:20:42,319 [Thread=15] INFO - 步进失败 2022-09-08 14:20:42,319 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 14:20:42,331 [Thread=15] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:20:42,331 [Thread=15] INFO - stagein homez 2022-09-08 14:20:42,332 [Thread=15] INFO - stagein home ok 2022-09-08 14:20:42,332 [Thread=15] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:20:42,332 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:20:42,332 [Thread=15] INFO - 进入getLongth 2022-09-08 14:20:42,332 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 14:20:42,332 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:20:42,332 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:20:42,332 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:20:42,332 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:20:42,332 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:20:42,333 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:20:42,333 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:20:42,333 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 14:20:42,333 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:20:43,330 [Thread=27] INFO - stagein currentPos:-0.3313, currentVelocity:2, delayTime:384, point.Z:-0.5 2022-09-08 14:20:43,330 [Thread=27] INFO - stagein homez 2022-09-08 14:20:45,736 [Thread=27] INFO - stagein home ok 2022-09-08 14:20:45,738 [Thread=27] INFO - StageBack: waferSize = 6 2022-09-08 14:20:45,742 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:20:45,742 [Thread=27] INFO - stagein homez 2022-09-08 14:20:45,742 [Thread=27] INFO - stagein home ok 2022-09-08 14:20:45,742 [Thread=27] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:20:45,742 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:20:45,742 [Thread=27] INFO - 进入getLongth 2022-09-08 14:20:45,743 [Thread=27] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:20:45,743 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:20:45,743 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:20:45,743 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:20:45,743 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:20:45,743 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:20:45,743 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:20:45,743 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:20:45,743 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:20:55,317 [Thread=27] INFO - 单轴触发了 2022-09-08 14:20:55,318 [Thread=27] INFO - 该轴是Z 2022-09-08 14:20:55,318 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:20:55,318 [Thread=27] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:20:55,318 [Thread=27] INFO - 步进失败 2022-09-08 14:21:10,178 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:10,178 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:10,179 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:21:10,179 [Thread=1] INFO - 进入getLongth 2022-09-08 14:21:10,179 [Thread=1] INFO - 目标坐标X5.76999999999997Y71.9173 2022-09-08 14:21:10,179 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:21:10,179 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:21:10,179 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:21:10,179 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:21:10,179 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:21:10,179 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:21:10,179 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:21:10,179 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:21:16,734 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:21:16,850 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:21:30,395 [Thread=3] INFO - SwitchIndex index:0 2022-09-08 14:21:30,399 [Thread=3] INFO - Switch Lens:Broadcast Event 2022-09-08 14:21:30,399 [Thread=28] INFO - 单轴触发了 2022-09-08 14:21:30,399 [Thread=28] INFO - 该轴是Z 2022-09-08 14:21:30,400 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:21:30,400 [Thread=28] INFO - 该轴是Z,目标位置是-2.5058 2022-09-08 14:21:30,400 [Thread=28] INFO - 步进失败 2022-09-08 14:21:30,401 [Thread=28] INFO - SwitchOffsetZ:0 2022-09-08 14:21:30,410 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:30,410 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:30,411 [Thread=28] INFO - Longth长度152.4 2022-09-08 14:21:30,411 [Thread=28] INFO - 进入getLongth 2022-09-08 14:21:30,411 [Thread=28] INFO - 目标坐标X5.77Y71.9173 2022-09-08 14:21:30,411 [Thread=28] INFO - 晶圆的大小6 2022-09-08 14:21:30,411 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 14:21:30,411 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:21:30,411 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:21:30,411 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 14:21:30,411 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 14:21:30,411 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:21:30,411 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:21:31,890 [Thread=3] INFO - stagein currentPos:-2.5058, currentVelocity:2, delayTime:1302, point.Z:-0.5 2022-09-08 14:21:31,890 [Thread=3] INFO - stagein homez 2022-09-08 14:21:35,217 [Thread=3] INFO - stagein home ok 2022-09-08 14:21:35,219 [Thread=3] INFO - StageBack: waferSize = 6 2022-09-08 14:21:35,222 [Thread=3] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:35,223 [Thread=3] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:35,223 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:21:35,223 [Thread=3] INFO - 进入getLongth 2022-09-08 14:21:35,223 [Thread=3] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:21:35,223 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:21:35,223 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:21:35,223 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:21:35,223 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:21:35,223 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:21:35,223 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:21:35,224 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:21:35,224 [Thread=3] INFO - 双轴-目标点在范围内 2022-09-08 14:21:38,923 [Thread=3] INFO - 单轴触发了 2022-09-08 14:21:38,923 [Thread=3] INFO - 该轴是Z 2022-09-08 14:21:38,923 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:21:38,924 [Thread=3] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:21:38,924 [Thread=3] INFO - 步进失败 2022-09-08 14:21:45,874 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:45,874 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:45,874 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:21:45,874 [Thread=1] INFO - 进入getLongth 2022-09-08 14:21:45,874 [Thread=1] INFO - 目标坐标X5.76999999999997Y71.9173 2022-09-08 14:21:45,874 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:21:45,874 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:21:45,874 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:21:45,874 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:21:45,875 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:21:45,875 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:21:45,875 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:21:45,875 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:21:50,548 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:21:50,653 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:21:57,946 [Thread=20] INFO - 单轴触发了 2022-09-08 14:21:57,949 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:57,949 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:57,949 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:21:57,950 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:21:57,950 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:21:57,950 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:21:57,950 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:21:58,393 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:21:58,394 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:21:58,394 [Thread=20] INFO - 该轴是X,目标位置是5.56999999999997 2022-09-08 14:21:58,394 [Thread=20] INFO - 步进失败 2022-09-08 14:21:59,004 [Thread=21] INFO - 单轴触发了 2022-09-08 14:21:59,008 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:59,009 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:59,009 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:21:59,009 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:21:59,009 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:21:59,009 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:21:59,009 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:21:59,137 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:21:59,137 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:21:59,138 [Thread=21] INFO - 该轴是X,目标位置是5.36999999999997 2022-09-08 14:21:59,138 [Thread=21] INFO - 步进失败 2022-09-08 14:21:59,730 [Thread=19] INFO - 单轴触发了 2022-09-08 14:21:59,735 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:21:59,735 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:21:59,735 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:21:59,735 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:21:59,735 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:21:59,735 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:21:59,735 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:00,199 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:00,199 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:00,199 [Thread=19] INFO - 该轴是X,目标位置是5.16999999999997 2022-09-08 14:22:00,199 [Thread=19] INFO - 步进失败 2022-09-08 14:22:00,242 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:00,247 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:00,247 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:00,247 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:00,247 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:00,247 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:00,247 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:00,247 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:00,658 [Thread=21] INFO - 单轴触发了 2022-09-08 14:22:00,662 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:00,662 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:00,662 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:22:00,662 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:00,662 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:00,662 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:00,662 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:00,782 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:00,782 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:00,782 [Thread=20] INFO - 该轴是X,目标位置是4.96999999999997 2022-09-08 14:22:00,782 [Thread=20] INFO - 步进失败 2022-09-08 14:22:00,782 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:00,782 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:00,782 [Thread=21] INFO - 该轴是X,目标位置是4.76999999999997 2022-09-08 14:22:00,782 [Thread=21] INFO - 步进失败 2022-09-08 14:22:00,940 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:00,943 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:00,944 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:00,944 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:00,944 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:00,944 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:00,944 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:00,944 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:01,266 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:01,269 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:01,270 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:01,270 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:01,270 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:01,270 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:01,270 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:01,270 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:01,396 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:01,397 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:01,397 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:01,397 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:01,397 [Thread=20] INFO - 该轴是X,目标位置是4.36999999999997 2022-09-08 14:22:01,397 [Thread=20] INFO - 步进失败 2022-09-08 14:22:01,397 [Thread=19] INFO - 该轴是X,目标位置是4.56999999999997 2022-09-08 14:22:01,398 [Thread=19] INFO - 步进失败 2022-09-08 14:22:01,541 [Thread=21] INFO - 单轴触发了 2022-09-08 14:22:01,546 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:01,546 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:01,546 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:22:01,546 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:01,546 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:01,546 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:01,546 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:01,799 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:01,803 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:01,803 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:01,803 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:01,803 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:01,803 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:01,803 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:01,804 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:02,148 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:02,153 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:02,153 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:02,153 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:02,153 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:02,153 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:02,153 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:02,153 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:02,645 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:02,645 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:02,645 [Thread=19] INFO - 该轴是X,目标位置是3.76999999999997 2022-09-08 14:22:02,645 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:02,646 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:02,646 [Thread=21] INFO - 该轴是X,目标位置是4.16999999999997 2022-09-08 14:22:02,645 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:02,646 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:02,646 [Thread=20] INFO - 该轴是X,目标位置是3.96999999999997 2022-09-08 14:22:02,646 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:02,650 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:02,651 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:02,651 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:02,651 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:02,651 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:02,651 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:02,651 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:02,771 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:02,771 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:02,771 [Thread=19] INFO - 该轴是X,目标位置是3.56999999999997 2022-09-08 14:22:02,771 [Thread=19] INFO - 步进失败 2022-09-08 14:22:04,738 [Thread=21] INFO - 单轴触发了 2022-09-08 14:22:04,742 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:04,743 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:04,743 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:22:04,743 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:04,743 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:04,743 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:04,743 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:05,019 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:05,021 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:05,022 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:05,022 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:05,022 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:05,022 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:05,022 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:05,022 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:05,266 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:05,270 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:05,270 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:05,271 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:05,271 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:05,271 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:05,271 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:05,271 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:05,509 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:05,509 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:05,509 [Thread=21] INFO - 该轴是Y,目标位置是72.1173 2022-09-08 14:22:05,510 [Thread=21] INFO - 步进失败 2022-09-08 14:22:05,509 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:05,509 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:05,510 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:05,510 [Thread=20] INFO - 该轴是Y,目标位置是72.3173 2022-09-08 14:22:05,510 [Thread=20] INFO - 步进失败 2022-09-08 14:22:05,510 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:05,511 [Thread=19] INFO - 该轴是Y,目标位置是72.5173 2022-09-08 14:22:05,511 [Thread=19] INFO - 步进失败 2022-09-08 14:22:05,546 [Thread=21] INFO - 单轴触发了 2022-09-08 14:22:05,551 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:05,551 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:05,551 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:22:05,551 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:05,551 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:05,551 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:05,551 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:05,832 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:05,835 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:05,835 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:05,835 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:05,835 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:05,835 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:05,835 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:05,835 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:06,165 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:06,168 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:06,168 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:06,168 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:06,168 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:06,168 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:06,168 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:06,168 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:06,456 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:06,456 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:06,456 [Thread=19] INFO - 该轴是Y,目标位置是73.1173 2022-09-08 14:22:06,456 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:06,457 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:06,457 [Thread=20] INFO - 该轴是Y,目标位置是72.9173 2022-09-08 14:22:06,457 [Thread=20] INFO - 步进失败 2022-09-08 14:22:06,456 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:06,457 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:06,457 [Thread=21] INFO - 该轴是Y,目标位置是72.7173 2022-09-08 14:22:06,457 [Thread=21] INFO - 步进失败 2022-09-08 14:22:06,457 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:06,456 [Thread=19] INFO - 步进失败 2022-09-08 14:22:06,462 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:06,462 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:06,462 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:06,462 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:06,462 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:06,462 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:06,462 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:06,737 [Thread=21] INFO - 单轴触发了 2022-09-08 14:22:06,741 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:06,741 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:06,741 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:22:06,742 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:06,742 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:06,742 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:06,743 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:06,743 [Thread=20] INFO - 该轴是Y,目标位置是73.3173 2022-09-08 14:22:06,743 [Thread=20] INFO - 步进失败 2022-09-08 14:22:06,742 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:06,743 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:07,025 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:07,028 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:07,028 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:07,029 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:07,029 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:07,029 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:07,029 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:07,029 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:07,314 [Thread=20] INFO - 单轴触发了 2022-09-08 14:22:07,317 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:07,317 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:07,318 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:22:07,318 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:07,318 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:07,318 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:07,318 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:07,679 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:07,679 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:07,679 [Thread=19] INFO - 该轴是Y,目标位置是73.7173 2022-09-08 14:22:07,679 [Thread=19] INFO - 步进失败 2022-09-08 14:22:07,680 [Thread=19] INFO - 单轴触发了 2022-09-08 14:22:07,679 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:07,680 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:07,680 [Thread=21] INFO - 该轴是Y,目标位置是73.5173 2022-09-08 14:22:07,680 [Thread=21] INFO - 步进失败 2022-09-08 14:22:07,679 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:07,681 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:07,681 [Thread=20] INFO - 该轴是Y,目标位置是73.9173 2022-09-08 14:22:07,681 [Thread=20] INFO - 步进失败 2022-09-08 14:22:07,683 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:07,683 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:07,684 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:22:07,684 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:07,684 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:07,684 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:07,684 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:07,932 [Thread=21] INFO - 单轴触发了 2022-09-08 14:22:07,935 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:07,935 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:07,935 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:22:07,935 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:07,935 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:22:07,935 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:22:07,935 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:22:08,356 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:08,356 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:08,356 [Thread=19] INFO - 该轴是Y,目标位置是74.1173 2022-09-08 14:22:08,357 [Thread=19] INFO - 步进失败 2022-09-08 14:22:08,356 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:22:08,357 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:22:08,357 [Thread=21] INFO - 该轴是Y,目标位置是74.3173 2022-09-08 14:22:08,357 [Thread=21] INFO - 步进失败 2022-09-08 14:22:11,645 [Thread=3] INFO - SwitchIndex index:0 2022-09-08 14:22:12,141 [Thread=3] INFO - Switch Lens:Broadcast Event 2022-09-08 14:22:12,141 [Thread=15] INFO - 单轴触发了 2022-09-08 14:22:12,142 [Thread=15] INFO - 该轴是Z 2022-09-08 14:22:12,142 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:22:12,142 [Thread=15] INFO - 该轴是Z,目标位置是-2.511 2022-09-08 14:22:12,142 [Thread=15] INFO - 步进失败 2022-09-08 14:22:12,142 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 14:22:12,146 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:22:12,146 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:22:12,146 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:22:12,146 [Thread=15] INFO - 进入getLongth 2022-09-08 14:22:12,146 [Thread=15] INFO - 目标坐标X3.57Y74.3173 2022-09-08 14:22:12,146 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:22:12,146 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:22:12,147 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:22:12,147 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:22:12,147 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:22:12,147 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:22:12,147 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:22:12,147 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:22:13,793 [Thread=3] INFO - stageout currentPos:-2.511, currentVelocity:2, delayTime:1305, point.Z:-0.5 2022-09-08 14:22:13,793 [Thread=3] INFO - stage out homez 2022-09-08 14:22:17,113 [Thread=3] INFO - stage out home ok 2022-09-08 14:22:17,116 [Thread=3] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:22:17,117 [Thread=3] INFO - stagein homez 2022-09-08 14:22:17,117 [Thread=3] INFO - stagein home ok 2022-09-08 14:22:17,117 [Thread=3] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:22:17,117 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:22:17,117 [Thread=3] INFO - 进入getLongth 2022-09-08 14:22:17,117 [Thread=3] INFO - 目标坐标X-100Y-90 2022-09-08 14:22:17,118 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:22:17,118 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:22:17,118 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:22:17,118 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:22:17,118 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:22:17,118 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:22:17,118 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:22:17,118 [Thread=3] INFO - 双轴-目标点不在范围内 2022-09-08 14:22:17,119 [Thread=3] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:23:33,227 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 14:23:33,231 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 14:23:33,231 [Thread=15] INFO - 单轴触发了 2022-09-08 14:23:33,232 [Thread=15] INFO - 该轴是Z 2022-09-08 14:23:33,232 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:23:33,233 [Thread=15] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:23:33,233 [Thread=15] INFO - 步进失败 2022-09-08 14:23:33,233 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 14:23:33,241 [Thread=15] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:23:33,242 [Thread=15] INFO - stagein homez 2022-09-08 14:23:33,242 [Thread=15] INFO - stagein home ok 2022-09-08 14:23:33,243 [Thread=15] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:23:33,243 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:23:33,243 [Thread=15] INFO - 进入getLongth 2022-09-08 14:23:33,243 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 14:23:33,243 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:23:33,243 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:23:33,243 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:23:33,244 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:23:33,244 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:23:33,244 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:23:33,244 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:23:33,244 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 14:23:33,244 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:23:34,243 [Thread=4] INFO - stagein currentPos:-0.1397, currentVelocity:2, delayTime:480, point.Z:-0.5 2022-09-08 14:23:34,243 [Thread=4] INFO - stagein homez 2022-09-08 14:23:36,741 [Thread=4] INFO - stagein home ok 2022-09-08 14:23:36,745 [Thread=4] INFO - StageBack: waferSize = 6 2022-09-08 14:23:36,749 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:23:36,749 [Thread=4] INFO - stagein homez 2022-09-08 14:23:36,749 [Thread=4] INFO - stagein home ok 2022-09-08 14:23:36,750 [Thread=4] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:23:36,750 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:23:36,750 [Thread=4] INFO - 进入getLongth 2022-09-08 14:23:36,750 [Thread=4] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:23:36,750 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:23:36,750 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:23:36,750 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:23:36,750 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:23:36,750 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:23:36,750 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:23:36,750 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:23:36,751 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:23:43,933 [Thread=4] INFO - 单轴触发了 2022-09-08 14:23:43,933 [Thread=4] INFO - 该轴是Z 2022-09-08 14:23:43,933 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:23:43,934 [Thread=4] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:23:43,934 [Thread=4] INFO - 步进失败 2022-09-08 14:23:47,963 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:23:47,964 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:23:47,964 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:23:47,964 [Thread=1] INFO - 进入getLongth 2022-09-08 14:23:47,964 [Thread=1] INFO - 目标坐标X-6.44700000000002Y82.2153 2022-09-08 14:23:47,964 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:23:47,964 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:23:47,964 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:23:47,964 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:23:47,964 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:23:47,964 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:23:47,964 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:23:47,965 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:23:51,222 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:23:51,327 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:23:53,131 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:23:53,131 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:23:55,146 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:23:55,147 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:23:55,147 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:23:55,147 [Thread=1] INFO - 进入getLongth 2022-09-08 14:23:55,147 [Thread=1] INFO - 目标坐标X-6.435933Y82.518409 2022-09-08 14:23:55,147 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:23:55,147 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:23:55,147 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:23:55,147 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:23:55,147 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:23:55,147 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:23:55,148 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:23:55,148 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:23:57,797 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:23:57,801 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:23:57,815 [Thread=15] INFO - 单轴触发了 2022-09-08 14:23:57,815 [Thread=15] INFO - 该轴是Z 2022-09-08 14:23:57,815 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:23:57,816 [Thread=15] INFO - 该轴是Z,目标位置是-2.58400000138283 2022-09-08 14:23:57,816 [Thread=15] INFO - 步进失败 2022-09-08 14:23:57,816 [Thread=15] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:23:57,821 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:23:57,821 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:23:57,821 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:23:57,821 [Thread=15] INFO - 进入getLongth 2022-09-08 14:23:57,821 [Thread=15] INFO - 目标坐标X-6.482933Y82.440409 2022-09-08 14:23:57,821 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:23:57,822 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:23:57,822 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:23:57,822 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:23:57,822 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:23:57,822 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:23:57,822 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:23:57,822 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:23:59,806 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:24:01,395 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:24:01,395 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:24:01,395 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:24:01,395 [Thread=1] INFO - 进入getLongth 2022-09-08 14:24:01,395 [Thread=1] INFO - 目标坐标X-6.486841Y82.402944 2022-09-08 14:24:01,395 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:24:01,396 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:24:01,396 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:24:01,396 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:24:01,396 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:24:01,396 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:24:01,396 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:24:01,396 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:24:04,345 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:24:04,347 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:24:04,358 [Thread=3] INFO - 单轴触发了 2022-09-08 14:24:04,359 [Thread=3] INFO - 该轴是Z 2022-09-08 14:24:04,359 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:04,359 [Thread=3] INFO - 该轴是Z,目标位置是-2.5669999976635 2022-09-08 14:24:04,359 [Thread=3] INFO - 步进失败 2022-09-08 14:24:04,359 [Thread=3] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:24:04,363 [Thread=3] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:24:04,364 [Thread=3] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:24:04,364 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:24:04,364 [Thread=3] INFO - 进入getLongth 2022-09-08 14:24:04,364 [Thread=3] INFO - 目标坐标X-6.496841Y82.399944 2022-09-08 14:24:04,364 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:24:04,364 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:24:04,364 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:24:04,364 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:24:04,364 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:24:04,364 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:24:04,365 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:24:04,365 [Thread=3] INFO - 双轴-目标点在范围内 2022-09-08 14:24:06,355 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:24:08,233 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:24:08,233 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:24:08,233 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:24:08,233 [Thread=1] INFO - 进入getLongth 2022-09-08 14:24:08,233 [Thread=1] INFO - 目标坐标X-6.496748Y82.398391 2022-09-08 14:24:08,233 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:24:08,234 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:24:08,234 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:24:08,234 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:24:08,234 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:24:08,234 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:24:08,234 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:24:08,234 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:24:10,955 [Thread=20] INFO - 单轴触发了 2022-09-08 14:24:10,956 [Thread=20] INFO - 该轴是Z 2022-09-08 14:24:10,956 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:10,956 [Thread=20] INFO - 该轴是Z,目标位置是-2.5642000000095 2022-09-08 14:24:10,956 [Thread=20] INFO - 步进失败 2022-09-08 14:24:11,186 [Thread=19] INFO - 单轴触发了 2022-09-08 14:24:11,186 [Thread=19] INFO - 该轴是Z 2022-09-08 14:24:11,186 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:11,187 [Thread=19] INFO - 该轴是Z,目标位置是-2.5642000000095 2022-09-08 14:24:11,187 [Thread=19] INFO - 步进失败 2022-09-08 14:24:11,418 [Thread=21] INFO - 单轴触发了 2022-09-08 14:24:11,418 [Thread=21] INFO - 该轴是Z 2022-09-08 14:24:11,418 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:11,419 [Thread=21] INFO - 该轴是Z,目标位置是-2.5642000000095 2022-09-08 14:24:11,419 [Thread=21] INFO - 步进失败 2022-09-08 14:24:11,631 [Thread=20] INFO - 单轴触发了 2022-09-08 14:24:11,631 [Thread=20] INFO - 该轴是Z 2022-09-08 14:24:11,631 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:11,632 [Thread=20] INFO - 该轴是Z,目标位置是-2.5646000000095 2022-09-08 14:24:11,632 [Thread=20] INFO - 步进失败 2022-09-08 14:24:11,851 [Thread=19] INFO - 单轴触发了 2022-09-08 14:24:11,851 [Thread=19] INFO - 该轴是Z 2022-09-08 14:24:11,851 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:11,852 [Thread=19] INFO - 该轴是Z,目标位置是-2.5648000000095 2022-09-08 14:24:11,852 [Thread=19] INFO - 步进失败 2022-09-08 14:24:14,754 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:24:14,827 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.3256465601818 2022-09-08 14:24:14,827 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2301413928391 2022-09-08 14:24:14,827 [Thread=16] INFO - Measure angle is -90.277894 2022-09-08 14:24:14,830 [Thread=16] INFO - Measure StartPoint:988.279174804688,987.436584472656, EndPoint:987.808959960938,1084.38232421875, PixelDistance:96.94688 2022-09-08 14:24:14,830 [Thread=16] INFO - DerivativeMeasure timespan = 2.4346 2022-09-08 14:24:15,703 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:24:15,773 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.1778330231311 2022-09-08 14:24:15,773 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.3790310467097 2022-09-08 14:24:15,773 [Thread=16] INFO - Measure angle is -90.278432 2022-09-08 14:24:15,777 [Thread=16] INFO - Measure StartPoint:1084.4404296875,988.373779296875, EndPoint:1083.96813964844,1085.56030273438, PixelDistance:97.187671 2022-09-08 14:24:15,777 [Thread=16] INFO - DerivativeMeasure timespan = 3.3021 2022-09-08 14:24:17,833 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:24:17,896 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.1676883601162 2022-09-08 14:24:17,897 [Thread=16] INFO - Measure angle is -90.167688 2022-09-08 14:24:17,899 [Thread=16] INFO - Measure StartPoint:1098.13293457031,988.590698242188, EndPoint:1097.84851074219,1085.75561523438, PixelDistance:97.165333 2022-09-08 14:24:17,899 [Thread=16] INFO - DerivativeMeasure timespan = 1.9953 2022-09-08 14:24:18,498 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:24:18,550 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2609614102399 2022-09-08 14:24:18,551 [Thread=16] INFO - Measure angle is -90.260961 2022-09-08 14:24:18,553 [Thread=16] INFO - Measure StartPoint:1016.30364990234,988.329284667969, EndPoint:1015.86199951172,1085.29736328125, PixelDistance:96.969084 2022-09-08 14:24:18,554 [Thread=16] INFO - DerivativeMeasure timespan = 2.7167 2022-09-08 14:24:19,937 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 14:24:19,940 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 14:24:19,952 [Thread=27] INFO - 单轴触发了 2022-09-08 14:24:19,953 [Thread=27] INFO - 该轴是Z 2022-09-08 14:24:19,953 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:24:19,953 [Thread=27] INFO - 该轴是Z,目标位置是-2.51400000095367 2022-09-08 14:24:19,953 [Thread=27] INFO - 步进失败 2022-09-08 14:24:19,953 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 14:24:19,958 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:24:19,959 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:24:19,959 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:24:19,959 [Thread=27] INFO - 进入getLongth 2022-09-08 14:24:19,959 [Thread=27] INFO - 目标坐标X-6.439748Y82.479391 2022-09-08 14:24:19,959 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:24:19,959 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:24:19,959 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:24:19,959 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:24:19,959 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:24:19,959 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:24:19,959 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:24:19,960 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:24:20,983 [Thread=15] INFO - stageout currentPos:-2.5142, currentVelocity:2, delayTime:1307, point.Z:-0.5 2022-09-08 14:24:20,983 [Thread=15] INFO - stage out homez 2022-09-08 14:24:24,310 [Thread=15] INFO - stage out home ok 2022-09-08 14:24:24,317 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:24:24,317 [Thread=15] INFO - stagein homez 2022-09-08 14:24:24,317 [Thread=15] INFO - stagein home ok 2022-09-08 14:24:24,318 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:24:24,318 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:24:24,318 [Thread=15] INFO - 进入getLongth 2022-09-08 14:24:24,318 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 14:24:24,318 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:24:24,318 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:24:24,318 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:24:24,318 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:24:24,318 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:24:24,318 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:24:24,319 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:24:24,319 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 14:24:24,319 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:25:20,004 [Thread=7] INFO - SwitchIndex index:0 2022-09-08 14:25:20,006 [Thread=7] INFO - Switch Lens:Broadcast Event 2022-09-08 14:25:20,006 [Thread=28] INFO - 单轴触发了 2022-09-08 14:25:20,006 [Thread=28] INFO - 该轴是Z 2022-09-08 14:25:20,006 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:25:20,007 [Thread=28] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:25:20,007 [Thread=28] INFO - 步进失败 2022-09-08 14:25:20,007 [Thread=28] INFO - SwitchOffsetZ:0 2022-09-08 14:25:20,012 [Thread=28] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:25:20,012 [Thread=28] INFO - stagein homez 2022-09-08 14:25:20,013 [Thread=28] INFO - stagein home ok 2022-09-08 14:25:20,013 [Thread=28] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:25:20,013 [Thread=28] INFO - Longth长度152.4 2022-09-08 14:25:20,013 [Thread=28] INFO - 进入getLongth 2022-09-08 14:25:20,013 [Thread=28] INFO - 目标坐标X-100Y-90 2022-09-08 14:25:20,013 [Thread=28] INFO - 晶圆的大小6 2022-09-08 14:25:20,013 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 14:25:20,013 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:25:20,013 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:25:20,013 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 14:25:20,013 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 14:25:20,014 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:25:20,014 [Thread=28] INFO - 双轴-目标点不在范围内 2022-09-08 14:25:20,014 [Thread=28] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:25:21,042 [Thread=7] INFO - stagein currentPos:0.1051, currentVelocity:2, delayTime:602, point.Z:-0.5 2022-09-08 14:25:21,042 [Thread=7] INFO - stagein homez 2022-09-08 14:25:23,672 [Thread=7] INFO - stagein home ok 2022-09-08 14:25:23,676 [Thread=7] INFO - StageBack: waferSize = 6 2022-09-08 14:25:23,679 [Thread=7] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:25:23,680 [Thread=7] INFO - stagein homez 2022-09-08 14:25:23,680 [Thread=7] INFO - stagein home ok 2022-09-08 14:25:23,680 [Thread=7] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:25:23,680 [Thread=7] INFO - Longth长度152.4 2022-09-08 14:25:23,680 [Thread=7] INFO - 进入getLongth 2022-09-08 14:25:23,680 [Thread=7] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:25:23,680 [Thread=7] INFO - 晶圆的大小6 2022-09-08 14:25:23,680 [Thread=7] INFO - 晶圆的宽高152.4 2022-09-08 14:25:23,680 [Thread=7] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:25:23,681 [Thread=7] INFO - X+安全坐标-118.61 2022-09-08 14:25:23,681 [Thread=7] INFO - X-安全坐标43.79 2022-09-08 14:25:23,681 [Thread=7] INFO - Y上安全坐标-42.1307 2022-09-08 14:25:23,681 [Thread=7] INFO - Y下安全坐标120.2693 2022-09-08 14:25:23,681 [Thread=7] INFO - 双轴-目标点在范围内 2022-09-08 14:25:31,104 [Thread=7] INFO - 单轴触发了 2022-09-08 14:25:31,104 [Thread=7] INFO - 该轴是Z 2022-09-08 14:25:31,104 [Thread=7] INFO - 进入MoveSingleAxis_1 2022-09-08 14:25:31,104 [Thread=7] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:25:31,104 [Thread=7] INFO - 步进失败 2022-09-08 14:25:40,442 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:25:40,443 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:25:40,443 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:25:40,443 [Thread=1] INFO - 进入getLongth 2022-09-08 14:25:40,443 [Thread=1] INFO - 目标坐标X3.67499999999998Y78.5653 2022-09-08 14:25:40,443 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:25:40,443 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:25:40,443 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:25:40,443 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:25:40,444 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:25:40,444 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:25:40,444 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:25:40,444 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:25:44,062 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:25:44,162 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:25:45,266 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:25:45,266 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:25:53,650 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:25:53,654 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:25:53,666 [Thread=3] INFO - 单轴触发了 2022-09-08 14:25:53,667 [Thread=3] INFO - 该轴是Z 2022-09-08 14:25:53,667 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:25:53,667 [Thread=3] INFO - 该轴是Z,目标位置是-2.52500000138283 2022-09-08 14:25:53,667 [Thread=3] INFO - 步进失败 2022-09-08 14:25:53,667 [Thread=3] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:25:53,672 [Thread=3] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:25:53,672 [Thread=3] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:25:53,672 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:25:53,672 [Thread=3] INFO - 进入getLongth 2022-09-08 14:25:53,672 [Thread=3] INFO - 目标坐标X3.628Y78.4873 2022-09-08 14:25:53,672 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:25:53,672 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:25:53,672 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:25:53,672 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:25:53,673 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:25:53,673 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:25:53,673 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:25:53,673 [Thread=3] INFO - 双轴-目标点在范围内 2022-09-08 14:25:55,688 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:25:57,822 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:25:57,822 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:25:57,822 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:25:57,822 [Thread=1] INFO - 进入getLongth 2022-09-08 14:25:57,822 [Thread=1] INFO - 目标坐标X3.626077Y78.472785 2022-09-08 14:25:57,822 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:25:57,822 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:25:57,822 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:25:57,822 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:25:57,823 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:25:57,823 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:25:57,823 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:25:57,823 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:26:00,223 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:26:00,226 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:26:00,240 [Thread=4] INFO - 单轴触发了 2022-09-08 14:26:00,240 [Thread=4] INFO - 该轴是Z 2022-09-08 14:26:00,240 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:26:00,241 [Thread=4] INFO - 该轴是Z,目标位置是-2.5131999976635 2022-09-08 14:26:00,241 [Thread=4] INFO - 步进失败 2022-09-08 14:26:00,241 [Thread=4] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:26:00,245 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:00,245 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:00,245 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:26:00,245 [Thread=4] INFO - 进入getLongth 2022-09-08 14:26:00,245 [Thread=4] INFO - 目标坐标X3.616077Y78.469785 2022-09-08 14:26:00,245 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:26:00,245 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:26:00,246 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:00,246 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:26:00,246 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:26:00,246 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:00,246 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:26:00,246 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:26:02,231 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:26:05,450 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:26:05,507 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:26:05,507 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.1993502177034 2022-09-08 14:26:05,507 [Thread=30] INFO - Measure angle is -90.099675 2022-09-08 14:26:05,509 [Thread=30] INFO - Measure StartPoint:1009.25561523438,883.063659667969, EndPoint:1008.80364990234,1142.87463378906, PixelDistance:259.811367 2022-09-08 14:26:05,509 [Thread=30] INFO - DerivativeMeasure timespan = 1.7901 2022-09-08 14:26:16,846 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:26:16,848 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:26:16,861 [Thread=27] INFO - 单轴触发了 2022-09-08 14:26:16,861 [Thread=27] INFO - 该轴是Z 2022-09-08 14:26:16,861 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:26:16,862 [Thread=27] INFO - 该轴是Z,目标位置是-2.5187000023365 2022-09-08 14:26:16,862 [Thread=27] INFO - 步进失败 2022-09-08 14:26:16,862 [Thread=27] INFO - SwitchOffsetZ:-0.006300002 2022-09-08 14:26:16,866 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:16,867 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:16,867 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:26:16,867 [Thread=27] INFO - 进入getLongth 2022-09-08 14:26:16,867 [Thread=27] INFO - 目标坐标X3.626077Y78.472785 2022-09-08 14:26:16,867 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:26:16,867 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:26:16,867 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:16,867 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:26:16,867 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:26:16,867 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:16,867 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:26:16,868 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:26:18,854 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:26:21,375 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:26:21,377 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:26:21,388 [Thread=11] INFO - 单轴触发了 2022-09-08 14:26:21,389 [Thread=11] INFO - 该轴是Z 2022-09-08 14:26:21,389 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 14:26:21,389 [Thread=11] INFO - 该轴是Z,目标位置是-2.46319999861717 2022-09-08 14:26:21,390 [Thread=11] INFO - 步进失败 2022-09-08 14:26:21,390 [Thread=11] INFO - SwitchOffsetZ:0.0573 2022-09-08 14:26:21,394 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:21,394 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:21,394 [Thread=11] INFO - Longth长度152.4 2022-09-08 14:26:21,394 [Thread=11] INFO - 进入getLongth 2022-09-08 14:26:21,394 [Thread=11] INFO - 目标坐标X3.673077Y78.550785 2022-09-08 14:26:21,394 [Thread=11] INFO - 晶圆的大小6 2022-09-08 14:26:21,395 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 14:26:21,395 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:21,395 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 14:26:21,395 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 14:26:21,395 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:21,395 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 14:26:21,396 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 14:26:23,390 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:26:26,268 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:26:26,269 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:26:28,107 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:28,107 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:28,107 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:26:28,108 [Thread=1] INFO - 进入getLongth 2022-09-08 14:26:28,108 [Thread=1] INFO - 目标坐标X3.142483Y78.875412 2022-09-08 14:26:28,108 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:26:28,108 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:26:28,108 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:28,108 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:26:28,108 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:26:28,108 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:28,109 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:26:28,109 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:26:31,965 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:26:31,967 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:26:31,979 [Thread=28] INFO - 单轴触发了 2022-09-08 14:26:31,979 [Thread=28] INFO - 该轴是Z 2022-09-08 14:26:31,979 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:26:31,980 [Thread=28] INFO - 该轴是Z,目标位置是-2.52070000138283 2022-09-08 14:26:31,980 [Thread=28] INFO - 步进失败 2022-09-08 14:26:31,980 [Thread=28] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:26:31,984 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:31,984 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:31,984 [Thread=28] INFO - Longth长度152.4 2022-09-08 14:26:31,984 [Thread=28] INFO - 进入getLongth 2022-09-08 14:26:31,985 [Thread=28] INFO - 目标坐标X3.095483Y78.797412 2022-09-08 14:26:31,985 [Thread=28] INFO - 晶圆的大小6 2022-09-08 14:26:31,985 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 14:26:31,985 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:31,985 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:26:31,985 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 14:26:31,985 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:31,985 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:26:31,985 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:26:33,975 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:26:35,310 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:35,311 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:35,311 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:26:35,311 [Thread=1] INFO - 进入getLongth 2022-09-08 14:26:35,311 [Thread=1] INFO - 目标坐标X3.067012Y78.762118 2022-09-08 14:26:35,311 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:26:35,311 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:26:35,311 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:35,311 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:26:35,311 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:26:35,311 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:35,312 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:26:35,312 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:26:37,506 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:26:37,509 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:26:37,521 [Thread=15] INFO - 单轴触发了 2022-09-08 14:26:37,521 [Thread=15] INFO - 该轴是Z 2022-09-08 14:26:37,521 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:26:37,521 [Thread=15] INFO - 该轴是Z,目标位置是-2.5149999976635 2022-09-08 14:26:37,522 [Thread=15] INFO - 步进失败 2022-09-08 14:26:37,522 [Thread=15] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:26:37,527 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:37,527 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:37,527 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:26:37,527 [Thread=15] INFO - 进入getLongth 2022-09-08 14:26:37,527 [Thread=15] INFO - 目标坐标X3.057012Y78.759118 2022-09-08 14:26:37,528 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:26:37,528 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:26:37,528 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:37,528 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:26:37,528 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:26:37,528 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:37,528 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:26:37,528 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:26:39,530 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:26:41,296 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:41,297 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:41,297 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:26:41,297 [Thread=1] INFO - 进入getLongth 2022-09-08 14:26:41,297 [Thread=1] INFO - 目标坐标X3.057882Y78.757285 2022-09-08 14:26:41,297 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:26:41,297 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:26:41,297 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:41,297 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:26:41,297 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:26:41,298 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:41,298 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:26:41,298 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:26:44,102 [Thread=6] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:26:44,158 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0.360635494627307 2022-09-08 14:26:44,159 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:26:44,159 [Thread=6] INFO - Measure angle is -0.180318 2022-09-08 14:26:44,163 [Thread=6] INFO - Measure StartPoint:944.32666015625,1029.85314941406, EndPoint:1075.46484375,1030.26586914063, PixelDistance:131.138833 2022-09-08 14:26:44,163 [Thread=6] INFO - DerivativeMeasure timespan = 4.0984 2022-09-08 14:26:44,953 [Thread=6] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:26:45,012 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0.326184486681259 2022-09-08 14:26:45,012 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0.00974489346015776 2022-09-08 14:26:45,012 [Thread=6] INFO - Measure angle is -0.167965 2022-09-08 14:26:45,018 [Thread=6] INFO - Measure StartPoint:944.352416992188,1019.98638916016, EndPoint:1075.50354003906,1020.37084960938, PixelDistance:131.151687 2022-09-08 14:26:45,018 [Thread=6] INFO - DerivativeMeasure timespan = 5.586 2022-09-08 14:26:45,603 [Thread=6] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:26:45,662 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0.323731634794464 2022-09-08 14:26:45,662 [Thread=6] INFO - Measure angle is -0.323732 2022-09-08 14:26:45,667 [Thread=6] INFO - Measure StartPoint:944.371337890625,1009.14898681641, EndPoint:1075.57666015625,1009.89031982422, PixelDistance:131.207417 2022-09-08 14:26:45,668 [Thread=6] INFO - DerivativeMeasure timespan = 5.0532 2022-09-08 14:26:46,892 [Thread=11] INFO - SwitchIndex index:0 2022-09-08 14:26:46,895 [Thread=11] INFO - Switch Lens:Broadcast Event 2022-09-08 14:26:46,906 [Thread=27] INFO - 单轴触发了 2022-09-08 14:26:46,906 [Thread=27] INFO - 该轴是Z 2022-09-08 14:26:46,906 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:26:46,907 [Thread=27] INFO - 该轴是Z,目标位置是-2.46180000095367 2022-09-08 14:26:46,907 [Thread=27] INFO - 步进失败 2022-09-08 14:26:46,907 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 14:26:46,911 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:26:46,911 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:26:46,912 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:26:46,912 [Thread=27] INFO - 进入getLongth 2022-09-08 14:26:46,912 [Thread=27] INFO - 目标坐标X3.114882Y78.838285 2022-09-08 14:26:46,912 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:26:46,912 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:26:46,912 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:46,912 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:26:46,912 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:26:46,912 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:46,912 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:26:46,912 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:26:48,600 [Thread=11] INFO - stageout currentPos:-2.5128, currentVelocity:2, delayTime:1306, point.Z:-0.5 2022-09-08 14:26:48,600 [Thread=11] INFO - stage out homez 2022-09-08 14:26:51,923 [Thread=11] INFO - stage out home ok 2022-09-08 14:26:51,939 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:26:51,940 [Thread=11] INFO - stagein homez 2022-09-08 14:26:51,940 [Thread=11] INFO - stagein home ok 2022-09-08 14:26:51,940 [Thread=11] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:26:51,940 [Thread=11] INFO - Longth长度152.4 2022-09-08 14:26:51,940 [Thread=11] INFO - 进入getLongth 2022-09-08 14:26:51,940 [Thread=11] INFO - 目标坐标X-100Y-90 2022-09-08 14:26:51,940 [Thread=11] INFO - 晶圆的大小6 2022-09-08 14:26:51,940 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 14:26:51,941 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:26:51,941 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 14:26:51,941 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 14:26:51,941 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 14:26:51,941 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 14:26:51,941 [Thread=11] INFO - 双轴-目标点不在范围内 2022-09-08 14:26:51,941 [Thread=11] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:27:40,347 [Thread=3] INFO - SwitchIndex index:0 2022-09-08 14:27:40,349 [Thread=3] INFO - Switch Lens:Broadcast Event 2022-09-08 14:27:40,349 [Thread=7] INFO - 单轴触发了 2022-09-08 14:27:40,349 [Thread=7] INFO - 该轴是Z 2022-09-08 14:27:40,350 [Thread=7] INFO - 进入MoveSingleAxis_1 2022-09-08 14:27:40,350 [Thread=7] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:27:40,350 [Thread=7] INFO - 步进失败 2022-09-08 14:27:40,350 [Thread=7] INFO - SwitchOffsetZ:0 2022-09-08 14:27:40,355 [Thread=7] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:27:40,355 [Thread=7] INFO - stagein homez 2022-09-08 14:27:40,355 [Thread=7] INFO - stagein home ok 2022-09-08 14:27:40,355 [Thread=7] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:27:40,356 [Thread=7] INFO - Longth长度152.4 2022-09-08 14:27:40,356 [Thread=7] INFO - 进入getLongth 2022-09-08 14:27:40,356 [Thread=7] INFO - 目标坐标X-100Y-90 2022-09-08 14:27:40,356 [Thread=7] INFO - 晶圆的大小6 2022-09-08 14:27:40,356 [Thread=7] INFO - 晶圆的宽高152.4 2022-09-08 14:27:40,356 [Thread=7] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:27:40,356 [Thread=7] INFO - X+安全坐标-118.61 2022-09-08 14:27:40,356 [Thread=7] INFO - X-安全坐标43.79 2022-09-08 14:27:40,356 [Thread=7] INFO - Y上安全坐标-42.1307 2022-09-08 14:27:40,357 [Thread=7] INFO - Y下安全坐标120.2693 2022-09-08 14:27:40,357 [Thread=7] INFO - 双轴-目标点不在范围内 2022-09-08 14:27:40,357 [Thread=7] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:27:41,387 [Thread=3] INFO - stagein currentPos:-0.4429, currentVelocity:2, delayTime:328, point.Z:-0.5 2022-09-08 14:27:41,387 [Thread=3] INFO - stagein homez 2022-09-08 14:27:43,730 [Thread=3] INFO - stagein home ok 2022-09-08 14:27:43,733 [Thread=3] INFO - StageBack: waferSize = 6 2022-09-08 14:27:43,738 [Thread=3] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:27:43,738 [Thread=3] INFO - stagein homez 2022-09-08 14:27:43,738 [Thread=3] INFO - stagein home ok 2022-09-08 14:27:43,739 [Thread=3] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:27:43,739 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:27:43,739 [Thread=3] INFO - 进入getLongth 2022-09-08 14:27:43,739 [Thread=3] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:27:43,739 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:27:43,739 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:27:43,739 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:27:43,739 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:27:43,739 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:27:43,740 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:27:43,740 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:27:43,740 [Thread=3] INFO - 双轴-目标点在范围内 2022-09-08 14:27:52,517 [Thread=3] INFO - 单轴触发了 2022-09-08 14:27:52,518 [Thread=3] INFO - 该轴是Z 2022-09-08 14:27:52,518 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:27:52,518 [Thread=3] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:27:52,518 [Thread=3] INFO - 步进失败 2022-09-08 14:27:56,252 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:27:56,252 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:27:56,252 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:27:56,252 [Thread=1] INFO - 进入getLongth 2022-09-08 14:27:56,252 [Thread=1] INFO - 目标坐标X-46.429Y-1.0047 2022-09-08 14:27:56,252 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:27:56,252 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:27:56,253 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:27:56,253 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:27:56,253 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:27:56,253 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:27:56,253 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:27:56,253 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:28:01,002 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:28:01,110 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:28:02,341 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:28:02,341 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:28:04,545 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:28:04,545 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:28:04,545 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:28:04,545 [Thread=1] INFO - 进入getLongth 2022-09-08 14:28:04,545 [Thread=1] INFO - 目标坐标X-46.893808Y-0.828245 2022-09-08 14:28:04,545 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:28:04,545 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:28:04,545 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:28:04,546 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:28:04,546 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:28:04,546 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:28:04,546 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:28:04,546 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:28:07,570 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:28:07,572 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:28:07,583 [Thread=28] INFO - 单轴触发了 2022-09-08 14:28:07,583 [Thread=28] INFO - 该轴是Z 2022-09-08 14:28:07,583 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:07,584 [Thread=28] INFO - 该轴是Z,目标位置是-2.48730000138283 2022-09-08 14:28:07,584 [Thread=28] INFO - 步进失败 2022-09-08 14:28:07,584 [Thread=28] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:28:07,589 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:28:07,589 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:28:07,589 [Thread=28] INFO - Longth长度152.4 2022-09-08 14:28:07,589 [Thread=28] INFO - 进入getLongth 2022-09-08 14:28:07,589 [Thread=28] INFO - 目标坐标X-46.940808Y-0.906245 2022-09-08 14:28:07,589 [Thread=28] INFO - 晶圆的大小6 2022-09-08 14:28:07,589 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 14:28:07,590 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:28:07,590 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:28:07,590 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 14:28:07,590 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 14:28:07,590 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:28:07,590 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:28:09,590 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:28:10,995 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:28:10,995 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:28:10,995 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:28:10,995 [Thread=1] INFO - 进入getLongth 2022-09-08 14:28:10,995 [Thread=1] INFO - 目标坐标X-46.940436Y-0.952952 2022-09-08 14:28:10,995 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:28:10,996 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:28:10,996 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:28:10,996 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:28:10,996 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:28:10,996 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:28:10,996 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:28:10,996 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:28:15,147 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:28:15,150 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:28:15,164 [Thread=7] INFO - 单轴触发了 2022-09-08 14:28:15,164 [Thread=7] INFO - 该轴是Z 2022-09-08 14:28:15,164 [Thread=7] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:15,165 [Thread=7] INFO - 该轴是Z,目标位置是-2.4710999976635 2022-09-08 14:28:15,165 [Thread=7] INFO - 步进失败 2022-09-08 14:28:15,165 [Thread=7] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:28:15,169 [Thread=7] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:28:15,169 [Thread=7] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:28:15,169 [Thread=7] INFO - Longth长度152.4 2022-09-08 14:28:15,170 [Thread=7] INFO - 进入getLongth 2022-09-08 14:28:15,170 [Thread=7] INFO - 目标坐标X-46.950436Y-0.955952 2022-09-08 14:28:15,170 [Thread=7] INFO - 晶圆的大小6 2022-09-08 14:28:15,170 [Thread=7] INFO - 晶圆的宽高152.4 2022-09-08 14:28:15,170 [Thread=7] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:28:15,170 [Thread=7] INFO - X+安全坐标-118.61 2022-09-08 14:28:15,170 [Thread=7] INFO - X-安全坐标43.79 2022-09-08 14:28:15,170 [Thread=7] INFO - Y上安全坐标-42.1307 2022-09-08 14:28:15,170 [Thread=7] INFO - Y下安全坐标120.2693 2022-09-08 14:28:15,170 [Thread=7] INFO - 双轴-目标点在范围内 2022-09-08 14:28:17,172 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:28:20,258 [Thread=21] INFO - 单轴触发了 2022-09-08 14:28:20,258 [Thread=21] INFO - 该轴是Z 2022-09-08 14:28:20,258 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:20,259 [Thread=21] INFO - 该轴是Z,目标位置是-2.4679000000095 2022-09-08 14:28:20,259 [Thread=21] INFO - 步进失败 2022-09-08 14:28:20,436 [Thread=20] INFO - 单轴触发了 2022-09-08 14:28:20,436 [Thread=20] INFO - 该轴是Z 2022-09-08 14:28:20,436 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:20,436 [Thread=20] INFO - 该轴是Z,目标位置是-2.4679000000095 2022-09-08 14:28:20,437 [Thread=20] INFO - 步进失败 2022-09-08 14:28:20,928 [Thread=19] INFO - 单轴触发了 2022-09-08 14:28:20,928 [Thread=19] INFO - 该轴是Z 2022-09-08 14:28:20,928 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:20,928 [Thread=19] INFO - 该轴是Z,目标位置是-2.4679000000095 2022-09-08 14:28:20,928 [Thread=19] INFO - 步进失败 2022-09-08 14:28:21,195 [Thread=21] INFO - 单轴触发了 2022-09-08 14:28:21,195 [Thread=21] INFO - 该轴是Z 2022-09-08 14:28:21,195 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:21,195 [Thread=21] INFO - 该轴是Z,目标位置是-2.4683000000095 2022-09-08 14:28:21,196 [Thread=21] INFO - 步进失败 2022-09-08 14:28:21,831 [Thread=20] INFO - 单轴触发了 2022-09-08 14:28:21,831 [Thread=20] INFO - 该轴是Z 2022-09-08 14:28:21,831 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:21,832 [Thread=20] INFO - 该轴是Z,目标位置是-2.4687000000095 2022-09-08 14:28:21,832 [Thread=20] INFO - 步进失败 2022-09-08 14:28:24,261 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:28:24,313 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.2133962269914 2022-09-08 14:28:24,313 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.2693829240009 2022-09-08 14:28:24,313 [Thread=13] INFO - Measure angle is -90.24139 2022-09-08 14:28:24,318 [Thread=13] INFO - Measure StartPoint:1051.89990234375,770.399475097656, EndPoint:1050.13635253906,1188.98046875, PixelDistance:418.584709 2022-09-08 14:28:24,318 [Thread=13] INFO - DerivativeMeasure timespan = 5.3485 2022-09-08 14:28:25,286 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:28:25,337 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.2594907758786 2022-09-08 14:28:25,337 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.3104564950437 2022-09-08 14:28:25,337 [Thread=13] INFO - Measure angle is -90.284974 2022-09-08 14:28:25,342 [Thread=13] INFO - Measure StartPoint:1027.44091796875,770.284851074219, EndPoint:1025.35913085938,1188.85766601563, PixelDistance:418.577992 2022-09-08 14:28:25,342 [Thread=13] INFO - DerivativeMeasure timespan = 4.8107 2022-09-08 14:28:26,931 [Thread=3] INFO - SwitchIndex index:0 2022-09-08 14:28:26,934 [Thread=3] INFO - Switch Lens:Broadcast Event 2022-09-08 14:28:26,947 [Thread=15] INFO - 单轴触发了 2022-09-08 14:28:26,947 [Thread=15] INFO - 该轴是Z 2022-09-08 14:28:26,947 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:28:26,948 [Thread=15] INFO - 该轴是Z,目标位置是-2.41770000095367 2022-09-08 14:28:26,948 [Thread=15] INFO - 步进失败 2022-09-08 14:28:26,948 [Thread=15] INFO - SwitchOffsetZ:0.051 2022-09-08 14:28:26,952 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:28:26,952 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:28:26,952 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:28:26,952 [Thread=15] INFO - 进入getLongth 2022-09-08 14:28:26,953 [Thread=15] INFO - 目标坐标X-46.893436Y-0.874952 2022-09-08 14:28:26,953 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:28:26,953 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:28:26,953 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:28:26,953 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:28:26,953 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:28:26,954 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:28:26,954 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:28:26,954 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:28:27,966 [Thread=3] INFO - stageout currentPos:-2.4179, currentVelocity:2, delayTime:1258, point.Z:-0.5 2022-09-08 14:28:27,966 [Thread=3] INFO - stage out homez 2022-09-08 14:28:31,244 [Thread=3] INFO - stage out home ok 2022-09-08 14:28:31,247 [Thread=3] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:28:31,248 [Thread=3] INFO - stagein homez 2022-09-08 14:28:31,248 [Thread=3] INFO - stagein home ok 2022-09-08 14:28:31,248 [Thread=3] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:28:31,248 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:28:31,248 [Thread=3] INFO - 进入getLongth 2022-09-08 14:28:31,248 [Thread=3] INFO - 目标坐标X-100Y-90 2022-09-08 14:28:31,248 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:28:31,248 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:28:31,248 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:28:31,249 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:28:31,249 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:28:31,249 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:28:31,249 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:28:31,249 [Thread=3] INFO - 双轴-目标点不在范围内 2022-09-08 14:28:31,249 [Thread=3] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:29:20,168 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 14:29:20,172 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 14:29:20,172 [Thread=4] INFO - 单轴触发了 2022-09-08 14:29:20,172 [Thread=4] INFO - 该轴是Z 2022-09-08 14:29:20,172 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:29:20,173 [Thread=4] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:29:20,173 [Thread=4] INFO - 步进失败 2022-09-08 14:29:20,173 [Thread=4] INFO - SwitchOffsetZ:0 2022-09-08 14:29:20,178 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:29:20,178 [Thread=4] INFO - stagein homez 2022-09-08 14:29:20,178 [Thread=4] INFO - stagein home ok 2022-09-08 14:29:20,178 [Thread=4] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:29:20,178 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:29:20,178 [Thread=4] INFO - 进入getLongth 2022-09-08 14:29:20,179 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 14:29:20,179 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:29:20,179 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:29:20,179 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:20,179 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:29:20,179 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:29:20,179 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:20,179 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:29:20,179 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 14:29:20,179 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:29:21,203 [Thread=27] INFO - stagein currentPos:-0.1404, currentVelocity:2, delayTime:479, point.Z:-0.5 2022-09-08 14:29:21,204 [Thread=27] INFO - stagein homez 2022-09-08 14:29:23,708 [Thread=27] INFO - stagein home ok 2022-09-08 14:29:23,711 [Thread=27] INFO - StageBack: waferSize = 6 2022-09-08 14:29:23,717 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:29:23,718 [Thread=27] INFO - stagein homez 2022-09-08 14:29:23,718 [Thread=27] INFO - stagein home ok 2022-09-08 14:29:23,718 [Thread=27] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:29:23,718 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:29:23,718 [Thread=27] INFO - 进入getLongth 2022-09-08 14:29:23,718 [Thread=27] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:29:23,719 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:29:23,719 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:29:23,719 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:23,719 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:29:23,719 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:29:23,719 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:23,719 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:29:23,719 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:29:32,308 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:29:32,309 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:29:32,309 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:29:32,309 [Thread=1] INFO - 进入getLongth 2022-09-08 14:29:32,309 [Thread=1] INFO - 目标坐标X-46.429Y-1.0047 2022-09-08 14:29:32,309 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:29:32,309 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:29:32,309 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:32,309 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:29:32,310 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:29:32,310 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:32,310 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:29:32,310 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:29:37,506 [Thread=27] INFO - 单轴触发了 2022-09-08 14:29:37,506 [Thread=27] INFO - 该轴是Z 2022-09-08 14:29:37,506 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:29:37,507 [Thread=27] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:29:37,507 [Thread=27] INFO - 步进失败 2022-09-08 14:29:39,557 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:29:39,557 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:29:41,161 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:29:41,262 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:29:43,668 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:29:43,668 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:29:43,668 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:29:43,668 [Thread=1] INFO - 进入getLongth 2022-09-08 14:29:43,668 [Thread=1] INFO - 目标坐标X-46.623285Y-0.835623 2022-09-08 14:29:43,668 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:29:43,669 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:29:43,669 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:43,669 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:29:43,669 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:29:43,669 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:43,669 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:29:43,669 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:29:46,697 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:29:46,699 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:29:46,712 [Thread=4] INFO - 单轴触发了 2022-09-08 14:29:46,712 [Thread=4] INFO - 该轴是Z 2022-09-08 14:29:46,712 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:29:46,713 [Thread=4] INFO - 该轴是Z,目标位置是-2.48730000138283 2022-09-08 14:29:46,713 [Thread=4] INFO - 步进失败 2022-09-08 14:29:46,713 [Thread=4] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:29:46,718 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:29:46,719 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:29:46,719 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:29:46,719 [Thread=4] INFO - 进入getLongth 2022-09-08 14:29:46,719 [Thread=4] INFO - 目标坐标X-46.670285Y-0.913623 2022-09-08 14:29:46,719 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:29:46,719 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:29:46,719 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:46,719 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:29:46,720 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:29:46,720 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:46,720 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:29:46,720 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:29:48,709 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:29:50,256 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:29:50,256 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:29:50,256 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:29:50,256 [Thread=1] INFO - 进入getLongth 2022-09-08 14:29:50,257 [Thread=1] INFO - 目标坐标X-46.677852Y-0.951212 2022-09-08 14:29:50,257 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:29:50,257 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:29:50,257 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:50,257 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:29:50,257 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:29:50,257 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:50,258 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:29:50,258 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:29:54,272 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:29:54,275 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:29:54,286 [Thread=15] INFO - 单轴触发了 2022-09-08 14:29:54,286 [Thread=15] INFO - 该轴是Z 2022-09-08 14:29:54,286 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:29:54,286 [Thread=15] INFO - 该轴是Z,目标位置是-2.4732999976635 2022-09-08 14:29:54,286 [Thread=15] INFO - 步进失败 2022-09-08 14:29:54,286 [Thread=15] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:29:54,290 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:29:54,290 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:29:54,290 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:29:54,290 [Thread=15] INFO - 进入getLongth 2022-09-08 14:29:54,290 [Thread=15] INFO - 目标坐标X-46.687852Y-0.954212 2022-09-08 14:29:54,290 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:29:54,291 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:29:54,291 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:54,291 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:29:54,291 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:29:54,291 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:54,291 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:29:54,291 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:29:56,283 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:29:57,447 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:29:57,447 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:29:57,447 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:29:57,447 [Thread=1] INFO - 进入getLongth 2022-09-08 14:29:57,448 [Thread=1] INFO - 目标坐标X-46.688038Y-0.962258 2022-09-08 14:29:57,448 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:29:57,448 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:29:57,448 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:29:57,448 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:29:57,448 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:29:57,448 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:29:57,448 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:29:57,448 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:30:00,595 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:30:00,595 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:30:00,595 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:30:00,595 [Thread=1] INFO - 进入getLongth 2022-09-08 14:30:00,595 [Thread=1] INFO - 目标坐标X-46.687945Y-0.960021 2022-09-08 14:30:00,595 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:30:00,595 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:30:00,595 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:30:00,596 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:30:00,596 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:30:00,596 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:30:00,596 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:30:00,596 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:30:02,915 [Thread=19] INFO - 单轴触发了 2022-09-08 14:30:02,915 [Thread=19] INFO - 该轴是Z 2022-09-08 14:30:02,916 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:02,916 [Thread=19] INFO - 该轴是Z,目标位置是-2.4711000000095 2022-09-08 14:30:02,916 [Thread=19] INFO - 步进失败 2022-09-08 14:30:03,180 [Thread=21] INFO - 单轴触发了 2022-09-08 14:30:03,180 [Thread=21] INFO - 该轴是Z 2022-09-08 14:30:03,180 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:03,181 [Thread=21] INFO - 该轴是Z,目标位置是-2.4713000000095 2022-09-08 14:30:03,181 [Thread=21] INFO - 步进失败 2022-09-08 14:30:03,800 [Thread=20] INFO - 单轴触发了 2022-09-08 14:30:03,800 [Thread=20] INFO - 该轴是Z 2022-09-08 14:30:03,800 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:03,801 [Thread=20] INFO - 该轴是Z,目标位置是-2.4715000000095 2022-09-08 14:30:03,801 [Thread=20] INFO - 步进失败 2022-09-08 14:30:04,037 [Thread=19] INFO - 单轴触发了 2022-09-08 14:30:04,037 [Thread=19] INFO - 该轴是Z 2022-09-08 14:30:04,037 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:04,037 [Thread=19] INFO - 该轴是Z,目标位置是-2.4715000000095 2022-09-08 14:30:04,038 [Thread=19] INFO - 步进失败 2022-09-08 14:30:04,288 [Thread=21] INFO - 单轴触发了 2022-09-08 14:30:04,288 [Thread=21] INFO - 该轴是Z 2022-09-08 14:30:04,288 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:04,289 [Thread=21] INFO - 该轴是Z,目标位置是-2.4717000000095 2022-09-08 14:30:04,289 [Thread=21] INFO - 步进失败 2022-09-08 14:30:04,874 [Thread=20] INFO - 单轴触发了 2022-09-08 14:30:04,875 [Thread=20] INFO - 该轴是Z 2022-09-08 14:30:04,875 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:04,875 [Thread=20] INFO - 该轴是Z,目标位置是-2.4721000000095 2022-09-08 14:30:04,875 [Thread=20] INFO - 步进失败 2022-09-08 14:30:08,048 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:30:08,108 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2665014175112 2022-09-08 14:30:08,108 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.3296203111049 2022-09-08 14:30:08,108 [Thread=16] INFO - Measure angle is -90.298061 2022-09-08 14:30:08,112 [Thread=16] INFO - Measure StartPoint:1085.05517578125,870.161071777344, EndPoint:1083.39184570313,1189.91442871094, PixelDistance:319.757683 2022-09-08 14:30:08,112 [Thread=16] INFO - DerivativeMeasure timespan = 4.136 2022-09-08 14:30:09,084 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:30:09,142 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2060526297004 2022-09-08 14:30:09,142 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2743080754524 2022-09-08 14:30:09,142 [Thread=16] INFO - Measure angle is -90.24018 2022-09-08 14:30:09,151 [Thread=16] INFO - Measure StartPoint:1018.88903808594,869.922668457031, EndPoint:1017.54858398438,1189.6884765625, PixelDistance:319.768618 2022-09-08 14:30:09,152 [Thread=16] INFO - DerivativeMeasure timespan = 9.4998 2022-09-08 14:30:09,923 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:30:09,974 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.410951936925 2022-09-08 14:30:09,974 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.0627965411447 2022-09-08 14:30:09,974 [Thread=13] INFO - Measure angle is -90.236874 2022-09-08 14:30:09,977 [Thread=13] INFO - Measure StartPoint:1021.65765380859,869.9208984375, EndPoint:1020.33587646484,1189.64587402344, PixelDistance:319.727708 2022-09-08 14:30:09,977 [Thread=13] INFO - DerivativeMeasure timespan = 2.4218 2022-09-08 14:30:10,781 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:30:10,838 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.2568506643097 2022-09-08 14:30:10,838 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.2537049207763 2022-09-08 14:30:10,838 [Thread=13] INFO - Measure angle is -90.255278 2022-09-08 14:30:10,842 [Thread=13] INFO - Measure StartPoint:979.704895019531,869.792419433594, EndPoint:978.280456542969,1189.50317382813, PixelDistance:319.713928 2022-09-08 14:30:10,842 [Thread=13] INFO - DerivativeMeasure timespan = 4.0785 2022-09-08 14:30:12,258 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 14:30:12,264 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 14:30:12,276 [Thread=7] INFO - 单轴触发了 2022-09-08 14:30:12,276 [Thread=7] INFO - 该轴是Z 2022-09-08 14:30:12,276 [Thread=7] INFO - 进入MoveSingleAxis_1 2022-09-08 14:30:12,276 [Thread=7] INFO - 该轴是Z,目标位置是-2.42110000095367 2022-09-08 14:30:12,276 [Thread=7] INFO - 步进失败 2022-09-08 14:30:12,276 [Thread=7] INFO - SwitchOffsetZ:0.051 2022-09-08 14:30:12,281 [Thread=7] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:30:12,281 [Thread=7] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:30:12,281 [Thread=7] INFO - Longth长度152.4 2022-09-08 14:30:12,281 [Thread=7] INFO - 进入getLongth 2022-09-08 14:30:12,281 [Thread=7] INFO - 目标坐标X-46.630945Y-0.879021 2022-09-08 14:30:12,281 [Thread=7] INFO - 晶圆的大小6 2022-09-08 14:30:12,282 [Thread=7] INFO - 晶圆的宽高152.4 2022-09-08 14:30:12,282 [Thread=7] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:30:12,282 [Thread=7] INFO - X+安全坐标-118.61 2022-09-08 14:30:12,282 [Thread=7] INFO - X-安全坐标43.79 2022-09-08 14:30:12,282 [Thread=7] INFO - Y上安全坐标-42.1307 2022-09-08 14:30:12,282 [Thread=7] INFO - Y下安全坐标120.2693 2022-09-08 14:30:12,282 [Thread=7] INFO - 双轴-目标点在范围内 2022-09-08 14:30:13,317 [Thread=15] INFO - stageout currentPos:-2.4213, currentVelocity:2, delayTime:1260, point.Z:-0.5 2022-09-08 14:30:13,317 [Thread=15] INFO - stage out homez 2022-09-08 14:30:16,595 [Thread=15] INFO - stage out home ok 2022-09-08 14:30:16,598 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:30:16,599 [Thread=15] INFO - stagein homez 2022-09-08 14:30:16,599 [Thread=15] INFO - stagein home ok 2022-09-08 14:30:16,599 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:30:16,599 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:30:16,599 [Thread=15] INFO - 进入getLongth 2022-09-08 14:30:16,599 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 14:30:16,599 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:30:16,600 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:30:16,600 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:30:16,600 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:30:16,600 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:30:16,600 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:30:16,600 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:30:16,601 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 14:30:16,601 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:32:19,283 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 14:32:19,286 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 14:32:19,287 [Thread=3] INFO - 单轴触发了 2022-09-08 14:32:19,287 [Thread=3] INFO - 该轴是Z 2022-09-08 14:32:19,287 [Thread=3] INFO - 进入MoveSingleAxis_1 2022-09-08 14:32:19,287 [Thread=3] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:32:19,287 [Thread=3] INFO - 步进失败 2022-09-08 14:32:19,287 [Thread=3] INFO - SwitchOffsetZ:0 2022-09-08 14:32:19,296 [Thread=3] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:32:19,297 [Thread=3] INFO - stagein homez 2022-09-08 14:32:19,297 [Thread=3] INFO - stagein home ok 2022-09-08 14:32:19,297 [Thread=3] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:32:19,297 [Thread=3] INFO - Longth长度152.4 2022-09-08 14:32:19,297 [Thread=3] INFO - 进入getLongth 2022-09-08 14:32:19,297 [Thread=3] INFO - 目标坐标X-100Y-90 2022-09-08 14:32:19,298 [Thread=3] INFO - 晶圆的大小6 2022-09-08 14:32:19,298 [Thread=3] INFO - 晶圆的宽高152.4 2022-09-08 14:32:19,298 [Thread=3] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:19,298 [Thread=3] INFO - X+安全坐标-118.61 2022-09-08 14:32:19,298 [Thread=3] INFO - X-安全坐标43.79 2022-09-08 14:32:19,298 [Thread=3] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:19,298 [Thread=3] INFO - Y下安全坐标120.2693 2022-09-08 14:32:19,298 [Thread=3] INFO - 双轴-目标点不在范围内 2022-09-08 14:32:19,298 [Thread=3] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:32:20,296 [Thread=27] INFO - stagein currentPos:-0.0144, currentVelocity:2, delayTime:542, point.Z:-0.5 2022-09-08 14:32:20,296 [Thread=27] INFO - stagein homez 2022-09-08 14:32:22,856 [Thread=27] INFO - stagein home ok 2022-09-08 14:32:22,859 [Thread=27] INFO - StageBack: waferSize = 6 2022-09-08 14:32:22,862 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:32:22,863 [Thread=27] INFO - stagein homez 2022-09-08 14:32:22,863 [Thread=27] INFO - stagein home ok 2022-09-08 14:32:22,863 [Thread=27] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:32:22,863 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:32:22,863 [Thread=27] INFO - 进入getLongth 2022-09-08 14:32:22,863 [Thread=27] INFO - 目标坐标X38.79Y115.2693 2022-09-08 14:32:22,863 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:32:22,863 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:32:22,863 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:22,863 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:32:22,864 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:32:22,864 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:22,864 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:32:22,864 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:32:31,944 [Thread=27] INFO - 单轴触发了 2022-09-08 14:32:31,944 [Thread=27] INFO - 该轴是Z 2022-09-08 14:32:31,944 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:32:31,945 [Thread=27] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 14:32:31,945 [Thread=27] INFO - 步进失败 2022-09-08 14:32:33,720 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:32:33,720 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:32:33,720 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:32:33,720 [Thread=1] INFO - 进入getLongth 2022-09-08 14:32:33,720 [Thread=1] INFO - 目标坐标X-87.77Y-0.395700000000005 2022-09-08 14:32:33,720 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:32:33,720 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:32:33,720 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:33,720 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:32:33,720 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:32:33,721 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:33,721 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:32:33,721 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:32:41,905 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:32:42,018 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 14:32:43,037 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:32:43,038 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:32:44,859 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:32:44,859 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:32:44,860 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:32:44,860 [Thread=1] INFO - 进入getLongth 2022-09-08 14:32:44,860 [Thread=1] INFO - 目标坐标X-88.115532Y-0.201415 2022-09-08 14:32:44,860 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:32:44,860 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:32:44,860 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:44,860 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:32:44,860 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:32:44,860 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:44,860 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:32:44,860 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:32:48,478 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 14:32:48,481 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:32:48,493 [Thread=27] INFO - 单轴触发了 2022-09-08 14:32:48,494 [Thread=27] INFO - 该轴是Z 2022-09-08 14:32:48,494 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:32:48,494 [Thread=27] INFO - 该轴是Z,目标位置是-2.39070000138283 2022-09-08 14:32:48,494 [Thread=27] INFO - 步进失败 2022-09-08 14:32:48,494 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 14:32:48,499 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:32:48,500 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:32:48,500 [Thread=27] INFO - Longth长度152.4 2022-09-08 14:32:48,500 [Thread=27] INFO - 进入getLongth 2022-09-08 14:32:48,500 [Thread=27] INFO - 目标坐标X-88.162532Y-0.279415 2022-09-08 14:32:48,500 [Thread=27] INFO - 晶圆的大小6 2022-09-08 14:32:48,500 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 14:32:48,501 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:48,501 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:32:48,501 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 14:32:48,501 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:48,501 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:32:48,501 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 14:32:50,494 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:32:51,791 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:32:51,792 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:32:51,792 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:32:51,792 [Thread=1] INFO - 进入getLongth 2022-09-08 14:32:51,792 [Thread=1] INFO - 目标坐标X-88.171092Y-0.299946 2022-09-08 14:32:51,792 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:32:51,792 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:32:51,792 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:51,792 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:32:51,793 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:32:51,793 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:51,793 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:32:51,793 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:32:54,011 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:32:54,014 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:32:54,025 [Thread=4] INFO - 单轴触发了 2022-09-08 14:32:54,025 [Thread=4] INFO - 该轴是Z 2022-09-08 14:32:54,025 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:32:54,025 [Thread=4] INFO - 该轴是Z,目标位置是-2.3752999976635 2022-09-08 14:32:54,026 [Thread=4] INFO - 步进失败 2022-09-08 14:32:54,026 [Thread=4] INFO - SwitchOffsetZ:0.006300002 2022-09-08 14:32:54,030 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:32:54,031 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:32:54,031 [Thread=4] INFO - Longth长度152.4 2022-09-08 14:32:54,031 [Thread=4] INFO - 进入getLongth 2022-09-08 14:32:54,031 [Thread=4] INFO - 目标坐标X-88.181092Y-0.302946 2022-09-08 14:32:54,031 [Thread=4] INFO - 晶圆的大小6 2022-09-08 14:32:54,031 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 14:32:54,031 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:54,031 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:32:54,031 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 14:32:54,031 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:54,032 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:32:54,032 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:32:56,019 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:32:57,162 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:32:57,162 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:32:57,163 [Thread=1] INFO - Longth长度152.4 2022-09-08 14:32:57,163 [Thread=1] INFO - 进入getLongth 2022-09-08 14:32:57,163 [Thread=1] INFO - 目标坐标X-88.179166Y-0.299839 2022-09-08 14:32:57,163 [Thread=1] INFO - 晶圆的大小6 2022-09-08 14:32:57,163 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 14:32:57,163 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:32:57,163 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:32:57,163 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 14:32:57,163 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 14:32:57,163 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:32:57,163 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:32:59,840 [Thread=19] INFO - 单轴触发了 2022-09-08 14:32:59,841 [Thread=19] INFO - 该轴是Z 2022-09-08 14:32:59,841 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:32:59,841 [Thread=19] INFO - 该轴是Z,目标位置是-2.3727000000095 2022-09-08 14:32:59,841 [Thread=19] INFO - 步进失败 2022-09-08 14:33:00,086 [Thread=21] INFO - 单轴触发了 2022-09-08 14:33:00,086 [Thread=21] INFO - 该轴是Z 2022-09-08 14:33:00,086 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:00,087 [Thread=21] INFO - 该轴是Z,目标位置是-2.3729000000095 2022-09-08 14:33:00,087 [Thread=21] INFO - 步进失败 2022-09-08 14:33:00,301 [Thread=20] INFO - 单轴触发了 2022-09-08 14:33:00,301 [Thread=20] INFO - 该轴是Z 2022-09-08 14:33:00,301 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:00,301 [Thread=20] INFO - 该轴是Z,目标位置是-2.3731000000095 2022-09-08 14:33:00,302 [Thread=20] INFO - 步进失败 2022-09-08 14:33:00,509 [Thread=19] INFO - 单轴触发了 2022-09-08 14:33:00,509 [Thread=19] INFO - 该轴是Z 2022-09-08 14:33:00,509 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:00,510 [Thread=19] INFO - 该轴是Z,目标位置是-2.3731000000095 2022-09-08 14:33:00,510 [Thread=19] INFO - 步进失败 2022-09-08 14:33:00,742 [Thread=21] INFO - 单轴触发了 2022-09-08 14:33:00,742 [Thread=21] INFO - 该轴是Z 2022-09-08 14:33:00,742 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:00,743 [Thread=21] INFO - 该轴是Z,目标位置是-2.3735000000095 2022-09-08 14:33:00,743 [Thread=21] INFO - 步进失败 2022-09-08 14:33:00,956 [Thread=20] INFO - 单轴触发了 2022-09-08 14:33:00,956 [Thread=20] INFO - 该轴是Z 2022-09-08 14:33:00,956 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:00,957 [Thread=20] INFO - 该轴是Z,目标位置是-2.3735000000095 2022-09-08 14:33:00,957 [Thread=20] INFO - 步进失败 2022-09-08 14:33:01,795 [Thread=19] INFO - 单轴触发了 2022-09-08 14:33:01,795 [Thread=19] INFO - 该轴是Z 2022-09-08 14:33:01,796 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:01,796 [Thread=19] INFO - 该轴是Z,目标位置是-2.3739000000095 2022-09-08 14:33:01,796 [Thread=19] INFO - 步进失败 2022-09-08 14:33:04,716 [Thread=6] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:33:04,770 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:33:04,770 [Thread=6] INFO - Measure angle is 0 2022-09-08 14:33:04,772 [Thread=6] INFO - Measure StartPoint:931.90576171875,1027, EndPoint:1093.27709960938,1027, PixelDistance:161.371338 2022-09-08 14:33:04,772 [Thread=6] INFO - DerivativeMeasure timespan = 1.9907 2022-09-08 14:33:05,663 [Thread=6] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:33:05,715 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0.341200239158737 2022-09-08 14:33:05,716 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:33:05,717 [Thread=6] INFO - Measure angle is -0.1706 2022-09-08 14:33:05,719 [Thread=6] INFO - Measure StartPoint:931.885559082031,1039.73461914063, EndPoint:1093.21484375,1040.21496582031, PixelDistance:161.33 2022-09-08 14:33:05,719 [Thread=6] INFO - DerivativeMeasure timespan = 2.0788 2022-09-08 14:33:06,767 [Thread=6] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:33:06,819 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0.281726493500732 2022-09-08 14:33:06,888 [Thread=6] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:33:06,888 [Thread=6] INFO - Measure angle is -0.140863 2022-09-08 14:33:06,890 [Thread=6] INFO - Measure StartPoint:931.894958496094,1029.88415527344, EndPoint:1093.27282714844,1030.28088378906, PixelDistance:161.378356 2022-09-08 14:33:06,890 [Thread=6] INFO - DerivativeMeasure timespan = 2.354 2022-09-08 14:33:08,165 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 14:33:08,168 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 14:33:08,180 [Thread=28] INFO - 单轴触发了 2022-09-08 14:33:08,180 [Thread=28] INFO - 该轴是Z 2022-09-08 14:33:08,180 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:33:08,180 [Thread=28] INFO - 该轴是Z,目标位置是-2.32290000095367 2022-09-08 14:33:08,180 [Thread=28] INFO - 步进失败 2022-09-08 14:33:08,181 [Thread=28] INFO - SwitchOffsetZ:0.051 2022-09-08 14:33:08,189 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:33:08,189 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:33:08,189 [Thread=28] INFO - Longth长度152.4 2022-09-08 14:33:08,189 [Thread=28] INFO - 进入getLongth 2022-09-08 14:33:08,189 [Thread=28] INFO - 目标坐标X-88.122166Y-0.218839 2022-09-08 14:33:08,189 [Thread=28] INFO - 晶圆的大小6 2022-09-08 14:33:08,190 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 14:33:08,190 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:33:08,190 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:33:08,190 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 14:33:08,190 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 14:33:08,190 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:33:08,190 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:33:09,194 [Thread=15] INFO - stageout currentPos:-2.3231, currentVelocity:2, delayTime:1211, point.Z:-0.5 2022-09-08 14:33:09,195 [Thread=15] INFO - stage out homez 2022-09-08 14:33:12,424 [Thread=15] INFO - stage out home ok 2022-09-08 14:33:12,427 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:33:12,428 [Thread=15] INFO - stagein homez 2022-09-08 14:33:12,428 [Thread=15] INFO - stagein home ok 2022-09-08 14:33:12,428 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:33:12,428 [Thread=15] INFO - Longth长度152.4 2022-09-08 14:33:12,428 [Thread=15] INFO - 进入getLongth 2022-09-08 14:33:12,429 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 14:33:12,429 [Thread=15] INFO - 晶圆的大小6 2022-09-08 14:33:12,429 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 14:33:12,429 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:33:12,429 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:33:12,429 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 14:33:12,429 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 14:33:12,430 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:33:12,430 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 14:33:12,430 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:37:22,770 [Thread=28] INFO - SwitchIndex index:0 2022-09-08 14:37:22,773 [Thread=28] INFO - Switch Lens:Broadcast Event 2022-09-08 14:37:22,773 [Thread=27] INFO - 单轴触发了 2022-09-08 14:37:22,774 [Thread=27] INFO - 该轴是Z 2022-09-08 14:37:22,774 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:22,774 [Thread=27] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:37:22,774 [Thread=27] INFO - 步进失败 2022-09-08 14:37:22,775 [Thread=27] INFO - SwitchOffsetZ:0 2022-09-08 14:37:22,793 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 14:37:22,794 [Thread=27] INFO - stagein homez 2022-09-08 14:37:22,794 [Thread=27] INFO - stagein home ok 2022-09-08 14:37:22,794 [Thread=27] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 14:37:22,794 [Thread=27] INFO - Longth长度127 2022-09-08 14:37:22,794 [Thread=27] INFO - 进入getLongth 2022-09-08 14:37:22,794 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 14:37:22,794 [Thread=27] INFO - 晶圆的大小5 2022-09-08 14:37:22,795 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 14:37:22,795 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:37:22,795 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 14:37:22,795 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 14:37:22,795 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 14:37:22,795 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 14:37:22,795 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 14:37:22,795 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:37:23,795 [Thread=28] INFO - stagein currentPos:-0.1402, currentVelocity:2, delayTime:479, point.Z:-0.5 2022-09-08 14:37:23,795 [Thread=28] INFO - stagein homez 2022-09-08 14:37:26,289 [Thread=28] INFO - stagein home ok 2022-09-08 14:37:26,292 [Thread=28] INFO - StageBack: waferSize = 5 2022-09-08 14:37:26,296 [Thread=28] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 14:37:26,296 [Thread=28] INFO - stagein homez 2022-09-08 14:37:26,297 [Thread=28] INFO - stagein home ok 2022-09-08 14:37:26,297 [Thread=28] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 14:37:26,297 [Thread=28] INFO - Longth长度127 2022-09-08 14:37:26,297 [Thread=28] INFO - 进入getLongth 2022-09-08 14:37:26,297 [Thread=28] INFO - 目标坐标X13.39Y115.2693 2022-09-08 14:37:26,297 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:37:26,297 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:37:26,297 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:37:26,298 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:37:26,298 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:37:26,298 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:37:26,298 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:37:26,298 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:37:33,386 [Thread=28] INFO - 单轴触发了 2022-09-08 14:37:33,386 [Thread=28] INFO - 该轴是Z 2022-09-08 14:37:33,386 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:33,387 [Thread=28] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 14:37:33,387 [Thread=28] INFO - 步进失败 2022-09-08 14:37:38,376 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:37:44,331 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:44,331 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:44,331 [Thread=21] INFO - Longth长度127 2022-09-08 14:37:44,331 [Thread=21] INFO - 进入getLongth 2022-09-08 14:37:44,331 [Thread=21] INFO - 目标坐标X-6.61Y95.2693 2022-09-08 14:37:44,332 [Thread=21] INFO - 晶圆的大小5 2022-09-08 14:37:44,332 [Thread=21] INFO - 晶圆的宽高127 2022-09-08 14:37:44,332 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:37:44,332 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 14:37:44,332 [Thread=21] INFO - X-安全坐标18.39 2022-09-08 14:37:44,332 [Thread=21] INFO - Y上安全坐标-16.7307 2022-09-08 14:37:44,332 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 14:37:44,332 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 14:37:46,314 [Thread=20] INFO - 单轴触发了 2022-09-08 14:37:46,318 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:46,319 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:46,319 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:37:46,319 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:46,319 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:37:46,319 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:37:46,319 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:37:47,265 [Thread=19] INFO - 单轴触发了 2022-09-08 14:37:47,268 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:47,268 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:47,268 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:37:47,268 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:47,268 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:37:47,268 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:37:47,268 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:37:48,066 [Thread=21] INFO - 单轴触发了 2022-09-08 14:37:48,070 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:48,070 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:48,070 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:37:48,070 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:48,070 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:37:48,070 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:37:48,070 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:37:49,909 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:37:49,909 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:37:49,910 [Thread=20] INFO - 该轴是Y,目标位置是75.2693 2022-09-08 14:37:49,910 [Thread=20] INFO - 步进失败 2022-09-08 14:37:49,910 [Thread=20] INFO - 单轴触发了 2022-09-08 14:37:49,913 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:49,914 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:49,914 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:37:49,914 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:49,914 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:37:49,914 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:37:49,914 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:37:50,796 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:37:50,796 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:37:50,796 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:37:50,797 [Thread=20] INFO - 该轴是Y,目标位置是15.2693 2022-09-08 14:37:50,798 [Thread=20] INFO - 步进失败 2022-09-08 14:37:50,796 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:37:50,798 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:37:50,798 [Thread=19] INFO - 该轴是Y,目标位置是55.2693 2022-09-08 14:37:50,799 [Thread=19] INFO - 步进失败 2022-09-08 14:37:50,796 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:37:50,799 [Thread=21] INFO - 该轴是Y,目标位置是35.2693 2022-09-08 14:37:50,799 [Thread=21] INFO - 步进失败 2022-09-08 14:37:51,081 [Thread=20] INFO - 单轴触发了 2022-09-08 14:37:51,085 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:51,085 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:51,085 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:37:51,085 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:51,085 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:37:51,085 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:37:51,085 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:37:52,560 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:37:52,560 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:37:52,560 [Thread=20] INFO - 该轴是Y,目标位置是-4.7307 2022-09-08 14:37:52,560 [Thread=20] INFO - 步进失败 2022-09-08 14:37:58,632 [Thread=19] INFO - 单轴触发了 2022-09-08 14:37:58,636 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:37:58,636 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:37:58,636 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:37:58,636 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:37:58,636 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:37:58,636 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:37:58,636 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:38:00,495 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:38:00,495 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:38:00,495 [Thread=19] INFO - 该轴是Y,目标位置是0.269300000000001 2022-09-08 14:38:00,496 [Thread=19] INFO - 步进失败 2022-09-08 14:38:04,940 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:38:04,940 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:38:05,734 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:05,734 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:05,734 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:05,734 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:05,734 [Thread=1] INFO - 目标坐标X-6.882982Y0.841702 2022-09-08 14:38:05,735 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:05,735 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:05,735 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:05,735 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:05,735 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:05,735 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:05,735 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:05,735 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:07,354 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:07,355 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:07,355 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:07,355 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:07,355 [Thread=1] INFO - 目标坐标X-6.894664Y1.449149 2022-09-08 14:38:07,355 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:07,355 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:07,355 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:07,355 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:07,355 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:07,355 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:07,355 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:07,355 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:08,517 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:08,517 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:08,517 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:08,517 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:08,517 [Thread=1] INFO - 目标坐标X-6.581718Y2.453773 2022-09-08 14:38:08,517 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:08,517 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:08,518 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:08,518 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:08,518 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:08,518 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:08,518 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:08,518 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:09,946 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:09,946 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:09,946 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:09,946 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:09,947 [Thread=1] INFO - 目标坐标X-6.981354Y3.224148 2022-09-08 14:38:09,947 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:09,947 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:09,947 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:09,947 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:09,947 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:09,947 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:09,947 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:09,947 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:11,168 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:11,169 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:11,169 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:11,169 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:11,169 [Thread=1] INFO - 目标坐标X-7.515637Y3.967471 2022-09-08 14:38:11,169 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:11,169 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:11,169 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:11,169 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:11,169 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:11,169 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:11,170 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:11,170 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:12,561 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:12,561 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:12,561 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:12,561 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:12,561 [Thread=1] INFO - 目标坐标X-7.869161Y4.620415 2022-09-08 14:38:12,562 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:12,562 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:12,562 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:12,562 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:12,562 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:12,562 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:12,562 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:12,562 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:14,089 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:14,089 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:14,090 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:14,090 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:14,090 [Thread=1] INFO - 目标坐标X-8.309376Y5.457806 2022-09-08 14:38:14,090 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:14,090 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:14,090 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:14,090 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:14,090 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:14,090 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:14,090 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:14,090 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:15,641 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:15,641 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:15,642 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:15,642 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:15,642 [Thread=1] INFO - 目标坐标X-8.184567Y6.456896 2022-09-08 14:38:15,642 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:15,642 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:15,642 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:15,642 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:15,642 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:15,642 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:15,642 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:15,642 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:17,261 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:17,261 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:17,261 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:17,261 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:17,261 [Thread=1] INFO - 目标坐标X-8.196249Y7.411719 2022-09-08 14:38:17,261 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:17,261 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:17,262 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:17,262 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:17,262 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:17,262 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:17,262 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:17,262 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:19,325 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:19,325 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:19,326 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:19,326 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:19,326 [Thread=1] INFO - 目标坐标X-8.586048Y8.00318 2022-09-08 14:38:19,326 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:19,326 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:19,326 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:19,326 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:19,326 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:19,327 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:19,327 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:19,327 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:22,021 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:22,021 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:22,021 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:22,023 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:22,023 [Thread=1] INFO - 目标坐标X-8.607567Y7.878371 2022-09-08 14:38:22,023 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:22,023 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:22,023 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:22,023 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:22,023 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:22,023 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:22,023 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:22,023 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:25,927 [Thread=21] INFO - 单轴触发了 2022-09-08 14:38:25,934 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:25,934 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:25,934 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:38:25,934 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:25,934 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:38:25,934 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:38:25,934 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:38:26,383 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:38:26,383 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:38:26,383 [Thread=21] INFO - 该轴是X,目标位置是-13.607567 2022-09-08 14:38:26,383 [Thread=21] INFO - 步进失败 2022-09-08 14:38:29,366 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:38:29,369 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:38:29,379 [Thread=4] INFO - 单轴触发了 2022-09-08 14:38:29,380 [Thread=4] INFO - 该轴是Z 2022-09-08 14:38:29,380 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:29,380 [Thread=4] INFO - 该轴是Z,目标位置是-7.49429999904633 2022-09-08 14:38:29,380 [Thread=4] INFO - 步进失败 2022-09-08 14:38:29,380 [Thread=4] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:38:29,385 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:29,385 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:29,385 [Thread=4] INFO - Longth长度127 2022-09-08 14:38:29,385 [Thread=4] INFO - 进入getLongth 2022-09-08 14:38:29,385 [Thread=4] INFO - 目标坐标X-13.664567Y7.797371 2022-09-08 14:38:29,385 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:38:29,386 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:38:29,386 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:29,386 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:38:29,386 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:38:29,386 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:29,386 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:38:29,386 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:38:31,397 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:38:33,462 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:33,462 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:33,462 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:33,462 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:33,462 [Thread=1] INFO - 目标坐标X-13.678858Y7.780098 2022-09-08 14:38:33,462 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:33,462 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:33,462 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:33,462 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:33,463 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:33,463 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:33,463 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:33,463 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:38,339 [Thread=20] INFO - 单轴触发了 2022-09-08 14:38:38,339 [Thread=20] INFO - 该轴是Z 2022-09-08 14:38:38,339 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:38,339 [Thread=20] INFO - 该轴是Z,目标位置是-7.4923999999905 2022-09-08 14:38:38,339 [Thread=20] INFO - 步进失败 2022-09-08 14:38:38,490 [Thread=19] INFO - 单轴触发了 2022-09-08 14:38:38,490 [Thread=19] INFO - 该轴是Z 2022-09-08 14:38:38,490 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:38,491 [Thread=19] INFO - 该轴是Z,目标位置是-7.4923999999905 2022-09-08 14:38:38,491 [Thread=19] INFO - 步进失败 2022-09-08 14:38:41,096 [Thread=21] INFO - 单轴触发了 2022-09-08 14:38:41,096 [Thread=21] INFO - 该轴是Z 2022-09-08 14:38:41,097 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:41,097 [Thread=21] INFO - 该轴是Z,目标位置是-7.4924000000095 2022-09-08 14:38:41,097 [Thread=21] INFO - 步进失败 2022-09-08 14:38:41,272 [Thread=20] INFO - 单轴触发了 2022-09-08 14:38:41,272 [Thread=20] INFO - 该轴是Z 2022-09-08 14:38:41,272 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:41,273 [Thread=20] INFO - 该轴是Z,目标位置是-7.4924000000095 2022-09-08 14:38:41,273 [Thread=20] INFO - 步进失败 2022-09-08 14:38:41,458 [Thread=19] INFO - 单轴触发了 2022-09-08 14:38:41,458 [Thread=19] INFO - 该轴是Z 2022-09-08 14:38:41,458 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:38:41,459 [Thread=19] INFO - 该轴是Z,目标位置是-7.4928000000095 2022-09-08 14:38:41,459 [Thread=19] INFO - 步进失败 2022-09-08 14:38:46,171 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:38:46,172 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:38:46,172 [Thread=1] INFO - Longth长度127 2022-09-08 14:38:46,172 [Thread=1] INFO - 进入getLongth 2022-09-08 14:38:46,172 [Thread=1] INFO - 目标坐标X-13.678858Y7.780098 2022-09-08 14:38:46,172 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:38:46,172 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:38:46,172 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:38:46,172 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:38:46,173 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:38:46,173 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:38:46,173 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:38:46,173 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:38:50,308 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:38:50,359 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.0572794043487311 2022-09-08 14:38:50,360 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:38:50,360 [Thread=30] INFO - Measure angle is -0.02864 2022-09-08 14:38:50,360 [Thread=30] INFO - Measure StartPoint:1036.6337890625,1031.99279785156, EndPoint:1066.09655761719,1032.00756835938, PixelDistance:29.462772 2022-09-08 14:38:50,360 [Thread=30] INFO - DerivativeMeasure timespan = 0.3669 2022-09-08 14:38:52,604 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:38:52,664 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:38:52,664 [Thread=30] INFO - Measure angle is 0 2022-09-08 14:38:52,665 [Thread=30] INFO - Measure StartPoint:1036.65307617188,1004, EndPoint:1066.15405273438,1004, PixelDistance:29.500977 2022-09-08 14:38:52,665 [Thread=30] INFO - DerivativeMeasure timespan = 0.4282 2022-09-08 14:38:54,146 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:38:54,203 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.474535259090764 2022-09-08 14:38:54,203 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.529717781304321 2022-09-08 14:38:54,203 [Thread=30] INFO - Measure angle is -0.502127 2022-09-08 14:38:54,203 [Thread=30] INFO - Measure StartPoint:1036.81188964844,945.779235839844, EndPoint:1066.31921386719,946.037841796875, PixelDistance:29.508457 2022-09-08 14:38:54,203 [Thread=30] INFO - DerivativeMeasure timespan = 0.4444 2022-09-08 14:38:56,321 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:38:56,374 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.295884612826243 2022-09-08 14:38:56,374 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:38:56,374 [Thread=30] INFO - Measure angle is -0.147942 2022-09-08 14:38:56,375 [Thread=30] INFO - Measure StartPoint:1101.05358886719,961.935607910156, EndPoint:1130.65014648438,962.012023925781, PixelDistance:29.596656 2022-09-08 14:38:56,375 [Thread=30] INFO - DerivativeMeasure timespan = 0.4663 2022-09-08 14:39:00,440 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:00,491 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.419960626807432 2022-09-08 14:39:00,492 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.450266832197475 2022-09-08 14:39:00,492 [Thread=30] INFO - Measure angle is -0.435114 2022-09-08 14:39:00,492 [Thread=30] INFO - Measure StartPoint:1066.20764160156,965.842102050781, EndPoint:1101.06457519531,966.106811523438, PixelDistance:34.857939 2022-09-08 14:39:00,492 [Thread=30] INFO - DerivativeMeasure timespan = 0.5002 2022-09-08 14:39:03,840 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:03,897 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.457281379413359 2022-09-08 14:39:03,897 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.377306038940051 2022-09-08 14:39:03,897 [Thread=7] INFO - Measure angle is -0.417294 2022-09-08 14:39:03,898 [Thread=7] INFO - Measure StartPoint:1066.24072265625,955.826965332031, EndPoint:1101.08984375,956.080749511719, PixelDistance:34.850045 2022-09-08 14:39:03,898 [Thread=7] INFO - DerivativeMeasure timespan = 0.5791 2022-09-08 14:39:07,261 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:39:07,262 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:39:08,622 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:08,622 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:08,622 [Thread=1] INFO - Longth长度127 2022-09-08 14:39:08,622 [Thread=1] INFO - 进入getLongth 2022-09-08 14:39:08,622 [Thread=1] INFO - 目标坐标X-13.678858Y7.798521 2022-09-08 14:39:08,622 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:39:08,622 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:39:08,622 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:39:08,623 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:39:08,623 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:39:08,623 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:39:08,623 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:39:08,623 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:39:15,705 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:15,758 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:15,759 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:15,759 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:39:15,759 [Thread=7] INFO - Measure StartPoint:1087,941.494689941406, EndPoint:1087,972.249328613281, PixelDistance:30.754639 2022-09-08 14:39:15,759 [Thread=7] INFO - DerivativeMeasure timespan = 0.2523 2022-09-08 14:39:19,510 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:19,560 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:19,560 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:19,560 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:39:19,560 [Thread=7] INFO - Measure StartPoint:1095,941.504638671875, EndPoint:1095,972.254943847656, PixelDistance:30.750305 2022-09-08 14:39:19,561 [Thread=7] INFO - DerivativeMeasure timespan = 0.3155 2022-09-08 14:39:21,735 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:21,788 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.3340609897063 2022-09-08 14:39:21,789 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:21,789 [Thread=7] INFO - Measure angle is -90.16703 2022-09-08 14:39:21,789 [Thread=7] INFO - Measure StartPoint:1079.07434082031,941.504577636719, EndPoint:1078.98486328125,972.179138183594, PixelDistance:30.674691 2022-09-08 14:39:21,789 [Thread=7] INFO - DerivativeMeasure timespan = 0.2821 2022-09-08 14:39:24,621 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:24,687 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.1804990393589 2022-09-08 14:39:24,688 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:24,688 [Thread=7] INFO - Measure angle is -90.09025 2022-09-08 14:39:24,688 [Thread=7] INFO - Measure StartPoint:1081.03234863281,941.477722167969, EndPoint:1080.98388671875,972.249267578125, PixelDistance:30.771584 2022-09-08 14:39:24,688 [Thread=7] INFO - DerivativeMeasure timespan = 0.3433 2022-09-08 14:39:28,837 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:28,896 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:28,897 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.2984328876838 2022-09-08 14:39:28,897 [Thread=7] INFO - Measure angle is -90.149216 2022-09-08 14:39:28,897 [Thread=7] INFO - Measure StartPoint:1078.03515625,941.491455078125, EndPoint:1077.955078125,972.2666015625, PixelDistance:30.775251 2022-09-08 14:39:28,897 [Thread=7] INFO - DerivativeMeasure timespan = 0.2503 2022-09-08 14:39:30,483 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:39:30,532 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:30,532 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:39:30,532 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:39:30,533 [Thread=7] INFO - Measure StartPoint:1140,972.315063476563, EndPoint:1140,1006.28021240234, PixelDistance:33.965149 2022-09-08 14:39:30,533 [Thread=7] INFO - DerivativeMeasure timespan = 0.222 2022-09-08 14:39:34,440 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:39:34,444 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:39:34,455 [Thread=15] INFO - 单轴触发了 2022-09-08 14:39:34,456 [Thread=15] INFO - 该轴是Z 2022-09-08 14:39:34,456 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:34,456 [Thread=15] INFO - 该轴是Z,目标位置是-7.44180000095367 2022-09-08 14:39:34,456 [Thread=15] INFO - 步进失败 2022-09-08 14:39:34,456 [Thread=15] INFO - SwitchOffsetZ:0.051 2022-09-08 14:39:34,470 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:34,470 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:34,470 [Thread=15] INFO - Longth长度127 2022-09-08 14:39:34,470 [Thread=15] INFO - 进入getLongth 2022-09-08 14:39:34,470 [Thread=15] INFO - 目标坐标X-13.621858Y7.879521 2022-09-08 14:39:34,470 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:39:34,470 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:39:34,471 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:39:34,471 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:39:34,471 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:39:34,471 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:39:34,471 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:39:34,471 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:39:38,773 [Thread=21] INFO - 单轴触发了 2022-09-08 14:39:38,777 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:38,777 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:38,777 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:39:38,777 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:38,777 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:39:38,777 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:39:38,777 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:39:39,221 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:39:39,221 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:39:39,222 [Thread=21] INFO - 该轴是X,目标位置是-18.621858 2022-09-08 14:39:39,222 [Thread=21] INFO - 步进失败 2022-09-08 14:39:41,030 [Thread=20] INFO - 单轴触发了 2022-09-08 14:39:41,033 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:41,033 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:41,033 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:39:41,034 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:41,034 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:39:41,034 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:39:41,034 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:39:41,485 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:39:41,485 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:39:41,485 [Thread=20] INFO - 该轴是X,目标位置是-23.621858 2022-09-08 14:39:41,486 [Thread=20] INFO - 步进失败 2022-09-08 14:39:43,071 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:39:45,598 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:39:45,600 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:39:45,612 [Thread=15] INFO - 单轴触发了 2022-09-08 14:39:45,613 [Thread=15] INFO - 该轴是Z 2022-09-08 14:39:45,613 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:45,613 [Thread=15] INFO - 该轴是Z,目标位置是-7.50819999904633 2022-09-08 14:39:45,613 [Thread=15] INFO - 步进失败 2022-09-08 14:39:45,613 [Thread=15] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:39:45,618 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:45,619 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:45,619 [Thread=15] INFO - Longth长度127 2022-09-08 14:39:45,619 [Thread=15] INFO - 进入getLongth 2022-09-08 14:39:45,619 [Thread=15] INFO - 目标坐标X-23.678858Y7.798521 2022-09-08 14:39:45,619 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:39:45,619 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:39:45,619 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:39:45,619 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:39:45,619 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:39:45,619 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:39:45,620 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:39:45,620 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:39:47,630 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:39:49,777 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:39:49,777 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:39:51,383 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:51,384 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:51,384 [Thread=1] INFO - Longth长度127 2022-09-08 14:39:51,384 [Thread=1] INFO - 进入getLongth 2022-09-08 14:39:51,384 [Thread=1] INFO - 目标坐标X-23.676248Y7.780378 2022-09-08 14:39:51,384 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:39:51,384 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:39:51,384 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:39:51,384 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:39:51,384 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:39:51,384 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:39:51,384 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:39:51,384 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:39:54,911 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:39:54,911 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:39:54,912 [Thread=1] INFO - Longth长度127 2022-09-08 14:39:54,912 [Thread=1] INFO - 进入getLongth 2022-09-08 14:39:54,912 [Thread=1] INFO - 目标坐标X-23.676714Y7.777396 2022-09-08 14:39:54,912 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:39:54,912 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:39:54,912 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:39:54,912 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:39:54,912 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:39:54,912 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:39:54,913 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:39:54,913 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:39:59,128 [Thread=19] INFO - 单轴触发了 2022-09-08 14:39:59,128 [Thread=19] INFO - 该轴是Z 2022-09-08 14:39:59,128 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:59,128 [Thread=19] INFO - 该轴是Z,目标位置是-7.5017000000095 2022-09-08 14:39:59,129 [Thread=19] INFO - 步进失败 2022-09-08 14:39:59,289 [Thread=21] INFO - 单轴触发了 2022-09-08 14:39:59,289 [Thread=21] INFO - 该轴是Z 2022-09-08 14:39:59,289 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:59,289 [Thread=21] INFO - 该轴是Z,目标位置是-7.5017000000095 2022-09-08 14:39:59,290 [Thread=21] INFO - 步进失败 2022-09-08 14:39:59,488 [Thread=20] INFO - 单轴触发了 2022-09-08 14:39:59,488 [Thread=20] INFO - 该轴是Z 2022-09-08 14:39:59,488 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:39:59,489 [Thread=20] INFO - 该轴是Z,目标位置是-7.5019000000095 2022-09-08 14:39:59,489 [Thread=20] INFO - 步进失败 2022-09-08 14:40:04,821 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:04,876 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 179.996670130145 2022-09-08 14:40:04,876 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:40:04,877 [Thread=30] INFO - Measure angle is -179.998335 2022-09-08 14:40:04,877 [Thread=30] INFO - Measure StartPoint:1037.02502441406,1020.99969482422, EndPoint:1006.26068115234,1021.00054931641, PixelDistance:30.764343 2022-09-08 14:40:04,877 [Thread=30] INFO - DerivativeMeasure timespan = 0.4082 2022-09-08 14:40:06,971 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:07,025 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.00281650875316866 2022-09-08 14:40:07,025 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:40:07,025 [Thread=30] INFO - Measure angle is -0.001408 2022-09-08 14:40:07,026 [Thread=30] INFO - Measure StartPoint:1006.251953125,1024.99938964844, EndPoint:1036.99853515625,1025.00024414063, PixelDistance:30.746582 2022-09-08 14:40:07,026 [Thread=30] INFO - DerivativeMeasure timespan = 0.5271 2022-09-08 14:40:08,322 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:08,369 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:40:08,370 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:40:08,370 [Thread=30] INFO - Measure angle is 0 2022-09-08 14:40:08,370 [Thread=30] INFO - Measure StartPoint:1070.61962890625,1040, EndPoint:1101.39697265625,1040, PixelDistance:30.777344 2022-09-08 14:40:08,370 [Thread=30] INFO - DerivativeMeasure timespan = 0.4977 2022-09-08 14:40:09,886 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:09,942 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.161739428341407 2022-09-08 14:40:09,942 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.505514852592076 2022-09-08 14:40:09,942 [Thread=30] INFO - Measure angle is -0.333627 2022-09-08 14:40:09,943 [Thread=30] INFO - Measure StartPoint:1070.74475097656,989.887878417969, EndPoint:1101.58264160156,990.067443847656, PixelDistance:30.838413 2022-09-08 14:40:09,943 [Thread=30] INFO - DerivativeMeasure timespan = 0.5642 2022-09-08 14:40:12,255 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:12,311 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.428549276431585 2022-09-08 14:40:12,311 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.0307953503624916 2022-09-08 14:40:12,311 [Thread=7] INFO - Measure angle is -0.229672 2022-09-08 14:40:12,312 [Thread=7] INFO - Measure StartPoint:1070.90893554688,908.903442382813, EndPoint:1101.95642089844,909.027893066406, PixelDistance:31.047735 2022-09-08 14:40:12,312 [Thread=7] INFO - DerivativeMeasure timespan = 0.4813 2022-09-08 14:40:17,825 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:17,890 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0493536711624582 2022-09-08 14:40:17,891 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.463779889760285 2022-09-08 14:40:17,891 [Thread=16] INFO - Measure angle is -0.256567 2022-09-08 14:40:17,891 [Thread=16] INFO - Measure StartPoint:1135.3759765625,903.889709472656, EndPoint:1166.47924804688,904.028991699219, PixelDistance:31.103583 2022-09-08 14:40:17,891 [Thread=16] INFO - DerivativeMeasure timespan = 0.4186 2022-09-08 14:40:27,607 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:40:27,656 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:40:27,657 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0436124753111135 2022-09-08 14:40:27,657 [Thread=16] INFO - Measure angle is -0.021806 2022-09-08 14:40:27,657 [Thread=16] INFO - Measure StartPoint:1199.18469238281,1091.99206542969, EndPoint:1229.97473144531,1092.00378417969, PixelDistance:30.790041 2022-09-08 14:40:27,657 [Thread=16] INFO - DerivativeMeasure timespan = 0.3596 2022-09-08 14:40:31,669 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:40:31,674 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:40:31,687 [Thread=28] INFO - 单轴触发了 2022-09-08 14:40:31,688 [Thread=28] INFO - 该轴是Z 2022-09-08 14:40:31,688 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:40:31,688 [Thread=28] INFO - 该轴是Z,目标位置是-7.45110000095367 2022-09-08 14:40:31,688 [Thread=28] INFO - 步进失败 2022-09-08 14:40:31,688 [Thread=28] INFO - SwitchOffsetZ:0.051 2022-09-08 14:40:31,694 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:40:31,694 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:40:31,694 [Thread=28] INFO - Longth长度127 2022-09-08 14:40:31,694 [Thread=28] INFO - 进入getLongth 2022-09-08 14:40:31,694 [Thread=28] INFO - 目标坐标X-23.619714Y7.858396 2022-09-08 14:40:31,694 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:40:31,694 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:40:31,694 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:40:31,694 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:40:31,694 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:40:31,695 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:40:31,695 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:40:31,695 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:41:16,459 [Thread=19] INFO - 单轴触发了 2022-09-08 14:41:16,464 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:41:16,464 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:41:16,464 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:41:16,464 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:16,465 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:41:16,465 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:41:16,465 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:41:16,900 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:41:16,900 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:41:16,900 [Thread=19] INFO - 该轴是X,目标位置是-18.619714 2022-09-08 14:41:16,901 [Thread=19] INFO - 步进失败 2022-09-08 14:41:17,061 [Thread=21] INFO - 单轴触发了 2022-09-08 14:41:17,065 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:41:17,065 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:41:17,065 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:41:17,065 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:17,065 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:41:17,065 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:41:17,065 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:41:17,516 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:41:17,516 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:41:17,516 [Thread=21] INFO - 该轴是X,目标位置是-13.619714 2022-09-08 14:41:17,516 [Thread=21] INFO - 步进失败 2022-09-08 14:41:17,638 [Thread=20] INFO - 单轴触发了 2022-09-08 14:41:17,643 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:41:17,643 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:41:17,643 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:41:17,643 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:17,643 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:41:17,643 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:41:17,643 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:41:18,214 [Thread=19] INFO - 单轴触发了 2022-09-08 14:41:18,217 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:41:18,219 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:41:18,219 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:41:18,219 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:18,219 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:41:18,219 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:41:18,219 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:41:18,898 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:41:18,898 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:41:18,899 [Thread=19] INFO - 该轴是X,目标位置是-3.619714 2022-09-08 14:41:18,899 [Thread=19] INFO - 步进失败 2022-09-08 14:41:18,898 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:41:18,899 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:41:18,899 [Thread=20] INFO - 该轴是X,目标位置是-8.619714 2022-09-08 14:41:18,899 [Thread=20] INFO - 步进失败 2022-09-08 14:41:20,543 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:41:32,178 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:41:32,182 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:41:32,194 [Thread=4] INFO - 单轴触发了 2022-09-08 14:41:32,195 [Thread=4] INFO - 该轴是Z 2022-09-08 14:41:32,195 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:32,195 [Thread=4] INFO - 该轴是Z,目标位置是-7.49039999904633 2022-09-08 14:41:32,196 [Thread=4] INFO - 步进失败 2022-09-08 14:41:32,196 [Thread=4] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:41:32,214 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:41:32,214 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:41:32,214 [Thread=4] INFO - Longth长度127 2022-09-08 14:41:32,214 [Thread=4] INFO - 进入getLongth 2022-09-08 14:41:32,214 [Thread=4] INFO - 目标坐标X-3.676714Y7.777396 2022-09-08 14:41:32,215 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:41:32,215 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:41:32,215 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:41:32,215 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:41:32,216 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:41:32,216 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:41:32,216 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:41:32,216 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:41:34,198 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:41:38,871 [Thread=21] INFO - 单轴触发了 2022-09-08 14:41:38,871 [Thread=21] INFO - 该轴是Z 2022-09-08 14:41:38,871 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:38,872 [Thread=21] INFO - 该轴是Z,目标位置是-7.4842000000095 2022-09-08 14:41:38,872 [Thread=21] INFO - 步进失败 2022-09-08 14:41:39,047 [Thread=19] INFO - 单轴触发了 2022-09-08 14:41:39,048 [Thread=19] INFO - 该轴是Z 2022-09-08 14:41:39,048 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:39,048 [Thread=19] INFO - 该轴是Z,目标位置是-7.4842000000095 2022-09-08 14:41:39,048 [Thread=19] INFO - 步进失败 2022-09-08 14:41:39,198 [Thread=20] INFO - 单轴触发了 2022-09-08 14:41:39,199 [Thread=20] INFO - 该轴是Z 2022-09-08 14:41:39,199 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:39,199 [Thread=20] INFO - 该轴是Z,目标位置是-7.4842000000095 2022-09-08 14:41:39,200 [Thread=20] INFO - 步进失败 2022-09-08 14:41:39,388 [Thread=21] INFO - 单轴触发了 2022-09-08 14:41:39,388 [Thread=21] INFO - 该轴是Z 2022-09-08 14:41:39,388 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:39,388 [Thread=21] INFO - 该轴是Z,目标位置是-7.4846000000095 2022-09-08 14:41:39,389 [Thread=21] INFO - 步进失败 2022-09-08 14:41:39,558 [Thread=19] INFO - 单轴触发了 2022-09-08 14:41:39,559 [Thread=19] INFO - 该轴是Z 2022-09-08 14:41:39,559 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:41:39,559 [Thread=19] INFO - 该轴是Z,目标位置是-7.4846000000095 2022-09-08 14:41:39,559 [Thread=19] INFO - 步进失败 2022-09-08 14:41:54,016 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:41:54,067 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.476674277309012 2022-09-08 14:41:54,068 [Thread=16] INFO - Measure angle is -0.476674 2022-09-08 14:41:54,068 [Thread=16] INFO - Measure StartPoint:1162.947265625,997.883056640625, EndPoint:1190.51525878906,998.112426757813, PixelDistance:27.568947 2022-09-08 14:41:54,068 [Thread=16] INFO - DerivativeMeasure timespan = 0.4563 2022-09-08 14:41:56,159 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:41:56,209 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.775472149144953 2022-09-08 14:41:56,209 [Thread=16] INFO - Measure angle is -0.775472 2022-09-08 14:41:56,209 [Thread=16] INFO - DerivativeMeasure timespan = 0.1549 2022-09-08 14:41:59,547 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:41:59,614 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:41:59,615 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:41:59,615 [Thread=7] INFO - Measure angle is 0 2022-09-08 14:41:59,615 [Thread=7] INFO - Measure StartPoint:1033.83215332031,1018, EndPoint:1061.54943847656,1018, PixelDistance:27.717285 2022-09-08 14:41:59,615 [Thread=7] INFO - DerivativeMeasure timespan = 0.416 2022-09-08 14:42:03,443 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:03,497 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.0334030379218492 2022-09-08 14:42:03,497 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:42:03,497 [Thread=7] INFO - Measure angle is -0.016702 2022-09-08 14:42:03,498 [Thread=7] INFO - Measure StartPoint:1034.13623046875,942.994812011719, EndPoint:1061.873046875,943.002868652344, PixelDistance:27.736818 2022-09-08 14:42:03,498 [Thread=7] INFO - DerivativeMeasure timespan = 0.4763 2022-09-08 14:42:05,162 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:05,209 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.29855465030246 2022-09-08 14:42:05,209 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.0546870575956975 2022-09-08 14:42:05,209 [Thread=7] INFO - Measure angle is -0.176621 2022-09-08 14:42:05,210 [Thread=7] INFO - Measure StartPoint:1034.39672851563,883.948791503906, EndPoint:1062.11596679688,884.034240722656, PixelDistance:27.71937 2022-09-08 14:42:05,210 [Thread=7] INFO - DerivativeMeasure timespan = 0.5286 2022-09-08 14:42:06,907 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:06,962 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.540109412728478 2022-09-08 14:42:06,963 [Thread=7] INFO - Measure angle is -0.540109 2022-09-08 14:42:06,963 [Thread=7] INFO - Measure StartPoint:1033.6787109375,1149.85559082031, EndPoint:1061.13134765625,1150.11437988281, PixelDistance:27.453856 2022-09-08 14:42:06,963 [Thread=7] INFO - DerivativeMeasure timespan = 0.4308 2022-09-08 14:42:24,054 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:42:24,054 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:42:25,450 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:42:25,450 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:42:25,450 [Thread=1] INFO - Longth长度127 2022-09-08 14:42:25,450 [Thread=1] INFO - 进入getLongth 2022-09-08 14:42:25,450 [Thread=1] INFO - 目标坐标X-3.680007Y7.80197 2022-09-08 14:42:25,450 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:42:25,451 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:42:25,451 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:42:25,451 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:42:25,451 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:42:25,451 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:42:25,451 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:42:25,451 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:42:34,500 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:34,554 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:42:34,554 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:42:34,554 [Thread=16] INFO - Measure angle is -90 2022-09-08 14:42:34,555 [Thread=16] INFO - Measure StartPoint:1018,1014.04174804688, EndPoint:1018,1042.39111328125, PixelDistance:28.349365 2022-09-08 14:42:34,555 [Thread=16] INFO - DerivativeMeasure timespan = 0.4903 2022-09-08 14:42:38,817 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:38,867 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.4178944416455 2022-09-08 14:42:38,867 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.4711694120582 2022-09-08 14:42:38,867 [Thread=7] INFO - Measure angle is -90.444532 2022-09-08 14:42:38,868 [Thread=7] INFO - Measure StartPoint:1016.12316894531,1014.12622070313, EndPoint:1015.90515136719,1042.22155761719, PixelDistance:28.096183 2022-09-08 14:42:38,868 [Thread=7] INFO - DerivativeMeasure timespan = 0.3627 2022-09-08 14:42:39,998 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:40,044 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:42:40,045 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:42:40,045 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:42:40,045 [Thread=7] INFO - Measure StartPoint:1021,1014.14215087891, EndPoint:1021,1042.33068847656, PixelDistance:28.188538 2022-09-08 14:42:40,045 [Thread=7] INFO - DerivativeMeasure timespan = 0.2428 2022-09-08 14:42:41,202 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:41,252 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.7068989358647 2022-09-08 14:42:41,252 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.6263026056543 2022-09-08 14:42:41,253 [Thread=7] INFO - Measure angle is -90.666601 2022-09-08 14:42:41,253 [Thread=7] INFO - Measure StartPoint:1018.10321044922,1014.12780761719, EndPoint:1017.77545166016,1042.29919433594, PixelDistance:28.173293 2022-09-08 14:42:41,253 [Thread=7] INFO - DerivativeMeasure timespan = 0.2431 2022-09-08 14:42:42,476 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:42:42,530 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:42:42,530 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:42:42,531 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:42:42,531 [Thread=7] INFO - Measure StartPoint:1026,1014.12078857422, EndPoint:1026,1042.36010742188, PixelDistance:28.239319 2022-09-08 14:42:42,531 [Thread=7] INFO - DerivativeMeasure timespan = 0.2507 2022-09-08 14:43:05,473 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:05,551 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:43:05,552 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:43:05,552 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:43:05,552 [Thread=7] INFO - Measure StartPoint:1130,978.674987792969, EndPoint:1130,1014.74652099609, PixelDistance:36.071533 2022-09-08 14:43:05,552 [Thread=7] INFO - DerivativeMeasure timespan = 0.3219 2022-09-08 14:43:08,962 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:09,016 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:43:09,016 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:43:09,016 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 91.2475915809825 2022-09-08 14:43:09,016 [Thread=16] INFO - Measure angle is -90.415864 2022-09-08 14:43:09,017 [Thread=16] INFO - Measure StartPoint:1137.33312988281,952.104309082031, EndPoint:1136.673828125,1042.93505859375, PixelDistance:90.833142 2022-09-08 14:43:09,017 [Thread=16] INFO - DerivativeMeasure timespan = 0.2716 2022-09-08 14:43:10,738 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:10,810 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:43:10,810 [Thread=16] INFO - Measure angle is -90 2022-09-08 14:43:10,811 [Thread=16] INFO - Measure StartPoint:1203,978.7685546875, EndPoint:1203,1015.20288085938, PixelDistance:36.434326 2022-09-08 14:43:10,811 [Thread=16] INFO - DerivativeMeasure timespan = 0.2149 2022-09-08 14:43:13,393 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:13,446 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:43:13,446 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90.7944300790517 2022-09-08 14:43:13,446 [Thread=29] INFO - Measure angle is -90.397215 2022-09-08 14:43:13,447 [Thread=29] INFO - Measure StartPoint:1362.13049316406,979.185607910156, EndPoint:1361.87744140625,1015.68395996094, PixelDistance:36.499229 2022-09-08 14:43:13,447 [Thread=29] INFO - DerivativeMeasure timespan = 0.3028 2022-09-08 14:43:19,991 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:43:19,993 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:43:20,006 [Thread=4] INFO - 单轴触发了 2022-09-08 14:43:20,006 [Thread=4] INFO - 该轴是Z 2022-09-08 14:43:20,006 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:43:20,007 [Thread=4] INFO - 该轴是Z,目标位置是-7.43260000095367 2022-09-08 14:43:20,007 [Thread=4] INFO - 步进失败 2022-09-08 14:43:20,007 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 14:43:20,014 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:43:20,014 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:43:20,014 [Thread=4] INFO - Longth长度127 2022-09-08 14:43:20,014 [Thread=4] INFO - 进入getLongth 2022-09-08 14:43:20,014 [Thread=4] INFO - 目标坐标X-3.623007Y7.88297 2022-09-08 14:43:20,015 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:43:20,015 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:43:20,015 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:43:20,015 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:43:20,015 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:43:20,015 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:43:20,015 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:43:20,015 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:43:23,746 [Thread=20] INFO - 单轴触发了 2022-09-08 14:43:23,749 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:43:23,750 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:43:23,750 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:43:23,750 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:43:23,750 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:43:23,750 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:43:23,750 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:43:24,436 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:43:24,436 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:43:24,436 [Thread=20] INFO - 该轴是X,目标位置是-8.623007 2022-09-08 14:43:24,436 [Thread=20] INFO - 步进失败 2022-09-08 14:43:27,189 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:43:27,192 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:43:27,202 [Thread=15] INFO - 单轴触发了 2022-09-08 14:43:27,203 [Thread=15] INFO - 该轴是Z 2022-09-08 14:43:27,203 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:43:27,203 [Thread=15] INFO - 该轴是Z,目标位置是-7.48379999904633 2022-09-08 14:43:27,203 [Thread=15] INFO - 步进失败 2022-09-08 14:43:27,203 [Thread=15] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:43:27,208 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:43:27,208 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:43:27,208 [Thread=15] INFO - Longth长度127 2022-09-08 14:43:27,208 [Thread=15] INFO - 进入getLongth 2022-09-08 14:43:27,208 [Thread=15] INFO - 目标坐标X-8.680007Y7.80197 2022-09-08 14:43:27,208 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:43:27,208 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:43:27,208 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:43:27,208 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:43:27,209 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:43:27,209 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:43:27,209 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:43:27,209 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:43:28,036 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:43:32,013 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:43:32,013 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:43:33,997 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:43:33,998 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:43:33,998 [Thread=1] INFO - Longth长度127 2022-09-08 14:43:33,998 [Thread=1] INFO - 进入getLongth 2022-09-08 14:43:33,998 [Thread=1] INFO - 目标坐标X-8.678764Y7.781093 2022-09-08 14:43:33,998 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:43:33,998 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:43:33,998 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:43:33,998 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:43:33,998 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:43:33,998 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:43:33,999 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:43:33,999 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:43:51,630 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:51,687 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:51,687 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:51,687 [Thread=29] INFO - Measure angle is 0 2022-09-08 14:43:51,687 [Thread=29] INFO - Measure StartPoint:1025.59558105469,973, EndPoint:1054.49755859375,973, PixelDistance:28.901978 2022-09-08 14:43:51,687 [Thread=29] INFO - DerivativeMeasure timespan = 0.3619 2022-09-08 14:43:53,260 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:53,318 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.047103606917988 2022-09-08 14:43:53,318 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.563527653745748 2022-09-08 14:43:53,318 [Thread=29] INFO - Measure angle is -0.305316 2022-09-08 14:43:53,319 [Thread=29] INFO - Measure StartPoint:1025.95678710938,914.935852050781, EndPoint:1054.69250488281,915.088928222656, PixelDistance:28.736125 2022-09-08 14:43:53,319 [Thread=29] INFO - DerivativeMeasure timespan = 0.4891 2022-09-08 14:43:54,365 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:54,425 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.413310488010371 2022-09-08 14:43:54,426 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.606774198578133 2022-09-08 14:43:54,426 [Thread=29] INFO - Measure angle is -0.510042 2022-09-08 14:43:54,426 [Thread=29] INFO - Measure StartPoint:1026.19543457031,862.894897460938, EndPoint:1054.98693847656,863.151245117188, PixelDistance:28.792645 2022-09-08 14:43:54,426 [Thread=29] INFO - DerivativeMeasure timespan = 0.4834 2022-09-08 14:43:55,328 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:55,380 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:55,381 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:55,381 [Thread=29] INFO - Measure angle is 0 2022-09-08 14:43:55,381 [Thread=29] INFO - Measure StartPoint:1025.369140625,1032, EndPoint:1089.84436035156,1032, PixelDistance:64.47522 2022-09-08 14:43:55,382 [Thread=29] INFO - DerivativeMeasure timespan = 0.6126 2022-09-08 14:43:56,683 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:56,737 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:56,737 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.320268708206112 2022-09-08 14:43:56,737 [Thread=29] INFO - Measure angle is -0.160134 2022-09-08 14:43:56,738 [Thread=29] INFO - Measure StartPoint:1025.40075683594,1031.94519042969, EndPoint:1054.30859375,1032.02600097656, PixelDistance:28.90795 2022-09-08 14:43:56,738 [Thread=29] INFO - DerivativeMeasure timespan = 0.3702 2022-09-08 14:43:57,839 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:57,891 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:57,891 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.039934517507896 2022-09-08 14:43:57,891 [Thread=29] INFO - Measure angle is -0.019967 2022-09-08 14:43:57,892 [Thread=29] INFO - Measure StartPoint:1025.35559082031,1031.99487304688, EndPoint:1054.34167480469,1032.00500488281, PixelDistance:28.986086 2022-09-08 14:43:57,892 [Thread=29] INFO - DerivativeMeasure timespan = 0.4484 2022-09-08 14:43:59,155 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:43:59,215 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:43:59,215 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 179.99245197054 2022-09-08 14:43:59,215 [Thread=29] INFO - Measure angle is -179.996226 2022-09-08 14:43:59,216 [Thread=29] INFO - Measure StartPoint:1054.39428710938,1023.99890136719, EndPoint:1025.38061523438,1024.00085449219, PixelDistance:29.013672 2022-09-08 14:43:59,216 [Thread=29] INFO - DerivativeMeasure timespan = 0.3399 2022-09-08 14:45:12,828 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:45:12,828 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:45:14,386 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:45:14,386 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:45:14,386 [Thread=1] INFO - Longth长度127 2022-09-08 14:45:14,386 [Thread=1] INFO - 进入getLongth 2022-09-08 14:45:14,386 [Thread=1] INFO - 目标坐标X-8.679541Y7.79352 2022-09-08 14:45:14,386 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:45:14,387 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:45:14,387 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:45:14,387 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:45:14,387 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:45:14,387 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:45:14,387 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:45:14,387 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:45:19,262 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:45:46,589 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:45:46,645 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 89.8412591497106 2022-09-08 14:45:46,645 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:45:46,645 [Thread=5] INFO - Measure angle is -89.92063 2022-09-08 14:45:46,645 [Thread=5] INFO - Measure StartPoint:1018.97283935547,1001.37133789063, EndPoint:1019.01306152344,1030.40893554688, PixelDistance:29.037626 2022-09-08 14:45:46,645 [Thread=5] INFO - DerivativeMeasure timespan = 0.2595 2022-09-08 14:45:48,277 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:45:48,328 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90.1648702441473 2022-09-08 14:45:48,328 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:45:48,329 [Thread=5] INFO - Measure angle is -90.082435 2022-09-08 14:45:48,329 [Thread=5] INFO - Measure StartPoint:1141.0234375,1001.72412109375, EndPoint:1140.98156738281,1030.79370117188, PixelDistance:29.06961 2022-09-08 14:45:48,329 [Thread=5] INFO - DerivativeMeasure timespan = 0.2813 2022-09-08 14:45:49,374 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:45:49,431 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:45:49,431 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:45:49,431 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:45:49,432 [Thread=5] INFO - Measure StartPoint:1219,1001.73352050781, EndPoint:1219,1030.90783691406, PixelDistance:29.174316 2022-09-08 14:45:49,432 [Thread=5] INFO - DerivativeMeasure timespan = 0.2966 2022-09-08 14:45:50,514 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:45:50,570 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2764287527678 2022-09-08 14:45:50,570 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.0218107689155 2022-09-08 14:45:50,571 [Thread=3] INFO - Measure angle is -90.14912 2022-09-08 14:45:50,571 [Thread=3] INFO - Measure StartPoint:1016.03826904297,1001.30126953125, EndPoint:1015.96264648438,1030.35266113281, PixelDistance:29.05149 2022-09-08 14:45:50,571 [Thread=3] INFO - DerivativeMeasure timespan = 0.2654 2022-09-08 14:45:51,726 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:45:51,778 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 89.9392135108761 2022-09-08 14:45:51,778 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:45:51,778 [Thread=3] INFO - Measure angle is -89.969607 2022-09-08 14:45:51,778 [Thread=3] INFO - Measure StartPoint:1022.99542236328,1001.36480712891, EndPoint:1023.01086425781,1030.42431640625, PixelDistance:29.059513 2022-09-08 14:45:51,779 [Thread=3] INFO - DerivativeMeasure timespan = 0.2165 2022-09-08 14:46:07,794 [Thread=21] INFO - 单轴触发了 2022-09-08 14:46:07,798 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:46:07,798 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:46:07,798 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:46:07,798 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:46:07,798 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:46:07,798 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:46:07,798 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:46:08,234 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:46:08,234 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:46:08,234 [Thread=21] INFO - 该轴是X,目标位置是-13.679541 2022-09-08 14:46:08,234 [Thread=21] INFO - 步进失败 2022-09-08 14:46:09,703 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:46:19,111 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:19,165 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:19,165 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:19,165 [Thread=13] INFO - Measure angle is -90 2022-09-08 14:46:19,165 [Thread=13] INFO - Measure StartPoint:1015,975.83544921875, EndPoint:1015,1005.65185546875, PixelDistance:29.816406 2022-09-08 14:46:19,166 [Thread=13] INFO - DerivativeMeasure timespan = 0.2235 2022-09-08 14:46:20,428 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:20,483 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:20,483 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:20,483 [Thread=13] INFO - Measure angle is -90 2022-09-08 14:46:20,483 [Thread=13] INFO - Measure StartPoint:1026,975.839233398438, EndPoint:1026,1005.72094726563, PixelDistance:29.881714 2022-09-08 14:46:20,483 [Thread=13] INFO - DerivativeMeasure timespan = 0.25 2022-09-08 14:46:21,417 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:21,471 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:21,471 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:21,471 [Thread=13] INFO - Measure angle is -90 2022-09-08 14:46:21,471 [Thread=13] INFO - Measure StartPoint:1024,975.833068847656, EndPoint:1024,1037.29296875, PixelDistance:61.4599 2022-09-08 14:46:21,471 [Thread=13] INFO - DerivativeMeasure timespan = 0.2233 2022-09-08 14:46:22,359 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:22,412 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:22,412 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:22,412 [Thread=13] INFO - Measure angle is -90 2022-09-08 14:46:22,413 [Thread=13] INFO - Measure StartPoint:1015,975.837036132813, EndPoint:1015,1005.64056396484, PixelDistance:29.803528 2022-09-08 14:46:22,413 [Thread=13] INFO - DerivativeMeasure timespan = 0.2492 2022-09-08 14:46:23,312 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:23,360 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:23,360 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:23,360 [Thread=13] INFO - Measure angle is -90 2022-09-08 14:46:23,360 [Thread=13] INFO - Measure StartPoint:1013,975.812072753906, EndPoint:1013,1005.58776855469, PixelDistance:29.775696 2022-09-08 14:46:23,360 [Thread=13] INFO - DerivativeMeasure timespan = 0.2054 2022-09-08 14:46:24,807 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:24,857 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:24,857 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:46:24,857 [Thread=13] INFO - Measure angle is -90 2022-09-08 14:46:24,857 [Thread=13] INFO - Measure StartPoint:1008,975.6767578125, EndPoint:1008,1005.67840576172, PixelDistance:30.001648 2022-09-08 14:46:24,857 [Thread=13] INFO - DerivativeMeasure timespan = 0.225 2022-09-08 14:46:39,661 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:46:39,661 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:46:40,743 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:46:40,743 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:46:40,743 [Thread=1] INFO - Longth长度127 2022-09-08 14:46:40,743 [Thread=1] INFO - 进入getLongth 2022-09-08 14:46:40,744 [Thread=1] INFO - 目标坐标X-13.678578Y7.772643 2022-09-08 14:46:40,744 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:46:40,744 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:46:40,744 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:46:40,744 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:46:40,744 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:46:40,744 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:46:40,744 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:46:40,744 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:46:48,857 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:48,911 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:48,911 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:48,911 [Thread=16] INFO - Measure angle is 0 2022-09-08 14:46:48,911 [Thread=16] INFO - Measure StartPoint:1045.92822265625,1005, EndPoint:1075.56896972656,1005, PixelDistance:29.640747 2022-09-08 14:46:48,912 [Thread=16] INFO - DerivativeMeasure timespan = 0.2886 2022-09-08 14:46:50,297 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:50,351 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:50,351 [Thread=16] INFO - Measure angle is 0 2022-09-08 14:46:50,352 [Thread=16] INFO - Measure StartPoint:1046.04736328125,1026, EndPoint:1075.501953125,1026, PixelDistance:29.45459 2022-09-08 14:46:50,352 [Thread=16] INFO - DerivativeMeasure timespan = 0.3078 2022-09-08 14:46:51,944 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:51,998 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:51,998 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:51,998 [Thread=16] INFO - Measure angle is 0 2022-09-08 14:46:51,999 [Thread=16] INFO - Measure StartPoint:1045.9560546875,1037, EndPoint:1075.51684570313,1037, PixelDistance:29.560791 2022-09-08 14:46:51,999 [Thread=16] INFO - DerivativeMeasure timespan = 0.3574 2022-09-08 14:46:53,438 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:53,488 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:53,489 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:53,490 [Thread=7] INFO - Measure angle is 0 2022-09-08 14:46:53,490 [Thread=7] INFO - Measure StartPoint:1045.91125488281,1034, EndPoint:1075.53076171875,1034, PixelDistance:29.619507 2022-09-08 14:46:53,491 [Thread=7] INFO - DerivativeMeasure timespan = 0.3425 2022-09-08 14:46:55,024 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:46:55,077 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:55,077 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:46:55,077 [Thread=7] INFO - Measure angle is 0 2022-09-08 14:46:55,077 [Thread=7] INFO - Measure StartPoint:1045.95971679688,1042, EndPoint:1075.56286621094,1042, PixelDistance:29.603149 2022-09-08 14:46:55,077 [Thread=7] INFO - DerivativeMeasure timespan = 0.2824 2022-09-08 14:47:05,671 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:47:05,674 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:47:05,685 [Thread=28] INFO - 单轴触发了 2022-09-08 14:47:05,685 [Thread=28] INFO - 该轴是Z 2022-09-08 14:47:05,685 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:05,685 [Thread=28] INFO - 该轴是Z,目标位置是-7.44210000095367 2022-09-08 14:47:05,685 [Thread=28] INFO - 步进失败 2022-09-08 14:47:05,685 [Thread=28] INFO - SwitchOffsetZ:0.051 2022-09-08 14:47:05,690 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:47:05,690 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:47:05,690 [Thread=28] INFO - Longth长度127 2022-09-08 14:47:05,690 [Thread=28] INFO - 进入getLongth 2022-09-08 14:47:05,690 [Thread=28] INFO - 目标坐标X-13.621578Y7.853643 2022-09-08 14:47:05,690 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:47:05,691 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:47:05,691 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:47:05,691 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:47:05,691 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:47:05,691 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:47:05,691 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:47:05,691 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:47:07,685 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:47:09,822 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:09,826 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:47:09,826 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:47:09,826 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:47:09,826 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:09,826 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:47:09,826 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:47:09,826 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:47:10,413 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:47:10,413 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:47:10,413 [Thread=19] INFO - 该轴是X,目标位置是-18.621578 2022-09-08 14:47:10,414 [Thread=19] INFO - 步进失败 2022-09-08 14:47:12,531 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:47:12,531 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:47:13,994 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:47:13,994 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:47:13,994 [Thread=1] INFO - Longth长度127 2022-09-08 14:47:13,994 [Thread=1] INFO - 进入getLongth 2022-09-08 14:47:13,994 [Thread=1] INFO - 目标坐标X-18.587148Y7.896066 2022-09-08 14:47:13,994 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:47:13,994 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:47:13,995 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:47:13,995 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:47:13,995 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:47:13,995 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:47:13,995 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:47:13,995 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:47:19,315 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:47:19,317 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:47:19,330 [Thread=4] INFO - 单轴触发了 2022-09-08 14:47:19,330 [Thread=4] INFO - 该轴是Z 2022-09-08 14:47:19,330 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:19,331 [Thread=4] INFO - 该轴是Z,目标位置是-7.49329999904633 2022-09-08 14:47:19,331 [Thread=4] INFO - 步进失败 2022-09-08 14:47:19,331 [Thread=4] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:47:19,335 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:47:19,336 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:47:19,336 [Thread=4] INFO - Longth长度127 2022-09-08 14:47:19,336 [Thread=4] INFO - 进入getLongth 2022-09-08 14:47:19,336 [Thread=4] INFO - 目标坐标X-18.644148Y7.815066 2022-09-08 14:47:19,336 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:47:19,336 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:47:19,336 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:47:19,336 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:47:19,336 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:47:19,336 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:47:19,336 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:47:19,337 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:47:21,329 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:47:23,683 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:47:23,683 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:47:23,683 [Thread=1] INFO - Longth长度127 2022-09-08 14:47:23,683 [Thread=1] INFO - 进入getLongth 2022-09-08 14:47:23,683 [Thread=1] INFO - 目标坐标X-18.664715Y7.778065 2022-09-08 14:47:23,683 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:47:23,683 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:47:23,683 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:47:23,684 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:47:23,684 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:47:23,684 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:47:23,684 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:47:23,684 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:47:27,508 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:47:27,508 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:47:27,508 [Thread=1] INFO - Longth长度127 2022-09-08 14:47:27,509 [Thread=1] INFO - 进入getLongth 2022-09-08 14:47:27,509 [Thread=1] INFO - 目标坐标X-18.681522Y7.781079 2022-09-08 14:47:27,509 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:47:27,509 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:47:27,509 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:47:27,509 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:47:27,509 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:47:27,509 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:47:27,509 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:47:27,509 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:47:31,960 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:31,960 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:31,960 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:31,961 [Thread=20] INFO - 该轴是Z,目标位置是-7.4977000000095 2022-09-08 14:47:31,961 [Thread=20] INFO - 步进失败 2022-09-08 14:47:32,137 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:32,137 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:32,137 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:32,137 [Thread=21] INFO - 该轴是Z,目标位置是-7.4977000000095 2022-09-08 14:47:32,138 [Thread=21] INFO - 步进失败 2022-09-08 14:47:33,400 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:33,400 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:33,400 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:33,401 [Thread=19] INFO - 该轴是Z,目标位置是-7.4981000000095 2022-09-08 14:47:33,401 [Thread=19] INFO - 步进失败 2022-09-08 14:47:33,580 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:33,580 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:33,580 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:33,581 [Thread=20] INFO - 该轴是Z,目标位置是-7.4981000000095 2022-09-08 14:47:33,581 [Thread=20] INFO - 步进失败 2022-09-08 14:47:33,763 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:33,764 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:33,764 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:33,764 [Thread=21] INFO - 该轴是Z,目标位置是-7.4981000000095 2022-09-08 14:47:33,764 [Thread=21] INFO - 步进失败 2022-09-08 14:47:35,575 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:35,576 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:35,576 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:35,576 [Thread=19] INFO - 该轴是Z,目标位置是-7.4982999999905 2022-09-08 14:47:35,576 [Thread=19] INFO - 步进失败 2022-09-08 14:47:35,744 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:35,744 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:35,744 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:35,745 [Thread=20] INFO - 该轴是Z,目标位置是-7.4980999999905 2022-09-08 14:47:35,745 [Thread=20] INFO - 步进失败 2022-09-08 14:47:35,913 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:35,913 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:35,914 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:35,914 [Thread=21] INFO - 该轴是Z,目标位置是-7.4980999999905 2022-09-08 14:47:35,914 [Thread=21] INFO - 步进失败 2022-09-08 14:47:36,107 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:36,107 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:36,107 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:36,108 [Thread=19] INFO - 该轴是Z,目标位置是-7.4978999999905 2022-09-08 14:47:36,108 [Thread=19] INFO - 步进失败 2022-09-08 14:47:36,258 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:36,258 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:36,258 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:36,259 [Thread=20] INFO - 该轴是Z,目标位置是-7.4978999999905 2022-09-08 14:47:36,259 [Thread=20] INFO - 步进失败 2022-09-08 14:47:36,444 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:36,444 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:36,445 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:36,445 [Thread=21] INFO - 该轴是Z,目标位置是-7.4974999999905 2022-09-08 14:47:36,445 [Thread=21] INFO - 步进失败 2022-09-08 14:47:36,614 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:36,614 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:36,614 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:36,614 [Thread=19] INFO - 该轴是Z,目标位置是-7.4974999999905 2022-09-08 14:47:36,614 [Thread=19] INFO - 步进失败 2022-09-08 14:47:36,800 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:36,800 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:36,801 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:36,801 [Thread=20] INFO - 该轴是Z,目标位置是-7.4970999999905 2022-09-08 14:47:36,801 [Thread=20] INFO - 步进失败 2022-09-08 14:47:37,912 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:37,913 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:37,913 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:37,913 [Thread=21] INFO - 该轴是Z,目标位置是-7.4971000000095 2022-09-08 14:47:37,913 [Thread=21] INFO - 步进失败 2022-09-08 14:47:38,119 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:38,120 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:38,120 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:38,120 [Thread=19] INFO - 该轴是Z,目标位置是-7.4971000000095 2022-09-08 14:47:38,120 [Thread=19] INFO - 步进失败 2022-09-08 14:47:38,288 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:38,288 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:38,288 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:38,288 [Thread=20] INFO - 该轴是Z,目标位置是-7.4973000000095 2022-09-08 14:47:38,288 [Thread=20] INFO - 步进失败 2022-09-08 14:47:38,450 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:38,450 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:38,450 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:38,450 [Thread=21] INFO - 该轴是Z,目标位置是-7.4973000000095 2022-09-08 14:47:38,450 [Thread=21] INFO - 步进失败 2022-09-08 14:47:38,624 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:38,624 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:38,624 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:38,624 [Thread=19] INFO - 该轴是Z,目标位置是-7.4977000000095 2022-09-08 14:47:38,624 [Thread=19] INFO - 步进失败 2022-09-08 14:47:38,792 [Thread=20] INFO - 单轴触发了 2022-09-08 14:47:38,792 [Thread=20] INFO - 该轴是Z 2022-09-08 14:47:38,792 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:38,793 [Thread=20] INFO - 该轴是Z,目标位置是-7.4977000000095 2022-09-08 14:47:38,793 [Thread=20] INFO - 步进失败 2022-09-08 14:47:38,976 [Thread=21] INFO - 单轴触发了 2022-09-08 14:47:38,976 [Thread=21] INFO - 该轴是Z 2022-09-08 14:47:38,976 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:38,980 [Thread=21] INFO - 该轴是Z,目标位置是-7.4981000000095 2022-09-08 14:47:38,980 [Thread=21] INFO - 步进失败 2022-09-08 14:47:39,156 [Thread=19] INFO - 单轴触发了 2022-09-08 14:47:39,156 [Thread=19] INFO - 该轴是Z 2022-09-08 14:47:39,156 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:47:39,157 [Thread=19] INFO - 该轴是Z,目标位置是-7.4981000000095 2022-09-08 14:47:39,157 [Thread=19] INFO - 步进失败 2022-09-08 14:47:43,996 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:47:44,044 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:44,044 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:44,044 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:47:44,045 [Thread=5] INFO - Measure StartPoint:992.857788085938,1013, EndPoint:1023.16125488281,1013, PixelDistance:30.303467 2022-09-08 14:47:44,045 [Thread=5] INFO - DerivativeMeasure timespan = 0.3576 2022-09-08 14:47:45,326 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:47:45,382 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.141745957242379 2022-09-08 14:47:45,382 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.301044389162297 2022-09-08 14:47:45,383 [Thread=5] INFO - Measure angle is -0.221395 2022-09-08 14:47:45,383 [Thread=5] INFO - Measure StartPoint:992.974365234375,986.891723632813, EndPoint:1055.92224121094,987.134948730469, PixelDistance:62.948346 2022-09-08 14:47:45,383 [Thread=5] INFO - DerivativeMeasure timespan = 0.5346 2022-09-08 14:47:46,805 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:47:46,860 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:46,860 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:46,860 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:47:46,860 [Thread=5] INFO - Measure StartPoint:992.981506347656,984, EndPoint:1023.25109863281,984, PixelDistance:30.269592 2022-09-08 14:47:46,860 [Thread=5] INFO - DerivativeMeasure timespan = 0.3748 2022-09-08 14:47:49,025 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:47:49,071 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:49,072 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:49,072 [Thread=7] INFO - Measure angle is 0 2022-09-08 14:47:49,072 [Thread=7] INFO - Measure StartPoint:992.898620605469,1001, EndPoint:1023.21112060547,1001, PixelDistance:30.3125 2022-09-08 14:47:49,072 [Thread=7] INFO - DerivativeMeasure timespan = 0.4519 2022-09-08 14:47:49,964 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:47:50,015 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:50,016 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:50,016 [Thread=7] INFO - Measure angle is 0 2022-09-08 14:47:50,016 [Thread=7] INFO - Measure StartPoint:993.13916015625,909, EndPoint:1023.63153076172,909, PixelDistance:30.492371 2022-09-08 14:47:50,016 [Thread=7] INFO - DerivativeMeasure timespan = 0.2812 2022-09-08 14:47:51,482 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:47:51,540 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.0527361015030813 2022-09-08 14:47:51,540 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:47:51,540 [Thread=7] INFO - Measure angle is -0.026368 2022-09-08 14:47:51,540 [Thread=7] INFO - Measure StartPoint:993.179992675781,903.990905761719, EndPoint:1023.63012695313,904.0048828125, PixelDistance:30.450137 2022-09-08 14:47:51,541 [Thread=7] INFO - DerivativeMeasure timespan = 0.6838 2022-09-08 14:48:04,350 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:48:04,350 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:48:05,028 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:48:05,028 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:48:07,395 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:48:07,395 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:48:07,395 [Thread=1] INFO - Longth长度127 2022-09-08 14:48:07,396 [Thread=1] INFO - 进入getLongth 2022-09-08 14:48:07,396 [Thread=1] INFO - 目标坐标X-18.681895Y7.793785 2022-09-08 14:48:07,396 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:48:07,396 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:48:07,396 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:48:07,396 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:48:07,396 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:48:07,396 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:48:07,396 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:48:07,396 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:48:27,400 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:48:27,456 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.4827614039852 2022-09-08 14:48:27,456 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.7529493688306 2022-09-08 14:48:27,456 [Thread=3] INFO - Measure angle is -90.617855 2022-09-08 14:48:27,457 [Thread=3] INFO - Measure StartPoint:1024.20385742188,1008.09704589844, EndPoint:1023.87200927734,1038.86938476563, PixelDistance:30.774128 2022-09-08 14:48:27,457 [Thread=3] INFO - DerivativeMeasure timespan = 0.2958 2022-09-08 14:48:28,576 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:48:28,632 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.286182814309 2022-09-08 14:48:28,632 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.1617830843025 2022-09-08 14:48:28,632 [Thread=3] INFO - Measure angle is -90.223983 2022-09-08 14:48:28,633 [Thread=3] INFO - Measure StartPoint:1020.08197021484,1008.03790283203, EndPoint:1019.96136474609,1038.87658691406, PixelDistance:30.83892 2022-09-08 14:48:28,633 [Thread=3] INFO - DerivativeMeasure timespan = 0.4357 2022-09-08 14:48:29,599 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:48:29,648 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.3840521197445 2022-09-08 14:48:29,648 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.0575704241189 2022-09-08 14:48:29,648 [Thread=3] INFO - Measure angle is -90.220811 2022-09-08 14:48:29,648 [Thread=3] INFO - Measure StartPoint:1012.06164550781,1008.00469970703, EndPoint:1011.94287109375,1038.82556152344, PixelDistance:30.821091 2022-09-08 14:48:29,648 [Thread=3] INFO - DerivativeMeasure timespan = 0.3202 2022-09-08 14:48:30,574 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:48:30,624 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.290167965069 2022-09-08 14:48:30,624 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:48:30,624 [Thread=3] INFO - Measure angle is -90.145084 2022-09-08 14:48:30,625 [Thread=3] INFO - Measure StartPoint:1017.04803466797,1008.03259277344, EndPoint:1016.96997070313,1038.85827636719, PixelDistance:30.825782 2022-09-08 14:48:30,625 [Thread=3] INFO - DerivativeMeasure timespan = 0.3558 2022-09-08 14:48:31,644 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:48:31,694 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.5060212112143 2022-09-08 14:48:31,694 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.611862560432 2022-09-08 14:48:31,694 [Thread=3] INFO - Measure angle is -90.558942 2022-09-08 14:48:31,695 [Thread=3] INFO - Measure StartPoint:1027.25305175781,1008.06652832031, EndPoint:1026.95239257813,1038.87963867188, PixelDistance:30.814577 2022-09-08 14:48:31,695 [Thread=3] INFO - DerivativeMeasure timespan = 0.315 2022-09-08 14:48:45,351 [Thread=20] INFO - 单轴触发了 2022-09-08 14:48:45,355 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:48:45,355 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:48:45,355 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:48:45,355 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:45,356 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:48:45,356 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:48:45,356 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:48:46,086 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:48:46,086 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:48:46,087 [Thread=20] INFO - 该轴是X,目标位置是-23.681895 2022-09-08 14:48:46,087 [Thread=20] INFO - 步进失败 2022-09-08 14:48:47,945 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:48:49,595 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:48:49,596 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:48:52,849 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:48:52,849 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:48:52,849 [Thread=1] INFO - Longth长度127 2022-09-08 14:48:52,849 [Thread=1] INFO - 进入getLongth 2022-09-08 14:48:52,850 [Thread=1] INFO - 目标坐标X-23.680528Y7.776791 2022-09-08 14:48:52,850 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:48:52,850 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:48:52,850 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:48:52,850 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:48:52,850 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:48:52,850 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:48:52,850 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:48:52,850 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:48:56,394 [Thread=21] INFO - 单轴触发了 2022-09-08 14:48:56,394 [Thread=21] INFO - 该轴是Z 2022-09-08 14:48:56,394 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:56,394 [Thread=21] INFO - 该轴是Z,目标位置是-7.5021000000095 2022-09-08 14:48:56,394 [Thread=21] INFO - 步进失败 2022-09-08 14:48:56,578 [Thread=19] INFO - 单轴触发了 2022-09-08 14:48:56,578 [Thread=19] INFO - 该轴是Z 2022-09-08 14:48:56,578 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:56,578 [Thread=19] INFO - 该轴是Z,目标位置是-7.5021000000095 2022-09-08 14:48:56,578 [Thread=19] INFO - 步进失败 2022-09-08 14:48:56,745 [Thread=20] INFO - 单轴触发了 2022-09-08 14:48:56,746 [Thread=20] INFO - 该轴是Z 2022-09-08 14:48:56,746 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:56,746 [Thread=20] INFO - 该轴是Z,目标位置是-7.5021000000095 2022-09-08 14:48:56,746 [Thread=20] INFO - 步进失败 2022-09-08 14:48:56,905 [Thread=21] INFO - 单轴触发了 2022-09-08 14:48:56,905 [Thread=21] INFO - 该轴是Z 2022-09-08 14:48:56,905 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:56,905 [Thread=21] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:48:56,906 [Thread=21] INFO - 步进失败 2022-09-08 14:48:58,307 [Thread=19] INFO - 单轴触发了 2022-09-08 14:48:58,307 [Thread=19] INFO - 该轴是Z 2022-09-08 14:48:58,307 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:58,308 [Thread=19] INFO - 该轴是Z,目标位置是-7.5024999999905 2022-09-08 14:48:58,308 [Thread=19] INFO - 步进失败 2022-09-08 14:48:58,474 [Thread=20] INFO - 单轴触发了 2022-09-08 14:48:58,474 [Thread=20] INFO - 该轴是Z 2022-09-08 14:48:58,474 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:58,475 [Thread=20] INFO - 该轴是Z,目标位置是-7.5024999999905 2022-09-08 14:48:58,475 [Thread=20] INFO - 步进失败 2022-09-08 14:48:58,658 [Thread=21] INFO - 单轴触发了 2022-09-08 14:48:58,658 [Thread=21] INFO - 该轴是Z 2022-09-08 14:48:58,658 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:58,658 [Thread=21] INFO - 该轴是Z,目标位置是-7.5020999999905 2022-09-08 14:48:58,658 [Thread=21] INFO - 步进失败 2022-09-08 14:48:58,827 [Thread=19] INFO - 单轴触发了 2022-09-08 14:48:58,827 [Thread=19] INFO - 该轴是Z 2022-09-08 14:48:58,827 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:58,828 [Thread=19] INFO - 该轴是Z,目标位置是-7.5020999999905 2022-09-08 14:48:58,828 [Thread=19] INFO - 步进失败 2022-09-08 14:48:59,002 [Thread=20] INFO - 单轴触发了 2022-09-08 14:48:59,002 [Thread=20] INFO - 该轴是Z 2022-09-08 14:48:59,002 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:59,002 [Thread=20] INFO - 该轴是Z,目标位置是-7.5018999999905 2022-09-08 14:48:59,003 [Thread=20] INFO - 步进失败 2022-09-08 14:48:59,185 [Thread=21] INFO - 单轴触发了 2022-09-08 14:48:59,185 [Thread=21] INFO - 该轴是Z 2022-09-08 14:48:59,185 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:59,186 [Thread=21] INFO - 该轴是Z,目标位置是-7.5018999999905 2022-09-08 14:48:59,186 [Thread=21] INFO - 步进失败 2022-09-08 14:48:59,601 [Thread=19] INFO - 单轴触发了 2022-09-08 14:48:59,602 [Thread=19] INFO - 该轴是Z 2022-09-08 14:48:59,602 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:59,602 [Thread=19] INFO - 该轴是Z,目标位置是-7.5012999999905 2022-09-08 14:48:59,602 [Thread=19] INFO - 步进失败 2022-09-08 14:48:59,837 [Thread=20] INFO - 单轴触发了 2022-09-08 14:48:59,837 [Thread=20] INFO - 该轴是Z 2022-09-08 14:48:59,837 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:48:59,837 [Thread=20] INFO - 该轴是Z,目标位置是-7.5012999999905 2022-09-08 14:48:59,837 [Thread=20] INFO - 步进失败 2022-09-08 14:49:00,023 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:00,023 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:00,023 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:00,024 [Thread=21] INFO - 该轴是Z,目标位置是-7.5010999999905 2022-09-08 14:49:00,024 [Thread=21] INFO - 步进失败 2022-09-08 14:49:00,806 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:00,806 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:00,807 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:00,807 [Thread=19] INFO - 该轴是Z,目标位置是-7.5011000000095 2022-09-08 14:49:00,807 [Thread=19] INFO - 步进失败 2022-09-08 14:49:00,969 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:00,970 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:00,970 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:00,970 [Thread=20] INFO - 该轴是Z,目标位置是-7.5011000000095 2022-09-08 14:49:00,970 [Thread=20] INFO - 步进失败 2022-09-08 14:49:01,122 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:01,122 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:01,122 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:01,122 [Thread=21] INFO - 该轴是Z,目标位置是-7.5015000000095 2022-09-08 14:49:01,122 [Thread=21] INFO - 步进失败 2022-09-08 14:49:01,312 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:01,313 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:01,313 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:01,313 [Thread=19] INFO - 该轴是Z,目标位置是-7.5015000000095 2022-09-08 14:49:01,313 [Thread=19] INFO - 步进失败 2022-09-08 14:49:01,482 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:01,482 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:01,482 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:01,483 [Thread=20] INFO - 该轴是Z,目标位置是-7.5019000000095 2022-09-08 14:49:01,483 [Thread=20] INFO - 步进失败 2022-09-08 14:49:01,657 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:01,657 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:01,657 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:01,657 [Thread=21] INFO - 该轴是Z,目标位置是-7.5019000000095 2022-09-08 14:49:01,658 [Thread=21] INFO - 步进失败 2022-09-08 14:49:01,833 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:01,833 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:01,833 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:01,835 [Thread=19] INFO - 该轴是Z,目标位置是-7.5023000000095 2022-09-08 14:49:01,835 [Thread=19] INFO - 步进失败 2022-09-08 14:49:02,026 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:02,026 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:02,026 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:02,027 [Thread=20] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:49:02,027 [Thread=20] INFO - 步进失败 2022-09-08 14:49:02,207 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:02,208 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:02,208 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:02,208 [Thread=21] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:49:02,208 [Thread=21] INFO - 步进失败 2022-09-08 14:49:02,361 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:02,361 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:02,361 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:02,361 [Thread=19] INFO - 该轴是Z,目标位置是-7.5029000000095 2022-09-08 14:49:02,362 [Thread=19] INFO - 步进失败 2022-09-08 14:49:06,792 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:06,792 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:06,793 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:06,793 [Thread=20] INFO - 该轴是Z,目标位置是-7.5031000000095 2022-09-08 14:49:06,793 [Thread=20] INFO - 步进失败 2022-09-08 14:49:06,956 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:06,956 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:06,956 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:06,957 [Thread=21] INFO - 该轴是Z,目标位置是-7.5031000000095 2022-09-08 14:49:06,957 [Thread=21] INFO - 步进失败 2022-09-08 14:49:07,128 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:07,128 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:07,129 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:07,129 [Thread=19] INFO - 该轴是Z,目标位置是-7.5031000000095 2022-09-08 14:49:07,129 [Thread=19] INFO - 步进失败 2022-09-08 14:49:08,854 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:08,854 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:08,854 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:08,855 [Thread=20] INFO - 该轴是Z,目标位置是-7.5032999999905 2022-09-08 14:49:08,855 [Thread=20] INFO - 步进失败 2022-09-08 14:49:09,002 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:09,003 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:09,003 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:09,003 [Thread=21] INFO - 该轴是Z,目标位置是-7.5032999999905 2022-09-08 14:49:09,003 [Thread=21] INFO - 步进失败 2022-09-08 14:49:09,204 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:09,204 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:09,204 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:09,205 [Thread=19] INFO - 该轴是Z,目标位置是-7.5030999999905 2022-09-08 14:49:09,205 [Thread=19] INFO - 步进失败 2022-09-08 14:49:09,360 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:09,360 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:09,360 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:09,361 [Thread=20] INFO - 该轴是Z,目标位置是-7.5030999999905 2022-09-08 14:49:09,361 [Thread=20] INFO - 步进失败 2022-09-08 14:49:09,556 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:09,556 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:09,556 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:09,556 [Thread=21] INFO - 该轴是Z,目标位置是-7.5028999999905 2022-09-08 14:49:09,556 [Thread=21] INFO - 步进失败 2022-09-08 14:49:09,745 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:09,746 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:09,746 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:09,746 [Thread=19] INFO - 该轴是Z,目标位置是-7.5022999999905 2022-09-08 14:49:09,746 [Thread=19] INFO - 步进失败 2022-09-08 14:49:10,242 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:10,243 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:10,243 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:10,243 [Thread=20] INFO - 该轴是Z,目标位置是-7.5020999999905 2022-09-08 14:49:10,243 [Thread=20] INFO - 步进失败 2022-09-08 14:49:12,295 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:12,295 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:12,295 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:12,296 [Thread=21] INFO - 该轴是Z,目标位置是-7.5023000000095 2022-09-08 14:49:12,296 [Thread=21] INFO - 步进失败 2022-09-08 14:49:16,227 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:16,279 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:16,279 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.228573120927798 2022-09-08 14:49:16,280 [Thread=5] INFO - Measure angle is -0.114287 2022-09-08 14:49:16,280 [Thread=5] INFO - Measure StartPoint:1015.18994140625,1045.96252441406, EndPoint:1045.94445800781,1046.02380371094, PixelDistance:30.754578 2022-09-08 14:49:16,280 [Thread=5] INFO - DerivativeMeasure timespan = 0.5361 2022-09-08 14:49:17,368 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:17,420 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:17,421 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:49:17,421 [Thread=5] INFO - Measure StartPoint:1015.19799804688,1028, EndPoint:1045.95532226563,1028, PixelDistance:30.757324 2022-09-08 14:49:17,421 [Thread=5] INFO - DerivativeMeasure timespan = 0.5145 2022-09-08 14:49:18,407 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:18,456 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:18,456 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.0473593285334755 2022-09-08 14:49:18,456 [Thread=13] INFO - Measure angle is -0.02368 2022-09-08 14:49:18,457 [Thread=13] INFO - Measure StartPoint:1015.18579101563,1030.99340820313, EndPoint:1045.96203613281,1031.00622558594, PixelDistance:30.776248 2022-09-08 14:49:18,457 [Thread=13] INFO - DerivativeMeasure timespan = 0.3498 2022-09-08 14:49:20,476 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:20,526 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:20,526 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.0473593285334755 2022-09-08 14:49:20,527 [Thread=13] INFO - Measure angle is -0.02368 2022-09-08 14:49:20,527 [Thread=13] INFO - Measure StartPoint:1015.18597412109,1030.9921875, EndPoint:1045.96215820313,1031.0048828125, PixelDistance:30.776187 2022-09-08 14:49:20,527 [Thread=13] INFO - DerivativeMeasure timespan = 0.3898 2022-09-08 14:49:25,331 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:25,384 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:25,384 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.728734073711794 2022-09-08 14:49:25,385 [Thread=13] INFO - Measure angle is -0.364367 2022-09-08 14:49:25,385 [Thread=13] INFO - Measure StartPoint:1015.20452880859,1030.92492675781, EndPoint:1045.96398925781,1031.12060546875, PixelDistance:30.760083 2022-09-08 14:49:25,385 [Thread=13] INFO - DerivativeMeasure timespan = 0.4076 2022-09-08 14:49:48,053 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:48,053 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:48,053 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:48,054 [Thread=19] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:49:48,054 [Thread=19] INFO - 步进失败 2022-09-08 14:49:48,245 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:48,245 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:48,245 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:48,246 [Thread=20] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:49:48,246 [Thread=20] INFO - 步进失败 2022-09-08 14:49:48,413 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:48,414 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:48,414 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:48,414 [Thread=21] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:49:48,414 [Thread=21] INFO - 步进失败 2022-09-08 14:49:48,605 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:48,605 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:48,605 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:48,606 [Thread=19] INFO - 该轴是Z,目标位置是-7.5029000000095 2022-09-08 14:49:48,606 [Thread=19] INFO - 步进失败 2022-09-08 14:49:50,186 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:50,186 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:50,186 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:50,187 [Thread=20] INFO - 该轴是Z,目标位置是-7.5028999999905 2022-09-08 14:49:50,187 [Thread=20] INFO - 步进失败 2022-09-08 14:49:50,324 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:50,324 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:50,325 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:50,325 [Thread=21] INFO - 该轴是Z,目标位置是-7.5028999999905 2022-09-08 14:49:50,325 [Thread=21] INFO - 步进失败 2022-09-08 14:49:50,496 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:50,496 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:50,496 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:50,497 [Thread=19] INFO - 该轴是Z,目标位置是-7.5026999999905 2022-09-08 14:49:50,497 [Thread=19] INFO - 步进失败 2022-09-08 14:49:50,676 [Thread=20] INFO - 单轴触发了 2022-09-08 14:49:50,676 [Thread=20] INFO - 该轴是Z 2022-09-08 14:49:50,676 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:50,677 [Thread=20] INFO - 该轴是Z,目标位置是-7.5022999999905 2022-09-08 14:49:50,677 [Thread=20] INFO - 步进失败 2022-09-08 14:49:50,837 [Thread=21] INFO - 单轴触发了 2022-09-08 14:49:50,837 [Thread=21] INFO - 该轴是Z 2022-09-08 14:49:50,837 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:50,838 [Thread=21] INFO - 该轴是Z,目标位置是-7.5022999999905 2022-09-08 14:49:50,838 [Thread=21] INFO - 步进失败 2022-09-08 14:49:51,006 [Thread=19] INFO - 单轴触发了 2022-09-08 14:49:51,007 [Thread=19] INFO - 该轴是Z 2022-09-08 14:49:51,007 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:49:51,008 [Thread=19] INFO - 该轴是Z,目标位置是-7.5018999999905 2022-09-08 14:49:51,008 [Thread=19] INFO - 步进失败 2022-09-08 14:49:54,358 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:54,411 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:54,411 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:54,411 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:49:54,412 [Thread=5] INFO - Measure StartPoint:1015.30328369141,1034, EndPoint:1046.25549316406,1034, PixelDistance:30.952209 2022-09-08 14:49:54,412 [Thread=5] INFO - DerivativeMeasure timespan = 0.2788 2022-09-08 14:49:55,493 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:55,545 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:55,545 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:55,545 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:49:55,546 [Thread=5] INFO - Measure StartPoint:1015.29351806641,1035, EndPoint:1046.28930664063,1035, PixelDistance:30.995789 2022-09-08 14:49:55,546 [Thread=5] INFO - DerivativeMeasure timespan = 0.338 2022-09-08 14:49:56,512 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:56,568 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:56,568 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:56,568 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:49:56,569 [Thread=5] INFO - Measure StartPoint:1015.30651855469,1035, EndPoint:1046.32006835938,1035, PixelDistance:31.01355 2022-09-08 14:49:56,569 [Thread=5] INFO - DerivativeMeasure timespan = 0.3088 2022-09-08 14:49:57,638 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:49:57,692 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:49:57,692 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.267651303171364 2022-09-08 14:49:57,692 [Thread=5] INFO - Measure angle is -0.133826 2022-09-08 14:49:57,693 [Thread=5] INFO - Measure StartPoint:1015.32733154297,1027.9541015625, EndPoint:1046.23828125,1028.02624511719, PixelDistance:30.911034 2022-09-08 14:49:57,693 [Thread=5] INFO - DerivativeMeasure timespan = 0.2835 2022-09-08 14:50:00,263 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:50:00,317 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:50:00,317 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0277014929554786 2022-09-08 14:50:00,317 [Thread=3] INFO - Measure angle is -0.013851 2022-09-08 14:50:00,318 [Thread=3] INFO - Measure StartPoint:1015.35229492188,1023.99475097656, EndPoint:1046.32739257813,1024.00219726563, PixelDistance:30.975099 2022-09-08 14:50:00,318 [Thread=3] INFO - DerivativeMeasure timespan = 0.2551 2022-09-08 14:50:09,251 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:50:09,251 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:50:11,672 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:50:11,672 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:50:11,672 [Thread=1] INFO - Longth长度127 2022-09-08 14:50:11,672 [Thread=1] INFO - 进入getLongth 2022-09-08 14:50:11,672 [Thread=1] INFO - 目标坐标X-23.680932Y7.791641 2022-09-08 14:50:11,672 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:50:11,673 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:50:11,673 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:50:11,673 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:50:11,673 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:50:11,673 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:50:11,673 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:50:11,673 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:50:14,507 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:14,507 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:14,507 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:14,508 [Thread=20] INFO - 该轴是Z,目标位置是-7.5021000000095 2022-09-08 14:50:14,508 [Thread=20] INFO - 步进失败 2022-09-08 14:50:14,705 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:14,705 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:14,706 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:14,706 [Thread=21] INFO - 该轴是Z,目标位置是-7.5021000000095 2022-09-08 14:50:14,706 [Thread=21] INFO - 步进失败 2022-09-08 14:50:14,900 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:14,900 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:14,900 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:14,901 [Thread=19] INFO - 该轴是Z,目标位置是-7.5023000000095 2022-09-08 14:50:14,901 [Thread=19] INFO - 步进失败 2022-09-08 14:50:15,098 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:15,098 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:15,098 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:15,099 [Thread=20] INFO - 该轴是Z,目标位置是-7.5023000000095 2022-09-08 14:50:15,099 [Thread=20] INFO - 步进失败 2022-09-08 14:50:15,323 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:15,323 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:15,324 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:15,324 [Thread=21] INFO - 该轴是Z,目标位置是-7.5025000000095 2022-09-08 14:50:15,325 [Thread=21] INFO - 步进失败 2022-09-08 14:50:15,962 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:15,963 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:15,963 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:15,963 [Thread=19] INFO - 该轴是Z,目标位置是-7.5031000000095 2022-09-08 14:50:15,964 [Thread=19] INFO - 步进失败 2022-09-08 14:50:16,146 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:16,146 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:16,147 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:16,147 [Thread=20] INFO - 该轴是Z,目标位置是-7.5031000000095 2022-09-08 14:50:16,147 [Thread=20] INFO - 步进失败 2022-09-08 14:50:16,762 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:16,762 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:16,762 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:16,763 [Thread=21] INFO - 该轴是Z,目标位置是-7.5030999999905 2022-09-08 14:50:16,763 [Thread=21] INFO - 步进失败 2022-09-08 14:50:16,961 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:16,962 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:16,962 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:16,962 [Thread=19] INFO - 该轴是Z,目标位置是-7.5030999999905 2022-09-08 14:50:16,962 [Thread=19] INFO - 步进失败 2022-09-08 14:50:17,161 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:17,161 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:17,161 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:17,161 [Thread=20] INFO - 该轴是Z,目标位置是-7.5030999999905 2022-09-08 14:50:17,162 [Thread=20] INFO - 步进失败 2022-09-08 14:50:17,327 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:17,327 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:17,327 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:17,327 [Thread=21] INFO - 该轴是Z,目标位置是-7.5030999999905 2022-09-08 14:50:17,327 [Thread=21] INFO - 步进失败 2022-09-08 14:50:17,498 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:17,498 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:17,498 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:17,498 [Thread=19] INFO - 该轴是Z,目标位置是-7.5026999999905 2022-09-08 14:50:17,498 [Thread=19] INFO - 步进失败 2022-09-08 14:50:17,694 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:17,694 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:17,694 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:17,694 [Thread=20] INFO - 该轴是Z,目标位置是-7.5022999999905 2022-09-08 14:50:17,694 [Thread=20] INFO - 步进失败 2022-09-08 14:50:17,850 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:17,850 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:17,850 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:17,850 [Thread=21] INFO - 该轴是Z,目标位置是-7.5022999999905 2022-09-08 14:50:17,851 [Thread=21] INFO - 步进失败 2022-09-08 14:50:18,041 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:18,041 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:18,042 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:18,042 [Thread=19] INFO - 该轴是Z,目标位置是-7.5018999999905 2022-09-08 14:50:18,042 [Thread=19] INFO - 步进失败 2022-09-08 14:50:18,329 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:18,329 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:18,329 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:18,330 [Thread=20] INFO - 该轴是Z,目标位置是-7.5016999999905 2022-09-08 14:50:18,330 [Thread=20] INFO - 步进失败 2022-09-08 14:50:18,587 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:18,587 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:18,587 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:18,588 [Thread=21] INFO - 该轴是Z,目标位置是-7.5012999999905 2022-09-08 14:50:18,588 [Thread=21] INFO - 步进失败 2022-09-08 14:50:19,961 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:19,962 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:19,962 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:19,962 [Thread=19] INFO - 该轴是Z,目标位置是-7.5010999999905 2022-09-08 14:50:19,962 [Thread=19] INFO - 步进失败 2022-09-08 14:50:20,153 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:20,153 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:20,153 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:20,153 [Thread=20] INFO - 该轴是Z,目标位置是-7.5010999999905 2022-09-08 14:50:20,154 [Thread=20] INFO - 步进失败 2022-09-08 14:50:20,376 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:20,377 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:20,377 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:20,377 [Thread=21] INFO - 该轴是Z,目标位置是-7.5010999999905 2022-09-08 14:50:20,377 [Thread=21] INFO - 步进失败 2022-09-08 14:50:21,209 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:21,209 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:21,209 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:21,210 [Thread=19] INFO - 该轴是Z,目标位置是-7.5009000000095 2022-09-08 14:50:21,210 [Thread=19] INFO - 步进失败 2022-09-08 14:50:21,393 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:21,393 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:21,394 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:21,394 [Thread=20] INFO - 该轴是Z,目标位置是-7.5009000000095 2022-09-08 14:50:21,395 [Thread=20] INFO - 步进失败 2022-09-08 14:50:21,585 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:21,585 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:21,585 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:21,586 [Thread=21] INFO - 该轴是Z,目标位置是-7.5009000000095 2022-09-08 14:50:21,586 [Thread=21] INFO - 步进失败 2022-09-08 14:50:21,809 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:21,809 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:21,810 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:21,810 [Thread=19] INFO - 该轴是Z,目标位置是-7.5013000000095 2022-09-08 14:50:21,810 [Thread=19] INFO - 步进失败 2022-09-08 14:50:21,985 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:21,985 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:21,985 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:21,986 [Thread=20] INFO - 该轴是Z,目标位置是-7.5013000000095 2022-09-08 14:50:21,986 [Thread=20] INFO - 步进失败 2022-09-08 14:50:22,161 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:22,161 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:22,161 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:22,162 [Thread=21] INFO - 该轴是Z,目标位置是-7.5017000000095 2022-09-08 14:50:22,162 [Thread=21] INFO - 步进失败 2022-09-08 14:50:22,361 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:22,361 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:22,361 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:22,362 [Thread=19] INFO - 该轴是Z,目标位置是-7.5019000000095 2022-09-08 14:50:22,362 [Thread=19] INFO - 步进失败 2022-09-08 14:50:22,537 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:22,537 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:22,538 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:22,538 [Thread=20] INFO - 该轴是Z,目标位置是-7.5019000000095 2022-09-08 14:50:22,538 [Thread=20] INFO - 步进失败 2022-09-08 14:50:22,736 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:22,736 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:22,736 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:22,736 [Thread=21] INFO - 该轴是Z,目标位置是-7.5023000000095 2022-09-08 14:50:22,737 [Thread=21] INFO - 步进失败 2022-09-08 14:50:22,889 [Thread=19] INFO - 单轴触发了 2022-09-08 14:50:22,890 [Thread=19] INFO - 该轴是Z 2022-09-08 14:50:22,890 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:22,890 [Thread=19] INFO - 该轴是Z,目标位置是-7.5023000000095 2022-09-08 14:50:22,890 [Thread=19] INFO - 步进失败 2022-09-08 14:50:23,073 [Thread=20] INFO - 单轴触发了 2022-09-08 14:50:23,074 [Thread=20] INFO - 该轴是Z 2022-09-08 14:50:23,074 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:23,074 [Thread=20] INFO - 该轴是Z,目标位置是-7.5027000000095 2022-09-08 14:50:23,075 [Thread=20] INFO - 步进失败 2022-09-08 14:50:23,769 [Thread=21] INFO - 单轴触发了 2022-09-08 14:50:23,769 [Thread=21] INFO - 该轴是Z 2022-09-08 14:50:23,769 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:23,770 [Thread=21] INFO - 该轴是Z,目标位置是-7.5031000000095 2022-09-08 14:50:23,770 [Thread=21] INFO - 步进失败 2022-09-08 14:50:29,965 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:50:30,026 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 91.0689643859836 2022-09-08 14:50:30,026 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.4652455092795 2022-09-08 14:50:30,026 [Thread=3] INFO - Measure angle is -90.767105 2022-09-08 14:50:30,026 [Thread=3] INFO - Measure StartPoint:1010.15710449219,995.266845703125, EndPoint:1009.73431396484,1026.84338378906, PixelDistance:31.579368 2022-09-08 14:50:30,026 [Thread=3] INFO - DerivativeMeasure timespan = 0.2538 2022-09-08 14:50:31,065 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:50:31,116 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.6985183710693 2022-09-08 14:50:31,116 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2258588095955 2022-09-08 14:50:31,116 [Thread=3] INFO - Measure angle is -90.462189 2022-09-08 14:50:31,117 [Thread=3] INFO - Measure StartPoint:1010.205078125,995.576721191406, EndPoint:1009.953125,1026.80859375, PixelDistance:31.232889 2022-09-08 14:50:31,117 [Thread=3] INFO - DerivativeMeasure timespan = 0.2737 2022-09-08 14:50:32,193 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:50:32,244 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.8293148801132 2022-09-08 14:50:32,244 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.5242518795694 2022-09-08 14:50:32,244 [Thread=3] INFO - Measure angle is -90.676783 2022-09-08 14:50:32,244 [Thread=3] INFO - Measure StartPoint:1013.13848876953,995.273864746094, EndPoint:1012.765625,1026.83874511719, PixelDistance:31.567083 2022-09-08 14:50:32,244 [Thread=3] INFO - DerivativeMeasure timespan = 0.2907 2022-09-08 14:50:33,651 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:50:33,704 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.576385193456 2022-09-08 14:50:33,704 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.6072921561111 2022-09-08 14:50:33,705 [Thread=3] INFO - Measure angle is -90.591839 2022-09-08 14:50:33,705 [Thread=3] INFO - Measure StartPoint:1029.23425292969,995.321838378906, EndPoint:1028.90844726563,1026.86706542969, PixelDistance:31.54691 2022-09-08 14:50:33,705 [Thread=3] INFO - DerivativeMeasure timespan = 0.4122 2022-09-08 14:50:34,822 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:50:34,872 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.7118497233296 2022-09-08 14:50:34,873 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.6072921561111 2022-09-08 14:50:34,873 [Thread=3] INFO - Measure angle is -90.659571 2022-09-08 14:50:34,873 [Thread=3] INFO - Measure StartPoint:1020.16931152344,995.292419433594, EndPoint:1019.80584716797,1026.86669921875, PixelDistance:31.576372 2022-09-08 14:50:34,873 [Thread=3] INFO - DerivativeMeasure timespan = 0.3212 2022-09-08 14:50:50,629 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:50:50,633 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:50:50,645 [Thread=15] INFO - 单轴触发了 2022-09-08 14:50:50,645 [Thread=15] INFO - 该轴是Z 2022-09-08 14:50:50,645 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:50:50,646 [Thread=15] INFO - 该轴是Z,目标位置是-7.45210000095367 2022-09-08 14:50:50,646 [Thread=15] INFO - 步进失败 2022-09-08 14:50:50,646 [Thread=15] INFO - SwitchOffsetZ:0.051 2022-09-08 14:50:50,650 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:50:50,650 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:50:50,650 [Thread=15] INFO - Longth长度127 2022-09-08 14:50:50,650 [Thread=15] INFO - 进入getLongth 2022-09-08 14:50:50,650 [Thread=15] INFO - 目标坐标X-23.623932Y7.872641 2022-09-08 14:50:50,650 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:50:50,651 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:50:50,651 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:50:50,651 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:50:50,651 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:50:50,651 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:50:50,651 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:50:50,651 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:50:54,893 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:50:54,893 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:50:54,893 [Thread=19] INFO - Longth长度127 2022-09-08 14:50:54,893 [Thread=19] INFO - 进入getLongth 2022-09-08 14:50:54,893 [Thread=19] INFO - 目标坐标X-73.623932Y57.872641 2022-09-08 14:50:54,894 [Thread=19] INFO - 晶圆的大小5 2022-09-08 14:50:54,894 [Thread=19] INFO - 晶圆的宽高127 2022-09-08 14:50:54,894 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:50:54,894 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 14:50:54,894 [Thread=19] INFO - X-安全坐标18.39 2022-09-08 14:50:54,894 [Thread=19] INFO - Y上安全坐标-16.7307 2022-09-08 14:50:54,894 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 14:50:54,894 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 14:50:55,803 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:50:55,804 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:50:55,804 [Thread=20] INFO - Longth长度127 2022-09-08 14:50:55,804 [Thread=20] INFO - 进入getLongth 2022-09-08 14:50:55,804 [Thread=20] INFO - 目标坐标X-96.1664961838188Y80.4293473192911 2022-09-08 14:50:55,804 [Thread=20] INFO - 晶圆的大小5 2022-09-08 14:50:55,804 [Thread=20] INFO - 晶圆的宽高127 2022-09-08 14:50:55,804 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:50:55,805 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 14:50:55,805 [Thread=20] INFO - X-安全坐标18.39 2022-09-08 14:50:55,805 [Thread=20] INFO - Y上安全坐标-16.7307 2022-09-08 14:50:55,805 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 14:50:55,805 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 14:50:57,828 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 14:50:57,828 [Thread=21] INFO - stagein homez 2022-09-08 14:50:57,828 [Thread=21] INFO - stagein home ok 2022-09-08 14:50:57,828 [Thread=21] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 14:50:57,829 [Thread=21] INFO - Longth长度127 2022-09-08 14:50:57,829 [Thread=21] INFO - 进入getLongth 2022-09-08 14:50:57,829 [Thread=21] INFO - 目标坐标X-119.087896828253Y103.342607779428 2022-09-08 14:50:57,829 [Thread=21] INFO - 晶圆的大小5 2022-09-08 14:50:57,829 [Thread=21] INFO - 晶圆的宽高127 2022-09-08 14:50:57,829 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:50:57,829 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 14:50:57,829 [Thread=21] INFO - X-安全坐标18.39 2022-09-08 14:50:57,829 [Thread=21] INFO - Y上安全坐标-16.7307 2022-09-08 14:50:57,829 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 14:50:57,830 [Thread=21] INFO - 双轴-目标点不在范围内 2022-09-08 14:50:57,830 [Thread=21] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 14:51:06,864 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 14:51:06,867 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 14:51:06,870 [Thread=15] INFO - 单轴触发了 2022-09-08 14:51:06,870 [Thread=15] INFO - 该轴是Z 2022-09-08 14:51:06,870 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:06,871 [Thread=15] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 14:51:06,871 [Thread=15] INFO - 步进失败 2022-09-08 14:51:06,871 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 14:51:06,881 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:06,881 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:06,881 [Thread=15] INFO - Longth长度127 2022-09-08 14:51:06,882 [Thread=15] INFO - 进入getLongth 2022-09-08 14:51:06,882 [Thread=15] INFO - 目标坐标X-115Y103.342608 2022-09-08 14:51:06,882 [Thread=15] INFO - 晶圆的大小5 2022-09-08 14:51:06,882 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 14:51:06,882 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:06,883 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 14:51:06,883 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 14:51:06,883 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:06,883 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 14:51:06,883 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 14:51:07,882 [Thread=4] INFO - stagein currentPos:-0.4998, currentVelocity:2, delayTime:300, point.Z:-0.5 2022-09-08 14:51:07,882 [Thread=4] INFO - stagein homez 2022-09-08 14:51:10,198 [Thread=4] INFO - stagein home ok 2022-09-08 14:51:10,200 [Thread=4] INFO - StageBack: waferSize = 5 2022-09-08 14:51:10,204 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:10,204 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:10,204 [Thread=4] INFO - Longth长度127 2022-09-08 14:51:10,204 [Thread=4] INFO - 进入getLongth 2022-09-08 14:51:10,204 [Thread=4] INFO - 目标坐标X13.39Y115.2693 2022-09-08 14:51:10,204 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:51:10,204 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:51:10,205 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:10,205 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:51:10,205 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:51:10,205 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:10,205 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:51:10,205 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:51:17,253 [Thread=4] INFO - 单轴触发了 2022-09-08 14:51:17,254 [Thread=4] INFO - 该轴是Z 2022-09-08 14:51:17,254 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:17,254 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:17,254 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:17,254 [Thread=21] INFO - Longth长度127 2022-09-08 14:51:17,254 [Thread=21] INFO - 进入getLongth 2022-09-08 14:51:17,255 [Thread=21] INFO - 目标坐标X-65Y53.3426077794282 2022-09-08 14:51:17,255 [Thread=21] INFO - 晶圆的大小5 2022-09-08 14:51:17,255 [Thread=21] INFO - 晶圆的宽高127 2022-09-08 14:51:17,255 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:17,255 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 14:51:17,255 [Thread=21] INFO - X-安全坐标18.39 2022-09-08 14:51:17,255 [Thread=21] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:17,255 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 14:51:17,255 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 14:51:17,254 [Thread=4] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 14:51:17,256 [Thread=4] INFO - 步进失败 2022-09-08 14:51:43,211 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:51:44,534 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:44,535 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:44,535 [Thread=21] INFO - Longth长度127 2022-09-08 14:51:44,535 [Thread=21] INFO - 进入getLongth 2022-09-08 14:51:44,535 [Thread=21] INFO - 目标坐标X-70Y58.3426077794282 2022-09-08 14:51:44,535 [Thread=21] INFO - 晶圆的大小5 2022-09-08 14:51:44,535 [Thread=21] INFO - 晶圆的宽高127 2022-09-08 14:51:44,535 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:44,535 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 14:51:44,535 [Thread=21] INFO - X-安全坐标18.39 2022-09-08 14:51:44,536 [Thread=21] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:44,536 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 14:51:44,536 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 14:51:45,322 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:45,322 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:45,322 [Thread=19] INFO - Longth长度127 2022-09-08 14:51:45,322 [Thread=19] INFO - 进入getLongth 2022-09-08 14:51:45,322 [Thread=19] INFO - 目标坐标X-75Y63.3426077794282 2022-09-08 14:51:45,322 [Thread=19] INFO - 晶圆的大小5 2022-09-08 14:51:45,322 [Thread=19] INFO - 晶圆的宽高127 2022-09-08 14:51:45,322 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:45,322 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 14:51:45,322 [Thread=19] INFO - X-安全坐标18.39 2022-09-08 14:51:45,322 [Thread=19] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:45,323 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 14:51:45,323 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 14:51:46,038 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:46,038 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:46,038 [Thread=20] INFO - Longth长度127 2022-09-08 14:51:46,038 [Thread=20] INFO - 进入getLongth 2022-09-08 14:51:46,038 [Thread=20] INFO - 目标坐标X-80Y68.3426077794282 2022-09-08 14:51:46,038 [Thread=20] INFO - 晶圆的大小5 2022-09-08 14:51:46,039 [Thread=20] INFO - 晶圆的宽高127 2022-09-08 14:51:46,039 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:46,039 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 14:51:46,039 [Thread=20] INFO - X-安全坐标18.39 2022-09-08 14:51:46,039 [Thread=20] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:46,039 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 14:51:46,039 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 14:51:47,104 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:47,104 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:47,104 [Thread=21] INFO - Longth长度127 2022-09-08 14:51:47,104 [Thread=21] INFO - 进入getLongth 2022-09-08 14:51:47,105 [Thread=21] INFO - 目标坐标X-85Y73.3426077794282 2022-09-08 14:51:47,105 [Thread=21] INFO - 晶圆的大小5 2022-09-08 14:51:47,105 [Thread=21] INFO - 晶圆的宽高127 2022-09-08 14:51:47,105 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:51:47,105 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 14:51:47,105 [Thread=21] INFO - X-安全坐标18.39 2022-09-08 14:51:47,105 [Thread=21] INFO - Y上安全坐标-16.7307 2022-09-08 14:51:47,105 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 14:51:47,105 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 14:51:48,531 [Thread=19] INFO - 单轴触发了 2022-09-08 14:51:48,534 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:48,535 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:48,535 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:51:48,535 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:48,535 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:51:48,535 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:51:48,535 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:51:49,164 [Thread=20] INFO - 单轴触发了 2022-09-08 14:51:49,167 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:49,167 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:49,168 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:51:49,168 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:49,168 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:51:49,168 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:51:49,168 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:51:49,949 [Thread=21] INFO - 单轴触发了 2022-09-08 14:51:49,952 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:49,952 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:49,952 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:51:49,953 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:49,953 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:51:49,953 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:51:49,953 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:51:53,256 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:51:53,256 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:51:53,256 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:51:53,256 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:51:53,257 [Thread=21] INFO - 该轴是Y,目标位置是88.3426077794282 2022-09-08 14:51:53,257 [Thread=21] INFO - 步进失败 2022-09-08 14:51:53,256 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:51:53,257 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:51:53,257 [Thread=19] INFO - 该轴是Y,目标位置是78.3426077794282 2022-09-08 14:51:53,256 [Thread=20] INFO - 该轴是Y,目标位置是83.3426077794282 2022-09-08 14:51:53,257 [Thread=20] INFO - 步进失败 2022-09-08 14:51:53,257 [Thread=19] INFO - 步进失败 2022-09-08 14:51:53,803 [Thread=21] INFO - 单轴触发了 2022-09-08 14:51:53,806 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:53,806 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:53,806 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:51:53,807 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:53,807 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:51:53,807 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:51:53,807 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:51:54,269 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:51:54,269 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:51:54,270 [Thread=21] INFO - 该轴是Y,目标位置是93.3426077794282 2022-09-08 14:51:54,270 [Thread=21] INFO - 步进失败 2022-09-08 14:51:54,603 [Thread=20] INFO - 单轴触发了 2022-09-08 14:51:54,606 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:54,607 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:54,607 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:51:54,607 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:54,607 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:51:54,607 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:51:54,607 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:51:56,801 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:51:56,801 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:51:56,801 [Thread=20] INFO - 该轴是Y,目标位置是98.3426077794282 2022-09-08 14:51:56,802 [Thread=20] INFO - 步进失败 2022-09-08 14:51:59,162 [Thread=19] INFO - 单轴触发了 2022-09-08 14:51:59,166 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:51:59,166 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:51:59,166 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:51:59,166 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:51:59,166 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:51:59,167 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:51:59,167 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:51:59,883 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:51:59,883 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:51:59,883 [Thread=19] INFO - 该轴是X,目标位置是-80 2022-09-08 14:51:59,883 [Thread=19] INFO - 步进失败 2022-09-08 14:52:00,791 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:52:00,791 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:52:01,700 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:01,701 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:01,701 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:01,701 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:01,701 [Thread=1] INFO - 目标坐标X-79.396857Y99.124665 2022-09-08 14:52:01,701 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:01,701 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:01,701 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:01,701 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:01,702 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:01,702 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:01,702 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:01,702 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:02,772 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:02,772 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:02,773 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:02,773 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:02,773 [Thread=1] INFO - 目标坐标X-78.805396Y99.86061 2022-09-08 14:52:02,773 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:02,773 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:02,773 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:02,773 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:02,773 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:02,773 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:02,773 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:02,774 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:04,231 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:04,231 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:04,231 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:04,232 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:04,232 [Thread=1] INFO - 目标坐标X-78.551473Y100.567658 2022-09-08 14:52:04,232 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:04,232 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:04,232 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:04,232 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:04,232 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:04,232 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:04,232 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:04,232 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:05,489 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:05,490 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:05,490 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:05,490 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:05,490 [Thread=1] INFO - 目标坐标X-78.601889Y101.305448 2022-09-08 14:52:05,490 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:05,490 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:05,490 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:05,490 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:05,490 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:05,490 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:05,490 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:05,491 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:06,576 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:06,577 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:06,577 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:06,577 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:06,577 [Thread=1] INFO - 目标坐标X-78.740225Y102.072134 2022-09-08 14:52:06,577 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:06,577 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:06,577 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:06,577 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:06,577 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:06,578 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:06,578 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:06,578 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:09,964 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:09,964 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:09,965 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:09,965 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:09,965 [Thread=1] INFO - 目标坐标X-78.957258Y102.719544 2022-09-08 14:52:09,965 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:09,965 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:09,965 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:09,965 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:09,965 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:09,965 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:09,965 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:09,966 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:11,635 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:11,635 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:11,636 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:11,636 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:11,636 [Thread=1] INFO - 目标坐标X-78.678742Y103.622107 2022-09-08 14:52:11,636 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:11,636 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:11,636 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:11,636 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:11,636 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:11,636 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:11,636 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:11,636 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:12,871 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:12,871 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:12,871 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:12,871 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:12,871 [Thread=1] INFO - 目标坐标X-78.315381Y104.338378 2022-09-08 14:52:12,871 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:12,872 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:12,872 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:12,872 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:12,872 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:12,872 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:12,872 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:12,872 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:14,250 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:14,251 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:14,251 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:14,251 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:14,251 [Thread=1] INFO - 目标坐标X-78.259432Y104.99747 2022-09-08 14:52:14,251 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:14,251 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:14,251 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:14,251 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:14,251 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:14,251 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:14,252 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:14,252 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:15,876 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:15,876 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:15,876 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:15,876 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:15,876 [Thread=1] INFO - 目标坐标X-78.253284Y105.596924 2022-09-08 14:52:15,876 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:15,876 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:15,876 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:15,877 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:15,877 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:15,877 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:15,877 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:15,877 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:17,250 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:17,251 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:17,251 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:17,251 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:17,251 [Thread=1] INFO - 目标坐标X-78.70641Y106.342092 2022-09-08 14:52:17,251 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:17,251 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:17,251 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:17,251 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:17,251 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:17,251 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:17,252 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:17,252 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:24,433 [Thread=21] INFO - 单轴触发了 2022-09-08 14:52:24,437 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:24,437 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:24,437 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:52:24,437 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:24,437 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:24,437 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:24,437 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:25,047 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:25,048 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:25,048 [Thread=21] INFO - 该轴是Y,目标位置是101.342092 2022-09-08 14:52:25,049 [Thread=21] INFO - 步进失败 2022-09-08 14:52:25,072 [Thread=20] INFO - 单轴触发了 2022-09-08 14:52:25,076 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:25,076 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:25,077 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:52:25,077 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:25,077 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:25,077 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:25,077 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:25,996 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:25,997 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:25,997 [Thread=20] INFO - 该轴是Y,目标位置是96.342092 2022-09-08 14:52:25,997 [Thread=20] INFO - 步进失败 2022-09-08 14:52:26,955 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:26,956 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:26,956 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:26,956 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:26,956 [Thread=1] INFO - 目标坐标X-78.450643Y95.705748 2022-09-08 14:52:26,956 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:26,956 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:26,956 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:26,956 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:26,956 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:26,956 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:26,957 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:26,957 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:30,281 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:30,281 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:30,282 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:30,282 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:30,282 [Thread=1] INFO - 目标坐标X-77.39253Y95.726652 2022-09-08 14:52:30,282 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:30,282 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:30,282 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:30,282 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:30,282 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:30,282 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:30,282 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:30,282 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:33,257 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:33,257 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:33,257 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:33,257 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:33,258 [Thread=1] INFO - 目标坐标X-77.413434Y95.897573 2022-09-08 14:52:33,258 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:33,258 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:33,258 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:33,258 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:33,258 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:33,258 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:33,258 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:33,258 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:52:45,101 [Thread=19] INFO - 单轴触发了 2022-09-08 14:52:45,104 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:45,104 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:45,104 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:52:45,104 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:45,104 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:45,104 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:45,104 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:45,690 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:45,690 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:45,690 [Thread=19] INFO - 该轴是X,目标位置是-82.413434 2022-09-08 14:52:45,690 [Thread=19] INFO - 步进失败 2022-09-08 14:52:45,700 [Thread=21] INFO - 单轴触发了 2022-09-08 14:52:45,704 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:45,704 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:45,704 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:52:45,705 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:45,705 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:45,705 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:45,705 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:46,166 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:46,166 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:46,166 [Thread=21] INFO - 该轴是X,目标位置是-87.413434 2022-09-08 14:52:46,166 [Thread=21] INFO - 步进失败 2022-09-08 14:52:46,341 [Thread=20] INFO - 单轴触发了 2022-09-08 14:52:46,345 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:46,345 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:46,345 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:52:46,345 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:46,345 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:46,345 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:46,345 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:46,817 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:46,817 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:46,817 [Thread=20] INFO - 该轴是X,目标位置是-92.413434 2022-09-08 14:52:46,817 [Thread=20] INFO - 步进失败 2022-09-08 14:52:46,837 [Thread=19] INFO - 单轴触发了 2022-09-08 14:52:46,840 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:46,841 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:46,841 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:52:46,841 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:46,841 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:46,841 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:46,841 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:47,276 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:47,276 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:47,276 [Thread=19] INFO - 该轴是X,目标位置是-97.413434 2022-09-08 14:52:47,276 [Thread=19] INFO - 步进失败 2022-09-08 14:52:47,374 [Thread=21] INFO - 单轴触发了 2022-09-08 14:52:47,377 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:47,377 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:47,377 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 14:52:47,378 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:47,378 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:47,378 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:47,378 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:47,796 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:47,796 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:47,796 [Thread=21] INFO - 该轴是X,目标位置是-102.413434 2022-09-08 14:52:47,796 [Thread=21] INFO - 步进失败 2022-09-08 14:52:48,942 [Thread=20] INFO - 单轴触发了 2022-09-08 14:52:48,946 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:48,946 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:48,946 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:52:48,946 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:48,946 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:52:48,946 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:52:48,946 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:52:49,376 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:52:49,377 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:52:49,377 [Thread=20] INFO - 该轴是X,目标位置是-97.413434 2022-09-08 14:52:49,377 [Thread=20] INFO - 步进失败 2022-09-08 14:52:53,445 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:52:53,447 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:52:53,459 [Thread=4] INFO - 单轴触发了 2022-09-08 14:52:53,460 [Thread=4] INFO - 该轴是Z 2022-09-08 14:52:53,460 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:52:53,460 [Thread=4] INFO - 该轴是Z,目标位置是-7.74059999904633 2022-09-08 14:52:53,460 [Thread=4] INFO - 步进失败 2022-09-08 14:52:53,460 [Thread=4] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:52:53,465 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:53,465 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:53,465 [Thread=4] INFO - Longth长度127 2022-09-08 14:52:53,465 [Thread=4] INFO - 进入getLongth 2022-09-08 14:52:53,465 [Thread=4] INFO - 目标坐标X-97.470434Y95.816573 2022-09-08 14:52:53,465 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:52:53,465 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:52:53,466 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:53,466 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:52:53,466 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:52:53,466 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:53,466 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:52:53,466 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:52:55,466 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:52:59,879 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:52:59,879 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:52:59,879 [Thread=1] INFO - Longth长度127 2022-09-08 14:52:59,879 [Thread=1] INFO - 进入getLongth 2022-09-08 14:52:59,879 [Thread=1] INFO - 目标坐标X-97.469782Y95.786282 2022-09-08 14:52:59,879 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:52:59,880 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:52:59,880 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:52:59,880 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:52:59,880 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:52:59,880 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:52:59,880 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:52:59,880 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:53:03,638 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:53:03,638 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:53:03,638 [Thread=1] INFO - Longth长度127 2022-09-08 14:53:03,638 [Thread=1] INFO - 进入getLongth 2022-09-08 14:53:03,638 [Thread=1] INFO - 目标坐标X-97.464035Y95.791035 2022-09-08 14:53:03,638 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:53:03,638 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:53:03,638 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:53:03,638 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:53:03,638 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:53:03,639 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:53:03,639 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:53:03,639 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:53:31,351 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:53:31,407 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.100557124707474 2022-09-08 14:53:31,407 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.308641219906383 2022-09-08 14:53:31,407 [Thread=13] INFO - Measure angle is -0.204599 2022-09-08 14:53:31,408 [Thread=13] INFO - Measure StartPoint:1038.71350097656,1095.92395019531, EndPoint:1067.91271972656,1096.02819824219, PixelDistance:29.199405 2022-09-08 14:53:31,408 [Thread=13] INFO - DerivativeMeasure timespan = 0.4334 2022-09-08 14:53:35,291 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:53:35,349 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.0390139842437956 2022-09-08 14:53:35,349 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.541785857767045 2022-09-08 14:53:35,349 [Thread=13] INFO - Measure angle is -0.2904 2022-09-08 14:53:35,349 [Thread=13] INFO - Measure StartPoint:1038.52490234375,1172.91137695313, EndPoint:1067.62976074219,1173.05895996094, PixelDistance:29.105233 2022-09-08 14:53:35,350 [Thread=13] INFO - DerivativeMeasure timespan = 0.3633 2022-09-08 14:53:36,447 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:53:36,501 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:53:36,501 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.591067039026853 2022-09-08 14:53:36,501 [Thread=13] INFO - Measure angle is -0.295534 2022-09-08 14:53:36,501 [Thread=13] INFO - Measure StartPoint:1038.22912597656,1222.91870117188, EndPoint:1067.38488769531,1223.06909179688, PixelDistance:29.15615 2022-09-08 14:53:36,502 [Thread=13] INFO - DerivativeMeasure timespan = 0.3059 2022-09-08 14:53:37,541 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:53:37,592 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:53:37,592 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.025880334891235 2022-09-08 14:53:37,592 [Thread=13] INFO - Measure angle is -0.01294 2022-09-08 14:53:37,592 [Thread=13] INFO - Measure StartPoint:1038.11059570313,1239.99658203125, EndPoint:1067.33264160156,1240.00329589844, PixelDistance:29.222047 2022-09-08 14:53:37,592 [Thread=13] INFO - DerivativeMeasure timespan = 0.2786 2022-09-08 14:53:47,101 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:53:47,158 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.17660694089155 2022-09-08 14:53:47,159 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.192447696732052 2022-09-08 14:53:47,159 [Thread=16] INFO - Measure angle is -0.184527 2022-09-08 14:53:47,159 [Thread=16] INFO - Measure StartPoint:1038.02282714844,1272.9453125, EndPoint:1067.1328125,1273.0390625, PixelDistance:29.110136 2022-09-08 14:53:47,159 [Thread=16] INFO - DerivativeMeasure timespan = 0.4274 2022-09-08 14:54:05,307 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:54:05,308 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:54:07,071 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:54:07,071 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:54:07,071 [Thread=1] INFO - Longth长度127 2022-09-08 14:54:07,071 [Thread=1] INFO - 进入getLongth 2022-09-08 14:54:07,071 [Thread=1] INFO - 目标坐标X-97.462948Y95.776744 2022-09-08 14:54:07,071 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:54:07,071 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:54:07,072 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:54:07,072 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:54:07,072 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:54:07,072 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:54:07,072 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:54:07,072 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:54:11,406 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:54:11,406 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:54:11,406 [Thread=1] INFO - Longth长度127 2022-09-08 14:54:11,406 [Thread=1] INFO - 进入getLongth 2022-09-08 14:54:11,406 [Thread=1] INFO - 目标坐标X-97.466645Y95.775284 2022-09-08 14:54:11,406 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:54:11,406 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:54:11,406 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:54:11,407 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:54:11,407 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:54:11,407 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:54:11,407 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:54:11,407 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:54:17,915 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:17,972 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:17,972 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:17,972 [Thread=16] INFO - Measure angle is -90 2022-09-08 14:54:17,972 [Thread=16] INFO - Measure StartPoint:1019,980.979064941406, EndPoint:1019,1011.19769287109, PixelDistance:30.218628 2022-09-08 14:54:17,973 [Thread=16] INFO - DerivativeMeasure timespan = 0.1859 2022-09-08 14:54:18,828 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:18,882 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.817497833859 2022-09-08 14:54:18,883 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2931171991009 2022-09-08 14:54:18,883 [Thread=16] INFO - Measure angle is -90.555308 2022-09-08 14:54:18,883 [Thread=16] INFO - Measure StartPoint:1010.17474365234,980.969055175781, EndPoint:1009.88153076172,1011.22613525391, PixelDistance:30.258501 2022-09-08 14:54:18,883 [Thread=16] INFO - DerivativeMeasure timespan = 0.2396 2022-09-08 14:54:19,650 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:19,706 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.4855507558867 2022-09-08 14:54:19,706 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.4271211072737 2022-09-08 14:54:19,706 [Thread=16] INFO - Measure angle is -90.456336 2022-09-08 14:54:19,706 [Thread=16] INFO - Measure StartPoint:1023.11962890625,980.982604980469, EndPoint:1022.87841796875,1011.26348876953, PixelDistance:30.281844 2022-09-08 14:54:19,706 [Thread=16] INFO - DerivativeMeasure timespan = 0.2362 2022-09-08 14:54:20,395 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:20,451 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 91.0859339420767 2022-09-08 14:54:20,452 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.1222791276719 2022-09-08 14:54:20,452 [Thread=16] INFO - Measure angle is -90.604107 2022-09-08 14:54:20,452 [Thread=16] INFO - Measure StartPoint:1020.14770507813,980.9931640625, EndPoint:1019.82855224609,1011.26257324219, PixelDistance:30.271092 2022-09-08 14:54:20,452 [Thread=16] INFO - DerivativeMeasure timespan = 0.328 2022-09-08 14:54:21,481 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:21,531 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.6196169458761 2022-09-08 14:54:21,531 [Thread=16] INFO - Measure angle is -90.619617 2022-09-08 14:54:21,532 [Thread=16] INFO - Measure StartPoint:1024.16223144531,981.000549316406, EndPoint:1023.83532714844,1011.22772216797, PixelDistance:30.228941 2022-09-08 14:54:21,532 [Thread=16] INFO - DerivativeMeasure timespan = 0.2061 2022-09-08 14:54:38,693 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:38,747 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.1954045838734 2022-09-08 14:54:38,747 [Thread=16] INFO - Measure angle is -90.195405 2022-09-08 14:54:38,747 [Thread=16] INFO - Measure StartPoint:1013.04449462891,981.9453125, EndPoint:1012.94134521484,1012.20562744141, PixelDistance:30.260491 2022-09-08 14:54:38,748 [Thread=16] INFO - DerivativeMeasure timespan = 0.2765 2022-09-08 14:54:39,862 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:39,914 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:39,914 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:39,914 [Thread=16] INFO - Measure angle is -90 2022-09-08 14:54:39,915 [Thread=16] INFO - Measure StartPoint:1007,981.838317871094, EndPoint:1007,1012.2412109375, PixelDistance:30.402893 2022-09-08 14:54:39,915 [Thread=16] INFO - DerivativeMeasure timespan = 0.3043 2022-09-08 14:54:40,985 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:41,059 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:41,059 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.5815507567549 2022-09-08 14:54:41,060 [Thread=16] INFO - Measure angle is -90.290775 2022-09-08 14:54:41,060 [Thread=16] INFO - Measure StartPoint:1037.12292480469,981.781188964844, EndPoint:1036.96997070313,1011.92785644531, PixelDistance:30.147055 2022-09-08 14:54:41,060 [Thread=16] INFO - DerivativeMeasure timespan = 0.239 2022-09-08 14:54:42,124 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:42,199 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.4286965980376 2022-09-08 14:54:42,199 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:42,199 [Thread=16] INFO - Measure angle is -90.214348 2022-09-08 14:54:42,199 [Thread=16] INFO - Measure StartPoint:1021.07824707031,982.092041015625, EndPoint:1020.96472167969,1012.42816162109, PixelDistance:30.336333 2022-09-08 14:54:42,199 [Thread=16] INFO - DerivativeMeasure timespan = 0.2262 2022-09-08 14:54:43,376 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:54:43,457 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:43,458 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:54:43,458 [Thread=16] INFO - Measure angle is -90 2022-09-08 14:54:43,459 [Thread=16] INFO - Measure StartPoint:1026,981.853942871094, EndPoint:1026,1012.26678466797, PixelDistance:30.412842 2022-09-08 14:54:43,459 [Thread=16] INFO - DerivativeMeasure timespan = 0.3425 2022-09-08 14:54:55,908 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:54:55,911 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:54:55,922 [Thread=4] INFO - 单轴触发了 2022-09-08 14:54:55,922 [Thread=4] INFO - 该轴是Z 2022-09-08 14:54:55,922 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:54:55,923 [Thread=4] INFO - 该轴是Z,目标位置是-7.68960000095367 2022-09-08 14:54:55,923 [Thread=4] INFO - 步进失败 2022-09-08 14:54:55,923 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 14:54:55,927 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:54:55,927 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:54:55,927 [Thread=4] INFO - Longth长度127 2022-09-08 14:54:55,927 [Thread=4] INFO - 进入getLongth 2022-09-08 14:54:55,927 [Thread=4] INFO - 目标坐标X-97.409645Y95.856284 2022-09-08 14:54:55,927 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:54:55,927 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:54:55,927 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:54:55,928 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:54:55,928 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:54:55,928 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:54:55,928 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:54:55,928 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:54:58,967 [Thread=19] INFO - 单轴触发了 2022-09-08 14:54:58,971 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:54:58,972 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:54:58,972 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 14:54:58,972 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:54:58,972 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 14:54:58,972 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 14:54:58,972 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 14:54:59,413 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 14:54:59,413 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 14:54:59,413 [Thread=19] INFO - 该轴是X,目标位置是-92.409645 2022-09-08 14:54:59,414 [Thread=19] INFO - 步进失败 2022-09-08 14:55:01,351 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:55:03,864 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:55:03,866 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:55:03,878 [Thread=4] INFO - 单轴触发了 2022-09-08 14:55:03,878 [Thread=4] INFO - 该轴是Z 2022-09-08 14:55:03,878 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:03,879 [Thread=4] INFO - 该轴是Z,目标位置是-7.74079999904633 2022-09-08 14:55:03,879 [Thread=4] INFO - 步进失败 2022-09-08 14:55:03,879 [Thread=4] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:55:03,886 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:55:03,886 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:55:03,886 [Thread=4] INFO - Longth长度127 2022-09-08 14:55:03,886 [Thread=4] INFO - 进入getLongth 2022-09-08 14:55:03,886 [Thread=4] INFO - 目标坐标X-92.466645Y95.775284 2022-09-08 14:55:03,886 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:55:03,886 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:55:03,886 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:55:03,886 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:55:03,887 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:55:03,887 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:55:03,887 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:55:03,887 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:55:05,876 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:55:10,251 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:10,251 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:10,251 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:10,252 [Thread=21] INFO - 该轴是Z,目标位置是-7.7376000000095 2022-09-08 14:55:10,252 [Thread=21] INFO - 步进失败 2022-09-08 14:55:10,419 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:10,419 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:10,419 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:10,420 [Thread=20] INFO - 该轴是Z,目标位置是-7.7376000000095 2022-09-08 14:55:10,420 [Thread=20] INFO - 步进失败 2022-09-08 14:55:10,603 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:10,603 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:10,603 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:10,603 [Thread=19] INFO - 该轴是Z,目标位置是-7.7376000000095 2022-09-08 14:55:10,604 [Thread=19] INFO - 步进失败 2022-09-08 14:55:10,787 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:10,787 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:10,787 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:10,788 [Thread=21] INFO - 该轴是Z,目标位置是-7.7380000000095 2022-09-08 14:55:10,788 [Thread=21] INFO - 步进失败 2022-09-08 14:55:10,964 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:10,964 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:10,964 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:10,965 [Thread=20] INFO - 该轴是Z,目标位置是-7.7384000000095 2022-09-08 14:55:10,965 [Thread=20] INFO - 步进失败 2022-09-08 14:55:11,142 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:11,142 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:11,143 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:11,143 [Thread=19] INFO - 该轴是Z,目标位置是-7.7384000000095 2022-09-08 14:55:11,143 [Thread=19] INFO - 步进失败 2022-09-08 14:55:11,313 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:11,313 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:11,313 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:11,314 [Thread=21] INFO - 该轴是Z,目标位置是-7.7388000000095 2022-09-08 14:55:11,314 [Thread=21] INFO - 步进失败 2022-09-08 14:55:11,475 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:11,475 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:11,475 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:11,475 [Thread=20] INFO - 该轴是Z,目标位置是-7.7388000000095 2022-09-08 14:55:11,475 [Thread=20] INFO - 步进失败 2022-09-08 14:55:11,682 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:11,682 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:11,683 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:11,683 [Thread=19] INFO - 该轴是Z,目标位置是-7.7392000000095 2022-09-08 14:55:11,683 [Thread=19] INFO - 步进失败 2022-09-08 14:55:11,859 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:11,859 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:11,859 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:11,860 [Thread=21] INFO - 该轴是Z,目标位置是-7.7392000000095 2022-09-08 14:55:11,860 [Thread=21] INFO - 步进失败 2022-09-08 14:55:12,018 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:12,019 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:12,019 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:12,019 [Thread=20] INFO - 该轴是Z,目标位置是-7.7394000000095 2022-09-08 14:55:12,019 [Thread=20] INFO - 步进失败 2022-09-08 14:55:12,931 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:12,931 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:12,931 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:12,931 [Thread=19] INFO - 该轴是Z,目标位置是-7.7398000000095 2022-09-08 14:55:12,931 [Thread=19] INFO - 步进失败 2022-09-08 14:55:13,163 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:13,163 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:13,163 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:13,163 [Thread=21] INFO - 该轴是Z,目标位置是-7.7400000000095 2022-09-08 14:55:13,164 [Thread=21] INFO - 步进失败 2022-09-08 14:55:14,279 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:14,280 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:14,280 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:14,280 [Thread=20] INFO - 该轴是Z,目标位置是-7.7397999999905 2022-09-08 14:55:14,280 [Thread=20] INFO - 步进失败 2022-09-08 14:55:14,466 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:14,466 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:14,466 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:14,467 [Thread=19] INFO - 该轴是Z,目标位置是-7.7395999999905 2022-09-08 14:55:14,467 [Thread=19] INFO - 步进失败 2022-09-08 14:55:14,650 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:14,650 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:14,651 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:14,651 [Thread=21] INFO - 该轴是Z,目标位置是-7.7395999999905 2022-09-08 14:55:14,651 [Thread=21] INFO - 步进失败 2022-09-08 14:55:14,850 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:14,850 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:14,850 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:14,851 [Thread=20] INFO - 该轴是Z,目标位置是-7.7393999999905 2022-09-08 14:55:14,851 [Thread=20] INFO - 步进失败 2022-09-08 14:55:15,026 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:15,026 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:15,027 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:15,027 [Thread=19] INFO - 该轴是Z,目标位置是-7.7389999999905 2022-09-08 14:55:15,027 [Thread=19] INFO - 步进失败 2022-09-08 14:55:15,201 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:15,201 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:15,201 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:15,202 [Thread=21] INFO - 该轴是Z,目标位置是-7.7389999999905 2022-09-08 14:55:15,202 [Thread=21] INFO - 步进失败 2022-09-08 14:55:15,419 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:15,419 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:15,419 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:15,419 [Thread=20] INFO - 该轴是Z,目标位置是-7.7385999999905 2022-09-08 14:55:15,419 [Thread=20] INFO - 步进失败 2022-09-08 14:55:15,822 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:15,822 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:15,822 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:15,823 [Thread=19] INFO - 该轴是Z,目标位置是-7.7383999999905 2022-09-08 14:55:15,823 [Thread=19] INFO - 步进失败 2022-09-08 14:55:16,036 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:16,036 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:16,036 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:16,037 [Thread=21] INFO - 该轴是Z,目标位置是-7.7381999999905 2022-09-08 14:55:16,037 [Thread=21] INFO - 步进失败 2022-09-08 14:55:17,562 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:17,563 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:17,563 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:17,563 [Thread=20] INFO - 该轴是Z,目标位置是-7.7379999999905 2022-09-08 14:55:17,563 [Thread=20] INFO - 步进失败 2022-09-08 14:55:19,322 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:19,322 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:19,322 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:19,322 [Thread=19] INFO - 该轴是Z,目标位置是-7.7382000000095 2022-09-08 14:55:19,323 [Thread=19] INFO - 步进失败 2022-09-08 14:55:24,731 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:24,781 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.6644582298745 2022-09-08 14:55:24,782 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 91.022010126761 2022-09-08 14:55:24,782 [Thread=30] INFO - Measure angle is -90.843234 2022-09-08 14:55:24,782 [Thread=30] INFO - Measure StartPoint:1015.26239013672,975.172424316406, EndPoint:1014.80725097656,1006.09503173828, PixelDistance:30.925957 2022-09-08 14:55:24,782 [Thread=30] INFO - DerivativeMeasure timespan = 0.2577 2022-09-08 14:55:25,740 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:25,796 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.8988823362529 2022-09-08 14:55:25,796 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.6390842191389 2022-09-08 14:55:25,796 [Thread=30] INFO - Measure angle is -90.768983 2022-09-08 14:55:25,796 [Thread=30] INFO - Measure StartPoint:1021.23907470703,975.1875, EndPoint:1020.82397460938,1006.11676025391, PixelDistance:30.932046 2022-09-08 14:55:25,797 [Thread=30] INFO - DerivativeMeasure timespan = 0.2982 2022-09-08 14:55:26,603 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:26,652 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.3789750827817 2022-09-08 14:55:26,674 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.4779961934415 2022-09-08 14:55:26,674 [Thread=30] INFO - Measure angle is -90.428486 2022-09-08 14:55:26,674 [Thread=30] INFO - Measure StartPoint:1031.11791992188,975.229614257813, EndPoint:1030.88720703125,1006.08923339844, PixelDistance:30.860482 2022-09-08 14:55:26,674 [Thread=30] INFO - DerivativeMeasure timespan = 0.1839 2022-09-08 14:55:27,351 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:27,411 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.5070402444858 2022-09-08 14:55:27,411 [Thread=30] INFO - Measure angle is -90.50704 2022-09-08 14:55:27,412 [Thread=30] INFO - Measure StartPoint:1028.07763671875,975.2255859375, EndPoint:1027.80456542969,1006.07891845703, PixelDistance:30.854541 2022-09-08 14:55:27,412 [Thread=30] INFO - DerivativeMeasure timespan = 0.2102 2022-09-08 14:55:28,900 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:28,957 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.3211623553411 2022-09-08 14:55:28,958 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.5880724925513 2022-09-08 14:55:28,958 [Thread=30] INFO - Measure angle is -90.454617 2022-09-08 14:55:28,958 [Thread=30] INFO - Measure StartPoint:1012.07794189453,975.177551269531, EndPoint:1011.83312988281,1006.02862548828, PixelDistance:30.852046 2022-09-08 14:55:28,958 [Thread=30] INFO - DerivativeMeasure timespan = 0.2524 2022-09-08 14:55:38,320 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:55:38,320 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:55:40,311 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:55:40,311 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:55:40,311 [Thread=1] INFO - Longth长度127 2022-09-08 14:55:40,311 [Thread=1] INFO - 进入getLongth 2022-09-08 14:55:40,311 [Thread=1] INFO - 目标坐标X-92.466552Y95.792651 2022-09-08 14:55:40,311 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:55:40,311 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:55:40,311 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:55:40,312 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:55:40,312 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:55:40,312 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:55:40,312 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:55:40,312 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:55:45,095 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:45,096 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:45,096 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:45,096 [Thread=21] INFO - 该轴是Z,目标位置是-7.7379999999905 2022-09-08 14:55:45,097 [Thread=21] INFO - 步进失败 2022-09-08 14:55:45,295 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:45,295 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:45,296 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:45,296 [Thread=20] INFO - 该轴是Z,目标位置是-7.7379999999905 2022-09-08 14:55:45,296 [Thread=20] INFO - 步进失败 2022-09-08 14:55:46,615 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:46,615 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:46,615 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:46,616 [Thread=19] INFO - 该轴是Z,目标位置是-7.7380000000095 2022-09-08 14:55:46,616 [Thread=19] INFO - 步进失败 2022-09-08 14:55:46,783 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:46,784 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:46,784 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:46,784 [Thread=21] INFO - 该轴是Z,目标位置是-7.7380000000095 2022-09-08 14:55:46,784 [Thread=21] INFO - 步进失败 2022-09-08 14:55:46,951 [Thread=20] INFO - 单轴触发了 2022-09-08 14:55:46,951 [Thread=20] INFO - 该轴是Z 2022-09-08 14:55:46,951 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:46,955 [Thread=20] INFO - 该轴是Z,目标位置是-7.7380000000095 2022-09-08 14:55:46,955 [Thread=20] INFO - 步进失败 2022-09-08 14:55:47,119 [Thread=19] INFO - 单轴触发了 2022-09-08 14:55:47,119 [Thread=19] INFO - 该轴是Z 2022-09-08 14:55:47,119 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:47,122 [Thread=19] INFO - 该轴是Z,目标位置是-7.7384000000095 2022-09-08 14:55:47,122 [Thread=19] INFO - 步进失败 2022-09-08 14:55:47,294 [Thread=21] INFO - 单轴触发了 2022-09-08 14:55:47,295 [Thread=21] INFO - 该轴是Z 2022-09-08 14:55:47,295 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:55:47,295 [Thread=21] INFO - 该轴是Z,目标位置是-7.7384000000095 2022-09-08 14:55:47,295 [Thread=21] INFO - 步进失败 2022-09-08 14:55:51,337 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:51,393 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:51,393 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:51,393 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:55:51,393 [Thread=5] INFO - Measure StartPoint:1019.97155761719,1034, EndPoint:1049.96496582031,1034, PixelDistance:29.993408 2022-09-08 14:55:51,393 [Thread=5] INFO - DerivativeMeasure timespan = 0.3124 2022-09-08 14:55:53,226 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:53,276 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:53,277 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:53,277 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:55:53,277 [Thread=5] INFO - Measure StartPoint:1020.00122070313,1040, EndPoint:1050.01257324219,1040, PixelDistance:30.011353 2022-09-08 14:55:53,277 [Thread=5] INFO - DerivativeMeasure timespan = 0.3875 2022-09-08 14:55:55,040 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:55,090 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:55,091 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:55,091 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:55:55,091 [Thread=5] INFO - Measure StartPoint:1020.00244140625,1040, EndPoint:1050.00231933594,1040, PixelDistance:29.999878 2022-09-08 14:55:55,091 [Thread=5] INFO - DerivativeMeasure timespan = 0.3154 2022-09-08 14:55:56,214 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:56,274 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:56,274 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:56,274 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:55:56,274 [Thread=5] INFO - Measure StartPoint:1019.98095703125,1041, EndPoint:1049.92956542969,1041, PixelDistance:29.948608 2022-09-08 14:55:56,274 [Thread=5] INFO - DerivativeMeasure timespan = 0.3442 2022-09-08 14:55:57,265 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:55:57,314 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:57,314 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:55:57,314 [Thread=5] INFO - Measure angle is 0 2022-09-08 14:55:57,315 [Thread=5] INFO - Measure StartPoint:1019.96826171875,1051, EndPoint:1049.91528320313,1051, PixelDistance:29.947021 2022-09-08 14:55:57,315 [Thread=5] INFO - DerivativeMeasure timespan = 0.357 2022-09-08 14:56:10,421 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 14:56:10,423 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:56:10,436 [Thread=4] INFO - 单轴触发了 2022-09-08 14:56:10,436 [Thread=4] INFO - 该轴是Z 2022-09-08 14:56:10,436 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:10,436 [Thread=4] INFO - 该轴是Z,目标位置是-7.68780000095367 2022-09-08 14:56:10,436 [Thread=4] INFO - 步进失败 2022-09-08 14:56:10,436 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 14:56:10,442 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:56:10,442 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:56:10,442 [Thread=4] INFO - Longth长度127 2022-09-08 14:56:10,442 [Thread=4] INFO - 进入getLongth 2022-09-08 14:56:10,442 [Thread=4] INFO - 目标坐标X-92.409552Y95.873651 2022-09-08 14:56:10,442 [Thread=4] INFO - 晶圆的大小5 2022-09-08 14:56:10,442 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 14:56:10,442 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:56:10,442 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 14:56:10,442 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 14:56:10,443 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 14:56:10,443 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 14:56:10,443 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 14:56:12,503 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:12,507 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:56:12,507 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:56:12,507 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:56:12,507 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:12,507 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:56:12,507 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:56:12,508 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:56:13,067 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:56:13,067 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:56:13,067 [Thread=20] INFO - 该轴是X,目标位置是-87.409552 2022-09-08 14:56:13,067 [Thread=20] INFO - 步进失败 2022-09-08 14:56:15,833 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:56:17,340 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 14:56:17,343 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 14:56:17,354 [Thread=28] INFO - 单轴触发了 2022-09-08 14:56:17,354 [Thread=28] INFO - 该轴是Z 2022-09-08 14:56:17,354 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:17,355 [Thread=28] INFO - 该轴是Z,目标位置是-7.73899999904633 2022-09-08 14:56:17,355 [Thread=28] INFO - 步进失败 2022-09-08 14:56:17,355 [Thread=28] INFO - SwitchOffsetZ:-0.051 2022-09-08 14:56:17,360 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:56:17,360 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:56:17,360 [Thread=28] INFO - Longth长度127 2022-09-08 14:56:17,360 [Thread=28] INFO - 进入getLongth 2022-09-08 14:56:17,360 [Thread=28] INFO - 目标坐标X-87.466552Y95.792651 2022-09-08 14:56:17,360 [Thread=28] INFO - 晶圆的大小5 2022-09-08 14:56:17,360 [Thread=28] INFO - 晶圆的宽高127 2022-09-08 14:56:17,361 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:56:17,361 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 14:56:17,361 [Thread=28] INFO - X-安全坐标18.39 2022-09-08 14:56:17,361 [Thread=28] INFO - Y上安全坐标-16.7307 2022-09-08 14:56:17,361 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 14:56:17,361 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 14:56:19,351 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:56:25,779 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:25,780 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:25,780 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:25,781 [Thread=19] INFO - 该轴是Z,目标位置是-7.7366000000095 2022-09-08 14:56:25,781 [Thread=19] INFO - 步进失败 2022-09-08 14:56:25,963 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:25,963 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:25,963 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:25,964 [Thread=21] INFO - 该轴是Z,目标位置是-7.7366000000095 2022-09-08 14:56:25,964 [Thread=21] INFO - 步进失败 2022-09-08 14:56:26,116 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:26,116 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:26,116 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:26,116 [Thread=20] INFO - 该轴是Z,目标位置是-7.7366000000095 2022-09-08 14:56:26,117 [Thread=20] INFO - 步进失败 2022-09-08 14:56:26,306 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:26,306 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:26,306 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:26,307 [Thread=19] INFO - 该轴是Z,目标位置是-7.7368000000095 2022-09-08 14:56:26,307 [Thread=19] INFO - 步进失败 2022-09-08 14:56:26,500 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:26,500 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:26,500 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:26,501 [Thread=21] INFO - 该轴是Z,目标位置是-7.7368000000095 2022-09-08 14:56:26,501 [Thread=21] INFO - 步进失败 2022-09-08 14:56:29,325 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:56:29,385 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:29,386 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:29,386 [Thread=29] INFO - Measure angle is 0 2022-09-08 14:56:29,386 [Thread=29] INFO - Measure StartPoint:1054.919921875,1027, EndPoint:1085.94616699219,1027, PixelDistance:31.026245 2022-09-08 14:56:29,386 [Thread=29] INFO - DerivativeMeasure timespan = 0.3813 2022-09-08 14:56:30,321 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:56:30,376 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:30,377 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:30,377 [Thread=29] INFO - Measure angle is 0 2022-09-08 14:56:30,378 [Thread=29] INFO - Measure StartPoint:1055.39636230469,1032, EndPoint:1085.93566894531,1032, PixelDistance:30.539307 2022-09-08 14:56:30,378 [Thread=29] INFO - DerivativeMeasure timespan = 0.289 2022-09-08 14:56:31,102 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:56:31,153 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.34697056599466 2022-09-08 14:56:31,153 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:31,154 [Thread=29] INFO - Measure angle is -0.173485 2022-09-08 14:56:31,154 [Thread=29] INFO - Measure StartPoint:1054.93359375,1023.93621826172, EndPoint:1085.9482421875,1024.03015136719, PixelDistance:31.014791 2022-09-08 14:56:31,154 [Thread=29] INFO - DerivativeMeasure timespan = 0.4332 2022-09-08 14:56:31,871 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:56:31,919 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.229669266060955 2022-09-08 14:56:31,919 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:31,919 [Thread=29] INFO - Measure angle is -0.114835 2022-09-08 14:56:31,921 [Thread=29] INFO - Measure StartPoint:1054.86376953125,1039.96166992188, EndPoint:1085.92236328125,1040.02392578125, PixelDistance:31.058656 2022-09-08 14:56:31,921 [Thread=29] INFO - DerivativeMeasure timespan = 1.2828 2022-09-08 14:56:32,773 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:56:32,825 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.0266556826475576 2022-09-08 14:56:32,825 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:56:32,826 [Thread=29] INFO - Measure angle is -0.013328 2022-09-08 14:56:32,826 [Thread=29] INFO - Measure StartPoint:1054.87329101563,1037.99560546875, EndPoint:1085.94262695313,1038.00280761719, PixelDistance:31.069337 2022-09-08 14:56:32,826 [Thread=29] INFO - DerivativeMeasure timespan = 0.4575 2022-09-08 14:56:43,203 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:56:43,203 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:56:45,369 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:56:45,369 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:56:45,369 [Thread=1] INFO - Longth长度127 2022-09-08 14:56:45,369 [Thread=1] INFO - 进入getLongth 2022-09-08 14:56:45,369 [Thread=1] INFO - 目标坐标X-87.467515Y95.772053 2022-09-08 14:56:45,370 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:56:45,370 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:56:45,370 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:56:45,370 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:56:45,370 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:56:45,370 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:56:45,370 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:56:45,370 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:56:49,969 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:49,969 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:49,969 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:49,970 [Thread=20] INFO - 该轴是Z,目标位置是-7.7371999999905 2022-09-08 14:56:49,970 [Thread=20] INFO - 步进失败 2022-09-08 14:56:50,151 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:50,151 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:50,151 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:50,151 [Thread=19] INFO - 该轴是Z,目标位置是-7.7371999999905 2022-09-08 14:56:50,152 [Thread=19] INFO - 步进失败 2022-09-08 14:56:50,313 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:50,313 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:50,313 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:50,314 [Thread=21] INFO - 该轴是Z,目标位置是-7.7367999999905 2022-09-08 14:56:50,314 [Thread=21] INFO - 步进失败 2022-09-08 14:56:51,907 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:51,907 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:51,907 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:51,908 [Thread=20] INFO - 该轴是Z,目标位置是-7.7370000000095 2022-09-08 14:56:51,908 [Thread=20] INFO - 步进失败 2022-09-08 14:56:52,060 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:52,061 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:52,061 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:52,061 [Thread=19] INFO - 该轴是Z,目标位置是-7.7370000000095 2022-09-08 14:56:52,061 [Thread=19] INFO - 步进失败 2022-09-08 14:56:52,259 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:52,259 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:52,259 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:52,259 [Thread=21] INFO - 该轴是Z,目标位置是-7.7374000000095 2022-09-08 14:56:52,259 [Thread=21] INFO - 步进失败 2022-09-08 14:56:52,691 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:52,691 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:52,691 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:52,692 [Thread=20] INFO - 该轴是Z,目标位置是-7.7376000000095 2022-09-08 14:56:52,692 [Thread=20] INFO - 步进失败 2022-09-08 14:56:52,954 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:52,954 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:52,954 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:52,955 [Thread=19] INFO - 该轴是Z,目标位置是-7.7378000000095 2022-09-08 14:56:52,955 [Thread=19] INFO - 步进失败 2022-09-08 14:56:53,104 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:53,105 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:53,105 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:53,105 [Thread=21] INFO - 该轴是Z,目标位置是-7.7380000000095 2022-09-08 14:56:53,105 [Thread=21] INFO - 步进失败 2022-09-08 14:56:53,281 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:53,281 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:53,281 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:53,281 [Thread=20] INFO - 该轴是Z,目标位置是-7.7380000000095 2022-09-08 14:56:53,282 [Thread=20] INFO - 步进失败 2022-09-08 14:56:54,112 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:54,113 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:54,113 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:54,113 [Thread=19] INFO - 该轴是Z,目标位置是-7.7379999999905 2022-09-08 14:56:54,113 [Thread=19] INFO - 步进失败 2022-09-08 14:56:54,280 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:54,281 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:54,281 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:54,281 [Thread=21] INFO - 该轴是Z,目标位置是-7.7379999999905 2022-09-08 14:56:54,281 [Thread=21] INFO - 步进失败 2022-09-08 14:56:54,459 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:54,459 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:54,459 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:54,460 [Thread=20] INFO - 该轴是Z,目标位置是-7.7379999999905 2022-09-08 14:56:54,460 [Thread=20] INFO - 步进失败 2022-09-08 14:56:54,657 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:54,657 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:54,657 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:54,657 [Thread=19] INFO - 该轴是Z,目标位置是-7.7375999999905 2022-09-08 14:56:54,657 [Thread=19] INFO - 步进失败 2022-09-08 14:56:54,840 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:54,840 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:54,840 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:54,841 [Thread=21] INFO - 该轴是Z,目标位置是-7.7375999999905 2022-09-08 14:56:54,841 [Thread=21] INFO - 步进失败 2022-09-08 14:56:55,040 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:55,041 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:55,041 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:55,041 [Thread=20] INFO - 该轴是Z,目标位置是-7.7373999999905 2022-09-08 14:56:55,041 [Thread=20] INFO - 步进失败 2022-09-08 14:56:55,232 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:55,232 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:55,232 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:55,233 [Thread=19] INFO - 该轴是Z,目标位置是-7.7373999999905 2022-09-08 14:56:55,233 [Thread=19] INFO - 步进失败 2022-09-08 14:56:55,417 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:55,417 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:55,417 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:55,417 [Thread=21] INFO - 该轴是Z,目标位置是-7.7369999999905 2022-09-08 14:56:55,417 [Thread=21] INFO - 步进失败 2022-09-08 14:56:55,600 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:55,600 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:55,600 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:55,601 [Thread=20] INFO - 该轴是Z,目标位置是-7.7365999999905 2022-09-08 14:56:55,601 [Thread=20] INFO - 步进失败 2022-09-08 14:56:55,811 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:55,811 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:55,811 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:55,811 [Thread=19] INFO - 该轴是Z,目标位置是-7.7365999999905 2022-09-08 14:56:55,812 [Thread=19] INFO - 步进失败 2022-09-08 14:56:55,984 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:55,984 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:55,984 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:55,985 [Thread=21] INFO - 该轴是Z,目标位置是-7.7363999999905 2022-09-08 14:56:55,985 [Thread=21] INFO - 步进失败 2022-09-08 14:56:56,161 [Thread=20] INFO - 单轴触发了 2022-09-08 14:56:56,162 [Thread=20] INFO - 该轴是Z 2022-09-08 14:56:56,163 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:56,163 [Thread=20] INFO - 该轴是Z,目标位置是-7.7363999999905 2022-09-08 14:56:56,163 [Thread=20] INFO - 步进失败 2022-09-08 14:56:56,569 [Thread=19] INFO - 单轴触发了 2022-09-08 14:56:56,569 [Thread=19] INFO - 该轴是Z 2022-09-08 14:56:56,569 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:56,569 [Thread=19] INFO - 该轴是Z,目标位置是-7.7355999999905 2022-09-08 14:56:56,569 [Thread=19] INFO - 步进失败 2022-09-08 14:56:56,807 [Thread=21] INFO - 单轴触发了 2022-09-08 14:56:56,807 [Thread=21] INFO - 该轴是Z 2022-09-08 14:56:56,807 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:56:56,807 [Thread=21] INFO - 该轴是Z,目标位置是-7.7355999999905 2022-09-08 14:56:56,807 [Thread=21] INFO - 步进失败 2022-09-08 14:57:11,003 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:11,058 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90.7125981730208 2022-09-08 14:57:11,058 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90.8940171380454 2022-09-08 14:57:11,058 [Thread=29] INFO - Measure angle is -90.803308 2022-09-08 14:57:11,058 [Thread=29] INFO - Measure StartPoint:1021.22198486328,1005.16680908203, EndPoint:1020.77551269531,1037.01000976563, PixelDistance:31.846331 2022-09-08 14:57:11,058 [Thread=29] INFO - DerivativeMeasure timespan = 0.2395 2022-09-08 14:57:11,914 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:11,970 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:11,970 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:11,970 [Thread=29] INFO - Measure angle is -90 2022-09-08 14:57:11,970 [Thread=29] INFO - Measure StartPoint:1032,1005.18011474609, EndPoint:1032,1037.04528808594, PixelDistance:31.865173 2022-09-08 14:57:11,970 [Thread=29] INFO - DerivativeMeasure timespan = 0.2276 2022-09-08 14:57:12,764 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:12,813 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90.9301230373583 2022-09-08 14:57:12,813 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 91.037260422906 2022-09-08 14:57:12,813 [Thread=5] INFO - Measure angle is -90.983692 2022-09-08 14:57:12,813 [Thread=5] INFO - Measure StartPoint:1035.30590820313,1005.18737792969, EndPoint:1034.75939941406,1037.01245117188, PixelDistance:31.829765 2022-09-08 14:57:12,813 [Thread=5] INFO - DerivativeMeasure timespan = 0.2136 2022-09-08 14:57:13,530 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:13,590 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:13,590 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:13,590 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:57:13,591 [Thread=5] INFO - Measure StartPoint:1026,1005.1396484375, EndPoint:1026,1037.05151367188, PixelDistance:31.911865 2022-09-08 14:57:13,591 [Thread=5] INFO - DerivativeMeasure timespan = 0.4019 2022-09-08 14:57:14,853 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:14,903 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90.6654265483526 2022-09-08 14:57:14,904 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90.8326147544457 2022-09-08 14:57:14,904 [Thread=5] INFO - Measure angle is -90.749021 2022-09-08 14:57:14,904 [Thread=5] INFO - Measure StartPoint:1026.19384765625,1005.17169189453, EndPoint:1025.77722167969,1037.04357910156, PixelDistance:31.87461 2022-09-08 14:57:14,904 [Thread=5] INFO - DerivativeMeasure timespan = 0.334 2022-09-08 14:57:20,249 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:20,299 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:20,299 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:20,300 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:57:20,300 [Thread=5] INFO - Measure StartPoint:1110,1005.51098632813, EndPoint:1110,1037.42980957031, PixelDistance:31.918823 2022-09-08 14:57:20,300 [Thread=5] INFO - DerivativeMeasure timespan = 0.248 2022-09-08 14:57:21,249 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:21,297 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:21,297 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:21,297 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:57:21,297 [Thread=5] INFO - Measure StartPoint:1107,1005.4716796875, EndPoint:1107,1037.48010253906, PixelDistance:32.008423 2022-09-08 14:57:21,298 [Thread=5] INFO - DerivativeMeasure timespan = 0.2009 2022-09-08 14:57:22,112 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:22,167 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:22,167 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:57:22,167 [Thread=5] INFO - Measure StartPoint:1112,1008.009765625, EndPoint:1112,1037.48168945313, PixelDistance:29.471924 2022-09-08 14:57:22,167 [Thread=5] INFO - DerivativeMeasure timespan = 0.1949 2022-09-08 14:57:22,999 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:23,049 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:23,049 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:23,049 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:57:23,049 [Thread=5] INFO - Measure StartPoint:1104,1005.44024658203, EndPoint:1104,1037.4072265625, PixelDistance:31.96698 2022-09-08 14:57:23,049 [Thread=5] INFO - DerivativeMeasure timespan = 0.283 2022-09-08 14:57:23,939 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:24,000 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:24,000 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:24,000 [Thread=5] INFO - Measure angle is -90 2022-09-08 14:57:24,000 [Thread=5] INFO - Measure StartPoint:1098,1005.42059326172, EndPoint:1098,1037.34436035156, PixelDistance:31.923767 2022-09-08 14:57:24,001 [Thread=5] INFO - DerivativeMeasure timespan = 0.2543 2022-09-08 14:57:34,069 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:57:34,069 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:57:35,603 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:57:35,603 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:57:35,603 [Thread=1] INFO - Longth长度127 2022-09-08 14:57:35,603 [Thread=1] INFO - 进入getLongth 2022-09-08 14:57:35,603 [Thread=1] INFO - 目标坐标X-87.475655Y95.772146 2022-09-08 14:57:35,603 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:57:35,603 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:57:35,603 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:57:35,603 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:57:35,604 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:57:35,604 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:57:35,604 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:57:35,604 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:57:48,372 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:48,423 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:48,424 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.2598986366805 2022-09-08 14:57:48,424 [Thread=7] INFO - Measure angle is -90.629949 2022-09-08 14:57:48,424 [Thread=7] INFO - Measure StartPoint:1015.17108154297,1002.44287109375, EndPoint:1014.82214355469,1034.17810058594, PixelDistance:31.737148 2022-09-08 14:57:48,424 [Thread=7] INFO - DerivativeMeasure timespan = 0.2085 2022-09-08 14:57:49,462 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:49,514 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:49,515 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:49,515 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:57:49,515 [Thread=7] INFO - Measure StartPoint:1016,1002.69372558594, EndPoint:1016,1034.25158691406, PixelDistance:31.557861 2022-09-08 14:57:49,515 [Thread=7] INFO - DerivativeMeasure timespan = 0.214 2022-09-08 14:57:51,175 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:51,228 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:51,228 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:51,228 [Thread=7] INFO - Measure angle is -90 2022-09-08 14:57:51,228 [Thread=7] INFO - Measure StartPoint:1013,1002.43969726563, EndPoint:1013,1034.21472167969, PixelDistance:31.775024 2022-09-08 14:57:51,229 [Thread=7] INFO - DerivativeMeasure timespan = 0.2344 2022-09-08 14:57:52,015 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:52,078 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:52,078 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.1030938597921 2022-09-08 14:57:52,079 [Thread=7] INFO - Measure angle is -90.551547 2022-09-08 14:57:52,079 [Thread=7] INFO - Measure StartPoint:1018.13977050781,1002.48309326172, EndPoint:1017.83428955078,1034.21374511719, PixelDistance:31.732122 2022-09-08 14:57:52,079 [Thread=7] INFO - DerivativeMeasure timespan = 0.2503 2022-09-08 14:57:53,026 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:57:53,079 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:57:53,079 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.9925837831774 2022-09-08 14:57:53,079 [Thread=7] INFO - Measure angle is -90.496292 2022-09-08 14:57:53,080 [Thread=7] INFO - Measure StartPoint:1008.05688476563,1002.43133544922, EndPoint:1007.78204345703,1034.16430664063, PixelDistance:31.734161 2022-09-08 14:57:53,080 [Thread=7] INFO - DerivativeMeasure timespan = 0.2399 2022-09-08 14:58:04,737 [Thread=20] INFO - 单轴触发了 2022-09-08 14:58:04,741 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:58:04,741 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:58:04,741 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 14:58:04,741 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:04,741 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 14:58:04,741 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 14:58:04,741 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 14:58:05,180 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 14:58:05,180 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 14:58:05,180 [Thread=20] INFO - 该轴是X,目标位置是-82.475655 2022-09-08 14:58:05,180 [Thread=20] INFO - 步进失败 2022-09-08 14:58:06,388 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 14:58:08,762 [Thread=19] INFO - 单轴触发了 2022-09-08 14:58:08,762 [Thread=19] INFO - 该轴是Z 2022-09-08 14:58:08,762 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:08,763 [Thread=19] INFO - 该轴是Z,目标位置是-7.7339000000095 2022-09-08 14:58:08,763 [Thread=19] INFO - 步进失败 2022-09-08 14:58:08,930 [Thread=21] INFO - 单轴触发了 2022-09-08 14:58:08,930 [Thread=21] INFO - 该轴是Z 2022-09-08 14:58:08,930 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:08,931 [Thread=21] INFO - 该轴是Z,目标位置是-7.7339000000095 2022-09-08 14:58:08,931 [Thread=21] INFO - 步进失败 2022-09-08 14:58:09,097 [Thread=20] INFO - 单轴触发了 2022-09-08 14:58:09,097 [Thread=20] INFO - 该轴是Z 2022-09-08 14:58:09,097 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:09,098 [Thread=20] INFO - 该轴是Z,目标位置是-7.7339000000095 2022-09-08 14:58:09,098 [Thread=20] INFO - 步进失败 2022-09-08 14:58:09,260 [Thread=19] INFO - 单轴触发了 2022-09-08 14:58:09,260 [Thread=19] INFO - 该轴是Z 2022-09-08 14:58:09,261 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:09,261 [Thread=19] INFO - 该轴是Z,目标位置是-7.7343000000095 2022-09-08 14:58:09,261 [Thread=19] INFO - 步进失败 2022-09-08 14:58:09,433 [Thread=21] INFO - 单轴触发了 2022-09-08 14:58:09,433 [Thread=21] INFO - 该轴是Z 2022-09-08 14:58:09,433 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:09,434 [Thread=21] INFO - 该轴是Z,目标位置是-7.7343000000095 2022-09-08 14:58:09,434 [Thread=21] INFO - 步进失败 2022-09-08 14:58:09,601 [Thread=20] INFO - 单轴触发了 2022-09-08 14:58:09,602 [Thread=20] INFO - 该轴是Z 2022-09-08 14:58:09,602 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:09,602 [Thread=20] INFO - 该轴是Z,目标位置是-7.7346000000095 2022-09-08 14:58:09,602 [Thread=20] INFO - 步进失败 2022-09-08 14:58:09,761 [Thread=19] INFO - 单轴触发了 2022-09-08 14:58:09,761 [Thread=19] INFO - 该轴是Z 2022-09-08 14:58:09,761 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:09,762 [Thread=19] INFO - 该轴是Z,目标位置是-7.7346000000095 2022-09-08 14:58:09,762 [Thread=19] INFO - 步进失败 2022-09-08 14:58:09,940 [Thread=21] INFO - 单轴触发了 2022-09-08 14:58:09,940 [Thread=21] INFO - 该轴是Z 2022-09-08 14:58:09,940 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 14:58:09,941 [Thread=21] INFO - 该轴是Z,目标位置是-7.7350000000095 2022-09-08 14:58:09,941 [Thread=21] INFO - 步进失败 2022-09-08 14:58:14,434 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:58:14,486 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.1440007600036 2022-09-08 14:58:14,486 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 91.2313002064126 2022-09-08 14:58:14,487 [Thread=3] INFO - Measure angle is -90.68765 2022-09-08 14:58:14,487 [Thread=3] INFO - Measure StartPoint:1029.25744628906,995.553894042969, EndPoint:1028.86730957031,1028.05920410156, PixelDistance:32.507651 2022-09-08 14:58:14,487 [Thread=3] INFO - DerivativeMeasure timespan = 0.2178 2022-09-08 14:58:15,606 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:58:15,657 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:58:15,657 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.3966375388696 2022-09-08 14:58:15,658 [Thread=3] INFO - Measure angle is -90.198319 2022-09-08 14:58:15,658 [Thread=3] INFO - Measure StartPoint:1020.07135009766,995.381103515625, EndPoint:1019.95831298828,1028.04724121094, PixelDistance:32.666333 2022-09-08 14:58:15,658 [Thread=3] INFO - DerivativeMeasure timespan = 0.2152 2022-09-08 14:58:16,801 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:58:16,851 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 14:58:16,852 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 91.7496431793601 2022-09-08 14:58:16,852 [Thread=3] INFO - Measure angle is -90.874822 2022-09-08 14:58:16,852 [Thread=3] INFO - Measure StartPoint:1023.17834472656,995.321228027344, EndPoint:1022.67846679688,1028.05676269531, PixelDistance:32.739351 2022-09-08 14:58:16,852 [Thread=3] INFO - DerivativeMeasure timespan = 0.2019 2022-09-08 14:58:17,740 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:58:17,798 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.6331271085662 2022-09-08 14:58:17,798 [Thread=3] INFO - Measure angle is -90.633127 2022-09-08 14:58:17,799 [Thread=3] INFO - Measure StartPoint:1020.18316650391,995.423950195313, EndPoint:1019.82263183594,1028.05004882813, PixelDistance:32.628091 2022-09-08 14:58:17,799 [Thread=3] INFO - DerivativeMeasure timespan = 0.2319 2022-09-08 14:58:19,798 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:58:19,849 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2704795640821 2022-09-08 14:58:19,849 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.3332865768414 2022-09-08 14:58:19,849 [Thread=3] INFO - Measure angle is -90.301883 2022-09-08 14:58:19,850 [Thread=3] INFO - Measure StartPoint:1026.060546875,995.507690429688, EndPoint:1025.88916015625,1028.03881835938, PixelDistance:32.531579 2022-09-08 14:58:19,850 [Thread=3] INFO - DerivativeMeasure timespan = 0.3611 2022-09-08 14:58:49,621 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 14:58:49,621 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 14:58:51,380 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 14:58:51,380 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 14:58:51,380 [Thread=1] INFO - Longth长度127 2022-09-08 14:58:51,380 [Thread=1] INFO - 进入getLongth 2022-09-08 14:58:51,380 [Thread=1] INFO - 目标坐标X-82.476245Y95.790693 2022-09-08 14:58:51,380 [Thread=1] INFO - 晶圆的大小5 2022-09-08 14:58:51,380 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 14:58:51,380 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 14:58:51,380 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 14:58:51,381 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 14:58:51,381 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 14:58:51,381 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 14:58:51,381 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 14:59:25,264 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:25,315 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:25,316 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:25,316 [Thread=16] INFO - Measure angle is 0 2022-09-08 14:59:25,316 [Thread=16] INFO - Measure StartPoint:999.348022460938,1041, EndPoint:1031.11572265625,1041, PixelDistance:31.7677 2022-09-08 14:59:25,316 [Thread=16] INFO - DerivativeMeasure timespan = 0.3548 2022-09-08 14:59:26,541 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:26,597 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:26,598 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 1.08064866095702 2022-09-08 14:59:26,598 [Thread=16] INFO - Measure angle is -0.540324 2022-09-08 14:59:26,598 [Thread=16] INFO - Measure StartPoint:969.827575683594,1041.62109375, EndPoint:1031.119140625,1042.19921875, PixelDistance:61.294291 2022-09-08 14:59:26,598 [Thread=16] INFO - DerivativeMeasure timespan = 0.382 2022-09-08 14:59:27,582 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:27,638 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 179.385256013527 2022-09-08 14:59:27,638 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:27,639 [Thread=16] INFO - Measure angle is -179.692628 2022-09-08 14:59:27,639 [Thread=16] INFO - Measure StartPoint:1031.09484863281,1037.89758300781, EndPoint:966.524658203125,1038.24401855469, PixelDistance:64.57112 2022-09-08 14:59:27,639 [Thread=16] INFO - DerivativeMeasure timespan = 0.3384 2022-09-08 14:59:28,588 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:28,638 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 179.297154651464 2022-09-08 14:59:28,638 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:28,638 [Thread=16] INFO - Measure angle is -179.648577 2022-09-08 14:59:28,639 [Thread=16] INFO - Measure StartPoint:1031.19287109375,1025.8515625, EndPoint:966.661499023438,1026.24743652344, PixelDistance:64.532586 2022-09-08 14:59:28,639 [Thread=16] INFO - DerivativeMeasure timespan = 0.3272 2022-09-08 14:59:29,637 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:29,687 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:29,687 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:29,687 [Thread=16] INFO - Measure angle is 0 2022-09-08 14:59:29,687 [Thread=16] INFO - Measure StartPoint:999.364135742188,1032, EndPoint:1031.16418457031,1032, PixelDistance:31.800049 2022-09-08 14:59:29,687 [Thread=16] INFO - DerivativeMeasure timespan = 0.3378 2022-09-08 14:59:31,244 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:31,293 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.377899497414244 2022-09-08 14:59:31,293 [Thread=16] INFO - Measure angle is -0.377899 2022-09-08 14:59:31,293 [Thread=16] INFO - Measure StartPoint:1001.94366455078,1038.84790039063, EndPoint:1031.12768554688,1039.04040527344, PixelDistance:29.184656 2022-09-08 14:59:31,293 [Thread=16] INFO - DerivativeMeasure timespan = 0.2632 2022-09-08 14:59:44,635 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:44,696 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:44,696 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.768840709815228 2022-09-08 14:59:44,696 [Thread=13] INFO - Measure angle is -0.38442 2022-09-08 14:59:44,697 [Thread=13] INFO - Measure StartPoint:999.37158203125,1045.81457519531, EndPoint:1063.67272949219,1046.24609375, PixelDistance:64.302595 2022-09-08 14:59:44,697 [Thread=13] INFO - DerivativeMeasure timespan = 0.3935 2022-09-08 14:59:46,769 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:46,821 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:46,821 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.065673061441454 2022-09-08 14:59:46,821 [Thread=13] INFO - Measure angle is -0.032837 2022-09-08 14:59:46,822 [Thread=13] INFO - Measure StartPoint:999.010986328125,1218.98742675781, EndPoint:1030.60888671875,1219.00549316406, PixelDistance:31.597906 2022-09-08 14:59:46,822 [Thread=13] INFO - DerivativeMeasure timespan = 0.3736 2022-09-08 14:59:53,977 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 14:59:54,029 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:54,030 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 14:59:54,030 [Thread=13] INFO - Measure angle is 0 2022-09-08 14:59:54,030 [Thread=13] INFO - Measure StartPoint:999.33154296875,1035, EndPoint:1031.13171386719,1035, PixelDistance:31.800171 2022-09-08 14:59:54,030 [Thread=13] INFO - DerivativeMeasure timespan = 0.2923 2022-09-08 15:00:06,648 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 15:00:06,649 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 15:00:08,460 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:00:08,461 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:00:08,461 [Thread=1] INFO - Longth长度127 2022-09-08 15:00:08,461 [Thread=1] INFO - 进入getLongth 2022-09-08 15:00:08,461 [Thread=1] INFO - 目标坐标X-82.478575Y95.80517 2022-09-08 15:00:08,461 [Thread=1] INFO - 晶圆的大小5 2022-09-08 15:00:08,461 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 15:00:08,461 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:00:08,461 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:00:08,461 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 15:00:08,462 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 15:00:08,462 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:00:08,462 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:00:25,073 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:00:25,128 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.349729951917668 2022-09-08 15:00:25,128 [Thread=5] INFO - Measure angle is -0.34973 2022-09-08 15:00:25,128 [Thread=5] INFO - Measure StartPoint:988.766784667969,1020.83984375, EndPoint:1020.16558837891,1021.03155517578, PixelDistance:31.399389 2022-09-08 15:00:25,128 [Thread=5] INFO - DerivativeMeasure timespan = 0.4691 2022-09-08 15:00:26,558 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:00:26,611 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 179.716063704224 2022-09-08 15:00:26,611 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 179.758943800197 2022-09-08 15:00:26,611 [Thread=13] INFO - Measure angle is -179.737504 2022-09-08 15:00:26,612 [Thread=13] INFO - Measure StartPoint:1020.19323730469,1005.98992919922, EndPoint:989.377136230469,1006.13116455078, PixelDistance:30.816425 2022-09-08 15:00:26,612 [Thread=13] INFO - DerivativeMeasure timespan = 0.2982 2022-09-08 15:00:26,768 [Thread=1] INFO - run button state is disabled, current measurement will be ignored 2022-09-08 15:00:28,399 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:00:28,451 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.468659107917014 2022-09-08 15:00:28,451 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 179.134372014925 2022-09-08 15:00:28,451 [Thread=13] INFO - Measure angle is -179.801516 2022-09-08 15:00:28,452 [Thread=13] INFO - Measure StartPoint:1020.17419433594,1022.95434570313, EndPoint:988.778991699219,1023.06311035156, PixelDistance:31.395391 2022-09-08 15:00:28,452 [Thread=13] INFO - DerivativeMeasure timespan = 0.4199 2022-09-08 15:00:29,733 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:00:29,789 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:00:29,789 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:00:29,789 [Thread=13] INFO - Measure angle is 0 2022-09-08 15:00:29,790 [Thread=13] INFO - Measure StartPoint:988.777709960938,1027, EndPoint:1020.17578125,1027, PixelDistance:31.398071 2022-09-08 15:00:29,790 [Thread=13] INFO - DerivativeMeasure timespan = 0.3657 2022-09-08 15:00:30,670 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:00:30,722 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.0950698289018056 2022-09-08 15:00:30,723 [Thread=13] INFO - Measure angle is -0.09507 2022-09-08 15:00:30,723 [Thread=13] INFO - Measure StartPoint:988.768310546875,1031.98803710938, EndPoint:1020.14129638672,1032.0400390625, PixelDistance:31.373029 2022-09-08 15:00:30,723 [Thread=13] INFO - DerivativeMeasure timespan = 0.3131 2022-09-08 15:00:31,833 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:00:31,887 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 179.769256533903 2022-09-08 15:00:31,887 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 0.527600980162957 2022-09-08 15:00:31,888 [Thread=13] INFO - Measure angle is -0.148429 2022-09-08 15:00:31,888 [Thread=13] INFO - Measure StartPoint:988.776977539063,1040.95275878906, EndPoint:1020.11395263672,1041.03393554688, PixelDistance:31.33708 2022-09-08 15:00:31,888 [Thread=13] INFO - DerivativeMeasure timespan = 0.4076 2022-09-08 15:00:37,740 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 15:00:37,740 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 15:00:38,786 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:00:38,786 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:00:38,786 [Thread=1] INFO - Longth长度127 2022-09-08 15:00:38,787 [Thread=1] INFO - 进入getLongth 2022-09-08 15:00:38,787 [Thread=1] INFO - 目标坐标X-82.477519Y95.762359 2022-09-08 15:00:38,787 [Thread=1] INFO - 晶圆的大小5 2022-09-08 15:00:38,787 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 15:00:38,787 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:00:38,787 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:00:38,787 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 15:00:38,787 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 15:00:38,787 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:00:38,787 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:00:45,705 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:00:45,705 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:00:45,705 [Thread=1] INFO - Longth长度127 2022-09-08 15:00:45,705 [Thread=1] INFO - 进入getLongth 2022-09-08 15:00:45,706 [Thread=1] INFO - 目标坐标X-82.478482Y95.761489 2022-09-08 15:00:45,706 [Thread=1] INFO - 晶圆的大小5 2022-09-08 15:00:45,706 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 15:00:45,706 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:00:45,706 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:00:45,706 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 15:00:45,706 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 15:00:45,706 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:00:45,707 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:00:51,998 [Thread=20] INFO - 单轴触发了 2022-09-08 15:00:51,998 [Thread=20] INFO - 该轴是Z 2022-09-08 15:00:51,998 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:51,999 [Thread=20] INFO - 该轴是Z,目标位置是-7.7348000000095 2022-09-08 15:00:51,999 [Thread=20] INFO - 步进失败 2022-09-08 15:00:52,170 [Thread=19] INFO - 单轴触发了 2022-09-08 15:00:52,170 [Thread=19] INFO - 该轴是Z 2022-09-08 15:00:52,170 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:52,171 [Thread=19] INFO - 该轴是Z,目标位置是-7.7348000000095 2022-09-08 15:00:52,171 [Thread=19] INFO - 步进失败 2022-09-08 15:00:54,148 [Thread=21] INFO - 单轴触发了 2022-09-08 15:00:54,148 [Thread=21] INFO - 该轴是Z 2022-09-08 15:00:54,148 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:54,149 [Thread=21] INFO - 该轴是Z,目标位置是-7.7347999999905 2022-09-08 15:00:54,149 [Thread=21] INFO - 步进失败 2022-09-08 15:00:54,306 [Thread=20] INFO - 单轴触发了 2022-09-08 15:00:54,306 [Thread=20] INFO - 该轴是Z 2022-09-08 15:00:54,306 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:54,307 [Thread=20] INFO - 该轴是Z,目标位置是-7.7347999999905 2022-09-08 15:00:54,307 [Thread=20] INFO - 步进失败 2022-09-08 15:00:54,466 [Thread=19] INFO - 单轴触发了 2022-09-08 15:00:54,466 [Thread=19] INFO - 该轴是Z 2022-09-08 15:00:54,467 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:54,467 [Thread=19] INFO - 该轴是Z,目标位置是-7.7343999999905 2022-09-08 15:00:54,467 [Thread=19] INFO - 步进失败 2022-09-08 15:00:54,636 [Thread=21] INFO - 单轴触发了 2022-09-08 15:00:54,636 [Thread=21] INFO - 该轴是Z 2022-09-08 15:00:54,636 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:54,637 [Thread=21] INFO - 该轴是Z,目标位置是-7.7343999999905 2022-09-08 15:00:54,637 [Thread=21] INFO - 步进失败 2022-09-08 15:00:54,804 [Thread=20] INFO - 单轴触发了 2022-09-08 15:00:54,805 [Thread=20] INFO - 该轴是Z 2022-09-08 15:00:54,805 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:54,805 [Thread=20] INFO - 该轴是Z,目标位置是-7.7340999999905 2022-09-08 15:00:54,805 [Thread=20] INFO - 步进失败 2022-09-08 15:00:54,973 [Thread=19] INFO - 单轴触发了 2022-09-08 15:00:54,973 [Thread=19] INFO - 该轴是Z 2022-09-08 15:00:54,973 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:54,974 [Thread=19] INFO - 该轴是Z,目标位置是-7.7340999999905 2022-09-08 15:00:54,974 [Thread=19] INFO - 步进失败 2022-09-08 15:00:56,658 [Thread=21] INFO - 单轴触发了 2022-09-08 15:00:56,659 [Thread=21] INFO - 该轴是Z 2022-09-08 15:00:56,659 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:56,659 [Thread=21] INFO - 该轴是Z,目标位置是-7.7341000000095 2022-09-08 15:00:56,659 [Thread=21] INFO - 步进失败 2022-09-08 15:00:56,827 [Thread=20] INFO - 单轴触发了 2022-09-08 15:00:56,828 [Thread=20] INFO - 该轴是Z 2022-09-08 15:00:56,828 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:56,828 [Thread=20] INFO - 该轴是Z,目标位置是-7.7341000000095 2022-09-08 15:00:56,828 [Thread=20] INFO - 步进失败 2022-09-08 15:00:56,996 [Thread=19] INFO - 单轴触发了 2022-09-08 15:00:56,996 [Thread=19] INFO - 该轴是Z 2022-09-08 15:00:56,996 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:00:56,996 [Thread=19] INFO - 该轴是Z,目标位置是-7.7341000000095 2022-09-08 15:00:56,996 [Thread=19] INFO - 步进失败 2022-09-08 15:01:03,157 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:03,212 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.4789903612431 2022-09-08 15:01:03,213 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.6393299868064 2022-09-08 15:01:03,213 [Thread=7] INFO - Measure angle is -91.55916 2022-09-08 15:01:03,213 [Thread=7] INFO - Measure StartPoint:1009.45886230469,1018.14105224609, EndPoint:1008.58801269531,1050.13684082031, PixelDistance:32.007638 2022-09-08 15:01:03,213 [Thread=7] INFO - DerivativeMeasure timespan = 0.2755 2022-09-08 15:01:07,436 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:07,487 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.3454811236194 2022-09-08 15:01:07,487 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.8685341753693 2022-09-08 15:01:07,487 [Thread=7] INFO - Measure angle is -91.107008 2022-09-08 15:01:07,487 [Thread=7] INFO - Measure StartPoint:1021.26531982422,1018.27032470703, EndPoint:1020.65014648438,1050.1064453125, PixelDistance:31.842064 2022-09-08 15:01:07,487 [Thread=7] INFO - DerivativeMeasure timespan = 0.2043 2022-09-08 15:01:08,732 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:08,791 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.1542624065333 2022-09-08 15:01:08,792 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.8392608076215 2022-09-08 15:01:08,792 [Thread=7] INFO - Measure angle is -90.496762 2022-09-08 15:01:08,792 [Thread=7] INFO - Measure StartPoint:1021.13818359375,1018.06164550781, EndPoint:1020.85980224609,1050.17126464844, PixelDistance:32.110826 2022-09-08 15:01:08,792 [Thread=7] INFO - DerivativeMeasure timespan = 0.2651 2022-09-08 15:01:09,748 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:09,801 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:09,802 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:09,802 [Thread=7] INFO - Measure angle is -90 2022-09-08 15:01:09,802 [Thread=7] INFO - Measure StartPoint:1023,1018.02484130859, EndPoint:1023,1050.21789550781, PixelDistance:32.193054 2022-09-08 15:01:09,802 [Thread=7] INFO - DerivativeMeasure timespan = 0.2823 2022-09-08 15:01:10,795 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:10,844 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.3277621949056 2022-09-08 15:01:10,844 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.9393401931906 2022-09-08 15:01:10,844 [Thread=7] INFO - Measure angle is -90.633551 2022-09-08 15:01:10,845 [Thread=7] INFO - Measure StartPoint:1020.09814453125,1018.12713623047, EndPoint:1019.74395751953,1050.15673828125, PixelDistance:32.03156 2022-09-08 15:01:10,845 [Thread=7] INFO - DerivativeMeasure timespan = 0.243 2022-09-08 15:01:11,846 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:11,900 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.2118151994756 2022-09-08 15:01:11,900 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.0125216777051 2022-09-08 15:01:11,900 [Thread=7] INFO - Measure angle is -90.612168 2022-09-08 15:01:11,900 [Thread=7] INFO - Measure StartPoint:1024.13671875,1018.20922851563, EndPoint:1023.79510498047,1050.17565917969, PixelDistance:31.968256 2022-09-08 15:01:11,900 [Thread=7] INFO - DerivativeMeasure timespan = 0.1923 2022-09-08 15:01:12,989 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:13,047 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:13,047 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:13,047 [Thread=7] INFO - Measure angle is -90 2022-09-08 15:01:13,047 [Thread=7] INFO - Measure StartPoint:1024,1018.12060546875, EndPoint:1024,1050.18981933594, PixelDistance:32.069214 2022-09-08 15:01:13,048 [Thread=7] INFO - DerivativeMeasure timespan = 0.2435 2022-09-08 15:01:29,631 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 15:01:29,632 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 15:01:31,134 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:01:31,134 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:01:31,134 [Thread=1] INFO - Longth长度127 2022-09-08 15:01:31,134 [Thread=1] INFO - 进入getLongth 2022-09-08 15:01:31,134 [Thread=1] INFO - 目标坐标X-82.481216Y95.761955 2022-09-08 15:01:31,135 [Thread=1] INFO - 晶圆的大小5 2022-09-08 15:01:31,135 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 15:01:31,135 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:01:31,135 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:01:31,135 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 15:01:31,135 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 15:01:31,135 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:01:31,135 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:01:33,596 [Thread=21] INFO - 单轴触发了 2022-09-08 15:01:33,596 [Thread=21] INFO - 该轴是Z 2022-09-08 15:01:33,596 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:01:33,598 [Thread=21] INFO - 该轴是Z,目标位置是-7.7346000000095 2022-09-08 15:01:33,598 [Thread=21] INFO - 步进失败 2022-09-08 15:01:33,746 [Thread=20] INFO - 单轴触发了 2022-09-08 15:01:33,747 [Thread=20] INFO - 该轴是Z 2022-09-08 15:01:33,747 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:01:33,747 [Thread=20] INFO - 该轴是Z,目标位置是-7.7346000000095 2022-09-08 15:01:33,747 [Thread=20] INFO - 步进失败 2022-09-08 15:01:33,987 [Thread=19] INFO - 单轴触发了 2022-09-08 15:01:33,988 [Thread=19] INFO - 该轴是Z 2022-09-08 15:01:33,988 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:01:33,988 [Thread=19] INFO - 该轴是Z,目标位置是-7.7346000000095 2022-09-08 15:01:33,988 [Thread=19] INFO - 步进失败 2022-09-08 15:01:35,639 [Thread=21] INFO - 单轴触发了 2022-09-08 15:01:35,639 [Thread=21] INFO - 该轴是Z 2022-09-08 15:01:35,639 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:01:35,639 [Thread=21] INFO - 该轴是Z,目标位置是-7.7347999999905 2022-09-08 15:01:35,640 [Thread=21] INFO - 步进失败 2022-09-08 15:01:35,815 [Thread=20] INFO - 单轴触发了 2022-09-08 15:01:35,815 [Thread=20] INFO - 该轴是Z 2022-09-08 15:01:35,815 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:01:35,816 [Thread=20] INFO - 该轴是Z,目标位置是-7.7347999999905 2022-09-08 15:01:35,816 [Thread=20] INFO - 步进失败 2022-09-08 15:01:35,990 [Thread=19] INFO - 单轴触发了 2022-09-08 15:01:35,991 [Thread=19] INFO - 该轴是Z 2022-09-08 15:01:35,991 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:01:35,991 [Thread=19] INFO - 该轴是Z,目标位置是-7.7345999999905 2022-09-08 15:01:35,991 [Thread=19] INFO - 步进失败 2022-09-08 15:01:41,497 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:41,550 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:41,550 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 91.8024924328929 2022-09-08 15:01:41,550 [Thread=3] INFO - Measure angle is -90.901246 2022-09-08 15:01:41,551 [Thread=3] INFO - Measure StartPoint:1016.193359375,1002.70782470703, EndPoint:1015.68579101563,1034.97375488281, PixelDistance:32.269922 2022-09-08 15:01:41,551 [Thread=3] INFO - DerivativeMeasure timespan = 0.2357 2022-09-08 15:01:42,688 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:42,738 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:42,739 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.363352583095 2022-09-08 15:01:42,739 [Thread=3] INFO - Measure angle is -90.181676 2022-09-08 15:01:42,739 [Thread=3] INFO - Measure StartPoint:1002.04565429688,1002.61065673828, EndPoint:1001.94311523438,1034.93713378906, PixelDistance:32.32664 2022-09-08 15:01:42,739 [Thread=3] INFO - DerivativeMeasure timespan = 0.2324 2022-09-08 15:01:44,295 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:44,354 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:44,354 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.2757168055255 2022-09-08 15:01:44,354 [Thread=13] INFO - Measure angle is -90.137858 2022-09-08 15:01:44,354 [Thread=13] INFO - Measure StartPoint:1026.05114746094,1002.75933837891, EndPoint:1025.97326660156,1035.11987304688, PixelDistance:32.360628 2022-09-08 15:01:44,354 [Thread=13] INFO - DerivativeMeasure timespan = 0.2867 2022-09-08 15:01:45,305 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:45,357 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:45,357 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.8162781998905 2022-09-08 15:01:45,357 [Thread=13] INFO - Measure angle is -90.408139 2022-09-08 15:01:45,358 [Thread=13] INFO - Measure StartPoint:1018.22338867188,970.640808105469, EndPoint:1017.77362060547,1033.78283691406, PixelDistance:63.143631 2022-09-08 15:01:45,358 [Thread=13] INFO - DerivativeMeasure timespan = 0.3233 2022-09-08 15:01:46,282 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:46,340 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:46,340 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.6125736117894 2022-09-08 15:01:46,340 [Thread=13] INFO - Measure angle is -90.306287 2022-09-08 15:01:46,340 [Thread=13] INFO - Measure StartPoint:1008.05535888672,1002.64422607422, EndPoint:1007.88238525391,1035.00402832031, PixelDistance:32.360265 2022-09-08 15:01:46,340 [Thread=13] INFO - DerivativeMeasure timespan = 0.2789 2022-09-08 15:01:47,542 [Thread=13] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:01:47,595 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:01:47,596 [Thread=13] INFO - SetDerivativeMeasureParameters: Deg = 90.8317028751937 2022-09-08 15:01:47,596 [Thread=13] INFO - Measure angle is -90.415851 2022-09-08 15:01:47,596 [Thread=13] INFO - Measure StartPoint:1023.12548828125,1002.71130371094, EndPoint:1022.89044189453,1035.09851074219, PixelDistance:32.38806 2022-09-08 15:01:47,596 [Thread=13] INFO - DerivativeMeasure timespan = 0.2724 2022-09-08 15:02:02,064 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:02,069 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:02:02,069 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:02:02,069 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:02:02,069 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:02,069 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:02:02,069 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:02:02,069 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:02:02,627 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:02:02,627 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:02:02,627 [Thread=21] INFO - 该轴是X,目标位置是-77.481216 2022-09-08 15:02:02,628 [Thread=21] INFO - 步进失败 2022-09-08 15:02:04,642 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:02:07,924 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:07,924 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:07,924 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:07,924 [Thread=20] INFO - 该轴是Z,目标位置是-7.7325000000095 2022-09-08 15:02:07,924 [Thread=20] INFO - 步进失败 2022-09-08 15:02:08,076 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:08,077 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:08,077 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:08,077 [Thread=19] INFO - 该轴是Z,目标位置是-7.7325000000095 2022-09-08 15:02:08,077 [Thread=19] INFO - 步进失败 2022-09-08 15:02:08,253 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:08,253 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:08,253 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:08,255 [Thread=21] INFO - 该轴是Z,目标位置是-7.7325000000095 2022-09-08 15:02:08,255 [Thread=21] INFO - 步进失败 2022-09-08 15:02:08,436 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:08,436 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:08,436 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:08,437 [Thread=20] INFO - 该轴是Z,目标位置是-7.7329000000095 2022-09-08 15:02:08,437 [Thread=20] INFO - 步进失败 2022-09-08 15:02:08,604 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:08,604 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:08,604 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:08,604 [Thread=19] INFO - 该轴是Z,目标位置是-7.7333000000095 2022-09-08 15:02:08,604 [Thread=19] INFO - 步进失败 2022-09-08 15:02:14,976 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:15,028 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:02:15,028 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.6662326976658 2022-09-08 15:02:15,028 [Thread=7] INFO - Measure angle is -90.333116 2022-09-08 15:02:15,028 [Thread=7] INFO - Measure StartPoint:1026.10815429688,991.398803710938, EndPoint:1025.91564941406,1024.50903320313, PixelDistance:33.110789 2022-09-08 15:02:15,028 [Thread=7] INFO - DerivativeMeasure timespan = 0.2819 2022-09-08 15:02:16,008 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:16,058 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:02:16,059 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.7262294074476 2022-09-08 15:02:16,059 [Thread=7] INFO - Measure angle is -90.363115 2022-09-08 15:02:16,060 [Thread=7] INFO - Measure StartPoint:1020.08001708984,991.372131347656, EndPoint:1019.87036132813,1024.45361328125, PixelDistance:33.082146 2022-09-08 15:02:16,061 [Thread=7] INFO - DerivativeMeasure timespan = 1.3967 2022-09-08 15:02:17,063 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:17,109 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:02:17,109 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:02:17,109 [Thread=7] INFO - Measure angle is -90 2022-09-08 15:02:17,110 [Thread=7] INFO - Measure StartPoint:1018,991.385375976563, EndPoint:1018,1024.51428222656, PixelDistance:33.128906 2022-09-08 15:02:17,110 [Thread=7] INFO - DerivativeMeasure timespan = 0.2379 2022-09-08 15:02:18,488 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:18,542 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 91.1201486159364 2022-09-08 15:02:18,542 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:02:18,542 [Thread=7] INFO - Measure angle is -90.560074 2022-09-08 15:02:18,543 [Thread=7] INFO - Measure StartPoint:1014.12359619141,991.356506347656, EndPoint:1013.80017089844,1024.44213867188, PixelDistance:33.087213 2022-09-08 15:02:18,543 [Thread=7] INFO - DerivativeMeasure timespan = 0.2782 2022-09-08 15:02:19,662 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:19,714 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90.846267264459 2022-09-08 15:02:19,714 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 15:02:19,714 [Thread=7] INFO - Measure angle is -90.423134 2022-09-08 15:02:19,714 [Thread=7] INFO - Measure StartPoint:1017.13757324219,991.371704101563, EndPoint:1016.89324951172,1024.4580078125, PixelDistance:33.087206 2022-09-08 15:02:19,714 [Thread=7] INFO - DerivativeMeasure timespan = 0.2548 2022-09-08 15:02:34,490 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 15:02:34,490 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 15:02:36,362 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:02:36,362 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:02:36,362 [Thread=1] INFO - Longth长度127 2022-09-08 15:02:36,362 [Thread=1] INFO - 进入getLongth 2022-09-08 15:02:36,363 [Thread=1] INFO - 目标坐标X-77.479756Y95.798055 2022-09-08 15:02:36,363 [Thread=1] INFO - 晶圆的大小5 2022-09-08 15:02:36,363 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 15:02:36,363 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:02:36,364 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:02:36,364 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 15:02:36,364 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 15:02:36,364 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:02:36,364 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:02:42,641 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:02:42,641 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:02:42,641 [Thread=1] INFO - Longth长度127 2022-09-08 15:02:42,641 [Thread=1] INFO - 进入getLongth 2022-09-08 15:02:42,641 [Thread=1] INFO - 目标坐标X-77.480408Y95.799329 2022-09-08 15:02:42,642 [Thread=1] INFO - 晶圆的大小5 2022-09-08 15:02:42,642 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 15:02:42,642 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:02:42,642 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:02:42,642 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 15:02:42,642 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 15:02:42,642 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:02:42,642 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:02:44,332 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:02:46,718 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:46,718 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:46,718 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:46,719 [Thread=21] INFO - 该轴是Z,目标位置是-7.7335000000095 2022-09-08 15:02:46,719 [Thread=21] INFO - 步进失败 2022-09-08 15:02:46,881 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:46,881 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:46,881 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:46,882 [Thread=20] INFO - 该轴是Z,目标位置是-7.7335000000095 2022-09-08 15:02:46,882 [Thread=20] INFO - 步进失败 2022-09-08 15:02:47,057 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:47,057 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:47,057 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:47,058 [Thread=19] INFO - 该轴是Z,目标位置是-7.7335000000095 2022-09-08 15:02:47,058 [Thread=19] INFO - 步进失败 2022-09-08 15:02:47,233 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:47,233 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:47,233 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:47,234 [Thread=21] INFO - 该轴是Z,目标位置是-7.7335000000095 2022-09-08 15:02:47,234 [Thread=21] INFO - 步进失败 2022-09-08 15:02:48,313 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:48,313 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:48,313 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:48,314 [Thread=20] INFO - 该轴是Z,目标位置是-7.7338999999905 2022-09-08 15:02:48,314 [Thread=20] INFO - 步进失败 2022-09-08 15:02:48,489 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:48,490 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:48,490 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:48,490 [Thread=19] INFO - 该轴是Z,目标位置是-7.7338999999905 2022-09-08 15:02:48,490 [Thread=19] INFO - 步进失败 2022-09-08 15:02:48,649 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:48,650 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:48,650 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:48,650 [Thread=21] INFO - 该轴是Z,目标位置是-7.7338999999905 2022-09-08 15:02:48,650 [Thread=21] INFO - 步进失败 2022-09-08 15:02:48,832 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:48,832 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:48,833 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:48,833 [Thread=20] INFO - 该轴是Z,目标位置是-7.7338999999905 2022-09-08 15:02:48,833 [Thread=20] INFO - 步进失败 2022-09-08 15:02:49,001 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:49,001 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:49,001 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:49,001 [Thread=19] INFO - 该轴是Z,目标位置是-7.7334999999905 2022-09-08 15:02:49,001 [Thread=19] INFO - 步进失败 2022-09-08 15:02:49,176 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:49,176 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:49,176 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:49,177 [Thread=21] INFO - 该轴是Z,目标位置是-7.7334999999905 2022-09-08 15:02:49,177 [Thread=21] INFO - 步进失败 2022-09-08 15:02:49,353 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:49,353 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:49,353 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:49,354 [Thread=20] INFO - 该轴是Z,目标位置是-7.7330999999905 2022-09-08 15:02:49,354 [Thread=20] INFO - 步进失败 2022-09-08 15:02:49,533 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:49,533 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:49,533 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:49,533 [Thread=19] INFO - 该轴是Z,目标位置是-7.7326999999905 2022-09-08 15:02:49,534 [Thread=19] INFO - 步进失败 2022-09-08 15:02:49,725 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:49,725 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:49,725 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:49,725 [Thread=21] INFO - 该轴是Z,目标位置是-7.7326999999905 2022-09-08 15:02:49,725 [Thread=21] INFO - 步进失败 2022-09-08 15:02:49,896 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:49,896 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:49,896 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:49,897 [Thread=20] INFO - 该轴是Z,目标位置是-7.7324999999905 2022-09-08 15:02:49,897 [Thread=20] INFO - 步进失败 2022-09-08 15:02:50,097 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:50,097 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:50,097 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:50,097 [Thread=19] INFO - 该轴是Z,目标位置是-7.7324999999905 2022-09-08 15:02:50,097 [Thread=19] INFO - 步进失败 2022-09-08 15:02:51,096 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:51,144 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:51,144 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:51,145 [Thread=21] INFO - 该轴是Z,目标位置是-7.7316999999905 2022-09-08 15:02:51,145 [Thread=21] INFO - 步进失败 2022-09-08 15:02:52,827 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:52,828 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:52,828 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:52,828 [Thread=20] INFO - 该轴是Z,目标位置是-7.7319000000095 2022-09-08 15:02:52,828 [Thread=20] INFO - 步进失败 2022-09-08 15:02:53,003 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:53,003 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:53,003 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:53,003 [Thread=19] INFO - 该轴是Z,目标位置是-7.7319000000095 2022-09-08 15:02:53,003 [Thread=19] INFO - 步进失败 2022-09-08 15:02:53,171 [Thread=21] INFO - 单轴触发了 2022-09-08 15:02:53,171 [Thread=21] INFO - 该轴是Z 2022-09-08 15:02:53,171 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:53,172 [Thread=21] INFO - 该轴是Z,目标位置是-7.7319000000095 2022-09-08 15:02:53,172 [Thread=21] INFO - 步进失败 2022-09-08 15:02:53,376 [Thread=20] INFO - 单轴触发了 2022-09-08 15:02:53,377 [Thread=20] INFO - 该轴是Z 2022-09-08 15:02:53,377 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:53,377 [Thread=20] INFO - 该轴是Z,目标位置是-7.7321000000095 2022-09-08 15:02:53,377 [Thread=20] INFO - 步进失败 2022-09-08 15:02:53,880 [Thread=19] INFO - 单轴触发了 2022-09-08 15:02:53,880 [Thread=19] INFO - 该轴是Z 2022-09-08 15:02:53,880 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:02:53,881 [Thread=19] INFO - 该轴是Z,目标位置是-7.7327000000095 2022-09-08 15:02:53,881 [Thread=19] INFO - 步进失败 2022-09-08 15:02:57,914 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:57,966 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.518852638262446 2022-09-08 15:02:57,967 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:02:57,967 [Thread=5] INFO - Measure angle is -0.259426 2022-09-08 15:02:57,967 [Thread=5] INFO - Measure StartPoint:1021.68933105469,1023.90802001953, EndPoint:1053.86022949219,1024.0537109375, PixelDistance:32.171228 2022-09-08 15:02:57,967 [Thread=5] INFO - DerivativeMeasure timespan = 0.318 2022-09-08 15:02:59,521 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:02:59,577 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:02:59,577 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:02:59,577 [Thread=16] INFO - Measure StartPoint:1021.64794921875,1032, EndPoint:1053.80236816406,1032, PixelDistance:32.154419 2022-09-08 15:02:59,577 [Thread=16] INFO - DerivativeMeasure timespan = 0.3651 2022-09-08 15:03:01,010 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:03:01,058 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:03:01,058 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.141637125711544 2022-09-08 15:03:01,058 [Thread=16] INFO - Measure angle is -0.070819 2022-09-08 15:03:01,059 [Thread=16] INFO - Measure StartPoint:1021.6748046875,1027.98352050781, EndPoint:1053.82299804688,1028.02331542969, PixelDistance:32.148218 2022-09-08 15:03:01,059 [Thread=16] INFO - DerivativeMeasure timespan = 0.3059 2022-09-08 15:03:02,225 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:03:02,283 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:03:02,284 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:03:02,284 [Thread=16] INFO - Measure StartPoint:1021.61761474609,1038, EndPoint:1053.73669433594,1038, PixelDistance:32.11908 2022-09-08 15:03:02,284 [Thread=16] INFO - DerivativeMeasure timespan = 0.2803 2022-09-08 15:03:03,482 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:03:03,533 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:03:03,534 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:03:03,534 [Thread=16] INFO - Measure StartPoint:1021.63397216797,1034, EndPoint:1053.76794433594,1034, PixelDistance:32.133972 2022-09-08 15:03:03,534 [Thread=16] INFO - DerivativeMeasure timespan = 0.3747 2022-09-08 15:09:35,289 [Thread=11] INFO - SwitchIndex index:0 2022-09-08 15:09:35,292 [Thread=11] INFO - Switch Lens:Broadcast Event 2022-09-08 15:09:35,305 [Thread=15] INFO - 单轴触发了 2022-09-08 15:09:35,305 [Thread=15] INFO - 该轴是Z 2022-09-08 15:09:35,305 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 15:09:35,306 [Thread=15] INFO - 该轴是Z,目标位置是-7.68170000095367 2022-09-08 15:09:35,306 [Thread=15] INFO - 步进失败 2022-09-08 15:09:35,306 [Thread=15] INFO - SwitchOffsetZ:0.051 2022-09-08 15:09:35,310 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:09:35,310 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:09:35,310 [Thread=15] INFO - Longth长度127 2022-09-08 15:09:35,310 [Thread=15] INFO - 进入getLongth 2022-09-08 15:09:35,310 [Thread=15] INFO - 目标坐标X-77.423408Y95.880329 2022-09-08 15:09:35,310 [Thread=15] INFO - 晶圆的大小5 2022-09-08 15:09:35,311 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 15:09:35,311 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:09:35,311 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 15:09:35,311 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 15:09:35,311 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 15:09:35,311 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 15:09:35,311 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 15:09:36,316 [Thread=11] INFO - stageout currentPos:-7.7327, currentVelocity:2, delayTime:3916, point.Z:-0.5 2022-09-08 15:09:36,316 [Thread=11] INFO - stage out homez 2022-09-08 15:09:42,243 [Thread=11] INFO - stage out home ok 2022-09-08 15:09:42,246 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 15:09:42,246 [Thread=11] INFO - stagein homez 2022-09-08 15:09:42,246 [Thread=11] INFO - stagein home ok 2022-09-08 15:09:42,246 [Thread=11] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 15:09:42,246 [Thread=11] INFO - Longth长度127 2022-09-08 15:09:42,247 [Thread=11] INFO - 进入getLongth 2022-09-08 15:09:42,247 [Thread=11] INFO - 目标坐标X-100Y-90 2022-09-08 15:09:42,247 [Thread=11] INFO - 晶圆的大小5 2022-09-08 15:09:42,247 [Thread=11] INFO - 晶圆的宽高127 2022-09-08 15:09:42,247 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:09:42,247 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 15:09:42,247 [Thread=11] INFO - X-安全坐标18.39 2022-09-08 15:09:42,247 [Thread=11] INFO - Y上安全坐标-16.7307 2022-09-08 15:09:42,247 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 15:09:42,247 [Thread=11] INFO - 双轴-目标点不在范围内 2022-09-08 15:09:42,248 [Thread=11] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 15:16:13,357 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 15:16:13,359 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 15:16:13,360 [Thread=27] INFO - 单轴触发了 2022-09-08 15:16:13,360 [Thread=27] INFO - 该轴是Z 2022-09-08 15:16:13,361 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 15:16:13,361 [Thread=27] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 15:16:13,361 [Thread=27] INFO - 步进失败 2022-09-08 15:16:13,361 [Thread=27] INFO - SwitchOffsetZ:0 2022-09-08 15:16:13,369 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 15:16:13,369 [Thread=27] INFO - stagein homez 2022-09-08 15:16:13,370 [Thread=27] INFO - stagein home ok 2022-09-08 15:16:13,370 [Thread=27] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 15:16:13,370 [Thread=27] INFO - Longth长度152.4 2022-09-08 15:16:13,370 [Thread=27] INFO - 进入getLongth 2022-09-08 15:16:13,370 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 15:16:13,370 [Thread=27] INFO - 晶圆的大小6 2022-09-08 15:16:13,371 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 15:16:13,371 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:16:13,371 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 15:16:13,371 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 15:16:13,371 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 15:16:13,371 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 15:16:13,371 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 15:16:13,371 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 15:16:14,374 [Thread=13] INFO - stagein currentPos:-0.2337, currentVelocity:2, delayTime:433, point.Z:-0.5 2022-09-08 15:16:14,375 [Thread=13] INFO - stagein homez 2022-09-08 15:16:16,824 [Thread=13] INFO - stagein home ok 2022-09-08 15:16:16,826 [Thread=13] INFO - StageBack: waferSize = 6 2022-09-08 15:16:16,830 [Thread=13] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 15:16:16,830 [Thread=13] INFO - stagein homez 2022-09-08 15:16:16,830 [Thread=13] INFO - stagein home ok 2022-09-08 15:16:16,830 [Thread=13] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 15:16:16,830 [Thread=13] INFO - Longth长度152.4 2022-09-08 15:16:16,830 [Thread=13] INFO - 进入getLongth 2022-09-08 15:16:16,830 [Thread=13] INFO - 目标坐标X38.79Y115.2693 2022-09-08 15:16:16,830 [Thread=13] INFO - 晶圆的大小6 2022-09-08 15:16:16,831 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 15:16:16,831 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:16:16,831 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 15:16:16,831 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 15:16:16,831 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 15:16:16,831 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 15:16:16,831 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 15:16:24,626 [Thread=13] INFO - 单轴触发了 2022-09-08 15:16:24,626 [Thread=13] INFO - 该轴是Z 2022-09-08 15:16:24,626 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 15:16:24,627 [Thread=13] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 15:16:24,627 [Thread=13] INFO - 步进失败 2022-09-08 15:17:04,599 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:17:04,599 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:17:04,599 [Thread=21] INFO - Longth长度152.4 2022-09-08 15:17:04,599 [Thread=21] INFO - 进入getLongth 2022-09-08 15:17:04,600 [Thread=21] INFO - 目标坐标X28.79Y105.2693 2022-09-08 15:17:04,600 [Thread=21] INFO - 晶圆的大小6 2022-09-08 15:17:04,600 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 15:17:04,600 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:17:04,600 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 15:17:04,600 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 15:17:04,600 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 15:17:04,600 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 15:17:04,600 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 15:17:05,505 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:17:05,505 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:17:05,505 [Thread=20] INFO - Longth长度152.4 2022-09-08 15:17:05,505 [Thread=20] INFO - 进入getLongth 2022-09-08 15:17:05,506 [Thread=20] INFO - 目标坐标X18.79Y95.2693 2022-09-08 15:17:05,506 [Thread=20] INFO - 晶圆的大小6 2022-09-08 15:17:05,506 [Thread=20] INFO - 晶圆的宽高152.4 2022-09-08 15:17:05,506 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:17:05,506 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 15:17:05,506 [Thread=20] INFO - X-安全坐标43.79 2022-09-08 15:17:05,506 [Thread=20] INFO - Y上安全坐标-42.1307 2022-09-08 15:17:05,506 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 15:17:05,506 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 15:17:06,381 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:17:06,381 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:17:06,381 [Thread=19] INFO - Longth长度152.4 2022-09-08 15:17:06,381 [Thread=19] INFO - 进入getLongth 2022-09-08 15:17:06,382 [Thread=19] INFO - 目标坐标X8.78999999999998Y85.2693 2022-09-08 15:17:06,382 [Thread=19] INFO - 晶圆的大小6 2022-09-08 15:17:06,382 [Thread=19] INFO - 晶圆的宽高152.4 2022-09-08 15:17:06,382 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:17:06,382 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 15:17:06,382 [Thread=19] INFO - X-安全坐标43.79 2022-09-08 15:17:06,382 [Thread=19] INFO - Y上安全坐标-42.1307 2022-09-08 15:17:06,382 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 15:17:06,382 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 15:17:08,124 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:17:08,124 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:17:08,124 [Thread=19] INFO - Longth长度152.4 2022-09-08 15:17:08,124 [Thread=19] INFO - 进入getLongth 2022-09-08 15:17:08,124 [Thread=19] INFO - 目标坐标X-1.21000000000002Y75.2693 2022-09-08 15:17:08,124 [Thread=19] INFO - 晶圆的大小6 2022-09-08 15:17:08,125 [Thread=19] INFO - 晶圆的宽高152.4 2022-09-08 15:17:08,125 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:17:08,125 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 15:17:08,125 [Thread=19] INFO - X-安全坐标43.79 2022-09-08 15:17:08,125 [Thread=19] INFO - Y上安全坐标-42.1307 2022-09-08 15:17:08,125 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 15:17:08,125 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 15:17:10,794 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:17:10,905 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 15:17:14,337 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 15:17:14,339 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:17:14,350 [Thread=15] INFO - 单轴触发了 2022-09-08 15:17:14,350 [Thread=15] INFO - 该轴是Z 2022-09-08 15:17:14,350 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 15:17:14,351 [Thread=15] INFO - 该轴是Z,目标位置是-2.56030000138283 2022-09-08 15:17:14,351 [Thread=15] INFO - 步进失败 2022-09-08 15:17:14,351 [Thread=15] INFO - SwitchOffsetZ:-0.0573 2022-09-08 15:17:14,355 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:17:14,355 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:17:14,356 [Thread=15] INFO - Longth长度152.4 2022-09-08 15:17:14,356 [Thread=15] INFO - 进入getLongth 2022-09-08 15:17:14,356 [Thread=15] INFO - 目标坐标X-1.257Y75.1913 2022-09-08 15:17:14,356 [Thread=15] INFO - 晶圆的大小6 2022-09-08 15:17:14,356 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 15:17:14,356 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:17:14,356 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 15:17:14,356 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 15:17:14,357 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 15:17:14,357 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 15:17:14,357 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 15:17:16,350 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:17:18,870 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 15:17:18,873 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:17:18,884 [Thread=15] INFO - 单轴触发了 2022-09-08 15:17:18,885 [Thread=15] INFO - 该轴是Z 2022-09-08 15:17:18,885 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 15:17:18,885 [Thread=15] INFO - 该轴是Z,目标位置是-2.5451999976635 2022-09-08 15:17:18,885 [Thread=15] INFO - 步进失败 2022-09-08 15:17:18,885 [Thread=15] INFO - SwitchOffsetZ:0.006300002 2022-09-08 15:17:18,905 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:17:18,905 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:17:18,905 [Thread=15] INFO - Longth长度152.4 2022-09-08 15:17:18,905 [Thread=15] INFO - 进入getLongth 2022-09-08 15:17:18,905 [Thread=15] INFO - 目标坐标X-1.267Y75.1883 2022-09-08 15:17:18,905 [Thread=15] INFO - 晶圆的大小6 2022-09-08 15:17:18,906 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 15:17:18,906 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:17:18,906 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 15:17:18,906 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 15:17:18,906 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 15:17:18,906 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 15:17:18,906 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 15:17:20,878 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:17:32,632 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:32,688 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:17:32,688 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0441503453895236 2022-09-08 15:17:32,688 [Thread=3] INFO - Measure angle is -0.022075 2022-09-08 15:17:32,689 [Thread=3] INFO - Measure StartPoint:954.056213378906,1036.998046875, EndPoint:978.390258789063,1037.00744628906, PixelDistance:24.334047 2022-09-08 15:17:32,689 [Thread=3] INFO - DerivativeMeasure timespan = 0.4832 2022-09-08 15:17:34,946 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:34,994 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.00216215752041519 2022-09-08 15:17:34,995 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.16759149664743 2022-09-08 15:17:34,995 [Thread=3] INFO - Measure angle is -0.084877 2022-09-08 15:17:34,995 [Thread=3] INFO - Measure StartPoint:954.092651367188,1020.97644042969, EndPoint:978.4423828125,1021.01251220703, PixelDistance:24.349758 2022-09-08 15:17:34,996 [Thread=3] INFO - DerivativeMeasure timespan = 0.5964 2022-09-08 15:17:37,248 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:37,305 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:17:37,305 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0451342945558944 2022-09-08 15:17:37,305 [Thread=3] INFO - Measure angle is -0.022567 2022-09-08 15:17:37,306 [Thread=3] INFO - Measure StartPoint:1069.95532226563,1036.99401855469, EndPoint:1094.21472167969,1037.00366210938, PixelDistance:24.259401 2022-09-08 15:17:37,306 [Thread=3] INFO - DerivativeMeasure timespan = 0.4611 2022-09-08 15:17:38,880 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:38,931 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 179.739583636595 2022-09-08 15:17:38,931 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:17:38,931 [Thread=3] INFO - Measure angle is -179.869792 2022-09-08 15:17:38,932 [Thread=3] INFO - Measure StartPoint:862.342041015625,1037.9697265625, EndPoint:838.108825683594,1038.02478027344, PixelDistance:24.233278 2022-09-08 15:17:38,932 [Thread=3] INFO - DerivativeMeasure timespan = 0.3615 2022-09-08 15:17:41,093 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:41,148 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.132612679427779 2022-09-08 15:17:41,148 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:17:41,148 [Thread=3] INFO - Measure angle is -0.066306 2022-09-08 15:17:41,149 [Thread=3] INFO - Measure StartPoint:954.080444335938,1025.98510742188, EndPoint:978.418518066406,1026.01318359375, PixelDistance:24.33809 2022-09-08 15:17:41,149 [Thread=3] INFO - DerivativeMeasure timespan = 0.4662 2022-09-08 15:17:42,335 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:42,393 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:17:42,394 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0708772027913988 2022-09-08 15:17:42,394 [Thread=3] INFO - Measure angle is -0.035439 2022-09-08 15:17:42,394 [Thread=3] INFO - Measure StartPoint:1069.96691894531,1036.9931640625, EndPoint:1094.24426269531,1037.00817871094, PixelDistance:24.277348 2022-09-08 15:17:42,394 [Thread=3] INFO - DerivativeMeasure timespan = 0.5675 2022-09-08 15:17:43,710 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:17:43,767 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:17:43,768 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0481575670218534 2022-09-08 15:17:43,768 [Thread=3] INFO - Measure angle is -0.024079 2022-09-08 15:17:43,768 [Thread=3] INFO - Measure StartPoint:954.055480957031,1032.99450683594, EndPoint:978.408020019531,1033.00476074219, PixelDistance:24.352541 2022-09-08 15:17:43,769 [Thread=3] INFO - DerivativeMeasure timespan = 0.4681 2022-09-08 15:19:31,863 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:19:31,910 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.519394788092901 2022-09-08 15:19:31,910 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:19:31,911 [Thread=5] INFO - Measure angle is -0.259697 2022-09-08 15:19:31,911 [Thread=5] INFO - Measure StartPoint:978.365966796875,1031.79772949219, EndPoint:1070.009765625,1032.21313476563, PixelDistance:91.64474 2022-09-08 15:19:31,911 [Thread=5] INFO - DerivativeMeasure timespan = 0.675 2022-09-08 15:19:36,157 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:19:36,210 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:19:36,210 [Thread=5] INFO - Measure angle is 0 2022-09-08 15:19:36,211 [Thread=5] INFO - Measure StartPoint:978.385925292969,1035, EndPoint:1070.0185546875,1035, PixelDistance:91.632629 2022-09-08 15:19:36,211 [Thread=5] INFO - DerivativeMeasure timespan = 0.5133 2022-09-08 15:19:37,735 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:19:37,785 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:19:37,785 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:19:37,786 [Thread=5] INFO - Measure angle is 0 2022-09-08 15:19:37,786 [Thread=5] INFO - Measure StartPoint:954.102416992188,1018, EndPoint:978.478759765625,1018, PixelDistance:24.376343 2022-09-08 15:19:37,786 [Thread=5] INFO - DerivativeMeasure timespan = 0.3026 2022-09-08 15:19:40,052 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:19:40,102 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:19:40,102 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:19:40,103 [Thread=5] INFO - Measure angle is 0 2022-09-08 15:19:40,103 [Thread=5] INFO - Measure StartPoint:1185.90490722656,1019, EndPoint:1210.3447265625,1019, PixelDistance:24.439819 2022-09-08 15:19:40,103 [Thread=5] INFO - DerivativeMeasure timespan = 0.5932 2022-09-08 15:20:59,038 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:21:00,553 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 15:21:00,556 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:21:00,568 [Thread=6] INFO - 单轴触发了 2022-09-08 15:21:00,569 [Thread=6] INFO - 该轴是Z 2022-09-08 15:21:00,569 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:00,569 [Thread=6] INFO - 该轴是Z,目标位置是-2.49410000095367 2022-09-08 15:21:00,570 [Thread=6] INFO - 步进失败 2022-09-08 15:21:00,570 [Thread=6] INFO - SwitchOffsetZ:0.051 2022-09-08 15:21:00,575 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:00,575 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:00,575 [Thread=6] INFO - Longth长度152.4 2022-09-08 15:21:00,575 [Thread=6] INFO - 进入getLongth 2022-09-08 15:21:00,575 [Thread=6] INFO - 目标坐标X-1.21Y75.2693 2022-09-08 15:21:00,575 [Thread=6] INFO - 晶圆的大小6 2022-09-08 15:21:00,575 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 15:21:00,575 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:21:00,575 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 15:21:00,576 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 15:21:00,576 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 15:21:00,576 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 15:21:00,576 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 15:21:02,564 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:21:06,123 [Thread=21] INFO - 单轴触发了 2022-09-08 15:21:06,128 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:06,128 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:06,128 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:21:06,128 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:06,128 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:06,128 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:06,128 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:06,667 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:06,667 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:06,667 [Thread=21] INFO - 该轴是X,目标位置是-11.21 2022-09-08 15:21:06,667 [Thread=21] INFO - 步进失败 2022-09-08 15:21:06,813 [Thread=20] INFO - 单轴触发了 2022-09-08 15:21:06,817 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:06,817 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:06,818 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:21:06,818 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:06,818 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:06,818 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:06,818 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:07,380 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:07,380 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:07,380 [Thread=20] INFO - 该轴是X,目标位置是-21.21 2022-09-08 15:21:07,380 [Thread=20] INFO - 步进失败 2022-09-08 15:21:07,509 [Thread=19] INFO - 单轴触发了 2022-09-08 15:21:07,513 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:07,513 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:07,513 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:21:07,513 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:07,513 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:07,513 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:07,513 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:07,967 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:07,967 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:07,967 [Thread=19] INFO - 该轴是X,目标位置是-31.21 2022-09-08 15:21:07,968 [Thread=19] INFO - 步进失败 2022-09-08 15:21:08,181 [Thread=21] INFO - 单轴触发了 2022-09-08 15:21:08,299 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:08,299 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:08,299 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:21:08,299 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:08,299 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:08,299 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:08,300 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:08,756 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:08,757 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:08,757 [Thread=21] INFO - 该轴是X,目标位置是-41.21 2022-09-08 15:21:08,757 [Thread=21] INFO - 步进失败 2022-09-08 15:21:08,933 [Thread=20] INFO - 单轴触发了 2022-09-08 15:21:08,936 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:08,937 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:08,937 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:21:08,937 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:08,937 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:08,937 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:08,937 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:09,655 [Thread=19] INFO - 单轴触发了 2022-09-08 15:21:09,659 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:09,659 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:09,659 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:21:09,659 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:09,659 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:09,659 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:09,659 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:10,117 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:10,117 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:10,117 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:10,117 [Thread=19] INFO - 该轴是X,目标位置是-61.21 2022-09-08 15:21:10,118 [Thread=19] INFO - 步进失败 2022-09-08 15:21:10,117 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:10,118 [Thread=20] INFO - 该轴是X,目标位置是-51.21 2022-09-08 15:21:10,118 [Thread=20] INFO - 步进失败 2022-09-08 15:21:10,317 [Thread=21] INFO - 单轴触发了 2022-09-08 15:21:10,321 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:10,321 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:10,321 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:21:10,321 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:10,321 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:10,321 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:10,321 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:11,081 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:11,081 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:11,082 [Thread=21] INFO - 该轴是X,目标位置是-71.21 2022-09-08 15:21:11,082 [Thread=21] INFO - 步进失败 2022-09-08 15:21:11,181 [Thread=19] INFO - 单轴触发了 2022-09-08 15:21:11,185 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:11,185 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:11,185 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:21:11,185 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:11,185 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:11,185 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:11,185 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:11,967 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:11,967 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:11,967 [Thread=19] INFO - 该轴是X,目标位置是-81.21 2022-09-08 15:21:11,967 [Thread=19] INFO - 步进失败 2022-09-08 15:21:12,105 [Thread=20] INFO - 单轴触发了 2022-09-08 15:21:12,109 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:12,109 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:12,109 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:21:12,110 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:12,110 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:21:12,110 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:21:12,110 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:21:13,073 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:21:13,073 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:21:13,073 [Thread=20] INFO - 该轴是X,目标位置是-91.21 2022-09-08 15:21:13,073 [Thread=20] INFO - 步进失败 2022-09-08 15:21:17,226 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 15:21:17,228 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:21:17,241 [Thread=11] INFO - 单轴触发了 2022-09-08 15:21:17,241 [Thread=11] INFO - 该轴是Z 2022-09-08 15:21:17,242 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:17,242 [Thread=11] INFO - 该轴是Z,目标位置是-2.53570000138283 2022-09-08 15:21:17,242 [Thread=11] INFO - 步进失败 2022-09-08 15:21:17,242 [Thread=11] INFO - SwitchOffsetZ:-0.0573 2022-09-08 15:21:17,246 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:17,247 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:17,247 [Thread=11] INFO - Longth长度152.4 2022-09-08 15:21:17,247 [Thread=11] INFO - 进入getLongth 2022-09-08 15:21:17,247 [Thread=11] INFO - 目标坐标X-91.257Y75.1913 2022-09-08 15:21:17,247 [Thread=11] INFO - 晶圆的大小6 2022-09-08 15:21:17,247 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 15:21:17,248 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:21:17,248 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 15:21:17,248 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 15:21:17,248 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 15:21:17,248 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 15:21:17,248 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 15:21:19,262 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:21:21,781 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 15:21:21,783 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:21:21,795 [Thread=6] INFO - 单轴触发了 2022-09-08 15:21:21,795 [Thread=6] INFO - 该轴是Z 2022-09-08 15:21:21,795 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 15:21:21,796 [Thread=6] INFO - 该轴是Z,目标位置是-2.5224999976635 2022-09-08 15:21:21,796 [Thread=6] INFO - 步进失败 2022-09-08 15:21:21,796 [Thread=6] INFO - SwitchOffsetZ:0.006300002 2022-09-08 15:21:21,800 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:21:21,800 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:21:21,800 [Thread=6] INFO - Longth长度152.4 2022-09-08 15:21:21,800 [Thread=6] INFO - 进入getLongth 2022-09-08 15:21:21,800 [Thread=6] INFO - 目标坐标X-91.267Y75.1883 2022-09-08 15:21:21,800 [Thread=6] INFO - 晶圆的大小6 2022-09-08 15:21:21,801 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 15:21:21,801 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:21:21,801 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 15:21:21,801 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 15:21:21,801 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 15:21:21,801 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 15:21:21,801 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 15:21:23,803 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:21:33,819 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:21:33,876 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:21:33,876 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:21:33,876 [Thread=30] INFO - Measure angle is 0 2022-09-08 15:21:33,876 [Thread=30] INFO - Measure StartPoint:944.443237304688,1023, EndPoint:968.704956054688,1023, PixelDistance:24.261719 2022-09-08 15:21:33,876 [Thread=30] INFO - DerivativeMeasure timespan = 0.3753 2022-09-08 15:21:35,538 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:21:35,590 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:21:35,590 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.0649417694904348 2022-09-08 15:21:35,590 [Thread=30] INFO - Measure angle is -0.032471 2022-09-08 15:21:35,591 [Thread=30] INFO - Measure StartPoint:1060.3388671875,1025.99560546875, EndPoint:1084.65856933594,1026.00939941406, PixelDistance:24.319706 2022-09-08 15:21:35,591 [Thread=30] INFO - DerivativeMeasure timespan = 0.9299 2022-09-08 15:21:37,319 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:21:37,369 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:21:37,370 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:21:37,370 [Thread=30] INFO - Measure angle is 0 2022-09-08 15:21:37,371 [Thread=30] INFO - Measure StartPoint:944.463073730469,1026, EndPoint:968.705322265625,1026, PixelDistance:24.242249 2022-09-08 15:21:37,371 [Thread=30] INFO - DerivativeMeasure timespan = 0.6911 2022-09-08 15:21:38,649 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:21:38,701 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:21:38,702 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.0173500423546882 2022-09-08 15:21:38,702 [Thread=30] INFO - Measure angle is -0.008675 2022-09-08 15:21:38,702 [Thread=30] INFO - Measure StartPoint:1060.349609375,1016.99853515625, EndPoint:1084.69934082031,1017.00219726563, PixelDistance:24.349732 2022-09-08 15:21:38,703 [Thread=30] INFO - DerivativeMeasure timespan = 0.5625 2022-09-08 15:22:01,743 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:22:04,261 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 15:22:04,264 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:22:04,275 [Thread=6] INFO - 单轴触发了 2022-09-08 15:22:04,275 [Thread=6] INFO - 该轴是Z 2022-09-08 15:22:04,276 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:04,276 [Thread=6] INFO - 该轴是Z,目标位置是-2.47110000095367 2022-09-08 15:22:04,276 [Thread=6] INFO - 步进失败 2022-09-08 15:22:04,276 [Thread=6] INFO - SwitchOffsetZ:0.051 2022-09-08 15:22:04,280 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:04,280 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:04,280 [Thread=6] INFO - Longth长度152.4 2022-09-08 15:22:04,281 [Thread=6] INFO - 进入getLongth 2022-09-08 15:22:04,281 [Thread=6] INFO - 目标坐标X-91.21Y75.2693 2022-09-08 15:22:04,281 [Thread=6] INFO - 晶圆的大小6 2022-09-08 15:22:04,281 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 15:22:04,281 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:04,281 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 15:22:04,281 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 15:22:04,281 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:04,281 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 15:22:04,281 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 15:22:06,277 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:22:07,333 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:07,334 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:07,334 [Thread=21] INFO - Longth长度152.4 2022-09-08 15:22:07,334 [Thread=21] INFO - 进入getLongth 2022-09-08 15:22:07,334 [Thread=21] INFO - 目标坐标X-81.21Y65.2693 2022-09-08 15:22:07,334 [Thread=21] INFO - 晶圆的大小6 2022-09-08 15:22:07,334 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 15:22:07,334 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:07,334 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 15:22:07,334 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 15:22:07,334 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:07,334 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 15:22:07,335 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 15:22:08,062 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:08,062 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:08,062 [Thread=19] INFO - Longth长度152.4 2022-09-08 15:22:08,063 [Thread=19] INFO - 进入getLongth 2022-09-08 15:22:08,063 [Thread=19] INFO - 目标坐标X-71.21Y55.2693 2022-09-08 15:22:08,063 [Thread=19] INFO - 晶圆的大小6 2022-09-08 15:22:08,063 [Thread=19] INFO - 晶圆的宽高152.4 2022-09-08 15:22:08,063 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:08,064 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 15:22:08,064 [Thread=19] INFO - X-安全坐标43.79 2022-09-08 15:22:08,064 [Thread=19] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:08,064 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 15:22:08,064 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 15:22:08,814 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:08,814 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:08,814 [Thread=20] INFO - Longth长度152.4 2022-09-08 15:22:08,814 [Thread=20] INFO - 进入getLongth 2022-09-08 15:22:08,814 [Thread=20] INFO - 目标坐标X-61.21Y45.2693 2022-09-08 15:22:08,814 [Thread=20] INFO - 晶圆的大小6 2022-09-08 15:22:08,814 [Thread=20] INFO - 晶圆的宽高152.4 2022-09-08 15:22:08,815 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:08,815 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 15:22:08,815 [Thread=20] INFO - X-安全坐标43.79 2022-09-08 15:22:08,815 [Thread=20] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:08,815 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 15:22:08,815 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 15:22:10,512 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:10,512 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:10,512 [Thread=21] INFO - Longth长度152.4 2022-09-08 15:22:10,512 [Thread=21] INFO - 进入getLongth 2022-09-08 15:22:10,512 [Thread=21] INFO - 目标坐标X-51.21Y35.2693 2022-09-08 15:22:10,512 [Thread=21] INFO - 晶圆的大小6 2022-09-08 15:22:10,512 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 15:22:10,513 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:10,513 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 15:22:10,513 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 15:22:10,513 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:10,513 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 15:22:10,513 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 15:22:12,840 [Thread=20] INFO - 单轴触发了 2022-09-08 15:22:12,845 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:12,845 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:12,845 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:22:12,845 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:12,845 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:22:12,845 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:22:12,846 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:22:13,325 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:22:13,325 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:22:13,325 [Thread=20] INFO - 该轴是X,目标位置是-41.21 2022-09-08 15:22:13,326 [Thread=20] INFO - 步进失败 2022-09-08 15:22:15,871 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 15:22:15,874 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:22:15,886 [Thread=15] INFO - 单轴触发了 2022-09-08 15:22:15,886 [Thread=15] INFO - 该轴是Z 2022-09-08 15:22:15,886 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:15,886 [Thread=15] INFO - 该轴是Z,目标位置是-2.49290000138283 2022-09-08 15:22:15,887 [Thread=15] INFO - 步进失败 2022-09-08 15:22:15,887 [Thread=15] INFO - SwitchOffsetZ:-0.0573 2022-09-08 15:22:15,891 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:15,891 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:15,891 [Thread=15] INFO - Longth长度152.4 2022-09-08 15:22:15,892 [Thread=15] INFO - 进入getLongth 2022-09-08 15:22:15,892 [Thread=15] INFO - 目标坐标X-41.257Y35.1913 2022-09-08 15:22:15,892 [Thread=15] INFO - 晶圆的大小6 2022-09-08 15:22:15,892 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 15:22:15,892 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:15,892 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 15:22:15,892 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 15:22:15,892 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:15,892 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 15:22:15,892 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 15:22:17,881 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:22:19,393 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 15:22:19,395 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:22:19,410 [Thread=4] INFO - 单轴触发了 2022-09-08 15:22:19,410 [Thread=4] INFO - 该轴是Z 2022-09-08 15:22:19,410 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:19,411 [Thread=4] INFO - 该轴是Z,目标位置是-2.4804999976635 2022-09-08 15:22:19,411 [Thread=4] INFO - 步进失败 2022-09-08 15:22:19,411 [Thread=4] INFO - SwitchOffsetZ:0.006300002 2022-09-08 15:22:19,429 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:19,429 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:19,429 [Thread=4] INFO - Longth长度152.4 2022-09-08 15:22:19,430 [Thread=4] INFO - 进入getLongth 2022-09-08 15:22:19,430 [Thread=4] INFO - 目标坐标X-41.267Y35.1883 2022-09-08 15:22:19,430 [Thread=4] INFO - 晶圆的大小6 2022-09-08 15:22:19,430 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 15:22:19,430 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:19,430 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 15:22:19,430 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 15:22:19,430 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:19,431 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 15:22:19,431 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 15:22:21,415 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:22:33,907 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:22:33,958 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:22:33,959 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.124443973722505 2022-09-08 15:22:33,959 [Thread=7] INFO - Measure angle is -0.062222 2022-09-08 15:22:33,959 [Thread=7] INFO - Measure StartPoint:1001.05950927734,1019.97943115234, EndPoint:1025.25695800781,1020.00573730469, PixelDistance:24.197463 2022-09-08 15:22:33,960 [Thread=7] INFO - DerivativeMeasure timespan = 0.5388 2022-09-08 15:22:35,420 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:22:35,474 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.230166075441122 2022-09-08 15:22:35,474 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.430401566236298 2022-09-08 15:22:35,475 [Thread=5] INFO - Measure angle is -0.330284 2022-09-08 15:22:35,475 [Thread=5] INFO - Measure StartPoint:1117.01379394531,1016.91363525391, EndPoint:1141.23571777344,1017.05322265625, PixelDistance:24.222326 2022-09-08 15:22:35,475 [Thread=5] INFO - DerivativeMeasure timespan = 0.3323 2022-09-08 15:22:37,014 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:22:37,070 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:22:37,070 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:22:37,071 [Thread=3] INFO - Measure angle is 0 2022-09-08 15:22:37,071 [Thread=3] INFO - Measure StartPoint:885.233215332031,1010, EndPoint:909.339782714844,1010, PixelDistance:24.106567 2022-09-08 15:22:37,071 [Thread=3] INFO - DerivativeMeasure timespan = 0.4459 2022-09-08 15:22:48,661 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:22:51,180 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 15:22:51,183 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:22:51,195 [Thread=6] INFO - 单轴触发了 2022-09-08 15:22:51,195 [Thread=6] INFO - 该轴是Z 2022-09-08 15:22:51,196 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:51,196 [Thread=6] INFO - 该轴是Z,目标位置是-2.42900000095367 2022-09-08 15:22:51,196 [Thread=6] INFO - 步进失败 2022-09-08 15:22:51,196 [Thread=6] INFO - SwitchOffsetZ:0.051 2022-09-08 15:22:51,201 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:51,201 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:51,201 [Thread=6] INFO - Longth长度152.4 2022-09-08 15:22:51,201 [Thread=6] INFO - 进入getLongth 2022-09-08 15:22:51,201 [Thread=6] INFO - 目标坐标X-41.21Y35.2693 2022-09-08 15:22:51,201 [Thread=6] INFO - 晶圆的大小6 2022-09-08 15:22:51,202 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 15:22:51,202 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:51,202 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 15:22:51,202 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 15:22:51,202 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:51,202 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 15:22:51,202 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 15:22:53,193 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:22:55,304 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:55,304 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:55,304 [Thread=19] INFO - Longth长度152.4 2022-09-08 15:22:55,304 [Thread=19] INFO - 进入getLongth 2022-09-08 15:22:55,304 [Thread=19] INFO - 目标坐标X-31.21Y25.2693 2022-09-08 15:22:55,304 [Thread=19] INFO - 晶圆的大小6 2022-09-08 15:22:55,304 [Thread=19] INFO - 晶圆的宽高152.4 2022-09-08 15:22:55,304 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:55,304 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 15:22:55,305 [Thread=19] INFO - X-安全坐标43.79 2022-09-08 15:22:55,305 [Thread=19] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:55,305 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 15:22:55,305 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 15:22:56,061 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:56,061 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:56,061 [Thread=21] INFO - Longth长度152.4 2022-09-08 15:22:56,061 [Thread=21] INFO - 进入getLongth 2022-09-08 15:22:56,061 [Thread=21] INFO - 目标坐标X-21.21Y15.2693 2022-09-08 15:22:56,061 [Thread=21] INFO - 晶圆的大小6 2022-09-08 15:22:56,061 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 15:22:56,062 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:56,062 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 15:22:56,062 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 15:22:56,062 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:56,062 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 15:22:56,062 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 15:22:56,826 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:56,827 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:56,827 [Thread=20] INFO - Longth长度152.4 2022-09-08 15:22:56,827 [Thread=20] INFO - 进入getLongth 2022-09-08 15:22:56,827 [Thread=20] INFO - 目标坐标X-11.21Y5.2693 2022-09-08 15:22:56,827 [Thread=20] INFO - 晶圆的大小6 2022-09-08 15:22:56,827 [Thread=20] INFO - 晶圆的宽高152.4 2022-09-08 15:22:56,827 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:22:56,827 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 15:22:56,827 [Thread=20] INFO - X-安全坐标43.79 2022-09-08 15:22:56,827 [Thread=20] INFO - Y上安全坐标-42.1307 2022-09-08 15:22:56,828 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 15:22:56,828 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 15:22:59,797 [Thread=19] INFO - 单轴触发了 2022-09-08 15:22:59,800 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:59,800 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:59,800 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:22:59,800 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:59,801 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:22:59,801 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:22:59,801 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:22:59,949 [Thread=20] INFO - 单轴触发了 2022-09-08 15:22:59,953 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:22:59,953 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:22:59,953 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:22:59,953 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:22:59,953 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:22:59,953 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:22:59,954 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:00,632 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:00,632 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:00,633 [Thread=20] INFO - 该轴是X,目标位置是0.616739582711443 2022-09-08 15:23:00,633 [Thread=20] INFO - 步进失败 2022-09-08 15:23:00,632 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:00,633 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:00,634 [Thread=19] INFO - 该轴是X,目标位置是-1.21 2022-09-08 15:23:00,634 [Thread=19] INFO - 步进失败 2022-09-08 15:23:03,805 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 15:23:03,807 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:23:03,818 [Thread=27] INFO - 单轴触发了 2022-09-08 15:23:03,819 [Thread=27] INFO - 该轴是Z 2022-09-08 15:23:03,819 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:03,819 [Thread=27] INFO - 该轴是Z,目标位置是-2.45480000138283 2022-09-08 15:23:03,819 [Thread=27] INFO - 步进失败 2022-09-08 15:23:03,819 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 15:23:03,825 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:03,825 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:03,825 [Thread=27] INFO - Longth长度152.4 2022-09-08 15:23:03,826 [Thread=27] INFO - 进入getLongth 2022-09-08 15:23:03,826 [Thread=27] INFO - 目标坐标X0.56974Y5.1913 2022-09-08 15:23:03,826 [Thread=27] INFO - 晶圆的大小6 2022-09-08 15:23:03,826 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 15:23:03,826 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:23:03,826 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 15:23:03,826 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 15:23:03,826 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 15:23:03,826 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 15:23:03,826 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 15:23:05,817 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:23:08,338 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 15:23:08,341 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:23:08,353 [Thread=27] INFO - 单轴触发了 2022-09-08 15:23:08,353 [Thread=27] INFO - 该轴是Z 2022-09-08 15:23:08,353 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:08,353 [Thread=27] INFO - 该轴是Z,目标位置是-2.4389999976635 2022-09-08 15:23:08,354 [Thread=27] INFO - 步进失败 2022-09-08 15:23:08,354 [Thread=27] INFO - SwitchOffsetZ:0.006300002 2022-09-08 15:23:08,357 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:08,357 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:08,358 [Thread=27] INFO - Longth长度152.4 2022-09-08 15:23:08,358 [Thread=27] INFO - 进入getLongth 2022-09-08 15:23:08,358 [Thread=27] INFO - 目标坐标X0.55974Y5.1883 2022-09-08 15:23:08,358 [Thread=27] INFO - 晶圆的大小6 2022-09-08 15:23:08,358 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 15:23:08,358 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:23:08,358 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 15:23:08,358 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 15:23:08,358 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 15:23:08,358 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 15:23:08,358 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 15:23:10,345 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:23:12,568 [Thread=21] INFO - 单轴触发了 2022-09-08 15:23:12,568 [Thread=21] INFO - 该轴是Z 2022-09-08 15:23:12,569 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:12,569 [Thread=21] INFO - 该轴是Z,目标位置是-2.4378000000095 2022-09-08 15:23:12,569 [Thread=21] INFO - 步进失败 2022-09-08 15:23:12,892 [Thread=20] INFO - 单轴触发了 2022-09-08 15:23:12,892 [Thread=20] INFO - 该轴是Z 2022-09-08 15:23:12,892 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:12,893 [Thread=20] INFO - 该轴是Z,目标位置是-2.4380000000095 2022-09-08 15:23:12,893 [Thread=20] INFO - 步进失败 2022-09-08 15:23:13,208 [Thread=19] INFO - 单轴触发了 2022-09-08 15:23:13,208 [Thread=19] INFO - 该轴是Z 2022-09-08 15:23:13,208 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:13,208 [Thread=19] INFO - 该轴是Z,目标位置是-2.4382000000095 2022-09-08 15:23:13,209 [Thread=19] INFO - 步进失败 2022-09-08 15:23:13,504 [Thread=21] INFO - 单轴触发了 2022-09-08 15:23:13,504 [Thread=21] INFO - 该轴是Z 2022-09-08 15:23:13,504 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:13,505 [Thread=21] INFO - 该轴是Z,目标位置是-2.4384000000095 2022-09-08 15:23:13,505 [Thread=21] INFO - 步进失败 2022-09-08 15:23:21,034 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:21,087 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.41376805923728 2022-09-08 15:23:21,088 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:23:21,088 [Thread=16] INFO - Measure angle is -0.206884 2022-09-08 15:23:21,089 [Thread=16] INFO - Measure StartPoint:984.191345214844,1014.98266601563, EndPoint:1007.99224853516,1015.06860351563, PixelDistance:23.801058 2022-09-08 15:23:21,089 [Thread=16] INFO - DerivativeMeasure timespan = 0.7079 2022-09-08 15:23:22,819 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:22,872 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.284508857155375 2022-09-08 15:23:22,872 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:23:22,872 [Thread=16] INFO - Measure angle is -0.142254 2022-09-08 15:23:22,873 [Thread=16] INFO - Measure StartPoint:984.12109375,1030.99035644531, EndPoint:1007.93566894531,1031.04943847656, PixelDistance:23.814648 2022-09-08 15:23:22,873 [Thread=16] INFO - DerivativeMeasure timespan = 0.7539 2022-09-08 15:23:23,904 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:23,953 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.135770659729104 2022-09-08 15:23:23,953 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.266336392337929 2022-09-08 15:23:23,953 [Thread=16] INFO - Measure angle is -0.201054 2022-09-08 15:23:23,954 [Thread=16] INFO - Measure StartPoint:984.110778808594,1042.96179199219, EndPoint:1007.89587402344,1043.04528808594, PixelDistance:23.785242 2022-09-08 15:23:23,954 [Thread=16] INFO - DerivativeMeasure timespan = 0.6346 2022-09-08 15:23:25,194 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:25,246 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:23:25,247 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:23:25,247 [Thread=16] INFO - Measure StartPoint:984.139709472656,1021, EndPoint:1007.97802734375,1021, PixelDistance:23.838318 2022-09-08 15:23:25,247 [Thread=16] INFO - DerivativeMeasure timespan = 0.3843 2022-09-08 15:23:26,841 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:26,891 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0108638937323543 2022-09-08 15:23:26,892 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0894932542812988 2022-09-08 15:23:26,892 [Thread=16] INFO - Measure angle is -0.050179 2022-09-08 15:23:26,892 [Thread=16] INFO - Measure StartPoint:984.028503417969,1038.98693847656, EndPoint:1007.88372802734,1039.0078125, PixelDistance:23.855234 2022-09-08 15:23:26,893 [Thread=16] INFO - DerivativeMeasure timespan = 0.7228 2022-09-08 15:23:29,177 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:29,226 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.26869596691786 2022-09-08 15:23:29,226 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:23:29,226 [Thread=16] INFO - Measure angle is -0.134348 2022-09-08 15:23:29,227 [Thread=16] INFO - Measure StartPoint:984.062927246094,1031.96032714844, EndPoint:1007.94451904297,1032.01623535156, PixelDistance:23.881657 2022-09-08 15:23:29,227 [Thread=16] INFO - DerivativeMeasure timespan = 0.5429 2022-09-08 15:23:30,849 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:30,901 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:23:30,901 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:23:30,902 [Thread=16] INFO - Measure StartPoint:984.099670410156,1030, EndPoint:1007.96203613281,1030, PixelDistance:23.862366 2022-09-08 15:23:30,903 [Thread=16] INFO - DerivativeMeasure timespan = 1.3583 2022-09-08 15:23:32,851 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:23:32,896 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:23:32,897 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:23:32,897 [Thread=16] INFO - Measure StartPoint:984.2109375,1012, EndPoint:1007.99499511719,1012, PixelDistance:23.784058 2022-09-08 15:23:32,897 [Thread=16] INFO - DerivativeMeasure timespan = 0.4813 2022-09-08 15:23:44,592 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:23:47,117 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 15:23:47,119 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:23:47,133 [Thread=27] INFO - 单轴触发了 2022-09-08 15:23:47,133 [Thread=27] INFO - 该轴是Z 2022-09-08 15:23:47,133 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:47,133 [Thread=27] INFO - 该轴是Z,目标位置是-2.38750000095367 2022-09-08 15:23:47,133 [Thread=27] INFO - 步进失败 2022-09-08 15:23:47,133 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 15:23:47,138 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:47,138 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:47,138 [Thread=27] INFO - Longth长度152.4 2022-09-08 15:23:47,139 [Thread=27] INFO - 进入getLongth 2022-09-08 15:23:47,139 [Thread=27] INFO - 目标坐标X0.61674Y5.2693 2022-09-08 15:23:47,139 [Thread=27] INFO - 晶圆的大小6 2022-09-08 15:23:47,139 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 15:23:47,139 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:23:47,139 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 15:23:47,139 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 15:23:47,139 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 15:23:47,139 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 15:23:47,139 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 15:23:49,135 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:23:49,328 [Thread=20] INFO - 单轴触发了 2022-09-08 15:23:49,332 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:49,332 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:49,332 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:23:49,332 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:49,333 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:49,333 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:49,333 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:49,799 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:49,799 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:49,799 [Thread=20] INFO - 该轴是X,目标位置是-9.38326 2022-09-08 15:23:49,799 [Thread=20] INFO - 步进失败 2022-09-08 15:23:49,888 [Thread=19] INFO - 单轴触发了 2022-09-08 15:23:49,891 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:49,892 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:49,892 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:23:49,892 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:49,892 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:49,892 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:49,892 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:50,353 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:50,354 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:50,354 [Thread=19] INFO - 该轴是X,目标位置是-19.38326 2022-09-08 15:23:50,354 [Thread=19] INFO - 步进失败 2022-09-08 15:23:50,392 [Thread=21] INFO - 单轴触发了 2022-09-08 15:23:50,396 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:50,396 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:50,396 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:23:50,396 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:50,396 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:50,396 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:50,396 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:50,803 [Thread=20] INFO - 单轴触发了 2022-09-08 15:23:50,806 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:50,807 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:50,807 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:23:50,807 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:50,807 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:50,807 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:50,807 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:51,198 [Thread=19] INFO - 单轴触发了 2022-09-08 15:23:51,202 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:51,202 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:51,202 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:23:51,202 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:51,202 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:51,203 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:51,203 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:51,741 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:51,743 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:51,743 [Thread=21] INFO - 该轴是X,目标位置是-29.38326 2022-09-08 15:23:51,743 [Thread=21] INFO - 单轴触发了 2022-09-08 15:23:51,742 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:51,743 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:51,743 [Thread=20] INFO - 该轴是X,目标位置是-39.3118120832913 2022-09-08 15:23:51,742 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:51,744 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:51,744 [Thread=19] INFO - 该轴是X,目标位置是-48.6102853068382 2022-09-08 15:23:51,747 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:51,747 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:51,747 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:23:51,747 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:51,747 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:51,747 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:51,747 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:51,896 [Thread=20] INFO - 单轴触发了 2022-09-08 15:23:51,899 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:51,899 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:51,899 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:23:51,900 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:51,900 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:51,900 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:51,900 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:52,306 [Thread=19] INFO - 单轴触发了 2022-09-08 15:23:52,310 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:52,311 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:52,311 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:23:52,311 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:52,311 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:52,311 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:52,311 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:52,958 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:52,959 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:52,959 [Thread=19] INFO - 该轴是X,目标位置是-67.4319431331308 2022-09-08 15:23:52,959 [Thread=19] INFO - 单轴触发了 2022-09-08 15:23:52,958 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:52,959 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:52,959 [Thread=20] INFO - 该轴是X,目标位置是-60.0169221365197 2022-09-08 15:23:52,959 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:52,960 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:52,960 [Thread=21] INFO - 该轴是X,目标位置是-54.0718120821365 2022-09-08 15:23:52,962 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:52,962 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:52,962 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:23:52,963 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:52,963 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:52,963 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:52,963 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:53,270 [Thread=20] INFO - 单轴触发了 2022-09-08 15:23:53,274 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:53,274 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:53,274 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:23:53,274 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:53,274 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:23:53,274 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:23:53,274 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:23:53,923 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:53,924 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:23:53,924 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:53,924 [Thread=20] INFO - 该轴是X,目标位置是-84.8921503194066 2022-09-08 15:23:53,924 [Thread=20] INFO - 步进失败 2022-09-08 15:23:53,924 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:23:53,925 [Thread=19] INFO - 该轴是X,目标位置是-75.6079782147316 2022-09-08 15:23:53,925 [Thread=19] INFO - 步进失败 2022-09-08 15:23:56,727 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 15:23:56,729 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:23:56,740 [Thread=15] INFO - 单轴触发了 2022-09-08 15:23:56,740 [Thread=15] INFO - 该轴是Z 2022-09-08 15:23:56,740 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 15:23:56,741 [Thread=15] INFO - 该轴是Z,目标位置是-2.43710000138283 2022-09-08 15:23:56,741 [Thread=15] INFO - 步进失败 2022-09-08 15:23:56,741 [Thread=15] INFO - SwitchOffsetZ:-0.0573 2022-09-08 15:23:56,746 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:23:56,746 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:23:56,746 [Thread=15] INFO - Longth长度152.4 2022-09-08 15:23:56,746 [Thread=15] INFO - 进入getLongth 2022-09-08 15:23:56,747 [Thread=15] INFO - 目标坐标X-84.93915Y5.1913 2022-09-08 15:23:56,747 [Thread=15] INFO - 晶圆的大小6 2022-09-08 15:23:56,747 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 15:23:56,747 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:23:56,747 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 15:23:56,747 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 15:23:56,747 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 15:23:56,747 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 15:23:56,747 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 15:23:58,736 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:24:00,250 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 15:24:00,253 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:24:00,264 [Thread=11] INFO - 单轴触发了 2022-09-08 15:24:00,264 [Thread=11] INFO - 该轴是Z 2022-09-08 15:24:00,264 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:00,264 [Thread=11] INFO - 该轴是Z,目标位置是-2.4194999976635 2022-09-08 15:24:00,264 [Thread=11] INFO - 步进失败 2022-09-08 15:24:00,264 [Thread=11] INFO - SwitchOffsetZ:0.006300002 2022-09-08 15:24:00,272 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:00,272 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:00,272 [Thread=11] INFO - Longth长度152.4 2022-09-08 15:24:00,272 [Thread=11] INFO - 进入getLongth 2022-09-08 15:24:00,272 [Thread=11] INFO - 目标坐标X-84.94915Y5.1883 2022-09-08 15:24:00,273 [Thread=11] INFO - 晶圆的大小6 2022-09-08 15:24:00,273 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 15:24:00,273 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:24:00,273 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 15:24:00,273 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 15:24:00,274 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 15:24:00,274 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 15:24:00,274 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 15:24:02,259 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:24:13,228 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:13,279 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:13,279 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:13,280 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:13,280 [Thread=16] INFO - Measure StartPoint:971.189758300781,1018, EndPoint:995.321594238281,1018, PixelDistance:24.131836 2022-09-08 15:24:13,280 [Thread=16] INFO - DerivativeMeasure timespan = 0.501 2022-09-08 15:24:15,077 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:15,145 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:15,145 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:15,145 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:15,146 [Thread=16] INFO - Measure StartPoint:1087.22021484375,1001, EndPoint:1111.19995117188,1001, PixelDistance:23.979736 2022-09-08 15:24:15,146 [Thread=16] INFO - DerivativeMeasure timespan = 0.6715 2022-09-08 15:24:16,284 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:16,334 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:16,334 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:16,334 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:16,335 [Thread=16] INFO - Measure StartPoint:971.21533203125,1000, EndPoint:995.365600585938,1000, PixelDistance:24.150269 2022-09-08 15:24:16,335 [Thread=16] INFO - DerivativeMeasure timespan = 0.5721 2022-09-08 15:24:17,259 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:17,312 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:17,313 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:17,313 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:17,314 [Thread=16] INFO - Measure StartPoint:1087.18786621094,1019, EndPoint:1111.15893554688,1019, PixelDistance:23.971069 2022-09-08 15:24:17,314 [Thread=16] INFO - DerivativeMeasure timespan = 0.7697 2022-09-08 15:24:18,941 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:18,988 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:18,989 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:18,989 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:18,989 [Thread=16] INFO - Measure StartPoint:971.181579589844,1017, EndPoint:995.324829101563,1017, PixelDistance:24.14325 2022-09-08 15:24:18,990 [Thread=16] INFO - DerivativeMeasure timespan = 0.6101 2022-09-08 15:24:20,419 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:20,476 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:20,476 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:20,476 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:20,476 [Thread=16] INFO - Measure StartPoint:971.190185546875,1008, EndPoint:995.316528320313,1008, PixelDistance:24.126343 2022-09-08 15:24:20,477 [Thread=16] INFO - DerivativeMeasure timespan = 0.4605 2022-09-08 15:24:21,702 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:24:21,760 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:21,760 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:24:21,761 [Thread=16] INFO - Measure angle is 0 2022-09-08 15:24:21,761 [Thread=16] INFO - Measure StartPoint:971.191528320313,1031, EndPoint:995.280151367188,1031, PixelDistance:24.088623 2022-09-08 15:24:21,761 [Thread=16] INFO - DerivativeMeasure timespan = 0.5478 2022-09-08 15:24:46,986 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:24:48,491 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 15:24:48,493 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:24:48,505 [Thread=4] INFO - 单轴触发了 2022-09-08 15:24:48,505 [Thread=4] INFO - 该轴是Z 2022-09-08 15:24:48,505 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:48,505 [Thread=4] INFO - 该轴是Z,目标位置是-2.36770000095367 2022-09-08 15:24:48,505 [Thread=4] INFO - 步进失败 2022-09-08 15:24:48,506 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 15:24:48,510 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:48,510 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:48,510 [Thread=4] INFO - Longth长度152.4 2022-09-08 15:24:48,510 [Thread=4] INFO - 进入getLongth 2022-09-08 15:24:48,511 [Thread=4] INFO - 目标坐标X-84.89215Y5.2693 2022-09-08 15:24:48,511 [Thread=4] INFO - 晶圆的大小6 2022-09-08 15:24:48,511 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 15:24:48,511 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:24:48,511 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 15:24:48,511 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 15:24:48,511 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 15:24:48,511 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 15:24:48,511 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 15:24:50,507 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:24:51,593 [Thread=21] INFO - 单轴触发了 2022-09-08 15:24:51,597 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:51,597 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:51,597 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:24:51,597 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:51,597 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:51,597 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:51,598 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:52,202 [Thread=20] INFO - 单轴触发了 2022-09-08 15:24:52,206 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:52,206 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:52,206 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:24:52,206 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:52,207 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:52,207 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:52,207 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:52,717 [Thread=19] INFO - 单轴触发了 2022-09-08 15:24:52,720 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:52,720 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:52,720 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:24:52,720 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:52,721 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:52,721 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:52,721 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:54,894 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:54,895 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:54,895 [Thread=20] INFO - 该轴是Y,目标位置是25.2693 2022-09-08 15:24:54,895 [Thread=20] INFO - 步进失败 2022-09-08 15:24:54,895 [Thread=20] INFO - 单轴触发了 2022-09-08 15:24:54,898 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:54,898 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:54,898 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:24:54,898 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:54,898 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:54,898 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:54,899 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:55,510 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:55,511 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:55,511 [Thread=20] INFO - 该轴是Y,目标位置是45.2693 2022-09-08 15:24:55,510 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:55,511 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:55,511 [Thread=21] INFO - 该轴是Y,目标位置是15.2693 2022-09-08 15:24:55,510 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:55,511 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:55,512 [Thread=19] INFO - 该轴是Y,目标位置是35.2693 2022-09-08 15:24:55,511 [Thread=20] INFO - 单轴触发了 2022-09-08 15:24:55,516 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:55,516 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:55,516 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:24:55,516 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:55,516 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:55,516 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:55,517 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:56,010 [Thread=21] INFO - 单轴触发了 2022-09-08 15:24:56,013 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:56,013 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:56,013 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:24:56,013 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:56,013 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:56,014 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:56,014 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:56,626 [Thread=19] INFO - 单轴触发了 2022-09-08 15:24:56,630 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:56,630 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:56,630 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:24:56,630 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:56,630 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:56,630 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:56,630 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:57,297 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:57,297 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:57,297 [Thread=21] INFO - 该轴是Y,目标位置是65.2693 2022-09-08 15:24:57,297 [Thread=21] INFO - 单轴触发了 2022-09-08 15:24:57,297 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:57,298 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:57,298 [Thread=20] INFO - 该轴是Y,目标位置是55.2693 2022-09-08 15:24:57,297 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:24:57,298 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:24:57,298 [Thread=19] INFO - 该轴是Y,目标位置是75.2693 2022-09-08 15:24:57,301 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:57,301 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:57,301 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:24:57,301 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:57,301 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:57,301 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:57,302 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:24:57,898 [Thread=20] INFO - 单轴触发了 2022-09-08 15:24:57,902 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:24:57,902 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:24:57,902 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:24:57,902 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:24:57,902 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:24:57,902 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:24:57,902 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:00,254 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:00,254 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:00,254 [Thread=20] INFO - 该轴是Y,目标位置是95.2693 2022-09-08 15:25:00,254 [Thread=20] INFO - 步进失败 2022-09-08 15:25:00,254 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:00,255 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:00,255 [Thread=21] INFO - 该轴是Y,目标位置是85.2693 2022-09-08 15:25:00,255 [Thread=21] INFO - 步进失败 2022-09-08 15:25:01,423 [Thread=19] INFO - 单轴触发了 2022-09-08 15:25:01,427 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:01,427 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:01,427 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:25:01,427 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:01,427 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:01,427 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:01,427 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:01,819 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:01,820 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:01,820 [Thread=19] INFO - 该轴是Y,目标位置是94.2693 2022-09-08 15:25:01,820 [Thread=19] INFO - 步进失败 2022-09-08 15:25:01,904 [Thread=20] INFO - 单轴触发了 2022-09-08 15:25:01,908 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:01,908 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:01,908 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:25:01,908 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:01,908 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:01,909 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:01,909 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:02,415 [Thread=21] INFO - 单轴触发了 2022-09-08 15:25:02,419 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:02,419 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:02,419 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:25:02,420 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:02,420 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:02,420 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:02,420 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:03,113 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:03,113 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:03,113 [Thread=21] INFO - 该轴是Y,目标位置是92.2693 2022-09-08 15:25:03,113 [Thread=21] INFO - 步进失败 2022-09-08 15:25:03,113 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:03,114 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:03,114 [Thread=20] INFO - 该轴是Y,目标位置是93.2693 2022-09-08 15:25:03,114 [Thread=20] INFO - 步进失败 2022-09-08 15:25:03,143 [Thread=19] INFO - 单轴触发了 2022-09-08 15:25:03,147 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:03,147 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:03,147 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:25:03,147 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:03,148 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:03,148 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:03,148 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:03,800 [Thread=21] INFO - 单轴触发了 2022-09-08 15:25:03,805 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:03,805 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:03,805 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:25:03,805 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:03,806 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:03,806 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:03,806 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:04,369 [Thread=20] INFO - 单轴触发了 2022-09-08 15:25:04,373 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:04,373 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:04,373 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:25:04,374 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:04,374 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:04,374 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:04,374 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:04,934 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:04,934 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:04,934 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:04,935 [Thread=20] INFO - 该轴是Y,目标位置是89.2693 2022-09-08 15:25:04,935 [Thread=20] INFO - 步进失败 2022-09-08 15:25:04,934 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:04,935 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:04,935 [Thread=19] INFO - 该轴是Y,目标位置是91.2693 2022-09-08 15:25:04,935 [Thread=19] INFO - 步进失败 2022-09-08 15:25:04,934 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:04,936 [Thread=21] INFO - 该轴是Y,目标位置是90.2693 2022-09-08 15:25:04,936 [Thread=21] INFO - 步进失败 2022-09-08 15:25:04,944 [Thread=20] INFO - 单轴触发了 2022-09-08 15:25:04,948 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:04,949 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:04,949 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:25:04,949 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:04,949 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:04,949 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:04,949 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:05,407 [Thread=19] INFO - 单轴触发了 2022-09-08 15:25:05,411 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:05,411 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:05,411 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:25:05,411 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:05,411 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:05,411 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:05,411 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:05,804 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:05,804 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:05,805 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:05,805 [Thread=20] INFO - 该轴是Y,目标位置是88.2693 2022-09-08 15:25:05,805 [Thread=20] INFO - 步进失败 2022-09-08 15:25:05,804 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:05,805 [Thread=19] INFO - 该轴是Y,目标位置是87.2693 2022-09-08 15:25:05,805 [Thread=19] INFO - 步进失败 2022-09-08 15:25:06,807 [Thread=21] INFO - 单轴触发了 2022-09-08 15:25:06,811 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:06,811 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:06,812 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:25:06,812 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:06,812 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:06,812 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:06,812 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:07,487 [Thread=20] INFO - 单轴触发了 2022-09-08 15:25:07,490 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:07,491 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:07,491 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:25:07,491 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:07,491 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:07,491 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:07,491 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:07,787 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:07,788 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:07,788 [Thread=20] INFO - 该轴是X,目标位置是-83.89215 2022-09-08 15:25:07,788 [Thread=20] INFO - 步进失败 2022-09-08 15:25:07,921 [Thread=19] INFO - 单轴触发了 2022-09-08 15:25:07,925 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:07,925 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:07,925 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:25:07,925 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:07,925 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:07,925 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:07,925 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:08,341 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:08,341 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:08,341 [Thread=19] INFO - 该轴是X,目标位置是-82.89215 2022-09-08 15:25:08,341 [Thread=19] INFO - 步进失败 2022-09-08 15:25:08,928 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:08,928 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:08,928 [Thread=21] INFO - 该轴是Y,目标位置是88.2693 2022-09-08 15:25:08,929 [Thread=21] INFO - 步进失败 2022-09-08 15:25:09,973 [Thread=20] INFO - 单轴触发了 2022-09-08 15:25:09,977 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:09,977 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:09,977 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:25:09,977 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:09,977 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:09,977 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:09,977 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:10,260 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:10,260 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:10,260 [Thread=20] INFO - 该轴是X,目标位置是-81.89215 2022-09-08 15:25:10,260 [Thread=20] INFO - 步进失败 2022-09-08 15:25:10,338 [Thread=19] INFO - 单轴触发了 2022-09-08 15:25:10,342 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:10,342 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:10,342 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:25:10,342 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:10,342 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:10,342 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:10,342 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:10,576 [Thread=21] INFO - 单轴触发了 2022-09-08 15:25:10,580 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:10,580 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:10,580 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:25:10,580 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:10,580 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:10,580 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:10,580 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:10,847 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:10,847 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:10,847 [Thread=19] INFO - 该轴是X,目标位置是-80.89215 2022-09-08 15:25:10,848 [Thread=19] INFO - 步进失败 2022-09-08 15:25:10,847 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:10,848 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:10,848 [Thread=21] INFO - 该轴是X,目标位置是-79.89215 2022-09-08 15:25:10,848 [Thread=21] INFO - 步进失败 2022-09-08 15:25:11,010 [Thread=20] INFO - 单轴触发了 2022-09-08 15:25:11,013 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:11,014 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:11,014 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 15:25:11,014 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:11,014 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:11,014 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:11,014 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:11,528 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:11,528 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:11,528 [Thread=20] INFO - 该轴是X,目标位置是-78.89215 2022-09-08 15:25:11,528 [Thread=20] INFO - 步进失败 2022-09-08 15:25:11,687 [Thread=19] INFO - 单轴触发了 2022-09-08 15:25:11,692 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:11,693 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:11,693 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 15:25:11,693 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:11,693 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:11,693 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:11,693 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:12,080 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:12,080 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:12,080 [Thread=19] INFO - 该轴是X,目标位置是-77.89215 2022-09-08 15:25:12,081 [Thread=19] INFO - 步进失败 2022-09-08 15:25:12,194 [Thread=21] INFO - 单轴触发了 2022-09-08 15:25:12,199 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:12,199 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:12,199 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 15:25:12,199 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:12,200 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 15:25:12,200 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 15:25:12,200 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 15:25:12,679 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 15:25:12,679 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 15:25:12,679 [Thread=21] INFO - 该轴是X,目标位置是-76.89215 2022-09-08 15:25:12,680 [Thread=21] INFO - 步进失败 2022-09-08 15:25:14,222 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 15:25:14,223 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 15:25:15,763 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:15,763 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:15,763 [Thread=1] INFO - Longth长度152.4 2022-09-08 15:25:15,763 [Thread=1] INFO - 进入getLongth 2022-09-08 15:25:15,763 [Thread=1] INFO - 目标坐标X-77.404914Y88.402102 2022-09-08 15:25:15,763 [Thread=1] INFO - 晶圆的大小6 2022-09-08 15:25:15,763 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 15:25:15,763 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:25:15,764 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:25:15,764 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 15:25:15,764 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 15:25:15,764 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:25:15,764 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:25:19,319 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 15:25:19,324 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:25:19,335 [Thread=27] INFO - 单轴触发了 2022-09-08 15:25:19,335 [Thread=27] INFO - 该轴是Z 2022-09-08 15:25:19,335 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:19,336 [Thread=27] INFO - 该轴是Z,目标位置是-2.56350000138283 2022-09-08 15:25:19,336 [Thread=27] INFO - 步进失败 2022-09-08 15:25:19,336 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 15:25:19,340 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:19,340 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:19,340 [Thread=27] INFO - Longth长度152.4 2022-09-08 15:25:19,340 [Thread=27] INFO - 进入getLongth 2022-09-08 15:25:19,340 [Thread=27] INFO - 目标坐标X-77.451914Y88.324102 2022-09-08 15:25:19,341 [Thread=27] INFO - 晶圆的大小6 2022-09-08 15:25:19,341 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 15:25:19,341 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:25:19,341 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 15:25:19,341 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 15:25:19,341 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 15:25:19,341 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 15:25:19,341 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 15:25:21,339 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:25:31,233 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 15:25:31,234 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 15:25:32,887 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:32,887 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:32,887 [Thread=1] INFO - Longth长度152.4 2022-09-08 15:25:32,887 [Thread=1] INFO - 进入getLongth 2022-09-08 15:25:32,887 [Thread=1] INFO - 目标坐标X-77.465064Y88.294266 2022-09-08 15:25:32,887 [Thread=1] INFO - 晶圆的大小6 2022-09-08 15:25:32,888 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 15:25:32,888 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:25:32,888 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 15:25:32,888 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 15:25:32,888 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 15:25:32,888 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 15:25:32,888 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 15:25:35,983 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 15:25:35,989 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 15:25:36,001 [Thread=13] INFO - 单轴触发了 2022-09-08 15:25:36,001 [Thread=13] INFO - 该轴是Z 2022-09-08 15:25:36,002 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 15:25:36,002 [Thread=13] INFO - 该轴是Z,目标位置是-2.5451999976635 2022-09-08 15:25:36,002 [Thread=13] INFO - 步进失败 2022-09-08 15:25:36,002 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 15:25:36,008 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:25:36,008 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:25:36,008 [Thread=13] INFO - Longth长度152.4 2022-09-08 15:25:36,008 [Thread=13] INFO - 进入getLongth 2022-09-08 15:25:36,008 [Thread=13] INFO - 目标坐标X-77.475064Y88.291266 2022-09-08 15:25:36,008 [Thread=13] INFO - 晶圆的大小6 2022-09-08 15:25:36,008 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 15:25:36,008 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:25:36,008 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 15:25:36,008 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 15:25:36,008 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 15:25:36,008 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 15:25:36,009 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 15:25:37,998 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 15:25:53,032 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:25:53,082 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:25:53,082 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:25:53,082 [Thread=5] INFO - Measure angle is 0 2022-09-08 15:25:53,096 [Thread=5] INFO - Measure StartPoint:1013.5234375,991, EndPoint:1072.66088867188,991, PixelDistance:59.137451 2022-09-08 15:25:53,096 [Thread=5] INFO - DerivativeMeasure timespan = 14.046 2022-09-08 15:25:54,700 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:25:54,752 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:25:54,752 [Thread=5] INFO - Measure angle is 0 2022-09-08 15:25:54,754 [Thread=5] INFO - Measure StartPoint:1013.38775634766,1057, EndPoint:1072.51513671875,1057, PixelDistance:59.12738 2022-09-08 15:25:54,755 [Thread=5] INFO - DerivativeMeasure timespan = 2.7477 2022-09-08 15:25:58,095 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:25:58,148 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:25:58,149 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.0614943114036569 2022-09-08 15:25:58,149 [Thread=5] INFO - Measure angle is -0.030747 2022-09-08 15:25:58,153 [Thread=5] INFO - Measure StartPoint:1013.46124267578,1019.99383544922, EndPoint:1072.61706542969,1020.02557373047, PixelDistance:59.155831 2022-09-08 15:25:58,153 [Thread=5] INFO - DerivativeMeasure timespan = 4.3772 2022-09-08 15:25:59,306 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:25:59,357 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:25:59,357 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.280255669366578 2022-09-08 15:25:59,357 [Thread=5] INFO - Measure angle is -0.140128 2022-09-08 15:25:59,360 [Thread=5] INFO - Measure StartPoint:1013.39788818359,1056.99853515625, EndPoint:1072.45397949219,1057.14294433594, PixelDistance:59.056268 2022-09-08 15:25:59,360 [Thread=5] INFO - DerivativeMeasure timespan = 3.0312 2022-09-08 15:26:00,159 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:26:00,216 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:26:00,217 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.254478646826823 2022-09-08 15:26:00,217 [Thread=5] INFO - Measure angle is -0.127239 2022-09-08 15:26:00,219 [Thread=5] INFO - Measure StartPoint:1013.43188476563,1034.81225585938, EndPoint:1072.54992675781,1034.94348144531, PixelDistance:59.118188 2022-09-08 15:26:00,220 [Thread=5] INFO - DerivativeMeasure timespan = 2.866 2022-09-08 15:26:01,008 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:26:01,056 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:26:01,056 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.0203929497695678 2022-09-08 15:26:01,056 [Thread=5] INFO - Measure angle is -0.010196 2022-09-08 15:26:01,059 [Thread=5] INFO - Measure StartPoint:1013.47119140625,1005.99810791016, EndPoint:1072.64978027344,1006.00866699219, PixelDistance:59.17859 2022-09-08 15:26:01,059 [Thread=5] INFO - DerivativeMeasure timespan = 2.1002 2022-09-08 15:26:01,907 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 15:26:01,958 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 15:26:01,959 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 0.4370711044632 2022-09-08 15:26:01,959 [Thread=5] INFO - Measure angle is -0.218536 2022-09-08 15:26:01,960 [Thread=5] INFO - Measure StartPoint:1013.51098632813,1000.81506347656, EndPoint:1072.625,1001.04052734375, PixelDistance:59.114444 2022-09-08 15:26:01,961 [Thread=5] INFO - DerivativeMeasure timespan = 1.7322 2022-09-08 15:26:26,724 [Thread=11] INFO - SwitchIndex index:0 2022-09-08 15:26:26,727 [Thread=11] INFO - Switch Lens:Broadcast Event 2022-09-08 15:26:26,740 [Thread=27] INFO - 单轴触发了 2022-09-08 15:26:26,740 [Thread=27] INFO - 该轴是Z 2022-09-08 15:26:26,740 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 15:26:26,740 [Thread=27] INFO - 该轴是Z,目标位置是-2.49430000095367 2022-09-08 15:26:26,740 [Thread=27] INFO - 步进失败 2022-09-08 15:26:26,741 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 15:26:26,745 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 15:26:26,745 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 15:26:26,745 [Thread=27] INFO - Longth长度152.4 2022-09-08 15:26:26,745 [Thread=27] INFO - 进入getLongth 2022-09-08 15:26:26,745 [Thread=27] INFO - 目标坐标X-77.418064Y88.372266 2022-09-08 15:26:26,745 [Thread=27] INFO - 晶圆的大小6 2022-09-08 15:26:26,745 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 15:26:26,745 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:26:26,745 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 15:26:26,746 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 15:26:26,746 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 15:26:26,746 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 15:26:26,746 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 15:26:27,762 [Thread=11] INFO - stageout currentPos:-2.4945, currentVelocity:2, delayTime:1297, point.Z:-0.5 2022-09-08 15:26:27,762 [Thread=11] INFO - stage out homez 2022-09-08 15:26:31,085 [Thread=11] INFO - stage out home ok 2022-09-08 15:26:31,100 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 15:26:31,100 [Thread=11] INFO - stagein homez 2022-09-08 15:26:31,101 [Thread=11] INFO - stagein home ok 2022-09-08 15:26:31,101 [Thread=11] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 15:26:31,101 [Thread=11] INFO - Longth长度152.4 2022-09-08 15:26:31,101 [Thread=11] INFO - 进入getLongth 2022-09-08 15:26:31,101 [Thread=11] INFO - 目标坐标X-100Y-90 2022-09-08 15:26:31,101 [Thread=11] INFO - 晶圆的大小6 2022-09-08 15:26:31,101 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 15:26:31,101 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 15:26:31,101 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 15:26:31,101 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 15:26:31,101 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 15:26:31,101 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 15:26:31,102 [Thread=11] INFO - 双轴-目标点不在范围内 2022-09-08 15:26:31,102 [Thread=11] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:00:07,214 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 16:00:07,217 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 16:00:07,217 [Thread=6] INFO - 单轴触发了 2022-09-08 16:00:07,217 [Thread=6] INFO - 该轴是Z 2022-09-08 16:00:07,217 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:00:07,218 [Thread=6] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:00:07,218 [Thread=6] INFO - 步进失败 2022-09-08 16:00:07,218 [Thread=6] INFO - SwitchOffsetZ:0 2022-09-08 16:00:07,224 [Thread=6] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:00:07,225 [Thread=6] INFO - stagein homez 2022-09-08 16:00:07,225 [Thread=6] INFO - stagein home ok 2022-09-08 16:00:07,225 [Thread=6] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:00:07,225 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:00:07,225 [Thread=6] INFO - 进入getLongth 2022-09-08 16:00:07,225 [Thread=6] INFO - 目标坐标X-100Y-90 2022-09-08 16:00:07,226 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:00:07,226 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:00:07,226 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:00:07,226 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:00:07,226 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:00:07,226 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:00:07,226 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:00:07,226 [Thread=6] INFO - 双轴-目标点不在范围内 2022-09-08 16:00:07,226 [Thread=6] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:00:08,255 [Thread=4] INFO - stagein currentPos:0.0762, currentVelocity:2, delayTime:588, point.Z:-0.5 2022-09-08 16:00:08,255 [Thread=4] INFO - stagein homez 2022-09-08 16:00:10,869 [Thread=4] INFO - stagein home ok 2022-09-08 16:00:10,871 [Thread=4] INFO - StageBack: waferSize = 6 2022-09-08 16:00:10,874 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:00:10,875 [Thread=4] INFO - stagein homez 2022-09-08 16:00:10,875 [Thread=4] INFO - stagein home ok 2022-09-08 16:00:10,875 [Thread=4] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:00:10,875 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:00:10,875 [Thread=4] INFO - 进入getLongth 2022-09-08 16:00:10,875 [Thread=4] INFO - 目标坐标X38.79Y115.2693 2022-09-08 16:00:10,875 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:00:10,876 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:00:10,876 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:00:10,876 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:00:10,876 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:00:10,876 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:00:10,876 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:00:10,876 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:00:21,608 [Thread=4] INFO - 单轴触发了 2022-09-08 16:00:21,608 [Thread=4] INFO - 该轴是Z 2022-09-08 16:00:21,608 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:00:21,609 [Thread=4] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 16:00:21,609 [Thread=4] INFO - 步进失败 2022-09-08 16:00:31,846 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:00:31,846 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:00:31,846 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:00:31,846 [Thread=1] INFO - 进入getLongth 2022-09-08 16:00:31,846 [Thread=1] INFO - 目标坐标X-85.305Y-0.261700000000005 2022-09-08 16:00:31,846 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:00:31,846 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:00:31,846 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:00:31,847 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:00:31,847 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:00:31,847 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:00:31,847 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:00:31,847 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:00:39,470 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:00:51,038 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:00:51,039 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:00:54,232 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:00:54,232 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:00:54,232 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:00:54,232 [Thread=1] INFO - 进入getLongth 2022-09-08 16:00:54,232 [Thread=1] INFO - 目标坐标X-85.831905Y-0.232803 2022-09-08 16:00:54,232 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:00:54,232 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:00:54,232 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:00:54,233 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:00:54,233 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:00:54,233 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:00:54,233 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:00:54,233 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:01:02,229 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:01:02,232 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:01:02,243 [Thread=13] INFO - 单轴触发了 2022-09-08 16:01:02,243 [Thread=13] INFO - 该轴是Z 2022-09-08 16:01:02,244 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:02,244 [Thread=13] INFO - 该轴是Z,目标位置是-2.30180000138283 2022-09-08 16:01:02,244 [Thread=13] INFO - 步进失败 2022-09-08 16:01:02,244 [Thread=13] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:01:02,248 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:01:02,248 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:01:02,249 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:01:02,249 [Thread=13] INFO - 进入getLongth 2022-09-08 16:01:02,249 [Thread=13] INFO - 目标坐标X-85.878905Y-0.310803 2022-09-08 16:01:02,249 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:01:02,249 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:01:02,249 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:01:02,249 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:01:02,249 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:01:02,249 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:01:02,249 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:01:02,249 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:01:04,245 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:01:06,651 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:01:06,652 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:01:06,652 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:01:06,652 [Thread=1] INFO - 进入getLongth 2022-09-08 16:01:06,652 [Thread=1] INFO - 目标坐标X-85.893296Y-0.345663 2022-09-08 16:01:06,652 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:01:06,652 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:01:06,652 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:01:06,652 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:01:06,652 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:01:06,652 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:01:06,653 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:01:06,653 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:01:10,804 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:01:10,807 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:01:10,818 [Thread=6] INFO - 单轴触发了 2022-09-08 16:01:10,818 [Thread=6] INFO - 该轴是Z 2022-09-08 16:01:10,818 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:10,819 [Thread=6] INFO - 该轴是Z,目标位置是-2.2871999976635 2022-09-08 16:01:10,819 [Thread=6] INFO - 步进失败 2022-09-08 16:01:10,819 [Thread=6] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:01:10,823 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:01:10,824 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:01:10,824 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:01:10,824 [Thread=6] INFO - 进入getLongth 2022-09-08 16:01:10,824 [Thread=6] INFO - 目标坐标X-85.903296Y-0.348663 2022-09-08 16:01:10,824 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:01:10,824 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:01:10,825 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:01:10,825 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:01:10,825 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:01:10,825 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:01:10,825 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:01:10,825 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:01:12,818 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:01:15,344 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:01:15,345 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:01:15,345 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:01:15,345 [Thread=1] INFO - 进入getLongth 2022-09-08 16:01:15,345 [Thread=1] INFO - 目标坐标X-85.903886Y-0.343506 2022-09-08 16:01:15,345 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:01:15,345 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:01:15,345 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:01:15,345 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:01:15,345 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:01:15,346 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:01:15,346 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:01:15,346 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:01:18,686 [Thread=20] INFO - 单轴触发了 2022-09-08 16:01:18,686 [Thread=20] INFO - 该轴是Z 2022-09-08 16:01:18,686 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:18,686 [Thread=20] INFO - 该轴是Z,目标位置是-2.2852000000095 2022-09-08 16:01:18,686 [Thread=20] INFO - 步进失败 2022-09-08 16:01:18,827 [Thread=19] INFO - 单轴触发了 2022-09-08 16:01:18,827 [Thread=19] INFO - 该轴是Z 2022-09-08 16:01:18,827 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:18,828 [Thread=19] INFO - 该轴是Z,目标位置是-2.2852000000095 2022-09-08 16:01:18,828 [Thread=19] INFO - 步进失败 2022-09-08 16:01:18,997 [Thread=21] INFO - 单轴触发了 2022-09-08 16:01:18,997 [Thread=21] INFO - 该轴是Z 2022-09-08 16:01:18,997 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:18,997 [Thread=21] INFO - 该轴是Z,目标位置是-2.2852000000095 2022-09-08 16:01:18,998 [Thread=21] INFO - 步进失败 2022-09-08 16:01:19,176 [Thread=20] INFO - 单轴触发了 2022-09-08 16:01:19,176 [Thread=20] INFO - 该轴是Z 2022-09-08 16:01:19,176 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:19,177 [Thread=20] INFO - 该轴是Z,目标位置是-2.2856000000095 2022-09-08 16:01:19,177 [Thread=20] INFO - 步进失败 2022-09-08 16:01:19,349 [Thread=19] INFO - 单轴触发了 2022-09-08 16:01:19,349 [Thread=19] INFO - 该轴是Z 2022-09-08 16:01:19,349 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:19,349 [Thread=19] INFO - 该轴是Z,目标位置是-2.2856000000095 2022-09-08 16:01:19,350 [Thread=19] INFO - 步进失败 2022-09-08 16:01:19,896 [Thread=21] INFO - 单轴触发了 2022-09-08 16:01:19,896 [Thread=21] INFO - 该轴是Z 2022-09-08 16:01:19,896 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:19,897 [Thread=21] INFO - 该轴是Z,目标位置是-2.2862000000095 2022-09-08 16:01:19,897 [Thread=21] INFO - 步进失败 2022-09-08 16:01:20,120 [Thread=20] INFO - 单轴触发了 2022-09-08 16:01:20,120 [Thread=20] INFO - 该轴是Z 2022-09-08 16:01:20,120 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:20,120 [Thread=20] INFO - 该轴是Z,目标位置是-2.2862000000095 2022-09-08 16:01:20,120 [Thread=20] INFO - 步进失败 2022-09-08 16:01:20,885 [Thread=19] INFO - 单轴触发了 2022-09-08 16:01:20,885 [Thread=19] INFO - 该轴是Z 2022-09-08 16:01:20,885 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:01:20,885 [Thread=19] INFO - 该轴是Z,目标位置是-2.2865000000095 2022-09-08 16:01:20,886 [Thread=19] INFO - 步进失败 2022-09-08 16:01:25,564 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:01:25,619 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:25,619 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:25,619 [Thread=16] INFO - Measure angle is 0 2022-09-08 16:01:25,620 [Thread=16] INFO - Measure StartPoint:988.444763183594,1004, EndPoint:1084.08959960938,1004, PixelDistance:95.644836 2022-09-08 16:01:25,621 [Thread=16] INFO - DerivativeMeasure timespan = 1.1457 2022-09-08 16:01:26,264 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:01:26,315 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:26,315 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.0262660048535808 2022-09-08 16:01:26,316 [Thread=29] INFO - Measure angle is -0.013133 2022-09-08 16:01:26,317 [Thread=29] INFO - Measure StartPoint:988.476623535156,1012.99829101563, EndPoint:1084.05493164063,1013.02020263672, PixelDistance:95.578311 2022-09-08 16:01:26,318 [Thread=29] INFO - DerivativeMeasure timespan = 1.9338 2022-09-08 16:01:26,890 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:01:26,938 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:26,938 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.0637249461216064 2022-09-08 16:01:26,938 [Thread=28] INFO - Measure angle is -0.031862 2022-09-08 16:01:26,940 [Thread=28] INFO - Measure StartPoint:988.464538574219,1016.00305175781, EndPoint:1084.04675292969,1016.05621337891, PixelDistance:95.582229 2022-09-08 16:01:26,940 [Thread=28] INFO - DerivativeMeasure timespan = 1.4954 2022-09-08 16:01:27,549 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:01:27,603 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.0695186349209368 2022-09-08 16:01:27,604 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.133571554489982 2022-09-08 16:01:27,604 [Thread=28] INFO - Measure angle is -0.101545 2022-09-08 16:01:27,605 [Thread=28] INFO - Measure StartPoint:827.206176757813,1006.73626708984, EndPoint:1084.08215332031,1007.19152832031, PixelDistance:256.87638 2022-09-08 16:01:27,606 [Thread=28] INFO - DerivativeMeasure timespan = 1.7997 2022-09-08 16:01:28,495 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:01:28,545 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:28,545 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.0423407399162313 2022-09-08 16:01:28,546 [Thread=28] INFO - Measure angle is -0.02117 2022-09-08 16:01:28,548 [Thread=28] INFO - Measure StartPoint:988.502868652344,1001.99426269531, EndPoint:1084.10131835938,1002.02960205078, PixelDistance:95.598456 2022-09-08 16:01:28,548 [Thread=28] INFO - DerivativeMeasure timespan = 2.1005 2022-09-08 16:01:29,864 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:01:29,913 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:29,913 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:01:29,913 [Thread=28] INFO - Measure angle is 0 2022-09-08 16:01:29,914 [Thread=28] INFO - Measure StartPoint:988.515258789063,998, EndPoint:1084.11181640625,998, PixelDistance:95.596558 2022-09-08 16:01:29,914 [Thread=28] INFO - DerivativeMeasure timespan = 1.0536 2022-09-08 16:03:12,188 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:12,263 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:12,263 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0535175155036872 2022-09-08 16:03:12,263 [Thread=16] INFO - Measure angle is -0.026759 2022-09-08 16:03:12,264 [Thread=16] INFO - Measure StartPoint:989.197875976563,1022.97344970703, EndPoint:1085.01318359375,1023.01824951172, PixelDistance:95.815318 2022-09-08 16:03:12,264 [Thread=16] INFO - DerivativeMeasure timespan = 1.0149 2022-09-08 16:03:13,450 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:13,503 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:13,503 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:13,504 [Thread=16] INFO - Measure angle is 0 2022-09-08 16:03:13,505 [Thread=16] INFO - Measure StartPoint:989.242492675781,1017, EndPoint:1085.01916503906,1017, PixelDistance:95.776672 2022-09-08 16:03:13,505 [Thread=16] INFO - DerivativeMeasure timespan = 1.317 2022-09-08 16:03:24,625 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:24,693 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.323276874572649 2022-09-08 16:03:24,693 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.394876263939675 2022-09-08 16:03:24,693 [Thread=30] INFO - Measure angle is -0.359077 2022-09-08 16:03:24,695 [Thread=30] INFO - Measure StartPoint:989.101501464844,1044.8564453125, EndPoint:1084.87219238281,1045.45666503906, PixelDistance:95.772572 2022-09-08 16:03:24,695 [Thread=30] INFO - DerivativeMeasure timespan = 1.4588 2022-09-08 16:03:25,419 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:25,489 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:25,489 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.00976728888984249 2022-09-08 16:03:25,489 [Thread=30] INFO - Measure angle is -0.004884 2022-09-08 16:03:25,491 [Thread=30] INFO - Measure StartPoint:989.257385253906,1044.99426269531, EndPoint:1085.09509277344,1045.00244140625, PixelDistance:95.837708 2022-09-08 16:03:25,491 [Thread=30] INFO - DerivativeMeasure timespan = 1.8698 2022-09-08 16:03:26,098 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:26,165 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:26,165 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.264704072645234 2022-09-08 16:03:26,165 [Thread=30] INFO - Measure angle is -0.132352 2022-09-08 16:03:26,167 [Thread=30] INFO - Measure StartPoint:989.286987304688,1022.90826416016, EndPoint:1085.0029296875,1023.12939453125, PixelDistance:95.716198 2022-09-08 16:03:26,167 [Thread=30] INFO - DerivativeMeasure timespan = 1.5484 2022-09-08 16:03:26,743 [Thread=31] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:26,813 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:26,813 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0.0158382015648098 2022-09-08 16:03:26,813 [Thread=31] INFO - Measure angle is -0.007919 2022-09-08 16:03:26,815 [Thread=31] INFO - Measure StartPoint:826.984985351563,1044.97790527344, EndPoint:1084.83325195313,1045.01354980469, PixelDistance:257.848269 2022-09-08 16:03:26,815 [Thread=31] INFO - DerivativeMeasure timespan = 1.6853 2022-09-08 16:03:27,474 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:27,546 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.192096591752806 2022-09-08 16:03:27,546 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.414898966715139 2022-09-08 16:03:27,546 [Thread=30] INFO - Measure angle is -0.303498 2022-09-08 16:03:27,547 [Thread=30] INFO - Measure StartPoint:989.031127929688,1028.62939453125, EndPoint:1084.7431640625,1029.13635253906, PixelDistance:95.713379 2022-09-08 16:03:27,547 [Thread=30] INFO - DerivativeMeasure timespan = 1.0205 2022-09-08 16:03:28,083 [Thread=31] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:28,165 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:28,165 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:28,165 [Thread=31] INFO - Measure angle is 0 2022-09-08 16:03:28,167 [Thread=31] INFO - Measure StartPoint:989.43017578125,1031, EndPoint:1085.19213867188,1031, PixelDistance:95.761963 2022-09-08 16:03:28,167 [Thread=31] INFO - DerivativeMeasure timespan = 1.749 2022-09-08 16:03:28,692 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:03:28,755 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:03:28,756 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.354249192591323 2022-09-08 16:03:28,756 [Thread=30] INFO - Measure angle is -0.177125 2022-09-08 16:03:28,757 [Thread=30] INFO - Measure StartPoint:989.206298828125,1025.80895996094, EndPoint:1084.96484375,1026.10498046875, PixelDistance:95.759002 2022-09-08 16:03:28,758 [Thread=30] INFO - DerivativeMeasure timespan = 1.278 2022-09-08 16:04:03,727 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:04:03,730 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:04:03,743 [Thread=27] INFO - 单轴触发了 2022-09-08 16:04:03,743 [Thread=27] INFO - 该轴是Z 2022-09-08 16:04:03,744 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:04:03,744 [Thread=27] INFO - 该轴是Z,目标位置是-2.23550000095367 2022-09-08 16:04:03,744 [Thread=27] INFO - 步进失败 2022-09-08 16:04:03,744 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 16:04:03,747 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:04:03,747 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:04:03,747 [Thread=27] INFO - Longth长度152.4 2022-09-08 16:04:03,748 [Thread=27] INFO - 进入getLongth 2022-09-08 16:04:03,748 [Thread=27] INFO - 目标坐标X-85.846886Y-0.262506 2022-09-08 16:04:03,748 [Thread=27] INFO - 晶圆的大小6 2022-09-08 16:04:03,748 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 16:04:03,748 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:04:03,748 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:04:03,748 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 16:04:03,748 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 16:04:03,748 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:04:03,748 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:04:07,812 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:04:07,812 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:04:09,605 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:04:09,605 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:04:09,605 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:04:09,605 [Thread=1] INFO - 进入getLongth 2022-09-08 16:04:09,605 [Thread=1] INFO - 目标坐标X-85.533325Y-0.065147 2022-09-08 16:04:09,605 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:04:09,605 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:04:09,605 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:04:09,606 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:04:09,606 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:04:09,606 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:04:09,606 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:04:09,606 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:04:15,617 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:04:18,147 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:04:18,151 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:04:18,164 [Thread=11] INFO - 单轴触发了 2022-09-08 16:04:18,164 [Thread=11] INFO - 该轴是Z 2022-09-08 16:04:18,164 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:04:18,165 [Thread=11] INFO - 该轴是Z,目标位置是-2.29300000138283 2022-09-08 16:04:18,165 [Thread=11] INFO - 步进失败 2022-09-08 16:04:18,165 [Thread=11] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:04:18,169 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:04:18,169 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:04:18,169 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:04:18,169 [Thread=11] INFO - 进入getLongth 2022-09-08 16:04:18,169 [Thread=11] INFO - 目标坐标X-85.580325Y-0.143147 2022-09-08 16:04:18,170 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:04:18,170 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:04:18,170 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:04:18,170 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:04:18,170 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:04:18,170 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:04:18,170 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:04:18,170 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:04:20,184 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:04:22,217 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:04:22,217 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:04:22,217 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:04:22,217 [Thread=1] INFO - 进入getLongth 2022-09-08 16:04:22,217 [Thread=1] INFO - 目标坐标X-85.583426Y-0.17962 2022-09-08 16:04:22,217 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:04:22,218 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:04:22,218 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:04:22,218 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:04:22,218 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:04:22,218 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:04:22,218 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:04:22,218 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:04:28,754 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:04:28,757 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:04:28,770 [Thread=11] INFO - 单轴触发了 2022-09-08 16:04:28,770 [Thread=11] INFO - 该轴是Z 2022-09-08 16:04:28,770 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:04:28,771 [Thread=11] INFO - 该轴是Z,目标位置是-2.2897999976635 2022-09-08 16:04:28,771 [Thread=11] INFO - 步进失败 2022-09-08 16:04:28,771 [Thread=11] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:04:28,790 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:04:28,790 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:04:28,790 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:04:28,790 [Thread=11] INFO - 进入getLongth 2022-09-08 16:04:28,790 [Thread=11] INFO - 目标坐标X-85.593426Y-0.18262 2022-09-08 16:04:28,790 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:04:28,790 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:04:28,790 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:04:28,791 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:04:28,791 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:04:28,791 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:04:28,791 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:04:28,791 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:04:30,773 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:04:33,041 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:04:33,041 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:04:33,041 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:04:33,041 [Thread=1] INFO - 进入getLongth 2022-09-08 16:04:33,041 [Thread=1] INFO - 目标坐标X-85.589356Y-0.186317 2022-09-08 16:04:33,041 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:04:33,042 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:04:33,042 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:04:33,042 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:04:33,042 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:04:33,042 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:04:33,042 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:04:33,042 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:04:50,872 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:04:50,923 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.292370955667 2022-09-08 16:04:50,924 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.1007345183565 2022-09-08 16:04:50,924 [Thread=28] INFO - Measure angle is -90.196553 2022-09-08 16:04:50,927 [Thread=28] INFO - Measure StartPoint:998.606079101563,899.33349609375, EndPoint:997.50439453125,1220.4658203125, PixelDistance:321.134214 2022-09-08 16:04:50,927 [Thread=28] INFO - DerivativeMeasure timespan = 2.9746 2022-09-08 16:04:52,146 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:04:52,198 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.2014272792725 2022-09-08 16:04:52,198 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.2685933494597 2022-09-08 16:04:52,198 [Thread=28] INFO - Measure angle is -90.23501 2022-09-08 16:04:52,201 [Thread=28] INFO - Measure StartPoint:894.881652832031,899.059631347656, EndPoint:893.565368652344,1219.96716308594, PixelDistance:320.910231 2022-09-08 16:04:52,201 [Thread=28] INFO - DerivativeMeasure timespan = 2.8585 2022-09-08 16:04:53,041 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:04:53,096 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.1354270382609 2022-09-08 16:04:53,096 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.0298773145687 2022-09-08 16:04:53,096 [Thread=28] INFO - Measure angle is -90.082652 2022-09-08 16:04:53,099 [Thread=28] INFO - Measure StartPoint:952.262268066406,899.199951171875, EndPoint:951.799072265625,1220.27563476563, PixelDistance:321.076018 2022-09-08 16:04:53,099 [Thread=28] INFO - DerivativeMeasure timespan = 2.7326 2022-09-08 16:04:53,860 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:04:53,909 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.1142905314995 2022-09-08 16:04:53,909 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:04:53,909 [Thread=28] INFO - Measure angle is -90.057145 2022-09-08 16:04:53,911 [Thread=28] INFO - Measure StartPoint:948.131469726563,899.189819335938, EndPoint:947.811218261719,1220.25390625, PixelDistance:321.064247 2022-09-08 16:04:53,912 [Thread=28] INFO - DerivativeMeasure timespan = 2.2054 2022-09-08 16:04:54,558 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:04:54,620 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.2475675517454 2022-09-08 16:04:54,620 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.227697088521 2022-09-08 16:04:54,620 [Thread=28] INFO - Measure angle is -90.237632 2022-09-08 16:04:54,624 [Thread=28] INFO - Measure StartPoint:940.501220703125,899.156982421875, EndPoint:939.169738769531,1220.18225097656, PixelDistance:321.02803 2022-09-08 16:04:54,625 [Thread=28] INFO - DerivativeMeasure timespan = 4.0915 2022-09-08 16:04:55,283 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:04:55,341 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.3317352645514 2022-09-08 16:04:55,341 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 90.2672995715946 2022-09-08 16:04:55,341 [Thread=28] INFO - Measure angle is -90.299517 2022-09-08 16:04:55,344 [Thread=28] INFO - Measure StartPoint:888.86767578125,899.019958496094, EndPoint:887.18994140625,1219.95495605469, PixelDistance:320.939383 2022-09-08 16:04:55,344 [Thread=28] INFO - DerivativeMeasure timespan = 3.194 2022-09-08 16:05:10,701 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:05:10,704 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:05:10,714 [Thread=27] INFO - 单轴触发了 2022-09-08 16:05:10,714 [Thread=27] INFO - 该轴是Z 2022-09-08 16:05:10,715 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:05:10,715 [Thread=27] INFO - 该轴是Z,目标位置是-2.2932000023365 2022-09-08 16:05:10,715 [Thread=27] INFO - 步进失败 2022-09-08 16:05:10,715 [Thread=27] INFO - SwitchOffsetZ:-0.006300002 2022-09-08 16:05:10,720 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:10,720 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:10,720 [Thread=27] INFO - Longth长度152.4 2022-09-08 16:05:10,720 [Thread=27] INFO - 进入getLongth 2022-09-08 16:05:10,720 [Thread=27] INFO - 目标坐标X-85.579356Y-0.183317 2022-09-08 16:05:10,720 [Thread=27] INFO - 晶圆的大小6 2022-09-08 16:05:10,720 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 16:05:10,720 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:10,720 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:05:10,720 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 16:05:10,721 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:10,721 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:05:10,721 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:05:11,867 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:05:13,243 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:05:13,244 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:05:14,334 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:14,334 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:14,334 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:05:14,334 [Thread=1] INFO - 进入getLongth 2022-09-08 16:05:14,334 [Thread=1] INFO - 目标坐标X-85.532276Y-0.291432 2022-09-08 16:05:14,334 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:05:14,334 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:05:14,334 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:14,334 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:05:14,335 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:05:14,335 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:14,335 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:05:14,335 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:05:17,931 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:17,931 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:17,931 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:05:17,931 [Thread=1] INFO - 进入getLongth 2022-09-08 16:05:17,931 [Thread=1] INFO - 目标坐标X-85.547411Y-0.315313 2022-09-08 16:05:17,931 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:05:17,931 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:05:17,932 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:17,932 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:05:17,932 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:05:17,932 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:17,932 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:05:17,932 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:05:23,445 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:05:23,448 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:05:23,459 [Thread=6] INFO - 单轴触发了 2022-09-08 16:05:23,459 [Thread=6] INFO - 该轴是Z 2022-09-08 16:05:23,459 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:05:23,460 [Thread=6] INFO - 该轴是Z,目标位置是-2.2903999976635 2022-09-08 16:05:23,460 [Thread=6] INFO - 步进失败 2022-09-08 16:05:23,460 [Thread=6] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:05:23,465 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:23,466 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:23,466 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:05:23,466 [Thread=6] INFO - 进入getLongth 2022-09-08 16:05:23,466 [Thread=6] INFO - 目标坐标X-85.557411Y-0.318313 2022-09-08 16:05:23,466 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:05:23,466 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:05:23,467 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:23,467 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:05:23,467 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:05:23,467 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:23,467 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:05:23,467 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:05:25,469 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:05:27,077 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:27,078 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:27,078 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:05:27,078 [Thread=1] INFO - 进入getLongth 2022-09-08 16:05:27,078 [Thread=1] INFO - 目标坐标X-85.559275Y-0.31968 2022-09-08 16:05:27,078 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:05:27,078 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:05:27,078 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:27,078 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:05:27,078 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:05:27,079 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:27,079 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:05:27,079 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:05:35,994 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:35,994 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:35,994 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:05:35,995 [Thread=1] INFO - 进入getLongth 2022-09-08 16:05:35,995 [Thread=1] INFO - 目标坐标X-85.559275Y-0.31968 2022-09-08 16:05:35,995 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:05:35,995 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:05:35,995 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:35,995 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:05:35,995 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:05:35,995 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:35,995 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:05:35,995 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:05:36,607 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:05:43,156 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:05:43,159 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:05:43,171 [Thread=11] INFO - 单轴触发了 2022-09-08 16:05:43,171 [Thread=11] INFO - 该轴是Z 2022-09-08 16:05:43,171 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:05:43,172 [Thread=11] INFO - 该轴是Z,目标位置是-2.2936000023365 2022-09-08 16:05:43,172 [Thread=11] INFO - 步进失败 2022-09-08 16:05:43,172 [Thread=11] INFO - SwitchOffsetZ:-0.006300002 2022-09-08 16:05:43,180 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:43,180 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:43,180 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:05:43,180 [Thread=11] INFO - 进入getLongth 2022-09-08 16:05:43,181 [Thread=11] INFO - 目标坐标X-85.549275Y-0.31668 2022-09-08 16:05:43,181 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:05:43,181 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:05:43,181 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:43,181 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:05:43,181 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:05:43,181 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:43,181 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:05:43,182 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:05:45,183 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:05:48,730 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:05:48,732 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:05:48,745 [Thread=11] INFO - 单轴触发了 2022-09-08 16:05:48,745 [Thread=11] INFO - 该轴是Z 2022-09-08 16:05:48,745 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:05:48,745 [Thread=11] INFO - 该轴是Z,目标位置是-2.2913999976635 2022-09-08 16:05:48,745 [Thread=11] INFO - 步进失败 2022-09-08 16:05:48,746 [Thread=11] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:05:48,751 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:05:48,751 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:05:48,751 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:05:48,751 [Thread=11] INFO - 进入getLongth 2022-09-08 16:05:48,751 [Thread=11] INFO - 目标坐标X-85.559275Y-0.31968 2022-09-08 16:05:48,751 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:05:48,752 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:05:48,752 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:05:48,752 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:05:48,752 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:05:48,752 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:05:48,752 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:05:48,752 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:05:50,743 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:06:10,751 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:06:10,803 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:06:10,803 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.150858773565969 2022-09-08 16:06:10,804 [Thread=16] INFO - Measure angle is -0.075429 2022-09-08 16:06:10,807 [Thread=16] INFO - Measure StartPoint:888.411926269531,1016.82281494141, EndPoint:1209.34594726563,1017.24530029297, PixelDistance:320.934299 2022-09-08 16:06:10,808 [Thread=16] INFO - DerivativeMeasure timespan = 4.6184 2022-09-08 16:06:11,604 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:06:11,659 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:06:11,660 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0612980030133202 2022-09-08 16:06:11,660 [Thread=16] INFO - Measure angle is -0.030649 2022-09-08 16:06:11,663 [Thread=16] INFO - Measure StartPoint:888.321838378906,1047.92736816406, EndPoint:1209.24377441406,1048.09912109375, PixelDistance:320.921982 2022-09-08 16:06:11,663 [Thread=16] INFO - DerivativeMeasure timespan = 2.9152 2022-09-08 16:06:12,420 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:06:12,472 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0556304995101434 2022-09-08 16:06:12,473 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.0732957734871011 2022-09-08 16:06:12,473 [Thread=16] INFO - Measure angle is -0.064463 2022-09-08 16:06:12,476 [Thread=16] INFO - Measure StartPoint:888.349365234375,1033.82263183594, EndPoint:1209.29553222656,1034.18371582031, PixelDistance:320.94637 2022-09-08 16:06:12,476 [Thread=16] INFO - DerivativeMeasure timespan = 3.0744 2022-09-08 16:06:13,129 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:06:13,182 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.341392342270553 2022-09-08 16:06:13,182 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:06:13,182 [Thread=16] INFO - Measure angle is -0.170696 2022-09-08 16:06:13,186 [Thread=16] INFO - Measure StartPoint:888.394958496094,1025.47985839844, EndPoint:1209.33190917969,1026.43591308594, PixelDistance:320.938375 2022-09-08 16:06:13,186 [Thread=16] INFO - DerivativeMeasure timespan = 3.2959 2022-09-08 16:06:14,171 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:06:14,228 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.334592303228826 2022-09-08 16:06:14,228 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.212271845654529 2022-09-08 16:06:14,228 [Thread=16] INFO - Measure angle is -0.273432 2022-09-08 16:06:14,232 [Thread=16] INFO - Measure StartPoint:888.584716796875,967.220153808594, EndPoint:1209.57604980469,968.752014160156, PixelDistance:320.994988 2022-09-08 16:06:14,232 [Thread=16] INFO - DerivativeMeasure timespan = 3.6963 2022-09-08 16:06:33,598 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:06:33,600 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:06:33,612 [Thread=11] INFO - 单轴触发了 2022-09-08 16:06:33,612 [Thread=11] INFO - 该轴是Z 2022-09-08 16:06:33,612 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:06:33,614 [Thread=11] INFO - 该轴是Z,目标位置是-2.23510000095367 2022-09-08 16:06:33,614 [Thread=11] INFO - 步进失败 2022-09-08 16:06:33,614 [Thread=11] INFO - SwitchOffsetZ:0.051 2022-09-08 16:06:33,619 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:06:33,619 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:06:33,619 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:06:33,619 [Thread=11] INFO - 进入getLongth 2022-09-08 16:06:33,619 [Thread=11] INFO - 目标坐标X-85.502275Y-0.23868 2022-09-08 16:06:33,619 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:06:33,619 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:06:33,620 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:06:33,620 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:06:33,620 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:06:33,620 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:06:33,620 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:06:33,620 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:06:36,868 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:06:59,805 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:06:59,805 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:07:05,247 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:07:05,248 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:07:05,248 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:07:05,248 [Thread=1] INFO - 进入getLongth 2022-09-08 16:07:05,248 [Thread=1] INFO - 目标坐标X-85.800465Y-0.18519 2022-09-08 16:07:05,248 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:07:05,248 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:07:05,248 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:07:05,248 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:07:05,248 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:07:05,248 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:07:05,248 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:07:05,249 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:07:08,665 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:07:08,668 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:07:08,679 [Thread=6] INFO - 单轴触发了 2022-09-08 16:07:08,679 [Thread=6] INFO - 该轴是Z 2022-09-08 16:07:08,679 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:07:08,680 [Thread=6] INFO - 该轴是Z,目标位置是-2.29320000138283 2022-09-08 16:07:08,680 [Thread=6] INFO - 步进失败 2022-09-08 16:07:08,680 [Thread=6] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:07:08,684 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:07:08,684 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:07:08,684 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:07:08,685 [Thread=6] INFO - 进入getLongth 2022-09-08 16:07:08,685 [Thread=6] INFO - 目标坐标X-85.847465Y-0.26319 2022-09-08 16:07:08,685 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:07:08,685 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:07:08,685 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:07:08,685 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:07:08,685 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:07:08,685 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:07:08,686 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:07:08,686 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:07:10,682 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:07:13,730 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:07:13,730 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:07:13,730 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:07:13,730 [Thread=1] INFO - 进入getLongth 2022-09-08 16:07:13,730 [Thread=1] INFO - 目标坐标X-85.860057Y-0.291847 2022-09-08 16:07:13,730 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:07:13,730 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:07:13,730 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:07:13,730 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:07:13,730 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:07:13,731 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:07:13,731 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:07:13,731 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:07:18,244 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:07:18,248 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:07:18,259 [Thread=13] INFO - 单轴触发了 2022-09-08 16:07:18,259 [Thread=13] INFO - 该轴是Z 2022-09-08 16:07:18,259 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:07:18,260 [Thread=13] INFO - 该轴是Z,目标位置是-2.2903999976635 2022-09-08 16:07:18,260 [Thread=13] INFO - 步进失败 2022-09-08 16:07:18,260 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:07:18,266 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:07:18,266 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:07:18,266 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:07:18,267 [Thread=13] INFO - 进入getLongth 2022-09-08 16:07:18,267 [Thread=13] INFO - 目标坐标X-85.870057Y-0.294847 2022-09-08 16:07:18,267 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:07:18,267 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:07:18,267 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:07:18,267 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:07:18,267 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:07:18,267 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:07:18,267 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:07:18,267 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:07:20,268 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:07:22,225 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:07:22,225 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:07:22,225 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:07:22,225 [Thread=1] INFO - 进入getLongth 2022-09-08 16:07:22,226 [Thread=1] INFO - 目标坐标X-85.858717Y-0.298544 2022-09-08 16:07:22,226 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:07:22,226 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:07:22,226 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:07:22,226 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:07:22,226 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:07:22,226 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:07:22,226 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:07:22,226 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:07:25,143 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:07:25,143 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:07:25,143 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:07:25,143 [Thread=1] INFO - 进入getLongth 2022-09-08 16:07:25,144 [Thread=1] INFO - 目标坐标X-85.862507Y-0.298637 2022-09-08 16:07:25,144 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:07:25,144 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:07:25,144 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:07:25,144 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:07:25,144 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:07:25,144 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:07:25,144 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:07:25,144 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:07:29,337 [Thread=21] INFO - 单轴触发了 2022-09-08 16:07:29,337 [Thread=21] INFO - 该轴是Z 2022-09-08 16:07:29,337 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:07:29,338 [Thread=21] INFO - 该轴是Z,目标位置是-2.2863000000095 2022-09-08 16:07:29,338 [Thread=21] INFO - 步进失败 2022-09-08 16:07:34,186 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:34,250 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.3682982014568 2022-09-08 16:07:34,251 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.0248095150831 2022-09-08 16:07:34,251 [Thread=30] INFO - Measure angle is -90.196554 2022-09-08 16:07:34,252 [Thread=30] INFO - Measure StartPoint:1019.22424316406,990.639892578125, EndPoint:1018.78869628906,1117.58972167969, PixelDistance:126.950576 2022-09-08 16:07:34,252 [Thread=30] INFO - DerivativeMeasure timespan = 0.8772 2022-09-08 16:07:34,906 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:34,955 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.0609323789607 2022-09-08 16:07:34,955 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.3456183063517 2022-09-08 16:07:34,956 [Thread=30] INFO - Measure angle is -90.203275 2022-09-08 16:07:34,956 [Thread=30] INFO - Measure StartPoint:1001.21447753906,990.543212890625, EndPoint:1000.76385498047,1117.55187988281, PixelDistance:127.009466 2022-09-08 16:07:34,956 [Thread=30] INFO - DerivativeMeasure timespan = 0.7158 2022-09-08 16:07:35,562 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:35,615 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.1063282910913 2022-09-08 16:07:35,615 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:07:35,615 [Thread=30] INFO - Measure angle is -90.053164 2022-09-08 16:07:35,616 [Thread=30] INFO - Measure StartPoint:1001.05981445313,990.533508300781, EndPoint:1000.94195556641,1117.52612304688, PixelDistance:126.992669 2022-09-08 16:07:35,616 [Thread=30] INFO - DerivativeMeasure timespan = 0.7864 2022-09-08 16:07:36,234 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:36,286 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.154892902613 2022-09-08 16:07:36,286 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90.0242788861585 2022-09-08 16:07:36,286 [Thread=30] INFO - Measure angle is -90.089586 2022-09-08 16:07:36,287 [Thread=30] INFO - Measure StartPoint:985.050842285156,990.473022460938, EndPoint:984.852355957031,1117.41613769531, PixelDistance:126.94327 2022-09-08 16:07:36,288 [Thread=30] INFO - DerivativeMeasure timespan = 1.1247 2022-09-08 16:07:37,065 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:37,116 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:07:37,116 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:07:37,116 [Thread=30] INFO - Measure angle is -90 2022-09-08 16:07:37,117 [Thread=30] INFO - Measure StartPoint:981,990.484069824219, EndPoint:981,1117.38134765625, PixelDistance:126.897278 2022-09-08 16:07:37,117 [Thread=30] INFO - DerivativeMeasure timespan = 0.7313 2022-09-08 16:07:41,076 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:41,133 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:41,133 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0.0770166961528044 2022-09-08 16:07:41,134 [Thread=30] INFO - Measure angle is -0.038508 2022-09-08 16:07:41,135 [Thread=30] INFO - Measure StartPoint:860.045959472656,1731.95764160156, EndPoint:987.363830566406,1732.04321289063, PixelDistance:127.3179 2022-09-08 16:07:41,135 [Thread=30] INFO - DerivativeMeasure timespan = 1.6832 2022-09-08 16:07:41,978 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:42,037 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:42,038 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:42,038 [Thread=30] INFO - Measure angle is 0 2022-09-08 16:07:42,039 [Thread=30] INFO - Measure StartPoint:859.909484863281,1765, EndPoint:987.260803222656,1765, PixelDistance:127.351318 2022-09-08 16:07:42,039 [Thread=30] INFO - DerivativeMeasure timespan = 1.4666 2022-09-08 16:07:42,804 [Thread=30] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:42,856 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:42,856 [Thread=30] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:42,856 [Thread=30] INFO - Measure angle is 0 2022-09-08 16:07:42,857 [Thread=30] INFO - Measure StartPoint:859.874328613281,1762, EndPoint:987.283081054688,1762, PixelDistance:127.408752 2022-09-08 16:07:42,858 [Thread=30] INFO - DerivativeMeasure timespan = 1.1089 2022-09-08 16:07:43,551 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:43,612 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:43,612 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:43,612 [Thread=28] INFO - Measure angle is 0 2022-09-08 16:07:43,614 [Thread=28] INFO - Measure StartPoint:859.924499511719,1773, EndPoint:987.241027832031,1773, PixelDistance:127.316528 2022-09-08 16:07:43,614 [Thread=28] INFO - DerivativeMeasure timespan = 1.9126 2022-09-08 16:07:44,291 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:07:44,341 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:44,341 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:07:44,341 [Thread=28] INFO - Measure angle is 0 2022-09-08 16:07:44,343 [Thread=28] INFO - Measure StartPoint:860.018798828125,1748, EndPoint:987.308410644531,1748, PixelDistance:127.289612 2022-09-08 16:07:44,343 [Thread=28] INFO - DerivativeMeasure timespan = 1.854 2022-09-08 16:09:19,768 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 16:09:19,771 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 16:09:19,785 [Thread=6] INFO - 单轴触发了 2022-09-08 16:09:19,785 [Thread=6] INFO - 该轴是Z 2022-09-08 16:09:19,785 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:09:19,786 [Thread=6] INFO - 该轴是Z,目标位置是-2.23530000095367 2022-09-08 16:09:19,786 [Thread=6] INFO - 步进失败 2022-09-08 16:09:19,786 [Thread=6] INFO - SwitchOffsetZ:0.051 2022-09-08 16:09:19,793 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:09:19,793 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:09:19,793 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:09:19,793 [Thread=6] INFO - 进入getLongth 2022-09-08 16:09:19,793 [Thread=6] INFO - 目标坐标X-85.805507Y-0.217637 2022-09-08 16:09:19,793 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:09:19,793 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:09:19,794 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:09:19,794 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:09:19,794 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:09:19,794 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:09:19,794 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:09:19,794 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:09:20,810 [Thread=13] INFO - stagein currentPos:-2.2863, currentVelocity:2, delayTime:1193, point.Z:-0.5 2022-09-08 16:09:20,810 [Thread=13] INFO - stagein homez 2022-09-08 16:09:24,016 [Thread=13] INFO - stagein home ok 2022-09-08 16:09:24,018 [Thread=13] INFO - StageBack: waferSize = 6 2022-09-08 16:09:24,021 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:09:24,021 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:09:24,022 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:09:24,022 [Thread=13] INFO - 进入getLongth 2022-09-08 16:09:24,022 [Thread=13] INFO - 目标坐标X38.79Y115.2693 2022-09-08 16:09:24,022 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:09:24,022 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:09:24,022 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:09:24,022 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:09:24,022 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:09:24,022 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:09:24,022 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:09:24,022 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:09:29,771 [Thread=13] INFO - 单轴触发了 2022-09-08 16:09:29,772 [Thread=13] INFO - 该轴是Z 2022-09-08 16:09:29,772 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:09:29,772 [Thread=13] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 16:09:29,772 [Thread=13] INFO - 步进失败 2022-09-08 16:09:44,598 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:09:44,598 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:09:44,598 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:09:44,599 [Thread=1] INFO - 进入getLongth 2022-09-08 16:09:44,599 [Thread=1] INFO - 目标坐标X27.888Y103.7793 2022-09-08 16:09:44,599 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:09:44,599 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:09:44,599 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:09:44,599 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:09:44,599 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:09:44,599 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:09:44,599 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:09:44,599 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:09:47,028 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:09:49,366 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:09:49,367 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:09:52,011 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:09:52,011 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:09:52,011 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:09:52,011 [Thread=1] INFO - 进入getLongth 2022-09-08 16:09:52,011 [Thread=1] INFO - 目标坐标X27.544313Y104.017852 2022-09-08 16:09:52,012 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:09:52,012 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:09:52,012 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:09:52,012 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:09:52,012 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:09:52,012 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:09:52,012 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:09:52,012 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:09:54,603 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:09:54,605 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:09:54,617 [Thread=11] INFO - 单轴触发了 2022-09-08 16:09:54,617 [Thread=11] INFO - 该轴是Z 2022-09-08 16:09:54,617 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:09:54,617 [Thread=11] INFO - 该轴是Z,目标位置是-2.54490000138283 2022-09-08 16:09:54,617 [Thread=11] INFO - 步进失败 2022-09-08 16:09:54,618 [Thread=11] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:09:54,622 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:09:54,623 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:09:54,623 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:09:54,623 [Thread=11] INFO - 进入getLongth 2022-09-08 16:09:54,623 [Thread=11] INFO - 目标坐标X27.497313Y103.939852 2022-09-08 16:09:54,623 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:09:54,623 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:09:54,623 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:09:54,624 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:09:54,624 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:09:54,624 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:09:54,624 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:09:54,624 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:09:56,631 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:09:59,265 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:09:59,266 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:09:59,266 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:09:59,266 [Thread=1] INFO - 进入getLongth 2022-09-08 16:09:59,266 [Thread=1] INFO - 目标坐标X27.487637Y103.893703 2022-09-08 16:09:59,266 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:09:59,266 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:09:59,267 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:09:59,267 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:09:59,267 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:09:59,267 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:09:59,267 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:09:59,267 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:10:01,171 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:10:01,175 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:10:01,190 [Thread=6] INFO - 单轴触发了 2022-09-08 16:10:01,190 [Thread=6] INFO - 该轴是Z 2022-09-08 16:10:01,190 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:01,191 [Thread=6] INFO - 该轴是Z,目标位置是-2.5383999976635 2022-09-08 16:10:01,191 [Thread=6] INFO - 步进失败 2022-09-08 16:10:01,191 [Thread=6] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:10:01,195 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:10:01,196 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:10:01,196 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:10:01,196 [Thread=6] INFO - 进入getLongth 2022-09-08 16:10:01,196 [Thread=6] INFO - 目标坐标X27.477637Y103.890703 2022-09-08 16:10:01,196 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:10:01,196 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:10:01,196 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:10:01,196 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:10:01,197 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:10:01,197 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:10:01,197 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:10:01,197 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:10:03,187 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:10:07,185 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:10:07,186 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:10:07,186 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:10:07,186 [Thread=1] INFO - 进入getLongth 2022-09-08 16:10:07,186 [Thread=1] INFO - 目标坐标X27.477917Y103.888466 2022-09-08 16:10:07,186 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:10:07,186 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:10:07,186 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:10:07,187 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:10:07,187 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:10:07,187 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:10:07,187 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:10:07,187 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:10:10,506 [Thread=20] INFO - 单轴触发了 2022-09-08 16:10:10,506 [Thread=20] INFO - 该轴是Z 2022-09-08 16:10:10,506 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:10,507 [Thread=20] INFO - 该轴是Z,目标位置是-2.5342000000095 2022-09-08 16:10:10,507 [Thread=20] INFO - 步进失败 2022-09-08 16:10:10,643 [Thread=19] INFO - 单轴触发了 2022-09-08 16:10:10,643 [Thread=19] INFO - 该轴是Z 2022-09-08 16:10:10,643 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:10,643 [Thread=19] INFO - 该轴是Z,目标位置是-2.5342000000095 2022-09-08 16:10:10,644 [Thread=19] INFO - 步进失败 2022-09-08 16:10:10,811 [Thread=21] INFO - 单轴触发了 2022-09-08 16:10:10,811 [Thread=21] INFO - 该轴是Z 2022-09-08 16:10:10,811 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:10,812 [Thread=21] INFO - 该轴是Z,目标位置是-2.5342000000095 2022-09-08 16:10:10,812 [Thread=21] INFO - 步进失败 2022-09-08 16:10:10,970 [Thread=20] INFO - 单轴触发了 2022-09-08 16:10:10,970 [Thread=20] INFO - 该轴是Z 2022-09-08 16:10:10,970 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:10,971 [Thread=20] INFO - 该轴是Z,目标位置是-2.5342000000095 2022-09-08 16:10:10,971 [Thread=20] INFO - 步进失败 2022-09-08 16:10:11,138 [Thread=19] INFO - 单轴触发了 2022-09-08 16:10:11,138 [Thread=19] INFO - 该轴是Z 2022-09-08 16:10:11,138 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:11,139 [Thread=19] INFO - 该轴是Z,目标位置是-2.5346000000095 2022-09-08 16:10:11,139 [Thread=19] INFO - 步进失败 2022-09-08 16:10:11,306 [Thread=21] INFO - 单轴触发了 2022-09-08 16:10:11,306 [Thread=21] INFO - 该轴是Z 2022-09-08 16:10:11,306 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:11,307 [Thread=21] INFO - 该轴是Z,目标位置是-2.5346000000095 2022-09-08 16:10:11,307 [Thread=21] INFO - 步进失败 2022-09-08 16:10:11,498 [Thread=20] INFO - 单轴触发了 2022-09-08 16:10:11,498 [Thread=20] INFO - 该轴是Z 2022-09-08 16:10:11,499 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:11,499 [Thread=20] INFO - 该轴是Z,目标位置是-2.5350000000095 2022-09-08 16:10:11,499 [Thread=20] INFO - 步进失败 2022-09-08 16:10:11,866 [Thread=19] INFO - 单轴触发了 2022-09-08 16:10:11,867 [Thread=19] INFO - 该轴是Z 2022-09-08 16:10:11,867 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:11,867 [Thread=19] INFO - 该轴是Z,目标位置是-2.5354000000095 2022-09-08 16:10:11,868 [Thread=19] INFO - 步进失败 2022-09-08 16:10:14,290 [Thread=21] INFO - 单轴触发了 2022-09-08 16:10:14,290 [Thread=21] INFO - 该轴是Z 2022-09-08 16:10:14,290 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:14,290 [Thread=21] INFO - 该轴是Z,目标位置是-2.5353999999905 2022-09-08 16:10:14,291 [Thread=21] INFO - 步进失败 2022-09-08 16:10:14,481 [Thread=20] INFO - 单轴触发了 2022-09-08 16:10:14,482 [Thread=20] INFO - 该轴是Z 2022-09-08 16:10:14,482 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:14,482 [Thread=20] INFO - 该轴是Z,目标位置是-2.5353999999905 2022-09-08 16:10:14,482 [Thread=20] INFO - 步进失败 2022-09-08 16:10:17,145 [Thread=19] INFO - 单轴触发了 2022-09-08 16:10:17,145 [Thread=19] INFO - 该轴是Z 2022-09-08 16:10:17,145 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:17,146 [Thread=19] INFO - 该轴是Z,目标位置是-2.5354000000095 2022-09-08 16:10:17,146 [Thread=19] INFO - 步进失败 2022-09-08 16:10:17,356 [Thread=21] INFO - 单轴触发了 2022-09-08 16:10:17,356 [Thread=21] INFO - 该轴是Z 2022-09-08 16:10:17,356 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:10:17,357 [Thread=21] INFO - 该轴是Z,目标位置是-2.5354000000095 2022-09-08 16:10:17,357 [Thread=21] INFO - 步进失败 2022-09-08 16:10:20,966 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:10:21,020 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:10:21,020 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.63603135398418 2022-09-08 16:10:21,020 [Thread=28] INFO - Measure angle is -0.318016 2022-09-08 16:10:21,021 [Thread=28] INFO - Measure StartPoint:1009.36926269531,617.746704101563, EndPoint:1088.43383789063,618.185546875, PixelDistance:79.065793 2022-09-08 16:10:21,021 [Thread=28] INFO - DerivativeMeasure timespan = 0.94 2022-09-08 16:10:22,059 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:10:22,112 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:10:22,112 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.441844499191062 2022-09-08 16:10:22,112 [Thread=28] INFO - Measure angle is -0.220922 2022-09-08 16:10:22,113 [Thread=28] INFO - Measure StartPoint:1009.31146240234,634.839233398438, EndPoint:1088.38354492188,635.144165039063, PixelDistance:79.07267 2022-09-08 16:10:22,113 [Thread=28] INFO - DerivativeMeasure timespan = 1.0353 2022-09-08 16:10:23,100 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:10:23,152 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:10:23,152 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.282871679025315 2022-09-08 16:10:23,152 [Thread=28] INFO - Measure angle is -0.141436 2022-09-08 16:10:23,153 [Thread=28] INFO - Measure StartPoint:1009.32525634766,639.877380371094, EndPoint:1088.35998535156,640.072448730469, PixelDistance:79.03497 2022-09-08 16:10:23,153 [Thread=28] INFO - DerivativeMeasure timespan = 0.7919 2022-09-08 16:10:24,143 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:10:24,195 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.0617326521967153 2022-09-08 16:10:24,195 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.319254099865619 2022-09-08 16:10:24,195 [Thread=28] INFO - Measure angle is -0.190493 2022-09-08 16:10:24,196 [Thread=28] INFO - Measure StartPoint:1009.26483154297,655.877868652344, EndPoint:1088.28198242188,656.140563964844, PixelDistance:79.017588 2022-09-08 16:10:24,196 [Thread=28] INFO - DerivativeMeasure timespan = 0.741 2022-09-08 16:10:25,204 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:10:25,251 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:10:25,251 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.479282323843007 2022-09-08 16:10:25,251 [Thread=28] INFO - Measure angle is -0.239641 2022-09-08 16:10:25,252 [Thread=28] INFO - Measure StartPoint:1009.28802490234,648.846435546875, EndPoint:1088.27099609375,649.176818847656, PixelDistance:78.983662 2022-09-08 16:10:25,252 [Thread=28] INFO - DerivativeMeasure timespan = 0.5816 2022-09-08 16:11:16,223 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:16,271 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:11:16,272 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.467639856926356 2022-09-08 16:11:16,272 [Thread=16] INFO - Measure angle is -0.23382 2022-09-08 16:11:16,273 [Thread=16] INFO - Measure StartPoint:1007.28778076172,673.846069335938, EndPoint:1086.58837890625,674.169738769531, PixelDistance:79.301259 2022-09-08 16:11:16,273 [Thread=16] INFO - DerivativeMeasure timespan = 0.9201 2022-09-08 16:11:24,134 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:24,189 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.254054469614603 2022-09-08 16:11:24,189 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.582047147376368 2022-09-08 16:11:24,189 [Thread=16] INFO - Measure angle is -0.418051 2022-09-08 16:11:24,190 [Thread=16] INFO - Measure StartPoint:1007.24420166016,689.5712890625, EndPoint:1086.50219726563,690.149597167969, PixelDistance:79.260105 2022-09-08 16:11:24,190 [Thread=16] INFO - DerivativeMeasure timespan = 0.6104 2022-09-08 16:11:25,843 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:25,900 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.450158270792352 2022-09-08 16:11:25,900 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.595431380820583 2022-09-08 16:11:25,900 [Thread=3] INFO - Measure angle is -0.522795 2022-09-08 16:11:25,901 [Thread=3] INFO - Measure StartPoint:1007.20764160156,700.59130859375, EndPoint:1086.43774414063,701.314208984375, PixelDistance:79.2334 2022-09-08 16:11:25,901 [Thread=3] INFO - DerivativeMeasure timespan = 0.5766 2022-09-08 16:11:26,796 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:26,841 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0322501941754488 2022-09-08 16:11:26,842 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:11:26,842 [Thread=3] INFO - Measure angle is -0.016125 2022-09-08 16:11:26,842 [Thread=3] INFO - Measure StartPoint:1007.10943603516,714.983154296875, EndPoint:1086.44372558594,715.005493164063, PixelDistance:79.334293 2022-09-08 16:11:26,843 [Thread=3] INFO - DerivativeMeasure timespan = 0.7654 2022-09-08 16:11:28,046 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:28,109 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.660119931080736 2022-09-08 16:11:28,109 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.580842570538258 2022-09-08 16:11:28,109 [Thread=3] INFO - Measure angle is -0.620481 2022-09-08 16:11:28,110 [Thread=3] INFO - Measure StartPoint:1007.07098388672,728.524230957031, EndPoint:1086.36987304688,729.383056640625, PixelDistance:79.30354 2022-09-08 16:11:28,110 [Thread=3] INFO - DerivativeMeasure timespan = 0.6618 2022-09-08 16:11:33,621 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:33,675 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 89.9882847972353 2022-09-08 16:11:33,675 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2588032833092 2022-09-08 16:11:33,675 [Thread=16] INFO - Measure angle is -90.123544 2022-09-08 16:11:33,675 [Thread=16] INFO - Measure StartPoint:618.078125,970.756469726563, EndPoint:617.906799316406,1050.22521972656, PixelDistance:79.468935 2022-09-08 16:11:33,676 [Thread=16] INFO - DerivativeMeasure timespan = 0.4155 2022-09-08 16:11:34,736 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:34,783 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:11:34,783 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:11:34,783 [Thread=16] INFO - Measure angle is -90 2022-09-08 16:11:34,783 [Thread=16] INFO - Measure StartPoint:615,970.842529296875, EndPoint:615,1050.15661621094, PixelDistance:79.314087 2022-09-08 16:11:34,783 [Thread=16] INFO - DerivativeMeasure timespan = 0.3489 2022-09-08 16:11:35,676 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:35,727 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 89.8726212041468 2022-09-08 16:11:35,727 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.5406562938102 2022-09-08 16:11:35,727 [Thread=16] INFO - Measure angle is -90.206639 2022-09-08 16:11:35,728 [Thread=16] INFO - Measure StartPoint:621.166320800781,970.880676269531, EndPoint:620.880187988281,1050.21569824219, PixelDistance:79.335538 2022-09-08 16:11:35,728 [Thread=16] INFO - DerivativeMeasure timespan = 0.3951 2022-09-08 16:11:36,614 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:36,667 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:11:36,667 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90.2567582322827 2022-09-08 16:11:36,667 [Thread=16] INFO - Measure angle is -90.128379 2022-09-08 16:11:36,667 [Thread=16] INFO - Measure StartPoint:620.060974121094,970.79541015625, EndPoint:619.882995605469,1050.21801757813, PixelDistance:79.422807 2022-09-08 16:11:36,667 [Thread=16] INFO - DerivativeMeasure timespan = 0.3805 2022-09-08 16:11:37,890 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:11:37,937 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:11:37,938 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:11:37,938 [Thread=16] INFO - Measure angle is -90 2022-09-08 16:11:37,938 [Thread=16] INFO - Measure StartPoint:629,970.83056640625, EndPoint:629,1050.29357910156, PixelDistance:79.463013 2022-09-08 16:11:37,938 [Thread=16] INFO - DerivativeMeasure timespan = 0.3361 2022-09-08 16:12:30,764 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:30,812 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.712879961437265 2022-09-08 16:12:30,812 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 1.01555208704304 2022-09-08 16:12:30,812 [Thread=29] INFO - Measure angle is -0.864216 2022-09-08 16:12:30,813 [Thread=29] INFO - Measure StartPoint:1007.16351318359,714.580078125, EndPoint:1086.39489746094,715.775268554688, PixelDistance:79.240398 2022-09-08 16:12:30,813 [Thread=29] INFO - DerivativeMeasure timespan = 0.7562 2022-09-08 16:12:31,848 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:31,904 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.472151471864258 2022-09-08 16:12:31,904 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.372440387235628 2022-09-08 16:12:31,904 [Thread=29] INFO - Measure angle is -0.422296 2022-09-08 16:12:31,905 [Thread=29] INFO - Measure StartPoint:1007.13104248047,714.661926269531, EndPoint:1086.41369628906,715.246276855469, PixelDistance:79.284807 2022-09-08 16:12:31,905 [Thread=29] INFO - DerivativeMeasure timespan = 0.4733 2022-09-08 16:12:32,913 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:32,969 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.472151471864258 2022-09-08 16:12:32,969 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.372440387235628 2022-09-08 16:12:32,970 [Thread=29] INFO - Measure angle is -0.422296 2022-09-08 16:12:32,970 [Thread=29] INFO - Measure StartPoint:1007.13006591797,714.698791503906, EndPoint:1086.41333007813,715.283142089844, PixelDistance:79.285418 2022-09-08 16:12:32,970 [Thread=29] INFO - DerivativeMeasure timespan = 0.5713 2022-09-08 16:12:33,708 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:33,763 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.735085453161687 2022-09-08 16:12:33,763 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.65250294187494 2022-09-08 16:12:33,764 [Thread=29] INFO - Measure angle is -0.693794 2022-09-08 16:12:33,764 [Thread=29] INFO - Measure StartPoint:1007.06402587891,729.467956542969, EndPoint:1086.35681152344,730.428161621094, PixelDistance:79.298599 2022-09-08 16:12:33,764 [Thread=29] INFO - DerivativeMeasure timespan = 0.5329 2022-09-08 16:12:35,000 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:35,050 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:12:35,051 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:12:35,051 [Thread=16] INFO - Measure angle is 0 2022-09-08 16:12:35,051 [Thread=16] INFO - Measure StartPoint:1008.17645263672,740, EndPoint:1086.35095214844,740, PixelDistance:78.1745 2022-09-08 16:12:35,051 [Thread=16] INFO - DerivativeMeasure timespan = 0.5728 2022-09-08 16:12:44,041 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:44,091 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.833693013452048 2022-09-08 16:12:44,091 [Thread=29] INFO - Measure angle is -0.833693 2022-09-08 16:12:44,092 [Thread=29] INFO - Measure StartPoint:1007.10119628906,722.375732421875, EndPoint:1086.37890625,723.529357910156, PixelDistance:79.286103 2022-09-08 16:12:44,092 [Thread=29] INFO - DerivativeMeasure timespan = 0.5223 2022-09-08 16:12:45,247 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:12:45,313 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.564795002632569 2022-09-08 16:12:45,313 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.53296941873296 2022-09-08 16:12:45,313 [Thread=29] INFO - Measure angle is -0.548882 2022-09-08 16:12:45,314 [Thread=29] INFO - Measure StartPoint:1007.13696289063,712.570190429688, EndPoint:1086.39477539063,713.329528808594, PixelDistance:79.26145 2022-09-08 16:12:45,314 [Thread=29] INFO - DerivativeMeasure timespan = 0.6749 2022-09-08 16:13:11,732 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:13:11,782 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:13:11,782 [Thread=5] INFO - Measure angle is -90 2022-09-08 16:13:11,782 [Thread=5] INFO - Measure StartPoint:565,968.246520996094, EndPoint:565,1047.57800292969, PixelDistance:79.331482 2022-09-08 16:13:11,783 [Thread=5] INFO - DerivativeMeasure timespan = 0.3724 2022-09-08 16:13:12,871 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:13:12,921 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:13:12,921 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:13:12,921 [Thread=5] INFO - Measure angle is -90 2022-09-08 16:13:12,922 [Thread=5] INFO - Measure StartPoint:560,968.26416015625, EndPoint:560,1047.57470703125, PixelDistance:79.310547 2022-09-08 16:13:12,922 [Thread=5] INFO - DerivativeMeasure timespan = 0.52 2022-09-08 16:13:14,005 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:13:14,055 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:13:14,055 [Thread=5] INFO - Measure angle is -90 2022-09-08 16:13:14,055 [Thread=5] INFO - Measure StartPoint:568,968.300170898438, EndPoint:568,1047.59619140625, PixelDistance:79.296021 2022-09-08 16:13:14,055 [Thread=5] INFO - DerivativeMeasure timespan = 0.3878 2022-09-08 16:13:14,973 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:13:15,020 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90.0796269147368 2022-09-08 16:13:15,020 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:13:15,020 [Thread=5] INFO - Measure angle is -90.039813 2022-09-08 16:13:15,021 [Thread=5] INFO - Measure StartPoint:557.028991699219,968.239868164063, EndPoint:556.973876953125,1047.55932617188, PixelDistance:79.319477 2022-09-08 16:13:15,021 [Thread=5] INFO - DerivativeMeasure timespan = 0.4083 2022-09-08 16:13:17,934 [Thread=5] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:13:17,985 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90.118329605666 2022-09-08 16:13:17,986 [Thread=5] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:13:17,986 [Thread=5] INFO - Measure angle is -90.059165 2022-09-08 16:13:17,986 [Thread=5] INFO - Measure StartPoint:531.048461914063,968.0576171875, EndPoint:530.966430664063,1047.49523925781, PixelDistance:79.437664 2022-09-08 16:13:17,986 [Thread=5] INFO - DerivativeMeasure timespan = 0.4271 2022-09-08 16:14:35,499 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:14:35,554 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90.3030941731394 2022-09-08 16:14:35,554 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90.5800449310536 2022-09-08 16:14:35,554 [Thread=29] INFO - Measure angle is -90.44157 2022-09-08 16:14:35,555 [Thread=29] INFO - Measure StartPoint:1543.44079589844,1132.80859375, EndPoint:1542.82873535156,1212.22619628906, PixelDistance:79.419961 2022-09-08 16:14:35,555 [Thread=29] INFO - DerivativeMeasure timespan = 0.5705 2022-09-08 16:14:36,952 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:14:37,001 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90.498978166097 2022-09-08 16:14:37,001 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 90 2022-09-08 16:14:37,001 [Thread=29] INFO - Measure angle is -90.249489 2022-09-08 16:14:37,002 [Thread=29] INFO - Measure StartPoint:1574.20080566406,1132.87915039063, EndPoint:1573.85473632813,1212.36474609375, PixelDistance:79.486349 2022-09-08 16:14:37,002 [Thread=29] INFO - DerivativeMeasure timespan = 0.4016 2022-09-08 16:14:39,004 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:14:39,006 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:14:39,016 [Thread=4] INFO - 单轴触发了 2022-09-08 16:14:39,016 [Thread=4] INFO - 该轴是Z 2022-09-08 16:14:39,017 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:14:39,017 [Thread=4] INFO - 该轴是Z,目标位置是-2.48460000095367 2022-09-08 16:14:39,017 [Thread=4] INFO - 步进失败 2022-09-08 16:14:39,017 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 16:14:39,025 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:14:39,026 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:14:39,026 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:14:39,026 [Thread=4] INFO - 进入getLongth 2022-09-08 16:14:39,026 [Thread=4] INFO - 目标坐标X27.534917Y103.969466 2022-09-08 16:14:39,026 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:14:39,026 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:14:39,026 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:14:39,026 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:14:39,026 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:14:39,026 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:14:39,027 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:14:39,027 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:14:43,612 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 16:14:43,614 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 16:14:43,614 [Thread=6] INFO - 单轴触发了 2022-09-08 16:14:43,614 [Thread=6] INFO - 该轴是Z 2022-09-08 16:14:43,614 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:14:43,615 [Thread=6] INFO - 该轴是Z,目标位置是-2.4848 2022-09-08 16:14:43,615 [Thread=6] INFO - 步进失败 2022-09-08 16:14:43,615 [Thread=6] INFO - SwitchOffsetZ:0 2022-09-08 16:14:43,620 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:14:43,620 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:14:43,620 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:14:43,620 [Thread=6] INFO - 进入getLongth 2022-09-08 16:14:43,620 [Thread=6] INFO - 目标坐标X27.534917Y103.969466 2022-09-08 16:14:43,621 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:14:43,621 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:14:43,621 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:14:43,621 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:14:43,621 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:14:43,621 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:14:43,621 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:14:43,622 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:14:44,640 [Thread=15] INFO - stageout currentPos:-2.4848, currentVelocity:2, delayTime:1292, point.Z:-0.5 2022-09-08 16:14:44,640 [Thread=15] INFO - stage out homez 2022-09-08 16:14:47,946 [Thread=15] INFO - stage out home ok 2022-09-08 16:14:47,949 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:14:47,950 [Thread=15] INFO - stagein homez 2022-09-08 16:14:47,950 [Thread=15] INFO - stagein home ok 2022-09-08 16:14:47,950 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:14:47,950 [Thread=15] INFO - Longth长度152.4 2022-09-08 16:14:47,950 [Thread=15] INFO - 进入getLongth 2022-09-08 16:14:47,951 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 16:14:47,951 [Thread=15] INFO - 晶圆的大小6 2022-09-08 16:14:47,951 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 16:14:47,951 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:14:47,951 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 16:14:47,951 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 16:14:47,951 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 16:14:47,951 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 16:14:47,951 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 16:14:47,951 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:17:19,847 [Thread=6] INFO - SwitchIndex index:0 2022-09-08 16:17:19,850 [Thread=6] INFO - Switch Lens:Broadcast Event 2022-09-08 16:17:19,850 [Thread=15] INFO - 单轴触发了 2022-09-08 16:17:19,851 [Thread=15] INFO - 该轴是Z 2022-09-08 16:17:19,851 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 16:17:19,852 [Thread=15] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:17:19,852 [Thread=15] INFO - 步进失败 2022-09-08 16:17:19,852 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 16:17:19,858 [Thread=15] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:17:19,858 [Thread=15] INFO - stagein homez 2022-09-08 16:17:19,858 [Thread=15] INFO - stagein home ok 2022-09-08 16:17:19,858 [Thread=15] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:17:19,858 [Thread=15] INFO - Longth长度152.4 2022-09-08 16:17:19,859 [Thread=15] INFO - 进入getLongth 2022-09-08 16:17:19,859 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 16:17:19,859 [Thread=15] INFO - 晶圆的大小6 2022-09-08 16:17:19,859 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 16:17:19,859 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:17:19,859 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 16:17:19,859 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 16:17:19,859 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 16:17:19,859 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 16:17:19,859 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 16:17:19,859 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:17:20,867 [Thread=6] INFO - stageout currentPos:-0.3635, currentVelocity:2, delayTime:368, point.Z:-0.5 2022-09-08 16:17:20,868 [Thread=6] INFO - stage out homez 2022-09-08 16:17:23,256 [Thread=6] INFO - stage out home ok 2022-09-08 16:17:23,259 [Thread=6] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:17:23,260 [Thread=6] INFO - stagein homez 2022-09-08 16:17:23,260 [Thread=6] INFO - stagein home ok 2022-09-08 16:17:23,260 [Thread=6] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:17:23,260 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:17:23,260 [Thread=6] INFO - 进入getLongth 2022-09-08 16:17:23,260 [Thread=6] INFO - 目标坐标X-100Y-90 2022-09-08 16:17:23,260 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:17:23,260 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:17:23,261 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:17:23,261 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:17:23,261 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:17:23,261 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:17:23,261 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:17:23,261 [Thread=6] INFO - 双轴-目标点不在范围内 2022-09-08 16:17:23,261 [Thread=6] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:20:49,512 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 16:20:49,515 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 16:20:49,515 [Thread=4] INFO - 单轴触发了 2022-09-08 16:20:49,515 [Thread=4] INFO - 该轴是Z 2022-09-08 16:20:49,515 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:20:49,516 [Thread=4] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:20:49,516 [Thread=4] INFO - 步进失败 2022-09-08 16:20:49,516 [Thread=4] INFO - SwitchOffsetZ:0 2022-09-08 16:20:49,524 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:20:49,524 [Thread=4] INFO - stagein homez 2022-09-08 16:20:49,524 [Thread=4] INFO - stagein home ok 2022-09-08 16:20:49,524 [Thread=4] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:20:49,524 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:20:49,525 [Thread=4] INFO - 进入getLongth 2022-09-08 16:20:49,525 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 16:20:49,525 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:20:49,525 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:20:49,525 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:20:49,525 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:20:49,525 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:20:49,525 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:20:49,525 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:20:49,525 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 16:20:49,528 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:20:50,544 [Thread=27] INFO - stagein currentPos:-0.0462, currentVelocity:2, delayTime:526, point.Z:-0.5 2022-09-08 16:20:50,545 [Thread=27] INFO - stagein homez 2022-09-08 16:20:53,092 [Thread=27] INFO - stagein home ok 2022-09-08 16:20:53,095 [Thread=27] INFO - StageBack: waferSize = 6 2022-09-08 16:20:53,101 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:20:53,101 [Thread=27] INFO - stagein homez 2022-09-08 16:20:53,101 [Thread=27] INFO - stagein home ok 2022-09-08 16:20:53,101 [Thread=27] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:20:53,101 [Thread=27] INFO - Longth长度152.4 2022-09-08 16:20:53,101 [Thread=27] INFO - 进入getLongth 2022-09-08 16:20:53,101 [Thread=27] INFO - 目标坐标X38.79Y115.2693 2022-09-08 16:20:53,102 [Thread=27] INFO - 晶圆的大小6 2022-09-08 16:20:53,102 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 16:20:53,102 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:20:53,102 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:20:53,102 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 16:20:53,102 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 16:20:53,102 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:20:53,102 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:21:02,589 [Thread=27] INFO - 单轴触发了 2022-09-08 16:21:02,589 [Thread=27] INFO - 该轴是Z 2022-09-08 16:21:02,589 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:21:02,589 [Thread=27] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 16:21:02,589 [Thread=27] INFO - 步进失败 2022-09-08 16:21:26,184 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:21:26,185 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:21:26,185 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:21:26,185 [Thread=1] INFO - 进入getLongth 2022-09-08 16:21:26,185 [Thread=1] INFO - 目标坐标X-6.77500000000002Y87.2073 2022-09-08 16:21:26,185 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:21:26,185 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:21:26,185 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:21:26,185 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:21:26,185 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:21:26,185 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:21:26,185 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:21:26,185 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:21:32,064 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:21:34,466 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:21:34,469 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:21:37,109 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:21:37,109 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:21:37,109 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:21:37,110 [Thread=1] INFO - 进入getLongth 2022-09-08 16:21:37,110 [Thread=1] INFO - 目标坐标X-7.147584Y87.525779 2022-09-08 16:21:37,110 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:21:37,110 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:21:37,110 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:21:37,110 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:21:37,110 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:21:37,110 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:21:37,110 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:21:37,111 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:21:39,983 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:21:39,983 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:21:39,983 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:21:39,983 [Thread=1] INFO - 进入getLongth 2022-09-08 16:21:39,983 [Thread=1] INFO - 目标坐标X-7.134058Y87.496882 2022-09-08 16:21:39,983 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:21:39,983 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:21:39,983 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:21:39,984 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:21:39,984 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:21:39,984 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:21:39,984 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:21:39,984 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:21:47,738 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:21:47,741 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:21:47,752 [Thread=6] INFO - 单轴触发了 2022-09-08 16:21:47,752 [Thread=6] INFO - 该轴是Z 2022-09-08 16:21:47,752 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:21:47,753 [Thread=6] INFO - 该轴是Z,目标位置是-2.53779999904633 2022-09-08 16:21:47,753 [Thread=6] INFO - 步进失败 2022-09-08 16:21:47,753 [Thread=6] INFO - SwitchOffsetZ:-0.051 2022-09-08 16:21:47,757 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:21:47,757 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:21:47,757 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:21:47,757 [Thread=6] INFO - 进入getLongth 2022-09-08 16:21:47,757 [Thread=6] INFO - 目标坐标X-7.191058Y87.415882 2022-09-08 16:21:47,757 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:21:47,757 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:21:47,758 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:21:47,758 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:21:47,758 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:21:47,758 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:21:47,758 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:21:47,758 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:21:49,749 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:21:52,749 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:21:52,749 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:21:52,750 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:21:52,750 [Thread=1] INFO - 进入getLongth 2022-09-08 16:21:52,750 [Thread=1] INFO - 目标坐标X-7.205256Y87.399572 2022-09-08 16:21:52,750 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:21:52,750 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:21:52,750 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:21:52,750 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:21:52,750 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:21:52,750 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:21:52,750 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:21:52,750 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:21:57,317 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:21:57,321 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:21:57,333 [Thread=11] INFO - 单轴触发了 2022-09-08 16:21:57,334 [Thread=11] INFO - 该轴是Z 2022-09-08 16:21:57,334 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:21:57,334 [Thread=11] INFO - 该轴是Z,目标位置是-2.5290000023365 2022-09-08 16:21:57,334 [Thread=11] INFO - 步进失败 2022-09-08 16:21:57,334 [Thread=11] INFO - SwitchOffsetZ:-0.006300002 2022-09-08 16:21:57,339 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:21:57,339 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:21:57,339 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:21:57,339 [Thread=11] INFO - 进入getLongth 2022-09-08 16:21:57,340 [Thread=11] INFO - 目标坐标X-7.195256Y87.402572 2022-09-08 16:21:57,340 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:21:57,340 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:21:57,340 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:21:57,340 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:21:57,340 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:21:57,340 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:21:57,340 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:21:57,340 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:21:59,343 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:22:02,864 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:22:02,866 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:22:02,878 [Thread=15] INFO - 单轴触发了 2022-09-08 16:22:02,879 [Thread=15] INFO - 该轴是Z 2022-09-08 16:22:02,879 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:02,879 [Thread=15] INFO - 该轴是Z,目标位置是-2.47449999861717 2022-09-08 16:22:02,879 [Thread=15] INFO - 步进失败 2022-09-08 16:22:02,879 [Thread=15] INFO - SwitchOffsetZ:0.0573 2022-09-08 16:22:02,899 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:22:02,900 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:22:02,900 [Thread=15] INFO - Longth长度152.4 2022-09-08 16:22:02,900 [Thread=15] INFO - 进入getLongth 2022-09-08 16:22:02,900 [Thread=15] INFO - 目标坐标X-7.148256Y87.480572 2022-09-08 16:22:02,900 [Thread=15] INFO - 晶圆的大小6 2022-09-08 16:22:02,900 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 16:22:02,900 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:22:02,901 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 16:22:02,901 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 16:22:02,901 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 16:22:02,901 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 16:22:02,901 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 16:22:04,879 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:22:08,715 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:22:08,715 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:22:08,715 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:22:08,716 [Thread=1] INFO - 进入getLongth 2022-09-08 16:22:08,716 [Thread=1] INFO - 目标坐标X-7.135345Y87.490409 2022-09-08 16:22:08,716 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:22:08,716 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:22:08,716 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:22:08,716 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:22:08,716 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:22:08,716 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:22:08,716 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:22:08,717 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:22:13,480 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:22:13,484 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:22:13,500 [Thread=4] INFO - 单轴触发了 2022-09-08 16:22:13,500 [Thread=4] INFO - 该轴是Z 2022-09-08 16:22:13,500 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:13,501 [Thread=4] INFO - 该轴是Z,目标位置是-2.52569999904633 2022-09-08 16:22:13,501 [Thread=4] INFO - 步进失败 2022-09-08 16:22:13,501 [Thread=4] INFO - SwitchOffsetZ:-0.051 2022-09-08 16:22:13,505 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:22:13,505 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:22:13,505 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:22:13,505 [Thread=4] INFO - 进入getLongth 2022-09-08 16:22:13,505 [Thread=4] INFO - 目标坐标X-7.192345Y87.409409 2022-09-08 16:22:13,505 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:22:13,505 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:22:13,506 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:22:13,506 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:22:13,506 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:22:13,506 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:22:13,506 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:22:13,506 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:22:15,493 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:22:18,836 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:22:18,837 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:22:20,242 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:22:20,243 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:22:20,243 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:22:20,243 [Thread=1] INFO - 进入getLongth 2022-09-08 16:22:20,243 [Thread=1] INFO - 目标坐标X-7.202162Y87.394093 2022-09-08 16:22:20,243 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:22:20,243 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:22:20,243 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:22:20,243 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:22:20,243 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:22:20,244 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:22:20,244 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:22:20,244 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:22:23,236 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:23,236 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:23,236 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:23,237 [Thread=20] INFO - 该轴是Z,目标位置是-2.5214999999905 2022-09-08 16:22:23,237 [Thread=20] INFO - 步进失败 2022-09-08 16:22:23,411 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:23,412 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:23,412 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:23,412 [Thread=19] INFO - 该轴是Z,目标位置是-2.5214999999905 2022-09-08 16:22:23,412 [Thread=19] INFO - 步进失败 2022-09-08 16:22:23,590 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:23,590 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:23,590 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:23,591 [Thread=21] INFO - 该轴是Z,目标位置是-2.5212999999905 2022-09-08 16:22:23,591 [Thread=21] INFO - 步进失败 2022-09-08 16:22:23,763 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:23,764 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:23,764 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:23,764 [Thread=20] INFO - 该轴是Z,目标位置是-2.5212999999905 2022-09-08 16:22:23,764 [Thread=20] INFO - 步进失败 2022-09-08 16:22:23,932 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:23,932 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:23,932 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:23,932 [Thread=19] INFO - 该轴是Z,目标位置是-2.5210999999905 2022-09-08 16:22:23,933 [Thread=19] INFO - 步进失败 2022-09-08 16:22:24,103 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:24,103 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:24,103 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:24,104 [Thread=21] INFO - 该轴是Z,目标位置是-2.5210999999905 2022-09-08 16:22:24,104 [Thread=21] INFO - 步进失败 2022-09-08 16:22:24,291 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:24,291 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:24,291 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:24,292 [Thread=20] INFO - 该轴是Z,目标位置是-2.5206999999905 2022-09-08 16:22:24,292 [Thread=20] INFO - 步进失败 2022-09-08 16:22:24,436 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:24,436 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:24,436 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:24,437 [Thread=19] INFO - 该轴是Z,目标位置是-2.5206999999905 2022-09-08 16:22:24,437 [Thread=19] INFO - 步进失败 2022-09-08 16:22:24,612 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:24,612 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:24,612 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:24,612 [Thread=21] INFO - 该轴是Z,目标位置是-2.5202999999905 2022-09-08 16:22:24,612 [Thread=21] INFO - 步进失败 2022-09-08 16:22:24,780 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:24,780 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:24,780 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:24,781 [Thread=20] INFO - 该轴是Z,目标位置是-2.5202999999905 2022-09-08 16:22:24,781 [Thread=20] INFO - 步进失败 2022-09-08 16:22:25,788 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:25,788 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:25,788 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:25,789 [Thread=19] INFO - 该轴是Z,目标位置是-2.5199000000095 2022-09-08 16:22:25,789 [Thread=19] INFO - 步进失败 2022-09-08 16:22:25,949 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:25,949 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:25,949 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:25,950 [Thread=21] INFO - 该轴是Z,目标位置是-2.5199000000095 2022-09-08 16:22:25,950 [Thread=21] INFO - 步进失败 2022-09-08 16:22:26,129 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:26,129 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:26,129 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:26,130 [Thread=20] INFO - 该轴是Z,目标位置是-2.5199000000095 2022-09-08 16:22:26,130 [Thread=20] INFO - 步进失败 2022-09-08 16:22:26,296 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:26,297 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:26,297 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:26,297 [Thread=19] INFO - 该轴是Z,目标位置是-2.5199000000095 2022-09-08 16:22:26,297 [Thread=19] INFO - 步进失败 2022-09-08 16:22:26,454 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:26,454 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:26,454 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:26,455 [Thread=21] INFO - 该轴是Z,目标位置是-2.5203000000095 2022-09-08 16:22:26,455 [Thread=21] INFO - 步进失败 2022-09-08 16:22:26,648 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:26,649 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:26,649 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:26,649 [Thread=20] INFO - 该轴是Z,目标位置是-2.5203000000095 2022-09-08 16:22:26,649 [Thread=20] INFO - 步进失败 2022-09-08 16:22:26,812 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:26,812 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:26,813 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:26,813 [Thread=19] INFO - 该轴是Z,目标位置是-2.5207000000095 2022-09-08 16:22:26,813 [Thread=19] INFO - 步进失败 2022-09-08 16:22:26,988 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:26,988 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:26,988 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:26,989 [Thread=21] INFO - 该轴是Z,目标位置是-2.5211000000095 2022-09-08 16:22:26,989 [Thread=21] INFO - 步进失败 2022-09-08 16:22:27,171 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:27,172 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:27,172 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:27,172 [Thread=20] INFO - 该轴是Z,目标位置是-2.5211000000095 2022-09-08 16:22:27,172 [Thread=20] INFO - 步进失败 2022-09-08 16:22:27,384 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:27,386 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:27,386 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:27,387 [Thread=19] INFO - 该轴是Z,目标位置是-2.5215000000095 2022-09-08 16:22:27,387 [Thread=19] INFO - 步进失败 2022-09-08 16:22:27,563 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:27,564 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:27,564 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:27,564 [Thread=21] INFO - 该轴是Z,目标位置是-2.5215000000095 2022-09-08 16:22:27,564 [Thread=21] INFO - 步进失败 2022-09-08 16:22:27,731 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:27,731 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:27,731 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:27,732 [Thread=20] INFO - 该轴是Z,目标位置是-2.5217000000095 2022-09-08 16:22:27,732 [Thread=20] INFO - 步进失败 2022-09-08 16:22:27,939 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:27,940 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:27,940 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:27,940 [Thread=19] INFO - 该轴是Z,目标位置是-2.5221000000095 2022-09-08 16:22:27,940 [Thread=19] INFO - 步进失败 2022-09-08 16:22:28,131 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:28,131 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:28,131 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:28,132 [Thread=21] INFO - 该轴是Z,目标位置是-2.5221000000095 2022-09-08 16:22:28,132 [Thread=21] INFO - 步进失败 2022-09-08 16:22:28,324 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:28,324 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:28,324 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:28,324 [Thread=20] INFO - 该轴是Z,目标位置是-2.5225000000095 2022-09-08 16:22:28,325 [Thread=20] INFO - 步进失败 2022-09-08 16:22:28,531 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:28,532 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:28,532 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:28,533 [Thread=19] INFO - 该轴是Z,目标位置是-2.5227000000095 2022-09-08 16:22:28,533 [Thread=19] INFO - 步进失败 2022-09-08 16:22:29,068 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:29,068 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:29,068 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:29,069 [Thread=21] INFO - 该轴是Z,目标位置是-2.5231000000095 2022-09-08 16:22:29,069 [Thread=21] INFO - 步进失败 2022-09-08 16:22:29,675 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:29,676 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:29,676 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:29,676 [Thread=20] INFO - 该轴是Z,目标位置是-2.5233000000095 2022-09-08 16:22:29,676 [Thread=20] INFO - 步进失败 2022-09-08 16:22:29,883 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:29,883 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:29,883 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:29,883 [Thread=19] INFO - 该轴是Z,目标位置是-2.5233000000095 2022-09-08 16:22:29,884 [Thread=19] INFO - 步进失败 2022-09-08 16:22:30,387 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:30,387 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:30,387 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:30,387 [Thread=21] INFO - 该轴是Z,目标位置是-2.5235000000095 2022-09-08 16:22:30,388 [Thread=21] INFO - 步进失败 2022-09-08 16:22:30,779 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:30,779 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:30,779 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:30,780 [Thread=20] INFO - 该轴是Z,目标位置是-2.5239000000095 2022-09-08 16:22:30,780 [Thread=20] INFO - 步进失败 2022-09-08 16:22:30,931 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:30,932 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:30,932 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:30,932 [Thread=19] INFO - 该轴是Z,目标位置是-2.5239000000095 2022-09-08 16:22:30,932 [Thread=19] INFO - 步进失败 2022-09-08 16:22:31,099 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:31,099 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:31,099 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:31,100 [Thread=21] INFO - 该轴是Z,目标位置是-2.5241000000095 2022-09-08 16:22:31,100 [Thread=21] INFO - 步进失败 2022-09-08 16:22:31,298 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:31,299 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:31,299 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:31,299 [Thread=20] INFO - 该轴是Z,目标位置是-2.5241000000095 2022-09-08 16:22:31,299 [Thread=20] INFO - 步进失败 2022-09-08 16:22:31,459 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:31,459 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:31,459 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:31,459 [Thread=19] INFO - 该轴是Z,目标位置是-2.5245000000095 2022-09-08 16:22:31,459 [Thread=19] INFO - 步进失败 2022-09-08 16:22:32,491 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:32,491 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:32,491 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:32,492 [Thread=21] INFO - 该轴是Z,目标位置是-2.5244999999905 2022-09-08 16:22:32,492 [Thread=21] INFO - 步进失败 2022-09-08 16:22:32,667 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:32,667 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:32,668 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:32,668 [Thread=20] INFO - 该轴是Z,目标位置是-2.5244999999905 2022-09-08 16:22:32,668 [Thread=20] INFO - 步进失败 2022-09-08 16:22:32,814 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:32,814 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:32,815 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:32,815 [Thread=19] INFO - 该轴是Z,目标位置是-2.5244999999905 2022-09-08 16:22:32,815 [Thread=19] INFO - 步进失败 2022-09-08 16:22:33,003 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:33,003 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:33,003 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:33,004 [Thread=21] INFO - 该轴是Z,目标位置是-2.5240999999905 2022-09-08 16:22:33,004 [Thread=21] INFO - 步进失败 2022-09-08 16:22:33,179 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:33,179 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:33,179 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:33,179 [Thread=20] INFO - 该轴是Z,目标位置是-2.5240999999905 2022-09-08 16:22:33,179 [Thread=20] INFO - 步进失败 2022-09-08 16:22:33,355 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:33,355 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:33,356 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:33,356 [Thread=19] INFO - 该轴是Z,目标位置是-2.5236999999905 2022-09-08 16:22:33,356 [Thread=19] INFO - 步进失败 2022-09-08 16:22:33,563 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:33,563 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:33,563 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:33,564 [Thread=21] INFO - 该轴是Z,目标位置是-2.5234999999905 2022-09-08 16:22:33,564 [Thread=21] INFO - 步进失败 2022-09-08 16:22:33,731 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:33,732 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:33,732 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:33,732 [Thread=20] INFO - 该轴是Z,目标位置是-2.5234999999905 2022-09-08 16:22:33,732 [Thread=20] INFO - 步进失败 2022-09-08 16:22:34,099 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:34,099 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:34,100 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:34,100 [Thread=19] INFO - 该轴是Z,目标位置是-2.5230999999905 2022-09-08 16:22:34,100 [Thread=19] INFO - 步进失败 2022-09-08 16:22:34,300 [Thread=21] INFO - 单轴触发了 2022-09-08 16:22:34,300 [Thread=21] INFO - 该轴是Z 2022-09-08 16:22:34,300 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:34,301 [Thread=21] INFO - 该轴是Z,目标位置是-2.5228999999905 2022-09-08 16:22:34,301 [Thread=21] INFO - 步进失败 2022-09-08 16:22:34,491 [Thread=20] INFO - 单轴触发了 2022-09-08 16:22:34,491 [Thread=20] INFO - 该轴是Z 2022-09-08 16:22:34,491 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:34,492 [Thread=20] INFO - 该轴是Z,目标位置是-2.5226999999905 2022-09-08 16:22:34,492 [Thread=20] INFO - 步进失败 2022-09-08 16:22:34,683 [Thread=19] INFO - 单轴触发了 2022-09-08 16:22:34,683 [Thread=19] INFO - 该轴是Z 2022-09-08 16:22:34,683 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:22:34,683 [Thread=19] INFO - 该轴是Z,目标位置是-2.5226999999905 2022-09-08 16:22:34,683 [Thread=19] INFO - 步进失败 2022-09-08 16:22:39,493 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:39,554 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0808259413753369 2022-09-08 16:22:39,554 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.48253609196637 2022-09-08 16:22:39,554 [Thread=3] INFO - Measure angle is -0.281681 2022-09-08 16:22:39,558 [Thread=3] INFO - Measure StartPoint:970.436401367188,1047.29907226563, EndPoint:1292.75708007813,1048.8837890625, PixelDistance:322.324574 2022-09-08 16:22:39,558 [Thread=3] INFO - DerivativeMeasure timespan = 3.4048 2022-09-08 16:22:43,420 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:43,477 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.402371887200325 2022-09-08 16:22:43,478 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.461642621024972 2022-09-08 16:22:43,478 [Thread=3] INFO - Measure angle is -0.432007 2022-09-08 16:22:43,481 [Thread=3] INFO - Measure StartPoint:970.534301757813,1006.7373046875, EndPoint:1292.92333984375,1009.16815185547, PixelDistance:322.398202 2022-09-08 16:22:43,481 [Thread=3] INFO - DerivativeMeasure timespan = 3.3162 2022-09-08 16:22:45,243 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:45,298 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.242556975882629 2022-09-08 16:22:45,299 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.320633675938572 2022-09-08 16:22:45,299 [Thread=3] INFO - Measure angle is -0.281595 2022-09-08 16:22:45,306 [Thread=3] INFO - Measure StartPoint:970.39208984375,1056.42431640625, EndPoint:1292.70837402344,1058.00842285156, PixelDistance:322.320177 2022-09-08 16:22:45,306 [Thread=3] INFO - DerivativeMeasure timespan = 7.0444 2022-09-08 16:22:46,948 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:47,022 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.427553911558631 2022-09-08 16:22:47,022 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.0869013342666385 2022-09-08 16:22:47,023 [Thread=3] INFO - Measure angle is -0.257228 2022-09-08 16:22:47,026 [Thread=3] INFO - Measure StartPoint:970.472595214844,1028.14916992188, EndPoint:1292.8486328125,1029.59643554688, PixelDistance:322.379286 2022-09-08 16:22:47,026 [Thread=3] INFO - DerivativeMeasure timespan = 3.6681 2022-09-08 16:22:48,185 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:48,237 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:22:48,237 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:22:48,238 [Thread=7] INFO - Measure angle is 0 2022-09-08 16:22:48,241 [Thread=7] INFO - Measure StartPoint:970.433166503906,1046, EndPoint:1292.75891113281,1046, PixelDistance:322.325745 2022-09-08 16:22:48,241 [Thread=7] INFO - DerivativeMeasure timespan = 3.2469 2022-09-08 16:22:49,419 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:49,466 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:22:49,466 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.57538251787185 2022-09-08 16:22:49,466 [Thread=7] INFO - Measure angle is -0.287691 2022-09-08 16:22:49,469 [Thread=7] INFO - Measure StartPoint:970.401062011719,1059.06298828125, EndPoint:1292.70959472656,1060.68139648438, PixelDistance:322.312596 2022-09-08 16:22:49,469 [Thread=7] INFO - DerivativeMeasure timespan = 2.5331 2022-09-08 16:22:50,634 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:50,684 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:22:50,684 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.737307038732966 2022-09-08 16:22:50,684 [Thread=7] INFO - Measure angle is -0.368654 2022-09-08 16:22:50,687 [Thread=7] INFO - Measure StartPoint:970.444641113281,1047.51647949219, EndPoint:1292.73010253906,1049.59020996094, PixelDistance:322.292133 2022-09-08 16:22:50,687 [Thread=7] INFO - DerivativeMeasure timespan = 3.4087 2022-09-08 16:22:52,766 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:52,813 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:22:52,814 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:22:52,814 [Thread=7] INFO - Measure angle is 0 2022-09-08 16:22:52,818 [Thread=7] INFO - Measure StartPoint:970.404113769531,1059, EndPoint:1292.73059082031,1059, PixelDistance:322.326477 2022-09-08 16:22:52,818 [Thread=7] INFO - DerivativeMeasure timespan = 4.2272 2022-09-08 16:22:54,035 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:22:54,082 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.457198645487527 2022-09-08 16:22:54,082 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.357543010969465 2022-09-08 16:22:54,082 [Thread=7] INFO - Measure angle is -0.407371 2022-09-08 16:22:54,085 [Thread=7] INFO - Measure StartPoint:970.565979003906,983.738403320313, EndPoint:1293.03125,986.031188964844, PixelDistance:322.473422 2022-09-08 16:22:54,085 [Thread=7] INFO - DerivativeMeasure timespan = 2.9367 2022-09-08 16:24:22,353 [Thread=21] INFO - 单轴触发了 2022-09-08 16:24:22,353 [Thread=21] INFO - 该轴是Z 2022-09-08 16:24:22,353 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:24:22,353 [Thread=21] INFO - 该轴是Z,目标位置是-2.5225000000095 2022-09-08 16:24:22,353 [Thread=21] INFO - 步进失败 2022-09-08 16:24:22,545 [Thread=20] INFO - 单轴触发了 2022-09-08 16:24:22,545 [Thread=20] INFO - 该轴是Z 2022-09-08 16:24:22,545 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:24:22,546 [Thread=20] INFO - 该轴是Z,目标位置是-2.5225000000095 2022-09-08 16:24:22,546 [Thread=20] INFO - 步进失败 2022-09-08 16:24:24,343 [Thread=19] INFO - 单轴触发了 2022-09-08 16:24:24,343 [Thread=19] INFO - 该轴是Z 2022-09-08 16:24:24,343 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:24:24,344 [Thread=19] INFO - 该轴是Z,目标位置是-2.5224999999905 2022-09-08 16:24:24,344 [Thread=19] INFO - 步进失败 2022-09-08 16:24:24,537 [Thread=21] INFO - 单轴触发了 2022-09-08 16:24:24,537 [Thread=21] INFO - 该轴是Z 2022-09-08 16:24:24,537 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:24:24,537 [Thread=21] INFO - 该轴是Z,目标位置是-2.5224999999905 2022-09-08 16:24:24,538 [Thread=21] INFO - 步进失败 2022-09-08 16:24:24,720 [Thread=20] INFO - 单轴触发了 2022-09-08 16:24:24,720 [Thread=20] INFO - 该轴是Z 2022-09-08 16:24:24,720 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:24:24,721 [Thread=20] INFO - 该轴是Z,目标位置是-2.5222999999905 2022-09-08 16:24:24,721 [Thread=20] INFO - 步进失败 2022-09-08 16:24:25,024 [Thread=19] INFO - 单轴触发了 2022-09-08 16:24:25,024 [Thread=19] INFO - 该轴是Z 2022-09-08 16:24:25,024 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:24:25,025 [Thread=19] INFO - 该轴是Z,目标位置是-2.5218999999905 2022-09-08 16:24:25,025 [Thread=19] INFO - 步进失败 2022-09-08 16:24:26,549 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:24:26,616 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.298383109092451 2022-09-08 16:24:26,616 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.0567291230736003 2022-09-08 16:24:26,616 [Thread=28] INFO - Measure angle is -0.177556 2022-09-08 16:24:26,626 [Thread=28] INFO - Measure StartPoint:969.497497558594,1003.55529785156, EndPoint:1292.22204589844,1004.55541992188, PixelDistance:322.726098 2022-09-08 16:24:26,626 [Thread=28] INFO - DerivativeMeasure timespan = 9.7739 2022-09-08 16:24:27,493 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:24:27,548 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.061339322811822 2022-09-08 16:24:27,548 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.302606139745554 2022-09-08 16:24:27,548 [Thread=28] INFO - Measure angle is -0.181973 2022-09-08 16:24:27,562 [Thread=28] INFO - Measure StartPoint:969.490173339844,1002.55688476563, EndPoint:1292.22839355469,1003.58190917969, PixelDistance:322.739848 2022-09-08 16:24:27,562 [Thread=28] INFO - DerivativeMeasure timespan = 13.7389 2022-09-08 16:24:28,407 [Thread=28] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:24:28,469 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.00207462505717375 2022-09-08 16:24:28,469 [Thread=28] INFO - SetDerivativeMeasureParameters: Deg = 0.164119116663987 2022-09-08 16:24:28,469 [Thread=28] INFO - Measure angle is -0.083097 2022-09-08 16:24:28,479 [Thread=28] INFO - Measure StartPoint:969.433837890625,1000.71923828125, EndPoint:1292.28833007813,1001.1875, PixelDistance:322.854832 2022-09-08 16:24:28,479 [Thread=28] INFO - DerivativeMeasure timespan = 9.6497 2022-09-08 16:25:10,132 [Thread=21] INFO - 单轴触发了 2022-09-08 16:25:10,132 [Thread=21] INFO - 该轴是Z 2022-09-08 16:25:10,132 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:10,133 [Thread=21] INFO - 该轴是Z,目标位置是-2.5216999999905 2022-09-08 16:25:10,133 [Thread=21] INFO - 步进失败 2022-09-08 16:25:10,317 [Thread=20] INFO - 单轴触发了 2022-09-08 16:25:10,318 [Thread=20] INFO - 该轴是Z 2022-09-08 16:25:10,318 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:10,318 [Thread=20] INFO - 该轴是Z,目标位置是-2.5214999999905 2022-09-08 16:25:10,319 [Thread=20] INFO - 步进失败 2022-09-08 16:25:10,492 [Thread=19] INFO - 单轴触发了 2022-09-08 16:25:10,492 [Thread=19] INFO - 该轴是Z 2022-09-08 16:25:10,492 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:10,493 [Thread=19] INFO - 该轴是Z,目标位置是-2.5214999999905 2022-09-08 16:25:10,493 [Thread=19] INFO - 步进失败 2022-09-08 16:25:10,924 [Thread=21] INFO - 单轴触发了 2022-09-08 16:25:10,924 [Thread=21] INFO - 该轴是Z 2022-09-08 16:25:10,925 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:10,925 [Thread=21] INFO - 该轴是Z,目标位置是-2.5210999999905 2022-09-08 16:25:10,925 [Thread=21] INFO - 步进失败 2022-09-08 16:25:11,114 [Thread=20] INFO - 单轴触发了 2022-09-08 16:25:11,114 [Thread=20] INFO - 该轴是Z 2022-09-08 16:25:11,114 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:11,115 [Thread=20] INFO - 该轴是Z,目标位置是-2.5210999999905 2022-09-08 16:25:11,115 [Thread=20] INFO - 步进失败 2022-09-08 16:25:11,300 [Thread=19] INFO - 单轴触发了 2022-09-08 16:25:11,300 [Thread=19] INFO - 该轴是Z 2022-09-08 16:25:11,301 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:11,301 [Thread=19] INFO - 该轴是Z,目标位置是-2.5206999999905 2022-09-08 16:25:11,301 [Thread=19] INFO - 步进失败 2022-09-08 16:25:11,550 [Thread=21] INFO - 单轴触发了 2022-09-08 16:25:11,550 [Thread=21] INFO - 该轴是Z 2022-09-08 16:25:11,550 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:11,550 [Thread=21] INFO - 该轴是Z,目标位置是-2.5206999999905 2022-09-08 16:25:11,551 [Thread=21] INFO - 步进失败 2022-09-08 16:25:12,550 [Thread=20] INFO - 单轴触发了 2022-09-08 16:25:12,550 [Thread=20] INFO - 该轴是Z 2022-09-08 16:25:12,550 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:12,551 [Thread=20] INFO - 该轴是Z,目标位置是-2.5207000000095 2022-09-08 16:25:12,551 [Thread=20] INFO - 步进失败 2022-09-08 16:25:12,758 [Thread=19] INFO - 单轴触发了 2022-09-08 16:25:12,758 [Thread=19] INFO - 该轴是Z 2022-09-08 16:25:12,758 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:12,759 [Thread=19] INFO - 该轴是Z,目标位置是-2.5207000000095 2022-09-08 16:25:12,759 [Thread=19] INFO - 步进失败 2022-09-08 16:25:12,925 [Thread=21] INFO - 单轴触发了 2022-09-08 16:25:12,925 [Thread=21] INFO - 该轴是Z 2022-09-08 16:25:12,925 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:12,926 [Thread=21] INFO - 该轴是Z,目标位置是-2.5209000000095 2022-09-08 16:25:12,926 [Thread=21] INFO - 步进失败 2022-09-08 16:25:13,124 [Thread=20] INFO - 单轴触发了 2022-09-08 16:25:13,124 [Thread=20] INFO - 该轴是Z 2022-09-08 16:25:13,124 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:13,125 [Thread=20] INFO - 该轴是Z,目标位置是-2.5209000000095 2022-09-08 16:25:13,125 [Thread=20] INFO - 步进失败 2022-09-08 16:25:13,308 [Thread=19] INFO - 单轴触发了 2022-09-08 16:25:13,309 [Thread=19] INFO - 该轴是Z 2022-09-08 16:25:13,309 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:13,309 [Thread=19] INFO - 该轴是Z,目标位置是-2.5213000000095 2022-09-08 16:25:13,309 [Thread=19] INFO - 步进失败 2022-09-08 16:25:13,500 [Thread=21] INFO - 单轴触发了 2022-09-08 16:25:13,500 [Thread=21] INFO - 该轴是Z 2022-09-08 16:25:13,500 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:13,501 [Thread=21] INFO - 该轴是Z,目标位置是-2.5217000000095 2022-09-08 16:25:13,501 [Thread=21] INFO - 步进失败 2022-09-08 16:25:13,712 [Thread=20] INFO - 单轴触发了 2022-09-08 16:25:13,712 [Thread=20] INFO - 该轴是Z 2022-09-08 16:25:13,712 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:13,713 [Thread=20] INFO - 该轴是Z,目标位置是-2.5217000000095 2022-09-08 16:25:13,713 [Thread=20] INFO - 步进失败 2022-09-08 16:25:14,068 [Thread=19] INFO - 单轴触发了 2022-09-08 16:25:14,068 [Thread=19] INFO - 该轴是Z 2022-09-08 16:25:14,068 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:14,068 [Thread=19] INFO - 该轴是Z,目标位置是-2.5219000000095 2022-09-08 16:25:14,068 [Thread=19] INFO - 步进失败 2022-09-08 16:25:14,392 [Thread=21] INFO - 单轴触发了 2022-09-08 16:25:14,392 [Thread=21] INFO - 该轴是Z 2022-09-08 16:25:14,392 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:14,392 [Thread=21] INFO - 该轴是Z,目标位置是-2.5223000000095 2022-09-08 16:25:14,393 [Thread=21] INFO - 步进失败 2022-09-08 16:25:15,102 [Thread=20] INFO - 单轴触发了 2022-09-08 16:25:15,102 [Thread=20] INFO - 该轴是Z 2022-09-08 16:25:15,102 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:15,102 [Thread=20] INFO - 该轴是Z,目标位置是-2.5225000000095 2022-09-08 16:25:15,103 [Thread=20] INFO - 步进失败 2022-09-08 16:25:16,894 [Thread=19] INFO - 单轴触发了 2022-09-08 16:25:16,894 [Thread=19] INFO - 该轴是Z 2022-09-08 16:25:16,894 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:25:16,895 [Thread=19] INFO - 该轴是Z,目标位置是-2.5222999999905 2022-09-08 16:25:16,895 [Thread=19] INFO - 步进失败 2022-09-08 16:25:19,248 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:25:19,303 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:19,303 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:19,304 [Thread=16] INFO - Measure angle is 0 2022-09-08 16:25:19,307 [Thread=16] INFO - Measure StartPoint:969.20361328125,995, EndPoint:1291.88745117188,995, PixelDistance:322.683838 2022-09-08 16:25:19,307 [Thread=16] INFO - DerivativeMeasure timespan = 2.8631 2022-09-08 16:25:21,519 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:25:21,569 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:21,570 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.444433499398371 2022-09-08 16:25:21,570 [Thread=16] INFO - Measure angle is -0.222217 2022-09-08 16:25:21,576 [Thread=16] INFO - Measure StartPoint:969.156860351563,1036.28698730469, EndPoint:1291.68920898438,1037.53784179688, PixelDistance:322.534774 2022-09-08 16:25:21,576 [Thread=16] INFO - DerivativeMeasure timespan = 6.4325 2022-09-08 16:25:23,495 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:25:23,549 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:23,549 [Thread=16] INFO - SetDerivativeMeasureParameters: Deg = 0.32890643669027 2022-09-08 16:25:23,549 [Thread=16] INFO - Measure angle is -0.164453 2022-09-08 16:25:23,555 [Thread=16] INFO - Measure StartPoint:969.149597167969,1036.38330078125, EndPoint:1291.70043945313,1037.30908203125, PixelDistance:322.552171 2022-09-08 16:25:23,555 [Thread=16] INFO - DerivativeMeasure timespan = 6.0843 2022-09-08 16:25:38,049 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:25:38,104 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:38,104 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0.397456735041772 2022-09-08 16:25:38,105 [Thread=29] INFO - Measure angle is -0.198728 2022-09-08 16:25:38,122 [Thread=29] INFO - Measure StartPoint:969.202880859375,1011.35900878906, EndPoint:1291.810546875,1012.47796630859, PixelDistance:322.609607 2022-09-08 16:25:38,123 [Thread=29] INFO - DerivativeMeasure timespan = 17.815 2022-09-08 16:25:40,199 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:25:40,256 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:40,256 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:40,256 [Thread=29] INFO - Measure angle is 0 2022-09-08 16:25:40,258 [Thread=29] INFO - Measure StartPoint:969.190856933594,1001, EndPoint:1291.89624023438,1001, PixelDistance:322.705383 2022-09-08 16:25:40,259 [Thread=29] INFO - DerivativeMeasure timespan = 2.6303 2022-09-08 16:25:41,409 [Thread=29] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:25:41,466 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:41,467 [Thread=29] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:25:41,467 [Thread=29] INFO - Measure angle is 0 2022-09-08 16:25:41,468 [Thread=29] INFO - Measure StartPoint:969.049499511719,1107, EndPoint:1291.45385742188,1107, PixelDistance:322.404358 2022-09-08 16:25:41,468 [Thread=29] INFO - DerivativeMeasure timespan = 1.0724 2022-09-08 16:26:43,204 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 16:26:43,207 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 16:26:43,220 [Thread=4] INFO - 单轴触发了 2022-09-08 16:26:43,221 [Thread=4] INFO - 该轴是Z 2022-09-08 16:26:43,221 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:26:43,221 [Thread=4] INFO - 该轴是Z,目标位置是-2.47130000095367 2022-09-08 16:26:43,222 [Thread=4] INFO - 步进失败 2022-09-08 16:26:43,222 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 16:26:43,226 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:26:43,226 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:26:43,226 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:26:43,226 [Thread=4] INFO - 进入getLongth 2022-09-08 16:26:43,226 [Thread=4] INFO - 目标坐标X-7.145162Y87.475093 2022-09-08 16:26:43,226 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:26:43,227 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:26:43,227 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:26:43,227 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:26:43,227 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:26:43,227 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:26:43,227 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:26:43,227 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:26:44,242 [Thread=15] INFO - stageout currentPos:-2.5223, currentVelocity:2, delayTime:1311, point.Z:-0.5 2022-09-08 16:26:44,242 [Thread=15] INFO - stage out homez 2022-09-08 16:26:47,565 [Thread=15] INFO - stage out home ok 2022-09-08 16:26:47,569 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:26:47,569 [Thread=15] INFO - stagein homez 2022-09-08 16:26:47,569 [Thread=15] INFO - stagein home ok 2022-09-08 16:26:47,570 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:26:47,570 [Thread=15] INFO - Longth长度152.4 2022-09-08 16:26:47,570 [Thread=15] INFO - 进入getLongth 2022-09-08 16:26:47,570 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 16:26:47,570 [Thread=15] INFO - 晶圆的大小6 2022-09-08 16:26:47,570 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 16:26:47,570 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:26:47,570 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 16:26:47,571 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 16:26:47,571 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 16:26:47,571 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 16:26:47,572 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 16:26:47,572 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:29:56,200 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 16:29:56,204 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 16:29:56,204 [Thread=27] INFO - 单轴触发了 2022-09-08 16:29:56,204 [Thread=27] INFO - 该轴是Z 2022-09-08 16:29:56,204 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:29:56,205 [Thread=27] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:29:56,205 [Thread=27] INFO - 步进失败 2022-09-08 16:29:56,205 [Thread=27] INFO - SwitchOffsetZ:0 2022-09-08 16:29:56,215 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:29:56,216 [Thread=27] INFO - stagein homez 2022-09-08 16:29:56,216 [Thread=27] INFO - stagein home ok 2022-09-08 16:29:56,216 [Thread=27] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:29:56,216 [Thread=27] INFO - Longth长度127 2022-09-08 16:29:56,217 [Thread=27] INFO - 进入getLongth 2022-09-08 16:29:56,217 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 16:29:56,217 [Thread=27] INFO - 晶圆的大小5 2022-09-08 16:29:56,217 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 16:29:56,217 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:29:56,217 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:29:56,217 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 16:29:56,217 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 16:29:56,217 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:29:56,217 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 16:29:56,217 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:29:57,241 [Thread=4] INFO - stagein currentPos:-0.1714, currentVelocity:2, delayTime:464, point.Z:-0.5 2022-09-08 16:29:57,241 [Thread=4] INFO - stagein homez 2022-09-08 16:29:59,727 [Thread=4] INFO - stagein home ok 2022-09-08 16:29:59,730 [Thread=4] INFO - StageBack: waferSize = 5 2022-09-08 16:29:59,734 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:29:59,734 [Thread=4] INFO - stagein homez 2022-09-08 16:29:59,734 [Thread=4] INFO - stagein home ok 2022-09-08 16:29:59,734 [Thread=4] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:29:59,735 [Thread=4] INFO - Longth长度127 2022-09-08 16:29:59,735 [Thread=4] INFO - 进入getLongth 2022-09-08 16:29:59,735 [Thread=4] INFO - 目标坐标X13.39Y115.2693 2022-09-08 16:29:59,735 [Thread=4] INFO - 晶圆的大小5 2022-09-08 16:29:59,735 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 16:29:59,735 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:29:59,735 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:29:59,735 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 16:29:59,736 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 16:29:59,736 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:29:59,736 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:30:08,283 [Thread=4] INFO - 单轴触发了 2022-09-08 16:30:08,283 [Thread=4] INFO - 该轴是Z 2022-09-08 16:30:08,283 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:08,284 [Thread=4] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 16:30:08,284 [Thread=4] INFO - 步进失败 2022-09-08 16:30:13,847 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:13,847 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:13,847 [Thread=21] INFO - Longth长度127 2022-09-08 16:30:13,847 [Thread=21] INFO - 进入getLongth 2022-09-08 16:30:13,847 [Thread=21] INFO - 目标坐标X3.39Y105.2693 2022-09-08 16:30:13,847 [Thread=21] INFO - 晶圆的大小5 2022-09-08 16:30:13,847 [Thread=21] INFO - 晶圆的宽高127 2022-09-08 16:30:13,848 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:30:13,848 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 16:30:13,848 [Thread=21] INFO - X-安全坐标18.39 2022-09-08 16:30:13,848 [Thread=21] INFO - Y上安全坐标-16.7307 2022-09-08 16:30:13,848 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 16:30:13,848 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 16:30:14,910 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:14,914 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:14,914 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:14,914 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:30:14,914 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:14,914 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:14,914 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:14,914 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:15,683 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:15,687 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:15,688 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:15,688 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:30:15,688 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:15,688 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:15,688 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:15,688 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:16,243 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:16,243 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:16,244 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:16,244 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:16,244 [Thread=20] INFO - 该轴是Y,目标位置是95.2693 2022-09-08 16:30:16,244 [Thread=20] INFO - 步进失败 2022-09-08 16:30:16,244 [Thread=19] INFO - 该轴是Y,目标位置是85.2693 2022-09-08 16:30:16,245 [Thread=19] INFO - 步进失败 2022-09-08 16:30:16,581 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:30:17,997 [Thread=21] INFO - 单轴触发了 2022-09-08 16:30:18,001 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:18,001 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:18,001 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 16:30:18,001 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:18,001 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:18,001 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:18,001 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:18,799 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:18,804 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:18,804 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:18,804 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:30:18,805 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:18,805 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:18,805 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:18,805 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:19,419 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:19,422 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:19,423 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:19,423 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:30:19,423 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:19,423 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:19,423 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:19,423 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:22,201 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:22,201 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:22,202 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:22,202 [Thread=21] INFO - 该轴是Y,目标位置是75.2693 2022-09-08 16:30:22,202 [Thread=21] INFO - 单轴触发了 2022-09-08 16:30:22,201 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:22,202 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:22,202 [Thread=20] INFO - 该轴是Y,目标位置是65.2693 2022-09-08 16:30:22,201 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:22,203 [Thread=19] INFO - 该轴是Y,目标位置是55.2693 2022-09-08 16:30:22,206 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:22,206 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:22,206 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 16:30:22,206 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:22,206 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:22,206 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:22,206 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:22,631 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:22,635 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:22,635 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:22,635 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:30:22,635 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:22,636 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:22,636 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:22,636 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:23,117 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:23,117 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:23,117 [Thread=20] INFO - 该轴是X,目标位置是-6.61 2022-09-08 16:30:23,117 [Thread=20] INFO - 步进失败 2022-09-08 16:30:23,532 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:23,539 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:23,539 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:23,539 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:30:23,539 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:23,539 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:23,539 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:23,539 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:24,123 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:24,128 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:24,128 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:24,128 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:30:24,128 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:24,128 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:24,129 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:24,129 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:24,745 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:24,746 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:24,746 [Thread=19] INFO - 该轴是Y,目标位置是35.2693 2022-09-08 16:30:24,746 [Thread=19] INFO - 步进失败 2022-09-08 16:30:24,746 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:24,746 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:24,746 [Thread=20] INFO - 该轴是Y,目标位置是25.2693 2022-09-08 16:30:24,746 [Thread=20] INFO - 步进失败 2022-09-08 16:30:24,745 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:24,747 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:24,747 [Thread=21] INFO - 该轴是Y,目标位置是45.2693 2022-09-08 16:30:24,747 [Thread=21] INFO - 步进失败 2022-09-08 16:30:25,421 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:25,425 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:25,425 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:25,425 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:30:25,425 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:25,425 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:25,425 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:25,425 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:26,010 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:26,010 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:26,010 [Thread=19] INFO - 该轴是Y,目标位置是15.2693 2022-09-08 16:30:26,010 [Thread=19] INFO - 步进失败 2022-09-08 16:30:26,149 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:26,153 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:26,153 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:26,153 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:30:26,153 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:26,153 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:26,153 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:26,154 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:27,877 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:27,877 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:27,877 [Thread=20] INFO - 该轴是Y,目标位置是5.2693 2022-09-08 16:30:27,877 [Thread=20] INFO - 步进失败 2022-09-08 16:30:31,140 [Thread=21] INFO - 单轴触发了 2022-09-08 16:30:31,143 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:31,143 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:31,143 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 16:30:31,143 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:31,144 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:31,144 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:31,144 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:31,702 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:31,702 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:31,703 [Thread=21] INFO - 该轴是X,目标位置是-11.61 2022-09-08 16:30:31,703 [Thread=21] INFO - 步进失败 2022-09-08 16:30:31,965 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:31,969 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:31,969 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:31,969 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:30:31,969 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:31,969 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:30:31,969 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:30:31,969 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:30:32,852 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:30:32,852 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:30:32,852 [Thread=19] INFO - 该轴是Y,目标位置是10.2693 2022-09-08 16:30:32,852 [Thread=19] INFO - 步进失败 2022-09-08 16:30:33,854 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:30:33,854 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:30:35,143 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:35,143 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:35,143 [Thread=1] INFO - Longth长度127 2022-09-08 16:30:35,143 [Thread=1] INFO - 进入getLongth 2022-09-08 16:30:35,143 [Thread=1] INFO - 目标坐标X-12.670573Y9.229631 2022-09-08 16:30:35,144 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:30:35,144 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:30:35,144 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:30:35,144 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:30:35,144 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:30:35,144 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:30:35,144 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:30:35,144 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:30:37,313 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:37,313 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:37,313 [Thread=1] INFO - Longth长度127 2022-09-08 16:30:37,313 [Thread=1] INFO - 进入getLongth 2022-09-08 16:30:37,313 [Thread=1] INFO - 目标坐标X-13.509809Y8.274808 2022-09-08 16:30:37,314 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:30:37,314 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:30:37,314 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:30:37,314 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:30:37,314 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:30:37,314 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:30:37,314 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:30:37,314 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:30:40,310 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:40,310 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:40,310 [Thread=1] INFO - Longth长度127 2022-09-08 16:30:40,310 [Thread=1] INFO - 进入getLongth 2022-09-08 16:30:40,310 [Thread=1] INFO - 目标坐标X-13.609411Y7.873327 2022-09-08 16:30:40,310 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:30:40,310 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:30:40,311 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:30:40,311 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:30:40,311 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:30:40,311 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:30:40,311 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:30:40,311 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:30:44,387 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:30:44,389 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:30:44,401 [Thread=15] INFO - 单轴触发了 2022-09-08 16:30:44,401 [Thread=15] INFO - 该轴是Z 2022-09-08 16:30:44,401 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:44,402 [Thread=15] INFO - 该轴是Z,目标位置是-7.50449999904633 2022-09-08 16:30:44,402 [Thread=15] INFO - 步进失败 2022-09-08 16:30:44,402 [Thread=15] INFO - SwitchOffsetZ:-0.051 2022-09-08 16:30:44,407 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:44,408 [Thread=15] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:44,408 [Thread=15] INFO - Longth长度127 2022-09-08 16:30:44,408 [Thread=15] INFO - 进入getLongth 2022-09-08 16:30:44,408 [Thread=15] INFO - 目标坐标X-13.666411Y7.792327 2022-09-08 16:30:44,408 [Thread=15] INFO - 晶圆的大小5 2022-09-08 16:30:44,408 [Thread=15] INFO - 晶圆的宽高127 2022-09-08 16:30:44,408 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:30:44,408 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 16:30:44,408 [Thread=15] INFO - X-安全坐标18.39 2022-09-08 16:30:44,408 [Thread=15] INFO - Y上安全坐标-16.7307 2022-09-08 16:30:44,409 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 16:30:44,409 [Thread=15] INFO - 双轴-目标点在范围内 2022-09-08 16:30:46,397 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:30:50,085 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:30:50,085 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:30:50,085 [Thread=1] INFO - Longth长度127 2022-09-08 16:30:50,085 [Thread=1] INFO - 进入getLongth 2022-09-08 16:30:50,085 [Thread=1] INFO - 目标坐标X-13.682908Y7.778067 2022-09-08 16:30:50,085 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:30:50,085 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:30:50,085 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:30:50,086 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:30:50,086 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:30:50,086 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:30:50,086 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:30:50,086 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:30:57,446 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:57,446 [Thread=20] INFO - 该轴是Z 2022-09-08 16:30:57,447 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:57,447 [Thread=20] INFO - 该轴是Z,目标位置是-7.4997000000095 2022-09-08 16:30:57,447 [Thread=20] INFO - 步进失败 2022-09-08 16:30:57,606 [Thread=21] INFO - 单轴触发了 2022-09-08 16:30:57,606 [Thread=21] INFO - 该轴是Z 2022-09-08 16:30:57,607 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:57,607 [Thread=21] INFO - 该轴是Z,目标位置是-7.4997000000095 2022-09-08 16:30:57,607 [Thread=21] INFO - 步进失败 2022-09-08 16:30:57,807 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:57,807 [Thread=19] INFO - 该轴是Z 2022-09-08 16:30:57,807 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:57,808 [Thread=19] INFO - 该轴是Z,目标位置是-7.4999000000095 2022-09-08 16:30:57,808 [Thread=19] INFO - 步进失败 2022-09-08 16:30:57,998 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:57,998 [Thread=20] INFO - 该轴是Z 2022-09-08 16:30:57,999 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:57,999 [Thread=20] INFO - 该轴是Z,目标位置是-7.5003000000095 2022-09-08 16:30:57,999 [Thread=20] INFO - 步进失败 2022-09-08 16:30:58,183 [Thread=21] INFO - 单轴触发了 2022-09-08 16:30:58,183 [Thread=21] INFO - 该轴是Z 2022-09-08 16:30:58,183 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:58,184 [Thread=21] INFO - 该轴是Z,目标位置是-7.5003000000095 2022-09-08 16:30:58,184 [Thread=21] INFO - 步进失败 2022-09-08 16:30:58,384 [Thread=19] INFO - 单轴触发了 2022-09-08 16:30:58,384 [Thread=19] INFO - 该轴是Z 2022-09-08 16:30:58,384 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:58,385 [Thread=19] INFO - 该轴是Z,目标位置是-7.5007000000095 2022-09-08 16:30:58,385 [Thread=19] INFO - 步进失败 2022-09-08 16:30:58,599 [Thread=20] INFO - 单轴触发了 2022-09-08 16:30:58,599 [Thread=20] INFO - 该轴是Z 2022-09-08 16:30:58,599 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:30:58,599 [Thread=20] INFO - 该轴是Z,目标位置是-7.5009000000095 2022-09-08 16:30:58,600 [Thread=20] INFO - 步进失败 2022-09-08 16:31:00,380 [Thread=21] INFO - 单轴触发了 2022-09-08 16:31:00,380 [Thread=21] INFO - 该轴是Z 2022-09-08 16:31:00,381 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:00,381 [Thread=21] INFO - 该轴是Z,目标位置是-7.5011000000095 2022-09-08 16:31:00,381 [Thread=21] INFO - 步进失败 2022-09-08 16:31:03,384 [Thread=19] INFO - 单轴触发了 2022-09-08 16:31:03,384 [Thread=19] INFO - 该轴是Z 2022-09-08 16:31:03,384 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:03,385 [Thread=19] INFO - 该轴是Z,目标位置是-7.5008999999905 2022-09-08 16:31:03,385 [Thread=19] INFO - 步进失败 2022-09-08 16:31:03,526 [Thread=20] INFO - 单轴触发了 2022-09-08 16:31:03,526 [Thread=20] INFO - 该轴是Z 2022-09-08 16:31:03,526 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:03,527 [Thread=20] INFO - 该轴是Z,目标位置是-7.5008999999905 2022-09-08 16:31:03,527 [Thread=20] INFO - 步进失败 2022-09-08 16:31:07,644 [Thread=31] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:31:07,702 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0.184782361845938 2022-09-08 16:31:07,702 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:31:07,702 [Thread=31] INFO - Measure angle is -0.092391 2022-09-08 16:31:07,702 [Thread=31] INFO - Measure StartPoint:1000.39752197266,1030.9619140625, EndPoint:1029.90771484375,1031.00952148438, PixelDistance:29.510231 2022-09-08 16:31:07,702 [Thread=31] INFO - DerivativeMeasure timespan = 0.3513 2022-09-08 16:31:10,626 [Thread=31] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:31:10,683 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0.335036447457512 2022-09-08 16:31:10,683 [Thread=31] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:31:10,683 [Thread=31] INFO - Measure angle is -0.167518 2022-09-08 16:31:10,684 [Thread=31] INFO - Measure StartPoint:1000.40618896484,1028.95727539063, EndPoint:1029.91479492188,1029.04357910156, PixelDistance:29.508732 2022-09-08 16:31:10,684 [Thread=31] INFO - DerivativeMeasure timespan = 0.3432 2022-09-08 16:31:12,389 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:31:12,392 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:31:12,404 [Thread=4] INFO - 单轴触发了 2022-09-08 16:31:12,404 [Thread=4] INFO - 该轴是Z 2022-09-08 16:31:12,404 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:12,405 [Thread=4] INFO - 该轴是Z,目标位置是-7.44970000095367 2022-09-08 16:31:12,405 [Thread=4] INFO - 步进失败 2022-09-08 16:31:12,405 [Thread=4] INFO - SwitchOffsetZ:0.051 2022-09-08 16:31:12,410 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:12,410 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:12,410 [Thread=4] INFO - Longth长度127 2022-09-08 16:31:12,410 [Thread=4] INFO - 进入getLongth 2022-09-08 16:31:12,410 [Thread=4] INFO - 目标坐标X-13.625908Y7.859067 2022-09-08 16:31:12,410 [Thread=4] INFO - 晶圆的大小5 2022-09-08 16:31:12,410 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 16:31:12,410 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:12,411 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:31:12,411 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 16:31:12,411 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:12,411 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:31:12,411 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:31:14,621 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:31:14,622 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:31:16,204 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:16,204 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:16,204 [Thread=1] INFO - Longth长度127 2022-09-08 16:31:16,205 [Thread=1] INFO - 进入getLongth 2022-09-08 16:31:16,205 [Thread=1] INFO - 目标坐标X-14.544456Y7.843696 2022-09-08 16:31:16,205 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:31:16,205 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:31:16,205 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:16,205 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:31:16,205 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:31:16,205 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:16,205 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:31:16,205 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:31:19,364 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:19,364 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:19,364 [Thread=1] INFO - Longth长度127 2022-09-08 16:31:19,364 [Thread=1] INFO - 进入getLongth 2022-09-08 16:31:19,364 [Thread=1] INFO - 目标坐标X-14.467603Y7.893497 2022-09-08 16:31:19,365 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:31:19,365 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:31:19,365 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:19,365 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:31:19,365 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:31:19,365 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:19,365 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:31:19,365 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:31:21,453 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:31:21,456 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:31:21,468 [Thread=11] INFO - 单轴触发了 2022-09-08 16:31:21,468 [Thread=11] INFO - 该轴是Z 2022-09-08 16:31:21,468 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:21,468 [Thread=11] INFO - 该轴是Z,目标位置是-7.50089999904633 2022-09-08 16:31:21,469 [Thread=11] INFO - 步进失败 2022-09-08 16:31:21,469 [Thread=11] INFO - SwitchOffsetZ:-0.051 2022-09-08 16:31:21,473 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:21,473 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:21,473 [Thread=11] INFO - Longth长度127 2022-09-08 16:31:21,473 [Thread=11] INFO - 进入getLongth 2022-09-08 16:31:21,473 [Thread=11] INFO - 目标坐标X-14.524603Y7.812497 2022-09-08 16:31:21,473 [Thread=11] INFO - 晶圆的大小5 2022-09-08 16:31:21,473 [Thread=11] INFO - 晶圆的宽高127 2022-09-08 16:31:21,473 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:21,474 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:31:21,474 [Thread=11] INFO - X-安全坐标18.39 2022-09-08 16:31:21,474 [Thread=11] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:21,474 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:31:21,474 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:31:22,165 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:31:24,274 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:24,275 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:24,275 [Thread=1] INFO - Longth长度127 2022-09-08 16:31:24,275 [Thread=1] INFO - 进入getLongth 2022-09-08 16:31:24,275 [Thread=1] INFO - 目标坐标X-14.524883Y7.7695 2022-09-08 16:31:24,275 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:31:24,275 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:31:24,275 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:24,275 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:31:24,275 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:31:24,275 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:24,275 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:31:24,276 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:31:26,507 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:26,507 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:26,507 [Thread=1] INFO - Longth长度127 2022-09-08 16:31:26,507 [Thread=1] INFO - 进入getLongth 2022-09-08 16:31:26,507 [Thread=1] INFO - 目标坐标X-14.530599Y7.770277 2022-09-08 16:31:26,508 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:31:26,508 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:31:26,508 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:26,508 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:31:26,508 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:31:26,508 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:26,508 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:31:26,508 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:31:29,202 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:29,203 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:29,203 [Thread=1] INFO - Longth长度127 2022-09-08 16:31:29,203 [Thread=1] INFO - 进入getLongth 2022-09-08 16:31:29,203 [Thread=1] INFO - 目标坐标X-14.531935Y7.769128 2022-09-08 16:31:29,203 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:31:29,203 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:31:29,203 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:29,204 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:31:29,204 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:31:29,204 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:29,204 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:31:29,204 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:31:31,738 [Thread=21] INFO - 单轴触发了 2022-09-08 16:31:31,739 [Thread=21] INFO - 该轴是Z 2022-09-08 16:31:31,739 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:31,739 [Thread=21] INFO - 该轴是Z,目标位置是-7.5009000000095 2022-09-08 16:31:31,740 [Thread=21] INFO - 步进失败 2022-09-08 16:31:31,916 [Thread=19] INFO - 单轴触发了 2022-09-08 16:31:31,916 [Thread=19] INFO - 该轴是Z 2022-09-08 16:31:31,916 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:31,917 [Thread=19] INFO - 该轴是Z,目标位置是-7.5009000000095 2022-09-08 16:31:31,917 [Thread=19] INFO - 步进失败 2022-09-08 16:31:32,116 [Thread=20] INFO - 单轴触发了 2022-09-08 16:31:32,116 [Thread=20] INFO - 该轴是Z 2022-09-08 16:31:32,116 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:32,117 [Thread=20] INFO - 该轴是Z,目标位置是-7.5013000000095 2022-09-08 16:31:32,117 [Thread=20] INFO - 步进失败 2022-09-08 16:31:32,308 [Thread=21] INFO - 单轴触发了 2022-09-08 16:31:32,309 [Thread=21] INFO - 该轴是Z 2022-09-08 16:31:32,309 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:32,309 [Thread=21] INFO - 该轴是Z,目标位置是-7.5013000000095 2022-09-08 16:31:32,309 [Thread=21] INFO - 步进失败 2022-09-08 16:31:32,527 [Thread=19] INFO - 单轴触发了 2022-09-08 16:31:32,527 [Thread=19] INFO - 该轴是Z 2022-09-08 16:31:32,527 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:32,527 [Thread=19] INFO - 该轴是Z,目标位置是-7.5017000000095 2022-09-08 16:31:32,528 [Thread=19] INFO - 步进失败 2022-09-08 16:31:37,134 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:31:37,185 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0.0988165585094967 2022-09-08 16:31:37,186 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:31:37,186 [Thread=15] INFO - Measure angle is -0.049408 2022-09-08 16:31:37,187 [Thread=15] INFO - Measure StartPoint:993.670227050781,1041.97216796875, EndPoint:1055.59094238281,1042.02551269531, PixelDistance:61.920738 2022-09-08 16:31:37,187 [Thread=15] INFO - DerivativeMeasure timespan = 1.0645 2022-09-08 16:31:38,821 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:31:38,869 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0.0590837492701801 2022-09-08 16:31:38,869 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:31:38,869 [Thread=15] INFO - Measure angle is -0.029542 2022-09-08 16:31:38,870 [Thread=15] INFO - Measure StartPoint:993.671875,1045.98486328125, EndPoint:1055.63732910156,1046.01684570313, PixelDistance:61.965462 2022-09-08 16:31:38,870 [Thread=15] INFO - DerivativeMeasure timespan = 0.7285 2022-09-08 16:31:39,807 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:31:39,862 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.135391415028705 2022-09-08 16:31:39,862 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.119440846408634 2022-09-08 16:31:39,862 [Thread=7] INFO - Measure angle is -0.127416 2022-09-08 16:31:39,863 [Thread=7] INFO - Measure StartPoint:993.934997558594,944.9287109375, EndPoint:1056.0283203125,945.066772460938, PixelDistance:62.093476 2022-09-08 16:31:39,863 [Thread=7] INFO - DerivativeMeasure timespan = 1.3008 2022-09-08 16:31:41,263 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:31:41,316 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.0653730017367081 2022-09-08 16:31:41,316 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 16:31:41,316 [Thread=7] INFO - Measure angle is -0.032687 2022-09-08 16:31:41,317 [Thread=7] INFO - Measure StartPoint:993.838073730469,983.978820800781, EndPoint:1055.84790039063,984.01416015625, PixelDistance:62.009837 2022-09-08 16:31:41,318 [Thread=7] INFO - DerivativeMeasure timespan = 1.4314 2022-09-08 16:31:47,555 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:31:47,558 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:31:47,572 [Thread=27] INFO - 单轴触发了 2022-09-08 16:31:47,573 [Thread=27] INFO - 该轴是Z 2022-09-08 16:31:47,573 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:47,573 [Thread=27] INFO - 该轴是Z,目标位置是-7.45070000095367 2022-09-08 16:31:47,573 [Thread=27] INFO - 步进失败 2022-09-08 16:31:47,574 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 16:31:47,577 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:47,577 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:47,577 [Thread=27] INFO - Longth长度127 2022-09-08 16:31:47,578 [Thread=27] INFO - 进入getLongth 2022-09-08 16:31:47,578 [Thread=27] INFO - 目标坐标X-14.474935Y7.850128 2022-09-08 16:31:47,578 [Thread=27] INFO - 晶圆的大小5 2022-09-08 16:31:47,578 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 16:31:47,578 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:47,578 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:31:47,578 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 16:31:47,578 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:47,578 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:31:47,578 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:31:53,060 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 16:31:53,062 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 16:31:53,062 [Thread=11] INFO - 单轴触发了 2022-09-08 16:31:53,063 [Thread=11] INFO - 该轴是Z 2022-09-08 16:31:53,063 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:31:53,063 [Thread=11] INFO - 该轴是Z,目标位置是-7.4509 2022-09-08 16:31:53,063 [Thread=11] INFO - 步进失败 2022-09-08 16:31:53,063 [Thread=11] INFO - SwitchOffsetZ:0 2022-09-08 16:31:53,068 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:31:53,069 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:31:53,069 [Thread=11] INFO - Longth长度127 2022-09-08 16:31:53,069 [Thread=11] INFO - 进入getLongth 2022-09-08 16:31:53,069 [Thread=11] INFO - 目标坐标X-14.474935Y7.850128 2022-09-08 16:31:53,069 [Thread=11] INFO - 晶圆的大小5 2022-09-08 16:31:53,070 [Thread=11] INFO - 晶圆的宽高127 2022-09-08 16:31:53,070 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:53,070 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:31:53,070 [Thread=11] INFO - X-安全坐标18.39 2022-09-08 16:31:53,070 [Thread=11] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:53,070 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:31:53,070 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:31:54,070 [Thread=4] INFO - stageout currentPos:-7.4509, currentVelocity:2, delayTime:3775, point.Z:-0.5 2022-09-08 16:31:54,070 [Thread=4] INFO - stage out homez 2022-09-08 16:31:59,863 [Thread=4] INFO - stage out home ok 2022-09-08 16:31:59,866 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:31:59,866 [Thread=4] INFO - stagein homez 2022-09-08 16:31:59,867 [Thread=4] INFO - stagein home ok 2022-09-08 16:31:59,867 [Thread=4] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:31:59,867 [Thread=4] INFO - Longth长度127 2022-09-08 16:31:59,867 [Thread=4] INFO - 进入getLongth 2022-09-08 16:31:59,867 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 16:31:59,867 [Thread=4] INFO - 晶圆的大小5 2022-09-08 16:31:59,867 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 16:31:59,868 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:31:59,868 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:31:59,868 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 16:31:59,868 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 16:31:59,868 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:31:59,868 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 16:31:59,868 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:42:50,892 [Thread=6] INFO - SwitchIndex index:0 2022-09-08 16:42:50,896 [Thread=6] INFO - Switch Lens:Broadcast Event 2022-09-08 16:42:50,896 [Thread=4] INFO - 单轴触发了 2022-09-08 16:42:50,896 [Thread=4] INFO - 该轴是Z 2022-09-08 16:42:50,896 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:42:50,897 [Thread=4] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:42:50,897 [Thread=4] INFO - 步进失败 2022-09-08 16:42:50,897 [Thread=4] INFO - SwitchOffsetZ:0 2022-09-08 16:42:50,903 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:42:50,903 [Thread=4] INFO - stagein homez 2022-09-08 16:42:50,903 [Thread=4] INFO - stagein home ok 2022-09-08 16:42:50,904 [Thread=4] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:42:50,904 [Thread=4] INFO - Longth长度127 2022-09-08 16:42:50,904 [Thread=4] INFO - 进入getLongth 2022-09-08 16:42:50,904 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 16:42:50,904 [Thread=4] INFO - 晶圆的大小5 2022-09-08 16:42:50,904 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 16:42:50,904 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:42:50,904 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:42:50,904 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 16:42:50,905 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 16:42:50,905 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:42:50,905 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 16:42:50,905 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:42:51,934 [Thread=6] INFO - stagein currentPos:-0.1079, currentVelocity:2, delayTime:496, point.Z:-0.5 2022-09-08 16:42:51,934 [Thread=6] INFO - stagein homez 2022-09-08 16:42:54,448 [Thread=6] INFO - stagein home ok 2022-09-08 16:42:54,450 [Thread=6] INFO - StageBack: waferSize = 5 2022-09-08 16:42:54,453 [Thread=6] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:42:54,454 [Thread=6] INFO - stagein homez 2022-09-08 16:42:54,454 [Thread=6] INFO - stagein home ok 2022-09-08 16:42:54,454 [Thread=6] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:42:54,454 [Thread=6] INFO - Longth长度127 2022-09-08 16:42:54,455 [Thread=6] INFO - 进入getLongth 2022-09-08 16:42:54,455 [Thread=6] INFO - 目标坐标X13.39Y115.2693 2022-09-08 16:42:54,455 [Thread=6] INFO - 晶圆的大小5 2022-09-08 16:42:54,455 [Thread=6] INFO - 晶圆的宽高127 2022-09-08 16:42:54,455 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:42:54,455 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:42:54,455 [Thread=6] INFO - X-安全坐标18.39 2022-09-08 16:42:54,455 [Thread=6] INFO - Y上安全坐标-16.7307 2022-09-08 16:42:54,455 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:42:54,455 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:43:01,545 [Thread=6] INFO - 单轴触发了 2022-09-08 16:43:01,546 [Thread=6] INFO - 该轴是Z 2022-09-08 16:43:01,546 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:43:01,546 [Thread=6] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 16:43:01,546 [Thread=6] INFO - 步进失败 2022-09-08 16:43:10,700 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:43:10,701 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:43:10,701 [Thread=1] INFO - Longth长度127 2022-09-08 16:43:10,701 [Thread=1] INFO - 进入getLongth 2022-09-08 16:43:10,701 [Thread=1] INFO - 目标坐标X-17.662Y22.8193 2022-09-08 16:43:10,701 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:43:10,701 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:43:10,701 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:10,701 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:43:10,701 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:43:10,701 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:10,702 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:43:10,702 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:43:15,802 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:43:15,909 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 16:43:16,794 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:43:16,795 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:43:19,343 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:43:19,343 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:43:19,343 [Thread=1] INFO - Longth长度127 2022-09-08 16:43:19,343 [Thread=1] INFO - 进入getLongth 2022-09-08 16:43:19,343 [Thread=1] INFO - 目标坐标X-18.131111Y22.767655 2022-09-08 16:43:19,344 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:43:19,344 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:43:19,344 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:19,344 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:43:19,344 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:43:19,344 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:19,344 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:43:19,344 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:43:22,343 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:43:22,346 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:43:22,359 [Thread=27] INFO - 单轴触发了 2022-09-08 16:43:22,359 [Thread=27] INFO - 该轴是Z 2022-09-08 16:43:22,359 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:43:22,360 [Thread=27] INFO - 该轴是Z,目标位置是-7.53760000138283 2022-09-08 16:43:22,360 [Thread=27] INFO - 步进失败 2022-09-08 16:43:22,360 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:43:22,364 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:43:22,365 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:43:22,365 [Thread=27] INFO - Longth长度127 2022-09-08 16:43:22,365 [Thread=27] INFO - 进入getLongth 2022-09-08 16:43:22,365 [Thread=27] INFO - 目标坐标X-18.178111Y22.689655 2022-09-08 16:43:22,365 [Thread=27] INFO - 晶圆的大小5 2022-09-08 16:43:22,365 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 16:43:22,365 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:22,365 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:43:22,365 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 16:43:22,366 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:22,366 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:43:22,366 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:43:24,359 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:43:25,308 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:43:25,308 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:43:25,308 [Thread=1] INFO - Longth长度127 2022-09-08 16:43:25,308 [Thread=1] INFO - 进入getLongth 2022-09-08 16:43:25,309 [Thread=1] INFO - 目标坐标X-18.218243Y22.680723 2022-09-08 16:43:25,309 [Thread=1] INFO - 晶圆的大小5 2022-09-08 16:43:25,309 [Thread=1] INFO - 晶圆的宽高127 2022-09-08 16:43:25,309 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:25,309 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:43:25,309 [Thread=1] INFO - X-安全坐标18.39 2022-09-08 16:43:25,309 [Thread=1] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:25,309 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:43:25,309 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:43:27,888 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:43:27,891 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:43:27,902 [Thread=13] INFO - 单轴触发了 2022-09-08 16:43:27,902 [Thread=13] INFO - 该轴是Z 2022-09-08 16:43:27,902 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:43:27,903 [Thread=13] INFO - 该轴是Z,目标位置是-7.5310999976635 2022-09-08 16:43:27,903 [Thread=13] INFO - 步进失败 2022-09-08 16:43:27,903 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:43:27,908 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:43:27,908 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:43:27,908 [Thread=13] INFO - Longth长度127 2022-09-08 16:43:27,908 [Thread=13] INFO - 进入getLongth 2022-09-08 16:43:27,908 [Thread=13] INFO - 目标坐标X-18.228243Y22.677723 2022-09-08 16:43:27,908 [Thread=13] INFO - 晶圆的大小5 2022-09-08 16:43:27,909 [Thread=13] INFO - 晶圆的宽高127 2022-09-08 16:43:27,909 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:27,909 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:43:27,909 [Thread=13] INFO - X-安全坐标18.39 2022-09-08 16:43:27,909 [Thread=13] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:27,909 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:43:27,909 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:43:29,908 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:43:33,267 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:43:33,323 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.0437189008615 2022-09-08 16:43:33,323 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.1837521479142 2022-09-08 16:43:33,323 [Thread=11] INFO - Measure angle is -90.113736 2022-09-08 16:43:33,333 [Thread=11] INFO - Measure StartPoint:1049.95471191406,479.074035644531, EndPoint:1048.02526855469,1451.05029296875, PixelDistance:971.978172 2022-09-08 16:43:33,333 [Thread=11] INFO - DerivativeMeasure timespan = 9.5851 2022-09-08 16:43:34,619 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:43:34,668 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.2694134162791 2022-09-08 16:43:34,668 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.2747610930199 2022-09-08 16:43:34,668 [Thread=11] INFO - Measure angle is -90.272087 2022-09-08 16:43:34,676 [Thread=11] INFO - Measure StartPoint:1041.30786132813,479.012817382813, EndPoint:1036.69201660156,1450.99829101563, PixelDistance:971.996434 2022-09-08 16:43:34,676 [Thread=11] INFO - DerivativeMeasure timespan = 7.5495 2022-09-08 16:43:36,867 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:43:36,924 [Thread=11] INFO - SetDerivativeMeasureParameters: Deg = 90.3464470661462 2022-09-08 16:43:36,924 [Thread=11] INFO - Measure angle is -90.346447 2022-09-08 16:43:36,937 [Thread=11] INFO - Measure StartPoint:1043.25256347656,479.095977783203, EndPoint:1037.37561035156,1451.01318359375, PixelDistance:971.934974 2022-09-08 16:43:36,937 [Thread=11] INFO - DerivativeMeasure timespan = 12.5675 2022-09-08 16:43:39,422 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 16:43:39,425 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 16:43:39,437 [Thread=27] INFO - 单轴触发了 2022-09-08 16:43:39,437 [Thread=27] INFO - 该轴是Z 2022-09-08 16:43:39,437 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:43:39,438 [Thread=27] INFO - 该轴是Z,目标位置是-7.47790000095367 2022-09-08 16:43:39,438 [Thread=27] INFO - 步进失败 2022-09-08 16:43:39,438 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 16:43:39,442 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:43:39,442 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:43:39,443 [Thread=27] INFO - Longth长度127 2022-09-08 16:43:39,443 [Thread=27] INFO - 进入getLongth 2022-09-08 16:43:39,444 [Thread=27] INFO - 目标坐标X-18.171243Y22.758723 2022-09-08 16:43:39,444 [Thread=27] INFO - 晶圆的大小5 2022-09-08 16:43:39,444 [Thread=27] INFO - 晶圆的宽高127 2022-09-08 16:43:39,445 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:39,445 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:43:39,445 [Thread=27] INFO - X-安全坐标18.39 2022-09-08 16:43:39,445 [Thread=27] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:39,445 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:43:39,445 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:43:41,016 [Thread=4] INFO - stageout currentPos:-7.4781, currentVelocity:2, delayTime:3789, point.Z:-0.5 2022-09-08 16:43:41,017 [Thread=4] INFO - stage out homez 2022-09-08 16:43:46,808 [Thread=4] INFO - stage out home ok 2022-09-08 16:43:46,824 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:43:46,824 [Thread=4] INFO - stagein homez 2022-09-08 16:43:46,825 [Thread=4] INFO - stagein home ok 2022-09-08 16:43:46,825 [Thread=4] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:43:46,825 [Thread=4] INFO - Longth长度127 2022-09-08 16:43:46,825 [Thread=4] INFO - 进入getLongth 2022-09-08 16:43:46,825 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 16:43:46,825 [Thread=4] INFO - 晶圆的大小5 2022-09-08 16:43:46,825 [Thread=4] INFO - 晶圆的宽高127 2022-09-08 16:43:46,825 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:43:46,825 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:43:46,825 [Thread=4] INFO - X-安全坐标18.39 2022-09-08 16:43:46,826 [Thread=4] INFO - Y上安全坐标-16.7307 2022-09-08 16:43:46,826 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:43:46,826 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 16:43:46,826 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:44:42,468 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 16:44:42,471 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 16:44:42,471 [Thread=6] INFO - 单轴触发了 2022-09-08 16:44:42,472 [Thread=6] INFO - 该轴是Z 2022-09-08 16:44:42,472 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:44:42,472 [Thread=6] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:44:42,473 [Thread=6] INFO - 步进失败 2022-09-08 16:44:42,473 [Thread=6] INFO - SwitchOffsetZ:0 2022-09-08 16:44:42,479 [Thread=6] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:44:42,481 [Thread=6] INFO - stagein homez 2022-09-08 16:44:42,481 [Thread=6] INFO - stagein home ok 2022-09-08 16:44:42,481 [Thread=6] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:44:42,481 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:44:42,481 [Thread=6] INFO - 进入getLongth 2022-09-08 16:44:42,481 [Thread=6] INFO - 目标坐标X-100Y-90 2022-09-08 16:44:42,481 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:44:42,482 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:44:42,482 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:44:42,482 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:44:42,482 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:44:42,482 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:44:42,482 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:44:42,482 [Thread=6] INFO - 双轴-目标点不在范围内 2022-09-08 16:44:42,482 [Thread=6] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:44:43,496 [Thread=13] INFO - stagein currentPos:0.049, currentVelocity:2, delayTime:574, point.Z:-0.5 2022-09-08 16:44:43,496 [Thread=13] INFO - stagein homez 2022-09-08 16:44:46,099 [Thread=13] INFO - stagein home ok 2022-09-08 16:44:46,106 [Thread=13] INFO - StageBack: waferSize = 6 2022-09-08 16:44:46,112 [Thread=13] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:44:46,113 [Thread=13] INFO - stagein homez 2022-09-08 16:44:46,113 [Thread=13] INFO - stagein home ok 2022-09-08 16:44:46,113 [Thread=13] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:44:46,113 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:44:46,113 [Thread=13] INFO - 进入getLongth 2022-09-08 16:44:46,113 [Thread=13] INFO - 目标坐标X38.79Y115.2693 2022-09-08 16:44:46,114 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:44:46,114 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:44:46,114 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:44:46,114 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:44:46,114 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:44:46,114 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:44:46,114 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:44:46,115 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:44:53,809 [Thread=13] INFO - 单轴触发了 2022-09-08 16:44:53,809 [Thread=13] INFO - 该轴是Z 2022-09-08 16:44:53,809 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:44:53,809 [Thread=13] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 16:44:53,809 [Thread=13] INFO - 步进失败 2022-09-08 16:45:05,126 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:45:05,126 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:45:05,126 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:45:05,127 [Thread=1] INFO - 进入getLongth 2022-09-08 16:45:05,127 [Thread=1] INFO - 目标坐标X-29.219Y73.6583 2022-09-08 16:45:05,127 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:45:05,127 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:45:05,127 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:45:05,127 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:45:05,127 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:45:05,127 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:45:05,127 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:45:05,127 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:45:10,144 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:45:10,253 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 16:45:13,276 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:45:13,276 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:45:17,194 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:45:17,194 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:45:17,194 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:45:17,194 [Thread=1] INFO - 进入getLongth 2022-09-08 16:45:17,195 [Thread=1] INFO - 目标坐标X-29.613103Y73.526113 2022-09-08 16:45:17,195 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:45:17,195 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:45:17,195 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:45:17,195 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:45:17,195 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:45:17,195 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:45:17,195 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:45:17,195 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:45:19,757 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:45:19,759 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:45:19,771 [Thread=6] INFO - 单轴触发了 2022-09-08 16:45:19,771 [Thread=6] INFO - 该轴是Z 2022-09-08 16:45:19,771 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:19,771 [Thread=6] INFO - 该轴是Z,目标位置是-2.57440000138283 2022-09-08 16:45:19,771 [Thread=6] INFO - 步进失败 2022-09-08 16:45:19,772 [Thread=6] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:45:19,776 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:45:19,776 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:45:19,776 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:45:19,776 [Thread=6] INFO - 进入getLongth 2022-09-08 16:45:19,776 [Thread=6] INFO - 目标坐标X-29.660103Y73.448113 2022-09-08 16:45:19,776 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:45:19,777 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:45:19,777 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:45:19,777 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:45:19,777 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:45:19,777 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:45:19,777 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:45:19,777 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:45:21,778 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:45:23,001 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:45:23,002 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:45:23,002 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:45:23,002 [Thread=1] INFO - 进入getLongth 2022-09-08 16:45:23,002 [Thread=1] INFO - 目标坐标X-29.66277Y73.407795 2022-09-08 16:45:23,002 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:45:23,002 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:45:23,002 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:45:23,002 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:45:23,002 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:45:23,003 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:45:23,003 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:45:23,003 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:45:25,306 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:45:25,309 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:45:25,321 [Thread=6] INFO - 单轴触发了 2022-09-08 16:45:25,321 [Thread=6] INFO - 该轴是Z 2022-09-08 16:45:25,321 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:25,322 [Thread=6] INFO - 该轴是Z,目标位置是-2.5679999976635 2022-09-08 16:45:25,322 [Thread=6] INFO - 步进失败 2022-09-08 16:45:25,322 [Thread=6] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:45:25,326 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:45:25,326 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:45:25,326 [Thread=6] INFO - Longth长度152.4 2022-09-08 16:45:25,326 [Thread=6] INFO - 进入getLongth 2022-09-08 16:45:25,326 [Thread=6] INFO - 目标坐标X-29.67277Y73.404795 2022-09-08 16:45:25,326 [Thread=6] INFO - 晶圆的大小6 2022-09-08 16:45:25,326 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 16:45:25,326 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:45:25,327 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 16:45:25,327 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 16:45:25,327 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 16:45:25,327 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 16:45:25,327 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 16:45:27,315 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:45:29,374 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:45:32,244 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:32,244 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:32,244 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:32,244 [Thread=20] INFO - 该轴是Z,目标位置是-2.5683000000095 2022-09-08 16:45:32,244 [Thread=20] INFO - 步进失败 2022-09-08 16:45:32,473 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:32,473 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:32,473 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:32,474 [Thread=21] INFO - 该轴是Z,目标位置是-2.5683000000095 2022-09-08 16:45:32,474 [Thread=21] INFO - 步进失败 2022-09-08 16:45:35,198 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:35,198 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:35,199 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:35,199 [Thread=19] INFO - 该轴是Z,目标位置是-2.5674999999525 2022-09-08 16:45:35,199 [Thread=19] INFO - 步进失败 2022-09-08 16:45:35,434 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:35,434 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:35,434 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:35,435 [Thread=20] INFO - 该轴是Z,目标位置是-2.5674999999525 2022-09-08 16:45:35,435 [Thread=20] INFO - 步进失败 2022-09-08 16:45:35,685 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:35,685 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:35,685 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:35,685 [Thread=21] INFO - 该轴是Z,目标位置是-2.5654999999525 2022-09-08 16:45:35,685 [Thread=21] INFO - 步进失败 2022-09-08 16:45:35,910 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:35,910 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:35,910 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:35,911 [Thread=19] INFO - 该轴是Z,目标位置是-2.5654999999525 2022-09-08 16:45:35,911 [Thread=19] INFO - 步进失败 2022-09-08 16:45:36,149 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:36,149 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:36,149 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:36,150 [Thread=20] INFO - 该轴是Z,目标位置是-2.5644999999525 2022-09-08 16:45:36,150 [Thread=20] INFO - 步进失败 2022-09-08 16:45:36,385 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:36,385 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:36,386 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:36,386 [Thread=21] INFO - 该轴是Z,目标位置是-2.5635999999525 2022-09-08 16:45:36,386 [Thread=21] INFO - 步进失败 2022-09-08 16:45:36,626 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:36,626 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:36,626 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:36,627 [Thread=19] INFO - 该轴是Z,目标位置是-2.5615999999525 2022-09-08 16:45:36,627 [Thread=19] INFO - 步进失败 2022-09-08 16:45:36,850 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:36,850 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:36,850 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:36,851 [Thread=20] INFO - 该轴是Z,目标位置是-2.5615999999525 2022-09-08 16:45:36,851 [Thread=20] INFO - 步进失败 2022-09-08 16:45:37,085 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:37,085 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:37,085 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:37,087 [Thread=21] INFO - 该轴是Z,目标位置是-2.5605999999525 2022-09-08 16:45:37,087 [Thread=21] INFO - 步进失败 2022-09-08 16:45:37,328 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:37,329 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:37,329 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:37,329 [Thread=19] INFO - 该轴是Z,目标位置是-2.5595999999525 2022-09-08 16:45:37,329 [Thread=19] INFO - 步进失败 2022-09-08 16:45:37,554 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:37,555 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:37,555 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:37,555 [Thread=20] INFO - 该轴是Z,目标位置是-2.5575999999525 2022-09-08 16:45:37,555 [Thread=20] INFO - 步进失败 2022-09-08 16:45:37,795 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:37,795 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:37,795 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:37,795 [Thread=21] INFO - 该轴是Z,目标位置是-2.5575999999525 2022-09-08 16:45:37,795 [Thread=21] INFO - 步进失败 2022-09-08 16:45:38,018 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:38,018 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:38,018 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:38,018 [Thread=19] INFO - 该轴是Z,目标位置是-2.5565999999525 2022-09-08 16:45:38,019 [Thread=19] INFO - 步进失败 2022-09-08 16:45:38,255 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:38,255 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:38,255 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:38,255 [Thread=20] INFO - 该轴是Z,目标位置是-2.5555999999525 2022-09-08 16:45:38,256 [Thread=20] INFO - 步进失败 2022-09-08 16:45:38,482 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:38,483 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:38,483 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:38,483 [Thread=21] INFO - 该轴是Z,目标位置是-2.5535999999525 2022-09-08 16:45:38,484 [Thread=21] INFO - 步进失败 2022-09-08 16:45:38,706 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:38,706 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:38,706 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:38,707 [Thread=19] INFO - 该轴是Z,目标位置是-2.5535999999525 2022-09-08 16:45:38,707 [Thread=19] INFO - 步进失败 2022-09-08 16:45:38,958 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:38,958 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:38,958 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:38,959 [Thread=20] INFO - 该轴是Z,目标位置是-2.5525999999525 2022-09-08 16:45:38,959 [Thread=20] INFO - 步进失败 2022-09-08 16:45:39,385 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:39,386 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:39,386 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:39,386 [Thread=21] INFO - 该轴是Z,目标位置是-2.5516999999525 2022-09-08 16:45:39,386 [Thread=21] INFO - 步进失败 2022-09-08 16:45:39,623 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:39,623 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:39,623 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:39,624 [Thread=19] INFO - 该轴是Z,目标位置是-2.5506999999525 2022-09-08 16:45:39,624 [Thread=19] INFO - 步进失败 2022-09-08 16:45:40,162 [Thread=20] INFO - 单轴触发了 2022-09-08 16:45:40,162 [Thread=20] INFO - 该轴是Z 2022-09-08 16:45:40,162 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:40,162 [Thread=20] INFO - 该轴是Z,目标位置是-2.5486999999525 2022-09-08 16:45:40,162 [Thread=20] INFO - 步进失败 2022-09-08 16:45:40,908 [Thread=21] INFO - 单轴触发了 2022-09-08 16:45:40,908 [Thread=21] INFO - 该轴是Z 2022-09-08 16:45:40,908 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:40,909 [Thread=21] INFO - 该轴是Z,目标位置是-2.5476999999525 2022-09-08 16:45:40,909 [Thread=21] INFO - 步进失败 2022-09-08 16:45:42,170 [Thread=19] INFO - 单轴触发了 2022-09-08 16:45:42,170 [Thread=19] INFO - 该轴是Z 2022-09-08 16:45:42,171 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:45:42,171 [Thread=19] INFO - 该轴是Z,目标位置是-2.5487000000475 2022-09-08 16:45:42,171 [Thread=19] INFO - 步进失败 2022-09-08 16:45:52,542 [Thread=16] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:46:03,891 [Thread=20] INFO - 单轴触发了 2022-09-08 16:46:03,895 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:03,895 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:03,895 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:46:03,895 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:03,895 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:46:03,895 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:46:03,895 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:46:04,152 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:46:04,152 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:46:04,152 [Thread=20] INFO - 该轴是Y,目标位置是73.204795 2022-09-08 16:46:04,152 [Thread=20] INFO - 步进失败 2022-09-08 16:46:04,795 [Thread=21] INFO - 单轴触发了 2022-09-08 16:46:04,799 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:04,799 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:04,799 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 16:46:04,799 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:04,799 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 16:46:04,799 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 16:46:04,799 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 16:46:05,070 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 16:46:05,070 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 16:46:05,071 [Thread=21] INFO - 该轴是Y,目标位置是73.004795 2022-09-08 16:46:05,071 [Thread=21] INFO - 步进失败 2022-09-08 16:46:05,590 [Thread=19] INFO - 单轴触发了 2022-09-08 16:46:05,594 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:05,594 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:05,594 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:46:05,594 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:05,594 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:46:05,594 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:46:05,594 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:46:06,780 [Thread=20] INFO - 单轴触发了 2022-09-08 16:46:06,784 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:06,785 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:06,785 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 16:46:06,785 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:06,785 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 16:46:06,785 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 16:46:06,785 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 16:46:07,796 [Thread=21] INFO - 单轴触发了 2022-09-08 16:46:07,800 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:07,801 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:07,801 [Thread=21] INFO - 单轴-目标点在范围内 2022-09-08 16:46:07,801 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:07,801 [Thread=21] INFO - 进入MoveSingleAxis_2 2022-09-08 16:46:07,801 [Thread=21] INFO - 进入MoveSingleAxis_3 2022-09-08 16:46:07,801 [Thread=21] INFO - 进入MoveSingleAxis_4 2022-09-08 16:46:09,196 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:46:09,197 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:46:09,197 [Thread=19] INFO - 该轴是Y,目标位置是72.804795 2022-09-08 16:46:09,197 [Thread=19] INFO - 步进失败 2022-09-08 16:46:09,197 [Thread=19] INFO - 单轴触发了 2022-09-08 16:46:09,196 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 16:46:09,197 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 16:46:09,197 [Thread=20] INFO - 该轴是Y,目标位置是72.604795 2022-09-08 16:46:09,199 [Thread=20] INFO - 步进失败 2022-09-08 16:46:09,196 [Thread=21] INFO - 进入MoveSingleAxis_5 2022-09-08 16:46:09,200 [Thread=21] INFO - 进入MoveSingleAxis_6 2022-09-08 16:46:09,200 [Thread=21] INFO - 该轴是Y,目标位置是72.404795 2022-09-08 16:46:09,200 [Thread=21] INFO - 步进失败 2022-09-08 16:46:09,201 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:09,201 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:09,201 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 16:46:09,201 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:09,201 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 16:46:09,202 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 16:46:09,202 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 16:46:09,449 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 16:46:09,449 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 16:46:09,449 [Thread=19] INFO - 该轴是Y,目标位置是72.204795 2022-09-08 16:46:09,449 [Thread=19] INFO - 步进失败 2022-09-08 16:46:11,591 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:46:11,593 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:46:11,607 [Thread=4] INFO - 单轴触发了 2022-09-08 16:46:11,607 [Thread=4] INFO - 该轴是Z 2022-09-08 16:46:11,607 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:11,608 [Thread=4] INFO - 该轴是Z,目标位置是-2.5550000023365 2022-09-08 16:46:11,608 [Thread=4] INFO - 步进失败 2022-09-08 16:46:11,608 [Thread=4] INFO - SwitchOffsetZ:-0.006300002 2022-09-08 16:46:11,613 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:11,613 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:11,613 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:46:11,613 [Thread=4] INFO - 进入getLongth 2022-09-08 16:46:11,613 [Thread=4] INFO - 目标坐标X-29.66277Y72.207795 2022-09-08 16:46:11,614 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:46:11,614 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:46:11,614 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:11,614 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:46:11,614 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:46:11,614 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:11,614 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:46:11,614 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:46:14,215 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:46:14,219 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:46:14,230 [Thread=28] INFO - 单轴触发了 2022-09-08 16:46:14,230 [Thread=28] INFO - 该轴是Z 2022-09-08 16:46:14,230 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:14,231 [Thread=28] INFO - 该轴是Z,目标位置是-2.49749999861717 2022-09-08 16:46:14,231 [Thread=28] INFO - 步进失败 2022-09-08 16:46:14,231 [Thread=28] INFO - SwitchOffsetZ:0.0573 2022-09-08 16:46:14,235 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:14,235 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:14,235 [Thread=28] INFO - Longth长度152.4 2022-09-08 16:46:14,235 [Thread=28] INFO - 进入getLongth 2022-09-08 16:46:14,235 [Thread=28] INFO - 目标坐标X-29.61577Y72.285795 2022-09-08 16:46:14,235 [Thread=28] INFO - 晶圆的大小6 2022-09-08 16:46:14,235 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 16:46:14,235 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:14,236 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 16:46:14,236 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 16:46:14,236 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:14,236 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 16:46:14,236 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 16:46:18,263 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:46:18,263 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:46:19,241 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:19,241 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:19,241 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:46:19,241 [Thread=1] INFO - 进入getLongth 2022-09-08 16:46:19,241 [Thread=1] INFO - 目标坐标X-29.569658Y72.768432 2022-09-08 16:46:19,241 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:46:19,241 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:46:19,243 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:19,243 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:46:19,243 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:46:19,243 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:19,244 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:46:19,244 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:46:23,788 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:23,788 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:23,788 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:46:23,789 [Thread=1] INFO - 进入getLongth 2022-09-08 16:46:23,789 [Thread=1] INFO - 目标坐标X-29.63114Y72.747528 2022-09-08 16:46:23,789 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:46:23,789 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:46:23,789 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:23,789 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:46:23,789 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:46:23,789 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:23,790 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:46:23,790 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:46:28,895 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:46:28,898 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:46:28,910 [Thread=29] INFO - 单轴触发了 2022-09-08 16:46:28,910 [Thread=29] INFO - 该轴是Z 2022-09-08 16:46:28,910 [Thread=29] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:28,911 [Thread=29] INFO - 该轴是Z,目标位置是-2.55500000138283 2022-09-08 16:46:28,911 [Thread=29] INFO - 步进失败 2022-09-08 16:46:28,911 [Thread=29] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:46:28,916 [Thread=29] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:28,916 [Thread=29] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:28,916 [Thread=29] INFO - Longth长度152.4 2022-09-08 16:46:28,916 [Thread=29] INFO - 进入getLongth 2022-09-08 16:46:28,917 [Thread=29] INFO - 目标坐标X-29.67814Y72.669528 2022-09-08 16:46:28,917 [Thread=29] INFO - 晶圆的大小6 2022-09-08 16:46:28,917 [Thread=29] INFO - 晶圆的宽高152.4 2022-09-08 16:46:28,917 [Thread=29] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:28,917 [Thread=29] INFO - X+安全坐标-118.61 2022-09-08 16:46:28,917 [Thread=29] INFO - X-安全坐标43.79 2022-09-08 16:46:28,917 [Thread=29] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:28,917 [Thread=29] INFO - Y下安全坐标120.2693 2022-09-08 16:46:28,918 [Thread=29] INFO - 双轴-目标点在范围内 2022-09-08 16:46:31,775 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:46:31,777 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:46:31,788 [Thread=28] INFO - 单轴触发了 2022-09-08 16:46:31,788 [Thread=28] INFO - 该轴是Z 2022-09-08 16:46:31,788 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:31,789 [Thread=28] INFO - 该轴是Z,目标位置是-2.5484999976635 2022-09-08 16:46:31,789 [Thread=28] INFO - 步进失败 2022-09-08 16:46:31,789 [Thread=28] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:46:31,793 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:31,793 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:31,793 [Thread=28] INFO - Longth长度152.4 2022-09-08 16:46:31,793 [Thread=28] INFO - 进入getLongth 2022-09-08 16:46:31,793 [Thread=28] INFO - 目标坐标X-29.68814Y72.666528 2022-09-08 16:46:31,793 [Thread=28] INFO - 晶圆的大小6 2022-09-08 16:46:31,794 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 16:46:31,794 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:31,794 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 16:46:31,794 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 16:46:31,794 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:31,794 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 16:46:31,794 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 16:46:35,522 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:35,522 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:35,522 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:46:35,523 [Thread=1] INFO - 进入getLongth 2022-09-08 16:46:35,523 [Thread=1] INFO - 目标坐标X-29.68522Y72.683522 2022-09-08 16:46:35,523 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:46:35,523 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:46:35,523 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:35,523 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:46:35,523 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:46:35,523 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:35,523 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:46:35,523 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:46:38,196 [Thread=20] INFO - 单轴触发了 2022-09-08 16:46:38,197 [Thread=20] INFO - 该轴是Z 2022-09-08 16:46:38,197 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:38,197 [Thread=20] INFO - 该轴是Z,目标位置是-2.5476999999525 2022-09-08 16:46:38,197 [Thread=20] INFO - 步进失败 2022-09-08 16:46:38,454 [Thread=21] INFO - 单轴触发了 2022-09-08 16:46:38,454 [Thread=21] INFO - 该轴是Z 2022-09-08 16:46:38,454 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:38,455 [Thread=21] INFO - 该轴是Z,目标位置是-2.5466999999525 2022-09-08 16:46:38,455 [Thread=21] INFO - 步进失败 2022-09-08 16:46:42,687 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:46:44,265 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:46:46,031 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:46:46,035 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:46:46,048 [Thread=4] INFO - 单轴触发了 2022-09-08 16:46:46,049 [Thread=4] INFO - 该轴是Z 2022-09-08 16:46:46,049 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:46,049 [Thread=4] INFO - 该轴是Z,目标位置是-2.5530000023365 2022-09-08 16:46:46,049 [Thread=4] INFO - 步进失败 2022-09-08 16:46:46,049 [Thread=4] INFO - SwitchOffsetZ:-0.006300002 2022-09-08 16:46:46,053 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:46,054 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:46,054 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:46:46,054 [Thread=4] INFO - 进入getLongth 2022-09-08 16:46:46,054 [Thread=4] INFO - 目标坐标X-29.67522Y72.686522 2022-09-08 16:46:46,054 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:46:46,054 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:46:46,054 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:46,054 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:46:46,054 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:46:46,054 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:46,055 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:46:46,055 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:46:47,876 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 16:46:47,880 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:46:47,891 [Thread=13] INFO - 单轴触发了 2022-09-08 16:46:47,891 [Thread=13] INFO - 该轴是Z 2022-09-08 16:46:47,891 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:46:47,892 [Thread=13] INFO - 该轴是Z,目标位置是-2.49549999861717 2022-09-08 16:46:47,892 [Thread=13] INFO - 步进失败 2022-09-08 16:46:47,892 [Thread=13] INFO - SwitchOffsetZ:0.0573 2022-09-08 16:46:47,896 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:47,896 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:47,896 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:46:47,896 [Thread=13] INFO - 进入getLongth 2022-09-08 16:46:47,896 [Thread=13] INFO - 目标坐标X-29.62822Y72.764522 2022-09-08 16:46:47,896 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:46:47,896 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:46:47,897 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:47,897 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:46:47,897 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:46:47,897 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:47,897 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:46:47,897 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:46:52,734 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:46:52,734 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:46:53,481 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:53,482 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:53,482 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:46:53,482 [Thread=1] INFO - 进入getLongth 2022-09-08 16:46:53,482 [Thread=1] INFO - 目标坐标X-29.614694Y72.318774 2022-09-08 16:46:53,482 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:46:53,482 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:46:53,482 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:53,482 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:46:53,483 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:46:53,483 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:53,483 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:46:53,483 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:46:55,784 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:55,785 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:55,785 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:46:55,785 [Thread=1] INFO - 进入getLongth 2022-09-08 16:46:55,785 [Thread=1] INFO - 目标坐标X-29.61285Y72.061162 2022-09-08 16:46:55,785 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:46:55,785 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:46:55,785 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:55,785 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:46:55,785 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:46:55,785 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:55,785 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:46:55,786 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:46:59,219 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:46:59,228 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:46:59,228 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:46:59,228 [Thread=1] INFO - 进入getLongth 2022-09-08 16:46:59,228 [Thread=1] INFO - 目标坐标X-29.611006Y72.378412 2022-09-08 16:46:59,228 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:46:59,228 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:46:59,228 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:46:59,228 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:46:59,228 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:46:59,229 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:46:59,229 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:46:59,229 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:00,451 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:00,451 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:00,451 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:00,451 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:00,451 [Thread=1] INFO - 目标坐标X-29.66634Y73.037504 2022-09-08 16:47:00,451 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:00,451 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:00,452 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:00,452 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:00,452 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:00,452 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:00,452 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:00,452 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:02,491 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:02,491 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:02,491 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:02,491 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:02,491 [Thread=1] INFO - 目标坐标X-29.714296Y73.529364 2022-09-08 16:47:02,491 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:02,491 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:02,492 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:02,492 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:02,492 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:02,492 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:02,492 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:02,492 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:06,218 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:06,219 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:06,219 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:06,219 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:06,219 [Thread=1] INFO - 目标坐标X-29.627606Y73.633269 2022-09-08 16:47:06,219 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:06,219 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:06,219 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:06,219 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:06,220 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:06,220 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:06,220 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:06,220 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:09,002 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:47:09,005 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:47:09,016 [Thread=27] INFO - 单轴触发了 2022-09-08 16:47:09,016 [Thread=27] INFO - 该轴是Z 2022-09-08 16:47:09,016 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:09,017 [Thread=27] INFO - 该轴是Z,目标位置是-2.55300000138283 2022-09-08 16:47:09,017 [Thread=27] INFO - 步进失败 2022-09-08 16:47:09,017 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:47:09,021 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:09,021 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:09,022 [Thread=27] INFO - Longth长度152.4 2022-09-08 16:47:09,022 [Thread=27] INFO - 进入getLongth 2022-09-08 16:47:09,022 [Thread=27] INFO - 目标坐标X-29.674606Y73.555269 2022-09-08 16:47:09,023 [Thread=27] INFO - 晶圆的大小6 2022-09-08 16:47:09,023 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 16:47:09,023 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:09,023 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:47:09,023 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 16:47:09,023 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:09,023 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:47:09,023 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:47:11,361 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:11,362 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:11,362 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:11,362 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:11,362 [Thread=1] INFO - 目标坐标X-29.677894Y73.500994 2022-09-08 16:47:11,362 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:11,362 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:11,362 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:11,362 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:11,362 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:11,362 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:11,362 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:11,362 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:13,034 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:47:13,037 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:47:13,048 [Thread=13] INFO - 单轴触发了 2022-09-08 16:47:13,049 [Thread=13] INFO - 该轴是Z 2022-09-08 16:47:13,049 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:13,049 [Thread=13] INFO - 该轴是Z,目标位置是-2.5464999976635 2022-09-08 16:47:13,049 [Thread=13] INFO - 步进失败 2022-09-08 16:47:13,049 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:47:13,053 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:13,053 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:13,053 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:47:13,053 [Thread=13] INFO - 进入getLongth 2022-09-08 16:47:13,053 [Thread=13] INFO - 目标坐标X-29.687894Y73.497994 2022-09-08 16:47:13,053 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:47:13,053 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:47:13,054 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:13,054 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:47:13,054 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:47:13,054 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:13,054 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:47:13,054 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 16:47:16,082 [Thread=19] INFO - 单轴触发了 2022-09-08 16:47:16,082 [Thread=19] INFO - 该轴是Z 2022-09-08 16:47:16,082 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:16,083 [Thread=19] INFO - 该轴是Z,目标位置是-2.5456999999525 2022-09-08 16:47:16,083 [Thread=19] INFO - 步进失败 2022-09-08 16:47:16,338 [Thread=20] INFO - 单轴触发了 2022-09-08 16:47:16,338 [Thread=20] INFO - 该轴是Z 2022-09-08 16:47:16,338 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:16,339 [Thread=20] INFO - 该轴是Z,目标位置是-2.5446999999525 2022-09-08 16:47:16,339 [Thread=20] INFO - 步进失败 2022-09-08 16:47:16,537 [Thread=21] INFO - 单轴触发了 2022-09-08 16:47:16,537 [Thread=21] INFO - 该轴是Z 2022-09-08 16:47:16,537 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:16,538 [Thread=21] INFO - 该轴是Z,目标位置是-2.5446999999525 2022-09-08 16:47:16,538 [Thread=21] INFO - 步进失败 2022-09-08 16:47:17,460 [Thread=19] INFO - 单轴触发了 2022-09-08 16:47:17,460 [Thread=19] INFO - 该轴是Z 2022-09-08 16:47:17,460 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:17,461 [Thread=19] INFO - 该轴是Z,目标位置是-2.5447000000475 2022-09-08 16:47:17,461 [Thread=19] INFO - 步进失败 2022-09-08 16:47:17,739 [Thread=20] INFO - 单轴触发了 2022-09-08 16:47:17,739 [Thread=20] INFO - 该轴是Z 2022-09-08 16:47:17,739 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:17,740 [Thread=20] INFO - 该轴是Z,目标位置是-2.5447000000475 2022-09-08 16:47:17,740 [Thread=20] INFO - 步进失败 2022-09-08 16:47:17,980 [Thread=21] INFO - 单轴触发了 2022-09-08 16:47:17,980 [Thread=21] INFO - 该轴是Z 2022-09-08 16:47:17,980 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:17,981 [Thread=21] INFO - 该轴是Z,目标位置是-2.5457000000475 2022-09-08 16:47:17,981 [Thread=21] INFO - 步进失败 2022-09-08 16:47:18,210 [Thread=19] INFO - 单轴触发了 2022-09-08 16:47:18,210 [Thread=19] INFO - 该轴是Z 2022-09-08 16:47:18,210 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:18,210 [Thread=19] INFO - 该轴是Z,目标位置是-2.5477000000475 2022-09-08 16:47:18,211 [Thread=19] INFO - 步进失败 2022-09-08 16:47:18,441 [Thread=20] INFO - 单轴触发了 2022-09-08 16:47:18,441 [Thread=20] INFO - 该轴是Z 2022-09-08 16:47:18,441 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:18,442 [Thread=20] INFO - 该轴是Z,目标位置是-2.5487000000475 2022-09-08 16:47:18,442 [Thread=20] INFO - 步进失败 2022-09-08 16:47:18,681 [Thread=21] INFO - 单轴触发了 2022-09-08 16:47:18,681 [Thread=21] INFO - 该轴是Z 2022-09-08 16:47:18,681 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:18,682 [Thread=21] INFO - 该轴是Z,目标位置是-2.5487000000475 2022-09-08 16:47:18,682 [Thread=21] INFO - 步进失败 2022-09-08 16:47:19,033 [Thread=19] INFO - 单轴触发了 2022-09-08 16:47:19,033 [Thread=19] INFO - 该轴是Z 2022-09-08 16:47:19,034 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:19,034 [Thread=19] INFO - 该轴是Z,目标位置是-2.5497000000475 2022-09-08 16:47:19,034 [Thread=19] INFO - 步进失败 2022-09-08 16:47:20,761 [Thread=20] INFO - 单轴触发了 2022-09-08 16:47:20,761 [Thread=20] INFO - 该轴是Z 2022-09-08 16:47:20,762 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:20,762 [Thread=20] INFO - 该轴是Z,目标位置是-2.5496999999525 2022-09-08 16:47:20,762 [Thread=20] INFO - 步进失败 2022-09-08 16:47:22,465 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:22,465 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:22,465 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:22,465 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:22,465 [Thread=1] INFO - 目标坐标X-29.69128Y73.494017 2022-09-08 16:47:22,465 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:22,466 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:22,466 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:22,466 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:22,466 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:22,466 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:22,466 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:22,466 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:23,785 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:23,785 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:23,785 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:23,785 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:23,785 [Thread=1] INFO - 目标坐标X-29.687397Y73.499858 2022-09-08 16:47:23,785 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:23,785 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:23,785 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:23,785 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:23,786 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:23,786 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:23,786 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:23,786 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:26,952 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:26,952 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:26,952 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:47:26,952 [Thread=1] INFO - 进入getLongth 2022-09-08 16:47:26,952 [Thread=1] INFO - 目标坐标X-29.683514Y73.503338 2022-09-08 16:47:26,952 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:47:26,952 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:47:26,953 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:26,953 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:47:26,953 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:47:26,953 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:26,953 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:47:26,953 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:47:32,198 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:47:34,990 [Thread=11] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:47:35,125 [Thread=11] INFO - FindCircle: circle is not complete. 2022-09-08 16:47:38,952 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 16:47:38,955 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 16:47:38,966 [Thread=28] INFO - 单轴触发了 2022-09-08 16:47:38,966 [Thread=28] INFO - 该轴是Z 2022-09-08 16:47:38,966 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 16:47:38,966 [Thread=28] INFO - 该轴是Z,目标位置是-2.49870000095367 2022-09-08 16:47:38,966 [Thread=28] INFO - 步进失败 2022-09-08 16:47:38,966 [Thread=28] INFO - SwitchOffsetZ:0.051 2022-09-08 16:47:38,970 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:47:38,970 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:47:38,970 [Thread=28] INFO - Longth长度152.4 2022-09-08 16:47:38,970 [Thread=28] INFO - 进入getLongth 2022-09-08 16:47:38,970 [Thread=28] INFO - 目标坐标X-29.626514Y73.584338 2022-09-08 16:47:38,970 [Thread=28] INFO - 晶圆的大小6 2022-09-08 16:47:38,971 [Thread=28] INFO - 晶圆的宽高152.4 2022-09-08 16:47:38,971 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:38,971 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 16:47:38,971 [Thread=28] INFO - X-安全坐标43.79 2022-09-08 16:47:38,971 [Thread=28] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:38,971 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 16:47:38,971 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 16:47:39,987 [Thread=4] INFO - stageout currentPos:-2.4989, currentVelocity:2, delayTime:1299, point.Z:-0.5 2022-09-08 16:47:39,987 [Thread=4] INFO - stage out homez 2022-09-08 16:47:43,300 [Thread=4] INFO - stage out home ok 2022-09-08 16:47:43,303 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:47:43,304 [Thread=4] INFO - stagein homez 2022-09-08 16:47:43,304 [Thread=4] INFO - stagein home ok 2022-09-08 16:47:43,304 [Thread=4] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:47:43,304 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:47:43,304 [Thread=4] INFO - 进入getLongth 2022-09-08 16:47:43,304 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 16:47:43,305 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:47:43,305 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:47:43,305 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:47:43,305 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:47:43,305 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:47:43,305 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:47:43,305 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:47:43,305 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 16:47:43,306 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:48:38,536 [Thread=29] INFO - SwitchIndex index:0 2022-09-08 16:48:38,539 [Thread=29] INFO - Switch Lens:Broadcast Event 2022-09-08 16:48:38,539 [Thread=13] INFO - 单轴触发了 2022-09-08 16:48:38,539 [Thread=13] INFO - 该轴是Z 2022-09-08 16:48:38,540 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 16:48:38,540 [Thread=13] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:48:38,541 [Thread=13] INFO - 步进失败 2022-09-08 16:48:38,541 [Thread=13] INFO - SwitchOffsetZ:0 2022-09-08 16:48:38,548 [Thread=13] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:48:38,549 [Thread=13] INFO - stagein homez 2022-09-08 16:48:38,549 [Thread=13] INFO - stagein home ok 2022-09-08 16:48:38,549 [Thread=13] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:48:38,549 [Thread=13] INFO - Longth长度152.4 2022-09-08 16:48:38,549 [Thread=13] INFO - 进入getLongth 2022-09-08 16:48:38,549 [Thread=13] INFO - 目标坐标X-100Y-90 2022-09-08 16:48:38,549 [Thread=13] INFO - 晶圆的大小6 2022-09-08 16:48:38,549 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 16:48:38,550 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:48:38,550 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:48:38,550 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 16:48:38,550 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 16:48:38,550 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:48:38,550 [Thread=13] INFO - 双轴-目标点不在范围内 2022-09-08 16:48:38,550 [Thread=13] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:48:39,579 [Thread=29] INFO - stagein currentPos:-0.0081, currentVelocity:2, delayTime:545, point.Z:-0.5 2022-09-08 16:48:39,579 [Thread=29] INFO - stagein homez 2022-09-08 16:48:42,146 [Thread=29] INFO - stagein home ok 2022-09-08 16:48:42,148 [Thread=29] INFO - StageBack: waferSize = 6 2022-09-08 16:48:42,152 [Thread=29] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:48:42,153 [Thread=29] INFO - stagein homez 2022-09-08 16:48:42,153 [Thread=29] INFO - stagein home ok 2022-09-08 16:48:42,153 [Thread=29] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:48:42,154 [Thread=29] INFO - Longth长度152.4 2022-09-08 16:48:42,154 [Thread=29] INFO - 进入getLongth 2022-09-08 16:48:42,154 [Thread=29] INFO - 目标坐标X38.79Y115.2693 2022-09-08 16:48:42,154 [Thread=29] INFO - 晶圆的大小6 2022-09-08 16:48:42,154 [Thread=29] INFO - 晶圆的宽高152.4 2022-09-08 16:48:42,154 [Thread=29] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:48:42,154 [Thread=29] INFO - X+安全坐标-118.61 2022-09-08 16:48:42,154 [Thread=29] INFO - X-安全坐标43.79 2022-09-08 16:48:42,154 [Thread=29] INFO - Y上安全坐标-42.1307 2022-09-08 16:48:42,155 [Thread=29] INFO - Y下安全坐标120.2693 2022-09-08 16:48:42,155 [Thread=29] INFO - 双轴-目标点在范围内 2022-09-08 16:48:51,390 [Thread=29] INFO - 单轴触发了 2022-09-08 16:48:51,390 [Thread=29] INFO - 该轴是Z 2022-09-08 16:48:51,390 [Thread=29] INFO - 进入MoveSingleAxis_1 2022-09-08 16:48:51,391 [Thread=29] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 16:48:51,391 [Thread=29] INFO - 步进失败 2022-09-08 16:48:52,802 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:48:52,802 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:48:52,802 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:48:52,802 [Thread=1] INFO - 进入getLongth 2022-09-08 16:48:52,803 [Thread=1] INFO - 目标坐标X-7.72100000000002Y68.2793 2022-09-08 16:48:52,803 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:48:52,803 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:48:52,803 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:48:52,803 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:48:52,803 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:48:52,803 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:48:52,803 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:48:52,803 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:48:57,626 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:48:57,741 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 16:49:02,179 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:49:02,181 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:49:02,192 [Thread=27] INFO - 单轴触发了 2022-09-08 16:49:02,192 [Thread=27] INFO - 该轴是Z 2022-09-08 16:49:02,192 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:02,192 [Thread=27] INFO - 该轴是Z,目标位置是-2.59470000138283 2022-09-08 16:49:02,193 [Thread=27] INFO - 步进失败 2022-09-08 16:49:02,193 [Thread=27] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:49:02,199 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:49:02,199 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:49:02,199 [Thread=27] INFO - Longth长度152.4 2022-09-08 16:49:02,199 [Thread=27] INFO - 进入getLongth 2022-09-08 16:49:02,199 [Thread=27] INFO - 目标坐标X-7.768Y68.2013 2022-09-08 16:49:02,199 [Thread=27] INFO - 晶圆的大小6 2022-09-08 16:49:02,199 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 16:49:02,199 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:49:02,199 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:49:02,199 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 16:49:02,200 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 16:49:02,200 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:49:02,200 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:49:04,205 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:49:07,954 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:49:07,955 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:49:08,887 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:49:08,887 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:49:08,887 [Thread=1] INFO - Longth长度152.4 2022-09-08 16:49:08,888 [Thread=1] INFO - 进入getLongth 2022-09-08 16:49:08,888 [Thread=1] INFO - 目标坐标X-7.778049Y68.222638 2022-09-08 16:49:08,888 [Thread=1] INFO - 晶圆的大小6 2022-09-08 16:49:08,888 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 16:49:08,888 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:49:08,888 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:49:08,888 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 16:49:08,889 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 16:49:08,889 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:49:08,889 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:49:12,791 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:49:12,793 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:49:12,804 [Thread=4] INFO - 单轴触发了 2022-09-08 16:49:12,805 [Thread=4] INFO - 该轴是Z 2022-09-08 16:49:12,805 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:12,805 [Thread=4] INFO - 该轴是Z,目标位置是-2.5881999976635 2022-09-08 16:49:12,805 [Thread=4] INFO - 步进失败 2022-09-08 16:49:12,806 [Thread=4] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:49:12,811 [Thread=4] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:49:12,811 [Thread=4] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:49:12,811 [Thread=4] INFO - Longth长度152.4 2022-09-08 16:49:12,811 [Thread=4] INFO - 进入getLongth 2022-09-08 16:49:12,811 [Thread=4] INFO - 目标坐标X-7.788049Y68.219638 2022-09-08 16:49:12,812 [Thread=4] INFO - 晶圆的大小6 2022-09-08 16:49:12,812 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 16:49:12,812 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:49:12,812 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 16:49:12,812 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 16:49:12,812 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 16:49:12,812 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 16:49:12,812 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 16:49:14,799 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:49:17,352 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:17,352 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:17,352 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:17,353 [Thread=21] INFO - 该轴是Z,目标位置是-2.5894000000475 2022-09-08 16:49:17,353 [Thread=21] INFO - 步进失败 2022-09-08 16:49:17,617 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:17,617 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:17,617 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:17,618 [Thread=19] INFO - 该轴是Z,目标位置是-2.5894000000475 2022-09-08 16:49:17,618 [Thread=19] INFO - 步进失败 2022-09-08 16:49:17,808 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:17,808 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:17,808 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:17,809 [Thread=20] INFO - 该轴是Z,目标位置是-2.5904000000475 2022-09-08 16:49:17,809 [Thread=20] INFO - 步进失败 2022-09-08 16:49:18,521 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:18,521 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:18,521 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:18,522 [Thread=21] INFO - 该轴是Z,目标位置是-2.5902999999525 2022-09-08 16:49:18,522 [Thread=21] INFO - 步进失败 2022-09-08 16:49:18,743 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:18,743 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:18,743 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:18,744 [Thread=19] INFO - 该轴是Z,目标位置是-2.5893999999525 2022-09-08 16:49:18,745 [Thread=19] INFO - 步进失败 2022-09-08 16:49:18,960 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:18,960 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:18,960 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:18,961 [Thread=20] INFO - 该轴是Z,目标位置是-2.5883999999525 2022-09-08 16:49:18,961 [Thread=20] INFO - 步进失败 2022-09-08 16:49:19,192 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:19,192 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:19,192 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:19,192 [Thread=21] INFO - 该轴是Z,目标位置是-2.5883999999525 2022-09-08 16:49:19,193 [Thread=21] INFO - 步进失败 2022-09-08 16:49:19,415 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:19,415 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:19,415 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:19,416 [Thread=19] INFO - 该轴是Z,目标位置是-2.5873999999525 2022-09-08 16:49:19,416 [Thread=19] INFO - 步进失败 2022-09-08 16:49:19,640 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:19,640 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:19,640 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:19,641 [Thread=20] INFO - 该轴是Z,目标位置是-2.5853999999525 2022-09-08 16:49:19,641 [Thread=20] INFO - 步进失败 2022-09-08 16:49:19,863 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:19,863 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:19,863 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:19,864 [Thread=21] INFO - 该轴是Z,目标位置是-2.5853999999525 2022-09-08 16:49:19,864 [Thread=21] INFO - 步进失败 2022-09-08 16:49:20,080 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:20,100 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:20,100 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:20,101 [Thread=19] INFO - 该轴是Z,目标位置是-2.5843999999525 2022-09-08 16:49:20,101 [Thread=19] INFO - 步进失败 2022-09-08 16:49:20,311 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:20,311 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:20,312 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:20,312 [Thread=20] INFO - 该轴是Z,目标位置是-2.5823999999525 2022-09-08 16:49:20,312 [Thread=20] INFO - 步进失败 2022-09-08 16:49:20,567 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:20,567 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:20,567 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:20,568 [Thread=21] INFO - 该轴是Z,目标位置是-2.5813999999525 2022-09-08 16:49:20,568 [Thread=21] INFO - 步进失败 2022-09-08 16:49:20,808 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:20,808 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:20,808 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:20,808 [Thread=19] INFO - 该轴是Z,目标位置是-2.5813999999525 2022-09-08 16:49:20,809 [Thread=19] INFO - 步进失败 2022-09-08 16:49:21,072 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:21,072 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:21,072 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:21,073 [Thread=20] INFO - 该轴是Z,目标位置是-2.5803999999525 2022-09-08 16:49:21,073 [Thread=20] INFO - 步进失败 2022-09-08 16:49:21,325 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:21,325 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:21,325 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:21,325 [Thread=21] INFO - 该轴是Z,目标位置是-2.5793999999525 2022-09-08 16:49:21,326 [Thread=21] INFO - 步进失败 2022-09-08 16:49:21,559 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:21,559 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:21,559 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:21,560 [Thread=19] INFO - 该轴是Z,目标位置是-2.5773999999525 2022-09-08 16:49:21,560 [Thread=19] INFO - 步进失败 2022-09-08 16:49:21,807 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:21,808 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:21,808 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:21,808 [Thread=20] INFO - 该轴是Z,目标位置是-2.5764999999525 2022-09-08 16:49:21,808 [Thread=20] INFO - 步进失败 2022-09-08 16:49:22,061 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:22,062 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:22,062 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:22,062 [Thread=21] INFO - 该轴是Z,目标位置是-2.5754999999525 2022-09-08 16:49:22,062 [Thread=21] INFO - 步进失败 2022-09-08 16:49:22,287 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:22,287 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:22,287 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:22,287 [Thread=19] INFO - 该轴是Z,目标位置是-2.5754999999525 2022-09-08 16:49:22,288 [Thread=19] INFO - 步进失败 2022-09-08 16:49:22,512 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:22,512 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:22,512 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:22,512 [Thread=20] INFO - 该轴是Z,目标位置是-2.5734999999525 2022-09-08 16:49:22,513 [Thread=20] INFO - 步进失败 2022-09-08 16:49:22,735 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:22,735 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:22,735 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:22,736 [Thread=21] INFO - 该轴是Z,目标位置是-2.5724999999525 2022-09-08 16:49:22,736 [Thread=21] INFO - 步进失败 2022-09-08 16:49:22,954 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:22,954 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:22,954 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:22,954 [Thread=19] INFO - 该轴是Z,目标位置是-2.5724999999525 2022-09-08 16:49:22,955 [Thread=19] INFO - 步进失败 2022-09-08 16:49:23,186 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:23,186 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:23,186 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:23,186 [Thread=20] INFO - 该轴是Z,目标位置是-2.5710999999525 2022-09-08 16:49:23,187 [Thread=20] INFO - 步进失败 2022-09-08 16:49:23,416 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:23,416 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:23,416 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:23,417 [Thread=21] INFO - 该轴是Z,目标位置是-2.5694999999525 2022-09-08 16:49:23,417 [Thread=21] INFO - 步进失败 2022-09-08 16:49:23,671 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:23,671 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:23,671 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:23,674 [Thread=19] INFO - 该轴是Z,目标位置是-2.5684999999525 2022-09-08 16:49:23,675 [Thread=19] INFO - 步进失败 2022-09-08 16:49:23,895 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:23,895 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:23,895 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:23,896 [Thread=20] INFO - 该轴是Z,目标位置是-2.5684999999525 2022-09-08 16:49:23,896 [Thread=20] INFO - 步进失败 2022-09-08 16:49:24,105 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:24,105 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:24,105 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:24,106 [Thread=21] INFO - 该轴是Z,目标位置是-2.5684999999525 2022-09-08 16:49:24,106 [Thread=21] INFO - 步进失败 2022-09-08 16:49:25,015 [Thread=19] INFO - 单轴触发了 2022-09-08 16:49:25,015 [Thread=19] INFO - 该轴是Z 2022-09-08 16:49:25,016 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:25,016 [Thread=19] INFO - 该轴是Z,目标位置是-2.5654999999525 2022-09-08 16:49:25,016 [Thread=19] INFO - 步进失败 2022-09-08 16:49:26,743 [Thread=20] INFO - 单轴触发了 2022-09-08 16:49:26,743 [Thread=20] INFO - 该轴是Z 2022-09-08 16:49:26,743 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:26,744 [Thread=20] INFO - 该轴是Z,目标位置是-2.5665000000475 2022-09-08 16:49:26,744 [Thread=20] INFO - 步进失败 2022-09-08 16:49:28,071 [Thread=21] INFO - 单轴触发了 2022-09-08 16:49:28,071 [Thread=21] INFO - 该轴是Z 2022-09-08 16:49:28,071 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:28,071 [Thread=21] INFO - 该轴是Z,目标位置是-2.5654999999525 2022-09-08 16:49:28,072 [Thread=21] INFO - 步进失败 2022-09-08 16:49:34,939 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:49:35,004 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.174964049418813 2022-09-08 16:49:35,004 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.440375174045104 2022-09-08 16:49:35,005 [Thread=7] INFO - Measure angle is -0.30767 2022-09-08 16:49:35,010 [Thread=7] INFO - Measure StartPoint:721.562072753906,1016.40277099609, EndPoint:1360.08532714844,1019.83160400391, PixelDistance:638.532461 2022-09-08 16:49:35,011 [Thread=7] INFO - DerivativeMeasure timespan = 5.8983 2022-09-08 16:49:36,779 [Thread=7] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:49:36,839 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.53728737987468 2022-09-08 16:49:36,839 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.557445268671369 2022-09-08 16:49:36,839 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.293953222063261 2022-09-08 16:49:36,839 [Thread=7] INFO - SetDerivativeMeasureParameters: Deg = 0.0622147937431573 2022-09-08 16:49:36,839 [Thread=7] INFO - Measure angle is -0.362725 2022-09-08 16:49:36,848 [Thread=7] INFO - Measure StartPoint:721.280639648438,1022.36840820313, EndPoint:1359.84375,1026.41101074219, PixelDistance:638.575907 2022-09-08 16:49:36,848 [Thread=7] INFO - DerivativeMeasure timespan = 8.5483 2022-09-08 16:49:39,541 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 16:49:39,544 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 16:49:39,557 [Thread=11] INFO - 单轴触发了 2022-09-08 16:49:39,557 [Thread=11] INFO - 该轴是Z 2022-09-08 16:49:39,557 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:49:39,557 [Thread=11] INFO - 该轴是Z,目标位置是-2.51450000095367 2022-09-08 16:49:39,557 [Thread=11] INFO - 步进失败 2022-09-08 16:49:39,558 [Thread=11] INFO - SwitchOffsetZ:0.051 2022-09-08 16:49:39,564 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:49:39,564 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:49:39,564 [Thread=11] INFO - Longth长度152.4 2022-09-08 16:49:39,564 [Thread=11] INFO - 进入getLongth 2022-09-08 16:49:39,564 [Thread=11] INFO - 目标坐标X-7.731049Y68.300638 2022-09-08 16:49:39,565 [Thread=11] INFO - 晶圆的大小6 2022-09-08 16:49:39,565 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 16:49:39,565 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:49:39,565 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:49:39,565 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 16:49:39,565 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 16:49:39,565 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:49:39,565 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:49:40,571 [Thread=27] INFO - stageout currentPos:-2.5147, currentVelocity:2, delayTime:1307, point.Z:-0.5 2022-09-08 16:49:40,571 [Thread=27] INFO - stage out homez 2022-09-08 16:49:43,886 [Thread=27] INFO - stage out home ok 2022-09-08 16:49:43,889 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:49:43,889 [Thread=27] INFO - stagein homez 2022-09-08 16:49:43,889 [Thread=27] INFO - stagein home ok 2022-09-08 16:49:43,889 [Thread=27] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:49:43,889 [Thread=27] INFO - Longth长度152.4 2022-09-08 16:49:43,889 [Thread=27] INFO - 进入getLongth 2022-09-08 16:49:43,890 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 16:49:43,890 [Thread=27] INFO - 晶圆的大小6 2022-09-08 16:49:43,890 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 16:49:43,890 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:49:43,890 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:49:43,890 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 16:49:43,890 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 16:49:43,890 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:49:43,890 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 16:49:43,890 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:58:33,058 [Thread=29] INFO - SwitchIndex index:0 2022-09-08 16:58:33,061 [Thread=29] INFO - Switch Lens:Broadcast Event 2022-09-08 16:58:33,061 [Thread=28] INFO - 单轴触发了 2022-09-08 16:58:33,061 [Thread=28] INFO - 该轴是Z 2022-09-08 16:58:33,061 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 16:58:33,062 [Thread=28] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 16:58:33,062 [Thread=28] INFO - 步进失败 2022-09-08 16:58:33,062 [Thread=28] INFO - SwitchOffsetZ:0 2022-09-08 16:58:33,067 [Thread=28] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 16:58:33,067 [Thread=28] INFO - stagein homez 2022-09-08 16:58:33,067 [Thread=28] INFO - stagein home ok 2022-09-08 16:58:33,067 [Thread=28] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 16:58:33,067 [Thread=28] INFO - Longth长度177.8 2022-09-08 16:58:33,067 [Thread=28] INFO - 进入getLongth 2022-09-08 16:58:33,068 [Thread=28] INFO - 目标坐标X-100Y-90 2022-09-08 16:58:33,068 [Thread=28] INFO - 晶圆的大小7 2022-09-08 16:58:33,068 [Thread=28] INFO - 晶圆的宽高177.8 2022-09-08 16:58:33,068 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:58:33,068 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 16:58:33,068 [Thread=28] INFO - X-安全坐标69.19 2022-09-08 16:58:33,068 [Thread=28] INFO - Y上安全坐标-67.5307 2022-09-08 16:58:33,068 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 16:58:33,068 [Thread=28] INFO - 双轴-目标点不在范围内 2022-09-08 16:58:33,068 [Thread=28] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 16:58:34,086 [Thread=29] INFO - stagein currentPos:0.0488, currentVelocity:2, delayTime:574, point.Z:-0.5 2022-09-08 16:58:34,086 [Thread=29] INFO - stagein homez 2022-09-08 16:58:36,684 [Thread=29] INFO - stagein home ok 2022-09-08 16:58:36,687 [Thread=29] INFO - StageBack: waferSize = 7 2022-09-08 16:58:36,690 [Thread=29] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 16:58:36,691 [Thread=29] INFO - stagein homez 2022-09-08 16:58:36,691 [Thread=29] INFO - stagein home ok 2022-09-08 16:58:36,691 [Thread=29] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 16:58:36,691 [Thread=29] INFO - Longth长度177.8 2022-09-08 16:58:36,691 [Thread=29] INFO - 进入getLongth 2022-09-08 16:58:36,691 [Thread=29] INFO - 目标坐标X64.19Y115.2693 2022-09-08 16:58:36,691 [Thread=29] INFO - 晶圆的大小7 2022-09-08 16:58:36,692 [Thread=29] INFO - 晶圆的宽高177.8 2022-09-08 16:58:36,692 [Thread=29] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:58:36,692 [Thread=29] INFO - X+安全坐标-118.61 2022-09-08 16:58:36,692 [Thread=29] INFO - X-安全坐标69.19 2022-09-08 16:58:36,692 [Thread=29] INFO - Y上安全坐标-67.5307 2022-09-08 16:58:36,692 [Thread=29] INFO - Y下安全坐标120.2693 2022-09-08 16:58:36,692 [Thread=29] INFO - 双轴-目标点在范围内 2022-09-08 16:58:44,559 [Thread=29] INFO - 单轴触发了 2022-09-08 16:58:44,559 [Thread=29] INFO - 该轴是Z 2022-09-08 16:58:44,559 [Thread=29] INFO - 进入MoveSingleAxis_1 2022-09-08 16:58:44,559 [Thread=29] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 16:58:44,559 [Thread=29] INFO - 步进失败 2022-09-08 16:58:48,631 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:58:48,632 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:58:48,632 [Thread=1] INFO - Longth长度177.8 2022-09-08 16:58:48,632 [Thread=1] INFO - 进入getLongth 2022-09-08 16:58:48,632 [Thread=1] INFO - 目标坐标X-23.967Y-29.6397 2022-09-08 16:58:48,632 [Thread=1] INFO - 晶圆的大小7 2022-09-08 16:58:48,632 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 16:58:48,632 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:58:48,632 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:58:48,632 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 16:58:48,632 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 16:58:48,632 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:58:48,633 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:58:56,698 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:58:56,808 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 16:58:57,893 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 16:58:57,893 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 16:58:59,714 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:58:59,715 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:58:59,715 [Thread=1] INFO - Longth长度177.8 2022-09-08 16:58:59,715 [Thread=1] INFO - 进入getLongth 2022-09-08 16:58:59,715 [Thread=1] INFO - 目标坐标X-24.45886Y-29.545632 2022-09-08 16:58:59,715 [Thread=1] INFO - 晶圆的大小7 2022-09-08 16:58:59,716 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 16:58:59,716 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:58:59,716 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:58:59,716 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 16:58:59,716 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 16:58:59,716 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:58:59,716 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:59:04,277 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 16:59:04,280 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:59:04,291 [Thread=28] INFO - 单轴触发了 2022-09-08 16:59:04,291 [Thread=28] INFO - 该轴是Z 2022-09-08 16:59:04,291 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:04,292 [Thread=28] INFO - 该轴是Z,目标位置是-6.68130000138283 2022-09-08 16:59:04,292 [Thread=28] INFO - 步进失败 2022-09-08 16:59:04,292 [Thread=28] INFO - SwitchOffsetZ:-0.0573 2022-09-08 16:59:04,296 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:59:04,296 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:59:04,296 [Thread=28] INFO - Longth长度177.8 2022-09-08 16:59:04,296 [Thread=28] INFO - 进入getLongth 2022-09-08 16:59:04,296 [Thread=28] INFO - 目标坐标X-24.50586Y-29.623632 2022-09-08 16:59:04,297 [Thread=28] INFO - 晶圆的大小7 2022-09-08 16:59:04,297 [Thread=28] INFO - 晶圆的宽高177.8 2022-09-08 16:59:04,297 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:04,297 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 16:59:04,297 [Thread=28] INFO - X-安全坐标69.19 2022-09-08 16:59:04,297 [Thread=28] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:04,297 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 16:59:04,297 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 16:59:06,298 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:59:07,850 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:59:07,850 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:59:07,850 [Thread=1] INFO - Longth长度177.8 2022-09-08 16:59:07,850 [Thread=1] INFO - 进入getLongth 2022-09-08 16:59:07,850 [Thread=1] INFO - 目标坐标X-24.508589Y-29.664323 2022-09-08 16:59:07,850 [Thread=1] INFO - 晶圆的大小7 2022-09-08 16:59:07,850 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 16:59:07,850 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:07,851 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:59:07,851 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 16:59:07,851 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:07,851 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:59:07,851 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:59:10,841 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 16:59:10,845 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 16:59:10,858 [Thread=11] INFO - 单轴触发了 2022-09-08 16:59:10,858 [Thread=11] INFO - 该轴是Z 2022-09-08 16:59:10,858 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:10,858 [Thread=11] INFO - 该轴是Z,目标位置是-6.6724999976635 2022-09-08 16:59:10,859 [Thread=11] INFO - 步进失败 2022-09-08 16:59:10,859 [Thread=11] INFO - SwitchOffsetZ:0.006300002 2022-09-08 16:59:10,862 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:59:10,863 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:59:10,863 [Thread=11] INFO - Longth长度177.8 2022-09-08 16:59:10,863 [Thread=11] INFO - 进入getLongth 2022-09-08 16:59:10,863 [Thread=11] INFO - 目标坐标X-24.518589Y-29.667323 2022-09-08 16:59:10,863 [Thread=11] INFO - 晶圆的大小7 2022-09-08 16:59:10,863 [Thread=11] INFO - 晶圆的宽高177.8 2022-09-08 16:59:10,863 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:10,863 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 16:59:10,863 [Thread=11] INFO - X-安全坐标69.19 2022-09-08 16:59:10,864 [Thread=11] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:10,864 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 16:59:10,864 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 16:59:12,854 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 16:59:13,867 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:59:13,867 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:59:13,867 [Thread=1] INFO - Longth长度177.8 2022-09-08 16:59:13,867 [Thread=1] INFO - 进入getLongth 2022-09-08 16:59:13,867 [Thread=1] INFO - 目标坐标X-24.518372Y-29.67248 2022-09-08 16:59:13,867 [Thread=1] INFO - 晶圆的大小7 2022-09-08 16:59:13,867 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 16:59:13,867 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:13,867 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:59:13,867 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 16:59:13,868 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:13,868 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:59:13,868 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:59:16,730 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:59:16,730 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:59:16,730 [Thread=1] INFO - Longth长度177.8 2022-09-08 16:59:16,731 [Thread=1] INFO - 进入getLongth 2022-09-08 16:59:16,731 [Thread=1] INFO - 目标坐标X-24.518372Y-29.669964 2022-09-08 16:59:16,731 [Thread=1] INFO - 晶圆的大小7 2022-09-08 16:59:16,731 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 16:59:16,731 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:16,731 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 16:59:16,731 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 16:59:16,731 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:16,731 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 16:59:16,731 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 16:59:19,460 [Thread=19] INFO - 单轴触发了 2022-09-08 16:59:19,460 [Thread=19] INFO - 该轴是Z 2022-09-08 16:59:19,460 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:19,460 [Thread=19] INFO - 该轴是Z,目标位置是-6.6714000000475 2022-09-08 16:59:19,461 [Thread=19] INFO - 步进失败 2022-09-08 16:59:20,115 [Thread=20] INFO - 单轴触发了 2022-09-08 16:59:20,115 [Thread=20] INFO - 该轴是Z 2022-09-08 16:59:20,115 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:20,116 [Thread=20] INFO - 该轴是Z,目标位置是-6.6714000000475 2022-09-08 16:59:20,116 [Thread=20] INFO - 步进失败 2022-09-08 16:59:21,739 [Thread=21] INFO - 单轴触发了 2022-09-08 16:59:21,739 [Thread=21] INFO - 该轴是Z 2022-09-08 16:59:21,739 [Thread=21] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:21,739 [Thread=21] INFO - 该轴是Z,目标位置是-6.6713999999525 2022-09-08 16:59:21,740 [Thread=21] INFO - 步进失败 2022-09-08 16:59:23,426 [Thread=19] INFO - 单轴触发了 2022-09-08 16:59:23,427 [Thread=19] INFO - 该轴是Z 2022-09-08 16:59:23,427 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:23,427 [Thread=19] INFO - 该轴是Z,目标位置是-6.6703999999525 2022-09-08 16:59:23,428 [Thread=19] INFO - 步进失败 2022-09-08 16:59:26,141 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:59:26,213 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2510121018859 2022-09-08 16:59:26,213 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2055447618948 2022-09-08 16:59:26,213 [Thread=3] INFO - Measure angle is -90.228278 2022-09-08 16:59:26,217 [Thread=3] INFO - Measure StartPoint:990.41552734375,936.70703125, EndPoint:989.781616210938,1095.80773925781, PixelDistance:159.101971 2022-09-08 16:59:26,217 [Thread=3] INFO - DerivativeMeasure timespan = 3.8188 2022-09-08 16:59:27,181 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 16:59:27,248 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.3435406395748 2022-09-08 16:59:27,249 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.4073858502959 2022-09-08 16:59:27,249 [Thread=3] INFO - Measure angle is -90.375463 2022-09-08 16:59:27,251 [Thread=3] INFO - Measure StartPoint:1068.69494628906,936.954833984375, EndPoint:1067.65234375,1096.04577636719, PixelDistance:159.094359 2022-09-08 16:59:27,251 [Thread=3] INFO - DerivativeMeasure timespan = 2.4079 2022-09-08 16:59:28,834 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 16:59:28,837 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 16:59:28,852 [Thread=27] INFO - 单轴触发了 2022-09-08 16:59:28,852 [Thread=27] INFO - 该轴是Z 2022-09-08 16:59:28,852 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 16:59:28,852 [Thread=27] INFO - 该轴是Z,目标位置是-6.61940000095367 2022-09-08 16:59:28,852 [Thread=27] INFO - 步进失败 2022-09-08 16:59:28,852 [Thread=27] INFO - SwitchOffsetZ:0.051 2022-09-08 16:59:28,856 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 16:59:28,856 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 16:59:28,856 [Thread=27] INFO - Longth长度177.8 2022-09-08 16:59:28,856 [Thread=27] INFO - 进入getLongth 2022-09-08 16:59:28,857 [Thread=27] INFO - 目标坐标X-24.461372Y-29.588964 2022-09-08 16:59:28,857 [Thread=27] INFO - 晶圆的大小7 2022-09-08 16:59:28,857 [Thread=27] INFO - 晶圆的宽高177.8 2022-09-08 16:59:28,857 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:28,857 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 16:59:28,857 [Thread=27] INFO - X-安全坐标69.19 2022-09-08 16:59:28,857 [Thread=27] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:28,857 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 16:59:28,857 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 16:59:29,861 [Thread=13] INFO - stageout currentPos:-6.6196, currentVelocity:2, delayTime:3359, point.Z:-0.5 2022-09-08 16:59:29,861 [Thread=13] INFO - stage out homez 2022-09-08 16:59:35,233 [Thread=13] INFO - stage out home ok 2022-09-08 16:59:35,236 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 16:59:35,237 [Thread=13] INFO - stagein homez 2022-09-08 16:59:35,237 [Thread=13] INFO - stagein home ok 2022-09-08 16:59:35,237 [Thread=13] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 16:59:35,237 [Thread=13] INFO - Longth长度177.8 2022-09-08 16:59:35,237 [Thread=13] INFO - 进入getLongth 2022-09-08 16:59:35,237 [Thread=13] INFO - 目标坐标X-100Y-90 2022-09-08 16:59:35,238 [Thread=13] INFO - 晶圆的大小7 2022-09-08 16:59:35,238 [Thread=13] INFO - 晶圆的宽高177.8 2022-09-08 16:59:35,238 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 16:59:35,238 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 16:59:35,238 [Thread=13] INFO - X-安全坐标69.19 2022-09-08 16:59:35,238 [Thread=13] INFO - Y上安全坐标-67.5307 2022-09-08 16:59:35,238 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 16:59:35,238 [Thread=13] INFO - 双轴-目标点不在范围内 2022-09-08 16:59:35,238 [Thread=13] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 17:14:53,317 [Thread=4] INFO - SwitchIndex index:0 2022-09-08 17:14:53,322 [Thread=4] INFO - Switch Lens:Broadcast Event 2022-09-08 17:14:53,322 [Thread=27] INFO - 单轴触发了 2022-09-08 17:14:53,322 [Thread=27] INFO - 该轴是Z 2022-09-08 17:14:53,322 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 17:14:53,323 [Thread=27] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 17:14:53,323 [Thread=27] INFO - 步进失败 2022-09-08 17:14:53,323 [Thread=27] INFO - SwitchOffsetZ:0 2022-09-08 17:14:53,327 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 17:14:53,328 [Thread=27] INFO - stagein homez 2022-09-08 17:14:53,328 [Thread=27] INFO - stagein home ok 2022-09-08 17:14:53,328 [Thread=27] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 17:14:53,329 [Thread=27] INFO - Longth长度177.8 2022-09-08 17:14:53,329 [Thread=27] INFO - 进入getLongth 2022-09-08 17:14:53,329 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 17:14:53,329 [Thread=27] INFO - 晶圆的大小7 2022-09-08 17:14:53,329 [Thread=27] INFO - 晶圆的宽高177.8 2022-09-08 17:14:53,329 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:14:53,329 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 17:14:53,329 [Thread=27] INFO - X-安全坐标69.19 2022-09-08 17:14:53,329 [Thread=27] INFO - Y上安全坐标-67.5307 2022-09-08 17:14:53,329 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 17:14:53,330 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 17:14:53,330 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 17:14:54,351 [Thread=4] INFO - stagein currentPos:0.1408, currentVelocity:2, delayTime:620, point.Z:-0.5 2022-09-08 17:14:54,351 [Thread=4] INFO - stagein homez 2022-09-08 17:14:56,991 [Thread=4] INFO - stagein home ok 2022-09-08 17:14:56,993 [Thread=4] INFO - StageBack: waferSize = 7 2022-09-08 17:14:56,997 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 17:14:56,997 [Thread=4] INFO - stagein homez 2022-09-08 17:14:56,997 [Thread=4] INFO - stagein home ok 2022-09-08 17:14:56,997 [Thread=4] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 17:14:56,998 [Thread=4] INFO - Longth长度177.8 2022-09-08 17:14:56,998 [Thread=4] INFO - 进入getLongth 2022-09-08 17:14:56,998 [Thread=4] INFO - 目标坐标X64.19Y115.2693 2022-09-08 17:14:56,998 [Thread=4] INFO - 晶圆的大小7 2022-09-08 17:14:56,998 [Thread=4] INFO - 晶圆的宽高177.8 2022-09-08 17:14:56,998 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:14:56,998 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 17:14:56,998 [Thread=4] INFO - X-安全坐标69.19 2022-09-08 17:14:56,998 [Thread=4] INFO - Y上安全坐标-67.5307 2022-09-08 17:14:56,999 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 17:14:56,999 [Thread=4] INFO - 双轴-目标点在范围内 2022-09-08 17:15:07,609 [Thread=4] INFO - 单轴触发了 2022-09-08 17:15:07,609 [Thread=4] INFO - 该轴是Z 2022-09-08 17:15:07,610 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 17:15:07,610 [Thread=4] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 17:15:07,610 [Thread=4] INFO - 步进失败 2022-09-08 17:15:11,314 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:11,315 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:11,315 [Thread=1] INFO - Longth长度177.8 2022-09-08 17:15:11,315 [Thread=1] INFO - 进入getLongth 2022-09-08 17:15:11,315 [Thread=1] INFO - 目标坐标X-45.414Y-30.1097 2022-09-08 17:15:11,315 [Thread=1] INFO - 晶圆的大小7 2022-09-08 17:15:11,315 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 17:15:11,315 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:11,315 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 17:15:11,315 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 17:15:11,315 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:11,315 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 17:15:11,316 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 17:15:17,325 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 17:15:17,433 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 17:15:18,256 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 17:15:18,257 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 17:15:19,943 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:19,944 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:19,944 [Thread=1] INFO - Longth长度177.8 2022-09-08 17:15:19,944 [Thread=1] INFO - 进入getLongth 2022-09-08 17:15:19,944 [Thread=1] INFO - 目标坐标X-45.907704Y-29.967675 2022-09-08 17:15:19,944 [Thread=1] INFO - 晶圆的大小7 2022-09-08 17:15:19,944 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 17:15:19,944 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:19,945 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 17:15:19,945 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 17:15:19,945 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:19,945 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 17:15:19,945 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 17:15:22,885 [Thread=1] INFO - SwitchIndex index:1 2022-09-08 17:15:22,887 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 17:15:22,898 [Thread=28] INFO - 单轴触发了 2022-09-08 17:15:22,898 [Thread=28] INFO - 该轴是Z 2022-09-08 17:15:22,898 [Thread=28] INFO - 进入MoveSingleAxis_1 2022-09-08 17:15:22,898 [Thread=28] INFO - 该轴是Z,目标位置是-6.65310000138283 2022-09-08 17:15:22,899 [Thread=28] INFO - 步进失败 2022-09-08 17:15:22,899 [Thread=28] INFO - SwitchOffsetZ:-0.0573 2022-09-08 17:15:22,902 [Thread=28] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:22,902 [Thread=28] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:22,903 [Thread=28] INFO - Longth长度177.8 2022-09-08 17:15:22,903 [Thread=28] INFO - 进入getLongth 2022-09-08 17:15:22,903 [Thread=28] INFO - 目标坐标X-45.954704Y-30.045675 2022-09-08 17:15:22,903 [Thread=28] INFO - 晶圆的大小7 2022-09-08 17:15:22,903 [Thread=28] INFO - 晶圆的宽高177.8 2022-09-08 17:15:22,903 [Thread=28] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:22,903 [Thread=28] INFO - X+安全坐标-118.61 2022-09-08 17:15:22,903 [Thread=28] INFO - X-安全坐标69.19 2022-09-08 17:15:22,903 [Thread=28] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:22,903 [Thread=28] INFO - Y下安全坐标120.2693 2022-09-08 17:15:22,904 [Thread=28] INFO - 双轴-目标点在范围内 2022-09-08 17:15:24,911 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 17:15:26,203 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:26,203 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:26,203 [Thread=1] INFO - Longth长度177.8 2022-09-08 17:15:26,203 [Thread=1] INFO - 进入getLongth 2022-09-08 17:15:26,203 [Thread=1] INFO - 目标坐标X-45.971204Y-30.109068 2022-09-08 17:15:26,203 [Thread=1] INFO - 晶圆的大小7 2022-09-08 17:15:26,203 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 17:15:26,204 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:26,204 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 17:15:26,204 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 17:15:26,204 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:26,204 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 17:15:26,204 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 17:15:30,459 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 17:15:30,464 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 17:15:30,478 [Thread=13] INFO - 单轴触发了 2022-09-08 17:15:30,478 [Thread=13] INFO - 该轴是Z 2022-09-08 17:15:30,478 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 17:15:30,479 [Thread=13] INFO - 该轴是Z,目标位置是-6.6438999976635 2022-09-08 17:15:30,479 [Thread=13] INFO - 步进失败 2022-09-08 17:15:30,479 [Thread=13] INFO - SwitchOffsetZ:0.006300002 2022-09-08 17:15:30,484 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:30,484 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:30,484 [Thread=13] INFO - Longth长度177.8 2022-09-08 17:15:30,484 [Thread=13] INFO - 进入getLongth 2022-09-08 17:15:30,484 [Thread=13] INFO - 目标坐标X-45.981204Y-30.112068 2022-09-08 17:15:30,485 [Thread=13] INFO - 晶圆的大小7 2022-09-08 17:15:30,485 [Thread=13] INFO - 晶圆的宽高177.8 2022-09-08 17:15:30,485 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:30,485 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 17:15:30,485 [Thread=13] INFO - X-安全坐标69.19 2022-09-08 17:15:30,485 [Thread=13] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:30,485 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 17:15:30,486 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 17:15:32,472 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 17:15:33,550 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:33,550 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:33,550 [Thread=1] INFO - Longth长度177.8 2022-09-08 17:15:33,550 [Thread=1] INFO - 进入getLongth 2022-09-08 17:15:33,551 [Thread=1] INFO - 目标坐标X-45.981981Y-30.117909 2022-09-08 17:15:33,551 [Thread=1] INFO - 晶圆的大小7 2022-09-08 17:15:33,551 [Thread=1] INFO - 晶圆的宽高177.8 2022-09-08 17:15:33,551 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:33,551 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 17:15:33,551 [Thread=1] INFO - X-安全坐标69.19 2022-09-08 17:15:33,551 [Thread=1] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:33,551 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 17:15:33,551 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 17:15:38,259 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 17:15:38,319 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2241265833206 2022-09-08 17:15:38,319 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2625544658798 2022-09-08 17:15:38,319 [Thread=3] INFO - Measure angle is -90.243341 2022-09-08 17:15:38,328 [Thread=3] INFO - Measure StartPoint:988.830322265625,615.048889160156, EndPoint:985.413330078125,1419.58715820313, PixelDistance:804.545525 2022-09-08 17:15:38,328 [Thread=3] INFO - DerivativeMeasure timespan = 8.2013 2022-09-08 17:15:39,540 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 17:15:39,608 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2591365966698 2022-09-08 17:15:39,608 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 90.2388263717401 2022-09-08 17:15:39,608 [Thread=3] INFO - Measure angle is -90.248981 2022-09-08 17:15:39,618 [Thread=3] INFO - Measure StartPoint:976.591979980469,615.651611328125, EndPoint:973.096374511719,1420.05700683594, PixelDistance:804.412991 2022-09-08 17:15:39,618 [Thread=3] INFO - DerivativeMeasure timespan = 9.9434 2022-09-08 17:15:41,263 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 17:15:41,265 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 17:15:41,278 [Thread=13] INFO - 单轴触发了 2022-09-08 17:15:41,278 [Thread=13] INFO - 该轴是Z 2022-09-08 17:15:41,278 [Thread=13] INFO - 进入MoveSingleAxis_1 2022-09-08 17:15:41,279 [Thread=13] INFO - 该轴是Z,目标位置是-6.59160000095367 2022-09-08 17:15:41,279 [Thread=13] INFO - 步进失败 2022-09-08 17:15:41,279 [Thread=13] INFO - SwitchOffsetZ:0.051 2022-09-08 17:15:41,283 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 17:15:41,283 [Thread=13] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 17:15:41,283 [Thread=13] INFO - Longth长度177.8 2022-09-08 17:15:41,283 [Thread=13] INFO - 进入getLongth 2022-09-08 17:15:41,283 [Thread=13] INFO - 目标坐标X-45.924981Y-30.036909 2022-09-08 17:15:41,283 [Thread=13] INFO - 晶圆的大小7 2022-09-08 17:15:41,284 [Thread=13] INFO - 晶圆的宽高177.8 2022-09-08 17:15:41,284 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:41,284 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 17:15:41,284 [Thread=13] INFO - X-安全坐标69.19 2022-09-08 17:15:41,284 [Thread=13] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:41,284 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 17:15:41,284 [Thread=13] INFO - 双轴-目标点在范围内 2022-09-08 17:15:42,551 [Thread=27] INFO - stageout currentPos:-6.5918, currentVelocity:2, delayTime:3345, point.Z:-0.5 2022-09-08 17:15:42,552 [Thread=27] INFO - stage out homez 2022-09-08 17:15:47,919 [Thread=27] INFO - stage out home ok 2022-09-08 17:15:47,923 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 17:15:47,924 [Thread=27] INFO - stagein homez 2022-09-08 17:15:47,924 [Thread=27] INFO - stagein home ok 2022-09-08 17:15:47,924 [Thread=27] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 17:15:47,924 [Thread=27] INFO - Longth长度177.8 2022-09-08 17:15:47,924 [Thread=27] INFO - 进入getLongth 2022-09-08 17:15:47,924 [Thread=27] INFO - 目标坐标X-100Y-90 2022-09-08 17:15:47,925 [Thread=27] INFO - 晶圆的大小7 2022-09-08 17:15:47,925 [Thread=27] INFO - 晶圆的宽高177.8 2022-09-08 17:15:47,925 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 17:15:47,925 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 17:15:47,925 [Thread=27] INFO - X-安全坐标69.19 2022-09-08 17:15:47,925 [Thread=27] INFO - Y上安全坐标-67.5307 2022-09-08 17:15:47,925 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 17:15:47,925 [Thread=27] INFO - 双轴-目标点不在范围内 2022-09-08 17:15:47,925 [Thread=27] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:04:10,789 [Thread=11] INFO - SwitchIndex index:0 2022-09-08 18:04:10,793 [Thread=11] INFO - Switch Lens:Broadcast Event 2022-09-08 18:04:10,793 [Thread=4] INFO - 单轴触发了 2022-09-08 18:04:10,793 [Thread=4] INFO - 该轴是Z 2022-09-08 18:04:10,794 [Thread=4] INFO - 进入MoveSingleAxis_1 2022-09-08 18:04:10,794 [Thread=4] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 18:04:10,794 [Thread=4] INFO - 步进失败 2022-09-08 18:04:10,795 [Thread=4] INFO - SwitchOffsetZ:0 2022-09-08 18:04:10,814 [Thread=4] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 18:04:10,814 [Thread=4] INFO - stagein homez 2022-09-08 18:04:10,815 [Thread=4] INFO - stagein home ok 2022-09-08 18:04:10,815 [Thread=4] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 18:04:10,815 [Thread=4] INFO - Longth长度152.4 2022-09-08 18:04:10,815 [Thread=4] INFO - 进入getLongth 2022-09-08 18:04:10,815 [Thread=4] INFO - 目标坐标X-100Y-90 2022-09-08 18:04:10,815 [Thread=4] INFO - 晶圆的大小6 2022-09-08 18:04:10,815 [Thread=4] INFO - 晶圆的宽高152.4 2022-09-08 18:04:10,815 [Thread=4] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:10,815 [Thread=4] INFO - X+安全坐标-118.61 2022-09-08 18:04:10,815 [Thread=4] INFO - X-安全坐标43.79 2022-09-08 18:04:10,815 [Thread=4] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:10,815 [Thread=4] INFO - Y下安全坐标120.2693 2022-09-08 18:04:10,816 [Thread=4] INFO - 双轴-目标点不在范围内 2022-09-08 18:04:10,816 [Thread=4] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:04:11,839 [Thread=11] INFO - stagein currentPos:0.0805, currentVelocity:2, delayTime:590, point.Z:-0.5 2022-09-08 18:04:11,839 [Thread=11] INFO - stagein homez 2022-09-08 18:04:14,449 [Thread=11] INFO - stagein home ok 2022-09-08 18:04:14,451 [Thread=11] INFO - StageBack: waferSize = 6 2022-09-08 18:04:14,454 [Thread=11] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 18:04:14,455 [Thread=11] INFO - stagein homez 2022-09-08 18:04:14,455 [Thread=11] INFO - stagein home ok 2022-09-08 18:04:14,455 [Thread=11] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 18:04:14,455 [Thread=11] INFO - Longth长度152.4 2022-09-08 18:04:14,455 [Thread=11] INFO - 进入getLongth 2022-09-08 18:04:14,455 [Thread=11] INFO - 目标坐标X38.79Y115.2693 2022-09-08 18:04:14,455 [Thread=11] INFO - 晶圆的大小6 2022-09-08 18:04:14,455 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 18:04:14,455 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:14,455 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 18:04:14,456 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 18:04:14,456 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:14,456 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 18:04:14,456 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 18:04:22,329 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:04:22,329 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:04:22,329 [Thread=1] INFO - Longth长度152.4 2022-09-08 18:04:22,329 [Thread=1] INFO - 进入getLongth 2022-09-08 18:04:22,329 [Thread=1] INFO - 目标坐标X-12.138Y64.7763 2022-09-08 18:04:22,329 [Thread=1] INFO - 晶圆的大小6 2022-09-08 18:04:22,329 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 18:04:22,329 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:22,330 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 18:04:22,330 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 18:04:22,330 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:22,330 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 18:04:22,330 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 18:04:24,683 [Thread=11] INFO - 单轴触发了 2022-09-08 18:04:24,683 [Thread=11] INFO - 该轴是Z 2022-09-08 18:04:24,684 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 18:04:24,684 [Thread=11] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 18:04:24,684 [Thread=11] INFO - 步进失败 2022-09-08 18:04:27,341 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 18:04:27,446 [Thread=1] INFO - RealTimeFocusCommand_Start:Starting realtime focus... 2022-09-08 18:04:28,121 [Thread=1] INFO - 找到手动移动平台插件 2022-09-08 18:04:28,121 [Thread=1] INFO - 修改鼠标为手形 2022-09-08 18:04:31,922 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:04:31,922 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:04:31,922 [Thread=1] INFO - Longth长度152.4 2022-09-08 18:04:31,922 [Thread=1] INFO - 进入getLongth 2022-09-08 18:04:31,923 [Thread=1] INFO - 目标坐标X-12.506895Y65.051127 2022-09-08 18:04:31,923 [Thread=1] INFO - 晶圆的大小6 2022-09-08 18:04:31,923 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 18:04:31,923 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:31,923 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 18:04:31,923 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 18:04:31,923 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:31,923 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 18:04:31,923 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 18:04:34,907 [Thread=1] INFO - SwitchIndex index:2 2022-09-08 18:04:34,910 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 18:04:34,921 [Thread=27] INFO - 单轴触发了 2022-09-08 18:04:34,922 [Thread=27] INFO - 该轴是Z 2022-09-08 18:04:34,922 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 18:04:34,922 [Thread=27] INFO - 该轴是Z,目标位置是-3.29659999904633 2022-09-08 18:04:34,922 [Thread=27] INFO - 步进失败 2022-09-08 18:04:34,922 [Thread=27] INFO - SwitchOffsetZ:-0.051 2022-09-08 18:04:34,926 [Thread=27] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:04:34,927 [Thread=27] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:04:34,927 [Thread=27] INFO - Longth长度152.4 2022-09-08 18:04:34,927 [Thread=27] INFO - 进入getLongth 2022-09-08 18:04:34,927 [Thread=27] INFO - 目标坐标X-12.563895Y64.970127 2022-09-08 18:04:34,927 [Thread=27] INFO - 晶圆的大小6 2022-09-08 18:04:34,927 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 18:04:34,927 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:34,927 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 18:04:34,928 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 18:04:34,928 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:34,928 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 18:04:34,928 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 18:04:36,918 [Thread=1] INFO - 在范围内可以主动聚焦 2022-09-08 18:04:39,547 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:39,629 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0.0116592057597436 2022-09-08 18:04:39,629 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0.37987989778108 2022-09-08 18:04:39,629 [Thread=15] INFO - Measure angle is -0.19577 2022-09-08 18:04:39,635 [Thread=15] INFO - Measure StartPoint:802.718688964844,308.772399902344, EndPoint:1447.31591796875,310.974884033203, PixelDistance:644.600992 2022-09-08 18:04:39,635 [Thread=15] INFO - DerivativeMeasure timespan = 5.6071 2022-09-08 18:04:40,087 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:40,147 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 1.52417017175661 2022-09-08 18:04:40,148 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.923221956400193 2022-09-08 18:04:40,148 [Thread=3] INFO - Measure angle is -1.223696 2022-09-08 18:04:40,150 [Thread=3] INFO - Measure StartPoint:801.780822753906,450.309387207031, EndPoint:1446.525390625,464.081634521484, PixelDistance:644.891644 2022-09-08 18:04:40,150 [Thread=3] INFO - DerivativeMeasure timespan = 1.9483 2022-09-08 18:04:40,663 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:40,719 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:40,719 [Thread=15] INFO - Measure angle is 0 2022-09-08 18:04:40,723 [Thread=15] INFO - Measure StartPoint:801.454406738281,513, EndPoint:1446.28100585938,513, PixelDistance:644.826599 2022-09-08 18:04:40,724 [Thread=15] INFO - DerivativeMeasure timespan = 4.0327 2022-09-08 18:04:41,351 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:41,407 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:41,407 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0.070772944175974 2022-09-08 18:04:41,407 [Thread=3] INFO - Measure angle is -0.035386 2022-09-08 18:04:41,415 [Thread=3] INFO - Measure StartPoint:801.36328125,536.811218261719, EndPoint:1446.2568359375,537.209533691406, PixelDistance:644.893678 2022-09-08 18:04:41,415 [Thread=3] INFO - DerivativeMeasure timespan = 7.9003 2022-09-08 18:04:41,916 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:41,967 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 179.909915534606 2022-09-08 18:04:41,968 [Thread=15] INFO - Measure angle is -179.909916 2022-09-08 18:04:41,969 [Thread=15] INFO - DerivativeMeasure timespan = 1.5074 2022-09-08 18:04:42,480 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:42,549 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:42,549 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:42,549 [Thread=15] INFO - Measure angle is 0 2022-09-08 18:04:42,553 [Thread=15] INFO - Measure StartPoint:801.598693847656,654, EndPoint:1445.95288085938,654, PixelDistance:644.354187 2022-09-08 18:04:42,553 [Thread=15] INFO - DerivativeMeasure timespan = 3.9378 2022-09-08 18:04:43,041 [Thread=3] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:43,109 [Thread=3] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:43,109 [Thread=3] INFO - Measure angle is 0 2022-09-08 18:04:43,114 [Thread=3] INFO - Measure StartPoint:801.411987304688,607, EndPoint:1446.1337890625,607, PixelDistance:644.721802 2022-09-08 18:04:43,114 [Thread=3] INFO - DerivativeMeasure timespan = 5.03 2022-09-08 18:04:43,654 [Thread=15] INFO - searchExposureTime True: peak = 0, search 0 times, step = 100, lowLimit = -1, upLimit = -1 2022-09-08 18:04:43,713 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:43,713 [Thread=15] INFO - SetDerivativeMeasureParameters: Deg = 0 2022-09-08 18:04:43,713 [Thread=15] INFO - Measure angle is 0 2022-09-08 18:04:43,714 [Thread=15] INFO - Measure StartPoint:801.428466796875,605, EndPoint:1445.83911132813,605, PixelDistance:644.410645 2022-09-08 18:04:43,714 [Thread=15] INFO - DerivativeMeasure timespan = 1.1786 2022-09-08 18:04:45,817 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 18:04:45,822 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 18:04:45,833 [Thread=11] INFO - 单轴触发了 2022-09-08 18:04:45,833 [Thread=11] INFO - 该轴是Z 2022-09-08 18:04:45,833 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 18:04:45,834 [Thread=11] INFO - 该轴是Z,目标位置是-3.23670000095367 2022-09-08 18:04:45,834 [Thread=11] INFO - 步进失败 2022-09-08 18:04:45,834 [Thread=11] INFO - SwitchOffsetZ:0.051 2022-09-08 18:04:45,841 [Thread=11] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:04:45,842 [Thread=11] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:04:45,842 [Thread=11] INFO - Longth长度152.4 2022-09-08 18:04:45,842 [Thread=11] INFO - 进入getLongth 2022-09-08 18:04:45,842 [Thread=11] INFO - 目标坐标X-12.506895Y65.051127 2022-09-08 18:04:45,842 [Thread=11] INFO - 晶圆的大小6 2022-09-08 18:04:45,842 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 18:04:45,842 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:45,842 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 18:04:45,842 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 18:04:45,842 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:45,843 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 18:04:45,843 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 18:04:47,033 [Thread=13] INFO - stageout currentPos:-3.2877, currentVelocity:2, delayTime:1693, point.Z:-0.5 2022-09-08 18:04:47,034 [Thread=13] INFO - stage out homez 2022-09-08 18:04:50,751 [Thread=13] INFO - stage out home ok 2022-09-08 18:04:50,754 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 18:04:50,755 [Thread=13] INFO - stagein homez 2022-09-08 18:04:50,755 [Thread=13] INFO - stagein home ok 2022-09-08 18:04:50,755 [Thread=13] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 18:04:50,755 [Thread=13] INFO - Longth长度152.4 2022-09-08 18:04:50,755 [Thread=13] INFO - 进入getLongth 2022-09-08 18:04:50,755 [Thread=13] INFO - 目标坐标X-100Y-90 2022-09-08 18:04:50,755 [Thread=13] INFO - 晶圆的大小6 2022-09-08 18:04:50,755 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 18:04:50,757 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:04:50,757 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 18:04:50,757 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 18:04:50,757 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 18:04:50,757 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 18:04:50,757 [Thread=13] INFO - 双轴-目标点不在范围内 2022-09-08 18:04:50,757 [Thread=13] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:15:08,622 [Thread=29] INFO - SwitchIndex index:0 2022-09-08 18:15:08,626 [Thread=29] INFO - Switch Lens:Broadcast Event 2022-09-08 18:15:08,626 [Thread=15] INFO - 单轴触发了 2022-09-08 18:15:08,626 [Thread=15] INFO - 该轴是Z 2022-09-08 18:15:08,627 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 18:15:08,627 [Thread=15] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 18:15:08,627 [Thread=15] INFO - 步进失败 2022-09-08 18:15:08,627 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 18:15:08,633 [Thread=15] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 18:15:08,634 [Thread=15] INFO - stagein homez 2022-09-08 18:15:08,634 [Thread=15] INFO - stagein home ok 2022-09-08 18:15:08,634 [Thread=15] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 18:15:08,635 [Thread=15] INFO - Longth长度152.4 2022-09-08 18:15:08,635 [Thread=15] INFO - 进入getLongth 2022-09-08 18:15:08,635 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 18:15:08,635 [Thread=15] INFO - 晶圆的大小6 2022-09-08 18:15:08,635 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 18:15:08,635 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:15:08,635 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 18:15:08,636 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 18:15:08,636 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 18:15:08,636 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 18:15:08,636 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 18:15:08,636 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:15:09,671 [Thread=29] INFO - stagein currentPos:-0.1712, currentVelocity:2, delayTime:464, point.Z:-0.5 2022-09-08 18:15:09,671 [Thread=29] INFO - stagein homez 2022-09-08 18:15:12,156 [Thread=29] INFO - stagein home ok 2022-09-08 18:15:12,158 [Thread=29] INFO - StageBack: waferSize = 6 2022-09-08 18:15:12,163 [Thread=29] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 18:15:12,163 [Thread=29] INFO - stagein homez 2022-09-08 18:15:12,163 [Thread=29] INFO - stagein home ok 2022-09-08 18:15:12,163 [Thread=29] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 18:15:12,163 [Thread=29] INFO - Longth长度152.4 2022-09-08 18:15:12,163 [Thread=29] INFO - 进入getLongth 2022-09-08 18:15:12,164 [Thread=29] INFO - 目标坐标X38.79Y115.2693 2022-09-08 18:15:12,164 [Thread=29] INFO - 晶圆的大小6 2022-09-08 18:15:12,164 [Thread=29] INFO - 晶圆的宽高152.4 2022-09-08 18:15:12,164 [Thread=29] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:15:12,164 [Thread=29] INFO - X+安全坐标-118.61 2022-09-08 18:15:12,164 [Thread=29] INFO - X-安全坐标43.79 2022-09-08 18:15:12,164 [Thread=29] INFO - Y上安全坐标-42.1307 2022-09-08 18:15:12,164 [Thread=29] INFO - Y下安全坐标120.2693 2022-09-08 18:15:12,164 [Thread=29] INFO - 双轴-目标点在范围内 2022-09-08 18:15:19,442 [Thread=29] INFO - 单轴触发了 2022-09-08 18:15:19,443 [Thread=29] INFO - 该轴是Z 2022-09-08 18:15:19,443 [Thread=29] INFO - 进入MoveSingleAxis_1 2022-09-08 18:15:19,443 [Thread=29] INFO - 该轴是Z,目标位置是-5.688 2022-09-08 18:15:19,443 [Thread=29] INFO - 步进失败 2022-09-08 18:15:19,549 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:15:19,549 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:15:19,549 [Thread=1] INFO - Longth长度152.4 2022-09-08 18:15:19,550 [Thread=1] INFO - 进入getLongth 2022-09-08 18:15:19,550 [Thread=1] INFO - 目标坐标X-7.43500000000002Y68.4783 2022-09-08 18:15:19,550 [Thread=1] INFO - 晶圆的大小6 2022-09-08 18:15:19,550 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 18:15:19,550 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:15:19,550 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 18:15:19,550 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 18:15:19,550 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 18:15:19,550 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 18:15:19,551 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 18:15:33,267 [Thread=1] INFO - Version 2.2.1.2648 2022-09-08 18:15:33,276 [Thread=1] INFO - Starting Develop... 2022-09-08 18:15:33,279 [Thread=1] INFO - Init Develop... 2022-09-08 18:15:33,288 [Thread=1] INFO - Looking for AddIns... 2022-09-08 18:15:33,294 [Thread=1] INFO - Loading AddInTree... 2022-09-08 18:15:33,311 [Thread=1] INFO - Running autostart commands... 2022-09-08 18:15:33,312 [Thread=1] INFO - InitDevelop finished 2022-09-08 18:15:33,313 [Thread=1] INFO - Initializing workbench... 2022-09-08 18:15:33,317 [Thread=1] INFO - Loading addin Storm.AutoInspection.dll 2022-09-08 18:15:33,326 [Thread=1] INFO - Loading addin Storm.ReportManagement.dll 2022-09-08 18:15:33,338 [Thread=1] INFO - Loading addin Storm.Workflow.dll 2022-09-08 18:15:33,342 [Thread=1] INFO - Initialize Job Service 2022-09-08 18:15:33,345 [Thread=1] INFO - Initialize Report Servies 2022-09-08 18:15:33,346 [Thread=1] INFO - Initialize System Plugins Service 2022-09-08 18:15:34,608 [Thread=12] INFO - Close device:TowerLedG 2022-09-08 18:15:34,610 [Thread=12] INFO - Cmd:RS MR109 2022-09-08 18:15:34,715 [Thread=12] INFO - Close device:TowerLedR 2022-09-08 18:15:34,715 [Thread=12] INFO - Cmd:RS MR107 2022-09-08 18:15:34,718 [Thread=12] INFO - Cmd:ST MR108 2022-09-08 18:15:35,411 [Thread=12] INFO - axis is X 2022-09-08 18:15:35,428 [Thread=12] INFO - SetAccelerator PositionerName is XY.X 2022-09-08 18:15:35,429 [Thread=12] INFO - axis is Y 2022-09-08 18:15:35,444 [Thread=12] INFO - SetAccelerator PositionerName is XY.Y 2022-09-08 18:15:35,444 [Thread=12] INFO - axis is R 2022-09-08 18:15:35,445 [Thread=12] INFO - PLX Initialize Success 2022-09-08 18:15:35,467 [Thread=12] INFO - Witdh = 2448, Height = 2048 2022-09-08 18:15:35,467 [Thread=12] INFO - RealTime = 1 2022-09-08 18:15:35,469 [Thread=12] INFO - Moogee: OPTION_MAX_PRECISE_FRAMERATE = 0 2022-09-08 18:15:35,470 [Thread=12] INFO - Moogee: OPTION_PRECISE_FRAMERATE = 0 2022-09-08 18:15:35,470 [Thread=12] INFO - Real Witdh = 2048, Height = 2048 2022-09-08 18:15:35,510 [Thread=12] INFO - VPMicroscope Initialize Success 2022-09-08 18:15:35,512 [Thread=12] INFO - VPMMS Initialize Success 2022-09-08 18:15:38,531 [Thread=1] INFO - Initialize Lens Switch Service 2022-09-08 18:15:38,532 [Thread=1] INFO - Initialize Stage Status Service 2022-09-08 18:15:38,535 [Thread=1] INFO - Loading addin :DevelopCode.Develop 2022-09-08 18:15:38,558 [Thread=1] INFO - Loading addin Storm.ImageBinding.dll 2022-09-08 18:15:38,562 [Thread=1] INFO - Loading addin Storm.Measure.dll 2022-09-08 18:15:38,647 [Thread=1] INFO - Loading addin :Storm.Command.Common 2022-09-08 18:15:39,112 [Thread=1] INFO - Loading addin Storm.ManualMeasure.dll 2022-09-08 18:15:39,539 [Thread=1] INFO - Starting workbench... 2022-09-08 18:15:40,604 [Thread=1] INFO - SwitchIndex index:0 2022-09-08 18:15:40,608 [Thread=1] INFO - Switch Lens:Broadcast Event 2022-09-08 18:15:40,645 [Thread=1] INFO - Loading addin :Storm.ImageBinding.DrawPanel 2022-09-08 18:15:41,606 [Thread=1] INFO - Initialize System Service 2022-09-08 18:15:44,480 [Thread=5] INFO - SwitchIndex index:0 2022-09-08 18:15:44,484 [Thread=5] INFO - Switch Lens:Broadcast Event 2022-09-08 18:15:44,485 [Thread=6] INFO - 单轴触发了 2022-09-08 18:15:44,485 [Thread=6] INFO - 该轴是Z 2022-09-08 18:15:44,486 [Thread=6] INFO - 进入MoveSingleAxis_1 2022-09-08 18:15:44,487 [Thread=6] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 18:15:44,487 [Thread=6] INFO - 步进失败 2022-09-08 18:15:44,487 [Thread=6] INFO - SwitchOffsetZ:0 2022-09-08 18:15:44,499 [Thread=6] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:15:44,499 [Thread=6] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:15:44,499 [Thread=6] INFO - Longth长度152.4 2022-09-08 18:15:44,499 [Thread=6] INFO - 进入getLongth 2022-09-08 18:15:44,500 [Thread=6] INFO - 目标坐标X-7.435Y68.4783 2022-09-08 18:15:44,500 [Thread=6] INFO - 晶圆的大小6 2022-09-08 18:15:44,500 [Thread=6] INFO - 晶圆的宽高152.4 2022-09-08 18:15:44,500 [Thread=6] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:15:44,500 [Thread=6] INFO - X+安全坐标-118.61 2022-09-08 18:15:44,500 [Thread=6] INFO - X-安全坐标43.79 2022-09-08 18:15:44,500 [Thread=6] INFO - Y上安全坐标-42.1307 2022-09-08 18:15:44,500 [Thread=6] INFO - Y下安全坐标120.2693 2022-09-08 18:15:44,500 [Thread=6] INFO - 双轴-目标点在范围内 2022-09-08 18:15:45,518 [Thread=5] INFO - stageout currentPos:-0.4998, currentVelocity:2, delayTime:300, point.Z:-0.5 2022-09-08 18:15:45,519 [Thread=5] INFO - stage out homez 2022-09-08 18:15:47,827 [Thread=5] INFO - stage out home ok 2022-09-08 18:15:47,832 [Thread=5] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 18:15:47,833 [Thread=5] INFO - stagein homez 2022-09-08 18:15:47,833 [Thread=5] INFO - stagein home ok 2022-09-08 18:15:47,833 [Thread=5] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 18:15:47,833 [Thread=5] INFO - Longth长度152.4 2022-09-08 18:15:47,833 [Thread=5] INFO - 进入getLongth 2022-09-08 18:15:47,833 [Thread=5] INFO - 目标坐标X-100Y-90 2022-09-08 18:15:47,833 [Thread=5] INFO - 晶圆的大小6 2022-09-08 18:15:47,833 [Thread=5] INFO - 晶圆的宽高152.4 2022-09-08 18:15:47,834 [Thread=5] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:15:47,834 [Thread=5] INFO - X+安全坐标-118.61 2022-09-08 18:15:47,834 [Thread=5] INFO - X-安全坐标43.79 2022-09-08 18:15:47,834 [Thread=5] INFO - Y上安全坐标-42.1307 2022-09-08 18:15:47,834 [Thread=5] INFO - Y下安全坐标120.2693 2022-09-08 18:15:47,834 [Thread=5] INFO - 双轴-目标点不在范围内 2022-09-08 18:15:47,834 [Thread=5] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:22:36,025 [Thread=11] INFO - SwitchIndex index:0 2022-09-08 18:22:36,028 [Thread=11] INFO - Switch Lens:Broadcast Event 2022-09-08 18:22:36,028 [Thread=16] INFO - 单轴触发了 2022-09-08 18:22:36,028 [Thread=16] INFO - 该轴是Z 2022-09-08 18:22:36,028 [Thread=16] INFO - 进入MoveSingleAxis_1 2022-09-08 18:22:36,029 [Thread=16] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 18:22:36,029 [Thread=16] INFO - 步进失败 2022-09-08 18:22:36,030 [Thread=16] INFO - SwitchOffsetZ:0 2022-09-08 18:22:36,035 [Thread=16] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 18:22:36,036 [Thread=16] INFO - stagein homez 2022-09-08 18:22:36,036 [Thread=16] INFO - stagein home ok 2022-09-08 18:22:36,036 [Thread=16] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 18:22:36,036 [Thread=16] INFO - Longth长度152.4 2022-09-08 18:22:36,036 [Thread=16] INFO - 进入getLongth 2022-09-08 18:22:36,036 [Thread=16] INFO - 目标坐标X-100Y-90 2022-09-08 18:22:36,036 [Thread=16] INFO - 晶圆的大小6 2022-09-08 18:22:36,036 [Thread=16] INFO - 晶圆的宽高152.4 2022-09-08 18:22:36,037 [Thread=16] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:22:36,037 [Thread=16] INFO - X+安全坐标-118.61 2022-09-08 18:22:36,037 [Thread=16] INFO - X-安全坐标43.79 2022-09-08 18:22:36,037 [Thread=16] INFO - Y上安全坐标-42.1307 2022-09-08 18:22:36,037 [Thread=16] INFO - Y下安全坐标120.2693 2022-09-08 18:22:36,037 [Thread=16] INFO - 双轴-目标点不在范围内 2022-09-08 18:22:36,037 [Thread=16] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:22:37,042 [Thread=11] INFO - stagein currentPos:-0.1686, currentVelocity:2, delayTime:465, point.Z:-0.5 2022-09-08 18:22:37,042 [Thread=11] INFO - stagein homez 2022-09-08 18:22:39,521 [Thread=11] INFO - stagein home ok 2022-09-08 18:22:39,523 [Thread=11] INFO - StageBack: waferSize = 6 2022-09-08 18:22:39,527 [Thread=11] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 18:22:39,527 [Thread=11] INFO - stagein homez 2022-09-08 18:22:39,528 [Thread=11] INFO - stagein home ok 2022-09-08 18:22:39,528 [Thread=11] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 18:22:39,528 [Thread=11] INFO - Longth长度152.4 2022-09-08 18:22:39,528 [Thread=11] INFO - 进入getLongth 2022-09-08 18:22:39,528 [Thread=11] INFO - 目标坐标X38.79Y115.2693 2022-09-08 18:22:39,528 [Thread=11] INFO - 晶圆的大小6 2022-09-08 18:22:39,528 [Thread=11] INFO - 晶圆的宽高152.4 2022-09-08 18:22:39,528 [Thread=11] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:22:39,528 [Thread=11] INFO - X+安全坐标-118.61 2022-09-08 18:22:39,528 [Thread=11] INFO - X-安全坐标43.79 2022-09-08 18:22:39,529 [Thread=11] INFO - Y上安全坐标-42.1307 2022-09-08 18:22:39,529 [Thread=11] INFO - Y下安全坐标120.2693 2022-09-08 18:22:39,529 [Thread=11] INFO - 双轴-目标点在范围内 2022-09-08 18:22:47,208 [Thread=11] INFO - 单轴触发了 2022-09-08 18:22:47,209 [Thread=11] INFO - 该轴是Z 2022-09-08 18:22:47,209 [Thread=11] INFO - 进入MoveSingleAxis_1 2022-09-08 18:22:47,209 [Thread=11] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 18:22:47,209 [Thread=11] INFO - 步进失败 2022-09-08 18:23:06,107 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:06,107 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:06,107 [Thread=1] INFO - Longth长度152.4 2022-09-08 18:23:06,107 [Thread=1] INFO - 进入getLongth 2022-09-08 18:23:06,107 [Thread=1] INFO - 目标坐标X37.79Y113.2693 2022-09-08 18:23:06,108 [Thread=1] INFO - 晶圆的大小6 2022-09-08 18:23:06,108 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 18:23:06,108 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:06,108 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 18:23:06,108 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 18:23:06,108 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:06,108 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 18:23:06,109 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 18:23:15,008 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:15,008 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:15,008 [Thread=1] INFO - Longth长度152.4 2022-09-08 18:23:15,009 [Thread=1] INFO - 进入getLongth 2022-09-08 18:23:15,009 [Thread=1] INFO - 目标坐标X27.79Y93.2693 2022-09-08 18:23:15,009 [Thread=1] INFO - 晶圆的大小6 2022-09-08 18:23:15,009 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 18:23:15,009 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:15,009 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 18:23:15,009 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 18:23:15,009 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:15,009 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 18:23:15,010 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 18:23:24,997 [Thread=19] INFO - 单轴触发了 2022-09-08 18:23:25,001 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:25,001 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:25,001 [Thread=19] INFO - 单轴-目标点在范围内 2022-09-08 18:23:25,002 [Thread=19] INFO - 进入MoveSingleAxis_1 2022-09-08 18:23:25,002 [Thread=19] INFO - 进入MoveSingleAxis_2 2022-09-08 18:23:25,002 [Thread=19] INFO - 进入MoveSingleAxis_3 2022-09-08 18:23:25,002 [Thread=19] INFO - 进入MoveSingleAxis_4 2022-09-08 18:23:25,706 [Thread=19] INFO - 进入MoveSingleAxis_5 2022-09-08 18:23:25,706 [Thread=19] INFO - 进入MoveSingleAxis_6 2022-09-08 18:23:25,706 [Thread=19] INFO - 该轴是X,目标位置是7.78999999999998 2022-09-08 18:23:25,707 [Thread=19] INFO - 步进失败 2022-09-08 18:23:26,217 [Thread=20] INFO - 单轴触发了 2022-09-08 18:23:26,220 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:26,223 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:26,223 [Thread=20] INFO - 单轴-目标点在范围内 2022-09-08 18:23:26,223 [Thread=20] INFO - 进入MoveSingleAxis_1 2022-09-08 18:23:26,223 [Thread=20] INFO - 进入MoveSingleAxis_2 2022-09-08 18:23:26,224 [Thread=20] INFO - 进入MoveSingleAxis_3 2022-09-08 18:23:26,224 [Thread=20] INFO - 进入MoveSingleAxis_4 2022-09-08 18:23:26,942 [Thread=20] INFO - 进入MoveSingleAxis_5 2022-09-08 18:23:26,942 [Thread=20] INFO - 进入MoveSingleAxis_6 2022-09-08 18:23:26,942 [Thread=20] INFO - 该轴是X,目标位置是-12.21 2022-09-08 18:23:26,942 [Thread=20] INFO - 步进失败 2022-09-08 18:23:28,168 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:28,168 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:28,168 [Thread=21] INFO - Longth长度152.4 2022-09-08 18:23:28,168 [Thread=21] INFO - 进入getLongth 2022-09-08 18:23:28,168 [Thread=21] INFO - 目标坐标X-32.21Y73.2693 2022-09-08 18:23:28,168 [Thread=21] INFO - 晶圆的大小6 2022-09-08 18:23:28,169 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 18:23:28,169 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:28,169 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 18:23:28,169 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 18:23:28,169 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:28,169 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 18:23:28,169 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 18:23:29,669 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:29,670 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:29,670 [Thread=19] INFO - Longth长度152.4 2022-09-08 18:23:29,670 [Thread=19] INFO - 进入getLongth 2022-09-08 18:23:29,670 [Thread=19] INFO - 目标坐标X-52.21Y53.2693 2022-09-08 18:23:29,670 [Thread=19] INFO - 晶圆的大小6 2022-09-08 18:23:29,670 [Thread=19] INFO - 晶圆的宽高152.4 2022-09-08 18:23:29,670 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:29,670 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 18:23:29,671 [Thread=19] INFO - X-安全坐标43.79 2022-09-08 18:23:29,671 [Thread=19] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:29,671 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 18:23:29,671 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 18:23:32,134 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:32,135 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:32,135 [Thread=20] INFO - Longth长度152.4 2022-09-08 18:23:32,135 [Thread=20] INFO - 进入getLongth 2022-09-08 18:23:32,135 [Thread=20] INFO - 目标坐标X-32.21Y73.2693 2022-09-08 18:23:32,135 [Thread=20] INFO - 晶圆的大小6 2022-09-08 18:23:32,135 [Thread=20] INFO - 晶圆的宽高152.4 2022-09-08 18:23:32,135 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:32,135 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 18:23:32,135 [Thread=20] INFO - X-安全坐标43.79 2022-09-08 18:23:32,135 [Thread=20] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:32,136 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 18:23:32,136 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 18:23:33,063 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:33,063 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:33,063 [Thread=21] INFO - Longth长度152.4 2022-09-08 18:23:33,063 [Thread=21] INFO - 进入getLongth 2022-09-08 18:23:33,064 [Thread=21] INFO - 目标坐标X-12.21Y93.2693 2022-09-08 18:23:33,064 [Thread=21] INFO - 晶圆的大小6 2022-09-08 18:23:33,064 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 18:23:33,064 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:33,064 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 18:23:33,064 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 18:23:33,064 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:33,064 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 18:23:33,064 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 18:23:36,029 [Thread=15] INFO - SwitchIndex index:0 2022-09-08 18:23:36,032 [Thread=15] INFO - Switch Lens:Broadcast Event 2022-09-08 18:23:36,032 [Thread=5] INFO - 单轴触发了 2022-09-08 18:23:36,032 [Thread=5] INFO - 该轴是Z 2022-09-08 18:23:36,032 [Thread=5] INFO - 进入MoveSingleAxis_1 2022-09-08 18:23:36,033 [Thread=5] INFO - 该轴是Z,目标位置是-1.5878 2022-09-08 18:23:36,033 [Thread=5] INFO - 步进失败 2022-09-08 18:23:36,033 [Thread=5] INFO - SwitchOffsetZ:0 2022-09-08 18:23:36,039 [Thread=5] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:23:36,040 [Thread=5] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:23:36,040 [Thread=5] INFO - Longth长度152.4 2022-09-08 18:23:36,040 [Thread=5] INFO - 进入getLongth 2022-09-08 18:23:36,040 [Thread=5] INFO - 目标坐标X-12.21Y93.2693 2022-09-08 18:23:36,040 [Thread=5] INFO - 晶圆的大小6 2022-09-08 18:23:36,040 [Thread=5] INFO - 晶圆的宽高152.4 2022-09-08 18:23:36,040 [Thread=5] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:36,040 [Thread=5] INFO - X+安全坐标-118.61 2022-09-08 18:23:36,041 [Thread=5] INFO - X-安全坐标43.79 2022-09-08 18:23:36,041 [Thread=5] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:36,041 [Thread=5] INFO - Y下安全坐标120.2693 2022-09-08 18:23:36,041 [Thread=5] INFO - 双轴-目标点在范围内 2022-09-08 18:23:37,041 [Thread=15] INFO - stageout currentPos:-1.5878, currentVelocity:2, delayTime:843, point.Z:-0.5 2022-09-08 18:23:37,041 [Thread=15] INFO - stage out homez 2022-09-08 18:23:39,899 [Thread=15] INFO - stage out home ok 2022-09-08 18:23:39,902 [Thread=15] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 18:23:39,902 [Thread=15] INFO - stagein homez 2022-09-08 18:23:39,903 [Thread=15] INFO - stagein home ok 2022-09-08 18:23:39,903 [Thread=15] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 18:23:39,903 [Thread=15] INFO - Longth长度152.4 2022-09-08 18:23:39,903 [Thread=15] INFO - 进入getLongth 2022-09-08 18:23:39,903 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 18:23:39,903 [Thread=15] INFO - 晶圆的大小6 2022-09-08 18:23:39,903 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 18:23:39,903 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:39,903 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 18:23:39,903 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 18:23:39,903 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:39,904 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 18:23:39,904 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 18:23:39,904 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:23:49,356 [Thread=27] INFO - SwitchIndex index:0 2022-09-08 18:23:49,359 [Thread=27] INFO - Switch Lens:Broadcast Event 2022-09-08 18:23:49,360 [Thread=15] INFO - 单轴触发了 2022-09-08 18:23:49,360 [Thread=15] INFO - 该轴是Z 2022-09-08 18:23:49,360 [Thread=15] INFO - 进入MoveSingleAxis_1 2022-09-08 18:23:49,360 [Thread=15] INFO - 该轴是Z,目标位置是-0.4998 2022-09-08 18:23:49,360 [Thread=15] INFO - 步进失败 2022-09-08 18:23:49,360 [Thread=15] INFO - SwitchOffsetZ:0 2022-09-08 18:23:49,364 [Thread=15] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区False 2022-09-08 18:23:49,365 [Thread=15] INFO - stagein homez 2022-09-08 18:23:49,365 [Thread=15] INFO - stagein home ok 2022-09-08 18:23:49,365 [Thread=15] INFO - 当前位置不在安全区，目标点也不在安全区，Z回原点 2022-09-08 18:23:49,365 [Thread=15] INFO - Longth长度152.4 2022-09-08 18:23:49,365 [Thread=15] INFO - 进入getLongth 2022-09-08 18:23:49,366 [Thread=15] INFO - 目标坐标X-100Y-90 2022-09-08 18:23:49,366 [Thread=15] INFO - 晶圆的大小6 2022-09-08 18:23:49,366 [Thread=15] INFO - 晶圆的宽高152.4 2022-09-08 18:23:49,366 [Thread=15] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:49,366 [Thread=15] INFO - X+安全坐标-118.61 2022-09-08 18:23:49,366 [Thread=15] INFO - X-安全坐标43.79 2022-09-08 18:23:49,366 [Thread=15] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:49,366 [Thread=15] INFO - Y下安全坐标120.2693 2022-09-08 18:23:49,366 [Thread=15] INFO - 双轴-目标点不在范围内 2022-09-08 18:23:49,366 [Thread=15] INFO - 双轴-主动聚焦处于关闭状态 2022-09-08 18:23:50,369 [Thread=27] INFO - stagein currentPos:-0.042, currentVelocity:2, delayTime:529, point.Z:-0.5 2022-09-08 18:23:50,369 [Thread=27] INFO - stagein homez 2022-09-08 18:23:52,910 [Thread=27] INFO - stagein home ok 2022-09-08 18:23:52,912 [Thread=27] INFO - StageBack: waferSize = 6 2022-09-08 18:23:52,918 [Thread=27] INFO - 当前位置是否在安全区False，目标位置状态是否在安全区True 2022-09-08 18:23:52,918 [Thread=27] INFO - stagein homez 2022-09-08 18:23:52,918 [Thread=27] INFO - stagein home ok 2022-09-08 18:23:52,918 [Thread=27] INFO - 当前位置不在安全区，目标点在安全区，Z回原点 2022-09-08 18:23:52,918 [Thread=27] INFO - Longth长度152.4 2022-09-08 18:23:52,918 [Thread=27] INFO - 进入getLongth 2022-09-08 18:23:52,919 [Thread=27] INFO - 目标坐标X38.79Y115.2693 2022-09-08 18:23:52,919 [Thread=27] INFO - 晶圆的大小6 2022-09-08 18:23:52,919 [Thread=27] INFO - 晶圆的宽高152.4 2022-09-08 18:23:52,919 [Thread=27] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:23:52,919 [Thread=27] INFO - X+安全坐标-118.61 2022-09-08 18:23:52,919 [Thread=27] INFO - X-安全坐标43.79 2022-09-08 18:23:52,919 [Thread=27] INFO - Y上安全坐标-42.1307 2022-09-08 18:23:52,919 [Thread=27] INFO - Y下安全坐标120.2693 2022-09-08 18:23:52,919 [Thread=27] INFO - 双轴-目标点在范围内 2022-09-08 18:24:00,977 [Thread=1] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:24:00,977 [Thread=1] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:24:00,977 [Thread=1] INFO - Longth长度152.4 2022-09-08 18:24:00,978 [Thread=1] INFO - 进入getLongth 2022-09-08 18:24:00,978 [Thread=1] INFO - 目标坐标X28.79Y95.2693 2022-09-08 18:24:00,978 [Thread=1] INFO - 晶圆的大小6 2022-09-08 18:24:00,978 [Thread=1] INFO - 晶圆的宽高152.4 2022-09-08 18:24:00,978 [Thread=1] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:00,978 [Thread=1] INFO - X+安全坐标-118.61 2022-09-08 18:24:00,978 [Thread=1] INFO - X-安全坐标43.79 2022-09-08 18:24:00,978 [Thread=1] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:00,978 [Thread=1] INFO - Y下安全坐标120.2693 2022-09-08 18:24:00,978 [Thread=1] INFO - 双轴-目标点在范围内 2022-09-08 18:24:02,336 [Thread=27] INFO - 单轴触发了 2022-09-08 18:24:02,336 [Thread=27] INFO - 该轴是Z 2022-09-08 18:24:02,337 [Thread=27] INFO - 进入MoveSingleAxis_1 2022-09-08 18:24:02,337 [Thread=27] INFO - 该轴是Z,目标位置是-1.588 2022-09-08 18:24:02,337 [Thread=27] INFO - 步进失败 2022-09-08 18:24:06,772 [Thread=19] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:24:06,772 [Thread=19] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:24:06,772 [Thread=19] INFO - Longth长度152.4 2022-09-08 18:24:06,773 [Thread=19] INFO - 进入getLongth 2022-09-08 18:24:06,773 [Thread=19] INFO - 目标坐标X8.78999999999998Y75.2693 2022-09-08 18:24:06,773 [Thread=19] INFO - 晶圆的大小6 2022-09-08 18:24:06,773 [Thread=19] INFO - 晶圆的宽高152.4 2022-09-08 18:24:06,773 [Thread=19] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:06,773 [Thread=19] INFO - X+安全坐标-118.61 2022-09-08 18:24:06,773 [Thread=19] INFO - X-安全坐标43.79 2022-09-08 18:24:06,773 [Thread=19] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:06,774 [Thread=19] INFO - Y下安全坐标120.2693 2022-09-08 18:24:06,774 [Thread=19] INFO - 双轴-目标点在范围内 2022-09-08 18:24:07,953 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:24:07,953 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:24:07,954 [Thread=21] INFO - Longth长度152.4 2022-09-08 18:24:07,954 [Thread=21] INFO - 进入getLongth 2022-09-08 18:24:07,954 [Thread=21] INFO - 目标坐标X-11.21Y55.2693 2022-09-08 18:24:07,954 [Thread=21] INFO - 晶圆的大小6 2022-09-08 18:24:07,954 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 18:24:07,955 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:07,955 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 18:24:07,955 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 18:24:07,955 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:07,955 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 18:24:07,955 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 18:24:09,074 [Thread=20] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:24:09,074 [Thread=20] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:24:09,074 [Thread=20] INFO - Longth长度152.4 2022-09-08 18:24:09,074 [Thread=20] INFO - 进入getLongth 2022-09-08 18:24:09,074 [Thread=20] INFO - 目标坐标X-31.21Y35.2693 2022-09-08 18:24:09,075 [Thread=20] INFO - 晶圆的大小6 2022-09-08 18:24:09,075 [Thread=20] INFO - 晶圆的宽高152.4 2022-09-08 18:24:09,075 [Thread=20] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:09,075 [Thread=20] INFO - X+安全坐标-118.61 2022-09-08 18:24:09,075 [Thread=20] INFO - X-安全坐标43.79 2022-09-08 18:24:09,075 [Thread=20] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:09,075 [Thread=20] INFO - Y下安全坐标120.2693 2022-09-08 18:24:09,075 [Thread=20] INFO - 双轴-目标点在范围内 2022-09-08 18:24:10,107 [Thread=21] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:24:10,107 [Thread=21] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:24:10,107 [Thread=21] INFO - Longth长度152.4 2022-09-08 18:24:10,108 [Thread=21] INFO - 进入getLongth 2022-09-08 18:24:10,108 [Thread=21] INFO - 目标坐标X-51.21Y15.2693 2022-09-08 18:24:10,108 [Thread=21] INFO - 晶圆的大小6 2022-09-08 18:24:10,108 [Thread=21] INFO - 晶圆的宽高152.4 2022-09-08 18:24:10,108 [Thread=21] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:10,108 [Thread=21] INFO - X+安全坐标-118.61 2022-09-08 18:24:10,108 [Thread=21] INFO - X-安全坐标43.79 2022-09-08 18:24:10,108 [Thread=21] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:10,109 [Thread=21] INFO - Y下安全坐标120.2693 2022-09-08 18:24:10,109 [Thread=21] INFO - 双轴-目标点在范围内 2022-09-08 18:24:16,858 [Thread=13] INFO - SwitchIndex index:0 2022-09-08 18:24:16,861 [Thread=13] INFO - Switch Lens:Broadcast Event 2022-09-08 18:24:16,862 [Thread=16] INFO - 单轴触发了 2022-09-08 18:24:16,862 [Thread=16] INFO - 该轴是Z 2022-09-08 18:24:16,862 [Thread=16] INFO - 进入MoveSingleAxis_1 2022-09-08 18:24:16,862 [Thread=16] INFO - 该轴是Z,目标位置是-1.5878 2022-09-08 18:24:16,862 [Thread=16] INFO - 步进失败 2022-09-08 18:24:16,863 [Thread=16] INFO - SwitchOffsetZ:0 2022-09-08 18:24:16,871 [Thread=16] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区True 2022-09-08 18:24:16,871 [Thread=16] INFO - 当前位置在安全区内，目标点也在安全区，Z不变 2022-09-08 18:24:16,872 [Thread=16] INFO - Longth长度152.4 2022-09-08 18:24:16,872 [Thread=16] INFO - 进入getLongth 2022-09-08 18:24:16,872 [Thread=16] INFO - 目标坐标X-51.21Y15.2693 2022-09-08 18:24:16,872 [Thread=16] INFO - 晶圆的大小6 2022-09-08 18:24:16,872 [Thread=16] INFO - 晶圆的宽高152.4 2022-09-08 18:24:16,872 [Thread=16] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:16,872 [Thread=16] INFO - X+安全坐标-118.61 2022-09-08 18:24:16,872 [Thread=16] INFO - X-安全坐标43.79 2022-09-08 18:24:16,872 [Thread=16] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:16,872 [Thread=16] INFO - Y下安全坐标120.2693 2022-09-08 18:24:16,873 [Thread=16] INFO - 双轴-目标点在范围内 2022-09-08 18:24:17,888 [Thread=13] INFO - stageout currentPos:-1.5878, currentVelocity:2, delayTime:843, point.Z:-0.5 2022-09-08 18:24:17,888 [Thread=13] INFO - stage out homez 2022-09-08 18:24:20,750 [Thread=13] INFO - stage out home ok 2022-09-08 18:24:20,754 [Thread=13] INFO - 当前位置是否在安全区True，目标位置状态是否在安全区False 2022-09-08 18:24:20,755 [Thread=13] INFO - stagein homez 2022-09-08 18:24:20,755 [Thread=13] INFO - stagein home ok 2022-09-08 18:24:20,755 [Thread=13] INFO - 当前位置在安全区内，目标点不在安全区，Z回原点 2022-09-08 18:24:20,755 [Thread=13] INFO - Longth长度152.4 2022-09-08 18:24:20,755 [Thread=13] INFO - 进入getLongth 2022-09-08 18:24:20,756 [Thread=13] INFO - 目标坐标X-100Y-90 2022-09-08 18:24:20,756 [Thread=13] INFO - 晶圆的大小6 2022-09-08 18:24:20,756 [Thread=13] INFO - 晶圆的宽高152.4 2022-09-08 18:24:20,756 [Thread=13] INFO - 右下角X坐标-113.61Y坐标115.2693 2022-09-08 18:24:20,756 [Thread=13] INFO - X+安全坐标-118.61 2022-09-08 18:24:20,756 [Thread=13] INFO - X-安全坐标43.79 2022-09-08 18:24:20,756 [Thread=13] INFO - Y上安全坐标-42.1307 2022-09-08 18:24:20,756 [Thread=13] INFO - Y下安全坐标120.2693 2022-09-08 18:24:20,757 [Thread=13] INFO - 双轴-目标点不在范围内 2022-09-08 18:24:20,757 [Thread=13] INFO - 双轴-主动聚焦处于关闭状态