2025-06-26 16:40:36.232 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-06-26 16:40:36.305 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-26 16:40:36.306 +08:00 [INF] thr:4<> Start init SafeController
2025-06-26 16:40:36.314 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-26 16:40:36.314 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-26 16:40:36.315 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-26 16:40:36.316 +08:00 [INF] thr:5<> Start init Buffer
2025-06-26 16:40:36.472 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-26 16:40:36.477 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-26 16:40:36.915 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-26 16:40:37.374 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-26 16:40:37.865 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-26 16:42:10.211 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-06-26 16:42:10.249 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-26 16:42:10.250 +08:00 [INF] thr:4<> Start init SafeController
2025-06-26 16:42:10.258 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-26 16:42:10.259 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-26 16:42:10.260 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-26 16:42:10.260 +08:00 [INF] thr:10<> Start init Buffer
2025-06-26 16:42:10.431 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-26 16:42:10.435 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-26 16:42:11.448 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-26 16:42:11.907 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-26 16:42:12.389 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-26 16:43:26.341 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-06-26 16:43:26.380 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-26 16:43:26.380 +08:00 [INF] thr:4<> Start init SafeController
2025-06-26 16:43:26.391 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-26 16:43:26.391 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-26 16:43:26.392 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-26 16:43:26.393 +08:00 [INF] thr:10<> Start init Buffer
2025-06-26 16:43:26.556 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-26 16:43:26.561 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-26 16:43:26.709 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-26 16:43:27.178 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-26 16:43:27.632 +08:00 [INF] thr:4<> loader Requires:REMS
2025-06-26 16:43:28.076 +08:00 [INF] thr:4<> loader Requires:VER
2025-06-26 16:43:28.524 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-06-26 16:43:28.524 +08:00 [INF] thr:4<> loader Requires:SVON
2025-06-26 16:43:28.976 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-06-26 16:43:29.431 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-06-26 16:43:29.884 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-06-26 16:43:30.330 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-06-26 16:43:30.777 +08:00 [INF] thr:4<> loader Requires:HOM
2025-06-26 16:44:03.089 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-06-26 16:44:03.614 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-06-26 16:44:04.086 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-06-26 16:44:04.087 +08:00 [INF] thr:11<> StageProxy Init Start
2025-06-26 16:44:04.087 +08:00 [INF] thr:12<> LoadPortProxy Init Start
2025-06-26 16:44:04.088 +08:00 [INF] thr:13<> AlignerProxy Init Start
2025-06-26 16:44:04.088 +08:00 [INF] thr:14<> AirBlowerProxy Init Start
2025-06-26 16:44:04.132 +08:00 [INF] thr:14<> AirBlowerProxy Init Finished
2025-06-26 16:44:04.178 +08:00 [INF] thr:12<> CassettA 开始Connect
2025-06-26 16:44:04.178 +08:00 [INF] thr:12<> Component.LoadPort.SmifV2 Position:CassettA
2025-06-26 16:44:04.222 +08:00 [INF] thr:12<> 开始Home
2025-06-26 16:44:05.698 +08:00 [INF] thr:13<> AlignerProxy Init Finished
2025-06-26 16:44:07.616 +08:00 [INF] thr:11<> WaitHomeBufferComplete invoke...
2025-06-26 16:44:07.620 +08:00 [INF] thr:11<> GetHomeHash:0,NowHomeHash:499961443
2025-06-26 16:44:07.623 +08:00 [INF] thr:11<> stage Home:0
2025-06-26 16:44:12.698 +08:00 [INF] thr:12<> BoxExist:True
2025-06-26 16:44:12.698 +08:00 [INF] thr:12<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-26 16:44:12.721 +08:00 [INF] thr:12<> LoadPortProxy Init Finished
2025-06-26 16:44:12.728 +08:00 [INF] thr:17<> 开始Home
2025-06-26 16:44:21.236 +08:00 [INF] thr:17<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-26 16:44:21.238 +08:00 [INF] thr:23<> CassettA Absence
2025-06-26 16:44:21.240 +08:00 [INF] thr:13<> CassettA Unloaded
2025-06-26 16:45:10.409 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-06-26 16:45:10.409 +08:00 [INF] thr:11<> AOIType:4
2025-06-26 16:45:10.422 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-06-26 16:45:10.422 +08:00 [INF] thr:11<> Standard_GA_X:2
2025-06-26 16:45:10.426 +08:00 [INF] thr:11<> X axis:2 left [LLIMIT]：-81.5，right [RLIMIT]:74
2025-06-26 16:45:10.427 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-06-26 16:45:10.436 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-06-26 16:45:10.437 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-06-26 16:45:10.437 +08:00 [INF] thr:11<> Standard_GA_Y:0
2025-06-26 16:45:10.441 +08:00 [INF] thr:11<> Y axis:0 left [LLIMIT]：-181，right [RLIMIT]:81
2025-06-26 16:45:10.443 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-06-26 16:45:10.448 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-06-26 16:45:10.448 +08:00 [INF] thr:11<> Standard_GA_Z:7
2025-06-26 16:45:10.452 +08:00 [INF] thr:11<> Z axis:7 left [LLIMIT]：-100，right [RLIMIT]:100
2025-06-26 16:45:10.454 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-06-26 16:45:10.457 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-06-26 16:45:10.457 +08:00 [INF] thr:11<> Standard_GA_R:4
2025-06-26 16:45:10.459 +08:00 [INF] thr:11<> R axis:4 left [LLIMIT]：-1，right [RLIMIT]:1
2025-06-26 16:45:10.470 +08:00 [INF] thr:11<> load Stage setting :D:\VPTEK_AOI\VPTEKCONFIG\ACSStandardConfig.json
2025-06-26 16:45:10.477 +08:00 [INF] thr:11<> EjectedPosition X:2.8，Y:-160，Z:0
2025-06-26 16:45:10.477 +08:00 [INF] thr:11<> EnclosedPosition X:0，Y:0，Z:0
2025-06-26 16:45:10.487 +08:00 [INF] thr:11<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-06-26 16:45:10.500 +08:00 [INF] thr:11<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-06-26 16:45:10.509 +08:00 [INF] thr:11<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-06-26 16:45:10.628 +08:00 [INF] thr:11<> StageProxy Init Finished
2025-06-26 16:45:10.654 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-26 16:49:05.851 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-06-26 16:49:05.888 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-26 16:49:05.889 +08:00 [INF] thr:4<> Start init SafeController
2025-06-26 16:49:05.899 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-26 16:49:05.899 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-26 16:49:05.900 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-26 16:49:05.901 +08:00 [INF] thr:10<> Start init Buffer
2025-06-26 16:49:06.071 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-26 16:49:06.076 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-26 16:49:06.100 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-26 16:49:06.559 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-26 16:49:07.021 +08:00 [INF] thr:4<> loader Requires:REMS
2025-06-26 16:49:07.468 +08:00 [INF] thr:4<> loader Requires:VER
2025-06-26 16:49:07.915 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-06-26 16:49:07.915 +08:00 [INF] thr:4<> loader Requires:SVON
2025-06-26 16:49:08.367 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-06-26 16:49:08.818 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-06-26 16:49:09.271 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-06-26 16:49:09.718 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-06-26 16:49:10.163 +08:00 [INF] thr:4<> loader Requires:HOM
2025-06-26 16:49:59.465 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-06-26 16:49:59.991 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-06-26 16:50:00.462 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-06-26 16:50:00.463 +08:00 [INF] thr:12<> StageProxy Init Start
2025-06-26 16:50:00.463 +08:00 [INF] thr:13<> LoadPortProxy Init Start
2025-06-26 16:50:00.464 +08:00 [INF] thr:14<> AlignerProxy Init Start
2025-06-26 16:50:00.464 +08:00 [INF] thr:15<> AirBlowerProxy Init Start
2025-06-26 16:50:00.466 +08:00 [INF] thr:15<> AirBlowerProxy Init Finished
2025-06-26 16:50:00.469 +08:00 [INF] thr:13<> CassettA 开始Connect
2025-06-26 16:50:00.470 +08:00 [INF] thr:13<> Component.LoadPort.SmifV2 Position:CassettA
2025-06-26 16:50:00.497 +08:00 [INF] thr:13<> 开始Home
2025-06-26 16:50:02.017 +08:00 [INF] thr:14<> AlignerProxy Init Finished
2025-06-26 16:50:03.763 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-06-26 16:50:03.765 +08:00 [INF] thr:12<> GetHomeHash:499961443,NowHomeHash:499961443
2025-06-26 16:50:03.766 +08:00 [INF] thr:12<> stage Home:1
2025-06-26 16:50:03.769 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-06-26 16:50:03.769 +08:00 [INF] thr:12<> AOIType:4
2025-06-26 16:50:03.772 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-06-26 16:50:03.772 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-06-26 16:50:03.774 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-81.5，right [RLIMIT]:74
2025-06-26 16:50:03.775 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-06-26 16:50:03.776 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-06-26 16:50:03.777 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-06-26 16:50:03.777 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-06-26 16:50:03.779 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-181，right [RLIMIT]:81
2025-06-26 16:50:03.780 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-06-26 16:50:03.784 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-06-26 16:50:03.784 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-06-26 16:50:03.786 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-100，right [RLIMIT]:100
2025-06-26 16:50:03.787 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-06-26 16:50:03.790 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-06-26 16:50:03.790 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-06-26 16:50:03.791 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-1，right [RLIMIT]:1
2025-06-26 16:50:03.796 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEK_AOI\VPTEKCONFIG\ACSStandardConfig.json
2025-06-26 16:50:03.802 +08:00 [INF] thr:12<> EjectedPosition X:2.8，Y:-160，Z:0
2025-06-26 16:50:03.802 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-06-26 16:50:03.803 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-06-26 16:50:03.813 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-06-26 16:50:03.822 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-06-26 16:50:03.947 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-06-26 16:50:08.812 +08:00 [INF] thr:13<> BoxExist:True
2025-06-26 16:50:08.813 +08:00 [INF] thr:13<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-26 16:50:08.836 +08:00 [INF] thr:13<> LoadPortProxy Init Finished
2025-06-26 16:50:08.845 +08:00 [INF] thr:22<> 开始Home
2025-06-26 16:50:08.862 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-26 16:50:17.336 +08:00 [INF] thr:22<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-26 16:50:17.339 +08:00 [INF] thr:12<> CassettA Absence
2025-06-26 16:50:17.341 +08:00 [INF] thr:26<> CassettA Unloaded
2025-06-26 16:50:43.203 +08:00 [INF] thr:18<> loader Requires:INPUT B 13
2025-06-26 16:50:44.217 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-26 16:50:45.227 +08:00 [INF] thr:12<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-26 16:50:45.229 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-26 16:50:45.231 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-26 16:50:45.675 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-26 16:50:45.676 +08:00 [INF] thr:12<> loader Requires:MATS AJ T
2025-06-26 16:50:48.554 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-26 16:50:49.002 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-26 16:50:51.882 +08:00 [INF] thr:12<> loader Requires:MOVR R 226000
2025-06-26 16:50:54.476 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-26 16:50:54.927 +08:00 [INF] thr:12<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-26 16:50:54.927 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-26 16:50:54.928 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-26 16:50:55.433 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:50:55.433 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-26 16:50:55.889 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-26 16:50:56.335 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-26 16:50:56.782 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-26 16:50:57.231 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-26 16:50:57.678 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-26 16:50:58.127 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:50:58.579 +08:00 [INF] thr:12<> loader Requires:MATS AJ R 0
2025-06-26 16:51:01.829 +08:00 [INF] thr:12<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-26 16:51:01.829 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-26 16:51:01.829 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-26 16:51:02.332 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:51:02.332 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-26 16:51:02.781 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 0
2025-06-26 16:51:05.393 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-26 16:51:05.843 +08:00 [INF] thr:12<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-26 16:51:05.843 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-26 16:51:05.843 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-26 16:51:06.345 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:51:06.346 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-26 16:51:06.795 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-26 16:51:07.240 +08:00 [INF] thr:12<> loader Requires:OUTP 16 0
2025-06-26 16:51:07.688 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-26 16:51:08.136 +08:00 [INF] thr:12<> loader Requires:OUTP 4 0
2025-06-26 16:51:08.584 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-26 16:51:09.029 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:09.983 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:10.935 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:11.889 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:12.843 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:13.799 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:14.250 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-26 16:51:14.704 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-26 16:51:17.321 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-26 16:51:17.773 +08:00 [INF] thr:12<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-26 16:51:17.773 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-26 16:51:17.773 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-26 16:51:18.275 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:51:18.275 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-26 16:51:23.311 +08:00 [INF] thr:12<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-26 16:51:23.314 +08:00 [INF] thr:12<> AOI is Ready
2025-06-26 16:51:23.382 +08:00 [INF] thr:12<> SetVelocity, Axis:X, velocity:50
2025-06-26 16:51:23.386 +08:00 [INF] thr:12<> SetVelocity, Axis:Y, velocity:50
2025-06-26 16:51:26.828 +08:00 [INF] thr:12<> SetVelocity, Axis:X, velocity:50
2025-06-26 16:51:26.831 +08:00 [INF] thr:12<> SetVelocity, Axis:Y, velocity:100
2025-06-26 16:51:26.847 +08:00 [INF] thr:12<> stage move to position action ok
2025-06-26 16:51:26.849 +08:00 [INF] thr:12<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-26 16:51:26.850 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-26 16:51:26.851 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-26 16:51:27.294 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-26 16:51:27.294 +08:00 [INF] thr:12<> loader Requires:MATS AK T
2025-06-26 16:51:30.835 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-26 16:51:31.284 +08:00 [INF] thr:12<> loader Requires:MATS AK Z 1
2025-06-26 16:51:38.302 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-26 16:51:38.752 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-26 16:51:38.752 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-26 16:51:38.752 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-26 16:51:39.256 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:51:39.256 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-26 16:51:39.710 +08:00 [INF] thr:12<> loader Requires:MATS AK R 0
2025-06-26 16:51:44.992 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-26 16:51:44.992 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:上片请求
2025-06-26 16:51:44.992 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-26 16:51:45.495 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:51:45.496 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-26 16:51:45.950 +08:00 [INF] thr:12<> loader Requires:MATS AK Z 0
2025-06-26 16:51:48.663 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-26 16:51:49.142 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-26 16:51:49.142 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-26 16:51:49.142 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-26 16:51:49.645 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:51:49.645 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-26 16:51:50.092 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-26 16:51:50.540 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-26 16:51:50.987 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-26 16:51:51.436 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-26 16:51:51.883 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-26 16:51:52.327 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:53.283 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:54.236 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:55.192 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-26 16:51:55.647 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-26 16:51:56.099 +08:00 [INF] thr:12<> loader Requires:MATS AK Z 1
2025-06-26 16:51:58.818 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-26 16:51:59.268 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-26 16:51:59.269 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-26 16:51:59.269 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-26 16:52:00.274 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 16:52:00.274 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-26 16:52:05.536 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-26 17:59:07.967 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:52467
2025-06-26 18:03:30.708 +08:00 [INF] thr:74<> loader Requires:INPUT B 13
2025-06-26 18:03:32.216 +08:00 [INF] thr:40<> AOI is Ready
2025-06-26 18:03:32.288 +08:00 [INF] thr:40<> SetVelocity, Axis:X, velocity:50
2025-06-26 18:03:32.296 +08:00 [INF] thr:40<> SetVelocity, Axis:Y, velocity:50
2025-06-26 18:03:35.100 +08:00 [INF] thr:40<> SetVelocity, Axis:X, velocity:20
2025-06-26 18:03:35.103 +08:00 [INF] thr:40<> SetVelocity, Axis:Y, velocity:20
2025-06-26 18:03:35.120 +08:00 [INF] thr:40<> stage move to position action ok
2025-06-26 18:03:35.121 +08:00 [INF] thr:40<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-26 18:03:35.122 +08:00 [INF] thr:40<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-26 18:03:35.122 +08:00 [INF] thr:40<> loader Requires:RGRP
2025-06-26 18:03:35.563 +08:00 [INF] thr:40<> CLeanLoader Group Now C
2025-06-26 18:03:35.563 +08:00 [INF] thr:40<> loader Requires:MATS AK T
2025-06-26 18:03:36.021 +08:00 [INF] thr:40<> loader Requires:SSP Z 4000
2025-06-26 18:03:36.468 +08:00 [INF] thr:40<> loader Requires:MATS AK Z 1
2025-06-26 18:03:36.941 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-26 18:03:37.392 +08:00 [INF] thr:40<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-26 18:03:37.392 +08:00 [INF] thr:40<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-26 18:03:37.392 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-26 18:03:37.895 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:03:37.895 +08:00 [INF] thr:40<> loader Requires:INPUT A 6
2025-06-26 18:03:38.348 +08:00 [INF] thr:40<> loader Requires:OUTP 1 0
2025-06-26 18:03:38.795 +08:00 [INF] thr:40<> loader Requires:OUTP 16 1
2025-06-26 18:03:39.243 +08:00 [INF] thr:40<> loader Requires:OUTP 15 1
2025-06-26 18:03:39.692 +08:00 [INF] thr:40<> loader Requires:OUTP 4 1
2025-06-26 18:03:40.137 +08:00 [INF] thr:40<> loader Requires:OUTP 1 1
2025-06-26 18:03:40.584 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:41.036 +08:00 [INF] thr:40<> loader Requires:MATS AK R 0
2025-06-26 18:03:46.318 +08:00 [INF] thr:40<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-26 18:03:46.318 +08:00 [INF] thr:40<> Station:InspectStageA,SafeCheck:下片请求
2025-06-26 18:03:46.318 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-26 18:03:46.821 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:03:46.822 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-26 18:03:47.270 +08:00 [INF] thr:40<> loader Requires:MATS AK Z 0
2025-06-26 18:03:49.983 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-26 18:03:50.453 +08:00 [INF] thr:40<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-26 18:03:50.453 +08:00 [INF] thr:40<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-26 18:03:50.453 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-26 18:03:50.956 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:03:50.956 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-26 18:03:51.401 +08:00 [INF] thr:40<> loader Requires:OUTP 1 0
2025-06-26 18:03:51.849 +08:00 [INF] thr:40<> loader Requires:OUTP 16 0
2025-06-26 18:03:52.296 +08:00 [INF] thr:40<> loader Requires:OUTP 15 1
2025-06-26 18:03:52.744 +08:00 [INF] thr:40<> loader Requires:OUTP 4 0
2025-06-26 18:03:53.190 +08:00 [INF] thr:40<> loader Requires:OUTP 1 1
2025-06-26 18:03:53.637 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:54.590 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:55.544 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:56.505 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:57.460 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:58.413 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-26 18:03:58.867 +08:00 [INF] thr:40<> loader Requires:INPUT A 5
2025-06-26 18:03:59.319 +08:00 [INF] thr:40<> loader Requires:MATS AK Z 1
2025-06-26 18:04:02.036 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-26 18:04:02.487 +08:00 [INF] thr:40<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-26 18:04:02.487 +08:00 [INF] thr:40<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-26 18:04:02.487 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-26 18:04:02.990 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:04:02.990 +08:00 [INF] thr:40<> loader Requires:RETH
2025-06-26 18:04:08.249 +08:00 [INF] thr:40<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-26 18:04:08.252 +08:00 [INF] thr:38<> 执行Aligner设置初始角度InitialAngle：0
2025-06-26 18:04:08.252 +08:00 [INF] thr:38<> 执行Aligner角度angle：0
2025-06-26 18:04:09.260 +08:00 [INF] thr:38<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-26 18:04:09.260 +08:00 [INF] thr:38<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-26 18:04:09.261 +08:00 [INF] thr:38<> loader Requires:RGRP
2025-06-26 18:04:09.705 +08:00 [INF] thr:38<> CLeanLoader Group Now C
2025-06-26 18:04:09.705 +08:00 [INF] thr:38<> loader Requires:MATS AJ T
2025-06-26 18:04:13.246 +08:00 [INF] thr:38<> loader Requires:SSP Z 4000
2025-06-26 18:04:13.696 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 1
2025-06-26 18:04:20.713 +08:00 [INF] thr:38<> loader Requires:MOVR R 226000
2025-06-26 18:04:23.308 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-06-26 18:04:23.758 +08:00 [INF] thr:38<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-26 18:04:23.759 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-26 18:04:23.759 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-26 18:04:24.261 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:04:24.261 +08:00 [INF] thr:38<> loader Requires:INPUT A 6
2025-06-26 18:04:24.715 +08:00 [INF] thr:38<> loader Requires:MATS AJ R 0
2025-06-26 18:04:27.966 +08:00 [INF] thr:38<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-26 18:04:27.966 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-26 18:04:27.966 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-26 18:04:28.469 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:04:28.469 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-06-26 18:04:28.918 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 0
2025-06-26 18:04:31.531 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-06-26 18:04:31.983 +08:00 [INF] thr:38<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-26 18:04:31.983 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-26 18:04:31.983 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-26 18:04:32.485 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:04:32.485 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-06-26 18:04:32.935 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-06-26 18:04:33.383 +08:00 [INF] thr:38<> loader Requires:OUTP 16 1
2025-06-26 18:04:33.830 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-06-26 18:04:34.278 +08:00 [INF] thr:38<> loader Requires:OUTP 4 1
2025-06-26 18:04:34.725 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-06-26 18:04:35.170 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-06-26 18:04:36.125 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-06-26 18:04:37.077 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-06-26 18:04:38.031 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-06-26 18:04:38.482 +08:00 [INF] thr:38<> loader Requires:INPUT A 5
2025-06-26 18:04:38.934 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 1
2025-06-26 18:04:41.552 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-06-26 18:04:42.002 +08:00 [INF] thr:38<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-26 18:04:42.002 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-26 18:04:42.002 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-26 18:04:42.506 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:04:42.506 +08:00 [INF] thr:38<> loader Requires:RETH
2025-06-26 18:04:47.541 +08:00 [INF] thr:38<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-26 18:04:47.548 +08:00 [INF] thr:38<> 执行Aligner角度angle：0
2025-06-26 18:05:44.369 +08:00 [INF] thr:9<> loader Requires:INPUT B 13
2025-06-26 18:05:45.394 +08:00 [INF] thr:76<> 执行Aligner角度angle：0
2025-06-26 18:05:46.398 +08:00 [INF] thr:76<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-26 18:05:46.399 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-26 18:05:46.399 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-26 18:05:46.842 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-26 18:05:46.842 +08:00 [INF] thr:76<> loader Requires:MATS AJ T
2025-06-26 18:05:47.301 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-26 18:05:47.748 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 1
2025-06-26 18:05:48.221 +08:00 [INF] thr:76<> loader Requires:MOVR R 226000
2025-06-26 18:05:50.816 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-26 18:05:51.267 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-26 18:05:51.267 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-26 18:05:51.267 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-26 18:05:51.775 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:05:51.775 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-26 18:05:52.228 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-26 18:05:52.675 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-26 18:05:53.121 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-26 18:05:53.570 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-26 18:05:54.017 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-26 18:05:54.463 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:05:54.915 +08:00 [INF] thr:76<> loader Requires:MATS AJ R 0
2025-06-26 18:05:58.166 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-26 18:05:58.166 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-26 18:05:58.166 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-26 18:05:58.668 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:05:58.668 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-26 18:05:59.117 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 0
2025-06-26 18:06:01.729 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-26 18:06:02.178 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-26 18:06:02.178 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-26 18:06:02.178 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-26 18:06:02.680 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:06:02.680 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-26 18:06:03.131 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-26 18:06:03.577 +08:00 [INF] thr:76<> loader Requires:OUTP 16 0
2025-06-26 18:06:04.028 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-26 18:06:04.476 +08:00 [INF] thr:76<> loader Requires:OUTP 4 0
2025-06-26 18:06:04.932 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-26 18:06:05.377 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:06.330 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:07.286 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:08.241 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:09.195 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:10.149 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:10.600 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-26 18:06:11.053 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 1
2025-06-26 18:06:13.670 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-26 18:06:14.120 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-26 18:06:14.120 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-26 18:06:14.120 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-26 18:06:14.624 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:06:14.624 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-26 18:06:19.660 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-26 18:06:19.662 +08:00 [INF] thr:76<> AOI is Ready
2025-06-26 18:06:19.727 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:50
2025-06-26 18:06:19.730 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:50
2025-06-26 18:06:19.766 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:20
2025-06-26 18:06:19.769 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:20
2025-06-26 18:06:19.786 +08:00 [INF] thr:76<> stage move to position action ok
2025-06-26 18:06:19.786 +08:00 [INF] thr:76<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-26 18:06:19.791 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-26 18:06:19.791 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-26 18:06:20.234 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-26 18:06:20.234 +08:00 [INF] thr:76<> loader Requires:MATS AK T
2025-06-26 18:06:23.777 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-26 18:06:24.225 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-26 18:06:31.244 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-26 18:06:31.693 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-26 18:06:31.693 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-26 18:06:31.693 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-26 18:06:32.197 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:06:32.197 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-26 18:06:32.651 +08:00 [INF] thr:76<> loader Requires:MATS AK R 0
2025-06-26 18:06:37.933 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-26 18:06:37.933 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片请求
2025-06-26 18:06:37.933 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-26 18:06:38.437 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:06:38.437 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-26 18:06:38.883 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 0
2025-06-26 18:06:41.596 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-26 18:06:42.069 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-26 18:06:42.069 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-26 18:06:42.069 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-26 18:06:42.573 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:06:42.573 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-26 18:06:43.021 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-26 18:06:43.468 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-26 18:06:43.919 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-26 18:06:44.369 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-26 18:06:44.815 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-26 18:06:45.261 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:46.215 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:47.167 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:48.121 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-26 18:06:48.573 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-26 18:06:49.026 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-26 18:06:51.744 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-26 18:06:52.195 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-26 18:06:52.195 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-26 18:06:52.195 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-26 18:06:53.201 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-26 18:06:53.201 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-26 18:06:58.461 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 09:11:50.216 +08:00 [INF] thr:69<> loader Requires:INPUT B 13
2025-06-27 09:11:51.683 +08:00 [INF] thr:77<> AOI is Ready
2025-06-27 09:11:56.003 +08:00 [INF] thr:77<> SetVelocity, Axis:X, velocity:50
2025-06-27 09:11:56.010 +08:00 [INF] thr:77<> SetVelocity, Axis:Y, velocity:50
2025-06-27 09:11:58.898 +08:00 [INF] thr:77<> SetVelocity, Axis:X, velocity:8
2025-06-27 09:11:58.906 +08:00 [INF] thr:77<> SetVelocity, Axis:Y, velocity:8
2025-06-27 09:11:58.939 +08:00 [INF] thr:77<> stage move to position action ok
2025-06-27 09:11:58.939 +08:00 [INF] thr:77<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 09:11:58.940 +08:00 [INF] thr:77<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 09:11:58.940 +08:00 [INF] thr:77<> loader Requires:RGRP
2025-06-27 09:11:59.382 +08:00 [INF] thr:77<> CLeanLoader Group Now C
2025-06-27 09:11:59.382 +08:00 [INF] thr:77<> loader Requires:MATS AK T
2025-06-27 09:11:59.841 +08:00 [INF] thr:77<> loader Requires:SSP Z 4000
2025-06-27 09:12:00.289 +08:00 [INF] thr:77<> loader Requires:MATS AK Z 1
2025-06-27 09:12:00.761 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-27 09:12:01.211 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 09:12:01.211 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 09:12:01.211 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 09:12:01.715 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:01.715 +08:00 [INF] thr:77<> loader Requires:INPUT A 6
2025-06-27 09:12:02.168 +08:00 [INF] thr:77<> loader Requires:OUTP 1 0
2025-06-27 09:12:02.615 +08:00 [INF] thr:77<> loader Requires:OUTP 16 1
2025-06-27 09:12:03.063 +08:00 [INF] thr:77<> loader Requires:OUTP 15 1
2025-06-27 09:12:03.512 +08:00 [INF] thr:77<> loader Requires:OUTP 4 1
2025-06-27 09:12:03.965 +08:00 [INF] thr:77<> loader Requires:OUTP 1 1
2025-06-27 09:12:04.412 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:04.864 +08:00 [INF] thr:77<> loader Requires:MATS AK R 0
2025-06-27 09:12:10.146 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 09:12:10.146 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 09:12:10.146 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 09:12:10.665 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:10.665 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-27 09:12:11.112 +08:00 [INF] thr:77<> loader Requires:MATS AK Z 0
2025-06-27 09:12:13.826 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-27 09:12:14.304 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 09:12:14.304 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 09:12:14.304 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 09:12:14.806 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:14.806 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-27 09:12:15.255 +08:00 [INF] thr:77<> loader Requires:OUTP 1 0
2025-06-27 09:12:15.704 +08:00 [INF] thr:77<> loader Requires:OUTP 16 0
2025-06-27 09:12:16.150 +08:00 [INF] thr:77<> loader Requires:OUTP 15 1
2025-06-27 09:12:16.598 +08:00 [INF] thr:77<> loader Requires:OUTP 4 0
2025-06-27 09:12:17.046 +08:00 [INF] thr:77<> loader Requires:OUTP 1 1
2025-06-27 09:12:17.495 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:18.450 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:19.403 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:20.358 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:21.313 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:22.270 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-27 09:12:22.724 +08:00 [INF] thr:77<> loader Requires:INPUT A 5
2025-06-27 09:12:23.177 +08:00 [INF] thr:77<> loader Requires:MATS AK Z 1
2025-06-27 09:12:25.895 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-27 09:12:26.347 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 09:12:26.347 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 09:12:26.347 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 09:12:26.850 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:26.850 +08:00 [INF] thr:77<> loader Requires:RETH
2025-06-27 09:12:32.113 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 09:12:32.114 +08:00 [INF] thr:41<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 09:12:32.114 +08:00 [INF] thr:41<> 执行Aligner角度angle：0
2025-06-27 09:12:33.120 +08:00 [INF] thr:41<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 09:12:33.121 +08:00 [INF] thr:41<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 09:12:33.121 +08:00 [INF] thr:41<> loader Requires:RGRP
2025-06-27 09:12:33.563 +08:00 [INF] thr:41<> CLeanLoader Group Now C
2025-06-27 09:12:33.563 +08:00 [INF] thr:41<> loader Requires:MATS AJ T
2025-06-27 09:12:37.105 +08:00 [INF] thr:41<> loader Requires:SSP Z 4000
2025-06-27 09:12:37.553 +08:00 [INF] thr:41<> loader Requires:MATS AJ Z 1
2025-06-27 09:12:44.572 +08:00 [INF] thr:41<> loader Requires:MOVR R 226000
2025-06-27 09:12:47.166 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-06-27 09:12:47.618 +08:00 [INF] thr:41<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 09:12:47.618 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 09:12:47.618 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 09:12:48.122 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:48.122 +08:00 [INF] thr:41<> loader Requires:INPUT A 6
2025-06-27 09:12:48.574 +08:00 [INF] thr:41<> loader Requires:MATS AJ R 0
2025-06-27 09:12:51.825 +08:00 [INF] thr:41<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 09:12:51.825 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 09:12:51.825 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 09:12:52.327 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:52.327 +08:00 [INF] thr:41<> loader Requires:SSP Z 1000
2025-06-27 09:12:52.776 +08:00 [INF] thr:41<> loader Requires:MATS AJ Z 0
2025-06-27 09:12:55.388 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-06-27 09:12:55.838 +08:00 [INF] thr:41<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 09:12:55.838 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 09:12:55.838 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 09:12:56.342 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:12:56.342 +08:00 [INF] thr:41<> loader Requires:SSP Z 1000
2025-06-27 09:12:56.790 +08:00 [INF] thr:41<> loader Requires:OUTP 1 0
2025-06-27 09:12:57.236 +08:00 [INF] thr:41<> loader Requires:OUTP 16 1
2025-06-27 09:12:57.685 +08:00 [INF] thr:41<> loader Requires:OUTP 15 1
2025-06-27 09:12:58.131 +08:00 [INF] thr:41<> loader Requires:OUTP 4 1
2025-06-27 09:12:58.579 +08:00 [INF] thr:41<> loader Requires:OUTP 1 1
2025-06-27 09:12:59.024 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-06-27 09:12:59.979 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-06-27 09:13:00.932 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-06-27 09:13:01.884 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-06-27 09:13:02.336 +08:00 [INF] thr:41<> loader Requires:INPUT A 5
2025-06-27 09:13:02.789 +08:00 [INF] thr:41<> loader Requires:MATS AJ Z 1
2025-06-27 09:13:05.408 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-06-27 09:13:05.857 +08:00 [INF] thr:41<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 09:13:05.857 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 09:13:05.857 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 09:13:06.360 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:13:06.360 +08:00 [INF] thr:41<> loader Requires:RETH
2025-06-27 09:13:11.397 +08:00 [INF] thr:41<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 09:13:11.398 +08:00 [INF] thr:41<> 执行Aligner角度angle：0
2025-06-27 09:14:31.711 +08:00 [INF] thr:30<> loader Requires:INPUT B 13
2025-06-27 09:14:32.686 +08:00 [INF] thr:44<> 执行Aligner角度angle：0
2025-06-27 09:14:33.691 +08:00 [INF] thr:44<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 09:14:33.692 +08:00 [INF] thr:44<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 09:14:33.692 +08:00 [INF] thr:44<> loader Requires:RGRP
2025-06-27 09:14:34.136 +08:00 [INF] thr:44<> CLeanLoader Group Now C
2025-06-27 09:14:34.136 +08:00 [INF] thr:44<> loader Requires:MATS AJ T
2025-06-27 09:14:34.594 +08:00 [INF] thr:44<> loader Requires:SSP Z 4000
2025-06-27 09:14:35.041 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 1
2025-06-27 09:14:35.515 +08:00 [INF] thr:44<> loader Requires:MOVR R 226000
2025-06-27 09:14:38.110 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 09:14:38.561 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 09:14:38.561 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 09:14:38.561 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 09:14:39.065 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:14:39.065 +08:00 [INF] thr:44<> loader Requires:INPUT A 6
2025-06-27 09:14:39.514 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-06-27 09:14:39.960 +08:00 [INF] thr:44<> loader Requires:OUTP 16 1
2025-06-27 09:14:40.408 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-06-27 09:14:40.856 +08:00 [INF] thr:44<> loader Requires:OUTP 4 1
2025-06-27 09:14:41.303 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-06-27 09:14:41.749 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:42.201 +08:00 [INF] thr:44<> loader Requires:MATS AJ R 0
2025-06-27 09:14:45.451 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 09:14:45.451 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 09:14:45.451 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 09:14:45.954 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:14:45.954 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 09:14:46.402 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 0
2025-06-27 09:14:49.015 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 09:14:49.464 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 09:14:49.464 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 09:14:49.464 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 09:14:49.968 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:14:49.968 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 09:14:50.416 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-06-27 09:14:50.863 +08:00 [INF] thr:44<> loader Requires:OUTP 16 0
2025-06-27 09:14:51.310 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-06-27 09:14:51.758 +08:00 [INF] thr:44<> loader Requires:OUTP 4 0
2025-06-27 09:14:52.205 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-06-27 09:14:52.651 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:53.604 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:54.557 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:55.511 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:56.464 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:57.420 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:14:57.881 +08:00 [INF] thr:44<> loader Requires:INPUT A 5
2025-06-27 09:14:58.335 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 1
2025-06-27 09:15:00.955 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 09:15:01.406 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 09:15:01.406 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 09:15:01.406 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 09:15:01.913 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:15:01.913 +08:00 [INF] thr:44<> loader Requires:RETH
2025-06-27 09:15:06.946 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 09:15:06.949 +08:00 [INF] thr:44<> AOI is Ready
2025-06-27 09:15:07.013 +08:00 [INF] thr:44<> SetVelocity, Axis:X, velocity:50
2025-06-27 09:15:07.016 +08:00 [INF] thr:44<> SetVelocity, Axis:Y, velocity:50
2025-06-27 09:15:07.053 +08:00 [INF] thr:44<> SetVelocity, Axis:X, velocity:8
2025-06-27 09:15:07.056 +08:00 [INF] thr:44<> SetVelocity, Axis:Y, velocity:8
2025-06-27 09:15:07.086 +08:00 [INF] thr:44<> stage move to position action ok
2025-06-27 09:15:07.086 +08:00 [INF] thr:44<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 09:15:07.087 +08:00 [INF] thr:44<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 09:15:07.087 +08:00 [INF] thr:44<> loader Requires:RGRP
2025-06-27 09:15:07.529 +08:00 [INF] thr:44<> CLeanLoader Group Now C
2025-06-27 09:15:07.529 +08:00 [INF] thr:44<> loader Requires:MATS AK T
2025-06-27 09:15:11.071 +08:00 [INF] thr:44<> loader Requires:SSP Z 4000
2025-06-27 09:15:11.517 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 1
2025-06-27 09:15:18.536 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 09:15:18.984 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 09:15:18.984 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 09:15:18.985 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 09:15:19.488 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:15:19.488 +08:00 [INF] thr:44<> loader Requires:INPUT A 6
2025-06-27 09:15:19.942 +08:00 [INF] thr:44<> loader Requires:MATS AK R 0
2025-06-27 09:15:25.223 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 09:15:25.223 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 09:15:25.223 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 09:15:25.727 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:15:25.727 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 09:15:26.174 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 0
2025-06-27 09:15:28.887 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 09:15:29.355 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 09:15:29.355 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 09:15:29.355 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 09:15:29.859 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:15:29.859 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 09:15:30.305 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-06-27 09:15:30.751 +08:00 [INF] thr:44<> loader Requires:OUTP 16 1
2025-06-27 09:15:31.198 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-06-27 09:15:31.648 +08:00 [INF] thr:44<> loader Requires:OUTP 4 1
2025-06-27 09:15:32.094 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-06-27 09:15:32.540 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:15:33.493 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:15:34.449 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:15:35.402 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 09:15:35.855 +08:00 [INF] thr:44<> loader Requires:INPUT A 5
2025-06-27 09:15:36.307 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 1
2025-06-27 09:15:39.026 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 09:15:39.477 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 09:15:39.477 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 09:15:39.477 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 09:15:40.482 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 09:15:40.482 +08:00 [INF] thr:44<> loader Requires:RETH
2025-06-27 09:15:45.743 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 10:19:00.203 +08:00 [INF] thr:20<> loader Requires:INPUT B 13
2025-06-27 10:19:01.665 +08:00 [INF] thr:76<> AOI is Ready
2025-06-27 10:19:06.124 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:50
2025-06-27 10:19:06.126 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:50
2025-06-27 10:19:10.102 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:8
2025-06-27 10:19:10.105 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:8
2025-06-27 10:19:10.126 +08:00 [INF] thr:76<> stage move to position action ok
2025-06-27 10:19:10.126 +08:00 [INF] thr:76<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 10:19:10.127 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 10:19:10.127 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-27 10:19:10.572 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-27 10:19:10.572 +08:00 [INF] thr:76<> loader Requires:MATS AK T
2025-06-27 10:19:11.029 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-27 10:19:11.476 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-27 10:19:11.950 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-27 10:19:12.401 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 10:19:12.401 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 10:19:12.401 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 10:19:12.904 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:19:12.904 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-27 10:19:13.357 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-27 10:19:13.804 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-27 10:19:14.252 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-27 10:19:14.700 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-27 10:19:15.147 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-27 10:19:15.594 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:16.045 +08:00 [INF] thr:76<> loader Requires:MATS AK R 0
2025-06-27 10:19:21.327 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 10:19:21.327 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 10:19:21.327 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 10:19:21.831 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:19:21.831 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-27 10:19:22.281 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 0
2025-06-27 10:19:24.995 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-27 10:19:25.458 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 10:19:25.458 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 10:19:25.458 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 10:19:25.962 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:19:25.962 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-27 10:19:26.411 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-27 10:19:26.858 +08:00 [INF] thr:76<> loader Requires:OUTP 16 0
2025-06-27 10:19:27.306 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-27 10:19:27.754 +08:00 [INF] thr:76<> loader Requires:OUTP 4 0
2025-06-27 10:19:28.201 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-27 10:19:28.648 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:29.608 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:30.561 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:31.514 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:32.467 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:33.423 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-27 10:19:33.875 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-27 10:19:34.329 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-27 10:19:37.047 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-27 10:19:37.496 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 10:19:37.496 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 10:19:37.496 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 10:19:37.998 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:19:37.998 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-27 10:19:43.262 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 10:19:43.264 +08:00 [INF] thr:40<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 10:19:43.264 +08:00 [INF] thr:40<> 执行Aligner角度angle：0
2025-06-27 10:19:44.269 +08:00 [INF] thr:40<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 10:19:44.270 +08:00 [INF] thr:40<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 10:19:44.270 +08:00 [INF] thr:40<> loader Requires:RGRP
2025-06-27 10:19:44.712 +08:00 [INF] thr:40<> CLeanLoader Group Now C
2025-06-27 10:19:44.712 +08:00 [INF] thr:40<> loader Requires:MATS AJ T
2025-06-27 10:19:48.255 +08:00 [INF] thr:40<> loader Requires:SSP Z 4000
2025-06-27 10:19:48.703 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 1
2025-06-27 10:19:55.722 +08:00 [INF] thr:40<> loader Requires:MOVR R 226000
2025-06-27 10:19:58.316 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-27 10:19:58.767 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 10:19:58.767 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 10:19:58.767 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 10:19:59.269 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:19:59.269 +08:00 [INF] thr:40<> loader Requires:INPUT A 6
2025-06-27 10:19:59.720 +08:00 [INF] thr:40<> loader Requires:MATS AJ R 0
2025-06-27 10:20:02.969 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 10:20:02.969 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 10:20:02.969 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 10:20:03.472 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:20:03.472 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-27 10:20:03.921 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 0
2025-06-27 10:20:06.533 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-27 10:20:06.983 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 10:20:06.983 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 10:20:06.983 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 10:20:07.486 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:20:07.486 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-27 10:20:07.935 +08:00 [INF] thr:40<> loader Requires:OUTP 1 0
2025-06-27 10:20:08.381 +08:00 [INF] thr:40<> loader Requires:OUTP 16 1
2025-06-27 10:20:08.828 +08:00 [INF] thr:40<> loader Requires:OUTP 15 1
2025-06-27 10:20:09.278 +08:00 [INF] thr:40<> loader Requires:OUTP 4 1
2025-06-27 10:20:09.725 +08:00 [INF] thr:40<> loader Requires:OUTP 1 1
2025-06-27 10:20:10.171 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-27 10:20:11.123 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-27 10:20:12.077 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-27 10:20:13.034 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-27 10:20:13.486 +08:00 [INF] thr:40<> loader Requires:INPUT A 5
2025-06-27 10:20:13.941 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 1
2025-06-27 10:20:16.559 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-27 10:20:17.009 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 10:20:17.009 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 10:20:17.009 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 10:20:17.516 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:20:17.516 +08:00 [INF] thr:40<> loader Requires:RETH
2025-06-27 10:20:22.548 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 10:20:22.549 +08:00 [INF] thr:40<> 执行Aligner角度angle：0
2025-06-27 10:22:50.235 +08:00 [INF] thr:30<> loader Requires:INPUT B 13
2025-06-27 10:22:51.213 +08:00 [INF] thr:44<> 执行Aligner角度angle：0
2025-06-27 10:22:52.218 +08:00 [INF] thr:44<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 10:22:52.219 +08:00 [INF] thr:44<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 10:22:52.219 +08:00 [INF] thr:44<> loader Requires:RGRP
2025-06-27 10:22:52.663 +08:00 [INF] thr:44<> CLeanLoader Group Now C
2025-06-27 10:22:52.663 +08:00 [INF] thr:44<> loader Requires:MATS AJ T
2025-06-27 10:22:53.121 +08:00 [INF] thr:44<> loader Requires:SSP Z 4000
2025-06-27 10:22:53.569 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 1
2025-06-27 10:22:54.044 +08:00 [INF] thr:44<> loader Requires:MOVR R 226000
2025-06-27 10:22:56.637 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 10:22:57.088 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 10:22:57.088 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 10:22:57.089 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 10:22:57.610 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:22:57.610 +08:00 [INF] thr:44<> loader Requires:INPUT A 6
2025-06-27 10:22:58.062 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-06-27 10:22:58.508 +08:00 [INF] thr:44<> loader Requires:OUTP 16 1
2025-06-27 10:22:58.956 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-06-27 10:22:59.404 +08:00 [INF] thr:44<> loader Requires:OUTP 4 1
2025-06-27 10:22:59.851 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-06-27 10:23:00.297 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:00.750 +08:00 [INF] thr:44<> loader Requires:MATS AJ R 0
2025-06-27 10:23:03.999 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 10:23:03.999 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 10:23:03.999 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 10:23:04.503 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:04.503 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 10:23:04.951 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 0
2025-06-27 10:23:07.563 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 10:23:08.024 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 10:23:08.024 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 10:23:08.024 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 10:23:08.529 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:08.529 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 10:23:08.976 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-06-27 10:23:09.423 +08:00 [INF] thr:44<> loader Requires:OUTP 16 0
2025-06-27 10:23:09.871 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-06-27 10:23:10.318 +08:00 [INF] thr:44<> loader Requires:OUTP 4 0
2025-06-27 10:23:10.765 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-06-27 10:23:11.211 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:12.164 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:13.118 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:14.071 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:15.027 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:15.982 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:16.433 +08:00 [INF] thr:44<> loader Requires:INPUT A 5
2025-06-27 10:23:16.886 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 1
2025-06-27 10:23:19.503 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 10:23:19.953 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 10:23:19.953 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 10:23:19.953 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 10:23:20.456 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:20.456 +08:00 [INF] thr:44<> loader Requires:RETH
2025-06-27 10:23:25.490 +08:00 [INF] thr:44<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 10:23:25.492 +08:00 [INF] thr:44<> AOI is Ready
2025-06-27 10:23:25.556 +08:00 [INF] thr:44<> SetVelocity, Axis:X, velocity:50
2025-06-27 10:23:25.559 +08:00 [INF] thr:44<> SetVelocity, Axis:Y, velocity:50
2025-06-27 10:23:25.594 +08:00 [INF] thr:44<> SetVelocity, Axis:X, velocity:8
2025-06-27 10:23:25.597 +08:00 [INF] thr:44<> SetVelocity, Axis:Y, velocity:8
2025-06-27 10:23:25.613 +08:00 [INF] thr:44<> stage move to position action ok
2025-06-27 10:23:25.614 +08:00 [INF] thr:44<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 10:23:25.615 +08:00 [INF] thr:44<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 10:23:25.615 +08:00 [INF] thr:44<> loader Requires:RGRP
2025-06-27 10:23:26.057 +08:00 [INF] thr:44<> CLeanLoader Group Now C
2025-06-27 10:23:26.057 +08:00 [INF] thr:44<> loader Requires:MATS AK T
2025-06-27 10:23:29.599 +08:00 [INF] thr:44<> loader Requires:SSP Z 4000
2025-06-27 10:23:30.048 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 1
2025-06-27 10:23:37.066 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 10:23:37.517 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 10:23:37.518 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 10:23:37.518 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 10:23:38.021 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:38.021 +08:00 [INF] thr:44<> loader Requires:INPUT A 6
2025-06-27 10:23:38.474 +08:00 [INF] thr:44<> loader Requires:MATS AK R 0
2025-06-27 10:23:43.755 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 10:23:43.755 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 10:23:43.756 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 10:23:44.260 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:44.260 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 10:23:44.709 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 0
2025-06-27 10:23:47.422 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 10:23:48.618 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 10:23:48.618 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 10:23:48.618 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 10:23:49.125 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:49.125 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-06-27 10:23:49.572 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-06-27 10:23:50.021 +08:00 [INF] thr:44<> loader Requires:OUTP 16 1
2025-06-27 10:23:50.469 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-06-27 10:23:50.917 +08:00 [INF] thr:44<> loader Requires:OUTP 4 1
2025-06-27 10:23:51.364 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-06-27 10:23:51.810 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:52.764 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:53.718 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:54.671 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-06-27 10:23:55.122 +08:00 [INF] thr:44<> loader Requires:INPUT A 5
2025-06-27 10:23:55.575 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 1
2025-06-27 10:23:58.292 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-06-27 10:23:58.743 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 10:23:58.743 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 10:23:58.743 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 10:23:59.748 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 10:23:59.748 +08:00 [INF] thr:44<> loader Requires:RETH
2025-06-27 10:24:05.013 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 12:11:12.520 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:56894
2025-06-27 12:12:40.533 +08:00 [INF] thr:24<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-06-27 13:32:11.686 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-06-27 13:32:13.197 +08:00 [INF] thr:51<> AOI is Ready
2025-06-27 13:32:16.597 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:50
2025-06-27 13:32:16.600 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:50
2025-06-27 13:32:20.678 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:8
2025-06-27 13:32:20.681 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:8
2025-06-27 13:32:20.698 +08:00 [INF] thr:51<> stage move to position action ok
2025-06-27 13:32:20.698 +08:00 [INF] thr:51<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 13:32:20.699 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:32:20.699 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-06-27 13:32:21.142 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-06-27 13:32:21.142 +08:00 [INF] thr:51<> loader Requires:MATS AK T
2025-06-27 13:32:21.601 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-06-27 13:32:22.048 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 13:32:22.521 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 13:32:22.972 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 13:32:22.972 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 13:32:22.972 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 13:32:23.476 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:32:23.476 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-06-27 13:32:23.927 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 13:32:24.374 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-06-27 13:32:24.822 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 13:32:25.271 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-06-27 13:32:25.718 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 13:32:26.163 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:26.616 +08:00 [INF] thr:51<> loader Requires:MATS AK R 0
2025-06-27 13:32:31.897 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 13:32:31.897 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 13:32:31.897 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 13:32:32.400 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:32:32.400 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 13:32:32.847 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 0
2025-06-27 13:32:35.559 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 13:32:36.027 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 13:32:36.027 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 13:32:36.027 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 13:32:36.530 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:32:36.530 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 13:32:36.982 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 13:32:37.427 +08:00 [INF] thr:51<> loader Requires:OUTP 16 0
2025-06-27 13:32:37.875 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 13:32:38.323 +08:00 [INF] thr:51<> loader Requires:OUTP 4 0
2025-06-27 13:32:38.770 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 13:32:39.216 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:40.170 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:41.122 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:42.075 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:43.028 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:43.982 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 13:32:44.433 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-06-27 13:32:44.885 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 13:32:47.603 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 13:32:48.052 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 13:32:48.052 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 13:32:48.052 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 13:32:48.555 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:32:48.555 +08:00 [INF] thr:51<> loader Requires:RETH
2025-06-27 13:32:53.818 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 13:32:53.820 +08:00 [INF] thr:72<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 13:32:53.820 +08:00 [INF] thr:72<> 执行Aligner角度angle：0
2025-06-27 13:32:54.826 +08:00 [INF] thr:72<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 13:32:54.827 +08:00 [INF] thr:72<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:32:54.827 +08:00 [INF] thr:72<> loader Requires:RGRP
2025-06-27 13:32:55.270 +08:00 [INF] thr:72<> CLeanLoader Group Now C
2025-06-27 13:32:55.270 +08:00 [INF] thr:72<> loader Requires:MATS AJ T
2025-06-27 13:32:58.811 +08:00 [INF] thr:72<> loader Requires:SSP Z 4000
2025-06-27 13:32:59.261 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 1
2025-06-27 13:33:06.279 +08:00 [INF] thr:72<> loader Requires:MOVR R 226000
2025-06-27 13:33:08.875 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:33:09.325 +08:00 [INF] thr:72<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 13:33:09.325 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 13:33:09.325 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 13:33:09.828 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:33:09.828 +08:00 [INF] thr:72<> loader Requires:INPUT A 6
2025-06-27 13:33:10.282 +08:00 [INF] thr:72<> loader Requires:MATS AJ R 0
2025-06-27 13:33:13.531 +08:00 [INF] thr:72<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 13:33:13.531 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 13:33:13.531 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 13:33:14.036 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:33:14.036 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-27 13:33:14.485 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 0
2025-06-27 13:33:17.095 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:33:17.545 +08:00 [INF] thr:72<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 13:33:17.545 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 13:33:17.545 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 13:33:18.049 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:33:18.049 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-27 13:33:18.496 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-27 13:33:18.943 +08:00 [INF] thr:72<> loader Requires:OUTP 16 1
2025-06-27 13:33:19.391 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-27 13:33:19.839 +08:00 [INF] thr:72<> loader Requires:OUTP 4 1
2025-06-27 13:33:20.287 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-27 13:33:20.732 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:33:21.685 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:33:22.638 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:33:23.592 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:33:24.048 +08:00 [INF] thr:72<> loader Requires:INPUT A 5
2025-06-27 13:33:24.500 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 1
2025-06-27 13:33:27.117 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:33:27.567 +08:00 [INF] thr:72<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 13:33:27.567 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 13:33:27.567 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 13:33:28.072 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:33:28.072 +08:00 [INF] thr:72<> loader Requires:RETH
2025-06-27 13:33:33.108 +08:00 [INF] thr:72<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 13:33:33.111 +08:00 [INF] thr:72<> 执行Aligner角度angle：0
2025-06-27 13:36:06.982 +08:00 [INF] thr:48<> loader Requires:INPUT B 13
2025-06-27 13:36:07.966 +08:00 [INF] thr:72<> 执行Aligner角度angle：0
2025-06-27 13:36:08.969 +08:00 [INF] thr:72<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 13:36:08.970 +08:00 [INF] thr:72<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:36:08.970 +08:00 [INF] thr:72<> loader Requires:RGRP
2025-06-27 13:36:09.413 +08:00 [INF] thr:72<> CLeanLoader Group Now C
2025-06-27 13:36:09.413 +08:00 [INF] thr:72<> loader Requires:MATS AJ T
2025-06-27 13:36:09.871 +08:00 [INF] thr:72<> loader Requires:SSP Z 4000
2025-06-27 13:36:10.319 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 1
2025-06-27 13:36:10.793 +08:00 [INF] thr:72<> loader Requires:MOVR R 226000
2025-06-27 13:36:13.388 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:36:13.838 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 13:36:13.838 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 13:36:13.838 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 13:36:14.342 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:36:14.342 +08:00 [INF] thr:72<> loader Requires:INPUT A 6
2025-06-27 13:36:14.795 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-27 13:36:15.243 +08:00 [INF] thr:72<> loader Requires:OUTP 16 1
2025-06-27 13:36:15.690 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-27 13:36:16.138 +08:00 [INF] thr:72<> loader Requires:OUTP 4 1
2025-06-27 13:36:16.586 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-27 13:36:17.031 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:17.484 +08:00 [INF] thr:72<> loader Requires:MATS AJ R 0
2025-06-27 13:36:20.732 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 13:36:20.732 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 13:36:20.732 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 13:36:21.237 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:36:21.237 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-27 13:36:21.685 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 0
2025-06-27 13:36:24.296 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:36:24.745 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 13:36:24.745 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 13:36:24.745 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 13:36:25.249 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:36:25.249 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-27 13:36:25.700 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-27 13:36:26.145 +08:00 [INF] thr:72<> loader Requires:OUTP 16 0
2025-06-27 13:36:26.593 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-27 13:36:27.041 +08:00 [INF] thr:72<> loader Requires:OUTP 4 0
2025-06-27 13:36:27.488 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-27 13:36:27.934 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:28.887 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:29.842 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:30.794 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:31.748 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:32.701 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:36:33.151 +08:00 [INF] thr:72<> loader Requires:INPUT A 5
2025-06-27 13:36:33.606 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 1
2025-06-27 13:36:36.222 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:36:36.673 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 13:36:36.673 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 13:36:36.673 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 13:36:37.181 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:36:37.181 +08:00 [INF] thr:72<> loader Requires:RETH
2025-06-27 13:36:42.216 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 13:36:42.218 +08:00 [INF] thr:72<> AOI is Ready
2025-06-27 13:36:42.285 +08:00 [INF] thr:72<> SetVelocity, Axis:X, velocity:50
2025-06-27 13:36:42.289 +08:00 [INF] thr:72<> SetVelocity, Axis:Y, velocity:50
2025-06-27 13:36:42.325 +08:00 [INF] thr:72<> SetVelocity, Axis:X, velocity:8
2025-06-27 13:36:42.328 +08:00 [INF] thr:72<> SetVelocity, Axis:Y, velocity:8
2025-06-27 13:36:42.345 +08:00 [INF] thr:72<> stage move to position action ok
2025-06-27 13:36:42.345 +08:00 [INF] thr:72<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 13:36:42.346 +08:00 [INF] thr:72<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:36:42.346 +08:00 [INF] thr:72<> loader Requires:RGRP
2025-06-27 13:36:42.788 +08:00 [INF] thr:72<> CLeanLoader Group Now C
2025-06-27 13:36:42.788 +08:00 [INF] thr:72<> loader Requires:MATS AK T
2025-06-27 13:36:46.331 +08:00 [INF] thr:72<> loader Requires:SSP Z 4000
2025-06-27 13:36:46.779 +08:00 [INF] thr:72<> loader Requires:MATS AK Z 1
2025-06-27 13:36:53.797 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:36:54.247 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 13:36:54.247 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 13:36:54.247 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 13:36:54.750 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:36:54.750 +08:00 [INF] thr:72<> loader Requires:INPUT A 6
2025-06-27 13:36:55.204 +08:00 [INF] thr:72<> loader Requires:MATS AK R 0
2025-06-27 13:37:00.486 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 13:37:00.486 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 13:37:00.486 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 13:37:00.990 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:37:00.990 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-27 13:37:01.437 +08:00 [INF] thr:72<> loader Requires:MATS AK Z 0
2025-06-27 13:37:04.149 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:37:04.619 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 13:37:04.619 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 13:37:04.619 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 13:37:05.122 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:37:05.122 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-27 13:37:05.567 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-27 13:37:06.014 +08:00 [INF] thr:72<> loader Requires:OUTP 16 1
2025-06-27 13:37:06.461 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-27 13:37:06.910 +08:00 [INF] thr:72<> loader Requires:OUTP 4 1
2025-06-27 13:37:07.358 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-27 13:37:07.802 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:37:08.756 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:37:09.709 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:37:10.661 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-27 13:37:11.114 +08:00 [INF] thr:72<> loader Requires:INPUT A 5
2025-06-27 13:37:11.567 +08:00 [INF] thr:72<> loader Requires:MATS AK Z 1
2025-06-27 13:37:14.284 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-27 13:37:14.734 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 13:37:14.734 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 13:37:14.734 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 13:37:15.747 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:37:15.747 +08:00 [INF] thr:72<> loader Requires:RETH
2025-06-27 13:37:21.009 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 13:52:31.918 +08:00 [INF] thr:31<> loader Requires:INPUT B 13
2025-06-27 13:52:33.381 +08:00 [INF] thr:3<> AOI is Ready
2025-06-27 13:52:37.712 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-27 13:52:37.715 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-27 13:52:41.739 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-27 13:52:41.750 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-27 13:52:41.775 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-27 13:52:41.775 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 13:52:41.776 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:52:41.776 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-27 13:52:42.219 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-27 13:52:42.219 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-27 13:52:42.678 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-27 13:52:43.125 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-27 13:52:43.599 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 13:52:44.048 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 13:52:44.048 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 13:52:44.048 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 13:52:44.552 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:52:44.552 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-27 13:52:45.004 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-27 13:52:45.451 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-27 13:52:45.899 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-27 13:52:46.347 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-27 13:52:46.796 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-27 13:52:47.248 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:52:47.700 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-27 13:52:52.982 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 13:52:52.982 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 13:52:52.982 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 13:52:53.485 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:52:53.485 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 13:52:53.932 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-27 13:52:56.644 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 13:52:57.117 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 13:52:57.118 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 13:52:57.118 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 13:52:57.621 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:52:57.621 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 13:52:58.070 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-27 13:52:58.517 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-27 13:52:58.965 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-27 13:52:59.412 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-27 13:52:59.859 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-27 13:53:00.305 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:01.260 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:02.212 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:03.166 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:04.122 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:05.076 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:05.529 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-27 13:53:05.984 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-27 13:53:08.701 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 13:53:09.157 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 13:53:09.157 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 13:53:09.157 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 13:53:09.659 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:53:09.659 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-27 13:53:14.920 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 13:53:14.921 +08:00 [INF] thr:3<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 13:53:14.921 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-27 13:53:15.927 +08:00 [INF] thr:3<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 13:53:15.928 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:53:15.928 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-27 13:53:16.371 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-27 13:53:16.371 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-27 13:53:19.912 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-27 13:53:20.361 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-27 13:53:27.379 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-27 13:53:29.974 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 13:53:30.425 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 13:53:30.425 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 13:53:30.425 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 13:53:30.928 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:53:30.928 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-27 13:53:31.379 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-27 13:53:34.628 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 13:53:34.628 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 13:53:34.628 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 13:53:35.131 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:53:35.131 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 13:53:35.579 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-27 13:53:38.192 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 13:53:38.642 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 13:53:38.642 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 13:53:38.642 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 13:53:39.145 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:53:39.145 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 13:53:39.593 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-27 13:53:40.040 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-27 13:53:40.489 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-27 13:53:40.936 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-27 13:53:41.382 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-27 13:53:41.829 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:42.782 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:43.735 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:44.689 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 13:53:45.141 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-27 13:53:45.595 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-27 13:53:48.211 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 13:53:48.662 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 13:53:48.662 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 13:53:48.662 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 13:53:49.166 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:53:49.166 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-27 13:53:54.201 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 13:53:54.202 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-27 13:55:13.446 +08:00 [INF] thr:52<> loader Requires:INPUT B 13
2025-06-27 13:55:14.432 +08:00 [INF] thr:59<> 执行Aligner角度angle：0
2025-06-27 13:55:15.437 +08:00 [INF] thr:59<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 13:55:15.438 +08:00 [INF] thr:59<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:55:15.438 +08:00 [INF] thr:59<> loader Requires:RGRP
2025-06-27 13:55:15.884 +08:00 [INF] thr:59<> CLeanLoader Group Now C
2025-06-27 13:55:15.884 +08:00 [INF] thr:59<> loader Requires:MATS AJ T
2025-06-27 13:55:16.342 +08:00 [INF] thr:59<> loader Requires:SSP Z 4000
2025-06-27 13:55:16.790 +08:00 [INF] thr:59<> loader Requires:MATS AJ Z 1
2025-06-27 13:55:17.263 +08:00 [INF] thr:59<> loader Requires:MOVR R 226000
2025-06-27 13:55:19.857 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-06-27 13:55:20.309 +08:00 [INF] thr:59<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 13:55:20.309 +08:00 [INF] thr:59<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 13:55:20.309 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 13:55:20.812 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:55:20.812 +08:00 [INF] thr:59<> loader Requires:INPUT A 6
2025-06-27 13:55:21.265 +08:00 [INF] thr:59<> loader Requires:OUTP 1 0
2025-06-27 13:55:21.712 +08:00 [INF] thr:59<> loader Requires:OUTP 16 1
2025-06-27 13:55:22.160 +08:00 [INF] thr:59<> loader Requires:OUTP 15 1
2025-06-27 13:55:22.608 +08:00 [INF] thr:59<> loader Requires:OUTP 4 1
2025-06-27 13:55:23.054 +08:00 [INF] thr:59<> loader Requires:OUTP 1 1
2025-06-27 13:55:23.499 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:23.952 +08:00 [INF] thr:59<> loader Requires:MATS AJ R 0
2025-06-27 13:55:27.201 +08:00 [INF] thr:59<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 13:55:27.201 +08:00 [INF] thr:59<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 13:55:27.202 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 13:55:27.705 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:55:27.705 +08:00 [INF] thr:59<> loader Requires:SSP Z 1000
2025-06-27 13:55:28.153 +08:00 [INF] thr:59<> loader Requires:MATS AJ Z 0
2025-06-27 13:55:30.765 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-06-27 13:55:31.215 +08:00 [INF] thr:59<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 13:55:31.215 +08:00 [INF] thr:59<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 13:55:31.215 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 13:55:31.718 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:55:31.718 +08:00 [INF] thr:59<> loader Requires:SSP Z 1000
2025-06-27 13:55:32.175 +08:00 [INF] thr:59<> loader Requires:OUTP 1 0
2025-06-27 13:55:32.623 +08:00 [INF] thr:59<> loader Requires:OUTP 16 0
2025-06-27 13:55:33.070 +08:00 [INF] thr:59<> loader Requires:OUTP 15 1
2025-06-27 13:55:33.519 +08:00 [INF] thr:59<> loader Requires:OUTP 4 0
2025-06-27 13:55:33.966 +08:00 [INF] thr:59<> loader Requires:OUTP 1 1
2025-06-27 13:55:34.412 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:35.364 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:36.317 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:37.272 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:38.225 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:39.180 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:55:39.632 +08:00 [INF] thr:59<> loader Requires:INPUT A 5
2025-06-27 13:55:40.085 +08:00 [INF] thr:59<> loader Requires:MATS AJ Z 1
2025-06-27 13:55:42.702 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-06-27 13:55:43.153 +08:00 [INF] thr:59<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 13:55:43.153 +08:00 [INF] thr:59<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 13:55:43.153 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 13:55:43.657 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:55:43.657 +08:00 [INF] thr:59<> loader Requires:RETH
2025-06-27 13:55:48.692 +08:00 [INF] thr:59<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 13:55:48.694 +08:00 [INF] thr:59<> AOI is Ready
2025-06-27 13:55:48.760 +08:00 [INF] thr:59<> SetVelocity, Axis:X, velocity:50
2025-06-27 13:55:48.763 +08:00 [INF] thr:59<> SetVelocity, Axis:Y, velocity:50
2025-06-27 13:55:48.800 +08:00 [INF] thr:59<> SetVelocity, Axis:X, velocity:8
2025-06-27 13:55:48.803 +08:00 [INF] thr:59<> SetVelocity, Axis:Y, velocity:8
2025-06-27 13:55:48.820 +08:00 [INF] thr:59<> stage move to position action ok
2025-06-27 13:55:48.820 +08:00 [INF] thr:59<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 13:55:48.821 +08:00 [INF] thr:59<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 13:55:48.821 +08:00 [INF] thr:59<> loader Requires:RGRP
2025-06-27 13:55:49.263 +08:00 [INF] thr:59<> CLeanLoader Group Now C
2025-06-27 13:55:49.263 +08:00 [INF] thr:59<> loader Requires:MATS AK T
2025-06-27 13:55:52.806 +08:00 [INF] thr:59<> loader Requires:SSP Z 4000
2025-06-27 13:55:53.255 +08:00 [INF] thr:59<> loader Requires:MATS AK Z 1
2025-06-27 13:56:00.274 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-06-27 13:56:00.723 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 13:56:00.723 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 13:56:00.723 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 13:56:01.232 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:56:01.232 +08:00 [INF] thr:59<> loader Requires:INPUT A 6
2025-06-27 13:56:01.691 +08:00 [INF] thr:59<> loader Requires:MATS AK R 0
2025-06-27 13:56:06.978 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 13:56:06.978 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 13:56:06.978 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 13:56:07.482 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:56:07.482 +08:00 [INF] thr:59<> loader Requires:SSP Z 1000
2025-06-27 13:56:07.929 +08:00 [INF] thr:59<> loader Requires:MATS AK Z 0
2025-06-27 13:56:10.641 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-06-27 13:56:11.102 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 13:56:11.102 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 13:56:11.102 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 13:56:11.610 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:56:11.610 +08:00 [INF] thr:59<> loader Requires:SSP Z 1000
2025-06-27 13:56:12.058 +08:00 [INF] thr:59<> loader Requires:OUTP 1 0
2025-06-27 13:56:12.505 +08:00 [INF] thr:59<> loader Requires:OUTP 16 1
2025-06-27 13:56:12.952 +08:00 [INF] thr:59<> loader Requires:OUTP 15 1
2025-06-27 13:56:13.401 +08:00 [INF] thr:59<> loader Requires:OUTP 4 1
2025-06-27 13:56:13.848 +08:00 [INF] thr:59<> loader Requires:OUTP 1 1
2025-06-27 13:56:14.293 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:56:15.252 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:56:16.208 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:56:17.161 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-06-27 13:56:17.612 +08:00 [INF] thr:59<> loader Requires:INPUT A 5
2025-06-27 13:56:18.065 +08:00 [INF] thr:59<> loader Requires:MATS AK Z 1
2025-06-27 13:56:20.783 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-06-27 13:56:21.233 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 13:56:21.233 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 13:56:21.233 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 13:56:22.243 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 13:56:22.243 +08:00 [INF] thr:59<> loader Requires:RETH
2025-06-27 13:56:27.504 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 15:01:36.025 +08:00 [INF] thr:15<> get state: False
2025-06-27 15:01:36.043 +08:00 [INF] thr:15<> BoxExist:False
2025-06-27 15:01:36.521 +08:00 [INF] thr:15<> get state: True
2025-06-27 15:01:36.521 +08:00 [INF] thr:15<> BoxExist:True
2025-06-27 15:01:36.729 +08:00 [INF] thr:15<> get state: False
2025-06-27 15:01:36.729 +08:00 [INF] thr:15<> BoxExist:False
2025-06-27 15:01:39.058 +08:00 [INF] thr:59<> CassettA Absence
2025-06-27 15:01:41.079 +08:00 [INF] thr:15<> get state: True
2025-06-27 15:01:41.079 +08:00 [INF] thr:15<> BoxExist:True
2025-06-27 15:01:41.079 +08:00 [INF] thr:59<> CassettA Unloaded
2025-06-27 15:18:25.435 +08:00 [INF] thr:39<> loader Requires:INPUT B 13
2025-06-27 15:18:26.896 +08:00 [INF] thr:43<> AOI is Ready
2025-06-27 15:18:31.322 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:50
2025-06-27 15:18:31.325 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:50
2025-06-27 15:18:35.336 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:60
2025-06-27 15:18:35.339 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:60
2025-06-27 15:18:35.355 +08:00 [INF] thr:43<> stage move to position action ok
2025-06-27 15:18:35.356 +08:00 [INF] thr:43<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 15:18:35.356 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 15:18:35.356 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-06-27 15:18:35.800 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-06-27 15:18:35.800 +08:00 [INF] thr:43<> loader Requires:MATS AK T
2025-06-27 15:18:36.258 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-06-27 15:18:36.706 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-06-27 15:18:37.178 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-27 15:18:37.628 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 15:18:37.628 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 15:18:37.628 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 15:18:38.133 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:18:38.133 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-06-27 15:18:38.585 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-06-27 15:18:39.032 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-06-27 15:18:39.479 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-06-27 15:18:39.928 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-06-27 15:18:40.375 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-06-27 15:18:40.821 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:41.274 +08:00 [INF] thr:43<> loader Requires:MATS AK R 0
2025-06-27 15:18:46.555 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 15:18:46.555 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 15:18:46.555 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 15:18:47.058 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:18:47.058 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-27 15:18:47.505 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 0
2025-06-27 15:18:50.218 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-27 15:18:50.681 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 15:18:50.681 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 15:18:50.681 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 15:18:51.184 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:18:51.184 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-27 15:18:51.631 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-06-27 15:18:52.078 +08:00 [INF] thr:43<> loader Requires:OUTP 16 0
2025-06-27 15:18:52.526 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-06-27 15:18:52.974 +08:00 [INF] thr:43<> loader Requires:OUTP 4 0
2025-06-27 15:18:53.421 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-06-27 15:18:53.875 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:54.829 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:55.783 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:56.736 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:57.692 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:58.646 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 15:18:59.097 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-06-27 15:18:59.551 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-06-27 15:19:02.267 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-27 15:19:02.717 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 15:19:02.718 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 15:19:02.718 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 15:19:03.221 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:19:03.221 +08:00 [INF] thr:43<> loader Requires:RETH
2025-06-27 15:19:08.481 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 15:19:08.483 +08:00 [INF] thr:54<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 15:19:08.483 +08:00 [INF] thr:54<> 执行Aligner角度angle：0
2025-06-27 15:19:09.489 +08:00 [INF] thr:54<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 15:19:09.489 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 15:19:09.489 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 15:19:09.934 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 15:19:09.934 +08:00 [INF] thr:54<> loader Requires:MATS AJ T
2025-06-27 15:19:13.477 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 15:19:13.925 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 15:19:20.944 +08:00 [INF] thr:54<> loader Requires:MOVR R 226000
2025-06-27 15:19:23.539 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:19:23.992 +08:00 [INF] thr:54<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 15:19:23.992 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 15:19:23.992 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 15:19:24.496 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:19:24.496 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 15:19:24.950 +08:00 [INF] thr:54<> loader Requires:MATS AJ R 0
2025-06-27 15:19:28.199 +08:00 [INF] thr:54<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 15:19:28.199 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 15:19:28.199 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 15:19:28.702 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:19:28.702 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 15:19:29.147 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 0
2025-06-27 15:19:31.761 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:19:32.209 +08:00 [INF] thr:54<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 15:19:32.210 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 15:19:32.210 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 15:19:32.738 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:19:32.738 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 15:19:33.185 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 15:19:33.631 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 15:19:34.079 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 15:19:34.528 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 15:19:34.974 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 15:19:35.420 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:19:36.382 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:19:37.336 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:19:38.289 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:19:38.740 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 15:19:39.193 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 15:19:41.810 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:19:42.260 +08:00 [INF] thr:54<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 15:19:42.260 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 15:19:42.260 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 15:19:42.764 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:19:42.764 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 15:19:47.799 +08:00 [INF] thr:54<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 15:19:47.800 +08:00 [INF] thr:54<> 执行Aligner角度angle：0
2025-06-27 15:21:53.395 +08:00 [INF] thr:76<> loader Requires:INPUT B 13
2025-06-27 15:21:54.389 +08:00 [INF] thr:54<> 执行Aligner角度angle：0
2025-06-27 15:21:55.396 +08:00 [INF] thr:54<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 15:21:55.397 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 15:21:55.397 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 15:21:55.838 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 15:21:55.838 +08:00 [INF] thr:54<> loader Requires:MATS AJ T
2025-06-27 15:21:56.298 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 15:21:56.744 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 15:21:57.217 +08:00 [INF] thr:54<> loader Requires:MOVR R 226000
2025-06-27 15:21:59.811 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:22:00.263 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 15:22:00.263 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 15:22:00.263 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 15:22:00.766 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:00.766 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 15:22:01.215 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 15:22:01.663 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 15:22:02.110 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 15:22:02.559 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 15:22:03.005 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 15:22:03.450 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:03.903 +08:00 [INF] thr:54<> loader Requires:MATS AJ R 0
2025-06-27 15:22:07.152 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 15:22:07.152 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 15:22:07.152 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 15:22:07.656 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:07.656 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 15:22:08.104 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 0
2025-06-27 15:22:10.717 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:22:11.166 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 15:22:11.166 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 15:22:11.166 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 15:22:11.669 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:11.669 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 15:22:12.116 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 15:22:12.563 +08:00 [INF] thr:54<> loader Requires:OUTP 16 0
2025-06-27 15:22:13.011 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 15:22:13.460 +08:00 [INF] thr:54<> loader Requires:OUTP 4 0
2025-06-27 15:22:13.907 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 15:22:14.352 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:15.315 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:16.271 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:17.225 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:18.179 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:19.130 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:19.584 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 15:22:20.036 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 15:22:22.654 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:22:23.105 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 15:22:23.105 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 15:22:23.105 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 15:22:23.608 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:23.608 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 15:22:28.642 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 15:22:28.645 +08:00 [INF] thr:54<> AOI is Ready
2025-06-27 15:22:28.712 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:50
2025-06-27 15:22:28.715 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:50
2025-06-27 15:22:28.752 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:60
2025-06-27 15:22:28.755 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:60
2025-06-27 15:22:28.772 +08:00 [INF] thr:54<> stage move to position action ok
2025-06-27 15:22:28.772 +08:00 [INF] thr:54<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 15:22:28.773 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 15:22:28.773 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 15:22:29.214 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 15:22:29.214 +08:00 [INF] thr:54<> loader Requires:MATS AK T
2025-06-27 15:22:32.761 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 15:22:33.210 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-06-27 15:22:40.228 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:22:40.678 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 15:22:40.678 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 15:22:40.678 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 15:22:41.184 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:41.184 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 15:22:41.640 +08:00 [INF] thr:54<> loader Requires:MATS AK R 0
2025-06-27 15:22:46.921 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 15:22:46.921 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 15:22:46.921 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 15:22:47.424 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:47.424 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 15:22:47.871 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 0
2025-06-27 15:22:50.584 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:22:51.043 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 15:22:51.043 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 15:22:51.043 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 15:22:51.547 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:22:51.547 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 15:22:51.993 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 15:22:52.439 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 15:22:52.887 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 15:22:53.336 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 15:22:53.790 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 15:22:54.240 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:55.195 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:56.152 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:57.106 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 15:22:57.560 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 15:22:58.013 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-06-27 15:23:00.730 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 15:23:01.182 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 15:23:01.182 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 15:23:01.182 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 15:23:02.188 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 15:23:02.188 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 15:23:07.452 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 16:06:45.429 +08:00 [INF] thr:60<> loader Requires:INPUT B 13
2025-06-27 16:06:46.892 +08:00 [INF] thr:51<> AOI is Ready
2025-06-27 16:06:51.340 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:50
2025-06-27 16:06:51.343 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:50
2025-06-27 16:06:55.621 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:60
2025-06-27 16:06:55.624 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:60
2025-06-27 16:06:55.640 +08:00 [INF] thr:51<> stage move to position action ok
2025-06-27 16:06:55.641 +08:00 [INF] thr:51<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 16:06:55.643 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 16:06:55.643 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-06-27 16:06:56.089 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-06-27 16:06:56.089 +08:00 [INF] thr:51<> loader Requires:MATS AK T
2025-06-27 16:06:56.548 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-06-27 16:06:56.995 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 16:06:57.468 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 16:06:57.919 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 16:06:57.919 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 16:06:57.919 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 16:06:58.422 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:06:58.422 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-06-27 16:06:58.876 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 16:06:59.323 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-06-27 16:06:59.770 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 16:07:00.218 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-06-27 16:07:00.665 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 16:07:01.112 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:01.572 +08:00 [INF] thr:51<> loader Requires:MATS AK R 0
2025-06-27 16:07:06.854 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 16:07:06.854 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 16:07:06.854 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 16:07:07.358 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:07:07.358 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 16:07:07.807 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 0
2025-06-27 16:07:10.520 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 16:07:10.981 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 16:07:10.981 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 16:07:10.981 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 16:07:11.490 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:07:11.490 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 16:07:11.938 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 16:07:12.387 +08:00 [INF] thr:51<> loader Requires:OUTP 16 0
2025-06-27 16:07:12.836 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 16:07:13.285 +08:00 [INF] thr:51<> loader Requires:OUTP 4 0
2025-06-27 16:07:13.732 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 16:07:14.177 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:15.131 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:16.084 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:17.046 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:18.002 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:18.957 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:19.408 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-06-27 16:07:19.861 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 16:07:22.578 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 16:07:23.030 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 16:07:23.030 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 16:07:23.030 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 16:07:23.532 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:07:23.532 +08:00 [INF] thr:51<> loader Requires:RETH
2025-06-27 16:07:28.797 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 16:07:28.798 +08:00 [INF] thr:51<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 16:07:28.798 +08:00 [INF] thr:51<> 执行Aligner角度angle：0
2025-06-27 16:07:29.802 +08:00 [INF] thr:51<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 16:07:29.803 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 16:07:29.803 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-06-27 16:07:30.247 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-06-27 16:07:30.247 +08:00 [INF] thr:51<> loader Requires:MATS AJ T
2025-06-27 16:07:33.789 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-06-27 16:07:34.238 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 1
2025-06-27 16:07:41.256 +08:00 [INF] thr:51<> loader Requires:MOVR R 226000
2025-06-27 16:07:43.851 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 16:07:44.301 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 16:07:44.301 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 16:07:44.301 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 16:07:44.806 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:07:44.806 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-06-27 16:07:45.259 +08:00 [INF] thr:51<> loader Requires:MATS AJ R 0
2025-06-27 16:07:48.508 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 16:07:48.508 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 16:07:48.508 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 16:07:49.029 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:07:49.029 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 16:07:49.476 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 0
2025-06-27 16:07:52.089 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 16:07:52.546 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 16:07:52.546 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 16:07:52.546 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 16:07:53.054 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:07:53.054 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 16:07:53.502 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 16:07:53.950 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-06-27 16:07:54.398 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 16:07:54.845 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-06-27 16:07:55.292 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 16:07:55.737 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:56.690 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:57.643 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:58.598 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 16:07:59.049 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-06-27 16:07:59.502 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 1
2025-06-27 16:08:02.120 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 16:08:02.570 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 16:08:02.570 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 16:08:02.570 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 16:08:03.074 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:08:03.074 +08:00 [INF] thr:51<> loader Requires:RETH
2025-06-27 16:08:08.111 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 16:08:08.113 +08:00 [INF] thr:51<> 执行Aligner角度angle：0
2025-06-27 16:08:43.413 +08:00 [INF] thr:57<> loader Requires:INPUT B 13
2025-06-27 16:08:44.429 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-27 16:08:45.437 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 16:08:45.438 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 16:08:45.438 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-27 16:08:45.882 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-27 16:08:45.882 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-27 16:08:46.337 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-27 16:08:46.788 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-27 16:08:47.261 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-27 16:08:49.857 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 16:08:50.307 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 16:08:50.307 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 16:08:50.307 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 16:08:50.810 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:08:50.810 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-27 16:08:51.260 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-27 16:08:51.706 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-27 16:08:52.155 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-27 16:08:52.602 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-27 16:08:53.050 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-27 16:08:53.495 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:08:53.948 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-27 16:08:57.198 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 16:08:57.198 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 16:08:57.198 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 16:08:57.701 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:08:57.701 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 16:08:58.149 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-27 16:09:00.762 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 16:09:01.215 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 16:09:01.215 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 16:09:01.215 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 16:09:01.718 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:09:01.718 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 16:09:02.167 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-27 16:09:02.613 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-27 16:09:03.060 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-27 16:09:03.510 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-27 16:09:03.957 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-27 16:09:04.403 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:05.355 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:06.310 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:07.262 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:08.215 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:09.169 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:09.620 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-27 16:09:10.074 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-27 16:09:12.690 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 16:09:13.140 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 16:09:13.140 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 16:09:13.140 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 16:09:13.655 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:09:13.655 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-27 16:09:18.691 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 16:09:18.693 +08:00 [INF] thr:3<> AOI is Ready
2025-06-27 16:09:18.767 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-27 16:09:18.770 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-27 16:09:18.807 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:60
2025-06-27 16:09:18.810 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:60
2025-06-27 16:09:18.827 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-27 16:09:18.827 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 16:09:18.828 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 16:09:18.828 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-27 16:09:19.274 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-27 16:09:19.274 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-27 16:09:22.816 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-27 16:09:23.266 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-27 16:09:30.283 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 16:09:30.733 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 16:09:30.734 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 16:09:30.734 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 16:09:31.237 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:09:31.237 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-27 16:09:31.691 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-27 16:09:36.974 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 16:09:36.974 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 16:09:36.974 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 16:09:37.481 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:09:37.481 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 16:09:37.926 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-27 16:09:40.640 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 16:09:41.101 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 16:09:41.101 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 16:09:41.101 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 16:09:41.605 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:09:41.605 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-27 16:09:42.054 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-27 16:09:42.501 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-27 16:09:42.948 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-27 16:09:43.397 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-27 16:09:43.843 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-27 16:09:44.289 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:45.242 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:46.196 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:47.153 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-27 16:09:47.604 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-27 16:09:48.058 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-27 16:09:50.775 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-27 16:09:51.226 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 16:09:51.226 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 16:09:51.226 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 16:09:52.231 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 16:09:52.231 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-27 16:09:57.495 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 18:16:05.780 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-27 18:16:07.245 +08:00 [INF] thr:12<> AOI is Ready
2025-06-27 18:16:11.597 +08:00 [INF] thr:12<> SetVelocity, Axis:X, velocity:50
2025-06-27 18:16:11.600 +08:00 [INF] thr:12<> SetVelocity, Axis:Y, velocity:50
2025-06-27 18:16:14.411 +08:00 [INF] thr:12<> SetVelocity, Axis:X, velocity:8
2025-06-27 18:16:14.414 +08:00 [INF] thr:12<> SetVelocity, Axis:Y, velocity:8
2025-06-27 18:16:14.431 +08:00 [INF] thr:12<> stage move to position action ok
2025-06-27 18:16:14.431 +08:00 [INF] thr:12<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 18:16:14.432 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 18:16:14.432 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-27 18:16:14.876 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-27 18:16:14.876 +08:00 [INF] thr:12<> loader Requires:MATS AK T
2025-06-27 18:16:15.332 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-27 18:16:15.779 +08:00 [INF] thr:12<> loader Requires:MATS AK Z 1
2025-06-27 18:16:16.253 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 18:16:16.703 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 18:16:16.703 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 18:16:16.703 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 18:16:17.205 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:16:17.205 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-27 18:16:17.656 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-27 18:16:18.103 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-27 18:16:18.550 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-27 18:16:19.007 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-27 18:16:19.453 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-27 18:16:19.901 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:20.353 +08:00 [INF] thr:12<> loader Requires:MATS AK R 0
2025-06-27 18:16:25.634 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 18:16:25.634 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 18:16:25.634 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 18:16:26.139 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:16:26.139 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-27 18:16:26.588 +08:00 [INF] thr:12<> loader Requires:MATS AK Z 0
2025-06-27 18:16:29.301 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 18:16:29.771 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 18:16:29.771 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 18:16:29.771 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 18:16:30.274 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:16:30.274 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-27 18:16:30.724 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-27 18:16:31.170 +08:00 [INF] thr:12<> loader Requires:OUTP 16 0
2025-06-27 18:16:31.617 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-27 18:16:32.065 +08:00 [INF] thr:12<> loader Requires:OUTP 4 0
2025-06-27 18:16:32.512 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-27 18:16:32.958 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:33.911 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:34.864 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:35.818 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:36.772 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:37.724 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:16:38.176 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-27 18:16:38.630 +08:00 [INF] thr:12<> loader Requires:MATS AK Z 1
2025-06-27 18:16:41.347 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 18:16:41.798 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 18:16:41.798 +08:00 [INF] thr:12<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 18:16:41.798 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 18:16:42.303 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:16:42.303 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-27 18:16:47.565 +08:00 [INF] thr:12<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 18:16:47.568 +08:00 [INF] thr:12<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 18:16:47.568 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-27 18:16:48.580 +08:00 [INF] thr:12<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 18:16:48.581 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 18:16:48.581 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-27 18:16:49.023 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-27 18:16:49.023 +08:00 [INF] thr:12<> loader Requires:MATS AJ T
2025-06-27 18:16:52.566 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-27 18:16:53.015 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-27 18:17:00.033 +08:00 [INF] thr:12<> loader Requires:MOVR R 226000
2025-06-27 18:17:02.628 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 18:17:03.079 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 18:17:03.079 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 18:17:03.079 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 18:17:03.583 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:17:03.583 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-27 18:17:04.038 +08:00 [INF] thr:12<> loader Requires:MATS AJ R 0
2025-06-27 18:17:07.285 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 18:17:07.285 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 18:17:07.285 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 18:17:07.788 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:17:07.788 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-27 18:17:08.233 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 0
2025-06-27 18:17:10.846 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 18:17:11.294 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 18:17:11.294 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 18:17:11.294 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 18:17:11.802 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:17:11.802 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-27 18:17:12.251 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-27 18:17:12.697 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-27 18:17:13.144 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-27 18:17:13.592 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-27 18:17:14.039 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-27 18:17:14.485 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:17:15.439 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:17:16.393 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:17:17.345 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 18:17:17.798 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-27 18:17:18.250 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-27 18:17:20.867 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 18:17:21.318 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 18:17:21.318 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 18:17:21.318 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 18:17:21.822 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:17:21.822 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-27 18:17:26.857 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 18:17:26.858 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-27 18:22:08.980 +08:00 [INF] thr:78<> loader Requires:INPUT B 13
2025-06-27 18:22:09.963 +08:00 [INF] thr:54<> 执行Aligner角度angle：0
2025-06-27 18:22:10.976 +08:00 [INF] thr:54<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 18:22:10.976 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 18:22:10.976 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 18:22:11.419 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 18:22:11.420 +08:00 [INF] thr:54<> loader Requires:MATS AJ T
2025-06-27 18:22:11.878 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 18:22:12.325 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 18:22:12.798 +08:00 [INF] thr:54<> loader Requires:MOVR R 226000
2025-06-27 18:22:15.394 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 18:22:15.852 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 18:22:15.852 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 18:22:15.852 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 18:22:16.355 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:22:16.355 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 18:22:16.810 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 18:22:17.257 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 18:22:17.704 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 18:22:18.153 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 18:22:18.600 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 18:22:19.044 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:19.497 +08:00 [INF] thr:54<> loader Requires:MATS AJ R 0
2025-06-27 18:22:22.746 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 18:22:22.746 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 18:22:22.746 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 18:22:23.253 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:22:23.253 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 18:22:23.703 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 0
2025-06-27 18:22:26.317 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 18:22:26.768 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 18:22:26.768 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 18:22:26.768 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 18:22:27.275 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:22:27.275 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 18:22:27.727 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 18:22:28.175 +08:00 [INF] thr:54<> loader Requires:OUTP 16 0
2025-06-27 18:22:28.621 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 18:22:29.070 +08:00 [INF] thr:54<> loader Requires:OUTP 4 0
2025-06-27 18:22:29.517 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 18:22:29.963 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:30.917 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:31.873 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:32.826 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:33.780 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:34.733 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:22:35.184 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 18:22:35.638 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 18:22:38.255 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 18:22:38.706 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 18:22:38.706 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 18:22:38.706 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 18:22:39.209 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:22:39.209 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 18:22:44.246 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 18:22:44.247 +08:00 [INF] thr:54<> AOI is Ready
2025-06-27 18:22:44.316 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:50
2025-06-27 18:22:44.323 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:50
2025-06-27 18:22:44.368 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:8
2025-06-27 18:22:44.371 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:8
2025-06-27 18:22:44.387 +08:00 [INF] thr:54<> stage move to position action ok
2025-06-27 18:22:44.387 +08:00 [INF] thr:54<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 18:22:44.388 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 18:22:44.388 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 18:22:44.832 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 18:22:44.832 +08:00 [INF] thr:54<> loader Requires:MATS AK T
2025-06-27 18:22:48.375 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 18:22:48.833 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-06-27 18:22:55.851 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 18:22:56.301 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 18:22:56.301 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 18:22:56.301 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 18:22:56.805 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:22:56.805 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 18:22:57.258 +08:00 [INF] thr:54<> loader Requires:MATS AK R 0
2025-06-27 18:23:02.540 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 18:23:02.541 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 18:23:02.541 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 18:23:03.045 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:23:03.045 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 18:23:03.490 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 0
2025-06-27 18:23:06.203 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 18:23:06.675 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 18:23:06.675 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 18:23:06.675 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 18:23:07.177 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:23:07.177 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 18:23:07.623 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 18:23:08.071 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 18:23:08.517 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 18:23:08.966 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 18:23:09.413 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 18:23:09.858 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:23:10.812 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:23:11.769 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:23:12.722 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 18:23:13.173 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 18:23:13.628 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-06-27 18:23:16.345 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 18:23:16.795 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 18:23:16.795 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 18:23:16.795 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 18:23:17.799 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 18:23:17.799 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 18:23:23.062 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 20:33:04.789 +08:00 [INF] thr:15<> get state: False
2025-06-27 20:33:04.790 +08:00 [INF] thr:15<> BoxExist:False
2025-06-27 20:33:07.011 +08:00 [INF] thr:43<> CassettA Absence
2025-06-27 20:33:07.044 +08:00 [INF] thr:15<> get state: True
2025-06-27 20:33:07.044 +08:00 [INF] thr:15<> BoxExist:True
2025-06-27 20:33:07.044 +08:00 [INF] thr:59<> CassettA Unloaded
2025-06-27 20:49:00.748 +08:00 [INF] thr:80<> loader Requires:INPUT B 13
2025-06-27 20:49:02.214 +08:00 [INF] thr:74<> AOI is Ready
2025-06-27 20:49:06.659 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-06-27 20:49:06.666 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-06-27 20:49:10.683 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:8
2025-06-27 20:49:10.691 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:8
2025-06-27 20:49:10.722 +08:00 [INF] thr:74<> stage move to position action ok
2025-06-27 20:49:10.722 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 20:49:10.723 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 20:49:10.723 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-06-27 20:49:11.165 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-06-27 20:49:11.165 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-06-27 20:49:11.624 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-06-27 20:49:12.075 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-06-27 20:49:12.548 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-27 20:49:12.998 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 20:49:12.998 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 20:49:12.998 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 20:49:13.502 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:49:13.502 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-06-27 20:49:13.955 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-27 20:49:14.402 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-06-27 20:49:14.849 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-27 20:49:15.298 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-06-27 20:49:15.744 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-27 20:49:16.190 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:16.642 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-06-27 20:49:21.925 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 20:49:21.925 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 20:49:21.925 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 20:49:22.428 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:49:22.428 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-27 20:49:22.878 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-06-27 20:49:25.591 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-27 20:49:26.060 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 20:49:26.060 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 20:49:26.060 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 20:49:26.564 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:49:26.564 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-27 20:49:27.013 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-27 20:49:27.461 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-06-27 20:49:27.907 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-27 20:49:28.356 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-06-27 20:49:28.803 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-27 20:49:29.249 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:30.203 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:31.158 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:32.113 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:33.065 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:34.017 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-27 20:49:34.470 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-06-27 20:49:34.925 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-06-27 20:49:37.644 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-27 20:49:38.095 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 20:49:38.095 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 20:49:38.095 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 20:49:38.598 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:49:38.598 +08:00 [INF] thr:74<> loader Requires:RETH
2025-06-27 20:49:43.859 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 20:49:43.861 +08:00 [INF] thr:43<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 20:49:43.861 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-06-27 20:49:44.867 +08:00 [INF] thr:43<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 20:49:44.868 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 20:49:44.869 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-06-27 20:49:45.312 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-06-27 20:49:45.312 +08:00 [INF] thr:43<> loader Requires:MATS AJ T
2025-06-27 20:49:48.854 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-06-27 20:49:49.304 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-06-27 20:49:56.322 +08:00 [INF] thr:43<> loader Requires:MOVR R 226000
2025-06-27 20:49:58.925 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-27 20:49:59.376 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 20:49:59.376 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 20:49:59.377 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 20:49:59.881 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:49:59.881 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-06-27 20:50:00.332 +08:00 [INF] thr:43<> loader Requires:MATS AJ R 0
2025-06-27 20:50:03.582 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 20:50:03.582 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 20:50:03.582 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 20:50:04.085 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:50:04.085 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-27 20:50:04.534 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 0
2025-06-27 20:50:07.147 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-27 20:50:07.596 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 20:50:07.596 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 20:50:07.596 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 20:50:08.100 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:50:08.100 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-27 20:50:08.548 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-06-27 20:50:08.993 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-06-27 20:50:09.441 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-06-27 20:50:09.890 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-06-27 20:50:10.336 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-06-27 20:50:10.785 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 20:50:11.740 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 20:50:12.692 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 20:50:13.645 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-27 20:50:14.097 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-06-27 20:50:14.551 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-06-27 20:50:17.168 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-27 20:50:17.618 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 20:50:17.618 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 20:50:17.618 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 20:50:18.121 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:50:18.121 +08:00 [INF] thr:43<> loader Requires:RETH
2025-06-27 20:50:23.158 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 20:50:23.159 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-06-27 20:50:33.739 +08:00 [INF] thr:81<> loader Requires:INPUT B 13
2025-06-27 20:50:34.797 +08:00 [INF] thr:51<> 执行Aligner角度angle：0
2025-06-27 20:50:35.807 +08:00 [INF] thr:51<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 20:50:35.808 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 20:50:35.808 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-06-27 20:50:36.251 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-06-27 20:50:36.251 +08:00 [INF] thr:51<> loader Requires:MATS AJ T
2025-06-27 20:50:36.710 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-06-27 20:50:37.157 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 1
2025-06-27 20:50:37.630 +08:00 [INF] thr:51<> loader Requires:MOVR R 226000
2025-06-27 20:50:40.226 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 20:50:40.676 +08:00 [INF] thr:51<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 20:50:40.676 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 20:50:40.676 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 20:50:41.180 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:50:41.180 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-06-27 20:50:41.635 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 20:50:42.080 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-06-27 20:50:42.527 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 20:50:42.976 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-06-27 20:50:43.423 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 20:50:43.868 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:44.321 +08:00 [INF] thr:51<> loader Requires:MATS AJ R 0
2025-06-27 20:50:47.573 +08:00 [INF] thr:51<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 20:50:47.574 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 20:50:47.574 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 20:50:48.077 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:50:48.077 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 20:50:48.525 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 0
2025-06-27 20:50:51.138 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 20:50:51.587 +08:00 [INF] thr:51<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 20:50:51.587 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 20:50:51.587 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 20:50:52.090 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:50:52.090 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 20:50:52.535 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 20:50:52.982 +08:00 [INF] thr:51<> loader Requires:OUTP 16 0
2025-06-27 20:50:53.429 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 20:50:53.881 +08:00 [INF] thr:51<> loader Requires:OUTP 4 0
2025-06-27 20:50:54.328 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 20:50:54.774 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:55.729 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:56.682 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:57.634 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:58.588 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:59.541 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:50:59.991 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-06-27 20:51:00.445 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 1
2025-06-27 20:51:03.063 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 20:51:03.513 +08:00 [INF] thr:51<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 20:51:03.513 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 20:51:03.513 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 20:51:04.017 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:51:04.017 +08:00 [INF] thr:51<> loader Requires:RETH
2025-06-27 20:51:09.053 +08:00 [INF] thr:51<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 20:51:09.055 +08:00 [INF] thr:51<> AOI is Ready
2025-06-27 20:51:09.120 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:50
2025-06-27 20:51:09.123 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:50
2025-06-27 20:51:09.158 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:8
2025-06-27 20:51:09.165 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:8
2025-06-27 20:51:09.197 +08:00 [INF] thr:51<> stage move to position action ok
2025-06-27 20:51:09.198 +08:00 [INF] thr:51<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 20:51:09.199 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 20:51:09.199 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-06-27 20:51:09.640 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-06-27 20:51:09.640 +08:00 [INF] thr:51<> loader Requires:MATS AK T
2025-06-27 20:51:13.183 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-06-27 20:51:13.632 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 20:51:20.650 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 20:51:21.099 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 20:51:21.099 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 20:51:21.099 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 20:51:21.603 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:51:21.603 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-06-27 20:51:22.056 +08:00 [INF] thr:51<> loader Requires:MATS AK R 0
2025-06-27 20:51:27.339 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 20:51:27.339 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 20:51:27.339 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 20:51:27.842 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:51:27.842 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 20:51:28.288 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 0
2025-06-27 20:51:31.001 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 20:51:31.476 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 20:51:31.476 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 20:51:31.476 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 20:51:31.980 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:51:31.980 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 20:51:32.428 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 20:51:32.875 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-06-27 20:51:33.322 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 20:51:33.770 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-06-27 20:51:34.217 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 20:51:34.663 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:51:35.617 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:51:36.574 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:51:37.526 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 20:51:37.978 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-06-27 20:51:38.431 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 20:51:41.148 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 20:51:41.599 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 20:51:41.599 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 20:51:41.599 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 20:51:42.604 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 20:51:42.604 +08:00 [INF] thr:51<> loader Requires:RETH
2025-06-27 20:51:47.865 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-27 21:12:05.621 +08:00 [INF] thr:48<> loader Requires:INPUT B 13
2025-06-27 21:12:07.090 +08:00 [INF] thr:51<> AOI is Ready
2025-06-27 21:12:11.540 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:50
2025-06-27 21:12:11.544 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:50
2025-06-27 21:12:15.024 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:8
2025-06-27 21:12:15.027 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:8
2025-06-27 21:12:15.044 +08:00 [INF] thr:51<> stage move to position action ok
2025-06-27 21:12:15.044 +08:00 [INF] thr:51<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-27 21:12:15.046 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 21:12:15.047 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-06-27 21:12:15.491 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-06-27 21:12:15.491 +08:00 [INF] thr:51<> loader Requires:MATS AK T
2025-06-27 21:12:15.949 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-06-27 21:12:16.397 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 21:12:16.869 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 21:12:17.319 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-27 21:12:17.319 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-27 21:12:17.319 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-27 21:12:17.822 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:12:17.822 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-06-27 21:12:18.276 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 21:12:18.723 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-06-27 21:12:19.171 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 21:12:19.619 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-06-27 21:12:20.067 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 21:12:20.515 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:20.968 +08:00 [INF] thr:51<> loader Requires:MATS AK R 0
2025-06-27 21:12:26.250 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-27 21:12:26.250 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片请求
2025-06-27 21:12:26.250 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-27 21:12:26.754 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:12:26.754 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 21:12:27.200 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 0
2025-06-27 21:12:29.913 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 21:12:30.376 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-27 21:12:30.376 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-27 21:12:30.376 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-27 21:12:30.879 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:12:30.879 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-06-27 21:12:31.327 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-06-27 21:12:31.774 +08:00 [INF] thr:51<> loader Requires:OUTP 16 0
2025-06-27 21:12:32.222 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-06-27 21:12:32.670 +08:00 [INF] thr:51<> loader Requires:OUTP 4 0
2025-06-27 21:12:33.118 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-06-27 21:12:33.567 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:34.520 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:35.474 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:36.427 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:37.380 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:38.334 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-06-27 21:12:38.787 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-06-27 21:12:39.241 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-06-27 21:12:41.958 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-06-27 21:12:42.410 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-27 21:12:42.410 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-27 21:12:42.410 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-27 21:12:42.914 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:12:42.914 +08:00 [INF] thr:51<> loader Requires:RETH
2025-06-27 21:12:48.177 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-27 21:12:48.179 +08:00 [INF] thr:12<> 执行Aligner设置初始角度InitialAngle：0
2025-06-27 21:12:48.179 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-27 21:12:49.187 +08:00 [INF] thr:12<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-27 21:12:49.188 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 21:12:49.188 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-27 21:12:49.632 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-27 21:12:49.632 +08:00 [INF] thr:12<> loader Requires:MATS AJ T
2025-06-27 21:12:53.174 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-27 21:12:53.619 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-27 21:13:00.637 +08:00 [INF] thr:12<> loader Requires:MOVR R 226000
2025-06-27 21:13:03.232 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 21:13:03.683 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-27 21:13:03.683 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-27 21:13:03.683 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-27 21:13:04.188 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:13:04.188 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-27 21:13:04.640 +08:00 [INF] thr:12<> loader Requires:MATS AJ R 0
2025-06-27 21:13:07.889 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-27 21:13:07.889 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-27 21:13:07.890 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-27 21:13:08.394 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:13:08.394 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-27 21:13:08.841 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 0
2025-06-27 21:13:11.455 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 21:13:11.903 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-27 21:13:11.903 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-27 21:13:11.903 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-27 21:13:12.406 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:13:12.406 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-27 21:13:12.852 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-27 21:13:13.300 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-27 21:13:13.746 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-27 21:13:14.195 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-27 21:13:14.641 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-27 21:13:15.088 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 21:13:16.041 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 21:13:16.996 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 21:13:17.952 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-27 21:13:18.403 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-27 21:13:18.857 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-27 21:13:21.479 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-27 21:13:21.928 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-27 21:13:21.928 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-27 21:13:21.928 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-27 21:13:22.431 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:13:22.431 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-27 21:13:27.468 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-27 21:13:27.469 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-27 21:14:22.781 +08:00 [INF] thr:78<> loader Requires:INPUT B 13
2025-06-27 21:14:23.751 +08:00 [INF] thr:54<> 执行Aligner角度angle：0
2025-06-27 21:14:24.764 +08:00 [INF] thr:54<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-27 21:14:24.765 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 21:14:24.765 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 21:14:25.206 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 21:14:25.206 +08:00 [INF] thr:54<> loader Requires:MATS AJ T
2025-06-27 21:14:25.665 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 21:14:26.119 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 21:14:26.592 +08:00 [INF] thr:54<> loader Requires:MOVR R 226000
2025-06-27 21:14:29.189 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 21:14:29.638 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-27 21:14:29.638 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-27 21:14:29.638 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-27 21:14:30.143 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:14:30.143 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 21:14:30.596 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 21:14:31.044 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 21:14:31.490 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 21:14:31.938 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 21:14:32.385 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 21:14:32.832 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:33.283 +08:00 [INF] thr:54<> loader Requires:MATS AJ R 0
2025-06-27 21:14:36.533 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-27 21:14:36.533 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-27 21:14:36.533 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-27 21:14:37.036 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:14:37.036 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 21:14:37.482 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 0
2025-06-27 21:14:40.093 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 21:14:40.543 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-27 21:14:40.543 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-27 21:14:40.543 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-27 21:14:41.048 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:14:41.048 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 21:14:41.495 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 21:14:41.942 +08:00 [INF] thr:54<> loader Requires:OUTP 16 0
2025-06-27 21:14:42.390 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 21:14:42.838 +08:00 [INF] thr:54<> loader Requires:OUTP 4 0
2025-06-27 21:14:43.284 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 21:14:43.732 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:44.689 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:45.641 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:46.595 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:47.548 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:48.501 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:14:48.952 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 21:14:49.406 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-06-27 21:14:52.024 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 21:14:52.474 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-27 21:14:52.474 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-27 21:14:52.474 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-27 21:14:52.978 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:14:52.978 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 21:14:58.012 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-27 21:14:58.013 +08:00 [INF] thr:54<> AOI is Ready
2025-06-27 21:14:58.078 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:50
2025-06-27 21:14:58.081 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:50
2025-06-27 21:14:58.116 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:8
2025-06-27 21:14:58.120 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:8
2025-06-27 21:14:58.136 +08:00 [INF] thr:54<> stage move to position action ok
2025-06-27 21:14:58.137 +08:00 [INF] thr:54<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-27 21:14:58.138 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-27 21:14:58.138 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-06-27 21:14:58.579 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-06-27 21:14:58.579 +08:00 [INF] thr:54<> loader Requires:MATS AK T
2025-06-27 21:15:02.122 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-06-27 21:15:02.571 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-06-27 21:15:09.589 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 21:15:10.039 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-27 21:15:10.039 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-27 21:15:10.039 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-27 21:15:10.543 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:15:10.543 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-06-27 21:15:10.997 +08:00 [INF] thr:54<> loader Requires:MATS AK R 0
2025-06-27 21:15:16.278 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-27 21:15:16.278 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片请求
2025-06-27 21:15:16.278 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-27 21:15:16.781 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:15:16.781 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 21:15:17.228 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 0
2025-06-27 21:15:19.941 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 21:15:20.414 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-27 21:15:20.414 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-27 21:15:20.414 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-27 21:15:20.918 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:15:20.918 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-06-27 21:15:21.367 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-06-27 21:15:21.813 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-06-27 21:15:22.260 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-06-27 21:15:22.709 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-06-27 21:15:23.155 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-06-27 21:15:23.601 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:15:24.554 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:15:25.508 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:15:26.461 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-06-27 21:15:26.912 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-06-27 21:15:27.366 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-06-27 21:15:30.083 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-06-27 21:15:30.533 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-27 21:15:30.533 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-27 21:15:30.533 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-27 21:15:31.538 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-06-27 21:15:31.538 +08:00 [INF] thr:54<> loader Requires:RETH
2025-06-27 21:15:36.800 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-28 09:52:10.628 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-28 09:52:12.089 +08:00 [INF] thr:74<> AOI is Ready
2025-06-28 09:52:12.163 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-06-28 09:52:12.167 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-06-28 09:52:15.875 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:20
2025-06-28 09:52:15.879 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:20
2025-06-28 09:52:15.898 +08:00 [INF] thr:74<> stage move to position action ok
2025-06-28 09:52:15.898 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-28 09:52:15.899 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 09:52:15.899 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-06-28 09:52:16.340 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-06-28 09:52:16.340 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-06-28 09:52:16.799 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-06-28 09:52:17.250 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-06-28 09:52:17.723 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 09:52:18.173 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-28 09:52:18.173 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-28 09:52:18.173 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-28 09:52:18.677 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:52:18.677 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-06-28 09:52:19.126 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-28 09:52:19.573 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-06-28 09:52:20.021 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-28 09:52:20.472 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-06-28 09:52:20.917 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-28 09:52:21.363 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:21.815 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-06-28 09:52:27.096 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-28 09:52:27.096 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片请求
2025-06-28 09:52:27.096 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-28 09:52:27.604 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:52:27.604 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 09:52:28.050 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-06-28 09:52:30.763 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 09:52:31.233 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-28 09:52:31.233 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-28 09:52:31.233 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-28 09:52:31.736 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:52:31.736 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 09:52:32.184 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-28 09:52:32.631 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-06-28 09:52:33.079 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-28 09:52:33.527 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-06-28 09:52:33.974 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-28 09:52:34.420 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:35.376 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:36.331 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:37.283 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:38.237 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:39.189 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:52:39.642 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-06-28 09:52:40.095 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-06-28 09:52:42.812 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 09:52:43.264 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-28 09:52:43.264 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-28 09:52:43.264 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-28 09:52:43.771 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:52:43.771 +08:00 [INF] thr:74<> loader Requires:RETH
2025-06-28 09:52:49.041 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-28 09:52:49.042 +08:00 [INF] thr:74<> 执行Aligner设置初始角度InitialAngle：0
2025-06-28 09:52:49.042 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-06-28 09:52:50.051 +08:00 [INF] thr:74<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-28 09:52:50.052 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 09:52:50.052 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-06-28 09:52:50.495 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-06-28 09:52:50.495 +08:00 [INF] thr:74<> loader Requires:MATS AJ T
2025-06-28 09:52:54.037 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-06-28 09:52:54.487 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-06-28 09:53:01.505 +08:00 [INF] thr:74<> loader Requires:MOVR R 226000
2025-06-28 09:53:04.100 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 09:53:04.550 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-28 09:53:04.550 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-28 09:53:04.550 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-28 09:53:05.059 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:53:05.059 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-06-28 09:53:05.514 +08:00 [INF] thr:74<> loader Requires:MATS AJ R 0
2025-06-28 09:53:08.764 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-28 09:53:08.764 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-28 09:53:08.764 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-28 09:53:09.268 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:53:09.268 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 09:53:09.718 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 0
2025-06-28 09:53:12.333 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 09:53:12.782 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-28 09:53:12.782 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-28 09:53:12.782 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-28 09:53:13.286 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:53:13.286 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 09:53:13.735 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-28 09:53:14.189 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-06-28 09:53:14.636 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-28 09:53:15.085 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-06-28 09:53:15.531 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-28 09:53:15.978 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:53:16.931 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:53:17.884 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:53:18.838 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 09:53:19.290 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-06-28 09:53:19.742 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-06-28 09:53:22.367 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 09:53:22.817 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-28 09:53:22.817 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-28 09:53:22.817 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-28 09:53:23.320 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:53:23.320 +08:00 [INF] thr:74<> loader Requires:RETH
2025-06-28 09:53:28.356 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-28 09:53:28.357 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-06-28 09:56:08.517 +08:00 [INF] thr:53<> loader Requires:INPUT B 13
2025-06-28 09:56:09.489 +08:00 [INF] thr:72<> 执行Aligner角度angle：0
2025-06-28 09:56:10.494 +08:00 [INF] thr:72<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-28 09:56:10.495 +08:00 [INF] thr:72<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 09:56:10.495 +08:00 [INF] thr:72<> loader Requires:RGRP
2025-06-28 09:56:10.938 +08:00 [INF] thr:72<> CLeanLoader Group Now C
2025-06-28 09:56:10.938 +08:00 [INF] thr:72<> loader Requires:MATS AJ T
2025-06-28 09:56:11.396 +08:00 [INF] thr:72<> loader Requires:SSP Z 4000
2025-06-28 09:56:11.842 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 1
2025-06-28 09:56:12.316 +08:00 [INF] thr:72<> loader Requires:MOVR R 226000
2025-06-28 09:56:14.912 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-28 09:56:15.362 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-28 09:56:15.362 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-28 09:56:15.362 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-28 09:56:15.866 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:56:15.866 +08:00 [INF] thr:72<> loader Requires:INPUT A 6
2025-06-28 09:56:16.319 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-28 09:56:16.766 +08:00 [INF] thr:72<> loader Requires:OUTP 16 1
2025-06-28 09:56:17.213 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-28 09:56:17.661 +08:00 [INF] thr:72<> loader Requires:OUTP 4 1
2025-06-28 09:56:18.109 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-28 09:56:18.554 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:19.006 +08:00 [INF] thr:72<> loader Requires:MATS AJ R 0
2025-06-28 09:56:22.256 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-28 09:56:22.256 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-28 09:56:22.256 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-28 09:56:22.760 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:56:22.760 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-28 09:56:23.207 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 0
2025-06-28 09:56:25.819 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-28 09:56:26.272 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-28 09:56:26.272 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-28 09:56:26.272 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-28 09:56:26.773 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:56:26.773 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-28 09:56:27.220 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-28 09:56:27.667 +08:00 [INF] thr:72<> loader Requires:OUTP 16 0
2025-06-28 09:56:28.116 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-28 09:56:28.567 +08:00 [INF] thr:72<> loader Requires:OUTP 4 0
2025-06-28 09:56:29.014 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-28 09:56:29.459 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:30.412 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:31.367 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:32.319 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:33.273 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:34.225 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:56:34.677 +08:00 [INF] thr:72<> loader Requires:INPUT A 5
2025-06-28 09:56:35.138 +08:00 [INF] thr:72<> loader Requires:MATS AJ Z 1
2025-06-28 09:56:37.754 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-28 09:56:38.205 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-28 09:56:38.205 +08:00 [INF] thr:72<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-28 09:56:38.205 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-28 09:56:38.709 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:56:38.709 +08:00 [INF] thr:72<> loader Requires:RETH
2025-06-28 09:56:43.744 +08:00 [INF] thr:72<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-28 09:56:43.745 +08:00 [INF] thr:72<> AOI is Ready
2025-06-28 09:56:43.811 +08:00 [INF] thr:72<> SetVelocity, Axis:X, velocity:50
2025-06-28 09:56:43.814 +08:00 [INF] thr:72<> SetVelocity, Axis:Y, velocity:50
2025-06-28 09:56:43.851 +08:00 [INF] thr:72<> SetVelocity, Axis:X, velocity:20
2025-06-28 09:56:43.854 +08:00 [INF] thr:72<> SetVelocity, Axis:Y, velocity:20
2025-06-28 09:56:43.871 +08:00 [INF] thr:72<> stage move to position action ok
2025-06-28 09:56:43.871 +08:00 [INF] thr:72<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-28 09:56:43.872 +08:00 [INF] thr:72<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 09:56:43.872 +08:00 [INF] thr:72<> loader Requires:RGRP
2025-06-28 09:56:44.316 +08:00 [INF] thr:72<> CLeanLoader Group Now C
2025-06-28 09:56:44.316 +08:00 [INF] thr:72<> loader Requires:MATS AK T
2025-06-28 09:56:47.858 +08:00 [INF] thr:72<> loader Requires:SSP Z 4000
2025-06-28 09:56:48.306 +08:00 [INF] thr:72<> loader Requires:MATS AK Z 1
2025-06-28 09:56:55.324 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-28 09:56:55.774 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-28 09:56:55.774 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-28 09:56:55.774 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-28 09:56:56.277 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:56:56.277 +08:00 [INF] thr:72<> loader Requires:INPUT A 6
2025-06-28 09:56:56.731 +08:00 [INF] thr:72<> loader Requires:MATS AK R 0
2025-06-28 09:57:02.013 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-28 09:57:02.013 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片请求
2025-06-28 09:57:02.013 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-28 09:57:02.517 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:57:02.517 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-28 09:57:02.966 +08:00 [INF] thr:72<> loader Requires:MATS AK Z 0
2025-06-28 09:57:05.678 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-28 09:57:06.138 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-28 09:57:06.138 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-28 09:57:06.138 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-28 09:57:06.641 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:57:06.641 +08:00 [INF] thr:72<> loader Requires:SSP Z 1000
2025-06-28 09:57:07.087 +08:00 [INF] thr:72<> loader Requires:OUTP 1 0
2025-06-28 09:57:07.535 +08:00 [INF] thr:72<> loader Requires:OUTP 16 1
2025-06-28 09:57:07.982 +08:00 [INF] thr:72<> loader Requires:OUTP 15 1
2025-06-28 09:57:08.431 +08:00 [INF] thr:72<> loader Requires:OUTP 4 1
2025-06-28 09:57:08.879 +08:00 [INF] thr:72<> loader Requires:OUTP 1 1
2025-06-28 09:57:09.326 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:57:10.281 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:57:11.234 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:57:12.187 +08:00 [INF] thr:72<> loader Requires:INPUT A 4
2025-06-28 09:57:12.639 +08:00 [INF] thr:72<> loader Requires:INPUT A 5
2025-06-28 09:57:13.091 +08:00 [INF] thr:72<> loader Requires:MATS AK Z 1
2025-06-28 09:57:15.809 +08:00 [INF] thr:72<> loader Requires:SSPP Z 30
2025-06-28 09:57:16.260 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-28 09:57:16.260 +08:00 [INF] thr:72<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-28 09:57:16.260 +08:00 [INF] thr:72<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-28 09:57:17.267 +08:00 [INF] thr:72<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 09:57:17.267 +08:00 [INF] thr:72<> loader Requires:RETH
2025-06-28 09:57:22.528 +08:00 [INF] thr:72<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-28 10:02:06.781 +08:00 [INF] thr:28<> loader Requires:INPUT B 13
2025-06-28 10:02:08.244 +08:00 [INF] thr:74<> AOI is Ready
2025-06-28 10:02:08.308 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:02:08.311 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:02:12.222 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:8
2025-06-28 10:02:12.225 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:8
2025-06-28 10:02:12.242 +08:00 [INF] thr:74<> stage move to position action ok
2025-06-28 10:02:12.242 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-28 10:02:12.243 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:02:12.243 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-06-28 10:02:12.686 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-06-28 10:02:12.686 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-06-28 10:02:13.146 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-06-28 10:02:13.595 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-06-28 10:02:14.070 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 10:02:14.520 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-28 10:02:14.520 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-28 10:02:14.520 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-28 10:02:15.023 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:02:15.023 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-06-28 10:02:15.476 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-28 10:02:15.923 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-06-28 10:02:16.371 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-28 10:02:16.820 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-06-28 10:02:17.267 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-28 10:02:17.712 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:18.165 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-06-28 10:02:23.446 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-28 10:02:23.446 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片请求
2025-06-28 10:02:23.446 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-28 10:02:23.952 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:02:23.952 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 10:02:24.396 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-06-28 10:02:27.109 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 10:02:27.577 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-28 10:02:27.577 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-28 10:02:27.577 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-28 10:02:28.080 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:02:28.080 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 10:02:28.526 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-28 10:02:28.973 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-06-28 10:02:29.420 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-28 10:02:29.869 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-06-28 10:02:30.316 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-28 10:02:30.761 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:31.714 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:32.667 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:33.621 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:34.574 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:35.528 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:02:35.978 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-06-28 10:02:36.432 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-06-28 10:02:39.149 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 10:02:39.600 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-28 10:02:39.601 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-28 10:02:39.601 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-28 10:02:40.103 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:02:40.103 +08:00 [INF] thr:74<> loader Requires:RETH
2025-06-28 10:02:45.362 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-28 10:02:45.364 +08:00 [INF] thr:74<> 执行Aligner设置初始角度InitialAngle：0
2025-06-28 10:02:45.364 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-06-28 10:02:46.373 +08:00 [INF] thr:74<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-28 10:02:46.374 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:02:46.374 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-06-28 10:02:46.817 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-06-28 10:02:46.817 +08:00 [INF] thr:74<> loader Requires:MATS AJ T
2025-06-28 10:02:50.359 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-06-28 10:02:50.808 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-06-28 10:02:57.828 +08:00 [INF] thr:74<> loader Requires:MOVR R 226000
2025-06-28 10:03:00.422 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 10:03:00.873 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-28 10:03:00.873 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-28 10:03:00.873 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-28 10:03:01.377 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:03:01.377 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-06-28 10:03:01.830 +08:00 [INF] thr:74<> loader Requires:MATS AJ R 0
2025-06-28 10:03:05.079 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-28 10:03:05.079 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-28 10:03:05.079 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-28 10:03:05.583 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:03:05.583 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 10:03:06.031 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 0
2025-06-28 10:03:08.643 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 10:03:09.092 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-28 10:03:09.092 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-28 10:03:09.092 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-28 10:03:09.596 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:03:09.596 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-06-28 10:03:10.044 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-06-28 10:03:10.491 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-06-28 10:03:10.947 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-06-28 10:03:11.395 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-06-28 10:03:11.842 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-06-28 10:03:12.288 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:03:13.243 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:03:14.195 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:03:15.148 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-06-28 10:03:15.600 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-06-28 10:03:16.053 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-06-28 10:03:18.671 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-06-28 10:03:19.121 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-28 10:03:19.122 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-28 10:03:19.122 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-28 10:03:19.625 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:03:19.625 +08:00 [INF] thr:74<> loader Requires:RETH
2025-06-28 10:03:24.659 +08:00 [INF] thr:74<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-28 10:03:24.660 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-06-28 10:05:49.774 +08:00 [INF] thr:67<> loader Requires:INPUT B 13
2025-06-28 10:05:50.768 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-06-28 10:05:51.780 +08:00 [INF] thr:43<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-28 10:05:51.781 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:05:51.781 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-06-28 10:05:52.225 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-06-28 10:05:52.225 +08:00 [INF] thr:43<> loader Requires:MATS AJ T
2025-06-28 10:05:52.684 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-06-28 10:05:53.131 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-06-28 10:05:53.607 +08:00 [INF] thr:43<> loader Requires:MOVR R 226000
2025-06-28 10:05:56.204 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-28 10:05:56.655 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-28 10:05:56.655 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-28 10:05:56.655 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-28 10:05:57.159 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:05:57.159 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-06-28 10:05:57.611 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-06-28 10:05:58.057 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-06-28 10:05:58.506 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-06-28 10:05:58.954 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-06-28 10:05:59.401 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-06-28 10:05:59.847 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:00.299 +08:00 [INF] thr:43<> loader Requires:MATS AJ R 0
2025-06-28 10:06:03.549 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-28 10:06:03.549 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-28 10:06:03.549 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-28 10:06:04.052 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:04.052 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-28 10:06:04.497 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 0
2025-06-28 10:06:07.109 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-28 10:06:07.557 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-28 10:06:07.557 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-28 10:06:07.557 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-28 10:06:08.061 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:08.061 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-28 10:06:08.511 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-06-28 10:06:08.956 +08:00 [INF] thr:43<> loader Requires:OUTP 16 0
2025-06-28 10:06:09.404 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-06-28 10:06:09.852 +08:00 [INF] thr:43<> loader Requires:OUTP 4 0
2025-06-28 10:06:10.299 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-06-28 10:06:10.745 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:11.703 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:12.657 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:13.609 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:14.561 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:15.515 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:15.966 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-06-28 10:06:16.420 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-06-28 10:06:19.036 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-28 10:06:19.486 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-28 10:06:19.486 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-28 10:06:19.486 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-28 10:06:19.990 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:19.990 +08:00 [INF] thr:43<> loader Requires:RETH
2025-06-28 10:06:25.024 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-28 10:06:25.025 +08:00 [INF] thr:43<> AOI is Ready
2025-06-28 10:06:25.091 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:06:25.094 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:06:25.133 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:8
2025-06-28 10:06:25.136 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:8
2025-06-28 10:06:25.152 +08:00 [INF] thr:43<> stage move to position action ok
2025-06-28 10:06:25.153 +08:00 [INF] thr:43<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-28 10:06:25.153 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:06:25.153 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-06-28 10:06:25.596 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-06-28 10:06:25.596 +08:00 [INF] thr:43<> loader Requires:MATS AK T
2025-06-28 10:06:29.138 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-06-28 10:06:29.585 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-06-28 10:06:36.608 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-28 10:06:37.058 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-28 10:06:37.058 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-28 10:06:37.058 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-28 10:06:37.561 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:37.561 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-06-28 10:06:38.013 +08:00 [INF] thr:43<> loader Requires:MATS AK R 0
2025-06-28 10:06:43.296 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-28 10:06:43.296 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片请求
2025-06-28 10:06:43.296 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-28 10:06:43.803 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:43.803 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-28 10:06:44.249 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 0
2025-06-28 10:06:46.962 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-28 10:06:47.444 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-28 10:06:47.444 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-28 10:06:47.444 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-28 10:06:47.947 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:47.947 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-06-28 10:06:48.396 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-06-28 10:06:48.843 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-06-28 10:06:49.291 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-06-28 10:06:49.741 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-06-28 10:06:50.189 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-06-28 10:06:50.636 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:51.589 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:52.542 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:53.496 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-06-28 10:06:53.948 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-06-28 10:06:54.400 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-06-28 10:06:57.117 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-06-28 10:06:57.569 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-28 10:06:57.569 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-28 10:06:57.569 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-28 10:06:58.574 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:06:58.574 +08:00 [INF] thr:43<> loader Requires:RETH
2025-06-28 10:07:03.836 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-28 10:10:48.412 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:56511
2025-06-28 10:11:46.091 +08:00 [INF] thr:24<> Axis:X, axis id:2,state:ACSC_SAFETY_LL
2025-06-28 10:27:56.989 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:62495
2025-06-28 10:28:25.116 +08:00 [INF] thr:13<> CleanLoader Init Start
2025-06-28 10:28:25.116 +08:00 [INF] thr:13<> loader Requires:RSIO 13
2025-06-28 10:28:25.570 +08:00 [INF] thr:13<> loader Requires:INPUT B 13
2025-06-28 10:28:26.025 +08:00 [INF] thr:13<> loader Requires:REMS
2025-06-28 10:28:26.470 +08:00 [INF] thr:13<> loader Requires:VER
2025-06-28 10:28:26.917 +08:00 [INF] thr:13<> HIWIN loader Version:1.86.0.77
2025-06-28 10:28:26.917 +08:00 [INF] thr:13<> loader Requires:SVON
2025-06-28 10:28:27.368 +08:00 [INF] thr:13<> loader Requires:INPUT A 6
2025-06-28 10:28:27.823 +08:00 [INF] thr:13<> loader Requires:INPUT A 9
2025-06-28 10:28:28.275 +08:00 [INF] thr:13<> loader Requires:OUTP 1 0
2025-06-28 10:28:28.722 +08:00 [INF] thr:13<> loader Requires:OUTP 4 0
2025-06-28 10:28:29.168 +08:00 [INF] thr:13<> loader Requires:HOM
2025-06-28 10:29:18.469 +08:00 [INF] thr:13<> loader Requires:ERR 0
2025-06-28 10:29:18.992 +08:00 [INF] thr:13<> loader Requires:SSPP A 30 30 30
2025-06-28 10:29:19.463 +08:00 [INF] thr:13<> CleanLoader Init Finished
2025-06-28 10:29:19.465 +08:00 [INF] thr:27<> LoadPortProxy Reset Start
2025-06-28 10:29:19.465 +08:00 [INF] thr:13<> StageProxy Reset Start
2025-06-28 10:29:19.465 +08:00 [INF] thr:11<> AlignerProxy Reset Start
2025-06-28 10:29:19.466 +08:00 [INF] thr:11<> Aligner Reset Start
2025-06-28 10:29:19.466 +08:00 [INF] thr:27<> LoadPort Reset Start
2025-06-28 10:29:19.466 +08:00 [INF] thr:64<> CassettA Disconnected
2025-06-28 10:29:19.968 +08:00 [INF] thr:13<> StageProxy Reset Finished
2025-06-28 10:29:20.007 +08:00 [INF] thr:22<> 开始Home
2025-06-28 10:29:21.468 +08:00 [INF] thr:11<> AlignerProxy Reset Finished
2025-06-28 10:29:28.383 +08:00 [INF] thr:22<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-28 10:29:28.383 +08:00 [INF] thr:11<> CassettA Absence
2025-06-28 10:29:28.383 +08:00 [INF] thr:36<> CassettA Unloaded
2025-06-28 10:29:28.474 +08:00 [INF] thr:27<> LoadPortProxy Reset Finished
2025-06-28 10:31:55.371 +08:00 [INF] thr:33<> loader Requires:INPUT B 13
2025-06-28 10:31:56.365 +08:00 [INF] thr:69<> 执行Aligner角度angle：0
2025-06-28 10:31:57.373 +08:00 [INF] thr:69<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-28 10:31:57.373 +08:00 [INF] thr:69<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:31:57.373 +08:00 [INF] thr:69<> loader Requires:RGRP
2025-06-28 10:31:57.817 +08:00 [INF] thr:69<> CLeanLoader Group Now C
2025-06-28 10:31:57.817 +08:00 [INF] thr:69<> loader Requires:MATS AJ T
2025-06-28 10:32:00.697 +08:00 [INF] thr:69<> loader Requires:SSP Z 4000
2025-06-28 10:32:01.145 +08:00 [INF] thr:69<> loader Requires:MATS AJ Z 1
2025-06-28 10:32:04.022 +08:00 [INF] thr:69<> loader Requires:MOVR R 226000
2025-06-28 10:32:06.617 +08:00 [INF] thr:69<> loader Requires:SSPP Z 30
2025-06-28 10:32:07.067 +08:00 [INF] thr:69<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-28 10:32:07.068 +08:00 [INF] thr:69<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-28 10:32:07.068 +08:00 [INF] thr:69<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-28 10:32:07.571 +08:00 [INF] thr:69<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:32:07.571 +08:00 [INF] thr:69<> loader Requires:INPUT A 6
2025-06-28 10:32:08.025 +08:00 [INF] thr:69<> loader Requires:OUTP 1 0
2025-06-28 10:32:08.472 +08:00 [INF] thr:69<> loader Requires:OUTP 16 1
2025-06-28 10:32:08.919 +08:00 [INF] thr:69<> loader Requires:OUTP 15 1
2025-06-28 10:32:09.368 +08:00 [INF] thr:69<> loader Requires:OUTP 4 1
2025-06-28 10:32:09.815 +08:00 [INF] thr:69<> loader Requires:OUTP 1 1
2025-06-28 10:32:10.261 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:10.713 +08:00 [INF] thr:69<> loader Requires:MATS AJ R 0
2025-06-28 10:32:13.963 +08:00 [INF] thr:69<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-28 10:32:13.963 +08:00 [INF] thr:69<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-28 10:32:13.963 +08:00 [INF] thr:69<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-28 10:32:14.465 +08:00 [INF] thr:69<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:32:14.465 +08:00 [INF] thr:69<> loader Requires:SSP Z 1000
2025-06-28 10:32:14.911 +08:00 [INF] thr:69<> loader Requires:MATS AJ Z 0
2025-06-28 10:32:17.530 +08:00 [INF] thr:69<> loader Requires:SSPP Z 30
2025-06-28 10:32:17.981 +08:00 [INF] thr:69<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-28 10:32:17.981 +08:00 [INF] thr:69<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-28 10:32:17.981 +08:00 [INF] thr:69<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-28 10:32:18.484 +08:00 [INF] thr:69<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:32:18.484 +08:00 [INF] thr:69<> loader Requires:SSP Z 1000
2025-06-28 10:32:18.933 +08:00 [INF] thr:69<> loader Requires:OUTP 1 0
2025-06-28 10:32:19.380 +08:00 [INF] thr:69<> loader Requires:OUTP 16 0
2025-06-28 10:32:19.827 +08:00 [INF] thr:69<> loader Requires:OUTP 15 1
2025-06-28 10:32:20.276 +08:00 [INF] thr:69<> loader Requires:OUTP 4 0
2025-06-28 10:32:20.722 +08:00 [INF] thr:69<> loader Requires:OUTP 1 1
2025-06-28 10:32:21.168 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:22.124 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:23.079 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:24.032 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:24.986 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:25.942 +08:00 [INF] thr:69<> loader Requires:INPUT A 4
2025-06-28 10:32:26.393 +08:00 [INF] thr:69<> loader Requires:INPUT A 5
2025-06-28 10:32:26.847 +08:00 [INF] thr:69<> loader Requires:MATS AJ Z 1
2025-06-28 10:32:29.464 +08:00 [INF] thr:69<> loader Requires:SSPP Z 30
2025-06-28 10:32:29.915 +08:00 [INF] thr:69<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-28 10:32:29.915 +08:00 [INF] thr:69<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-28 10:32:29.915 +08:00 [INF] thr:69<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-28 10:32:30.418 +08:00 [INF] thr:69<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:32:30.418 +08:00 [INF] thr:69<> loader Requires:RETH
2025-06-28 10:32:35.454 +08:00 [INF] thr:69<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-28 10:32:35.457 +08:00 [INF] thr:69<> AOI is Ready
2025-06-28 10:32:35.521 +08:00 [INF] thr:69<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:32:35.524 +08:00 [INF] thr:69<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:32:35.835 +08:00 [INF] thr:69<> SetVelocity, Axis:X, velocity:20
2025-06-28 10:32:35.838 +08:00 [INF] thr:69<> SetVelocity, Axis:Y, velocity:20
2025-06-28 10:32:35.855 +08:00 [INF] thr:69<> stage move to position action ok
2025-06-28 10:32:35.855 +08:00 [INF] thr:69<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-28 10:32:35.856 +08:00 [INF] thr:69<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:32:35.856 +08:00 [INF] thr:69<> loader Requires:RGRP
2025-06-28 10:32:36.297 +08:00 [INF] thr:69<> CLeanLoader Group Now C
2025-06-28 10:32:36.297 +08:00 [INF] thr:69<> loader Requires:MATS AK T
2025-06-28 10:32:39.838 +08:00 [INF] thr:69<> loader Requires:SSP Z 4000
2025-06-28 10:32:40.287 +08:00 [INF] thr:69<> loader Requires:MATS AK Z 1
2025-06-28 10:32:47.306 +08:00 [INF] thr:69<> loader Requires:SSPP Z 30
2025-06-28 10:32:47.755 +08:00 [INF] thr:69<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-28 10:32:47.755 +08:00 [INF] thr:69<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-28 10:32:47.755 +08:00 [INF] thr:69<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-28 10:32:48.257 +08:00 [INF] thr:69<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:32:48.257 +08:00 [INF] thr:69<> loader Requires:INPUT A 6
2025-06-28 10:32:48.712 +08:00 [INF] thr:69<> loader Requires:MATS AK R 0
2025-06-28 10:32:53.994 +08:00 [INF] thr:69<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-28 10:32:53.994 +08:00 [INF] thr:69<> Station:InspectStageA,SafeCheck:上片请求
2025-06-28 10:32:53.994 +08:00 [INF] thr:69<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-28 10:36:12.578 +08:00 [INF] thr:18<> CleanLoader Init Start
2025-06-28 10:36:12.578 +08:00 [INF] thr:18<> loader Requires:RSIO 13
2025-06-28 10:36:13.035 +08:00 [INF] thr:18<> loader Requires:INPUT B 13
2025-06-28 10:36:13.489 +08:00 [INF] thr:18<> loader Requires:REMS
2025-06-28 10:36:13.933 +08:00 [INF] thr:18<> loader Requires:VER
2025-06-28 10:36:14.381 +08:00 [INF] thr:18<> HIWIN loader Version:1.86.0.77
2025-06-28 10:36:14.382 +08:00 [INF] thr:18<> loader Requires:SVON
2025-06-28 10:36:14.831 +08:00 [INF] thr:18<> loader Requires:INPUT A 6
2025-06-28 10:36:15.283 +08:00 [INF] thr:18<> loader Requires:INPUT A 9
2025-06-28 10:36:15.737 +08:00 [INF] thr:18<> loader Requires:OUTP 1 0
2025-06-28 10:36:16.184 +08:00 [INF] thr:18<> loader Requires:OUTP 4 0
2025-06-28 10:36:16.630 +08:00 [INF] thr:18<> loader Requires:HOM
2025-06-28 10:36:51.124 +08:00 [INF] thr:18<> loader Requires:ERR 0
2025-06-28 10:36:51.650 +08:00 [INF] thr:18<> loader Requires:SSPP A 30 30 30
2025-06-28 10:36:52.122 +08:00 [INF] thr:18<> CleanLoader Init Finished
2025-06-28 10:36:52.122 +08:00 [INF] thr:18<> StageProxy Reset Start
2025-06-28 10:36:52.122 +08:00 [INF] thr:69<> LoadPortProxy Reset Start
2025-06-28 10:36:52.122 +08:00 [INF] thr:10<> AlignerProxy Reset Start
2025-06-28 10:36:52.122 +08:00 [INF] thr:69<> LoadPort Reset Start
2025-06-28 10:36:52.122 +08:00 [INF] thr:10<> Aligner Reset Start
2025-06-28 10:36:52.122 +08:00 [INF] thr:49<> CassettA Disconnected
2025-06-28 10:36:52.630 +08:00 [INF] thr:18<> StageProxy Reset Finished
2025-06-28 10:36:52.836 +08:00 [INF] thr:22<> 开始Home
2025-06-28 10:36:54.125 +08:00 [INF] thr:10<> AlignerProxy Reset Finished
2025-06-28 10:37:01.199 +08:00 [INF] thr:22<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-28 10:37:01.199 +08:00 [INF] thr:65<> CassettA Absence
2025-06-28 10:37:01.199 +08:00 [INF] thr:52<> CassettA Unloaded
2025-06-28 10:37:02.136 +08:00 [INF] thr:69<> LoadPortProxy Reset Finished
2025-06-28 10:37:07.767 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:63027
2025-06-28 10:39:12.407 +08:00 [INF] thr:28<> loader Requires:INPUT B 13
2025-06-28 10:39:13.385 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-06-28 10:39:14.392 +08:00 [INF] thr:52<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-28 10:39:14.393 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:39:14.393 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-06-28 10:39:14.837 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-06-28 10:39:14.837 +08:00 [INF] thr:52<> loader Requires:MATS AJ T
2025-06-28 10:39:17.716 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-06-28 10:39:18.165 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-06-28 10:39:21.040 +08:00 [INF] thr:52<> loader Requires:MOVR R 226000
2025-06-28 10:39:23.637 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-06-28 10:39:24.087 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-28 10:39:24.087 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-28 10:39:24.087 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-28 10:39:24.591 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:39:24.591 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-06-28 10:39:25.045 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-06-28 10:39:25.491 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-06-28 10:39:25.939 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-06-28 10:39:26.387 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-06-28 10:39:26.834 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-06-28 10:39:27.281 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:27.732 +08:00 [INF] thr:52<> loader Requires:MATS AJ R 0
2025-06-28 10:39:30.982 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-28 10:39:30.982 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-28 10:39:30.982 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-28 10:39:31.486 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:39:31.486 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-06-28 10:39:31.934 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 0
2025-06-28 10:39:34.546 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-06-28 10:39:34.996 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-28 10:39:34.996 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-28 10:39:34.996 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-28 10:39:35.499 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:39:35.499 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-06-28 10:39:35.947 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-06-28 10:39:36.402 +08:00 [INF] thr:52<> loader Requires:OUTP 16 0
2025-06-28 10:39:36.850 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-06-28 10:39:37.299 +08:00 [INF] thr:52<> loader Requires:OUTP 4 0
2025-06-28 10:39:37.745 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-06-28 10:39:38.192 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:39.147 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:40.104 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:41.055 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:42.009 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:42.962 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-06-28 10:39:43.414 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-06-28 10:39:43.867 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-06-28 10:39:46.485 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-06-28 10:39:46.935 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-28 10:39:46.935 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-28 10:39:46.935 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-28 10:39:47.441 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:39:47.441 +08:00 [INF] thr:52<> loader Requires:RETH
2025-06-28 10:39:52.474 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-28 10:39:52.476 +08:00 [INF] thr:52<> AOI is Ready
2025-06-28 10:39:52.543 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:39:52.551 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:39:52.861 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:20
2025-06-28 10:39:52.868 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:20
2025-06-28 10:39:52.887 +08:00 [INF] thr:52<> stage move to position action ok
2025-06-28 10:39:52.887 +08:00 [INF] thr:52<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-28 10:39:52.888 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:39:52.888 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-06-28 10:39:53.329 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-06-28 10:39:53.329 +08:00 [INF] thr:52<> loader Requires:MATS AK T
2025-06-28 10:39:56.872 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-06-28 10:39:57.320 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-06-28 10:40:04.339 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-06-28 10:40:04.788 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-28 10:40:04.788 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-28 10:40:04.788 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-28 10:40:05.294 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:40:05.294 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-06-28 10:40:05.746 +08:00 [INF] thr:52<> loader Requires:MATS AK R 0
2025-06-28 10:40:11.028 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-28 10:40:11.028 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:上片请求
2025-06-28 10:40:11.028 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-28 10:42:10.438 +08:00 [INF] thr:49<> CleanLoader Init Start
2025-06-28 10:42:10.438 +08:00 [INF] thr:49<> loader Requires:RSIO 13
2025-06-28 10:42:10.892 +08:00 [INF] thr:49<> loader Requires:INPUT B 13
2025-06-28 10:44:24.408 +08:00 [INF] thr:14<> CleanLoader Init Start
2025-06-28 10:44:24.408 +08:00 [INF] thr:14<> loader Requires:RSIO 13
2025-06-28 10:44:24.864 +08:00 [INF] thr:14<> loader Requires:INPUT B 13
2025-06-28 10:44:58.630 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-06-28 10:44:58.668 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-28 10:44:58.669 +08:00 [INF] thr:4<> Start init SafeController
2025-06-28 10:44:58.679 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-28 10:44:58.679 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-28 10:44:58.680 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-28 10:44:58.680 +08:00 [INF] thr:10<> Start init Buffer
2025-06-28 10:44:58.845 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-28 10:44:58.850 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-28 10:44:58.876 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-28 10:44:59.337 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-28 10:44:59.867 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-28 10:46:33.834 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-06-28 10:46:33.874 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-28 10:46:33.875 +08:00 [INF] thr:4<> Start init SafeController
2025-06-28 10:46:33.885 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-28 10:46:33.885 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-28 10:46:33.886 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-28 10:46:33.886 +08:00 [INF] thr:10<> Start init Buffer
2025-06-28 10:46:34.042 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-28 10:46:34.046 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-28 10:46:34.200 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-28 10:46:34.661 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-28 10:46:35.115 +08:00 [INF] thr:4<> loader Requires:REMS
2025-06-28 10:46:35.559 +08:00 [INF] thr:4<> loader Requires:VER
2025-06-28 10:46:36.006 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-06-28 10:46:36.006 +08:00 [INF] thr:4<> loader Requires:SVON
2025-06-28 10:46:36.457 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-06-28 10:46:36.909 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-06-28 10:46:37.361 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-06-28 10:46:37.808 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-06-28 10:46:38.258 +08:00 [INF] thr:4<> loader Requires:HOM
2025-06-28 10:47:10.550 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-06-28 10:47:11.076 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-06-28 10:47:11.547 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-06-28 10:47:11.548 +08:00 [INF] thr:13<> StageProxy Init Start
2025-06-28 10:47:11.548 +08:00 [INF] thr:11<> LoadPortProxy Init Start
2025-06-28 10:47:11.549 +08:00 [INF] thr:12<> AlignerProxy Init Start
2025-06-28 10:47:11.549 +08:00 [INF] thr:14<> AirBlowerProxy Init Start
2025-06-28 10:47:11.551 +08:00 [INF] thr:14<> AirBlowerProxy Init Finished
2025-06-28 10:47:11.576 +08:00 [INF] thr:11<> CassettA 开始Connect
2025-06-28 10:47:11.576 +08:00 [INF] thr:11<> Component.LoadPort.SmifV2 Position:CassettA
2025-06-28 10:47:11.601 +08:00 [INF] thr:11<> 开始Home
2025-06-28 10:47:13.107 +08:00 [INF] thr:12<> AlignerProxy Init Finished
2025-06-28 10:47:14.930 +08:00 [INF] thr:13<> WaitHomeBufferComplete invoke...
2025-06-28 10:47:14.932 +08:00 [INF] thr:13<> GetHomeHash:-306607611,NowHomeHash:-306607611
2025-06-28 10:47:14.933 +08:00 [INF] thr:13<> stage Home:0
2025-06-28 10:47:19.902 +08:00 [INF] thr:11<> BoxExist:True
2025-06-28 10:47:19.902 +08:00 [INF] thr:11<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-28 10:47:19.925 +08:00 [INF] thr:11<> LoadPortProxy Init Finished
2025-06-28 10:47:19.933 +08:00 [INF] thr:22<> 开始Home
2025-06-28 10:47:28.409 +08:00 [INF] thr:22<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-06-28 10:47:28.410 +08:00 [INF] thr:12<> CassettA Absence
2025-06-28 10:47:28.412 +08:00 [INF] thr:16<> CassettA Unloaded
2025-06-28 10:48:18.220 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-06-28 10:48:18.220 +08:00 [INF] thr:13<> AOIType:4
2025-06-28 10:48:18.236 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-06-28 10:48:18.236 +08:00 [INF] thr:13<> Standard_GA_X:2
2025-06-28 10:48:18.238 +08:00 [INF] thr:13<> X axis:2 left [LLIMIT]：-78.2，right [RLIMIT]:77.3
2025-06-28 10:48:18.238 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-06-28 10:48:18.239 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-06-28 10:48:18.240 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-06-28 10:48:18.240 +08:00 [INF] thr:13<> Standard_GA_Y:0
2025-06-28 10:48:18.242 +08:00 [INF] thr:13<> Y axis:0 left [LLIMIT]：-181，right [RLIMIT]:81
2025-06-28 10:48:18.243 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-06-28 10:48:18.247 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-06-28 10:48:18.247 +08:00 [INF] thr:13<> Standard_GA_Z:7
2025-06-28 10:48:18.249 +08:00 [INF] thr:13<> Z axis:7 left [LLIMIT]：-100，right [RLIMIT]:100
2025-06-28 10:48:18.250 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-06-28 10:48:18.252 +08:00 [INF] thr:13<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-06-28 10:48:18.252 +08:00 [INF] thr:13<> Standard_GA_R:4
2025-06-28 10:48:18.254 +08:00 [INF] thr:13<> R axis:4 left [LLIMIT]：-1，right [RLIMIT]:1
2025-06-28 10:48:18.259 +08:00 [INF] thr:13<> load Stage setting :D:\VPTEK_AOI\VPTEKCONFIG\ACSStandardConfig.json
2025-06-28 10:48:18.265 +08:00 [INF] thr:13<> EjectedPosition X:-0.5，Y:-160，Z:0
2025-06-28 10:48:18.265 +08:00 [INF] thr:13<> EnclosedPosition X:0，Y:0，Z:0
2025-06-28 10:48:18.267 +08:00 [INF] thr:13<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-06-28 10:48:18.277 +08:00 [INF] thr:13<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-06-28 10:48:18.285 +08:00 [INF] thr:13<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-06-28 10:48:18.417 +08:00 [INF] thr:13<> StageProxy Init Finished
2025-06-28 10:48:18.443 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-28 10:49:48.559 +08:00 [INF] thr:36<> loader Requires:INPUT B 13
2025-06-28 10:49:49.573 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-06-28 10:49:50.584 +08:00 [INF] thr:31<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-28 10:49:50.586 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:49:50.587 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-06-28 10:49:51.030 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-06-28 10:49:51.030 +08:00 [INF] thr:31<> loader Requires:MATS AJ T
2025-06-28 10:49:53.920 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-06-28 10:49:54.370 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-06-28 10:49:57.246 +08:00 [INF] thr:31<> loader Requires:MOVR R 226000
2025-06-28 10:49:59.843 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-06-28 10:50:00.293 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-28 10:50:00.293 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-28 10:50:00.294 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-28 10:50:00.797 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:00.797 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-06-28 10:50:01.251 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-06-28 10:50:01.698 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-06-28 10:50:02.149 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-06-28 10:50:02.597 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-06-28 10:50:03.044 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-06-28 10:50:03.490 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:03.942 +08:00 [INF] thr:31<> loader Requires:MATS AJ R 0
2025-06-28 10:50:07.191 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-28 10:50:07.191 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-28 10:50:07.191 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-28 10:50:07.694 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:07.694 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-06-28 10:50:08.143 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 0
2025-06-28 10:50:10.757 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-06-28 10:50:11.208 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-28 10:50:11.208 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-28 10:50:11.209 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-28 10:50:11.713 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:11.713 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-06-28 10:50:12.164 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-06-28 10:50:12.609 +08:00 [INF] thr:31<> loader Requires:OUTP 16 0
2025-06-28 10:50:13.055 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-06-28 10:50:13.504 +08:00 [INF] thr:31<> loader Requires:OUTP 4 0
2025-06-28 10:50:13.952 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-06-28 10:50:14.402 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:15.355 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:16.308 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:17.264 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:18.217 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:19.171 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:19.623 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-06-28 10:50:20.076 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-06-28 10:50:22.694 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-06-28 10:50:23.146 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-28 10:50:23.146 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-28 10:50:23.146 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-28 10:50:23.649 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:23.649 +08:00 [INF] thr:31<> loader Requires:RETH
2025-06-28 10:50:28.685 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-28 10:50:28.688 +08:00 [INF] thr:31<> AOI is Ready
2025-06-28 10:50:28.756 +08:00 [INF] thr:31<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:50:28.761 +08:00 [INF] thr:31<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:50:32.196 +08:00 [INF] thr:31<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:50:32.199 +08:00 [INF] thr:31<> SetVelocity, Axis:Y, velocity:100
2025-06-28 10:50:32.216 +08:00 [INF] thr:31<> stage move to position action ok
2025-06-28 10:50:32.218 +08:00 [INF] thr:31<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-28 10:50:32.219 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:50:32.219 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-06-28 10:50:32.663 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-06-28 10:50:32.663 +08:00 [INF] thr:31<> loader Requires:MATS AK T
2025-06-28 10:50:36.205 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-06-28 10:50:36.654 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 1
2025-06-28 10:50:43.672 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-06-28 10:50:44.123 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-28 10:50:44.123 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-28 10:50:44.123 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-28 10:50:44.626 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:44.626 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-06-28 10:50:45.080 +08:00 [INF] thr:31<> loader Requires:MATS AK R 0
2025-06-28 10:50:50.361 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-28 10:50:50.361 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片请求
2025-06-28 10:50:50.361 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-28 10:50:50.864 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:50.865 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-06-28 10:50:51.315 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 0
2025-06-28 10:50:54.028 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-06-28 10:50:54.510 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-28 10:50:54.510 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-28 10:50:54.510 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-28 10:50:55.014 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:50:55.014 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-06-28 10:50:55.461 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-06-28 10:50:55.908 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-06-28 10:50:56.354 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-06-28 10:50:56.803 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-06-28 10:50:57.250 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-06-28 10:50:57.694 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:58.649 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:50:59.603 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:51:00.559 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-06-28 10:51:01.011 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-06-28 10:51:01.464 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 1
2025-06-28 10:51:04.182 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-06-28 10:51:04.633 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-28 10:51:04.633 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-28 10:51:04.633 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-28 10:51:05.638 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:51:05.638 +08:00 [INF] thr:31<> loader Requires:RETH
2025-06-28 10:51:10.906 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-28 10:51:19.859 +08:00 [INF] thr:33<> loader Requires:INPUT B 13
2025-06-28 10:51:21.319 +08:00 [INF] thr:28<> AOI is Ready
2025-06-28 10:51:21.388 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:51:21.391 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:51:21.428 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:51:21.435 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:100
2025-06-28 10:51:21.468 +08:00 [INF] thr:28<> stage move to position action ok
2025-06-28 10:51:21.469 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-28 10:51:21.470 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:51:21.471 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-06-28 10:51:21.913 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-06-28 10:51:21.913 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-06-28 10:51:22.372 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-06-28 10:51:22.819 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-06-28 10:51:23.292 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-06-28 10:51:23.743 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-28 10:51:23.743 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-28 10:51:23.743 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-28 10:51:24.247 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:51:24.247 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-06-28 10:51:24.699 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-06-28 10:51:25.146 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-06-28 10:51:25.593 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-06-28 10:51:26.042 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-06-28 10:51:26.493 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-06-28 10:51:26.939 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:27.393 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-06-28 10:51:32.674 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-28 10:51:32.674 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片请求
2025-06-28 10:51:32.674 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-28 10:51:33.177 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:51:33.177 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-06-28 10:51:33.630 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-06-28 10:51:36.344 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-06-28 10:51:36.813 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-28 10:51:36.813 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-28 10:51:36.813 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-28 10:51:37.317 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:51:37.317 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-06-28 10:51:37.765 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-06-28 10:51:38.212 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-06-28 10:51:38.660 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-06-28 10:51:39.108 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-06-28 10:51:39.555 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-06-28 10:51:40.002 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:40.956 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:41.908 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:42.863 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:43.818 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:44.771 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-06-28 10:51:45.223 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-06-28 10:51:45.676 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-06-28 10:51:48.397 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-06-28 10:51:48.851 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-28 10:51:48.851 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-28 10:51:48.851 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-28 10:51:49.353 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:51:49.353 +08:00 [INF] thr:28<> loader Requires:RETH
2025-06-28 10:51:54.617 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-28 10:51:54.621 +08:00 [INF] thr:12<> 执行Aligner设置初始角度InitialAngle：0
2025-06-28 10:51:54.621 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-28 10:51:55.628 +08:00 [INF] thr:12<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-28 10:51:55.629 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:51:55.629 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-28 10:51:56.072 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-28 10:51:56.072 +08:00 [INF] thr:12<> loader Requires:MATS AJ T
2025-06-28 10:51:59.614 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-28 10:52:00.063 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-28 10:52:07.081 +08:00 [INF] thr:12<> loader Requires:MOVR R 226000
2025-06-28 10:52:09.680 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-28 10:52:10.130 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-28 10:52:10.130 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-28 10:52:10.130 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-28 10:52:10.632 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:52:10.632 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-28 10:52:11.086 +08:00 [INF] thr:12<> loader Requires:MATS AJ R 0
2025-06-28 10:52:14.337 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-28 10:52:14.337 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-28 10:52:14.337 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-28 10:52:14.839 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:52:14.840 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-28 10:52:15.288 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 0
2025-06-28 10:52:17.901 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-28 10:52:18.351 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-28 10:52:18.351 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-28 10:52:18.351 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-28 10:52:18.855 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:52:18.855 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-28 10:52:19.302 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-28 10:52:19.749 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-28 10:52:20.196 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-28 10:52:20.645 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-28 10:52:21.092 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-28 10:52:21.537 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-28 10:52:22.494 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-28 10:52:23.447 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-28 10:52:24.401 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-28 10:52:24.857 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-28 10:52:25.311 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-28 10:52:27.930 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-28 10:52:28.379 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-28 10:52:28.379 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-28 10:52:28.379 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-28 10:52:28.882 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:52:28.882 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-28 10:52:33.918 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-28 10:52:33.921 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-28 10:55:13.329 +08:00 [INF] thr:39<> loader Requires:INPUT B 13
2025-06-28 10:55:14.373 +08:00 [INF] thr:29<> 执行Aligner角度angle：0
2025-06-28 10:55:15.379 +08:00 [INF] thr:29<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-28 10:55:15.380 +08:00 [INF] thr:29<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:55:15.380 +08:00 [INF] thr:29<> loader Requires:RGRP
2025-06-28 10:55:15.823 +08:00 [INF] thr:29<> CLeanLoader Group Now C
2025-06-28 10:55:15.823 +08:00 [INF] thr:29<> loader Requires:MATS AJ T
2025-06-28 10:55:16.282 +08:00 [INF] thr:29<> loader Requires:SSP Z 4000
2025-06-28 10:55:16.733 +08:00 [INF] thr:29<> loader Requires:MATS AJ Z 1
2025-06-28 10:55:17.207 +08:00 [INF] thr:29<> loader Requires:MOVR R 226000
2025-06-28 10:55:19.803 +08:00 [INF] thr:29<> loader Requires:SSPP Z 30
2025-06-28 10:55:20.253 +08:00 [INF] thr:29<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-28 10:55:20.253 +08:00 [INF] thr:29<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-28 10:55:20.253 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-28 10:55:20.757 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:55:20.757 +08:00 [INF] thr:29<> loader Requires:INPUT A 6
2025-06-28 10:55:21.214 +08:00 [INF] thr:29<> loader Requires:OUTP 1 0
2025-06-28 10:55:21.661 +08:00 [INF] thr:29<> loader Requires:OUTP 16 1
2025-06-28 10:55:22.108 +08:00 [INF] thr:29<> loader Requires:OUTP 15 1
2025-06-28 10:55:22.556 +08:00 [INF] thr:29<> loader Requires:OUTP 4 1
2025-06-28 10:55:23.004 +08:00 [INF] thr:29<> loader Requires:OUTP 1 1
2025-06-28 10:55:23.450 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:23.901 +08:00 [INF] thr:29<> loader Requires:MATS AJ R 0
2025-06-28 10:55:27.150 +08:00 [INF] thr:29<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-28 10:55:27.150 +08:00 [INF] thr:29<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-28 10:55:27.150 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-28 10:55:27.654 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:55:27.654 +08:00 [INF] thr:29<> loader Requires:SSP Z 1000
2025-06-28 10:55:28.107 +08:00 [INF] thr:29<> loader Requires:MATS AJ Z 0
2025-06-28 10:55:30.721 +08:00 [INF] thr:29<> loader Requires:SSPP Z 30
2025-06-28 10:55:31.197 +08:00 [INF] thr:29<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-28 10:55:31.197 +08:00 [INF] thr:29<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-28 10:55:31.197 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-28 10:55:31.699 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:55:31.699 +08:00 [INF] thr:29<> loader Requires:SSP Z 1000
2025-06-28 10:55:32.155 +08:00 [INF] thr:29<> loader Requires:OUTP 1 0
2025-06-28 10:55:32.603 +08:00 [INF] thr:29<> loader Requires:OUTP 16 0
2025-06-28 10:55:33.050 +08:00 [INF] thr:29<> loader Requires:OUTP 15 1
2025-06-28 10:55:33.498 +08:00 [INF] thr:29<> loader Requires:OUTP 4 0
2025-06-28 10:55:33.945 +08:00 [INF] thr:29<> loader Requires:OUTP 1 1
2025-06-28 10:55:34.392 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:35.344 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:36.299 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:37.254 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:38.207 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:39.161 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:55:39.618 +08:00 [INF] thr:29<> loader Requires:INPUT A 5
2025-06-28 10:55:40.073 +08:00 [INF] thr:29<> loader Requires:MATS AJ Z 1
2025-06-28 10:55:42.689 +08:00 [INF] thr:29<> loader Requires:SSPP Z 30
2025-06-28 10:55:43.140 +08:00 [INF] thr:29<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-28 10:55:43.140 +08:00 [INF] thr:29<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-28 10:55:43.140 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-28 10:55:43.643 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:55:43.643 +08:00 [INF] thr:29<> loader Requires:RETH
2025-06-28 10:55:48.679 +08:00 [INF] thr:29<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-28 10:55:48.681 +08:00 [INF] thr:29<> AOI is Ready
2025-06-28 10:55:48.750 +08:00 [INF] thr:29<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:55:48.756 +08:00 [INF] thr:29<> SetVelocity, Axis:Y, velocity:50
2025-06-28 10:55:48.792 +08:00 [INF] thr:29<> SetVelocity, Axis:X, velocity:50
2025-06-28 10:55:48.795 +08:00 [INF] thr:29<> SetVelocity, Axis:Y, velocity:100
2025-06-28 10:55:48.812 +08:00 [INF] thr:29<> stage move to position action ok
2025-06-28 10:55:48.812 +08:00 [INF] thr:29<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-28 10:55:48.812 +08:00 [INF] thr:29<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-28 10:55:48.812 +08:00 [INF] thr:29<> loader Requires:RGRP
2025-06-28 10:55:49.255 +08:00 [INF] thr:29<> CLeanLoader Group Now C
2025-06-28 10:55:49.255 +08:00 [INF] thr:29<> loader Requires:MATS AK T
2025-06-28 10:55:52.794 +08:00 [INF] thr:29<> loader Requires:SSP Z 4000
2025-06-28 10:55:53.243 +08:00 [INF] thr:29<> loader Requires:MATS AK Z 1
2025-06-28 10:56:00.261 +08:00 [INF] thr:29<> loader Requires:SSPP Z 30
2025-06-28 10:56:00.713 +08:00 [INF] thr:29<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-28 10:56:00.713 +08:00 [INF] thr:29<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-28 10:56:00.713 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-28 10:56:01.217 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:56:01.217 +08:00 [INF] thr:29<> loader Requires:INPUT A 6
2025-06-28 10:56:01.670 +08:00 [INF] thr:29<> loader Requires:MATS AK R 0
2025-06-28 10:56:06.953 +08:00 [INF] thr:29<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-28 10:56:06.953 +08:00 [INF] thr:29<> Station:InspectStageA,SafeCheck:上片请求
2025-06-28 10:56:06.953 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-28 10:56:07.456 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:56:07.456 +08:00 [INF] thr:29<> loader Requires:SSP Z 1000
2025-06-28 10:56:07.903 +08:00 [INF] thr:29<> loader Requires:MATS AK Z 0
2025-06-28 10:56:10.616 +08:00 [INF] thr:29<> loader Requires:SSPP Z 30
2025-06-28 10:56:11.089 +08:00 [INF] thr:29<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-28 10:56:11.089 +08:00 [INF] thr:29<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-28 10:56:11.089 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-28 10:56:11.592 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:56:11.592 +08:00 [INF] thr:29<> loader Requires:SSP Z 1000
2025-06-28 10:56:12.039 +08:00 [INF] thr:29<> loader Requires:OUTP 1 0
2025-06-28 10:56:12.485 +08:00 [INF] thr:29<> loader Requires:OUTP 16 1
2025-06-28 10:56:12.938 +08:00 [INF] thr:29<> loader Requires:OUTP 15 1
2025-06-28 10:56:13.385 +08:00 [INF] thr:29<> loader Requires:OUTP 4 1
2025-06-28 10:56:13.832 +08:00 [INF] thr:29<> loader Requires:OUTP 1 1
2025-06-28 10:56:14.279 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:56:15.233 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:56:16.184 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:56:17.138 +08:00 [INF] thr:29<> loader Requires:INPUT A 4
2025-06-28 10:56:17.590 +08:00 [INF] thr:29<> loader Requires:INPUT A 5
2025-06-28 10:56:18.042 +08:00 [INF] thr:29<> loader Requires:MATS AK Z 1
2025-06-28 10:56:20.759 +08:00 [INF] thr:29<> loader Requires:SSPP Z 30
2025-06-28 10:56:21.210 +08:00 [INF] thr:29<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-28 10:56:21.210 +08:00 [INF] thr:29<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-28 10:56:21.210 +08:00 [INF] thr:29<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-28 10:56:22.215 +08:00 [INF] thr:29<> Safe ExecuteCommand sucess, plc is 0
2025-06-28 10:56:22.215 +08:00 [INF] thr:29<> loader Requires:RETH
2025-06-28 10:56:27.476 +08:00 [INF] thr:29<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-28 13:37:42.049 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:63601
2025-06-28 14:35:58.547 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:52215
2025-06-29 09:00:09.998 +08:00 [INF] thr:27<> loader Requires:INPUT B 13
2025-06-29 09:00:11.516 +08:00 [INF] thr:3<> AOI is Ready
2025-06-29 09:00:15.741 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-29 09:00:15.749 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-29 09:00:18.618 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-29 09:00:18.623 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-29 09:00:18.642 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-29 09:00:18.642 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-29 09:00:18.643 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 09:00:18.643 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 09:00:19.089 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 09:00:19.089 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-29 09:00:19.547 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 09:00:19.994 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 09:00:20.468 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:00:20.917 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-29 09:00:20.918 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-29 09:00:20.918 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-29 09:00:21.420 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:00:21.420 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 09:00:21.874 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 09:00:22.322 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 09:00:22.770 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 09:00:23.217 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 09:00:23.664 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 09:00:24.113 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:24.566 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-29 09:00:29.860 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-29 09:00:29.860 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-06-29 09:00:29.860 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-29 09:00:30.364 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:00:30.364 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 09:00:30.813 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-29 09:00:33.526 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:00:34.006 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-29 09:00:34.006 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-29 09:00:34.006 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-29 09:00:34.508 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:00:34.508 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 09:00:34.955 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 09:00:35.404 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-29 09:00:35.861 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 09:00:36.310 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-29 09:00:36.758 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 09:00:37.203 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:38.158 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:39.109 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:40.062 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:41.015 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:41.968 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:00:42.420 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 09:00:42.873 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 09:00:45.591 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:00:46.042 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-29 09:00:46.042 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-29 09:00:46.042 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-29 09:00:46.544 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:00:46.544 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 09:00:51.805 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-29 09:00:51.806 +08:00 [INF] thr:40<> 执行Aligner设置初始角度InitialAngle：0
2025-06-29 09:00:51.806 +08:00 [INF] thr:40<> 执行Aligner角度angle：0
2025-06-29 09:00:52.812 +08:00 [INF] thr:40<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-29 09:00:52.813 +08:00 [INF] thr:40<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 09:00:52.813 +08:00 [INF] thr:40<> loader Requires:RGRP
2025-06-29 09:00:53.255 +08:00 [INF] thr:40<> CLeanLoader Group Now C
2025-06-29 09:00:53.255 +08:00 [INF] thr:40<> loader Requires:MATS AJ T
2025-06-29 09:00:56.799 +08:00 [INF] thr:40<> loader Requires:SSP Z 4000
2025-06-29 09:00:57.246 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 1
2025-06-29 09:01:04.264 +08:00 [INF] thr:40<> loader Requires:MOVR R 226000
2025-06-29 09:01:06.859 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-29 09:01:07.311 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-29 09:01:07.311 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-29 09:01:07.311 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-29 09:01:07.813 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:01:07.813 +08:00 [INF] thr:40<> loader Requires:INPUT A 6
2025-06-29 09:01:08.267 +08:00 [INF] thr:40<> loader Requires:MATS AJ R 0
2025-06-29 09:01:11.522 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-29 09:01:11.523 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-29 09:01:11.523 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-29 09:01:12.025 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:01:12.025 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-29 09:01:12.472 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 0
2025-06-29 09:01:15.085 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-29 09:01:15.534 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-29 09:01:15.534 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-29 09:01:15.534 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-29 09:01:16.039 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:01:16.039 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-29 09:01:16.486 +08:00 [INF] thr:40<> loader Requires:OUTP 1 0
2025-06-29 09:01:16.934 +08:00 [INF] thr:40<> loader Requires:OUTP 16 1
2025-06-29 09:01:17.382 +08:00 [INF] thr:40<> loader Requires:OUTP 15 1
2025-06-29 09:01:17.838 +08:00 [INF] thr:40<> loader Requires:OUTP 4 1
2025-06-29 09:01:18.285 +08:00 [INF] thr:40<> loader Requires:OUTP 1 1
2025-06-29 09:01:18.730 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 09:01:19.685 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 09:01:20.637 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 09:01:21.590 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 09:01:22.041 +08:00 [INF] thr:40<> loader Requires:INPUT A 5
2025-06-29 09:01:22.495 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 1
2025-06-29 09:01:25.111 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-29 09:01:25.561 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-29 09:01:25.561 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-29 09:01:25.561 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-29 09:01:26.064 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:01:26.064 +08:00 [INF] thr:40<> loader Requires:RETH
2025-06-29 09:01:31.097 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-29 09:01:31.102 +08:00 [INF] thr:40<> 执行Aligner角度angle：0
2025-06-29 09:02:49.301 +08:00 [INF] thr:48<> loader Requires:INPUT B 13
2025-06-29 09:02:50.273 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-29 09:02:51.278 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-29 09:02:51.279 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 09:02:51.279 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 09:02:51.721 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 09:02:51.721 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-29 09:02:52.184 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 09:02:52.631 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-29 09:02:53.104 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-29 09:02:55.700 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:02:56.151 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-29 09:02:56.151 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-29 09:02:56.151 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-29 09:02:56.655 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:02:56.655 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 09:02:57.108 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 09:02:57.556 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 09:02:58.007 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 09:02:58.455 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 09:02:58.902 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 09:02:59.348 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:02:59.808 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-29 09:03:03.057 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-29 09:03:03.057 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-29 09:03:03.057 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-29 09:03:03.560 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:03.560 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 09:03:04.005 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-29 09:03:06.618 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:03:07.067 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-29 09:03:07.067 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-29 09:03:07.067 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-29 09:03:07.571 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:07.571 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 09:03:08.019 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 09:03:08.466 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-29 09:03:08.918 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 09:03:09.366 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-29 09:03:09.813 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 09:03:10.259 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:11.212 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:12.166 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:13.119 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:14.072 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:15.026 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:15.480 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 09:03:15.936 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-29 09:03:18.551 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:03:19.002 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-29 09:03:19.002 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-29 09:03:19.002 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-29 09:03:19.505 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:19.505 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 09:03:24.537 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-29 09:03:24.539 +08:00 [INF] thr:3<> AOI is Ready
2025-06-29 09:03:24.613 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-29 09:03:24.616 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-29 09:03:24.652 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-29 09:03:24.655 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-29 09:03:24.671 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-29 09:03:24.671 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-29 09:03:24.672 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 09:03:24.672 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 09:03:25.118 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 09:03:25.118 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-29 09:03:28.659 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 09:03:29.108 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 09:03:36.127 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:03:36.576 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-29 09:03:36.576 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-29 09:03:36.576 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-29 09:03:37.078 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:37.078 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 09:03:37.529 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-29 09:03:42.811 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-29 09:03:42.811 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-06-29 09:03:42.811 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-29 09:03:43.313 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:43.313 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 09:03:43.761 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-29 09:03:46.473 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:03:46.951 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-29 09:03:46.951 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-29 09:03:46.951 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-29 09:03:47.454 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:47.454 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 09:03:47.903 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 09:03:48.355 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 09:03:48.805 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 09:03:49.254 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 09:03:49.703 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 09:03:50.147 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:51.117 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:52.070 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:53.023 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 09:03:53.474 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 09:03:53.927 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 09:03:56.644 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 09:03:57.100 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-29 09:03:57.100 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-29 09:03:57.100 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-29 09:03:58.104 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 09:03:58.104 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 09:04:03.365 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-29 10:38:53.074 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-29 10:38:54.535 +08:00 [INF] thr:3<> AOI is Ready
2025-06-29 10:38:58.375 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-29 10:38:58.378 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-29 10:39:01.179 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-29 10:39:01.186 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-29 10:39:01.218 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-29 10:39:01.219 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-29 10:39:01.219 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:39:01.219 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 10:39:01.669 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 10:39:01.669 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-29 10:39:02.126 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 10:39:02.573 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 10:39:03.046 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 10:39:03.496 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-29 10:39:03.496 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-29 10:39:03.496 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-29 10:39:03.999 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:03.999 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 10:39:04.453 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 10:39:04.900 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 10:39:05.347 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 10:39:05.796 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 10:39:06.243 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 10:39:06.689 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:07.142 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-29 10:39:12.427 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-29 10:39:12.427 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-06-29 10:39:12.427 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-29 10:39:12.932 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:12.932 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 10:39:13.378 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-29 10:39:16.091 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 10:39:16.553 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-29 10:39:16.553 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-29 10:39:16.553 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-29 10:39:17.057 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:17.057 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 10:39:17.505 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 10:39:17.953 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-29 10:39:18.400 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 10:39:18.847 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-29 10:39:19.296 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 10:39:19.744 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:20.697 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:21.660 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:22.612 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:23.566 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:24.518 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 10:39:24.970 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 10:39:25.423 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 10:39:28.142 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 10:39:28.592 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-29 10:39:28.592 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-29 10:39:28.592 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-29 10:39:29.096 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:29.096 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 10:39:34.358 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-29 10:39:34.360 +08:00 [INF] thr:40<> 执行Aligner设置初始角度InitialAngle：0
2025-06-29 10:39:34.360 +08:00 [INF] thr:40<> 执行Aligner角度angle：0
2025-06-29 10:39:35.367 +08:00 [INF] thr:40<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-29 10:39:35.367 +08:00 [INF] thr:40<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:39:35.367 +08:00 [INF] thr:40<> loader Requires:RGRP
2025-06-29 10:39:35.809 +08:00 [INF] thr:40<> CLeanLoader Group Now C
2025-06-29 10:39:35.809 +08:00 [INF] thr:40<> loader Requires:MATS AJ T
2025-06-29 10:39:39.352 +08:00 [INF] thr:40<> loader Requires:SSP Z 4000
2025-06-29 10:39:39.801 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 1
2025-06-29 10:39:46.819 +08:00 [INF] thr:40<> loader Requires:MOVR R 226000
2025-06-29 10:39:49.414 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-29 10:39:49.865 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-29 10:39:49.865 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-29 10:39:49.865 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-29 10:39:50.369 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:50.369 +08:00 [INF] thr:40<> loader Requires:INPUT A 6
2025-06-29 10:39:50.823 +08:00 [INF] thr:40<> loader Requires:MATS AJ R 0
2025-06-29 10:39:54.071 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-29 10:39:54.071 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-29 10:39:54.071 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-29 10:39:54.575 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:54.575 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-29 10:39:55.026 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 0
2025-06-29 10:39:57.639 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-29 10:39:58.089 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-29 10:39:58.089 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-29 10:39:58.089 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-29 10:39:58.592 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:39:58.592 +08:00 [INF] thr:40<> loader Requires:SSP Z 1000
2025-06-29 10:39:59.041 +08:00 [INF] thr:40<> loader Requires:OUTP 1 0
2025-06-29 10:39:59.488 +08:00 [INF] thr:40<> loader Requires:OUTP 16 1
2025-06-29 10:39:59.935 +08:00 [INF] thr:40<> loader Requires:OUTP 15 1
2025-06-29 10:40:00.384 +08:00 [INF] thr:40<> loader Requires:OUTP 4 1
2025-06-29 10:40:00.831 +08:00 [INF] thr:40<> loader Requires:OUTP 1 1
2025-06-29 10:40:01.277 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 10:40:02.230 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 10:40:03.184 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 10:40:04.141 +08:00 [INF] thr:40<> loader Requires:INPUT A 4
2025-06-29 10:40:04.593 +08:00 [INF] thr:40<> loader Requires:INPUT A 5
2025-06-29 10:40:05.046 +08:00 [INF] thr:40<> loader Requires:MATS AJ Z 1
2025-06-29 10:40:07.664 +08:00 [INF] thr:40<> loader Requires:SSPP Z 30
2025-06-29 10:40:08.114 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-29 10:40:08.114 +08:00 [INF] thr:40<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-29 10:40:08.114 +08:00 [INF] thr:40<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-29 10:40:08.618 +08:00 [INF] thr:40<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:40:08.618 +08:00 [INF] thr:40<> loader Requires:RETH
2025-06-29 10:40:13.653 +08:00 [INF] thr:40<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-29 10:40:13.654 +08:00 [INF] thr:40<> 执行Aligner角度angle：0
2025-06-29 10:42:46.218 +08:00 [INF] thr:41<> loader Requires:INPUT B 13
2025-06-29 10:42:47.205 +08:00 [INF] thr:56<> 执行Aligner角度angle：0
2025-06-29 10:42:48.209 +08:00 [INF] thr:56<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-29 10:42:48.210 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:42:48.210 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-06-29 10:42:48.654 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-06-29 10:42:48.654 +08:00 [INF] thr:56<> loader Requires:MATS AJ T
2025-06-29 10:42:49.113 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-06-29 10:42:49.560 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-06-29 10:42:50.036 +08:00 [INF] thr:56<> loader Requires:MOVR R 226000
2025-06-29 10:42:52.633 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:42:53.083 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-29 10:42:53.083 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-29 10:42:53.083 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-29 10:42:53.587 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:42:53.587 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-06-29 10:42:54.049 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-29 10:42:54.495 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-06-29 10:42:54.946 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-29 10:42:55.396 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-06-29 10:42:55.848 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-29 10:42:56.297 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:42:56.749 +08:00 [INF] thr:56<> loader Requires:MATS AJ R 0
2025-06-29 10:42:59.999 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-29 10:42:59.999 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-29 10:42:59.999 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-29 10:43:00.501 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:00.501 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-29 10:43:00.951 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 0
2025-06-29 10:43:03.562 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:43:04.011 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-29 10:43:04.011 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-29 10:43:04.011 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-29 10:43:04.514 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:04.514 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-29 10:43:04.963 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-29 10:43:05.410 +08:00 [INF] thr:56<> loader Requires:OUTP 16 0
2025-06-29 10:43:05.860 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-29 10:43:06.306 +08:00 [INF] thr:56<> loader Requires:OUTP 4 0
2025-06-29 10:43:06.753 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-29 10:43:07.201 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:08.152 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:09.107 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:10.060 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:11.012 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:11.966 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:12.417 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-06-29 10:43:12.870 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-06-29 10:43:15.488 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:43:15.937 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-29 10:43:15.938 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-29 10:43:15.938 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-29 10:43:16.442 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:16.442 +08:00 [INF] thr:56<> loader Requires:RETH
2025-06-29 10:43:21.478 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-29 10:43:21.479 +08:00 [INF] thr:56<> AOI is Ready
2025-06-29 10:43:21.542 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:50
2025-06-29 10:43:21.545 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:50
2025-06-29 10:43:21.583 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:8
2025-06-29 10:43:21.591 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:8
2025-06-29 10:43:21.625 +08:00 [INF] thr:56<> stage move to position action ok
2025-06-29 10:43:21.625 +08:00 [INF] thr:56<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-29 10:43:21.626 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:43:21.626 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-06-29 10:43:22.069 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-06-29 10:43:22.069 +08:00 [INF] thr:56<> loader Requires:MATS AK T
2025-06-29 10:43:25.611 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-06-29 10:43:26.059 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-06-29 10:43:33.079 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:43:33.528 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-29 10:43:33.528 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-29 10:43:33.528 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-29 10:43:34.031 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:34.031 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-06-29 10:43:34.482 +08:00 [INF] thr:56<> loader Requires:MATS AK R 0
2025-06-29 10:43:39.764 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-29 10:43:39.764 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片请求
2025-06-29 10:43:39.764 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-29 10:43:40.267 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:40.267 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-29 10:43:40.714 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 0
2025-06-29 10:43:43.428 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:43:43.889 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-29 10:43:43.889 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-29 10:43:43.889 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-29 10:43:44.393 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:44.393 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-29 10:43:44.842 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-29 10:43:45.287 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-06-29 10:43:45.740 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-29 10:43:46.187 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-06-29 10:43:46.634 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-29 10:43:47.080 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:48.034 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:48.987 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:49.941 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:43:50.395 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-06-29 10:43:50.849 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-06-29 10:43:53.565 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:43:54.024 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-29 10:43:54.024 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-29 10:43:54.024 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-29 10:43:55.028 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:43:55.028 +08:00 [INF] thr:56<> loader Requires:RETH
2025-06-29 10:44:00.291 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-29 10:45:10.835 +08:00 [INF] thr:68<> loader Requires:INPUT B 13
2025-06-29 10:45:12.299 +08:00 [INF] thr:56<> AOI is Ready
2025-06-29 10:45:12.361 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:50
2025-06-29 10:45:12.364 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:50
2025-06-29 10:45:15.797 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:20
2025-06-29 10:45:15.800 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:20
2025-06-29 10:45:15.817 +08:00 [INF] thr:56<> stage move to position action ok
2025-06-29 10:45:15.817 +08:00 [INF] thr:56<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-29 10:45:15.817 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:45:15.817 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-06-29 10:45:16.260 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-06-29 10:45:16.260 +08:00 [INF] thr:56<> loader Requires:MATS AK T
2025-06-29 10:45:16.717 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-06-29 10:45:17.165 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-06-29 10:45:17.638 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:45:18.088 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-29 10:45:18.088 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-29 10:45:18.088 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-29 10:45:18.597 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:45:18.597 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-06-29 10:45:19.049 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-29 10:45:19.497 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-06-29 10:45:19.944 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-29 10:45:20.393 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-06-29 10:45:20.839 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-29 10:45:21.286 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:21.737 +08:00 [INF] thr:56<> loader Requires:MATS AK R 0
2025-06-29 10:45:27.018 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-29 10:45:27.018 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:下片请求
2025-06-29 10:45:27.018 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-29 10:45:27.522 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:45:27.522 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-29 10:45:27.969 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 0
2025-06-29 10:45:30.682 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:45:31.139 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-29 10:45:31.139 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-29 10:45:31.139 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-29 10:45:31.644 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:45:31.644 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-29 10:45:32.092 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-29 10:45:32.539 +08:00 [INF] thr:56<> loader Requires:OUTP 16 0
2025-06-29 10:45:32.995 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-29 10:45:33.443 +08:00 [INF] thr:56<> loader Requires:OUTP 4 0
2025-06-29 10:45:33.889 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-29 10:45:34.335 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:35.290 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:36.243 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:37.195 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:38.148 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:39.102 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-29 10:45:39.553 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-06-29 10:45:40.007 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-06-29 10:45:42.725 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-29 10:45:43.176 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-29 10:45:43.176 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-29 10:45:43.176 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-29 10:45:43.679 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:45:43.679 +08:00 [INF] thr:56<> loader Requires:RETH
2025-06-29 10:45:48.938 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-29 10:45:48.940 +08:00 [INF] thr:12<> 执行Aligner设置初始角度InitialAngle：0
2025-06-29 10:45:48.940 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-29 10:45:49.947 +08:00 [INF] thr:12<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-29 10:45:49.947 +08:00 [INF] thr:12<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:45:49.947 +08:00 [INF] thr:12<> loader Requires:RGRP
2025-06-29 10:45:50.394 +08:00 [INF] thr:12<> CLeanLoader Group Now C
2025-06-29 10:45:50.394 +08:00 [INF] thr:12<> loader Requires:MATS AJ T
2025-06-29 10:45:53.941 +08:00 [INF] thr:12<> loader Requires:SSP Z 4000
2025-06-29 10:45:54.389 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-29 10:46:01.407 +08:00 [INF] thr:12<> loader Requires:MOVR R 226000
2025-06-29 10:46:04.002 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-29 10:46:04.452 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-29 10:46:04.452 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-29 10:46:04.452 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-29 10:46:04.956 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:46:04.956 +08:00 [INF] thr:12<> loader Requires:INPUT A 6
2025-06-29 10:46:05.406 +08:00 [INF] thr:12<> loader Requires:MATS AJ R 0
2025-06-29 10:46:08.655 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-29 10:46:08.655 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-29 10:46:08.655 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-29 10:46:09.159 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:46:09.159 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-29 10:46:09.606 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 0
2025-06-29 10:46:12.219 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-29 10:46:12.668 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-29 10:46:12.668 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-29 10:46:12.668 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-29 10:46:13.172 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:46:13.172 +08:00 [INF] thr:12<> loader Requires:SSP Z 1000
2025-06-29 10:46:13.620 +08:00 [INF] thr:12<> loader Requires:OUTP 1 0
2025-06-29 10:46:14.067 +08:00 [INF] thr:12<> loader Requires:OUTP 16 1
2025-06-29 10:46:14.515 +08:00 [INF] thr:12<> loader Requires:OUTP 15 1
2025-06-29 10:46:14.971 +08:00 [INF] thr:12<> loader Requires:OUTP 4 1
2025-06-29 10:46:15.418 +08:00 [INF] thr:12<> loader Requires:OUTP 1 1
2025-06-29 10:46:15.864 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-29 10:46:16.818 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-29 10:46:17.775 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-29 10:46:18.729 +08:00 [INF] thr:12<> loader Requires:INPUT A 4
2025-06-29 10:46:19.183 +08:00 [INF] thr:12<> loader Requires:INPUT A 5
2025-06-29 10:46:19.637 +08:00 [INF] thr:12<> loader Requires:MATS AJ Z 1
2025-06-29 10:46:22.255 +08:00 [INF] thr:12<> loader Requires:SSPP Z 30
2025-06-29 10:46:22.706 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-29 10:46:22.706 +08:00 [INF] thr:12<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-29 10:46:22.706 +08:00 [INF] thr:12<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-29 10:46:23.208 +08:00 [INF] thr:12<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:46:23.208 +08:00 [INF] thr:12<> loader Requires:RETH
2025-06-29 10:46:28.241 +08:00 [INF] thr:12<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-29 10:46:28.242 +08:00 [INF] thr:12<> 执行Aligner角度angle：0
2025-06-29 10:49:04.371 +08:00 [INF] thr:29<> loader Requires:INPUT B 13
2025-06-29 10:49:05.357 +08:00 [INF] thr:60<> 执行Aligner角度angle：0
2025-06-29 10:49:06.365 +08:00 [INF] thr:60<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-29 10:49:06.366 +08:00 [INF] thr:60<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:49:06.366 +08:00 [INF] thr:60<> loader Requires:RGRP
2025-06-29 10:49:06.809 +08:00 [INF] thr:60<> CLeanLoader Group Now C
2025-06-29 10:49:06.809 +08:00 [INF] thr:60<> loader Requires:MATS AJ T
2025-06-29 10:49:07.268 +08:00 [INF] thr:60<> loader Requires:SSP Z 4000
2025-06-29 10:49:07.719 +08:00 [INF] thr:60<> loader Requires:MATS AJ Z 1
2025-06-29 10:49:08.192 +08:00 [INF] thr:60<> loader Requires:MOVR R 226000
2025-06-29 10:49:10.787 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 10:49:11.238 +08:00 [INF] thr:60<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-29 10:49:11.238 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-29 10:49:11.238 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-29 10:49:11.741 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:49:11.741 +08:00 [INF] thr:60<> loader Requires:INPUT A 6
2025-06-29 10:49:12.191 +08:00 [INF] thr:60<> loader Requires:OUTP 1 0
2025-06-29 10:49:12.639 +08:00 [INF] thr:60<> loader Requires:OUTP 16 1
2025-06-29 10:49:13.086 +08:00 [INF] thr:60<> loader Requires:OUTP 15 1
2025-06-29 10:49:13.534 +08:00 [INF] thr:60<> loader Requires:OUTP 4 1
2025-06-29 10:49:13.982 +08:00 [INF] thr:60<> loader Requires:OUTP 1 1
2025-06-29 10:49:14.427 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:14.887 +08:00 [INF] thr:60<> loader Requires:MATS AJ R 0
2025-06-29 10:49:18.136 +08:00 [INF] thr:60<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-29 10:49:18.136 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-29 10:49:18.136 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-29 10:49:18.639 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:49:18.639 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-29 10:49:19.092 +08:00 [INF] thr:60<> loader Requires:MATS AJ Z 0
2025-06-29 10:49:21.702 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 10:49:22.155 +08:00 [INF] thr:60<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-29 10:49:22.155 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-29 10:49:22.155 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-29 10:49:22.658 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:49:22.658 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-29 10:49:23.106 +08:00 [INF] thr:60<> loader Requires:OUTP 1 0
2025-06-29 10:49:23.553 +08:00 [INF] thr:60<> loader Requires:OUTP 16 0
2025-06-29 10:49:24.001 +08:00 [INF] thr:60<> loader Requires:OUTP 15 1
2025-06-29 10:49:24.449 +08:00 [INF] thr:60<> loader Requires:OUTP 4 0
2025-06-29 10:49:24.896 +08:00 [INF] thr:60<> loader Requires:OUTP 1 1
2025-06-29 10:49:25.342 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:26.296 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:27.249 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:28.202 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:29.155 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:30.110 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:49:30.564 +08:00 [INF] thr:60<> loader Requires:INPUT A 5
2025-06-29 10:49:31.017 +08:00 [INF] thr:60<> loader Requires:MATS AJ Z 1
2025-06-29 10:49:33.634 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 10:49:34.085 +08:00 [INF] thr:60<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-29 10:49:34.085 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-29 10:49:34.085 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-29 10:49:34.588 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:49:34.588 +08:00 [INF] thr:60<> loader Requires:RETH
2025-06-29 10:49:39.624 +08:00 [INF] thr:60<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-29 10:49:39.625 +08:00 [INF] thr:60<> AOI is Ready
2025-06-29 10:49:39.695 +08:00 [INF] thr:60<> SetVelocity, Axis:X, velocity:50
2025-06-29 10:49:39.699 +08:00 [INF] thr:60<> SetVelocity, Axis:Y, velocity:50
2025-06-29 10:49:39.735 +08:00 [INF] thr:60<> SetVelocity, Axis:X, velocity:20
2025-06-29 10:49:39.738 +08:00 [INF] thr:60<> SetVelocity, Axis:Y, velocity:20
2025-06-29 10:49:39.754 +08:00 [INF] thr:60<> stage move to position action ok
2025-06-29 10:49:39.754 +08:00 [INF] thr:60<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-29 10:49:39.755 +08:00 [INF] thr:60<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 10:49:39.755 +08:00 [INF] thr:60<> loader Requires:RGRP
2025-06-29 10:49:40.200 +08:00 [INF] thr:60<> CLeanLoader Group Now C
2025-06-29 10:49:40.200 +08:00 [INF] thr:60<> loader Requires:MATS AK T
2025-06-29 10:49:43.742 +08:00 [INF] thr:60<> loader Requires:SSP Z 4000
2025-06-29 10:49:44.191 +08:00 [INF] thr:60<> loader Requires:MATS AK Z 1
2025-06-29 10:49:51.209 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 10:49:51.659 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-29 10:49:51.659 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-29 10:49:51.659 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-29 10:49:52.162 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:49:52.162 +08:00 [INF] thr:60<> loader Requires:INPUT A 6
2025-06-29 10:49:52.616 +08:00 [INF] thr:60<> loader Requires:MATS AK R 0
2025-06-29 10:49:57.901 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-29 10:49:57.902 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:上片请求
2025-06-29 10:49:57.902 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-29 10:49:58.405 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:49:58.406 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-29 10:49:58.852 +08:00 [INF] thr:60<> loader Requires:MATS AK Z 0
2025-06-29 10:50:01.570 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 10:50:02.060 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-29 10:50:02.060 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-29 10:50:02.060 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-29 10:50:02.563 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:50:02.563 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-29 10:50:03.011 +08:00 [INF] thr:60<> loader Requires:OUTP 1 0
2025-06-29 10:50:03.457 +08:00 [INF] thr:60<> loader Requires:OUTP 16 1
2025-06-29 10:50:03.904 +08:00 [INF] thr:60<> loader Requires:OUTP 15 1
2025-06-29 10:50:04.353 +08:00 [INF] thr:60<> loader Requires:OUTP 4 1
2025-06-29 10:50:04.800 +08:00 [INF] thr:60<> loader Requires:OUTP 1 1
2025-06-29 10:50:05.250 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:50:06.208 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:50:07.162 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:50:08.113 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 10:50:08.566 +08:00 [INF] thr:60<> loader Requires:INPUT A 5
2025-06-29 10:50:09.017 +08:00 [INF] thr:60<> loader Requires:MATS AK Z 1
2025-06-29 10:50:11.736 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 10:50:12.185 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-29 10:50:12.185 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-29 10:50:12.185 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-29 10:50:13.192 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 10:50:13.192 +08:00 [INF] thr:60<> loader Requires:RETH
2025-06-29 10:50:18.457 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-29 13:10:57.011 +08:00 [INF] thr:31<> loader Requires:INPUT B 13
2025-06-29 13:10:58.475 +08:00 [INF] thr:60<> AOI is Ready
2025-06-29 13:11:02.951 +08:00 [INF] thr:60<> SetVelocity, Axis:X, velocity:50
2025-06-29 13:11:02.954 +08:00 [INF] thr:60<> SetVelocity, Axis:Y, velocity:50
2025-06-29 13:11:05.831 +08:00 [INF] thr:60<> SetVelocity, Axis:X, velocity:8
2025-06-29 13:11:05.834 +08:00 [INF] thr:60<> SetVelocity, Axis:Y, velocity:8
2025-06-29 13:11:05.851 +08:00 [INF] thr:60<> stage move to position action ok
2025-06-29 13:11:05.851 +08:00 [INF] thr:60<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-29 13:11:05.852 +08:00 [INF] thr:60<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 13:11:05.852 +08:00 [INF] thr:60<> loader Requires:RGRP
2025-06-29 13:11:06.294 +08:00 [INF] thr:60<> CLeanLoader Group Now C
2025-06-29 13:11:06.294 +08:00 [INF] thr:60<> loader Requires:MATS AK T
2025-06-29 13:11:06.751 +08:00 [INF] thr:60<> loader Requires:SSP Z 4000
2025-06-29 13:11:07.199 +08:00 [INF] thr:60<> loader Requires:MATS AK Z 1
2025-06-29 13:11:07.672 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 13:11:08.122 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-29 13:11:08.122 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-29 13:11:08.122 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-29 13:11:08.626 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:11:08.626 +08:00 [INF] thr:60<> loader Requires:INPUT A 6
2025-06-29 13:11:09.086 +08:00 [INF] thr:60<> loader Requires:OUTP 1 0
2025-06-29 13:11:09.540 +08:00 [INF] thr:60<> loader Requires:OUTP 16 1
2025-06-29 13:11:09.985 +08:00 [INF] thr:60<> loader Requires:OUTP 15 1
2025-06-29 13:11:10.434 +08:00 [INF] thr:60<> loader Requires:OUTP 4 1
2025-06-29 13:11:10.881 +08:00 [INF] thr:60<> loader Requires:OUTP 1 1
2025-06-29 13:11:11.326 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:11.779 +08:00 [INF] thr:60<> loader Requires:MATS AK R 0
2025-06-29 13:11:17.061 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-29 13:11:17.061 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:下片请求
2025-06-29 13:11:17.061 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-29 13:11:17.566 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:11:17.566 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-29 13:11:18.019 +08:00 [INF] thr:60<> loader Requires:MATS AK Z 0
2025-06-29 13:11:20.733 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 13:11:21.202 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-29 13:11:21.202 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-29 13:11:21.202 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-29 13:11:21.705 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:11:21.705 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-29 13:11:22.153 +08:00 [INF] thr:60<> loader Requires:OUTP 1 0
2025-06-29 13:11:22.602 +08:00 [INF] thr:60<> loader Requires:OUTP 16 0
2025-06-29 13:11:23.050 +08:00 [INF] thr:60<> loader Requires:OUTP 15 1
2025-06-29 13:11:23.498 +08:00 [INF] thr:60<> loader Requires:OUTP 4 0
2025-06-29 13:11:23.944 +08:00 [INF] thr:60<> loader Requires:OUTP 1 1
2025-06-29 13:11:24.395 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:25.349 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:26.303 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:27.257 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:28.213 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:29.169 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-29 13:11:29.624 +08:00 [INF] thr:60<> loader Requires:INPUT A 5
2025-06-29 13:11:30.076 +08:00 [INF] thr:60<> loader Requires:MATS AK Z 1
2025-06-29 13:11:32.797 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-29 13:11:33.249 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-29 13:11:33.249 +08:00 [INF] thr:60<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-29 13:11:33.249 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-29 13:11:33.752 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:11:33.752 +08:00 [INF] thr:60<> loader Requires:RETH
2025-06-29 13:11:39.017 +08:00 [INF] thr:60<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-29 13:11:39.019 +08:00 [INF] thr:3<> 执行Aligner设置初始角度InitialAngle：0
2025-06-29 13:11:39.019 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-29 13:11:40.027 +08:00 [INF] thr:3<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-29 13:11:40.027 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 13:11:40.027 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 13:11:40.467 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 13:11:40.467 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-29 13:11:44.010 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 13:11:44.458 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-29 13:11:51.477 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-29 13:11:54.071 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:11:54.524 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-29 13:11:54.524 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-29 13:11:54.524 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-29 13:11:55.028 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:11:55.028 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 13:11:55.480 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-29 13:11:58.736 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-29 13:11:58.736 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-29 13:11:58.736 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-29 13:11:59.240 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:11:59.240 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 13:11:59.688 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-29 13:12:02.303 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:12:02.751 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-29 13:12:02.751 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-29 13:12:02.751 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-29 13:12:03.254 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:12:03.254 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 13:12:03.703 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 13:12:04.151 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 13:12:04.598 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 13:12:05.046 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 13:12:05.493 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 13:12:05.938 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:12:06.891 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:12:07.845 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:12:08.798 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:12:09.250 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 13:12:09.707 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-29 13:12:12.325 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:12:12.782 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-29 13:12:12.782 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-29 13:12:12.782 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-29 13:12:13.285 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:12:13.285 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 13:12:18.318 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-29 13:12:18.320 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-29 13:13:19.394 +08:00 [INF] thr:51<> loader Requires:INPUT B 13
2025-06-29 13:13:20.364 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-29 13:13:21.370 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-29 13:13:21.371 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 13:13:21.371 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 13:13:21.814 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 13:13:21.814 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-29 13:13:22.273 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 13:13:22.720 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-29 13:13:23.194 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-29 13:13:25.787 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:13:26.239 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-29 13:13:26.239 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-29 13:13:26.239 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-29 13:13:26.743 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:13:26.743 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 13:13:27.196 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 13:13:27.643 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 13:13:28.091 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 13:13:28.539 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 13:13:28.986 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 13:13:29.432 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:29.884 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-29 13:13:33.133 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-29 13:13:33.133 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-29 13:13:33.133 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-29 13:13:33.637 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:13:33.637 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 13:13:34.086 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-29 13:13:36.698 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:13:37.148 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-29 13:13:37.148 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-29 13:13:37.148 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-29 13:13:37.652 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:13:37.652 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 13:13:38.100 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 13:13:38.547 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-29 13:13:38.995 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 13:13:39.444 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-29 13:13:39.889 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 13:13:40.335 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:41.289 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:42.244 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:43.199 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:44.152 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:45.108 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:13:45.561 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 13:13:46.013 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-29 13:13:48.631 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:13:49.081 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-29 13:13:49.081 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-29 13:13:49.081 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-29 13:13:49.584 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:13:49.584 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 13:13:54.618 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-29 13:13:54.620 +08:00 [INF] thr:3<> AOI is Ready
2025-06-29 13:13:54.684 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-29 13:13:54.689 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-29 13:13:54.724 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-29 13:13:54.727 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-29 13:13:54.743 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-29 13:13:54.743 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-29 13:13:54.744 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-29 13:13:54.744 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-29 13:13:55.189 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-29 13:13:55.189 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-29 13:13:58.728 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-29 13:13:59.178 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 13:14:06.196 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:14:06.646 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-29 13:14:06.646 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-29 13:14:06.646 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-29 13:14:07.150 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:14:07.150 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-29 13:14:07.603 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-29 13:14:12.885 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-29 13:14:12.885 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-06-29 13:14:12.885 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-29 13:14:13.388 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:14:13.388 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 13:14:13.834 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-29 13:14:16.552 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:14:17.026 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-29 13:14:17.026 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-29 13:14:17.026 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-29 13:14:17.530 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:14:17.530 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-29 13:14:17.981 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-29 13:14:18.428 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-29 13:14:18.874 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-29 13:14:19.326 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-29 13:14:19.774 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-29 13:14:20.219 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:14:21.173 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:14:22.126 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:14:23.079 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-29 13:14:23.532 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-29 13:14:23.985 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-29 13:14:26.702 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-29 13:14:27.153 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-29 13:14:27.153 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-29 13:14:27.153 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-29 13:14:28.156 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-29 13:14:28.156 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-29 13:14:33.421 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 09:44:00.394 +08:00 [INF] thr:41<> loader Requires:INPUT B 13
2025-06-30 09:44:01.856 +08:00 [INF] thr:3<> AOI is Ready
2025-06-30 09:44:06.357 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-30 09:44:06.365 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-30 09:44:09.620 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-30 09:44:09.623 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-30 09:44:09.639 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-30 09:44:09.640 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 09:44:09.640 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 09:44:09.640 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-30 09:44:10.081 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-30 09:44:10.081 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-30 09:44:10.540 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-30 09:44:10.986 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 09:44:11.460 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 09:44:11.910 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 09:44:11.910 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 09:44:11.910 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 09:44:12.413 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:44:12.413 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-30 09:44:12.868 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 09:44:13.314 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-30 09:44:13.762 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 09:44:14.211 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-30 09:44:14.657 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 09:44:15.108 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:15.560 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-30 09:44:20.849 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 09:44:20.849 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 09:44:20.849 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 09:44:21.352 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:44:21.352 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 09:44:21.800 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-30 09:44:24.513 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 09:44:25.001 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 09:44:25.001 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 09:44:25.001 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 09:44:25.507 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:44:25.507 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 09:44:25.954 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 09:44:26.401 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-30 09:44:26.848 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 09:44:27.297 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-30 09:44:27.743 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 09:44:28.193 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:29.147 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:30.100 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:31.053 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:32.007 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:32.959 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 09:44:33.411 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-30 09:44:33.865 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 09:44:36.581 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 09:44:37.040 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 09:44:37.041 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 09:44:37.041 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 09:44:37.543 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:44:37.543 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-30 09:44:42.806 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 09:44:42.808 +08:00 [INF] thr:56<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 09:44:42.808 +08:00 [INF] thr:56<> 执行Aligner角度angle：0
2025-06-30 09:44:43.813 +08:00 [INF] thr:56<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 09:44:43.814 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 09:44:43.814 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-06-30 09:44:44.257 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-06-30 09:44:44.257 +08:00 [INF] thr:56<> loader Requires:MATS AJ T
2025-06-30 09:44:47.800 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-06-30 09:44:48.249 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-06-30 09:44:55.266 +08:00 [INF] thr:56<> loader Requires:MOVR R 226000
2025-06-30 09:44:57.861 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:44:58.314 +08:00 [INF] thr:56<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 09:44:58.314 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 09:44:58.314 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 09:44:58.817 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:44:58.818 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-06-30 09:44:59.272 +08:00 [INF] thr:56<> loader Requires:MATS AJ R 0
2025-06-30 09:45:02.522 +08:00 [INF] thr:56<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 09:45:02.522 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 09:45:02.522 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 09:45:03.026 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:45:03.026 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-30 09:45:03.473 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 0
2025-06-30 09:45:06.087 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:45:06.536 +08:00 [INF] thr:56<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 09:45:06.536 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 09:45:06.536 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 09:45:07.039 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:45:07.039 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-30 09:45:07.488 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-30 09:45:07.934 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-06-30 09:45:08.381 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-30 09:45:08.831 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-06-30 09:45:09.278 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-30 09:45:09.723 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:45:10.677 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:45:11.630 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:45:12.582 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:45:13.035 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-06-30 09:45:13.487 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-06-30 09:45:16.104 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:45:16.553 +08:00 [INF] thr:56<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 09:45:16.553 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 09:45:16.553 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 09:45:17.058 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:45:17.058 +08:00 [INF] thr:56<> loader Requires:RETH
2025-06-30 09:45:22.093 +08:00 [INF] thr:56<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 09:45:22.094 +08:00 [INF] thr:56<> 执行Aligner角度angle：0
2025-06-30 09:47:31.419 +08:00 [INF] thr:16<> loader Requires:INPUT B 13
2025-06-30 09:47:32.389 +08:00 [INF] thr:56<> 执行Aligner角度angle：0
2025-06-30 09:47:33.396 +08:00 [INF] thr:56<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-30 09:47:33.397 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 09:47:33.397 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-06-30 09:47:33.840 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-06-30 09:47:33.840 +08:00 [INF] thr:56<> loader Requires:MATS AJ T
2025-06-30 09:47:34.298 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-06-30 09:47:34.745 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-06-30 09:47:35.218 +08:00 [INF] thr:56<> loader Requires:MOVR R 226000
2025-06-30 09:47:37.815 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:47:38.264 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-30 09:47:38.264 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-30 09:47:38.264 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-30 09:47:38.768 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:47:38.768 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-06-30 09:47:39.222 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-30 09:47:39.669 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-06-30 09:47:40.119 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-30 09:47:40.568 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-06-30 09:47:41.015 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-30 09:47:41.460 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:41.913 +08:00 [INF] thr:56<> loader Requires:MATS AJ R 0
2025-06-30 09:47:45.162 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-30 09:47:45.162 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-30 09:47:45.162 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-30 09:47:45.667 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:47:45.667 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-30 09:47:46.114 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 0
2025-06-30 09:47:48.731 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:47:49.184 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-30 09:47:49.184 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-30 09:47:49.184 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-30 09:47:49.687 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:47:49.688 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-30 09:47:50.136 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-30 09:47:50.585 +08:00 [INF] thr:56<> loader Requires:OUTP 16 0
2025-06-30 09:47:51.034 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-30 09:47:51.489 +08:00 [INF] thr:56<> loader Requires:OUTP 4 0
2025-06-30 09:47:51.941 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-30 09:47:52.390 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:53.344 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:54.298 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:55.252 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:56.205 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:57.158 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:47:57.609 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-06-30 09:47:58.062 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-06-30 09:48:00.679 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:48:01.130 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-30 09:48:01.130 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-30 09:48:01.130 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-30 09:48:01.634 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:48:01.634 +08:00 [INF] thr:56<> loader Requires:RETH
2025-06-30 09:48:06.681 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-30 09:48:06.682 +08:00 [INF] thr:56<> AOI is Ready
2025-06-30 09:48:06.750 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:50
2025-06-30 09:48:06.753 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:50
2025-06-30 09:48:06.790 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:8
2025-06-30 09:48:06.793 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:8
2025-06-30 09:48:06.810 +08:00 [INF] thr:56<> stage move to position action ok
2025-06-30 09:48:06.810 +08:00 [INF] thr:56<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-30 09:48:06.811 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 09:48:06.811 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-06-30 09:48:07.252 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-06-30 09:48:07.252 +08:00 [INF] thr:56<> loader Requires:MATS AK T
2025-06-30 09:48:10.794 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-06-30 09:48:11.244 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-06-30 09:48:18.262 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:48:18.712 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-30 09:48:18.712 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-30 09:48:18.712 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-30 09:48:19.215 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:48:19.215 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-06-30 09:48:19.668 +08:00 [INF] thr:56<> loader Requires:MATS AK R 0
2025-06-30 09:48:24.951 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-30 09:48:24.951 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片请求
2025-06-30 09:48:24.951 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-30 09:48:25.455 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:48:25.455 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-30 09:48:25.901 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 0
2025-06-30 09:48:28.623 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:48:29.089 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-30 09:48:29.089 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-30 09:48:29.089 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-30 09:48:29.593 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:48:29.593 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-06-30 09:48:30.040 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-06-30 09:48:30.487 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-06-30 09:48:30.934 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-06-30 09:48:31.383 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-06-30 09:48:31.830 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-06-30 09:48:32.275 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:48:33.230 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:48:34.182 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:48:35.135 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-06-30 09:48:35.586 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-06-30 09:48:36.042 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-06-30 09:48:38.758 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-06-30 09:48:39.209 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-30 09:48:39.209 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-30 09:48:39.209 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-30 09:48:40.215 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 09:48:40.215 +08:00 [INF] thr:56<> loader Requires:RETH
2025-06-30 09:48:45.478 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 13:07:30.829 +08:00 [INF] thr:53<> loader Requires:INPUT B 13
2025-06-30 13:07:32.290 +08:00 [INF] thr:3<> AOI is Ready
2025-06-30 13:07:37.246 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-30 13:07:37.249 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-30 13:07:40.049 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-30 13:07:40.052 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-30 13:07:40.068 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-30 13:07:40.069 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 13:07:40.069 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 13:07:40.069 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-30 13:07:40.512 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-30 13:07:40.512 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-30 13:07:40.972 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-30 13:07:41.418 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 13:07:41.891 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 13:07:42.341 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 13:07:42.341 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 13:07:42.341 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 13:07:42.845 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:07:42.845 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-30 13:07:43.299 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 13:07:43.745 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-30 13:07:44.193 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 13:07:44.641 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-30 13:07:45.089 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 13:07:45.534 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:07:45.987 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-30 13:07:51.277 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 13:07:51.277 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 13:07:51.277 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 13:07:51.781 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:07:51.781 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 13:07:52.230 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-30 13:07:54.944 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 13:07:55.416 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 13:07:55.416 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 13:07:55.416 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 13:07:55.919 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:07:55.919 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 13:07:56.371 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 13:07:56.816 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-30 13:07:57.264 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 13:07:57.712 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-30 13:07:58.165 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 13:07:58.611 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:07:59.566 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:00.518 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:01.473 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:02.426 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:03.378 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:03.829 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-30 13:08:04.284 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 13:08:07.000 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 13:08:07.450 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 13:08:07.450 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 13:08:07.450 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 13:08:07.954 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:08:07.954 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-30 13:08:13.217 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 13:08:13.219 +08:00 [INF] thr:3<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 13:08:13.219 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-30 13:08:14.225 +08:00 [INF] thr:3<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 13:08:14.226 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 13:08:14.226 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-30 13:08:14.667 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-30 13:08:14.667 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-30 13:08:18.210 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-30 13:08:18.660 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-30 13:08:25.677 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-30 13:08:28.273 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 13:08:28.723 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 13:08:28.723 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 13:08:28.723 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 13:08:29.226 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:08:29.226 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-30 13:08:29.687 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-30 13:08:32.938 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 13:08:32.938 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 13:08:32.938 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 13:08:33.442 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:08:33.442 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 13:08:33.889 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-30 13:08:36.502 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 13:08:36.952 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 13:08:36.952 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 13:08:36.952 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 13:08:37.455 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:08:37.455 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 13:08:37.902 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 13:08:38.349 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-30 13:08:38.796 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 13:08:39.246 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-30 13:08:39.693 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 13:08:40.138 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:41.092 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:42.044 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:42.997 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 13:08:43.450 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-30 13:08:43.902 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-30 13:08:46.522 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 13:08:46.974 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 13:08:46.974 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 13:08:46.974 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 13:08:47.477 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 13:08:47.477 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-30 13:08:52.512 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 13:08:52.514 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-30 14:57:40.915 +08:00 [INF] thr:32<> loader Requires:INPUT B 13
2025-06-30 14:57:41.893 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-06-30 14:57:42.899 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-30 14:57:42.900 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 14:57:42.900 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-30 14:57:43.343 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-30 14:57:43.343 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-06-30 14:57:43.801 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-30 14:57:44.270 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-30 14:57:44.742 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-06-30 14:57:47.339 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 14:57:47.791 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-30 14:57:47.791 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-30 14:57:47.791 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-30 14:57:48.296 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:57:48.296 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-30 14:57:48.750 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 14:57:49.198 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-30 14:57:49.647 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 14:57:50.096 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-30 14:57:50.543 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 14:57:50.988 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:57:51.440 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-06-30 14:57:54.695 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-30 14:57:54.695 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-30 14:57:54.695 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-30 14:57:55.198 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:57:55.198 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 14:57:55.646 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-06-30 14:57:58.258 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 14:57:58.706 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-30 14:57:58.706 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-30 14:57:58.706 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-30 14:57:59.210 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:57:59.211 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 14:57:59.665 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 14:58:00.113 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-30 14:58:00.562 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 14:58:01.015 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-30 14:58:01.461 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 14:58:01.913 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:02.869 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:03.823 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:04.777 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:05.733 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:06.686 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:07.137 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-30 14:58:07.590 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-06-30 14:58:10.207 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 14:58:10.657 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-30 14:58:10.657 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-30 14:58:10.657 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-30 14:58:11.160 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:58:11.160 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-30 14:58:16.192 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-30 14:58:16.194 +08:00 [INF] thr:3<> AOI is Ready
2025-06-30 14:58:16.256 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-30 14:58:16.264 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-30 14:58:19.499 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-06-30 14:58:19.506 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-06-30 14:58:19.537 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-30 14:58:19.537 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-30 14:58:19.538 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 14:58:19.538 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-30 14:58:19.979 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-30 14:58:19.979 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-30 14:58:23.515 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-30 14:58:23.963 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 14:58:30.980 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 14:58:31.434 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-30 14:58:31.434 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-30 14:58:31.434 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-30 14:58:31.938 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:58:31.938 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-30 14:58:32.391 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-30 14:58:37.679 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-30 14:58:37.679 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-06-30 14:58:37.679 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-30 14:58:38.181 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:58:38.181 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 14:58:38.632 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-30 14:58:41.344 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 14:58:41.810 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-30 14:58:41.810 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-30 14:58:41.810 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-30 14:58:42.313 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:58:42.313 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 14:58:42.763 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 14:58:43.210 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-30 14:58:43.657 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 14:58:44.105 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-30 14:58:44.551 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 14:58:44.998 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:45.952 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:46.906 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:47.858 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 14:58:48.311 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-30 14:58:48.780 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 14:58:51.497 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 14:58:51.947 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-30 14:58:51.948 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-30 14:58:51.948 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-30 14:58:52.953 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 14:58:52.953 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-30 14:58:58.214 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 17:02:06.914 +08:00 [INF] thr:59<> loader Requires:INPUT B 13
2025-06-30 17:02:08.376 +08:00 [INF] thr:3<> AOI is Ready
2025-06-30 17:02:11.952 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-06-30 17:02:11.955 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-06-30 17:02:14.788 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:60
2025-06-30 17:02:14.791 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:60
2025-06-30 17:02:14.807 +08:00 [INF] thr:3<> stage move to position action ok
2025-06-30 17:02:14.808 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 17:02:14.808 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 17:02:14.808 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-06-30 17:02:15.252 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-06-30 17:02:15.253 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-06-30 17:02:15.710 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-06-30 17:02:16.160 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 17:02:16.633 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 17:02:17.084 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 17:02:17.084 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 17:02:17.084 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 17:02:17.588 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:02:17.588 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-06-30 17:02:18.042 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 17:02:18.493 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-06-30 17:02:18.940 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 17:02:19.386 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-06-30 17:02:19.834 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 17:02:20.280 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:20.733 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-06-30 17:02:26.014 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 17:02:26.014 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 17:02:26.014 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 17:02:26.517 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:02:26.517 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 17:02:26.964 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-06-30 17:02:29.676 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 17:02:30.158 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 17:02:30.158 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 17:02:30.158 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 17:02:30.662 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:02:30.662 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-06-30 17:02:31.110 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-06-30 17:02:31.556 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-06-30 17:02:32.004 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-06-30 17:02:32.455 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-06-30 17:02:32.903 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-06-30 17:02:33.349 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:34.302 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:35.254 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:36.208 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:37.162 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:38.119 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-06-30 17:02:38.570 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-06-30 17:02:39.023 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-06-30 17:02:41.741 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-06-30 17:02:42.192 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 17:02:42.192 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 17:02:42.192 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 17:02:42.694 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:02:42.694 +08:00 [INF] thr:3<> loader Requires:RETH
2025-06-30 17:02:47.959 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 17:02:47.960 +08:00 [INF] thr:60<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 17:02:47.960 +08:00 [INF] thr:60<> 执行Aligner角度angle：0
2025-06-30 17:02:48.965 +08:00 [INF] thr:60<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 17:02:48.966 +08:00 [INF] thr:60<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 17:02:48.966 +08:00 [INF] thr:60<> loader Requires:RGRP
2025-06-30 17:02:49.408 +08:00 [INF] thr:60<> CLeanLoader Group Now C
2025-06-30 17:02:49.408 +08:00 [INF] thr:60<> loader Requires:MATS AJ T
2025-06-30 17:02:52.951 +08:00 [INF] thr:60<> loader Requires:SSP Z 4000
2025-06-30 17:02:53.400 +08:00 [INF] thr:60<> loader Requires:MATS AJ Z 1
2025-06-30 17:03:00.417 +08:00 [INF] thr:60<> loader Requires:MOVR R 226000
2025-06-30 17:03:03.012 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-30 17:03:03.463 +08:00 [INF] thr:60<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 17:03:03.463 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 17:03:03.463 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 17:03:03.968 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:03:03.968 +08:00 [INF] thr:60<> loader Requires:INPUT A 6
2025-06-30 17:03:04.419 +08:00 [INF] thr:60<> loader Requires:MATS AJ R 0
2025-06-30 17:03:07.684 +08:00 [INF] thr:60<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 17:03:07.684 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 17:03:07.684 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 17:03:08.186 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:03:08.186 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-30 17:03:08.633 +08:00 [INF] thr:60<> loader Requires:MATS AJ Z 0
2025-06-30 17:03:11.246 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-30 17:03:11.695 +08:00 [INF] thr:60<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 17:03:11.696 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 17:03:11.696 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 17:03:12.199 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:03:12.199 +08:00 [INF] thr:60<> loader Requires:SSP Z 1000
2025-06-30 17:03:12.647 +08:00 [INF] thr:60<> loader Requires:OUTP 1 0
2025-06-30 17:03:13.093 +08:00 [INF] thr:60<> loader Requires:OUTP 16 1
2025-06-30 17:03:13.541 +08:00 [INF] thr:60<> loader Requires:OUTP 15 1
2025-06-30 17:03:13.989 +08:00 [INF] thr:60<> loader Requires:OUTP 4 1
2025-06-30 17:03:14.436 +08:00 [INF] thr:60<> loader Requires:OUTP 1 1
2025-06-30 17:03:14.886 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-30 17:03:15.841 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-30 17:03:16.796 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-30 17:03:17.750 +08:00 [INF] thr:60<> loader Requires:INPUT A 4
2025-06-30 17:03:18.203 +08:00 [INF] thr:60<> loader Requires:INPUT A 5
2025-06-30 17:03:18.654 +08:00 [INF] thr:60<> loader Requires:MATS AJ Z 1
2025-06-30 17:03:21.272 +08:00 [INF] thr:60<> loader Requires:SSPP Z 30
2025-06-30 17:03:21.722 +08:00 [INF] thr:60<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 17:03:21.722 +08:00 [INF] thr:60<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 17:03:21.722 +08:00 [INF] thr:60<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 17:03:22.225 +08:00 [INF] thr:60<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:03:22.225 +08:00 [INF] thr:60<> loader Requires:RETH
2025-06-30 17:03:27.259 +08:00 [INF] thr:60<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 17:03:27.261 +08:00 [INF] thr:60<> 执行Aligner角度angle：0
2025-06-30 17:04:53.418 +08:00 [INF] thr:55<> loader Requires:INPUT B 13
2025-06-30 17:04:54.401 +08:00 [INF] thr:67<> 执行Aligner角度angle：0
2025-06-30 17:04:55.408 +08:00 [INF] thr:67<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-30 17:04:55.408 +08:00 [INF] thr:67<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 17:04:55.408 +08:00 [INF] thr:67<> loader Requires:RGRP
2025-06-30 17:04:55.850 +08:00 [INF] thr:67<> CLeanLoader Group Now C
2025-06-30 17:04:55.850 +08:00 [INF] thr:67<> loader Requires:MATS AJ T
2025-06-30 17:04:56.308 +08:00 [INF] thr:67<> loader Requires:SSP Z 4000
2025-06-30 17:04:56.756 +08:00 [INF] thr:67<> loader Requires:MATS AJ Z 1
2025-06-30 17:04:57.229 +08:00 [INF] thr:67<> loader Requires:MOVR R 226000
2025-06-30 17:04:59.825 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-06-30 17:05:00.276 +08:00 [INF] thr:67<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-30 17:05:00.276 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-30 17:05:00.276 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-30 17:05:00.780 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:00.780 +08:00 [INF] thr:67<> loader Requires:INPUT A 6
2025-06-30 17:05:01.232 +08:00 [INF] thr:67<> loader Requires:OUTP 1 0
2025-06-30 17:05:01.680 +08:00 [INF] thr:67<> loader Requires:OUTP 16 1
2025-06-30 17:05:02.128 +08:00 [INF] thr:67<> loader Requires:OUTP 15 1
2025-06-30 17:05:02.581 +08:00 [INF] thr:67<> loader Requires:OUTP 4 1
2025-06-30 17:05:03.027 +08:00 [INF] thr:67<> loader Requires:OUTP 1 1
2025-06-30 17:05:03.472 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:03.924 +08:00 [INF] thr:67<> loader Requires:MATS AJ R 0
2025-06-30 17:05:07.173 +08:00 [INF] thr:67<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-30 17:05:07.173 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-30 17:05:07.173 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-30 17:05:07.676 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:07.676 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-06-30 17:05:08.120 +08:00 [INF] thr:67<> loader Requires:MATS AJ Z 0
2025-06-30 17:05:10.733 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-06-30 17:05:11.182 +08:00 [INF] thr:67<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-30 17:05:11.182 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-30 17:05:11.182 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-30 17:05:11.686 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:11.686 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-06-30 17:05:12.135 +08:00 [INF] thr:67<> loader Requires:OUTP 1 0
2025-06-30 17:05:12.582 +08:00 [INF] thr:67<> loader Requires:OUTP 16 0
2025-06-30 17:05:13.032 +08:00 [INF] thr:67<> loader Requires:OUTP 15 1
2025-06-30 17:05:13.481 +08:00 [INF] thr:67<> loader Requires:OUTP 4 0
2025-06-30 17:05:13.927 +08:00 [INF] thr:67<> loader Requires:OUTP 1 1
2025-06-30 17:05:14.373 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:15.328 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:16.280 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:17.234 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:18.197 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:19.153 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:19.607 +08:00 [INF] thr:67<> loader Requires:INPUT A 5
2025-06-30 17:05:20.060 +08:00 [INF] thr:67<> loader Requires:MATS AJ Z 1
2025-06-30 17:05:22.678 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-06-30 17:05:23.128 +08:00 [INF] thr:67<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-30 17:05:23.128 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-30 17:05:23.128 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-30 17:05:23.632 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:23.632 +08:00 [INF] thr:67<> loader Requires:RETH
2025-06-30 17:05:28.666 +08:00 [INF] thr:67<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-30 17:05:28.668 +08:00 [INF] thr:67<> AOI is Ready
2025-06-30 17:05:28.741 +08:00 [INF] thr:67<> SetVelocity, Axis:X, velocity:50
2025-06-30 17:05:28.744 +08:00 [INF] thr:67<> SetVelocity, Axis:Y, velocity:50
2025-06-30 17:05:28.781 +08:00 [INF] thr:67<> SetVelocity, Axis:X, velocity:60
2025-06-30 17:05:28.784 +08:00 [INF] thr:67<> SetVelocity, Axis:Y, velocity:60
2025-06-30 17:05:28.801 +08:00 [INF] thr:67<> stage move to position action ok
2025-06-30 17:05:28.801 +08:00 [INF] thr:67<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-30 17:05:28.802 +08:00 [INF] thr:67<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 17:05:28.802 +08:00 [INF] thr:67<> loader Requires:RGRP
2025-06-30 17:05:29.246 +08:00 [INF] thr:67<> CLeanLoader Group Now C
2025-06-30 17:05:29.246 +08:00 [INF] thr:67<> loader Requires:MATS AK T
2025-06-30 17:05:32.789 +08:00 [INF] thr:67<> loader Requires:SSP Z 4000
2025-06-30 17:05:33.238 +08:00 [INF] thr:67<> loader Requires:MATS AK Z 1
2025-06-30 17:05:40.275 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-06-30 17:05:40.725 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-30 17:05:40.725 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-30 17:05:40.725 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-30 17:05:41.229 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:41.229 +08:00 [INF] thr:67<> loader Requires:INPUT A 6
2025-06-30 17:05:41.696 +08:00 [INF] thr:67<> loader Requires:MATS AK R 0
2025-06-30 17:05:46.978 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-30 17:05:46.979 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:上片请求
2025-06-30 17:05:46.979 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-30 17:05:47.481 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:47.481 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-06-30 17:05:47.929 +08:00 [INF] thr:67<> loader Requires:MATS AK Z 0
2025-06-30 17:05:50.641 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-06-30 17:05:51.103 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-30 17:05:51.103 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-30 17:05:51.103 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-30 17:05:51.607 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:05:51.607 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-06-30 17:05:52.054 +08:00 [INF] thr:67<> loader Requires:OUTP 1 0
2025-06-30 17:05:52.500 +08:00 [INF] thr:67<> loader Requires:OUTP 16 1
2025-06-30 17:05:52.947 +08:00 [INF] thr:67<> loader Requires:OUTP 15 1
2025-06-30 17:05:53.396 +08:00 [INF] thr:67<> loader Requires:OUTP 4 1
2025-06-30 17:05:53.843 +08:00 [INF] thr:67<> loader Requires:OUTP 1 1
2025-06-30 17:05:54.289 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:55.245 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:56.200 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:57.153 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-06-30 17:05:57.621 +08:00 [INF] thr:67<> loader Requires:INPUT A 5
2025-06-30 17:05:58.075 +08:00 [INF] thr:67<> loader Requires:MATS AK Z 1
2025-06-30 17:06:00.791 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-06-30 17:06:01.241 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-30 17:06:01.241 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-30 17:06:01.241 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-30 17:06:02.248 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 17:06:02.248 +08:00 [INF] thr:67<> loader Requires:RETH
2025-06-30 17:06:07.512 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 18:01:48.108 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:53785
2025-06-30 18:10:35.501 +08:00 [INF] thr:73<> loader Requires:INPUT B 13
2025-06-30 18:10:36.994 +08:00 [INF] thr:65<> AOI is Ready
2025-06-30 18:10:37.076 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-06-30 18:10:37.079 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-06-30 18:10:41.769 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:20
2025-06-30 18:10:41.772 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:20
2025-06-30 18:10:41.788 +08:00 [INF] thr:65<> stage move to position action ok
2025-06-30 18:10:41.789 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 18:10:41.789 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 18:10:41.789 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-06-30 18:10:42.232 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-06-30 18:10:42.232 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-06-30 18:10:42.691 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-06-30 18:10:43.140 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-06-30 18:10:43.625 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 18:10:44.080 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 18:10:44.081 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 18:10:44.081 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 18:10:44.584 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:10:44.584 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-06-30 18:10:45.033 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 18:10:45.480 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-06-30 18:10:45.930 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 18:10:46.381 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-06-30 18:10:46.828 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 18:10:47.272 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:10:47.725 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-06-30 18:10:53.008 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 18:10:53.008 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 18:10:53.008 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 18:10:53.512 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:10:53.512 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 18:10:53.970 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-06-30 18:10:56.685 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 18:10:57.221 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 18:10:57.221 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 18:10:57.221 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 18:10:57.725 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:10:57.725 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 18:10:58.170 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 18:10:58.618 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-06-30 18:10:59.073 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 18:10:59.520 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-06-30 18:10:59.967 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 18:11:00.413 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:01.367 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:02.322 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:03.277 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:04.230 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:05.184 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:05.635 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-06-30 18:11:06.087 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-06-30 18:11:08.806 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 18:11:09.256 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 18:11:09.256 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 18:11:09.256 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 18:11:09.759 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:11:09.759 +08:00 [INF] thr:65<> loader Requires:RETH
2025-06-30 18:11:15.018 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 18:11:15.020 +08:00 [INF] thr:65<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 18:11:15.020 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-06-30 18:11:16.027 +08:00 [INF] thr:65<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 18:11:16.027 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 18:11:16.027 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-06-30 18:11:16.473 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-06-30 18:11:16.473 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-06-30 18:11:20.015 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-06-30 18:11:20.464 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-06-30 18:11:27.482 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-06-30 18:11:30.082 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 18:11:30.531 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 18:11:30.531 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 18:11:30.531 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 18:11:31.036 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:11:31.036 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-06-30 18:11:31.489 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-06-30 18:11:34.738 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 18:11:34.739 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 18:11:34.739 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 18:11:35.242 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:11:35.242 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 18:11:35.690 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-06-30 18:11:38.303 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 18:11:38.753 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 18:11:38.753 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 18:11:38.753 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 18:11:39.256 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:11:39.256 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 18:11:39.706 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 18:11:40.153 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-06-30 18:11:40.600 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 18:11:41.058 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-06-30 18:11:41.506 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 18:11:41.953 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:42.907 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:43.860 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:44.815 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 18:11:45.266 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-06-30 18:11:45.719 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-06-30 18:11:48.336 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 18:11:48.787 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 18:11:48.787 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 18:11:48.787 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 18:11:49.291 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:11:49.291 +08:00 [INF] thr:65<> loader Requires:RETH
2025-06-30 18:11:54.325 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 18:11:54.327 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-06-30 18:13:55.669 +08:00 [INF] thr:83<> loader Requires:INPUT B 13
2025-06-30 18:13:56.649 +08:00 [INF] thr:76<> 执行Aligner角度angle：0
2025-06-30 18:13:57.658 +08:00 [INF] thr:76<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-30 18:13:57.658 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 18:13:57.658 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-30 18:13:58.105 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-30 18:13:58.105 +08:00 [INF] thr:76<> loader Requires:MATS AJ T
2025-06-30 18:13:58.564 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-30 18:13:59.022 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 1
2025-06-30 18:13:59.495 +08:00 [INF] thr:76<> loader Requires:MOVR R 226000
2025-06-30 18:14:02.092 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 18:14:02.541 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-30 18:14:02.541 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-30 18:14:02.541 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-30 18:14:03.045 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:03.045 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-30 18:14:03.499 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-30 18:14:03.946 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-30 18:14:04.394 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-30 18:14:04.842 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-30 18:14:05.287 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-30 18:14:05.733 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:06.186 +08:00 [INF] thr:76<> loader Requires:MATS AJ R 0
2025-06-30 18:14:09.434 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-30 18:14:09.434 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-30 18:14:09.434 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-30 18:14:09.936 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:09.936 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 18:14:10.383 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 0
2025-06-30 18:14:12.995 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 18:14:13.449 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-30 18:14:13.449 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-30 18:14:13.449 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-30 18:14:13.951 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:13.951 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 18:14:14.407 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-30 18:14:14.851 +08:00 [INF] thr:76<> loader Requires:OUTP 16 0
2025-06-30 18:14:15.304 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-30 18:14:15.752 +08:00 [INF] thr:76<> loader Requires:OUTP 4 0
2025-06-30 18:14:16.198 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-30 18:14:16.645 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:17.595 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:18.550 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:19.504 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:20.461 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:21.421 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:21.873 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-30 18:14:22.327 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 1
2025-06-30 18:14:24.945 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 18:14:25.395 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-30 18:14:25.396 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-30 18:14:25.396 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-30 18:14:25.900 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:25.900 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-30 18:14:30.933 +08:00 [INF] thr:76<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-30 18:14:30.935 +08:00 [INF] thr:76<> AOI is Ready
2025-06-30 18:14:30.999 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:50
2025-06-30 18:14:31.002 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:50
2025-06-30 18:14:31.039 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:20
2025-06-30 18:14:31.046 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:20
2025-06-30 18:14:31.078 +08:00 [INF] thr:76<> stage move to position action ok
2025-06-30 18:14:31.078 +08:00 [INF] thr:76<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-30 18:14:31.079 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 18:14:31.079 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-30 18:14:31.521 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-30 18:14:31.521 +08:00 [INF] thr:76<> loader Requires:MATS AK T
2025-06-30 18:14:35.072 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-30 18:14:35.520 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-30 18:14:42.538 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 18:14:42.996 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-30 18:14:42.996 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-30 18:14:42.996 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-30 18:14:43.499 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:43.500 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-30 18:14:43.960 +08:00 [INF] thr:76<> loader Requires:MATS AK R 0
2025-06-30 18:14:49.243 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-30 18:14:49.243 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片请求
2025-06-30 18:14:49.243 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-30 18:14:49.748 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:49.748 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 18:14:50.193 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 0
2025-06-30 18:14:52.907 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 18:14:53.366 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-30 18:14:53.366 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-30 18:14:53.366 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-30 18:14:53.870 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:14:53.870 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 18:14:54.324 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-30 18:14:54.776 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-30 18:14:55.226 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-30 18:14:55.675 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-30 18:14:56.120 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-30 18:14:56.567 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:57.521 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:58.473 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:59.427 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 18:14:59.878 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-30 18:15:00.334 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-30 18:15:03.054 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 18:15:03.504 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-30 18:15:03.504 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-30 18:15:03.504 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-30 18:15:04.509 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 18:15:04.509 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-30 18:15:09.777 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 19:58:17.710 +08:00 [INF] thr:47<> loader Requires:INPUT B 13
2025-06-30 19:58:19.183 +08:00 [INF] thr:76<> AOI is Ready
2025-06-30 19:58:22.970 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:50
2025-06-30 19:58:22.973 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:50
2025-06-30 19:58:25.770 +08:00 [INF] thr:76<> SetVelocity, Axis:X, velocity:60
2025-06-30 19:58:25.773 +08:00 [INF] thr:76<> SetVelocity, Axis:Y, velocity:60
2025-06-30 19:58:25.789 +08:00 [INF] thr:76<> stage move to position action ok
2025-06-30 19:58:25.790 +08:00 [INF] thr:76<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 19:58:25.790 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 19:58:25.790 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-30 19:58:26.235 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-30 19:58:26.235 +08:00 [INF] thr:76<> loader Requires:MATS AK T
2025-06-30 19:58:26.693 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-30 19:58:27.141 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-30 19:58:27.614 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 19:58:28.064 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 19:58:28.064 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 19:58:28.064 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 19:58:28.569 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:58:28.569 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-30 19:58:29.022 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-30 19:58:29.468 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-30 19:58:29.920 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-30 19:58:30.368 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-30 19:58:30.815 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-30 19:58:31.261 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:31.714 +08:00 [INF] thr:76<> loader Requires:MATS AK R 0
2025-06-30 19:58:36.995 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 19:58:36.995 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 19:58:36.995 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 19:58:37.499 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:58:37.499 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 19:58:37.951 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 0
2025-06-30 19:58:40.667 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 19:58:41.144 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 19:58:41.144 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 19:58:41.144 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 19:58:41.648 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:58:41.648 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 19:58:42.096 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-30 19:58:42.548 +08:00 [INF] thr:76<> loader Requires:OUTP 16 0
2025-06-30 19:58:43.005 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-30 19:58:43.451 +08:00 [INF] thr:76<> loader Requires:OUTP 4 0
2025-06-30 19:58:43.898 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-30 19:58:44.343 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:45.296 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:46.253 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:47.209 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:48.164 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:49.117 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 19:58:49.569 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-30 19:58:50.021 +08:00 [INF] thr:76<> loader Requires:MATS AK Z 1
2025-06-30 19:58:52.755 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 19:58:53.204 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 19:58:53.204 +08:00 [INF] thr:76<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 19:58:53.204 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 19:58:53.711 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:58:53.711 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-30 19:58:58.982 +08:00 [INF] thr:76<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 19:58:58.983 +08:00 [INF] thr:77<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 19:58:58.983 +08:00 [INF] thr:77<> 执行Aligner角度angle：0
2025-06-30 19:58:59.988 +08:00 [INF] thr:77<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 19:58:59.989 +08:00 [INF] thr:77<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 19:58:59.989 +08:00 [INF] thr:77<> loader Requires:RGRP
2025-06-30 19:59:00.432 +08:00 [INF] thr:77<> CLeanLoader Group Now C
2025-06-30 19:59:00.432 +08:00 [INF] thr:77<> loader Requires:MATS AJ T
2025-06-30 19:59:03.972 +08:00 [INF] thr:77<> loader Requires:SSP Z 4000
2025-06-30 19:59:04.421 +08:00 [INF] thr:77<> loader Requires:MATS AJ Z 1
2025-06-30 19:59:11.441 +08:00 [INF] thr:77<> loader Requires:MOVR R 226000
2025-06-30 19:59:14.039 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 19:59:14.489 +08:00 [INF] thr:77<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 19:59:14.489 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 19:59:14.489 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 19:59:14.991 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:59:14.991 +08:00 [INF] thr:77<> loader Requires:INPUT A 6
2025-06-30 19:59:15.445 +08:00 [INF] thr:77<> loader Requires:MATS AJ R 0
2025-06-30 19:59:18.699 +08:00 [INF] thr:77<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 19:59:18.699 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 19:59:18.699 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 19:59:19.205 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:59:19.206 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-30 19:59:19.655 +08:00 [INF] thr:77<> loader Requires:MATS AJ Z 0
2025-06-30 19:59:22.276 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 19:59:22.725 +08:00 [INF] thr:77<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 19:59:22.725 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 19:59:22.725 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 19:59:23.229 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:59:23.229 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-30 19:59:23.677 +08:00 [INF] thr:77<> loader Requires:OUTP 1 0
2025-06-30 19:59:24.123 +08:00 [INF] thr:77<> loader Requires:OUTP 16 1
2025-06-30 19:59:24.571 +08:00 [INF] thr:77<> loader Requires:OUTP 15 1
2025-06-30 19:59:25.020 +08:00 [INF] thr:77<> loader Requires:OUTP 4 1
2025-06-30 19:59:25.467 +08:00 [INF] thr:77<> loader Requires:OUTP 1 1
2025-06-30 19:59:25.912 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 19:59:26.865 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 19:59:27.818 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 19:59:28.772 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 19:59:29.224 +08:00 [INF] thr:77<> loader Requires:INPUT A 5
2025-06-30 19:59:29.677 +08:00 [INF] thr:77<> loader Requires:MATS AJ Z 1
2025-06-30 19:59:32.297 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 19:59:32.747 +08:00 [INF] thr:77<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 19:59:32.747 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 19:59:32.748 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 19:59:33.252 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 19:59:33.252 +08:00 [INF] thr:77<> loader Requires:RETH
2025-06-30 19:59:38.288 +08:00 [INF] thr:77<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 19:59:38.289 +08:00 [INF] thr:77<> 执行Aligner角度angle：0
2025-06-30 21:11:28.223 +08:00 [INF] thr:69<> loader Requires:INPUT B 13
2025-06-30 21:11:29.197 +08:00 [INF] thr:77<> 执行Aligner角度angle：0
2025-06-30 21:11:30.200 +08:00 [INF] thr:77<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-30 21:11:30.201 +08:00 [INF] thr:77<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:11:30.201 +08:00 [INF] thr:77<> loader Requires:RGRP
2025-06-30 21:11:30.643 +08:00 [INF] thr:77<> CLeanLoader Group Now C
2025-06-30 21:11:30.643 +08:00 [INF] thr:77<> loader Requires:MATS AJ T
2025-06-30 21:11:31.102 +08:00 [INF] thr:77<> loader Requires:SSP Z 4000
2025-06-30 21:11:31.550 +08:00 [INF] thr:77<> loader Requires:MATS AJ Z 1
2025-06-30 21:11:32.022 +08:00 [INF] thr:77<> loader Requires:MOVR R 226000
2025-06-30 21:11:34.620 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 21:11:35.073 +08:00 [INF] thr:77<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-30 21:11:35.073 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-30 21:11:35.073 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-30 21:11:35.577 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:11:35.577 +08:00 [INF] thr:77<> loader Requires:INPUT A 6
2025-06-30 21:11:36.030 +08:00 [INF] thr:77<> loader Requires:OUTP 1 0
2025-06-30 21:11:36.476 +08:00 [INF] thr:77<> loader Requires:OUTP 16 1
2025-06-30 21:11:36.923 +08:00 [INF] thr:77<> loader Requires:OUTP 15 1
2025-06-30 21:11:37.372 +08:00 [INF] thr:77<> loader Requires:OUTP 4 1
2025-06-30 21:11:37.819 +08:00 [INF] thr:77<> loader Requires:OUTP 1 1
2025-06-30 21:11:38.265 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:38.717 +08:00 [INF] thr:77<> loader Requires:MATS AJ R 0
2025-06-30 21:11:41.965 +08:00 [INF] thr:77<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-30 21:11:41.966 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-30 21:11:41.966 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-30 21:11:42.470 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:11:42.470 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-30 21:11:42.917 +08:00 [INF] thr:77<> loader Requires:MATS AJ Z 0
2025-06-30 21:11:45.530 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 21:11:45.980 +08:00 [INF] thr:77<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-30 21:11:45.980 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-30 21:11:45.980 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-30 21:11:46.483 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:11:46.483 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-30 21:11:46.936 +08:00 [INF] thr:77<> loader Requires:OUTP 1 0
2025-06-30 21:11:47.387 +08:00 [INF] thr:77<> loader Requires:OUTP 16 0
2025-06-30 21:11:47.834 +08:00 [INF] thr:77<> loader Requires:OUTP 15 1
2025-06-30 21:11:48.281 +08:00 [INF] thr:77<> loader Requires:OUTP 4 0
2025-06-30 21:11:48.727 +08:00 [INF] thr:77<> loader Requires:OUTP 1 1
2025-06-30 21:11:49.174 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:50.127 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:51.085 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:52.037 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:52.991 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:53.944 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:11:54.395 +08:00 [INF] thr:77<> loader Requires:INPUT A 5
2025-06-30 21:11:54.848 +08:00 [INF] thr:77<> loader Requires:MATS AJ Z 1
2025-06-30 21:11:57.466 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 21:11:57.916 +08:00 [INF] thr:77<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-30 21:11:57.916 +08:00 [INF] thr:77<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-30 21:11:57.916 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-30 21:11:58.418 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:11:58.418 +08:00 [INF] thr:77<> loader Requires:RETH
2025-06-30 21:12:03.451 +08:00 [INF] thr:77<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-30 21:12:03.453 +08:00 [INF] thr:77<> AOI is Ready
2025-06-30 21:12:03.521 +08:00 [INF] thr:77<> SetVelocity, Axis:X, velocity:50
2025-06-30 21:12:03.525 +08:00 [INF] thr:77<> SetVelocity, Axis:Y, velocity:50
2025-06-30 21:12:03.560 +08:00 [INF] thr:77<> SetVelocity, Axis:X, velocity:60
2025-06-30 21:12:03.563 +08:00 [INF] thr:77<> SetVelocity, Axis:Y, velocity:60
2025-06-30 21:12:03.579 +08:00 [INF] thr:77<> stage move to position action ok
2025-06-30 21:12:03.580 +08:00 [INF] thr:77<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-30 21:12:03.580 +08:00 [INF] thr:77<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:12:03.580 +08:00 [INF] thr:77<> loader Requires:RGRP
2025-06-30 21:12:04.023 +08:00 [INF] thr:77<> CLeanLoader Group Now C
2025-06-30 21:12:04.023 +08:00 [INF] thr:77<> loader Requires:MATS AK T
2025-06-30 21:12:07.566 +08:00 [INF] thr:77<> loader Requires:SSP Z 4000
2025-06-30 21:12:08.014 +08:00 [INF] thr:77<> loader Requires:MATS AK Z 1
2025-06-30 21:12:15.032 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 21:12:15.481 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-30 21:12:15.481 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-30 21:12:15.481 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-30 21:12:15.986 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:12:15.986 +08:00 [INF] thr:77<> loader Requires:INPUT A 6
2025-06-30 21:12:16.439 +08:00 [INF] thr:77<> loader Requires:MATS AK R 0
2025-06-30 21:12:21.722 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-30 21:12:21.722 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:上片请求
2025-06-30 21:12:21.722 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-30 21:12:22.223 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:12:22.223 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-30 21:12:22.671 +08:00 [INF] thr:77<> loader Requires:MATS AK Z 0
2025-06-30 21:12:25.395 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 21:12:25.878 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-30 21:12:25.878 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-30 21:12:25.878 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-30 21:12:26.381 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:12:26.381 +08:00 [INF] thr:77<> loader Requires:SSP Z 1000
2025-06-30 21:12:26.844 +08:00 [INF] thr:77<> loader Requires:OUTP 1 0
2025-06-30 21:12:27.292 +08:00 [INF] thr:77<> loader Requires:OUTP 16 1
2025-06-30 21:12:27.740 +08:00 [INF] thr:77<> loader Requires:OUTP 15 1
2025-06-30 21:12:28.188 +08:00 [INF] thr:77<> loader Requires:OUTP 4 1
2025-06-30 21:12:28.635 +08:00 [INF] thr:77<> loader Requires:OUTP 1 1
2025-06-30 21:12:29.082 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:12:30.036 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:12:30.992 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:12:31.956 +08:00 [INF] thr:77<> loader Requires:INPUT A 4
2025-06-30 21:12:32.409 +08:00 [INF] thr:77<> loader Requires:INPUT A 5
2025-06-30 21:12:32.877 +08:00 [INF] thr:77<> loader Requires:MATS AK Z 1
2025-06-30 21:12:35.595 +08:00 [INF] thr:77<> loader Requires:SSPP Z 30
2025-06-30 21:12:36.045 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-30 21:12:36.045 +08:00 [INF] thr:77<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-30 21:12:36.045 +08:00 [INF] thr:77<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-30 21:12:37.053 +08:00 [INF] thr:77<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:12:37.053 +08:00 [INF] thr:77<> loader Requires:RETH
2025-06-30 21:12:42.315 +08:00 [INF] thr:77<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 21:13:01.614 +08:00 [INF] thr:17<> loader Requires:INPUT B 13
2025-06-30 21:13:03.077 +08:00 [INF] thr:65<> AOI is Ready
2025-06-30 21:13:03.155 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-06-30 21:13:03.158 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-06-30 21:13:03.197 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:60
2025-06-30 21:13:03.207 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:60
2025-06-30 21:13:03.254 +08:00 [INF] thr:65<> stage move to position action ok
2025-06-30 21:13:03.254 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 21:13:03.255 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:13:03.255 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-06-30 21:13:03.696 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-06-30 21:13:03.696 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-06-30 21:13:04.156 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-06-30 21:13:04.605 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-06-30 21:13:05.080 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:13:05.531 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 21:13:05.531 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 21:13:05.531 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 21:13:06.038 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:13:06.038 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-06-30 21:13:06.490 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 21:13:06.937 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-06-30 21:13:07.385 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 21:13:07.839 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-06-30 21:13:08.289 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 21:13:08.738 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:09.193 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-06-30 21:13:14.475 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 21:13:14.475 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 21:13:14.475 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 21:13:14.979 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:13:14.980 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 21:13:15.429 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-06-30 21:13:18.141 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:13:18.616 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 21:13:18.617 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 21:13:18.617 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 21:13:19.121 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:13:19.121 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 21:13:19.567 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 21:13:20.014 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-06-30 21:13:20.462 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 21:13:20.911 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-06-30 21:13:21.356 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 21:13:21.802 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:22.756 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:23.709 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:24.663 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:25.615 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:26.567 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:13:27.021 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-06-30 21:13:27.473 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-06-30 21:13:30.191 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:13:30.642 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 21:13:30.642 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 21:13:30.642 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 21:13:31.144 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:13:31.144 +08:00 [INF] thr:65<> loader Requires:RETH
2025-06-30 21:13:36.409 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 21:13:36.411 +08:00 [INF] thr:65<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 21:13:36.411 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-06-30 21:13:37.417 +08:00 [INF] thr:65<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 21:13:37.418 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:13:37.418 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-06-30 21:13:37.863 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-06-30 21:13:37.863 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-06-30 21:13:41.405 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-06-30 21:13:41.854 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-06-30 21:13:48.872 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-06-30 21:13:51.467 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:13:51.922 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 21:13:51.922 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 21:13:51.922 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 21:13:52.425 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:13:52.425 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-06-30 21:13:52.879 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-06-30 21:13:56.129 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 21:13:56.129 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 21:13:56.129 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 21:13:56.631 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:13:56.632 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 21:13:57.080 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-06-30 21:13:59.693 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:14:00.141 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 21:14:00.141 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 21:14:00.141 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 21:14:00.644 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:14:00.644 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 21:14:01.094 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 21:14:01.542 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-06-30 21:14:01.988 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 21:14:02.442 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-06-30 21:14:02.888 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 21:14:03.333 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:14:04.286 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:14:05.239 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:14:06.194 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:14:06.645 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-06-30 21:14:07.098 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-06-30 21:14:09.715 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:14:10.173 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 21:14:10.173 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 21:14:10.173 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 21:14:10.674 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:14:10.674 +08:00 [INF] thr:65<> loader Requires:RETH
2025-06-30 21:14:15.711 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 21:14:15.713 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-06-30 21:15:10.878 +08:00 [INF] thr:56<> loader Requires:INPUT B 13
2025-06-30 21:15:11.873 +08:00 [INF] thr:27<> 执行Aligner角度angle：0
2025-06-30 21:15:12.880 +08:00 [INF] thr:27<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-06-30 21:15:12.882 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:15:12.882 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-06-30 21:15:13.325 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-06-30 21:15:13.325 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-06-30 21:15:13.784 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-06-30 21:15:14.231 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-06-30 21:15:14.705 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-06-30 21:15:17.304 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-06-30 21:15:17.755 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-06-30 21:15:17.755 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-06-30 21:15:17.755 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-06-30 21:15:18.259 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:15:18.259 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-06-30 21:15:18.712 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-06-30 21:15:19.159 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-06-30 21:15:19.606 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-06-30 21:15:20.055 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-06-30 21:15:20.501 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-06-30 21:15:20.947 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:21.403 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-06-30 21:15:24.651 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-06-30 21:15:24.651 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片请求
2025-06-30 21:15:24.651 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-06-30 21:15:25.155 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:15:25.155 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-06-30 21:15:25.604 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-06-30 21:15:28.217 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-06-30 21:15:28.671 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-06-30 21:15:28.671 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-06-30 21:15:28.671 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-06-30 21:15:29.173 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:15:29.173 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-06-30 21:15:29.622 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-06-30 21:15:30.068 +08:00 [INF] thr:27<> loader Requires:OUTP 16 0
2025-06-30 21:15:30.516 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-06-30 21:15:30.965 +08:00 [INF] thr:27<> loader Requires:OUTP 4 0
2025-06-30 21:15:31.411 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-06-30 21:15:31.857 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:32.811 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:33.766 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:34.719 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:35.673 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:36.626 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:15:37.078 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-06-30 21:15:37.531 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-06-30 21:15:40.148 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-06-30 21:15:40.599 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-06-30 21:15:40.599 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-06-30 21:15:40.599 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-06-30 21:15:41.103 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:15:41.103 +08:00 [INF] thr:27<> loader Requires:RETH
2025-06-30 21:15:46.139 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-06-30 21:15:46.140 +08:00 [INF] thr:27<> AOI is Ready
2025-06-30 21:15:46.216 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:50
2025-06-30 21:15:46.219 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:50
2025-06-30 21:15:46.265 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:60
2025-06-30 21:15:46.272 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:60
2025-06-30 21:15:46.305 +08:00 [INF] thr:27<> stage move to position action ok
2025-06-30 21:15:46.305 +08:00 [INF] thr:27<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-06-30 21:15:46.306 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:15:46.306 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-06-30 21:15:46.750 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-06-30 21:15:46.750 +08:00 [INF] thr:27<> loader Requires:MATS AK T
2025-06-30 21:15:50.295 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-06-30 21:15:50.741 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-06-30 21:15:57.758 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-06-30 21:15:58.208 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-06-30 21:15:58.208 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-06-30 21:15:58.208 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-06-30 21:15:58.712 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:15:58.712 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-06-30 21:15:59.166 +08:00 [INF] thr:27<> loader Requires:MATS AK R 0
2025-06-30 21:16:04.448 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-06-30 21:16:04.448 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片请求
2025-06-30 21:16:04.448 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-06-30 21:16:04.951 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:16:04.951 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-06-30 21:16:05.398 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 0
2025-06-30 21:16:08.112 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-06-30 21:16:08.589 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-06-30 21:16:08.589 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片低位请求
2025-06-30 21:16:08.589 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-06-30 21:16:09.092 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:16:09.092 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-06-30 21:16:09.541 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-06-30 21:16:09.987 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-06-30 21:16:10.435 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-06-30 21:16:10.884 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-06-30 21:16:11.330 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-06-30 21:16:11.776 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:16:12.733 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:16:13.686 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:16:14.640 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-06-30 21:16:15.091 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-06-30 21:16:15.544 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-06-30 21:16:18.261 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-06-30 21:16:18.713 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-06-30 21:16:18.713 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片完成请求
2025-06-30 21:16:18.713 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-06-30 21:16:19.717 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:16:19.717 +08:00 [INF] thr:27<> loader Requires:RETH
2025-06-30 21:16:24.980 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-06-30 21:52:03.705 +08:00 [INF] thr:81<> loader Requires:INPUT B 13
2025-06-30 21:52:05.166 +08:00 [INF] thr:65<> AOI is Ready
2025-06-30 21:52:09.654 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-06-30 21:52:09.657 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-06-30 21:52:13.008 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:60
2025-06-30 21:52:13.016 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:60
2025-06-30 21:52:13.054 +08:00 [INF] thr:65<> stage move to position action ok
2025-06-30 21:52:13.054 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-06-30 21:52:13.055 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:52:13.055 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-06-30 21:52:13.496 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-06-30 21:52:13.496 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-06-30 21:52:13.954 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-06-30 21:52:14.401 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-06-30 21:52:14.875 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:52:15.325 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-06-30 21:52:15.325 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-06-30 21:52:15.325 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-06-30 21:52:15.829 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:52:15.829 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-06-30 21:52:16.290 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 21:52:16.737 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-06-30 21:52:17.183 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 21:52:17.631 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-06-30 21:52:18.079 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 21:52:18.525 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:18.978 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-06-30 21:52:24.259 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-06-30 21:52:24.259 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片请求
2025-06-30 21:52:24.259 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-06-30 21:52:24.763 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:52:24.763 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 21:52:25.214 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-06-30 21:52:27.925 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:52:28.394 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-06-30 21:52:28.394 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片低位请求
2025-06-30 21:52:28.394 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-06-30 21:52:28.898 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:52:28.898 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-06-30 21:52:29.346 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-06-30 21:52:29.793 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-06-30 21:52:30.240 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-06-30 21:52:30.688 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-06-30 21:52:31.136 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-06-30 21:52:31.581 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:32.545 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:33.501 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:34.457 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:35.409 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:36.364 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-06-30 21:52:36.815 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-06-30 21:52:37.269 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-06-30 21:52:39.986 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-06-30 21:52:40.437 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-06-30 21:52:40.438 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片完成请求
2025-06-30 21:52:40.438 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-06-30 21:52:40.941 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:52:40.941 +08:00 [INF] thr:65<> loader Requires:RETH
2025-06-30 21:52:46.203 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-06-30 21:52:46.204 +08:00 [INF] thr:76<> 执行Aligner设置初始角度InitialAngle：0
2025-06-30 21:52:46.204 +08:00 [INF] thr:76<> 执行Aligner角度angle：0
2025-06-30 21:52:47.214 +08:00 [INF] thr:76<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-06-30 21:52:47.215 +08:00 [INF] thr:76<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-06-30 21:52:47.215 +08:00 [INF] thr:76<> loader Requires:RGRP
2025-06-30 21:52:47.656 +08:00 [INF] thr:76<> CLeanLoader Group Now C
2025-06-30 21:52:47.656 +08:00 [INF] thr:76<> loader Requires:MATS AJ T
2025-06-30 21:52:51.201 +08:00 [INF] thr:76<> loader Requires:SSP Z 4000
2025-06-30 21:52:51.647 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 1
2025-06-30 21:52:58.665 +08:00 [INF] thr:76<> loader Requires:MOVR R 226000
2025-06-30 21:53:01.259 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 21:53:01.710 +08:00 [INF] thr:76<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-06-30 21:53:01.710 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-06-30 21:53:01.710 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-06-30 21:53:02.214 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:53:02.214 +08:00 [INF] thr:76<> loader Requires:INPUT A 6
2025-06-30 21:53:02.665 +08:00 [INF] thr:76<> loader Requires:MATS AJ R 0
2025-06-30 21:53:05.915 +08:00 [INF] thr:76<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-06-30 21:53:05.916 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:上片请求
2025-06-30 21:53:05.916 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-06-30 21:53:06.420 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:53:06.420 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 21:53:06.867 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 0
2025-06-30 21:53:09.480 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 21:53:09.929 +08:00 [INF] thr:76<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-06-30 21:53:09.929 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-06-30 21:53:09.929 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-06-30 21:53:10.433 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:53:10.433 +08:00 [INF] thr:76<> loader Requires:SSP Z 1000
2025-06-30 21:53:10.881 +08:00 [INF] thr:76<> loader Requires:OUTP 1 0
2025-06-30 21:53:11.327 +08:00 [INF] thr:76<> loader Requires:OUTP 16 1
2025-06-30 21:53:11.775 +08:00 [INF] thr:76<> loader Requires:OUTP 15 1
2025-06-30 21:53:12.223 +08:00 [INF] thr:76<> loader Requires:OUTP 4 1
2025-06-30 21:53:12.670 +08:00 [INF] thr:76<> loader Requires:OUTP 1 1
2025-06-30 21:53:13.116 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 21:53:14.070 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 21:53:15.022 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 21:53:15.975 +08:00 [INF] thr:76<> loader Requires:INPUT A 4
2025-06-30 21:53:16.427 +08:00 [INF] thr:76<> loader Requires:INPUT A 5
2025-06-30 21:53:16.880 +08:00 [INF] thr:76<> loader Requires:MATS AJ Z 1
2025-06-30 21:53:19.497 +08:00 [INF] thr:76<> loader Requires:SSPP Z 30
2025-06-30 21:53:19.955 +08:00 [INF] thr:76<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-06-30 21:53:19.955 +08:00 [INF] thr:76<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-06-30 21:53:19.955 +08:00 [INF] thr:76<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-06-30 21:53:20.458 +08:00 [INF] thr:76<> Safe ExecuteCommand sucess, plc is 0
2025-06-30 21:53:20.458 +08:00 [INF] thr:76<> loader Requires:RETH
2025-06-30 21:53:25.494 +08:00 [INF] thr:76<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-06-30 21:53:25.495 +08:00 [INF] thr:76<> 执行Aligner角度angle：0
2025-07-01 09:47:40.983 +08:00 [INF] thr:84<> loader Requires:INPUT B 13
2025-07-01 09:47:41.962 +08:00 [INF] thr:41<> 执行Aligner角度angle：0
2025-07-01 09:47:42.968 +08:00 [INF] thr:41<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 09:47:42.969 +08:00 [INF] thr:41<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 09:47:42.969 +08:00 [INF] thr:41<> loader Requires:RGRP
2025-07-01 09:47:43.410 +08:00 [INF] thr:41<> CLeanLoader Group Now C
2025-07-01 09:47:43.410 +08:00 [INF] thr:41<> loader Requires:MATS AJ T
2025-07-01 09:47:43.869 +08:00 [INF] thr:41<> loader Requires:SSP Z 4000
2025-07-01 09:47:44.316 +08:00 [INF] thr:41<> loader Requires:MATS AJ Z 1
2025-07-01 09:47:44.790 +08:00 [INF] thr:41<> loader Requires:MOVR R 226000
2025-07-01 09:47:47.386 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-07-01 09:47:47.836 +08:00 [INF] thr:41<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 09:47:47.836 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 09:47:47.836 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 09:47:48.340 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:47:48.340 +08:00 [INF] thr:41<> loader Requires:INPUT A 6
2025-07-01 09:47:48.793 +08:00 [INF] thr:41<> loader Requires:OUTP 1 0
2025-07-01 09:47:49.241 +08:00 [INF] thr:41<> loader Requires:OUTP 16 1
2025-07-01 09:47:49.688 +08:00 [INF] thr:41<> loader Requires:OUTP 15 1
2025-07-01 09:47:50.136 +08:00 [INF] thr:41<> loader Requires:OUTP 4 1
2025-07-01 09:47:50.583 +08:00 [INF] thr:41<> loader Requires:OUTP 1 1
2025-07-01 09:47:51.029 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:47:51.481 +08:00 [INF] thr:41<> loader Requires:MATS AJ R 0
2025-07-01 09:47:54.730 +08:00 [INF] thr:41<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 09:47:54.730 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 09:47:54.730 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 09:47:55.233 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:47:55.233 +08:00 [INF] thr:41<> loader Requires:SSP Z 1000
2025-07-01 09:47:55.682 +08:00 [INF] thr:41<> loader Requires:MATS AJ Z 0
2025-07-01 09:47:58.293 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-07-01 09:47:58.743 +08:00 [INF] thr:41<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 09:47:58.743 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 09:47:58.743 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 09:47:59.247 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:47:59.247 +08:00 [INF] thr:41<> loader Requires:SSP Z 1000
2025-07-01 09:47:59.695 +08:00 [INF] thr:41<> loader Requires:OUTP 1 0
2025-07-01 09:48:00.143 +08:00 [INF] thr:41<> loader Requires:OUTP 16 0
2025-07-01 09:48:00.588 +08:00 [INF] thr:41<> loader Requires:OUTP 15 1
2025-07-01 09:48:01.037 +08:00 [INF] thr:41<> loader Requires:OUTP 4 0
2025-07-01 09:48:01.484 +08:00 [INF] thr:41<> loader Requires:OUTP 1 1
2025-07-01 09:48:01.930 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:02.884 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:03.838 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:04.791 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:05.743 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:06.697 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:07.147 +08:00 [INF] thr:41<> loader Requires:INPUT A 5
2025-07-01 09:48:07.600 +08:00 [INF] thr:41<> loader Requires:MATS AJ Z 1
2025-07-01 09:48:10.218 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-07-01 09:48:10.668 +08:00 [INF] thr:41<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 09:48:10.668 +08:00 [INF] thr:41<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 09:48:10.668 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 09:48:11.171 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:48:11.171 +08:00 [INF] thr:41<> loader Requires:RETH
2025-07-01 09:48:16.208 +08:00 [INF] thr:41<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 09:48:16.209 +08:00 [INF] thr:41<> AOI is Ready
2025-07-01 09:48:16.272 +08:00 [INF] thr:41<> SetVelocity, Axis:X, velocity:50
2025-07-01 09:48:16.275 +08:00 [INF] thr:41<> SetVelocity, Axis:Y, velocity:50
2025-07-01 09:48:16.312 +08:00 [INF] thr:41<> SetVelocity, Axis:X, velocity:60
2025-07-01 09:48:16.315 +08:00 [INF] thr:41<> SetVelocity, Axis:Y, velocity:60
2025-07-01 09:48:16.332 +08:00 [INF] thr:41<> stage move to position action ok
2025-07-01 09:48:16.332 +08:00 [INF] thr:41<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-01 09:48:16.333 +08:00 [INF] thr:41<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 09:48:16.333 +08:00 [INF] thr:41<> loader Requires:RGRP
2025-07-01 09:48:16.775 +08:00 [INF] thr:41<> CLeanLoader Group Now C
2025-07-01 09:48:16.775 +08:00 [INF] thr:41<> loader Requires:MATS AK T
2025-07-01 09:48:20.309 +08:00 [INF] thr:41<> loader Requires:SSP Z 4000
2025-07-01 09:48:20.754 +08:00 [INF] thr:41<> loader Requires:MATS AK Z 1
2025-07-01 09:48:27.773 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-07-01 09:48:28.223 +08:00 [INF] thr:41<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-01 09:48:28.223 +08:00 [INF] thr:41<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-01 09:48:28.223 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-01 09:48:28.727 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:48:28.727 +08:00 [INF] thr:41<> loader Requires:INPUT A 6
2025-07-01 09:48:29.179 +08:00 [INF] thr:41<> loader Requires:MATS AK R 0
2025-07-01 09:48:34.462 +08:00 [INF] thr:41<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-01 09:48:34.462 +08:00 [INF] thr:41<> Station:InspectStageA,SafeCheck:上片请求
2025-07-01 09:48:34.462 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-01 09:48:34.965 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:48:34.965 +08:00 [INF] thr:41<> loader Requires:SSP Z 1000
2025-07-01 09:48:35.412 +08:00 [INF] thr:41<> loader Requires:MATS AK Z 0
2025-07-01 09:48:38.124 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-07-01 09:48:38.584 +08:00 [INF] thr:41<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-01 09:48:38.584 +08:00 [INF] thr:41<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-01 09:48:38.584 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-01 09:48:39.087 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:48:39.087 +08:00 [INF] thr:41<> loader Requires:SSP Z 1000
2025-07-01 09:48:39.533 +08:00 [INF] thr:41<> loader Requires:OUTP 1 0
2025-07-01 09:48:39.980 +08:00 [INF] thr:41<> loader Requires:OUTP 16 1
2025-07-01 09:48:40.427 +08:00 [INF] thr:41<> loader Requires:OUTP 15 1
2025-07-01 09:48:40.876 +08:00 [INF] thr:41<> loader Requires:OUTP 4 1
2025-07-01 09:48:41.324 +08:00 [INF] thr:41<> loader Requires:OUTP 1 1
2025-07-01 09:48:41.769 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:42.722 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:43.675 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:44.628 +08:00 [INF] thr:41<> loader Requires:INPUT A 4
2025-07-01 09:48:45.080 +08:00 [INF] thr:41<> loader Requires:INPUT A 5
2025-07-01 09:48:45.532 +08:00 [INF] thr:41<> loader Requires:MATS AK Z 1
2025-07-01 09:48:48.256 +08:00 [INF] thr:41<> loader Requires:SSPP Z 30
2025-07-01 09:48:48.704 +08:00 [INF] thr:41<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-01 09:48:48.704 +08:00 [INF] thr:41<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-01 09:48:48.704 +08:00 [INF] thr:41<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-01 09:48:49.711 +08:00 [INF] thr:41<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 09:48:49.711 +08:00 [INF] thr:41<> loader Requires:RETH
2025-07-01 09:48:54.971 +08:00 [INF] thr:41<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-01 09:49:15.620 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:61569
2025-07-01 10:30:19.576 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-07-01 10:37:55.020 +08:00 [INF] thr:20<> Axis:Y, axis id:0,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:38:40.737 +08:00 [INF] thr:20<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-01 10:39:31.840 +08:00 [INF] thr:55<> loader Requires:INPUT B 13
2025-07-01 10:39:32.798 +08:00 [INF] thr:51<> AOI is Ready
2025-07-01 10:39:32.860 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:50
2025-07-01 10:39:32.863 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:50
2025-07-01 10:39:36.289 +08:00 [INF] thr:51<> SetVelocity, Axis:X, velocity:50
2025-07-01 10:39:36.292 +08:00 [INF] thr:51<> SetVelocity, Axis:Y, velocity:100
2025-07-01 10:39:36.309 +08:00 [INF] thr:51<> stage move to position action ok
2025-07-01 10:39:36.309 +08:00 [INF] thr:51<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-01 10:39:36.309 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 10:39:36.310 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-07-01 10:39:36.751 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-07-01 10:39:36.751 +08:00 [INF] thr:51<> loader Requires:MATS AK T
2025-07-01 10:39:37.210 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-07-01 10:39:37.657 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-07-01 10:39:38.129 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-07-01 10:39:38.579 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-01 10:39:38.579 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-01 10:39:38.579 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-01 10:39:39.084 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:39:39.084 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-07-01 10:39:39.537 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-07-01 10:39:39.983 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-07-01 10:39:40.431 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-07-01 10:39:40.887 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-07-01 10:39:41.335 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-07-01 10:39:41.781 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:39:42.232 +08:00 [INF] thr:51<> loader Requires:MATS AK R 0
2025-07-01 10:39:47.514 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-01 10:39:47.514 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片请求
2025-07-01 10:39:47.514 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-01 10:39:48.017 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:39:48.017 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-07-01 10:39:48.465 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 0
2025-07-01 10:39:51.177 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-07-01 10:39:51.647 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-01 10:39:51.647 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-01 10:39:51.647 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-01 10:39:52.150 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:39:52.150 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-07-01 10:39:52.596 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-07-01 10:39:53.041 +08:00 [INF] thr:51<> loader Requires:OUTP 16 0
2025-07-01 10:39:53.489 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-07-01 10:39:53.938 +08:00 [INF] thr:51<> loader Requires:OUTP 4 0
2025-07-01 10:39:54.385 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-07-01 10:39:54.831 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:39:55.784 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:39:56.738 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:39:57.689 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:39:58.644 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:39:59.600 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:40:00.052 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-07-01 10:40:00.505 +08:00 [INF] thr:51<> loader Requires:MATS AK Z 1
2025-07-01 10:40:03.222 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-07-01 10:40:03.673 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-01 10:40:03.673 +08:00 [INF] thr:51<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-01 10:40:03.673 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-01 10:40:04.177 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:40:04.177 +08:00 [INF] thr:51<> loader Requires:RETH
2025-07-01 10:40:09.441 +08:00 [INF] thr:51<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-01 10:40:09.442 +08:00 [INF] thr:51<> 执行Aligner设置初始角度InitialAngle：0
2025-07-01 10:40:09.442 +08:00 [INF] thr:51<> 执行Aligner角度angle：0
2025-07-01 10:40:10.450 +08:00 [INF] thr:51<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 10:40:10.451 +08:00 [INF] thr:51<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 10:40:10.451 +08:00 [INF] thr:51<> loader Requires:RGRP
2025-07-01 10:40:10.895 +08:00 [INF] thr:51<> CLeanLoader Group Now C
2025-07-01 10:40:10.896 +08:00 [INF] thr:51<> loader Requires:MATS AJ T
2025-07-01 10:40:14.436 +08:00 [INF] thr:51<> loader Requires:SSP Z 4000
2025-07-01 10:40:14.885 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 1
2025-07-01 10:40:21.903 +08:00 [INF] thr:51<> loader Requires:MOVR R 226000
2025-07-01 10:40:24.498 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-07-01 10:40:24.949 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 10:40:24.949 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 10:40:24.949 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 10:40:25.453 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:40:25.453 +08:00 [INF] thr:51<> loader Requires:INPUT A 6
2025-07-01 10:40:25.905 +08:00 [INF] thr:51<> loader Requires:MATS AJ R 0
2025-07-01 10:40:29.155 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 10:40:29.155 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 10:40:29.155 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 10:40:29.660 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:40:29.660 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-07-01 10:40:30.107 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 0
2025-07-01 10:40:32.720 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-07-01 10:40:33.169 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 10:40:33.169 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 10:40:33.169 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 10:40:33.672 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:40:33.672 +08:00 [INF] thr:51<> loader Requires:SSP Z 1000
2025-07-01 10:40:34.122 +08:00 [INF] thr:51<> loader Requires:OUTP 1 0
2025-07-01 10:40:34.568 +08:00 [INF] thr:51<> loader Requires:OUTP 16 1
2025-07-01 10:40:35.016 +08:00 [INF] thr:51<> loader Requires:OUTP 15 1
2025-07-01 10:40:35.465 +08:00 [INF] thr:51<> loader Requires:OUTP 4 1
2025-07-01 10:40:35.912 +08:00 [INF] thr:51<> loader Requires:OUTP 1 1
2025-07-01 10:40:36.358 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:40:37.311 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:40:38.267 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:40:39.222 +08:00 [INF] thr:51<> loader Requires:INPUT A 4
2025-07-01 10:40:39.673 +08:00 [INF] thr:51<> loader Requires:INPUT A 5
2025-07-01 10:40:40.127 +08:00 [INF] thr:51<> loader Requires:MATS AJ Z 1
2025-07-01 10:40:42.744 +08:00 [INF] thr:51<> loader Requires:SSPP Z 30
2025-07-01 10:40:43.194 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 10:40:43.194 +08:00 [INF] thr:51<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 10:40:43.194 +08:00 [INF] thr:51<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 10:40:43.697 +08:00 [INF] thr:51<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:40:43.697 +08:00 [INF] thr:51<> loader Requires:RETH
2025-07-01 10:40:48.733 +08:00 [INF] thr:51<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 10:40:48.735 +08:00 [INF] thr:51<> 执行Aligner角度angle：0
2025-07-01 10:42:04.712 +08:00 [INF] thr:31<> loader Requires:INPUT B 13
2025-07-01 10:42:05.718 +08:00 [INF] thr:47<> 执行Aligner角度angle：0
2025-07-01 10:42:06.725 +08:00 [INF] thr:47<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 10:42:06.725 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 10:42:06.725 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-01 10:42:07.166 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-01 10:42:07.166 +08:00 [INF] thr:47<> loader Requires:MATS AJ T
2025-07-01 10:42:07.625 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-01 10:42:08.071 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-01 10:42:08.544 +08:00 [INF] thr:47<> loader Requires:MOVR R 226000
2025-07-01 10:42:11.140 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-01 10:42:11.590 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 10:42:11.590 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 10:42:11.591 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 10:42:12.094 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:42:12.094 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-01 10:42:12.548 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-01 10:42:12.994 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-01 10:42:13.442 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-01 10:42:13.891 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-01 10:42:14.338 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-01 10:42:14.784 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:15.235 +08:00 [INF] thr:47<> loader Requires:MATS AJ R 0
2025-07-01 10:42:18.486 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 10:42:18.486 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 10:42:18.486 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 10:42:18.989 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:42:18.989 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-01 10:42:19.437 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 0
2025-07-01 10:42:22.049 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-01 10:42:22.498 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 10:42:22.498 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 10:42:22.498 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 10:42:23.003 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:42:23.003 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-01 10:42:23.450 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-01 10:42:23.897 +08:00 [INF] thr:47<> loader Requires:OUTP 16 0
2025-07-01 10:42:24.345 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-01 10:42:24.794 +08:00 [INF] thr:47<> loader Requires:OUTP 4 0
2025-07-01 10:42:25.241 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-01 10:42:25.686 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:26.640 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:27.593 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:28.547 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:29.498 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:30.452 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:42:30.904 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-01 10:42:31.357 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-01 10:42:33.982 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-01 10:42:34.433 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 10:42:34.433 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 10:42:34.433 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 10:42:34.937 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:42:34.937 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-01 10:42:39.971 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 10:42:39.973 +08:00 [INF] thr:47<> AOI is Ready
2025-07-01 10:42:40.042 +08:00 [INF] thr:47<> SetVelocity, Axis:X, velocity:50
2025-07-01 10:42:40.045 +08:00 [INF] thr:47<> SetVelocity, Axis:Y, velocity:50
2025-07-01 10:42:40.082 +08:00 [INF] thr:47<> SetVelocity, Axis:X, velocity:50
2025-07-01 10:42:40.085 +08:00 [INF] thr:47<> SetVelocity, Axis:Y, velocity:100
2025-07-01 10:42:40.116 +08:00 [INF] thr:47<> stage move to position action ok
2025-07-01 10:42:40.116 +08:00 [INF] thr:47<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-01 10:42:40.117 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 10:42:40.117 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-01 10:42:40.560 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-01 10:42:40.560 +08:00 [INF] thr:47<> loader Requires:MATS AK T
2025-07-01 10:42:44.101 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-01 10:42:44.550 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 1
2025-07-01 10:42:51.568 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-01 10:42:52.018 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-01 10:42:52.018 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-01 10:42:52.018 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-01 10:42:52.521 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:42:52.521 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-01 10:42:52.975 +08:00 [INF] thr:47<> loader Requires:MATS AK R 0
2025-07-01 10:42:58.257 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-01 10:42:58.257 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片请求
2025-07-01 10:42:58.257 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-01 10:42:58.761 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:42:58.761 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-01 10:42:59.210 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 0
2025-07-01 10:43:01.923 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-01 10:43:02.386 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-01 10:43:02.386 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-01 10:43:02.386 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-01 10:43:02.889 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:43:02.889 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-01 10:43:03.337 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-01 10:43:03.784 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-01 10:43:04.232 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-01 10:43:04.681 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-01 10:43:05.127 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-01 10:43:05.572 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:43:06.527 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:43:07.480 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:43:08.434 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-01 10:43:08.884 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-01 10:43:09.337 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 1
2025-07-01 10:43:12.055 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-01 10:43:12.506 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-01 10:43:12.506 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-01 10:43:12.506 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-01 10:43:13.511 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 10:43:13.511 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-01 10:43:18.776 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-01 10:48:25.776 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:50543
2025-07-01 11:42:22.805 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:55963
2025-07-01 11:49:28.863 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:57008
2025-07-01 13:15:49.978 +08:00 [INF] thr:21<> loader Requires:INPUT B 13
2025-07-01 13:15:51.472 +08:00 [INF] thr:3<> AOI is Ready
2025-07-01 13:15:56.406 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-07-01 13:15:56.414 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-07-01 13:15:59.155 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:60
2025-07-01 13:15:59.162 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:60
2025-07-01 13:15:59.194 +08:00 [INF] thr:3<> stage move to position action ok
2025-07-01 13:15:59.194 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-01 13:15:59.195 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 13:15:59.195 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-01 13:15:59.640 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-01 13:15:59.640 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-07-01 13:16:00.098 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-01 13:16:00.553 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-01 13:16:01.028 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:16:01.481 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-01 13:16:01.481 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-01 13:16:01.481 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-01 13:16:01.983 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:01.983 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-01 13:16:02.437 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 13:16:02.884 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-01 13:16:03.332 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 13:16:03.780 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-01 13:16:04.226 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 13:16:04.672 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:05.124 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-07-01 13:16:10.406 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-01 13:16:10.407 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-07-01 13:16:10.407 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-01 13:16:10.910 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:10.910 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 13:16:11.356 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-07-01 13:16:14.070 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:16:14.537 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-01 13:16:14.537 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-01 13:16:14.537 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-01 13:16:15.041 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:15.041 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 13:16:15.488 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 13:16:15.934 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-01 13:16:16.382 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 13:16:16.831 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-01 13:16:17.278 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 13:16:17.723 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:18.678 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:19.633 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:20.587 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:21.540 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:22.492 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:16:22.943 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-01 13:16:23.398 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-01 13:16:26.115 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:16:26.566 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-01 13:16:26.566 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-01 13:16:26.566 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-01 13:16:27.070 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:27.070 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-01 13:16:32.333 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-01 13:16:32.335 +08:00 [INF] thr:30<> 执行Aligner设置初始角度InitialAngle：0
2025-07-01 13:16:32.335 +08:00 [INF] thr:30<> 执行Aligner角度angle：0
2025-07-01 13:16:33.342 +08:00 [INF] thr:30<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 13:16:33.343 +08:00 [INF] thr:30<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 13:16:33.343 +08:00 [INF] thr:30<> loader Requires:RGRP
2025-07-01 13:16:33.786 +08:00 [INF] thr:30<> CLeanLoader Group Now C
2025-07-01 13:16:33.786 +08:00 [INF] thr:30<> loader Requires:MATS AJ T
2025-07-01 13:16:37.329 +08:00 [INF] thr:30<> loader Requires:SSP Z 4000
2025-07-01 13:16:37.778 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 1
2025-07-01 13:16:44.796 +08:00 [INF] thr:30<> loader Requires:MOVR R 226000
2025-07-01 13:16:47.391 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-01 13:16:47.841 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 13:16:47.841 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 13:16:47.841 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 13:16:48.344 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:48.344 +08:00 [INF] thr:30<> loader Requires:INPUT A 6
2025-07-01 13:16:48.797 +08:00 [INF] thr:30<> loader Requires:MATS AJ R 0
2025-07-01 13:16:52.047 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 13:16:52.048 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 13:16:52.048 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 13:16:52.550 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:52.550 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-01 13:16:52.999 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 0
2025-07-01 13:16:55.612 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-01 13:16:56.062 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 13:16:56.062 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 13:16:56.062 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 13:16:56.566 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:16:56.566 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-01 13:16:57.014 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-01 13:16:57.461 +08:00 [INF] thr:30<> loader Requires:OUTP 16 1
2025-07-01 13:16:57.909 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-01 13:16:58.358 +08:00 [INF] thr:30<> loader Requires:OUTP 4 1
2025-07-01 13:16:58.804 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-01 13:16:59.250 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 13:17:00.203 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 13:17:01.158 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 13:17:02.110 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 13:17:02.563 +08:00 [INF] thr:30<> loader Requires:INPUT A 5
2025-07-01 13:17:03.015 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 1
2025-07-01 13:17:05.632 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-01 13:17:06.083 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 13:17:06.083 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 13:17:06.083 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 13:17:06.587 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:17:06.587 +08:00 [INF] thr:30<> loader Requires:RETH
2025-07-01 13:17:11.621 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 13:17:11.627 +08:00 [INF] thr:30<> 执行Aligner角度angle：0
2025-07-01 13:34:05.249 +08:00 [INF] thr:48<> loader Requires:INPUT B 13
2025-07-01 13:34:06.245 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-01 13:34:07.250 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 13:34:07.251 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 13:34:07.251 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-01 13:34:07.693 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-01 13:34:07.693 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-01 13:34:08.151 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-01 13:34:08.598 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-01 13:34:09.079 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-01 13:34:11.675 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:34:12.125 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 13:34:12.125 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 13:34:12.125 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 13:34:12.627 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:34:12.627 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-01 13:34:13.077 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 13:34:13.525 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-01 13:34:13.972 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 13:34:14.421 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-01 13:34:14.868 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 13:34:15.312 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:15.765 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-01 13:34:19.014 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 13:34:19.014 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 13:34:19.014 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 13:34:19.518 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:34:19.518 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 13:34:19.967 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-01 13:34:22.579 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:34:23.029 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 13:34:23.029 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 13:34:23.029 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 13:34:23.530 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:34:23.530 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 13:34:23.976 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 13:34:24.423 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-01 13:34:24.871 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 13:34:25.320 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-01 13:34:25.766 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 13:34:26.212 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:27.167 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:28.122 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:29.076 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:30.029 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:30.985 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:34:31.437 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-01 13:34:31.890 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-01 13:34:34.507 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:34:34.958 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 13:34:34.958 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 13:34:34.958 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 13:34:35.462 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:34:35.462 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-01 13:34:40.498 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 13:34:40.499 +08:00 [INF] thr:3<> AOI is Ready
2025-07-01 13:34:40.565 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-07-01 13:34:40.568 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-07-01 13:34:40.605 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:60
2025-07-01 13:34:40.608 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:60
2025-07-01 13:34:40.625 +08:00 [INF] thr:3<> stage move to position action ok
2025-07-01 13:34:40.625 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-01 13:34:40.626 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 13:34:40.626 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-01 13:34:41.070 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-01 13:34:41.070 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-07-01 13:34:44.612 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-01 13:34:45.069 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-01 13:34:52.087 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:34:52.537 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-01 13:34:52.537 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-01 13:34:52.537 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-01 13:34:53.041 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:34:53.041 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-01 13:34:53.494 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-07-01 13:34:58.777 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-01 13:34:58.777 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-07-01 13:34:58.777 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-01 13:34:59.280 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:34:59.280 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 13:34:59.727 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-07-01 13:35:02.439 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:35:02.909 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-01 13:35:02.909 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-01 13:35:02.909 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-01 13:35:03.413 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:35:03.413 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 13:35:03.861 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 13:35:04.307 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-01 13:35:04.755 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 13:35:05.203 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-01 13:35:05.651 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 13:35:06.096 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:35:07.050 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:35:08.004 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:35:08.957 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 13:35:09.411 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-01 13:35:09.865 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-01 13:35:12.582 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 13:35:13.032 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-01 13:35:13.033 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-01 13:35:13.033 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-01 13:35:14.037 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 13:35:14.037 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-01 13:35:19.299 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-01 14:47:05.205 +08:00 [INF] thr:80<> loader Requires:INPUT B 13
2025-07-01 14:47:06.669 +08:00 [INF] thr:63<> AOI is Ready
2025-07-01 14:47:11.395 +08:00 [INF] thr:63<> SetVelocity, Axis:X, velocity:50
2025-07-01 14:47:11.402 +08:00 [INF] thr:63<> SetVelocity, Axis:Y, velocity:50
2025-07-01 14:47:16.042 +08:00 [INF] thr:63<> SetVelocity, Axis:X, velocity:8
2025-07-01 14:47:16.050 +08:00 [INF] thr:63<> SetVelocity, Axis:Y, velocity:8
2025-07-01 14:47:16.080 +08:00 [INF] thr:63<> stage move to position action ok
2025-07-01 14:47:16.080 +08:00 [INF] thr:63<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-01 14:47:16.081 +08:00 [INF] thr:63<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 14:47:16.081 +08:00 [INF] thr:63<> loader Requires:RGRP
2025-07-01 14:47:16.524 +08:00 [INF] thr:63<> CLeanLoader Group Now C
2025-07-01 14:47:16.524 +08:00 [INF] thr:63<> loader Requires:MATS AK T
2025-07-01 14:47:16.983 +08:00 [INF] thr:63<> loader Requires:SSP Z 4000
2025-07-01 14:47:17.429 +08:00 [INF] thr:63<> loader Requires:MATS AK Z 1
2025-07-01 14:47:17.902 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 14:47:18.353 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-01 14:47:18.353 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-01 14:47:18.353 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-01 14:47:18.857 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:47:18.857 +08:00 [INF] thr:63<> loader Requires:INPUT A 6
2025-07-01 14:47:19.310 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-01 14:47:19.758 +08:00 [INF] thr:63<> loader Requires:OUTP 16 1
2025-07-01 14:47:20.205 +08:00 [INF] thr:63<> loader Requires:OUTP 15 1
2025-07-01 14:47:20.653 +08:00 [INF] thr:63<> loader Requires:OUTP 4 1
2025-07-01 14:47:21.101 +08:00 [INF] thr:63<> loader Requires:OUTP 1 1
2025-07-01 14:47:21.546 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:21.999 +08:00 [INF] thr:63<> loader Requires:MATS AK R 0
2025-07-01 14:47:27.280 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-01 14:47:27.280 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片请求
2025-07-01 14:47:27.280 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-01 14:47:27.782 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:47:27.782 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-01 14:47:28.230 +08:00 [INF] thr:63<> loader Requires:MATS AK Z 0
2025-07-01 14:47:30.942 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 14:47:31.403 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-01 14:47:31.403 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-01 14:47:31.403 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-01 14:47:31.905 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:47:31.905 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-01 14:47:32.356 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-01 14:47:32.802 +08:00 [INF] thr:63<> loader Requires:OUTP 16 0
2025-07-01 14:47:33.249 +08:00 [INF] thr:63<> loader Requires:OUTP 15 1
2025-07-01 14:47:33.698 +08:00 [INF] thr:63<> loader Requires:OUTP 4 0
2025-07-01 14:47:34.145 +08:00 [INF] thr:63<> loader Requires:OUTP 1 1
2025-07-01 14:47:34.591 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:35.545 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:36.499 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:37.452 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:38.403 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:39.357 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 14:47:39.809 +08:00 [INF] thr:63<> loader Requires:INPUT A 5
2025-07-01 14:47:40.261 +08:00 [INF] thr:63<> loader Requires:MATS AK Z 1
2025-07-01 14:47:42.979 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 14:47:43.429 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-01 14:47:43.429 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-01 14:47:43.429 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-01 14:47:43.934 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:47:43.934 +08:00 [INF] thr:63<> loader Requires:RETH
2025-07-01 14:47:49.196 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-01 14:47:49.197 +08:00 [INF] thr:3<> 执行Aligner设置初始角度InitialAngle：0
2025-07-01 14:47:49.197 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-01 14:47:50.201 +08:00 [INF] thr:3<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 14:47:50.202 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 14:47:50.202 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-01 14:47:50.647 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-01 14:47:50.647 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-01 14:47:54.189 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-01 14:47:54.638 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-01 14:48:01.655 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-01 14:48:04.250 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 14:48:04.701 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 14:48:04.701 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 14:48:04.701 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 14:48:05.204 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:48:05.204 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-01 14:48:05.660 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-01 14:48:08.908 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 14:48:08.908 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 14:48:08.908 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 14:48:09.412 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:48:09.412 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 14:48:09.860 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-01 14:48:12.472 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 14:48:12.921 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 14:48:12.922 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 14:48:12.922 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 14:48:13.425 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:48:13.425 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 14:48:13.874 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 14:48:14.321 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-01 14:48:14.768 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 14:48:15.216 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-01 14:48:15.664 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 14:48:16.109 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 14:48:17.062 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 14:48:18.016 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 14:48:18.969 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 14:48:19.420 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-01 14:48:19.874 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-01 14:48:22.491 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 14:48:22.941 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 14:48:22.941 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 14:48:22.941 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 14:48:23.444 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:48:23.444 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-01 14:48:28.481 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 14:48:28.482 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-01 14:49:47.581 +08:00 [INF] thr:29<> loader Requires:INPUT B 13
2025-07-01 14:49:48.560 +08:00 [INF] thr:23<> 执行Aligner角度angle：0
2025-07-01 14:49:49.567 +08:00 [INF] thr:23<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 14:49:49.568 +08:00 [INF] thr:23<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 14:49:49.568 +08:00 [INF] thr:23<> loader Requires:RGRP
2025-07-01 14:49:50.013 +08:00 [INF] thr:23<> CLeanLoader Group Now C
2025-07-01 14:49:50.013 +08:00 [INF] thr:23<> loader Requires:MATS AJ T
2025-07-01 14:49:50.471 +08:00 [INF] thr:23<> loader Requires:SSP Z 4000
2025-07-01 14:49:50.918 +08:00 [INF] thr:23<> loader Requires:MATS AJ Z 1
2025-07-01 14:49:51.392 +08:00 [INF] thr:23<> loader Requires:MOVR R 226000
2025-07-01 14:49:53.988 +08:00 [INF] thr:23<> loader Requires:SSPP Z 30
2025-07-01 14:49:54.439 +08:00 [INF] thr:23<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 14:49:54.439 +08:00 [INF] thr:23<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 14:49:54.439 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 14:49:54.940 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:49:54.940 +08:00 [INF] thr:23<> loader Requires:INPUT A 6
2025-07-01 14:49:55.391 +08:00 [INF] thr:23<> loader Requires:OUTP 1 0
2025-07-01 14:49:55.838 +08:00 [INF] thr:23<> loader Requires:OUTP 16 1
2025-07-01 14:49:56.285 +08:00 [INF] thr:23<> loader Requires:OUTP 15 1
2025-07-01 14:49:56.734 +08:00 [INF] thr:23<> loader Requires:OUTP 4 1
2025-07-01 14:49:57.180 +08:00 [INF] thr:23<> loader Requires:OUTP 1 1
2025-07-01 14:49:57.627 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:49:58.078 +08:00 [INF] thr:23<> loader Requires:MATS AJ R 0
2025-07-01 14:50:01.327 +08:00 [INF] thr:23<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 14:50:01.327 +08:00 [INF] thr:23<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 14:50:01.327 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 14:50:01.831 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:01.831 +08:00 [INF] thr:23<> loader Requires:SSP Z 1000
2025-07-01 14:50:02.279 +08:00 [INF] thr:23<> loader Requires:MATS AJ Z 0
2025-07-01 14:50:04.892 +08:00 [INF] thr:23<> loader Requires:SSPP Z 30
2025-07-01 14:50:05.341 +08:00 [INF] thr:23<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 14:50:05.341 +08:00 [INF] thr:23<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 14:50:05.341 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 14:50:05.844 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:05.844 +08:00 [INF] thr:23<> loader Requires:SSP Z 1000
2025-07-01 14:50:06.293 +08:00 [INF] thr:23<> loader Requires:OUTP 1 0
2025-07-01 14:50:06.740 +08:00 [INF] thr:23<> loader Requires:OUTP 16 0
2025-07-01 14:50:07.186 +08:00 [INF] thr:23<> loader Requires:OUTP 15 1
2025-07-01 14:50:07.635 +08:00 [INF] thr:23<> loader Requires:OUTP 4 0
2025-07-01 14:50:08.081 +08:00 [INF] thr:23<> loader Requires:OUTP 1 1
2025-07-01 14:50:08.528 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:09.482 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:10.435 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:11.387 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:12.340 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:13.293 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:13.744 +08:00 [INF] thr:23<> loader Requires:INPUT A 5
2025-07-01 14:50:14.198 +08:00 [INF] thr:23<> loader Requires:MATS AJ Z 1
2025-07-01 14:50:16.815 +08:00 [INF] thr:23<> loader Requires:SSPP Z 30
2025-07-01 14:50:17.266 +08:00 [INF] thr:23<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 14:50:17.266 +08:00 [INF] thr:23<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 14:50:17.266 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 14:50:17.768 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:17.768 +08:00 [INF] thr:23<> loader Requires:RETH
2025-07-01 14:50:22.805 +08:00 [INF] thr:23<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 14:50:22.807 +08:00 [INF] thr:23<> AOI is Ready
2025-07-01 14:50:22.871 +08:00 [INF] thr:23<> SetVelocity, Axis:X, velocity:50
2025-07-01 14:50:22.874 +08:00 [INF] thr:23<> SetVelocity, Axis:Y, velocity:50
2025-07-01 14:50:22.911 +08:00 [INF] thr:23<> SetVelocity, Axis:X, velocity:8
2025-07-01 14:50:22.918 +08:00 [INF] thr:23<> SetVelocity, Axis:Y, velocity:8
2025-07-01 14:50:22.951 +08:00 [INF] thr:23<> stage move to position action ok
2025-07-01 14:50:22.951 +08:00 [INF] thr:23<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-01 14:50:22.952 +08:00 [INF] thr:23<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 14:50:22.953 +08:00 [INF] thr:23<> loader Requires:RGRP
2025-07-01 14:50:23.396 +08:00 [INF] thr:23<> CLeanLoader Group Now C
2025-07-01 14:50:23.396 +08:00 [INF] thr:23<> loader Requires:MATS AK T
2025-07-01 14:50:26.935 +08:00 [INF] thr:23<> loader Requires:SSP Z 4000
2025-07-01 14:50:27.385 +08:00 [INF] thr:23<> loader Requires:MATS AK Z 1
2025-07-01 14:50:34.402 +08:00 [INF] thr:23<> loader Requires:SSPP Z 30
2025-07-01 14:50:34.852 +08:00 [INF] thr:23<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-01 14:50:34.852 +08:00 [INF] thr:23<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-01 14:50:34.852 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-01 14:50:35.355 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:35.355 +08:00 [INF] thr:23<> loader Requires:INPUT A 6
2025-07-01 14:50:35.809 +08:00 [INF] thr:23<> loader Requires:MATS AK R 0
2025-07-01 14:50:41.092 +08:00 [INF] thr:23<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-01 14:50:41.092 +08:00 [INF] thr:23<> Station:InspectStageA,SafeCheck:上片请求
2025-07-01 14:50:41.092 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-01 14:50:41.594 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:41.594 +08:00 [INF] thr:23<> loader Requires:SSP Z 1000
2025-07-01 14:50:42.042 +08:00 [INF] thr:23<> loader Requires:MATS AK Z 0
2025-07-01 14:50:44.755 +08:00 [INF] thr:23<> loader Requires:SSPP Z 30
2025-07-01 14:50:45.224 +08:00 [INF] thr:23<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-01 14:50:45.224 +08:00 [INF] thr:23<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-01 14:50:45.224 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-01 14:50:45.728 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:45.729 +08:00 [INF] thr:23<> loader Requires:SSP Z 1000
2025-07-01 14:50:46.176 +08:00 [INF] thr:23<> loader Requires:OUTP 1 0
2025-07-01 14:50:46.623 +08:00 [INF] thr:23<> loader Requires:OUTP 16 1
2025-07-01 14:50:47.070 +08:00 [INF] thr:23<> loader Requires:OUTP 15 1
2025-07-01 14:50:47.519 +08:00 [INF] thr:23<> loader Requires:OUTP 4 1
2025-07-01 14:50:47.966 +08:00 [INF] thr:23<> loader Requires:OUTP 1 1
2025-07-01 14:50:48.412 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:49.365 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:50.318 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:51.272 +08:00 [INF] thr:23<> loader Requires:INPUT A 4
2025-07-01 14:50:51.724 +08:00 [INF] thr:23<> loader Requires:INPUT A 5
2025-07-01 14:50:52.176 +08:00 [INF] thr:23<> loader Requires:MATS AK Z 1
2025-07-01 14:50:54.893 +08:00 [INF] thr:23<> loader Requires:SSPP Z 30
2025-07-01 14:50:55.343 +08:00 [INF] thr:23<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-01 14:50:55.343 +08:00 [INF] thr:23<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-01 14:50:55.343 +08:00 [INF] thr:23<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-01 14:50:56.349 +08:00 [INF] thr:23<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 14:50:56.349 +08:00 [INF] thr:23<> loader Requires:RETH
2025-07-01 14:51:01.610 +08:00 [INF] thr:23<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-01 15:54:46.777 +08:00 [INF] thr:5<> loader Requires:INPUT B 13
2025-07-01 15:54:48.240 +08:00 [INF] thr:63<> AOI is Ready
2025-07-01 15:54:52.472 +08:00 [INF] thr:63<> SetVelocity, Axis:X, velocity:50
2025-07-01 15:54:52.475 +08:00 [INF] thr:63<> SetVelocity, Axis:Y, velocity:50
2025-07-01 15:54:56.978 +08:00 [INF] thr:63<> SetVelocity, Axis:X, velocity:8
2025-07-01 15:54:56.981 +08:00 [INF] thr:63<> SetVelocity, Axis:Y, velocity:8
2025-07-01 15:54:56.997 +08:00 [INF] thr:63<> stage move to position action ok
2025-07-01 15:54:56.998 +08:00 [INF] thr:63<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-01 15:54:56.998 +08:00 [INF] thr:63<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 15:54:56.998 +08:00 [INF] thr:63<> loader Requires:RGRP
2025-07-01 15:54:57.441 +08:00 [INF] thr:63<> CLeanLoader Group Now C
2025-07-01 15:54:57.441 +08:00 [INF] thr:63<> loader Requires:MATS AK T
2025-07-01 15:54:57.900 +08:00 [INF] thr:63<> loader Requires:SSP Z 4000
2025-07-01 15:54:58.346 +08:00 [INF] thr:63<> loader Requires:MATS AK Z 1
2025-07-01 15:54:58.820 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 15:54:59.270 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-01 15:54:59.270 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-01 15:54:59.270 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-01 15:54:59.772 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:54:59.772 +08:00 [INF] thr:63<> loader Requires:INPUT A 6
2025-07-01 15:55:00.226 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-01 15:55:00.673 +08:00 [INF] thr:63<> loader Requires:OUTP 16 1
2025-07-01 15:55:01.122 +08:00 [INF] thr:63<> loader Requires:OUTP 15 1
2025-07-01 15:55:01.570 +08:00 [INF] thr:63<> loader Requires:OUTP 4 1
2025-07-01 15:55:02.017 +08:00 [INF] thr:63<> loader Requires:OUTP 1 1
2025-07-01 15:55:02.461 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:02.914 +08:00 [INF] thr:63<> loader Requires:MATS AK R 0
2025-07-01 15:55:08.196 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-01 15:55:08.196 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片请求
2025-07-01 15:55:08.196 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-01 15:55:08.701 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:55:08.701 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-01 15:55:09.151 +08:00 [INF] thr:63<> loader Requires:MATS AK Z 0
2025-07-01 15:55:11.863 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 15:55:12.330 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-01 15:55:12.330 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-01 15:55:12.330 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-01 15:55:12.833 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:55:12.833 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-01 15:55:13.281 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-01 15:55:13.727 +08:00 [INF] thr:63<> loader Requires:OUTP 16 0
2025-07-01 15:55:14.182 +08:00 [INF] thr:63<> loader Requires:OUTP 15 1
2025-07-01 15:55:14.631 +08:00 [INF] thr:63<> loader Requires:OUTP 4 0
2025-07-01 15:55:15.078 +08:00 [INF] thr:63<> loader Requires:OUTP 1 1
2025-07-01 15:55:15.524 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:16.479 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:17.430 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:18.384 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:19.337 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:20.291 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:20.742 +08:00 [INF] thr:63<> loader Requires:INPUT A 5
2025-07-01 15:55:21.194 +08:00 [INF] thr:63<> loader Requires:MATS AK Z 1
2025-07-01 15:55:23.912 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 15:55:24.364 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-01 15:55:24.364 +08:00 [INF] thr:63<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-01 15:55:24.364 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-01 15:55:24.868 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:55:24.868 +08:00 [INF] thr:63<> loader Requires:RETH
2025-07-01 15:55:30.130 +08:00 [INF] thr:63<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-01 15:55:30.131 +08:00 [INF] thr:63<> 执行Aligner设置初始角度InitialAngle：0
2025-07-01 15:55:30.131 +08:00 [INF] thr:63<> 执行Aligner角度angle：0
2025-07-01 15:55:31.137 +08:00 [INF] thr:63<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 15:55:31.138 +08:00 [INF] thr:63<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 15:55:31.138 +08:00 [INF] thr:63<> loader Requires:RGRP
2025-07-01 15:55:31.581 +08:00 [INF] thr:63<> CLeanLoader Group Now C
2025-07-01 15:55:31.581 +08:00 [INF] thr:63<> loader Requires:MATS AJ T
2025-07-01 15:55:35.123 +08:00 [INF] thr:63<> loader Requires:SSP Z 4000
2025-07-01 15:55:35.572 +08:00 [INF] thr:63<> loader Requires:MATS AJ Z 1
2025-07-01 15:55:42.589 +08:00 [INF] thr:63<> loader Requires:MOVR R 226000
2025-07-01 15:55:45.185 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 15:55:45.636 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 15:55:45.636 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 15:55:45.636 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 15:55:46.139 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:55:46.139 +08:00 [INF] thr:63<> loader Requires:INPUT A 6
2025-07-01 15:55:46.593 +08:00 [INF] thr:63<> loader Requires:MATS AJ R 0
2025-07-01 15:55:49.843 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 15:55:49.843 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 15:55:49.843 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 15:55:50.345 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:55:50.345 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-01 15:55:50.793 +08:00 [INF] thr:63<> loader Requires:MATS AJ Z 0
2025-07-01 15:55:53.406 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 15:55:53.856 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 15:55:53.856 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 15:55:53.856 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 15:55:54.359 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:55:54.359 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-01 15:55:54.809 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-01 15:55:55.255 +08:00 [INF] thr:63<> loader Requires:OUTP 16 1
2025-07-01 15:55:55.703 +08:00 [INF] thr:63<> loader Requires:OUTP 15 1
2025-07-01 15:55:56.159 +08:00 [INF] thr:63<> loader Requires:OUTP 4 1
2025-07-01 15:55:56.606 +08:00 [INF] thr:63<> loader Requires:OUTP 1 1
2025-07-01 15:55:57.052 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:58.006 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:58.959 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:55:59.915 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-01 15:56:00.367 +08:00 [INF] thr:63<> loader Requires:INPUT A 5
2025-07-01 15:56:00.820 +08:00 [INF] thr:63<> loader Requires:MATS AJ Z 1
2025-07-01 15:56:03.437 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-01 15:56:03.888 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 15:56:03.888 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 15:56:03.888 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 15:56:04.392 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 15:56:04.392 +08:00 [INF] thr:63<> loader Requires:RETH
2025-07-01 15:56:09.427 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 15:56:09.428 +08:00 [INF] thr:63<> 执行Aligner角度angle：0
2025-07-01 16:02:32.961 +08:00 [INF] thr:37<> loader Requires:INPUT B 13
2025-07-01 16:02:33.943 +08:00 [INF] thr:54<> 执行Aligner角度angle：0
2025-07-01 16:02:34.950 +08:00 [INF] thr:54<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 16:02:34.951 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 16:02:34.951 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-07-01 16:02:35.394 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-07-01 16:02:35.394 +08:00 [INF] thr:54<> loader Requires:MATS AJ T
2025-07-01 16:02:35.853 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-07-01 16:02:36.300 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-07-01 16:02:36.773 +08:00 [INF] thr:54<> loader Requires:MOVR R 226000
2025-07-01 16:02:39.369 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-07-01 16:02:39.819 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 16:02:39.819 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 16:02:39.819 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 16:02:40.323 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:02:40.323 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-07-01 16:02:40.777 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-07-01 16:02:41.222 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-07-01 16:02:41.670 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-07-01 16:02:42.118 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-07-01 16:02:42.566 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-07-01 16:02:43.012 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:43.463 +08:00 [INF] thr:54<> loader Requires:MATS AJ R 0
2025-07-01 16:02:46.714 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 16:02:46.714 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 16:02:46.714 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 16:02:47.216 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:02:47.216 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-07-01 16:02:47.664 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 0
2025-07-01 16:02:50.277 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-07-01 16:02:50.726 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 16:02:50.726 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 16:02:50.726 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 16:02:51.230 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:02:51.230 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-07-01 16:02:51.677 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-07-01 16:02:52.125 +08:00 [INF] thr:54<> loader Requires:OUTP 16 0
2025-07-01 16:02:52.572 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-07-01 16:02:53.020 +08:00 [INF] thr:54<> loader Requires:OUTP 4 0
2025-07-01 16:02:53.467 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-07-01 16:02:53.912 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:54.867 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:55.820 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:56.774 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:57.725 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:58.679 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:02:59.131 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-07-01 16:02:59.583 +08:00 [INF] thr:54<> loader Requires:MATS AJ Z 1
2025-07-01 16:03:02.200 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-07-01 16:03:02.651 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 16:03:02.651 +08:00 [INF] thr:54<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 16:03:02.651 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 16:03:03.156 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:03:03.156 +08:00 [INF] thr:54<> loader Requires:RETH
2025-07-01 16:03:08.190 +08:00 [INF] thr:54<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 16:03:08.192 +08:00 [INF] thr:54<> AOI is Ready
2025-07-01 16:03:08.254 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:50
2025-07-01 16:03:08.257 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:50
2025-07-01 16:03:08.292 +08:00 [INF] thr:54<> SetVelocity, Axis:X, velocity:8
2025-07-01 16:03:08.295 +08:00 [INF] thr:54<> SetVelocity, Axis:Y, velocity:8
2025-07-01 16:03:08.312 +08:00 [INF] thr:54<> stage move to position action ok
2025-07-01 16:03:08.312 +08:00 [INF] thr:54<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-01 16:03:08.312 +08:00 [INF] thr:54<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 16:03:08.312 +08:00 [INF] thr:54<> loader Requires:RGRP
2025-07-01 16:03:08.754 +08:00 [INF] thr:54<> CLeanLoader Group Now C
2025-07-01 16:03:08.754 +08:00 [INF] thr:54<> loader Requires:MATS AK T
2025-07-01 16:03:12.296 +08:00 [INF] thr:54<> loader Requires:SSP Z 4000
2025-07-01 16:03:12.745 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-07-01 16:03:19.763 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-07-01 16:03:20.212 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-01 16:03:20.212 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-01 16:03:20.212 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-01 16:03:20.717 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:03:20.717 +08:00 [INF] thr:54<> loader Requires:INPUT A 6
2025-07-01 16:03:21.170 +08:00 [INF] thr:54<> loader Requires:MATS AK R 0
2025-07-01 16:03:26.453 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-01 16:03:26.453 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片请求
2025-07-01 16:03:26.453 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-01 16:03:26.956 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:03:26.956 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-07-01 16:03:27.403 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 0
2025-07-01 16:03:30.116 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-07-01 16:03:30.585 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-01 16:03:30.585 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-01 16:03:30.585 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-01 16:03:31.089 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:03:31.089 +08:00 [INF] thr:54<> loader Requires:SSP Z 1000
2025-07-01 16:03:31.538 +08:00 [INF] thr:54<> loader Requires:OUTP 1 0
2025-07-01 16:03:31.984 +08:00 [INF] thr:54<> loader Requires:OUTP 16 1
2025-07-01 16:03:32.432 +08:00 [INF] thr:54<> loader Requires:OUTP 15 1
2025-07-01 16:03:32.880 +08:00 [INF] thr:54<> loader Requires:OUTP 4 1
2025-07-01 16:03:33.327 +08:00 [INF] thr:54<> loader Requires:OUTP 1 1
2025-07-01 16:03:33.773 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:03:34.726 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:03:35.680 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:03:36.633 +08:00 [INF] thr:54<> loader Requires:INPUT A 4
2025-07-01 16:03:37.084 +08:00 [INF] thr:54<> loader Requires:INPUT A 5
2025-07-01 16:03:37.537 +08:00 [INF] thr:54<> loader Requires:MATS AK Z 1
2025-07-01 16:03:40.255 +08:00 [INF] thr:54<> loader Requires:SSPP Z 30
2025-07-01 16:03:40.705 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-01 16:03:40.705 +08:00 [INF] thr:54<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-01 16:03:40.705 +08:00 [INF] thr:54<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-01 16:03:41.712 +08:00 [INF] thr:54<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 16:03:41.712 +08:00 [INF] thr:54<> loader Requires:RETH
2025-07-01 16:03:46.975 +08:00 [INF] thr:54<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-01 20:57:20.377 +08:00 [INF] thr:38<> loader Requires:INPUT B 13
2025-07-01 20:57:21.838 +08:00 [INF] thr:61<> AOI is Ready
2025-07-01 20:57:29.756 +08:00 [INF] thr:61<> SetVelocity, Axis:X, velocity:50
2025-07-01 20:57:29.764 +08:00 [INF] thr:61<> SetVelocity, Axis:Y, velocity:50
2025-07-01 20:57:33.530 +08:00 [INF] thr:61<> SetVelocity, Axis:X, velocity:8
2025-07-01 20:57:33.533 +08:00 [INF] thr:61<> SetVelocity, Axis:Y, velocity:8
2025-07-01 20:57:33.549 +08:00 [INF] thr:61<> stage move to position action ok
2025-07-01 20:57:33.550 +08:00 [INF] thr:61<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-01 20:57:33.550 +08:00 [INF] thr:61<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 20:57:33.550 +08:00 [INF] thr:61<> loader Requires:RGRP
2025-07-01 20:57:33.994 +08:00 [INF] thr:61<> CLeanLoader Group Now C
2025-07-01 20:57:33.995 +08:00 [INF] thr:61<> loader Requires:MATS AK T
2025-07-01 20:57:34.453 +08:00 [INF] thr:61<> loader Requires:SSP Z 4000
2025-07-01 20:57:34.901 +08:00 [INF] thr:61<> loader Requires:MATS AK Z 1
2025-07-01 20:57:35.374 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-01 20:57:35.824 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-01 20:57:35.824 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-01 20:57:35.824 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-01 20:57:36.327 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:57:36.327 +08:00 [INF] thr:61<> loader Requires:INPUT A 6
2025-07-01 20:57:36.781 +08:00 [INF] thr:61<> loader Requires:OUTP 1 0
2025-07-01 20:57:37.228 +08:00 [INF] thr:61<> loader Requires:OUTP 16 1
2025-07-01 20:57:37.675 +08:00 [INF] thr:61<> loader Requires:OUTP 15 1
2025-07-01 20:57:38.124 +08:00 [INF] thr:61<> loader Requires:OUTP 4 1
2025-07-01 20:57:38.571 +08:00 [INF] thr:61<> loader Requires:OUTP 1 1
2025-07-01 20:57:39.017 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:39.470 +08:00 [INF] thr:61<> loader Requires:MATS AK R 0
2025-07-01 20:57:44.751 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-01 20:57:44.751 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:下片请求
2025-07-01 20:57:44.751 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-01 20:57:45.254 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:57:45.254 +08:00 [INF] thr:61<> loader Requires:SSP Z 1000
2025-07-01 20:57:45.700 +08:00 [INF] thr:61<> loader Requires:MATS AK Z 0
2025-07-01 20:57:48.414 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-01 20:57:48.885 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-01 20:57:48.885 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-01 20:57:48.885 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-01 20:57:49.389 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:57:49.389 +08:00 [INF] thr:61<> loader Requires:SSP Z 1000
2025-07-01 20:57:49.835 +08:00 [INF] thr:61<> loader Requires:OUTP 1 0
2025-07-01 20:57:50.282 +08:00 [INF] thr:61<> loader Requires:OUTP 16 0
2025-07-01 20:57:50.730 +08:00 [INF] thr:61<> loader Requires:OUTP 15 1
2025-07-01 20:57:51.177 +08:00 [INF] thr:61<> loader Requires:OUTP 4 0
2025-07-01 20:57:51.624 +08:00 [INF] thr:61<> loader Requires:OUTP 1 1
2025-07-01 20:57:52.070 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:53.024 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:53.978 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:54.931 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:55.885 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:56.836 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-01 20:57:57.288 +08:00 [INF] thr:61<> loader Requires:INPUT A 5
2025-07-01 20:57:57.743 +08:00 [INF] thr:61<> loader Requires:MATS AK Z 1
2025-07-01 20:58:00.460 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-01 20:58:00.910 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-01 20:58:00.910 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-01 20:58:00.910 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-01 20:58:01.413 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:58:01.413 +08:00 [INF] thr:61<> loader Requires:RETH
2025-07-01 20:58:06.677 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-01 20:58:06.679 +08:00 [INF] thr:30<> 执行Aligner设置初始角度InitialAngle：0
2025-07-01 20:58:06.679 +08:00 [INF] thr:30<> 执行Aligner角度angle：0
2025-07-01 20:58:07.685 +08:00 [INF] thr:30<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 20:58:07.685 +08:00 [INF] thr:30<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 20:58:07.686 +08:00 [INF] thr:30<> loader Requires:RGRP
2025-07-01 20:58:08.128 +08:00 [INF] thr:30<> CLeanLoader Group Now C
2025-07-01 20:58:08.128 +08:00 [INF] thr:30<> loader Requires:MATS AJ T
2025-07-01 20:58:11.671 +08:00 [INF] thr:30<> loader Requires:SSP Z 4000
2025-07-01 20:58:12.119 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 1
2025-07-01 20:58:19.138 +08:00 [INF] thr:30<> loader Requires:MOVR R 226000
2025-07-01 20:58:21.733 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-01 20:58:22.183 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 20:58:22.183 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 20:58:22.183 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 20:58:22.686 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:58:22.687 +08:00 [INF] thr:30<> loader Requires:INPUT A 6
2025-07-01 20:58:23.141 +08:00 [INF] thr:30<> loader Requires:MATS AJ R 0
2025-07-01 20:58:26.391 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 20:58:26.391 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 20:58:26.391 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 20:58:26.894 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:58:26.894 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-01 20:58:27.342 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 0
2025-07-01 20:58:29.955 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-01 20:58:30.403 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 20:58:30.403 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 20:58:30.403 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 20:58:30.906 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:58:30.907 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-01 20:58:31.357 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-01 20:58:31.804 +08:00 [INF] thr:30<> loader Requires:OUTP 16 1
2025-07-01 20:58:32.252 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-01 20:58:32.699 +08:00 [INF] thr:30<> loader Requires:OUTP 4 1
2025-07-01 20:58:33.145 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-01 20:58:33.592 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 20:58:34.544 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 20:58:35.498 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 20:58:36.451 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-01 20:58:36.902 +08:00 [INF] thr:30<> loader Requires:INPUT A 5
2025-07-01 20:58:37.356 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 1
2025-07-01 20:58:39.973 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-01 20:58:40.424 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 20:58:40.424 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 20:58:40.424 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 20:58:40.926 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 20:58:40.926 +08:00 [INF] thr:30<> loader Requires:RETH
2025-07-01 20:58:45.963 +08:00 [INF] thr:30<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 20:58:45.964 +08:00 [INF] thr:30<> 执行Aligner角度angle：0
2025-07-02 09:07:45.480 +08:00 [INF] thr:10<> loader Requires:INPUT B 13
2025-07-02 09:07:46.454 +08:00 [INF] thr:61<> 执行Aligner角度angle：0
2025-07-02 09:07:47.460 +08:00 [INF] thr:61<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-02 09:07:47.461 +08:00 [INF] thr:61<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 09:07:47.461 +08:00 [INF] thr:61<> loader Requires:RGRP
2025-07-02 09:07:47.903 +08:00 [INF] thr:61<> CLeanLoader Group Now C
2025-07-02 09:07:47.903 +08:00 [INF] thr:61<> loader Requires:MATS AJ T
2025-07-02 09:07:48.362 +08:00 [INF] thr:61<> loader Requires:SSP Z 4000
2025-07-02 09:07:48.809 +08:00 [INF] thr:61<> loader Requires:MATS AJ Z 1
2025-07-02 09:07:49.281 +08:00 [INF] thr:61<> loader Requires:MOVR R 226000
2025-07-02 09:07:51.877 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-02 09:07:52.328 +08:00 [INF] thr:61<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-02 09:07:52.328 +08:00 [INF] thr:61<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-02 09:07:52.328 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-02 09:07:52.831 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:07:52.831 +08:00 [INF] thr:61<> loader Requires:INPUT A 6
2025-07-02 09:07:53.285 +08:00 [INF] thr:61<> loader Requires:OUTP 1 0
2025-07-02 09:07:53.732 +08:00 [INF] thr:61<> loader Requires:OUTP 16 1
2025-07-02 09:07:54.180 +08:00 [INF] thr:61<> loader Requires:OUTP 15 1
2025-07-02 09:07:54.627 +08:00 [INF] thr:61<> loader Requires:OUTP 4 1
2025-07-02 09:07:55.073 +08:00 [INF] thr:61<> loader Requires:OUTP 1 1
2025-07-02 09:07:55.520 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:07:55.972 +08:00 [INF] thr:61<> loader Requires:MATS AJ R 0
2025-07-02 09:07:59.221 +08:00 [INF] thr:61<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-02 09:07:59.221 +08:00 [INF] thr:61<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-02 09:07:59.221 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-02 09:07:59.725 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:07:59.725 +08:00 [INF] thr:61<> loader Requires:SSP Z 1000
2025-07-02 09:08:00.174 +08:00 [INF] thr:61<> loader Requires:MATS AJ Z 0
2025-07-02 09:08:02.787 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-02 09:08:03.235 +08:00 [INF] thr:61<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-02 09:08:03.235 +08:00 [INF] thr:61<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-02 09:08:03.235 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-02 09:08:03.737 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:08:03.737 +08:00 [INF] thr:61<> loader Requires:SSP Z 1000
2025-07-02 09:08:04.183 +08:00 [INF] thr:61<> loader Requires:OUTP 1 0
2025-07-02 09:08:04.630 +08:00 [INF] thr:61<> loader Requires:OUTP 16 0
2025-07-02 09:08:05.077 +08:00 [INF] thr:61<> loader Requires:OUTP 15 1
2025-07-02 09:08:05.525 +08:00 [INF] thr:61<> loader Requires:OUTP 4 0
2025-07-02 09:08:05.972 +08:00 [INF] thr:61<> loader Requires:OUTP 1 1
2025-07-02 09:08:06.418 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:07.375 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:08.329 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:09.282 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:10.237 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:11.193 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:11.644 +08:00 [INF] thr:61<> loader Requires:INPUT A 5
2025-07-02 09:08:12.097 +08:00 [INF] thr:61<> loader Requires:MATS AJ Z 1
2025-07-02 09:08:14.714 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-02 09:08:15.165 +08:00 [INF] thr:61<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-02 09:08:15.165 +08:00 [INF] thr:61<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-02 09:08:15.165 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-02 09:08:15.670 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:08:15.670 +08:00 [INF] thr:61<> loader Requires:RETH
2025-07-02 09:08:20.703 +08:00 [INF] thr:61<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-02 09:08:20.705 +08:00 [INF] thr:61<> AOI is Ready
2025-07-02 09:08:20.770 +08:00 [INF] thr:61<> SetVelocity, Axis:X, velocity:50
2025-07-02 09:08:20.773 +08:00 [INF] thr:61<> SetVelocity, Axis:Y, velocity:50
2025-07-02 09:08:20.808 +08:00 [INF] thr:61<> SetVelocity, Axis:X, velocity:8
2025-07-02 09:08:20.811 +08:00 [INF] thr:61<> SetVelocity, Axis:Y, velocity:8
2025-07-02 09:08:20.827 +08:00 [INF] thr:61<> stage move to position action ok
2025-07-02 09:08:20.828 +08:00 [INF] thr:61<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-02 09:08:20.828 +08:00 [INF] thr:61<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 09:08:20.828 +08:00 [INF] thr:61<> loader Requires:RGRP
2025-07-02 09:08:21.272 +08:00 [INF] thr:61<> CLeanLoader Group Now C
2025-07-02 09:08:21.272 +08:00 [INF] thr:61<> loader Requires:MATS AK T
2025-07-02 09:08:24.814 +08:00 [INF] thr:61<> loader Requires:SSP Z 4000
2025-07-02 09:08:25.262 +08:00 [INF] thr:61<> loader Requires:MATS AK Z 1
2025-07-02 09:08:32.281 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-02 09:08:32.730 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-02 09:08:32.730 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-02 09:08:32.730 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-02 09:08:33.235 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:08:33.235 +08:00 [INF] thr:61<> loader Requires:INPUT A 6
2025-07-02 09:08:33.688 +08:00 [INF] thr:61<> loader Requires:MATS AK R 0
2025-07-02 09:08:38.969 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-02 09:08:38.969 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:上片请求
2025-07-02 09:08:38.969 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-02 09:08:39.472 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:08:39.472 +08:00 [INF] thr:61<> loader Requires:SSP Z 1000
2025-07-02 09:08:39.918 +08:00 [INF] thr:61<> loader Requires:MATS AK Z 0
2025-07-02 09:08:42.632 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-02 09:08:43.092 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-02 09:08:43.092 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-02 09:08:43.092 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-02 09:08:43.595 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:08:43.595 +08:00 [INF] thr:61<> loader Requires:SSP Z 1000
2025-07-02 09:08:44.046 +08:00 [INF] thr:61<> loader Requires:OUTP 1 0
2025-07-02 09:08:44.493 +08:00 [INF] thr:61<> loader Requires:OUTP 16 1
2025-07-02 09:08:44.939 +08:00 [INF] thr:61<> loader Requires:OUTP 15 1
2025-07-02 09:08:45.388 +08:00 [INF] thr:61<> loader Requires:OUTP 4 1
2025-07-02 09:08:45.834 +08:00 [INF] thr:61<> loader Requires:OUTP 1 1
2025-07-02 09:08:46.280 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:47.234 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:48.188 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:49.141 +08:00 [INF] thr:61<> loader Requires:INPUT A 4
2025-07-02 09:08:49.592 +08:00 [INF] thr:61<> loader Requires:INPUT A 5
2025-07-02 09:08:50.046 +08:00 [INF] thr:61<> loader Requires:MATS AK Z 1
2025-07-02 09:08:52.763 +08:00 [INF] thr:61<> loader Requires:SSPP Z 30
2025-07-02 09:08:53.214 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-02 09:08:53.214 +08:00 [INF] thr:61<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-02 09:08:53.214 +08:00 [INF] thr:61<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-02 09:08:54.220 +08:00 [INF] thr:61<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 09:08:54.220 +08:00 [INF] thr:61<> loader Requires:RETH
2025-07-02 09:08:59.481 +08:00 [INF] thr:61<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-02 13:46:02.207 +08:00 [INF] thr:13<> the connection has been disconnected: 127.0.0.1:57199
2025-07-02 15:16:03.450 +08:00 [INF] thr:39<> loader Requires:INPUT B 13
2025-07-02 15:16:04.448 +08:00 [INF] thr:32<> AOI is Ready
2025-07-02 15:18:15.474 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-07-02 15:18:15.524 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-02 15:18:15.525 +08:00 [INF] thr:4<> Start init SafeController
2025-07-02 15:18:15.535 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-02 15:18:15.536 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-02 15:18:15.537 +08:00 [INF] thr:10<> Start init Buffer
2025-07-02 15:18:15.561 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-02 15:18:15.777 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-02 15:18:15.782 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-02 15:18:15.887 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-02 15:18:16.349 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-02 15:18:16.804 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-02 15:18:17.247 +08:00 [INF] thr:4<> loader Requires:VER
2025-07-02 15:18:17.695 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-07-02 15:18:17.695 +08:00 [INF] thr:4<> loader Requires:SVON
2025-07-02 15:18:18.147 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-02 15:18:18.601 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-07-02 15:18:19.055 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-02 15:18:19.502 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-02 15:18:19.947 +08:00 [INF] thr:4<> loader Requires:HOM
2025-07-02 15:19:09.246 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-07-02 15:19:09.771 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-07-02 15:19:10.243 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-07-02 15:19:10.244 +08:00 [INF] thr:12<> StageProxy Init Start
2025-07-02 15:19:10.244 +08:00 [INF] thr:11<> LoadPortProxy Init Start
2025-07-02 15:19:10.245 +08:00 [INF] thr:13<> AlignerProxy Init Start
2025-07-02 15:19:10.245 +08:00 [INF] thr:14<> AirBlowerProxy Init Start
2025-07-02 15:19:10.247 +08:00 [INF] thr:14<> AirBlowerProxy Init Finished
2025-07-02 15:19:10.282 +08:00 [INF] thr:11<> CassettA 开始Connect
2025-07-02 15:19:10.282 +08:00 [INF] thr:11<> Component.LoadPort.SmifV2 Position:CassettA
2025-07-02 15:19:10.308 +08:00 [INF] thr:11<> 开始Home
2025-07-02 15:19:11.815 +08:00 [INF] thr:13<> AlignerProxy Init Finished
2025-07-02 15:19:13.643 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-07-02 15:19:13.646 +08:00 [INF] thr:12<> GetHomeHash:-1825637286,NowHomeHash:-1825637286
2025-07-02 15:19:13.647 +08:00 [INF] thr:12<> stage Home:1
2025-07-02 15:19:13.656 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-07-02 15:19:13.656 +08:00 [INF] thr:12<> AOIType:4
2025-07-02 15:19:13.659 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-07-02 15:19:13.659 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-07-02 15:19:13.661 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-78.2，right [RLIMIT]:77.3
2025-07-02 15:19:13.662 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-07-02 15:19:13.663 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-07-02 15:19:13.664 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-07-02 15:19:13.664 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-07-02 15:19:13.665 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-181，right [RLIMIT]:81
2025-07-02 15:19:13.666 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-07-02 15:19:13.670 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-07-02 15:19:13.670 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-07-02 15:19:13.672 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-100，right [RLIMIT]:100
2025-07-02 15:19:13.673 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-07-02 15:19:13.676 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-07-02 15:19:13.676 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-07-02 15:19:13.678 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-1，right [RLIMIT]:1
2025-07-02 15:19:13.682 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEK_AOI\VPTEKCONFIG\ACSStandardConfig.json
2025-07-02 15:19:13.689 +08:00 [INF] thr:12<> EjectedPosition X:-0.5，Y:-160，Z:0
2025-07-02 15:19:13.689 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-07-02 15:19:13.690 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-07-02 15:19:13.700 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-07-02 15:19:13.709 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-07-02 15:19:13.840 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-07-02 15:19:18.656 +08:00 [INF] thr:11<> BoxExist:True
2025-07-02 15:19:18.656 +08:00 [INF] thr:11<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-02 15:19:18.719 +08:00 [INF] thr:11<> LoadPortProxy Init Finished
2025-07-02 15:19:18.728 +08:00 [INF] thr:12<> 开始Home
2025-07-02 15:19:18.765 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-02 15:19:27.195 +08:00 [INF] thr:12<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-02 15:19:27.197 +08:00 [INF] thr:15<> CassettA Absence
2025-07-02 15:19:27.199 +08:00 [INF] thr:4<> CassettA Unloaded
2025-07-02 15:19:43.272 +08:00 [INF] thr:25<> loader Requires:INPUT B 13
2025-07-02 15:22:08.720 +08:00 [INF] thr:34<> loader Requires:INPUT B 13
2025-07-02 15:22:09.735 +08:00 [INF] thr:36<> 执行Aligner角度angle：0
2025-07-02 15:22:10.745 +08:00 [INF] thr:36<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-02 15:22:10.746 +08:00 [INF] thr:36<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 15:22:10.748 +08:00 [INF] thr:36<> loader Requires:RGRP
2025-07-02 15:22:11.191 +08:00 [INF] thr:36<> CLeanLoader Group Now C
2025-07-02 15:22:11.192 +08:00 [INF] thr:36<> loader Requires:MATS AJ T
2025-07-02 15:22:14.071 +08:00 [INF] thr:36<> loader Requires:SSP Z 4000
2025-07-02 15:22:14.520 +08:00 [INF] thr:36<> loader Requires:MATS AJ Z 1
2025-07-02 15:22:17.398 +08:00 [INF] thr:36<> loader Requires:MOVR R 226000
2025-07-02 15:22:19.991 +08:00 [INF] thr:36<> loader Requires:SSPP Z 30
2025-07-02 15:22:20.449 +08:00 [INF] thr:36<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-02 15:22:20.449 +08:00 [INF] thr:36<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-02 15:22:20.450 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-02 15:22:20.952 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:22:20.953 +08:00 [INF] thr:36<> loader Requires:INPUT A 6
2025-07-02 15:22:21.405 +08:00 [INF] thr:36<> loader Requires:OUTP 1 0
2025-07-02 15:22:21.852 +08:00 [INF] thr:36<> loader Requires:OUTP 16 1
2025-07-02 15:22:22.300 +08:00 [INF] thr:36<> loader Requires:OUTP 15 1
2025-07-02 15:22:22.749 +08:00 [INF] thr:36<> loader Requires:OUTP 4 1
2025-07-02 15:22:23.195 +08:00 [INF] thr:36<> loader Requires:OUTP 1 1
2025-07-02 15:22:23.641 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:24.094 +08:00 [INF] thr:36<> loader Requires:MATS AJ R 0
2025-07-02 15:22:27.343 +08:00 [INF] thr:36<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-02 15:22:27.343 +08:00 [INF] thr:36<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-02 15:22:27.343 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-02 15:22:27.847 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:22:27.847 +08:00 [INF] thr:36<> loader Requires:SSP Z 1000
2025-07-02 15:22:28.295 +08:00 [INF] thr:36<> loader Requires:MATS AJ Z 0
2025-07-02 15:22:30.908 +08:00 [INF] thr:36<> loader Requires:SSPP Z 30
2025-07-02 15:22:31.356 +08:00 [INF] thr:36<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-02 15:22:31.356 +08:00 [INF] thr:36<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-02 15:22:31.356 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-02 15:22:31.860 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:22:31.860 +08:00 [INF] thr:36<> loader Requires:SSP Z 1000
2025-07-02 15:22:32.309 +08:00 [INF] thr:36<> loader Requires:OUTP 1 0
2025-07-02 15:22:32.755 +08:00 [INF] thr:36<> loader Requires:OUTP 16 0
2025-07-02 15:22:33.202 +08:00 [INF] thr:36<> loader Requires:OUTP 15 1
2025-07-02 15:22:33.650 +08:00 [INF] thr:36<> loader Requires:OUTP 4 0
2025-07-02 15:22:34.097 +08:00 [INF] thr:36<> loader Requires:OUTP 1 1
2025-07-02 15:22:34.544 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:35.497 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:36.451 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:37.402 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:38.356 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:39.309 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:22:39.761 +08:00 [INF] thr:36<> loader Requires:INPUT A 5
2025-07-02 15:22:40.215 +08:00 [INF] thr:36<> loader Requires:MATS AJ Z 1
2025-07-02 15:22:42.832 +08:00 [INF] thr:36<> loader Requires:SSPP Z 30
2025-07-02 15:22:43.283 +08:00 [INF] thr:36<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-02 15:22:43.283 +08:00 [INF] thr:36<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-02 15:22:43.283 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-02 15:22:43.787 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:22:43.787 +08:00 [INF] thr:36<> loader Requires:RETH
2025-07-02 15:22:48.822 +08:00 [INF] thr:36<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-02 15:22:48.826 +08:00 [INF] thr:36<> AOI is Ready
2025-07-02 15:22:48.892 +08:00 [INF] thr:36<> SetVelocity, Axis:X, velocity:50
2025-07-02 15:22:48.896 +08:00 [INF] thr:36<> SetVelocity, Axis:Y, velocity:50
2025-07-02 15:22:48.934 +08:00 [INF] thr:36<> SetVelocity, Axis:X, velocity:8
2025-07-02 15:22:48.937 +08:00 [INF] thr:36<> SetVelocity, Axis:Y, velocity:8
2025-07-02 15:22:48.952 +08:00 [INF] thr:36<> stage move to position action ok
2025-07-02 15:22:48.955 +08:00 [INF] thr:36<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-02 15:22:48.956 +08:00 [INF] thr:36<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 15:22:48.956 +08:00 [INF] thr:36<> loader Requires:RGRP
2025-07-02 15:22:49.397 +08:00 [INF] thr:36<> CLeanLoader Group Now C
2025-07-02 15:22:49.397 +08:00 [INF] thr:36<> loader Requires:MATS AK T
2025-07-02 15:22:52.937 +08:00 [INF] thr:36<> loader Requires:SSP Z 4000
2025-07-02 15:22:53.385 +08:00 [INF] thr:36<> loader Requires:MATS AK Z 1
2025-07-02 15:23:00.403 +08:00 [INF] thr:36<> loader Requires:SSPP Z 30
2025-07-02 15:23:00.853 +08:00 [INF] thr:36<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-02 15:23:00.853 +08:00 [INF] thr:36<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-02 15:23:00.853 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-02 15:23:01.356 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:23:01.356 +08:00 [INF] thr:36<> loader Requires:INPUT A 6
2025-07-02 15:23:01.810 +08:00 [INF] thr:36<> loader Requires:MATS AK R 0
2025-07-02 15:23:07.093 +08:00 [INF] thr:36<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-02 15:23:07.093 +08:00 [INF] thr:36<> Station:InspectStageA,SafeCheck:上片请求
2025-07-02 15:23:07.093 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-02 15:23:07.596 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:23:07.596 +08:00 [INF] thr:36<> loader Requires:SSP Z 1000
2025-07-02 15:23:08.042 +08:00 [INF] thr:36<> loader Requires:MATS AK Z 0
2025-07-02 15:23:10.754 +08:00 [INF] thr:36<> loader Requires:SSPP Z 30
2025-07-02 15:23:11.233 +08:00 [INF] thr:36<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-02 15:23:11.233 +08:00 [INF] thr:36<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-02 15:23:11.233 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-02 15:23:11.737 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:23:11.737 +08:00 [INF] thr:36<> loader Requires:SSP Z 1000
2025-07-02 15:23:12.184 +08:00 [INF] thr:36<> loader Requires:OUTP 1 0
2025-07-02 15:23:12.631 +08:00 [INF] thr:36<> loader Requires:OUTP 16 1
2025-07-02 15:23:13.079 +08:00 [INF] thr:36<> loader Requires:OUTP 15 1
2025-07-02 15:23:13.528 +08:00 [INF] thr:36<> loader Requires:OUTP 4 1
2025-07-02 15:23:13.975 +08:00 [INF] thr:36<> loader Requires:OUTP 1 1
2025-07-02 15:23:14.427 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:23:15.382 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:23:16.335 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:23:17.289 +08:00 [INF] thr:36<> loader Requires:INPUT A 4
2025-07-02 15:23:17.739 +08:00 [INF] thr:36<> loader Requires:INPUT A 5
2025-07-02 15:23:18.192 +08:00 [INF] thr:36<> loader Requires:MATS AK Z 1
2025-07-02 15:23:20.910 +08:00 [INF] thr:36<> loader Requires:SSPP Z 30
2025-07-02 15:23:21.360 +08:00 [INF] thr:36<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-02 15:23:21.360 +08:00 [INF] thr:36<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-02 15:23:21.361 +08:00 [INF] thr:36<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-02 15:23:22.366 +08:00 [INF] thr:36<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:23:22.366 +08:00 [INF] thr:36<> loader Requires:RETH
2025-07-02 15:23:27.627 +08:00 [INF] thr:36<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-02 15:24:07.714 +08:00 [INF] thr:44<> loader Requires:INPUT B 13
2025-07-02 15:24:09.176 +08:00 [INF] thr:5<> AOI is Ready
2025-07-02 15:24:09.239 +08:00 [INF] thr:5<> SetVelocity, Axis:X, velocity:50
2025-07-02 15:24:09.242 +08:00 [INF] thr:5<> SetVelocity, Axis:Y, velocity:50
2025-07-02 15:24:12.680 +08:00 [INF] thr:5<> SetVelocity, Axis:X, velocity:20
2025-07-02 15:24:12.683 +08:00 [INF] thr:5<> SetVelocity, Axis:Y, velocity:20
2025-07-02 15:24:12.705 +08:00 [INF] thr:5<> stage move to position action ok
2025-07-02 15:24:12.706 +08:00 [INF] thr:5<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-02 15:24:12.707 +08:00 [INF] thr:5<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 15:24:12.707 +08:00 [INF] thr:5<> loader Requires:RGRP
2025-07-02 15:24:13.148 +08:00 [INF] thr:5<> CLeanLoader Group Now C
2025-07-02 15:24:13.148 +08:00 [INF] thr:5<> loader Requires:MATS AK T
2025-07-02 15:24:13.607 +08:00 [INF] thr:5<> loader Requires:SSP Z 4000
2025-07-02 15:24:14.054 +08:00 [INF] thr:5<> loader Requires:MATS AK Z 1
2025-07-02 15:24:14.528 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 15:24:14.977 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-02 15:24:14.977 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-02 15:24:14.977 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-02 15:24:15.480 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:24:15.480 +08:00 [INF] thr:5<> loader Requires:INPUT A 6
2025-07-02 15:24:15.934 +08:00 [INF] thr:5<> loader Requires:OUTP 1 0
2025-07-02 15:24:16.381 +08:00 [INF] thr:5<> loader Requires:OUTP 16 1
2025-07-02 15:24:16.829 +08:00 [INF] thr:5<> loader Requires:OUTP 15 1
2025-07-02 15:24:17.277 +08:00 [INF] thr:5<> loader Requires:OUTP 4 1
2025-07-02 15:24:17.723 +08:00 [INF] thr:5<> loader Requires:OUTP 1 1
2025-07-02 15:24:18.169 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:18.621 +08:00 [INF] thr:5<> loader Requires:MATS AK R 0
2025-07-02 15:24:23.903 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-02 15:24:23.903 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片请求
2025-07-02 15:24:23.903 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-02 15:24:24.406 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:24:24.406 +08:00 [INF] thr:5<> loader Requires:SSP Z 1000
2025-07-02 15:24:24.853 +08:00 [INF] thr:5<> loader Requires:MATS AK Z 0
2025-07-02 15:24:27.566 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 15:24:28.049 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-02 15:24:28.049 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-02 15:24:28.049 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-02 15:24:28.553 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:24:28.553 +08:00 [INF] thr:5<> loader Requires:SSP Z 1000
2025-07-02 15:24:29.000 +08:00 [INF] thr:5<> loader Requires:OUTP 1 0
2025-07-02 15:24:29.447 +08:00 [INF] thr:5<> loader Requires:OUTP 16 0
2025-07-02 15:24:29.895 +08:00 [INF] thr:5<> loader Requires:OUTP 15 1
2025-07-02 15:24:30.342 +08:00 [INF] thr:5<> loader Requires:OUTP 4 0
2025-07-02 15:24:30.789 +08:00 [INF] thr:5<> loader Requires:OUTP 1 1
2025-07-02 15:24:31.235 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:32.191 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:33.146 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:34.099 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:35.053 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:36.008 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 15:24:36.460 +08:00 [INF] thr:5<> loader Requires:INPUT A 5
2025-07-02 15:24:36.914 +08:00 [INF] thr:5<> loader Requires:MATS AK Z 1
2025-07-02 15:24:39.631 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 15:24:40.078 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-02 15:24:40.078 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-02 15:24:40.078 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-02 15:24:40.581 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:24:40.581 +08:00 [INF] thr:5<> loader Requires:RETH
2025-07-02 15:24:45.844 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-02 15:24:45.848 +08:00 [INF] thr:8<> 执行Aligner设置初始角度InitialAngle：0
2025-07-02 15:24:45.848 +08:00 [INF] thr:8<> 执行Aligner角度angle：0
2025-07-02 15:24:46.854 +08:00 [INF] thr:8<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-02 15:24:46.856 +08:00 [INF] thr:8<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 15:24:46.856 +08:00 [INF] thr:8<> loader Requires:RGRP
2025-07-02 15:24:47.299 +08:00 [INF] thr:8<> CLeanLoader Group Now C
2025-07-02 15:24:47.299 +08:00 [INF] thr:8<> loader Requires:MATS AJ T
2025-07-02 15:24:50.842 +08:00 [INF] thr:8<> loader Requires:SSP Z 4000
2025-07-02 15:24:51.290 +08:00 [INF] thr:8<> loader Requires:MATS AJ Z 1
2025-07-02 15:24:58.309 +08:00 [INF] thr:8<> loader Requires:MOVR R 226000
2025-07-02 15:25:00.904 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:25:01.355 +08:00 [INF] thr:8<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-02 15:25:01.355 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-02 15:25:01.355 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-02 15:25:01.858 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:25:01.858 +08:00 [INF] thr:8<> loader Requires:INPUT A 6
2025-07-02 15:25:02.312 +08:00 [INF] thr:8<> loader Requires:MATS AJ R 0
2025-07-02 15:25:05.560 +08:00 [INF] thr:8<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-02 15:25:05.560 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-02 15:25:05.560 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-02 15:25:06.065 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:25:06.065 +08:00 [INF] thr:8<> loader Requires:SSP Z 1000
2025-07-02 15:25:06.513 +08:00 [INF] thr:8<> loader Requires:MATS AJ Z 0
2025-07-02 15:25:09.126 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:25:09.575 +08:00 [INF] thr:8<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-02 15:25:09.575 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-02 15:25:09.575 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-02 15:25:10.078 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:25:10.078 +08:00 [INF] thr:8<> loader Requires:SSP Z 1000
2025-07-02 15:25:10.527 +08:00 [INF] thr:8<> loader Requires:OUTP 1 0
2025-07-02 15:25:10.974 +08:00 [INF] thr:8<> loader Requires:OUTP 16 1
2025-07-02 15:25:11.421 +08:00 [INF] thr:8<> loader Requires:OUTP 15 1
2025-07-02 15:25:11.869 +08:00 [INF] thr:8<> loader Requires:OUTP 4 1
2025-07-02 15:25:12.316 +08:00 [INF] thr:8<> loader Requires:OUTP 1 1
2025-07-02 15:25:12.762 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:25:13.716 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:25:14.669 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:25:15.622 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:25:16.074 +08:00 [INF] thr:8<> loader Requires:INPUT A 5
2025-07-02 15:25:16.527 +08:00 [INF] thr:8<> loader Requires:MATS AJ Z 1
2025-07-02 15:25:19.144 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:25:19.595 +08:00 [INF] thr:8<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-02 15:25:19.595 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-02 15:25:19.595 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-02 15:25:20.099 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:25:20.099 +08:00 [INF] thr:8<> loader Requires:RETH
2025-07-02 15:25:25.133 +08:00 [INF] thr:8<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-02 15:25:25.136 +08:00 [INF] thr:8<> 执行Aligner角度angle：0
2025-07-02 15:28:20.827 +08:00 [INF] thr:46<> loader Requires:INPUT B 13
2025-07-02 15:28:21.818 +08:00 [INF] thr:8<> 执行Aligner角度angle：0
2025-07-02 15:28:22.823 +08:00 [INF] thr:8<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-02 15:28:22.824 +08:00 [INF] thr:8<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 15:28:22.824 +08:00 [INF] thr:8<> loader Requires:RGRP
2025-07-02 15:28:23.268 +08:00 [INF] thr:8<> CLeanLoader Group Now C
2025-07-02 15:28:23.268 +08:00 [INF] thr:8<> loader Requires:MATS AJ T
2025-07-02 15:28:23.727 +08:00 [INF] thr:8<> loader Requires:SSP Z 4000
2025-07-02 15:28:24.173 +08:00 [INF] thr:8<> loader Requires:MATS AJ Z 1
2025-07-02 15:28:24.646 +08:00 [INF] thr:8<> loader Requires:MOVR R 226000
2025-07-02 15:28:27.242 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:28:27.693 +08:00 [INF] thr:8<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-02 15:28:27.693 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-02 15:28:27.693 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-02 15:28:28.197 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:28:28.197 +08:00 [INF] thr:8<> loader Requires:INPUT A 6
2025-07-02 15:28:28.650 +08:00 [INF] thr:8<> loader Requires:OUTP 1 0
2025-07-02 15:28:29.097 +08:00 [INF] thr:8<> loader Requires:OUTP 16 1
2025-07-02 15:28:29.543 +08:00 [INF] thr:8<> loader Requires:OUTP 15 1
2025-07-02 15:28:29.992 +08:00 [INF] thr:8<> loader Requires:OUTP 4 1
2025-07-02 15:28:30.439 +08:00 [INF] thr:8<> loader Requires:OUTP 1 1
2025-07-02 15:28:30.885 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:31.337 +08:00 [INF] thr:8<> loader Requires:MATS AJ R 0
2025-07-02 15:28:34.587 +08:00 [INF] thr:8<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-02 15:28:34.587 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-02 15:28:34.587 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-02 15:28:35.089 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:28:35.089 +08:00 [INF] thr:8<> loader Requires:SSP Z 1000
2025-07-02 15:28:35.535 +08:00 [INF] thr:8<> loader Requires:MATS AJ Z 0
2025-07-02 15:28:38.147 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:28:38.596 +08:00 [INF] thr:8<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-02 15:28:38.596 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-02 15:28:38.596 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-02 15:28:39.099 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:28:39.099 +08:00 [INF] thr:8<> loader Requires:SSP Z 1000
2025-07-02 15:28:39.545 +08:00 [INF] thr:8<> loader Requires:OUTP 1 0
2025-07-02 15:28:39.992 +08:00 [INF] thr:8<> loader Requires:OUTP 16 0
2025-07-02 15:28:40.439 +08:00 [INF] thr:8<> loader Requires:OUTP 15 1
2025-07-02 15:28:40.888 +08:00 [INF] thr:8<> loader Requires:OUTP 4 0
2025-07-02 15:28:41.334 +08:00 [INF] thr:8<> loader Requires:OUTP 1 1
2025-07-02 15:28:41.779 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:42.735 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:43.686 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:44.640 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:45.593 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:46.547 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:28:46.998 +08:00 [INF] thr:8<> loader Requires:INPUT A 5
2025-07-02 15:28:47.451 +08:00 [INF] thr:8<> loader Requires:MATS AJ Z 1
2025-07-02 15:28:50.068 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:28:50.519 +08:00 [INF] thr:8<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-02 15:28:50.519 +08:00 [INF] thr:8<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-02 15:28:50.519 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-02 15:28:51.022 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:28:51.022 +08:00 [INF] thr:8<> loader Requires:RETH
2025-07-02 15:28:56.058 +08:00 [INF] thr:8<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-02 15:28:56.060 +08:00 [INF] thr:8<> AOI is Ready
2025-07-02 15:28:56.130 +08:00 [INF] thr:8<> SetVelocity, Axis:X, velocity:50
2025-07-02 15:28:56.133 +08:00 [INF] thr:8<> SetVelocity, Axis:Y, velocity:50
2025-07-02 15:28:56.170 +08:00 [INF] thr:8<> SetVelocity, Axis:X, velocity:20
2025-07-02 15:28:56.177 +08:00 [INF] thr:8<> SetVelocity, Axis:Y, velocity:20
2025-07-02 15:28:56.209 +08:00 [INF] thr:8<> stage move to position action ok
2025-07-02 15:28:56.209 +08:00 [INF] thr:8<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-02 15:28:56.210 +08:00 [INF] thr:8<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 15:28:56.210 +08:00 [INF] thr:8<> loader Requires:RGRP
2025-07-02 15:28:56.654 +08:00 [INF] thr:8<> CLeanLoader Group Now C
2025-07-02 15:28:56.654 +08:00 [INF] thr:8<> loader Requires:MATS AK T
2025-07-02 15:29:00.196 +08:00 [INF] thr:8<> loader Requires:SSP Z 4000
2025-07-02 15:29:00.645 +08:00 [INF] thr:8<> loader Requires:MATS AK Z 1
2025-07-02 15:29:07.663 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:29:08.113 +08:00 [INF] thr:8<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-02 15:29:08.113 +08:00 [INF] thr:8<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-02 15:29:08.113 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-02 15:29:08.617 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:29:08.617 +08:00 [INF] thr:8<> loader Requires:INPUT A 6
2025-07-02 15:29:09.070 +08:00 [INF] thr:8<> loader Requires:MATS AK R 0
2025-07-02 15:29:14.352 +08:00 [INF] thr:8<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-02 15:29:14.352 +08:00 [INF] thr:8<> Station:InspectStageA,SafeCheck:上片请求
2025-07-02 15:29:14.352 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-02 15:29:14.855 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:29:14.855 +08:00 [INF] thr:8<> loader Requires:SSP Z 1000
2025-07-02 15:29:15.303 +08:00 [INF] thr:8<> loader Requires:MATS AK Z 0
2025-07-02 15:29:18.016 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:29:18.522 +08:00 [INF] thr:8<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-02 15:29:18.522 +08:00 [INF] thr:8<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-02 15:29:18.522 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-02 15:29:19.025 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:29:19.025 +08:00 [INF] thr:8<> loader Requires:SSP Z 1000
2025-07-02 15:29:19.473 +08:00 [INF] thr:8<> loader Requires:OUTP 1 0
2025-07-02 15:29:19.920 +08:00 [INF] thr:8<> loader Requires:OUTP 16 1
2025-07-02 15:29:20.367 +08:00 [INF] thr:8<> loader Requires:OUTP 15 1
2025-07-02 15:29:20.816 +08:00 [INF] thr:8<> loader Requires:OUTP 4 1
2025-07-02 15:29:21.263 +08:00 [INF] thr:8<> loader Requires:OUTP 1 1
2025-07-02 15:29:21.709 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:29:22.662 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:29:23.616 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:29:24.569 +08:00 [INF] thr:8<> loader Requires:INPUT A 4
2025-07-02 15:29:25.021 +08:00 [INF] thr:8<> loader Requires:INPUT A 5
2025-07-02 15:29:25.474 +08:00 [INF] thr:8<> loader Requires:MATS AK Z 1
2025-07-02 15:29:28.191 +08:00 [INF] thr:8<> loader Requires:SSPP Z 30
2025-07-02 15:29:28.642 +08:00 [INF] thr:8<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-02 15:29:28.642 +08:00 [INF] thr:8<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-02 15:29:28.642 +08:00 [INF] thr:8<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-02 15:29:29.648 +08:00 [INF] thr:8<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 15:29:29.648 +08:00 [INF] thr:8<> loader Requires:RETH
2025-07-02 15:29:34.911 +08:00 [INF] thr:8<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-02 16:03:40.573 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-02 16:03:42.035 +08:00 [INF] thr:5<> AOI is Ready
2025-07-02 16:03:50.169 +08:00 [INF] thr:5<> SetVelocity, Axis:X, velocity:50
2025-07-02 16:03:50.172 +08:00 [INF] thr:5<> SetVelocity, Axis:Y, velocity:50
2025-07-02 16:03:53.936 +08:00 [INF] thr:5<> SetVelocity, Axis:X, velocity:8
2025-07-02 16:03:53.939 +08:00 [INF] thr:5<> SetVelocity, Axis:Y, velocity:8
2025-07-02 16:03:53.956 +08:00 [INF] thr:5<> stage move to position action ok
2025-07-02 16:03:53.957 +08:00 [INF] thr:5<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-02 16:03:53.958 +08:00 [INF] thr:5<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 16:03:53.958 +08:00 [INF] thr:5<> loader Requires:RGRP
2025-07-02 16:03:54.401 +08:00 [INF] thr:5<> CLeanLoader Group Now C
2025-07-02 16:03:54.401 +08:00 [INF] thr:5<> loader Requires:MATS AK T
2025-07-02 16:03:54.859 +08:00 [INF] thr:5<> loader Requires:SSP Z 4000
2025-07-02 16:03:55.314 +08:00 [INF] thr:5<> loader Requires:MATS AK Z 1
2025-07-02 16:03:55.787 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 16:03:56.238 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-02 16:03:56.238 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-02 16:03:56.238 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-02 16:03:56.742 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:03:56.742 +08:00 [INF] thr:5<> loader Requires:INPUT A 6
2025-07-02 16:03:57.195 +08:00 [INF] thr:5<> loader Requires:OUTP 1 0
2025-07-02 16:03:57.642 +08:00 [INF] thr:5<> loader Requires:OUTP 16 1
2025-07-02 16:03:58.089 +08:00 [INF] thr:5<> loader Requires:OUTP 15 1
2025-07-02 16:03:58.539 +08:00 [INF] thr:5<> loader Requires:OUTP 4 1
2025-07-02 16:03:58.984 +08:00 [INF] thr:5<> loader Requires:OUTP 1 1
2025-07-02 16:03:59.430 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:03:59.883 +08:00 [INF] thr:5<> loader Requires:MATS AK R 0
2025-07-02 16:04:05.164 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-02 16:04:05.164 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片请求
2025-07-02 16:04:05.164 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-02 16:04:05.668 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:04:05.668 +08:00 [INF] thr:5<> loader Requires:SSP Z 1000
2025-07-02 16:04:06.118 +08:00 [INF] thr:5<> loader Requires:MATS AK Z 0
2025-07-02 16:04:08.831 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 16:04:09.302 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-02 16:04:09.302 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-02 16:04:09.302 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-02 16:04:09.805 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:04:09.805 +08:00 [INF] thr:5<> loader Requires:SSP Z 1000
2025-07-02 16:04:10.252 +08:00 [INF] thr:5<> loader Requires:OUTP 1 0
2025-07-02 16:04:10.700 +08:00 [INF] thr:5<> loader Requires:OUTP 16 0
2025-07-02 16:04:11.147 +08:00 [INF] thr:5<> loader Requires:OUTP 15 1
2025-07-02 16:04:11.595 +08:00 [INF] thr:5<> loader Requires:OUTP 4 0
2025-07-02 16:04:12.041 +08:00 [INF] thr:5<> loader Requires:OUTP 1 1
2025-07-02 16:04:12.488 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:04:13.443 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:04:14.398 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:04:15.352 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:04:16.305 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:04:17.257 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 16:04:17.709 +08:00 [INF] thr:5<> loader Requires:INPUT A 5
2025-07-02 16:04:18.162 +08:00 [INF] thr:5<> loader Requires:MATS AK Z 1
2025-07-02 16:04:20.880 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 16:04:21.330 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-02 16:04:21.330 +08:00 [INF] thr:5<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-02 16:04:21.330 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-02 16:04:21.835 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:04:21.835 +08:00 [INF] thr:5<> loader Requires:RETH
2025-07-02 16:04:27.096 +08:00 [INF] thr:5<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-02 16:04:27.097 +08:00 [INF] thr:27<> 执行Aligner设置初始角度InitialAngle：0
2025-07-02 16:04:27.097 +08:00 [INF] thr:27<> 执行Aligner角度angle：0
2025-07-02 16:04:28.101 +08:00 [INF] thr:27<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-02 16:04:28.102 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 16:04:28.102 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-02 16:04:28.543 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-02 16:04:28.543 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-07-02 16:04:32.086 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-02 16:04:32.530 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-02 16:04:39.549 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-07-02 16:04:42.144 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-02 16:04:42.595 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-02 16:04:42.595 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-02 16:04:42.595 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-02 16:04:43.097 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:04:43.097 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-02 16:04:43.551 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-07-02 16:04:46.800 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-02 16:04:46.800 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-02 16:04:46.800 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-02 16:04:47.304 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:04:47.304 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-02 16:04:47.753 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-07-02 16:04:50.366 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-02 16:04:50.815 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-02 16:04:50.815 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-02 16:04:50.815 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-02 16:04:51.317 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:04:51.317 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-02 16:04:51.766 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-02 16:04:52.214 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-02 16:04:52.662 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-02 16:04:53.109 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-02 16:04:53.556 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-02 16:04:54.002 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-02 16:04:54.955 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-02 16:04:55.909 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-02 16:04:56.860 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-02 16:04:57.313 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-02 16:04:57.767 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-02 16:05:00.384 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-02 16:05:00.834 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-02 16:05:00.835 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-02 16:05:00.835 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-02 16:05:01.336 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 16:05:01.337 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-02 16:05:06.372 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-02 16:05:06.374 +08:00 [INF] thr:27<> 执行Aligner角度angle：0
2025-07-02 17:47:13.691 +08:00 [INF] thr:50<> loader Requires:INPUT B 13
2025-07-02 17:47:14.672 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-02 17:47:15.677 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-02 17:47:15.678 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 17:47:15.678 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-02 17:47:16.121 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-02 17:47:16.122 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-02 17:47:16.580 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-02 17:47:17.028 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-02 17:47:17.501 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-02 17:47:20.097 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 17:47:20.547 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-02 17:47:20.547 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-02 17:47:20.547 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-02 17:47:21.051 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:47:21.051 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-02 17:47:21.505 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 17:47:21.952 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-02 17:47:22.399 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 17:47:22.846 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-02 17:47:23.293 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 17:47:23.739 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:24.192 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-02 17:47:27.441 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-02 17:47:27.441 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-02 17:47:27.441 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-02 17:47:27.945 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:47:27.945 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 17:47:28.394 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-02 17:47:31.006 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 17:47:31.461 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-02 17:47:31.461 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-02 17:47:31.461 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-02 17:47:31.964 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:47:31.964 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 17:47:32.414 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 17:47:32.861 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-02 17:47:33.308 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 17:47:33.756 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-02 17:47:34.203 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 17:47:34.649 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:35.603 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:36.557 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:37.510 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:38.464 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:39.415 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:47:39.868 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-02 17:47:40.321 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-02 17:47:42.937 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 17:47:43.386 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-02 17:47:43.386 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-02 17:47:43.386 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-02 17:47:43.890 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:47:43.890 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-02 17:47:48.926 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-02 17:47:48.927 +08:00 [INF] thr:3<> AOI is Ready
2025-07-02 17:47:48.994 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-07-02 17:47:48.997 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-07-02 17:47:49.032 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-07-02 17:47:49.035 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-07-02 17:47:49.051 +08:00 [INF] thr:3<> stage move to position action ok
2025-07-02 17:47:49.052 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-02 17:47:49.052 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 17:47:49.052 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-02 17:47:49.496 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-02 17:47:49.496 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-07-02 17:47:53.039 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-02 17:47:53.486 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-02 17:48:00.506 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 17:48:00.954 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-02 17:48:00.954 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-02 17:48:00.954 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-02 17:48:01.459 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:48:01.459 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-02 17:48:01.911 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-07-02 17:48:07.194 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-02 17:48:07.194 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-07-02 17:48:07.194 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-02 17:48:07.696 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:48:07.696 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 17:48:08.143 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-07-02 17:48:10.856 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 17:48:11.349 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-02 17:48:11.349 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-02 17:48:11.349 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-02 17:48:11.850 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:48:11.850 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 17:48:12.298 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 17:48:12.745 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-02 17:48:13.193 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 17:48:13.641 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-02 17:48:14.087 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 17:48:14.533 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:48:15.489 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:48:16.440 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:48:17.394 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 17:48:17.845 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-02 17:48:18.299 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-02 17:48:21.017 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 17:48:21.468 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-02 17:48:21.468 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-02 17:48:21.468 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-02 17:48:22.472 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 17:48:22.472 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-02 17:48:27.735 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-02 20:39:10.356 +08:00 [INF] thr:60<> loader Requires:INPUT B 13
2025-07-02 20:39:11.821 +08:00 [INF] thr:3<> AOI is Ready
2025-07-02 20:39:19.623 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-07-02 20:39:19.630 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-07-02 20:39:23.736 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:60
2025-07-02 20:39:23.739 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:60
2025-07-02 20:39:23.755 +08:00 [INF] thr:3<> stage move to position action ok
2025-07-02 20:39:23.756 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-02 20:39:23.756 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 20:39:23.756 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-02 20:39:24.198 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-02 20:39:24.198 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-07-02 20:39:24.657 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-02 20:39:25.108 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-02 20:39:25.581 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 20:39:26.032 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-02 20:39:26.032 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-02 20:39:26.032 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-02 20:39:26.534 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:39:26.534 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-02 20:39:26.988 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 20:39:27.436 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-02 20:39:27.883 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 20:39:28.331 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-02 20:39:28.778 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 20:39:29.224 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:29.677 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-07-02 20:39:34.958 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-02 20:39:34.958 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-07-02 20:39:34.959 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-02 20:39:35.462 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:39:35.462 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 20:39:35.911 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-07-02 20:39:38.624 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 20:39:39.251 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-02 20:39:39.251 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-02 20:39:39.251 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-02 20:39:39.755 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:39:39.755 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 20:39:40.206 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 20:39:40.653 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-02 20:39:41.099 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 20:39:41.548 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-02 20:39:41.995 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 20:39:42.441 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:43.394 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:44.348 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:45.301 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:46.255 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:47.208 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 20:39:47.660 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-02 20:39:48.113 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-02 20:39:50.829 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 20:39:51.281 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-02 20:39:51.281 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-02 20:39:51.281 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-02 20:39:51.785 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:39:51.785 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-02 20:39:57.048 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-02 20:39:57.049 +08:00 [INF] thr:5<> 执行Aligner设置初始角度InitialAngle：0
2025-07-02 20:39:57.049 +08:00 [INF] thr:5<> 执行Aligner角度angle：0
2025-07-02 20:39:58.056 +08:00 [INF] thr:5<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-02 20:39:58.057 +08:00 [INF] thr:5<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 20:39:58.057 +08:00 [INF] thr:5<> loader Requires:RGRP
2025-07-02 20:39:58.499 +08:00 [INF] thr:5<> CLeanLoader Group Now C
2025-07-02 20:39:58.499 +08:00 [INF] thr:5<> loader Requires:MATS AJ T
2025-07-02 20:40:02.041 +08:00 [INF] thr:5<> loader Requires:SSP Z 4000
2025-07-02 20:40:02.489 +08:00 [INF] thr:5<> loader Requires:MATS AJ Z 1
2025-07-02 20:40:09.506 +08:00 [INF] thr:5<> loader Requires:MOVR R 226000
2025-07-02 20:40:12.101 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 20:40:12.552 +08:00 [INF] thr:5<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-02 20:40:12.552 +08:00 [INF] thr:5<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-02 20:40:12.552 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-02 20:40:13.056 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:40:13.056 +08:00 [INF] thr:5<> loader Requires:INPUT A 6
2025-07-02 20:40:13.509 +08:00 [INF] thr:5<> loader Requires:MATS AJ R 0
2025-07-02 20:40:16.759 +08:00 [INF] thr:5<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-02 20:40:16.759 +08:00 [INF] thr:5<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-02 20:40:16.759 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-02 20:40:17.263 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:40:17.263 +08:00 [INF] thr:5<> loader Requires:SSP Z 1000
2025-07-02 20:40:17.719 +08:00 [INF] thr:5<> loader Requires:MATS AJ Z 0
2025-07-02 20:40:20.332 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 20:40:20.781 +08:00 [INF] thr:5<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-02 20:40:20.781 +08:00 [INF] thr:5<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-02 20:40:20.781 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-02 20:40:21.283 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:40:21.283 +08:00 [INF] thr:5<> loader Requires:SSP Z 1000
2025-07-02 20:40:21.734 +08:00 [INF] thr:5<> loader Requires:OUTP 1 0
2025-07-02 20:40:22.181 +08:00 [INF] thr:5<> loader Requires:OUTP 16 1
2025-07-02 20:40:22.627 +08:00 [INF] thr:5<> loader Requires:OUTP 15 1
2025-07-02 20:40:23.076 +08:00 [INF] thr:5<> loader Requires:OUTP 4 1
2025-07-02 20:40:23.523 +08:00 [INF] thr:5<> loader Requires:OUTP 1 1
2025-07-02 20:40:23.968 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 20:40:24.923 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 20:40:25.875 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 20:40:26.828 +08:00 [INF] thr:5<> loader Requires:INPUT A 4
2025-07-02 20:40:27.280 +08:00 [INF] thr:5<> loader Requires:INPUT A 5
2025-07-02 20:40:27.733 +08:00 [INF] thr:5<> loader Requires:MATS AJ Z 1
2025-07-02 20:40:30.350 +08:00 [INF] thr:5<> loader Requires:SSPP Z 30
2025-07-02 20:40:30.800 +08:00 [INF] thr:5<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-02 20:40:30.800 +08:00 [INF] thr:5<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-02 20:40:30.800 +08:00 [INF] thr:5<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-02 20:40:31.303 +08:00 [INF] thr:5<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 20:40:31.303 +08:00 [INF] thr:5<> loader Requires:RETH
2025-07-02 20:40:36.339 +08:00 [INF] thr:5<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-02 20:40:36.599 +08:00 [INF] thr:5<> 执行Aligner角度angle：0
2025-07-03 09:06:32.723 +08:00 [INF] thr:35<> loader Requires:INPUT B 13
2025-07-03 09:06:33.708 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-03 09:06:34.715 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-03 09:06:34.715 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 09:06:34.715 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-03 09:06:35.159 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-03 09:06:35.159 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-03 09:06:35.618 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-03 09:06:36.065 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-03 09:06:36.539 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-03 09:06:39.134 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 09:06:39.583 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-03 09:06:39.583 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-03 09:06:39.583 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-03 09:06:40.088 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:06:40.088 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-03 09:06:40.541 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 09:06:40.988 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-03 09:06:41.435 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 09:06:41.883 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-03 09:06:42.329 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 09:06:42.775 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:43.228 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-03 09:06:46.476 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-03 09:06:46.477 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-03 09:06:46.477 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-03 09:06:46.980 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:06:46.980 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 09:06:47.430 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-03 09:06:50.042 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 09:06:50.491 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-03 09:06:50.491 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-03 09:06:50.491 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-03 09:06:50.995 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:06:50.995 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 09:06:51.443 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 09:06:51.890 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-03 09:06:52.337 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 09:06:52.785 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-03 09:06:53.232 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 09:06:53.678 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:54.632 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:55.584 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:56.537 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:57.491 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:58.444 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:06:58.895 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-03 09:06:59.349 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-03 09:07:01.966 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 09:07:02.415 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-03 09:07:02.415 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-03 09:07:02.415 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-03 09:07:02.919 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:07:02.919 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-03 09:07:07.954 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-03 09:07:07.956 +08:00 [INF] thr:3<> AOI is Ready
2025-07-03 09:07:08.019 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-07-03 09:07:08.023 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-07-03 09:07:08.059 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:60
2025-07-03 09:07:08.063 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:60
2025-07-03 09:07:08.079 +08:00 [INF] thr:3<> stage move to position action ok
2025-07-03 09:07:08.080 +08:00 [INF] thr:3<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-03 09:07:08.080 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 09:07:08.080 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-03 09:07:08.522 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-03 09:07:08.522 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-07-03 09:07:12.057 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-03 09:07:12.504 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-03 09:07:19.523 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 09:07:19.973 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-03 09:07:19.973 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-03 09:07:19.973 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-03 09:07:20.476 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:07:20.476 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-03 09:07:20.930 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-07-03 09:07:26.212 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-03 09:07:26.212 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片请求
2025-07-03 09:07:26.212 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-03 09:07:26.716 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:07:26.716 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 09:07:27.169 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-07-03 09:07:29.882 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 09:07:30.350 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-03 09:07:30.350 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-03 09:07:30.350 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-03 09:07:30.854 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:07:30.854 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 09:07:31.302 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 09:07:31.750 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-03 09:07:32.197 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 09:07:32.646 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-03 09:07:33.093 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 09:07:33.537 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:07:34.492 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:07:35.445 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:07:36.399 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 09:07:36.849 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-03 09:07:37.303 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-03 09:07:40.021 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 09:07:40.472 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-03 09:07:40.472 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-03 09:07:40.472 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-03 09:07:41.476 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 09:07:41.476 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-03 09:07:46.739 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-03 13:33:18.152 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:57757
2025-07-03 13:34:04.379 +08:00 [INF] thr:23<> Axis:Y, axis id:0,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-03 13:34:44.016 +08:00 [INF] thr:23<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-03 14:05:47.302 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:51499
2025-07-03 16:26:31.436 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:53103
2025-07-03 16:52:39.298 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:57249
2025-07-03 17:20:35.048 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:57987
2025-07-03 17:36:04.940 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:58837
2025-07-03 18:03:20.115 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:59262
2025-07-03 18:05:40.964 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:60082
2025-07-03 18:19:00.557 +08:00 [INF] thr:14<> get state: False
2025-07-03 18:19:00.558 +08:00 [INF] thr:14<> BoxExist:False
2025-07-03 18:19:02.600 +08:00 [INF] thr:72<> CassettA Absence
2025-07-03 18:19:03.837 +08:00 [INF] thr:14<> get state: True
2025-07-03 18:19:03.837 +08:00 [INF] thr:14<> BoxExist:True
2025-07-03 18:19:03.837 +08:00 [INF] thr:26<> CassettA Unloaded
2025-07-03 18:20:04.940 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:60326
2025-07-03 18:37:10.261 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:60572
2025-07-03 19:13:16.207 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:61109
2025-07-03 19:32:56.152 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:62130
2025-07-03 19:46:45.813 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:62735
2025-07-04 09:10:20.310 +08:00 [INF] thr:17<> loader Requires:INPUT B 13
2025-07-04 09:10:21.307 +08:00 [INF] thr:28<> AOI is Ready
2025-07-04 09:10:21.371 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-07-04 09:10:21.377 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-07-04 09:10:21.412 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:8
2025-07-04 09:10:21.416 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:8
2025-07-04 09:10:21.432 +08:00 [INF] thr:28<> stage move to position action ok
2025-07-04 09:10:21.432 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 09:10:21.433 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 09:10:21.433 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-04 09:10:21.878 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-04 09:10:21.878 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-07-04 09:10:22.337 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-04 09:10:22.784 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-04 09:10:23.257 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:10:23.707 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 09:10:23.707 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 09:10:23.707 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 09:10:24.211 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:10:24.211 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-04 09:10:24.664 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-04 09:10:25.111 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-04 09:10:25.559 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-04 09:10:26.007 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-04 09:10:26.453 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-04 09:10:26.898 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:27.351 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-07-04 09:10:32.634 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 09:10:32.634 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 09:10:32.634 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 09:10:33.138 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:10:33.138 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 09:10:33.584 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-07-04 09:10:36.297 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:10:36.768 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 09:10:36.768 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 09:10:36.768 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 09:10:37.271 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:10:37.271 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 09:10:37.718 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-04 09:10:38.165 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-04 09:10:38.612 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-04 09:10:39.060 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-04 09:10:39.508 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-04 09:10:39.953 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:40.906 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:41.860 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:42.812 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:43.765 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:44.719 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:10:45.171 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-04 09:10:45.623 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-04 09:10:48.341 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:10:48.792 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 09:10:48.793 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 09:10:48.793 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 09:10:49.299 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:10:49.299 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-04 09:10:54.562 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 09:10:54.564 +08:00 [INF] thr:84<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 09:10:54.564 +08:00 [INF] thr:84<> 执行Aligner角度angle：0
2025-07-04 09:10:55.572 +08:00 [INF] thr:84<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 09:10:55.573 +08:00 [INF] thr:84<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 09:10:55.573 +08:00 [INF] thr:84<> loader Requires:RGRP
2025-07-04 09:10:56.014 +08:00 [INF] thr:84<> CLeanLoader Group Now C
2025-07-04 09:10:56.014 +08:00 [INF] thr:84<> loader Requires:MATS AJ T
2025-07-04 09:10:59.555 +08:00 [INF] thr:84<> loader Requires:SSP Z 4000
2025-07-04 09:11:00.003 +08:00 [INF] thr:84<> loader Requires:MATS AJ Z 1
2025-07-04 09:11:07.021 +08:00 [INF] thr:84<> loader Requires:MOVR R 226000
2025-07-04 09:11:09.616 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 09:11:10.067 +08:00 [INF] thr:84<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 09:11:10.067 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 09:11:10.067 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 09:11:10.571 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:11:10.571 +08:00 [INF] thr:84<> loader Requires:INPUT A 6
2025-07-04 09:11:11.024 +08:00 [INF] thr:84<> loader Requires:MATS AJ R 0
2025-07-04 09:11:14.274 +08:00 [INF] thr:84<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 09:11:14.274 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 09:11:14.274 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 09:11:14.777 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:11:14.777 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 09:11:15.224 +08:00 [INF] thr:84<> loader Requires:MATS AJ Z 0
2025-07-04 09:11:17.838 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 09:11:18.287 +08:00 [INF] thr:84<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 09:11:18.287 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 09:11:18.287 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 09:11:18.791 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:11:18.791 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 09:11:19.239 +08:00 [INF] thr:84<> loader Requires:OUTP 1 0
2025-07-04 09:11:19.686 +08:00 [INF] thr:84<> loader Requires:OUTP 16 1
2025-07-04 09:11:20.134 +08:00 [INF] thr:84<> loader Requires:OUTP 15 1
2025-07-04 09:11:20.581 +08:00 [INF] thr:84<> loader Requires:OUTP 4 1
2025-07-04 09:11:21.029 +08:00 [INF] thr:84<> loader Requires:OUTP 1 1
2025-07-04 09:11:21.475 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 09:11:22.429 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 09:11:23.381 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 09:11:24.334 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 09:11:24.786 +08:00 [INF] thr:84<> loader Requires:INPUT A 5
2025-07-04 09:11:25.238 +08:00 [INF] thr:84<> loader Requires:MATS AJ Z 1
2025-07-04 09:11:27.855 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 09:11:28.306 +08:00 [INF] thr:84<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 09:11:28.306 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 09:11:28.306 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 09:11:28.809 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:11:28.809 +08:00 [INF] thr:84<> loader Requires:RETH
2025-07-04 09:11:33.846 +08:00 [INF] thr:84<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 09:11:33.850 +08:00 [INF] thr:84<> 执行Aligner角度angle：0
2025-07-04 09:52:25.177 +08:00 [INF] thr:37<> loader Requires:INPUT B 13
2025-07-04 09:52:26.147 +08:00 [INF] thr:28<> 执行Aligner角度angle：0
2025-07-04 09:52:27.152 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 09:52:27.153 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 09:52:27.153 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-04 09:52:27.597 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-04 09:52:27.597 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-04 09:52:28.056 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-04 09:52:28.505 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-04 09:52:28.979 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-04 09:52:31.575 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:52:32.025 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 09:52:32.025 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 09:52:32.025 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 09:52:32.529 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:52:32.529 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-04 09:52:32.982 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-04 09:52:33.429 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-04 09:52:33.877 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-04 09:52:34.325 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-04 09:52:34.773 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-04 09:52:35.218 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:35.670 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-04 09:52:38.920 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 09:52:38.920 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 09:52:38.920 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 09:52:39.423 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:52:39.423 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 09:52:39.872 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-04 09:52:42.484 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:52:42.933 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 09:52:42.933 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 09:52:42.933 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 09:52:43.437 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:52:43.437 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 09:52:43.884 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-04 09:52:44.332 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-04 09:52:44.779 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-04 09:52:45.228 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-04 09:52:45.674 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-04 09:52:46.120 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:47.075 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:48.028 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:48.980 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:49.933 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:50.886 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:52:51.338 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-04 09:52:51.792 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-04 09:52:54.417 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:52:54.867 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 09:52:54.867 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 09:52:54.867 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 09:52:55.371 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:52:55.371 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-04 09:53:00.407 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 09:53:00.408 +08:00 [INF] thr:28<> AOI is Ready
2025-07-04 09:53:00.475 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-07-04 09:53:00.478 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-07-04 09:53:00.513 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:8
2025-07-04 09:53:00.520 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:8
2025-07-04 09:53:00.550 +08:00 [INF] thr:28<> stage move to position action ok
2025-07-04 09:53:00.550 +08:00 [INF] thr:28<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 09:53:00.551 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 09:53:00.551 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-04 09:53:00.994 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-04 09:53:00.994 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-07-04 09:53:04.535 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-04 09:53:04.984 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-04 09:53:12.002 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:53:12.452 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 09:53:12.452 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 09:53:12.452 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 09:53:12.956 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:53:12.956 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-04 09:53:13.409 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-07-04 09:53:18.690 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 09:53:18.690 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 09:53:18.690 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 09:53:19.192 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:53:19.192 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 09:53:19.639 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-07-04 09:53:22.351 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:53:22.811 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 09:53:22.811 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 09:53:22.811 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 09:53:23.315 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:53:23.315 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 09:53:23.762 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-04 09:53:24.208 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-04 09:53:24.655 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-04 09:53:25.104 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-04 09:53:25.550 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-04 09:53:25.996 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:53:26.949 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:53:27.903 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:53:28.856 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 09:53:29.308 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-04 09:53:29.761 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-04 09:53:32.479 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 09:53:32.929 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 09:53:32.929 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 09:53:32.929 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 09:53:33.935 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 09:53:33.935 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-04 09:53:39.196 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 10:23:35.441 +08:00 [INF] thr:77<> loader Requires:INPUT B 13
2025-07-04 10:23:36.903 +08:00 [INF] thr:84<> AOI is Ready
2025-07-04 10:23:41.076 +08:00 [INF] thr:84<> SetVelocity, Axis:X, velocity:50
2025-07-04 10:23:41.079 +08:00 [INF] thr:84<> SetVelocity, Axis:Y, velocity:50
2025-07-04 10:23:45.354 +08:00 [INF] thr:84<> SetVelocity, Axis:X, velocity:8
2025-07-04 10:23:45.361 +08:00 [INF] thr:84<> SetVelocity, Axis:Y, velocity:8
2025-07-04 10:23:45.377 +08:00 [INF] thr:84<> stage move to position action ok
2025-07-04 10:23:45.378 +08:00 [INF] thr:84<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 10:23:45.378 +08:00 [INF] thr:84<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 10:23:45.378 +08:00 [INF] thr:84<> loader Requires:RGRP
2025-07-04 10:23:45.823 +08:00 [INF] thr:84<> CLeanLoader Group Now C
2025-07-04 10:23:45.823 +08:00 [INF] thr:84<> loader Requires:MATS AK T
2025-07-04 10:23:46.283 +08:00 [INF] thr:84<> loader Requires:SSP Z 4000
2025-07-04 10:23:46.729 +08:00 [INF] thr:84<> loader Requires:MATS AK Z 1
2025-07-04 10:23:47.202 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:23:47.652 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 10:23:47.652 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 10:23:47.653 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 10:23:48.157 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:23:48.157 +08:00 [INF] thr:84<> loader Requires:INPUT A 6
2025-07-04 10:23:48.609 +08:00 [INF] thr:84<> loader Requires:OUTP 1 0
2025-07-04 10:23:49.055 +08:00 [INF] thr:84<> loader Requires:OUTP 16 1
2025-07-04 10:23:49.503 +08:00 [INF] thr:84<> loader Requires:OUTP 15 1
2025-07-04 10:23:49.952 +08:00 [INF] thr:84<> loader Requires:OUTP 4 1
2025-07-04 10:23:50.399 +08:00 [INF] thr:84<> loader Requires:OUTP 1 1
2025-07-04 10:23:50.846 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:23:51.298 +08:00 [INF] thr:84<> loader Requires:MATS AK R 0
2025-07-04 10:23:56.578 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 10:23:56.578 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 10:23:56.578 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 10:23:57.082 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:23:57.082 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 10:23:57.532 +08:00 [INF] thr:84<> loader Requires:MATS AK Z 0
2025-07-04 10:24:00.245 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:24:00.717 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 10:24:00.717 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 10:24:00.717 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 10:24:01.221 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:24:01.221 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 10:24:01.670 +08:00 [INF] thr:84<> loader Requires:OUTP 1 0
2025-07-04 10:24:02.117 +08:00 [INF] thr:84<> loader Requires:OUTP 16 0
2025-07-04 10:24:02.564 +08:00 [INF] thr:84<> loader Requires:OUTP 15 1
2025-07-04 10:24:03.012 +08:00 [INF] thr:84<> loader Requires:OUTP 4 0
2025-07-04 10:24:03.458 +08:00 [INF] thr:84<> loader Requires:OUTP 1 1
2025-07-04 10:24:03.905 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:24:04.857 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:24:05.813 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:24:06.764 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:24:07.718 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:24:08.670 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:24:09.122 +08:00 [INF] thr:84<> loader Requires:INPUT A 5
2025-07-04 10:24:09.575 +08:00 [INF] thr:84<> loader Requires:MATS AK Z 1
2025-07-04 10:24:12.292 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:24:12.742 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 10:24:12.743 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 10:24:12.743 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 10:24:13.247 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:24:13.247 +08:00 [INF] thr:84<> loader Requires:RETH
2025-07-04 10:24:18.509 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 10:24:18.511 +08:00 [INF] thr:28<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 10:24:18.511 +08:00 [INF] thr:28<> 执行Aligner角度angle：0
2025-07-04 10:24:19.516 +08:00 [INF] thr:28<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 10:24:19.516 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 10:24:19.516 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-04 10:24:19.960 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-04 10:24:19.960 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-04 10:24:23.502 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-04 10:24:23.950 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-04 10:24:30.977 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-04 10:24:33.572 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 10:24:34.022 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 10:24:34.022 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 10:24:34.022 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 10:24:34.526 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:24:34.526 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-04 10:24:34.980 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-04 10:24:38.229 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 10:24:38.229 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 10:24:38.229 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 10:24:38.732 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:24:38.732 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 10:24:39.181 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-04 10:24:41.793 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 10:24:42.242 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 10:24:42.242 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 10:24:42.242 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 10:24:42.747 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:24:42.747 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-04 10:24:43.194 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-04 10:24:43.641 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-04 10:24:44.088 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-04 10:24:44.536 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-04 10:24:44.984 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-04 10:24:45.429 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 10:24:46.381 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 10:24:47.335 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 10:24:48.289 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-04 10:24:48.740 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-04 10:24:49.194 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-04 10:24:51.811 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-04 10:24:52.261 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 10:24:52.261 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 10:24:52.261 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 10:24:52.763 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:24:52.763 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-04 10:24:57.796 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 10:24:57.797 +08:00 [INF] thr:28<> 执行Aligner角度angle：0
2025-07-04 10:26:17.538 +08:00 [INF] thr:11<> loader Requires:INPUT B 13
2025-07-04 10:26:18.520 +08:00 [INF] thr:84<> 执行Aligner角度angle：0
2025-07-04 10:26:19.528 +08:00 [INF] thr:84<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 10:26:19.528 +08:00 [INF] thr:84<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 10:26:19.528 +08:00 [INF] thr:84<> loader Requires:RGRP
2025-07-04 10:26:19.968 +08:00 [INF] thr:84<> CLeanLoader Group Now C
2025-07-04 10:26:19.968 +08:00 [INF] thr:84<> loader Requires:MATS AJ T
2025-07-04 10:26:20.427 +08:00 [INF] thr:84<> loader Requires:SSP Z 4000
2025-07-04 10:26:20.874 +08:00 [INF] thr:84<> loader Requires:MATS AJ Z 1
2025-07-04 10:26:21.356 +08:00 [INF] thr:84<> loader Requires:MOVR R 226000
2025-07-04 10:26:23.951 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:26:24.401 +08:00 [INF] thr:84<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 10:26:24.401 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 10:26:24.401 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 10:26:24.904 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:26:24.904 +08:00 [INF] thr:84<> loader Requires:INPUT A 6
2025-07-04 10:26:25.358 +08:00 [INF] thr:84<> loader Requires:OUTP 1 0
2025-07-04 10:26:25.805 +08:00 [INF] thr:84<> loader Requires:OUTP 16 1
2025-07-04 10:26:26.253 +08:00 [INF] thr:84<> loader Requires:OUTP 15 1
2025-07-04 10:26:26.701 +08:00 [INF] thr:84<> loader Requires:OUTP 4 1
2025-07-04 10:26:27.148 +08:00 [INF] thr:84<> loader Requires:OUTP 1 1
2025-07-04 10:26:27.593 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:28.046 +08:00 [INF] thr:84<> loader Requires:MATS AJ R 0
2025-07-04 10:26:31.294 +08:00 [INF] thr:84<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 10:26:31.294 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 10:26:31.294 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 10:26:31.798 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:26:31.798 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 10:26:32.243 +08:00 [INF] thr:84<> loader Requires:MATS AJ Z 0
2025-07-04 10:26:34.856 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:26:35.304 +08:00 [INF] thr:84<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 10:26:35.304 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 10:26:35.304 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 10:26:35.807 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:26:35.808 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 10:26:36.257 +08:00 [INF] thr:84<> loader Requires:OUTP 1 0
2025-07-04 10:26:36.704 +08:00 [INF] thr:84<> loader Requires:OUTP 16 0
2025-07-04 10:26:37.151 +08:00 [INF] thr:84<> loader Requires:OUTP 15 1
2025-07-04 10:26:37.599 +08:00 [INF] thr:84<> loader Requires:OUTP 4 0
2025-07-04 10:26:38.046 +08:00 [INF] thr:84<> loader Requires:OUTP 1 1
2025-07-04 10:26:38.492 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:39.447 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:40.402 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:41.355 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:42.309 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:43.260 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:26:43.713 +08:00 [INF] thr:84<> loader Requires:INPUT A 5
2025-07-04 10:26:44.167 +08:00 [INF] thr:84<> loader Requires:MATS AJ Z 1
2025-07-04 10:26:46.784 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:26:47.234 +08:00 [INF] thr:84<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 10:26:47.234 +08:00 [INF] thr:84<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 10:26:47.234 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 10:26:47.737 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:26:47.737 +08:00 [INF] thr:84<> loader Requires:RETH
2025-07-04 10:26:52.774 +08:00 [INF] thr:84<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 10:26:52.776 +08:00 [INF] thr:84<> AOI is Ready
2025-07-04 10:26:52.841 +08:00 [INF] thr:84<> SetVelocity, Axis:X, velocity:50
2025-07-04 10:26:52.844 +08:00 [INF] thr:84<> SetVelocity, Axis:Y, velocity:50
2025-07-04 10:26:52.880 +08:00 [INF] thr:84<> SetVelocity, Axis:X, velocity:8
2025-07-04 10:26:52.883 +08:00 [INF] thr:84<> SetVelocity, Axis:Y, velocity:8
2025-07-04 10:26:52.899 +08:00 [INF] thr:84<> stage move to position action ok
2025-07-04 10:26:52.900 +08:00 [INF] thr:84<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 10:26:52.900 +08:00 [INF] thr:84<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 10:26:52.900 +08:00 [INF] thr:84<> loader Requires:RGRP
2025-07-04 10:26:53.341 +08:00 [INF] thr:84<> CLeanLoader Group Now C
2025-07-04 10:26:53.341 +08:00 [INF] thr:84<> loader Requires:MATS AK T
2025-07-04 10:26:56.884 +08:00 [INF] thr:84<> loader Requires:SSP Z 4000
2025-07-04 10:26:57.340 +08:00 [INF] thr:84<> loader Requires:MATS AK Z 1
2025-07-04 10:27:04.359 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:27:04.810 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 10:27:04.810 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 10:27:04.810 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 10:27:05.312 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:27:05.312 +08:00 [INF] thr:84<> loader Requires:INPUT A 6
2025-07-04 10:27:05.763 +08:00 [INF] thr:84<> loader Requires:MATS AK R 0
2025-07-04 10:27:11.045 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 10:27:11.045 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 10:27:11.045 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 10:27:11.550 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:27:11.550 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 10:27:11.999 +08:00 [INF] thr:84<> loader Requires:MATS AK Z 0
2025-07-04 10:27:14.711 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:27:15.213 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 10:27:15.213 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 10:27:15.213 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 10:27:15.716 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:27:15.716 +08:00 [INF] thr:84<> loader Requires:SSP Z 1000
2025-07-04 10:27:16.164 +08:00 [INF] thr:84<> loader Requires:OUTP 1 0
2025-07-04 10:27:16.611 +08:00 [INF] thr:84<> loader Requires:OUTP 16 1
2025-07-04 10:27:17.059 +08:00 [INF] thr:84<> loader Requires:OUTP 15 1
2025-07-04 10:27:17.508 +08:00 [INF] thr:84<> loader Requires:OUTP 4 1
2025-07-04 10:27:17.954 +08:00 [INF] thr:84<> loader Requires:OUTP 1 1
2025-07-04 10:27:18.400 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:27:19.354 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:27:20.307 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:27:21.262 +08:00 [INF] thr:84<> loader Requires:INPUT A 4
2025-07-04 10:27:21.715 +08:00 [INF] thr:84<> loader Requires:INPUT A 5
2025-07-04 10:27:22.169 +08:00 [INF] thr:84<> loader Requires:MATS AK Z 1
2025-07-04 10:27:24.887 +08:00 [INF] thr:84<> loader Requires:SSPP Z 30
2025-07-04 10:27:25.338 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 10:27:25.338 +08:00 [INF] thr:84<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 10:27:25.338 +08:00 [INF] thr:84<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 10:27:26.342 +08:00 [INF] thr:84<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 10:27:26.342 +08:00 [INF] thr:84<> loader Requires:RETH
2025-07-04 10:27:31.605 +08:00 [INF] thr:84<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 14:55:49.416 +08:00 [INF] thr:59<> loader Requires:INPUT B 13
2025-07-04 14:55:50.876 +08:00 [INF] thr:67<> AOI is Ready
2025-07-04 14:55:55.349 +08:00 [INF] thr:67<> SetVelocity, Axis:X, velocity:50
2025-07-04 14:55:55.353 +08:00 [INF] thr:67<> SetVelocity, Axis:Y, velocity:50
2025-07-04 14:55:59.368 +08:00 [INF] thr:67<> SetVelocity, Axis:X, velocity:8
2025-07-04 14:55:59.371 +08:00 [INF] thr:67<> SetVelocity, Axis:Y, velocity:8
2025-07-04 14:55:59.387 +08:00 [INF] thr:67<> stage move to position action ok
2025-07-04 14:55:59.388 +08:00 [INF] thr:67<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 14:55:59.389 +08:00 [INF] thr:67<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 14:55:59.389 +08:00 [INF] thr:67<> loader Requires:RGRP
2025-07-04 14:55:59.832 +08:00 [INF] thr:67<> CLeanLoader Group Now C
2025-07-04 14:55:59.832 +08:00 [INF] thr:67<> loader Requires:MATS AK T
2025-07-04 14:56:00.291 +08:00 [INF] thr:67<> loader Requires:SSP Z 4000
2025-07-04 14:56:00.738 +08:00 [INF] thr:67<> loader Requires:MATS AK Z 1
2025-07-04 14:56:01.210 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-07-04 14:56:01.661 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 14:56:01.661 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 14:56:01.661 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 14:56:02.166 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:02.166 +08:00 [INF] thr:67<> loader Requires:INPUT A 6
2025-07-04 14:56:02.619 +08:00 [INF] thr:67<> loader Requires:OUTP 1 0
2025-07-04 14:56:03.065 +08:00 [INF] thr:67<> loader Requires:OUTP 16 1
2025-07-04 14:56:03.513 +08:00 [INF] thr:67<> loader Requires:OUTP 15 1
2025-07-04 14:56:03.961 +08:00 [INF] thr:67<> loader Requires:OUTP 4 1
2025-07-04 14:56:04.408 +08:00 [INF] thr:67<> loader Requires:OUTP 1 1
2025-07-04 14:56:04.855 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:05.309 +08:00 [INF] thr:67<> loader Requires:MATS AK R 0
2025-07-04 14:56:10.592 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 14:56:10.592 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 14:56:10.592 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 14:56:11.095 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:11.095 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-07-04 14:56:11.541 +08:00 [INF] thr:67<> loader Requires:MATS AK Z 0
2025-07-04 14:56:14.254 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-07-04 14:56:14.715 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 14:56:14.715 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 14:56:14.715 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 14:56:15.220 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:15.220 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-07-04 14:56:15.669 +08:00 [INF] thr:67<> loader Requires:OUTP 1 0
2025-07-04 14:56:16.116 +08:00 [INF] thr:67<> loader Requires:OUTP 16 0
2025-07-04 14:56:16.563 +08:00 [INF] thr:67<> loader Requires:OUTP 15 1
2025-07-04 14:56:17.011 +08:00 [INF] thr:67<> loader Requires:OUTP 4 0
2025-07-04 14:56:17.458 +08:00 [INF] thr:67<> loader Requires:OUTP 1 1
2025-07-04 14:56:17.904 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:18.857 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:19.811 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:20.764 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:21.717 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:22.671 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:56:23.125 +08:00 [INF] thr:67<> loader Requires:INPUT A 5
2025-07-04 14:56:23.579 +08:00 [INF] thr:67<> loader Requires:MATS AK Z 1
2025-07-04 14:56:26.296 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-07-04 14:56:26.747 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 14:56:26.747 +08:00 [INF] thr:67<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 14:56:26.747 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 14:56:27.251 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:27.251 +08:00 [INF] thr:67<> loader Requires:RETH
2025-07-04 14:56:32.514 +08:00 [INF] thr:67<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 14:56:32.516 +08:00 [INF] thr:67<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 14:56:32.516 +08:00 [INF] thr:67<> 执行Aligner角度angle：0
2025-07-04 14:56:33.523 +08:00 [INF] thr:67<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 14:56:33.523 +08:00 [INF] thr:67<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 14:56:33.523 +08:00 [INF] thr:67<> loader Requires:RGRP
2025-07-04 14:56:33.965 +08:00 [INF] thr:67<> CLeanLoader Group Now C
2025-07-04 14:56:33.965 +08:00 [INF] thr:67<> loader Requires:MATS AJ T
2025-07-04 14:56:37.507 +08:00 [INF] thr:67<> loader Requires:SSP Z 4000
2025-07-04 14:56:37.955 +08:00 [INF] thr:67<> loader Requires:MATS AJ Z 1
2025-07-04 14:56:44.973 +08:00 [INF] thr:67<> loader Requires:MOVR R 226000
2025-07-04 14:56:47.568 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-07-04 14:56:48.019 +08:00 [INF] thr:67<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 14:56:48.019 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 14:56:48.019 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 14:56:48.524 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:48.524 +08:00 [INF] thr:67<> loader Requires:INPUT A 6
2025-07-04 14:56:48.977 +08:00 [INF] thr:67<> loader Requires:MATS AJ R 0
2025-07-04 14:56:52.226 +08:00 [INF] thr:67<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 14:56:52.227 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 14:56:52.227 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 14:56:52.730 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:52.730 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-07-04 14:56:53.178 +08:00 [INF] thr:67<> loader Requires:MATS AJ Z 0
2025-07-04 14:56:55.790 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-07-04 14:56:56.239 +08:00 [INF] thr:67<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 14:56:56.239 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 14:56:56.239 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 14:56:56.743 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:56:56.743 +08:00 [INF] thr:67<> loader Requires:SSP Z 1000
2025-07-04 14:56:57.191 +08:00 [INF] thr:67<> loader Requires:OUTP 1 0
2025-07-04 14:56:57.639 +08:00 [INF] thr:67<> loader Requires:OUTP 16 1
2025-07-04 14:56:58.085 +08:00 [INF] thr:67<> loader Requires:OUTP 15 1
2025-07-04 14:56:58.534 +08:00 [INF] thr:67<> loader Requires:OUTP 4 1
2025-07-04 14:56:58.980 +08:00 [INF] thr:67<> loader Requires:OUTP 1 1
2025-07-04 14:56:59.426 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:57:00.379 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:57:01.333 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:57:02.286 +08:00 [INF] thr:67<> loader Requires:INPUT A 4
2025-07-04 14:57:02.737 +08:00 [INF] thr:67<> loader Requires:INPUT A 5
2025-07-04 14:57:03.191 +08:00 [INF] thr:67<> loader Requires:MATS AJ Z 1
2025-07-04 14:57:05.808 +08:00 [INF] thr:67<> loader Requires:SSPP Z 30
2025-07-04 14:57:06.258 +08:00 [INF] thr:67<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 14:57:06.258 +08:00 [INF] thr:67<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 14:57:06.258 +08:00 [INF] thr:67<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 14:57:06.762 +08:00 [INF] thr:67<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:57:06.762 +08:00 [INF] thr:67<> loader Requires:RETH
2025-07-04 14:57:11.798 +08:00 [INF] thr:67<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 14:57:11.799 +08:00 [INF] thr:67<> 执行Aligner角度angle：0
2025-07-04 14:57:54.504 +08:00 [INF] thr:77<> loader Requires:INPUT B 13
2025-07-04 14:57:55.484 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-04 14:57:56.489 +08:00 [INF] thr:42<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 14:57:56.490 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 14:57:56.490 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-04 14:57:56.932 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-04 14:57:56.932 +08:00 [INF] thr:42<> loader Requires:MATS AJ T
2025-07-04 14:57:57.391 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-04 14:57:57.839 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-04 14:57:58.311 +08:00 [INF] thr:42<> loader Requires:MOVR R 226000
2025-07-04 14:58:00.907 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-04 14:58:01.358 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 14:58:01.358 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 14:58:01.358 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 14:58:01.861 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:01.861 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-04 14:58:02.316 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-04 14:58:02.762 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-04 14:58:03.209 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-04 14:58:03.658 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-04 14:58:04.105 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-04 14:58:04.551 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:05.002 +08:00 [INF] thr:42<> loader Requires:MATS AJ R 0
2025-07-04 14:58:08.251 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 14:58:08.252 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 14:58:08.252 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 14:58:08.755 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:08.755 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-04 14:58:09.203 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 0
2025-07-04 14:58:11.816 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-04 14:58:12.265 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 14:58:12.265 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 14:58:12.265 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 14:58:12.770 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:12.770 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-04 14:58:13.218 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-04 14:58:13.664 +08:00 [INF] thr:42<> loader Requires:OUTP 16 0
2025-07-04 14:58:14.114 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-04 14:58:14.563 +08:00 [INF] thr:42<> loader Requires:OUTP 4 0
2025-07-04 14:58:15.010 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-04 14:58:15.456 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:16.410 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:17.371 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:18.325 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:19.278 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:20.232 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:20.687 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-04 14:58:21.140 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-04 14:58:23.757 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-04 14:58:24.208 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 14:58:24.208 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 14:58:24.208 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 14:58:24.710 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:24.710 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-04 14:58:29.743 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 14:58:29.744 +08:00 [INF] thr:42<> AOI is Ready
2025-07-04 14:58:29.810 +08:00 [INF] thr:42<> SetVelocity, Axis:X, velocity:50
2025-07-04 14:58:29.813 +08:00 [INF] thr:42<> SetVelocity, Axis:Y, velocity:50
2025-07-04 14:58:29.847 +08:00 [INF] thr:42<> SetVelocity, Axis:X, velocity:8
2025-07-04 14:58:29.851 +08:00 [INF] thr:42<> SetVelocity, Axis:Y, velocity:8
2025-07-04 14:58:29.868 +08:00 [INF] thr:42<> stage move to position action ok
2025-07-04 14:58:29.868 +08:00 [INF] thr:42<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 14:58:29.869 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 14:58:29.869 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-04 14:58:30.311 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-04 14:58:30.311 +08:00 [INF] thr:42<> loader Requires:MATS AK T
2025-07-04 14:58:33.853 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-04 14:58:34.302 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 1
2025-07-04 14:58:41.320 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-04 14:58:41.770 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 14:58:41.770 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 14:58:41.770 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 14:58:42.273 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:42.273 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-04 14:58:42.727 +08:00 [INF] thr:42<> loader Requires:MATS AK R 0
2025-07-04 14:58:48.009 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 14:58:48.010 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 14:58:48.010 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 14:58:48.512 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:48.512 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-04 14:58:48.959 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 0
2025-07-04 14:58:51.672 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-04 14:58:52.140 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 14:58:52.140 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 14:58:52.140 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 14:58:52.643 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:58:52.643 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-04 14:58:53.093 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-04 14:58:53.540 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-04 14:58:53.987 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-04 14:58:54.435 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-04 14:58:54.882 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-04 14:58:55.328 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:56.282 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:57.234 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:58.187 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-04 14:58:58.639 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-04 14:58:59.093 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 1
2025-07-04 14:59:01.813 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-04 14:59:02.260 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 14:59:02.260 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 14:59:02.260 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 14:59:03.267 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 14:59:03.267 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-04 14:59:08.528 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 15:32:31.987 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:63113
2025-07-04 15:38:44.440 +08:00 [INF] thr:23<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-04 16:19:49.612 +08:00 [INF] thr:15<> loader Requires:INPUT B 13
2025-07-04 16:19:51.116 +08:00 [INF] thr:68<> AOI is Ready
2025-07-04 16:19:55.586 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:50
2025-07-04 16:19:55.590 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:50
2025-07-04 16:19:58.833 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:8
2025-07-04 16:19:58.836 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:8
2025-07-04 16:19:58.852 +08:00 [INF] thr:68<> stage move to position action ok
2025-07-04 16:19:58.853 +08:00 [INF] thr:68<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 16:19:58.853 +08:00 [INF] thr:68<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 16:19:58.853 +08:00 [INF] thr:68<> loader Requires:RGRP
2025-07-04 16:19:59.297 +08:00 [INF] thr:68<> CLeanLoader Group Now C
2025-07-04 16:19:59.297 +08:00 [INF] thr:68<> loader Requires:MATS AK T
2025-07-04 16:19:59.755 +08:00 [INF] thr:68<> loader Requires:SSP Z 4000
2025-07-04 16:20:00.201 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-04 16:20:00.675 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:20:01.125 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 16:20:01.125 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 16:20:01.125 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 16:20:01.629 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:01.629 +08:00 [INF] thr:68<> loader Requires:INPUT A 6
2025-07-04 16:20:02.082 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-04 16:20:02.529 +08:00 [INF] thr:68<> loader Requires:OUTP 16 1
2025-07-04 16:20:02.976 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-04 16:20:03.425 +08:00 [INF] thr:68<> loader Requires:OUTP 4 1
2025-07-04 16:20:03.872 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-04 16:20:04.317 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:04.769 +08:00 [INF] thr:68<> loader Requires:MATS AK R 0
2025-07-04 16:20:10.051 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 16:20:10.051 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 16:20:10.051 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 16:20:10.554 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:10.554 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 16:20:11.000 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 0
2025-07-04 16:20:13.713 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:20:14.184 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 16:20:14.184 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 16:20:14.184 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 16:20:14.688 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:14.688 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 16:20:15.135 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-04 16:20:15.582 +08:00 [INF] thr:68<> loader Requires:OUTP 16 0
2025-07-04 16:20:16.030 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-04 16:20:16.478 +08:00 [INF] thr:68<> loader Requires:OUTP 4 0
2025-07-04 16:20:16.926 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-04 16:20:17.371 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:18.325 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:19.278 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:20.232 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:21.183 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:22.137 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:20:22.589 +08:00 [INF] thr:68<> loader Requires:INPUT A 5
2025-07-04 16:20:23.042 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-04 16:20:25.760 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:20:26.211 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 16:20:26.211 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 16:20:26.211 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 16:20:26.715 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:26.715 +08:00 [INF] thr:68<> loader Requires:RETH
2025-07-04 16:20:31.976 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 16:20:31.977 +08:00 [INF] thr:33<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 16:20:31.977 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-04 16:20:32.986 +08:00 [INF] thr:33<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 16:20:32.986 +08:00 [INF] thr:33<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 16:20:32.986 +08:00 [INF] thr:33<> loader Requires:RGRP
2025-07-04 16:20:33.430 +08:00 [INF] thr:33<> CLeanLoader Group Now C
2025-07-04 16:20:33.430 +08:00 [INF] thr:33<> loader Requires:MATS AJ T
2025-07-04 16:20:36.973 +08:00 [INF] thr:33<> loader Requires:SSP Z 4000
2025-07-04 16:20:37.422 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-04 16:20:44.440 +08:00 [INF] thr:33<> loader Requires:MOVR R 226000
2025-07-04 16:20:47.033 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-04 16:20:47.484 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 16:20:47.484 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 16:20:47.484 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 16:20:47.987 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:47.987 +08:00 [INF] thr:33<> loader Requires:INPUT A 6
2025-07-04 16:20:48.437 +08:00 [INF] thr:33<> loader Requires:MATS AJ R 0
2025-07-04 16:20:51.687 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 16:20:51.687 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 16:20:51.687 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 16:20:52.190 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:52.190 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-04 16:20:52.639 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 0
2025-07-04 16:20:55.252 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-04 16:20:55.701 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 16:20:55.701 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 16:20:55.701 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 16:20:56.203 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:20:56.203 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-04 16:20:56.652 +08:00 [INF] thr:33<> loader Requires:OUTP 1 0
2025-07-04 16:20:57.099 +08:00 [INF] thr:33<> loader Requires:OUTP 16 1
2025-07-04 16:20:57.547 +08:00 [INF] thr:33<> loader Requires:OUTP 15 1
2025-07-04 16:20:57.996 +08:00 [INF] thr:33<> loader Requires:OUTP 4 1
2025-07-04 16:20:58.443 +08:00 [INF] thr:33<> loader Requires:OUTP 1 1
2025-07-04 16:20:58.888 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 16:20:59.843 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 16:21:00.794 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 16:21:01.748 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 16:21:02.200 +08:00 [INF] thr:33<> loader Requires:INPUT A 5
2025-07-04 16:21:02.651 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-04 16:21:05.269 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-04 16:21:05.718 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 16:21:05.719 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 16:21:05.719 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 16:21:06.222 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:21:06.223 +08:00 [INF] thr:33<> loader Requires:RETH
2025-07-04 16:21:11.257 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 16:21:11.260 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-04 16:21:45.918 +08:00 [INF] thr:52<> loader Requires:INPUT B 13
2025-07-04 16:21:46.896 +08:00 [INF] thr:35<> 执行Aligner角度angle：0
2025-07-04 16:21:47.901 +08:00 [INF] thr:35<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 16:21:47.902 +08:00 [INF] thr:35<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 16:21:47.902 +08:00 [INF] thr:35<> loader Requires:RGRP
2025-07-04 16:21:48.345 +08:00 [INF] thr:35<> CLeanLoader Group Now C
2025-07-04 16:21:48.345 +08:00 [INF] thr:35<> loader Requires:MATS AJ T
2025-07-04 16:21:48.804 +08:00 [INF] thr:35<> loader Requires:SSP Z 4000
2025-07-04 16:21:49.251 +08:00 [INF] thr:35<> loader Requires:MATS AJ Z 1
2025-07-04 16:21:49.724 +08:00 [INF] thr:35<> loader Requires:MOVR R 226000
2025-07-04 16:21:52.320 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-04 16:21:52.770 +08:00 [INF] thr:35<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 16:21:52.770 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 16:21:52.770 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 16:21:53.274 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:21:53.274 +08:00 [INF] thr:35<> loader Requires:INPUT A 6
2025-07-04 16:21:53.728 +08:00 [INF] thr:35<> loader Requires:OUTP 1 0
2025-07-04 16:21:54.175 +08:00 [INF] thr:35<> loader Requires:OUTP 16 1
2025-07-04 16:21:54.621 +08:00 [INF] thr:35<> loader Requires:OUTP 15 1
2025-07-04 16:21:55.070 +08:00 [INF] thr:35<> loader Requires:OUTP 4 1
2025-07-04 16:21:55.517 +08:00 [INF] thr:35<> loader Requires:OUTP 1 1
2025-07-04 16:21:55.963 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:21:56.416 +08:00 [INF] thr:35<> loader Requires:MATS AJ R 0
2025-07-04 16:21:59.664 +08:00 [INF] thr:35<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 16:21:59.664 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 16:21:59.664 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 16:22:00.168 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:00.168 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-04 16:22:00.616 +08:00 [INF] thr:35<> loader Requires:MATS AJ Z 0
2025-07-04 16:22:03.229 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-04 16:22:03.678 +08:00 [INF] thr:35<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 16:22:03.678 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 16:22:03.678 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 16:22:04.180 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:04.181 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-04 16:22:04.630 +08:00 [INF] thr:35<> loader Requires:OUTP 1 0
2025-07-04 16:22:05.078 +08:00 [INF] thr:35<> loader Requires:OUTP 16 0
2025-07-04 16:22:05.529 +08:00 [INF] thr:35<> loader Requires:OUTP 15 1
2025-07-04 16:22:05.977 +08:00 [INF] thr:35<> loader Requires:OUTP 4 0
2025-07-04 16:22:06.424 +08:00 [INF] thr:35<> loader Requires:OUTP 1 1
2025-07-04 16:22:06.870 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:07.824 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:08.778 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:09.734 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:10.688 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:11.640 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:12.092 +08:00 [INF] thr:35<> loader Requires:INPUT A 5
2025-07-04 16:22:12.546 +08:00 [INF] thr:35<> loader Requires:MATS AJ Z 1
2025-07-04 16:22:15.162 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-04 16:22:15.612 +08:00 [INF] thr:35<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 16:22:15.612 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 16:22:15.612 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 16:22:16.116 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:16.116 +08:00 [INF] thr:35<> loader Requires:RETH
2025-07-04 16:22:21.152 +08:00 [INF] thr:35<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 16:22:21.154 +08:00 [INF] thr:35<> AOI is Ready
2025-07-04 16:22:21.225 +08:00 [INF] thr:35<> SetVelocity, Axis:X, velocity:50
2025-07-04 16:22:21.228 +08:00 [INF] thr:35<> SetVelocity, Axis:Y, velocity:50
2025-07-04 16:22:21.263 +08:00 [INF] thr:35<> SetVelocity, Axis:X, velocity:8
2025-07-04 16:22:21.266 +08:00 [INF] thr:35<> SetVelocity, Axis:Y, velocity:8
2025-07-04 16:22:21.283 +08:00 [INF] thr:35<> stage move to position action ok
2025-07-04 16:22:21.283 +08:00 [INF] thr:35<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 16:22:21.283 +08:00 [INF] thr:35<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 16:22:21.283 +08:00 [INF] thr:35<> loader Requires:RGRP
2025-07-04 16:22:21.727 +08:00 [INF] thr:35<> CLeanLoader Group Now C
2025-07-04 16:22:21.728 +08:00 [INF] thr:35<> loader Requires:MATS AK T
2025-07-04 16:22:25.270 +08:00 [INF] thr:35<> loader Requires:SSP Z 4000
2025-07-04 16:22:25.718 +08:00 [INF] thr:35<> loader Requires:MATS AK Z 1
2025-07-04 16:22:32.737 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-04 16:22:33.186 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 16:22:33.186 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 16:22:33.186 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 16:22:33.688 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:33.688 +08:00 [INF] thr:35<> loader Requires:INPUT A 6
2025-07-04 16:22:34.140 +08:00 [INF] thr:35<> loader Requires:MATS AK R 0
2025-07-04 16:22:39.422 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 16:22:39.422 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 16:22:39.422 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 16:22:39.923 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:39.923 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-04 16:22:40.371 +08:00 [INF] thr:35<> loader Requires:MATS AK Z 0
2025-07-04 16:22:43.085 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-04 16:22:43.546 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 16:22:43.546 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 16:22:43.546 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 16:22:44.050 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:44.050 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-04 16:22:44.498 +08:00 [INF] thr:35<> loader Requires:OUTP 1 0
2025-07-04 16:22:44.945 +08:00 [INF] thr:35<> loader Requires:OUTP 16 1
2025-07-04 16:22:45.394 +08:00 [INF] thr:35<> loader Requires:OUTP 15 1
2025-07-04 16:22:45.842 +08:00 [INF] thr:35<> loader Requires:OUTP 4 1
2025-07-04 16:22:46.288 +08:00 [INF] thr:35<> loader Requires:OUTP 1 1
2025-07-04 16:22:46.734 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:47.688 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:48.641 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:49.593 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-04 16:22:50.045 +08:00 [INF] thr:35<> loader Requires:INPUT A 5
2025-07-04 16:22:50.498 +08:00 [INF] thr:35<> loader Requires:MATS AK Z 1
2025-07-04 16:22:53.215 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-04 16:22:53.666 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 16:22:53.666 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 16:22:53.666 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 16:22:54.672 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:22:54.672 +08:00 [INF] thr:35<> loader Requires:RETH
2025-07-04 16:22:59.937 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 16:58:15.558 +08:00 [INF] thr:15<> loader Requires:INPUT B 13
2025-07-04 16:58:17.020 +08:00 [INF] thr:68<> AOI is Ready
2025-07-04 16:58:21.487 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:50
2025-07-04 16:58:21.490 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:50
2025-07-04 16:58:25.504 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:8
2025-07-04 16:58:25.507 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:8
2025-07-04 16:58:25.523 +08:00 [INF] thr:68<> stage move to position action ok
2025-07-04 16:58:25.524 +08:00 [INF] thr:68<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 16:58:25.524 +08:00 [INF] thr:68<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 16:58:25.524 +08:00 [INF] thr:68<> loader Requires:RGRP
2025-07-04 16:58:25.969 +08:00 [INF] thr:68<> CLeanLoader Group Now C
2025-07-04 16:58:25.969 +08:00 [INF] thr:68<> loader Requires:MATS AK T
2025-07-04 16:58:26.427 +08:00 [INF] thr:68<> loader Requires:SSP Z 4000
2025-07-04 16:58:26.874 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-04 16:58:27.348 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:58:27.798 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 16:58:27.799 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 16:58:27.799 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 16:58:28.301 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:58:28.302 +08:00 [INF] thr:68<> loader Requires:INPUT A 6
2025-07-04 16:58:28.754 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-04 16:58:29.201 +08:00 [INF] thr:68<> loader Requires:OUTP 16 1
2025-07-04 16:58:29.649 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-04 16:58:30.099 +08:00 [INF] thr:68<> loader Requires:OUTP 4 1
2025-07-04 16:58:30.544 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-04 16:58:30.990 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:31.443 +08:00 [INF] thr:68<> loader Requires:MATS AK R 0
2025-07-04 16:58:36.725 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 16:58:36.725 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 16:58:36.725 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 16:58:37.228 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:58:37.228 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 16:58:37.677 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 0
2025-07-04 16:58:40.390 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:58:40.852 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 16:58:40.852 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 16:58:40.852 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 16:58:41.355 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:58:41.355 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 16:58:41.804 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-04 16:58:42.251 +08:00 [INF] thr:68<> loader Requires:OUTP 16 0
2025-07-04 16:58:42.699 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-04 16:58:43.147 +08:00 [INF] thr:68<> loader Requires:OUTP 4 0
2025-07-04 16:58:43.592 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-04 16:58:44.039 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:44.993 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:45.946 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:46.900 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:47.851 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:48.805 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:58:49.256 +08:00 [INF] thr:68<> loader Requires:INPUT A 5
2025-07-04 16:58:49.709 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-04 16:58:52.427 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:58:52.877 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 16:58:52.877 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 16:58:52.877 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 16:58:53.379 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:58:53.379 +08:00 [INF] thr:68<> loader Requires:RETH
2025-07-04 16:58:58.643 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 16:58:58.644 +08:00 [INF] thr:68<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 16:58:58.644 +08:00 [INF] thr:68<> 执行Aligner角度angle：0
2025-07-04 16:58:59.651 +08:00 [INF] thr:68<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 16:58:59.652 +08:00 [INF] thr:68<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 16:58:59.652 +08:00 [INF] thr:68<> loader Requires:RGRP
2025-07-04 16:59:00.093 +08:00 [INF] thr:68<> CLeanLoader Group Now C
2025-07-04 16:59:00.093 +08:00 [INF] thr:68<> loader Requires:MATS AJ T
2025-07-04 16:59:03.636 +08:00 [INF] thr:68<> loader Requires:SSP Z 4000
2025-07-04 16:59:04.086 +08:00 [INF] thr:68<> loader Requires:MATS AJ Z 1
2025-07-04 16:59:11.111 +08:00 [INF] thr:68<> loader Requires:MOVR R 226000
2025-07-04 16:59:13.706 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:59:14.157 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 16:59:14.157 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 16:59:14.157 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 16:59:14.660 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:59:14.660 +08:00 [INF] thr:68<> loader Requires:INPUT A 6
2025-07-04 16:59:15.114 +08:00 [INF] thr:68<> loader Requires:MATS AJ R 0
2025-07-04 16:59:18.364 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 16:59:18.364 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 16:59:18.364 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 16:59:18.867 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:59:18.867 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 16:59:19.316 +08:00 [INF] thr:68<> loader Requires:MATS AJ Z 0
2025-07-04 16:59:21.929 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:59:22.378 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 16:59:22.378 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 16:59:22.378 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 16:59:22.880 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:59:22.880 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 16:59:23.329 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-04 16:59:23.776 +08:00 [INF] thr:68<> loader Requires:OUTP 16 1
2025-07-04 16:59:24.224 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-04 16:59:24.673 +08:00 [INF] thr:68<> loader Requires:OUTP 4 1
2025-07-04 16:59:25.119 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-04 16:59:25.564 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:59:26.518 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:59:27.471 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:59:28.425 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 16:59:28.876 +08:00 [INF] thr:68<> loader Requires:INPUT A 5
2025-07-04 16:59:29.330 +08:00 [INF] thr:68<> loader Requires:MATS AJ Z 1
2025-07-04 16:59:31.947 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 16:59:32.398 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 16:59:32.398 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 16:59:32.398 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 16:59:32.901 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 16:59:32.901 +08:00 [INF] thr:68<> loader Requires:RETH
2025-07-04 16:59:37.933 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 16:59:37.934 +08:00 [INF] thr:68<> 执行Aligner角度angle：0
2025-07-04 17:00:56.950 +08:00 [INF] thr:45<> loader Requires:INPUT B 13
2025-07-04 17:00:57.921 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-04 17:00:58.927 +08:00 [INF] thr:66<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 17:00:58.928 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 17:00:58.928 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-04 17:00:59.371 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-04 17:00:59.371 +08:00 [INF] thr:66<> loader Requires:MATS AJ T
2025-07-04 17:00:59.828 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-04 17:01:00.276 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-04 17:01:00.749 +08:00 [INF] thr:66<> loader Requires:MOVR R 226000
2025-07-04 17:01:03.345 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 17:01:03.797 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 17:01:03.797 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 17:01:03.797 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 17:01:04.300 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:04.300 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-04 17:01:04.753 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-04 17:01:05.200 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-04 17:01:05.647 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-04 17:01:06.096 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-04 17:01:06.542 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-04 17:01:06.988 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:07.441 +08:00 [INF] thr:66<> loader Requires:MATS AJ R 0
2025-07-04 17:01:10.690 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 17:01:10.690 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 17:01:10.690 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 17:01:11.194 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:11.194 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 17:01:11.643 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 0
2025-07-04 17:01:14.255 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 17:01:14.705 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 17:01:14.705 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 17:01:14.705 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 17:01:15.207 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:15.207 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 17:01:15.657 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-04 17:01:16.103 +08:00 [INF] thr:66<> loader Requires:OUTP 16 0
2025-07-04 17:01:16.551 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-04 17:01:16.999 +08:00 [INF] thr:66<> loader Requires:OUTP 4 0
2025-07-04 17:01:17.446 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-04 17:01:17.892 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:18.847 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:19.800 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:20.751 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:21.705 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:22.658 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:23.108 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-04 17:01:23.562 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-04 17:01:26.179 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 17:01:26.630 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 17:01:26.630 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 17:01:26.630 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 17:01:27.132 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:27.132 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-04 17:01:32.166 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 17:01:32.167 +08:00 [INF] thr:66<> AOI is Ready
2025-07-04 17:01:32.230 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:50
2025-07-04 17:01:32.237 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:50
2025-07-04 17:01:32.277 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:8
2025-07-04 17:01:32.281 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:8
2025-07-04 17:01:32.297 +08:00 [INF] thr:66<> stage move to position action ok
2025-07-04 17:01:32.297 +08:00 [INF] thr:66<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 17:01:32.298 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 17:01:32.298 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-04 17:01:32.741 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-04 17:01:32.741 +08:00 [INF] thr:66<> loader Requires:MATS AK T
2025-07-04 17:01:36.284 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-04 17:01:36.733 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-04 17:01:43.751 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 17:01:44.200 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 17:01:44.200 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 17:01:44.200 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 17:01:44.703 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:44.703 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-04 17:01:45.158 +08:00 [INF] thr:66<> loader Requires:MATS AK R 0
2025-07-04 17:01:50.439 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 17:01:50.439 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 17:01:50.439 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 17:01:50.943 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:50.943 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 17:01:51.394 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 0
2025-07-04 17:01:54.106 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 17:01:54.567 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 17:01:54.567 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 17:01:54.567 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 17:01:55.071 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:01:55.071 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 17:01:55.519 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-04 17:01:55.966 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-04 17:01:56.414 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-04 17:01:56.863 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-04 17:01:57.310 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-04 17:01:57.756 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:58.710 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:01:59.661 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:02:00.615 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 17:02:01.067 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-04 17:02:01.519 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-04 17:02:04.236 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 17:02:04.687 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 17:02:04.687 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 17:02:04.687 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 17:02:05.694 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 17:02:05.694 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-04 17:02:10.959 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 18:28:06.802 +08:00 [INF] thr:82<> loader Requires:INPUT B 13
2025-07-04 18:28:08.264 +08:00 [INF] thr:74<> AOI is Ready
2025-07-04 18:28:12.532 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-07-04 18:28:12.535 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-07-04 18:28:16.680 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:60
2025-07-04 18:28:16.684 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:60
2025-07-04 18:28:16.713 +08:00 [INF] thr:74<> stage move to position action ok
2025-07-04 18:28:16.713 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 18:28:16.714 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 18:28:16.714 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-04 18:28:17.157 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-04 18:28:17.157 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-07-04 18:28:17.615 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-04 18:28:18.062 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-04 18:28:18.536 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-04 18:28:18.986 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 18:28:18.986 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 18:28:18.986 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 18:28:19.489 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:28:19.489 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-04 18:28:19.943 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-04 18:28:20.389 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-04 18:28:20.837 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-04 18:28:21.285 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-04 18:28:21.732 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-04 18:28:22.178 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:22.631 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-07-04 18:28:27.921 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 18:28:27.921 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 18:28:27.921 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 18:28:28.424 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:28:28.424 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-04 18:28:28.871 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-07-04 18:28:31.583 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-04 18:28:32.053 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 18:28:32.053 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 18:28:32.053 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 18:28:32.556 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:28:32.556 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-04 18:28:33.006 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-04 18:28:33.452 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-07-04 18:28:33.899 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-04 18:28:34.348 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-07-04 18:28:34.795 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-04 18:28:35.239 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:36.194 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:37.147 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:38.101 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:39.052 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:40.006 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-04 18:28:40.457 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-04 18:28:40.911 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-04 18:28:43.628 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-04 18:28:44.087 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 18:28:44.087 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 18:28:44.087 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 18:28:44.590 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:28:44.590 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-04 18:28:49.853 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 18:28:49.854 +08:00 [INF] thr:64<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 18:28:49.855 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-04 18:28:50.862 +08:00 [INF] thr:64<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 18:28:50.863 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 18:28:50.863 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 18:28:51.303 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 18:28:51.303 +08:00 [INF] thr:64<> loader Requires:MATS AJ T
2025-07-04 18:28:54.846 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 18:28:55.295 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 18:29:02.313 +08:00 [INF] thr:64<> loader Requires:MOVR R 226000
2025-07-04 18:29:04.908 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:29:05.358 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 18:29:05.358 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 18:29:05.358 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 18:29:05.861 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:29:05.861 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 18:29:06.314 +08:00 [INF] thr:64<> loader Requires:MATS AJ R 0
2025-07-04 18:29:09.565 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 18:29:09.565 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 18:29:09.565 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 18:29:10.068 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:29:10.068 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 18:29:10.516 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 0
2025-07-04 18:29:13.130 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:29:13.579 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 18:29:13.579 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 18:29:13.579 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 18:29:14.081 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:29:14.081 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 18:29:14.530 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 18:29:14.977 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 18:29:15.425 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 18:29:15.873 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 18:29:16.321 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 18:29:16.766 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:29:17.723 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:29:18.676 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:29:19.629 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:29:20.080 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 18:29:20.533 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 18:29:23.151 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:29:23.602 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 18:29:23.602 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 18:29:23.602 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 18:29:24.106 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:29:24.106 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 18:29:29.142 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 18:29:29.143 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-04 18:31:02.547 +08:00 [INF] thr:17<> loader Requires:INPUT B 13
2025-07-04 18:31:03.524 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-04 18:31:04.530 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 18:31:04.530 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 18:31:04.530 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 18:31:04.976 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 18:31:04.976 +08:00 [INF] thr:64<> loader Requires:MATS AJ T
2025-07-04 18:31:05.433 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 18:31:05.881 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 18:31:06.353 +08:00 [INF] thr:64<> loader Requires:MOVR R 226000
2025-07-04 18:31:08.949 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:31:09.400 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 18:31:09.400 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 18:31:09.400 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 18:31:09.903 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:31:09.903 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 18:31:10.358 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 18:31:10.805 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 18:31:11.251 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 18:31:11.700 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 18:31:12.147 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 18:31:12.593 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:13.046 +08:00 [INF] thr:64<> loader Requires:MATS AJ R 0
2025-07-04 18:31:16.295 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 18:31:16.295 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 18:31:16.295 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 18:31:16.798 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:31:16.798 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 18:31:17.246 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 0
2025-07-04 18:31:19.858 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:31:20.310 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 18:31:20.311 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 18:31:20.311 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 18:31:20.814 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:31:20.814 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 18:31:21.263 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 18:31:21.709 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-04 18:31:22.157 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 18:31:22.606 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-04 18:31:23.053 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 18:31:23.499 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:24.453 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:25.406 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:26.360 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:27.311 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:28.265 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:31:28.717 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 18:31:29.169 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 18:31:31.786 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:31:32.237 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 18:31:32.237 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 18:31:32.237 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 18:31:32.740 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:31:32.740 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 18:31:37.775 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 18:31:37.776 +08:00 [INF] thr:64<> AOI is Ready
2025-07-04 18:31:37.845 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-04 18:31:37.849 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-04 18:31:37.884 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:60
2025-07-04 18:31:37.887 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:60
2025-07-04 18:31:37.904 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-04 18:31:37.904 +08:00 [INF] thr:64<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 18:31:37.905 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 18:31:37.905 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 18:31:38.347 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 18:31:38.347 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-04 18:31:41.889 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 18:31:42.337 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 18:31:49.356 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:31:49.805 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 18:31:49.805 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 18:31:49.805 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 18:31:50.309 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:31:50.309 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 18:31:50.764 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-04 18:31:56.046 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 18:31:56.047 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 18:31:56.047 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 18:31:56.550 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:31:56.550 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 18:31:57.000 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-04 18:31:59.713 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:32:00.181 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 18:32:00.181 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 18:32:00.181 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 18:32:00.684 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:32:00.684 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 18:32:01.131 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 18:32:01.578 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 18:32:02.025 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 18:32:02.473 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 18:32:02.920 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 18:32:03.366 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:32:04.320 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:32:05.274 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:32:06.225 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 18:32:06.677 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 18:32:07.130 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 18:32:09.848 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 18:32:10.298 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 18:32:10.298 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 18:32:10.298 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 18:32:11.305 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 18:32:11.305 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 18:32:16.569 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 19:51:04.023 +08:00 [INF] thr:59<> loader Requires:INPUT B 13
2025-07-04 19:51:05.484 +08:00 [INF] thr:73<> AOI is Ready
2025-07-04 19:51:09.195 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:50
2025-07-04 19:51:09.203 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:50
2025-07-04 19:51:13.686 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:60
2025-07-04 19:51:13.693 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:60
2025-07-04 19:51:13.726 +08:00 [INF] thr:73<> stage move to position action ok
2025-07-04 19:51:13.726 +08:00 [INF] thr:73<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 19:51:13.728 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 19:51:13.728 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-04 19:51:14.170 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-04 19:51:14.170 +08:00 [INF] thr:73<> loader Requires:MATS AK T
2025-07-04 19:51:14.629 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-04 19:51:15.074 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-04 19:51:15.548 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 19:51:15.998 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 19:51:15.998 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 19:51:15.998 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 19:51:16.503 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:51:16.503 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-04 19:51:16.955 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-04 19:51:17.402 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-04 19:51:17.849 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-04 19:51:18.298 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-04 19:51:18.745 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-04 19:51:19.190 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:19.642 +08:00 [INF] thr:73<> loader Requires:MATS AK R 0
2025-07-04 19:51:24.924 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 19:51:24.924 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 19:51:24.924 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 19:51:25.428 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:51:25.428 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-04 19:51:25.874 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 0
2025-07-04 19:51:28.586 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 19:51:29.068 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 19:51:29.069 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 19:51:29.069 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 19:51:29.573 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:51:29.573 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-04 19:51:30.019 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-04 19:51:30.466 +08:00 [INF] thr:73<> loader Requires:OUTP 16 0
2025-07-04 19:51:30.914 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-04 19:51:31.362 +08:00 [INF] thr:73<> loader Requires:OUTP 4 0
2025-07-04 19:51:31.810 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-04 19:51:32.255 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:33.210 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:34.163 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:35.115 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:36.068 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:37.022 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 19:51:37.474 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-04 19:51:37.926 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-04 19:51:40.644 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 19:51:41.095 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 19:51:41.095 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 19:51:41.095 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 19:51:41.597 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:51:41.597 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-04 19:51:46.860 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 19:51:46.861 +08:00 [INF] thr:64<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 19:51:46.861 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-04 19:51:47.869 +08:00 [INF] thr:64<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 19:51:47.870 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 19:51:47.870 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 19:51:48.314 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 19:51:48.314 +08:00 [INF] thr:64<> loader Requires:MATS AJ T
2025-07-04 19:51:51.856 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 19:51:52.305 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 19:51:59.323 +08:00 [INF] thr:64<> loader Requires:MOVR R 226000
2025-07-04 19:52:01.925 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:52:02.376 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 19:52:02.376 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 19:52:02.376 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 19:52:02.880 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:52:02.880 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 19:52:03.332 +08:00 [INF] thr:64<> loader Requires:MATS AJ R 0
2025-07-04 19:52:06.582 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 19:52:06.582 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 19:52:06.582 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 19:52:07.086 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:52:07.086 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 19:52:07.534 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 0
2025-07-04 19:52:10.147 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:52:10.596 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 19:52:10.596 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 19:52:10.596 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 19:52:11.100 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:52:11.100 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 19:52:11.549 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 19:52:11.996 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 19:52:12.443 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 19:52:12.892 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 19:52:13.339 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 19:52:13.785 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:52:14.739 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:52:15.692 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:52:16.646 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:52:17.097 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 19:52:17.550 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 19:52:20.165 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:52:20.616 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 19:52:20.616 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 19:52:20.616 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 19:52:21.119 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:52:21.119 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 19:52:26.154 +08:00 [INF] thr:64<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 19:52:26.156 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-04 19:53:59.699 +08:00 [INF] thr:15<> loader Requires:INPUT B 13
2025-07-04 19:54:00.701 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-04 19:54:01.707 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 19:54:01.709 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 19:54:01.709 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 19:54:02.152 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 19:54:02.152 +08:00 [INF] thr:64<> loader Requires:MATS AJ T
2025-07-04 19:54:02.611 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 19:54:03.060 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 19:54:03.534 +08:00 [INF] thr:64<> loader Requires:MOVR R 226000
2025-07-04 19:54:06.129 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:54:06.580 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 19:54:06.580 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 19:54:06.580 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 19:54:07.085 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:07.085 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 19:54:07.537 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 19:54:07.984 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 19:54:08.432 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 19:54:08.880 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 19:54:09.328 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 19:54:09.773 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:10.225 +08:00 [INF] thr:64<> loader Requires:MATS AJ R 0
2025-07-04 19:54:13.476 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 19:54:13.476 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 19:54:13.476 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 19:54:13.978 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:13.978 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 19:54:14.427 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 0
2025-07-04 19:54:17.039 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:54:17.488 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 19:54:17.488 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 19:54:17.488 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 19:54:17.990 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:17.990 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 19:54:18.436 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 19:54:18.883 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-04 19:54:19.331 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 19:54:19.779 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-04 19:54:20.225 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 19:54:20.671 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:21.629 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:22.582 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:23.536 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:24.487 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:25.441 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:54:25.893 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 19:54:26.346 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-04 19:54:28.963 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:54:29.414 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 19:54:29.414 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 19:54:29.414 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 19:54:29.918 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:29.918 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 19:54:34.951 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 19:54:34.952 +08:00 [INF] thr:64<> AOI is Ready
2025-07-04 19:54:35.016 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-04 19:54:35.019 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-04 19:54:35.054 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:60
2025-07-04 19:54:35.062 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:60
2025-07-04 19:54:35.094 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-04 19:54:35.094 +08:00 [INF] thr:64<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 19:54:35.095 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 19:54:35.095 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 19:54:35.539 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 19:54:35.539 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-04 19:54:39.080 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 19:54:39.528 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 19:54:46.546 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:54:46.996 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 19:54:46.996 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 19:54:46.996 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 19:54:47.501 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:47.501 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 19:54:47.952 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-04 19:54:53.234 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 19:54:53.234 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 19:54:53.234 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 19:54:53.738 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:53.738 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 19:54:54.189 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-04 19:54:56.901 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:54:57.387 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 19:54:57.387 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 19:54:57.387 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 19:54:57.891 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:54:57.891 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 19:54:58.340 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 19:54:58.786 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 19:54:59.233 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 19:54:59.690 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 19:55:00.137 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 19:55:00.583 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:55:01.536 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:55:02.490 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:55:03.443 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 19:55:03.895 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 19:55:04.348 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 19:55:07.066 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 19:55:07.517 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 19:55:07.517 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 19:55:07.517 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 19:55:08.522 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 19:55:08.522 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 19:55:13.783 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 20:41:47.513 +08:00 [INF] thr:76<> loader Requires:INPUT B 13
2025-07-04 20:41:48.975 +08:00 [INF] thr:73<> AOI is Ready
2025-07-04 20:41:57.078 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:50
2025-07-04 20:41:57.085 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:50
2025-07-04 20:42:00.367 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:8
2025-07-04 20:42:00.374 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:8
2025-07-04 20:42:00.407 +08:00 [INF] thr:73<> stage move to position action ok
2025-07-04 20:42:00.407 +08:00 [INF] thr:73<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 20:42:00.408 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 20:42:00.408 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-04 20:42:00.852 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-04 20:42:00.852 +08:00 [INF] thr:73<> loader Requires:MATS AK T
2025-07-04 20:42:01.311 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-04 20:42:01.760 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-04 20:42:02.234 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 20:42:02.685 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 20:42:02.685 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 20:42:02.685 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 20:42:03.188 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:03.188 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-04 20:42:03.641 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-04 20:42:04.088 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-04 20:42:04.539 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-04 20:42:04.988 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-04 20:42:05.435 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-04 20:42:05.880 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:06.332 +08:00 [INF] thr:73<> loader Requires:MATS AK R 0
2025-07-04 20:42:11.614 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 20:42:11.614 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 20:42:11.614 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 20:42:12.118 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:12.118 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-04 20:42:12.564 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 0
2025-07-04 20:42:15.277 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 20:42:15.760 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 20:42:15.760 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 20:42:15.761 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 20:42:16.265 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:16.265 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-04 20:42:16.713 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-04 20:42:17.160 +08:00 [INF] thr:73<> loader Requires:OUTP 16 0
2025-07-04 20:42:17.608 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-04 20:42:18.057 +08:00 [INF] thr:73<> loader Requires:OUTP 4 0
2025-07-04 20:42:18.504 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-04 20:42:18.949 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:19.912 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:20.864 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:21.818 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:22.771 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:23.723 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:42:24.175 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-04 20:42:24.629 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-04 20:42:27.347 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 20:42:27.798 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 20:42:27.798 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 20:42:27.798 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 20:42:28.301 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:28.301 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-04 20:42:33.564 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 20:42:33.566 +08:00 [INF] thr:73<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 20:42:33.566 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-04 20:42:34.573 +08:00 [INF] thr:73<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 20:42:34.574 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 20:42:34.574 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-04 20:42:35.014 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-04 20:42:35.014 +08:00 [INF] thr:73<> loader Requires:MATS AJ T
2025-07-04 20:42:38.557 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-04 20:42:39.006 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-04 20:42:46.024 +08:00 [INF] thr:73<> loader Requires:MOVR R 226000
2025-07-04 20:42:48.621 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 20:42:49.073 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 20:42:49.073 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 20:42:49.073 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 20:42:49.576 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:49.576 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-04 20:42:50.029 +08:00 [INF] thr:73<> loader Requires:MATS AJ R 0
2025-07-04 20:42:53.279 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 20:42:53.279 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 20:42:53.279 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 20:42:53.782 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:53.782 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-04 20:42:54.230 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 0
2025-07-04 20:42:56.843 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 20:42:57.292 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 20:42:57.293 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 20:42:57.293 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 20:42:57.796 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:42:57.796 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-04 20:42:58.244 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-04 20:42:58.691 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-04 20:42:59.139 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-04 20:42:59.587 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-04 20:43:00.035 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-04 20:43:00.480 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:43:01.434 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:43:02.387 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:43:03.339 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-04 20:43:03.792 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-04 20:43:04.244 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-04 20:43:06.860 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-04 20:43:07.311 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 20:43:07.311 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 20:43:07.311 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 20:43:07.814 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:43:07.814 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-04 20:43:12.849 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 20:43:12.850 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-04 20:44:16.306 +08:00 [INF] thr:69<> loader Requires:INPUT B 13
2025-07-04 20:44:17.284 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-04 20:44:18.289 +08:00 [INF] thr:66<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 20:44:18.290 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 20:44:18.290 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-04 20:44:18.734 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-04 20:44:18.734 +08:00 [INF] thr:66<> loader Requires:MATS AJ T
2025-07-04 20:44:19.193 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-04 20:44:19.640 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-04 20:44:20.113 +08:00 [INF] thr:66<> loader Requires:MOVR R 226000
2025-07-04 20:44:22.709 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 20:44:23.159 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 20:44:23.159 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 20:44:23.159 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 20:44:23.663 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:44:23.663 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-04 20:44:24.117 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-04 20:44:24.565 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-04 20:44:25.011 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-04 20:44:25.458 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-04 20:44:25.905 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-04 20:44:26.351 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:26.804 +08:00 [INF] thr:66<> loader Requires:MATS AJ R 0
2025-07-04 20:44:30.053 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 20:44:30.053 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 20:44:30.053 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 20:44:30.557 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:44:30.558 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 20:44:31.005 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 0
2025-07-04 20:44:33.617 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 20:44:34.066 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 20:44:34.067 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 20:44:34.067 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 20:44:34.571 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:44:34.571 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 20:44:35.018 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-04 20:44:35.464 +08:00 [INF] thr:66<> loader Requires:OUTP 16 0
2025-07-04 20:44:35.912 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-04 20:44:36.360 +08:00 [INF] thr:66<> loader Requires:OUTP 4 0
2025-07-04 20:44:36.808 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-04 20:44:37.254 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:38.210 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:39.164 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:40.117 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:41.071 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:42.022 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:44:42.475 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-04 20:44:42.929 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-04 20:44:45.546 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 20:44:45.996 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 20:44:45.996 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 20:44:45.996 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 20:44:46.498 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:44:46.498 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-04 20:44:51.531 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 20:44:51.532 +08:00 [INF] thr:66<> AOI is Ready
2025-07-04 20:44:51.596 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:50
2025-07-04 20:44:51.599 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:50
2025-07-04 20:44:51.634 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:8
2025-07-04 20:44:51.637 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:8
2025-07-04 20:44:51.654 +08:00 [INF] thr:66<> stage move to position action ok
2025-07-04 20:44:51.654 +08:00 [INF] thr:66<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 20:44:51.655 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 20:44:51.655 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-04 20:44:52.098 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-04 20:44:52.098 +08:00 [INF] thr:66<> loader Requires:MATS AK T
2025-07-04 20:44:55.640 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-04 20:44:56.087 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-04 20:45:03.106 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 20:45:03.555 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 20:45:03.555 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 20:45:03.555 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 20:45:04.059 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:45:04.059 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-04 20:45:04.512 +08:00 [INF] thr:66<> loader Requires:MATS AK R 0
2025-07-04 20:45:09.794 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 20:45:09.795 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 20:45:09.795 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 20:45:10.298 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:45:10.298 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 20:45:10.747 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 0
2025-07-04 20:45:13.461 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 20:45:13.953 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 20:45:13.953 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 20:45:13.953 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 20:45:14.455 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:45:14.455 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-04 20:45:14.902 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-04 20:45:15.350 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-04 20:45:15.797 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-04 20:45:16.245 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-04 20:45:16.691 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-04 20:45:17.138 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:45:18.093 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:45:19.044 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:45:19.999 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-04 20:45:20.450 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-04 20:45:20.903 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-04 20:45:23.622 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-04 20:45:24.073 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 20:45:24.073 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 20:45:24.073 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 20:45:25.079 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 20:45:25.079 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-04 20:45:30.343 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 21:02:17.458 +08:00 [INF] thr:41<> loader Requires:INPUT B 13
2025-07-04 21:02:18.919 +08:00 [INF] thr:64<> AOI is Ready
2025-07-04 21:02:23.139 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-04 21:02:23.142 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-04 21:02:27.241 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:8
2025-07-04 21:02:27.245 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:8
2025-07-04 21:02:27.261 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-04 21:02:27.261 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 21:02:27.262 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 21:02:27.262 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 21:02:27.706 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 21:02:27.706 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-04 21:02:28.163 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 21:02:28.610 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 21:02:29.083 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 21:02:29.534 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 21:02:29.534 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 21:02:29.534 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 21:02:30.038 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:02:30.038 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 21:02:30.491 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 21:02:30.937 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 21:02:31.385 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 21:02:31.834 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 21:02:32.280 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 21:02:32.726 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:33.179 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-04 21:02:38.460 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 21:02:38.460 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 21:02:38.460 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 21:02:38.964 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:02:38.964 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 21:02:39.410 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-04 21:02:42.123 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 21:02:42.592 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 21:02:42.592 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 21:02:42.592 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 21:02:43.095 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:02:43.095 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 21:02:43.541 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 21:02:43.988 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-04 21:02:44.436 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 21:02:44.885 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-04 21:02:45.332 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 21:02:45.777 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:46.730 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:47.683 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:48.637 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:49.590 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:50.544 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:02:50.994 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 21:02:51.448 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 21:02:54.165 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 21:02:54.615 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 21:02:54.615 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 21:02:54.616 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 21:02:55.118 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:02:55.118 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 21:03:00.382 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 21:03:00.383 +08:00 [INF] thr:33<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 21:03:00.383 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-04 21:03:01.390 +08:00 [INF] thr:33<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 21:03:01.391 +08:00 [INF] thr:33<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 21:03:01.391 +08:00 [INF] thr:33<> loader Requires:RGRP
2025-07-04 21:03:01.832 +08:00 [INF] thr:33<> CLeanLoader Group Now C
2025-07-04 21:03:01.832 +08:00 [INF] thr:33<> loader Requires:MATS AJ T
2025-07-04 21:03:05.374 +08:00 [INF] thr:33<> loader Requires:SSP Z 4000
2025-07-04 21:03:05.823 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-04 21:03:12.841 +08:00 [INF] thr:33<> loader Requires:MOVR R 226000
2025-07-04 21:03:15.436 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-04 21:03:15.886 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 21:03:15.886 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 21:03:15.886 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 21:03:16.390 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:03:16.390 +08:00 [INF] thr:33<> loader Requires:INPUT A 6
2025-07-04 21:03:16.843 +08:00 [INF] thr:33<> loader Requires:MATS AJ R 0
2025-07-04 21:03:20.093 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 21:03:20.093 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 21:03:20.093 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 21:03:20.595 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:03:20.595 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-04 21:03:21.041 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 0
2025-07-04 21:03:23.653 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-04 21:03:24.103 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 21:03:24.103 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 21:03:24.103 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 21:03:24.605 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:03:24.606 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-04 21:03:25.053 +08:00 [INF] thr:33<> loader Requires:OUTP 1 0
2025-07-04 21:03:25.500 +08:00 [INF] thr:33<> loader Requires:OUTP 16 1
2025-07-04 21:03:25.948 +08:00 [INF] thr:33<> loader Requires:OUTP 15 1
2025-07-04 21:03:26.398 +08:00 [INF] thr:33<> loader Requires:OUTP 4 1
2025-07-04 21:03:26.844 +08:00 [INF] thr:33<> loader Requires:OUTP 1 1
2025-07-04 21:03:27.289 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 21:03:28.243 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 21:03:29.196 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 21:03:30.150 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-04 21:03:30.601 +08:00 [INF] thr:33<> loader Requires:INPUT A 5
2025-07-04 21:03:31.052 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-04 21:03:33.670 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-04 21:03:34.120 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 21:03:34.120 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 21:03:34.120 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 21:03:34.623 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:03:34.623 +08:00 [INF] thr:33<> loader Requires:RETH
2025-07-04 21:03:39.658 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 21:03:39.659 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-04 21:04:32.307 +08:00 [INF] thr:82<> loader Requires:INPUT B 13
2025-07-04 21:04:33.304 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-04 21:04:34.311 +08:00 [INF] thr:10<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-04 21:04:34.312 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 21:04:34.312 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-04 21:04:34.757 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-04 21:04:34.757 +08:00 [INF] thr:10<> loader Requires:MATS AJ T
2025-07-04 21:04:35.216 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-04 21:04:35.664 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-04 21:04:36.136 +08:00 [INF] thr:10<> loader Requires:MOVR R 226000
2025-07-04 21:04:38.732 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-04 21:04:39.183 +08:00 [INF] thr:10<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-04 21:04:39.183 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-04 21:04:39.183 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-04 21:04:39.686 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:04:39.686 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-04 21:04:40.141 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-04 21:04:40.587 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-04 21:04:41.034 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-04 21:04:41.483 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-04 21:04:41.930 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-04 21:04:42.376 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:42.827 +08:00 [INF] thr:10<> loader Requires:MATS AJ R 0
2025-07-04 21:04:46.077 +08:00 [INF] thr:10<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-04 21:04:46.077 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-04 21:04:46.078 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-04 21:04:46.581 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:04:46.581 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-04 21:04:47.028 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 0
2025-07-04 21:04:49.641 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-04 21:04:50.090 +08:00 [INF] thr:10<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-04 21:04:50.090 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-04 21:04:50.090 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-04 21:04:50.595 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:04:50.595 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-04 21:04:51.043 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-04 21:04:51.489 +08:00 [INF] thr:10<> loader Requires:OUTP 16 0
2025-07-04 21:04:51.935 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-04 21:04:52.384 +08:00 [INF] thr:10<> loader Requires:OUTP 4 0
2025-07-04 21:04:52.831 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-04 21:04:53.278 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:54.230 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:55.183 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:56.137 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:57.090 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:58.044 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:04:58.498 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-04 21:04:58.951 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-04 21:05:01.568 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-04 21:05:02.019 +08:00 [INF] thr:10<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-04 21:05:02.019 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-04 21:05:02.019 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-04 21:05:02.523 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:05:02.523 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-04 21:05:07.558 +08:00 [INF] thr:10<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-04 21:05:07.561 +08:00 [INF] thr:10<> AOI is Ready
2025-07-04 21:05:07.622 +08:00 [INF] thr:10<> SetVelocity, Axis:X, velocity:50
2025-07-04 21:05:07.626 +08:00 [INF] thr:10<> SetVelocity, Axis:Y, velocity:50
2025-07-04 21:05:07.661 +08:00 [INF] thr:10<> SetVelocity, Axis:X, velocity:8
2025-07-04 21:05:07.664 +08:00 [INF] thr:10<> SetVelocity, Axis:Y, velocity:8
2025-07-04 21:05:07.680 +08:00 [INF] thr:10<> stage move to position action ok
2025-07-04 21:05:07.681 +08:00 [INF] thr:10<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-04 21:05:07.681 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 21:05:07.681 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-04 21:05:08.126 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-04 21:05:08.126 +08:00 [INF] thr:10<> loader Requires:MATS AK T
2025-07-04 21:05:11.668 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-04 21:05:12.117 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 1
2025-07-04 21:05:19.136 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-04 21:05:19.585 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-04 21:05:19.585 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-04 21:05:19.585 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-04 21:05:20.090 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:05:20.090 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-04 21:05:20.543 +08:00 [INF] thr:10<> loader Requires:MATS AK R 0
2025-07-04 21:05:25.826 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-04 21:05:25.826 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:上片请求
2025-07-04 21:05:25.826 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-04 21:05:26.328 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:05:26.328 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-04 21:05:26.775 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 0
2025-07-04 21:05:29.489 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-04 21:05:29.967 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-04 21:05:29.967 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-04 21:05:29.967 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-04 21:05:30.470 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:05:30.470 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-04 21:05:30.918 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-04 21:05:31.365 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-04 21:05:31.813 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-04 21:05:32.260 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-04 21:05:32.707 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-04 21:05:33.154 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:05:34.106 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:05:35.060 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:05:36.013 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-04 21:05:36.464 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-04 21:05:36.918 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 1
2025-07-04 21:05:39.636 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-04 21:05:40.086 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-04 21:05:40.086 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-04 21:05:40.086 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-04 21:05:41.093 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:05:41.093 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-04 21:05:46.357 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-04 21:51:57.453 +08:00 [INF] thr:9<> loader Requires:INPUT B 13
2025-07-04 21:51:58.917 +08:00 [INF] thr:64<> AOI is Ready
2025-07-04 21:52:06.912 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-04 21:52:06.915 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-04 21:52:10.185 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:8
2025-07-04 21:52:10.188 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:8
2025-07-04 21:52:10.205 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-04 21:52:10.206 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-04 21:52:10.206 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 21:52:10.206 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-04 21:52:10.649 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-04 21:52:10.649 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-04 21:52:11.109 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-04 21:52:11.558 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 21:52:12.032 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 21:52:12.483 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-04 21:52:12.483 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-04 21:52:12.483 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-04 21:52:12.986 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:52:12.986 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-04 21:52:13.439 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 21:52:13.887 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-04 21:52:14.334 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 21:52:14.783 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-04 21:52:15.229 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 21:52:15.675 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:16.127 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-04 21:52:21.408 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-04 21:52:21.408 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片请求
2025-07-04 21:52:21.408 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-04 21:52:21.913 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:52:21.913 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 21:52:22.358 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-04 21:52:25.080 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 21:52:25.550 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-04 21:52:25.550 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-04 21:52:25.550 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-04 21:52:26.054 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:52:26.054 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-04 21:52:26.500 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-04 21:52:26.948 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-04 21:52:27.395 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-04 21:52:27.844 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-04 21:52:28.291 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-04 21:52:28.736 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:29.691 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:30.646 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:31.599 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:32.554 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:33.506 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-04 21:52:33.958 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-04 21:52:34.424 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-04 21:52:37.140 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-04 21:52:37.591 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-04 21:52:37.591 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-04 21:52:37.591 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-04 21:52:38.094 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:52:38.094 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-04 21:52:43.358 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-04 21:52:43.360 +08:00 [INF] thr:68<> 执行Aligner设置初始角度InitialAngle：0
2025-07-04 21:52:43.360 +08:00 [INF] thr:68<> 执行Aligner角度angle：0
2025-07-04 21:52:44.367 +08:00 [INF] thr:68<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-04 21:52:44.368 +08:00 [INF] thr:68<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-04 21:52:44.368 +08:00 [INF] thr:68<> loader Requires:RGRP
2025-07-04 21:52:44.811 +08:00 [INF] thr:68<> CLeanLoader Group Now C
2025-07-04 21:52:44.811 +08:00 [INF] thr:68<> loader Requires:MATS AJ T
2025-07-04 21:52:48.355 +08:00 [INF] thr:68<> loader Requires:SSP Z 4000
2025-07-04 21:52:48.802 +08:00 [INF] thr:68<> loader Requires:MATS AJ Z 1
2025-07-04 21:52:55.821 +08:00 [INF] thr:68<> loader Requires:MOVR R 226000
2025-07-04 21:52:58.416 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 21:52:58.865 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-04 21:52:58.865 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-04 21:52:58.865 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-04 21:52:59.369 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:52:59.369 +08:00 [INF] thr:68<> loader Requires:INPUT A 6
2025-07-04 21:52:59.823 +08:00 [INF] thr:68<> loader Requires:MATS AJ R 0
2025-07-04 21:53:03.075 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-04 21:53:03.075 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-04 21:53:03.075 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-04 21:53:03.578 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:53:03.578 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 21:53:04.025 +08:00 [INF] thr:68<> loader Requires:MATS AJ Z 0
2025-07-04 21:53:06.637 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 21:53:07.086 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-04 21:53:07.086 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-04 21:53:07.086 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-04 21:53:07.589 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:53:07.589 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-04 21:53:08.035 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-04 21:53:08.481 +08:00 [INF] thr:68<> loader Requires:OUTP 16 1
2025-07-04 21:53:08.929 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-04 21:53:09.376 +08:00 [INF] thr:68<> loader Requires:OUTP 4 1
2025-07-04 21:53:09.828 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-04 21:53:10.274 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 21:53:11.228 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 21:53:12.184 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 21:53:13.137 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-04 21:53:13.589 +08:00 [INF] thr:68<> loader Requires:INPUT A 5
2025-07-04 21:53:14.042 +08:00 [INF] thr:68<> loader Requires:MATS AJ Z 1
2025-07-04 21:53:16.659 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-04 21:53:17.110 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-04 21:53:17.110 +08:00 [INF] thr:68<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-04 21:53:17.110 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-04 21:53:17.613 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-04 21:53:17.613 +08:00 [INF] thr:68<> loader Requires:RETH
2025-07-04 21:53:22.648 +08:00 [INF] thr:68<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-04 21:53:22.649 +08:00 [INF] thr:68<> 执行Aligner角度angle：0
2025-07-05 09:25:43.250 +08:00 [INF] thr:37<> loader Requires:INPUT B 13
2025-07-05 09:25:44.231 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-07-05 09:25:45.237 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 09:25:45.238 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 09:25:45.238 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 09:25:45.682 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 09:25:45.682 +08:00 [INF] thr:74<> loader Requires:MATS AJ T
2025-07-05 09:25:46.140 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 09:25:46.590 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-07-05 09:25:47.064 +08:00 [INF] thr:74<> loader Requires:MOVR R 226000
2025-07-05 09:25:49.660 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 09:25:50.146 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 09:25:50.146 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 09:25:50.146 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 09:25:50.648 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:25:50.648 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 09:25:51.099 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 09:25:51.547 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 09:25:51.994 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 09:25:52.441 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 09:25:52.888 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 09:25:53.334 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:25:53.791 +08:00 [INF] thr:74<> loader Requires:MATS AJ R 0
2025-07-05 09:25:57.042 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 09:25:57.042 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 09:25:57.042 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 09:25:57.545 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:25:57.546 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 09:25:57.993 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 0
2025-07-05 09:26:00.605 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 09:26:01.053 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 09:26:01.053 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 09:26:01.053 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 09:26:01.556 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:26:01.556 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 09:26:02.009 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 09:26:02.456 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-07-05 09:26:02.902 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 09:26:03.352 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-07-05 09:26:03.798 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 09:26:04.244 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:05.196 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:06.151 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:07.104 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:08.062 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:09.013 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:09.465 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 09:26:09.919 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-07-05 09:26:12.544 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 09:26:12.994 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 09:26:12.994 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 09:26:12.994 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 09:26:13.498 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:26:13.498 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 09:26:18.533 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 09:26:18.535 +08:00 [INF] thr:74<> AOI is Ready
2025-07-05 09:26:18.604 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-07-05 09:26:18.607 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-07-05 09:26:18.644 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:8
2025-07-05 09:26:18.647 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:8
2025-07-05 09:26:18.665 +08:00 [INF] thr:74<> stage move to position action ok
2025-07-05 09:26:18.665 +08:00 [INF] thr:74<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 09:26:18.666 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 09:26:18.666 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 09:26:19.108 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 09:26:19.108 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-07-05 09:26:22.642 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 09:26:23.091 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 09:26:30.109 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 09:26:30.560 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 09:26:30.560 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 09:26:30.560 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 09:26:31.062 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:26:31.062 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 09:26:31.515 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-07-05 09:26:36.798 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 09:26:36.798 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 09:26:36.798 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 09:26:37.303 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:26:37.304 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 09:26:37.751 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-07-05 09:26:40.464 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 09:26:40.960 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 09:26:40.960 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 09:26:40.960 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 09:26:41.463 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:26:41.463 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 09:26:41.910 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 09:26:42.356 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 09:26:42.804 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 09:26:43.253 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 09:26:43.698 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 09:26:44.144 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:45.098 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:46.051 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:47.007 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 09:26:47.456 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 09:26:47.910 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 09:26:50.629 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 09:26:51.079 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 09:26:51.079 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 09:26:51.079 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 09:26:52.084 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 09:26:52.084 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 09:26:57.351 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 10:07:52.419 +08:00 [INF] thr:20<> loader Requires:INPUT B 13
2025-07-05 10:07:53.882 +08:00 [INF] thr:74<> AOI is Ready
2025-07-05 10:07:57.953 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-07-05 10:07:57.959 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-07-05 10:08:00.784 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:8
2025-07-05 10:08:00.787 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:8
2025-07-05 10:08:00.804 +08:00 [INF] thr:74<> stage move to position action ok
2025-07-05 10:08:00.805 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 10:08:00.805 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 10:08:00.805 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 10:08:01.247 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 10:08:01.247 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-07-05 10:08:01.711 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 10:08:02.156 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 10:08:02.647 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:08:03.097 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 10:08:03.097 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 10:08:03.097 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 10:08:03.601 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:03.601 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 10:08:04.052 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 10:08:04.499 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 10:08:04.947 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 10:08:05.396 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 10:08:05.843 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 10:08:06.287 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:06.740 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-07-05 10:08:12.022 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 10:08:12.022 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 10:08:12.022 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 10:08:12.527 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:12.527 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 10:08:12.975 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-07-05 10:08:15.688 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:08:16.162 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 10:08:16.162 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 10:08:16.163 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 10:08:16.666 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:16.666 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 10:08:17.114 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 10:08:17.562 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-07-05 10:08:18.012 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 10:08:18.464 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-07-05 10:08:18.913 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 10:08:19.357 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:20.313 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:21.265 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:22.217 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:23.170 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:24.124 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:08:24.574 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 10:08:25.027 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 10:08:27.745 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:08:28.196 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 10:08:28.196 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 10:08:28.196 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 10:08:28.700 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:28.700 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 10:08:33.963 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 10:08:33.964 +08:00 [INF] thr:10<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 10:08:33.964 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-05 10:08:34.974 +08:00 [INF] thr:10<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 10:08:34.975 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 10:08:34.975 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-05 10:08:35.417 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-05 10:08:35.417 +08:00 [INF] thr:10<> loader Requires:MATS AJ T
2025-07-05 10:08:38.961 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-05 10:08:39.410 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-05 10:08:46.428 +08:00 [INF] thr:10<> loader Requires:MOVR R 226000
2025-07-05 10:08:49.023 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-05 10:08:49.474 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 10:08:49.474 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 10:08:49.474 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 10:08:49.977 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:49.977 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-05 10:08:50.434 +08:00 [INF] thr:10<> loader Requires:MATS AJ R 0
2025-07-05 10:08:53.685 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 10:08:53.685 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 10:08:53.685 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 10:08:54.188 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:54.188 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-05 10:08:54.635 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 0
2025-07-05 10:08:57.249 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-05 10:08:57.698 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 10:08:57.698 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 10:08:57.698 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 10:08:58.201 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:08:58.201 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-05 10:08:58.651 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-05 10:08:59.097 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-05 10:08:59.545 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-05 10:08:59.994 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-05 10:09:00.440 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-05 10:09:00.885 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-05 10:09:01.840 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-05 10:09:02.793 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-05 10:09:03.745 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-05 10:09:04.197 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-05 10:09:04.649 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-05 10:09:07.267 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-05 10:09:07.717 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 10:09:07.717 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 10:09:07.717 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 10:09:08.221 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:09:08.222 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-05 10:09:13.257 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 10:09:13.258 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-05 10:10:39.852 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-07-05 10:10:40.831 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-07-05 10:10:41.835 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 10:10:41.836 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 10:10:41.836 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 10:10:42.280 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 10:10:42.280 +08:00 [INF] thr:74<> loader Requires:MATS AJ T
2025-07-05 10:10:42.739 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 10:10:43.185 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-07-05 10:10:43.659 +08:00 [INF] thr:74<> loader Requires:MOVR R 226000
2025-07-05 10:10:46.254 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:10:46.705 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 10:10:46.705 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 10:10:46.705 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 10:10:47.209 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:10:47.209 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 10:10:47.663 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 10:10:48.114 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 10:10:48.561 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 10:10:49.009 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 10:10:49.457 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 10:10:49.903 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:10:50.354 +08:00 [INF] thr:74<> loader Requires:MATS AJ R 0
2025-07-05 10:10:53.605 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 10:10:53.605 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 10:10:53.605 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 10:10:54.106 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:10:54.106 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 10:10:54.555 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 0
2025-07-05 10:10:57.168 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:10:57.617 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 10:10:57.617 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 10:10:57.617 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 10:10:58.121 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:10:58.121 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 10:10:58.569 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 10:10:59.017 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-07-05 10:10:59.463 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 10:10:59.912 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-07-05 10:11:00.359 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 10:11:00.804 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:01.758 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:02.711 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:03.665 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:04.619 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:05.573 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:06.023 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 10:11:06.476 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-07-05 10:11:09.093 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:11:09.543 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 10:11:09.543 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 10:11:09.543 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 10:11:10.046 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:11:10.046 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 10:11:15.082 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 10:11:15.083 +08:00 [INF] thr:74<> AOI is Ready
2025-07-05 10:11:15.147 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-07-05 10:11:15.150 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-07-05 10:11:15.187 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:8
2025-07-05 10:11:15.194 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:8
2025-07-05 10:11:15.223 +08:00 [INF] thr:74<> stage move to position action ok
2025-07-05 10:11:15.223 +08:00 [INF] thr:74<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 10:11:15.224 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 10:11:15.224 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 10:11:15.666 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 10:11:15.666 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-07-05 10:11:19.208 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 10:11:19.657 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 10:11:26.675 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:11:27.132 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 10:11:27.132 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 10:11:27.132 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 10:11:27.635 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:11:27.635 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 10:11:28.089 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-07-05 10:11:33.372 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 10:11:33.372 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 10:11:33.372 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 10:11:33.876 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:11:33.876 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 10:11:34.322 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-07-05 10:11:37.035 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:11:37.502 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 10:11:37.502 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 10:11:37.502 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 10:11:38.006 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:11:38.006 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 10:11:38.453 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 10:11:38.900 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 10:11:39.347 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 10:11:39.795 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 10:11:40.242 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 10:11:40.688 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:41.643 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:42.604 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:43.568 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 10:11:44.021 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 10:11:44.474 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 10:11:47.192 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 10:11:47.643 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 10:11:47.643 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 10:11:47.643 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 10:11:48.649 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 10:11:48.649 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 10:11:53.914 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 11:12:33.831 +08:00 [INF] thr:38<> loader Requires:INPUT B 13
2025-07-05 11:12:35.293 +08:00 [INF] thr:68<> AOI is Ready
2025-07-05 11:12:39.899 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:50
2025-07-05 11:12:39.906 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:50
2025-07-05 11:12:42.750 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:8
2025-07-05 11:12:42.753 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:8
2025-07-05 11:12:42.769 +08:00 [INF] thr:68<> stage move to position action ok
2025-07-05 11:12:42.770 +08:00 [INF] thr:68<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 11:12:42.770 +08:00 [INF] thr:68<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 11:12:42.770 +08:00 [INF] thr:68<> loader Requires:RGRP
2025-07-05 11:12:43.216 +08:00 [INF] thr:68<> CLeanLoader Group Now C
2025-07-05 11:12:43.216 +08:00 [INF] thr:68<> loader Requires:MATS AK T
2025-07-05 11:12:43.675 +08:00 [INF] thr:68<> loader Requires:SSP Z 4000
2025-07-05 11:12:44.124 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-05 11:12:44.597 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-05 11:12:45.047 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 11:12:45.048 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 11:12:45.048 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 11:12:45.552 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:12:45.552 +08:00 [INF] thr:68<> loader Requires:INPUT A 6
2025-07-05 11:12:46.005 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-05 11:12:46.451 +08:00 [INF] thr:68<> loader Requires:OUTP 16 1
2025-07-05 11:12:46.899 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-05 11:12:47.347 +08:00 [INF] thr:68<> loader Requires:OUTP 4 1
2025-07-05 11:12:47.794 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-05 11:12:48.240 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:12:48.692 +08:00 [INF] thr:68<> loader Requires:MATS AK R 0
2025-07-05 11:12:53.974 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 11:12:53.974 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 11:12:53.974 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 11:12:54.478 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:12:54.478 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-05 11:12:54.924 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 0
2025-07-05 11:12:57.637 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-05 11:12:58.109 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 11:12:58.109 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 11:12:58.109 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 11:12:58.613 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:12:58.613 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-05 11:12:59.063 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-05 11:12:59.509 +08:00 [INF] thr:68<> loader Requires:OUTP 16 0
2025-07-05 11:12:59.957 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-05 11:13:00.405 +08:00 [INF] thr:68<> loader Requires:OUTP 4 0
2025-07-05 11:13:00.853 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-05 11:13:01.299 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:13:02.252 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:13:03.206 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:13:04.159 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:13:05.112 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:13:06.065 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 11:13:06.517 +08:00 [INF] thr:68<> loader Requires:INPUT A 5
2025-07-05 11:13:06.970 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-05 11:13:09.697 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-05 11:13:10.146 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 11:13:10.146 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 11:13:10.146 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 11:13:10.649 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:13:10.649 +08:00 [INF] thr:68<> loader Requires:RETH
2025-07-05 11:13:15.912 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 11:13:15.914 +08:00 [INF] thr:66<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 11:13:15.914 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-05 11:13:16.919 +08:00 [INF] thr:66<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 11:13:16.920 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 11:13:16.920 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-05 11:13:17.362 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-05 11:13:17.362 +08:00 [INF] thr:66<> loader Requires:MATS AJ T
2025-07-05 11:13:20.910 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-05 11:13:21.357 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-05 11:13:28.374 +08:00 [INF] thr:66<> loader Requires:MOVR R 226000
2025-07-05 11:13:30.972 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-05 11:13:31.431 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 11:13:31.431 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 11:13:31.431 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 11:13:31.935 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:13:31.935 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-05 11:13:32.388 +08:00 [INF] thr:66<> loader Requires:MATS AJ R 0
2025-07-05 11:13:35.642 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 11:13:35.642 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 11:13:35.642 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 11:13:36.145 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:13:36.145 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-05 11:13:36.590 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 0
2025-07-05 11:13:39.202 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-05 11:13:39.652 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 11:13:39.652 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 11:13:39.652 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 11:13:40.155 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:13:40.155 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-05 11:13:40.604 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-05 11:13:41.050 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-05 11:13:41.498 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-05 11:13:41.946 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-05 11:13:42.393 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-05 11:13:42.840 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-05 11:13:43.796 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-05 11:13:44.750 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-05 11:13:45.703 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-05 11:13:46.155 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-05 11:13:46.609 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-05 11:13:49.242 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-05 11:13:49.689 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 11:13:49.689 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 11:13:49.689 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 11:13:50.194 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:13:50.194 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-05 11:13:55.229 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 11:13:55.230 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-05 11:15:00.119 +08:00 [INF] thr:78<> loader Requires:INPUT B 13
2025-07-05 11:15:01.103 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-05 11:15:02.110 +08:00 [INF] thr:33<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 11:15:02.111 +08:00 [INF] thr:33<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 11:15:02.111 +08:00 [INF] thr:33<> loader Requires:RGRP
2025-07-05 11:15:02.552 +08:00 [INF] thr:33<> CLeanLoader Group Now C
2025-07-05 11:15:02.552 +08:00 [INF] thr:33<> loader Requires:MATS AJ T
2025-07-05 11:15:03.010 +08:00 [INF] thr:33<> loader Requires:SSP Z 4000
2025-07-05 11:15:03.457 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-05 11:15:03.931 +08:00 [INF] thr:33<> loader Requires:MOVR R 226000
2025-07-05 11:15:06.534 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 11:15:06.984 +08:00 [INF] thr:33<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 11:15:06.984 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 11:15:06.984 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 11:15:07.488 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:07.488 +08:00 [INF] thr:33<> loader Requires:INPUT A 6
2025-07-05 11:15:07.941 +08:00 [INF] thr:33<> loader Requires:OUTP 1 0
2025-07-05 11:15:08.387 +08:00 [INF] thr:33<> loader Requires:OUTP 16 1
2025-07-05 11:15:08.835 +08:00 [INF] thr:33<> loader Requires:OUTP 15 1
2025-07-05 11:15:09.284 +08:00 [INF] thr:33<> loader Requires:OUTP 4 1
2025-07-05 11:15:09.731 +08:00 [INF] thr:33<> loader Requires:OUTP 1 1
2025-07-05 11:15:10.176 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:10.627 +08:00 [INF] thr:33<> loader Requires:MATS AJ R 0
2025-07-05 11:15:13.876 +08:00 [INF] thr:33<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 11:15:13.876 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 11:15:13.877 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 11:15:14.380 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:14.380 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-05 11:15:14.830 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 0
2025-07-05 11:15:17.442 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 11:15:17.891 +08:00 [INF] thr:33<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 11:15:17.891 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 11:15:17.891 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 11:15:18.393 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:18.393 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-05 11:15:18.842 +08:00 [INF] thr:33<> loader Requires:OUTP 1 0
2025-07-05 11:15:19.290 +08:00 [INF] thr:33<> loader Requires:OUTP 16 0
2025-07-05 11:15:19.736 +08:00 [INF] thr:33<> loader Requires:OUTP 15 1
2025-07-05 11:15:20.184 +08:00 [INF] thr:33<> loader Requires:OUTP 4 0
2025-07-05 11:15:20.631 +08:00 [INF] thr:33<> loader Requires:OUTP 1 1
2025-07-05 11:15:21.077 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:22.032 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:22.983 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:23.937 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:24.891 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:25.856 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:15:26.307 +08:00 [INF] thr:33<> loader Requires:INPUT A 5
2025-07-05 11:15:26.761 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-05 11:15:29.378 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 11:15:29.837 +08:00 [INF] thr:33<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 11:15:29.837 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 11:15:29.837 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 11:15:30.339 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:30.339 +08:00 [INF] thr:33<> loader Requires:RETH
2025-07-05 11:15:35.376 +08:00 [INF] thr:33<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 11:15:35.377 +08:00 [INF] thr:33<> AOI is Ready
2025-07-05 11:15:35.459 +08:00 [INF] thr:33<> SetVelocity, Axis:X, velocity:50
2025-07-05 11:15:35.464 +08:00 [INF] thr:33<> SetVelocity, Axis:Y, velocity:50
2025-07-05 11:15:35.501 +08:00 [INF] thr:33<> SetVelocity, Axis:X, velocity:8
2025-07-05 11:15:35.506 +08:00 [INF] thr:33<> SetVelocity, Axis:Y, velocity:8
2025-07-05 11:15:35.536 +08:00 [INF] thr:33<> stage move to position action ok
2025-07-05 11:15:35.536 +08:00 [INF] thr:33<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 11:15:35.538 +08:00 [INF] thr:33<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 11:15:35.538 +08:00 [INF] thr:33<> loader Requires:RGRP
2025-07-05 11:15:35.983 +08:00 [INF] thr:33<> CLeanLoader Group Now C
2025-07-05 11:15:35.983 +08:00 [INF] thr:33<> loader Requires:MATS AK T
2025-07-05 11:15:39.525 +08:00 [INF] thr:33<> loader Requires:SSP Z 4000
2025-07-05 11:15:39.971 +08:00 [INF] thr:33<> loader Requires:MATS AK Z 1
2025-07-05 11:15:46.989 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 11:15:47.439 +08:00 [INF] thr:33<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 11:15:47.439 +08:00 [INF] thr:33<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 11:15:47.439 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 11:15:47.942 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:47.942 +08:00 [INF] thr:33<> loader Requires:INPUT A 6
2025-07-05 11:15:48.395 +08:00 [INF] thr:33<> loader Requires:MATS AK R 0
2025-07-05 11:15:53.678 +08:00 [INF] thr:33<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 11:15:53.678 +08:00 [INF] thr:33<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 11:15:53.678 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 11:15:54.181 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:54.181 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-05 11:15:54.627 +08:00 [INF] thr:33<> loader Requires:MATS AK Z 0
2025-07-05 11:15:57.341 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 11:15:57.801 +08:00 [INF] thr:33<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 11:15:57.801 +08:00 [INF] thr:33<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 11:15:57.801 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 11:15:58.305 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:15:58.305 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-05 11:15:58.753 +08:00 [INF] thr:33<> loader Requires:OUTP 1 0
2025-07-05 11:15:59.207 +08:00 [INF] thr:33<> loader Requires:OUTP 16 1
2025-07-05 11:15:59.656 +08:00 [INF] thr:33<> loader Requires:OUTP 15 1
2025-07-05 11:16:00.105 +08:00 [INF] thr:33<> loader Requires:OUTP 4 1
2025-07-05 11:16:00.556 +08:00 [INF] thr:33<> loader Requires:OUTP 1 1
2025-07-05 11:16:01.001 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:16:01.955 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:16:02.908 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:16:03.860 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 11:16:04.316 +08:00 [INF] thr:33<> loader Requires:INPUT A 5
2025-07-05 11:16:04.769 +08:00 [INF] thr:33<> loader Requires:MATS AK Z 1
2025-07-05 11:16:07.486 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 11:16:07.937 +08:00 [INF] thr:33<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 11:16:07.937 +08:00 [INF] thr:33<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 11:16:07.937 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 11:16:08.943 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 11:16:08.943 +08:00 [INF] thr:33<> loader Requires:RETH
2025-07-05 11:16:14.216 +08:00 [INF] thr:33<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 13:34:58.958 +08:00 [INF] thr:11<> loader Requires:INPUT B 13
2025-07-05 13:35:00.421 +08:00 [INF] thr:68<> AOI is Ready
2025-07-05 13:35:04.580 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:50
2025-07-05 13:35:04.583 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:50
2025-07-05 13:35:07.445 +08:00 [INF] thr:68<> SetVelocity, Axis:X, velocity:8
2025-07-05 13:35:07.449 +08:00 [INF] thr:68<> SetVelocity, Axis:Y, velocity:8
2025-07-05 13:35:07.471 +08:00 [INF] thr:68<> stage move to position action ok
2025-07-05 13:35:07.471 +08:00 [INF] thr:68<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 13:35:07.471 +08:00 [INF] thr:68<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 13:35:07.471 +08:00 [INF] thr:68<> loader Requires:RGRP
2025-07-05 13:35:07.914 +08:00 [INF] thr:68<> CLeanLoader Group Now C
2025-07-05 13:35:07.914 +08:00 [INF] thr:68<> loader Requires:MATS AK T
2025-07-05 13:35:08.373 +08:00 [INF] thr:68<> loader Requires:SSP Z 4000
2025-07-05 13:35:08.821 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-05 13:35:09.294 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-05 13:35:09.744 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 13:35:09.744 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 13:35:09.744 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 13:35:10.247 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:35:10.247 +08:00 [INF] thr:68<> loader Requires:INPUT A 6
2025-07-05 13:35:10.701 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-05 13:35:11.148 +08:00 [INF] thr:68<> loader Requires:OUTP 16 1
2025-07-05 13:35:11.596 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-05 13:35:12.045 +08:00 [INF] thr:68<> loader Requires:OUTP 4 1
2025-07-05 13:35:12.498 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-05 13:35:12.945 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:13.397 +08:00 [INF] thr:68<> loader Requires:MATS AK R 0
2025-07-05 13:35:18.679 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 13:35:18.679 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 13:35:18.679 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 13:35:19.182 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:35:19.183 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-05 13:35:19.633 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 0
2025-07-05 13:35:22.346 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-05 13:35:22.815 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 13:35:22.815 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 13:35:22.815 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 13:35:23.317 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:35:23.317 +08:00 [INF] thr:68<> loader Requires:SSP Z 1000
2025-07-05 13:35:23.764 +08:00 [INF] thr:68<> loader Requires:OUTP 1 0
2025-07-05 13:35:24.211 +08:00 [INF] thr:68<> loader Requires:OUTP 16 0
2025-07-05 13:35:24.659 +08:00 [INF] thr:68<> loader Requires:OUTP 15 1
2025-07-05 13:35:25.107 +08:00 [INF] thr:68<> loader Requires:OUTP 4 0
2025-07-05 13:35:25.554 +08:00 [INF] thr:68<> loader Requires:OUTP 1 1
2025-07-05 13:35:26.000 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:26.962 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:27.915 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:28.868 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:29.820 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:30.773 +08:00 [INF] thr:68<> loader Requires:INPUT A 4
2025-07-05 13:35:31.225 +08:00 [INF] thr:68<> loader Requires:INPUT A 5
2025-07-05 13:35:31.679 +08:00 [INF] thr:68<> loader Requires:MATS AK Z 1
2025-07-05 13:35:34.397 +08:00 [INF] thr:68<> loader Requires:SSPP Z 30
2025-07-05 13:35:34.847 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 13:35:34.847 +08:00 [INF] thr:68<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 13:35:34.847 +08:00 [INF] thr:68<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 13:35:35.349 +08:00 [INF] thr:68<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:35:35.349 +08:00 [INF] thr:68<> loader Requires:RETH
2025-07-05 13:35:40.610 +08:00 [INF] thr:68<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 13:35:40.611 +08:00 [INF] thr:33<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 13:35:40.612 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-05 13:35:41.617 +08:00 [INF] thr:33<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 13:35:41.618 +08:00 [INF] thr:33<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 13:35:41.618 +08:00 [INF] thr:33<> loader Requires:RGRP
2025-07-05 13:35:42.061 +08:00 [INF] thr:33<> CLeanLoader Group Now C
2025-07-05 13:35:42.061 +08:00 [INF] thr:33<> loader Requires:MATS AJ T
2025-07-05 13:35:45.611 +08:00 [INF] thr:33<> loader Requires:SSP Z 4000
2025-07-05 13:35:46.065 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-05 13:35:53.083 +08:00 [INF] thr:33<> loader Requires:MOVR R 226000
2025-07-05 13:35:55.677 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 13:35:56.133 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 13:35:56.133 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 13:35:56.133 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 13:35:56.637 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:35:56.637 +08:00 [INF] thr:33<> loader Requires:INPUT A 6
2025-07-05 13:35:57.089 +08:00 [INF] thr:33<> loader Requires:MATS AJ R 0
2025-07-05 13:36:00.337 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 13:36:00.337 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 13:36:00.337 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 13:36:00.842 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:36:00.842 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-05 13:36:01.291 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 0
2025-07-05 13:36:03.903 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 13:36:04.356 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 13:36:04.356 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 13:36:04.356 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 13:36:04.858 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:36:04.858 +08:00 [INF] thr:33<> loader Requires:SSP Z 1000
2025-07-05 13:36:05.304 +08:00 [INF] thr:33<> loader Requires:OUTP 1 0
2025-07-05 13:36:05.751 +08:00 [INF] thr:33<> loader Requires:OUTP 16 1
2025-07-05 13:36:06.199 +08:00 [INF] thr:33<> loader Requires:OUTP 15 1
2025-07-05 13:36:06.647 +08:00 [INF] thr:33<> loader Requires:OUTP 4 1
2025-07-05 13:36:07.094 +08:00 [INF] thr:33<> loader Requires:OUTP 1 1
2025-07-05 13:36:07.540 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 13:36:08.494 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 13:36:09.448 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 13:36:10.403 +08:00 [INF] thr:33<> loader Requires:INPUT A 4
2025-07-05 13:36:10.856 +08:00 [INF] thr:33<> loader Requires:INPUT A 5
2025-07-05 13:36:11.309 +08:00 [INF] thr:33<> loader Requires:MATS AJ Z 1
2025-07-05 13:36:13.926 +08:00 [INF] thr:33<> loader Requires:SSPP Z 30
2025-07-05 13:36:14.377 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 13:36:14.377 +08:00 [INF] thr:33<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 13:36:14.377 +08:00 [INF] thr:33<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 13:36:14.880 +08:00 [INF] thr:33<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:36:14.880 +08:00 [INF] thr:33<> loader Requires:RETH
2025-07-05 13:36:19.917 +08:00 [INF] thr:33<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 13:36:19.918 +08:00 [INF] thr:33<> 执行Aligner角度angle：0
2025-07-05 13:37:35.895 +08:00 [INF] thr:70<> loader Requires:INPUT B 13
2025-07-05 13:37:36.880 +08:00 [INF] thr:74<> 执行Aligner角度angle：0
2025-07-05 13:37:37.887 +08:00 [INF] thr:74<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 13:37:37.887 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 13:37:37.887 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 13:37:38.327 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 13:37:38.327 +08:00 [INF] thr:74<> loader Requires:MATS AJ T
2025-07-05 13:37:38.782 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 13:37:39.230 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-07-05 13:37:39.703 +08:00 [INF] thr:74<> loader Requires:MOVR R 226000
2025-07-05 13:37:42.297 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 13:37:42.747 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 13:37:42.748 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 13:37:42.748 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 13:37:43.250 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:37:43.250 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 13:37:43.704 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 13:37:44.151 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 13:37:44.616 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 13:37:45.063 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 13:37:45.509 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 13:37:45.955 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:37:46.407 +08:00 [INF] thr:74<> loader Requires:MATS AJ R 0
2025-07-05 13:37:49.657 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 13:37:49.657 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 13:37:49.657 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 13:37:50.161 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:37:50.161 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 13:37:50.609 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 0
2025-07-05 13:37:53.221 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 13:37:53.670 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 13:37:53.670 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 13:37:53.670 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 13:37:54.175 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:37:54.175 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 13:37:54.622 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 13:37:55.070 +08:00 [INF] thr:74<> loader Requires:OUTP 16 0
2025-07-05 13:37:55.516 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 13:37:55.965 +08:00 [INF] thr:74<> loader Requires:OUTP 4 0
2025-07-05 13:37:56.412 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 13:37:56.858 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:37:57.812 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:37:58.768 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:37:59.721 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:00.675 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:01.628 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:02.080 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 13:38:02.532 +08:00 [INF] thr:74<> loader Requires:MATS AJ Z 1
2025-07-05 13:38:05.150 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 13:38:05.600 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 13:38:05.600 +08:00 [INF] thr:74<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 13:38:05.600 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 13:38:06.104 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:38:06.104 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 13:38:11.140 +08:00 [INF] thr:74<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 13:38:11.141 +08:00 [INF] thr:74<> AOI is Ready
2025-07-05 13:38:11.206 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:50
2025-07-05 13:38:11.209 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:50
2025-07-05 13:38:11.245 +08:00 [INF] thr:74<> SetVelocity, Axis:X, velocity:8
2025-07-05 13:38:11.252 +08:00 [INF] thr:74<> SetVelocity, Axis:Y, velocity:8
2025-07-05 13:38:11.280 +08:00 [INF] thr:74<> stage move to position action ok
2025-07-05 13:38:11.280 +08:00 [INF] thr:74<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 13:38:11.281 +08:00 [INF] thr:74<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 13:38:11.281 +08:00 [INF] thr:74<> loader Requires:RGRP
2025-07-05 13:38:11.723 +08:00 [INF] thr:74<> CLeanLoader Group Now C
2025-07-05 13:38:11.723 +08:00 [INF] thr:74<> loader Requires:MATS AK T
2025-07-05 13:38:15.266 +08:00 [INF] thr:74<> loader Requires:SSP Z 4000
2025-07-05 13:38:15.714 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 13:38:22.733 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 13:38:23.182 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 13:38:23.182 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 13:38:23.182 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 13:38:23.685 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:38:23.685 +08:00 [INF] thr:74<> loader Requires:INPUT A 6
2025-07-05 13:38:24.163 +08:00 [INF] thr:74<> loader Requires:MATS AK R 0
2025-07-05 13:38:29.442 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 13:38:29.443 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 13:38:29.443 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 13:38:29.945 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:38:29.945 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 13:38:30.395 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 0
2025-07-05 13:38:33.105 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 13:38:33.573 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 13:38:33.573 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 13:38:33.573 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 13:38:34.077 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:38:34.077 +08:00 [INF] thr:74<> loader Requires:SSP Z 1000
2025-07-05 13:38:34.527 +08:00 [INF] thr:74<> loader Requires:OUTP 1 0
2025-07-05 13:38:34.974 +08:00 [INF] thr:74<> loader Requires:OUTP 16 1
2025-07-05 13:38:35.422 +08:00 [INF] thr:74<> loader Requires:OUTP 15 1
2025-07-05 13:38:35.870 +08:00 [INF] thr:74<> loader Requires:OUTP 4 1
2025-07-05 13:38:36.316 +08:00 [INF] thr:74<> loader Requires:OUTP 1 1
2025-07-05 13:38:36.761 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:37.716 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:38.669 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:39.623 +08:00 [INF] thr:74<> loader Requires:INPUT A 4
2025-07-05 13:38:40.073 +08:00 [INF] thr:74<> loader Requires:INPUT A 5
2025-07-05 13:38:40.527 +08:00 [INF] thr:74<> loader Requires:MATS AK Z 1
2025-07-05 13:38:43.245 +08:00 [INF] thr:74<> loader Requires:SSPP Z 30
2025-07-05 13:38:43.696 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 13:38:43.696 +08:00 [INF] thr:74<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 13:38:43.696 +08:00 [INF] thr:74<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 13:38:44.702 +08:00 [INF] thr:74<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 13:38:44.702 +08:00 [INF] thr:74<> loader Requires:RETH
2025-07-05 13:38:49.963 +08:00 [INF] thr:74<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 14:48:31.836 +08:00 [INF] thr:42<> loader Requires:INPUT B 13
2025-07-05 14:48:33.298 +08:00 [INF] thr:73<> AOI is Ready
2025-07-05 14:48:35.133 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:50
2025-07-05 14:48:35.136 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:50
2025-07-05 14:48:39.676 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:8
2025-07-05 14:48:39.679 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:8
2025-07-05 14:48:39.695 +08:00 [INF] thr:73<> stage move to position action ok
2025-07-05 14:48:39.696 +08:00 [INF] thr:73<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 14:48:39.697 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 14:48:39.697 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-05 14:48:40.140 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-05 14:48:40.140 +08:00 [INF] thr:73<> loader Requires:MATS AK T
2025-07-05 14:48:40.597 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-05 14:48:41.044 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-05 14:48:41.517 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:48:41.968 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 14:48:41.968 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 14:48:41.968 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 14:48:42.471 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:48:42.471 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-05 14:48:42.925 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-05 14:48:43.372 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-05 14:48:43.818 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-05 14:48:44.267 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-05 14:48:44.714 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-05 14:48:45.160 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:48:45.612 +08:00 [INF] thr:73<> loader Requires:MATS AK R 0
2025-07-05 14:48:50.893 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 14:48:50.893 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 14:48:50.893 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 14:48:51.396 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:48:51.396 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:48:51.844 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 0
2025-07-05 14:48:54.556 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:48:55.027 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 14:48:55.027 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 14:48:55.027 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 14:48:55.531 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:48:55.531 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:48:55.977 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-05 14:48:56.423 +08:00 [INF] thr:73<> loader Requires:OUTP 16 0
2025-07-05 14:48:56.871 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-05 14:48:57.320 +08:00 [INF] thr:73<> loader Requires:OUTP 4 0
2025-07-05 14:48:57.767 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-05 14:48:58.213 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:48:59.166 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:00.120 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:01.071 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:02.024 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:02.977 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:03.430 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-05 14:49:03.883 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-05 14:49:06.606 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:49:07.055 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 14:49:07.055 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 14:49:07.055 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 14:49:07.560 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:49:07.560 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-05 14:49:12.821 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 14:49:12.823 +08:00 [INF] thr:73<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 14:49:12.823 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-05 14:49:13.833 +08:00 [INF] thr:73<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 14:49:13.833 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 14:49:13.833 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-05 14:49:14.276 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-05 14:49:14.276 +08:00 [INF] thr:73<> loader Requires:MATS AJ T
2025-07-05 14:49:17.816 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-05 14:49:18.274 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-05 14:49:25.291 +08:00 [INF] thr:73<> loader Requires:MOVR R 226000
2025-07-05 14:49:27.885 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:49:28.336 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 14:49:28.336 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 14:49:28.336 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 14:49:28.840 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:49:28.840 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-05 14:49:29.293 +08:00 [INF] thr:73<> loader Requires:MATS AJ R 0
2025-07-05 14:49:32.559 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 14:49:32.559 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 14:49:32.559 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 14:49:33.063 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:49:33.063 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:49:33.511 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 0
2025-07-05 14:49:36.123 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:49:36.573 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 14:49:36.573 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 14:49:36.573 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 14:49:37.078 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:49:37.078 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:49:37.524 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-05 14:49:37.970 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-05 14:49:38.418 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-05 14:49:38.867 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-05 14:49:39.314 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-05 14:49:39.773 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:40.725 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:41.678 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:42.631 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:49:43.084 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-05 14:49:43.536 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-05 14:49:46.153 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:49:46.602 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 14:49:46.602 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 14:49:46.602 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 14:49:47.105 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:49:47.106 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-05 14:49:52.142 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 14:49:52.145 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-05 14:53:29.668 +08:00 [INF] thr:32<> loader Requires:INPUT B 13
2025-07-05 14:53:30.652 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-05 14:53:31.664 +08:00 [INF] thr:73<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 14:53:31.664 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 14:53:31.665 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-05 14:53:32.110 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-05 14:53:32.110 +08:00 [INF] thr:73<> loader Requires:MATS AJ T
2025-07-05 14:53:32.569 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-05 14:53:33.016 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-05 14:53:33.488 +08:00 [INF] thr:73<> loader Requires:MOVR R 226000
2025-07-05 14:53:36.084 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:53:36.535 +08:00 [INF] thr:73<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 14:53:36.535 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 14:53:36.535 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 14:53:37.038 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:53:37.038 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-05 14:53:37.492 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-05 14:53:37.939 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-05 14:53:38.388 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-05 14:53:38.834 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-05 14:53:39.282 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-05 14:53:39.728 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:40.180 +08:00 [INF] thr:73<> loader Requires:MATS AJ R 0
2025-07-05 14:53:43.446 +08:00 [INF] thr:73<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 14:53:43.446 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 14:53:43.446 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 14:53:43.949 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:53:43.949 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:53:44.396 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 0
2025-07-05 14:53:47.008 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:53:47.457 +08:00 [INF] thr:73<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 14:53:47.457 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 14:53:47.457 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 14:53:47.962 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:53:47.962 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:53:48.410 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-05 14:53:48.856 +08:00 [INF] thr:73<> loader Requires:OUTP 16 0
2025-07-05 14:53:49.304 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-05 14:53:49.752 +08:00 [INF] thr:73<> loader Requires:OUTP 4 0
2025-07-05 14:53:50.199 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-05 14:53:50.648 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:51.602 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:52.556 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:53.509 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:54.462 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:55.416 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:53:55.867 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-05 14:53:56.320 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-05 14:53:58.937 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:53:59.388 +08:00 [INF] thr:73<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 14:53:59.388 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 14:53:59.388 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 14:53:59.891 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:53:59.891 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-05 14:54:04.928 +08:00 [INF] thr:73<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 14:54:04.929 +08:00 [INF] thr:73<> AOI is Ready
2025-07-05 14:54:04.999 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:50
2025-07-05 14:54:05.003 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:50
2025-07-05 14:54:05.040 +08:00 [INF] thr:73<> SetVelocity, Axis:X, velocity:8
2025-07-05 14:54:05.043 +08:00 [INF] thr:73<> SetVelocity, Axis:Y, velocity:8
2025-07-05 14:54:05.060 +08:00 [INF] thr:73<> stage move to position action ok
2025-07-05 14:54:05.060 +08:00 [INF] thr:73<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 14:54:05.060 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 14:54:05.061 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-05 14:54:05.509 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-05 14:54:05.509 +08:00 [INF] thr:73<> loader Requires:MATS AK T
2025-07-05 14:54:09.048 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-05 14:54:09.498 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-05 14:54:16.515 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:54:16.965 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 14:54:16.965 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 14:54:16.965 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 14:54:17.468 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:54:17.468 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-05 14:54:17.919 +08:00 [INF] thr:73<> loader Requires:MATS AK R 0
2025-07-05 14:54:23.201 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 14:54:23.201 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 14:54:23.201 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 14:54:23.704 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:54:23.704 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:54:24.150 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 0
2025-07-05 14:54:26.863 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:54:27.336 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 14:54:27.336 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 14:54:27.336 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 14:54:27.841 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:54:27.841 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-05 14:54:28.290 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-05 14:54:28.744 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-05 14:54:29.190 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-05 14:54:29.643 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-05 14:54:30.094 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-05 14:54:30.540 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:54:31.493 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:54:32.445 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:54:33.398 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-05 14:54:33.851 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-05 14:54:34.312 +08:00 [INF] thr:73<> loader Requires:MATS AK Z 1
2025-07-05 14:54:37.032 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-05 14:54:37.480 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 14:54:37.480 +08:00 [INF] thr:73<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 14:54:37.480 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 14:54:38.486 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 14:54:38.486 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-05 14:54:43.748 +08:00 [INF] thr:73<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 15:24:41.331 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:65418
2025-07-05 15:32:54.325 +08:00 [INF] thr:70<> loader Requires:INPUT B 13
2025-07-05 15:32:55.820 +08:00 [INF] thr:55<> AOI is Ready
2025-07-05 15:32:55.890 +08:00 [INF] thr:55<> SetVelocity, Axis:X, velocity:50
2025-07-05 15:32:55.903 +08:00 [INF] thr:55<> SetVelocity, Axis:Y, velocity:50
2025-07-05 15:32:59.334 +08:00 [INF] thr:55<> SetVelocity, Axis:X, velocity:50
2025-07-05 15:32:59.337 +08:00 [INF] thr:55<> SetVelocity, Axis:Y, velocity:100
2025-07-05 15:32:59.353 +08:00 [INF] thr:55<> stage move to position action ok
2025-07-05 15:32:59.354 +08:00 [INF] thr:55<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 15:32:59.354 +08:00 [INF] thr:55<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 15:32:59.354 +08:00 [INF] thr:55<> loader Requires:RGRP
2025-07-05 15:32:59.798 +08:00 [INF] thr:55<> CLeanLoader Group Now C
2025-07-05 15:32:59.798 +08:00 [INF] thr:55<> loader Requires:MATS AK T
2025-07-05 15:33:00.265 +08:00 [INF] thr:55<> loader Requires:SSP Z 4000
2025-07-05 15:33:00.713 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 1
2025-07-05 15:33:01.186 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-05 15:33:01.637 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 15:33:01.637 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 15:33:01.637 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 15:33:02.140 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:02.140 +08:00 [INF] thr:55<> loader Requires:INPUT A 6
2025-07-05 15:33:02.594 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-05 15:33:03.041 +08:00 [INF] thr:55<> loader Requires:OUTP 16 1
2025-07-05 15:33:03.487 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-05 15:33:03.935 +08:00 [INF] thr:55<> loader Requires:OUTP 4 1
2025-07-05 15:33:04.382 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-05 15:33:04.828 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:05.281 +08:00 [INF] thr:55<> loader Requires:MATS AK R 0
2025-07-05 15:33:10.562 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 15:33:10.562 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 15:33:10.562 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 15:33:11.064 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:11.064 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-05 15:33:11.512 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 0
2025-07-05 15:33:14.226 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-05 15:33:14.687 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 15:33:14.687 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 15:33:14.687 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 15:33:15.189 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:15.189 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-05 15:33:15.639 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-05 15:33:16.086 +08:00 [INF] thr:55<> loader Requires:OUTP 16 0
2025-07-05 15:33:16.534 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-05 15:33:16.983 +08:00 [INF] thr:55<> loader Requires:OUTP 4 0
2025-07-05 15:33:17.429 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-05 15:33:17.875 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:18.829 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:19.787 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:20.744 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:21.696 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:22.649 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:33:23.100 +08:00 [INF] thr:55<> loader Requires:INPUT A 5
2025-07-05 15:33:23.554 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 1
2025-07-05 15:33:26.272 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-05 15:33:26.723 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 15:33:26.723 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 15:33:26.723 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 15:33:27.227 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:27.227 +08:00 [INF] thr:55<> loader Requires:RETH
2025-07-05 15:33:32.489 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 15:33:32.490 +08:00 [INF] thr:55<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 15:33:32.490 +08:00 [INF] thr:55<> 执行Aligner角度angle：0
2025-07-05 15:33:33.497 +08:00 [INF] thr:55<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 15:33:33.498 +08:00 [INF] thr:55<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 15:33:33.498 +08:00 [INF] thr:55<> loader Requires:RGRP
2025-07-05 15:33:33.943 +08:00 [INF] thr:55<> CLeanLoader Group Now C
2025-07-05 15:33:33.943 +08:00 [INF] thr:55<> loader Requires:MATS AJ T
2025-07-05 15:33:37.484 +08:00 [INF] thr:55<> loader Requires:SSP Z 4000
2025-07-05 15:33:37.933 +08:00 [INF] thr:55<> loader Requires:MATS AJ Z 1
2025-07-05 15:33:44.951 +08:00 [INF] thr:55<> loader Requires:MOVR R 226000
2025-07-05 15:33:47.545 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-05 15:33:47.995 +08:00 [INF] thr:55<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 15:33:47.995 +08:00 [INF] thr:55<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 15:33:47.995 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 15:33:48.499 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:48.499 +08:00 [INF] thr:55<> loader Requires:INPUT A 6
2025-07-05 15:33:48.953 +08:00 [INF] thr:55<> loader Requires:MATS AJ R 0
2025-07-05 15:33:52.203 +08:00 [INF] thr:55<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 15:33:52.203 +08:00 [INF] thr:55<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 15:33:52.203 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 15:33:52.707 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:52.707 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-05 15:33:53.176 +08:00 [INF] thr:55<> loader Requires:MATS AJ Z 0
2025-07-05 15:33:55.791 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-05 15:33:56.240 +08:00 [INF] thr:55<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 15:33:56.240 +08:00 [INF] thr:55<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 15:33:56.240 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 15:33:56.744 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:33:56.744 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-05 15:33:57.193 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-05 15:33:57.638 +08:00 [INF] thr:55<> loader Requires:OUTP 16 1
2025-07-05 15:33:58.086 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-05 15:33:58.535 +08:00 [INF] thr:55<> loader Requires:OUTP 4 1
2025-07-05 15:33:58.982 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-05 15:33:59.428 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:34:00.382 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:34:01.334 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:34:02.286 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-05 15:34:02.739 +08:00 [INF] thr:55<> loader Requires:INPUT A 5
2025-07-05 15:34:03.194 +08:00 [INF] thr:55<> loader Requires:MATS AJ Z 1
2025-07-05 15:34:05.809 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-05 15:34:06.270 +08:00 [INF] thr:55<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 15:34:06.270 +08:00 [INF] thr:55<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 15:34:06.270 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 15:34:06.773 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:34:06.773 +08:00 [INF] thr:55<> loader Requires:RETH
2025-07-05 15:34:11.810 +08:00 [INF] thr:55<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 15:34:11.813 +08:00 [INF] thr:55<> 执行Aligner角度angle：0
2025-07-05 15:39:55.861 +08:00 [INF] thr:8<> loader Requires:INPUT B 13
2025-07-05 15:39:56.833 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-05 15:39:57.845 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 15:39:57.845 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 15:39:57.845 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-05 15:39:58.287 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-05 15:39:58.287 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-07-05 15:39:58.744 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-05 15:39:59.192 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-05 15:39:59.665 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-07-05 15:40:02.261 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 15:40:02.712 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 15:40:02.712 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 15:40:02.712 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 15:40:03.214 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:03.214 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-05 15:40:03.665 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-05 15:40:04.112 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-05 15:40:04.559 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-05 15:40:05.008 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-05 15:40:05.454 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-05 15:40:05.900 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:06.352 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-07-05 15:40:09.601 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 15:40:09.601 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 15:40:09.601 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 15:40:10.105 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:10.105 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 15:40:10.558 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-07-05 15:40:13.171 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 15:40:13.630 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 15:40:13.630 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 15:40:13.630 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 15:40:14.133 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:14.133 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 15:40:14.581 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-05 15:40:15.033 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-07-05 15:40:15.483 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-05 15:40:15.931 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-07-05 15:40:16.378 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-05 15:40:16.824 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:17.778 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:18.735 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:19.688 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:20.640 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:21.593 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:22.045 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-05 15:40:22.499 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-05 15:40:25.116 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 15:40:25.567 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 15:40:25.567 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 15:40:25.567 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 15:40:26.071 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:26.071 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-05 15:40:31.107 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 15:40:31.108 +08:00 [INF] thr:65<> AOI is Ready
2025-07-05 15:40:31.172 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-07-05 15:40:31.175 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-07-05 15:40:31.212 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-07-05 15:40:31.217 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:100
2025-07-05 15:40:31.248 +08:00 [INF] thr:65<> stage move to position action ok
2025-07-05 15:40:31.249 +08:00 [INF] thr:65<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 15:40:31.249 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 15:40:31.249 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-05 15:40:31.694 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-05 15:40:31.694 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-07-05 15:40:35.230 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-05 15:40:35.678 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-05 15:40:42.696 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 15:40:43.145 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 15:40:43.145 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 15:40:43.145 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 15:40:43.648 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:43.648 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-05 15:40:44.102 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-07-05 15:40:49.384 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 15:40:49.384 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 15:40:49.384 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 15:40:49.888 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:49.888 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 15:40:50.334 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-07-05 15:40:53.047 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 15:40:53.509 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 15:40:53.509 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 15:40:53.509 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 15:40:54.012 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:40:54.012 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 15:40:54.463 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-05 15:40:54.907 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-05 15:40:55.355 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-05 15:40:55.804 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-05 15:40:56.251 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-05 15:40:56.696 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:57.650 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:58.603 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:40:59.557 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 15:41:00.012 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-05 15:41:00.464 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-05 15:41:03.181 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 15:41:03.632 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 15:41:03.632 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 15:41:03.632 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 15:41:04.638 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 15:41:04.638 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-05 15:41:09.899 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 16:20:49.111 +08:00 [INF] thr:26<> loader Requires:INPUT B 13
2025-07-05 16:20:50.573 +08:00 [INF] thr:25<> AOI is Ready
2025-07-05 16:20:55.385 +08:00 [INF] thr:25<> SetVelocity, Axis:X, velocity:50
2025-07-05 16:20:55.388 +08:00 [INF] thr:25<> SetVelocity, Axis:Y, velocity:50
2025-07-05 16:20:58.186 +08:00 [INF] thr:25<> SetVelocity, Axis:X, velocity:8
2025-07-05 16:20:58.189 +08:00 [INF] thr:25<> SetVelocity, Axis:Y, velocity:8
2025-07-05 16:20:58.207 +08:00 [INF] thr:25<> stage move to position action ok
2025-07-05 16:20:58.207 +08:00 [INF] thr:25<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 16:20:58.208 +08:00 [INF] thr:25<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 16:20:58.208 +08:00 [INF] thr:25<> loader Requires:RGRP
2025-07-05 16:20:58.650 +08:00 [INF] thr:25<> CLeanLoader Group Now C
2025-07-05 16:20:58.650 +08:00 [INF] thr:25<> loader Requires:MATS AK T
2025-07-05 16:20:59.108 +08:00 [INF] thr:25<> loader Requires:SSP Z 4000
2025-07-05 16:20:59.555 +08:00 [INF] thr:25<> loader Requires:MATS AK Z 1
2025-07-05 16:21:00.033 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-05 16:21:00.484 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 16:21:00.484 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 16:21:00.484 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 16:21:00.987 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:00.987 +08:00 [INF] thr:25<> loader Requires:INPUT A 6
2025-07-05 16:21:01.440 +08:00 [INF] thr:25<> loader Requires:OUTP 1 0
2025-07-05 16:21:01.887 +08:00 [INF] thr:25<> loader Requires:OUTP 16 1
2025-07-05 16:21:02.334 +08:00 [INF] thr:25<> loader Requires:OUTP 15 1
2025-07-05 16:21:02.782 +08:00 [INF] thr:25<> loader Requires:OUTP 4 1
2025-07-05 16:21:03.229 +08:00 [INF] thr:25<> loader Requires:OUTP 1 1
2025-07-05 16:21:03.675 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:04.128 +08:00 [INF] thr:25<> loader Requires:MATS AK R 0
2025-07-05 16:21:09.409 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 16:21:09.409 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 16:21:09.409 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 16:21:09.910 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:09.910 +08:00 [INF] thr:25<> loader Requires:SSP Z 1000
2025-07-05 16:21:10.359 +08:00 [INF] thr:25<> loader Requires:MATS AK Z 0
2025-07-05 16:21:13.072 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-05 16:21:13.541 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 16:21:13.541 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 16:21:13.541 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 16:21:14.044 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:14.044 +08:00 [INF] thr:25<> loader Requires:SSP Z 1000
2025-07-05 16:21:14.492 +08:00 [INF] thr:25<> loader Requires:OUTP 1 0
2025-07-05 16:21:14.939 +08:00 [INF] thr:25<> loader Requires:OUTP 16 0
2025-07-05 16:21:15.387 +08:00 [INF] thr:25<> loader Requires:OUTP 15 1
2025-07-05 16:21:15.836 +08:00 [INF] thr:25<> loader Requires:OUTP 4 0
2025-07-05 16:21:16.286 +08:00 [INF] thr:25<> loader Requires:OUTP 1 1
2025-07-05 16:21:16.732 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:17.686 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:18.638 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:19.590 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:20.544 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:21.496 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-05 16:21:21.949 +08:00 [INF] thr:25<> loader Requires:INPUT A 5
2025-07-05 16:21:22.402 +08:00 [INF] thr:25<> loader Requires:MATS AK Z 1
2025-07-05 16:21:25.120 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-05 16:21:25.570 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 16:21:25.570 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 16:21:25.570 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 16:21:26.075 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:26.075 +08:00 [INF] thr:25<> loader Requires:RETH
2025-07-05 16:21:31.336 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 16:21:31.337 +08:00 [INF] thr:52<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 16:21:31.337 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-05 16:21:32.343 +08:00 [INF] thr:52<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 16:21:32.344 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 16:21:32.344 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-05 16:21:32.785 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-05 16:21:32.785 +08:00 [INF] thr:52<> loader Requires:MATS AJ T
2025-07-05 16:21:36.328 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-05 16:21:36.777 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-05 16:21:43.795 +08:00 [INF] thr:52<> loader Requires:MOVR R 226000
2025-07-05 16:21:46.388 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 16:21:46.839 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 16:21:46.839 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 16:21:46.839 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 16:21:47.341 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:47.341 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-05 16:21:47.796 +08:00 [INF] thr:52<> loader Requires:MATS AJ R 0
2025-07-05 16:21:51.044 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 16:21:51.045 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 16:21:51.045 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 16:21:51.547 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:51.548 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 16:21:51.997 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 0
2025-07-05 16:21:54.610 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 16:21:55.059 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 16:21:55.059 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 16:21:55.059 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 16:21:55.562 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:21:55.563 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 16:21:56.011 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 16:21:56.458 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-05 16:21:56.906 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 16:21:57.354 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-05 16:21:57.801 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 16:21:58.247 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 16:21:59.201 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 16:22:00.157 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 16:22:01.109 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 16:22:01.562 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-05 16:22:02.014 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-05 16:22:04.631 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 16:22:05.081 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 16:22:05.081 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 16:22:05.081 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 16:22:05.585 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:22:05.585 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-05 16:22:10.620 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 16:22:10.626 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-05 16:23:54.080 +08:00 [INF] thr:47<> loader Requires:INPUT B 13
2025-07-05 16:23:55.058 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-07-05 16:23:56.063 +08:00 [INF] thr:31<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 16:23:56.063 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 16:23:56.063 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-07-05 16:23:56.505 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-07-05 16:23:56.505 +08:00 [INF] thr:31<> loader Requires:MATS AJ T
2025-07-05 16:23:56.968 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-07-05 16:23:57.416 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-05 16:23:57.888 +08:00 [INF] thr:31<> loader Requires:MOVR R 226000
2025-07-05 16:24:00.484 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 16:24:00.946 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 16:24:00.946 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 16:24:00.946 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 16:24:01.450 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:01.450 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-07-05 16:24:01.903 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-05 16:24:02.350 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-07-05 16:24:02.801 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-05 16:24:03.250 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-07-05 16:24:03.697 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-05 16:24:04.143 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:04.595 +08:00 [INF] thr:31<> loader Requires:MATS AJ R 0
2025-07-05 16:24:07.851 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 16:24:07.851 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 16:24:07.851 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 16:24:08.353 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:08.353 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-05 16:24:08.803 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 0
2025-07-05 16:24:11.415 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 16:24:11.865 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 16:24:11.865 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 16:24:11.865 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 16:24:12.368 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:12.368 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-05 16:24:12.817 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-05 16:24:13.264 +08:00 [INF] thr:31<> loader Requires:OUTP 16 0
2025-07-05 16:24:13.720 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-05 16:24:14.168 +08:00 [INF] thr:31<> loader Requires:OUTP 4 0
2025-07-05 16:24:14.615 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-05 16:24:15.065 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:16.020 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:16.972 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:17.927 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:18.882 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:19.836 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:20.285 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-07-05 16:24:20.739 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-05 16:24:23.356 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 16:24:23.839 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 16:24:23.839 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 16:24:23.839 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 16:24:24.342 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:24.342 +08:00 [INF] thr:31<> loader Requires:RETH
2025-07-05 16:24:29.379 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 16:24:29.380 +08:00 [INF] thr:31<> AOI is Ready
2025-07-05 16:24:29.450 +08:00 [INF] thr:31<> SetVelocity, Axis:X, velocity:50
2025-07-05 16:24:29.457 +08:00 [INF] thr:31<> SetVelocity, Axis:Y, velocity:50
2025-07-05 16:24:29.502 +08:00 [INF] thr:31<> SetVelocity, Axis:X, velocity:8
2025-07-05 16:24:29.505 +08:00 [INF] thr:31<> SetVelocity, Axis:Y, velocity:8
2025-07-05 16:24:29.524 +08:00 [INF] thr:31<> stage move to position action ok
2025-07-05 16:24:29.524 +08:00 [INF] thr:31<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 16:24:29.524 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 16:24:29.524 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-07-05 16:24:29.967 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-07-05 16:24:29.967 +08:00 [INF] thr:31<> loader Requires:MATS AK T
2025-07-05 16:24:33.509 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-07-05 16:24:33.957 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 1
2025-07-05 16:24:40.976 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 16:24:41.425 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 16:24:41.426 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 16:24:41.426 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 16:24:41.929 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:41.929 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-07-05 16:24:42.378 +08:00 [INF] thr:31<> loader Requires:MATS AK R 0
2025-07-05 16:24:47.660 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 16:24:47.660 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 16:24:47.660 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 16:24:48.163 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:48.163 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-05 16:24:48.610 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 0
2025-07-05 16:24:51.324 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 16:24:51.795 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 16:24:51.795 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 16:24:51.795 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 16:24:52.299 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:24:52.299 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-05 16:24:52.746 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-05 16:24:53.204 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-07-05 16:24:53.652 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-05 16:24:54.100 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-07-05 16:24:54.547 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-05 16:24:54.994 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:55.951 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:56.903 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:57.857 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 16:24:58.309 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-07-05 16:24:58.762 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 1
2025-07-05 16:25:01.477 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 16:25:01.930 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 16:25:01.930 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 16:25:01.930 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 16:25:02.936 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 16:25:02.936 +08:00 [INF] thr:31<> loader Requires:RETH
2025-07-05 16:25:08.198 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 17:43:19.147 +08:00 [INF] thr:60<> loader Requires:INPUT B 13
2025-07-05 17:43:20.609 +08:00 [INF] thr:57<> AOI is Ready
2025-07-05 17:43:25.384 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:50
2025-07-05 17:43:25.387 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:50
2025-07-05 17:43:28.237 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:8
2025-07-05 17:43:28.241 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:8
2025-07-05 17:43:28.259 +08:00 [INF] thr:57<> stage move to position action ok
2025-07-05 17:43:28.259 +08:00 [INF] thr:57<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 17:43:28.259 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 17:43:28.259 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-05 17:43:28.704 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-05 17:43:28.704 +08:00 [INF] thr:57<> loader Requires:MATS AK T
2025-07-05 17:43:29.161 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-05 17:43:29.609 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-05 17:43:30.082 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 17:43:30.532 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 17:43:30.532 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 17:43:30.532 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 17:43:31.033 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:43:31.033 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-05 17:43:31.485 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 17:43:31.932 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-05 17:43:32.379 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 17:43:32.827 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-05 17:43:33.273 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 17:43:33.719 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:34.172 +08:00 [INF] thr:57<> loader Requires:MATS AK R 0
2025-07-05 17:43:39.454 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 17:43:39.454 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 17:43:39.454 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 17:43:39.957 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:43:39.957 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 17:43:40.403 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 0
2025-07-05 17:43:43.117 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 17:43:43.579 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 17:43:43.579 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 17:43:43.579 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 17:43:44.083 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:43:44.083 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 17:43:44.531 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 17:43:44.977 +08:00 [INF] thr:57<> loader Requires:OUTP 16 0
2025-07-05 17:43:45.425 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 17:43:45.874 +08:00 [INF] thr:57<> loader Requires:OUTP 4 0
2025-07-05 17:43:46.321 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 17:43:46.766 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:47.721 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:48.672 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:49.626 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:50.579 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:51.531 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 17:43:51.983 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-05 17:43:52.436 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-05 17:43:55.157 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 17:43:55.610 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 17:43:55.610 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 17:43:55.610 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 17:43:56.112 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:43:56.112 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-05 17:44:01.376 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 17:44:01.378 +08:00 [INF] thr:31<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 17:44:01.378 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-07-05 17:44:02.384 +08:00 [INF] thr:31<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 17:44:02.384 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 17:44:02.384 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-07-05 17:44:02.826 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-07-05 17:44:02.826 +08:00 [INF] thr:31<> loader Requires:MATS AJ T
2025-07-05 17:44:06.369 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-07-05 17:44:06.816 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-05 17:44:13.835 +08:00 [INF] thr:31<> loader Requires:MOVR R 226000
2025-07-05 17:44:16.430 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 17:44:16.880 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 17:44:16.880 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 17:44:16.880 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 17:44:17.384 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:44:17.384 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-07-05 17:44:17.837 +08:00 [INF] thr:31<> loader Requires:MATS AJ R 0
2025-07-05 17:44:21.086 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 17:44:21.086 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 17:44:21.086 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 17:44:21.591 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:44:21.591 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-05 17:44:22.038 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 0
2025-07-05 17:44:24.674 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 17:44:25.124 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 17:44:25.124 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 17:44:25.124 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 17:44:25.631 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:44:25.631 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-05 17:44:26.076 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-05 17:44:26.526 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-07-05 17:44:26.974 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-05 17:44:27.422 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-07-05 17:44:27.869 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-05 17:44:28.315 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 17:44:29.269 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 17:44:30.221 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 17:44:31.174 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-05 17:44:31.626 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-07-05 17:44:32.080 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-05 17:44:34.697 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-05 17:44:35.148 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 17:44:35.148 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 17:44:35.148 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 17:44:35.650 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:44:35.650 +08:00 [INF] thr:31<> loader Requires:RETH
2025-07-05 17:44:40.696 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 17:44:40.697 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-07-05 17:46:11.540 +08:00 [INF] thr:5<> loader Requires:INPUT B 13
2025-07-05 17:46:12.535 +08:00 [INF] thr:49<> 执行Aligner角度angle：0
2025-07-05 17:46:13.541 +08:00 [INF] thr:49<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 17:46:13.542 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 17:46:13.542 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-05 17:46:13.983 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-05 17:46:13.983 +08:00 [INF] thr:49<> loader Requires:MATS AJ T
2025-07-05 17:46:14.441 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-05 17:46:14.894 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-05 17:46:15.365 +08:00 [INF] thr:49<> loader Requires:MOVR R 226000
2025-07-05 17:46:17.961 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-05 17:46:18.412 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 17:46:18.412 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 17:46:18.412 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 17:46:18.914 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:46:18.914 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-05 17:46:19.364 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-05 17:46:19.812 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-05 17:46:20.259 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-05 17:46:20.708 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-05 17:46:21.154 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-05 17:46:21.600 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:22.053 +08:00 [INF] thr:49<> loader Requires:MATS AJ R 0
2025-07-05 17:46:25.302 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 17:46:25.302 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 17:46:25.302 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 17:46:25.810 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:46:25.810 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-05 17:46:26.259 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 0
2025-07-05 17:46:28.870 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-05 17:46:29.319 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 17:46:29.320 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 17:46:29.320 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 17:46:29.822 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:46:29.822 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-05 17:46:30.271 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-05 17:46:30.718 +08:00 [INF] thr:49<> loader Requires:OUTP 16 0
2025-07-05 17:46:31.166 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-05 17:46:31.614 +08:00 [INF] thr:49<> loader Requires:OUTP 4 0
2025-07-05 17:46:32.061 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-05 17:46:32.507 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:33.468 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:34.430 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:35.382 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:36.336 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:37.289 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:46:37.743 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-05 17:46:38.194 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-05 17:46:40.810 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-05 17:46:41.261 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 17:46:41.261 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 17:46:41.261 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 17:46:41.763 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:46:41.763 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-05 17:46:46.798 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 17:46:46.800 +08:00 [INF] thr:49<> AOI is Ready
2025-07-05 17:46:46.862 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:50
2025-07-05 17:46:46.866 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:50
2025-07-05 17:46:46.906 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:8
2025-07-05 17:46:46.910 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:8
2025-07-05 17:46:46.925 +08:00 [INF] thr:49<> stage move to position action ok
2025-07-05 17:46:46.925 +08:00 [INF] thr:49<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 17:46:46.926 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 17:46:46.926 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-05 17:46:47.369 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-05 17:46:47.369 +08:00 [INF] thr:49<> loader Requires:MATS AK T
2025-07-05 17:46:50.910 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-05 17:46:51.360 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-05 17:46:58.378 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-05 17:46:58.828 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 17:46:58.828 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 17:46:58.828 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 17:46:59.330 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:46:59.330 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-05 17:46:59.784 +08:00 [INF] thr:49<> loader Requires:MATS AK R 0
2025-07-05 17:47:05.067 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 17:47:05.067 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 17:47:05.067 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 17:47:05.569 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:47:05.569 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-05 17:47:06.015 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 0
2025-07-05 17:47:08.728 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-05 17:47:09.190 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 17:47:09.190 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 17:47:09.190 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 17:47:09.694 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:47:09.694 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-05 17:47:10.143 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-05 17:47:10.590 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-05 17:47:11.037 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-05 17:47:11.495 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-05 17:47:11.944 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-05 17:47:12.390 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:47:13.344 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:47:14.297 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:47:15.252 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-05 17:47:15.705 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-05 17:47:16.159 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-05 17:47:18.875 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-05 17:47:19.330 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 17:47:19.330 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 17:47:19.330 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 17:47:20.337 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 17:47:20.337 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-05 17:47:25.600 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 18:25:24.413 +08:00 [INF] thr:43<> loader Requires:INPUT B 13
2025-07-05 18:25:25.876 +08:00 [INF] thr:57<> AOI is Ready
2025-07-05 18:25:35.501 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:50
2025-07-05 18:25:35.504 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:50
2025-07-05 18:25:38.505 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:8
2025-07-05 18:25:38.509 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:8
2025-07-05 18:25:38.528 +08:00 [INF] thr:57<> stage move to position action ok
2025-07-05 18:25:38.528 +08:00 [INF] thr:57<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 18:25:38.529 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 18:25:38.529 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-05 18:25:38.970 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-05 18:25:38.971 +08:00 [INF] thr:57<> loader Requires:MATS AK T
2025-07-05 18:25:39.435 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-05 18:25:39.884 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-05 18:25:40.357 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 18:25:40.807 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 18:25:40.807 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 18:25:40.807 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 18:25:41.311 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:25:41.311 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-05 18:25:41.764 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 18:25:42.213 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-05 18:25:42.663 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 18:25:43.112 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-05 18:25:43.570 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 18:25:44.016 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:25:44.475 +08:00 [INF] thr:57<> loader Requires:MATS AK R 0
2025-07-05 18:25:49.786 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 18:25:49.786 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 18:25:49.786 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 18:25:50.289 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:25:50.289 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 18:25:50.737 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 0
2025-07-05 18:25:53.450 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 18:25:53.913 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 18:25:53.913 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 18:25:53.913 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 18:25:54.417 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:25:54.417 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 18:25:54.865 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 18:25:55.312 +08:00 [INF] thr:57<> loader Requires:OUTP 16 0
2025-07-05 18:25:55.762 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 18:25:56.211 +08:00 [INF] thr:57<> loader Requires:OUTP 4 0
2025-07-05 18:25:56.658 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 18:25:57.103 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:25:58.058 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:25:59.019 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:25:59.973 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:00.926 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:01.878 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:02.329 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-05 18:26:02.783 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-05 18:26:05.500 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 18:26:05.952 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 18:26:05.952 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 18:26:05.952 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 18:26:06.453 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:26:06.454 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-05 18:26:11.718 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 18:26:11.719 +08:00 [INF] thr:57<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 18:26:11.719 +08:00 [INF] thr:57<> 执行Aligner角度angle：0
2025-07-05 18:26:12.726 +08:00 [INF] thr:57<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 18:26:12.726 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 18:26:12.726 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-05 18:26:13.168 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-05 18:26:13.169 +08:00 [INF] thr:57<> loader Requires:MATS AJ T
2025-07-05 18:26:16.713 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-05 18:26:17.161 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 1
2025-07-05 18:26:24.179 +08:00 [INF] thr:57<> loader Requires:MOVR R 226000
2025-07-05 18:26:26.774 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 18:26:27.225 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 18:26:27.225 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 18:26:27.225 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 18:26:27.727 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:26:27.727 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-05 18:26:28.177 +08:00 [INF] thr:57<> loader Requires:MATS AJ R 0
2025-07-05 18:26:31.427 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 18:26:31.427 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 18:26:31.427 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 18:26:31.929 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:26:31.929 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 18:26:32.377 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 0
2025-07-05 18:26:34.990 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 18:26:35.440 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 18:26:35.440 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 18:26:35.440 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 18:26:35.943 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:26:35.943 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 18:26:36.392 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 18:26:36.839 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-05 18:26:37.287 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 18:26:37.735 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-05 18:26:38.182 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 18:26:38.628 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:39.581 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:40.536 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:41.492 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 18:26:41.943 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-05 18:26:42.397 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 1
2025-07-05 18:26:45.013 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 18:26:45.465 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 18:26:45.465 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 18:26:45.465 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 18:26:45.967 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:26:45.967 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-05 18:26:50.999 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 18:26:51.003 +08:00 [INF] thr:57<> 执行Aligner角度angle：0
2025-07-05 18:28:33.910 +08:00 [INF] thr:19<> loader Requires:INPUT B 13
2025-07-05 18:28:34.887 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-05 18:28:35.892 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 18:28:35.893 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 18:28:35.893 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-05 18:28:36.334 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-05 18:28:36.335 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-07-05 18:28:36.793 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-05 18:28:37.240 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-05 18:28:37.714 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-07-05 18:28:40.308 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 18:28:40.758 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 18:28:40.758 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 18:28:40.758 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 18:28:41.261 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:28:41.261 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-05 18:28:41.715 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-05 18:28:42.162 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-05 18:28:42.610 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-05 18:28:43.059 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-05 18:28:43.505 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-05 18:28:43.950 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:28:44.402 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-07-05 18:28:47.651 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 18:28:47.651 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 18:28:47.651 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 18:28:48.155 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:28:48.155 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 18:28:48.604 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-07-05 18:28:51.216 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 18:28:51.666 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 18:28:51.666 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 18:28:51.666 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 18:28:52.168 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:28:52.168 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 18:28:52.617 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-05 18:28:53.064 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-07-05 18:28:53.512 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-05 18:28:53.960 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-07-05 18:28:54.406 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-05 18:28:54.853 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:28:55.806 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:28:56.758 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:28:57.712 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:28:58.682 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:28:59.633 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:29:00.085 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-05 18:29:00.539 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-05 18:29:03.156 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 18:29:03.607 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 18:29:03.607 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 18:29:03.607 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 18:29:04.110 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:29:04.110 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-05 18:29:09.148 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 18:29:09.150 +08:00 [INF] thr:65<> AOI is Ready
2025-07-05 18:29:09.220 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-07-05 18:29:09.225 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-07-05 18:29:09.271 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:8
2025-07-05 18:29:09.275 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:8
2025-07-05 18:29:09.291 +08:00 [INF] thr:65<> stage move to position action ok
2025-07-05 18:29:09.291 +08:00 [INF] thr:65<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 18:29:09.293 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 18:29:09.293 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-05 18:29:09.733 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-05 18:29:09.733 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-07-05 18:29:13.275 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-05 18:29:13.724 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-05 18:29:20.742 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 18:29:21.192 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 18:29:21.192 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 18:29:21.192 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 18:29:21.696 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:29:21.696 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-05 18:29:22.149 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-07-05 18:29:27.431 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 18:29:27.431 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 18:29:27.431 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 18:29:27.934 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:29:27.934 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 18:29:28.397 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-07-05 18:29:31.109 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 18:29:31.598 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 18:29:31.598 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 18:29:31.598 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 18:29:32.106 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:29:32.106 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-05 18:29:32.555 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-05 18:29:33.002 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-05 18:29:33.449 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-05 18:29:33.898 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-05 18:29:34.345 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-05 18:29:34.790 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:29:35.744 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:29:36.696 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:29:37.650 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-05 18:29:38.101 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-05 18:29:38.554 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-05 18:29:41.272 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-05 18:29:41.723 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 18:29:41.723 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 18:29:41.723 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 18:29:42.729 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 18:29:42.729 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-05 18:29:48.012 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 20:17:29.979 +08:00 [INF] thr:81<> loader Requires:INPUT B 13
2025-07-05 20:17:31.442 +08:00 [INF] thr:52<> AOI is Ready
2025-07-05 20:17:36.683 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:50
2025-07-05 20:17:36.686 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:50
2025-07-05 20:17:39.511 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:8
2025-07-05 20:17:39.515 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:8
2025-07-05 20:17:39.550 +08:00 [INF] thr:52<> stage move to position action ok
2025-07-05 20:17:39.550 +08:00 [INF] thr:52<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 20:17:39.551 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 20:17:39.551 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-05 20:17:39.998 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-05 20:17:39.998 +08:00 [INF] thr:52<> loader Requires:MATS AK T
2025-07-05 20:17:40.461 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-05 20:17:40.909 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-05 20:17:41.382 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 20:17:41.832 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 20:17:41.832 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 20:17:41.832 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 20:17:42.336 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:17:42.336 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-05 20:17:42.790 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 20:17:43.237 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-05 20:17:43.682 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 20:17:44.131 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-05 20:17:44.578 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 20:17:45.024 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:17:45.477 +08:00 [INF] thr:52<> loader Requires:MATS AK R 0
2025-07-05 20:17:50.757 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 20:17:50.757 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 20:17:50.757 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 20:17:51.262 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:17:51.262 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 20:17:51.712 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 0
2025-07-05 20:17:54.425 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 20:17:54.885 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 20:17:54.886 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 20:17:54.886 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 20:17:55.388 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:17:55.388 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 20:17:55.834 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 20:17:56.282 +08:00 [INF] thr:52<> loader Requires:OUTP 16 0
2025-07-05 20:17:56.729 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 20:17:57.177 +08:00 [INF] thr:52<> loader Requires:OUTP 4 0
2025-07-05 20:17:57.624 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 20:17:58.070 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:17:59.024 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:17:59.978 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:00.931 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:01.884 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:02.836 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:03.288 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-05 20:18:03.742 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-05 20:18:06.459 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 20:18:06.909 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 20:18:06.909 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 20:18:06.909 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 20:18:07.414 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:18:07.414 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-05 20:18:12.675 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 20:18:12.677 +08:00 [INF] thr:52<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 20:18:12.677 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-05 20:18:13.684 +08:00 [INF] thr:52<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 20:18:13.684 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 20:18:13.684 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-05 20:18:14.130 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-05 20:18:14.130 +08:00 [INF] thr:52<> loader Requires:MATS AJ T
2025-07-05 20:18:17.673 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-05 20:18:18.120 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-05 20:18:25.139 +08:00 [INF] thr:52<> loader Requires:MOVR R 226000
2025-07-05 20:18:27.733 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 20:18:28.183 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 20:18:28.183 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 20:18:28.183 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 20:18:28.686 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:18:28.686 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-05 20:18:29.140 +08:00 [INF] thr:52<> loader Requires:MATS AJ R 0
2025-07-05 20:18:32.390 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 20:18:32.390 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 20:18:32.390 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 20:18:32.893 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:18:32.893 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 20:18:33.343 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 0
2025-07-05 20:18:35.955 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 20:18:36.404 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 20:18:36.404 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 20:18:36.404 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 20:18:36.907 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:18:36.907 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 20:18:37.356 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 20:18:37.803 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-05 20:18:38.251 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 20:18:38.698 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-05 20:18:39.145 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 20:18:39.592 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:40.546 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:41.502 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:42.455 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 20:18:42.907 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-05 20:18:43.360 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-05 20:18:45.976 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 20:18:46.426 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 20:18:46.426 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 20:18:46.426 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 20:18:46.931 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:18:46.931 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-05 20:18:51.964 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 20:18:51.966 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-05 20:30:03.268 +08:00 [INF] thr:76<> loader Requires:INPUT B 13
2025-07-05 20:30:04.251 +08:00 [INF] thr:57<> 执行Aligner角度angle：0
2025-07-05 20:30:05.255 +08:00 [INF] thr:57<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 20:30:05.255 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 20:30:05.255 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-05 20:30:05.696 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-05 20:30:05.696 +08:00 [INF] thr:57<> loader Requires:MATS AJ T
2025-07-05 20:30:06.155 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-05 20:30:06.602 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 1
2025-07-05 20:30:07.082 +08:00 [INF] thr:57<> loader Requires:MOVR R 226000
2025-07-05 20:30:09.677 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 20:30:10.128 +08:00 [INF] thr:57<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 20:30:10.128 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 20:30:10.128 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 20:30:10.632 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:30:10.632 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-05 20:30:11.085 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 20:30:11.532 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-05 20:30:11.979 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 20:30:12.428 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-05 20:30:12.874 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 20:30:13.319 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:13.772 +08:00 [INF] thr:57<> loader Requires:MATS AJ R 0
2025-07-05 20:30:17.021 +08:00 [INF] thr:57<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 20:30:17.021 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 20:30:17.021 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 20:30:17.524 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:30:17.524 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 20:30:17.973 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 0
2025-07-05 20:30:20.585 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 20:30:21.034 +08:00 [INF] thr:57<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 20:30:21.034 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 20:30:21.034 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 20:30:21.538 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:30:21.538 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 20:30:21.987 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 20:30:22.432 +08:00 [INF] thr:57<> loader Requires:OUTP 16 0
2025-07-05 20:30:22.880 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 20:30:23.328 +08:00 [INF] thr:57<> loader Requires:OUTP 4 0
2025-07-05 20:30:23.779 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 20:30:24.225 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:25.180 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:26.135 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:27.088 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:28.041 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:28.994 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:30:29.446 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-05 20:30:29.899 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 1
2025-07-05 20:30:32.516 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 20:30:32.967 +08:00 [INF] thr:57<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 20:30:32.968 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 20:30:32.968 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 20:30:33.470 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:30:33.470 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-05 20:30:38.506 +08:00 [INF] thr:57<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 20:30:38.507 +08:00 [INF] thr:57<> AOI is Ready
2025-07-05 20:30:38.574 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:50
2025-07-05 20:30:38.577 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:50
2025-07-05 20:30:38.612 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:8
2025-07-05 20:30:38.618 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:8
2025-07-05 20:30:38.635 +08:00 [INF] thr:57<> stage move to position action ok
2025-07-05 20:30:38.635 +08:00 [INF] thr:57<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 20:30:38.636 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 20:30:38.636 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-05 20:30:39.078 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-05 20:30:39.078 +08:00 [INF] thr:57<> loader Requires:MATS AK T
2025-07-05 20:30:42.620 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-05 20:30:43.077 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-05 20:30:50.095 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 20:30:50.545 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 20:30:50.545 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 20:30:50.545 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 20:30:51.049 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:30:51.049 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-05 20:30:51.502 +08:00 [INF] thr:57<> loader Requires:MATS AK R 0
2025-07-05 20:30:56.785 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 20:30:56.785 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 20:30:56.785 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 20:30:57.290 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:30:57.290 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 20:30:57.735 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 0
2025-07-05 20:31:00.447 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 20:31:00.907 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 20:31:00.907 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 20:31:00.907 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 20:31:01.411 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:31:01.411 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-05 20:31:01.860 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-05 20:31:02.306 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-05 20:31:02.754 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-05 20:31:03.203 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-05 20:31:03.650 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-05 20:31:04.096 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:31:05.049 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:31:06.003 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:31:06.957 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-05 20:31:07.411 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-05 20:31:07.865 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-05 20:31:10.582 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-05 20:31:11.033 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 20:31:11.033 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 20:31:11.033 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 20:31:12.039 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 20:31:12.039 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-05 20:31:17.301 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-05 21:56:54.825 +08:00 [INF] thr:19<> loader Requires:INPUT B 13
2025-07-05 21:56:56.286 +08:00 [INF] thr:44<> AOI is Ready
2025-07-05 21:57:01.463 +08:00 [INF] thr:44<> SetVelocity, Axis:X, velocity:50
2025-07-05 21:57:01.466 +08:00 [INF] thr:44<> SetVelocity, Axis:Y, velocity:50
2025-07-05 21:57:05.466 +08:00 [INF] thr:44<> SetVelocity, Axis:X, velocity:60
2025-07-05 21:57:05.469 +08:00 [INF] thr:44<> SetVelocity, Axis:Y, velocity:60
2025-07-05 21:57:05.501 +08:00 [INF] thr:44<> stage move to position action ok
2025-07-05 21:57:05.501 +08:00 [INF] thr:44<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-05 21:57:05.502 +08:00 [INF] thr:44<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 21:57:05.502 +08:00 [INF] thr:44<> loader Requires:RGRP
2025-07-05 21:57:05.946 +08:00 [INF] thr:44<> CLeanLoader Group Now C
2025-07-05 21:57:05.946 +08:00 [INF] thr:44<> loader Requires:MATS AK T
2025-07-05 21:57:06.408 +08:00 [INF] thr:44<> loader Requires:SSP Z 4000
2025-07-05 21:57:06.856 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 1
2025-07-05 21:57:07.329 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-07-05 21:57:07.779 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-05 21:57:07.779 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-05 21:57:07.779 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-05 21:57:08.283 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:57:08.283 +08:00 [INF] thr:44<> loader Requires:INPUT A 6
2025-07-05 21:57:08.747 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-07-05 21:57:09.190 +08:00 [INF] thr:44<> loader Requires:OUTP 16 1
2025-07-05 21:57:09.638 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-07-05 21:57:10.087 +08:00 [INF] thr:44<> loader Requires:OUTP 4 1
2025-07-05 21:57:10.534 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-07-05 21:57:10.979 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:11.431 +08:00 [INF] thr:44<> loader Requires:MATS AK R 0
2025-07-05 21:57:16.713 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-05 21:57:16.713 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:下片请求
2025-07-05 21:57:16.713 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-05 21:57:17.216 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:57:17.216 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-07-05 21:57:17.664 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 0
2025-07-05 21:57:20.376 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-07-05 21:57:20.844 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-05 21:57:20.844 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-05 21:57:20.844 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-05 21:57:21.347 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:57:21.347 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-07-05 21:57:21.795 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-07-05 21:57:22.241 +08:00 [INF] thr:44<> loader Requires:OUTP 16 0
2025-07-05 21:57:22.696 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-07-05 21:57:23.145 +08:00 [INF] thr:44<> loader Requires:OUTP 4 0
2025-07-05 21:57:23.592 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-07-05 21:57:24.038 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:24.990 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:25.944 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:26.897 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:27.851 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:28.804 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:57:29.256 +08:00 [INF] thr:44<> loader Requires:INPUT A 5
2025-07-05 21:57:29.709 +08:00 [INF] thr:44<> loader Requires:MATS AK Z 1
2025-07-05 21:57:32.427 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-07-05 21:57:32.878 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-05 21:57:32.878 +08:00 [INF] thr:44<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-05 21:57:32.878 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-05 21:57:33.380 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:57:33.380 +08:00 [INF] thr:44<> loader Requires:RETH
2025-07-05 21:57:38.643 +08:00 [INF] thr:44<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-05 21:57:38.645 +08:00 [INF] thr:44<> 执行Aligner设置初始角度InitialAngle：0
2025-07-05 21:57:38.645 +08:00 [INF] thr:44<> 执行Aligner角度angle：0
2025-07-05 21:57:39.652 +08:00 [INF] thr:44<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-05 21:57:39.653 +08:00 [INF] thr:44<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 21:57:39.653 +08:00 [INF] thr:44<> loader Requires:RGRP
2025-07-05 21:57:40.095 +08:00 [INF] thr:44<> CLeanLoader Group Now C
2025-07-05 21:57:40.095 +08:00 [INF] thr:44<> loader Requires:MATS AJ T
2025-07-05 21:57:43.660 +08:00 [INF] thr:44<> loader Requires:SSP Z 4000
2025-07-05 21:57:44.106 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 1
2025-07-05 21:57:51.124 +08:00 [INF] thr:44<> loader Requires:MOVR R 226000
2025-07-05 21:57:53.719 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-07-05 21:57:54.170 +08:00 [INF] thr:44<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-05 21:57:54.170 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-05 21:57:54.170 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-05 21:57:54.674 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:57:54.674 +08:00 [INF] thr:44<> loader Requires:INPUT A 6
2025-07-05 21:57:55.127 +08:00 [INF] thr:44<> loader Requires:MATS AJ R 0
2025-07-05 21:57:58.377 +08:00 [INF] thr:44<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-05 21:57:58.377 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-05 21:57:58.377 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-05 21:57:58.880 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:57:58.880 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-07-05 21:57:59.329 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 0
2025-07-05 21:58:01.949 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-07-05 21:58:02.399 +08:00 [INF] thr:44<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-05 21:58:02.399 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-05 21:58:02.399 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-05 21:58:02.903 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:58:02.903 +08:00 [INF] thr:44<> loader Requires:SSP Z 1000
2025-07-05 21:58:03.354 +08:00 [INF] thr:44<> loader Requires:OUTP 1 0
2025-07-05 21:58:03.798 +08:00 [INF] thr:44<> loader Requires:OUTP 16 1
2025-07-05 21:58:04.246 +08:00 [INF] thr:44<> loader Requires:OUTP 15 1
2025-07-05 21:58:04.693 +08:00 [INF] thr:44<> loader Requires:OUTP 4 1
2025-07-05 21:58:05.140 +08:00 [INF] thr:44<> loader Requires:OUTP 1 1
2025-07-05 21:58:05.587 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:58:06.540 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:58:07.494 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:58:08.448 +08:00 [INF] thr:44<> loader Requires:INPUT A 4
2025-07-05 21:58:08.900 +08:00 [INF] thr:44<> loader Requires:INPUT A 5
2025-07-05 21:58:09.354 +08:00 [INF] thr:44<> loader Requires:MATS AJ Z 1
2025-07-05 21:58:11.975 +08:00 [INF] thr:44<> loader Requires:SSPP Z 30
2025-07-05 21:58:12.425 +08:00 [INF] thr:44<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-05 21:58:12.425 +08:00 [INF] thr:44<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-05 21:58:12.425 +08:00 [INF] thr:44<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-05 21:58:12.928 +08:00 [INF] thr:44<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 21:58:12.928 +08:00 [INF] thr:44<> loader Requires:RETH
2025-07-05 21:58:17.964 +08:00 [INF] thr:44<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-05 21:58:17.968 +08:00 [INF] thr:44<> 执行Aligner角度angle：0
2025-07-05 22:00:07.225 +08:00 [INF] thr:20<> loader Requires:INPUT B 13
2025-07-05 22:00:08.205 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-05 22:00:09.211 +08:00 [INF] thr:52<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-05 22:00:09.212 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 22:00:09.212 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-05 22:00:09.655 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-05 22:00:09.655 +08:00 [INF] thr:52<> loader Requires:MATS AJ T
2025-07-05 22:00:10.110 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-05 22:00:10.557 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-05 22:00:11.030 +08:00 [INF] thr:52<> loader Requires:MOVR R 226000
2025-07-05 22:00:13.624 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 22:00:14.075 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-05 22:00:14.076 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-05 22:00:14.076 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-05 22:00:14.580 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:00:14.580 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-05 22:00:15.032 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 22:00:15.479 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-05 22:00:15.927 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 22:00:16.376 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-05 22:00:16.822 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 22:00:17.267 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:17.720 +08:00 [INF] thr:52<> loader Requires:MATS AJ R 0
2025-07-05 22:00:20.970 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-05 22:00:20.970 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-05 22:00:20.970 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-05 22:00:21.475 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:00:21.475 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 22:00:21.922 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 0
2025-07-05 22:00:24.533 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 22:00:24.983 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-05 22:00:24.983 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-05 22:00:24.983 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-05 22:00:25.485 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:00:25.485 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 22:00:25.937 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 22:00:26.384 +08:00 [INF] thr:52<> loader Requires:OUTP 16 0
2025-07-05 22:00:26.850 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 22:00:27.297 +08:00 [INF] thr:52<> loader Requires:OUTP 4 0
2025-07-05 22:00:27.743 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 22:00:28.189 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:29.143 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:30.096 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:31.050 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:32.003 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:32.955 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:00:33.407 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-05 22:00:33.860 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-05 22:00:36.477 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 22:00:36.928 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-05 22:00:36.928 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-05 22:00:36.928 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-05 22:00:37.431 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:00:37.432 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-05 22:00:42.467 +08:00 [INF] thr:52<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-05 22:00:42.469 +08:00 [INF] thr:52<> AOI is Ready
2025-07-05 22:00:42.530 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:50
2025-07-05 22:00:42.534 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:50
2025-07-05 22:00:42.569 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:60
2025-07-05 22:00:42.572 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:60
2025-07-05 22:00:42.588 +08:00 [INF] thr:52<> stage move to position action ok
2025-07-05 22:00:42.589 +08:00 [INF] thr:52<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-05 22:00:42.589 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-05 22:00:42.589 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-05 22:00:43.031 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-05 22:00:43.031 +08:00 [INF] thr:52<> loader Requires:MATS AK T
2025-07-05 22:00:46.579 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-05 22:00:47.030 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-05 22:00:54.048 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 22:00:54.520 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-05 22:00:54.520 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-05 22:00:54.520 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-05 22:00:55.024 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:00:55.024 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-05 22:00:55.476 +08:00 [INF] thr:52<> loader Requires:MATS AK R 0
2025-07-05 22:01:00.762 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-05 22:01:00.762 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:上片请求
2025-07-05 22:01:00.762 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-05 22:01:01.265 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:01:01.265 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 22:01:01.715 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 0
2025-07-05 22:01:04.427 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 22:01:04.900 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-05 22:01:04.900 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-05 22:01:04.900 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-05 22:01:05.405 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:01:05.405 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-05 22:01:05.853 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-05 22:01:06.306 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-05 22:01:06.755 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-05 22:01:07.203 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-05 22:01:07.649 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-05 22:01:08.096 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:01:09.048 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:01:10.004 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:01:10.957 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-05 22:01:11.411 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-05 22:01:11.864 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-05 22:01:14.581 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-05 22:01:15.032 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-05 22:01:15.032 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-05 22:01:15.032 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-05 22:01:16.038 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-05 22:01:16.038 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-05 22:01:21.302 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-06 10:23:06.280 +08:00 [INF] thr:15<> loader Requires:INPUT B 13
2025-07-06 10:23:07.739 +08:00 [INF] thr:55<> AOI is Ready
2025-07-06 10:23:12.251 +08:00 [INF] thr:55<> SetVelocity, Axis:X, velocity:50
2025-07-06 10:23:12.259 +08:00 [INF] thr:55<> SetVelocity, Axis:Y, velocity:50
2025-07-06 10:23:16.278 +08:00 [INF] thr:55<> SetVelocity, Axis:X, velocity:8
2025-07-06 10:23:16.285 +08:00 [INF] thr:55<> SetVelocity, Axis:Y, velocity:8
2025-07-06 10:23:16.315 +08:00 [INF] thr:55<> stage move to position action ok
2025-07-06 10:23:16.316 +08:00 [INF] thr:55<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-06 10:23:16.317 +08:00 [INF] thr:55<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 10:23:16.317 +08:00 [INF] thr:55<> loader Requires:RGRP
2025-07-06 10:23:16.758 +08:00 [INF] thr:55<> CLeanLoader Group Now C
2025-07-06 10:23:16.758 +08:00 [INF] thr:55<> loader Requires:MATS AK T
2025-07-06 10:23:17.216 +08:00 [INF] thr:55<> loader Requires:SSP Z 4000
2025-07-06 10:23:17.662 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 1
2025-07-06 10:23:18.136 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-06 10:23:18.586 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-06 10:23:18.586 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-06 10:23:18.586 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-06 10:23:19.092 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:23:19.092 +08:00 [INF] thr:55<> loader Requires:INPUT A 6
2025-07-06 10:23:19.543 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-06 10:23:19.991 +08:00 [INF] thr:55<> loader Requires:OUTP 16 1
2025-07-06 10:23:20.437 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-06 10:23:20.886 +08:00 [INF] thr:55<> loader Requires:OUTP 4 1
2025-07-06 10:23:21.333 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-06 10:23:21.778 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:22.230 +08:00 [INF] thr:55<> loader Requires:MATS AK R 0
2025-07-06 10:23:27.512 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-06 10:23:27.512 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片请求
2025-07-06 10:23:27.512 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-06 10:23:28.015 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:23:28.015 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-06 10:23:28.461 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 0
2025-07-06 10:23:31.174 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-06 10:23:31.635 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-06 10:23:31.635 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-06 10:23:31.635 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-06 10:23:32.140 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:23:32.140 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-06 10:23:32.587 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-06 10:23:33.034 +08:00 [INF] thr:55<> loader Requires:OUTP 16 0
2025-07-06 10:23:33.482 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-06 10:23:33.931 +08:00 [INF] thr:55<> loader Requires:OUTP 4 0
2025-07-06 10:23:34.378 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-06 10:23:34.823 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:35.775 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:36.729 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:37.682 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:38.643 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:39.598 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-06 10:23:40.049 +08:00 [INF] thr:55<> loader Requires:INPUT A 5
2025-07-06 10:23:40.502 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 1
2025-07-06 10:23:43.220 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-06 10:23:43.671 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-06 10:23:43.671 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-06 10:23:43.671 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-06 10:23:44.177 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:23:44.177 +08:00 [INF] thr:55<> loader Requires:RETH
2025-07-06 10:23:49.442 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-06 10:23:49.443 +08:00 [INF] thr:31<> 执行Aligner设置初始角度InitialAngle：0
2025-07-06 10:23:49.443 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-07-06 10:23:50.449 +08:00 [INF] thr:31<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-06 10:23:50.451 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 10:23:50.451 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-07-06 10:23:50.893 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-07-06 10:23:50.893 +08:00 [INF] thr:31<> loader Requires:MATS AJ T
2025-07-06 10:23:54.434 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-07-06 10:23:54.883 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-06 10:24:01.901 +08:00 [INF] thr:31<> loader Requires:MOVR R 226000
2025-07-06 10:24:04.495 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:24:04.945 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-06 10:24:04.945 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-06 10:24:04.945 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-06 10:24:05.450 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:24:05.450 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-07-06 10:24:05.902 +08:00 [INF] thr:31<> loader Requires:MATS AJ R 0
2025-07-06 10:24:09.152 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-06 10:24:09.152 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-06 10:24:09.152 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-06 10:24:09.655 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:24:09.655 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-06 10:24:10.104 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 0
2025-07-06 10:24:12.718 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:24:13.177 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-06 10:24:13.177 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-06 10:24:13.177 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-06 10:24:13.682 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:24:13.682 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-06 10:24:14.137 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-06 10:24:14.584 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-07-06 10:24:15.032 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-06 10:24:15.481 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-07-06 10:24:15.946 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-06 10:24:16.389 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:24:17.361 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:24:18.315 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:24:19.270 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:24:19.720 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-07-06 10:24:20.173 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-06 10:24:22.790 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:24:23.240 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-06 10:24:23.240 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-06 10:24:23.240 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-06 10:24:23.743 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:24:23.743 +08:00 [INF] thr:31<> loader Requires:RETH
2025-07-06 10:24:28.779 +08:00 [INF] thr:31<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-06 10:24:28.780 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-07-06 10:25:18.057 +08:00 [INF] thr:38<> loader Requires:INPUT B 13
2025-07-06 10:25:19.037 +08:00 [INF] thr:31<> 执行Aligner角度angle：0
2025-07-06 10:25:20.044 +08:00 [INF] thr:31<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-06 10:25:20.044 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 10:25:20.044 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-07-06 10:25:20.492 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-07-06 10:25:20.492 +08:00 [INF] thr:31<> loader Requires:MATS AJ T
2025-07-06 10:25:20.950 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-07-06 10:25:21.398 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-06 10:25:21.870 +08:00 [INF] thr:31<> loader Requires:MOVR R 226000
2025-07-06 10:25:24.466 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:25:24.916 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-06 10:25:24.916 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-06 10:25:24.916 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-06 10:25:25.421 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:25:25.421 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-07-06 10:25:25.874 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-06 10:25:26.319 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-07-06 10:25:26.767 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-06 10:25:27.216 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-07-06 10:25:27.663 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-06 10:25:28.109 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:28.560 +08:00 [INF] thr:31<> loader Requires:MATS AJ R 0
2025-07-06 10:25:31.811 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-06 10:25:31.811 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-06 10:25:31.811 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-06 10:25:32.313 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:25:32.313 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-06 10:25:32.762 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 0
2025-07-06 10:25:35.374 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:25:35.823 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-06 10:25:35.823 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-06 10:25:35.823 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-06 10:25:36.326 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:25:36.327 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-06 10:25:36.776 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-06 10:25:37.222 +08:00 [INF] thr:31<> loader Requires:OUTP 16 0
2025-07-06 10:25:37.669 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-06 10:25:38.117 +08:00 [INF] thr:31<> loader Requires:OUTP 4 0
2025-07-06 10:25:38.564 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-06 10:25:39.010 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:39.963 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:40.916 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:41.870 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:42.823 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:43.777 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:25:44.231 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-07-06 10:25:44.686 +08:00 [INF] thr:31<> loader Requires:MATS AJ Z 1
2025-07-06 10:25:47.305 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:25:47.755 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-06 10:25:47.755 +08:00 [INF] thr:31<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-06 10:25:47.755 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-06 10:25:48.259 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:25:48.259 +08:00 [INF] thr:31<> loader Requires:RETH
2025-07-06 10:25:53.294 +08:00 [INF] thr:31<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-06 10:25:53.298 +08:00 [INF] thr:31<> AOI is Ready
2025-07-06 10:25:53.361 +08:00 [INF] thr:31<> SetVelocity, Axis:X, velocity:50
2025-07-06 10:25:53.364 +08:00 [INF] thr:31<> SetVelocity, Axis:Y, velocity:50
2025-07-06 10:25:53.401 +08:00 [INF] thr:31<> SetVelocity, Axis:X, velocity:8
2025-07-06 10:25:53.404 +08:00 [INF] thr:31<> SetVelocity, Axis:Y, velocity:8
2025-07-06 10:25:53.429 +08:00 [INF] thr:31<> stage move to position action ok
2025-07-06 10:25:53.429 +08:00 [INF] thr:31<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-06 10:25:53.430 +08:00 [INF] thr:31<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 10:25:53.430 +08:00 [INF] thr:31<> loader Requires:RGRP
2025-07-06 10:25:53.874 +08:00 [INF] thr:31<> CLeanLoader Group Now C
2025-07-06 10:25:53.874 +08:00 [INF] thr:31<> loader Requires:MATS AK T
2025-07-06 10:25:57.417 +08:00 [INF] thr:31<> loader Requires:SSP Z 4000
2025-07-06 10:25:57.865 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 1
2025-07-06 10:26:04.883 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:26:05.332 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-06 10:26:05.333 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-06 10:26:05.333 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-06 10:26:05.837 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:26:05.837 +08:00 [INF] thr:31<> loader Requires:INPUT A 6
2025-07-06 10:26:06.290 +08:00 [INF] thr:31<> loader Requires:MATS AK R 0
2025-07-06 10:26:11.572 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-06 10:26:11.572 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片请求
2025-07-06 10:26:11.572 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-06 10:26:12.075 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:26:12.075 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-06 10:26:12.522 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 0
2025-07-06 10:26:15.236 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:26:15.695 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-06 10:26:15.695 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-06 10:26:15.695 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-06 10:26:16.199 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:26:16.199 +08:00 [INF] thr:31<> loader Requires:SSP Z 1000
2025-07-06 10:26:16.645 +08:00 [INF] thr:31<> loader Requires:OUTP 1 0
2025-07-06 10:26:17.099 +08:00 [INF] thr:31<> loader Requires:OUTP 16 1
2025-07-06 10:26:17.548 +08:00 [INF] thr:31<> loader Requires:OUTP 15 1
2025-07-06 10:26:17.996 +08:00 [INF] thr:31<> loader Requires:OUTP 4 1
2025-07-06 10:26:18.443 +08:00 [INF] thr:31<> loader Requires:OUTP 1 1
2025-07-06 10:26:18.895 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:26:19.855 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:26:20.807 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:26:21.775 +08:00 [INF] thr:31<> loader Requires:INPUT A 4
2025-07-06 10:26:22.228 +08:00 [INF] thr:31<> loader Requires:INPUT A 5
2025-07-06 10:26:22.681 +08:00 [INF] thr:31<> loader Requires:MATS AK Z 1
2025-07-06 10:26:25.398 +08:00 [INF] thr:31<> loader Requires:SSPP Z 30
2025-07-06 10:26:25.848 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-06 10:26:25.848 +08:00 [INF] thr:31<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-06 10:26:25.848 +08:00 [INF] thr:31<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-06 10:26:26.855 +08:00 [INF] thr:31<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 10:26:26.855 +08:00 [INF] thr:31<> loader Requires:RETH
2025-07-06 10:26:32.116 +08:00 [INF] thr:31<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-06 11:18:10.195 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-07-06 11:18:11.661 +08:00 [INF] thr:65<> AOI is Ready
2025-07-06 11:18:16.250 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-07-06 11:18:16.257 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-07-06 11:18:19.509 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:8
2025-07-06 11:18:19.513 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:8
2025-07-06 11:18:19.529 +08:00 [INF] thr:65<> stage move to position action ok
2025-07-06 11:18:19.529 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-06 11:18:19.530 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 11:18:19.530 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-06 11:18:19.974 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-06 11:18:19.974 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-07-06 11:18:20.447 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-06 11:18:20.899 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-06 11:18:21.373 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:18:21.823 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-06 11:18:21.823 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-06 11:18:21.823 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-06 11:18:22.326 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:18:22.326 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-06 11:18:22.779 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 11:18:23.227 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-06 11:18:23.674 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 11:18:24.123 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-06 11:18:24.569 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 11:18:25.014 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:25.467 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-07-06 11:18:30.749 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-06 11:18:30.749 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片请求
2025-07-06 11:18:30.749 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-06 11:18:31.252 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:18:31.252 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:18:31.699 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-07-06 11:18:34.412 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:18:34.881 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-06 11:18:34.882 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-06 11:18:34.882 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-06 11:18:35.386 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:18:35.386 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:18:35.833 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 11:18:36.280 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-07-06 11:18:36.727 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 11:18:37.176 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-07-06 11:18:37.623 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 11:18:38.068 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:39.021 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:39.975 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:40.927 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:41.880 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:42.835 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:18:43.293 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-06 11:18:43.770 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-06 11:18:46.488 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:18:46.947 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-06 11:18:46.947 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-06 11:18:46.947 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-06 11:18:47.450 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:18:47.450 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-06 11:18:52.713 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-06 11:18:52.714 +08:00 [INF] thr:65<> 执行Aligner设置初始角度InitialAngle：0
2025-07-06 11:18:52.714 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-06 11:18:53.722 +08:00 [INF] thr:65<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-06 11:18:53.722 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 11:18:53.722 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-06 11:18:54.164 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-06 11:18:54.164 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-07-06 11:18:57.715 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-06 11:18:58.164 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-06 11:19:05.182 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-07-06 11:19:07.778 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:19:08.227 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-06 11:19:08.227 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-06 11:19:08.227 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-06 11:19:08.731 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:19:08.731 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-06 11:19:09.184 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-07-06 11:19:12.442 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-06 11:19:12.442 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-06 11:19:12.442 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-06 11:19:12.945 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:19:12.945 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:19:13.393 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-07-06 11:19:16.006 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:19:16.456 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-06 11:19:16.456 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-06 11:19:16.456 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-06 11:19:16.961 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:19:16.961 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:19:17.432 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 11:19:17.879 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-06 11:19:18.327 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 11:19:18.775 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-06 11:19:19.227 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 11:19:19.678 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:19:20.634 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:19:21.595 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:19:22.547 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:19:23.022 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-06 11:19:23.476 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-06 11:19:26.093 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:19:26.544 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-06 11:19:26.544 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-06 11:19:26.544 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-06 11:19:27.046 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:19:27.046 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-06 11:19:32.083 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-06 11:19:32.085 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-06 11:20:33.939 +08:00 [INF] thr:66<> loader Requires:INPUT B 13
2025-07-06 11:20:34.950 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-06 11:20:35.957 +08:00 [INF] thr:65<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-06 11:20:35.958 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 11:20:35.958 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-06 11:20:36.399 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-06 11:20:36.399 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-07-06 11:20:36.857 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-06 11:20:37.306 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-06 11:20:37.777 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-07-06 11:20:40.373 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:20:40.824 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-06 11:20:40.824 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-06 11:20:40.824 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-06 11:20:41.328 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:20:41.328 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-06 11:20:41.781 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 11:20:42.227 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-06 11:20:42.675 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 11:20:43.124 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-06 11:20:43.571 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 11:20:44.017 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:20:44.468 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-07-06 11:20:47.719 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-06 11:20:47.719 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-06 11:20:47.719 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-06 11:20:48.222 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:20:48.222 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:20:48.669 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-07-06 11:20:51.281 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:20:51.730 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-06 11:20:51.730 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-06 11:20:51.730 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-06 11:20:52.233 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:20:52.233 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:20:52.678 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 11:20:53.124 +08:00 [INF] thr:65<> loader Requires:OUTP 16 0
2025-07-06 11:20:53.572 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 11:20:54.021 +08:00 [INF] thr:65<> loader Requires:OUTP 4 0
2025-07-06 11:20:54.468 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 11:20:54.913 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:20:55.866 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:20:56.820 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:20:57.774 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:20:58.730 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:20:59.684 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:21:00.135 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-06 11:21:00.595 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-06 11:21:03.213 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:21:03.662 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-06 11:21:03.662 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-06 11:21:03.662 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-06 11:21:04.166 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:21:04.166 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-06 11:21:09.201 +08:00 [INF] thr:65<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-06 11:21:09.202 +08:00 [INF] thr:65<> AOI is Ready
2025-07-06 11:21:09.271 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:50
2025-07-06 11:21:09.274 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:50
2025-07-06 11:21:09.310 +08:00 [INF] thr:65<> SetVelocity, Axis:X, velocity:8
2025-07-06 11:21:09.318 +08:00 [INF] thr:65<> SetVelocity, Axis:Y, velocity:8
2025-07-06 11:21:09.354 +08:00 [INF] thr:65<> stage move to position action ok
2025-07-06 11:21:09.354 +08:00 [INF] thr:65<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-06 11:21:09.355 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 11:21:09.355 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-06 11:21:09.799 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-06 11:21:09.799 +08:00 [INF] thr:65<> loader Requires:MATS AK T
2025-07-06 11:21:13.341 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-06 11:21:13.790 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-06 11:21:20.808 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:21:21.258 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-06 11:21:21.258 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-06 11:21:21.258 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-06 11:21:21.762 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:21:21.762 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-06 11:21:22.216 +08:00 [INF] thr:65<> loader Requires:MATS AK R 0
2025-07-06 11:21:27.497 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-06 11:21:27.497 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片请求
2025-07-06 11:21:27.497 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-06 11:21:28.002 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:21:28.002 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:21:28.451 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 0
2025-07-06 11:21:31.164 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:21:31.624 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-06 11:21:31.624 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-06 11:21:31.624 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-06 11:21:32.127 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:21:32.127 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 11:21:32.574 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 11:21:33.022 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-06 11:21:33.470 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 11:21:33.916 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-06 11:21:34.363 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 11:21:34.809 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:21:35.762 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:21:36.716 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:21:37.668 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 11:21:38.121 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-06 11:21:38.574 +08:00 [INF] thr:65<> loader Requires:MATS AK Z 1
2025-07-06 11:21:41.293 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 11:21:41.742 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-06 11:21:41.742 +08:00 [INF] thr:65<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-06 11:21:41.742 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-06 11:21:42.750 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 11:21:42.750 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-06 11:21:48.013 +08:00 [INF] thr:65<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-06 12:04:05.741 +08:00 [INF] thr:30<> loader Requires:INPUT B 13
2025-07-06 12:04:07.205 +08:00 [INF] thr:25<> AOI is Ready
2025-07-06 12:04:11.706 +08:00 [INF] thr:25<> SetVelocity, Axis:X, velocity:50
2025-07-06 12:04:11.709 +08:00 [INF] thr:25<> SetVelocity, Axis:Y, velocity:50
2025-07-06 12:04:15.976 +08:00 [INF] thr:25<> SetVelocity, Axis:X, velocity:8
2025-07-06 12:04:15.981 +08:00 [INF] thr:25<> SetVelocity, Axis:Y, velocity:8
2025-07-06 12:04:16.010 +08:00 [INF] thr:25<> stage move to position action ok
2025-07-06 12:04:16.010 +08:00 [INF] thr:25<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-06 12:04:16.011 +08:00 [INF] thr:25<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 12:04:16.011 +08:00 [INF] thr:25<> loader Requires:RGRP
2025-07-06 12:04:16.453 +08:00 [INF] thr:25<> CLeanLoader Group Now C
2025-07-06 12:04:16.453 +08:00 [INF] thr:25<> loader Requires:MATS AK T
2025-07-06 12:04:16.912 +08:00 [INF] thr:25<> loader Requires:SSP Z 4000
2025-07-06 12:04:17.373 +08:00 [INF] thr:25<> loader Requires:MATS AK Z 1
2025-07-06 12:04:17.848 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-06 12:04:18.298 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-06 12:04:18.298 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-06 12:04:18.298 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-06 12:04:18.801 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:04:18.801 +08:00 [INF] thr:25<> loader Requires:INPUT A 6
2025-07-06 12:04:19.255 +08:00 [INF] thr:25<> loader Requires:OUTP 1 0
2025-07-06 12:04:19.702 +08:00 [INF] thr:25<> loader Requires:OUTP 16 1
2025-07-06 12:04:20.150 +08:00 [INF] thr:25<> loader Requires:OUTP 15 1
2025-07-06 12:04:20.598 +08:00 [INF] thr:25<> loader Requires:OUTP 4 1
2025-07-06 12:04:21.045 +08:00 [INF] thr:25<> loader Requires:OUTP 1 1
2025-07-06 12:04:21.491 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:21.944 +08:00 [INF] thr:25<> loader Requires:MATS AK R 0
2025-07-06 12:04:27.229 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-06 12:04:27.229 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片请求
2025-07-06 12:04:27.229 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-06 12:04:27.733 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:04:27.733 +08:00 [INF] thr:25<> loader Requires:SSP Z 1000
2025-07-06 12:04:28.178 +08:00 [INF] thr:25<> loader Requires:MATS AK Z 0
2025-07-06 12:04:30.896 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-06 12:04:31.362 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-06 12:04:31.362 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-06 12:04:31.362 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-06 12:04:31.864 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:04:31.864 +08:00 [INF] thr:25<> loader Requires:SSP Z 1000
2025-07-06 12:04:32.318 +08:00 [INF] thr:25<> loader Requires:OUTP 1 0
2025-07-06 12:04:32.763 +08:00 [INF] thr:25<> loader Requires:OUTP 16 0
2025-07-06 12:04:33.211 +08:00 [INF] thr:25<> loader Requires:OUTP 15 1
2025-07-06 12:04:33.660 +08:00 [INF] thr:25<> loader Requires:OUTP 4 0
2025-07-06 12:04:34.109 +08:00 [INF] thr:25<> loader Requires:OUTP 1 1
2025-07-06 12:04:34.552 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:35.507 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:36.461 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:37.417 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:38.368 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:39.322 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-06 12:04:39.773 +08:00 [INF] thr:25<> loader Requires:INPUT A 5
2025-07-06 12:04:40.226 +08:00 [INF] thr:25<> loader Requires:MATS AK Z 1
2025-07-06 12:04:42.944 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-06 12:04:43.395 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-06 12:04:43.395 +08:00 [INF] thr:25<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-06 12:04:43.395 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-06 12:04:43.897 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:04:43.897 +08:00 [INF] thr:25<> loader Requires:RETH
2025-07-06 12:04:49.161 +08:00 [INF] thr:25<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-06 12:04:49.162 +08:00 [INF] thr:65<> 执行Aligner设置初始角度InitialAngle：0
2025-07-06 12:04:49.162 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-06 12:04:50.170 +08:00 [INF] thr:65<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-06 12:04:50.171 +08:00 [INF] thr:65<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 12:04:50.171 +08:00 [INF] thr:65<> loader Requires:RGRP
2025-07-06 12:04:50.615 +08:00 [INF] thr:65<> CLeanLoader Group Now C
2025-07-06 12:04:50.615 +08:00 [INF] thr:65<> loader Requires:MATS AJ T
2025-07-06 12:04:54.158 +08:00 [INF] thr:65<> loader Requires:SSP Z 4000
2025-07-06 12:04:54.608 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-06 12:05:01.626 +08:00 [INF] thr:65<> loader Requires:MOVR R 226000
2025-07-06 12:05:04.221 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 12:05:04.672 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-06 12:05:04.672 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-06 12:05:04.672 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-06 12:05:05.176 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:05:05.176 +08:00 [INF] thr:65<> loader Requires:INPUT A 6
2025-07-06 12:05:05.627 +08:00 [INF] thr:65<> loader Requires:MATS AJ R 0
2025-07-06 12:05:08.878 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-06 12:05:08.878 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-06 12:05:08.878 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-06 12:05:09.380 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:05:09.380 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 12:05:09.825 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 0
2025-07-06 12:05:12.438 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 12:05:12.887 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-06 12:05:12.887 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-06 12:05:12.888 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-06 12:05:13.390 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:05:13.391 +08:00 [INF] thr:65<> loader Requires:SSP Z 1000
2025-07-06 12:05:13.839 +08:00 [INF] thr:65<> loader Requires:OUTP 1 0
2025-07-06 12:05:14.286 +08:00 [INF] thr:65<> loader Requires:OUTP 16 1
2025-07-06 12:05:14.734 +08:00 [INF] thr:65<> loader Requires:OUTP 15 1
2025-07-06 12:05:15.182 +08:00 [INF] thr:65<> loader Requires:OUTP 4 1
2025-07-06 12:05:15.630 +08:00 [INF] thr:65<> loader Requires:OUTP 1 1
2025-07-06 12:05:16.076 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 12:05:17.028 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 12:05:17.981 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 12:05:18.934 +08:00 [INF] thr:65<> loader Requires:INPUT A 4
2025-07-06 12:05:19.387 +08:00 [INF] thr:65<> loader Requires:INPUT A 5
2025-07-06 12:05:19.839 +08:00 [INF] thr:65<> loader Requires:MATS AJ Z 1
2025-07-06 12:05:22.456 +08:00 [INF] thr:65<> loader Requires:SSPP Z 30
2025-07-06 12:05:22.907 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-06 12:05:22.907 +08:00 [INF] thr:65<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-06 12:05:22.907 +08:00 [INF] thr:65<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-06 12:05:23.410 +08:00 [INF] thr:65<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:05:23.410 +08:00 [INF] thr:65<> loader Requires:RETH
2025-07-06 12:05:28.445 +08:00 [INF] thr:65<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-06 12:05:28.447 +08:00 [INF] thr:65<> 执行Aligner角度angle：0
2025-07-06 12:06:33.310 +08:00 [INF] thr:53<> loader Requires:INPUT B 13
2025-07-06 12:06:34.283 +08:00 [INF] thr:49<> 执行Aligner角度angle：0
2025-07-06 12:06:35.290 +08:00 [INF] thr:49<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-06 12:06:35.290 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 12:06:35.290 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-06 12:06:35.732 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-06 12:06:35.732 +08:00 [INF] thr:49<> loader Requires:MATS AJ T
2025-07-06 12:06:36.190 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-06 12:06:36.638 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-06 12:06:37.111 +08:00 [INF] thr:49<> loader Requires:MOVR R 226000
2025-07-06 12:06:39.707 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-06 12:06:40.158 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-06 12:06:40.158 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-06 12:06:40.158 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-06 12:06:40.660 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:06:40.660 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-06 12:06:41.111 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-06 12:06:41.557 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-06 12:06:42.004 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-06 12:06:42.452 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-06 12:06:42.900 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-06 12:06:43.345 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:43.798 +08:00 [INF] thr:49<> loader Requires:MATS AJ R 0
2025-07-06 12:06:47.047 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-06 12:06:47.047 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-06 12:06:47.047 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-06 12:06:47.551 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:06:47.551 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-06 12:06:47.999 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 0
2025-07-06 12:06:50.612 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-06 12:06:51.060 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-06 12:06:51.060 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-06 12:06:51.060 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-06 12:06:51.564 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:06:51.564 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-06 12:06:52.013 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-06 12:06:52.460 +08:00 [INF] thr:49<> loader Requires:OUTP 16 0
2025-07-06 12:06:52.907 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-06 12:06:53.354 +08:00 [INF] thr:49<> loader Requires:OUTP 4 0
2025-07-06 12:06:53.801 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-06 12:06:54.247 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:55.200 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:56.154 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:57.107 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:58.060 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:59.013 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:06:59.464 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-06 12:06:59.918 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-06 12:07:02.535 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-06 12:07:02.985 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-06 12:07:02.985 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-06 12:07:02.985 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-06 12:07:03.489 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:07:03.489 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-06 12:07:08.524 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-06 12:07:08.525 +08:00 [INF] thr:49<> AOI is Ready
2025-07-06 12:07:08.589 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:50
2025-07-06 12:07:08.597 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:50
2025-07-06 12:07:08.644 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:8
2025-07-06 12:07:08.647 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:8
2025-07-06 12:07:08.665 +08:00 [INF] thr:49<> stage move to position action ok
2025-07-06 12:07:08.665 +08:00 [INF] thr:49<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-06 12:07:08.666 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-06 12:07:08.666 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-06 12:07:09.112 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-06 12:07:09.112 +08:00 [INF] thr:49<> loader Requires:MATS AK T
2025-07-06 12:07:12.654 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-06 12:07:13.103 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-06 12:07:20.122 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-06 12:07:20.571 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-06 12:07:20.571 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-06 12:07:20.571 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-06 12:07:21.074 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:07:21.074 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-06 12:07:21.528 +08:00 [INF] thr:49<> loader Requires:MATS AK R 0
2025-07-06 12:07:26.810 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-06 12:07:26.810 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片请求
2025-07-06 12:07:26.810 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-06 12:07:27.313 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:07:27.313 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-06 12:07:27.780 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 0
2025-07-06 12:07:30.493 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-06 12:07:30.963 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-06 12:07:30.963 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-06 12:07:30.963 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-06 12:07:31.469 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:07:31.469 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-06 12:07:31.915 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-06 12:07:32.362 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-06 12:07:32.809 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-06 12:07:33.257 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-06 12:07:33.707 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-06 12:07:34.154 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:07:35.109 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:07:36.064 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:07:37.018 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-06 12:07:37.469 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-06 12:07:37.923 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-06 12:07:40.639 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-06 12:07:41.090 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-06 12:07:41.090 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-06 12:07:41.090 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-06 12:07:42.096 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-06 12:07:42.096 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-06 12:07:47.356 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 09:27:28.000 +08:00 [INF] thr:9<> loader Requires:INPUT B 13
2025-07-07 09:27:29.464 +08:00 [INF] thr:55<> AOI is Ready
2025-07-07 09:27:33.744 +08:00 [INF] thr:55<> SetVelocity, Axis:X, velocity:50
2025-07-07 09:27:33.747 +08:00 [INF] thr:55<> SetVelocity, Axis:Y, velocity:50
2025-07-07 09:27:36.607 +08:00 [INF] thr:55<> SetVelocity, Axis:X, velocity:8
2025-07-07 09:27:36.614 +08:00 [INF] thr:55<> SetVelocity, Axis:Y, velocity:8
2025-07-07 09:27:36.643 +08:00 [INF] thr:55<> stage move to position action ok
2025-07-07 09:27:36.643 +08:00 [INF] thr:55<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 09:27:36.644 +08:00 [INF] thr:55<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 09:27:36.644 +08:00 [INF] thr:55<> loader Requires:RGRP
2025-07-07 09:27:37.085 +08:00 [INF] thr:55<> CLeanLoader Group Now C
2025-07-07 09:27:37.086 +08:00 [INF] thr:55<> loader Requires:MATS AK T
2025-07-07 09:27:37.543 +08:00 [INF] thr:55<> loader Requires:SSP Z 4000
2025-07-07 09:27:37.991 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 1
2025-07-07 09:27:38.464 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-07 09:27:38.915 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 09:27:38.915 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 09:27:38.915 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 09:27:39.417 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:27:39.417 +08:00 [INF] thr:55<> loader Requires:INPUT A 6
2025-07-07 09:27:39.871 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-07 09:27:40.318 +08:00 [INF] thr:55<> loader Requires:OUTP 16 1
2025-07-07 09:27:40.765 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-07 09:27:41.214 +08:00 [INF] thr:55<> loader Requires:OUTP 4 1
2025-07-07 09:27:41.660 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-07 09:27:42.105 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:27:42.558 +08:00 [INF] thr:55<> loader Requires:MATS AK R 0
2025-07-07 09:27:47.840 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 09:27:47.841 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 09:27:47.841 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 09:27:48.344 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:27:48.344 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-07 09:27:48.789 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 0
2025-07-07 09:27:51.508 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-07 09:27:51.982 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 09:27:51.982 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 09:27:51.982 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 09:27:52.489 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:27:52.489 +08:00 [INF] thr:55<> loader Requires:SSP Z 1000
2025-07-07 09:27:52.937 +08:00 [INF] thr:55<> loader Requires:OUTP 1 0
2025-07-07 09:27:53.384 +08:00 [INF] thr:55<> loader Requires:OUTP 16 0
2025-07-07 09:27:53.831 +08:00 [INF] thr:55<> loader Requires:OUTP 15 1
2025-07-07 09:27:54.279 +08:00 [INF] thr:55<> loader Requires:OUTP 4 0
2025-07-07 09:27:54.725 +08:00 [INF] thr:55<> loader Requires:OUTP 1 1
2025-07-07 09:27:55.173 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:27:56.125 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:27:57.078 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:27:58.032 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:27:58.985 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:27:59.937 +08:00 [INF] thr:55<> loader Requires:INPUT A 4
2025-07-07 09:28:00.388 +08:00 [INF] thr:55<> loader Requires:INPUT A 5
2025-07-07 09:28:00.842 +08:00 [INF] thr:55<> loader Requires:MATS AK Z 1
2025-07-07 09:28:03.559 +08:00 [INF] thr:55<> loader Requires:SSPP Z 30
2025-07-07 09:28:04.010 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 09:28:04.010 +08:00 [INF] thr:55<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 09:28:04.010 +08:00 [INF] thr:55<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 09:28:04.514 +08:00 [INF] thr:55<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:28:04.514 +08:00 [INF] thr:55<> loader Requires:RETH
2025-07-07 09:28:09.778 +08:00 [INF] thr:55<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 09:28:09.779 +08:00 [INF] thr:57<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 09:28:09.779 +08:00 [INF] thr:57<> 执行Aligner角度angle：0
2025-07-07 09:28:10.785 +08:00 [INF] thr:57<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 09:28:10.788 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 09:28:10.788 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-07 09:28:11.232 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-07 09:28:11.232 +08:00 [INF] thr:57<> loader Requires:MATS AJ T
2025-07-07 09:28:14.774 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-07 09:28:15.223 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 1
2025-07-07 09:28:22.241 +08:00 [INF] thr:57<> loader Requires:MOVR R 226000
2025-07-07 09:28:24.836 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-07 09:28:25.287 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 09:28:25.287 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 09:28:25.287 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 09:28:25.791 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:28:25.791 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-07 09:28:26.245 +08:00 [INF] thr:57<> loader Requires:MATS AJ R 0
2025-07-07 09:28:29.495 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 09:28:29.495 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 09:28:29.495 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 09:28:29.999 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:28:29.999 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-07 09:28:30.446 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 0
2025-07-07 09:28:33.059 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-07 09:28:33.508 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 09:28:33.508 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 09:28:33.508 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 09:28:34.012 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:28:34.012 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-07 09:28:34.461 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-07 09:28:34.908 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-07 09:28:35.355 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-07 09:28:35.803 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-07 09:28:36.249 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-07 09:28:36.696 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 09:28:37.648 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 09:28:38.605 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 09:28:39.559 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 09:28:40.011 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-07 09:28:40.464 +08:00 [INF] thr:57<> loader Requires:MATS AJ Z 1
2025-07-07 09:28:43.081 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-07 09:28:43.532 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 09:28:43.532 +08:00 [INF] thr:57<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 09:28:43.532 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 09:28:44.036 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:28:44.036 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-07 09:28:49.071 +08:00 [INF] thr:57<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 09:28:49.073 +08:00 [INF] thr:57<> 执行Aligner角度angle：0
2025-07-07 09:31:13.944 +08:00 [INF] thr:36<> loader Requires:INPUT B 13
2025-07-07 09:31:14.939 +08:00 [INF] thr:49<> 执行Aligner角度angle：0
2025-07-07 09:31:15.945 +08:00 [INF] thr:49<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-07 09:31:15.946 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 09:31:15.946 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-07 09:31:16.389 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-07 09:31:16.389 +08:00 [INF] thr:49<> loader Requires:MATS AJ T
2025-07-07 09:31:16.847 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-07 09:31:17.294 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-07 09:31:17.768 +08:00 [INF] thr:49<> loader Requires:MOVR R 226000
2025-07-07 09:31:20.363 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 09:31:20.814 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-07 09:31:20.814 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-07 09:31:20.814 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-07 09:31:21.317 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:31:21.317 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-07 09:31:21.771 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-07 09:31:22.217 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-07 09:31:22.665 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-07 09:31:23.114 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-07 09:31:23.560 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-07 09:31:24.005 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:24.457 +08:00 [INF] thr:49<> loader Requires:MATS AJ R 0
2025-07-07 09:31:27.706 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-07 09:31:27.706 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-07 09:31:27.706 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-07 09:31:28.210 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:31:28.210 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 09:31:28.659 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 0
2025-07-07 09:31:31.272 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 09:31:31.729 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-07 09:31:31.729 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-07 09:31:31.729 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-07 09:31:32.230 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:31:32.230 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 09:31:32.681 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-07 09:31:33.127 +08:00 [INF] thr:49<> loader Requires:OUTP 16 0
2025-07-07 09:31:33.575 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-07 09:31:34.023 +08:00 [INF] thr:49<> loader Requires:OUTP 4 0
2025-07-07 09:31:34.477 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-07 09:31:34.924 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:35.880 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:36.835 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:37.787 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:38.740 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:39.693 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:31:40.145 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-07 09:31:40.598 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-07 09:31:43.215 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 09:31:43.666 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-07 09:31:43.666 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-07 09:31:43.666 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-07 09:31:44.170 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:31:44.170 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-07 09:31:49.205 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-07 09:31:49.207 +08:00 [INF] thr:49<> AOI is Ready
2025-07-07 09:31:49.278 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:50
2025-07-07 09:31:49.281 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:50
2025-07-07 09:31:49.317 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:8
2025-07-07 09:31:49.320 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:8
2025-07-07 09:31:49.336 +08:00 [INF] thr:49<> stage move to position action ok
2025-07-07 09:31:49.337 +08:00 [INF] thr:49<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-07 09:31:49.337 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 09:31:49.337 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-07 09:31:49.781 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-07 09:31:49.781 +08:00 [INF] thr:49<> loader Requires:MATS AK T
2025-07-07 09:31:53.328 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-07 09:31:53.777 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-07 09:32:00.795 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 09:32:01.244 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-07 09:32:01.245 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-07 09:32:01.245 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-07 09:32:01.748 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:32:01.748 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-07 09:32:02.201 +08:00 [INF] thr:49<> loader Requires:MATS AK R 0
2025-07-07 09:32:07.483 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-07 09:32:07.483 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片请求
2025-07-07 09:32:07.483 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-07 09:32:07.989 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:32:07.989 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 09:32:08.437 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 0
2025-07-07 09:32:11.154 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 09:32:11.630 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-07 09:32:11.630 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-07 09:32:11.630 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-07 09:32:12.134 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:32:12.134 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 09:32:12.583 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-07 09:32:13.030 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-07 09:32:13.492 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-07 09:32:13.938 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-07 09:32:14.384 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-07 09:32:14.831 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:32:15.789 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:32:16.740 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:32:17.695 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 09:32:18.144 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-07 09:32:18.598 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-07 09:32:21.316 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 09:32:21.767 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-07 09:32:21.767 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-07 09:32:21.767 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-07 09:32:22.771 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 09:32:22.771 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-07 09:32:28.034 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 10:45:27.524 +08:00 [INF] thr:68<> loader Requires:INPUT B 13
2025-07-07 10:45:28.991 +08:00 [INF] thr:57<> AOI is Ready
2025-07-07 10:45:30.956 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:50
2025-07-07 10:45:30.960 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:50
2025-07-07 10:45:33.739 +08:00 [INF] thr:57<> SetVelocity, Axis:X, velocity:8
2025-07-07 10:45:33.742 +08:00 [INF] thr:57<> SetVelocity, Axis:Y, velocity:8
2025-07-07 10:45:33.758 +08:00 [INF] thr:57<> stage move to position action ok
2025-07-07 10:45:33.759 +08:00 [INF] thr:57<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 10:45:33.759 +08:00 [INF] thr:57<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 10:45:33.759 +08:00 [INF] thr:57<> loader Requires:RGRP
2025-07-07 10:45:34.204 +08:00 [INF] thr:57<> CLeanLoader Group Now C
2025-07-07 10:45:34.204 +08:00 [INF] thr:57<> loader Requires:MATS AK T
2025-07-07 10:45:34.662 +08:00 [INF] thr:57<> loader Requires:SSP Z 4000
2025-07-07 10:45:35.109 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-07 10:45:35.586 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-07 10:45:36.036 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 10:45:36.036 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 10:45:36.036 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 10:45:36.539 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:45:36.539 +08:00 [INF] thr:57<> loader Requires:INPUT A 6
2025-07-07 10:45:36.993 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-07 10:45:37.440 +08:00 [INF] thr:57<> loader Requires:OUTP 16 1
2025-07-07 10:45:37.887 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-07 10:45:38.335 +08:00 [INF] thr:57<> loader Requires:OUTP 4 1
2025-07-07 10:45:38.782 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-07 10:45:39.228 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:39.681 +08:00 [INF] thr:57<> loader Requires:MATS AK R 0
2025-07-07 10:45:44.962 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 10:45:44.962 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 10:45:44.962 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 10:45:45.465 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:45:45.465 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-07 10:45:45.920 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 0
2025-07-07 10:45:48.633 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-07 10:45:49.103 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 10:45:49.103 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 10:45:49.103 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 10:45:49.608 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:45:49.608 +08:00 [INF] thr:57<> loader Requires:SSP Z 1000
2025-07-07 10:45:50.056 +08:00 [INF] thr:57<> loader Requires:OUTP 1 0
2025-07-07 10:45:50.503 +08:00 [INF] thr:57<> loader Requires:OUTP 16 0
2025-07-07 10:45:50.949 +08:00 [INF] thr:57<> loader Requires:OUTP 15 1
2025-07-07 10:45:51.398 +08:00 [INF] thr:57<> loader Requires:OUTP 4 0
2025-07-07 10:45:51.845 +08:00 [INF] thr:57<> loader Requires:OUTP 1 1
2025-07-07 10:45:52.290 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:53.243 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:54.198 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:55.151 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:56.105 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:57.058 +08:00 [INF] thr:57<> loader Requires:INPUT A 4
2025-07-07 10:45:57.509 +08:00 [INF] thr:57<> loader Requires:INPUT A 5
2025-07-07 10:45:57.962 +08:00 [INF] thr:57<> loader Requires:MATS AK Z 1
2025-07-07 10:46:00.678 +08:00 [INF] thr:57<> loader Requires:SSPP Z 30
2025-07-07 10:46:01.128 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 10:46:01.129 +08:00 [INF] thr:57<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 10:46:01.129 +08:00 [INF] thr:57<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 10:46:01.632 +08:00 [INF] thr:57<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:46:01.632 +08:00 [INF] thr:57<> loader Requires:RETH
2025-07-07 10:46:06.895 +08:00 [INF] thr:57<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 10:46:06.897 +08:00 [INF] thr:52<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 10:46:06.897 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-07 10:46:07.903 +08:00 [INF] thr:52<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 10:46:07.904 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 10:46:07.904 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-07 10:46:08.346 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-07 10:46:08.346 +08:00 [INF] thr:52<> loader Requires:MATS AJ T
2025-07-07 10:46:11.889 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-07 10:46:12.341 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-07 10:46:19.368 +08:00 [INF] thr:52<> loader Requires:MOVR R 226000
2025-07-07 10:46:21.964 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-07 10:46:22.415 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 10:46:22.415 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 10:46:22.415 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 10:46:22.919 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:46:22.919 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-07 10:46:23.371 +08:00 [INF] thr:52<> loader Requires:MATS AJ R 0
2025-07-07 10:46:26.621 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 10:46:26.621 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 10:46:26.621 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 10:46:27.125 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:46:27.125 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-07 10:46:27.573 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 0
2025-07-07 10:46:30.185 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-07 10:46:30.633 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 10:46:30.633 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 10:46:30.633 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 10:46:31.138 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:46:31.138 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-07 10:46:31.586 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-07 10:46:32.033 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-07 10:46:32.479 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-07 10:46:32.928 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-07 10:46:33.375 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-07 10:46:33.821 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-07 10:46:34.774 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-07 10:46:35.727 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-07 10:46:36.680 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-07 10:46:37.132 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-07 10:46:37.586 +08:00 [INF] thr:52<> loader Requires:MATS AJ Z 1
2025-07-07 10:46:40.202 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-07 10:46:40.653 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 10:46:40.653 +08:00 [INF] thr:52<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 10:46:40.653 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 10:46:41.156 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:46:41.156 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-07 10:46:46.191 +08:00 [INF] thr:52<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 10:46:46.193 +08:00 [INF] thr:52<> 执行Aligner角度angle：0
2025-07-07 10:48:05.500 +08:00 [INF] thr:63<> loader Requires:INPUT B 13
2025-07-07 10:48:06.479 +08:00 [INF] thr:49<> 执行Aligner角度angle：0
2025-07-07 10:48:07.484 +08:00 [INF] thr:49<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-07 10:48:07.485 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 10:48:07.485 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-07 10:48:07.932 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-07 10:48:07.932 +08:00 [INF] thr:49<> loader Requires:MATS AJ T
2025-07-07 10:48:08.391 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-07 10:48:08.839 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-07 10:48:09.311 +08:00 [INF] thr:49<> loader Requires:MOVR R 226000
2025-07-07 10:48:11.908 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 10:48:12.358 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-07 10:48:12.358 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-07 10:48:12.358 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-07 10:48:12.862 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:48:12.862 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-07 10:48:13.316 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-07 10:48:13.762 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-07 10:48:14.209 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-07 10:48:14.658 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-07 10:48:15.105 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-07 10:48:15.551 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:16.002 +08:00 [INF] thr:49<> loader Requires:MATS AJ R 0
2025-07-07 10:48:19.252 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-07 10:48:19.252 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-07 10:48:19.252 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-07 10:48:19.755 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:48:19.755 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 10:48:20.203 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 0
2025-07-07 10:48:22.816 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 10:48:23.265 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-07 10:48:23.265 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-07 10:48:23.265 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-07 10:48:23.768 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:48:23.768 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 10:48:24.213 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-07 10:48:24.660 +08:00 [INF] thr:49<> loader Requires:OUTP 16 0
2025-07-07 10:48:25.107 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-07 10:48:25.555 +08:00 [INF] thr:49<> loader Requires:OUTP 4 0
2025-07-07 10:48:26.002 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-07 10:48:26.448 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:27.401 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:28.362 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:29.315 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:30.268 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:31.222 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:48:31.674 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-07 10:48:32.126 +08:00 [INF] thr:49<> loader Requires:MATS AJ Z 1
2025-07-07 10:48:34.743 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 10:48:35.194 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-07 10:48:35.194 +08:00 [INF] thr:49<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-07 10:48:35.194 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-07 10:48:35.697 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:48:35.697 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-07 10:48:40.733 +08:00 [INF] thr:49<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-07 10:48:40.735 +08:00 [INF] thr:49<> AOI is Ready
2025-07-07 10:48:40.799 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:50
2025-07-07 10:48:40.805 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:50
2025-07-07 10:48:40.842 +08:00 [INF] thr:49<> SetVelocity, Axis:X, velocity:8
2025-07-07 10:48:40.845 +08:00 [INF] thr:49<> SetVelocity, Axis:Y, velocity:8
2025-07-07 10:48:40.863 +08:00 [INF] thr:49<> stage move to position action ok
2025-07-07 10:48:40.864 +08:00 [INF] thr:49<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-07 10:48:40.864 +08:00 [INF] thr:49<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 10:48:40.864 +08:00 [INF] thr:49<> loader Requires:RGRP
2025-07-07 10:48:41.309 +08:00 [INF] thr:49<> CLeanLoader Group Now C
2025-07-07 10:48:41.309 +08:00 [INF] thr:49<> loader Requires:MATS AK T
2025-07-07 10:48:44.851 +08:00 [INF] thr:49<> loader Requires:SSP Z 4000
2025-07-07 10:48:45.300 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-07 10:48:52.318 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 10:48:52.768 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-07 10:48:52.769 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-07 10:48:52.769 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-07 10:48:53.272 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:48:53.272 +08:00 [INF] thr:49<> loader Requires:INPUT A 6
2025-07-07 10:48:53.725 +08:00 [INF] thr:49<> loader Requires:MATS AK R 0
2025-07-07 10:48:59.007 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-07 10:48:59.007 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片请求
2025-07-07 10:48:59.007 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-07 10:48:59.511 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:48:59.511 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 10:48:59.957 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 0
2025-07-07 10:49:02.670 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 10:49:03.131 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-07 10:49:03.132 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-07 10:49:03.132 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-07 10:49:03.636 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:49:03.636 +08:00 [INF] thr:49<> loader Requires:SSP Z 1000
2025-07-07 10:49:04.083 +08:00 [INF] thr:49<> loader Requires:OUTP 1 0
2025-07-07 10:49:04.530 +08:00 [INF] thr:49<> loader Requires:OUTP 16 1
2025-07-07 10:49:04.977 +08:00 [INF] thr:49<> loader Requires:OUTP 15 1
2025-07-07 10:49:05.426 +08:00 [INF] thr:49<> loader Requires:OUTP 4 1
2025-07-07 10:49:05.882 +08:00 [INF] thr:49<> loader Requires:OUTP 1 1
2025-07-07 10:49:06.331 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:49:07.284 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:49:08.236 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:49:09.189 +08:00 [INF] thr:49<> loader Requires:INPUT A 4
2025-07-07 10:49:09.642 +08:00 [INF] thr:49<> loader Requires:INPUT A 5
2025-07-07 10:49:10.094 +08:00 [INF] thr:49<> loader Requires:MATS AK Z 1
2025-07-07 10:49:12.812 +08:00 [INF] thr:49<> loader Requires:SSPP Z 30
2025-07-07 10:49:13.262 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-07 10:49:13.262 +08:00 [INF] thr:49<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-07 10:49:13.262 +08:00 [INF] thr:49<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-07 10:49:14.268 +08:00 [INF] thr:49<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 10:49:14.268 +08:00 [INF] thr:49<> loader Requires:RETH
2025-07-07 10:49:19.534 +08:00 [INF] thr:49<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 12:30:51.948 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:58065
2025-07-07 12:32:39.739 +08:00 [INF] thr:23<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-07 12:37:02.739 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:56447
2025-07-07 14:45:57.025 +08:00 [INF] thr:39<> loader Requires:INPUT B 13
2025-07-07 14:45:58.526 +08:00 [INF] thr:11<> AOI is Ready
2025-07-07 14:46:02.403 +08:00 [INF] thr:11<> SetVelocity, Axis:X, velocity:50
2025-07-07 14:46:02.410 +08:00 [INF] thr:11<> SetVelocity, Axis:Y, velocity:50
2025-07-07 14:46:05.311 +08:00 [INF] thr:11<> SetVelocity, Axis:X, velocity:8
2025-07-07 14:46:05.315 +08:00 [INF] thr:11<> SetVelocity, Axis:Y, velocity:8
2025-07-07 14:46:05.332 +08:00 [INF] thr:11<> stage move to position action ok
2025-07-07 14:46:05.332 +08:00 [INF] thr:11<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 14:46:05.332 +08:00 [INF] thr:11<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 14:46:05.332 +08:00 [INF] thr:11<> loader Requires:RGRP
2025-07-07 14:46:05.777 +08:00 [INF] thr:11<> CLeanLoader Group Now C
2025-07-07 14:46:05.777 +08:00 [INF] thr:11<> loader Requires:MATS AK T
2025-07-07 14:46:06.234 +08:00 [INF] thr:11<> loader Requires:SSP Z 4000
2025-07-07 14:46:06.681 +08:00 [INF] thr:11<> loader Requires:MATS AK Z 1
2025-07-07 14:46:07.155 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 14:46:07.605 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 14:46:07.605 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 14:46:07.605 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 14:46:08.107 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:46:08.107 +08:00 [INF] thr:11<> loader Requires:INPUT A 6
2025-07-07 14:46:08.562 +08:00 [INF] thr:11<> loader Requires:OUTP 1 0
2025-07-07 14:46:09.010 +08:00 [INF] thr:11<> loader Requires:OUTP 16 1
2025-07-07 14:46:09.459 +08:00 [INF] thr:11<> loader Requires:OUTP 15 1
2025-07-07 14:46:09.908 +08:00 [INF] thr:11<> loader Requires:OUTP 4 1
2025-07-07 14:46:10.355 +08:00 [INF] thr:11<> loader Requires:OUTP 1 1
2025-07-07 14:46:10.805 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:11.257 +08:00 [INF] thr:11<> loader Requires:MATS AK R 0
2025-07-07 14:46:16.538 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 14:46:16.538 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 14:46:16.538 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 14:46:17.043 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:46:17.043 +08:00 [INF] thr:11<> loader Requires:SSP Z 1000
2025-07-07 14:46:17.492 +08:00 [INF] thr:11<> loader Requires:MATS AK Z 0
2025-07-07 14:46:20.205 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 14:46:20.667 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 14:46:20.667 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 14:46:20.667 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 14:46:21.170 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:46:21.170 +08:00 [INF] thr:11<> loader Requires:SSP Z 1000
2025-07-07 14:46:21.617 +08:00 [INF] thr:11<> loader Requires:OUTP 1 0
2025-07-07 14:46:22.064 +08:00 [INF] thr:11<> loader Requires:OUTP 16 0
2025-07-07 14:46:22.512 +08:00 [INF] thr:11<> loader Requires:OUTP 15 1
2025-07-07 14:46:22.961 +08:00 [INF] thr:11<> loader Requires:OUTP 4 0
2025-07-07 14:46:23.408 +08:00 [INF] thr:11<> loader Requires:OUTP 1 1
2025-07-07 14:46:23.853 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:24.814 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:25.767 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:26.722 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:27.675 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:28.629 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 14:46:29.080 +08:00 [INF] thr:11<> loader Requires:INPUT A 5
2025-07-07 14:46:29.533 +08:00 [INF] thr:11<> loader Requires:MATS AK Z 1
2025-07-07 14:46:32.251 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 14:46:32.702 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 14:46:32.702 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 14:46:32.702 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 14:46:33.205 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:46:33.205 +08:00 [INF] thr:11<> loader Requires:RETH
2025-07-07 14:46:38.467 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 14:46:38.468 +08:00 [INF] thr:17<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 14:46:38.468 +08:00 [INF] thr:17<> 执行Aligner角度angle：0
2025-07-07 14:46:39.476 +08:00 [INF] thr:17<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 14:46:39.476 +08:00 [INF] thr:17<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 14:46:39.476 +08:00 [INF] thr:17<> loader Requires:RGRP
2025-07-07 14:46:39.920 +08:00 [INF] thr:17<> CLeanLoader Group Now C
2025-07-07 14:46:39.920 +08:00 [INF] thr:17<> loader Requires:MATS AJ T
2025-07-07 14:46:43.463 +08:00 [INF] thr:17<> loader Requires:SSP Z 4000
2025-07-07 14:46:43.912 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-07 14:46:50.930 +08:00 [INF] thr:17<> loader Requires:MOVR R 226000
2025-07-07 14:46:53.524 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-07 14:46:53.974 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 14:46:53.974 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 14:46:53.974 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 14:46:54.477 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:46:54.477 +08:00 [INF] thr:17<> loader Requires:INPUT A 6
2025-07-07 14:46:54.930 +08:00 [INF] thr:17<> loader Requires:MATS AJ R 0
2025-07-07 14:46:58.180 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 14:46:58.181 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 14:46:58.181 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 14:46:58.688 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:46:58.688 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-07 14:46:59.136 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 0
2025-07-07 14:47:01.749 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-07 14:47:02.198 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 14:47:02.198 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 14:47:02.198 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 14:47:02.703 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:47:02.703 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-07 14:47:03.150 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-07 14:47:03.596 +08:00 [INF] thr:17<> loader Requires:OUTP 16 1
2025-07-07 14:47:04.050 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-07 14:47:04.500 +08:00 [INF] thr:17<> loader Requires:OUTP 4 1
2025-07-07 14:47:04.947 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-07 14:47:05.393 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-07 14:47:06.346 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-07 14:47:07.299 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-07 14:47:08.253 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-07 14:47:08.704 +08:00 [INF] thr:17<> loader Requires:INPUT A 5
2025-07-07 14:47:09.157 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-07 14:47:11.774 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-07 14:47:12.224 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 14:47:12.224 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 14:47:12.224 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 14:47:12.727 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 14:47:12.727 +08:00 [INF] thr:17<> loader Requires:RETH
2025-07-07 14:47:17.763 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 14:47:17.768 +08:00 [INF] thr:17<> 执行Aligner角度angle：0
2025-07-07 15:06:54.202 +08:00 [INF] thr:38<> loader Requires:INPUT B 13
2025-07-07 15:06:55.175 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-07 15:06:56.181 +08:00 [INF] thr:66<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-07 15:06:56.182 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 15:06:56.182 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-07 15:06:56.627 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-07 15:06:56.627 +08:00 [INF] thr:66<> loader Requires:MATS AJ T
2025-07-07 15:06:57.084 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-07 15:06:57.532 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-07 15:06:58.004 +08:00 [INF] thr:66<> loader Requires:MOVR R 226000
2025-07-07 15:07:00.601 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:07:01.051 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-07 15:07:01.051 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-07 15:07:01.051 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-07 15:07:01.555 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:01.555 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-07 15:07:02.008 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 15:07:02.455 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-07 15:07:02.903 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 15:07:03.351 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-07 15:07:03.798 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 15:07:04.244 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:04.696 +08:00 [INF] thr:66<> loader Requires:MATS AJ R 0
2025-07-07 15:07:07.947 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-07 15:07:07.947 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-07 15:07:07.947 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-07 15:07:08.451 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:08.451 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 15:07:08.897 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 0
2025-07-07 15:07:11.510 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:07:11.957 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-07 15:07:11.957 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-07 15:07:11.957 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-07 15:07:12.461 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:12.461 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 15:07:12.910 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 15:07:13.357 +08:00 [INF] thr:66<> loader Requires:OUTP 16 0
2025-07-07 15:07:13.804 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 15:07:14.253 +08:00 [INF] thr:66<> loader Requires:OUTP 4 0
2025-07-07 15:07:14.708 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 15:07:15.154 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:16.106 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:17.060 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:18.025 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:18.979 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:19.931 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:20.384 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-07 15:07:20.836 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-07 15:07:23.453 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:07:23.904 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-07 15:07:23.904 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-07 15:07:23.904 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-07 15:07:24.407 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:24.407 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-07 15:07:29.442 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-07 15:07:29.444 +08:00 [INF] thr:66<> AOI is Ready
2025-07-07 15:07:29.510 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:50
2025-07-07 15:07:29.513 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:50
2025-07-07 15:07:29.551 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:8
2025-07-07 15:07:29.554 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:8
2025-07-07 15:07:29.590 +08:00 [INF] thr:66<> stage move to position action ok
2025-07-07 15:07:29.590 +08:00 [INF] thr:66<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-07 15:07:29.591 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 15:07:29.591 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-07 15:07:30.033 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-07 15:07:30.034 +08:00 [INF] thr:66<> loader Requires:MATS AK T
2025-07-07 15:07:33.587 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-07 15:07:34.037 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-07 15:07:41.055 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:07:41.504 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-07 15:07:41.504 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-07 15:07:41.504 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-07 15:07:42.007 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:42.007 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-07 15:07:42.457 +08:00 [INF] thr:66<> loader Requires:MATS AK R 0
2025-07-07 15:07:47.739 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-07 15:07:47.739 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片请求
2025-07-07 15:07:47.739 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-07 15:07:48.240 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:48.240 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 15:07:48.688 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 0
2025-07-07 15:07:51.402 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:07:51.865 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-07 15:07:51.865 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-07 15:07:51.865 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-07 15:07:52.367 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:07:52.367 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 15:07:52.815 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 15:07:53.262 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-07 15:07:53.717 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 15:07:54.166 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-07 15:07:54.612 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 15:07:55.058 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:56.011 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:56.966 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:57.922 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:07:58.373 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-07 15:07:58.826 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-07 15:08:01.545 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:08:01.995 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-07 15:08:01.995 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-07 15:08:01.996 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-07 15:08:03.001 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:08:03.001 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-07 15:08:08.262 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 15:58:17.604 +08:00 [INF] thr:15<> loader Requires:INPUT B 13
2025-07-07 15:58:19.071 +08:00 [INF] thr:11<> AOI is Ready
2025-07-07 15:58:21.258 +08:00 [INF] thr:11<> SetVelocity, Axis:X, velocity:50
2025-07-07 15:58:21.261 +08:00 [INF] thr:11<> SetVelocity, Axis:Y, velocity:50
2025-07-07 15:58:24.062 +08:00 [INF] thr:11<> SetVelocity, Axis:X, velocity:8
2025-07-07 15:58:24.066 +08:00 [INF] thr:11<> SetVelocity, Axis:Y, velocity:8
2025-07-07 15:58:24.082 +08:00 [INF] thr:11<> stage move to position action ok
2025-07-07 15:58:24.082 +08:00 [INF] thr:11<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 15:58:24.083 +08:00 [INF] thr:11<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 15:58:24.083 +08:00 [INF] thr:11<> loader Requires:RGRP
2025-07-07 15:58:24.526 +08:00 [INF] thr:11<> CLeanLoader Group Now C
2025-07-07 15:58:24.526 +08:00 [INF] thr:11<> loader Requires:MATS AK T
2025-07-07 15:58:24.985 +08:00 [INF] thr:11<> loader Requires:SSP Z 4000
2025-07-07 15:58:25.435 +08:00 [INF] thr:11<> loader Requires:MATS AK Z 1
2025-07-07 15:58:25.908 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 15:58:26.359 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 15:58:26.359 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 15:58:26.359 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 15:58:26.866 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:58:26.866 +08:00 [INF] thr:11<> loader Requires:INPUT A 6
2025-07-07 15:58:27.315 +08:00 [INF] thr:11<> loader Requires:OUTP 1 0
2025-07-07 15:58:27.762 +08:00 [INF] thr:11<> loader Requires:OUTP 16 1
2025-07-07 15:58:28.213 +08:00 [INF] thr:11<> loader Requires:OUTP 15 1
2025-07-07 15:58:28.662 +08:00 [INF] thr:11<> loader Requires:OUTP 4 1
2025-07-07 15:58:29.109 +08:00 [INF] thr:11<> loader Requires:OUTP 1 1
2025-07-07 15:58:29.560 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:30.014 +08:00 [INF] thr:11<> loader Requires:MATS AK R 0
2025-07-07 15:58:35.296 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 15:58:35.296 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 15:58:35.296 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 15:58:35.801 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:58:35.801 +08:00 [INF] thr:11<> loader Requires:SSP Z 1000
2025-07-07 15:58:36.247 +08:00 [INF] thr:11<> loader Requires:MATS AK Z 0
2025-07-07 15:58:38.958 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 15:58:39.428 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 15:58:39.428 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 15:58:39.428 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 15:58:39.932 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:58:39.932 +08:00 [INF] thr:11<> loader Requires:SSP Z 1000
2025-07-07 15:58:40.380 +08:00 [INF] thr:11<> loader Requires:OUTP 1 0
2025-07-07 15:58:40.826 +08:00 [INF] thr:11<> loader Requires:OUTP 16 0
2025-07-07 15:58:41.274 +08:00 [INF] thr:11<> loader Requires:OUTP 15 1
2025-07-07 15:58:41.723 +08:00 [INF] thr:11<> loader Requires:OUTP 4 0
2025-07-07 15:58:42.170 +08:00 [INF] thr:11<> loader Requires:OUTP 1 1
2025-07-07 15:58:42.616 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:43.569 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:44.522 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:45.476 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:46.431 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:47.385 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 15:58:47.838 +08:00 [INF] thr:11<> loader Requires:INPUT A 5
2025-07-07 15:58:48.291 +08:00 [INF] thr:11<> loader Requires:MATS AK Z 1
2025-07-07 15:58:51.009 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 15:58:51.459 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 15:58:51.459 +08:00 [INF] thr:11<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 15:58:51.459 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 15:58:51.963 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:58:51.963 +08:00 [INF] thr:11<> loader Requires:RETH
2025-07-07 15:58:57.226 +08:00 [INF] thr:11<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 15:58:57.227 +08:00 [INF] thr:66<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 15:58:57.227 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-07 15:58:58.232 +08:00 [INF] thr:66<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 15:58:58.233 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 15:58:58.233 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-07 15:58:58.675 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-07 15:58:58.675 +08:00 [INF] thr:66<> loader Requires:MATS AJ T
2025-07-07 15:59:02.217 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-07 15:59:02.666 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-07 15:59:09.684 +08:00 [INF] thr:66<> loader Requires:MOVR R 226000
2025-07-07 15:59:12.278 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:59:12.739 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 15:59:12.739 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 15:59:12.739 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 15:59:13.244 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:59:13.244 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-07 15:59:13.698 +08:00 [INF] thr:66<> loader Requires:MATS AJ R 0
2025-07-07 15:59:16.947 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 15:59:16.947 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 15:59:16.947 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 15:59:17.451 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:59:17.451 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 15:59:17.900 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 0
2025-07-07 15:59:20.512 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:59:20.961 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 15:59:20.961 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 15:59:20.961 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 15:59:21.464 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:59:21.464 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 15:59:21.914 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 15:59:22.359 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-07 15:59:22.807 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 15:59:23.255 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-07 15:59:23.702 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 15:59:24.148 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:59:25.102 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:59:26.055 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:59:27.009 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 15:59:27.463 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-07 15:59:27.916 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-07 15:59:30.533 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 15:59:30.983 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 15:59:30.983 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 15:59:30.983 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 15:59:31.491 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 15:59:31.491 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-07 15:59:36.525 +08:00 [INF] thr:66<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 15:59:36.526 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-07 16:03:52.581 +08:00 [INF] thr:43<> loader Requires:INPUT B 13
2025-07-07 16:03:53.592 +08:00 [INF] thr:66<> 执行Aligner角度angle：0
2025-07-07 16:03:54.600 +08:00 [INF] thr:66<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-07 16:03:54.601 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 16:03:54.601 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-07 16:03:55.051 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-07 16:03:55.051 +08:00 [INF] thr:66<> loader Requires:MATS AJ T
2025-07-07 16:03:55.509 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-07 16:03:55.956 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-07 16:03:56.430 +08:00 [INF] thr:66<> loader Requires:MOVR R 226000
2025-07-07 16:03:59.026 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 16:03:59.476 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-07 16:03:59.476 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-07 16:03:59.476 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-07 16:03:59.979 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:03:59.979 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-07 16:04:00.433 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 16:04:00.880 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-07 16:04:01.327 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 16:04:01.776 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-07 16:04:02.222 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 16:04:02.668 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:03.120 +08:00 [INF] thr:66<> loader Requires:MATS AJ R 0
2025-07-07 16:04:06.370 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-07 16:04:06.370 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-07 16:04:06.370 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-07 16:04:06.874 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:04:06.874 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 16:04:07.321 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 0
2025-07-07 16:04:09.934 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 16:04:10.386 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-07 16:04:10.386 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-07 16:04:10.386 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-07 16:04:10.888 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:04:10.888 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 16:04:11.335 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 16:04:11.781 +08:00 [INF] thr:66<> loader Requires:OUTP 16 0
2025-07-07 16:04:12.229 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 16:04:12.677 +08:00 [INF] thr:66<> loader Requires:OUTP 4 0
2025-07-07 16:04:13.131 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 16:04:13.577 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:14.531 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:15.484 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:16.437 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:17.391 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:18.344 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:18.795 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-07 16:04:19.248 +08:00 [INF] thr:66<> loader Requires:MATS AJ Z 1
2025-07-07 16:04:21.865 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 16:04:22.323 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-07 16:04:22.323 +08:00 [INF] thr:66<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-07 16:04:22.323 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-07 16:04:22.825 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:04:22.825 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-07 16:04:27.859 +08:00 [INF] thr:66<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-07 16:04:27.860 +08:00 [INF] thr:66<> AOI is Ready
2025-07-07 16:04:27.925 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:50
2025-07-07 16:04:27.928 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:50
2025-07-07 16:04:27.963 +08:00 [INF] thr:66<> SetVelocity, Axis:X, velocity:8
2025-07-07 16:04:27.970 +08:00 [INF] thr:66<> SetVelocity, Axis:Y, velocity:8
2025-07-07 16:04:27.995 +08:00 [INF] thr:66<> stage move to position action ok
2025-07-07 16:04:27.995 +08:00 [INF] thr:66<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-07 16:04:27.996 +08:00 [INF] thr:66<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 16:04:27.996 +08:00 [INF] thr:66<> loader Requires:RGRP
2025-07-07 16:04:28.437 +08:00 [INF] thr:66<> CLeanLoader Group Now C
2025-07-07 16:04:28.437 +08:00 [INF] thr:66<> loader Requires:MATS AK T
2025-07-07 16:04:31.980 +08:00 [INF] thr:66<> loader Requires:SSP Z 4000
2025-07-07 16:04:32.429 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-07 16:04:39.447 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 16:04:39.897 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-07 16:04:39.897 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-07 16:04:39.897 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-07 16:04:40.400 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:04:40.400 +08:00 [INF] thr:66<> loader Requires:INPUT A 6
2025-07-07 16:04:40.854 +08:00 [INF] thr:66<> loader Requires:MATS AK R 0
2025-07-07 16:04:46.137 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-07 16:04:46.137 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片请求
2025-07-07 16:04:46.137 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-07 16:04:46.639 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:04:46.640 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 16:04:47.086 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 0
2025-07-07 16:04:49.799 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 16:04:50.298 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-07 16:04:50.298 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-07 16:04:50.298 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-07 16:04:50.803 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:04:50.803 +08:00 [INF] thr:66<> loader Requires:SSP Z 1000
2025-07-07 16:04:51.250 +08:00 [INF] thr:66<> loader Requires:OUTP 1 0
2025-07-07 16:04:51.697 +08:00 [INF] thr:66<> loader Requires:OUTP 16 1
2025-07-07 16:04:52.147 +08:00 [INF] thr:66<> loader Requires:OUTP 15 1
2025-07-07 16:04:52.597 +08:00 [INF] thr:66<> loader Requires:OUTP 4 1
2025-07-07 16:04:53.043 +08:00 [INF] thr:66<> loader Requires:OUTP 1 1
2025-07-07 16:04:53.489 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:54.443 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:55.396 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:56.352 +08:00 [INF] thr:66<> loader Requires:INPUT A 4
2025-07-07 16:04:56.803 +08:00 [INF] thr:66<> loader Requires:INPUT A 5
2025-07-07 16:04:57.257 +08:00 [INF] thr:66<> loader Requires:MATS AK Z 1
2025-07-07 16:04:59.974 +08:00 [INF] thr:66<> loader Requires:SSPP Z 30
2025-07-07 16:05:00.426 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-07 16:05:00.426 +08:00 [INF] thr:66<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-07 16:05:00.426 +08:00 [INF] thr:66<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-07 16:05:01.430 +08:00 [INF] thr:66<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 16:05:01.430 +08:00 [INF] thr:66<> loader Requires:RETH
2025-07-07 16:05:06.691 +08:00 [INF] thr:66<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 18:23:52.532 +08:00 [INF] thr:10<> loader Requires:INPUT B 13
2025-07-07 18:23:53.991 +08:00 [INF] thr:59<> AOI is Ready
2025-07-07 18:23:59.279 +08:00 [INF] thr:59<> SetVelocity, Axis:X, velocity:50
2025-07-07 18:23:59.283 +08:00 [INF] thr:59<> SetVelocity, Axis:Y, velocity:50
2025-07-07 18:24:03.482 +08:00 [INF] thr:59<> SetVelocity, Axis:X, velocity:8
2025-07-07 18:24:03.485 +08:00 [INF] thr:59<> SetVelocity, Axis:Y, velocity:8
2025-07-07 18:24:03.526 +08:00 [INF] thr:59<> stage move to position action ok
2025-07-07 18:24:03.527 +08:00 [INF] thr:59<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 18:24:03.527 +08:00 [INF] thr:59<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 18:24:03.527 +08:00 [INF] thr:59<> loader Requires:RGRP
2025-07-07 18:24:03.969 +08:00 [INF] thr:59<> CLeanLoader Group Now C
2025-07-07 18:24:03.969 +08:00 [INF] thr:59<> loader Requires:MATS AK T
2025-07-07 18:24:04.427 +08:00 [INF] thr:59<> loader Requires:SSP Z 4000
2025-07-07 18:24:04.876 +08:00 [INF] thr:59<> loader Requires:MATS AK Z 1
2025-07-07 18:24:05.348 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-07-07 18:24:05.799 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 18:24:05.799 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 18:24:05.799 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 18:24:06.300 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:24:06.300 +08:00 [INF] thr:59<> loader Requires:INPUT A 6
2025-07-07 18:24:06.756 +08:00 [INF] thr:59<> loader Requires:OUTP 1 0
2025-07-07 18:24:07.203 +08:00 [INF] thr:59<> loader Requires:OUTP 16 1
2025-07-07 18:24:07.651 +08:00 [INF] thr:59<> loader Requires:OUTP 15 1
2025-07-07 18:24:08.098 +08:00 [INF] thr:59<> loader Requires:OUTP 4 1
2025-07-07 18:24:08.545 +08:00 [INF] thr:59<> loader Requires:OUTP 1 1
2025-07-07 18:24:08.992 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:09.447 +08:00 [INF] thr:59<> loader Requires:MATS AK R 0
2025-07-07 18:24:14.730 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 18:24:14.730 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 18:24:14.730 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 18:24:15.233 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:24:15.233 +08:00 [INF] thr:59<> loader Requires:SSP Z 1000
2025-07-07 18:24:15.679 +08:00 [INF] thr:59<> loader Requires:MATS AK Z 0
2025-07-07 18:24:18.392 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-07-07 18:24:18.854 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 18:24:18.854 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 18:24:18.854 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 18:24:19.356 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:24:19.356 +08:00 [INF] thr:59<> loader Requires:SSP Z 1000
2025-07-07 18:24:19.805 +08:00 [INF] thr:59<> loader Requires:OUTP 1 0
2025-07-07 18:24:20.252 +08:00 [INF] thr:59<> loader Requires:OUTP 16 0
2025-07-07 18:24:20.700 +08:00 [INF] thr:59<> loader Requires:OUTP 15 1
2025-07-07 18:24:21.148 +08:00 [INF] thr:59<> loader Requires:OUTP 4 0
2025-07-07 18:24:21.595 +08:00 [INF] thr:59<> loader Requires:OUTP 1 1
2025-07-07 18:24:22.041 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:22.996 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:23.948 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:24.901 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:25.855 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:26.808 +08:00 [INF] thr:59<> loader Requires:INPUT A 4
2025-07-07 18:24:27.265 +08:00 [INF] thr:59<> loader Requires:INPUT A 5
2025-07-07 18:24:27.715 +08:00 [INF] thr:59<> loader Requires:MATS AK Z 1
2025-07-07 18:24:30.437 +08:00 [INF] thr:59<> loader Requires:SSPP Z 30
2025-07-07 18:24:30.888 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 18:24:30.888 +08:00 [INF] thr:59<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 18:24:30.888 +08:00 [INF] thr:59<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 18:24:31.392 +08:00 [INF] thr:59<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:24:31.392 +08:00 [INF] thr:59<> loader Requires:RETH
2025-07-07 18:24:36.656 +08:00 [INF] thr:59<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 18:24:36.657 +08:00 [INF] thr:11<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 18:24:36.657 +08:00 [INF] thr:11<> 执行Aligner角度angle：0
2025-07-07 18:24:37.664 +08:00 [INF] thr:11<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 18:24:37.664 +08:00 [INF] thr:11<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 18:24:37.664 +08:00 [INF] thr:11<> loader Requires:RGRP
2025-07-07 18:24:38.118 +08:00 [INF] thr:11<> CLeanLoader Group Now C
2025-07-07 18:24:38.118 +08:00 [INF] thr:11<> loader Requires:MATS AJ T
2025-07-07 18:24:41.660 +08:00 [INF] thr:11<> loader Requires:SSP Z 4000
2025-07-07 18:24:42.109 +08:00 [INF] thr:11<> loader Requires:MATS AJ Z 1
2025-07-07 18:24:49.126 +08:00 [INF] thr:11<> loader Requires:MOVR R 226000
2025-07-07 18:24:51.721 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 18:24:52.179 +08:00 [INF] thr:11<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 18:24:52.179 +08:00 [INF] thr:11<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 18:24:52.179 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 18:24:52.681 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:24:52.681 +08:00 [INF] thr:11<> loader Requires:INPUT A 6
2025-07-07 18:24:53.132 +08:00 [INF] thr:11<> loader Requires:MATS AJ R 0
2025-07-07 18:24:56.382 +08:00 [INF] thr:11<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 18:24:56.382 +08:00 [INF] thr:11<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 18:24:56.382 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 18:24:56.886 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:24:56.886 +08:00 [INF] thr:11<> loader Requires:SSP Z 1000
2025-07-07 18:24:57.334 +08:00 [INF] thr:11<> loader Requires:MATS AJ Z 0
2025-07-07 18:24:59.947 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 18:25:00.420 +08:00 [INF] thr:11<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 18:25:00.420 +08:00 [INF] thr:11<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 18:25:00.420 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 18:25:00.922 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:25:00.922 +08:00 [INF] thr:11<> loader Requires:SSP Z 1000
2025-07-07 18:25:01.371 +08:00 [INF] thr:11<> loader Requires:OUTP 1 0
2025-07-07 18:25:01.836 +08:00 [INF] thr:11<> loader Requires:OUTP 16 1
2025-07-07 18:25:02.285 +08:00 [INF] thr:11<> loader Requires:OUTP 15 1
2025-07-07 18:25:02.733 +08:00 [INF] thr:11<> loader Requires:OUTP 4 1
2025-07-07 18:25:03.180 +08:00 [INF] thr:11<> loader Requires:OUTP 1 1
2025-07-07 18:25:03.625 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 18:25:04.580 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 18:25:05.532 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 18:25:06.485 +08:00 [INF] thr:11<> loader Requires:INPUT A 4
2025-07-07 18:25:06.937 +08:00 [INF] thr:11<> loader Requires:INPUT A 5
2025-07-07 18:25:07.390 +08:00 [INF] thr:11<> loader Requires:MATS AJ Z 1
2025-07-07 18:25:10.007 +08:00 [INF] thr:11<> loader Requires:SSPP Z 30
2025-07-07 18:25:10.458 +08:00 [INF] thr:11<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 18:25:10.458 +08:00 [INF] thr:11<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 18:25:10.458 +08:00 [INF] thr:11<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 18:25:10.961 +08:00 [INF] thr:11<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:25:10.962 +08:00 [INF] thr:11<> loader Requires:RETH
2025-07-07 18:25:15.998 +08:00 [INF] thr:11<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 18:25:15.999 +08:00 [INF] thr:11<> 执行Aligner角度angle：0
2025-07-07 18:27:30.300 +08:00 [INF] thr:61<> loader Requires:INPUT B 13
2025-07-07 18:27:31.304 +08:00 [INF] thr:34<> 执行Aligner角度angle：0
2025-07-07 18:27:32.311 +08:00 [INF] thr:34<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-07 18:27:32.311 +08:00 [INF] thr:34<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 18:27:32.311 +08:00 [INF] thr:34<> loader Requires:RGRP
2025-07-07 18:27:32.757 +08:00 [INF] thr:34<> CLeanLoader Group Now C
2025-07-07 18:27:32.757 +08:00 [INF] thr:34<> loader Requires:MATS AJ T
2025-07-07 18:27:33.223 +08:00 [INF] thr:34<> loader Requires:SSP Z 4000
2025-07-07 18:27:33.671 +08:00 [INF] thr:34<> loader Requires:MATS AJ Z 1
2025-07-07 18:27:34.144 +08:00 [INF] thr:34<> loader Requires:MOVR R 226000
2025-07-07 18:27:36.740 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 18:27:37.191 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-07 18:27:37.191 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-07 18:27:37.191 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-07 18:27:37.693 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:27:37.693 +08:00 [INF] thr:34<> loader Requires:INPUT A 6
2025-07-07 18:27:38.147 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-07 18:27:38.595 +08:00 [INF] thr:34<> loader Requires:OUTP 16 1
2025-07-07 18:27:39.050 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-07 18:27:39.498 +08:00 [INF] thr:34<> loader Requires:OUTP 4 1
2025-07-07 18:27:39.944 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-07 18:27:40.390 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:40.843 +08:00 [INF] thr:34<> loader Requires:MATS AJ R 0
2025-07-07 18:27:44.092 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-07 18:27:44.092 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-07 18:27:44.092 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-07 18:27:44.596 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:27:44.596 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 18:27:45.045 +08:00 [INF] thr:34<> loader Requires:MATS AJ Z 0
2025-07-07 18:27:47.671 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 18:27:48.122 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-07 18:27:48.122 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-07 18:27:48.122 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-07 18:27:48.624 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:27:48.624 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 18:27:49.073 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-07 18:27:49.521 +08:00 [INF] thr:34<> loader Requires:OUTP 16 0
2025-07-07 18:27:49.971 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-07 18:27:50.427 +08:00 [INF] thr:34<> loader Requires:OUTP 4 0
2025-07-07 18:27:50.875 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-07 18:27:51.320 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:52.273 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:53.226 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:54.181 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:55.138 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:56.090 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:27:56.543 +08:00 [INF] thr:34<> loader Requires:INPUT A 5
2025-07-07 18:27:56.995 +08:00 [INF] thr:34<> loader Requires:MATS AJ Z 1
2025-07-07 18:27:59.611 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 18:28:00.062 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-07 18:28:00.062 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-07 18:28:00.062 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-07 18:28:00.565 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:28:00.565 +08:00 [INF] thr:34<> loader Requires:RETH
2025-07-07 18:28:05.599 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-07 18:28:05.601 +08:00 [INF] thr:34<> AOI is Ready
2025-07-07 18:28:05.665 +08:00 [INF] thr:34<> SetVelocity, Axis:X, velocity:50
2025-07-07 18:28:05.668 +08:00 [INF] thr:34<> SetVelocity, Axis:Y, velocity:50
2025-07-07 18:28:05.711 +08:00 [INF] thr:34<> SetVelocity, Axis:X, velocity:8
2025-07-07 18:28:05.714 +08:00 [INF] thr:34<> SetVelocity, Axis:Y, velocity:8
2025-07-07 18:28:05.733 +08:00 [INF] thr:34<> stage move to position action ok
2025-07-07 18:28:05.733 +08:00 [INF] thr:34<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-07 18:28:05.734 +08:00 [INF] thr:34<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 18:28:05.734 +08:00 [INF] thr:34<> loader Requires:RGRP
2025-07-07 18:28:06.182 +08:00 [INF] thr:34<> CLeanLoader Group Now C
2025-07-07 18:28:06.183 +08:00 [INF] thr:34<> loader Requires:MATS AK T
2025-07-07 18:28:09.725 +08:00 [INF] thr:34<> loader Requires:SSP Z 4000
2025-07-07 18:28:10.174 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 1
2025-07-07 18:28:17.192 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 18:28:17.642 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-07 18:28:17.642 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-07 18:28:17.642 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-07 18:28:18.146 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:28:18.146 +08:00 [INF] thr:34<> loader Requires:INPUT A 6
2025-07-07 18:28:18.598 +08:00 [INF] thr:34<> loader Requires:MATS AK R 0
2025-07-07 18:28:23.880 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-07 18:28:23.881 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片请求
2025-07-07 18:28:23.881 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-07 18:28:24.384 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:28:24.384 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 18:28:24.848 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 0
2025-07-07 18:28:27.563 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 18:28:28.032 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-07 18:28:28.032 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-07 18:28:28.032 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-07 18:28:28.536 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:28:28.536 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 18:28:28.984 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-07 18:28:29.431 +08:00 [INF] thr:34<> loader Requires:OUTP 16 1
2025-07-07 18:28:29.886 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-07 18:28:30.335 +08:00 [INF] thr:34<> loader Requires:OUTP 4 1
2025-07-07 18:28:30.789 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-07 18:28:31.235 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:28:32.209 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:28:33.184 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:28:34.148 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 18:28:34.602 +08:00 [INF] thr:34<> loader Requires:INPUT A 5
2025-07-07 18:28:35.057 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 1
2025-07-07 18:28:37.775 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 18:28:38.226 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-07 18:28:38.226 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-07 18:28:38.226 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-07 18:28:39.232 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 18:28:39.232 +08:00 [INF] thr:34<> loader Requires:RETH
2025-07-07 18:28:44.495 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 20:48:03.451 +08:00 [INF] thr:67<> loader Requires:INPUT B 13
2025-07-07 20:48:04.918 +08:00 [INF] thr:46<> AOI is Ready
2025-07-07 20:48:09.776 +08:00 [INF] thr:46<> SetVelocity, Axis:X, velocity:50
2025-07-07 20:48:09.779 +08:00 [INF] thr:46<> SetVelocity, Axis:Y, velocity:50
2025-07-07 20:48:12.597 +08:00 [INF] thr:46<> SetVelocity, Axis:X, velocity:20
2025-07-07 20:48:12.600 +08:00 [INF] thr:46<> SetVelocity, Axis:Y, velocity:20
2025-07-07 20:48:12.633 +08:00 [INF] thr:46<> stage move to position action ok
2025-07-07 20:48:12.633 +08:00 [INF] thr:46<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 20:48:12.634 +08:00 [INF] thr:46<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 20:48:12.634 +08:00 [INF] thr:46<> loader Requires:RGRP
2025-07-07 20:48:13.078 +08:00 [INF] thr:46<> CLeanLoader Group Now C
2025-07-07 20:48:13.078 +08:00 [INF] thr:46<> loader Requires:MATS AK T
2025-07-07 20:48:13.539 +08:00 [INF] thr:46<> loader Requires:SSP Z 4000
2025-07-07 20:48:13.987 +08:00 [INF] thr:46<> loader Requires:MATS AK Z 1
2025-07-07 20:48:14.461 +08:00 [INF] thr:46<> loader Requires:SSPP Z 30
2025-07-07 20:48:14.911 +08:00 [INF] thr:46<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 20:48:14.911 +08:00 [INF] thr:46<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 20:48:14.911 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 20:48:15.418 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:48:15.418 +08:00 [INF] thr:46<> loader Requires:INPUT A 6
2025-07-07 20:48:15.872 +08:00 [INF] thr:46<> loader Requires:OUTP 1 0
2025-07-07 20:48:16.319 +08:00 [INF] thr:46<> loader Requires:OUTP 16 1
2025-07-07 20:48:16.766 +08:00 [INF] thr:46<> loader Requires:OUTP 15 1
2025-07-07 20:48:17.218 +08:00 [INF] thr:46<> loader Requires:OUTP 4 1
2025-07-07 20:48:17.666 +08:00 [INF] thr:46<> loader Requires:OUTP 1 1
2025-07-07 20:48:18.111 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:18.563 +08:00 [INF] thr:46<> loader Requires:MATS AK R 0
2025-07-07 20:48:23.845 +08:00 [INF] thr:46<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 20:48:23.846 +08:00 [INF] thr:46<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 20:48:23.846 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 20:48:24.350 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:48:24.350 +08:00 [INF] thr:46<> loader Requires:SSP Z 1000
2025-07-07 20:48:24.799 +08:00 [INF] thr:46<> loader Requires:MATS AK Z 0
2025-07-07 20:48:27.513 +08:00 [INF] thr:46<> loader Requires:SSPP Z 30
2025-07-07 20:48:27.979 +08:00 [INF] thr:46<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 20:48:27.979 +08:00 [INF] thr:46<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 20:48:27.979 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 20:48:28.483 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:48:28.483 +08:00 [INF] thr:46<> loader Requires:SSP Z 1000
2025-07-07 20:48:28.931 +08:00 [INF] thr:46<> loader Requires:OUTP 1 0
2025-07-07 20:48:29.377 +08:00 [INF] thr:46<> loader Requires:OUTP 16 0
2025-07-07 20:48:29.824 +08:00 [INF] thr:46<> loader Requires:OUTP 15 1
2025-07-07 20:48:30.278 +08:00 [INF] thr:46<> loader Requires:OUTP 4 0
2025-07-07 20:48:30.724 +08:00 [INF] thr:46<> loader Requires:OUTP 1 1
2025-07-07 20:48:31.170 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:32.123 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:33.076 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:34.036 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:34.991 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:35.947 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:48:36.398 +08:00 [INF] thr:46<> loader Requires:INPUT A 5
2025-07-07 20:48:36.852 +08:00 [INF] thr:46<> loader Requires:MATS AK Z 1
2025-07-07 20:48:39.570 +08:00 [INF] thr:46<> loader Requires:SSPP Z 30
2025-07-07 20:48:40.023 +08:00 [INF] thr:46<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 20:48:40.023 +08:00 [INF] thr:46<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 20:48:40.023 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 20:48:40.525 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:48:40.525 +08:00 [INF] thr:46<> loader Requires:RETH
2025-07-07 20:48:45.787 +08:00 [INF] thr:46<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 20:48:45.789 +08:00 [INF] thr:46<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 20:48:45.789 +08:00 [INF] thr:46<> 执行Aligner角度angle：0
2025-07-07 20:48:46.798 +08:00 [INF] thr:46<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 20:48:46.800 +08:00 [INF] thr:46<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 20:48:46.800 +08:00 [INF] thr:46<> loader Requires:RGRP
2025-07-07 20:48:47.242 +08:00 [INF] thr:46<> CLeanLoader Group Now C
2025-07-07 20:48:47.242 +08:00 [INF] thr:46<> loader Requires:MATS AJ T
2025-07-07 20:48:50.784 +08:00 [INF] thr:46<> loader Requires:SSP Z 4000
2025-07-07 20:48:51.233 +08:00 [INF] thr:46<> loader Requires:MATS AJ Z 1
2025-07-07 20:48:58.253 +08:00 [INF] thr:46<> loader Requires:MOVR R 226000
2025-07-07 20:49:00.850 +08:00 [INF] thr:46<> loader Requires:SSPP Z 30
2025-07-07 20:49:01.301 +08:00 [INF] thr:46<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 20:49:01.301 +08:00 [INF] thr:46<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 20:49:01.301 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 20:49:01.804 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:49:01.804 +08:00 [INF] thr:46<> loader Requires:INPUT A 6
2025-07-07 20:49:02.258 +08:00 [INF] thr:46<> loader Requires:MATS AJ R 0
2025-07-07 20:49:05.508 +08:00 [INF] thr:46<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 20:49:05.509 +08:00 [INF] thr:46<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 20:49:05.509 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 20:49:06.012 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:49:06.012 +08:00 [INF] thr:46<> loader Requires:SSP Z 1000
2025-07-07 20:49:06.460 +08:00 [INF] thr:46<> loader Requires:MATS AJ Z 0
2025-07-07 20:49:09.073 +08:00 [INF] thr:46<> loader Requires:SSPP Z 30
2025-07-07 20:49:09.522 +08:00 [INF] thr:46<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 20:49:09.522 +08:00 [INF] thr:46<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 20:49:09.522 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 20:49:10.026 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:49:10.026 +08:00 [INF] thr:46<> loader Requires:SSP Z 1000
2025-07-07 20:49:10.474 +08:00 [INF] thr:46<> loader Requires:OUTP 1 0
2025-07-07 20:49:10.922 +08:00 [INF] thr:46<> loader Requires:OUTP 16 1
2025-07-07 20:49:11.368 +08:00 [INF] thr:46<> loader Requires:OUTP 15 1
2025-07-07 20:49:11.817 +08:00 [INF] thr:46<> loader Requires:OUTP 4 1
2025-07-07 20:49:12.264 +08:00 [INF] thr:46<> loader Requires:OUTP 1 1
2025-07-07 20:49:12.709 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:49:13.663 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:49:14.620 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:49:15.574 +08:00 [INF] thr:46<> loader Requires:INPUT A 4
2025-07-07 20:49:16.024 +08:00 [INF] thr:46<> loader Requires:INPUT A 5
2025-07-07 20:49:16.478 +08:00 [INF] thr:46<> loader Requires:MATS AJ Z 1
2025-07-07 20:49:19.095 +08:00 [INF] thr:46<> loader Requires:SSPP Z 30
2025-07-07 20:49:19.546 +08:00 [INF] thr:46<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 20:49:19.546 +08:00 [INF] thr:46<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 20:49:19.546 +08:00 [INF] thr:46<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 20:49:20.049 +08:00 [INF] thr:46<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:49:20.049 +08:00 [INF] thr:46<> loader Requires:RETH
2025-07-07 20:49:25.085 +08:00 [INF] thr:46<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 20:49:25.087 +08:00 [INF] thr:46<> 执行Aligner角度angle：0
2025-07-07 20:51:36.764 +08:00 [INF] thr:50<> loader Requires:INPUT B 13
2025-07-07 20:51:37.739 +08:00 [INF] thr:34<> 执行Aligner角度angle：0
2025-07-07 20:51:38.743 +08:00 [INF] thr:34<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-07 20:51:38.744 +08:00 [INF] thr:34<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 20:51:38.744 +08:00 [INF] thr:34<> loader Requires:RGRP
2025-07-07 20:51:39.188 +08:00 [INF] thr:34<> CLeanLoader Group Now C
2025-07-07 20:51:39.188 +08:00 [INF] thr:34<> loader Requires:MATS AJ T
2025-07-07 20:51:39.652 +08:00 [INF] thr:34<> loader Requires:SSP Z 4000
2025-07-07 20:51:40.097 +08:00 [INF] thr:34<> loader Requires:MATS AJ Z 1
2025-07-07 20:51:40.576 +08:00 [INF] thr:34<> loader Requires:MOVR R 226000
2025-07-07 20:51:43.171 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 20:51:43.625 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-07 20:51:43.625 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-07 20:51:43.625 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-07 20:51:44.129 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:51:44.129 +08:00 [INF] thr:34<> loader Requires:INPUT A 6
2025-07-07 20:51:44.582 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-07 20:51:45.028 +08:00 [INF] thr:34<> loader Requires:OUTP 16 1
2025-07-07 20:51:45.476 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-07 20:51:45.925 +08:00 [INF] thr:34<> loader Requires:OUTP 4 1
2025-07-07 20:51:46.375 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-07 20:51:46.822 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:51:47.276 +08:00 [INF] thr:34<> loader Requires:MATS AJ R 0
2025-07-07 20:51:50.526 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-07 20:51:50.526 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-07 20:51:50.526 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-07 20:51:51.029 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:51:51.029 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 20:51:51.478 +08:00 [INF] thr:34<> loader Requires:MATS AJ Z 0
2025-07-07 20:51:54.090 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 20:51:54.539 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-07 20:51:54.539 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-07 20:51:54.539 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-07 20:51:55.042 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:51:55.042 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 20:51:55.491 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-07 20:51:55.938 +08:00 [INF] thr:34<> loader Requires:OUTP 16 0
2025-07-07 20:51:56.386 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-07 20:51:56.835 +08:00 [INF] thr:34<> loader Requires:OUTP 4 0
2025-07-07 20:51:57.281 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-07 20:51:57.727 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:51:58.682 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:51:59.638 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:00.592 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:01.545 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:02.503 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:02.961 +08:00 [INF] thr:34<> loader Requires:INPUT A 5
2025-07-07 20:52:03.414 +08:00 [INF] thr:34<> loader Requires:MATS AJ Z 1
2025-07-07 20:52:06.031 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 20:52:06.482 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-07 20:52:06.482 +08:00 [INF] thr:34<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-07 20:52:06.482 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-07 20:52:06.990 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:52:06.990 +08:00 [INF] thr:34<> loader Requires:RETH
2025-07-07 20:52:12.030 +08:00 [INF] thr:34<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-07 20:52:12.032 +08:00 [INF] thr:34<> AOI is Ready
2025-07-07 20:52:12.095 +08:00 [INF] thr:34<> SetVelocity, Axis:X, velocity:50
2025-07-07 20:52:12.102 +08:00 [INF] thr:34<> SetVelocity, Axis:Y, velocity:50
2025-07-07 20:52:12.155 +08:00 [INF] thr:34<> SetVelocity, Axis:X, velocity:20
2025-07-07 20:52:12.162 +08:00 [INF] thr:34<> SetVelocity, Axis:Y, velocity:20
2025-07-07 20:52:12.196 +08:00 [INF] thr:34<> stage move to position action ok
2025-07-07 20:52:12.196 +08:00 [INF] thr:34<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-07 20:52:12.196 +08:00 [INF] thr:34<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 20:52:12.196 +08:00 [INF] thr:34<> loader Requires:RGRP
2025-07-07 20:52:12.646 +08:00 [INF] thr:34<> CLeanLoader Group Now C
2025-07-07 20:52:12.646 +08:00 [INF] thr:34<> loader Requires:MATS AK T
2025-07-07 20:52:16.187 +08:00 [INF] thr:34<> loader Requires:SSP Z 4000
2025-07-07 20:52:16.636 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 1
2025-07-07 20:52:23.654 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 20:52:24.109 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-07 20:52:24.109 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-07 20:52:24.109 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-07 20:52:24.611 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:52:24.611 +08:00 [INF] thr:34<> loader Requires:INPUT A 6
2025-07-07 20:52:25.070 +08:00 [INF] thr:34<> loader Requires:MATS AK R 0
2025-07-07 20:52:30.350 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-07 20:52:30.350 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片请求
2025-07-07 20:52:30.350 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-07 20:52:30.856 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:52:30.856 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 20:52:31.305 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 0
2025-07-07 20:52:34.017 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 20:52:34.487 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-07 20:52:34.487 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-07 20:52:34.487 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-07 20:52:34.991 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:52:34.991 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-07 20:52:35.438 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-07 20:52:35.885 +08:00 [INF] thr:34<> loader Requires:OUTP 16 1
2025-07-07 20:52:36.333 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-07 20:52:36.782 +08:00 [INF] thr:34<> loader Requires:OUTP 4 1
2025-07-07 20:52:37.229 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-07 20:52:37.675 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:38.629 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:39.586 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:40.540 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-07 20:52:40.995 +08:00 [INF] thr:34<> loader Requires:INPUT A 5
2025-07-07 20:52:41.447 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 1
2025-07-07 20:52:44.165 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-07 20:52:44.615 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-07 20:52:44.615 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-07 20:52:44.615 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-07 20:52:45.621 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 20:52:45.621 +08:00 [INF] thr:34<> loader Requires:RETH
2025-07-07 20:52:50.891 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-07 21:25:20.125 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:56598
2025-07-07 21:30:31.553 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:58069
2025-07-07 22:04:17.768 +08:00 [INF] thr:84<> loader Requires:INPUT B 13
2025-07-07 22:04:19.276 +08:00 [INF] thr:64<> AOI is Ready
2025-07-07 22:04:24.060 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-07 22:04:24.063 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-07 22:04:27.970 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:8
2025-07-07 22:04:27.973 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:8
2025-07-07 22:04:27.988 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-07 22:04:27.989 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-07 22:04:27.989 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 22:04:27.989 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-07 22:04:28.431 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-07 22:04:28.431 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-07 22:04:28.889 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-07 22:04:29.337 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-07 22:04:29.810 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-07 22:04:30.259 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-07 22:04:30.259 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-07 22:04:30.259 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-07 22:04:30.761 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:04:30.761 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-07 22:04:31.213 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-07 22:04:31.660 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-07 22:04:32.107 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-07 22:04:32.555 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-07 22:04:33.002 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-07 22:04:33.448 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:33.901 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-07 22:04:39.183 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-07 22:04:39.183 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片请求
2025-07-07 22:04:39.183 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-07 22:04:39.686 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:04:39.686 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-07 22:04:40.132 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-07 22:04:42.849 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-07 22:04:43.314 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-07 22:04:43.314 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-07 22:04:43.314 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-07 22:04:43.819 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:04:43.819 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-07 22:04:44.269 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-07 22:04:44.716 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-07 22:04:45.162 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-07 22:04:45.609 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-07 22:04:46.062 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-07 22:04:46.506 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:47.462 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:48.418 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:49.371 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:50.325 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:51.277 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-07 22:04:51.729 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-07 22:04:52.182 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-07 22:04:54.900 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-07 22:04:55.350 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-07 22:04:55.350 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-07 22:04:55.350 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-07 22:04:55.852 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:04:55.852 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-07 22:05:01.117 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-07 22:05:01.119 +08:00 [INF] thr:10<> 执行Aligner设置初始角度InitialAngle：0
2025-07-07 22:05:01.119 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-07 22:05:02.125 +08:00 [INF] thr:10<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-07 22:05:02.126 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-07 22:05:02.126 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-07 22:05:02.567 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-07 22:05:02.568 +08:00 [INF] thr:10<> loader Requires:MATS AJ T
2025-07-07 22:05:06.110 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-07 22:05:06.558 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-07 22:05:13.577 +08:00 [INF] thr:10<> loader Requires:MOVR R 226000
2025-07-07 22:05:16.172 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-07 22:05:16.622 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-07 22:05:16.622 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-07 22:05:16.622 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-07 22:05:17.125 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:05:17.125 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-07 22:05:17.585 +08:00 [INF] thr:10<> loader Requires:MATS AJ R 0
2025-07-07 22:05:20.833 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-07 22:05:20.833 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-07 22:05:20.833 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-07 22:05:21.336 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:05:21.336 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-07 22:05:21.782 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 0
2025-07-07 22:05:24.394 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-07 22:05:24.844 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-07 22:05:24.844 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-07 22:05:24.844 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-07 22:05:25.348 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:05:25.348 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-07 22:05:25.796 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-07 22:05:26.243 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-07 22:05:26.691 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-07 22:05:27.139 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-07 22:05:27.585 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-07 22:05:28.031 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-07 22:05:28.985 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-07 22:05:29.939 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-07 22:05:30.892 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-07 22:05:31.343 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-07 22:05:31.797 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-07 22:05:34.414 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-07 22:05:34.865 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-07 22:05:34.865 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-07 22:05:34.865 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-07 22:05:35.367 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-07 22:05:35.367 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-07 22:05:40.404 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-07 22:05:40.409 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-08 09:26:40.588 +08:00 [INF] thr:73<> loader Requires:INPUT B 13
2025-07-08 09:26:41.569 +08:00 [INF] thr:79<> 执行Aligner角度angle：0
2025-07-08 09:26:42.575 +08:00 [INF] thr:79<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 09:26:42.576 +08:00 [INF] thr:79<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 09:26:42.576 +08:00 [INF] thr:79<> loader Requires:RGRP
2025-07-08 09:26:43.020 +08:00 [INF] thr:79<> CLeanLoader Group Now C
2025-07-08 09:26:43.020 +08:00 [INF] thr:79<> loader Requires:MATS AJ T
2025-07-08 09:26:43.481 +08:00 [INF] thr:79<> loader Requires:SSP Z 4000
2025-07-08 09:26:43.931 +08:00 [INF] thr:79<> loader Requires:MATS AJ Z 1
2025-07-08 09:26:44.404 +08:00 [INF] thr:79<> loader Requires:MOVR R 226000
2025-07-08 09:26:47.000 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 09:26:47.457 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 09:26:47.457 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 09:26:47.457 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 09:26:47.962 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:26:47.962 +08:00 [INF] thr:79<> loader Requires:INPUT A 6
2025-07-08 09:26:48.415 +08:00 [INF] thr:79<> loader Requires:OUTP 1 0
2025-07-08 09:26:48.862 +08:00 [INF] thr:79<> loader Requires:OUTP 16 1
2025-07-08 09:26:49.309 +08:00 [INF] thr:79<> loader Requires:OUTP 15 1
2025-07-08 09:26:49.758 +08:00 [INF] thr:79<> loader Requires:OUTP 4 1
2025-07-08 09:26:50.205 +08:00 [INF] thr:79<> loader Requires:OUTP 1 1
2025-07-08 09:26:50.650 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:26:51.103 +08:00 [INF] thr:79<> loader Requires:MATS AJ R 0
2025-07-08 09:26:54.352 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 09:26:54.352 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 09:26:54.352 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 09:26:54.856 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:26:54.856 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 09:26:55.309 +08:00 [INF] thr:79<> loader Requires:MATS AJ Z 0
2025-07-08 09:26:57.919 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 09:26:58.368 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 09:26:58.368 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 09:26:58.369 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 09:26:58.873 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:26:58.873 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 09:26:59.321 +08:00 [INF] thr:79<> loader Requires:OUTP 1 0
2025-07-08 09:26:59.768 +08:00 [INF] thr:79<> loader Requires:OUTP 16 0
2025-07-08 09:27:00.215 +08:00 [INF] thr:79<> loader Requires:OUTP 15 1
2025-07-08 09:27:00.663 +08:00 [INF] thr:79<> loader Requires:OUTP 4 0
2025-07-08 09:27:01.111 +08:00 [INF] thr:79<> loader Requires:OUTP 1 1
2025-07-08 09:27:01.557 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:02.511 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:03.467 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:04.420 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:05.373 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:06.326 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:06.777 +08:00 [INF] thr:79<> loader Requires:INPUT A 5
2025-07-08 09:27:07.231 +08:00 [INF] thr:79<> loader Requires:MATS AJ Z 1
2025-07-08 09:27:09.849 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 09:27:10.298 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 09:27:10.298 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 09:27:10.298 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 09:27:10.802 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:27:10.802 +08:00 [INF] thr:79<> loader Requires:RETH
2025-07-08 09:27:15.838 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 09:27:15.840 +08:00 [INF] thr:79<> AOI is Ready
2025-07-08 09:27:15.904 +08:00 [INF] thr:79<> SetVelocity, Axis:X, velocity:50
2025-07-08 09:27:15.907 +08:00 [INF] thr:79<> SetVelocity, Axis:Y, velocity:50
2025-07-08 09:27:15.944 +08:00 [INF] thr:79<> SetVelocity, Axis:X, velocity:8
2025-07-08 09:27:15.947 +08:00 [INF] thr:79<> SetVelocity, Axis:Y, velocity:8
2025-07-08 09:27:15.963 +08:00 [INF] thr:79<> stage move to position action ok
2025-07-08 09:27:15.964 +08:00 [INF] thr:79<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 09:27:15.964 +08:00 [INF] thr:79<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 09:27:15.964 +08:00 [INF] thr:79<> loader Requires:RGRP
2025-07-08 09:27:16.406 +08:00 [INF] thr:79<> CLeanLoader Group Now C
2025-07-08 09:27:16.406 +08:00 [INF] thr:79<> loader Requires:MATS AK T
2025-07-08 09:27:19.949 +08:00 [INF] thr:79<> loader Requires:SSP Z 4000
2025-07-08 09:27:20.396 +08:00 [INF] thr:79<> loader Requires:MATS AK Z 1
2025-07-08 09:27:27.415 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 09:27:27.864 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 09:27:27.864 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 09:27:27.864 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 09:27:28.368 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:27:28.368 +08:00 [INF] thr:79<> loader Requires:INPUT A 6
2025-07-08 09:27:28.822 +08:00 [INF] thr:79<> loader Requires:MATS AK R 0
2025-07-08 09:27:34.104 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 09:27:34.104 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 09:27:34.105 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 09:27:34.608 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:27:34.608 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 09:27:35.055 +08:00 [INF] thr:79<> loader Requires:MATS AK Z 0
2025-07-08 09:27:37.766 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 09:27:38.232 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 09:27:38.232 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 09:27:38.232 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 09:27:38.736 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:27:38.736 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 09:27:39.184 +08:00 [INF] thr:79<> loader Requires:OUTP 1 0
2025-07-08 09:27:39.636 +08:00 [INF] thr:79<> loader Requires:OUTP 16 1
2025-07-08 09:27:40.082 +08:00 [INF] thr:79<> loader Requires:OUTP 15 1
2025-07-08 09:27:40.531 +08:00 [INF] thr:79<> loader Requires:OUTP 4 1
2025-07-08 09:27:40.978 +08:00 [INF] thr:79<> loader Requires:OUTP 1 1
2025-07-08 09:27:41.432 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:42.389 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:43.343 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:44.295 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 09:27:44.747 +08:00 [INF] thr:79<> loader Requires:INPUT A 5
2025-07-08 09:27:45.200 +08:00 [INF] thr:79<> loader Requires:MATS AK Z 1
2025-07-08 09:27:47.917 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 09:27:48.368 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 09:27:48.368 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 09:27:48.368 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 09:27:49.372 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 09:27:49.372 +08:00 [INF] thr:79<> loader Requires:RETH
2025-07-08 09:27:54.635 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 10:34:50.702 +08:00 [INF] thr:53<> loader Requires:INPUT B 13
2025-07-08 10:34:52.165 +08:00 [INF] thr:80<> AOI is Ready
2025-07-08 10:34:56.215 +08:00 [INF] thr:80<> SetVelocity, Axis:X, velocity:50
2025-07-08 10:34:56.218 +08:00 [INF] thr:80<> SetVelocity, Axis:Y, velocity:50
2025-07-08 10:35:00.167 +08:00 [INF] thr:80<> SetVelocity, Axis:X, velocity:60
2025-07-08 10:35:00.171 +08:00 [INF] thr:80<> SetVelocity, Axis:Y, velocity:60
2025-07-08 10:35:00.187 +08:00 [INF] thr:80<> stage move to position action ok
2025-07-08 10:35:00.187 +08:00 [INF] thr:80<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-08 10:35:00.188 +08:00 [INF] thr:80<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 10:35:00.188 +08:00 [INF] thr:80<> loader Requires:RGRP
2025-07-08 10:35:00.633 +08:00 [INF] thr:80<> CLeanLoader Group Now C
2025-07-08 10:35:00.633 +08:00 [INF] thr:80<> loader Requires:MATS AK T
2025-07-08 10:35:01.092 +08:00 [INF] thr:80<> loader Requires:SSP Z 4000
2025-07-08 10:35:01.540 +08:00 [INF] thr:80<> loader Requires:MATS AK Z 1
2025-07-08 10:35:02.012 +08:00 [INF] thr:80<> loader Requires:SSPP Z 30
2025-07-08 10:35:02.468 +08:00 [INF] thr:80<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-08 10:35:02.468 +08:00 [INF] thr:80<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-08 10:35:02.468 +08:00 [INF] thr:80<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-08 10:35:02.972 +08:00 [INF] thr:80<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:02.972 +08:00 [INF] thr:80<> loader Requires:INPUT A 6
2025-07-08 10:35:03.424 +08:00 [INF] thr:80<> loader Requires:OUTP 1 0
2025-07-08 10:35:03.869 +08:00 [INF] thr:80<> loader Requires:OUTP 16 1
2025-07-08 10:35:04.317 +08:00 [INF] thr:80<> loader Requires:OUTP 15 1
2025-07-08 10:35:04.766 +08:00 [INF] thr:80<> loader Requires:OUTP 4 1
2025-07-08 10:35:05.217 +08:00 [INF] thr:80<> loader Requires:OUTP 1 1
2025-07-08 10:35:05.662 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:06.115 +08:00 [INF] thr:80<> loader Requires:MATS AK R 0
2025-07-08 10:35:11.405 +08:00 [INF] thr:80<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-08 10:35:11.405 +08:00 [INF] thr:80<> Station:InspectStageA,SafeCheck:下片请求
2025-07-08 10:35:11.405 +08:00 [INF] thr:80<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-08 10:35:11.909 +08:00 [INF] thr:80<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:11.909 +08:00 [INF] thr:80<> loader Requires:SSP Z 1000
2025-07-08 10:35:12.355 +08:00 [INF] thr:80<> loader Requires:MATS AK Z 0
2025-07-08 10:35:15.068 +08:00 [INF] thr:80<> loader Requires:SSPP Z 30
2025-07-08 10:35:15.539 +08:00 [INF] thr:80<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-08 10:35:15.539 +08:00 [INF] thr:80<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-08 10:35:15.539 +08:00 [INF] thr:80<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-08 10:35:16.043 +08:00 [INF] thr:80<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:16.043 +08:00 [INF] thr:80<> loader Requires:SSP Z 1000
2025-07-08 10:35:16.489 +08:00 [INF] thr:80<> loader Requires:OUTP 1 0
2025-07-08 10:35:16.938 +08:00 [INF] thr:80<> loader Requires:OUTP 16 0
2025-07-08 10:35:17.388 +08:00 [INF] thr:80<> loader Requires:OUTP 15 1
2025-07-08 10:35:17.841 +08:00 [INF] thr:80<> loader Requires:OUTP 4 0
2025-07-08 10:35:18.290 +08:00 [INF] thr:80<> loader Requires:OUTP 1 1
2025-07-08 10:35:18.736 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:19.690 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:20.642 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:21.600 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:22.554 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:23.506 +08:00 [INF] thr:80<> loader Requires:INPUT A 4
2025-07-08 10:35:23.958 +08:00 [INF] thr:80<> loader Requires:INPUT A 5
2025-07-08 10:35:24.411 +08:00 [INF] thr:80<> loader Requires:MATS AK Z 1
2025-07-08 10:35:27.128 +08:00 [INF] thr:80<> loader Requires:SSPP Z 30
2025-07-08 10:35:27.583 +08:00 [INF] thr:80<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-08 10:35:27.583 +08:00 [INF] thr:80<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-08 10:35:27.583 +08:00 [INF] thr:80<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-08 10:35:28.086 +08:00 [INF] thr:80<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:28.086 +08:00 [INF] thr:80<> loader Requires:RETH
2025-07-08 10:35:33.350 +08:00 [INF] thr:80<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-08 10:35:33.351 +08:00 [INF] thr:15<> 执行Aligner设置初始角度InitialAngle：0
2025-07-08 10:35:33.351 +08:00 [INF] thr:15<> 执行Aligner角度angle：0
2025-07-08 10:35:34.357 +08:00 [INF] thr:15<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-08 10:35:34.358 +08:00 [INF] thr:15<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 10:35:34.358 +08:00 [INF] thr:15<> loader Requires:RGRP
2025-07-08 10:35:34.798 +08:00 [INF] thr:15<> CLeanLoader Group Now C
2025-07-08 10:35:34.798 +08:00 [INF] thr:15<> loader Requires:MATS AJ T
2025-07-08 10:35:38.344 +08:00 [INF] thr:15<> loader Requires:SSP Z 4000
2025-07-08 10:35:38.793 +08:00 [INF] thr:15<> loader Requires:MATS AJ Z 1
2025-07-08 10:35:45.808 +08:00 [INF] thr:15<> loader Requires:MOVR R 226000
2025-07-08 10:35:48.403 +08:00 [INF] thr:15<> loader Requires:SSPP Z 30
2025-07-08 10:35:48.853 +08:00 [INF] thr:15<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-08 10:35:48.853 +08:00 [INF] thr:15<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-08 10:35:48.853 +08:00 [INF] thr:15<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-08 10:35:49.357 +08:00 [INF] thr:15<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:49.357 +08:00 [INF] thr:15<> loader Requires:INPUT A 6
2025-07-08 10:35:49.811 +08:00 [INF] thr:15<> loader Requires:MATS AJ R 0
2025-07-08 10:35:53.059 +08:00 [INF] thr:15<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-08 10:35:53.059 +08:00 [INF] thr:15<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-08 10:35:53.059 +08:00 [INF] thr:15<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-08 10:35:53.563 +08:00 [INF] thr:15<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:53.563 +08:00 [INF] thr:15<> loader Requires:SSP Z 1000
2025-07-08 10:35:54.011 +08:00 [INF] thr:15<> loader Requires:MATS AJ Z 0
2025-07-08 10:35:56.627 +08:00 [INF] thr:15<> loader Requires:SSPP Z 30
2025-07-08 10:35:57.077 +08:00 [INF] thr:15<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-08 10:35:57.077 +08:00 [INF] thr:15<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-08 10:35:57.077 +08:00 [INF] thr:15<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-08 10:35:57.581 +08:00 [INF] thr:15<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:35:57.581 +08:00 [INF] thr:15<> loader Requires:SSP Z 1000
2025-07-08 10:35:58.028 +08:00 [INF] thr:15<> loader Requires:OUTP 1 0
2025-07-08 10:35:58.475 +08:00 [INF] thr:15<> loader Requires:OUTP 16 1
2025-07-08 10:35:58.922 +08:00 [INF] thr:15<> loader Requires:OUTP 15 1
2025-07-08 10:35:59.371 +08:00 [INF] thr:15<> loader Requires:OUTP 4 1
2025-07-08 10:35:59.819 +08:00 [INF] thr:15<> loader Requires:OUTP 1 1
2025-07-08 10:36:00.264 +08:00 [INF] thr:15<> loader Requires:INPUT A 4
2025-07-08 10:36:01.221 +08:00 [INF] thr:15<> loader Requires:INPUT A 4
2025-07-08 10:36:02.174 +08:00 [INF] thr:15<> loader Requires:INPUT A 4
2025-07-08 10:36:03.128 +08:00 [INF] thr:15<> loader Requires:INPUT A 4
2025-07-08 10:36:03.582 +08:00 [INF] thr:15<> loader Requires:INPUT A 5
2025-07-08 10:36:04.035 +08:00 [INF] thr:15<> loader Requires:MATS AJ Z 1
2025-07-08 10:36:06.652 +08:00 [INF] thr:15<> loader Requires:SSPP Z 30
2025-07-08 10:36:07.103 +08:00 [INF] thr:15<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-08 10:36:07.103 +08:00 [INF] thr:15<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-08 10:36:07.103 +08:00 [INF] thr:15<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-08 10:36:07.607 +08:00 [INF] thr:15<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:36:07.607 +08:00 [INF] thr:15<> loader Requires:RETH
2025-07-08 10:36:12.642 +08:00 [INF] thr:15<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-08 10:36:12.644 +08:00 [INF] thr:15<> 执行Aligner角度angle：0
2025-07-08 10:38:17.919 +08:00 [INF] thr:44<> loader Requires:INPUT B 13
2025-07-08 10:38:18.892 +08:00 [INF] thr:79<> 执行Aligner角度angle：0
2025-07-08 10:38:19.900 +08:00 [INF] thr:79<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 10:38:19.900 +08:00 [INF] thr:79<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 10:38:19.900 +08:00 [INF] thr:79<> loader Requires:RGRP
2025-07-08 10:38:20.344 +08:00 [INF] thr:79<> CLeanLoader Group Now C
2025-07-08 10:38:20.344 +08:00 [INF] thr:79<> loader Requires:MATS AJ T
2025-07-08 10:38:20.806 +08:00 [INF] thr:79<> loader Requires:SSP Z 4000
2025-07-08 10:38:21.254 +08:00 [INF] thr:79<> loader Requires:MATS AJ Z 1
2025-07-08 10:38:21.726 +08:00 [INF] thr:79<> loader Requires:MOVR R 226000
2025-07-08 10:38:24.320 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 10:38:24.770 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 10:38:24.770 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 10:38:24.770 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 10:38:25.275 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:38:25.275 +08:00 [INF] thr:79<> loader Requires:INPUT A 6
2025-07-08 10:38:25.728 +08:00 [INF] thr:79<> loader Requires:OUTP 1 0
2025-07-08 10:38:26.174 +08:00 [INF] thr:79<> loader Requires:OUTP 16 1
2025-07-08 10:38:26.622 +08:00 [INF] thr:79<> loader Requires:OUTP 15 1
2025-07-08 10:38:27.073 +08:00 [INF] thr:79<> loader Requires:OUTP 4 1
2025-07-08 10:38:27.520 +08:00 [INF] thr:79<> loader Requires:OUTP 1 1
2025-07-08 10:38:27.967 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:28.418 +08:00 [INF] thr:79<> loader Requires:MATS AJ R 0
2025-07-08 10:38:31.668 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 10:38:31.668 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 10:38:31.668 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 10:38:32.171 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:38:32.171 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 10:38:32.620 +08:00 [INF] thr:79<> loader Requires:MATS AJ Z 0
2025-07-08 10:38:35.232 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 10:38:35.682 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 10:38:35.682 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 10:38:35.682 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 10:38:36.186 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:38:36.186 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 10:38:36.633 +08:00 [INF] thr:79<> loader Requires:OUTP 1 0
2025-07-08 10:38:37.080 +08:00 [INF] thr:79<> loader Requires:OUTP 16 0
2025-07-08 10:38:37.527 +08:00 [INF] thr:79<> loader Requires:OUTP 15 1
2025-07-08 10:38:37.976 +08:00 [INF] thr:79<> loader Requires:OUTP 4 0
2025-07-08 10:38:38.423 +08:00 [INF] thr:79<> loader Requires:OUTP 1 1
2025-07-08 10:38:38.869 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:39.823 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:40.774 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:41.728 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:42.681 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:43.634 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:38:44.085 +08:00 [INF] thr:79<> loader Requires:INPUT A 5
2025-07-08 10:38:44.539 +08:00 [INF] thr:79<> loader Requires:MATS AJ Z 1
2025-07-08 10:38:47.156 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 10:38:47.607 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 10:38:47.607 +08:00 [INF] thr:79<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 10:38:47.607 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 10:38:48.111 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:38:48.111 +08:00 [INF] thr:79<> loader Requires:RETH
2025-07-08 10:38:53.145 +08:00 [INF] thr:79<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 10:38:53.148 +08:00 [INF] thr:79<> AOI is Ready
2025-07-08 10:38:53.212 +08:00 [INF] thr:79<> SetVelocity, Axis:X, velocity:50
2025-07-08 10:38:53.215 +08:00 [INF] thr:79<> SetVelocity, Axis:Y, velocity:50
2025-07-08 10:38:53.256 +08:00 [INF] thr:79<> SetVelocity, Axis:X, velocity:60
2025-07-08 10:38:53.259 +08:00 [INF] thr:79<> SetVelocity, Axis:Y, velocity:60
2025-07-08 10:38:53.275 +08:00 [INF] thr:79<> stage move to position action ok
2025-07-08 10:38:53.275 +08:00 [INF] thr:79<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 10:38:53.276 +08:00 [INF] thr:79<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 10:38:53.276 +08:00 [INF] thr:79<> loader Requires:RGRP
2025-07-08 10:38:53.721 +08:00 [INF] thr:79<> CLeanLoader Group Now C
2025-07-08 10:38:53.721 +08:00 [INF] thr:79<> loader Requires:MATS AK T
2025-07-08 10:38:57.263 +08:00 [INF] thr:79<> loader Requires:SSP Z 4000
2025-07-08 10:38:57.712 +08:00 [INF] thr:79<> loader Requires:MATS AK Z 1
2025-07-08 10:39:04.730 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 10:39:05.180 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 10:39:05.181 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 10:39:05.181 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 10:39:05.684 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:39:05.684 +08:00 [INF] thr:79<> loader Requires:INPUT A 6
2025-07-08 10:39:06.139 +08:00 [INF] thr:79<> loader Requires:MATS AK R 0
2025-07-08 10:39:11.419 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 10:39:11.419 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 10:39:11.419 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 10:39:11.921 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:39:11.921 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 10:39:12.370 +08:00 [INF] thr:79<> loader Requires:MATS AK Z 0
2025-07-08 10:39:15.082 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 10:39:15.550 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 10:39:15.550 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 10:39:15.550 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 10:39:16.054 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:39:16.054 +08:00 [INF] thr:79<> loader Requires:SSP Z 1000
2025-07-08 10:39:16.502 +08:00 [INF] thr:79<> loader Requires:OUTP 1 0
2025-07-08 10:39:16.949 +08:00 [INF] thr:79<> loader Requires:OUTP 16 1
2025-07-08 10:39:17.396 +08:00 [INF] thr:79<> loader Requires:OUTP 15 1
2025-07-08 10:39:17.845 +08:00 [INF] thr:79<> loader Requires:OUTP 4 1
2025-07-08 10:39:18.292 +08:00 [INF] thr:79<> loader Requires:OUTP 1 1
2025-07-08 10:39:18.741 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:39:19.695 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:39:20.647 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:39:21.602 +08:00 [INF] thr:79<> loader Requires:INPUT A 4
2025-07-08 10:39:22.054 +08:00 [INF] thr:79<> loader Requires:INPUT A 5
2025-07-08 10:39:22.507 +08:00 [INF] thr:79<> loader Requires:MATS AK Z 1
2025-07-08 10:39:25.224 +08:00 [INF] thr:79<> loader Requires:SSPP Z 30
2025-07-08 10:39:25.675 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 10:39:25.675 +08:00 [INF] thr:79<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 10:39:25.675 +08:00 [INF] thr:79<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 10:39:26.683 +08:00 [INF] thr:79<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 10:39:26.683 +08:00 [INF] thr:79<> loader Requires:RETH
2025-07-08 10:39:31.947 +08:00 [INF] thr:79<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 11:43:03.506 +08:00 [INF] thr:43<> loader Requires:INPUT B 13
2025-07-08 11:43:04.967 +08:00 [INF] thr:15<> AOI is Ready
2025-07-08 11:46:04.067 +08:00 [INF] thr:34<> loader Requires:INPUT B 13
2025-07-08 11:46:05.027 +08:00 [INF] thr:80<> AOI is Ready
2025-07-08 11:48:35.150 +08:00 [INF] thr:64<> CleanLoader Init Start
2025-07-08 11:48:35.150 +08:00 [INF] thr:64<> loader Requires:RSIO 13
2025-07-08 11:48:35.605 +08:00 [INF] thr:64<> loader Requires:INPUT B 13
2025-07-08 11:48:36.060 +08:00 [INF] thr:64<> loader Requires:REMS
2025-07-08 11:48:36.504 +08:00 [INF] thr:64<> loader Requires:VER
2025-07-08 11:48:36.952 +08:00 [INF] thr:64<> HIWIN loader Version:1.86.0.77
2025-07-08 11:48:36.952 +08:00 [INF] thr:64<> loader Requires:SVON
2025-07-08 11:48:37.407 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-08 11:48:37.861 +08:00 [INF] thr:64<> loader Requires:INPUT A 9
2025-07-08 11:48:38.314 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 11:48:38.761 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-08 11:48:39.208 +08:00 [INF] thr:64<> loader Requires:HOM
2025-07-08 11:48:42.560 +08:00 [INF] thr:64<> loader Requires:ERR 0
2025-07-08 11:49:14.115 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-07-08 11:49:14.156 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-08 11:49:14.157 +08:00 [INF] thr:4<> Start init SafeController
2025-07-08 11:49:14.167 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-08 11:49:14.168 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-08 11:49:14.168 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-08 11:49:14.169 +08:00 [INF] thr:10<> Start init Buffer
2025-07-08 11:49:14.340 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-08 11:49:14.345 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-08 11:49:15.369 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-08 11:49:15.829 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-08 11:49:16.331 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-08 13:34:54.068 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-07-08 13:34:54.108 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-08 13:34:54.108 +08:00 [INF] thr:4<> Start init SafeController
2025-07-08 13:34:54.118 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-08 13:34:54.119 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-08 13:34:54.120 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-08 13:34:54.120 +08:00 [INF] thr:5<> Start init Buffer
2025-07-08 13:34:54.275 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-08 13:34:54.280 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-08 13:34:54.412 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-08 13:34:54.872 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-08 13:34:55.363 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-08 13:35:25.475 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-07-08 13:35:25.514 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-08 13:35:25.515 +08:00 [INF] thr:4<> Start init SafeController
2025-07-08 13:35:25.525 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-08 13:35:25.525 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-08 13:35:25.526 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-08 13:35:25.527 +08:00 [INF] thr:10<> Start init Buffer
2025-07-08 13:35:25.682 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-08 13:35:25.687 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-08 13:35:25.803 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-08 13:35:26.262 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-08 13:35:26.751 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-08 13:36:58.849 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-07-08 13:36:58.888 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-08 13:36:58.888 +08:00 [INF] thr:4<> Start init SafeController
2025-07-08 13:36:58.898 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-08 13:36:58.898 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-08 13:36:58.899 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-08 13:36:58.900 +08:00 [INF] thr:10<> Start init Buffer
2025-07-08 13:36:59.057 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-08 13:36:59.062 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-08 13:36:59.085 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-08 13:36:59.546 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-08 13:37:00.000 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-08 13:37:00.442 +08:00 [INF] thr:4<> loader Requires:VER
2025-07-08 13:37:00.891 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-07-08 13:37:00.891 +08:00 [INF] thr:4<> loader Requires:SVON
2025-07-08 13:37:01.342 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-08 13:37:01.797 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-07-08 13:37:02.250 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-08 13:37:02.696 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-08 13:37:03.143 +08:00 [INF] thr:4<> loader Requires:HOM
2025-07-08 13:37:35.446 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-07-08 13:37:35.975 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-07-08 13:37:36.446 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-07-08 13:37:36.447 +08:00 [INF] thr:12<> StageProxy Init Start
2025-07-08 13:37:36.447 +08:00 [INF] thr:11<> LoadPortProxy Init Start
2025-07-08 13:37:36.447 +08:00 [INF] thr:13<> AlignerProxy Init Start
2025-07-08 13:37:36.447 +08:00 [INF] thr:14<> AirBlowerProxy Init Start
2025-07-08 13:37:36.449 +08:00 [INF] thr:14<> AirBlowerProxy Init Finished
2025-07-08 13:37:36.453 +08:00 [INF] thr:11<> CassettA 开始Connect
2025-07-08 13:37:36.453 +08:00 [INF] thr:11<> Component.LoadPort.SmifV2 Position:CassettA
2025-07-08 13:37:36.480 +08:00 [INF] thr:11<> 开始Home
2025-07-08 13:37:37.986 +08:00 [INF] thr:13<> AlignerProxy Init Finished
2025-07-08 13:37:39.815 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-07-08 13:37:39.817 +08:00 [INF] thr:12<> GetHomeHash:-306607512,NowHomeHash:-306607512
2025-07-08 13:37:39.818 +08:00 [INF] thr:12<> stage Home:1
2025-07-08 13:37:39.825 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-07-08 13:37:39.825 +08:00 [INF] thr:12<> AOIType:4
2025-07-08 13:37:39.827 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-07-08 13:37:39.827 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-07-08 13:37:39.829 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-78.2，right [RLIMIT]:77.3
2025-07-08 13:37:39.830 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-07-08 13:37:39.831 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-07-08 13:37:39.832 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-07-08 13:37:39.832 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-07-08 13:37:39.834 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-181，right [RLIMIT]:81
2025-07-08 13:37:39.835 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-07-08 13:37:39.839 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-07-08 13:37:39.839 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-07-08 13:37:39.840 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-100，right [RLIMIT]:100
2025-07-08 13:37:39.841 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-07-08 13:37:39.847 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-07-08 13:37:39.847 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-07-08 13:37:39.850 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-1，right [RLIMIT]:1
2025-07-08 13:37:39.858 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEK_AOI\VPTEKCONFIG\ACSStandardConfig.json
2025-07-08 13:37:39.865 +08:00 [INF] thr:12<> EjectedPosition X:-0.5，Y:-160，Z:0
2025-07-08 13:37:39.865 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-07-08 13:37:39.866 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-07-08 13:37:39.876 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-07-08 13:37:39.888 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-07-08 13:37:40.025 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-07-08 13:37:44.811 +08:00 [INF] thr:11<> BoxExist:True
2025-07-08 13:37:44.811 +08:00 [INF] thr:11<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-08 13:37:44.891 +08:00 [INF] thr:11<> LoadPortProxy Init Finished
2025-07-08 13:37:44.901 +08:00 [INF] thr:12<> 开始Home
2025-07-08 13:37:44.918 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-08 13:37:53.335 +08:00 [INF] thr:12<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-08 13:37:53.337 +08:00 [INF] thr:4<> CassettA Absence
2025-07-08 13:37:53.339 +08:00 [INF] thr:11<> CassettA Unloaded
2025-07-08 13:40:10.625 +08:00 [INF] thr:29<> loader Requires:INPUT B 13
2025-07-08 13:40:11.631 +08:00 [INF] thr:17<> 执行Aligner角度angle：0
2025-07-08 13:40:12.656 +08:00 [INF] thr:17<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 13:40:12.657 +08:00 [INF] thr:17<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 13:40:12.659 +08:00 [INF] thr:17<> loader Requires:RGRP
2025-07-08 13:40:13.101 +08:00 [INF] thr:17<> CLeanLoader Group Now C
2025-07-08 13:40:13.102 +08:00 [INF] thr:17<> loader Requires:MATS AJ T
2025-07-08 13:40:15.979 +08:00 [INF] thr:17<> loader Requires:SSP Z 4000
2025-07-08 13:40:16.427 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-08 13:40:19.305 +08:00 [INF] thr:17<> loader Requires:MOVR R 226000
2025-07-08 13:40:21.899 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-08 13:40:22.353 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 13:40:22.353 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 13:40:22.354 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 13:40:22.857 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:40:22.857 +08:00 [INF] thr:17<> loader Requires:INPUT A 6
2025-07-08 13:40:23.310 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-08 13:40:23.757 +08:00 [INF] thr:17<> loader Requires:OUTP 16 1
2025-07-08 13:40:24.203 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-08 13:40:24.652 +08:00 [INF] thr:17<> loader Requires:OUTP 4 1
2025-07-08 13:40:25.099 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-08 13:40:25.544 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:25.997 +08:00 [INF] thr:17<> loader Requires:MATS AJ R 0
2025-07-08 13:40:29.246 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 13:40:29.246 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 13:40:29.246 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 13:40:29.749 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:40:29.749 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-08 13:40:30.198 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 0
2025-07-08 13:40:32.810 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-08 13:40:33.260 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 13:40:33.260 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 13:40:33.260 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 13:40:33.763 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:40:33.763 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-08 13:40:34.213 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-08 13:40:34.659 +08:00 [INF] thr:17<> loader Requires:OUTP 16 0
2025-07-08 13:40:35.106 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-08 13:40:35.555 +08:00 [INF] thr:17<> loader Requires:OUTP 4 0
2025-07-08 13:40:36.002 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-08 13:40:36.448 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:37.402 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:38.358 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:39.311 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:40.265 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:41.216 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:40:41.668 +08:00 [INF] thr:17<> loader Requires:INPUT A 5
2025-07-08 13:40:42.122 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-08 13:40:44.740 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-08 13:40:45.190 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 13:40:45.190 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 13:40:45.190 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 13:40:45.693 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:40:45.694 +08:00 [INF] thr:17<> loader Requires:RETH
2025-07-08 13:40:50.730 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 13:40:50.734 +08:00 [INF] thr:17<> AOI is Ready
2025-07-08 13:40:50.826 +08:00 [INF] thr:17<> SetVelocity, Axis:X, velocity:50
2025-07-08 13:40:50.834 +08:00 [INF] thr:17<> SetVelocity, Axis:Y, velocity:50
2025-07-08 13:40:50.895 +08:00 [INF] thr:17<> SetVelocity, Axis:X, velocity:50
2025-07-08 13:40:50.899 +08:00 [INF] thr:17<> SetVelocity, Axis:Y, velocity:100
2025-07-08 13:40:50.927 +08:00 [INF] thr:17<> stage move to position action ok
2025-07-08 13:40:50.930 +08:00 [INF] thr:17<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 13:40:50.931 +08:00 [INF] thr:17<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 13:40:50.931 +08:00 [INF] thr:17<> loader Requires:RGRP
2025-07-08 13:40:51.374 +08:00 [INF] thr:17<> CLeanLoader Group Now C
2025-07-08 13:40:51.374 +08:00 [INF] thr:17<> loader Requires:MATS AK T
2025-07-08 13:40:54.908 +08:00 [INF] thr:17<> loader Requires:SSP Z 4000
2025-07-08 13:40:55.365 +08:00 [INF] thr:17<> loader Requires:MATS AK Z 1
2025-07-08 13:41:02.382 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-08 13:41:02.833 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 13:41:02.833 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 13:41:02.833 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 13:41:03.337 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:41:03.337 +08:00 [INF] thr:17<> loader Requires:INPUT A 6
2025-07-08 13:41:03.792 +08:00 [INF] thr:17<> loader Requires:MATS AK R 0
2025-07-08 13:41:09.076 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 13:41:09.076 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 13:41:09.076 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 13:41:09.578 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:41:09.579 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-08 13:41:10.028 +08:00 [INF] thr:17<> loader Requires:MATS AK Z 0
2025-07-08 13:41:12.740 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-08 13:41:13.209 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 13:41:13.210 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 13:41:13.210 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 13:41:13.712 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:41:13.713 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-08 13:41:14.162 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-08 13:41:14.609 +08:00 [INF] thr:17<> loader Requires:OUTP 16 1
2025-07-08 13:41:15.056 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-08 13:41:15.504 +08:00 [INF] thr:17<> loader Requires:OUTP 4 1
2025-07-08 13:41:15.951 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-08 13:41:16.396 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:41:17.350 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:41:18.304 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:41:19.257 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-08 13:41:19.708 +08:00 [INF] thr:17<> loader Requires:INPUT A 5
2025-07-08 13:41:20.161 +08:00 [INF] thr:17<> loader Requires:MATS AK Z 1
2025-07-08 13:41:22.879 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-08 13:41:23.329 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 13:41:23.329 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 13:41:23.329 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 13:41:24.337 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:41:24.337 +08:00 [INF] thr:17<> loader Requires:RETH
2025-07-08 13:41:29.601 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 13:43:14.938 +08:00 [INF] thr:42<> loader Requires:INPUT B 13
2025-07-08 13:43:16.406 +08:00 [INF] thr:10<> AOI is Ready
2025-07-08 13:43:16.485 +08:00 [INF] thr:10<> SetVelocity, Axis:X, velocity:50
2025-07-08 13:43:16.488 +08:00 [INF] thr:10<> SetVelocity, Axis:Y, velocity:50
2025-07-08 13:43:20.241 +08:00 [INF] thr:10<> SetVelocity, Axis:X, velocity:20
2025-07-08 13:43:20.244 +08:00 [INF] thr:10<> SetVelocity, Axis:Y, velocity:20
2025-07-08 13:43:20.262 +08:00 [INF] thr:10<> stage move to position action ok
2025-07-08 13:43:20.263 +08:00 [INF] thr:10<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-08 13:43:20.264 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 13:43:20.264 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-08 13:43:20.708 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-08 13:43:20.708 +08:00 [INF] thr:10<> loader Requires:MATS AK T
2025-07-08 13:43:21.167 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-08 13:43:21.613 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 1
2025-07-08 13:43:22.087 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 13:43:22.537 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-08 13:43:22.538 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-08 13:43:22.538 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-08 13:43:23.069 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:43:23.069 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-08 13:43:23.522 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-08 13:43:23.969 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-08 13:43:24.417 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-08 13:43:24.866 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-08 13:43:25.313 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-08 13:43:25.758 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:26.211 +08:00 [INF] thr:10<> loader Requires:MATS AK R 0
2025-07-08 13:43:31.493 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-08 13:43:31.493 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片请求
2025-07-08 13:43:31.493 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-08 13:43:32.009 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:43:32.009 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-08 13:43:32.455 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 0
2025-07-08 13:43:35.168 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 13:43:35.654 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-08 13:43:35.654 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-08 13:43:35.654 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-08 13:43:36.157 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:43:36.157 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-08 13:43:36.607 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-08 13:43:37.054 +08:00 [INF] thr:10<> loader Requires:OUTP 16 0
2025-07-08 13:43:37.501 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-08 13:43:37.951 +08:00 [INF] thr:10<> loader Requires:OUTP 4 0
2025-07-08 13:43:38.397 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-08 13:43:38.843 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:39.797 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:40.752 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:41.708 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:42.661 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:43.615 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 13:43:44.068 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-08 13:43:44.522 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 1
2025-07-08 13:43:47.240 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 13:43:47.692 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-08 13:43:47.692 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-08 13:43:47.692 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-08 13:43:48.194 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:43:48.194 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-08 13:43:53.457 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-08 13:43:53.461 +08:00 [INF] thr:9<> 执行Aligner设置初始角度InitialAngle：0
2025-07-08 13:43:53.461 +08:00 [INF] thr:9<> 执行Aligner角度angle：0
2025-07-08 13:43:54.470 +08:00 [INF] thr:9<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-08 13:43:54.471 +08:00 [INF] thr:9<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 13:43:54.471 +08:00 [INF] thr:9<> loader Requires:RGRP
2025-07-08 13:43:54.916 +08:00 [INF] thr:9<> CLeanLoader Group Now C
2025-07-08 13:43:54.917 +08:00 [INF] thr:9<> loader Requires:MATS AJ T
2025-07-08 13:43:58.458 +08:00 [INF] thr:9<> loader Requires:SSP Z 4000
2025-07-08 13:43:58.907 +08:00 [INF] thr:9<> loader Requires:MATS AJ Z 1
2025-07-08 13:44:05.925 +08:00 [INF] thr:9<> loader Requires:MOVR R 226000
2025-07-08 13:44:08.520 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:44:08.971 +08:00 [INF] thr:9<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-08 13:44:08.971 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-08 13:44:08.971 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-08 13:44:09.473 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:44:09.473 +08:00 [INF] thr:9<> loader Requires:INPUT A 6
2025-07-08 13:44:09.928 +08:00 [INF] thr:9<> loader Requires:MATS AJ R 0
2025-07-08 13:44:13.176 +08:00 [INF] thr:9<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-08 13:44:13.176 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-08 13:44:13.176 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-08 13:44:13.680 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:44:13.680 +08:00 [INF] thr:9<> loader Requires:SSP Z 1000
2025-07-08 13:44:14.128 +08:00 [INF] thr:9<> loader Requires:MATS AJ Z 0
2025-07-08 13:44:16.742 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:44:17.195 +08:00 [INF] thr:9<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-08 13:44:17.195 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-08 13:44:17.195 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-08 13:44:17.697 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:44:17.697 +08:00 [INF] thr:9<> loader Requires:SSP Z 1000
2025-07-08 13:44:18.146 +08:00 [INF] thr:9<> loader Requires:OUTP 1 0
2025-07-08 13:44:18.593 +08:00 [INF] thr:9<> loader Requires:OUTP 16 1
2025-07-08 13:44:19.041 +08:00 [INF] thr:9<> loader Requires:OUTP 15 1
2025-07-08 13:44:19.489 +08:00 [INF] thr:9<> loader Requires:OUTP 4 1
2025-07-08 13:44:19.935 +08:00 [INF] thr:9<> loader Requires:OUTP 1 1
2025-07-08 13:44:20.381 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:44:21.335 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:44:22.288 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:44:23.240 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:44:23.692 +08:00 [INF] thr:9<> loader Requires:INPUT A 5
2025-07-08 13:44:24.145 +08:00 [INF] thr:9<> loader Requires:MATS AJ Z 1
2025-07-08 13:44:26.763 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:44:27.213 +08:00 [INF] thr:9<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-08 13:44:27.213 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-08 13:44:27.213 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-08 13:44:27.725 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:44:27.725 +08:00 [INF] thr:9<> loader Requires:RETH
2025-07-08 13:44:32.760 +08:00 [INF] thr:9<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-08 13:44:32.764 +08:00 [INF] thr:9<> 执行Aligner角度angle：0
2025-07-08 13:45:42.041 +08:00 [INF] thr:45<> loader Requires:INPUT B 13
2025-07-08 13:45:43.016 +08:00 [INF] thr:9<> 执行Aligner角度angle：0
2025-07-08 13:45:44.032 +08:00 [INF] thr:9<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 13:45:44.032 +08:00 [INF] thr:9<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 13:45:44.032 +08:00 [INF] thr:9<> loader Requires:RGRP
2025-07-08 13:45:44.476 +08:00 [INF] thr:9<> CLeanLoader Group Now C
2025-07-08 13:45:44.476 +08:00 [INF] thr:9<> loader Requires:MATS AJ T
2025-07-08 13:45:44.934 +08:00 [INF] thr:9<> loader Requires:SSP Z 4000
2025-07-08 13:45:45.382 +08:00 [INF] thr:9<> loader Requires:MATS AJ Z 1
2025-07-08 13:45:45.855 +08:00 [INF] thr:9<> loader Requires:MOVR R 226000
2025-07-08 13:45:48.451 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:45:48.901 +08:00 [INF] thr:9<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 13:45:48.901 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 13:45:48.901 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 13:45:49.405 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:45:49.405 +08:00 [INF] thr:9<> loader Requires:INPUT A 6
2025-07-08 13:45:49.858 +08:00 [INF] thr:9<> loader Requires:OUTP 1 0
2025-07-08 13:45:50.305 +08:00 [INF] thr:9<> loader Requires:OUTP 16 1
2025-07-08 13:45:50.753 +08:00 [INF] thr:9<> loader Requires:OUTP 15 1
2025-07-08 13:45:51.200 +08:00 [INF] thr:9<> loader Requires:OUTP 4 1
2025-07-08 13:45:51.648 +08:00 [INF] thr:9<> loader Requires:OUTP 1 1
2025-07-08 13:45:52.094 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:45:52.549 +08:00 [INF] thr:9<> loader Requires:MATS AJ R 0
2025-07-08 13:45:55.799 +08:00 [INF] thr:9<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 13:45:55.799 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 13:45:55.799 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 13:45:56.303 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:45:56.303 +08:00 [INF] thr:9<> loader Requires:SSP Z 1000
2025-07-08 13:45:56.751 +08:00 [INF] thr:9<> loader Requires:MATS AJ Z 0
2025-07-08 13:45:59.363 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:45:59.812 +08:00 [INF] thr:9<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 13:45:59.812 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 13:45:59.812 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 13:46:00.317 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:46:00.317 +08:00 [INF] thr:9<> loader Requires:SSP Z 1000
2025-07-08 13:46:00.764 +08:00 [INF] thr:9<> loader Requires:OUTP 1 0
2025-07-08 13:46:01.219 +08:00 [INF] thr:9<> loader Requires:OUTP 16 0
2025-07-08 13:46:01.667 +08:00 [INF] thr:9<> loader Requires:OUTP 15 1
2025-07-08 13:46:02.115 +08:00 [INF] thr:9<> loader Requires:OUTP 4 0
2025-07-08 13:46:02.562 +08:00 [INF] thr:9<> loader Requires:OUTP 1 1
2025-07-08 13:46:03.008 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:03.961 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:04.915 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:05.868 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:06.822 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:07.777 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:08.228 +08:00 [INF] thr:9<> loader Requires:INPUT A 5
2025-07-08 13:46:08.683 +08:00 [INF] thr:9<> loader Requires:MATS AJ Z 1
2025-07-08 13:46:11.299 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:46:11.750 +08:00 [INF] thr:9<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 13:46:11.750 +08:00 [INF] thr:9<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 13:46:11.750 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 13:46:12.254 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:46:12.254 +08:00 [INF] thr:9<> loader Requires:RETH
2025-07-08 13:46:17.290 +08:00 [INF] thr:9<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 13:46:17.291 +08:00 [INF] thr:9<> AOI is Ready
2025-07-08 13:46:17.380 +08:00 [INF] thr:9<> SetVelocity, Axis:X, velocity:50
2025-07-08 13:46:17.386 +08:00 [INF] thr:9<> SetVelocity, Axis:Y, velocity:50
2025-07-08 13:46:17.425 +08:00 [INF] thr:9<> SetVelocity, Axis:X, velocity:20
2025-07-08 13:46:17.428 +08:00 [INF] thr:9<> SetVelocity, Axis:Y, velocity:20
2025-07-08 13:46:17.454 +08:00 [INF] thr:9<> stage move to position action ok
2025-07-08 13:46:17.454 +08:00 [INF] thr:9<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 13:46:17.455 +08:00 [INF] thr:9<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 13:46:17.455 +08:00 [INF] thr:9<> loader Requires:RGRP
2025-07-08 13:46:17.898 +08:00 [INF] thr:9<> CLeanLoader Group Now C
2025-07-08 13:46:17.898 +08:00 [INF] thr:9<> loader Requires:MATS AK T
2025-07-08 13:46:21.432 +08:00 [INF] thr:9<> loader Requires:SSP Z 4000
2025-07-08 13:46:21.881 +08:00 [INF] thr:9<> loader Requires:MATS AK Z 1
2025-07-08 13:46:28.899 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:46:29.349 +08:00 [INF] thr:9<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 13:46:29.349 +08:00 [INF] thr:9<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 13:46:29.349 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 13:46:29.850 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:46:29.850 +08:00 [INF] thr:9<> loader Requires:INPUT A 6
2025-07-08 13:46:30.302 +08:00 [INF] thr:9<> loader Requires:MATS AK R 0
2025-07-08 13:46:35.588 +08:00 [INF] thr:9<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 13:46:35.588 +08:00 [INF] thr:9<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 13:46:35.588 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 13:46:36.110 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:46:36.110 +08:00 [INF] thr:9<> loader Requires:SSP Z 1000
2025-07-08 13:46:36.558 +08:00 [INF] thr:9<> loader Requires:MATS AK Z 0
2025-07-08 13:46:39.271 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:46:39.740 +08:00 [INF] thr:9<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 13:46:39.740 +08:00 [INF] thr:9<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 13:46:39.740 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 13:46:40.244 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:46:40.244 +08:00 [INF] thr:9<> loader Requires:SSP Z 1000
2025-07-08 13:46:40.692 +08:00 [INF] thr:9<> loader Requires:OUTP 1 0
2025-07-08 13:46:41.139 +08:00 [INF] thr:9<> loader Requires:OUTP 16 1
2025-07-08 13:46:41.587 +08:00 [INF] thr:9<> loader Requires:OUTP 15 1
2025-07-08 13:46:42.035 +08:00 [INF] thr:9<> loader Requires:OUTP 4 1
2025-07-08 13:46:42.482 +08:00 [INF] thr:9<> loader Requires:OUTP 1 1
2025-07-08 13:46:42.928 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:43.885 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:44.838 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:45.791 +08:00 [INF] thr:9<> loader Requires:INPUT A 4
2025-07-08 13:46:46.242 +08:00 [INF] thr:9<> loader Requires:INPUT A 5
2025-07-08 13:46:46.696 +08:00 [INF] thr:9<> loader Requires:MATS AK Z 1
2025-07-08 13:46:49.413 +08:00 [INF] thr:9<> loader Requires:SSPP Z 30
2025-07-08 13:46:49.864 +08:00 [INF] thr:9<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 13:46:49.864 +08:00 [INF] thr:9<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 13:46:49.864 +08:00 [INF] thr:9<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 13:46:50.871 +08:00 [INF] thr:9<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 13:46:50.871 +08:00 [INF] thr:9<> loader Requires:RETH
2025-07-08 13:46:56.141 +08:00 [INF] thr:9<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 14:30:58.179 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-08 14:30:59.640 +08:00 [INF] thr:10<> AOI is Ready
2025-07-08 14:31:04.127 +08:00 [INF] thr:10<> SetVelocity, Axis:X, velocity:50
2025-07-08 14:31:04.130 +08:00 [INF] thr:10<> SetVelocity, Axis:Y, velocity:50
2025-07-08 14:31:08.147 +08:00 [INF] thr:10<> SetVelocity, Axis:X, velocity:8
2025-07-08 14:31:08.150 +08:00 [INF] thr:10<> SetVelocity, Axis:Y, velocity:8
2025-07-08 14:31:08.167 +08:00 [INF] thr:10<> stage move to position action ok
2025-07-08 14:31:08.168 +08:00 [INF] thr:10<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-08 14:31:08.168 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:31:08.168 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-08 14:31:08.610 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-08 14:31:08.610 +08:00 [INF] thr:10<> loader Requires:MATS AK T
2025-07-08 14:31:09.066 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-08 14:31:09.514 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 1
2025-07-08 14:31:09.987 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 14:31:10.438 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-08 14:31:10.438 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-08 14:31:10.438 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-08 14:31:10.950 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:31:10.950 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-08 14:31:11.403 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-08 14:31:11.850 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-08 14:31:12.300 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-08 14:31:12.749 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-08 14:31:13.196 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-08 14:31:13.642 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:14.094 +08:00 [INF] thr:10<> loader Requires:MATS AK R 0
2025-07-08 14:31:19.375 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-08 14:31:19.375 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片请求
2025-07-08 14:31:19.375 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-08 14:31:19.880 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:31:19.880 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-08 14:31:20.325 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 0
2025-07-08 14:31:23.038 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 14:31:23.499 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-08 14:31:23.499 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-08 14:31:23.499 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-08 14:31:24.001 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:31:24.001 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-08 14:31:24.451 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-08 14:31:24.898 +08:00 [INF] thr:10<> loader Requires:OUTP 16 0
2025-07-08 14:31:25.346 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-08 14:31:25.794 +08:00 [INF] thr:10<> loader Requires:OUTP 4 0
2025-07-08 14:31:26.240 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-08 14:31:26.688 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:27.644 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:28.596 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:29.551 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:30.512 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:31.466 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:31:31.917 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-08 14:31:32.370 +08:00 [INF] thr:10<> loader Requires:MATS AK Z 1
2025-07-08 14:31:35.088 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 14:31:35.539 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-08 14:31:35.539 +08:00 [INF] thr:10<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-08 14:31:35.539 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-08 14:31:36.041 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:31:36.041 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-08 14:31:41.304 +08:00 [INF] thr:10<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-08 14:31:41.306 +08:00 [INF] thr:10<> 执行Aligner设置初始角度InitialAngle：0
2025-07-08 14:31:41.306 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-08 14:31:42.315 +08:00 [INF] thr:10<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-08 14:31:42.316 +08:00 [INF] thr:10<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:31:42.316 +08:00 [INF] thr:10<> loader Requires:RGRP
2025-07-08 14:31:42.758 +08:00 [INF] thr:10<> CLeanLoader Group Now C
2025-07-08 14:31:42.758 +08:00 [INF] thr:10<> loader Requires:MATS AJ T
2025-07-08 14:31:46.300 +08:00 [INF] thr:10<> loader Requires:SSP Z 4000
2025-07-08 14:31:46.749 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-08 14:31:53.768 +08:00 [INF] thr:10<> loader Requires:MOVR R 226000
2025-07-08 14:31:56.361 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 14:31:56.812 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-08 14:31:56.812 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-08 14:31:56.812 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-08 14:31:57.315 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:31:57.315 +08:00 [INF] thr:10<> loader Requires:INPUT A 6
2025-07-08 14:31:57.767 +08:00 [INF] thr:10<> loader Requires:MATS AJ R 0
2025-07-08 14:32:01.018 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-08 14:32:01.018 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-08 14:32:01.018 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-08 14:32:01.523 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:32:01.523 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-08 14:32:01.969 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 0
2025-07-08 14:32:04.582 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 14:32:05.031 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-08 14:32:05.031 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-08 14:32:05.032 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-08 14:32:05.535 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:32:05.535 +08:00 [INF] thr:10<> loader Requires:SSP Z 1000
2025-07-08 14:32:05.990 +08:00 [INF] thr:10<> loader Requires:OUTP 1 0
2025-07-08 14:32:06.437 +08:00 [INF] thr:10<> loader Requires:OUTP 16 1
2025-07-08 14:32:06.885 +08:00 [INF] thr:10<> loader Requires:OUTP 15 1
2025-07-08 14:32:07.334 +08:00 [INF] thr:10<> loader Requires:OUTP 4 1
2025-07-08 14:32:07.781 +08:00 [INF] thr:10<> loader Requires:OUTP 1 1
2025-07-08 14:32:08.226 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:32:09.180 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:32:10.133 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:32:11.085 +08:00 [INF] thr:10<> loader Requires:INPUT A 4
2025-07-08 14:32:11.540 +08:00 [INF] thr:10<> loader Requires:INPUT A 5
2025-07-08 14:32:11.993 +08:00 [INF] thr:10<> loader Requires:MATS AJ Z 1
2025-07-08 14:32:14.611 +08:00 [INF] thr:10<> loader Requires:SSPP Z 30
2025-07-08 14:32:15.061 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-08 14:32:15.061 +08:00 [INF] thr:10<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-08 14:32:15.061 +08:00 [INF] thr:10<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-08 14:32:15.566 +08:00 [INF] thr:10<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:32:15.566 +08:00 [INF] thr:10<> loader Requires:RETH
2025-07-08 14:32:20.601 +08:00 [INF] thr:10<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-08 14:32:20.602 +08:00 [INF] thr:10<> 执行Aligner角度angle：0
2025-07-08 14:34:01.284 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-08 14:34:02.263 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-08 14:34:03.269 +08:00 [INF] thr:42<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 14:34:03.270 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:34:03.270 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-08 14:34:03.710 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-08 14:34:03.710 +08:00 [INF] thr:42<> loader Requires:MATS AJ T
2025-07-08 14:34:04.169 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-08 14:34:04.616 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-08 14:34:05.089 +08:00 [INF] thr:42<> loader Requires:MOVR R 226000
2025-07-08 14:34:07.685 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-08 14:34:08.145 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 14:34:08.145 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 14:34:08.145 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 14:34:08.648 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:08.648 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-08 14:34:09.100 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-08 14:34:09.546 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-08 14:34:09.994 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-08 14:34:10.443 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-08 14:34:10.891 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-08 14:34:11.336 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:11.788 +08:00 [INF] thr:42<> loader Requires:MATS AJ R 0
2025-07-08 14:34:15.037 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 14:34:15.037 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 14:34:15.037 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 14:34:15.540 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:15.540 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-08 14:34:15.989 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 0
2025-07-08 14:34:18.601 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-08 14:34:19.050 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 14:34:19.050 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 14:34:19.050 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 14:34:19.567 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:19.567 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-08 14:34:20.017 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-08 14:34:20.461 +08:00 [INF] thr:42<> loader Requires:OUTP 16 0
2025-07-08 14:34:20.916 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-08 14:34:21.366 +08:00 [INF] thr:42<> loader Requires:OUTP 4 0
2025-07-08 14:34:21.812 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-08 14:34:22.257 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:23.212 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:24.164 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:25.118 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:26.071 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:27.025 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:34:27.475 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-08 14:34:27.928 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-08 14:34:30.546 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-08 14:34:30.995 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 14:34:30.995 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 14:34:30.995 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 14:34:31.500 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:31.500 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-08 14:34:36.534 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 14:34:36.536 +08:00 [INF] thr:42<> AOI is Ready
2025-07-08 14:34:36.600 +08:00 [INF] thr:42<> SetVelocity, Axis:X, velocity:50
2025-07-08 14:34:36.603 +08:00 [INF] thr:42<> SetVelocity, Axis:Y, velocity:50
2025-07-08 14:34:36.639 +08:00 [INF] thr:42<> SetVelocity, Axis:X, velocity:8
2025-07-08 14:34:36.642 +08:00 [INF] thr:42<> SetVelocity, Axis:Y, velocity:8
2025-07-08 14:34:36.659 +08:00 [INF] thr:42<> stage move to position action ok
2025-07-08 14:34:36.659 +08:00 [INF] thr:42<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 14:34:36.660 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:34:36.660 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-08 14:34:37.102 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-08 14:34:37.102 +08:00 [INF] thr:42<> loader Requires:MATS AK T
2025-07-08 14:34:40.636 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-08 14:34:41.082 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 1
2025-07-08 14:34:48.101 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-08 14:34:48.549 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 14:34:48.550 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 14:34:48.550 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 14:34:49.054 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:49.054 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-08 14:34:49.508 +08:00 [INF] thr:42<> loader Requires:MATS AK R 0
2025-07-08 14:34:54.790 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 14:34:54.790 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 14:34:54.790 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 14:34:55.293 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:55.293 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-08 14:34:55.740 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 0
2025-07-08 14:34:58.453 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-08 14:34:58.920 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 14:34:58.921 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 14:34:58.921 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 14:34:59.424 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:34:59.424 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-08 14:34:59.878 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-08 14:35:00.325 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-08 14:35:00.773 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-08 14:35:01.223 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-08 14:35:01.668 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-08 14:35:02.114 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:35:03.067 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:35:04.020 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:35:04.973 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-08 14:35:05.425 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-08 14:35:05.887 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 1
2025-07-08 14:35:08.603 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-08 14:35:09.053 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 14:35:09.053 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 14:35:09.053 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 14:35:10.058 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:35:10.058 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-08 14:35:15.320 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 14:52:37.953 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:55551
2025-07-08 14:55:38.308 +08:00 [INF] thr:60<> loader Requires:INPUT B 13
2025-07-08 14:55:39.816 +08:00 [INF] thr:52<> AOI is Ready
2025-07-08 14:55:44.111 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:50
2025-07-08 14:55:44.114 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:50
2025-07-08 14:55:49.167 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:8
2025-07-08 14:55:49.174 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:8
2025-07-08 14:55:49.233 +08:00 [INF] thr:52<> stage move to position action ok
2025-07-08 14:55:49.233 +08:00 [INF] thr:52<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-08 14:55:49.234 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:55:49.234 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-08 14:55:49.678 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-08 14:55:49.678 +08:00 [INF] thr:52<> loader Requires:MATS AK T
2025-07-08 14:55:50.137 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-08 14:55:50.586 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-08 14:55:51.060 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-08 14:55:51.510 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-08 14:55:51.511 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-08 14:55:51.511 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-08 14:55:52.014 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:55:52.014 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-08 14:55:52.467 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-08 14:55:52.914 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-08 14:55:53.361 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-08 14:55:53.810 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-08 14:55:54.257 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-08 14:55:54.702 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:55:55.154 +08:00 [INF] thr:52<> loader Requires:MATS AK R 0
2025-07-08 14:56:00.436 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-08 14:56:00.436 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片请求
2025-07-08 14:56:00.436 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-08 14:56:00.940 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:00.940 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-08 14:56:01.392 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 0
2025-07-08 14:56:04.103 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-08 14:56:04.594 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-08 14:56:04.594 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-08 14:56:04.594 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-08 14:56:05.099 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:05.099 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-08 14:56:05.548 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-08 14:56:05.995 +08:00 [INF] thr:52<> loader Requires:OUTP 16 0
2025-07-08 14:56:06.443 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-08 14:56:06.891 +08:00 [INF] thr:52<> loader Requires:OUTP 4 0
2025-07-08 14:56:07.339 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-08 14:56:07.784 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:56:08.737 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:56:09.690 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:56:10.644 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:56:11.597 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:56:12.551 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 14:56:13.003 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-08 14:56:13.455 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-08 14:56:16.173 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-08 14:56:16.624 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-08 14:56:16.624 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-08 14:56:16.624 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-08 14:56:17.127 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:17.127 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-08 14:56:22.390 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-08 14:56:22.392 +08:00 [INF] thr:62<> 执行Aligner设置初始角度InitialAngle：0
2025-07-08 14:56:22.392 +08:00 [INF] thr:62<> 执行Aligner角度angle：0
2025-07-08 14:56:23.399 +08:00 [INF] thr:62<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-08 14:56:23.400 +08:00 [INF] thr:62<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:56:23.400 +08:00 [INF] thr:62<> loader Requires:RGRP
2025-07-08 14:56:23.842 +08:00 [INF] thr:62<> CLeanLoader Group Now C
2025-07-08 14:56:23.842 +08:00 [INF] thr:62<> loader Requires:MATS AJ T
2025-07-08 14:56:27.383 +08:00 [INF] thr:62<> loader Requires:SSP Z 4000
2025-07-08 14:56:27.835 +08:00 [INF] thr:62<> loader Requires:MATS AJ Z 1
2025-07-08 14:56:34.855 +08:00 [INF] thr:62<> loader Requires:MOVR R 226000
2025-07-08 14:56:37.457 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 14:56:37.908 +08:00 [INF] thr:62<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-08 14:56:37.908 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-08 14:56:37.908 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-08 14:56:38.411 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:38.411 +08:00 [INF] thr:62<> loader Requires:INPUT A 6
2025-07-08 14:56:38.864 +08:00 [INF] thr:62<> loader Requires:MATS AJ R 0
2025-07-08 14:56:42.114 +08:00 [INF] thr:62<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-08 14:56:42.114 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-08 14:56:42.114 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-08 14:56:42.617 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:42.617 +08:00 [INF] thr:62<> loader Requires:SSP Z 1000
2025-07-08 14:56:43.065 +08:00 [INF] thr:62<> loader Requires:MATS AJ Z 0
2025-07-08 14:56:45.678 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 14:56:46.132 +08:00 [INF] thr:62<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-08 14:56:46.132 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-08 14:56:46.132 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-08 14:56:46.635 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:46.635 +08:00 [INF] thr:62<> loader Requires:SSP Z 1000
2025-07-08 14:56:47.084 +08:00 [INF] thr:62<> loader Requires:OUTP 1 0
2025-07-08 14:56:47.530 +08:00 [INF] thr:62<> loader Requires:OUTP 16 1
2025-07-08 14:56:47.977 +08:00 [INF] thr:62<> loader Requires:OUTP 15 1
2025-07-08 14:56:48.426 +08:00 [INF] thr:62<> loader Requires:OUTP 4 1
2025-07-08 14:56:48.873 +08:00 [INF] thr:62<> loader Requires:OUTP 1 1
2025-07-08 14:56:49.319 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 14:56:50.272 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 14:56:51.225 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 14:56:52.179 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 14:56:52.631 +08:00 [INF] thr:62<> loader Requires:INPUT A 5
2025-07-08 14:56:53.083 +08:00 [INF] thr:62<> loader Requires:MATS AJ Z 1
2025-07-08 14:56:55.700 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 14:56:56.151 +08:00 [INF] thr:62<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-08 14:56:56.151 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-08 14:56:56.151 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-08 14:56:56.655 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:56:56.655 +08:00 [INF] thr:62<> loader Requires:RETH
2025-07-08 14:57:01.689 +08:00 [INF] thr:62<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-08 14:57:01.695 +08:00 [INF] thr:62<> 执行Aligner角度angle：0
2025-07-08 14:58:14.541 +08:00 [INF] thr:56<> loader Requires:INPUT B 13
2025-07-08 14:58:15.519 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-08 14:58:16.524 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 14:58:16.525 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:58:16.525 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-08 14:58:16.975 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-08 14:58:16.975 +08:00 [INF] thr:64<> loader Requires:MATS AJ T
2025-07-08 14:58:17.432 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-08 14:58:17.879 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-08 14:58:18.351 +08:00 [INF] thr:64<> loader Requires:MOVR R 226000
2025-07-08 14:58:20.948 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 14:58:21.399 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 14:58:21.399 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 14:58:21.399 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 14:58:21.902 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:58:21.902 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-08 14:58:22.356 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 14:58:22.803 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-08 14:58:23.257 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-08 14:58:23.706 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-08 14:58:24.153 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-08 14:58:24.600 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:25.052 +08:00 [INF] thr:64<> loader Requires:MATS AJ R 0
2025-07-08 14:58:28.302 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 14:58:28.302 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 14:58:28.302 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 14:58:28.805 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:58:28.805 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 14:58:29.261 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 0
2025-07-08 14:58:31.873 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 14:58:32.322 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 14:58:32.322 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 14:58:32.322 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 14:58:32.851 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:58:32.851 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 14:58:33.298 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 14:58:33.744 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-08 14:58:34.192 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-08 14:58:34.641 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-08 14:58:35.089 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-08 14:58:35.534 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:36.487 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:37.440 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:38.392 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:39.346 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:40.298 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:58:40.750 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-08 14:58:41.203 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-08 14:58:43.819 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 14:58:44.269 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 14:58:44.269 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 14:58:44.269 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 14:58:44.773 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:58:44.773 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-08 14:58:49.807 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 14:58:49.809 +08:00 [INF] thr:64<> AOI is Ready
2025-07-08 14:58:49.884 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-08 14:58:49.887 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-08 14:58:49.931 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:8
2025-07-08 14:58:49.935 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:8
2025-07-08 14:58:49.951 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-08 14:58:49.951 +08:00 [INF] thr:64<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 14:58:49.952 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 14:58:49.952 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-08 14:58:50.394 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-08 14:58:50.394 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-08 14:58:53.936 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-08 14:58:54.385 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-08 14:59:01.403 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 14:59:01.853 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 14:59:01.853 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 14:59:01.853 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 14:59:02.358 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:59:02.358 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-08 14:59:02.811 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-08 14:59:08.093 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 14:59:08.093 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 14:59:08.093 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 14:59:08.601 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:59:08.601 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 14:59:09.046 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-08 14:59:11.760 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 14:59:12.218 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 14:59:12.218 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 14:59:12.218 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 14:59:12.722 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:59:12.722 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 14:59:13.171 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 14:59:13.619 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-08 14:59:14.069 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-08 14:59:14.516 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-08 14:59:14.963 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-08 14:59:15.409 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:59:16.362 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:59:17.317 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:59:18.268 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 14:59:18.720 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-08 14:59:19.175 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-08 14:59:21.891 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 14:59:22.341 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 14:59:22.341 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 14:59:22.341 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 14:59:23.348 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 14:59:23.348 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-08 14:59:28.608 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 16:33:40.977 +08:00 [INF] thr:44<> loader Requires:INPUT B 13
2025-07-08 16:33:42.440 +08:00 [INF] thr:50<> AOI is Ready
2025-07-08 16:33:46.939 +08:00 [INF] thr:50<> SetVelocity, Axis:X, velocity:50
2025-07-08 16:33:46.942 +08:00 [INF] thr:50<> SetVelocity, Axis:Y, velocity:50
2025-07-08 16:33:50.952 +08:00 [INF] thr:50<> SetVelocity, Axis:X, velocity:8
2025-07-08 16:33:50.956 +08:00 [INF] thr:50<> SetVelocity, Axis:Y, velocity:8
2025-07-08 16:33:50.972 +08:00 [INF] thr:50<> stage move to position action ok
2025-07-08 16:33:50.972 +08:00 [INF] thr:50<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-08 16:33:50.973 +08:00 [INF] thr:50<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 16:33:50.973 +08:00 [INF] thr:50<> loader Requires:RGRP
2025-07-08 16:33:51.414 +08:00 [INF] thr:50<> CLeanLoader Group Now C
2025-07-08 16:33:51.414 +08:00 [INF] thr:50<> loader Requires:MATS AK T
2025-07-08 16:33:51.869 +08:00 [INF] thr:50<> loader Requires:SSP Z 4000
2025-07-08 16:33:52.316 +08:00 [INF] thr:50<> loader Requires:MATS AK Z 1
2025-07-08 16:33:52.790 +08:00 [INF] thr:50<> loader Requires:SSPP Z 30
2025-07-08 16:33:53.241 +08:00 [INF] thr:50<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-08 16:33:53.241 +08:00 [INF] thr:50<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-08 16:33:53.241 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-08 16:33:53.756 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:33:53.757 +08:00 [INF] thr:50<> loader Requires:INPUT A 6
2025-07-08 16:33:54.208 +08:00 [INF] thr:50<> loader Requires:OUTP 1 0
2025-07-08 16:33:54.656 +08:00 [INF] thr:50<> loader Requires:OUTP 16 1
2025-07-08 16:33:55.103 +08:00 [INF] thr:50<> loader Requires:OUTP 15 1
2025-07-08 16:33:55.551 +08:00 [INF] thr:50<> loader Requires:OUTP 4 1
2025-07-08 16:33:55.999 +08:00 [INF] thr:50<> loader Requires:OUTP 1 1
2025-07-08 16:33:56.444 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:33:56.896 +08:00 [INF] thr:50<> loader Requires:MATS AK R 0
2025-07-08 16:34:02.178 +08:00 [INF] thr:50<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-08 16:34:02.178 +08:00 [INF] thr:50<> Station:InspectStageA,SafeCheck:下片请求
2025-07-08 16:34:02.178 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-08 16:34:02.682 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:02.682 +08:00 [INF] thr:50<> loader Requires:SSP Z 1000
2025-07-08 16:34:03.131 +08:00 [INF] thr:50<> loader Requires:MATS AK Z 0
2025-07-08 16:34:05.844 +08:00 [INF] thr:50<> loader Requires:SSPP Z 30
2025-07-08 16:34:06.321 +08:00 [INF] thr:50<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-08 16:34:06.321 +08:00 [INF] thr:50<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-08 16:34:06.321 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-08 16:34:06.824 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:06.824 +08:00 [INF] thr:50<> loader Requires:SSP Z 1000
2025-07-08 16:34:07.275 +08:00 [INF] thr:50<> loader Requires:OUTP 1 0
2025-07-08 16:34:07.722 +08:00 [INF] thr:50<> loader Requires:OUTP 16 0
2025-07-08 16:34:08.170 +08:00 [INF] thr:50<> loader Requires:OUTP 15 1
2025-07-08 16:34:08.626 +08:00 [INF] thr:50<> loader Requires:OUTP 4 0
2025-07-08 16:34:09.072 +08:00 [INF] thr:50<> loader Requires:OUTP 1 1
2025-07-08 16:34:09.518 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:34:10.473 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:34:11.426 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:34:12.377 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:34:13.331 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:34:14.284 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 16:34:14.735 +08:00 [INF] thr:50<> loader Requires:INPUT A 5
2025-07-08 16:34:15.189 +08:00 [INF] thr:50<> loader Requires:MATS AK Z 1
2025-07-08 16:34:17.906 +08:00 [INF] thr:50<> loader Requires:SSPP Z 30
2025-07-08 16:34:18.356 +08:00 [INF] thr:50<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-08 16:34:18.357 +08:00 [INF] thr:50<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-08 16:34:18.357 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-08 16:34:18.860 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:18.860 +08:00 [INF] thr:50<> loader Requires:RETH
2025-07-08 16:34:24.124 +08:00 [INF] thr:50<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-08 16:34:24.125 +08:00 [INF] thr:63<> 执行Aligner设置初始角度InitialAngle：0
2025-07-08 16:34:24.125 +08:00 [INF] thr:63<> 执行Aligner角度angle：0
2025-07-08 16:34:25.132 +08:00 [INF] thr:63<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-08 16:34:25.133 +08:00 [INF] thr:63<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 16:34:25.133 +08:00 [INF] thr:63<> loader Requires:RGRP
2025-07-08 16:34:25.578 +08:00 [INF] thr:63<> CLeanLoader Group Now C
2025-07-08 16:34:25.578 +08:00 [INF] thr:63<> loader Requires:MATS AJ T
2025-07-08 16:34:29.121 +08:00 [INF] thr:63<> loader Requires:SSP Z 4000
2025-07-08 16:34:29.570 +08:00 [INF] thr:63<> loader Requires:MATS AJ Z 1
2025-07-08 16:34:36.588 +08:00 [INF] thr:63<> loader Requires:MOVR R 226000
2025-07-08 16:34:39.183 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-08 16:34:39.634 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-08 16:34:39.634 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-08 16:34:39.634 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-08 16:34:40.164 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:40.164 +08:00 [INF] thr:63<> loader Requires:INPUT A 6
2025-07-08 16:34:40.618 +08:00 [INF] thr:63<> loader Requires:MATS AJ R 0
2025-07-08 16:34:43.868 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-08 16:34:43.868 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-08 16:34:43.868 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-08 16:34:44.371 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:44.371 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-08 16:34:44.820 +08:00 [INF] thr:63<> loader Requires:MATS AJ Z 0
2025-07-08 16:34:47.433 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-08 16:34:47.885 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-08 16:34:47.885 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-08 16:34:47.885 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-08 16:34:48.398 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:48.398 +08:00 [INF] thr:63<> loader Requires:SSP Z 1000
2025-07-08 16:34:48.849 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-08 16:34:49.296 +08:00 [INF] thr:63<> loader Requires:OUTP 16 1
2025-07-08 16:34:49.743 +08:00 [INF] thr:63<> loader Requires:OUTP 15 1
2025-07-08 16:34:50.191 +08:00 [INF] thr:63<> loader Requires:OUTP 4 1
2025-07-08 16:34:50.638 +08:00 [INF] thr:63<> loader Requires:OUTP 1 1
2025-07-08 16:34:51.084 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-08 16:34:52.038 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-08 16:34:52.992 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-08 16:34:53.945 +08:00 [INF] thr:63<> loader Requires:INPUT A 4
2025-07-08 16:34:54.395 +08:00 [INF] thr:63<> loader Requires:INPUT A 5
2025-07-08 16:34:54.849 +08:00 [INF] thr:63<> loader Requires:MATS AJ Z 1
2025-07-08 16:34:57.466 +08:00 [INF] thr:63<> loader Requires:SSPP Z 30
2025-07-08 16:34:57.917 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-08 16:34:57.917 +08:00 [INF] thr:63<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-08 16:34:57.917 +08:00 [INF] thr:63<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-08 16:34:58.420 +08:00 [INF] thr:63<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:34:58.420 +08:00 [INF] thr:63<> loader Requires:RETH
2025-07-08 16:35:03.456 +08:00 [INF] thr:63<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-08 16:35:03.464 +08:00 [INF] thr:63<> 执行Aligner角度angle：0
2025-07-08 16:36:17.066 +08:00 [INF] thr:25<> loader Requires:INPUT B 13
2025-07-08 16:36:18.044 +08:00 [INF] thr:64<> 执行Aligner角度angle：0
2025-07-08 16:36:19.057 +08:00 [INF] thr:64<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 16:36:19.058 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 16:36:19.058 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-08 16:36:19.499 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-08 16:36:19.499 +08:00 [INF] thr:64<> loader Requires:MATS AJ T
2025-07-08 16:36:19.957 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-08 16:36:20.404 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-08 16:36:20.877 +08:00 [INF] thr:64<> loader Requires:MOVR R 226000
2025-07-08 16:36:23.471 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 16:36:23.921 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 16:36:23.922 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 16:36:23.922 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 16:36:24.426 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:36:24.426 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-08 16:36:24.879 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 16:36:25.326 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-08 16:36:25.774 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-08 16:36:26.222 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-08 16:36:26.668 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-08 16:36:27.113 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:27.566 +08:00 [INF] thr:64<> loader Requires:MATS AJ R 0
2025-07-08 16:36:30.815 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 16:36:30.816 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 16:36:30.816 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 16:36:31.320 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:36:31.320 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 16:36:31.767 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 0
2025-07-08 16:36:34.380 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 16:36:34.830 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 16:36:34.830 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 16:36:34.830 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 16:36:35.339 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:36:35.339 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 16:36:35.788 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 16:36:36.236 +08:00 [INF] thr:64<> loader Requires:OUTP 16 0
2025-07-08 16:36:36.687 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-08 16:36:37.136 +08:00 [INF] thr:64<> loader Requires:OUTP 4 0
2025-07-08 16:36:37.583 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-08 16:36:38.028 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:38.983 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:39.934 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:40.888 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:41.841 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:42.794 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:36:43.246 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-08 16:36:43.699 +08:00 [INF] thr:64<> loader Requires:MATS AJ Z 1
2025-07-08 16:36:46.315 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 16:36:46.766 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 16:36:46.766 +08:00 [INF] thr:64<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 16:36:46.766 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 16:36:47.273 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:36:47.273 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-08 16:36:52.309 +08:00 [INF] thr:64<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 16:36:52.310 +08:00 [INF] thr:64<> AOI is Ready
2025-07-08 16:36:52.398 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:50
2025-07-08 16:36:52.403 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:50
2025-07-08 16:36:52.456 +08:00 [INF] thr:64<> SetVelocity, Axis:X, velocity:8
2025-07-08 16:36:52.464 +08:00 [INF] thr:64<> SetVelocity, Axis:Y, velocity:8
2025-07-08 16:36:52.507 +08:00 [INF] thr:64<> stage move to position action ok
2025-07-08 16:36:52.507 +08:00 [INF] thr:64<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 16:36:52.508 +08:00 [INF] thr:64<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 16:36:52.508 +08:00 [INF] thr:64<> loader Requires:RGRP
2025-07-08 16:36:52.952 +08:00 [INF] thr:64<> CLeanLoader Group Now C
2025-07-08 16:36:52.952 +08:00 [INF] thr:64<> loader Requires:MATS AK T
2025-07-08 16:36:56.487 +08:00 [INF] thr:64<> loader Requires:SSP Z 4000
2025-07-08 16:36:56.935 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-08 16:37:03.953 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 16:37:04.404 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 16:37:04.404 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 16:37:04.404 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 16:37:04.906 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:37:04.906 +08:00 [INF] thr:64<> loader Requires:INPUT A 6
2025-07-08 16:37:05.361 +08:00 [INF] thr:64<> loader Requires:MATS AK R 0
2025-07-08 16:37:10.643 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 16:37:10.643 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 16:37:10.643 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 16:37:11.146 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:37:11.146 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 16:37:11.592 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 0
2025-07-08 16:37:14.306 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 16:37:14.769 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 16:37:14.769 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 16:37:14.769 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 16:37:15.281 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:37:15.281 +08:00 [INF] thr:64<> loader Requires:SSP Z 1000
2025-07-08 16:37:15.729 +08:00 [INF] thr:64<> loader Requires:OUTP 1 0
2025-07-08 16:37:16.177 +08:00 [INF] thr:64<> loader Requires:OUTP 16 1
2025-07-08 16:37:16.628 +08:00 [INF] thr:64<> loader Requires:OUTP 15 1
2025-07-08 16:37:17.077 +08:00 [INF] thr:64<> loader Requires:OUTP 4 1
2025-07-08 16:37:17.532 +08:00 [INF] thr:64<> loader Requires:OUTP 1 1
2025-07-08 16:37:17.977 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:37:18.932 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:37:19.885 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:37:20.839 +08:00 [INF] thr:64<> loader Requires:INPUT A 4
2025-07-08 16:37:21.293 +08:00 [INF] thr:64<> loader Requires:INPUT A 5
2025-07-08 16:37:21.745 +08:00 [INF] thr:64<> loader Requires:MATS AK Z 1
2025-07-08 16:37:24.463 +08:00 [INF] thr:64<> loader Requires:SSPP Z 30
2025-07-08 16:37:24.914 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 16:37:24.914 +08:00 [INF] thr:64<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 16:37:24.914 +08:00 [INF] thr:64<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 16:37:25.920 +08:00 [INF] thr:64<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 16:37:25.920 +08:00 [INF] thr:64<> loader Requires:RETH
2025-07-08 16:37:31.185 +08:00 [INF] thr:64<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-08 19:44:42.980 +08:00 [INF] thr:54<> loader Requires:INPUT B 13
2025-07-08 19:44:44.445 +08:00 [INF] thr:52<> AOI is Ready
2025-07-08 19:44:48.763 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:50
2025-07-08 19:44:48.766 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:50
2025-07-08 19:44:51.543 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:8
2025-07-08 19:44:51.550 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:8
2025-07-08 19:44:51.583 +08:00 [INF] thr:52<> stage move to position action ok
2025-07-08 19:44:51.584 +08:00 [INF] thr:52<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-08 19:44:51.584 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 19:44:51.584 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-08 19:44:52.029 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-08 19:44:52.029 +08:00 [INF] thr:52<> loader Requires:MATS AK T
2025-07-08 19:44:52.486 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-08 19:44:52.934 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-08 19:44:53.407 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-08 19:44:53.858 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-08 19:44:53.858 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-08 19:44:53.858 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-08 19:44:54.361 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:44:54.361 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-08 19:44:54.814 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-08 19:44:55.261 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-08 19:44:55.708 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-08 19:44:56.158 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-08 19:44:56.603 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-08 19:44:57.049 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:44:57.502 +08:00 [INF] thr:52<> loader Requires:MATS AK R 0
2025-07-08 19:45:02.785 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-08 19:45:02.785 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片请求
2025-07-08 19:45:02.785 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-08 19:45:03.293 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:03.293 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-08 19:45:03.742 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 0
2025-07-08 19:45:06.456 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-08 19:45:06.931 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-08 19:45:06.931 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-08 19:45:06.931 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-08 19:45:07.444 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:07.444 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-08 19:45:07.893 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-08 19:45:08.340 +08:00 [INF] thr:52<> loader Requires:OUTP 16 0
2025-07-08 19:45:08.788 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-08 19:45:09.236 +08:00 [INF] thr:52<> loader Requires:OUTP 4 0
2025-07-08 19:45:09.682 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-08 19:45:10.129 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:45:11.084 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:45:12.035 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:45:12.989 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:45:13.942 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:45:14.895 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-08 19:45:15.355 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-08 19:45:15.810 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-08 19:45:18.526 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-08 19:45:18.978 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-08 19:45:18.978 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-08 19:45:18.978 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-08 19:45:19.480 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:19.480 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-08 19:45:24.744 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-08 19:45:24.744 +08:00 [INF] thr:50<> 执行Aligner设置初始角度InitialAngle：0
2025-07-08 19:45:24.744 +08:00 [INF] thr:50<> 执行Aligner角度angle：0
2025-07-08 19:45:25.764 +08:00 [INF] thr:50<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-08 19:45:25.765 +08:00 [INF] thr:50<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 19:45:25.765 +08:00 [INF] thr:50<> loader Requires:RGRP
2025-07-08 19:45:26.210 +08:00 [INF] thr:50<> CLeanLoader Group Now C
2025-07-08 19:45:26.210 +08:00 [INF] thr:50<> loader Requires:MATS AJ T
2025-07-08 19:45:29.753 +08:00 [INF] thr:50<> loader Requires:SSP Z 4000
2025-07-08 19:45:30.202 +08:00 [INF] thr:50<> loader Requires:MATS AJ Z 1
2025-07-08 19:45:37.219 +08:00 [INF] thr:50<> loader Requires:MOVR R 226000
2025-07-08 19:45:39.813 +08:00 [INF] thr:50<> loader Requires:SSPP Z 30
2025-07-08 19:45:40.264 +08:00 [INF] thr:50<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-08 19:45:40.264 +08:00 [INF] thr:50<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-08 19:45:40.264 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-08 19:45:40.766 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:40.766 +08:00 [INF] thr:50<> loader Requires:INPUT A 6
2025-07-08 19:45:41.221 +08:00 [INF] thr:50<> loader Requires:MATS AJ R 0
2025-07-08 19:45:44.470 +08:00 [INF] thr:50<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-08 19:45:44.471 +08:00 [INF] thr:50<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-08 19:45:44.471 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-08 19:45:44.975 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:44.975 +08:00 [INF] thr:50<> loader Requires:SSP Z 1000
2025-07-08 19:45:45.423 +08:00 [INF] thr:50<> loader Requires:MATS AJ Z 0
2025-07-08 19:45:48.036 +08:00 [INF] thr:50<> loader Requires:SSPP Z 30
2025-07-08 19:45:48.484 +08:00 [INF] thr:50<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-08 19:45:48.484 +08:00 [INF] thr:50<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-08 19:45:48.484 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-08 19:45:48.988 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:48.988 +08:00 [INF] thr:50<> loader Requires:SSP Z 1000
2025-07-08 19:45:49.436 +08:00 [INF] thr:50<> loader Requires:OUTP 1 0
2025-07-08 19:45:49.883 +08:00 [INF] thr:50<> loader Requires:OUTP 16 1
2025-07-08 19:45:50.331 +08:00 [INF] thr:50<> loader Requires:OUTP 15 1
2025-07-08 19:45:50.780 +08:00 [INF] thr:50<> loader Requires:OUTP 4 1
2025-07-08 19:45:51.226 +08:00 [INF] thr:50<> loader Requires:OUTP 1 1
2025-07-08 19:45:51.671 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 19:45:52.625 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 19:45:53.578 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 19:45:54.532 +08:00 [INF] thr:50<> loader Requires:INPUT A 4
2025-07-08 19:45:54.982 +08:00 [INF] thr:50<> loader Requires:INPUT A 5
2025-07-08 19:45:55.436 +08:00 [INF] thr:50<> loader Requires:MATS AJ Z 1
2025-07-08 19:45:58.052 +08:00 [INF] thr:50<> loader Requires:SSPP Z 30
2025-07-08 19:45:58.503 +08:00 [INF] thr:50<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-08 19:45:58.503 +08:00 [INF] thr:50<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-08 19:45:58.503 +08:00 [INF] thr:50<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-08 19:45:59.006 +08:00 [INF] thr:50<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:45:59.006 +08:00 [INF] thr:50<> loader Requires:RETH
2025-07-08 19:46:04.041 +08:00 [INF] thr:50<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-08 19:46:04.043 +08:00 [INF] thr:50<> 执行Aligner角度angle：0
2025-07-08 19:47:28.380 +08:00 [INF] thr:45<> loader Requires:INPUT B 13
2025-07-08 19:47:29.385 +08:00 [INF] thr:62<> 执行Aligner角度angle：0
2025-07-08 19:47:30.393 +08:00 [INF] thr:62<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-08 19:47:30.394 +08:00 [INF] thr:62<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 19:47:30.394 +08:00 [INF] thr:62<> loader Requires:RGRP
2025-07-08 19:47:30.839 +08:00 [INF] thr:62<> CLeanLoader Group Now C
2025-07-08 19:47:30.839 +08:00 [INF] thr:62<> loader Requires:MATS AJ T
2025-07-08 19:47:31.298 +08:00 [INF] thr:62<> loader Requires:SSP Z 4000
2025-07-08 19:47:31.746 +08:00 [INF] thr:62<> loader Requires:MATS AJ Z 1
2025-07-08 19:47:32.219 +08:00 [INF] thr:62<> loader Requires:MOVR R 226000
2025-07-08 19:47:34.814 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 19:47:35.265 +08:00 [INF] thr:62<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-08 19:47:35.265 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-08 19:47:35.265 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-08 19:47:35.769 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:47:35.769 +08:00 [INF] thr:62<> loader Requires:INPUT A 6
2025-07-08 19:47:36.222 +08:00 [INF] thr:62<> loader Requires:OUTP 1 0
2025-07-08 19:47:36.668 +08:00 [INF] thr:62<> loader Requires:OUTP 16 1
2025-07-08 19:47:37.115 +08:00 [INF] thr:62<> loader Requires:OUTP 15 1
2025-07-08 19:47:37.564 +08:00 [INF] thr:62<> loader Requires:OUTP 4 1
2025-07-08 19:47:38.011 +08:00 [INF] thr:62<> loader Requires:OUTP 1 1
2025-07-08 19:47:38.457 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:38.909 +08:00 [INF] thr:62<> loader Requires:MATS AJ R 0
2025-07-08 19:47:42.157 +08:00 [INF] thr:62<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-08 19:47:42.158 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-08 19:47:42.158 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-08 19:47:42.659 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:47:42.659 +08:00 [INF] thr:62<> loader Requires:SSP Z 1000
2025-07-08 19:47:43.109 +08:00 [INF] thr:62<> loader Requires:MATS AJ Z 0
2025-07-08 19:47:45.722 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 19:47:46.171 +08:00 [INF] thr:62<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-08 19:47:46.171 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-08 19:47:46.171 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-08 19:47:46.676 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:47:46.676 +08:00 [INF] thr:62<> loader Requires:SSP Z 1000
2025-07-08 19:47:47.123 +08:00 [INF] thr:62<> loader Requires:OUTP 1 0
2025-07-08 19:47:47.570 +08:00 [INF] thr:62<> loader Requires:OUTP 16 0
2025-07-08 19:47:48.017 +08:00 [INF] thr:62<> loader Requires:OUTP 15 1
2025-07-08 19:47:48.465 +08:00 [INF] thr:62<> loader Requires:OUTP 4 0
2025-07-08 19:47:48.912 +08:00 [INF] thr:62<> loader Requires:OUTP 1 1
2025-07-08 19:47:49.359 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:50.311 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:51.264 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:52.218 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:53.169 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:54.125 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:47:54.579 +08:00 [INF] thr:62<> loader Requires:INPUT A 5
2025-07-08 19:47:55.031 +08:00 [INF] thr:62<> loader Requires:MATS AJ Z 1
2025-07-08 19:47:57.648 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 19:47:58.100 +08:00 [INF] thr:62<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-08 19:47:58.100 +08:00 [INF] thr:62<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-08 19:47:58.100 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-08 19:47:58.603 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:47:58.603 +08:00 [INF] thr:62<> loader Requires:RETH
2025-07-08 19:48:03.638 +08:00 [INF] thr:62<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-08 19:48:03.639 +08:00 [INF] thr:62<> AOI is Ready
2025-07-08 19:48:03.722 +08:00 [INF] thr:62<> SetVelocity, Axis:X, velocity:50
2025-07-08 19:48:03.730 +08:00 [INF] thr:62<> SetVelocity, Axis:Y, velocity:50
2025-07-08 19:48:03.776 +08:00 [INF] thr:62<> SetVelocity, Axis:X, velocity:8
2025-07-08 19:48:03.779 +08:00 [INF] thr:62<> SetVelocity, Axis:Y, velocity:8
2025-07-08 19:48:03.795 +08:00 [INF] thr:62<> stage move to position action ok
2025-07-08 19:48:03.796 +08:00 [INF] thr:62<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-08 19:48:03.796 +08:00 [INF] thr:62<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-08 19:48:03.796 +08:00 [INF] thr:62<> loader Requires:RGRP
2025-07-08 19:48:04.238 +08:00 [INF] thr:62<> CLeanLoader Group Now C
2025-07-08 19:48:04.238 +08:00 [INF] thr:62<> loader Requires:MATS AK T
2025-07-08 19:48:07.772 +08:00 [INF] thr:62<> loader Requires:SSP Z 4000
2025-07-08 19:48:08.222 +08:00 [INF] thr:62<> loader Requires:MATS AK Z 1
2025-07-08 19:48:15.246 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 19:48:15.697 +08:00 [INF] thr:62<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-08 19:48:15.698 +08:00 [INF] thr:62<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-08 19:48:15.698 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-08 19:48:16.201 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:48:16.201 +08:00 [INF] thr:62<> loader Requires:INPUT A 6
2025-07-08 19:48:16.655 +08:00 [INF] thr:62<> loader Requires:MATS AK R 0
2025-07-08 19:48:21.938 +08:00 [INF] thr:62<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-08 19:48:21.938 +08:00 [INF] thr:62<> Station:InspectStageA,SafeCheck:上片请求
2025-07-08 19:48:21.938 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-08 19:48:22.462 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:48:22.462 +08:00 [INF] thr:62<> loader Requires:SSP Z 1000
2025-07-08 19:48:22.911 +08:00 [INF] thr:62<> loader Requires:MATS AK Z 0
2025-07-08 19:48:25.625 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 19:48:26.116 +08:00 [INF] thr:62<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-08 19:48:26.116 +08:00 [INF] thr:62<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-08 19:48:26.116 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-08 19:48:26.621 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:48:26.621 +08:00 [INF] thr:62<> loader Requires:SSP Z 1000
2025-07-08 19:48:27.070 +08:00 [INF] thr:62<> loader Requires:OUTP 1 0
2025-07-08 19:48:27.516 +08:00 [INF] thr:62<> loader Requires:OUTP 16 1
2025-07-08 19:48:27.963 +08:00 [INF] thr:62<> loader Requires:OUTP 15 1
2025-07-08 19:48:28.412 +08:00 [INF] thr:62<> loader Requires:OUTP 4 1
2025-07-08 19:48:28.859 +08:00 [INF] thr:62<> loader Requires:OUTP 1 1
2025-07-08 19:48:29.305 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:48:30.258 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:48:31.212 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:48:32.165 +08:00 [INF] thr:62<> loader Requires:INPUT A 4
2025-07-08 19:48:32.616 +08:00 [INF] thr:62<> loader Requires:INPUT A 5
2025-07-08 19:48:33.070 +08:00 [INF] thr:62<> loader Requires:MATS AK Z 1
2025-07-08 19:48:35.786 +08:00 [INF] thr:62<> loader Requires:SSPP Z 30
2025-07-08 19:48:36.243 +08:00 [INF] thr:62<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-08 19:48:36.243 +08:00 [INF] thr:62<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-08 19:48:36.243 +08:00 [INF] thr:62<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-08 19:48:37.249 +08:00 [INF] thr:62<> Safe ExecuteCommand sucess, plc is 0
2025-07-08 19:48:37.249 +08:00 [INF] thr:62<> loader Requires:RETH
2025-07-08 19:48:42.511 +08:00 [INF] thr:62<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-09 15:11:38.232 +08:00 [INF] thr:14<> get state: False
2025-07-09 15:11:38.233 +08:00 [INF] thr:14<> BoxExist:False
2025-07-09 15:11:47.763 +08:00 [INF] thr:14<> get state: True
2025-07-09 15:11:47.763 +08:00 [INF] thr:14<> BoxExist:True
2025-07-09 15:11:49.983 +08:00 [INF] thr:62<> CassettA Unloaded
2025-07-09 16:00:16.035 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:58048
2025-07-09 17:04:14.733 +08:00 [INF] thr:21<> the connection has been disconnected: 127.0.0.1:57367
2025-07-09 18:09:43.545 +08:00 [INF] thr:33<> loader Requires:INPUT B 13
2025-07-09 18:19:33.146 +08:00 [INF] thr:53<> CleanLoader Init Start
2025-07-09 18:19:33.146 +08:00 [INF] thr:53<> loader Requires:RSIO 13
2025-07-09 18:19:33.599 +08:00 [INF] thr:53<> loader Requires:INPUT B 13
2025-07-09 18:19:34.054 +08:00 [INF] thr:53<> loader Requires:REMS
2025-07-09 18:19:34.501 +08:00 [INF] thr:53<> loader Requires:VER
2025-07-09 18:19:34.947 +08:00 [INF] thr:53<> HIWIN loader Version:1.86.0.77
2025-07-09 18:19:34.947 +08:00 [INF] thr:53<> loader Requires:SVON
2025-07-09 18:19:35.397 +08:00 [INF] thr:53<> loader Requires:INPUT A 6
2025-07-09 18:19:35.848 +08:00 [INF] thr:53<> loader Requires:INPUT A 9
2025-07-09 18:19:36.303 +08:00 [INF] thr:53<> loader Requires:OUTP 1 0
2025-07-09 18:19:36.749 +08:00 [INF] thr:53<> loader Requires:OUTP 4 0
2025-07-09 18:19:37.195 +08:00 [INF] thr:53<> loader Requires:HOM
2025-07-09 18:20:26.505 +08:00 [INF] thr:53<> loader Requires:ERR 0
2025-07-09 18:20:27.029 +08:00 [INF] thr:53<> loader Requires:SSPP A 30 30 30
2025-07-09 18:20:27.501 +08:00 [INF] thr:53<> CleanLoader Init Finished
2025-07-09 18:20:27.502 +08:00 [INF] thr:63<> LoadPortProxy Reset Start
2025-07-09 18:20:27.502 +08:00 [INF] thr:47<> StageProxy Reset Start
2025-07-09 18:20:27.502 +08:00 [INF] thr:17<> AlignerProxy Reset Start
2025-07-09 18:20:27.502 +08:00 [INF] thr:63<> LoadPort Reset Start
2025-07-09 18:20:27.503 +08:00 [INF] thr:45<> CassettA Disconnected
2025-07-09 18:20:27.503 +08:00 [INF] thr:17<> Aligner Reset Start
2025-07-09 18:20:27.843 +08:00 [INF] thr:12<> 开始Home
2025-07-09 18:20:28.021 +08:00 [INF] thr:47<> StageProxy Reset Finished
2025-07-09 18:20:31.508 +08:00 [INF] thr:17<> AlignerProxy Reset Finished
2025-07-09 18:20:36.314 +08:00 [INF] thr:12<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-09 18:20:36.314 +08:00 [INF] thr:47<> CassettA Absence
2025-07-09 18:20:36.314 +08:00 [INF] thr:17<> CassettA Unloaded
2025-07-09 18:20:36.512 +08:00 [INF] thr:63<> LoadPortProxy Reset Finished
2025-07-09 18:21:38.433 +08:00 [INF] thr:55<> loader Requires:INPUT B 13
2025-07-09 18:21:39.412 +08:00 [INF] thr:17<> 执行Aligner角度angle：0
2025-07-09 18:21:40.417 +08:00 [INF] thr:17<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-09 18:21:40.418 +08:00 [INF] thr:17<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:21:40.418 +08:00 [INF] thr:17<> loader Requires:RGRP
2025-07-09 18:21:40.862 +08:00 [INF] thr:17<> CLeanLoader Group Now C
2025-07-09 18:21:40.862 +08:00 [INF] thr:17<> loader Requires:MATS AJ T
2025-07-09 18:21:43.739 +08:00 [INF] thr:17<> loader Requires:SSP Z 4000
2025-07-09 18:21:44.187 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-09 18:21:47.065 +08:00 [INF] thr:17<> loader Requires:MOVR R 226000
2025-07-09 18:21:49.659 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:21:50.110 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-09 18:21:50.110 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-09 18:21:50.110 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-09 18:21:50.614 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:21:50.614 +08:00 [INF] thr:17<> loader Requires:INPUT A 6
2025-07-09 18:21:51.068 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-09 18:21:51.515 +08:00 [INF] thr:17<> loader Requires:OUTP 16 1
2025-07-09 18:21:51.962 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-09 18:21:52.410 +08:00 [INF] thr:17<> loader Requires:OUTP 4 1
2025-07-09 18:21:52.858 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-09 18:21:53.306 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:21:53.761 +08:00 [INF] thr:17<> loader Requires:MATS AJ R 0
2025-07-09 18:21:57.008 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-09 18:21:57.008 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-09 18:21:57.008 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-09 18:21:57.513 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:21:57.513 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-09 18:21:57.960 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 0
2025-07-09 18:22:00.573 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:22:01.022 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-09 18:22:01.022 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-09 18:22:01.022 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-09 18:22:01.525 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:22:01.525 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-09 18:22:01.973 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-09 18:22:02.422 +08:00 [INF] thr:17<> loader Requires:OUTP 16 0
2025-07-09 18:22:02.868 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-09 18:22:03.317 +08:00 [INF] thr:17<> loader Requires:OUTP 4 0
2025-07-09 18:22:03.764 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-09 18:22:04.210 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:05.163 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:06.117 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:07.070 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:08.024 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:08.979 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:09.431 +08:00 [INF] thr:17<> loader Requires:INPUT A 5
2025-07-09 18:22:09.884 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-09 18:22:12.502 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:22:12.952 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-09 18:22:12.952 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-09 18:22:12.952 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-09 18:22:13.456 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:22:13.456 +08:00 [INF] thr:17<> loader Requires:RETH
2025-07-09 18:22:18.492 +08:00 [INF] thr:17<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-09 18:22:18.493 +08:00 [INF] thr:17<> AOI is Ready
2025-07-09 18:22:18.557 +08:00 [INF] thr:17<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:22:18.561 +08:00 [INF] thr:17<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:22:18.597 +08:00 [INF] thr:17<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:22:18.601 +08:00 [INF] thr:17<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:22:18.617 +08:00 [INF] thr:17<> stage move to position action ok
2025-07-09 18:22:18.617 +08:00 [INF] thr:17<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-09 18:22:18.619 +08:00 [INF] thr:17<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:22:18.619 +08:00 [INF] thr:17<> loader Requires:RGRP
2025-07-09 18:22:19.063 +08:00 [INF] thr:17<> CLeanLoader Group Now C
2025-07-09 18:22:19.063 +08:00 [INF] thr:17<> loader Requires:MATS AK T
2025-07-09 18:22:22.599 +08:00 [INF] thr:17<> loader Requires:SSP Z 4000
2025-07-09 18:22:23.045 +08:00 [INF] thr:17<> loader Requires:MATS AK Z 1
2025-07-09 18:22:30.066 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:22:30.515 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-09 18:22:30.515 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-09 18:22:30.515 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-09 18:22:31.018 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:22:31.018 +08:00 [INF] thr:17<> loader Requires:INPUT A 6
2025-07-09 18:22:31.472 +08:00 [INF] thr:17<> loader Requires:MATS AK R 0
2025-07-09 18:22:36.754 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-09 18:22:36.754 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片请求
2025-07-09 18:22:36.754 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-09 18:22:37.257 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:22:37.257 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-09 18:22:37.704 +08:00 [INF] thr:17<> loader Requires:MATS AK Z 0
2025-07-09 18:22:40.416 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:22:40.893 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-09 18:22:40.893 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-09 18:22:40.893 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-09 18:22:41.396 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:22:41.396 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-09 18:22:41.845 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-09 18:22:42.292 +08:00 [INF] thr:17<> loader Requires:OUTP 16 1
2025-07-09 18:22:42.740 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-09 18:22:43.188 +08:00 [INF] thr:17<> loader Requires:OUTP 4 1
2025-07-09 18:22:43.634 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-09 18:22:44.079 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:45.034 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:45.987 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:46.941 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:22:47.391 +08:00 [INF] thr:17<> loader Requires:INPUT A 5
2025-07-09 18:22:47.844 +08:00 [INF] thr:17<> loader Requires:MATS AK Z 1
2025-07-09 18:22:50.563 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:22:51.016 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-09 18:22:51.016 +08:00 [INF] thr:17<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-09 18:22:51.016 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-09 18:22:51.532 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:22:51.532 +08:00 [INF] thr:17<> loader Requires:RETH
2025-07-09 18:22:56.796 +08:00 [INF] thr:17<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-09 18:23:05.530 +08:00 [INF] thr:58<> loader Requires:INPUT B 13
2025-07-09 18:23:06.994 +08:00 [INF] thr:35<> AOI is Ready
2025-07-09 18:23:07.084 +08:00 [INF] thr:35<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:23:07.087 +08:00 [INF] thr:35<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:23:07.127 +08:00 [INF] thr:35<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:23:07.130 +08:00 [INF] thr:35<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:23:07.146 +08:00 [INF] thr:35<> stage move to position action ok
2025-07-09 18:23:07.147 +08:00 [INF] thr:35<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-09 18:23:07.147 +08:00 [INF] thr:35<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:23:07.147 +08:00 [INF] thr:35<> loader Requires:RGRP
2025-07-09 18:23:07.589 +08:00 [INF] thr:35<> CLeanLoader Group Now C
2025-07-09 18:23:07.589 +08:00 [INF] thr:35<> loader Requires:MATS AK T
2025-07-09 18:23:08.047 +08:00 [INF] thr:35<> loader Requires:SSP Z 4000
2025-07-09 18:23:08.494 +08:00 [INF] thr:35<> loader Requires:MATS AK Z 1
2025-07-09 18:23:08.968 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-09 18:23:09.417 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-09 18:23:09.417 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-09 18:23:09.417 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-09 18:23:09.921 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:23:09.922 +08:00 [INF] thr:35<> loader Requires:INPUT A 6
2025-07-09 18:23:10.375 +08:00 [INF] thr:35<> loader Requires:OUTP 1 0
2025-07-09 18:23:10.822 +08:00 [INF] thr:35<> loader Requires:OUTP 16 1
2025-07-09 18:23:11.269 +08:00 [INF] thr:35<> loader Requires:OUTP 15 1
2025-07-09 18:23:11.717 +08:00 [INF] thr:35<> loader Requires:OUTP 4 1
2025-07-09 18:23:12.164 +08:00 [INF] thr:35<> loader Requires:OUTP 1 1
2025-07-09 18:23:12.610 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:13.062 +08:00 [INF] thr:35<> loader Requires:MATS AK R 0
2025-07-09 18:23:18.344 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-09 18:23:18.344 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:下片请求
2025-07-09 18:23:18.344 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-09 18:23:18.847 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:23:18.847 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-09 18:23:19.293 +08:00 [INF] thr:35<> loader Requires:MATS AK Z 0
2025-07-09 18:23:22.006 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-09 18:23:22.474 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-09 18:23:22.474 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-09 18:23:22.474 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-09 18:23:22.977 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:23:22.978 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-09 18:23:23.427 +08:00 [INF] thr:35<> loader Requires:OUTP 1 0
2025-07-09 18:23:23.874 +08:00 [INF] thr:35<> loader Requires:OUTP 16 0
2025-07-09 18:23:24.322 +08:00 [INF] thr:35<> loader Requires:OUTP 15 1
2025-07-09 18:23:24.770 +08:00 [INF] thr:35<> loader Requires:OUTP 4 0
2025-07-09 18:23:25.217 +08:00 [INF] thr:35<> loader Requires:OUTP 1 1
2025-07-09 18:23:25.663 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:26.620 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:27.573 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:28.526 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:29.486 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:30.441 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-09 18:23:30.892 +08:00 [INF] thr:35<> loader Requires:INPUT A 5
2025-07-09 18:23:31.346 +08:00 [INF] thr:35<> loader Requires:MATS AK Z 1
2025-07-09 18:23:34.063 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-09 18:23:34.513 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-09 18:23:34.513 +08:00 [INF] thr:35<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-09 18:23:34.513 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-09 18:23:35.016 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:23:35.016 +08:00 [INF] thr:35<> loader Requires:RETH
2025-07-09 18:23:40.278 +08:00 [INF] thr:35<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-09 18:23:40.293 +08:00 [INF] thr:17<> 执行Aligner设置初始角度InitialAngle：0
2025-07-09 18:23:40.293 +08:00 [INF] thr:17<> 执行Aligner角度angle：0
2025-07-09 18:23:41.309 +08:00 [INF] thr:17<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-09 18:23:41.310 +08:00 [INF] thr:17<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:23:41.310 +08:00 [INF] thr:17<> loader Requires:RGRP
2025-07-09 18:23:41.753 +08:00 [INF] thr:17<> CLeanLoader Group Now C
2025-07-09 18:23:41.753 +08:00 [INF] thr:17<> loader Requires:MATS AJ T
2025-07-09 18:23:45.295 +08:00 [INF] thr:17<> loader Requires:SSP Z 4000
2025-07-09 18:23:45.741 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-09 18:23:52.760 +08:00 [INF] thr:17<> loader Requires:MOVR R 226000
2025-07-09 18:23:55.354 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:23:55.804 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-09 18:23:55.804 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-09 18:23:55.804 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-09 18:23:56.309 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:23:56.310 +08:00 [INF] thr:17<> loader Requires:INPUT A 6
2025-07-09 18:23:56.764 +08:00 [INF] thr:17<> loader Requires:MATS AJ R 0
2025-07-09 18:24:00.014 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-09 18:24:00.014 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-09 18:24:00.014 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-09 18:24:00.517 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:24:00.517 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-09 18:24:00.966 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 0
2025-07-09 18:24:03.579 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:24:04.028 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-09 18:24:04.028 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-09 18:24:04.028 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-09 18:24:04.536 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:24:04.537 +08:00 [INF] thr:17<> loader Requires:SSP Z 1000
2025-07-09 18:24:04.987 +08:00 [INF] thr:17<> loader Requires:OUTP 1 0
2025-07-09 18:24:05.434 +08:00 [INF] thr:17<> loader Requires:OUTP 16 1
2025-07-09 18:24:05.882 +08:00 [INF] thr:17<> loader Requires:OUTP 15 1
2025-07-09 18:24:06.329 +08:00 [INF] thr:17<> loader Requires:OUTP 4 1
2025-07-09 18:24:06.776 +08:00 [INF] thr:17<> loader Requires:OUTP 1 1
2025-07-09 18:24:07.223 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:24:08.176 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:24:09.128 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:24:10.081 +08:00 [INF] thr:17<> loader Requires:INPUT A 4
2025-07-09 18:24:10.534 +08:00 [INF] thr:17<> loader Requires:INPUT A 5
2025-07-09 18:24:10.986 +08:00 [INF] thr:17<> loader Requires:MATS AJ Z 1
2025-07-09 18:24:13.604 +08:00 [INF] thr:17<> loader Requires:SSPP Z 30
2025-07-09 18:24:14.053 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-09 18:24:14.054 +08:00 [INF] thr:17<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-09 18:24:14.054 +08:00 [INF] thr:17<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-09 18:24:14.558 +08:00 [INF] thr:17<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:24:14.558 +08:00 [INF] thr:17<> loader Requires:RETH
2025-07-09 18:24:19.593 +08:00 [INF] thr:17<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-09 18:24:19.595 +08:00 [INF] thr:17<> 执行Aligner角度angle：0
2025-07-09 18:26:19.001 +08:00 [INF] thr:63<> CleanLoader Init Start
2025-07-09 18:26:19.001 +08:00 [INF] thr:63<> loader Requires:RSIO 13
2025-07-09 18:26:19.457 +08:00 [INF] thr:63<> loader Requires:INPUT B 13
2025-07-09 18:26:19.912 +08:00 [INF] thr:63<> loader Requires:REMS
2025-07-09 18:26:20.355 +08:00 [INF] thr:63<> loader Requires:VER
2025-07-09 18:26:20.803 +08:00 [INF] thr:63<> HIWIN loader Version:1.86.0.77
2025-07-09 18:26:20.803 +08:00 [INF] thr:63<> loader Requires:SVON
2025-07-09 18:26:21.254 +08:00 [INF] thr:63<> loader Requires:INPUT A 6
2025-07-09 18:26:21.705 +08:00 [INF] thr:63<> loader Requires:INPUT A 9
2025-07-09 18:26:22.159 +08:00 [INF] thr:63<> loader Requires:OUTP 1 0
2025-07-09 18:26:22.606 +08:00 [INF] thr:63<> loader Requires:OUTP 4 0
2025-07-09 18:26:23.055 +08:00 [INF] thr:63<> loader Requires:HOM
2025-07-09 18:26:57.164 +08:00 [INF] thr:63<> loader Requires:ERR 0
2025-07-09 18:26:57.689 +08:00 [INF] thr:63<> loader Requires:SSPP A 30 30 30
2025-07-09 18:26:58.161 +08:00 [INF] thr:63<> CleanLoader Init Finished
2025-07-09 18:26:58.161 +08:00 [INF] thr:63<> StageProxy Reset Start
2025-07-09 18:26:58.161 +08:00 [INF] thr:53<> AlignerProxy Reset Start
2025-07-09 18:26:58.161 +08:00 [INF] thr:19<> LoadPortProxy Reset Start
2025-07-09 18:26:58.161 +08:00 [INF] thr:53<> Aligner Reset Start
2025-07-09 18:26:58.161 +08:00 [INF] thr:19<> LoadPort Reset Start
2025-07-09 18:26:58.161 +08:00 [INF] thr:47<> CassettA Disconnected
2025-07-09 18:26:58.667 +08:00 [INF] thr:63<> StageProxy Reset Finished
2025-07-09 18:26:58.795 +08:00 [INF] thr:12<> 开始Home
2025-07-09 18:27:07.173 +08:00 [INF] thr:53<> AlignerProxy Reset Finished
2025-07-09 18:27:07.174 +08:00 [INF] thr:12<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-09 18:27:07.174 +08:00 [INF] thr:53<> CassettA Absence
2025-07-09 18:27:07.174 +08:00 [INF] thr:33<> CassettA Unloaded
2025-07-09 18:27:08.174 +08:00 [INF] thr:19<> LoadPortProxy Reset Finished
2025-07-09 18:27:24.603 +08:00 [INF] thr:49<> loader Requires:INPUT B 13
2025-07-09 18:27:25.596 +08:00 [INF] thr:19<> 执行Aligner角度angle：0
2025-07-09 18:27:26.602 +08:00 [INF] thr:19<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-09 18:27:26.607 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:27:26.607 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-09 18:27:27.050 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-09 18:27:27.050 +08:00 [INF] thr:19<> loader Requires:MATS AJ T
2025-07-09 18:27:29.925 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-09 18:27:30.374 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-09 18:27:33.250 +08:00 [INF] thr:19<> loader Requires:MOVR R 226000
2025-07-09 18:27:35.844 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:27:36.296 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-09 18:27:36.296 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-09 18:27:36.296 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-09 18:27:36.810 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:27:36.810 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-09 18:27:37.261 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-09 18:27:37.708 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-09 18:27:38.158 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-09 18:27:38.607 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-09 18:27:39.054 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-09 18:27:39.500 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:39.952 +08:00 [INF] thr:19<> loader Requires:MATS AJ R 0
2025-07-09 18:27:43.202 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-09 18:27:43.202 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-09 18:27:43.202 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-09 18:27:43.704 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:27:43.704 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:27:44.152 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 0
2025-07-09 18:27:46.764 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:27:47.213 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-09 18:27:47.213 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-09 18:27:47.213 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-09 18:27:47.717 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:27:47.717 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:27:48.164 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-09 18:27:48.612 +08:00 [INF] thr:19<> loader Requires:OUTP 16 0
2025-07-09 18:27:49.059 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-09 18:27:49.508 +08:00 [INF] thr:19<> loader Requires:OUTP 4 0
2025-07-09 18:27:49.955 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-09 18:27:50.400 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:51.353 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:52.308 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:53.260 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:54.213 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:55.167 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:27:55.617 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-09 18:27:56.071 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-09 18:27:58.687 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:27:59.138 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-09 18:27:59.138 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-09 18:27:59.138 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-09 18:27:59.642 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:27:59.642 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-09 18:28:04.676 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-09 18:28:04.678 +08:00 [INF] thr:19<> AOI is Ready
2025-07-09 18:28:04.740 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:28:04.744 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:28:04.781 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:28:04.788 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:28:04.821 +08:00 [INF] thr:19<> stage move to position action ok
2025-07-09 18:28:04.821 +08:00 [INF] thr:19<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-09 18:28:04.822 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:28:04.822 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-09 18:28:05.265 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-09 18:28:05.265 +08:00 [INF] thr:19<> loader Requires:MATS AK T
2025-07-09 18:28:08.806 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-09 18:28:09.255 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-09 18:28:16.273 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:28:16.723 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-09 18:28:16.723 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-09 18:28:16.723 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-09 18:28:17.236 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:28:17.236 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-09 18:28:17.689 +08:00 [INF] thr:19<> loader Requires:MATS AK R 0
2025-07-09 18:28:22.970 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-09 18:28:22.970 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片请求
2025-07-09 18:28:22.970 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-09 18:28:23.473 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:28:23.473 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:28:23.921 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 0
2025-07-09 18:28:26.634 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:28:27.106 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-09 18:28:27.106 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-09 18:28:27.106 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-09 18:28:27.611 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:28:27.611 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:28:28.061 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-09 18:28:28.507 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-09 18:28:28.953 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-09 18:28:29.403 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-09 18:28:29.849 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-09 18:28:30.296 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:28:31.249 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:28:32.202 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:28:33.156 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:28:33.606 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-09 18:28:34.059 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-09 18:28:36.777 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:28:37.228 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-09 18:28:37.228 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-09 18:28:37.228 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-09 18:28:38.235 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:28:38.235 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-09 18:28:43.498 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-09 18:28:47.603 +08:00 [INF] thr:58<> loader Requires:INPUT B 13
2025-07-09 18:28:49.066 +08:00 [INF] thr:19<> AOI is Ready
2025-07-09 18:28:49.129 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:28:49.133 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:28:49.171 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:28:49.178 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:28:49.212 +08:00 [INF] thr:19<> stage move to position action ok
2025-07-09 18:28:49.212 +08:00 [INF] thr:19<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-09 18:28:49.231 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:28:49.231 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-09 18:28:49.672 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-09 18:28:49.672 +08:00 [INF] thr:19<> loader Requires:MATS AK T
2025-07-09 18:28:50.130 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-09 18:28:50.580 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-09 18:28:51.051 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:28:51.502 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-09 18:28:51.502 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-09 18:28:51.502 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-09 18:28:52.005 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:28:52.005 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-09 18:28:52.458 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-09 18:28:52.905 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-09 18:28:53.354 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-09 18:28:53.801 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-09 18:28:54.248 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-09 18:28:54.694 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:28:55.147 +08:00 [INF] thr:19<> loader Requires:MATS AK R 0
2025-07-09 18:29:00.428 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-09 18:29:00.428 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片请求
2025-07-09 18:29:00.428 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-09 18:29:00.930 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:00.931 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:29:01.378 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 0
2025-07-09 18:29:04.091 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:29:04.566 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-09 18:29:04.566 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-09 18:29:04.566 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-09 18:29:05.084 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:05.084 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:29:05.535 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-09 18:29:05.980 +08:00 [INF] thr:19<> loader Requires:OUTP 16 0
2025-07-09 18:29:06.428 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-09 18:29:06.876 +08:00 [INF] thr:19<> loader Requires:OUTP 4 0
2025-07-09 18:29:07.323 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-09 18:29:07.769 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:08.725 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:09.679 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:10.632 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:11.586 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:12.537 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:12.990 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-09 18:29:13.444 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-09 18:29:16.160 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:29:16.610 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-09 18:29:16.610 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-09 18:29:16.610 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-09 18:29:17.114 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:17.115 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-09 18:29:22.376 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-09 18:29:22.378 +08:00 [INF] thr:19<> 执行Aligner设置初始角度InitialAngle：0
2025-07-09 18:29:22.378 +08:00 [INF] thr:19<> 执行Aligner角度angle：0
2025-07-09 18:29:23.383 +08:00 [INF] thr:19<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-09 18:29:23.384 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:29:23.384 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-09 18:29:23.832 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-09 18:29:23.832 +08:00 [INF] thr:19<> loader Requires:MATS AJ T
2025-07-09 18:29:27.372 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-09 18:29:27.820 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-09 18:29:34.839 +08:00 [INF] thr:19<> loader Requires:MOVR R 226000
2025-07-09 18:29:37.434 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:29:37.885 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-09 18:29:37.885 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-09 18:29:37.885 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-09 18:29:38.388 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:38.388 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-09 18:29:38.842 +08:00 [INF] thr:19<> loader Requires:MATS AJ R 0
2025-07-09 18:29:42.091 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-09 18:29:42.091 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-09 18:29:42.091 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-09 18:29:42.595 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:42.595 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:29:43.044 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 0
2025-07-09 18:29:45.657 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:29:46.106 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-09 18:29:46.106 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-09 18:29:46.106 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-09 18:29:46.616 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:46.616 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-09 18:29:47.066 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-09 18:29:47.513 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-09 18:29:47.960 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-09 18:29:48.408 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-09 18:29:48.855 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-09 18:29:49.301 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:50.259 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:51.213 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:52.164 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-09 18:29:52.617 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-09 18:29:53.069 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-09 18:29:55.686 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-09 18:29:56.136 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-09 18:29:56.136 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-09 18:29:56.136 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-09 18:29:56.643 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:29:56.643 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-09 18:30:01.679 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-09 18:30:01.680 +08:00 [INF] thr:19<> 执行Aligner角度angle：0
2025-07-09 18:33:55.996 +08:00 [INF] thr:37<> loader Requires:INPUT B 13
2025-07-09 18:33:56.998 +08:00 [INF] thr:47<> 执行Aligner角度angle：0
2025-07-09 18:33:58.007 +08:00 [INF] thr:47<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-09 18:33:58.008 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:33:58.008 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-09 18:33:58.452 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-09 18:33:58.452 +08:00 [INF] thr:47<> loader Requires:MATS AJ T
2025-07-09 18:33:58.910 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-09 18:33:59.358 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-09 18:33:59.831 +08:00 [INF] thr:47<> loader Requires:MOVR R 226000
2025-07-09 18:34:02.426 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-09 18:34:02.877 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-09 18:34:02.877 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-09 18:34:02.877 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-09 18:34:03.379 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:03.379 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-09 18:34:03.831 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-09 18:34:04.277 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-09 18:34:04.728 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-09 18:34:05.176 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-09 18:34:05.623 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-09 18:34:06.069 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:06.521 +08:00 [INF] thr:47<> loader Requires:MATS AJ R 0
2025-07-09 18:34:09.771 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-09 18:34:09.771 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-09 18:34:09.771 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-09 18:34:10.282 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:10.282 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-09 18:34:10.730 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 0
2025-07-09 18:34:13.342 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-09 18:34:13.790 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-09 18:34:13.790 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-09 18:34:13.790 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-09 18:34:14.292 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:14.292 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-09 18:34:14.742 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-09 18:34:15.189 +08:00 [INF] thr:47<> loader Requires:OUTP 16 0
2025-07-09 18:34:15.637 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-09 18:34:16.085 +08:00 [INF] thr:47<> loader Requires:OUTP 4 0
2025-07-09 18:34:16.532 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-09 18:34:16.977 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:17.930 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:18.883 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:19.838 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:20.791 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:21.745 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:22.197 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-09 18:34:22.657 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-09 18:34:25.275 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-09 18:34:25.724 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-09 18:34:25.724 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-09 18:34:25.724 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-09 18:34:26.226 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:26.226 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-09 18:34:31.258 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-09 18:34:31.260 +08:00 [INF] thr:47<> AOI is Ready
2025-07-09 18:34:31.323 +08:00 [INF] thr:47<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:34:31.326 +08:00 [INF] thr:47<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:34:31.363 +08:00 [INF] thr:47<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:34:31.367 +08:00 [INF] thr:47<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:34:31.398 +08:00 [INF] thr:47<> stage move to position action ok
2025-07-09 18:34:31.399 +08:00 [INF] thr:47<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-09 18:34:31.399 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:34:31.399 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-09 18:34:31.843 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-09 18:34:31.843 +08:00 [INF] thr:47<> loader Requires:MATS AK T
2025-07-09 18:34:35.384 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-09 18:34:35.833 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 1
2025-07-09 18:34:42.851 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-09 18:34:43.301 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-09 18:34:43.301 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-09 18:34:43.301 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-09 18:34:43.805 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:43.805 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-09 18:34:44.259 +08:00 [INF] thr:47<> loader Requires:MATS AK R 0
2025-07-09 18:34:49.542 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-09 18:34:49.542 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片请求
2025-07-09 18:34:49.542 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-09 18:34:50.045 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:50.045 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-09 18:34:50.495 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 0
2025-07-09 18:34:53.208 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-09 18:34:53.668 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-09 18:34:53.668 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-09 18:34:53.668 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-09 18:34:54.180 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:34:54.180 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-09 18:34:54.626 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-09 18:34:55.073 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-09 18:34:55.522 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-09 18:34:55.968 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-09 18:34:56.415 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-09 18:34:56.861 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:57.814 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:58.770 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:34:59.721 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-09 18:35:00.173 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-09 18:35:00.626 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 1
2025-07-09 18:35:03.345 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-09 18:35:03.794 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-09 18:35:03.794 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-09 18:35:03.794 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-09 18:35:04.801 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:35:04.801 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-09 18:35:10.061 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-09 18:38:29.875 +08:00 [INF] thr:8<> loader Requires:INPUT B 13
2025-07-09 18:38:31.338 +08:00 [INF] thr:45<> AOI is Ready
2025-07-09 18:38:31.400 +08:00 [INF] thr:45<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:38:31.403 +08:00 [INF] thr:45<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:38:31.439 +08:00 [INF] thr:45<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:38:31.443 +08:00 [INF] thr:45<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:38:31.472 +08:00 [INF] thr:45<> stage move to position action ok
2025-07-09 18:38:31.472 +08:00 [INF] thr:45<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-09 18:38:31.472 +08:00 [INF] thr:45<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:38:31.472 +08:00 [INF] thr:45<> loader Requires:RGRP
2025-07-09 18:38:31.915 +08:00 [INF] thr:45<> CLeanLoader Group Now C
2025-07-09 18:38:31.915 +08:00 [INF] thr:45<> loader Requires:MATS AK T
2025-07-09 18:38:32.374 +08:00 [INF] thr:45<> loader Requires:SSP Z 4000
2025-07-09 18:38:32.822 +08:00 [INF] thr:45<> loader Requires:MATS AK Z 1
2025-07-09 18:38:33.294 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:38:33.745 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-09 18:38:33.745 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-09 18:38:33.745 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-09 18:38:34.249 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:38:34.249 +08:00 [INF] thr:45<> loader Requires:INPUT A 6
2025-07-09 18:38:34.702 +08:00 [INF] thr:45<> loader Requires:OUTP 1 0
2025-07-09 18:38:35.148 +08:00 [INF] thr:45<> loader Requires:OUTP 16 1
2025-07-09 18:38:35.596 +08:00 [INF] thr:45<> loader Requires:OUTP 15 1
2025-07-09 18:38:36.045 +08:00 [INF] thr:45<> loader Requires:OUTP 4 1
2025-07-09 18:38:36.491 +08:00 [INF] thr:45<> loader Requires:OUTP 1 1
2025-07-09 18:38:36.938 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:37.389 +08:00 [INF] thr:45<> loader Requires:MATS AK R 0
2025-07-09 18:38:42.672 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-09 18:38:42.672 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:下片请求
2025-07-09 18:38:42.672 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-09 18:38:43.176 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:38:43.176 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:38:43.625 +08:00 [INF] thr:45<> loader Requires:MATS AK Z 0
2025-07-09 18:38:46.339 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:38:46.809 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-09 18:38:46.809 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-09 18:38:46.809 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-09 18:38:47.313 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:38:47.313 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:38:47.764 +08:00 [INF] thr:45<> loader Requires:OUTP 1 0
2025-07-09 18:38:48.210 +08:00 [INF] thr:45<> loader Requires:OUTP 16 0
2025-07-09 18:38:48.657 +08:00 [INF] thr:45<> loader Requires:OUTP 15 1
2025-07-09 18:38:49.105 +08:00 [INF] thr:45<> loader Requires:OUTP 4 0
2025-07-09 18:38:49.556 +08:00 [INF] thr:45<> loader Requires:OUTP 1 1
2025-07-09 18:38:50.002 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:50.954 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:51.910 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:52.862 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:53.814 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:54.767 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:38:55.219 +08:00 [INF] thr:45<> loader Requires:INPUT A 5
2025-07-09 18:38:55.673 +08:00 [INF] thr:45<> loader Requires:MATS AK Z 1
2025-07-09 18:38:58.389 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:38:58.839 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-09 18:38:58.839 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-09 18:38:58.839 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-09 18:38:59.343 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:38:59.344 +08:00 [INF] thr:45<> loader Requires:RETH
2025-07-09 18:39:04.607 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-09 18:39:04.608 +08:00 [INF] thr:45<> 执行Aligner设置初始角度InitialAngle：0
2025-07-09 18:39:04.608 +08:00 [INF] thr:45<> 执行Aligner角度angle：0
2025-07-09 18:39:05.616 +08:00 [INF] thr:45<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-09 18:39:05.617 +08:00 [INF] thr:45<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:39:05.617 +08:00 [INF] thr:45<> loader Requires:RGRP
2025-07-09 18:39:06.060 +08:00 [INF] thr:45<> CLeanLoader Group Now C
2025-07-09 18:39:06.060 +08:00 [INF] thr:45<> loader Requires:MATS AJ T
2025-07-09 18:39:09.602 +08:00 [INF] thr:45<> loader Requires:SSP Z 4000
2025-07-09 18:39:10.051 +08:00 [INF] thr:45<> loader Requires:MATS AJ Z 1
2025-07-09 18:39:17.077 +08:00 [INF] thr:45<> loader Requires:MOVR R 226000
2025-07-09 18:39:19.672 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:39:20.123 +08:00 [INF] thr:45<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-09 18:39:20.123 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-09 18:39:20.123 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-09 18:39:20.625 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:39:20.625 +08:00 [INF] thr:45<> loader Requires:INPUT A 6
2025-07-09 18:39:21.080 +08:00 [INF] thr:45<> loader Requires:MATS AJ R 0
2025-07-09 18:39:24.330 +08:00 [INF] thr:45<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-09 18:39:24.330 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-09 18:39:24.330 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-09 18:39:24.837 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:39:24.838 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:39:25.285 +08:00 [INF] thr:45<> loader Requires:MATS AJ Z 0
2025-07-09 18:39:27.897 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:39:28.347 +08:00 [INF] thr:45<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-09 18:39:28.347 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-09 18:39:28.347 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-09 18:39:28.851 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:39:28.851 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:39:29.300 +08:00 [INF] thr:45<> loader Requires:OUTP 1 0
2025-07-09 18:39:29.747 +08:00 [INF] thr:45<> loader Requires:OUTP 16 1
2025-07-09 18:39:30.193 +08:00 [INF] thr:45<> loader Requires:OUTP 15 1
2025-07-09 18:39:30.642 +08:00 [INF] thr:45<> loader Requires:OUTP 4 1
2025-07-09 18:39:31.089 +08:00 [INF] thr:45<> loader Requires:OUTP 1 1
2025-07-09 18:39:31.538 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:39:32.492 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:39:33.446 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:39:34.399 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:39:34.853 +08:00 [INF] thr:45<> loader Requires:INPUT A 5
2025-07-09 18:39:35.307 +08:00 [INF] thr:45<> loader Requires:MATS AJ Z 1
2025-07-09 18:39:37.924 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:39:38.374 +08:00 [INF] thr:45<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-09 18:39:38.374 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-09 18:39:38.374 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-09 18:39:38.877 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:39:38.877 +08:00 [INF] thr:45<> loader Requires:RETH
2025-07-09 18:39:43.909 +08:00 [INF] thr:45<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-09 18:39:43.911 +08:00 [INF] thr:45<> 执行Aligner角度angle：0
2025-07-09 18:42:26.844 +08:00 [INF] thr:43<> loader Requires:INPUT B 13
2025-07-09 18:42:27.818 +08:00 [INF] thr:45<> 执行Aligner角度angle：0
2025-07-09 18:42:28.824 +08:00 [INF] thr:45<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-09 18:42:28.824 +08:00 [INF] thr:45<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:42:28.824 +08:00 [INF] thr:45<> loader Requires:RGRP
2025-07-09 18:42:29.268 +08:00 [INF] thr:45<> CLeanLoader Group Now C
2025-07-09 18:42:29.268 +08:00 [INF] thr:45<> loader Requires:MATS AJ T
2025-07-09 18:42:29.726 +08:00 [INF] thr:45<> loader Requires:SSP Z 4000
2025-07-09 18:42:30.175 +08:00 [INF] thr:45<> loader Requires:MATS AJ Z 1
2025-07-09 18:42:30.647 +08:00 [INF] thr:45<> loader Requires:MOVR R 226000
2025-07-09 18:42:33.244 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:42:33.693 +08:00 [INF] thr:45<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-09 18:42:33.693 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-09 18:42:33.693 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-09 18:42:34.197 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:42:34.197 +08:00 [INF] thr:45<> loader Requires:INPUT A 6
2025-07-09 18:42:34.651 +08:00 [INF] thr:45<> loader Requires:OUTP 1 0
2025-07-09 18:42:35.098 +08:00 [INF] thr:45<> loader Requires:OUTP 16 1
2025-07-09 18:42:35.544 +08:00 [INF] thr:45<> loader Requires:OUTP 15 1
2025-07-09 18:42:35.993 +08:00 [INF] thr:45<> loader Requires:OUTP 4 1
2025-07-09 18:42:36.440 +08:00 [INF] thr:45<> loader Requires:OUTP 1 1
2025-07-09 18:42:36.886 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:37.339 +08:00 [INF] thr:45<> loader Requires:MATS AJ R 0
2025-07-09 18:42:40.587 +08:00 [INF] thr:45<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-09 18:42:40.587 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-09 18:42:40.587 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-09 18:42:41.091 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:42:41.091 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:42:41.539 +08:00 [INF] thr:45<> loader Requires:MATS AJ Z 0
2025-07-09 18:42:44.151 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:42:44.601 +08:00 [INF] thr:45<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-09 18:42:44.601 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-09 18:42:44.601 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-09 18:42:45.112 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:42:45.112 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:42:45.561 +08:00 [INF] thr:45<> loader Requires:OUTP 1 0
2025-07-09 18:42:46.008 +08:00 [INF] thr:45<> loader Requires:OUTP 16 0
2025-07-09 18:42:46.455 +08:00 [INF] thr:45<> loader Requires:OUTP 15 1
2025-07-09 18:42:46.903 +08:00 [INF] thr:45<> loader Requires:OUTP 4 0
2025-07-09 18:42:47.350 +08:00 [INF] thr:45<> loader Requires:OUTP 1 1
2025-07-09 18:42:47.796 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:48.750 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:49.704 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:50.655 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:51.609 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:52.562 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:42:53.012 +08:00 [INF] thr:45<> loader Requires:INPUT A 5
2025-07-09 18:42:53.466 +08:00 [INF] thr:45<> loader Requires:MATS AJ Z 1
2025-07-09 18:42:56.083 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:42:56.533 +08:00 [INF] thr:45<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-09 18:42:56.533 +08:00 [INF] thr:45<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-09 18:42:56.533 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-09 18:42:57.036 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:42:57.036 +08:00 [INF] thr:45<> loader Requires:RETH
2025-07-09 18:43:02.072 +08:00 [INF] thr:45<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-09 18:43:02.074 +08:00 [INF] thr:45<> AOI is Ready
2025-07-09 18:43:02.235 +08:00 [INF] thr:45<> SetVelocity, Axis:X, velocity:50
2025-07-09 18:43:02.240 +08:00 [INF] thr:45<> SetVelocity, Axis:Y, velocity:50
2025-07-09 18:43:02.313 +08:00 [INF] thr:45<> SetVelocity, Axis:X, velocity:8
2025-07-09 18:43:02.320 +08:00 [INF] thr:45<> SetVelocity, Axis:Y, velocity:8
2025-07-09 18:43:02.353 +08:00 [INF] thr:45<> stage move to position action ok
2025-07-09 18:43:02.353 +08:00 [INF] thr:45<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-09 18:43:02.354 +08:00 [INF] thr:45<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-09 18:43:02.354 +08:00 [INF] thr:45<> loader Requires:RGRP
2025-07-09 18:43:02.797 +08:00 [INF] thr:45<> CLeanLoader Group Now C
2025-07-09 18:43:02.797 +08:00 [INF] thr:45<> loader Requires:MATS AK T
2025-07-09 18:43:06.338 +08:00 [INF] thr:45<> loader Requires:SSP Z 4000
2025-07-09 18:43:06.787 +08:00 [INF] thr:45<> loader Requires:MATS AK Z 1
2025-07-09 18:43:13.805 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:43:14.255 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-09 18:43:14.255 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-09 18:43:14.255 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-09 18:43:14.759 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:43:14.759 +08:00 [INF] thr:45<> loader Requires:INPUT A 6
2025-07-09 18:43:15.212 +08:00 [INF] thr:45<> loader Requires:MATS AK R 0
2025-07-09 18:43:20.494 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-09 18:43:20.494 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:上片请求
2025-07-09 18:43:20.494 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-09 18:43:20.998 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:43:20.998 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:43:21.445 +08:00 [INF] thr:45<> loader Requires:MATS AK Z 0
2025-07-09 18:43:24.158 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:43:24.618 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-09 18:43:24.618 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-09 18:43:24.618 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-09 18:43:25.127 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:43:25.127 +08:00 [INF] thr:45<> loader Requires:SSP Z 1000
2025-07-09 18:43:25.576 +08:00 [INF] thr:45<> loader Requires:OUTP 1 0
2025-07-09 18:43:26.023 +08:00 [INF] thr:45<> loader Requires:OUTP 16 1
2025-07-09 18:43:26.469 +08:00 [INF] thr:45<> loader Requires:OUTP 15 1
2025-07-09 18:43:26.920 +08:00 [INF] thr:45<> loader Requires:OUTP 4 1
2025-07-09 18:43:27.365 +08:00 [INF] thr:45<> loader Requires:OUTP 1 1
2025-07-09 18:43:27.811 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:43:28.765 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:43:29.717 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:43:30.670 +08:00 [INF] thr:45<> loader Requires:INPUT A 4
2025-07-09 18:43:31.125 +08:00 [INF] thr:45<> loader Requires:INPUT A 5
2025-07-09 18:43:31.579 +08:00 [INF] thr:45<> loader Requires:MATS AK Z 1
2025-07-09 18:43:34.296 +08:00 [INF] thr:45<> loader Requires:SSPP Z 30
2025-07-09 18:43:34.745 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-09 18:43:34.746 +08:00 [INF] thr:45<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-09 18:43:34.746 +08:00 [INF] thr:45<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-09 18:43:35.276 +08:00 [INF] thr:45<> Safe ExecuteCommand sucess, plc is 0
2025-07-09 18:43:35.276 +08:00 [INF] thr:45<> loader Requires:RETH
2025-07-09 18:43:40.538 +08:00 [INF] thr:45<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-10 07:58:50.049 +08:00 [INF] thr:27<> loader Requires:INPUT B 13
2025-07-10 07:58:51.510 +08:00 [INF] thr:19<> AOI is Ready
2025-07-10 07:58:59.624 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:50
2025-07-10 07:58:59.627 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:50
2025-07-10 07:59:03.400 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:8
2025-07-10 07:59:03.407 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:8
2025-07-10 07:59:03.439 +08:00 [INF] thr:19<> stage move to position action ok
2025-07-10 07:59:03.439 +08:00 [INF] thr:19<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-10 07:59:03.441 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 07:59:03.441 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-10 07:59:03.882 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-10 07:59:03.882 +08:00 [INF] thr:19<> loader Requires:MATS AK T
2025-07-10 07:59:04.337 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-10 07:59:04.785 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-10 07:59:05.258 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-10 07:59:05.708 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-10 07:59:05.708 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-10 07:59:05.708 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-10 07:59:06.225 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 07:59:06.225 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-10 07:59:06.677 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-10 07:59:07.124 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-10 07:59:07.571 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-10 07:59:08.020 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-10 07:59:08.467 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-10 07:59:08.914 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:09.367 +08:00 [INF] thr:19<> loader Requires:MATS AK R 0
2025-07-10 07:59:14.646 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-10 07:59:14.646 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片请求
2025-07-10 07:59:14.646 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-10 07:59:15.150 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 07:59:15.150 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-10 07:59:15.596 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 0
2025-07-10 07:59:18.310 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-10 07:59:18.778 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-10 07:59:18.778 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-10 07:59:18.778 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-10 07:59:19.282 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 07:59:19.282 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-10 07:59:19.730 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-10 07:59:20.177 +08:00 [INF] thr:19<> loader Requires:OUTP 16 0
2025-07-10 07:59:20.625 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-10 07:59:21.073 +08:00 [INF] thr:19<> loader Requires:OUTP 4 0
2025-07-10 07:59:21.519 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-10 07:59:21.965 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:22.919 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:23.873 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:24.826 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:25.778 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:26.731 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-10 07:59:27.184 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-10 07:59:27.637 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-10 07:59:30.355 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-10 07:59:30.804 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-10 07:59:30.804 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-10 07:59:30.804 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-10 07:59:31.307 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 07:59:31.307 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-10 07:59:36.571 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-10 07:59:36.572 +08:00 [INF] thr:35<> 执行Aligner设置初始角度InitialAngle：0
2025-07-10 07:59:36.572 +08:00 [INF] thr:35<> 执行Aligner角度angle：0
2025-07-10 07:59:37.578 +08:00 [INF] thr:35<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-10 07:59:37.578 +08:00 [INF] thr:35<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 07:59:37.578 +08:00 [INF] thr:35<> loader Requires:RGRP
2025-07-10 07:59:38.021 +08:00 [INF] thr:35<> CLeanLoader Group Now C
2025-07-10 07:59:38.022 +08:00 [INF] thr:35<> loader Requires:MATS AJ T
2025-07-10 07:59:41.564 +08:00 [INF] thr:35<> loader Requires:SSP Z 4000
2025-07-10 07:59:42.012 +08:00 [INF] thr:35<> loader Requires:MATS AJ Z 1
2025-07-10 07:59:49.039 +08:00 [INF] thr:35<> loader Requires:MOVR R 226000
2025-07-10 07:59:51.634 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-10 07:59:52.084 +08:00 [INF] thr:35<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-10 07:59:52.084 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-10 07:59:52.084 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-10 07:59:52.589 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 07:59:52.589 +08:00 [INF] thr:35<> loader Requires:INPUT A 6
2025-07-10 07:59:53.042 +08:00 [INF] thr:35<> loader Requires:MATS AJ R 0
2025-07-10 07:59:56.292 +08:00 [INF] thr:35<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-10 07:59:56.292 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-10 07:59:56.292 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-10 07:59:56.796 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 07:59:56.796 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-10 07:59:57.244 +08:00 [INF] thr:35<> loader Requires:MATS AJ Z 0
2025-07-10 07:59:59.856 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-10 08:00:00.304 +08:00 [INF] thr:35<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-10 08:00:00.304 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-10 08:00:00.305 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-10 08:00:00.809 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 08:00:00.809 +08:00 [INF] thr:35<> loader Requires:SSP Z 1000
2025-07-10 08:00:01.256 +08:00 [INF] thr:35<> loader Requires:OUTP 1 0
2025-07-10 08:00:01.704 +08:00 [INF] thr:35<> loader Requires:OUTP 16 1
2025-07-10 08:00:02.151 +08:00 [INF] thr:35<> loader Requires:OUTP 15 1
2025-07-10 08:00:02.599 +08:00 [INF] thr:35<> loader Requires:OUTP 4 1
2025-07-10 08:00:03.046 +08:00 [INF] thr:35<> loader Requires:OUTP 1 1
2025-07-10 08:00:03.496 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-10 08:00:04.450 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-10 08:00:05.404 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-10 08:00:06.356 +08:00 [INF] thr:35<> loader Requires:INPUT A 4
2025-07-10 08:00:06.807 +08:00 [INF] thr:35<> loader Requires:INPUT A 5
2025-07-10 08:00:07.261 +08:00 [INF] thr:35<> loader Requires:MATS AJ Z 1
2025-07-10 08:00:09.878 +08:00 [INF] thr:35<> loader Requires:SSPP Z 30
2025-07-10 08:00:10.328 +08:00 [INF] thr:35<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-10 08:00:10.328 +08:00 [INF] thr:35<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-10 08:00:10.328 +08:00 [INF] thr:35<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-10 08:00:10.832 +08:00 [INF] thr:35<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 08:00:10.832 +08:00 [INF] thr:35<> loader Requires:RETH
2025-07-10 08:00:15.867 +08:00 [INF] thr:35<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-10 08:00:15.886 +08:00 [INF] thr:35<> 执行Aligner角度angle：0
2025-07-10 09:13:38.517 +08:00 [INF] thr:4<> workplace:D:\VPTEK_AOI\EFEM\EFEM_SVC
2025-07-10 09:13:38.557 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-10 09:13:38.558 +08:00 [INF] thr:4<> Start init SafeController
2025-07-10 09:13:38.567 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-10 09:13:38.568 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-10 09:13:38.569 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-10 09:13:38.569 +08:00 [INF] thr:10<> Start init Buffer
2025-07-10 09:13:38.735 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-10 09:13:38.743 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-10 09:13:38.872 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-10 09:13:39.333 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-10 09:13:39.789 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-10 09:13:40.233 +08:00 [INF] thr:4<> loader Requires:VER
2025-07-10 09:13:40.681 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-07-10 09:13:40.681 +08:00 [INF] thr:4<> loader Requires:SVON
2025-07-10 09:13:41.133 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-10 09:13:41.584 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-07-10 09:13:42.037 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-10 09:13:42.484 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-10 09:13:42.930 +08:00 [INF] thr:4<> loader Requires:HOM
2025-07-10 09:14:17.044 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-07-10 09:14:17.569 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-07-10 09:14:18.041 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-07-10 09:14:18.042 +08:00 [INF] thr:12<> StageProxy Init Start
2025-07-10 09:14:18.042 +08:00 [INF] thr:11<> LoadPortProxy Init Start
2025-07-10 09:14:18.042 +08:00 [INF] thr:13<> AlignerProxy Init Start
2025-07-10 09:14:18.043 +08:00 [INF] thr:14<> AirBlowerProxy Init Start
2025-07-10 09:14:18.044 +08:00 [INF] thr:14<> AirBlowerProxy Init Finished
2025-07-10 09:14:18.049 +08:00 [INF] thr:11<> CassettA 开始Connect
2025-07-10 09:14:18.049 +08:00 [INF] thr:11<> Component.LoadPort.SmifV2 Position:CassettA
2025-07-10 09:14:18.071 +08:00 [INF] thr:11<> 开始Home
2025-07-10 09:14:19.598 +08:00 [INF] thr:13<> AlignerProxy Init Finished
2025-07-10 09:14:21.351 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-07-10 09:14:21.353 +08:00 [INF] thr:12<> GetHomeHash:-1872691453,NowHomeHash:-662837873
2025-07-10 09:14:21.358 +08:00 [INF] thr:12<> stage Home:0
2025-07-10 09:14:26.387 +08:00 [INF] thr:11<> BoxExist:True
2025-07-10 09:14:26.387 +08:00 [INF] thr:11<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-10 09:14:26.432 +08:00 [INF] thr:11<> LoadPortProxy Init Finished
2025-07-10 09:14:26.440 +08:00 [INF] thr:13<> 开始Home
2025-07-10 09:14:34.894 +08:00 [INF] thr:13<> Connect get state True: 97 0 11 0 0 0 0 0 2 1 0 192 0 128 1 0 0 48 0 0 0
2025-07-10 09:14:34.896 +08:00 [INF] thr:15<> CassettA Absence
2025-07-10 09:14:34.897 +08:00 [INF] thr:11<> CassettA Unloaded
2025-07-10 09:15:19.490 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-07-10 09:15:19.490 +08:00 [INF] thr:12<> AOIType:4
2025-07-10 09:15:19.492 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-07-10 09:15:19.492 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-07-10 09:15:19.494 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-78.2，right [RLIMIT]:77.3
2025-07-10 09:15:19.495 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-07-10 09:15:19.496 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-07-10 09:15:19.497 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-07-10 09:15:19.497 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-07-10 09:15:19.499 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-181，right [RLIMIT]:81
2025-07-10 09:15:19.500 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-07-10 09:15:19.504 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-07-10 09:15:19.504 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-07-10 09:15:19.505 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-100，right [RLIMIT]:100
2025-07-10 09:15:19.506 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-07-10 09:15:19.509 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-07-10 09:15:19.509 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-07-10 09:15:19.511 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-1，right [RLIMIT]:1
2025-07-10 09:15:19.515 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEK_AOI\VPTEKCONFIG\ACSStandardConfig.json
2025-07-10 09:15:19.522 +08:00 [INF] thr:12<> EjectedPosition X:-0.5，Y:-160，Z:0
2025-07-10 09:15:19.522 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-07-10 09:15:19.523 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-07-10 09:15:19.533 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-07-10 09:15:19.547 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-07-10 09:15:19.758 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-07-10 09:15:19.791 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-10 09:17:06.587 +08:00 [INF] thr:29<> loader Requires:INPUT B 13
2025-07-10 09:17:07.591 +08:00 [INF] thr:30<> 执行Aligner角度angle：1800
2025-07-10 09:17:14.636 +08:00 [INF] thr:30<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-10 09:17:14.637 +08:00 [INF] thr:30<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 09:17:14.639 +08:00 [INF] thr:30<> loader Requires:RGRP
2025-07-10 09:17:15.084 +08:00 [INF] thr:30<> CLeanLoader Group Now C
2025-07-10 09:17:15.084 +08:00 [INF] thr:30<> loader Requires:MATS AJ T
2025-07-10 09:17:17.964 +08:00 [INF] thr:30<> loader Requires:SSP Z 4000
2025-07-10 09:17:18.412 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 1
2025-07-10 09:17:21.289 +08:00 [INF] thr:30<> loader Requires:MOVR R 226000
2025-07-10 09:17:23.883 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:17:24.334 +08:00 [INF] thr:30<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-10 09:17:24.334 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-10 09:17:24.335 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-10 09:17:24.838 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:17:24.838 +08:00 [INF] thr:30<> loader Requires:INPUT A 6
2025-07-10 09:17:25.292 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-10 09:17:25.737 +08:00 [INF] thr:30<> loader Requires:OUTP 16 1
2025-07-10 09:17:26.185 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-10 09:17:26.633 +08:00 [INF] thr:30<> loader Requires:OUTP 4 1
2025-07-10 09:17:27.080 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-10 09:17:27.527 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:27.978 +08:00 [INF] thr:30<> loader Requires:MATS AJ R 0
2025-07-10 09:17:31.227 +08:00 [INF] thr:30<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-10 09:17:31.227 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-10 09:17:31.227 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-10 09:17:31.731 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:17:31.732 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-10 09:17:32.182 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 0
2025-07-10 09:17:34.795 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:17:35.245 +08:00 [INF] thr:30<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-10 09:17:35.245 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-10 09:17:35.245 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-10 09:17:35.748 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:17:35.748 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-10 09:17:36.196 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-10 09:17:36.643 +08:00 [INF] thr:30<> loader Requires:OUTP 16 0
2025-07-10 09:17:37.091 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-10 09:17:37.540 +08:00 [INF] thr:30<> loader Requires:OUTP 4 0
2025-07-10 09:17:37.987 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-10 09:17:38.433 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:39.387 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:40.340 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:41.297 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:42.250 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:43.204 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:17:43.658 +08:00 [INF] thr:30<> loader Requires:INPUT A 5
2025-07-10 09:17:44.111 +08:00 [INF] thr:30<> loader Requires:MATS AJ Z 1
2025-07-10 09:17:46.728 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:17:47.180 +08:00 [INF] thr:30<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-10 09:17:47.180 +08:00 [INF] thr:30<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-10 09:17:47.180 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-10 09:17:47.683 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:17:47.683 +08:00 [INF] thr:30<> loader Requires:RETH
2025-07-10 09:17:52.718 +08:00 [INF] thr:30<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-10 09:17:52.722 +08:00 [INF] thr:30<> AOI is Ready
2025-07-10 09:17:52.819 +08:00 [INF] thr:30<> SetVelocity, Axis:X, velocity:50
2025-07-10 09:17:52.833 +08:00 [INF] thr:30<> SetVelocity, Axis:Y, velocity:50
2025-07-10 09:17:56.268 +08:00 [INF] thr:30<> SetVelocity, Axis:X, velocity:50
2025-07-10 09:17:56.271 +08:00 [INF] thr:30<> SetVelocity, Axis:Y, velocity:100
2025-07-10 09:17:56.316 +08:00 [INF] thr:30<> stage move to position action ok
2025-07-10 09:17:56.319 +08:00 [INF] thr:30<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-10 09:17:56.320 +08:00 [INF] thr:30<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 09:17:56.320 +08:00 [INF] thr:30<> loader Requires:RGRP
2025-07-10 09:17:56.763 +08:00 [INF] thr:30<> CLeanLoader Group Now C
2025-07-10 09:17:56.763 +08:00 [INF] thr:30<> loader Requires:MATS AK T
2025-07-10 09:18:00.297 +08:00 [INF] thr:30<> loader Requires:SSP Z 4000
2025-07-10 09:18:00.746 +08:00 [INF] thr:30<> loader Requires:MATS AK Z 1
2025-07-10 09:18:07.764 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:18:08.214 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-10 09:18:08.214 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-10 09:18:08.214 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-10 09:18:08.719 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:08.719 +08:00 [INF] thr:30<> loader Requires:INPUT A 6
2025-07-10 09:18:09.171 +08:00 [INF] thr:30<> loader Requires:MATS AK R 0
2025-07-10 09:18:14.454 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-10 09:18:14.454 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:上片请求
2025-07-10 09:18:14.454 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-10 09:18:14.957 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:14.958 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-10 09:18:15.405 +08:00 [INF] thr:30<> loader Requires:MATS AK Z 0
2025-07-10 09:18:18.117 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:18:18.600 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-10 09:18:18.600 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-10 09:18:18.600 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-10 09:18:19.108 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:19.108 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-10 09:18:19.555 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-10 09:18:20.001 +08:00 [INF] thr:30<> loader Requires:OUTP 16 1
2025-07-10 09:18:20.449 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-10 09:18:20.898 +08:00 [INF] thr:30<> loader Requires:OUTP 4 1
2025-07-10 09:18:21.345 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-10 09:18:21.791 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:22.743 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:23.697 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:24.650 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:25.103 +08:00 [INF] thr:30<> loader Requires:INPUT A 5
2025-07-10 09:18:25.556 +08:00 [INF] thr:30<> loader Requires:MATS AK Z 1
2025-07-10 09:18:28.272 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:18:28.723 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-10 09:18:28.723 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-10 09:18:28.723 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-10 09:18:29.729 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:29.729 +08:00 [INF] thr:30<> loader Requires:RETH
2025-07-10 09:18:34.993 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-10 09:18:37.883 +08:00 [INF] thr:21<> loader Requires:INPUT B 13
2025-07-10 09:18:39.348 +08:00 [INF] thr:30<> AOI is Ready
2025-07-10 09:18:39.433 +08:00 [INF] thr:30<> SetVelocity, Axis:X, velocity:50
2025-07-10 09:18:39.437 +08:00 [INF] thr:30<> SetVelocity, Axis:Y, velocity:50
2025-07-10 09:18:39.474 +08:00 [INF] thr:30<> SetVelocity, Axis:X, velocity:50
2025-07-10 09:18:39.477 +08:00 [INF] thr:30<> SetVelocity, Axis:Y, velocity:100
2025-07-10 09:18:39.494 +08:00 [INF] thr:30<> stage move to position action ok
2025-07-10 09:18:39.494 +08:00 [INF] thr:30<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-10 09:18:39.495 +08:00 [INF] thr:30<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 09:18:39.495 +08:00 [INF] thr:30<> loader Requires:RGRP
2025-07-10 09:18:39.941 +08:00 [INF] thr:30<> CLeanLoader Group Now C
2025-07-10 09:18:39.941 +08:00 [INF] thr:30<> loader Requires:MATS AK T
2025-07-10 09:18:40.400 +08:00 [INF] thr:30<> loader Requires:SSP Z 4000
2025-07-10 09:18:40.848 +08:00 [INF] thr:30<> loader Requires:MATS AK Z 1
2025-07-10 09:18:41.320 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:18:41.771 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-10 09:18:41.771 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-10 09:18:41.771 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-10 09:18:42.275 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:42.275 +08:00 [INF] thr:30<> loader Requires:INPUT A 6
2025-07-10 09:18:42.733 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-10 09:18:43.179 +08:00 [INF] thr:30<> loader Requires:OUTP 16 1
2025-07-10 09:18:43.625 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-10 09:18:44.074 +08:00 [INF] thr:30<> loader Requires:OUTP 4 1
2025-07-10 09:18:44.521 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-10 09:18:44.967 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:45.419 +08:00 [INF] thr:30<> loader Requires:MATS AK R 0
2025-07-10 09:18:50.700 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-10 09:18:50.700 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:下片请求
2025-07-10 09:18:50.700 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-10 09:18:51.204 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:51.205 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-10 09:18:51.655 +08:00 [INF] thr:30<> loader Requires:MATS AK Z 0
2025-07-10 09:18:54.368 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:18:54.840 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-10 09:18:54.840 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-10 09:18:54.840 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-10 09:18:55.343 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:18:55.343 +08:00 [INF] thr:30<> loader Requires:SSP Z 1000
2025-07-10 09:18:55.792 +08:00 [INF] thr:30<> loader Requires:OUTP 1 0
2025-07-10 09:18:56.239 +08:00 [INF] thr:30<> loader Requires:OUTP 16 0
2025-07-10 09:18:56.687 +08:00 [INF] thr:30<> loader Requires:OUTP 15 1
2025-07-10 09:18:57.135 +08:00 [INF] thr:30<> loader Requires:OUTP 4 0
2025-07-10 09:18:57.582 +08:00 [INF] thr:30<> loader Requires:OUTP 1 1
2025-07-10 09:18:58.028 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:58.981 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:18:59.935 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:19:00.888 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:19:01.840 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:19:02.793 +08:00 [INF] thr:30<> loader Requires:INPUT A 4
2025-07-10 09:19:03.246 +08:00 [INF] thr:30<> loader Requires:INPUT A 5
2025-07-10 09:19:03.699 +08:00 [INF] thr:30<> loader Requires:MATS AK Z 1
2025-07-10 09:19:06.416 +08:00 [INF] thr:30<> loader Requires:SSPP Z 30
2025-07-10 09:19:06.867 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-10 09:19:06.867 +08:00 [INF] thr:30<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-10 09:19:06.867 +08:00 [INF] thr:30<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-10 09:19:07.369 +08:00 [INF] thr:30<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:19:07.369 +08:00 [INF] thr:30<> loader Requires:RETH
2025-07-10 09:19:12.632 +08:00 [INF] thr:30<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-10 09:19:12.636 +08:00 [INF] thr:25<> 执行Aligner设置初始角度InitialAngle：1800
2025-07-10 09:19:12.636 +08:00 [INF] thr:25<> 执行Aligner角度angle：1800
2025-07-10 09:19:13.642 +08:00 [INF] thr:25<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-10 09:19:13.643 +08:00 [INF] thr:25<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 09:19:13.643 +08:00 [INF] thr:25<> loader Requires:RGRP
2025-07-10 09:19:14.087 +08:00 [INF] thr:25<> CLeanLoader Group Now C
2025-07-10 09:19:14.087 +08:00 [INF] thr:25<> loader Requires:MATS AJ T
2025-07-10 09:19:17.628 +08:00 [INF] thr:25<> loader Requires:SSP Z 4000
2025-07-10 09:19:18.078 +08:00 [INF] thr:25<> loader Requires:MATS AJ Z 1
2025-07-10 09:19:25.095 +08:00 [INF] thr:25<> loader Requires:MOVR R 226000
2025-07-10 09:19:27.689 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-10 09:19:28.140 +08:00 [INF] thr:25<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-10 09:19:28.140 +08:00 [INF] thr:25<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-10 09:19:28.140 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-10 09:19:28.643 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:19:28.643 +08:00 [INF] thr:25<> loader Requires:INPUT A 6
2025-07-10 09:19:29.093 +08:00 [INF] thr:25<> loader Requires:MATS AJ R 0
2025-07-10 09:19:32.342 +08:00 [INF] thr:25<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-10 09:19:32.342 +08:00 [INF] thr:25<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-10 09:19:32.342 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-10 09:19:32.866 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:19:32.866 +08:00 [INF] thr:25<> loader Requires:SSP Z 1000
2025-07-10 09:19:33.314 +08:00 [INF] thr:25<> loader Requires:MATS AJ Z 0
2025-07-10 09:19:35.927 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-10 09:19:36.376 +08:00 [INF] thr:25<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-10 09:19:36.376 +08:00 [INF] thr:25<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-10 09:19:36.376 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-10 09:19:36.880 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:19:36.880 +08:00 [INF] thr:25<> loader Requires:SSP Z 1000
2025-07-10 09:19:37.328 +08:00 [INF] thr:25<> loader Requires:OUTP 1 0
2025-07-10 09:19:37.775 +08:00 [INF] thr:25<> loader Requires:OUTP 16 1
2025-07-10 09:19:38.222 +08:00 [INF] thr:25<> loader Requires:OUTP 15 1
2025-07-10 09:19:38.671 +08:00 [INF] thr:25<> loader Requires:OUTP 4 1
2025-07-10 09:19:39.118 +08:00 [INF] thr:25<> loader Requires:OUTP 1 1
2025-07-10 09:19:39.564 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-10 09:19:40.517 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-10 09:19:41.471 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-10 09:19:42.423 +08:00 [INF] thr:25<> loader Requires:INPUT A 4
2025-07-10 09:19:42.875 +08:00 [INF] thr:25<> loader Requires:INPUT A 5
2025-07-10 09:19:43.328 +08:00 [INF] thr:25<> loader Requires:MATS AJ Z 1
2025-07-10 09:19:45.945 +08:00 [INF] thr:25<> loader Requires:SSPP Z 30
2025-07-10 09:19:46.394 +08:00 [INF] thr:25<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-10 09:19:46.394 +08:00 [INF] thr:25<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-10 09:19:46.394 +08:00 [INF] thr:25<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-10 09:19:46.898 +08:00 [INF] thr:25<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:19:46.898 +08:00 [INF] thr:25<> loader Requires:RETH
2025-07-10 09:19:51.934 +08:00 [INF] thr:25<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-10 09:19:51.936 +08:00 [INF] thr:25<> 执行Aligner角度angle：0
2025-07-10 09:27:54.222 +08:00 [INF] thr:36<> loader Requires:INPUT B 13
2025-07-10 09:27:55.203 +08:00 [INF] thr:27<> 执行Aligner角度angle：0
2025-07-10 09:27:56.210 +08:00 [INF] thr:27<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-10 09:27:56.210 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 09:27:56.210 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-10 09:27:56.651 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-10 09:27:56.651 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-07-10 09:27:57.106 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-10 09:27:57.554 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-10 09:27:58.026 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-07-10 09:28:00.622 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 09:28:01.079 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-10 09:28:01.079 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-10 09:28:01.080 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-10 09:28:01.582 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:01.582 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-10 09:28:02.034 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-10 09:28:02.480 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-10 09:28:02.927 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-10 09:28:03.376 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-10 09:28:03.823 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-10 09:28:04.268 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:04.721 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-07-10 09:28:07.970 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-10 09:28:07.970 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-10 09:28:07.970 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-10 09:28:08.479 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:08.480 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-10 09:28:08.930 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-07-10 09:28:11.542 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 09:28:11.991 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-10 09:28:11.991 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-10 09:28:11.991 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-10 09:28:12.496 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:12.496 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-10 09:28:12.945 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-10 09:28:13.390 +08:00 [INF] thr:27<> loader Requires:OUTP 16 0
2025-07-10 09:28:13.838 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-10 09:28:14.287 +08:00 [INF] thr:27<> loader Requires:OUTP 4 0
2025-07-10 09:28:14.734 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-10 09:28:15.180 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:16.134 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:17.085 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:18.039 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:18.992 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:19.944 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:20.397 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-10 09:28:20.849 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-10 09:28:23.466 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 09:28:23.918 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-10 09:28:23.918 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-10 09:28:23.918 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-10 09:28:24.422 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:24.422 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-10 09:28:29.456 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-10 09:28:29.458 +08:00 [INF] thr:27<> AOI is Ready
2025-07-10 09:28:29.522 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:50
2025-07-10 09:28:29.525 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:50
2025-07-10 09:28:29.559 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:50
2025-07-10 09:28:29.563 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:100
2025-07-10 09:28:29.579 +08:00 [INF] thr:27<> stage move to position action ok
2025-07-10 09:28:29.579 +08:00 [INF] thr:27<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-10 09:28:29.581 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 09:28:29.581 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-10 09:28:30.024 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-10 09:28:30.024 +08:00 [INF] thr:27<> loader Requires:MATS AK T
2025-07-10 09:28:33.555 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-10 09:28:34.004 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-07-10 09:28:41.022 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 09:28:41.472 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-10 09:28:41.472 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-10 09:28:41.472 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-10 09:28:41.976 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:41.976 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-10 09:28:42.431 +08:00 [INF] thr:27<> loader Requires:MATS AK R 0
2025-07-10 09:28:47.712 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-10 09:28:47.712 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片请求
2025-07-10 09:28:47.712 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-10 09:28:48.218 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:48.218 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-10 09:28:48.666 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 0
2025-07-10 09:28:51.378 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 09:28:51.843 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-10 09:28:51.843 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-10 09:28:51.843 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-10 09:28:52.346 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:28:52.346 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-10 09:28:52.795 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-10 09:28:53.242 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-10 09:28:53.690 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-10 09:28:54.138 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-10 09:28:54.585 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-10 09:28:55.039 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:55.992 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:56.946 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:57.899 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 09:28:58.350 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-10 09:28:58.803 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-07-10 09:29:01.520 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 09:29:01.970 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-10 09:29:01.970 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-10 09:29:01.970 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-10 09:29:02.977 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 09:29:02.977 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-10 09:29:08.238 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-10 13:15:08.232 +08:00 [INF] thr:43<> loader Requires:INPUT B 13
2025-07-10 13:15:09.697 +08:00 [INF] thr:27<> AOI is Ready
2025-07-10 13:15:11.004 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:50
2025-07-10 13:15:11.007 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:50
2025-07-10 13:15:14.345 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:60
2025-07-10 13:15:14.348 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:60
2025-07-10 13:15:14.365 +08:00 [INF] thr:27<> stage move to position action ok
2025-07-10 13:15:14.365 +08:00 [INF] thr:27<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-10 13:15:14.365 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 13:15:14.365 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-10 13:15:14.810 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-10 13:15:14.810 +08:00 [INF] thr:27<> loader Requires:MATS AK T
2025-07-10 13:15:15.269 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-10 13:15:15.720 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-07-10 13:15:16.192 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 13:15:16.642 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-10 13:15:16.642 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-10 13:15:16.642 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-10 13:15:17.146 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:15:17.146 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-10 13:15:17.599 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-10 13:15:18.046 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-10 13:15:18.493 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-10 13:15:18.941 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-10 13:15:19.388 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-10 13:15:19.834 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:20.286 +08:00 [INF] thr:27<> loader Requires:MATS AK R 0
2025-07-10 13:15:25.568 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-10 13:15:25.568 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片请求
2025-07-10 13:15:25.568 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-10 13:15:26.071 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:15:26.071 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-10 13:15:26.518 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 0
2025-07-10 13:15:29.231 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 13:15:29.698 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-10 13:15:29.698 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-10 13:15:29.698 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-10 13:15:30.201 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:15:30.201 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-10 13:15:30.648 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-10 13:15:31.095 +08:00 [INF] thr:27<> loader Requires:OUTP 16 0
2025-07-10 13:15:31.543 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-10 13:15:31.992 +08:00 [INF] thr:27<> loader Requires:OUTP 4 0
2025-07-10 13:15:32.438 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-10 13:15:32.884 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:33.839 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:34.790 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:35.748 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:36.701 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:37.653 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-10 13:15:38.105 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-10 13:15:38.558 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-07-10 13:15:41.276 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-10 13:15:41.727 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-10 13:15:41.727 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-10 13:15:41.727 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-10 13:15:42.236 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:15:42.236 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-10 13:15:47.498 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-10 13:15:47.500 +08:00 [INF] thr:32<> 执行Aligner设置初始角度InitialAngle：0
2025-07-10 13:15:47.500 +08:00 [INF] thr:32<> 执行Aligner角度angle：0
2025-07-10 13:15:48.506 +08:00 [INF] thr:32<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-10 13:15:48.507 +08:00 [INF] thr:32<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 13:15:48.507 +08:00 [INF] thr:32<> loader Requires:RGRP
2025-07-10 13:15:48.948 +08:00 [INF] thr:32<> CLeanLoader Group Now C
2025-07-10 13:15:48.948 +08:00 [INF] thr:32<> loader Requires:MATS AJ T
2025-07-10 13:15:52.491 +08:00 [INF] thr:32<> loader Requires:SSP Z 4000
2025-07-10 13:15:52.940 +08:00 [INF] thr:32<> loader Requires:MATS AJ Z 1
2025-07-10 13:15:59.958 +08:00 [INF] thr:32<> loader Requires:MOVR R 226000
2025-07-10 13:16:02.552 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:16:03.003 +08:00 [INF] thr:32<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-10 13:16:03.003 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-10 13:16:03.003 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-10 13:16:03.507 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:16:03.507 +08:00 [INF] thr:32<> loader Requires:INPUT A 6
2025-07-10 13:16:03.959 +08:00 [INF] thr:32<> loader Requires:MATS AJ R 0
2025-07-10 13:16:07.209 +08:00 [INF] thr:32<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-10 13:16:07.209 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-10 13:16:07.209 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-10 13:16:07.712 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:16:07.712 +08:00 [INF] thr:32<> loader Requires:SSP Z 1000
2025-07-10 13:16:08.161 +08:00 [INF] thr:32<> loader Requires:MATS AJ Z 0
2025-07-10 13:16:10.774 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:16:11.223 +08:00 [INF] thr:32<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-10 13:16:11.223 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-10 13:16:11.223 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-10 13:16:11.726 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:16:11.727 +08:00 [INF] thr:32<> loader Requires:SSP Z 1000
2025-07-10 13:16:12.175 +08:00 [INF] thr:32<> loader Requires:OUTP 1 0
2025-07-10 13:16:12.622 +08:00 [INF] thr:32<> loader Requires:OUTP 16 1
2025-07-10 13:16:13.068 +08:00 [INF] thr:32<> loader Requires:OUTP 15 1
2025-07-10 13:16:13.517 +08:00 [INF] thr:32<> loader Requires:OUTP 4 1
2025-07-10 13:16:13.964 +08:00 [INF] thr:32<> loader Requires:OUTP 1 1
2025-07-10 13:16:14.409 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:16:15.363 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:16:16.316 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:16:17.270 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:16:17.721 +08:00 [INF] thr:32<> loader Requires:INPUT A 5
2025-07-10 13:16:18.174 +08:00 [INF] thr:32<> loader Requires:MATS AJ Z 1
2025-07-10 13:16:20.791 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:16:21.242 +08:00 [INF] thr:32<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-10 13:16:21.242 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-10 13:16:21.242 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-10 13:16:21.745 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:16:21.745 +08:00 [INF] thr:32<> loader Requires:RETH
2025-07-10 13:16:26.781 +08:00 [INF] thr:32<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-10 13:16:26.783 +08:00 [INF] thr:32<> 执行Aligner角度angle：0
2025-07-10 13:43:39.215 +08:00 [INF] thr:40<> loader Requires:INPUT B 13
2025-07-10 13:43:40.189 +08:00 [INF] thr:32<> 执行Aligner角度angle：0
2025-07-10 13:43:41.195 +08:00 [INF] thr:32<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-10 13:43:41.196 +08:00 [INF] thr:32<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 13:43:41.196 +08:00 [INF] thr:32<> loader Requires:RGRP
2025-07-10 13:43:41.638 +08:00 [INF] thr:32<> CLeanLoader Group Now C
2025-07-10 13:43:41.638 +08:00 [INF] thr:32<> loader Requires:MATS AJ T
2025-07-10 13:43:42.095 +08:00 [INF] thr:32<> loader Requires:SSP Z 4000
2025-07-10 13:43:42.542 +08:00 [INF] thr:32<> loader Requires:MATS AJ Z 1
2025-07-10 13:43:43.016 +08:00 [INF] thr:32<> loader Requires:MOVR R 226000
2025-07-10 13:43:45.612 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:43:46.063 +08:00 [INF] thr:32<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-10 13:43:46.063 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-10 13:43:46.063 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-10 13:43:46.565 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:43:46.565 +08:00 [INF] thr:32<> loader Requires:INPUT A 6
2025-07-10 13:43:47.015 +08:00 [INF] thr:32<> loader Requires:OUTP 1 0
2025-07-10 13:43:47.462 +08:00 [INF] thr:32<> loader Requires:OUTP 16 1
2025-07-10 13:43:47.910 +08:00 [INF] thr:32<> loader Requires:OUTP 15 1
2025-07-10 13:43:48.359 +08:00 [INF] thr:32<> loader Requires:OUTP 4 1
2025-07-10 13:43:48.805 +08:00 [INF] thr:32<> loader Requires:OUTP 1 1
2025-07-10 13:43:49.251 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:43:49.703 +08:00 [INF] thr:32<> loader Requires:MATS AJ R 0
2025-07-10 13:43:52.953 +08:00 [INF] thr:32<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-10 13:43:52.953 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-10 13:43:52.953 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-10 13:43:53.457 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:43:53.457 +08:00 [INF] thr:32<> loader Requires:SSP Z 1000
2025-07-10 13:43:53.906 +08:00 [INF] thr:32<> loader Requires:MATS AJ Z 0
2025-07-10 13:43:56.517 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:43:56.967 +08:00 [INF] thr:32<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-10 13:43:56.967 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-10 13:43:56.967 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-10 13:43:57.470 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:43:57.470 +08:00 [INF] thr:32<> loader Requires:SSP Z 1000
2025-07-10 13:43:57.918 +08:00 [INF] thr:32<> loader Requires:OUTP 1 0
2025-07-10 13:43:58.366 +08:00 [INF] thr:32<> loader Requires:OUTP 16 0
2025-07-10 13:43:58.813 +08:00 [INF] thr:32<> loader Requires:OUTP 15 1
2025-07-10 13:43:59.262 +08:00 [INF] thr:32<> loader Requires:OUTP 4 0
2025-07-10 13:43:59.708 +08:00 [INF] thr:32<> loader Requires:OUTP 1 1
2025-07-10 13:44:00.153 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:01.107 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:02.060 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:03.013 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:03.967 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:04.920 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:05.371 +08:00 [INF] thr:32<> loader Requires:INPUT A 5
2025-07-10 13:44:05.824 +08:00 [INF] thr:32<> loader Requires:MATS AJ Z 1
2025-07-10 13:44:08.440 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:44:08.891 +08:00 [INF] thr:32<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-10 13:44:08.891 +08:00 [INF] thr:32<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-10 13:44:08.891 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-10 13:44:09.394 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:44:09.394 +08:00 [INF] thr:32<> loader Requires:RETH
2025-07-10 13:44:14.429 +08:00 [INF] thr:32<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-10 13:44:14.430 +08:00 [INF] thr:32<> AOI is Ready
2025-07-10 13:44:14.497 +08:00 [INF] thr:32<> SetVelocity, Axis:X, velocity:50
2025-07-10 13:44:14.500 +08:00 [INF] thr:32<> SetVelocity, Axis:Y, velocity:50
2025-07-10 13:44:14.535 +08:00 [INF] thr:32<> SetVelocity, Axis:X, velocity:60
2025-07-10 13:44:14.538 +08:00 [INF] thr:32<> SetVelocity, Axis:Y, velocity:60
2025-07-10 13:44:14.554 +08:00 [INF] thr:32<> stage move to position action ok
2025-07-10 13:44:14.555 +08:00 [INF] thr:32<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-10 13:44:14.555 +08:00 [INF] thr:32<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 13:44:14.555 +08:00 [INF] thr:32<> loader Requires:RGRP
2025-07-10 13:44:15.005 +08:00 [INF] thr:32<> CLeanLoader Group Now C
2025-07-10 13:44:15.005 +08:00 [INF] thr:32<> loader Requires:MATS AK T
2025-07-10 13:44:18.546 +08:00 [INF] thr:32<> loader Requires:SSP Z 4000
2025-07-10 13:44:18.991 +08:00 [INF] thr:32<> loader Requires:MATS AK Z 1
2025-07-10 13:44:26.009 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:44:26.459 +08:00 [INF] thr:32<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-10 13:44:26.459 +08:00 [INF] thr:32<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-10 13:44:26.459 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-10 13:44:26.962 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:44:26.962 +08:00 [INF] thr:32<> loader Requires:INPUT A 6
2025-07-10 13:44:27.415 +08:00 [INF] thr:32<> loader Requires:MATS AK R 0
2025-07-10 13:44:32.696 +08:00 [INF] thr:32<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-10 13:44:32.696 +08:00 [INF] thr:32<> Station:InspectStageA,SafeCheck:上片请求
2025-07-10 13:44:32.696 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-10 13:44:33.199 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:44:33.199 +08:00 [INF] thr:32<> loader Requires:SSP Z 1000
2025-07-10 13:44:33.647 +08:00 [INF] thr:32<> loader Requires:MATS AK Z 0
2025-07-10 13:44:36.358 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:44:36.828 +08:00 [INF] thr:32<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-10 13:44:36.828 +08:00 [INF] thr:32<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-10 13:44:36.828 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-10 13:44:37.332 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:44:37.332 +08:00 [INF] thr:32<> loader Requires:SSP Z 1000
2025-07-10 13:44:37.781 +08:00 [INF] thr:32<> loader Requires:OUTP 1 0
2025-07-10 13:44:38.228 +08:00 [INF] thr:32<> loader Requires:OUTP 16 1
2025-07-10 13:44:38.676 +08:00 [INF] thr:32<> loader Requires:OUTP 15 1
2025-07-10 13:44:39.123 +08:00 [INF] thr:32<> loader Requires:OUTP 4 1
2025-07-10 13:44:39.570 +08:00 [INF] thr:32<> loader Requires:OUTP 1 1
2025-07-10 13:44:40.017 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:40.969 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:41.924 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:42.876 +08:00 [INF] thr:32<> loader Requires:INPUT A 4
2025-07-10 13:44:43.328 +08:00 [INF] thr:32<> loader Requires:INPUT A 5
2025-07-10 13:44:43.782 +08:00 [INF] thr:32<> loader Requires:MATS AK Z 1
2025-07-10 13:44:46.498 +08:00 [INF] thr:32<> loader Requires:SSPP Z 30
2025-07-10 13:44:46.950 +08:00 [INF] thr:32<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-10 13:44:46.950 +08:00 [INF] thr:32<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-10 13:44:46.950 +08:00 [INF] thr:32<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-10 13:44:47.961 +08:00 [INF] thr:32<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 13:44:47.961 +08:00 [INF] thr:32<> loader Requires:RETH
2025-07-10 13:44:53.223 +08:00 [INF] thr:32<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-10 14:44:05.089 +08:00 [INF] thr:14<> get state: False
2025-07-10 14:44:05.089 +08:00 [INF] thr:14<> BoxExist:False
2025-07-10 14:44:07.971 +08:00 [INF] thr:32<> CassettA Absence
2025-07-10 14:44:37.091 +08:00 [INF] thr:14<> get state: True
2025-07-10 14:44:37.091 +08:00 [INF] thr:14<> BoxExist:True
2025-07-10 14:44:37.092 +08:00 [INF] thr:33<> CassettA Unloaded
2025-07-10 17:34:39.432 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:54795
2025-07-10 17:54:51.900 +08:00 [INF] thr:59<> loader Requires:INPUT B 13
2025-07-10 17:54:53.397 +08:00 [INF] thr:52<> AOI is Ready
2025-07-10 17:54:57.858 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:50
2025-07-10 17:54:57.865 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:50
2025-07-10 17:55:01.365 +08:00 [INF] thr:52<> SetVelocity, Axis:X, velocity:8
2025-07-10 17:55:01.368 +08:00 [INF] thr:52<> SetVelocity, Axis:Y, velocity:8
2025-07-10 17:55:01.417 +08:00 [INF] thr:52<> stage move to position action ok
2025-07-10 17:55:01.417 +08:00 [INF] thr:52<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-10 17:55:01.417 +08:00 [INF] thr:52<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 17:55:01.418 +08:00 [INF] thr:52<> loader Requires:RGRP
2025-07-10 17:55:01.860 +08:00 [INF] thr:52<> CLeanLoader Group Now C
2025-07-10 17:55:01.860 +08:00 [INF] thr:52<> loader Requires:MATS AK T
2025-07-10 17:55:02.318 +08:00 [INF] thr:52<> loader Requires:SSP Z 4000
2025-07-10 17:55:02.765 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-10 17:55:03.238 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-10 17:55:03.689 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-10 17:55:03.689 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-10 17:55:03.689 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-10 17:55:04.191 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:04.191 +08:00 [INF] thr:52<> loader Requires:INPUT A 6
2025-07-10 17:55:04.646 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-10 17:55:05.101 +08:00 [INF] thr:52<> loader Requires:OUTP 16 1
2025-07-10 17:55:05.549 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-10 17:55:05.996 +08:00 [INF] thr:52<> loader Requires:OUTP 4 1
2025-07-10 17:55:06.443 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-10 17:55:06.890 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:07.343 +08:00 [INF] thr:52<> loader Requires:MATS AK R 0
2025-07-10 17:55:12.623 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-10 17:55:12.623 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片请求
2025-07-10 17:55:12.623 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-10 17:55:13.126 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:13.126 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-10 17:55:13.573 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 0
2025-07-10 17:55:16.286 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-10 17:55:16.756 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-10 17:55:16.756 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-10 17:55:16.756 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-10 17:55:17.267 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:17.267 +08:00 [INF] thr:52<> loader Requires:SSP Z 1000
2025-07-10 17:55:17.716 +08:00 [INF] thr:52<> loader Requires:OUTP 1 0
2025-07-10 17:55:18.164 +08:00 [INF] thr:52<> loader Requires:OUTP 16 0
2025-07-10 17:55:18.615 +08:00 [INF] thr:52<> loader Requires:OUTP 15 1
2025-07-10 17:55:19.062 +08:00 [INF] thr:52<> loader Requires:OUTP 4 0
2025-07-10 17:55:19.509 +08:00 [INF] thr:52<> loader Requires:OUTP 1 1
2025-07-10 17:55:19.958 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:20.913 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:21.867 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:22.819 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:23.773 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:24.724 +08:00 [INF] thr:52<> loader Requires:INPUT A 4
2025-07-10 17:55:25.177 +08:00 [INF] thr:52<> loader Requires:INPUT A 5
2025-07-10 17:55:25.630 +08:00 [INF] thr:52<> loader Requires:MATS AK Z 1
2025-07-10 17:55:28.357 +08:00 [INF] thr:52<> loader Requires:SSPP Z 30
2025-07-10 17:55:28.806 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-10 17:55:28.806 +08:00 [INF] thr:52<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-10 17:55:28.806 +08:00 [INF] thr:52<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-10 17:55:29.311 +08:00 [INF] thr:52<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:29.311 +08:00 [INF] thr:52<> loader Requires:RETH
2025-07-10 17:55:34.573 +08:00 [INF] thr:52<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-10 17:55:34.575 +08:00 [INF] thr:43<> 执行Aligner设置初始角度InitialAngle：0
2025-07-10 17:55:34.575 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-07-10 17:55:35.581 +08:00 [INF] thr:43<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-10 17:55:35.583 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 17:55:35.583 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-07-10 17:55:36.027 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-07-10 17:55:36.027 +08:00 [INF] thr:43<> loader Requires:MATS AJ T
2025-07-10 17:55:39.570 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-07-10 17:55:40.018 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-07-10 17:55:47.036 +08:00 [INF] thr:43<> loader Requires:MOVR R 226000
2025-07-10 17:55:49.630 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-10 17:55:50.087 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-10 17:55:50.088 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-10 17:55:50.088 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-10 17:55:50.592 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:50.592 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-07-10 17:55:51.045 +08:00 [INF] thr:43<> loader Requires:MATS AJ R 0
2025-07-10 17:55:54.295 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-10 17:55:54.295 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-10 17:55:54.295 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-10 17:55:54.798 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:54.798 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-10 17:55:55.247 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 0
2025-07-10 17:55:57.860 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-10 17:55:58.309 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-10 17:55:58.310 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-10 17:55:58.310 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-10 17:55:58.812 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:55:58.812 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-10 17:55:59.260 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-10 17:55:59.707 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-07-10 17:56:00.155 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-10 17:56:00.603 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-07-10 17:56:01.050 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-10 17:56:01.499 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-10 17:56:02.455 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-10 17:56:03.409 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-10 17:56:04.363 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-10 17:56:04.815 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-07-10 17:56:05.267 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-07-10 17:56:07.885 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-10 17:56:08.335 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-10 17:56:08.335 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-10 17:56:08.335 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-10 17:56:08.839 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:56:08.839 +08:00 [INF] thr:43<> loader Requires:RETH
2025-07-10 17:56:13.874 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-10 17:56:13.881 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-07-10 17:58:25.293 +08:00 [INF] thr:71<> loader Requires:INPUT B 13
2025-07-10 17:58:26.263 +08:00 [INF] thr:39<> 执行Aligner角度angle：0
2025-07-10 17:58:27.269 +08:00 [INF] thr:39<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-10 17:58:27.270 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 17:58:27.270 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-10 17:58:27.712 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-10 17:58:27.712 +08:00 [INF] thr:39<> loader Requires:MATS AJ T
2025-07-10 17:58:28.171 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-10 17:58:28.618 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 1
2025-07-10 17:58:29.092 +08:00 [INF] thr:39<> loader Requires:MOVR R 226000
2025-07-10 17:58:31.686 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 17:58:32.136 +08:00 [INF] thr:39<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-10 17:58:32.136 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-10 17:58:32.136 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-10 17:58:32.641 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:58:32.641 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-10 17:58:33.094 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-10 17:58:33.541 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-10 17:58:33.989 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-10 17:58:34.437 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-10 17:58:34.885 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-10 17:58:35.333 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:35.785 +08:00 [INF] thr:39<> loader Requires:MATS AJ R 0
2025-07-10 17:58:39.034 +08:00 [INF] thr:39<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-10 17:58:39.034 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-10 17:58:39.034 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-10 17:58:39.537 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:58:39.537 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-10 17:58:39.985 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 0
2025-07-10 17:58:42.598 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 17:58:43.047 +08:00 [INF] thr:39<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-10 17:58:43.048 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-10 17:58:43.048 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-10 17:58:43.553 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:58:43.553 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-10 17:58:44.007 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-10 17:58:44.454 +08:00 [INF] thr:39<> loader Requires:OUTP 16 0
2025-07-10 17:58:44.901 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-10 17:58:45.351 +08:00 [INF] thr:39<> loader Requires:OUTP 4 0
2025-07-10 17:58:45.797 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-10 17:58:46.243 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:47.197 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:48.150 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:49.103 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:50.061 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:51.017 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:58:51.472 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-10 17:58:51.926 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 1
2025-07-10 17:58:54.543 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 17:58:54.994 +08:00 [INF] thr:39<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-10 17:58:54.995 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-10 17:58:54.995 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-10 17:58:55.498 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:58:55.498 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-10 17:59:00.533 +08:00 [INF] thr:39<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-10 17:59:00.535 +08:00 [INF] thr:39<> AOI is Ready
2025-07-10 17:59:00.603 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:50
2025-07-10 17:59:00.610 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:50
2025-07-10 17:59:00.655 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:8
2025-07-10 17:59:00.662 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:8
2025-07-10 17:59:00.692 +08:00 [INF] thr:39<> stage move to position action ok
2025-07-10 17:59:00.692 +08:00 [INF] thr:39<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-10 17:59:00.712 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 17:59:00.712 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-10 17:59:01.156 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-10 17:59:01.156 +08:00 [INF] thr:39<> loader Requires:MATS AK T
2025-07-10 17:59:04.693 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-10 17:59:05.141 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-10 17:59:12.159 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 17:59:12.610 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-10 17:59:12.610 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-10 17:59:12.610 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-10 17:59:13.134 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:59:13.134 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-10 17:59:13.587 +08:00 [INF] thr:39<> loader Requires:MATS AK R 0
2025-07-10 17:59:18.870 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-10 17:59:18.870 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:上片请求
2025-07-10 17:59:18.870 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-10 17:59:19.372 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:59:19.372 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-10 17:59:19.819 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 0
2025-07-10 17:59:22.531 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 17:59:23.010 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-10 17:59:23.011 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-10 17:59:23.011 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-10 17:59:23.516 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:59:23.516 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-10 17:59:23.965 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-10 17:59:24.412 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-10 17:59:24.859 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-10 17:59:25.307 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-10 17:59:25.754 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-10 17:59:26.200 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:59:27.153 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:59:28.107 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:59:29.060 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 17:59:29.512 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-10 17:59:29.966 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-10 17:59:32.684 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 17:59:33.134 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-10 17:59:33.134 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-10 17:59:33.135 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-10 17:59:34.171 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 17:59:34.171 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-10 17:59:39.433 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-10 21:09:32.582 +08:00 [INF] thr:58<> loader Requires:INPUT B 13
2025-07-10 21:09:34.047 +08:00 [INF] thr:39<> AOI is Ready
2025-07-10 21:09:38.364 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:50
2025-07-10 21:09:38.367 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:50
2025-07-10 21:09:41.191 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:8
2025-07-10 21:09:41.198 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:8
2025-07-10 21:09:41.219 +08:00 [INF] thr:39<> stage move to position action ok
2025-07-10 21:09:41.219 +08:00 [INF] thr:39<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-10 21:09:41.220 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 21:09:41.220 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-10 21:09:41.664 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-10 21:09:41.664 +08:00 [INF] thr:39<> loader Requires:MATS AK T
2025-07-10 21:09:42.122 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-10 21:09:42.568 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-10 21:09:43.042 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 21:09:43.492 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-10 21:09:43.493 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-10 21:09:43.493 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-10 21:09:43.996 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:09:43.996 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-10 21:09:44.449 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-10 21:09:44.896 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-10 21:09:45.348 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-10 21:09:45.796 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-10 21:09:46.243 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-10 21:09:46.688 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:09:47.145 +08:00 [INF] thr:39<> loader Requires:MATS AK R 0
2025-07-10 21:09:52.428 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-10 21:09:52.428 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片请求
2025-07-10 21:09:52.428 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-10 21:09:52.936 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:09:52.936 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-10 21:09:53.385 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 0
2025-07-10 21:09:56.097 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 21:09:56.567 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-10 21:09:56.567 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-10 21:09:56.567 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-10 21:09:57.071 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:09:57.071 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-10 21:09:57.518 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-10 21:09:57.965 +08:00 [INF] thr:39<> loader Requires:OUTP 16 0
2025-07-10 21:09:58.412 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-10 21:09:58.861 +08:00 [INF] thr:39<> loader Requires:OUTP 4 0
2025-07-10 21:09:59.308 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-10 21:09:59.754 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:10:00.706 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:10:01.661 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:10:02.613 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:10:03.566 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:10:04.520 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-10 21:10:04.973 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-10 21:10:05.425 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-10 21:10:08.143 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-10 21:10:08.593 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-10 21:10:08.593 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-10 21:10:08.593 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-10 21:10:09.098 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:10:09.098 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-10 21:10:14.358 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-10 21:10:14.360 +08:00 [INF] thr:73<> 执行Aligner设置初始角度InitialAngle：0
2025-07-10 21:10:14.360 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-10 21:10:15.367 +08:00 [INF] thr:73<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-10 21:10:15.368 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 21:10:15.368 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-10 21:10:15.809 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-10 21:10:15.809 +08:00 [INF] thr:73<> loader Requires:MATS AJ T
2025-07-10 21:10:19.351 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-10 21:10:19.800 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-10 21:10:26.818 +08:00 [INF] thr:73<> loader Requires:MOVR R 226000
2025-07-10 21:10:29.413 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-10 21:10:29.864 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-10 21:10:29.864 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-10 21:10:29.864 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-10 21:10:30.368 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:10:30.368 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-10 21:10:30.820 +08:00 [INF] thr:73<> loader Requires:MATS AJ R 0
2025-07-10 21:10:34.070 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-10 21:10:34.070 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-10 21:10:34.070 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-10 21:10:34.572 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:10:34.572 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-10 21:10:35.023 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 0
2025-07-10 21:10:37.635 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-10 21:10:38.084 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-10 21:10:38.084 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-10 21:10:38.084 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-10 21:10:38.599 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:10:38.599 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-10 21:10:39.048 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-10 21:10:39.495 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-10 21:10:39.943 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-10 21:10:40.391 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-10 21:10:40.838 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-10 21:10:41.283 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-10 21:10:42.239 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-10 21:10:43.190 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-10 21:10:44.144 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-10 21:10:44.597 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-10 21:10:45.048 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-10 21:10:47.665 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-10 21:10:48.115 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-10 21:10:48.115 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-10 21:10:48.115 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-10 21:10:48.623 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:10:48.623 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-10 21:10:53.658 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-10 21:10:53.660 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-10 21:12:23.039 +08:00 [INF] thr:58<> loader Requires:INPUT B 13
2025-07-10 21:12:24.011 +08:00 [INF] thr:47<> 执行Aligner角度angle：0
2025-07-10 21:12:25.016 +08:00 [INF] thr:47<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-10 21:12:25.017 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 21:12:25.017 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-10 21:12:25.460 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-10 21:12:25.460 +08:00 [INF] thr:47<> loader Requires:MATS AJ T
2025-07-10 21:12:25.919 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-10 21:12:26.366 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-10 21:12:26.838 +08:00 [INF] thr:47<> loader Requires:MOVR R 226000
2025-07-10 21:12:29.433 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-10 21:12:29.884 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-10 21:12:29.884 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-10 21:12:29.884 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-10 21:12:30.387 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:12:30.387 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-10 21:12:30.838 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-10 21:12:31.284 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-10 21:12:31.732 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-10 21:12:32.180 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-10 21:12:32.627 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-10 21:12:33.072 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:33.524 +08:00 [INF] thr:47<> loader Requires:MATS AJ R 0
2025-07-10 21:12:36.774 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-10 21:12:36.774 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-10 21:12:36.774 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-10 21:12:37.276 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:12:37.276 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-10 21:12:37.725 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 0
2025-07-10 21:12:40.343 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-10 21:12:40.792 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-10 21:12:40.792 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-10 21:12:40.792 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-10 21:12:41.296 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:12:41.296 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-10 21:12:41.745 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-10 21:12:42.191 +08:00 [INF] thr:47<> loader Requires:OUTP 16 0
2025-07-10 21:12:42.638 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-10 21:12:43.087 +08:00 [INF] thr:47<> loader Requires:OUTP 4 0
2025-07-10 21:12:43.534 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-10 21:12:43.980 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:44.933 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:45.886 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:46.844 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:47.796 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:48.750 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:12:49.202 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-10 21:12:49.654 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-10 21:12:52.271 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-10 21:12:52.721 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-10 21:12:52.721 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-10 21:12:52.721 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-10 21:12:53.224 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:12:53.224 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-10 21:12:58.260 +08:00 [INF] thr:47<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-10 21:12:58.261 +08:00 [INF] thr:47<> AOI is Ready
2025-07-10 21:12:58.326 +08:00 [INF] thr:47<> SetVelocity, Axis:X, velocity:50
2025-07-10 21:12:58.329 +08:00 [INF] thr:47<> SetVelocity, Axis:Y, velocity:50
2025-07-10 21:12:58.368 +08:00 [INF] thr:47<> SetVelocity, Axis:X, velocity:8
2025-07-10 21:12:58.371 +08:00 [INF] thr:47<> SetVelocity, Axis:Y, velocity:8
2025-07-10 21:12:58.389 +08:00 [INF] thr:47<> stage move to position action ok
2025-07-10 21:12:58.389 +08:00 [INF] thr:47<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-10 21:12:58.390 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-10 21:12:58.390 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-10 21:12:58.834 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-10 21:12:58.834 +08:00 [INF] thr:47<> loader Requires:MATS AK T
2025-07-10 21:13:02.373 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-10 21:13:02.822 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 1
2025-07-10 21:13:09.843 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-10 21:13:10.295 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-10 21:13:10.295 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-10 21:13:10.295 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-10 21:13:10.798 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:13:10.798 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-10 21:13:11.254 +08:00 [INF] thr:47<> loader Requires:MATS AK R 0
2025-07-10 21:13:16.533 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-10 21:13:16.533 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片请求
2025-07-10 21:13:16.533 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-10 21:13:17.036 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:13:17.036 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-10 21:13:17.484 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 0
2025-07-10 21:13:20.196 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-10 21:13:20.672 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-10 21:13:20.672 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-10 21:13:20.672 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-10 21:13:21.177 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:13:21.177 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-10 21:13:21.626 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-10 21:13:22.073 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-10 21:13:22.521 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-10 21:13:22.968 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-10 21:13:23.416 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-10 21:13:23.865 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:13:24.818 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:13:25.772 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:13:26.725 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-10 21:13:27.176 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-10 21:13:27.630 +08:00 [INF] thr:47<> loader Requires:MATS AK Z 1
2025-07-10 21:13:30.348 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-10 21:13:30.798 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-10 21:13:30.798 +08:00 [INF] thr:47<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-10 21:13:30.798 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-10 21:13:31.804 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-10 21:13:31.805 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-10 21:13:37.070 +08:00 [INF] thr:47<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-11 10:22:14.663 +08:00 [INF] thr:67<> loader Requires:INPUT B 13
2025-07-11 10:22:16.126 +08:00 [INF] thr:39<> AOI is Ready
2025-07-11 10:22:20.563 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:50
2025-07-11 10:22:20.566 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:50
2025-07-11 10:22:24.060 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:8
2025-07-11 10:22:24.068 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:8
2025-07-11 10:22:24.087 +08:00 [INF] thr:39<> stage move to position action ok
2025-07-11 10:22:24.088 +08:00 [INF] thr:39<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-11 10:22:24.088 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 10:22:24.088 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-11 10:22:24.530 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-11 10:22:24.530 +08:00 [INF] thr:39<> loader Requires:MATS AK T
2025-07-11 10:22:24.989 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-11 10:22:25.435 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-11 10:22:25.916 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 10:22:26.368 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-11 10:22:26.368 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-11 10:22:26.368 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-11 10:22:26.871 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:22:26.871 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-11 10:22:27.324 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-11 10:22:27.771 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-11 10:22:28.219 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-11 10:22:28.667 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-11 10:22:29.114 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-11 10:22:29.559 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:30.012 +08:00 [INF] thr:39<> loader Requires:MATS AK R 0
2025-07-11 10:22:35.294 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-11 10:22:35.294 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片请求
2025-07-11 10:22:35.294 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-11 10:22:35.797 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:22:35.797 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 10:22:36.244 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 0
2025-07-11 10:22:38.957 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 10:22:39.427 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-11 10:22:39.427 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-11 10:22:39.427 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-11 10:22:39.930 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:22:39.930 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 10:22:40.379 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-11 10:22:40.826 +08:00 [INF] thr:39<> loader Requires:OUTP 16 0
2025-07-11 10:22:41.273 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-11 10:22:41.722 +08:00 [INF] thr:39<> loader Requires:OUTP 4 0
2025-07-11 10:22:42.170 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-11 10:22:42.614 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:43.569 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:44.520 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:45.474 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:46.427 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:47.385 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 10:22:47.836 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-11 10:22:48.289 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-11 10:22:51.007 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 10:22:51.458 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-11 10:22:51.458 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-11 10:22:51.458 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-11 10:22:51.961 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:22:51.961 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-11 10:22:57.224 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-11 10:22:57.226 +08:00 [INF] thr:47<> 执行Aligner设置初始角度InitialAngle：0
2025-07-11 10:22:57.226 +08:00 [INF] thr:47<> 执行Aligner角度angle：0
2025-07-11 10:22:58.234 +08:00 [INF] thr:47<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-11 10:22:58.235 +08:00 [INF] thr:47<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 10:22:58.235 +08:00 [INF] thr:47<> loader Requires:RGRP
2025-07-11 10:22:58.680 +08:00 [INF] thr:47<> CLeanLoader Group Now C
2025-07-11 10:22:58.680 +08:00 [INF] thr:47<> loader Requires:MATS AJ T
2025-07-11 10:23:02.221 +08:00 [INF] thr:47<> loader Requires:SSP Z 4000
2025-07-11 10:23:02.670 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-11 10:23:09.689 +08:00 [INF] thr:47<> loader Requires:MOVR R 226000
2025-07-11 10:23:12.287 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-11 10:23:12.737 +08:00 [INF] thr:47<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-11 10:23:12.737 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-11 10:23:12.737 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-11 10:23:13.242 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:23:13.242 +08:00 [INF] thr:47<> loader Requires:INPUT A 6
2025-07-11 10:23:13.694 +08:00 [INF] thr:47<> loader Requires:MATS AJ R 0
2025-07-11 10:23:16.944 +08:00 [INF] thr:47<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-11 10:23:16.944 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-11 10:23:16.944 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-11 10:23:17.445 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:23:17.445 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-11 10:23:17.892 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 0
2025-07-11 10:23:20.505 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-11 10:23:20.955 +08:00 [INF] thr:47<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-11 10:23:20.955 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-11 10:23:20.955 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-11 10:23:21.459 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:23:21.459 +08:00 [INF] thr:47<> loader Requires:SSP Z 1000
2025-07-11 10:23:21.906 +08:00 [INF] thr:47<> loader Requires:OUTP 1 0
2025-07-11 10:23:22.353 +08:00 [INF] thr:47<> loader Requires:OUTP 16 1
2025-07-11 10:23:22.801 +08:00 [INF] thr:47<> loader Requires:OUTP 15 1
2025-07-11 10:23:23.249 +08:00 [INF] thr:47<> loader Requires:OUTP 4 1
2025-07-11 10:23:23.696 +08:00 [INF] thr:47<> loader Requires:OUTP 1 1
2025-07-11 10:23:24.141 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-11 10:23:25.096 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-11 10:23:26.049 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-11 10:23:27.001 +08:00 [INF] thr:47<> loader Requires:INPUT A 4
2025-07-11 10:23:27.453 +08:00 [INF] thr:47<> loader Requires:INPUT A 5
2025-07-11 10:23:27.905 +08:00 [INF] thr:47<> loader Requires:MATS AJ Z 1
2025-07-11 10:23:30.523 +08:00 [INF] thr:47<> loader Requires:SSPP Z 30
2025-07-11 10:23:30.973 +08:00 [INF] thr:47<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-11 10:23:30.973 +08:00 [INF] thr:47<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-11 10:23:30.973 +08:00 [INF] thr:47<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-11 10:23:31.477 +08:00 [INF] thr:47<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:23:31.478 +08:00 [INF] thr:47<> loader Requires:RETH
2025-07-11 10:23:36.513 +08:00 [INF] thr:47<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-11 10:23:36.515 +08:00 [INF] thr:47<> 执行Aligner角度angle：0
2025-07-11 10:27:05.424 +08:00 [INF] thr:42<> loader Requires:INPUT B 13
2025-07-11 10:27:06.404 +08:00 [INF] thr:56<> 执行Aligner角度angle：0
2025-07-11 10:27:07.412 +08:00 [INF] thr:56<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-11 10:27:07.413 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 10:27:07.413 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-07-11 10:27:07.855 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-07-11 10:27:07.855 +08:00 [INF] thr:56<> loader Requires:MATS AJ T
2025-07-11 10:27:08.313 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-07-11 10:27:08.760 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-07-11 10:27:09.234 +08:00 [INF] thr:56<> loader Requires:MOVR R 226000
2025-07-11 10:27:11.830 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-07-11 10:27:12.280 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-11 10:27:12.280 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-11 10:27:12.280 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-11 10:27:12.784 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:27:12.784 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-07-11 10:27:13.237 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-07-11 10:27:13.684 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-07-11 10:27:14.131 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-07-11 10:27:14.580 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-07-11 10:27:15.026 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-07-11 10:27:15.472 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:15.924 +08:00 [INF] thr:56<> loader Requires:MATS AJ R 0
2025-07-11 10:27:19.174 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-11 10:27:19.174 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-11 10:27:19.174 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-11 10:27:19.677 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:27:19.677 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-07-11 10:27:20.126 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 0
2025-07-11 10:27:22.738 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-07-11 10:27:23.187 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-11 10:27:23.187 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-11 10:27:23.187 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-11 10:27:23.688 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:27:23.688 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-07-11 10:27:24.138 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-07-11 10:27:24.585 +08:00 [INF] thr:56<> loader Requires:OUTP 16 0
2025-07-11 10:27:25.033 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-07-11 10:27:25.481 +08:00 [INF] thr:56<> loader Requires:OUTP 4 0
2025-07-11 10:27:25.927 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-07-11 10:27:26.373 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:27.326 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:28.280 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:29.233 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:30.187 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:31.140 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:27:31.592 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-07-11 10:27:32.044 +08:00 [INF] thr:56<> loader Requires:MATS AJ Z 1
2025-07-11 10:27:34.661 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-07-11 10:27:35.110 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-11 10:27:35.110 +08:00 [INF] thr:56<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-11 10:27:35.110 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-11 10:27:35.613 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:27:35.613 +08:00 [INF] thr:56<> loader Requires:RETH
2025-07-11 10:27:40.650 +08:00 [INF] thr:56<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-11 10:27:40.651 +08:00 [INF] thr:56<> AOI is Ready
2025-07-11 10:27:40.714 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:50
2025-07-11 10:27:40.717 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:50
2025-07-11 10:27:40.754 +08:00 [INF] thr:56<> SetVelocity, Axis:X, velocity:8
2025-07-11 10:27:40.757 +08:00 [INF] thr:56<> SetVelocity, Axis:Y, velocity:8
2025-07-11 10:27:40.773 +08:00 [INF] thr:56<> stage move to position action ok
2025-07-11 10:27:40.774 +08:00 [INF] thr:56<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-11 10:27:40.774 +08:00 [INF] thr:56<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 10:27:40.774 +08:00 [INF] thr:56<> loader Requires:RGRP
2025-07-11 10:27:41.216 +08:00 [INF] thr:56<> CLeanLoader Group Now C
2025-07-11 10:27:41.216 +08:00 [INF] thr:56<> loader Requires:MATS AK T
2025-07-11 10:27:44.758 +08:00 [INF] thr:56<> loader Requires:SSP Z 4000
2025-07-11 10:27:45.207 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-07-11 10:27:52.226 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-07-11 10:27:52.676 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-11 10:27:52.676 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-11 10:27:52.676 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-11 10:27:53.177 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:27:53.177 +08:00 [INF] thr:56<> loader Requires:INPUT A 6
2025-07-11 10:27:53.631 +08:00 [INF] thr:56<> loader Requires:MATS AK R 0
2025-07-11 10:27:58.914 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-11 10:27:58.914 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片请求
2025-07-11 10:27:58.914 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-11 10:27:59.418 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:27:59.418 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-07-11 10:27:59.863 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 0
2025-07-11 10:28:02.576 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-07-11 10:28:03.396 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-11 10:28:03.396 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-11 10:28:03.396 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-11 10:28:03.900 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:28:03.900 +08:00 [INF] thr:56<> loader Requires:SSP Z 1000
2025-07-11 10:28:04.347 +08:00 [INF] thr:56<> loader Requires:OUTP 1 0
2025-07-11 10:28:04.791 +08:00 [INF] thr:56<> loader Requires:OUTP 16 1
2025-07-11 10:28:05.239 +08:00 [INF] thr:56<> loader Requires:OUTP 15 1
2025-07-11 10:28:05.689 +08:00 [INF] thr:56<> loader Requires:OUTP 4 1
2025-07-11 10:28:06.135 +08:00 [INF] thr:56<> loader Requires:OUTP 1 1
2025-07-11 10:28:06.581 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:28:07.535 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:28:08.490 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:28:09.444 +08:00 [INF] thr:56<> loader Requires:INPUT A 4
2025-07-11 10:28:09.896 +08:00 [INF] thr:56<> loader Requires:INPUT A 5
2025-07-11 10:28:10.348 +08:00 [INF] thr:56<> loader Requires:MATS AK Z 1
2025-07-11 10:28:13.066 +08:00 [INF] thr:56<> loader Requires:SSPP Z 30
2025-07-11 10:28:13.516 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-11 10:28:13.517 +08:00 [INF] thr:56<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-11 10:28:13.517 +08:00 [INF] thr:56<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-11 10:28:14.523 +08:00 [INF] thr:56<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 10:28:14.523 +08:00 [INF] thr:56<> loader Requires:RETH
2025-07-11 10:28:19.787 +08:00 [INF] thr:56<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-11 13:19:29.203 +08:00 [INF] thr:70<> loader Requires:INPUT B 13
2025-07-11 13:19:30.665 +08:00 [INF] thr:39<> AOI is Ready
2025-07-11 13:19:31.555 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:50
2025-07-11 13:19:31.558 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:50
2025-07-11 13:19:34.408 +08:00 [INF] thr:39<> SetVelocity, Axis:X, velocity:8
2025-07-11 13:19:34.411 +08:00 [INF] thr:39<> SetVelocity, Axis:Y, velocity:8
2025-07-11 13:19:34.427 +08:00 [INF] thr:39<> stage move to position action ok
2025-07-11 13:19:34.428 +08:00 [INF] thr:39<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-11 13:19:34.429 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 13:19:34.429 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-11 13:19:34.872 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-11 13:19:34.872 +08:00 [INF] thr:39<> loader Requires:MATS AK T
2025-07-11 13:19:35.330 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-11 13:19:35.777 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-11 13:19:36.252 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 13:19:36.702 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-11 13:19:36.702 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-11 13:19:36.702 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-11 13:19:37.206 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:19:37.206 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-11 13:19:37.658 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-11 13:19:38.105 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-11 13:19:38.553 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-11 13:19:39.002 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-11 13:19:39.447 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-11 13:19:39.893 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:40.345 +08:00 [INF] thr:39<> loader Requires:MATS AK R 0
2025-07-11 13:19:45.627 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-11 13:19:45.627 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片请求
2025-07-11 13:19:45.627 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-11 13:19:46.131 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:19:46.132 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 13:19:46.582 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 0
2025-07-11 13:19:49.294 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 13:19:49.773 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-11 13:19:49.773 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-11 13:19:49.773 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-11 13:19:50.276 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:19:50.276 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 13:19:50.724 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-11 13:19:51.170 +08:00 [INF] thr:39<> loader Requires:OUTP 16 0
2025-07-11 13:19:51.618 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-11 13:19:52.066 +08:00 [INF] thr:39<> loader Requires:OUTP 4 0
2025-07-11 13:19:52.512 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-11 13:19:52.959 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:53.914 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:54.869 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:55.823 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:56.776 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:57.731 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 13:19:58.184 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-11 13:19:58.637 +08:00 [INF] thr:39<> loader Requires:MATS AK Z 1
2025-07-11 13:20:01.355 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 13:20:01.806 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-11 13:20:01.806 +08:00 [INF] thr:39<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-11 13:20:01.806 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-11 13:20:02.308 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:20:02.308 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-11 13:20:07.571 +08:00 [INF] thr:39<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-11 13:20:07.573 +08:00 [INF] thr:73<> 执行Aligner设置初始角度InitialAngle：0
2025-07-11 13:20:07.573 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-11 13:20:08.580 +08:00 [INF] thr:73<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-11 13:20:08.580 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 13:20:08.580 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-11 13:20:09.031 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-11 13:20:09.031 +08:00 [INF] thr:73<> loader Requires:MATS AJ T
2025-07-11 13:20:12.574 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-11 13:20:13.024 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-11 13:20:20.041 +08:00 [INF] thr:73<> loader Requires:MOVR R 226000
2025-07-11 13:20:22.636 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-11 13:20:23.087 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-11 13:20:23.087 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-11 13:20:23.087 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-11 13:20:23.589 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:20:23.589 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-11 13:20:24.043 +08:00 [INF] thr:73<> loader Requires:MATS AJ R 0
2025-07-11 13:20:27.292 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-11 13:20:27.292 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-11 13:20:27.292 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-11 13:20:27.796 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:20:27.796 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-11 13:20:28.245 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 0
2025-07-11 13:20:30.858 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-11 13:20:31.307 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-11 13:20:31.307 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-11 13:20:31.307 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-11 13:20:31.809 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:20:31.809 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-11 13:20:32.259 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-11 13:20:32.706 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-11 13:20:33.152 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-11 13:20:33.601 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-11 13:20:34.047 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-11 13:20:34.493 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-11 13:20:35.449 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-11 13:20:36.400 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-11 13:20:37.354 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-11 13:20:37.805 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-11 13:20:38.258 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-11 13:20:40.875 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-11 13:20:41.326 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-11 13:20:41.326 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-11 13:20:41.326 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-11 13:20:41.829 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:20:41.829 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-11 13:20:46.864 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-11 13:20:46.866 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-11 13:39:50.523 +08:00 [INF] thr:10<> loader Requires:INPUT B 13
2025-07-11 13:39:51.531 +08:00 [INF] thr:38<> 执行Aligner角度angle：0
2025-07-11 13:39:52.536 +08:00 [INF] thr:38<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-11 13:39:52.537 +08:00 [INF] thr:38<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 13:39:52.537 +08:00 [INF] thr:38<> loader Requires:RGRP
2025-07-11 13:39:52.978 +08:00 [INF] thr:38<> CLeanLoader Group Now C
2025-07-11 13:39:52.978 +08:00 [INF] thr:38<> loader Requires:MATS AJ T
2025-07-11 13:39:53.437 +08:00 [INF] thr:38<> loader Requires:SSP Z 4000
2025-07-11 13:39:53.884 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 1
2025-07-11 13:39:54.357 +08:00 [INF] thr:38<> loader Requires:MOVR R 226000
2025-07-11 13:39:56.953 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 13:39:57.404 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-11 13:39:57.404 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-11 13:39:57.404 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-11 13:39:57.907 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:39:57.907 +08:00 [INF] thr:38<> loader Requires:INPUT A 6
2025-07-11 13:39:58.361 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 13:39:58.808 +08:00 [INF] thr:38<> loader Requires:OUTP 16 1
2025-07-11 13:39:59.256 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 13:39:59.702 +08:00 [INF] thr:38<> loader Requires:OUTP 4 1
2025-07-11 13:40:00.149 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 13:40:00.596 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:01.048 +08:00 [INF] thr:38<> loader Requires:MATS AJ R 0
2025-07-11 13:40:04.297 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-11 13:40:04.297 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-11 13:40:04.297 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-11 13:40:04.801 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:04.801 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 13:40:05.250 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 0
2025-07-11 13:40:07.863 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 13:40:08.311 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-11 13:40:08.311 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-11 13:40:08.311 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-11 13:40:08.814 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:08.814 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 13:40:09.262 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 13:40:09.710 +08:00 [INF] thr:38<> loader Requires:OUTP 16 0
2025-07-11 13:40:10.156 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 13:40:10.605 +08:00 [INF] thr:38<> loader Requires:OUTP 4 0
2025-07-11 13:40:11.052 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 13:40:11.498 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:12.451 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:13.405 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:14.358 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:15.312 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:16.265 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:16.716 +08:00 [INF] thr:38<> loader Requires:INPUT A 5
2025-07-11 13:40:17.170 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 1
2025-07-11 13:40:19.786 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 13:40:20.236 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-11 13:40:20.236 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-11 13:40:20.236 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-11 13:40:20.740 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:20.740 +08:00 [INF] thr:38<> loader Requires:RETH
2025-07-11 13:40:25.775 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-11 13:40:25.777 +08:00 [INF] thr:38<> AOI is Ready
2025-07-11 13:40:25.840 +08:00 [INF] thr:38<> SetVelocity, Axis:X, velocity:50
2025-07-11 13:40:25.847 +08:00 [INF] thr:38<> SetVelocity, Axis:Y, velocity:50
2025-07-11 13:40:25.892 +08:00 [INF] thr:38<> SetVelocity, Axis:X, velocity:8
2025-07-11 13:40:25.898 +08:00 [INF] thr:38<> SetVelocity, Axis:Y, velocity:8
2025-07-11 13:40:25.914 +08:00 [INF] thr:38<> stage move to position action ok
2025-07-11 13:40:25.914 +08:00 [INF] thr:38<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-11 13:40:25.915 +08:00 [INF] thr:38<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 13:40:25.915 +08:00 [INF] thr:38<> loader Requires:RGRP
2025-07-11 13:40:26.358 +08:00 [INF] thr:38<> CLeanLoader Group Now C
2025-07-11 13:40:26.358 +08:00 [INF] thr:38<> loader Requires:MATS AK T
2025-07-11 13:40:29.899 +08:00 [INF] thr:38<> loader Requires:SSP Z 4000
2025-07-11 13:40:30.347 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 1
2025-07-11 13:40:37.366 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 13:40:37.815 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-11 13:40:37.815 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-11 13:40:37.815 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-11 13:40:38.319 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:38.319 +08:00 [INF] thr:38<> loader Requires:INPUT A 6
2025-07-11 13:40:38.772 +08:00 [INF] thr:38<> loader Requires:MATS AK R 0
2025-07-11 13:40:44.055 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-11 13:40:44.055 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片请求
2025-07-11 13:40:44.055 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-11 13:40:44.558 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:44.558 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 13:40:45.008 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 0
2025-07-11 13:40:47.721 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 13:40:48.190 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-11 13:40:48.190 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-11 13:40:48.190 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-11 13:40:48.693 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:48.693 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 13:40:49.142 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 13:40:49.590 +08:00 [INF] thr:38<> loader Requires:OUTP 16 1
2025-07-11 13:40:50.037 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 13:40:50.486 +08:00 [INF] thr:38<> loader Requires:OUTP 4 1
2025-07-11 13:40:50.932 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 13:40:51.378 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:52.333 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:53.286 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:54.240 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 13:40:54.691 +08:00 [INF] thr:38<> loader Requires:INPUT A 5
2025-07-11 13:40:55.144 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 1
2025-07-11 13:40:57.862 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 13:40:58.314 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-11 13:40:58.314 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-11 13:40:58.314 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-11 13:40:59.320 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:40:59.320 +08:00 [INF] thr:38<> loader Requires:RETH
2025-07-11 13:41:04.582 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-11 13:56:37.875 +08:00 [INF] thr:19<> loader Requires:INPUT B 13
2025-07-11 13:56:39.335 +08:00 [INF] thr:43<> AOI is Ready
2025-07-11 13:56:43.798 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:50
2025-07-11 13:56:43.806 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:50
2025-07-11 13:56:47.715 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:8
2025-07-11 13:56:47.722 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:8
2025-07-11 13:56:47.746 +08:00 [INF] thr:43<> stage move to position action ok
2025-07-11 13:56:47.746 +08:00 [INF] thr:43<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-11 13:56:47.747 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 13:56:47.747 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-07-11 13:56:48.191 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-07-11 13:56:48.192 +08:00 [INF] thr:43<> loader Requires:MATS AK T
2025-07-11 13:56:48.650 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-07-11 13:56:49.097 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-07-11 13:56:49.570 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 13:56:50.029 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-11 13:56:50.029 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-11 13:56:50.029 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-11 13:56:50.532 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:56:50.532 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-07-11 13:56:50.986 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 13:56:51.433 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-07-11 13:56:51.880 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 13:56:52.329 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-07-11 13:56:52.776 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 13:56:53.221 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:56:53.673 +08:00 [INF] thr:43<> loader Requires:MATS AK R 0
2025-07-11 13:56:58.956 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-11 13:56:58.956 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片请求
2025-07-11 13:56:58.956 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-11 13:56:59.460 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:56:59.460 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 13:56:59.909 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 0
2025-07-11 13:57:02.622 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 13:57:03.109 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-11 13:57:03.110 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-11 13:57:03.110 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-11 13:57:03.613 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:57:03.613 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 13:57:04.060 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 13:57:04.506 +08:00 [INF] thr:43<> loader Requires:OUTP 16 0
2025-07-11 13:57:04.954 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 13:57:05.403 +08:00 [INF] thr:43<> loader Requires:OUTP 4 0
2025-07-11 13:57:05.850 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 13:57:06.297 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:07.250 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:08.204 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:09.157 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:10.108 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:11.062 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:11.514 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-07-11 13:57:11.966 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-07-11 13:57:14.685 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 13:57:15.135 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-11 13:57:15.135 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-11 13:57:15.135 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-11 13:57:15.638 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:57:15.638 +08:00 [INF] thr:43<> loader Requires:RETH
2025-07-11 13:57:20.898 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-11 13:57:20.899 +08:00 [INF] thr:43<> 执行Aligner设置初始角度InitialAngle：0
2025-07-11 13:57:20.899 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-07-11 13:57:21.906 +08:00 [INF] thr:43<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-11 13:57:21.906 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 13:57:21.906 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-07-11 13:57:22.350 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-07-11 13:57:22.350 +08:00 [INF] thr:43<> loader Requires:MATS AJ T
2025-07-11 13:57:25.892 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-07-11 13:57:26.341 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-07-11 13:57:33.358 +08:00 [INF] thr:43<> loader Requires:MOVR R 226000
2025-07-11 13:57:35.954 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 13:57:36.405 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-11 13:57:36.405 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-11 13:57:36.405 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-11 13:57:36.909 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:57:36.909 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-07-11 13:57:37.362 +08:00 [INF] thr:43<> loader Requires:MATS AJ R 0
2025-07-11 13:57:40.612 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-11 13:57:40.612 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-11 13:57:40.612 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-11 13:57:41.115 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:57:41.116 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 13:57:41.562 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 0
2025-07-11 13:57:44.176 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 13:57:44.625 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-11 13:57:44.625 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-11 13:57:44.625 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-11 13:57:45.129 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:57:45.129 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 13:57:45.577 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 13:57:46.024 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-07-11 13:57:46.471 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 13:57:46.920 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-07-11 13:57:47.366 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 13:57:47.812 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:48.766 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:49.720 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:50.673 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 13:57:51.124 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-07-11 13:57:51.578 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-07-11 13:57:54.195 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 13:57:54.645 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-11 13:57:54.645 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-11 13:57:54.645 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-11 13:57:55.148 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 13:57:55.148 +08:00 [INF] thr:43<> loader Requires:RETH
2025-07-11 13:58:00.184 +08:00 [INF] thr:43<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-11 13:58:00.186 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-07-11 14:18:01.517 +08:00 [INF] thr:72<> loader Requires:INPUT B 13
2025-07-11 14:18:02.488 +08:00 [INF] thr:43<> 执行Aligner角度angle：0
2025-07-11 14:18:03.494 +08:00 [INF] thr:43<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-11 14:18:03.495 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 14:18:03.495 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-07-11 14:18:03.937 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-07-11 14:18:03.937 +08:00 [INF] thr:43<> loader Requires:MATS AJ T
2025-07-11 14:18:04.396 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-07-11 14:18:04.847 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-07-11 14:18:05.319 +08:00 [INF] thr:43<> loader Requires:MOVR R 226000
2025-07-11 14:18:07.916 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 14:18:08.366 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-11 14:18:08.366 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-11 14:18:08.366 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-11 14:18:08.870 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:08.870 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-07-11 14:18:09.323 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 14:18:09.770 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-07-11 14:18:10.217 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 14:18:10.666 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-07-11 14:18:11.113 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 14:18:11.559 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:12.010 +08:00 [INF] thr:43<> loader Requires:MATS AJ R 0
2025-07-11 14:18:15.261 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-11 14:18:15.261 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-11 14:18:15.261 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-11 14:18:15.763 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:15.763 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 14:18:16.213 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 0
2025-07-11 14:18:18.824 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 14:18:19.273 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-11 14:18:19.273 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-11 14:18:19.273 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-11 14:18:19.777 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:19.777 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 14:18:20.226 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 14:18:20.672 +08:00 [INF] thr:43<> loader Requires:OUTP 16 0
2025-07-11 14:18:21.120 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 14:18:21.569 +08:00 [INF] thr:43<> loader Requires:OUTP 4 0
2025-07-11 14:18:22.016 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 14:18:22.465 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:23.418 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:24.371 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:25.325 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:26.278 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:27.232 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:18:27.683 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-07-11 14:18:28.136 +08:00 [INF] thr:43<> loader Requires:MATS AJ Z 1
2025-07-11 14:18:30.752 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 14:18:31.202 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-11 14:18:31.202 +08:00 [INF] thr:43<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-11 14:18:31.202 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-11 14:18:31.707 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:31.707 +08:00 [INF] thr:43<> loader Requires:RETH
2025-07-11 14:18:36.740 +08:00 [INF] thr:43<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-11 14:18:36.741 +08:00 [INF] thr:43<> AOI is Ready
2025-07-11 14:18:36.805 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:50
2025-07-11 14:18:36.808 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:50
2025-07-11 14:18:36.845 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:8
2025-07-11 14:18:36.848 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:8
2025-07-11 14:18:36.871 +08:00 [INF] thr:43<> stage move to position action ok
2025-07-11 14:18:36.871 +08:00 [INF] thr:43<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-11 14:18:36.872 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 14:18:36.872 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-07-11 14:18:37.316 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-07-11 14:18:37.316 +08:00 [INF] thr:43<> loader Requires:MATS AK T
2025-07-11 14:18:40.857 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-07-11 14:18:41.306 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-07-11 14:18:48.325 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 14:18:48.775 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-11 14:18:48.775 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-11 14:18:48.775 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-11 14:18:49.277 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:49.278 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-07-11 14:18:49.732 +08:00 [INF] thr:43<> loader Requires:MATS AK R 0
2025-07-11 14:18:55.014 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-11 14:18:55.014 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片请求
2025-07-11 14:18:55.014 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-11 14:18:55.517 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:55.517 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 14:18:55.966 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 0
2025-07-11 14:18:58.680 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 14:18:59.156 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-11 14:18:59.156 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-11 14:18:59.156 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-11 14:18:59.660 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:18:59.660 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 14:19:00.109 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 14:19:00.557 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-07-11 14:19:01.004 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 14:19:01.451 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-07-11 14:19:01.898 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 14:19:02.344 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:19:03.297 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:19:04.251 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:19:05.204 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 14:19:05.655 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-07-11 14:19:06.109 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-07-11 14:19:08.828 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 14:19:09.277 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-11 14:19:09.277 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-11 14:19:09.277 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-11 14:19:10.284 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:19:10.284 +08:00 [INF] thr:43<> loader Requires:RETH
2025-07-11 14:19:15.548 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-11 14:24:26.620 +08:00 [INF] thr:11<> loader Requires:INPUT B 13
2025-07-11 14:24:28.082 +08:00 [INF] thr:38<> AOI is Ready
2025-07-11 14:24:35.461 +08:00 [INF] thr:38<> SetVelocity, Axis:X, velocity:50
2025-07-11 14:24:35.464 +08:00 [INF] thr:38<> SetVelocity, Axis:Y, velocity:50
2025-07-11 14:24:39.791 +08:00 [INF] thr:38<> SetVelocity, Axis:X, velocity:8
2025-07-11 14:24:39.794 +08:00 [INF] thr:38<> SetVelocity, Axis:Y, velocity:8
2025-07-11 14:24:39.810 +08:00 [INF] thr:38<> stage move to position action ok
2025-07-11 14:24:39.811 +08:00 [INF] thr:38<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-11 14:24:39.811 +08:00 [INF] thr:38<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 14:24:39.811 +08:00 [INF] thr:38<> loader Requires:RGRP
2025-07-11 14:24:40.261 +08:00 [INF] thr:38<> CLeanLoader Group Now C
2025-07-11 14:24:40.261 +08:00 [INF] thr:38<> loader Requires:MATS AK T
2025-07-11 14:24:40.718 +08:00 [INF] thr:38<> loader Requires:SSP Z 4000
2025-07-11 14:24:41.165 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 1
2025-07-11 14:24:41.638 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:24:42.089 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-11 14:24:42.089 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-11 14:24:42.089 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-11 14:24:42.592 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:24:42.592 +08:00 [INF] thr:38<> loader Requires:INPUT A 6
2025-07-11 14:24:43.046 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 14:24:43.493 +08:00 [INF] thr:38<> loader Requires:OUTP 16 1
2025-07-11 14:24:43.940 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 14:24:44.389 +08:00 [INF] thr:38<> loader Requires:OUTP 4 1
2025-07-11 14:24:44.835 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 14:24:45.281 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:24:45.734 +08:00 [INF] thr:38<> loader Requires:MATS AK R 0
2025-07-11 14:24:51.015 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-11 14:24:51.015 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:下片请求
2025-07-11 14:24:51.015 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-11 14:24:51.519 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:24:51.519 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 14:24:51.965 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 0
2025-07-11 14:24:54.678 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:24:55.151 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-11 14:24:55.151 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-11 14:24:55.151 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-11 14:24:55.655 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:24:55.655 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 14:24:56.105 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 14:24:56.552 +08:00 [INF] thr:38<> loader Requires:OUTP 16 0
2025-07-11 14:24:56.998 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 14:24:57.447 +08:00 [INF] thr:38<> loader Requires:OUTP 4 0
2025-07-11 14:24:57.894 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 14:24:58.339 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:24:59.293 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:25:00.247 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:25:01.200 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:25:02.152 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:25:03.105 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:25:03.557 +08:00 [INF] thr:38<> loader Requires:INPUT A 5
2025-07-11 14:25:04.011 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 1
2025-07-11 14:25:06.727 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:25:07.177 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-11 14:25:07.177 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-11 14:25:07.178 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-11 14:25:07.682 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:25:07.682 +08:00 [INF] thr:38<> loader Requires:RETH
2025-07-11 14:25:12.945 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-11 14:25:12.946 +08:00 [INF] thr:39<> 执行Aligner设置初始角度InitialAngle：0
2025-07-11 14:25:12.946 +08:00 [INF] thr:39<> 执行Aligner角度angle：0
2025-07-11 14:25:13.954 +08:00 [INF] thr:39<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-11 14:25:13.954 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 14:25:13.954 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-11 14:25:14.395 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-11 14:25:14.395 +08:00 [INF] thr:39<> loader Requires:MATS AJ T
2025-07-11 14:25:17.937 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-11 14:25:18.386 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 1
2025-07-11 14:25:25.404 +08:00 [INF] thr:39<> loader Requires:MOVR R 226000
2025-07-11 14:25:28.000 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 14:25:28.448 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-11 14:25:28.448 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-11 14:25:28.448 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-11 14:25:28.953 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:25:28.953 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-11 14:25:29.406 +08:00 [INF] thr:39<> loader Requires:MATS AJ R 0
2025-07-11 14:25:32.655 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-11 14:25:32.655 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-11 14:25:32.655 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-11 14:25:33.160 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:25:33.160 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 14:25:33.608 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 0
2025-07-11 14:25:36.221 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 14:25:36.669 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-11 14:25:36.669 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-11 14:25:36.669 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-11 14:25:37.173 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:25:37.173 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 14:25:37.621 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-11 14:25:38.068 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-11 14:25:38.514 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-11 14:25:38.963 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-11 14:25:39.410 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-11 14:25:39.857 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 14:25:40.810 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 14:25:41.764 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 14:25:42.717 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 14:25:43.169 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-11 14:25:43.621 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 1
2025-07-11 14:25:46.238 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 14:25:46.689 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-11 14:25:46.689 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-11 14:25:46.689 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-11 14:25:47.192 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:25:47.192 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-11 14:25:52.228 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-11 14:25:52.229 +08:00 [INF] thr:39<> 执行Aligner角度angle：0
2025-07-11 14:27:11.829 +08:00 [INF] thr:65<> loader Requires:INPUT B 13
2025-07-11 14:27:12.807 +08:00 [INF] thr:38<> 执行Aligner角度angle：0
2025-07-11 14:27:13.813 +08:00 [INF] thr:38<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-11 14:27:13.814 +08:00 [INF] thr:38<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 14:27:13.814 +08:00 [INF] thr:38<> loader Requires:RGRP
2025-07-11 14:27:14.257 +08:00 [INF] thr:38<> CLeanLoader Group Now C
2025-07-11 14:27:14.257 +08:00 [INF] thr:38<> loader Requires:MATS AJ T
2025-07-11 14:27:14.715 +08:00 [INF] thr:38<> loader Requires:SSP Z 4000
2025-07-11 14:27:15.163 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 1
2025-07-11 14:27:15.636 +08:00 [INF] thr:38<> loader Requires:MOVR R 226000
2025-07-11 14:27:18.231 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:27:18.682 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-11 14:27:18.682 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-11 14:27:18.682 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-11 14:27:19.186 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:27:19.186 +08:00 [INF] thr:38<> loader Requires:INPUT A 6
2025-07-11 14:27:19.639 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 14:27:20.086 +08:00 [INF] thr:38<> loader Requires:OUTP 16 1
2025-07-11 14:27:20.533 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 14:27:20.982 +08:00 [INF] thr:38<> loader Requires:OUTP 4 1
2025-07-11 14:27:21.428 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 14:27:21.874 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:22.330 +08:00 [INF] thr:38<> loader Requires:MATS AJ R 0
2025-07-11 14:27:25.579 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-11 14:27:25.579 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-11 14:27:25.579 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-11 14:27:26.082 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:27:26.082 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 14:27:26.531 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 0
2025-07-11 14:27:29.144 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:27:29.594 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-11 14:27:29.594 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-11 14:27:29.594 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-11 14:27:30.097 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:27:30.097 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 14:27:30.545 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 14:27:30.992 +08:00 [INF] thr:38<> loader Requires:OUTP 16 0
2025-07-11 14:27:31.438 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 14:27:31.886 +08:00 [INF] thr:38<> loader Requires:OUTP 4 0
2025-07-11 14:27:32.333 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 14:27:32.780 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:33.732 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:34.694 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:35.647 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:36.601 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:37.554 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:27:38.008 +08:00 [INF] thr:38<> loader Requires:INPUT A 5
2025-07-11 14:27:38.462 +08:00 [INF] thr:38<> loader Requires:MATS AJ Z 1
2025-07-11 14:27:41.080 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:27:41.530 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-11 14:27:41.530 +08:00 [INF] thr:38<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-11 14:27:41.530 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-11 14:27:42.033 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:27:42.033 +08:00 [INF] thr:38<> loader Requires:RETH
2025-07-11 14:27:47.069 +08:00 [INF] thr:38<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-11 14:27:47.071 +08:00 [INF] thr:38<> AOI is Ready
2025-07-11 14:27:47.138 +08:00 [INF] thr:38<> SetVelocity, Axis:X, velocity:50
2025-07-11 14:27:47.141 +08:00 [INF] thr:38<> SetVelocity, Axis:Y, velocity:50
2025-07-11 14:27:47.178 +08:00 [INF] thr:38<> SetVelocity, Axis:X, velocity:8
2025-07-11 14:27:47.181 +08:00 [INF] thr:38<> SetVelocity, Axis:Y, velocity:8
2025-07-11 14:27:47.197 +08:00 [INF] thr:38<> stage move to position action ok
2025-07-11 14:27:47.197 +08:00 [INF] thr:38<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-11 14:27:47.197 +08:00 [INF] thr:38<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 14:27:47.197 +08:00 [INF] thr:38<> loader Requires:RGRP
2025-07-11 14:27:47.640 +08:00 [INF] thr:38<> CLeanLoader Group Now C
2025-07-11 14:27:47.640 +08:00 [INF] thr:38<> loader Requires:MATS AK T
2025-07-11 14:27:51.183 +08:00 [INF] thr:38<> loader Requires:SSP Z 4000
2025-07-11 14:27:51.631 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 1
2025-07-11 14:27:58.650 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:27:59.100 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-11 14:27:59.100 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-11 14:27:59.100 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-11 14:27:59.604 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:27:59.604 +08:00 [INF] thr:38<> loader Requires:INPUT A 6
2025-07-11 14:28:00.057 +08:00 [INF] thr:38<> loader Requires:MATS AK R 0
2025-07-11 14:28:05.339 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-11 14:28:05.340 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片请求
2025-07-11 14:28:05.340 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-11 14:28:05.844 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:28:05.844 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 14:28:06.293 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 0
2025-07-11 14:28:09.006 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:28:09.475 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-11 14:28:09.475 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-11 14:28:09.475 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-11 14:28:09.980 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:28:09.980 +08:00 [INF] thr:38<> loader Requires:SSP Z 1000
2025-07-11 14:28:10.428 +08:00 [INF] thr:38<> loader Requires:OUTP 1 0
2025-07-11 14:28:10.875 +08:00 [INF] thr:38<> loader Requires:OUTP 16 1
2025-07-11 14:28:11.322 +08:00 [INF] thr:38<> loader Requires:OUTP 15 1
2025-07-11 14:28:11.771 +08:00 [INF] thr:38<> loader Requires:OUTP 4 1
2025-07-11 14:28:12.218 +08:00 [INF] thr:38<> loader Requires:OUTP 1 1
2025-07-11 14:28:12.663 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:28:13.618 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:28:14.569 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:28:15.523 +08:00 [INF] thr:38<> loader Requires:INPUT A 4
2025-07-11 14:28:15.975 +08:00 [INF] thr:38<> loader Requires:INPUT A 5
2025-07-11 14:28:16.427 +08:00 [INF] thr:38<> loader Requires:MATS AK Z 1
2025-07-11 14:28:19.145 +08:00 [INF] thr:38<> loader Requires:SSPP Z 30
2025-07-11 14:28:19.595 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-11 14:28:19.595 +08:00 [INF] thr:38<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-11 14:28:19.595 +08:00 [INF] thr:38<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-11 14:28:20.600 +08:00 [INF] thr:38<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 14:28:20.600 +08:00 [INF] thr:38<> loader Requires:RETH
2025-07-11 14:28:25.862 +08:00 [INF] thr:38<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-11 21:34:19.531 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-11 21:34:20.993 +08:00 [INF] thr:43<> AOI is Ready
2025-07-11 21:34:29.022 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:50
2025-07-11 21:34:29.030 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:50
2025-07-11 21:34:32.808 +08:00 [INF] thr:43<> SetVelocity, Axis:X, velocity:8
2025-07-11 21:34:32.811 +08:00 [INF] thr:43<> SetVelocity, Axis:Y, velocity:8
2025-07-11 21:34:32.828 +08:00 [INF] thr:43<> stage move to position action ok
2025-07-11 21:34:32.828 +08:00 [INF] thr:43<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-11 21:34:32.828 +08:00 [INF] thr:43<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 21:34:32.828 +08:00 [INF] thr:43<> loader Requires:RGRP
2025-07-11 21:34:33.273 +08:00 [INF] thr:43<> CLeanLoader Group Now C
2025-07-11 21:34:33.273 +08:00 [INF] thr:43<> loader Requires:MATS AK T
2025-07-11 21:34:33.732 +08:00 [INF] thr:43<> loader Requires:SSP Z 4000
2025-07-11 21:34:34.179 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-07-11 21:34:34.653 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 21:34:35.102 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-11 21:34:35.102 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-11 21:34:35.102 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-11 21:34:35.607 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:34:35.607 +08:00 [INF] thr:43<> loader Requires:INPUT A 6
2025-07-11 21:34:36.059 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 21:34:36.506 +08:00 [INF] thr:43<> loader Requires:OUTP 16 1
2025-07-11 21:34:36.954 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 21:34:37.411 +08:00 [INF] thr:43<> loader Requires:OUTP 4 1
2025-07-11 21:34:37.857 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 21:34:38.302 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:38.755 +08:00 [INF] thr:43<> loader Requires:MATS AK R 0
2025-07-11 21:34:44.037 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-11 21:34:44.037 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片请求
2025-07-11 21:34:44.037 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-11 21:34:44.541 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:34:44.541 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 21:34:44.987 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 0
2025-07-11 21:34:47.700 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 21:34:48.161 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-11 21:34:48.161 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-11 21:34:48.161 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-11 21:34:48.666 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:34:48.666 +08:00 [INF] thr:43<> loader Requires:SSP Z 1000
2025-07-11 21:34:49.114 +08:00 [INF] thr:43<> loader Requires:OUTP 1 0
2025-07-11 21:34:49.559 +08:00 [INF] thr:43<> loader Requires:OUTP 16 0
2025-07-11 21:34:50.007 +08:00 [INF] thr:43<> loader Requires:OUTP 15 1
2025-07-11 21:34:50.456 +08:00 [INF] thr:43<> loader Requires:OUTP 4 0
2025-07-11 21:34:50.903 +08:00 [INF] thr:43<> loader Requires:OUTP 1 1
2025-07-11 21:34:51.349 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:52.302 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:53.255 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:54.207 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:55.160 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:56.113 +08:00 [INF] thr:43<> loader Requires:INPUT A 4
2025-07-11 21:34:56.566 +08:00 [INF] thr:43<> loader Requires:INPUT A 5
2025-07-11 21:34:57.018 +08:00 [INF] thr:43<> loader Requires:MATS AK Z 1
2025-07-11 21:34:59.737 +08:00 [INF] thr:43<> loader Requires:SSPP Z 30
2025-07-11 21:35:00.187 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-11 21:35:00.187 +08:00 [INF] thr:43<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-11 21:35:00.187 +08:00 [INF] thr:43<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-11 21:35:00.692 +08:00 [INF] thr:43<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:35:00.692 +08:00 [INF] thr:43<> loader Requires:RETH
2025-07-11 21:35:05.954 +08:00 [INF] thr:43<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-11 21:35:05.955 +08:00 [INF] thr:39<> 执行Aligner设置初始角度InitialAngle：0
2025-07-11 21:35:05.955 +08:00 [INF] thr:39<> 执行Aligner角度angle：0
2025-07-11 21:35:06.961 +08:00 [INF] thr:39<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-11 21:35:06.962 +08:00 [INF] thr:39<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-11 21:35:06.962 +08:00 [INF] thr:39<> loader Requires:RGRP
2025-07-11 21:35:07.409 +08:00 [INF] thr:39<> CLeanLoader Group Now C
2025-07-11 21:35:07.409 +08:00 [INF] thr:39<> loader Requires:MATS AJ T
2025-07-11 21:35:10.949 +08:00 [INF] thr:39<> loader Requires:SSP Z 4000
2025-07-11 21:35:11.399 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 1
2025-07-11 21:35:18.416 +08:00 [INF] thr:39<> loader Requires:MOVR R 226000
2025-07-11 21:35:21.011 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 21:35:21.462 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-11 21:35:21.462 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-11 21:35:21.462 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-11 21:35:21.965 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:35:21.965 +08:00 [INF] thr:39<> loader Requires:INPUT A 6
2025-07-11 21:35:22.418 +08:00 [INF] thr:39<> loader Requires:MATS AJ R 0
2025-07-11 21:35:25.668 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-11 21:35:25.668 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-11 21:35:25.668 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-11 21:35:26.171 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:35:26.171 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 21:35:26.620 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 0
2025-07-11 21:35:29.233 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 21:35:29.682 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-11 21:35:29.682 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-11 21:35:29.682 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-11 21:35:30.187 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:35:30.187 +08:00 [INF] thr:39<> loader Requires:SSP Z 1000
2025-07-11 21:35:30.636 +08:00 [INF] thr:39<> loader Requires:OUTP 1 0
2025-07-11 21:35:31.082 +08:00 [INF] thr:39<> loader Requires:OUTP 16 1
2025-07-11 21:35:31.529 +08:00 [INF] thr:39<> loader Requires:OUTP 15 1
2025-07-11 21:35:31.977 +08:00 [INF] thr:39<> loader Requires:OUTP 4 1
2025-07-11 21:35:32.424 +08:00 [INF] thr:39<> loader Requires:OUTP 1 1
2025-07-11 21:35:32.872 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 21:35:33.828 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 21:35:34.781 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 21:35:35.733 +08:00 [INF] thr:39<> loader Requires:INPUT A 4
2025-07-11 21:35:36.186 +08:00 [INF] thr:39<> loader Requires:INPUT A 5
2025-07-11 21:35:36.638 +08:00 [INF] thr:39<> loader Requires:MATS AJ Z 1
2025-07-11 21:35:39.255 +08:00 [INF] thr:39<> loader Requires:SSPP Z 30
2025-07-11 21:35:39.706 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-11 21:35:39.706 +08:00 [INF] thr:39<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-11 21:35:39.706 +08:00 [INF] thr:39<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-11 21:35:40.210 +08:00 [INF] thr:39<> Safe ExecuteCommand sucess, plc is 0
2025-07-11 21:35:40.210 +08:00 [INF] thr:39<> loader Requires:RETH
2025-07-11 21:35:45.244 +08:00 [INF] thr:39<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-11 21:35:45.246 +08:00 [INF] thr:39<> 执行Aligner角度angle：0
2025-07-11 21:35:57.782 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:56724
2025-07-11 21:37:05.940 +08:00 [INF] thr:20<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-11 21:37:51.505 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:59832
2025-07-12 10:00:43.832 +08:00 [INF] thr:43<> loader Requires:INPUT B 13
2025-07-12 10:00:44.818 +08:00 [INF] thr:4<> 执行Aligner角度angle：0
2025-07-12 10:00:45.825 +08:00 [INF] thr:4<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-12 10:00:45.826 +08:00 [INF] thr:4<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 10:00:45.826 +08:00 [INF] thr:4<> loader Requires:RGRP
2025-07-12 10:00:46.269 +08:00 [INF] thr:4<> CLeanLoader Group Now C
2025-07-12 10:00:46.269 +08:00 [INF] thr:4<> loader Requires:MATS AJ T
2025-07-12 10:00:46.728 +08:00 [INF] thr:4<> loader Requires:SSP Z 4000
2025-07-12 10:00:47.174 +08:00 [INF] thr:4<> loader Requires:MATS AJ Z 1
2025-07-12 10:00:47.648 +08:00 [INF] thr:4<> loader Requires:MOVR R 226000
2025-07-12 10:00:50.243 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-12 10:00:50.694 +08:00 [INF] thr:4<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-12 10:00:50.695 +08:00 [INF] thr:4<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-12 10:00:50.695 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-12 10:00:51.197 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:00:51.197 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-12 10:00:51.651 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-12 10:00:52.099 +08:00 [INF] thr:4<> loader Requires:OUTP 16 1
2025-07-12 10:00:52.545 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-12 10:00:52.993 +08:00 [INF] thr:4<> loader Requires:OUTP 4 1
2025-07-12 10:00:53.440 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-12 10:00:53.887 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:00:54.339 +08:00 [INF] thr:4<> loader Requires:MATS AJ R 0
2025-07-12 10:00:57.588 +08:00 [INF] thr:4<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-12 10:00:57.588 +08:00 [INF] thr:4<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-12 10:00:57.588 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-12 10:00:58.092 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:00:58.092 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-12 10:00:58.541 +08:00 [INF] thr:4<> loader Requires:MATS AJ Z 0
2025-07-12 10:01:01.152 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-12 10:01:01.601 +08:00 [INF] thr:4<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-12 10:01:01.601 +08:00 [INF] thr:4<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-12 10:01:01.601 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-12 10:01:02.104 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:01:02.104 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-12 10:01:02.553 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-12 10:01:03.000 +08:00 [INF] thr:4<> loader Requires:OUTP 16 0
2025-07-12 10:01:03.448 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-12 10:01:03.896 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-12 10:01:04.343 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-12 10:01:04.789 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:05.742 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:06.696 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:07.649 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:08.601 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:09.554 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:10.007 +08:00 [INF] thr:4<> loader Requires:INPUT A 5
2025-07-12 10:01:10.460 +08:00 [INF] thr:4<> loader Requires:MATS AJ Z 1
2025-07-12 10:01:13.076 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-12 10:01:13.526 +08:00 [INF] thr:4<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-12 10:01:13.526 +08:00 [INF] thr:4<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-12 10:01:13.526 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-12 10:01:14.029 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:01:14.029 +08:00 [INF] thr:4<> loader Requires:RETH
2025-07-12 10:01:19.065 +08:00 [INF] thr:4<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-12 10:01:19.066 +08:00 [INF] thr:4<> AOI is Ready
2025-07-12 10:01:19.130 +08:00 [INF] thr:4<> SetVelocity, Axis:X, velocity:50
2025-07-12 10:01:19.133 +08:00 [INF] thr:4<> SetVelocity, Axis:Y, velocity:50
2025-07-12 10:01:22.558 +08:00 [INF] thr:4<> SetVelocity, Axis:X, velocity:50
2025-07-12 10:01:22.565 +08:00 [INF] thr:4<> SetVelocity, Axis:Y, velocity:100
2025-07-12 10:01:22.597 +08:00 [INF] thr:4<> stage move to position action ok
2025-07-12 10:01:22.597 +08:00 [INF] thr:4<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-12 10:01:22.598 +08:00 [INF] thr:4<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 10:01:22.598 +08:00 [INF] thr:4<> loader Requires:RGRP
2025-07-12 10:01:23.043 +08:00 [INF] thr:4<> CLeanLoader Group Now C
2025-07-12 10:01:23.044 +08:00 [INF] thr:4<> loader Requires:MATS AK T
2025-07-12 10:01:26.586 +08:00 [INF] thr:4<> loader Requires:SSP Z 4000
2025-07-12 10:01:27.033 +08:00 [INF] thr:4<> loader Requires:MATS AK Z 1
2025-07-12 10:01:34.052 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-12 10:01:34.502 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-12 10:01:34.502 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-12 10:01:34.502 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-12 10:01:35.005 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:01:35.005 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-12 10:01:35.460 +08:00 [INF] thr:4<> loader Requires:MATS AK R 0
2025-07-12 10:01:40.742 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-12 10:01:40.742 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:上片请求
2025-07-12 10:01:40.742 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-12 10:01:41.244 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:01:41.244 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-12 10:01:41.691 +08:00 [INF] thr:4<> loader Requires:MATS AK Z 0
2025-07-12 10:01:44.405 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-12 10:01:44.880 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-12 10:01:44.880 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-12 10:01:44.880 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-12 10:01:45.383 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:01:45.383 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-12 10:01:45.830 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-12 10:01:46.277 +08:00 [INF] thr:4<> loader Requires:OUTP 16 1
2025-07-12 10:01:46.725 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-12 10:01:47.173 +08:00 [INF] thr:4<> loader Requires:OUTP 4 1
2025-07-12 10:01:47.619 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-12 10:01:48.065 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:49.019 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:49.974 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:50.930 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-12 10:01:51.382 +08:00 [INF] thr:4<> loader Requires:INPUT A 5
2025-07-12 10:01:51.835 +08:00 [INF] thr:4<> loader Requires:MATS AK Z 1
2025-07-12 10:01:54.552 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-12 10:01:55.000 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-12 10:01:55.000 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-12 10:01:55.000 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-12 10:01:56.003 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 10:01:56.003 +08:00 [INF] thr:4<> loader Requires:RETH
2025-07-12 10:02:01.265 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-12 11:01:06.997 +08:00 [INF] thr:61<> loader Requires:INPUT B 13
2025-07-12 11:01:08.460 +08:00 [INF] thr:28<> AOI is Ready
2025-07-12 11:01:12.575 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-07-12 11:01:12.578 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-07-12 11:01:15.833 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:60
2025-07-12 11:01:15.836 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:60
2025-07-12 11:01:15.871 +08:00 [INF] thr:28<> stage move to position action ok
2025-07-12 11:01:15.871 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-12 11:01:15.872 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 11:01:15.872 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-12 11:01:16.315 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-12 11:01:16.315 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-07-12 11:01:16.774 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-12 11:01:17.220 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-12 11:01:17.694 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:01:18.144 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-12 11:01:18.144 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-12 11:01:18.144 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-12 11:01:18.651 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:01:18.651 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-12 11:01:19.104 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-12 11:01:19.551 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-12 11:01:19.999 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-12 11:01:20.448 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-12 11:01:20.895 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-12 11:01:21.339 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:21.792 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-07-12 11:01:27.074 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-12 11:01:27.074 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片请求
2025-07-12 11:01:27.074 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-12 11:01:27.579 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:01:27.579 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-12 11:01:28.029 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-07-12 11:01:30.740 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:01:31.217 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-12 11:01:31.217 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-12 11:01:31.217 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-12 11:01:31.721 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:01:31.721 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-12 11:01:32.170 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-12 11:01:32.617 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-12 11:01:33.065 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-12 11:01:33.512 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-12 11:01:33.960 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-12 11:01:34.405 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:35.359 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:36.312 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:37.266 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:38.219 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:39.171 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:01:39.622 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-12 11:01:40.075 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-12 11:01:42.794 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:01:43.244 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-12 11:01:43.244 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-12 11:01:43.244 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-12 11:01:43.748 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:01:43.748 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-12 11:01:49.011 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-12 11:01:49.012 +08:00 [INF] thr:42<> 执行Aligner设置初始角度InitialAngle：0
2025-07-12 11:01:49.012 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-12 11:01:50.025 +08:00 [INF] thr:42<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-12 11:01:50.026 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 11:01:50.026 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-12 11:01:50.470 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-12 11:01:50.470 +08:00 [INF] thr:42<> loader Requires:MATS AJ T
2025-07-12 11:01:54.012 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-12 11:01:54.466 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-12 11:02:01.483 +08:00 [INF] thr:42<> loader Requires:MOVR R 226000
2025-07-12 11:02:04.078 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 11:02:04.529 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-12 11:02:04.529 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-12 11:02:04.529 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-12 11:02:05.036 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:02:05.036 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-12 11:02:05.486 +08:00 [INF] thr:42<> loader Requires:MATS AJ R 0
2025-07-12 11:02:08.737 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-12 11:02:08.737 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-12 11:02:08.737 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-12 11:02:09.241 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:02:09.242 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 11:02:09.687 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 0
2025-07-12 11:02:12.300 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 11:02:12.750 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-12 11:02:12.750 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-12 11:02:12.750 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-12 11:02:13.253 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:02:13.254 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 11:02:13.702 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-12 11:02:14.149 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-12 11:02:14.598 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-12 11:02:15.045 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-12 11:02:15.491 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-12 11:02:15.937 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 11:02:16.890 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 11:02:17.845 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 11:02:18.801 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 11:02:19.253 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-12 11:02:19.705 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-12 11:02:22.327 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 11:02:22.777 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-12 11:02:22.777 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-12 11:02:22.777 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-12 11:02:23.280 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:02:23.280 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-12 11:02:28.317 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-12 11:02:28.318 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-12 11:05:48.453 +08:00 [INF] thr:46<> loader Requires:INPUT B 13
2025-07-12 11:05:49.440 +08:00 [INF] thr:28<> 执行Aligner角度angle：0
2025-07-12 11:05:50.446 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-12 11:05:50.447 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 11:05:50.447 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-12 11:05:50.892 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-12 11:05:50.892 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-12 11:05:51.350 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-12 11:05:51.798 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-12 11:05:52.270 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-12 11:05:54.866 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:05:55.317 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-12 11:05:55.317 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-12 11:05:55.317 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-12 11:05:55.837 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:05:55.837 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-12 11:05:56.291 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-12 11:05:56.737 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-12 11:05:57.183 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-12 11:05:57.632 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-12 11:05:58.079 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-12 11:05:58.525 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:05:58.977 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-12 11:06:02.227 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-12 11:06:02.227 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-12 11:06:02.227 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-12 11:06:02.743 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:02.743 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-12 11:06:03.192 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-12 11:06:05.803 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:06:06.252 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-12 11:06:06.252 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-12 11:06:06.252 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-12 11:06:06.756 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:06.756 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-12 11:06:07.205 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-12 11:06:07.652 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-12 11:06:08.099 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-12 11:06:08.548 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-12 11:06:08.995 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-12 11:06:09.440 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:10.393 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:11.346 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:12.301 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:13.254 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:14.208 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:14.659 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-12 11:06:15.110 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-12 11:06:17.727 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:06:18.177 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-12 11:06:18.177 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-12 11:06:18.177 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-12 11:06:18.680 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:18.680 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-12 11:06:23.715 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-12 11:06:23.717 +08:00 [INF] thr:28<> AOI is Ready
2025-07-12 11:06:23.779 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-07-12 11:06:23.786 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-07-12 11:06:23.831 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:60
2025-07-12 11:06:23.838 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:60
2025-07-12 11:06:23.883 +08:00 [INF] thr:28<> stage move to position action ok
2025-07-12 11:06:23.883 +08:00 [INF] thr:28<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-12 11:06:23.884 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 11:06:23.884 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-12 11:06:24.326 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-12 11:06:24.326 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-07-12 11:06:27.868 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-12 11:06:28.318 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-12 11:06:35.335 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:06:35.785 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-12 11:06:35.785 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-12 11:06:35.785 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-12 11:06:36.289 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:36.289 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-12 11:06:36.744 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-07-12 11:06:42.027 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-12 11:06:42.027 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片请求
2025-07-12 11:06:42.027 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-12 11:06:42.530 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:42.530 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-12 11:06:42.977 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-07-12 11:06:45.691 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:06:46.154 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-12 11:06:46.154 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-12 11:06:46.154 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-12 11:06:46.672 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:46.672 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-12 11:06:47.121 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-12 11:06:47.568 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-12 11:06:48.014 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-12 11:06:48.462 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-12 11:06:48.909 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-12 11:06:49.356 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:50.309 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:51.263 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:52.216 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-12 11:06:52.668 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-12 11:06:53.121 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-12 11:06:55.838 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-12 11:06:56.289 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-12 11:06:56.289 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-12 11:06:56.289 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-12 11:06:57.296 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 11:06:57.296 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-12 11:07:02.559 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-12 13:21:08.313 +08:00 [INF] thr:65<> loader Requires:INPUT B 13
2025-07-12 13:21:09.780 +08:00 [INF] thr:37<> AOI is Ready
2025-07-12 13:21:13.913 +08:00 [INF] thr:37<> SetVelocity, Axis:X, velocity:50
2025-07-12 13:21:13.920 +08:00 [INF] thr:37<> SetVelocity, Axis:Y, velocity:50
2025-07-12 13:21:16.484 +08:00 [INF] thr:37<> SetVelocity, Axis:X, velocity:60
2025-07-12 13:21:16.487 +08:00 [INF] thr:37<> SetVelocity, Axis:Y, velocity:60
2025-07-12 13:21:16.504 +08:00 [INF] thr:37<> stage move to position action ok
2025-07-12 13:21:16.504 +08:00 [INF] thr:37<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-12 13:21:16.504 +08:00 [INF] thr:37<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 13:21:16.504 +08:00 [INF] thr:37<> loader Requires:RGRP
2025-07-12 13:21:16.946 +08:00 [INF] thr:37<> CLeanLoader Group Now C
2025-07-12 13:21:16.946 +08:00 [INF] thr:37<> loader Requires:MATS AK T
2025-07-12 13:21:17.405 +08:00 [INF] thr:37<> loader Requires:SSP Z 4000
2025-07-12 13:21:17.852 +08:00 [INF] thr:37<> loader Requires:MATS AK Z 1
2025-07-12 13:21:18.324 +08:00 [INF] thr:37<> loader Requires:SSPP Z 30
2025-07-12 13:21:18.775 +08:00 [INF] thr:37<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-12 13:21:18.775 +08:00 [INF] thr:37<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-12 13:21:18.775 +08:00 [INF] thr:37<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-12 13:21:19.279 +08:00 [INF] thr:37<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:21:19.279 +08:00 [INF] thr:37<> loader Requires:INPUT A 6
2025-07-12 13:21:19.731 +08:00 [INF] thr:37<> loader Requires:OUTP 1 0
2025-07-12 13:21:20.178 +08:00 [INF] thr:37<> loader Requires:OUTP 16 1
2025-07-12 13:21:20.626 +08:00 [INF] thr:37<> loader Requires:OUTP 15 1
2025-07-12 13:21:21.074 +08:00 [INF] thr:37<> loader Requires:OUTP 4 1
2025-07-12 13:21:21.521 +08:00 [INF] thr:37<> loader Requires:OUTP 1 1
2025-07-12 13:21:21.967 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:22.419 +08:00 [INF] thr:37<> loader Requires:MATS AK R 0
2025-07-12 13:21:27.701 +08:00 [INF] thr:37<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-12 13:21:27.701 +08:00 [INF] thr:37<> Station:InspectStageA,SafeCheck:下片请求
2025-07-12 13:21:27.701 +08:00 [INF] thr:37<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-12 13:21:28.205 +08:00 [INF] thr:37<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:21:28.205 +08:00 [INF] thr:37<> loader Requires:SSP Z 1000
2025-07-12 13:21:28.654 +08:00 [INF] thr:37<> loader Requires:MATS AK Z 0
2025-07-12 13:21:31.367 +08:00 [INF] thr:37<> loader Requires:SSPP Z 30
2025-07-12 13:21:31.840 +08:00 [INF] thr:37<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-12 13:21:31.841 +08:00 [INF] thr:37<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-12 13:21:31.841 +08:00 [INF] thr:37<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-12 13:21:32.344 +08:00 [INF] thr:37<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:21:32.344 +08:00 [INF] thr:37<> loader Requires:SSP Z 1000
2025-07-12 13:21:32.793 +08:00 [INF] thr:37<> loader Requires:OUTP 1 0
2025-07-12 13:21:33.239 +08:00 [INF] thr:37<> loader Requires:OUTP 16 0
2025-07-12 13:21:33.687 +08:00 [INF] thr:37<> loader Requires:OUTP 15 1
2025-07-12 13:21:34.136 +08:00 [INF] thr:37<> loader Requires:OUTP 4 0
2025-07-12 13:21:34.590 +08:00 [INF] thr:37<> loader Requires:OUTP 1 1
2025-07-12 13:21:35.036 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:35.989 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:36.942 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:37.896 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:38.849 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:39.803 +08:00 [INF] thr:37<> loader Requires:INPUT A 4
2025-07-12 13:21:40.254 +08:00 [INF] thr:37<> loader Requires:INPUT A 5
2025-07-12 13:21:40.707 +08:00 [INF] thr:37<> loader Requires:MATS AK Z 1
2025-07-12 13:21:43.425 +08:00 [INF] thr:37<> loader Requires:SSPP Z 30
2025-07-12 13:21:43.875 +08:00 [INF] thr:37<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-12 13:21:43.875 +08:00 [INF] thr:37<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-12 13:21:43.875 +08:00 [INF] thr:37<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-12 13:21:44.379 +08:00 [INF] thr:37<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:21:44.379 +08:00 [INF] thr:37<> loader Requires:RETH
2025-07-12 13:21:49.642 +08:00 [INF] thr:37<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-12 13:21:49.643 +08:00 [INF] thr:42<> 执行Aligner设置初始角度InitialAngle：0
2025-07-12 13:21:49.643 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-12 13:21:50.662 +08:00 [INF] thr:42<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-12 13:21:50.663 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 13:21:50.663 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-12 13:21:51.109 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-12 13:21:51.109 +08:00 [INF] thr:42<> loader Requires:MATS AJ T
2025-07-12 13:21:54.651 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-12 13:21:55.100 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-12 13:22:02.118 +08:00 [INF] thr:42<> loader Requires:MOVR R 226000
2025-07-12 13:22:04.713 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:22:05.164 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-12 13:22:05.164 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-12 13:22:05.164 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-12 13:22:05.667 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:22:05.668 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-12 13:22:06.121 +08:00 [INF] thr:42<> loader Requires:MATS AJ R 0
2025-07-12 13:22:09.374 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-12 13:22:09.374 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-12 13:22:09.374 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-12 13:22:09.877 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:22:09.877 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 13:22:10.327 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 0
2025-07-12 13:22:12.939 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:22:13.388 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-12 13:22:13.388 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-12 13:22:13.388 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-12 13:22:13.891 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:22:13.892 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 13:22:14.339 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-12 13:22:14.787 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-12 13:22:15.234 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-12 13:22:15.683 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-12 13:22:16.130 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-12 13:22:16.583 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:22:17.538 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:22:18.489 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:22:19.444 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:22:19.896 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-12 13:22:20.347 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-12 13:22:22.965 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:22:23.415 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-12 13:22:23.415 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-12 13:22:23.415 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-12 13:22:23.919 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:22:23.919 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-12 13:22:28.954 +08:00 [INF] thr:42<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-12 13:22:28.956 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-12 13:55:40.596 +08:00 [INF] thr:30<> loader Requires:INPUT B 13
2025-07-12 13:55:41.576 +08:00 [INF] thr:42<> 执行Aligner角度angle：0
2025-07-12 13:55:42.581 +08:00 [INF] thr:42<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-12 13:55:42.582 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 13:55:42.582 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-12 13:55:43.025 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-12 13:55:43.026 +08:00 [INF] thr:42<> loader Requires:MATS AJ T
2025-07-12 13:55:43.484 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-12 13:55:43.931 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-12 13:55:44.403 +08:00 [INF] thr:42<> loader Requires:MOVR R 226000
2025-07-12 13:55:46.999 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:55:47.450 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-12 13:55:47.450 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-12 13:55:47.450 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-12 13:55:47.953 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:55:47.953 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-12 13:55:48.408 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-12 13:55:48.853 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-12 13:55:49.300 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-12 13:55:49.749 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-12 13:55:50.196 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-12 13:55:50.643 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:55:51.094 +08:00 [INF] thr:42<> loader Requires:MATS AJ R 0
2025-07-12 13:55:54.344 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-12 13:55:54.345 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-12 13:55:54.345 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-12 13:55:54.847 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:55:54.847 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 13:55:55.295 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 0
2025-07-12 13:55:57.908 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:55:58.357 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-12 13:55:58.357 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-12 13:55:58.357 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-12 13:55:58.861 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:55:58.861 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 13:55:59.310 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-12 13:55:59.756 +08:00 [INF] thr:42<> loader Requires:OUTP 16 0
2025-07-12 13:56:00.204 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-12 13:56:00.660 +08:00 [INF] thr:42<> loader Requires:OUTP 4 0
2025-07-12 13:56:01.108 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-12 13:56:01.553 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:02.507 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:03.460 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:04.412 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:05.365 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:06.319 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:06.774 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-12 13:56:07.227 +08:00 [INF] thr:42<> loader Requires:MATS AJ Z 1
2025-07-12 13:56:09.845 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:56:10.294 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-12 13:56:10.294 +08:00 [INF] thr:42<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-12 13:56:10.294 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-12 13:56:10.798 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:56:10.798 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-12 13:56:15.834 +08:00 [INF] thr:42<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-12 13:56:15.835 +08:00 [INF] thr:42<> AOI is Ready
2025-07-12 13:56:15.900 +08:00 [INF] thr:42<> SetVelocity, Axis:X, velocity:50
2025-07-12 13:56:15.903 +08:00 [INF] thr:42<> SetVelocity, Axis:Y, velocity:50
2025-07-12 13:56:15.941 +08:00 [INF] thr:42<> SetVelocity, Axis:X, velocity:60
2025-07-12 13:56:15.948 +08:00 [INF] thr:42<> SetVelocity, Axis:Y, velocity:60
2025-07-12 13:56:15.979 +08:00 [INF] thr:42<> stage move to position action ok
2025-07-12 13:56:15.979 +08:00 [INF] thr:42<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-12 13:56:15.980 +08:00 [INF] thr:42<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 13:56:15.980 +08:00 [INF] thr:42<> loader Requires:RGRP
2025-07-12 13:56:16.422 +08:00 [INF] thr:42<> CLeanLoader Group Now C
2025-07-12 13:56:16.422 +08:00 [INF] thr:42<> loader Requires:MATS AK T
2025-07-12 13:56:19.963 +08:00 [INF] thr:42<> loader Requires:SSP Z 4000
2025-07-12 13:56:20.412 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 1
2025-07-12 13:56:27.431 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:56:27.879 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-12 13:56:27.880 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-12 13:56:27.880 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-12 13:56:28.382 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:56:28.382 +08:00 [INF] thr:42<> loader Requires:INPUT A 6
2025-07-12 13:56:28.837 +08:00 [INF] thr:42<> loader Requires:MATS AK R 0
2025-07-12 13:56:34.119 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-12 13:56:34.119 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片请求
2025-07-12 13:56:34.119 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-12 13:56:34.623 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:56:34.623 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 13:56:35.070 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 0
2025-07-12 13:56:37.782 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:56:38.250 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-12 13:56:38.250 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-12 13:56:38.250 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-12 13:56:38.753 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:56:38.754 +08:00 [INF] thr:42<> loader Requires:SSP Z 1000
2025-07-12 13:56:39.200 +08:00 [INF] thr:42<> loader Requires:OUTP 1 0
2025-07-12 13:56:39.655 +08:00 [INF] thr:42<> loader Requires:OUTP 16 1
2025-07-12 13:56:40.101 +08:00 [INF] thr:42<> loader Requires:OUTP 15 1
2025-07-12 13:56:40.550 +08:00 [INF] thr:42<> loader Requires:OUTP 4 1
2025-07-12 13:56:40.997 +08:00 [INF] thr:42<> loader Requires:OUTP 1 1
2025-07-12 13:56:41.443 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:42.396 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:43.350 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:44.303 +08:00 [INF] thr:42<> loader Requires:INPUT A 4
2025-07-12 13:56:44.754 +08:00 [INF] thr:42<> loader Requires:INPUT A 5
2025-07-12 13:56:45.208 +08:00 [INF] thr:42<> loader Requires:MATS AK Z 1
2025-07-12 13:56:47.930 +08:00 [INF] thr:42<> loader Requires:SSPP Z 30
2025-07-12 13:56:48.379 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-12 13:56:48.379 +08:00 [INF] thr:42<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-12 13:56:48.379 +08:00 [INF] thr:42<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-12 13:56:49.385 +08:00 [INF] thr:42<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 13:56:49.385 +08:00 [INF] thr:42<> loader Requires:RETH
2025-07-12 13:56:54.647 +08:00 [INF] thr:42<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-12 15:06:42.836 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:59868
2025-07-12 15:08:23.880 +08:00 [INF] thr:20<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-12 15:13:18.180 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:59001
2025-07-12 15:47:33.185 +08:00 [INF] thr:22<> loader Requires:INPUT B 13
2025-07-12 15:47:34.677 +08:00 [INF] thr:64<> AOI is Ready
2025-07-12 15:48:09.657 +08:00 [INF] thr:30<> loader Requires:INPUT B 13
2025-07-12 15:48:10.615 +08:00 [INF] thr:64<> AOI is Ready
2025-07-12 15:49:23.393 +08:00 [INF] thr:67<> loader Requires:INPUT B 13
2025-07-12 15:49:24.352 +08:00 [INF] thr:34<> AOI is Ready
2025-07-12 15:49:28.690 +08:00 [INF] thr:34<> SetVelocity, Axis:X, velocity:50
2025-07-12 15:49:28.693 +08:00 [INF] thr:34<> SetVelocity, Axis:Y, velocity:50
2025-07-12 15:49:32.298 +08:00 [INF] thr:34<> SetVelocity, Axis:X, velocity:8
2025-07-12 15:49:32.301 +08:00 [INF] thr:34<> SetVelocity, Axis:Y, velocity:8
2025-07-12 15:49:32.317 +08:00 [INF] thr:34<> stage move to position action ok
2025-07-12 15:49:32.318 +08:00 [INF] thr:34<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-12 15:49:32.318 +08:00 [INF] thr:34<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 15:49:32.318 +08:00 [INF] thr:34<> loader Requires:RGRP
2025-07-12 15:49:32.760 +08:00 [INF] thr:34<> CLeanLoader Group Now C
2025-07-12 15:49:32.760 +08:00 [INF] thr:34<> loader Requires:MATS AK T
2025-07-12 15:49:33.218 +08:00 [INF] thr:34<> loader Requires:SSP Z 4000
2025-07-12 15:49:33.665 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 1
2025-07-12 15:49:34.139 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-12 15:49:34.590 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-12 15:49:34.590 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-12 15:49:34.590 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-12 15:49:35.091 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:49:35.091 +08:00 [INF] thr:34<> loader Requires:INPUT A 6
2025-07-12 15:49:35.541 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-12 15:49:35.988 +08:00 [INF] thr:34<> loader Requires:OUTP 16 1
2025-07-12 15:49:36.436 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-12 15:49:36.885 +08:00 [INF] thr:34<> loader Requires:OUTP 4 1
2025-07-12 15:49:37.331 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-12 15:49:37.777 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:38.230 +08:00 [INF] thr:34<> loader Requires:MATS AK R 0
2025-07-12 15:49:43.511 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-12 15:49:43.511 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:下片请求
2025-07-12 15:49:43.511 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-12 15:49:44.015 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:49:44.015 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-12 15:49:44.465 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 0
2025-07-12 15:49:47.177 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-12 15:49:47.639 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-12 15:49:47.639 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-12 15:49:47.639 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-12 15:49:48.144 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:49:48.144 +08:00 [INF] thr:34<> loader Requires:SSP Z 1000
2025-07-12 15:49:48.591 +08:00 [INF] thr:34<> loader Requires:OUTP 1 0
2025-07-12 15:49:49.038 +08:00 [INF] thr:34<> loader Requires:OUTP 16 0
2025-07-12 15:49:49.485 +08:00 [INF] thr:34<> loader Requires:OUTP 15 1
2025-07-12 15:49:49.934 +08:00 [INF] thr:34<> loader Requires:OUTP 4 0
2025-07-12 15:49:50.387 +08:00 [INF] thr:34<> loader Requires:OUTP 1 1
2025-07-12 15:49:50.834 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:51.789 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:52.740 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:53.694 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:54.647 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:55.601 +08:00 [INF] thr:34<> loader Requires:INPUT A 4
2025-07-12 15:49:56.051 +08:00 [INF] thr:34<> loader Requires:INPUT A 5
2025-07-12 15:49:56.504 +08:00 [INF] thr:34<> loader Requires:MATS AK Z 1
2025-07-12 15:49:59.222 +08:00 [INF] thr:34<> loader Requires:SSPP Z 30
2025-07-12 15:49:59.673 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-12 15:49:59.673 +08:00 [INF] thr:34<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-12 15:49:59.673 +08:00 [INF] thr:34<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-12 15:50:00.175 +08:00 [INF] thr:34<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:50:00.175 +08:00 [INF] thr:34<> loader Requires:RETH
2025-07-12 15:50:05.438 +08:00 [INF] thr:34<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-12 15:50:05.440 +08:00 [INF] thr:73<> 执行Aligner设置初始角度InitialAngle：0
2025-07-12 15:50:05.440 +08:00 [INF] thr:73<> 执行Aligner角度angle：0
2025-07-12 15:50:06.448 +08:00 [INF] thr:73<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-12 15:50:06.449 +08:00 [INF] thr:73<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-12 15:50:06.449 +08:00 [INF] thr:73<> loader Requires:RGRP
2025-07-12 15:50:06.893 +08:00 [INF] thr:73<> CLeanLoader Group Now C
2025-07-12 15:50:06.893 +08:00 [INF] thr:73<> loader Requires:MATS AJ T
2025-07-12 15:50:10.436 +08:00 [INF] thr:73<> loader Requires:SSP Z 4000
2025-07-12 15:50:10.885 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-12 15:50:17.903 +08:00 [INF] thr:73<> loader Requires:MOVR R 226000
2025-07-12 15:50:20.497 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-12 15:50:20.948 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-12 15:50:20.948 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-12 15:50:20.948 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-12 15:50:21.453 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:50:21.453 +08:00 [INF] thr:73<> loader Requires:INPUT A 6
2025-07-12 15:50:21.905 +08:00 [INF] thr:73<> loader Requires:MATS AJ R 0
2025-07-12 15:50:25.156 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-12 15:50:25.156 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-12 15:50:25.156 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-12 15:50:25.659 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:50:25.659 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-12 15:50:26.107 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 0
2025-07-12 15:50:28.720 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-12 15:50:29.169 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-12 15:50:29.169 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-12 15:50:29.169 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-12 15:50:29.673 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:50:29.673 +08:00 [INF] thr:73<> loader Requires:SSP Z 1000
2025-07-12 15:50:30.121 +08:00 [INF] thr:73<> loader Requires:OUTP 1 0
2025-07-12 15:50:30.568 +08:00 [INF] thr:73<> loader Requires:OUTP 16 1
2025-07-12 15:50:31.017 +08:00 [INF] thr:73<> loader Requires:OUTP 15 1
2025-07-12 15:50:31.465 +08:00 [INF] thr:73<> loader Requires:OUTP 4 1
2025-07-12 15:50:31.912 +08:00 [INF] thr:73<> loader Requires:OUTP 1 1
2025-07-12 15:50:32.359 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-12 15:50:33.314 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-12 15:50:34.267 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-12 15:50:35.221 +08:00 [INF] thr:73<> loader Requires:INPUT A 4
2025-07-12 15:50:35.672 +08:00 [INF] thr:73<> loader Requires:INPUT A 5
2025-07-12 15:50:36.125 +08:00 [INF] thr:73<> loader Requires:MATS AJ Z 1
2025-07-12 15:50:38.742 +08:00 [INF] thr:73<> loader Requires:SSPP Z 30
2025-07-12 15:50:39.193 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-12 15:50:39.193 +08:00 [INF] thr:73<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-12 15:50:39.193 +08:00 [INF] thr:73<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-12 15:50:39.698 +08:00 [INF] thr:73<> Safe ExecuteCommand sucess, plc is 0
2025-07-12 15:50:39.698 +08:00 [INF] thr:73<> loader Requires:RETH
2025-07-12 15:50:44.733 +08:00 [INF] thr:73<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-12 15:50:44.739 +08:00 [INF] thr:73<> 执行Aligner角度angle：0