2025-06-30 15:47:44.146 +08:00 [INF] thr:2<> loader Requires:GETST H 1
2025-06-30 15:48:16.031 +08:00 [INF] thr:2<> loader Requires:GETST H 1
2025-06-30 15:49:20.340 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:62658
2025-06-30 15:51:48.180 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:49831
2025-06-30 16:03:00.637 +08:00 [INF] thr:12<> the connection has been disconnected: 127.0.0.1:49935
2025-06-30 16:11:30.013 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-06-30 16:11:30.037 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-30 16:11:30.038 +08:00 [INF] thr:4<> Start init SafeController
2025-06-30 16:11:30.045 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-30 16:11:30.045 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-30 16:11:30.046 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-30 16:11:30.046 +08:00 [INF] thr:10<> Start init Buffer
2025-06-30 16:11:30.141 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-30 16:11:30.144 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-30 16:11:30.271 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-30 16:11:30.735 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-30 16:11:31.193 +08:00 [INF] thr:4<> loader Requires:REMS
2025-06-30 16:11:31.644 +08:00 [INF] thr:4<> loader Requires:VER
2025-06-30 16:11:32.092 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-06-30 16:11:32.093 +08:00 [INF] thr:4<> loader Requires:SVON
2025-06-30 16:11:32.559 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-06-30 16:11:33.017 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-06-30 16:11:33.471 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-06-30 16:11:33.921 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-06-30 16:11:34.380 +08:00 [INF] thr:4<> loader Requires:HOM
2025-06-30 16:12:06.461 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-06-30 16:12:06.995 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-06-30 16:12:07.471 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-06-30 16:12:07.471 +08:00 [INF] thr:12<> StageProxy Init Start
2025-06-30 16:12:07.471 +08:00 [INF] thr:13<> LoadPortProxy Init Start
2025-06-30 16:12:07.472 +08:00 [INF] thr:11<> AlignerProxy Init Start
2025-06-30 16:12:07.472 +08:00 [INF] thr:14<> AirBlowerProxy Init Start
2025-06-30 16:12:07.473 +08:00 [INF] thr:14<> AirBlowerProxy Init Finished
2025-06-30 16:12:07.478 +08:00 [INF] thr:13<> CassettA 开始Connect
2025-06-30 16:12:07.479 +08:00 [INF] thr:13<> Component.LoadPort.Smif Position:CassettA
2025-06-30 16:12:07.493 +08:00 [INF] thr:13<> 开始Home
2025-06-30 16:12:10.453 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-06-30 16:12:10.454 +08:00 [INF] thr:12<> GetHomeHash:-662837970,NowHomeHash:-662837970
2025-06-30 16:12:10.454 +08:00 [INF] thr:12<> stage Home:1
2025-06-30 16:12:10.456 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-06-30 16:12:10.456 +08:00 [INF] thr:12<> AOIType:4
2025-06-30 16:12:10.457 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-06-30 16:12:10.457 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-06-30 16:12:10.458 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-81，right [RLIMIT]:81
2025-06-30 16:12:10.458 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-06-30 16:12:10.458 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-06-30 16:12:10.459 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-06-30 16:12:10.459 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-06-30 16:12:10.459 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-203，right [RLIMIT]:71
2025-06-30 16:12:10.459 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-06-30 16:12:10.462 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-06-30 16:12:10.462 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-06-30 16:12:10.462 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-90，right [RLIMIT]:90
2025-06-30 16:12:10.462 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-06-30 16:12:10.463 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-06-30 16:12:10.463 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-06-30 16:12:10.463 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-50，right [RLIMIT]:50
2025-06-30 16:12:10.465 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEKCONFIG\ACSStandardConfig.json
2025-06-30 16:12:10.469 +08:00 [INF] thr:12<> EjectedPosition X:3.5，Y:-180，Z:0
2025-06-30 16:12:10.469 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-06-30 16:12:10.470 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-06-30 16:12:10.479 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-06-30 16:12:10.488 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-06-30 16:12:10.614 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-06-30 16:12:16.166 +08:00 [INF] thr:11<> AlignerProxy Init Finished
2025-06-30 16:12:28.710 +08:00 [INF] thr:13<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-06-30 16:12:28.763 +08:00 [INF] thr:13<> LoadPortProxy Init Finished
2025-06-30 16:12:28.770 +08:00 [INF] thr:12<> 开始Home
2025-06-30 16:12:28.795 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-30 16:12:50.136 +08:00 [INF] thr:12<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-06-30 16:12:50.137 +08:00 [INF] thr:22<> CassettA Absence
2025-06-30 17:45:59.319 +08:00 [INF] thr:11<> the connection has been disconnected: 127.0.0.1:50965
2025-06-30 17:46:37.885 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-06-30 17:46:37.908 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-30 17:46:37.908 +08:00 [INF] thr:4<> Start init SafeController
2025-06-30 17:46:37.914 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-30 17:46:37.914 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-30 17:46:37.915 +08:00 [INF] thr:5<> Start init Buffer
2025-06-30 17:46:37.915 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-30 17:46:38.018 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-30 17:46:38.020 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-30 17:46:38.169 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-30 17:46:38.638 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-30 17:46:39.103 +08:00 [INF] thr:4<> loader Requires:REMS
2025-06-30 17:46:39.557 +08:00 [INF] thr:4<> loader Requires:VER
2025-06-30 17:46:40.010 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-06-30 17:46:40.010 +08:00 [INF] thr:4<> loader Requires:SVON
2025-06-30 17:46:40.465 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-06-30 17:46:40.933 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-06-30 17:46:41.398 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-06-30 17:46:41.845 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-06-30 17:46:42.291 +08:00 [INF] thr:4<> loader Requires:HOM
2025-06-30 17:47:14.381 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-06-30 17:47:14.907 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-06-30 17:47:15.378 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-06-30 17:47:15.379 +08:00 [INF] thr:11<> StageProxy Init Start
2025-06-30 17:47:15.379 +08:00 [INF] thr:13<> LoadPortProxy Init Start
2025-06-30 17:47:15.379 +08:00 [INF] thr:4<> AirBlowerProxy Init Start
2025-06-30 17:47:15.380 +08:00 [INF] thr:12<> AlignerProxy Init Start
2025-06-30 17:47:15.380 +08:00 [INF] thr:4<> AirBlowerProxy Init Finished
2025-06-30 17:47:15.383 +08:00 [INF] thr:13<> CassettA 开始Connect
2025-06-30 17:47:15.383 +08:00 [INF] thr:13<> Component.LoadPort.Smif Position:CassettA
2025-06-30 17:47:15.406 +08:00 [INF] thr:13<> 开始Home
2025-06-30 17:47:18.354 +08:00 [INF] thr:11<> WaitHomeBufferComplete invoke...
2025-06-30 17:47:18.355 +08:00 [INF] thr:11<> GetHomeHash:-662837970,NowHomeHash:-662837970
2025-06-30 17:47:18.355 +08:00 [INF] thr:11<> stage Home:1
2025-06-30 17:47:18.357 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-06-30 17:47:18.357 +08:00 [INF] thr:11<> AOIType:4
2025-06-30 17:47:18.358 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-06-30 17:47:18.358 +08:00 [INF] thr:11<> Standard_GA_X:2
2025-06-30 17:47:18.359 +08:00 [INF] thr:11<> X axis:2 left [LLIMIT]：-81，right [RLIMIT]:81
2025-06-30 17:47:18.359 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-06-30 17:47:18.359 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-06-30 17:47:18.359 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-06-30 17:47:18.359 +08:00 [INF] thr:11<> Standard_GA_Y:0
2025-06-30 17:47:18.360 +08:00 [INF] thr:11<> Y axis:0 left [LLIMIT]：-203，right [RLIMIT]:71
2025-06-30 17:47:18.360 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-06-30 17:47:18.362 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-06-30 17:47:18.362 +08:00 [INF] thr:11<> Standard_GA_Z:7
2025-06-30 17:47:18.363 +08:00 [INF] thr:11<> Z axis:7 left [LLIMIT]：-90，right [RLIMIT]:90
2025-06-30 17:47:18.363 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-06-30 17:47:18.363 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-06-30 17:47:18.363 +08:00 [INF] thr:11<> Standard_GA_R:4
2025-06-30 17:47:18.364 +08:00 [INF] thr:11<> R axis:4 left [LLIMIT]：-50，right [RLIMIT]:50
2025-06-30 17:47:18.365 +08:00 [INF] thr:11<> load Stage setting :D:\VPTEKCONFIG\ACSStandardConfig.json
2025-06-30 17:47:18.368 +08:00 [INF] thr:11<> EjectedPosition X:3.5，Y:-180，Z:0
2025-06-30 17:47:18.368 +08:00 [INF] thr:11<> EnclosedPosition X:0，Y:0，Z:0
2025-06-30 17:47:18.369 +08:00 [INF] thr:11<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-06-30 17:47:18.378 +08:00 [INF] thr:11<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-06-30 17:47:18.387 +08:00 [INF] thr:11<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-06-30 17:47:18.517 +08:00 [INF] thr:11<> StageProxy Init Finished
2025-06-30 17:47:24.099 +08:00 [INF] thr:12<> AlignerProxy Init Finished
2025-06-30 17:47:36.606 +08:00 [INF] thr:13<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-06-30 17:47:36.632 +08:00 [INF] thr:13<> LoadPortProxy Init Finished
2025-06-30 17:47:36.637 +08:00 [INF] thr:12<> 开始Home
2025-06-30 17:47:36.659 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-30 17:47:58.015 +08:00 [INF] thr:12<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-06-30 17:47:58.017 +08:00 [INF] thr:29<> CassettA Absence
2025-06-30 17:57:49.823 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-06-30 17:57:49.846 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-06-30 17:57:49.846 +08:00 [INF] thr:4<> Start init SafeController
2025-06-30 17:57:49.852 +08:00 [INF] thr:5<> Start init SelfCheck
2025-06-30 17:57:49.852 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-06-30 17:57:49.853 +08:00 [INF] thr:9<> Start init ProductModes
2025-06-30 17:57:49.853 +08:00 [INF] thr:10<> Start init Buffer
2025-06-30 17:57:49.943 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-06-30 17:57:49.946 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-06-30 17:57:50.068 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-06-30 17:57:50.528 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-06-30 17:57:50.995 +08:00 [INF] thr:4<> loader Requires:REMS
2025-06-30 17:57:51.446 +08:00 [INF] thr:4<> loader Requires:VER
2025-06-30 17:57:51.894 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-06-30 17:57:51.894 +08:00 [INF] thr:4<> loader Requires:SVON
2025-06-30 17:57:52.349 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-06-30 17:57:52.809 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-06-30 17:57:53.262 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-06-30 17:57:53.709 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-06-30 17:57:54.170 +08:00 [INF] thr:4<> loader Requires:HOM
2025-06-30 17:58:28.241 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-06-30 17:58:28.775 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-06-30 17:58:29.259 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-06-30 17:58:29.259 +08:00 [INF] thr:12<> StageProxy Init Start
2025-06-30 17:58:29.259 +08:00 [INF] thr:14<> LoadPortProxy Init Start
2025-06-30 17:58:29.260 +08:00 [INF] thr:13<> AlignerProxy Init Start
2025-06-30 17:58:29.260 +08:00 [INF] thr:11<> AirBlowerProxy Init Start
2025-06-30 17:58:29.260 +08:00 [INF] thr:11<> AirBlowerProxy Init Finished
2025-06-30 17:58:29.264 +08:00 [INF] thr:14<> CassettA 开始Connect
2025-06-30 17:58:29.264 +08:00 [INF] thr:14<> Component.LoadPort.Smif Position:CassettA
2025-06-30 17:58:29.272 +08:00 [INF] thr:14<> 开始Home
2025-06-30 17:58:32.220 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-06-30 17:58:32.221 +08:00 [INF] thr:12<> GetHomeHash:-662837970,NowHomeHash:-662837970
2025-06-30 17:58:32.221 +08:00 [INF] thr:12<> stage Home:1
2025-06-30 17:58:32.223 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-06-30 17:58:32.223 +08:00 [INF] thr:12<> AOIType:4
2025-06-30 17:58:32.224 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-06-30 17:58:32.224 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-06-30 17:58:32.225 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-81，right [RLIMIT]:81
2025-06-30 17:58:32.225 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-06-30 17:58:32.225 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-06-30 17:58:32.226 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-06-30 17:58:32.226 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-06-30 17:58:32.226 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-203，right [RLIMIT]:71
2025-06-30 17:58:32.226 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-06-30 17:58:32.228 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-06-30 17:58:32.228 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-06-30 17:58:32.229 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-90，right [RLIMIT]:90
2025-06-30 17:58:32.229 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-06-30 17:58:32.229 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-06-30 17:58:32.229 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-06-30 17:58:32.230 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-50，right [RLIMIT]:50
2025-06-30 17:58:32.231 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEKCONFIG\ACSStandardConfig.json
2025-06-30 17:58:32.234 +08:00 [INF] thr:12<> EjectedPosition X:3.5，Y:-180，Z:0
2025-06-30 17:58:32.234 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-06-30 17:58:32.234 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-06-30 17:58:32.243 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-06-30 17:58:32.252 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-06-30 17:58:32.369 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-06-30 17:58:37.988 +08:00 [INF] thr:13<> AlignerProxy Init Finished
2025-06-30 17:58:50.490 +08:00 [INF] thr:14<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-06-30 17:58:50.515 +08:00 [INF] thr:14<> LoadPortProxy Init Finished
2025-06-30 17:58:50.522 +08:00 [INF] thr:15<> 开始Home
2025-06-30 17:58:50.545 +08:00 [INF] thr:4<> PCServiceHost started
2025-06-30 17:59:11.883 +08:00 [INF] thr:15<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-06-30 17:59:11.884 +08:00 [INF] thr:27<> CassettA Absence
2025-07-01 09:35:30.717 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:55812
2025-07-01 09:38:54.285 +08:00 [INF] thr:21<> Axis:X, axis id:2,state:ACSC_SAFETY_LL
2025-07-01 09:38:57.329 +08:00 [INF] thr:21<> Axis:Y, axis id:0,state:ACSC_SAFETY_LL, ACSC_SAFETY_PE
2025-07-01 09:39:33.740 +08:00 [INF] thr:21<> Axis:R, axis id:4,state:ACSC_SAFETY_RL
2025-07-01 10:22:25.245 +08:00 [INF] thr:23<> the connection has been disconnected: 127.0.0.1:55130
2025-07-01 10:24:54.939 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-07-01 10:24:55.252 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-01 10:24:55.252 +08:00 [INF] thr:4<> Start init SafeController
2025-07-01 10:24:55.330 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-01 10:24:55.330 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-01 10:24:55.330 +08:00 [INF] thr:10<> Start init Buffer
2025-07-01 10:24:55.924 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-01 10:24:57.627 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-01 10:24:57.642 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-01 10:24:57.689 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-01 10:24:58.142 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-01 10:24:58.611 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-01 10:24:59.048 +08:00 [INF] thr:4<> loader Requires:VER
2025-07-01 10:24:59.501 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-07-01 10:24:59.501 +08:00 [INF] thr:4<> loader Requires:SVON
2025-07-01 10:24:59.970 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-01 10:25:00.423 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-07-01 10:25:00.876 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-01 10:25:01.345 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-01 10:25:01.782 +08:00 [INF] thr:4<> loader Requires:HOM
2025-07-01 10:25:33.731 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-07-01 10:25:34.277 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-07-01 10:25:34.758 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-07-01 10:25:34.758 +08:00 [INF] thr:12<> StageProxy Init Start
2025-07-01 10:25:34.758 +08:00 [INF] thr:13<> LoadPortProxy Init Start
2025-07-01 10:25:34.759 +08:00 [INF] thr:14<> AlignerProxy Init Start
2025-07-01 10:25:34.759 +08:00 [INF] thr:15<> AirBlowerProxy Init Start
2025-07-01 10:25:34.759 +08:00 [INF] thr:15<> AirBlowerProxy Init Finished
2025-07-01 10:25:34.857 +08:00 [INF] thr:13<> CassettA 开始Connect
2025-07-01 10:25:34.857 +08:00 [INF] thr:13<> Component.LoadPort.Smif Position:CassettA
2025-07-01 10:25:34.910 +08:00 [INF] thr:13<> 开始Home
2025-07-01 10:25:38.847 +08:00 [INF] thr:12<> WaitHomeBufferComplete invoke...
2025-07-01 10:25:38.848 +08:00 [INF] thr:12<> GetHomeHash:2066045483,NowHomeHash:2066045483
2025-07-01 10:25:38.849 +08:00 [INF] thr:12<> stage Home:1
2025-07-01 10:25:38.874 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-07-01 10:25:38.874 +08:00 [INF] thr:12<> AOIType:4
2025-07-01 10:25:38.908 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-07-01 10:25:38.908 +08:00 [INF] thr:12<> Standard_GA_X:2
2025-07-01 10:25:38.909 +08:00 [INF] thr:12<> X axis:2 left [LLIMIT]：-81，right [RLIMIT]:81
2025-07-01 10:25:38.910 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-07-01 10:25:38.910 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-07-01 10:25:38.910 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-07-01 10:25:38.910 +08:00 [INF] thr:12<> Standard_GA_Y:0
2025-07-01 10:25:38.911 +08:00 [INF] thr:12<> Y axis:0 left [LLIMIT]：-203，right [RLIMIT]:71
2025-07-01 10:25:38.911 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-07-01 10:25:38.913 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-07-01 10:25:38.913 +08:00 [INF] thr:12<> Standard_GA_Z:7
2025-07-01 10:25:38.913 +08:00 [INF] thr:12<> Z axis:7 left [LLIMIT]：-90，right [RLIMIT]:90
2025-07-01 10:25:38.913 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-07-01 10:25:38.914 +08:00 [INF] thr:12<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-07-01 10:25:38.914 +08:00 [INF] thr:12<> Standard_GA_R:4
2025-07-01 10:25:38.914 +08:00 [INF] thr:12<> R axis:4 left [LLIMIT]：-50，right [RLIMIT]:50
2025-07-01 10:25:38.939 +08:00 [INF] thr:12<> load Stage setting :D:\VPTEKCONFIG\ACSStandardConfig.json
2025-07-01 10:25:38.944 +08:00 [INF] thr:12<> EjectedPosition X:3.5，Y:-180，Z:0
2025-07-01 10:25:38.944 +08:00 [INF] thr:12<> EnclosedPosition X:0，Y:0，Z:0
2025-07-01 10:25:38.973 +08:00 [INF] thr:12<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-07-01 10:25:38.983 +08:00 [INF] thr:12<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-07-01 10:25:38.992 +08:00 [INF] thr:12<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-07-01 10:25:39.188 +08:00 [INF] thr:12<> StageProxy Init Finished
2025-07-01 10:25:43.830 +08:00 [INF] thr:14<> AlignerProxy Init Finished
2025-07-01 10:25:56.071 +08:00 [INF] thr:13<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-07-01 10:25:56.112 +08:00 [INF] thr:13<> LoadPortProxy Init Finished
2025-07-01 10:25:56.118 +08:00 [INF] thr:15<> 开始Home
2025-07-01 10:25:56.211 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-01 10:26:17.482 +08:00 [INF] thr:15<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-07-01 10:26:17.485 +08:00 [INF] thr:25<> CassettA Absence
2025-07-01 10:33:00.498 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:01.509 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:02.521 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:03.535 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:04.550 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:05.567 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:06.582 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:33:56.269 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:34:38.841 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:34:39.850 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:34:40.864 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:34:41.875 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:34:42.883 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:35:05.192 +08:00 [INF] thr:22<> Axis:Y, axis id:0,state:ACSC_SAFETY_LL
2025-07-01 10:36:00.917 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL
2025-07-01 10:36:01.934 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL
2025-07-01 10:36:02.945 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:36:03.958 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL
2025-07-01 10:36:21.216 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:36:22.226 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:36:48.532 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:36:49.542 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:36:50.548 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:36:51.557 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_LL, ACSC_SAFETY_SLL
2025-07-01 10:39:42.694 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:43.706 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:44.716 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:45.727 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:46.749 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:47.767 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:48.776 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:55.876 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:56.905 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:39:57.919 +08:00 [INF] thr:22<> Axis:X, axis id:2,state:ACSC_SAFETY_RL
2025-07-01 10:49:34.362 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-07-01 10:49:34.386 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-01 10:49:34.386 +08:00 [INF] thr:4<> Start init SafeController
2025-07-01 10:49:34.392 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-01 10:49:34.392 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-01 10:49:34.393 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-01 10:49:34.393 +08:00 [INF] thr:10<> Start init Buffer
2025-07-01 10:49:34.502 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-01 10:49:34.506 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-01 10:49:34.627 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-01 10:49:35.087 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-01 10:49:35.544 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-01 10:49:36.002 +08:00 [INF] thr:4<> loader Requires:VER
2025-07-01 10:49:36.454 +08:00 [INF] thr:4<> HIWIN loader Version:1.86.0.77
2025-07-01 10:49:36.454 +08:00 [INF] thr:4<> loader Requires:SVON
2025-07-01 10:49:36.905 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-01 10:49:37.369 +08:00 [INF] thr:4<> loader Requires:INPUT A 9
2025-07-01 10:49:37.834 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-01 10:49:38.292 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-01 10:49:38.742 +08:00 [INF] thr:4<> loader Requires:HOM
2025-07-01 10:50:10.831 +08:00 [INF] thr:4<> loader Requires:ERR 0
2025-07-01 10:50:11.365 +08:00 [INF] thr:4<> loader Requires:SSPP A 30 30 30
2025-07-01 10:50:11.840 +08:00 [INF] thr:4<> CleanLoader Init Finished
2025-07-01 10:50:11.841 +08:00 [INF] thr:11<> StageProxy Init Start
2025-07-01 10:50:11.841 +08:00 [INF] thr:13<> LoadPortProxy Init Start
2025-07-01 10:50:11.841 +08:00 [INF] thr:4<> AirBlowerProxy Init Start
2025-07-01 10:50:11.841 +08:00 [INF] thr:14<> AlignerProxy Init Start
2025-07-01 10:50:11.841 +08:00 [INF] thr:4<> AirBlowerProxy Init Finished
2025-07-01 10:50:11.847 +08:00 [INF] thr:13<> CassettA 开始Connect
2025-07-01 10:50:11.847 +08:00 [INF] thr:13<> Component.LoadPort.Smif Position:CassettA
2025-07-01 10:50:11.867 +08:00 [INF] thr:13<> 开始Home
2025-07-01 10:50:15.014 +08:00 [INF] thr:11<> WaitHomeBufferComplete invoke...
2025-07-01 10:50:15.015 +08:00 [INF] thr:11<> GetHomeHash:2066045483,NowHomeHash:2066045483
2025-07-01 10:50:15.015 +08:00 [INF] thr:11<> stage Home:0
2025-07-01 10:50:20.581 +08:00 [INF] thr:14<> AlignerProxy Init Finished
2025-07-01 10:50:33.083 +08:00 [INF] thr:13<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-07-01 10:50:33.108 +08:00 [INF] thr:13<> LoadPortProxy Init Finished
2025-07-01 10:50:33.113 +08:00 [INF] thr:13<> 开始Home
2025-07-01 10:50:54.508 +08:00 [INF] thr:13<> Connect get state False: 97 0 1 0 255 0 0 0 0 0 0 0 43 10 128 0 0 0 0 0 128 128 0 128 12 0 0
2025-07-01 10:50:54.510 +08:00 [INF] thr:26<> CassettA Absence
2025-07-01 10:51:15.636 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_Stage_Type=4
2025-07-01 10:51:15.636 +08:00 [INF] thr:11<> AOIType:4
2025-07-01 10:51:15.637 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X=2
2025-07-01 10:51:15.637 +08:00 [INF] thr:11<> Standard_GA_X:2
2025-07-01 10:51:15.638 +08:00 [INF] thr:11<> X axis:2 left [LLIMIT]：-81，right [RLIMIT]:81
2025-07-01 10:51:15.639 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X_PEG=3
2025-07-01 10:51:15.639 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_X_D=1
2025-07-01 10:51:15.640 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Y=0
2025-07-01 10:51:15.640 +08:00 [INF] thr:11<> Standard_GA_Y:0
2025-07-01 10:51:15.640 +08:00 [INF] thr:11<> Y axis:0 left [LLIMIT]：-203，right [RLIMIT]:71
2025-07-01 10:51:15.641 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Y_PEG=5
2025-07-01 10:51:15.643 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Z=7
2025-07-01 10:51:15.643 +08:00 [INF] thr:11<> Standard_GA_Z:7
2025-07-01 10:51:15.643 +08:00 [INF] thr:11<> Z axis:7 left [LLIMIT]：-90，right [RLIMIT]:90
2025-07-01 10:51:15.643 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_Z_PEG=-1
2025-07-01 10:51:15.644 +08:00 [INF] thr:11<> GetValueFromACSCommand variable:Standard_GA_R=4
2025-07-01 10:51:15.644 +08:00 [INF] thr:11<> Standard_GA_R:4
2025-07-01 10:51:15.645 +08:00 [INF] thr:11<> R axis:4 left [LLIMIT]：-50，right [RLIMIT]:50
2025-07-01 10:51:15.646 +08:00 [INF] thr:11<> load Stage setting :D:\VPTEKCONFIG\ACSStandardConfig.json
2025-07-01 10:51:15.655 +08:00 [INF] thr:11<> EjectedPosition X:3.5，Y:-180，Z:0
2025-07-01 10:51:15.655 +08:00 [INF] thr:11<> EnclosedPosition X:0，Y:0，Z:0
2025-07-01 10:51:15.656 +08:00 [INF] thr:11<> ClearTrigger:X, PhyId:2, GetPEGAxis:ACSC_AXIS_3
2025-07-01 10:51:15.665 +08:00 [INF] thr:11<> ClearTrigger:Y, PhyId:0, GetPEGAxis:ACSC_AXIS_5
2025-07-01 10:51:15.674 +08:00 [INF] thr:11<> ClearTrigger:Z, PhyId:7, GetPEGAxis:ACSC_NONE
2025-07-01 10:51:15.870 +08:00 [INF] thr:11<> StageProxy Init Finished
2025-07-01 10:51:15.905 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-01 11:00:45.616 +08:00 [INF] thr:15<> get state: True
2025-07-01 11:00:45.616 +08:00 [INF] thr:15<> BoxExist:True
2025-07-01 11:00:45.617 +08:00 [INF] thr:4<> CassettA Unloaded
2025-07-01 11:01:09.585 +08:00 [INF] thr:8<> loader Requires:INPUT B 13
2025-07-01 11:01:10.042 +08:00 [INF] thr:4<> CassettA Loading
2025-07-01 11:01:10.044 +08:00 [INF] thr:19<> 开始load
2025-07-01 11:01:19.910 +08:00 [INF] thr:19<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-01 11:01:19.911 +08:00 [INF] thr:19<> CassettA Load MapResult:Normal
2025-07-01 11:01:20.170 +08:00 [INF] thr:8<> CassettA UnRunning
2025-07-01 11:01:23.618 +08:00 [INF] thr:30<> loader Requires:INPUT B 13
2025-07-01 11:01:24.645 +08:00 [INF] thr:4<> Behavior Get LoadPort:CassettA,slotIndex:0
2025-07-01 11:01:24.647 +08:00 [INF] thr:4<> 开始load
2025-07-01 11:01:25.187 +08:00 [INF] thr:4<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-01 11:01:25.187 +08:00 [INF] thr:4<> CassettA Load MapResult:Normal
2025-07-01 11:01:25.187 +08:00 [INF] thr:4<> CassettA MapResult:Normal
2025-07-01 11:01:25.188 +08:00 [INF] thr:4<> GetSubstrateFromStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass25_1::<GetFromStation>b__6
2025-07-01 11:01:25.191 +08:00 [INF] thr:4<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:01:25.193 +08:00 [INF] thr:4<> loader Requires:RGRP
2025-07-01 11:01:25.227 +08:00 [INF] thr:3<> CassettA Running
2025-07-01 11:01:25.640 +08:00 [INF] thr:4<> CLeanLoader Group Now C
2025-07-01 11:01:25.640 +08:00 [INF] thr:4<> loader Requires:MATS AA T
2025-07-01 11:01:26.362 +08:00 [INF] thr:4<> loader Requires:SSP Z 4000
2025-07-01 11:01:26.826 +08:00 [INF] thr:4<> loader Requires:MATS AA Z 1
2025-07-01 11:01:28.514 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-01 11:01:28.977 +08:00 [INF] thr:4<> <>c__DisplayClass25_0::<GetFromStation>b__2() done.
2025-07-01 11:01:28.977 +08:00 [INF] thr:4<> Station:CassettA,SafeCheck:下片水平检查请求
2025-07-01 11:01:28.978 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=12
2025-07-01 11:01:29.484 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:01:29.484 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-01 11:01:29.938 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-01 11:01:30.397 +08:00 [INF] thr:4<> loader Requires:OUTP 16 1
2025-07-01 11:01:30.848 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-01 11:01:31.297 +08:00 [INF] thr:4<> loader Requires:OUTP 4 1
2025-07-01 11:01:31.757 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-01 11:01:32.215 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-01 11:01:32.680 +08:00 [INF] thr:4<> loader Requires:MATS AA R 0
2025-07-01 11:01:37.463 +08:00 [INF] thr:4<> <>c__DisplayClass25_0::<GetFromStation>b__3() done.
2025-07-01 11:01:37.463 +08:00 [INF] thr:4<> Station:CassettA,SafeCheck:下片请求
2025-07-01 11:01:37.464 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=3
2025-07-01 11:01:37.968 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:01:37.968 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-01 11:01:38.428 +08:00 [INF] thr:4<> loader Requires:MATS AA Z 0
2025-07-01 11:01:41.125 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-01 11:01:41.586 +08:00 [INF] thr:4<> <>c__DisplayClass25_0::<GetFromStation>b__5() done.
2025-07-01 11:01:41.586 +08:00 [INF] thr:4<> Station:CassettA,SafeCheck:下片低位请求
2025-07-01 11:01:41.586 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=15
2025-07-01 11:01:42.104 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:01:42.105 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-01 11:01:42.563 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-01 11:01:43.014 +08:00 [INF] thr:4<> loader Requires:OUTP 16 0
2025-07-01 11:01:43.466 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-01 11:01:43.918 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-01 11:01:44.365 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-01 11:01:44.811 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-01 11:01:45.779 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-01 11:01:46.747 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-01 11:01:47.713 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-01 11:01:48.177 +08:00 [INF] thr:4<> loader Requires:INPUT A 5
2025-07-01 11:01:48.638 +08:00 [INF] thr:4<> loader Requires:MATS AA Z 1
2025-07-01 11:01:51.351 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-01 11:01:51.815 +08:00 [INF] thr:4<> <>c__DisplayClass25_0::<GetFromStation>b__1() done.
2025-07-01 11:01:51.815 +08:00 [INF] thr:4<> Station:CassettA,SafeCheck:下片完成请求
2025-07-01 11:01:51.815 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=4
2025-07-01 11:01:52.334 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:01:52.335 +08:00 [INF] thr:4<> loader Requires:RETH
2025-07-01 11:01:57.102 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-01 11:01:57.568 +08:00 [INF] thr:4<> <>c__DisplayClass25_0::<GetFromStation>b__4() done.
2025-07-01 11:01:57.569 +08:00 [INF] thr:4<> 开始Unload
2025-07-01 11:02:07.155 +08:00 [INF] thr:4<> CassettA Load RSP:MSG:103 9
2025-07-01 11:02:07.155 +08:00 [INF] thr:4<> MapResult:Normal
2025-07-01 11:02:08.105 +08:00 [INF] thr:19<> 执行Aligner设置初始角度InitialAngle：0
2025-07-01 11:02:08.106 +08:00 [INF] thr:19<> 执行Aligner角度angle：0
2025-07-01 11:02:09.124 +08:00 [INF] thr:19<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 11:02:09.126 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:02:09.126 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-01 11:02:09.577 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-01 11:02:09.577 +08:00 [INF] thr:19<> loader Requires:MATS AJ T
2025-07-01 11:02:12.514 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-01 11:02:12.973 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-01 11:02:14.827 +08:00 [INF] thr:19<> loader Requires:MOVR R 226000
2025-07-01 11:02:17.424 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:02:17.887 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 11:02:17.887 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 11:02:17.887 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 11:02:18.394 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:02:18.394 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-01 11:02:18.856 +08:00 [INF] thr:19<> loader Requires:MATS AJ R 0
2025-07-01 11:02:21.997 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 11:02:21.997 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 11:02:21.997 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 11:02:22.508 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:02:22.508 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-01 11:02:22.971 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 0
2025-07-01 11:02:25.675 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:02:26.134 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 11:02:26.134 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 11:02:26.135 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 11:02:26.645 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:02:26.645 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-01 11:02:27.108 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-01 11:02:27.553 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-01 11:02:28.000 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-01 11:02:28.457 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-01 11:02:28.907 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-01 11:02:29.366 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:02:30.335 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:02:31.304 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:02:32.270 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:02:32.736 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-01 11:02:33.201 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-01 11:02:35.910 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:02:36.364 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 11:02:36.364 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 11:02:36.364 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 11:02:36.871 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:02:36.871 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-01 11:02:41.790 +08:00 [INF] thr:19<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 11:02:41.791 +08:00 [INF] thr:19<> 执行Aligner角度angle：900
2025-07-01 11:02:44.345 +08:00 [INF] thr:19<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 11:02:44.347 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:02:44.347 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-01 11:02:44.795 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-01 11:02:44.795 +08:00 [INF] thr:19<> loader Requires:MATS AJ T
2025-07-01 11:02:45.260 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-01 11:02:45.715 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-01 11:02:46.192 +08:00 [INF] thr:19<> loader Requires:MOVR R 226000
2025-07-01 11:02:48.800 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:02:49.251 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 11:02:49.251 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 11:02:49.251 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 11:02:49.760 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:02:49.761 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-01 11:02:50.224 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-01 11:02:50.679 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-01 11:02:51.129 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-01 11:02:51.585 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-01 11:02:52.032 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-01 11:02:52.478 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:02:52.934 +08:00 [INF] thr:19<> loader Requires:MATS AJ R 0
2025-07-01 11:02:56.079 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 11:02:56.079 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 11:02:56.079 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 11:02:56.590 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:02:56.590 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-01 11:02:57.047 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 0
2025-07-01 11:02:59.755 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:03:00.211 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 11:03:00.211 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 11:03:00.211 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 11:03:00.730 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:03:00.731 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-01 11:03:01.191 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-01 11:03:01.649 +08:00 [INF] thr:19<> loader Requires:OUTP 16 0
2025-07-01 11:03:02.109 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-01 11:03:02.569 +08:00 [INF] thr:19<> loader Requires:OUTP 4 0
2025-07-01 11:03:03.017 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-01 11:03:03.468 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:04.429 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:05.383 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:06.343 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:06.796 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-01 11:03:07.257 +08:00 [INF] thr:19<> loader Requires:MATS AJ Z 1
2025-07-01 11:03:09.970 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:03:10.423 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 11:03:10.423 +08:00 [INF] thr:19<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 11:03:10.423 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 11:03:10.931 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:03:10.931 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-01 11:03:15.848 +08:00 [INF] thr:19<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 11:03:15.850 +08:00 [INF] thr:19<> AOI is Ready
2025-07-01 11:03:15.926 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:50
2025-07-01 11:03:15.928 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:50
2025-07-01 11:03:19.753 +08:00 [INF] thr:19<> SetVelocity, Axis:X, velocity:50
2025-07-01 11:03:19.754 +08:00 [INF] thr:19<> SetVelocity, Axis:Y, velocity:100
2025-07-01 11:03:19.757 +08:00 [INF] thr:19<> stage move to position action ok
2025-07-01 11:03:19.758 +08:00 [INF] thr:19<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-01 11:03:19.762 +08:00 [INF] thr:19<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:03:19.762 +08:00 [INF] thr:19<> loader Requires:RGRP
2025-07-01 11:03:20.218 +08:00 [INF] thr:19<> CLeanLoader Group Now C
2025-07-01 11:03:20.218 +08:00 [INF] thr:19<> loader Requires:MATS AK T
2025-07-01 11:03:23.729 +08:00 [INF] thr:19<> loader Requires:SSP Z 4000
2025-07-01 11:03:24.178 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-01 11:03:31.480 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:03:31.940 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-01 11:03:31.940 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-01 11:03:31.940 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-01 11:03:32.447 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:03:32.447 +08:00 [INF] thr:19<> loader Requires:INPUT A 6
2025-07-01 11:03:32.914 +08:00 [INF] thr:19<> loader Requires:MATS AK R 0
2025-07-01 11:03:38.174 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-01 11:03:38.174 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片请求
2025-07-01 11:03:38.174 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-01 11:03:38.679 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:03:38.680 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-01 11:03:39.128 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 0
2025-07-01 11:03:41.820 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:03:42.297 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-01 11:03:42.297 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-01 11:03:42.297 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-01 11:03:42.810 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:03:42.811 +08:00 [INF] thr:19<> loader Requires:SSP Z 1000
2025-07-01 11:03:43.273 +08:00 [INF] thr:19<> loader Requires:OUTP 1 0
2025-07-01 11:03:43.724 +08:00 [INF] thr:19<> loader Requires:OUTP 16 1
2025-07-01 11:03:44.180 +08:00 [INF] thr:19<> loader Requires:OUTP 15 1
2025-07-01 11:03:44.628 +08:00 [INF] thr:19<> loader Requires:OUTP 4 1
2025-07-01 11:03:45.078 +08:00 [INF] thr:19<> loader Requires:OUTP 1 1
2025-07-01 11:03:45.532 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:46.490 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:47.450 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:48.414 +08:00 [INF] thr:19<> loader Requires:INPUT A 4
2025-07-01 11:03:48.868 +08:00 [INF] thr:19<> loader Requires:INPUT A 5
2025-07-01 11:03:49.329 +08:00 [INF] thr:19<> loader Requires:MATS AK Z 1
2025-07-01 11:03:52.038 +08:00 [INF] thr:19<> loader Requires:SSPP Z 30
2025-07-01 11:03:52.496 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-01 11:03:52.496 +08:00 [INF] thr:19<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-01 11:03:52.496 +08:00 [INF] thr:19<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-01 11:03:54.037 +08:00 [INF] thr:19<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:03:54.037 +08:00 [INF] thr:19<> loader Requires:RETH
2025-07-01 11:03:59.289 +08:00 [INF] thr:19<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-01 11:43:10.295 +08:00 [INF] thr:36<> loader Requires:INPUT B 13
2025-07-01 11:43:13.303 +08:00 [INF] thr:3<> AOI is Ready
2025-07-01 11:43:14.484 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:50
2025-07-01 11:43:14.485 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:50
2025-07-01 11:43:18.266 +08:00 [INF] thr:3<> SetVelocity, Axis:X, velocity:8
2025-07-01 11:43:18.267 +08:00 [INF] thr:3<> SetVelocity, Axis:Y, velocity:8
2025-07-01 11:43:18.271 +08:00 [INF] thr:3<> stage move to position action ok
2025-07-01 11:43:18.271 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-01 11:43:18.275 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:43:18.275 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-01 11:43:18.724 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-01 11:43:18.724 +08:00 [INF] thr:3<> loader Requires:MATS AK T
2025-07-01 11:43:19.182 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-01 11:43:19.633 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-01 11:43:20.115 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 11:43:20.576 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-01 11:43:20.576 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-01 11:43:20.576 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-01 11:43:21.091 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:43:21.091 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-01 11:43:21.545 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 11:43:22.004 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-01 11:43:22.452 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 11:43:22.904 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-01 11:43:23.351 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 11:43:23.804 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 11:43:24.270 +08:00 [INF] thr:3<> loader Requires:MATS AK R 0
2025-07-01 11:43:29.540 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-01 11:43:29.540 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片请求
2025-07-01 11:43:29.540 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-01 11:43:30.050 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:43:30.050 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 11:43:30.499 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 0
2025-07-01 11:43:33.192 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 11:43:33.663 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-01 11:43:33.663 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-01 11:43:33.663 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-01 11:43:34.183 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:43:34.183 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-01 11:43:34.635 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-01 11:43:35.082 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-01 11:43:35.537 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-01 11:43:35.990 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-01 11:43:36.448 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-01 11:43:36.899 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 11:43:37.864 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 11:43:38.831 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 11:43:39.797 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-01 11:43:40.253 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-01 11:43:40.714 +08:00 [INF] thr:3<> loader Requires:MATS AK Z 1
2025-07-01 11:43:43.414 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-01 11:43:43.869 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-01 11:43:43.870 +08:00 [INF] thr:3<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-01 11:43:43.870 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-01 11:43:44.381 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:43:44.381 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-01 11:43:49.624 +08:00 [INF] thr:3<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-01 11:43:49.626 +08:00 [INF] thr:27<> 执行Aligner设置初始角度InitialAngle：900
2025-07-01 11:43:49.626 +08:00 [INF] thr:27<> 执行Aligner角度angle：900
2025-07-01 11:43:50.660 +08:00 [INF] thr:27<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-01 11:43:50.663 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:43:50.663 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-01 11:43:51.119 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-01 11:43:51.119 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-07-01 11:43:54.634 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-01 11:43:55.086 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-01 11:44:02.371 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-07-01 11:44:04.977 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:44:05.427 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-01 11:44:05.427 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-01 11:44:05.427 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-01 11:44:05.944 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:05.944 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-01 11:44:06.408 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-07-01 11:44:09.553 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-01 11:44:09.553 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-01 11:44:09.553 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-01 11:44:10.071 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:10.071 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-01 11:44:10.519 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-07-01 11:44:13.212 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:44:13.671 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-01 11:44:13.671 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-01 11:44:13.671 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-01 11:44:14.182 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:14.182 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-01 11:44:14.636 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-01 11:44:15.082 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-01 11:44:15.534 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-01 11:44:15.986 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-01 11:44:16.435 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-01 11:44:16.889 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:17.845 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:18.815 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:19.795 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:20.249 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-01 11:44:20.714 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-01 11:44:23.422 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:44:23.885 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-01 11:44:23.885 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-01 11:44:23.885 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-01 11:44:24.397 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:24.397 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-01 11:44:29.319 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-01 11:44:29.319 +08:00 [INF] thr:27<> 执行Aligner角度angle：0
2025-07-01 11:44:31.883 +08:00 [INF] thr:27<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-01 11:44:31.886 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:44:31.886 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-01 11:44:32.344 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-01 11:44:32.344 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-07-01 11:44:32.807 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-01 11:44:33.265 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-01 11:44:33.739 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-07-01 11:44:36.344 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:44:36.807 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-01 11:44:36.807 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-01 11:44:36.807 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-01 11:44:37.322 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:37.322 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-01 11:44:37.776 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-01 11:44:38.235 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-01 11:44:38.690 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-01 11:44:39.139 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-01 11:44:39.589 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-01 11:44:40.041 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:40.501 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-07-01 11:44:43.642 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-01 11:44:43.642 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-01 11:44:43.642 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-01 11:44:44.151 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:44.151 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-01 11:44:44.602 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-07-01 11:44:47.298 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:44:47.756 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-01 11:44:47.757 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-01 11:44:47.757 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-01 11:44:48.273 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:48.273 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-01 11:44:48.733 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-01 11:44:49.192 +08:00 [INF] thr:27<> loader Requires:OUTP 16 0
2025-07-01 11:44:49.647 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-01 11:44:50.096 +08:00 [INF] thr:27<> loader Requires:OUTP 4 0
2025-07-01 11:44:50.551 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-01 11:44:51.000 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:51.971 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:52.930 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:53.896 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:44:54.352 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-01 11:44:54.817 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-01 11:44:57.522 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:44:57.979 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-01 11:44:57.979 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-01 11:44:57.979 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-01 11:44:58.494 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:44:58.494 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-01 11:45:03.415 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-01 11:45:03.415 +08:00 [INF] thr:27<> Behavior Put LoadPort:CassettA,slotIndex:0
2025-07-01 11:45:03.416 +08:00 [INF] thr:27<> 开始load
2025-07-01 11:45:12.560 +08:00 [INF] thr:27<> CassettA Load RSP:MSG:103 8 MSG:103 0
2025-07-01 11:45:12.560 +08:00 [INF] thr:27<> CassettA Load MapResult:None
2025-07-01 11:45:12.560 +08:00 [INF] thr:27<> CassettA MapResult:None
2025-07-01 11:45:12.560 +08:00 [INF] thr:27<> PutSubstrateToStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass24_0::<Put2Station>b__6
2025-07-01 11:45:12.563 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-01 11:45:12.563 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-01 11:45:13.016 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-01 11:45:13.016 +08:00 [INF] thr:27<> loader Requires:MATS AA T
2025-07-01 11:45:15.944 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-01 11:45:16.404 +08:00 [INF] thr:27<> loader Requires:MATS AA Z 1
2025-07-01 11:45:18.240 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:45:18.694 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__2() done.
2025-07-01 11:45:18.694 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片水平检查请求
2025-07-01 11:45:18.694 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=11
2025-07-01 11:45:19.201 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:45:19.201 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-01 11:45:19.654 +08:00 [INF] thr:27<> loader Requires:MATS AA R 0
2025-07-01 11:45:24.430 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__3() done.
2025-07-01 11:45:24.430 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片请求
2025-07-01 11:45:24.430 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=1
2025-07-01 11:45:24.936 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:45:24.936 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-01 11:45:25.390 +08:00 [INF] thr:27<> loader Requires:MATS AA Z 0
2025-07-01 11:45:28.087 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:45:28.545 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__5() done.
2025-07-01 11:45:28.545 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片低位请求
2025-07-01 11:45:28.545 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=14
2025-07-01 11:45:29.062 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:45:29.062 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-01 11:45:29.510 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-01 11:45:29.963 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-01 11:45:30.415 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-01 11:45:30.868 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-01 11:45:31.318 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-01 11:45:31.769 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:45:32.727 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:45:33.695 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:45:34.657 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-01 11:45:35.115 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-01 11:45:35.580 +08:00 [INF] thr:27<> loader Requires:MATS AA Z 1
2025-07-01 11:45:38.294 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-01 11:45:38.748 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__1() done.
2025-07-01 11:45:38.748 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片完成请求
2025-07-01 11:45:38.748 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=2
2025-07-01 11:45:39.259 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-01 11:45:39.260 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-01 11:45:44.028 +08:00 [INF] thr:27<> loader Requires:INPUT B 13
2025-07-01 11:45:44.488 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__4() done.
2025-07-01 11:45:44.488 +08:00 [INF] thr:27<> 开始Unload
2025-07-01 11:45:53.458 +08:00 [INF] thr:27<> CassettA Load RSP:
2025-07-01 11:45:53.458 +08:00 [INF] thr:27<> MapResult:None
2025-07-01 11:45:53.929 +08:00 [INF] thr:29<> CassettA UnRunning
2025-07-01 11:45:54.862 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-01 11:45:55.318 +08:00 [INF] thr:29<> CassettA Unloading
2025-07-01 11:45:55.319 +08:00 [INF] thr:3<> 开始Unload
2025-07-01 11:45:55.423 +08:00 [INF] thr:3<> CassettA Load RSP:
2025-07-01 11:45:55.424 +08:00 [INF] thr:3<> MapResult:None
2025-07-01 11:45:56.366 +08:00 [INF] thr:3<> CassettA Unloaded
2025-07-01 11:46:19.117 +08:00 [INF] thr:15<> get state: False
2025-07-01 11:46:19.117 +08:00 [INF] thr:15<> BoxExist:False
2025-07-01 11:46:21.644 +08:00 [INF] thr:4<> CassettA Absence
2025-07-02 11:24:27.157 +08:00 [INF] thr:15<> get state: True
2025-07-02 11:24:27.158 +08:00 [INF] thr:15<> BoxExist:True
2025-07-02 11:24:27.158 +08:00 [INF] thr:26<> CassettA Unloaded
2025-07-02 11:24:47.043 +08:00 [INF] thr:26<> loader Requires:INPUT B 13
2025-07-02 11:24:47.506 +08:00 [INF] thr:26<> CassettA Loading
2025-07-02 11:24:47.506 +08:00 [INF] thr:27<> 开始load
2025-07-02 11:24:57.264 +08:00 [INF] thr:27<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-02 11:24:57.264 +08:00 [INF] thr:27<> CassettA Load MapResult:Normal
2025-07-02 11:24:57.485 +08:00 [INF] thr:27<> CassettA UnRunning
2025-07-02 11:25:01.046 +08:00 [INF] thr:52<> loader Requires:INPUT B 13
2025-07-02 11:25:02.040 +08:00 [INF] thr:28<> Behavior Get LoadPort:CassettA,slotIndex:0
2025-07-02 11:25:02.041 +08:00 [INF] thr:28<> 开始load
2025-07-02 11:25:02.492 +08:00 [INF] thr:28<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-02 11:25:02.492 +08:00 [INF] thr:28<> CassettA Load MapResult:Normal
2025-07-02 11:25:02.492 +08:00 [INF] thr:28<> CassettA MapResult:Normal
2025-07-02 11:25:02.492 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass25_1::<GetFromStation>b__6
2025-07-02 11:25:02.493 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 11:25:02.494 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-02 11:25:02.535 +08:00 [INF] thr:31<> CassettA Running
2025-07-02 11:25:02.948 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-02 11:25:02.948 +08:00 [INF] thr:28<> loader Requires:MATS AA T
2025-07-02 11:25:03.417 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-02 11:25:03.871 +08:00 [INF] thr:28<> loader Requires:MATS AA Z 1
2025-07-02 11:25:04.357 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:25:04.808 +08:00 [INF] thr:28<> <>c__DisplayClass25_0::<GetFromStation>b__2() done.
2025-07-02 11:25:04.808 +08:00 [INF] thr:28<> Station:CassettA,SafeCheck:下片水平检查请求
2025-07-02 11:25:04.808 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=12
2025-07-02 11:25:05.313 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:25:05.313 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-02 11:25:05.780 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-02 11:25:06.236 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-02 11:25:06.687 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-02 11:25:07.136 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-02 11:25:07.591 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-02 11:25:08.039 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:25:08.499 +08:00 [INF] thr:28<> loader Requires:MATS AA R 0
2025-07-02 11:25:13.274 +08:00 [INF] thr:28<> <>c__DisplayClass25_0::<GetFromStation>b__3() done.
2025-07-02 11:25:13.274 +08:00 [INF] thr:28<> Station:CassettA,SafeCheck:下片请求
2025-07-02 11:25:13.274 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=3
2025-07-02 11:25:13.795 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:25:13.795 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:25:14.250 +08:00 [INF] thr:28<> loader Requires:MATS AA Z 0
2025-07-02 11:25:16.947 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:25:17.409 +08:00 [INF] thr:28<> <>c__DisplayClass25_0::<GetFromStation>b__5() done.
2025-07-02 11:25:17.409 +08:00 [INF] thr:28<> Station:CassettA,SafeCheck:下片低位请求
2025-07-02 11:25:17.409 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=15
2025-07-02 11:25:17.928 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:25:17.928 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:25:18.376 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-02 11:25:18.824 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-02 11:25:19.279 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-02 11:25:19.732 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-02 11:25:20.179 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-02 11:25:20.633 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:25:21.598 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:25:22.562 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:25:23.534 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:25:23.991 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-02 11:25:24.452 +08:00 [INF] thr:28<> loader Requires:MATS AA Z 1
2025-07-02 11:25:27.157 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:25:27.607 +08:00 [INF] thr:28<> <>c__DisplayClass25_0::<GetFromStation>b__1() done.
2025-07-02 11:25:27.607 +08:00 [INF] thr:28<> Station:CassettA,SafeCheck:下片完成请求
2025-07-02 11:25:27.607 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=4
2025-07-02 11:25:28.120 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:25:28.120 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-02 11:25:32.880 +08:00 [INF] thr:28<> loader Requires:INPUT B 13
2025-07-02 11:25:33.337 +08:00 [INF] thr:28<> <>c__DisplayClass25_0::<GetFromStation>b__4() done.
2025-07-02 11:25:33.337 +08:00 [INF] thr:28<> 开始Unload
2025-07-02 11:25:42.990 +08:00 [INF] thr:28<> CassettA Load RSP:MSG:103 9
2025-07-02 11:25:42.990 +08:00 [INF] thr:28<> MapResult:Normal
2025-07-02 11:25:43.933 +08:00 [INF] thr:28<> 执行Aligner设置初始角度InitialAngle：0
2025-07-02 11:25:43.933 +08:00 [INF] thr:28<> 执行Aligner角度angle：0
2025-07-02 11:25:44.958 +08:00 [INF] thr:28<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-02 11:25:44.960 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 11:25:44.960 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-02 11:25:45.419 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-02 11:25:45.419 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-02 11:25:48.349 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-02 11:25:48.806 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-02 11:25:50.656 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-02 11:25:53.261 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:25:53.721 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-02 11:25:53.721 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-02 11:25:53.721 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-02 11:25:54.228 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:25:54.228 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-02 11:25:54.685 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-02 11:25:57.817 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-02 11:25:57.817 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-02 11:25:57.817 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-02 11:25:58.336 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:25:58.336 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:25:58.788 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-02 11:26:01.480 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:26:01.937 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-02 11:26:01.937 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-02 11:26:01.937 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-02 11:26:02.448 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:26:02.448 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:26:02.898 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-02 11:26:03.347 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-02 11:26:03.802 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-02 11:26:04.250 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-02 11:26:04.701 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-02 11:26:05.152 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:06.119 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:07.079 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:08.051 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:08.507 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-02 11:26:08.972 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-02 11:26:11.672 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:26:12.120 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-02 11:26:12.120 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-02 11:26:12.120 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-02 11:26:12.626 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:26:12.626 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-02 11:26:17.546 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-02 11:26:17.546 +08:00 [INF] thr:28<> 执行Aligner角度angle：900
2025-07-02 11:26:20.126 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-02 11:26:20.128 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 11:26:20.128 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-02 11:26:20.580 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-02 11:26:20.580 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-02 11:26:21.046 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-02 11:26:21.496 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-02 11:26:21.981 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-02 11:26:24.584 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:26:25.035 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-02 11:26:25.035 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-02 11:26:25.035 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-02 11:26:25.548 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:26:25.548 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-02 11:26:26.000 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-02 11:26:26.451 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-02 11:26:26.902 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-02 11:26:27.354 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-02 11:26:27.809 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-02 11:26:28.267 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:28.727 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-02 11:26:31.860 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-02 11:26:31.860 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-02 11:26:31.860 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-02 11:26:32.373 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:26:32.373 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:26:32.827 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-02 11:26:35.524 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:26:35.978 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-02 11:26:35.978 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-02 11:26:35.978 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-02 11:26:36.489 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:26:36.489 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:26:36.942 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-02 11:26:37.393 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-02 11:26:37.840 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-02 11:26:38.293 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-02 11:26:38.744 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-02 11:26:39.194 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:40.162 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:41.130 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:42.095 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:26:42.551 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-02 11:26:43.004 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-02 11:26:45.712 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:26:46.170 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-02 11:26:46.170 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-02 11:26:46.170 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-02 11:26:46.687 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:26:46.687 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-02 11:26:51.621 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-02 11:26:51.621 +08:00 [INF] thr:28<> AOI is Ready
2025-07-02 11:26:51.684 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-07-02 11:26:51.685 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-07-02 11:26:51.821 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:8
2025-07-02 11:26:51.822 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:8
2025-07-02 11:26:51.826 +08:00 [INF] thr:28<> stage move to position action ok
2025-07-02 11:26:51.826 +08:00 [INF] thr:28<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-02 11:26:51.828 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 11:26:51.828 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-02 11:26:52.280 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-02 11:26:52.280 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-07-02 11:26:55.798 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-02 11:26:56.249 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-02 11:27:03.538 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:27:03.999 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-02 11:27:03.999 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-02 11:27:03.999 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-02 11:27:04.515 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:27:04.515 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-02 11:27:04.980 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-07-02 11:27:10.239 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-02 11:27:10.239 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片请求
2025-07-02 11:27:10.239 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-02 11:27:10.743 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:27:10.743 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:27:11.193 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-07-02 11:27:13.891 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:27:14.418 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-02 11:27:14.418 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-02 11:27:14.418 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-02 11:27:14.930 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:27:14.931 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-02 11:27:15.377 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-02 11:27:15.825 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-02 11:27:16.284 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-02 11:27:16.740 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-02 11:27:17.191 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-02 11:27:17.641 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:27:18.612 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:27:19.576 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:27:20.550 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-02 11:27:21.005 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-02 11:27:21.457 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-02 11:27:24.160 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-02 11:27:24.622 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-02 11:27:24.622 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-02 11:27:24.622 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-02 11:27:26.141 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 11:27:26.141 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-02 11:27:31.384 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-02 13:33:32.760 +08:00 [INF] thr:71<> loader Requires:INPUT B 13
2025-07-02 13:33:33.733 +08:00 [INF] thr:4<> AOI is Ready
2025-07-02 13:33:33.808 +08:00 [INF] thr:4<> SetVelocity, Axis:X, velocity:50
2025-07-02 13:33:33.809 +08:00 [INF] thr:4<> SetVelocity, Axis:Y, velocity:50
2025-07-02 13:33:33.854 +08:00 [INF] thr:4<> SetVelocity, Axis:X, velocity:8
2025-07-02 13:33:33.855 +08:00 [INF] thr:4<> SetVelocity, Axis:Y, velocity:8
2025-07-02 13:33:33.858 +08:00 [INF] thr:4<> stage move to position action ok
2025-07-02 13:33:33.858 +08:00 [INF] thr:4<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-02 13:33:33.861 +08:00 [INF] thr:4<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 13:33:33.862 +08:00 [INF] thr:4<> loader Requires:RGRP
2025-07-02 13:33:34.305 +08:00 [INF] thr:4<> CLeanLoader Group Now C
2025-07-02 13:33:34.306 +08:00 [INF] thr:4<> loader Requires:MATS AK T
2025-07-02 13:33:34.768 +08:00 [INF] thr:4<> loader Requires:SSP Z 4000
2025-07-02 13:33:35.218 +08:00 [INF] thr:4<> loader Requires:MATS AK Z 1
2025-07-02 13:33:35.704 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-02 13:33:36.158 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-02 13:33:36.158 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-02 13:33:36.158 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-02 13:33:36.672 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:33:36.672 +08:00 [INF] thr:4<> loader Requires:INPUT A 6
2025-07-02 13:33:37.127 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-02 13:33:37.582 +08:00 [INF] thr:4<> loader Requires:OUTP 16 1
2025-07-02 13:33:38.033 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-02 13:33:38.482 +08:00 [INF] thr:4<> loader Requires:OUTP 4 1
2025-07-02 13:33:38.933 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-02 13:33:39.387 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-02 13:33:39.854 +08:00 [INF] thr:4<> loader Requires:MATS AK R 0
2025-07-02 13:33:45.121 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-02 13:33:45.121 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:下片请求
2025-07-02 13:33:45.121 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-02 13:33:45.628 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:33:45.628 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-02 13:33:46.078 +08:00 [INF] thr:4<> loader Requires:MATS AK Z 0
2025-07-02 13:33:48.783 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-02 13:33:49.284 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-02 13:33:49.284 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-02 13:33:49.284 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-02 13:33:49.797 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:33:49.797 +08:00 [INF] thr:4<> loader Requires:SSP Z 1000
2025-07-02 13:33:50.257 +08:00 [INF] thr:4<> loader Requires:OUTP 1 0
2025-07-02 13:33:50.702 +08:00 [INF] thr:4<> loader Requires:OUTP 16 0
2025-07-02 13:33:51.159 +08:00 [INF] thr:4<> loader Requires:OUTP 15 1
2025-07-02 13:33:51.614 +08:00 [INF] thr:4<> loader Requires:OUTP 4 0
2025-07-02 13:33:52.074 +08:00 [INF] thr:4<> loader Requires:OUTP 1 1
2025-07-02 13:33:52.532 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-02 13:33:53.485 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-02 13:33:54.456 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-02 13:33:55.425 +08:00 [INF] thr:4<> loader Requires:INPUT A 4
2025-07-02 13:33:55.878 +08:00 [INF] thr:4<> loader Requires:INPUT A 5
2025-07-02 13:33:56.339 +08:00 [INF] thr:4<> loader Requires:MATS AK Z 1
2025-07-02 13:33:59.054 +08:00 [INF] thr:4<> loader Requires:SSPP Z 30
2025-07-02 13:33:59.516 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-02 13:33:59.516 +08:00 [INF] thr:4<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-02 13:33:59.516 +08:00 [INF] thr:4<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-02 13:34:00.020 +08:00 [INF] thr:4<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:00.020 +08:00 [INF] thr:4<> loader Requires:RETH
2025-07-02 13:34:05.272 +08:00 [INF] thr:4<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-02 13:34:05.272 +08:00 [INF] thr:3<> 执行Aligner设置初始角度InitialAngle：900
2025-07-02 13:34:05.272 +08:00 [INF] thr:3<> 执行Aligner角度angle：900
2025-07-02 13:34:06.293 +08:00 [INF] thr:3<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-02 13:34:06.296 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 13:34:06.296 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-02 13:34:06.741 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-02 13:34:06.741 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-02 13:34:10.253 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-02 13:34:10.712 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-02 13:34:17.993 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-02 13:34:20.594 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:34:21.049 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-02 13:34:21.049 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-02 13:34:21.049 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-02 13:34:21.560 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:21.560 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-02 13:34:22.027 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-02 13:34:25.167 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-02 13:34:25.167 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-02 13:34:25.167 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-02 13:34:25.682 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:25.682 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 13:34:26.137 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-02 13:34:28.833 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:34:29.289 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-02 13:34:29.289 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-02 13:34:29.289 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-02 13:34:29.797 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:29.797 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 13:34:30.245 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 13:34:30.698 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-02 13:34:31.150 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 13:34:31.598 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-02 13:34:32.057 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 13:34:32.515 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:34:33.473 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:34:34.440 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:34:35.411 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:34:35.866 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-02 13:34:36.324 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-02 13:34:39.031 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:34:39.488 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-02 13:34:39.488 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-02 13:34:39.488 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-02 13:34:40.004 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:40.004 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-02 13:34:44.930 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-02 13:34:44.930 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-02 13:34:47.483 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-02 13:34:47.485 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 13:34:47.485 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-02 13:34:47.940 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-02 13:34:47.940 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-02 13:34:48.406 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-02 13:34:48.859 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-02 13:34:49.331 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-02 13:34:51.932 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:34:52.382 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-02 13:34:52.382 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-02 13:34:52.382 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-02 13:34:52.903 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:52.903 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-02 13:34:53.363 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 13:34:53.818 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-02 13:34:54.269 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 13:34:54.725 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-02 13:34:55.172 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 13:34:55.618 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:34:56.071 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-02 13:34:59.215 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-02 13:34:59.215 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-02 13:34:59.215 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-02 13:34:59.726 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:34:59.726 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 13:35:00.182 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-02 13:35:02.886 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:35:03.340 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-02 13:35:03.340 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-02 13:35:03.340 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-02 13:35:03.852 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:35:03.852 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 13:35:04.314 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 13:35:04.768 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-02 13:35:05.220 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 13:35:05.668 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-02 13:35:06.115 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 13:35:06.573 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:07.541 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:08.514 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:09.483 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:09.935 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-02 13:35:10.400 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-02 13:35:13.110 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:35:13.561 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-02 13:35:13.561 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-02 13:35:13.561 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-02 13:35:14.071 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:35:14.071 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-02 13:35:18.999 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-02 13:35:18.999 +08:00 [INF] thr:3<> Behavior Put LoadPort:CassettA,slotIndex:0
2025-07-02 13:35:18.999 +08:00 [INF] thr:3<> 开始load
2025-07-02 13:35:28.301 +08:00 [INF] thr:3<> CassettA Load RSP:MSG:103 8 MSG:103 0
2025-07-02 13:35:28.301 +08:00 [INF] thr:3<> CassettA Load MapResult:None
2025-07-02 13:35:28.301 +08:00 [INF] thr:3<> CassettA MapResult:None
2025-07-02 13:35:28.301 +08:00 [INF] thr:3<> PutSubstrateToStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass24_0::<Put2Station>b__6
2025-07-02 13:35:28.303 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-02 13:35:28.303 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-02 13:35:28.753 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-02 13:35:28.753 +08:00 [INF] thr:3<> loader Requires:MATS AA T
2025-07-02 13:35:31.691 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-02 13:35:32.144 +08:00 [INF] thr:3<> loader Requires:MATS AA Z 1
2025-07-02 13:35:33.987 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:35:34.437 +08:00 [INF] thr:3<> <>c__DisplayClass24_0::<Put2Station>b__2() done.
2025-07-02 13:35:34.437 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:上片水平检查请求
2025-07-02 13:35:34.437 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=11
2025-07-02 13:35:34.946 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:35:34.946 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-02 13:35:35.414 +08:00 [INF] thr:3<> loader Requires:MATS AA R 0
2025-07-02 13:35:40.196 +08:00 [INF] thr:3<> <>c__DisplayClass24_0::<Put2Station>b__3() done.
2025-07-02 13:35:40.196 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:上片请求
2025-07-02 13:35:40.196 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=1
2025-07-02 13:35:40.704 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:35:40.704 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 13:35:41.166 +08:00 [INF] thr:3<> loader Requires:MATS AA Z 0
2025-07-02 13:35:43.862 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:35:44.313 +08:00 [INF] thr:3<> <>c__DisplayClass24_0::<Put2Station>b__5() done.
2025-07-02 13:35:44.313 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:上片低位请求
2025-07-02 13:35:44.313 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=14
2025-07-02 13:35:44.822 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:35:44.822 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-02 13:35:45.273 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-02 13:35:45.733 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-02 13:35:46.191 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-02 13:35:46.652 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-02 13:35:47.103 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-02 13:35:47.554 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:48.515 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:49.482 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:50.448 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-02 13:35:50.903 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-02 13:35:51.364 +08:00 [INF] thr:3<> loader Requires:MATS AA Z 1
2025-07-02 13:35:54.073 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-02 13:35:54.534 +08:00 [INF] thr:3<> <>c__DisplayClass24_0::<Put2Station>b__1() done.
2025-07-02 13:35:54.534 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:上片完成请求
2025-07-02 13:35:54.534 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=2
2025-07-02 13:35:55.045 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-02 13:35:55.045 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-02 13:35:59.812 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-07-02 13:36:00.278 +08:00 [INF] thr:3<> <>c__DisplayClass24_0::<Put2Station>b__4() done.
2025-07-02 13:36:00.278 +08:00 [INF] thr:3<> 开始Unload
2025-07-02 13:36:09.247 +08:00 [INF] thr:3<> CassettA Load RSP:
2025-07-02 13:36:09.247 +08:00 [INF] thr:3<> MapResult:None
2025-07-02 13:36:09.734 +08:00 [INF] thr:4<> CassettA UnRunning
2025-07-02 13:36:10.633 +08:00 [INF] thr:29<> loader Requires:INPUT B 13
2025-07-02 13:36:11.091 +08:00 [INF] thr:29<> CassettA Unloading
2025-07-02 13:36:11.091 +08:00 [INF] thr:3<> 开始Unload
2025-07-02 13:36:11.197 +08:00 [INF] thr:3<> CassettA Load RSP:
2025-07-02 13:36:11.197 +08:00 [INF] thr:3<> MapResult:None
2025-07-02 13:36:12.136 +08:00 [INF] thr:3<> CassettA Unloaded
2025-07-02 13:36:13.371 +08:00 [INF] thr:15<> get state: False
2025-07-02 13:36:13.371 +08:00 [INF] thr:15<> BoxExist:False
2025-07-02 13:36:16.204 +08:00 [INF] thr:19<> CassettA Absence
2025-07-03 02:52:08.854 +08:00 [INF] thr:15<> get state: True
2025-07-03 02:52:08.854 +08:00 [INF] thr:15<> BoxExist:True
2025-07-03 02:52:08.854 +08:00 [INF] thr:26<> CassettA Unloaded
2025-07-03 02:52:48.168 +08:00 [INF] thr:27<> loader Requires:INPUT B 13
2025-07-03 02:52:48.633 +08:00 [INF] thr:8<> 开始load
2025-07-03 02:52:48.633 +08:00 [INF] thr:29<> CassettA Loading
2025-07-03 02:52:58.528 +08:00 [INF] thr:8<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-03 02:52:58.528 +08:00 [INF] thr:8<> CassettA Load MapResult:Normal
2025-07-03 02:52:58.751 +08:00 [INF] thr:8<> CassettA UnRunning
2025-07-03 02:53:02.172 +08:00 [INF] thr:87<> loader Requires:INPUT B 13
2025-07-03 02:53:03.198 +08:00 [INF] thr:26<> Behavior Get LoadPort:CassettA,slotIndex:0
2025-07-03 02:53:03.198 +08:00 [INF] thr:26<> 开始load
2025-07-03 02:53:03.548 +08:00 [INF] thr:26<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-03 02:53:03.548 +08:00 [INF] thr:26<> CassettA Load MapResult:Normal
2025-07-03 02:53:03.548 +08:00 [INF] thr:26<> CassettA MapResult:Normal
2025-07-03 02:53:03.549 +08:00 [INF] thr:26<> GetSubstrateFromStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass25_1::<GetFromStation>b__6
2025-07-03 02:53:03.552 +08:00 [INF] thr:26<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 02:53:03.552 +08:00 [INF] thr:26<> loader Requires:RGRP
2025-07-03 02:53:03.822 +08:00 [INF] thr:3<> CassettA Running
2025-07-03 02:53:04.003 +08:00 [INF] thr:26<> CLeanLoader Group Now C
2025-07-03 02:53:04.003 +08:00 [INF] thr:26<> loader Requires:MATS AA T
2025-07-03 02:53:04.466 +08:00 [INF] thr:26<> loader Requires:SSP Z 4000
2025-07-03 02:53:04.917 +08:00 [INF] thr:26<> loader Requires:MATS AA Z 1
2025-07-03 02:53:05.391 +08:00 [INF] thr:26<> loader Requires:SSPP Z 30
2025-07-03 02:53:05.845 +08:00 [INF] thr:26<> <>c__DisplayClass25_0::<GetFromStation>b__2() done.
2025-07-03 02:53:05.845 +08:00 [INF] thr:26<> Station:CassettA,SafeCheck:下片水平检查请求
2025-07-03 02:53:05.845 +08:00 [INF] thr:26<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=12
2025-07-03 02:53:06.358 +08:00 [INF] thr:26<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:53:06.358 +08:00 [INF] thr:26<> loader Requires:INPUT A 6
2025-07-03 02:53:06.810 +08:00 [INF] thr:26<> loader Requires:OUTP 1 0
2025-07-03 02:53:07.271 +08:00 [INF] thr:26<> loader Requires:OUTP 16 1
2025-07-03 02:53:07.730 +08:00 [INF] thr:26<> loader Requires:OUTP 15 1
2025-07-03 02:53:08.191 +08:00 [INF] thr:26<> loader Requires:OUTP 4 1
2025-07-03 02:53:08.650 +08:00 [INF] thr:26<> loader Requires:OUTP 1 1
2025-07-03 02:53:09.096 +08:00 [INF] thr:26<> loader Requires:INPUT A 4
2025-07-03 02:53:09.548 +08:00 [INF] thr:26<> loader Requires:MATS AA R 0
2025-07-03 02:53:14.324 +08:00 [INF] thr:26<> <>c__DisplayClass25_0::<GetFromStation>b__3() done.
2025-07-03 02:53:14.324 +08:00 [INF] thr:26<> Station:CassettA,SafeCheck:下片请求
2025-07-03 02:53:14.324 +08:00 [INF] thr:26<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=3
2025-07-03 02:53:14.836 +08:00 [INF] thr:26<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:53:14.836 +08:00 [INF] thr:26<> loader Requires:SSP Z 1000
2025-07-03 02:53:15.295 +08:00 [INF] thr:26<> loader Requires:MATS AA Z 0
2025-07-03 02:53:17.998 +08:00 [INF] thr:26<> loader Requires:SSPP Z 30
2025-07-03 02:53:18.456 +08:00 [INF] thr:26<> <>c__DisplayClass25_0::<GetFromStation>b__5() done.
2025-07-03 02:53:18.456 +08:00 [INF] thr:26<> Station:CassettA,SafeCheck:下片低位请求
2025-07-03 02:53:18.456 +08:00 [INF] thr:26<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=15
2025-07-03 02:53:18.971 +08:00 [INF] thr:26<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:53:18.971 +08:00 [INF] thr:26<> loader Requires:SSP Z 1000
2025-07-03 02:53:19.432 +08:00 [INF] thr:26<> loader Requires:OUTP 1 0
2025-07-03 02:53:19.879 +08:00 [INF] thr:26<> loader Requires:OUTP 16 0
2025-07-03 02:53:20.329 +08:00 [INF] thr:26<> loader Requires:OUTP 15 1
2025-07-03 02:53:20.782 +08:00 [INF] thr:26<> loader Requires:OUTP 4 0
2025-07-03 02:53:21.241 +08:00 [INF] thr:26<> loader Requires:OUTP 1 1
2025-07-03 02:53:21.691 +08:00 [INF] thr:26<> loader Requires:INPUT A 4
2025-07-03 02:53:22.649 +08:00 [INF] thr:26<> loader Requires:INPUT A 4
2025-07-03 02:53:23.618 +08:00 [INF] thr:26<> loader Requires:INPUT A 4
2025-07-03 02:53:24.573 +08:00 [INF] thr:26<> loader Requires:INPUT A 4
2025-07-03 02:53:25.038 +08:00 [INF] thr:26<> loader Requires:INPUT A 5
2025-07-03 02:53:25.500 +08:00 [INF] thr:26<> loader Requires:MATS AA Z 1
2025-07-03 02:53:28.213 +08:00 [INF] thr:26<> loader Requires:SSPP Z 30
2025-07-03 02:53:28.674 +08:00 [INF] thr:26<> <>c__DisplayClass25_0::<GetFromStation>b__1() done.
2025-07-03 02:53:28.674 +08:00 [INF] thr:26<> Station:CassettA,SafeCheck:下片完成请求
2025-07-03 02:53:28.674 +08:00 [INF] thr:26<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=4
2025-07-03 02:53:29.180 +08:00 [INF] thr:26<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:53:29.180 +08:00 [INF] thr:26<> loader Requires:RETH
2025-07-03 02:53:33.938 +08:00 [INF] thr:26<> loader Requires:INPUT B 13
2025-07-03 02:53:34.393 +08:00 [INF] thr:26<> <>c__DisplayClass25_0::<GetFromStation>b__4() done.
2025-07-03 02:53:34.393 +08:00 [INF] thr:26<> 开始Unload
2025-07-03 02:53:43.981 +08:00 [INF] thr:26<> CassettA Load RSP:MSG:103 9
2025-07-03 02:53:43.981 +08:00 [INF] thr:26<> MapResult:Normal
2025-07-03 02:53:44.924 +08:00 [INF] thr:28<> 执行Aligner设置初始角度InitialAngle：0
2025-07-03 02:53:44.924 +08:00 [INF] thr:28<> 执行Aligner角度angle：0
2025-07-03 02:53:45.949 +08:00 [INF] thr:28<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-03 02:53:45.951 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 02:53:45.951 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-03 02:53:46.405 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-03 02:53:46.405 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-03 02:53:49.337 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-03 02:53:49.794 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-03 02:53:51.634 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-03 02:53:54.231 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:53:54.687 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-03 02:53:54.687 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-03 02:53:54.687 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-03 02:53:55.200 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:53:55.200 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-03 02:53:55.666 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-03 02:53:58.811 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-03 02:53:58.811 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-03 02:53:58.811 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-03 02:53:59.327 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:53:59.327 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-03 02:53:59.774 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-03 02:54:02.480 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:54:02.937 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-03 02:54:02.937 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-03 02:54:02.937 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-03 02:54:03.446 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:54:03.446 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-03 02:54:03.897 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-03 02:54:04.343 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-03 02:54:04.795 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-03 02:54:05.256 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-03 02:54:05.714 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-03 02:54:06.161 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:07.123 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:08.084 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:09.057 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:09.511 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-03 02:54:09.976 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-03 02:54:12.689 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:54:13.140 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-03 02:54:13.140 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-03 02:54:13.140 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-03 02:54:13.660 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:54:13.660 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-03 02:54:18.577 +08:00 [INF] thr:28<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-03 02:54:18.577 +08:00 [INF] thr:28<> 执行Aligner角度angle：900
2025-07-03 02:54:21.147 +08:00 [INF] thr:28<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-03 02:54:21.149 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 02:54:21.149 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-03 02:54:21.599 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-03 02:54:21.599 +08:00 [INF] thr:28<> loader Requires:MATS AJ T
2025-07-03 02:54:22.061 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-03 02:54:22.512 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-03 02:54:22.989 +08:00 [INF] thr:28<> loader Requires:MOVR R 226000
2025-07-03 02:54:25.589 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:54:26.048 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-03 02:54:26.048 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-03 02:54:26.048 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-03 02:54:26.561 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:54:26.561 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-03 02:54:27.015 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-03 02:54:27.475 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-03 02:54:27.925 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-03 02:54:28.386 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-03 02:54:28.833 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-03 02:54:29.283 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:29.735 +08:00 [INF] thr:28<> loader Requires:MATS AJ R 0
2025-07-03 02:54:32.871 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-03 02:54:32.871 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-03 02:54:32.871 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-03 02:54:33.386 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:54:33.386 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-03 02:54:33.846 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 0
2025-07-03 02:54:36.538 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:54:36.991 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-03 02:54:36.991 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-03 02:54:36.991 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-03 02:54:37.495 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:54:37.496 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-03 02:54:37.944 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-03 02:54:38.399 +08:00 [INF] thr:28<> loader Requires:OUTP 16 0
2025-07-03 02:54:38.849 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-03 02:54:39.310 +08:00 [INF] thr:28<> loader Requires:OUTP 4 0
2025-07-03 02:54:39.768 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-03 02:54:40.214 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:41.180 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:42.138 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:43.096 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:54:43.561 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-03 02:54:44.022 +08:00 [INF] thr:28<> loader Requires:MATS AJ Z 1
2025-07-03 02:54:46.735 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:54:47.199 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-03 02:54:47.199 +08:00 [INF] thr:28<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-03 02:54:47.199 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-03 02:54:47.710 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:54:47.711 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-03 02:54:52.641 +08:00 [INF] thr:28<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-03 02:54:52.642 +08:00 [INF] thr:28<> AOI is Ready
2025-07-03 02:54:52.705 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:50
2025-07-03 02:54:52.706 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:50
2025-07-03 02:54:52.752 +08:00 [INF] thr:28<> SetVelocity, Axis:X, velocity:8
2025-07-03 02:54:52.753 +08:00 [INF] thr:28<> SetVelocity, Axis:Y, velocity:8
2025-07-03 02:54:52.757 +08:00 [INF] thr:28<> stage move to position action ok
2025-07-03 02:54:52.757 +08:00 [INF] thr:28<> PutSubstrateToStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__15
2025-07-03 02:54:52.759 +08:00 [INF] thr:28<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 02:54:52.759 +08:00 [INF] thr:28<> loader Requires:RGRP
2025-07-03 02:54:53.211 +08:00 [INF] thr:28<> CLeanLoader Group Now C
2025-07-03 02:54:53.211 +08:00 [INF] thr:28<> loader Requires:MATS AK T
2025-07-03 02:54:56.727 +08:00 [INF] thr:28<> loader Requires:SSP Z 4000
2025-07-03 02:54:57.178 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-03 02:55:04.479 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:55:04.931 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__12() done.
2025-07-03 02:55:04.931 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片水平检查请求
2025-07-03 02:55:04.931 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=11
2025-07-03 02:55:05.444 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:55:05.444 +08:00 [INF] thr:28<> loader Requires:INPUT A 6
2025-07-03 02:55:05.908 +08:00 [INF] thr:28<> loader Requires:MATS AK R 0
2025-07-03 02:55:11.169 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__13() done.
2025-07-03 02:55:11.169 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片请求
2025-07-03 02:55:11.169 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=1
2025-07-03 02:55:11.687 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:55:11.687 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-03 02:55:12.140 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 0
2025-07-03 02:55:14.831 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:55:15.317 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__10() done.
2025-07-03 02:55:15.317 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片低位请求
2025-07-03 02:55:15.317 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=17
2025-07-03 02:55:15.833 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:55:15.833 +08:00 [INF] thr:28<> loader Requires:SSP Z 1000
2025-07-03 02:55:16.282 +08:00 [INF] thr:28<> loader Requires:OUTP 1 0
2025-07-03 02:55:16.733 +08:00 [INF] thr:28<> loader Requires:OUTP 16 1
2025-07-03 02:55:17.184 +08:00 [INF] thr:28<> loader Requires:OUTP 15 1
2025-07-03 02:55:17.633 +08:00 [INF] thr:28<> loader Requires:OUTP 4 1
2025-07-03 02:55:18.092 +08:00 [INF] thr:28<> loader Requires:OUTP 1 1
2025-07-03 02:55:18.542 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:55:19.510 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:55:20.481 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:55:21.447 +08:00 [INF] thr:28<> loader Requires:INPUT A 4
2025-07-03 02:55:21.900 +08:00 [INF] thr:28<> loader Requires:INPUT A 5
2025-07-03 02:55:22.365 +08:00 [INF] thr:28<> loader Requires:MATS AK Z 1
2025-07-03 02:55:25.068 +08:00 [INF] thr:28<> loader Requires:SSPP Z 30
2025-07-03 02:55:25.525 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__11() done.
2025-07-03 02:55:25.525 +08:00 [INF] thr:28<> Station:InspectStageA,SafeCheck:上片完成请求
2025-07-03 02:55:25.525 +08:00 [INF] thr:28<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=2
2025-07-03 02:55:27.059 +08:00 [INF] thr:28<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 02:55:27.059 +08:00 [INF] thr:28<> loader Requires:RETH
2025-07-03 02:55:32.312 +08:00 [INF] thr:28<> <>c__DisplayClass14_0::<Stage>b__14() done.
2025-07-03 03:24:47.151 +08:00 [INF] thr:77<> loader Requires:INPUT B 13
2025-07-03 03:24:48.128 +08:00 [INF] thr:27<> AOI is Ready
2025-07-03 03:24:48.199 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:50
2025-07-03 03:24:48.200 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:50
2025-07-03 03:24:48.245 +08:00 [INF] thr:27<> SetVelocity, Axis:X, velocity:8
2025-07-03 03:24:48.246 +08:00 [INF] thr:27<> SetVelocity, Axis:Y, velocity:8
2025-07-03 03:24:48.250 +08:00 [INF] thr:27<> stage move to position action ok
2025-07-03 03:24:48.250 +08:00 [INF] thr:27<> GetSubstrateFromStation: station=InspectStageA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass14_0::<Stage>b__6
2025-07-03 03:24:48.253 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 03:24:48.253 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-03 03:24:48.705 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-03 03:24:48.705 +08:00 [INF] thr:27<> loader Requires:MATS AK T
2025-07-03 03:24:49.173 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-03 03:24:49.628 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-07-03 03:24:50.113 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:24:50.567 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__3() done.
2025-07-03 03:24:50.567 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片水平检查请求
2025-07-03 03:24:50.567 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=13
2025-07-03 03:24:51.086 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:24:51.086 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-03 03:24:51.537 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-03 03:24:51.988 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-03 03:24:52.436 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-03 03:24:52.883 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-03 03:24:53.343 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-03 03:24:53.803 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:24:54.268 +08:00 [INF] thr:27<> loader Requires:MATS AK R 0
2025-07-03 03:24:59.535 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__4() done.
2025-07-03 03:24:59.535 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片请求
2025-07-03 03:24:59.535 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=3
2025-07-03 03:25:00.043 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:00.043 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:25:00.492 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 0
2025-07-03 03:25:03.196 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:25:03.673 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__1() done.
2025-07-03 03:25:03.673 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片低位请求
2025-07-03 03:25:03.673 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=16
2025-07-03 03:25:04.178 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:04.178 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:25:04.634 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-03 03:25:05.093 +08:00 [INF] thr:27<> loader Requires:OUTP 16 0
2025-07-03 03:25:05.541 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-03 03:25:06.001 +08:00 [INF] thr:27<> loader Requires:OUTP 4 0
2025-07-03 03:25:06.452 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-03 03:25:06.898 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:07.859 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:08.817 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:09.775 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:10.229 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-03 03:25:10.689 +08:00 [INF] thr:27<> loader Requires:MATS AK Z 1
2025-07-03 03:25:13.399 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:25:13.858 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__2() done.
2025-07-03 03:25:13.858 +08:00 [INF] thr:27<> Station:InspectStageA,SafeCheck:下片完成请求
2025-07-03 03:25:13.858 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM100, errorAddress=DM199, command=4
2025-07-03 03:25:14.371 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:14.371 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-03 03:25:19.623 +08:00 [INF] thr:27<> <>c__DisplayClass14_0::<Stage>b__5() done.
2025-07-03 03:25:19.623 +08:00 [INF] thr:27<> 执行Aligner设置初始角度InitialAngle：900
2025-07-03 03:25:19.623 +08:00 [INF] thr:27<> 执行Aligner角度angle：900
2025-07-03 03:25:20.654 +08:00 [INF] thr:27<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-03 03:25:20.658 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 03:25:20.658 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-03 03:25:21.108 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-03 03:25:21.108 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-07-03 03:25:24.627 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-03 03:25:25.091 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-03 03:25:32.371 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-07-03 03:25:34.977 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:25:35.427 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-03 03:25:35.427 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-03 03:25:35.427 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-03 03:25:35.949 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:35.949 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-03 03:25:36.413 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-07-03 03:25:39.545 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-03 03:25:39.545 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-03 03:25:39.545 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-03 03:25:40.060 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:40.060 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:25:40.519 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-07-03 03:25:43.211 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:25:43.672 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-03 03:25:43.672 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-03 03:25:43.672 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-03 03:25:44.181 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:44.181 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:25:44.642 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-03 03:25:45.101 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-03 03:25:45.553 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-03 03:25:46.005 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-03 03:25:46.452 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-03 03:25:46.905 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:47.862 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:48.819 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:49.784 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:25:50.236 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-03 03:25:50.697 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-03 03:25:53.411 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:25:53.866 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-03 03:25:53.866 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-03 03:25:53.866 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-03 03:25:54.376 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:25:54.376 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-03 03:25:59.307 +08:00 [INF] thr:27<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-03 03:25:59.307 +08:00 [INF] thr:27<> 执行Aligner角度angle：0
2025-07-03 03:26:01.867 +08:00 [INF] thr:27<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-03 03:26:01.869 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 03:26:01.869 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-03 03:26:02.330 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-03 03:26:02.330 +08:00 [INF] thr:27<> loader Requires:MATS AJ T
2025-07-03 03:26:02.802 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-03 03:26:03.260 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-03 03:26:03.734 +08:00 [INF] thr:27<> loader Requires:MOVR R 226000
2025-07-03 03:26:06.341 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:26:06.792 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-03 03:26:06.792 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-03 03:26:06.792 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-03 03:26:07.305 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:07.305 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-03 03:26:07.773 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-03 03:26:08.228 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-03 03:26:08.679 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-03 03:26:09.127 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-03 03:26:09.578 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-03 03:26:10.024 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:26:10.479 +08:00 [INF] thr:27<> loader Requires:MATS AJ R 0
2025-07-03 03:26:13.613 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-03 03:26:13.613 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-03 03:26:13.613 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-03 03:26:14.119 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:14.119 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:26:14.573 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 0
2025-07-03 03:26:17.275 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:26:17.736 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-03 03:26:17.736 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-03 03:26:17.736 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-03 03:26:18.246 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:18.246 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:26:18.693 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-03 03:26:19.140 +08:00 [INF] thr:27<> loader Requires:OUTP 16 0
2025-07-03 03:26:19.591 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-03 03:26:20.052 +08:00 [INF] thr:27<> loader Requires:OUTP 4 0
2025-07-03 03:26:20.498 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-03 03:26:20.950 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:26:21.913 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:26:22.881 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:26:23.846 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:26:24.310 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-03 03:26:24.763 +08:00 [INF] thr:27<> loader Requires:MATS AJ Z 1
2025-07-03 03:26:27.486 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:26:27.947 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-03 03:26:27.947 +08:00 [INF] thr:27<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-03 03:26:27.947 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-03 03:26:28.451 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:28.451 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-03 03:26:33.380 +08:00 [INF] thr:27<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-03 03:26:33.381 +08:00 [INF] thr:27<> Behavior Put LoadPort:CassettA,slotIndex:0
2025-07-03 03:26:33.381 +08:00 [INF] thr:27<> 开始load
2025-07-03 03:26:42.608 +08:00 [INF] thr:27<> CassettA Load RSP:MSG:103 8 MSG:103 0
2025-07-03 03:26:42.608 +08:00 [INF] thr:27<> CassettA Load MapResult:None
2025-07-03 03:26:42.608 +08:00 [INF] thr:27<> CassettA MapResult:None
2025-07-03 03:26:42.608 +08:00 [INF] thr:27<> PutSubstrateToStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass24_0::<Put2Station>b__6
2025-07-03 03:26:42.611 +08:00 [INF] thr:27<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 03:26:42.611 +08:00 [INF] thr:27<> loader Requires:RGRP
2025-07-03 03:26:43.061 +08:00 [INF] thr:27<> CLeanLoader Group Now C
2025-07-03 03:26:43.061 +08:00 [INF] thr:27<> loader Requires:MATS AA T
2025-07-03 03:26:45.991 +08:00 [INF] thr:27<> loader Requires:SSP Z 4000
2025-07-03 03:26:46.439 +08:00 [INF] thr:27<> loader Requires:MATS AA Z 1
2025-07-03 03:26:48.280 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:26:48.742 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__2() done.
2025-07-03 03:26:48.742 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片水平检查请求
2025-07-03 03:26:48.742 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=11
2025-07-03 03:26:49.251 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:49.251 +08:00 [INF] thr:27<> loader Requires:INPUT A 6
2025-07-03 03:26:49.711 +08:00 [INF] thr:27<> loader Requires:MATS AA R 0
2025-07-03 03:26:54.490 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__3() done.
2025-07-03 03:26:54.491 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片请求
2025-07-03 03:26:54.491 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=1
2025-07-03 03:26:55.009 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:55.009 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:26:55.467 +08:00 [INF] thr:27<> loader Requires:MATS AA Z 0
2025-07-03 03:26:58.172 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:26:58.629 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__5() done.
2025-07-03 03:26:58.629 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片低位请求
2025-07-03 03:26:58.629 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=14
2025-07-03 03:26:59.141 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:26:59.141 +08:00 [INF] thr:27<> loader Requires:SSP Z 1000
2025-07-03 03:26:59.602 +08:00 [INF] thr:27<> loader Requires:OUTP 1 0
2025-07-03 03:27:00.061 +08:00 [INF] thr:27<> loader Requires:OUTP 16 1
2025-07-03 03:27:00.512 +08:00 [INF] thr:27<> loader Requires:OUTP 15 1
2025-07-03 03:27:00.961 +08:00 [INF] thr:27<> loader Requires:OUTP 4 1
2025-07-03 03:27:01.408 +08:00 [INF] thr:27<> loader Requires:OUTP 1 1
2025-07-03 03:27:01.862 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:27:02.819 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:27:03.783 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:27:04.744 +08:00 [INF] thr:27<> loader Requires:INPUT A 4
2025-07-03 03:27:05.196 +08:00 [INF] thr:27<> loader Requires:INPUT A 5
2025-07-03 03:27:05.661 +08:00 [INF] thr:27<> loader Requires:MATS AA Z 1
2025-07-03 03:27:08.370 +08:00 [INF] thr:27<> loader Requires:SSPP Z 30
2025-07-03 03:27:08.826 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__1() done.
2025-07-03 03:27:08.826 +08:00 [INF] thr:27<> Station:CassettA,SafeCheck:上片完成请求
2025-07-03 03:27:08.826 +08:00 [INF] thr:27<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=2
2025-07-03 03:27:09.334 +08:00 [INF] thr:27<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 03:27:09.334 +08:00 [INF] thr:27<> loader Requires:RETH
2025-07-03 03:27:14.102 +08:00 [INF] thr:27<> loader Requires:INPUT B 13
2025-07-03 03:27:14.564 +08:00 [INF] thr:27<> <>c__DisplayClass24_0::<Put2Station>b__4() done.
2025-07-03 03:27:14.564 +08:00 [INF] thr:27<> 开始Unload
2025-07-03 03:27:23.537 +08:00 [INF] thr:27<> CassettA Load RSP:
2025-07-03 03:27:23.537 +08:00 [INF] thr:27<> MapResult:None
2025-07-03 03:27:24.809 +08:00 [INF] thr:4<> CassettA UnRunning
2025-07-03 03:27:24.931 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-07-03 03:27:25.400 +08:00 [INF] thr:3<> CassettA Unloading
2025-07-03 03:27:25.400 +08:00 [INF] thr:19<> 开始Unload
2025-07-03 03:27:25.504 +08:00 [INF] thr:19<> CassettA Load RSP:
2025-07-03 03:27:25.504 +08:00 [INF] thr:19<> MapResult:None
2025-07-03 03:27:26.454 +08:00 [INF] thr:19<> CassettA Unloaded
2025-07-03 03:27:29.229 +08:00 [INF] thr:15<> get state: False
2025-07-03 03:27:29.229 +08:00 [INF] thr:15<> BoxExist:False
2025-07-03 03:27:31.504 +08:00 [INF] thr:26<> CassettA Absence
2025-07-03 04:15:18.915 +08:00 [INF] thr:11<> the connection has been disconnected: 127.0.0.1:50931
2025-07-03 04:15:50.015 +08:00 [INF] thr:24<> Axis:X, axis id:2,state:ACSC_SAFETY_LL
2025-07-03 04:15:53.059 +08:00 [INF] thr:24<> Axis:Y, axis id:0,state:ACSC_SAFETY_LL
2025-07-03 04:20:32.331 +08:00 [INF] thr:15<> get state: True
2025-07-03 04:20:32.331 +08:00 [INF] thr:15<> BoxExist:True
2025-07-03 04:20:32.331 +08:00 [INF] thr:9<> CassettA Unloaded
2025-07-03 04:20:51.659 +08:00 [INF] thr:75<> loader Requires:INPUT B 13
2025-07-03 04:20:52.124 +08:00 [INF] thr:9<> 开始load
2025-07-03 04:20:52.124 +08:00 [INF] thr:29<> CassettA Loading
2025-07-03 04:21:01.989 +08:00 [INF] thr:9<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-03 04:21:01.989 +08:00 [INF] thr:9<> CassettA Load MapResult:Normal
2025-07-03 04:21:02.215 +08:00 [INF] thr:9<> CassettA UnRunning
2025-07-03 04:21:05.665 +08:00 [INF] thr:26<> loader Requires:INPUT B 13
2025-07-03 04:21:06.695 +08:00 [INF] thr:3<> Behavior Get LoadPort:CassettA,slotIndex:0
2025-07-03 04:21:06.695 +08:00 [INF] thr:3<> 开始load
2025-07-03 04:21:07.249 +08:00 [INF] thr:3<> CassettA Load RSP:MSG:103 8 MSG:103 3 MSG:103 4
2025-07-03 04:21:07.249 +08:00 [INF] thr:3<> CassettA Load MapResult:Normal
2025-07-03 04:21:07.249 +08:00 [INF] thr:3<> CassettA MapResult:Normal
2025-07-03 04:21:07.249 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=CassettA, DeviceType=SMIF, actionWhenSensorDisabled=<>c__DisplayClass25_1::<GetFromStation>b__6
2025-07-03 04:21:07.251 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 04:21:07.251 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-03 04:21:07.267 +08:00 [INF] thr:29<> CassettA Running
2025-07-03 04:21:07.699 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-03 04:21:07.699 +08:00 [INF] thr:3<> loader Requires:MATS AA T
2025-07-03 04:21:08.162 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-03 04:21:08.612 +08:00 [INF] thr:3<> loader Requires:MATS AA Z 1
2025-07-03 04:21:09.097 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:21:09.554 +08:00 [INF] thr:3<> <>c__DisplayClass25_0::<GetFromStation>b__2() done.
2025-07-03 04:21:09.555 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:下片水平检查请求
2025-07-03 04:21:09.555 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=12
2025-07-03 04:21:10.063 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:21:10.063 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-03 04:21:10.528 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 04:21:10.979 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-03 04:21:11.426 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 04:21:11.887 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-03 04:21:12.345 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 04:21:12.796 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:21:13.252 +08:00 [INF] thr:3<> loader Requires:MATS AA R 0
2025-07-03 04:21:18.038 +08:00 [INF] thr:3<> <>c__DisplayClass25_0::<GetFromStation>b__3() done.
2025-07-03 04:21:18.038 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:下片请求
2025-07-03 04:21:18.038 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=3
2025-07-03 04:21:18.550 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:21:18.550 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 04:21:18.999 +08:00 [INF] thr:3<> loader Requires:MATS AA Z 0
2025-07-03 04:21:21.695 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:21:22.157 +08:00 [INF] thr:3<> <>c__DisplayClass25_0::<GetFromStation>b__5() done.
2025-07-03 04:21:22.157 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:下片低位请求
2025-07-03 04:21:22.157 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=15
2025-07-03 04:21:22.677 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:21:22.677 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 04:21:23.137 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 04:21:23.596 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-03 04:21:24.044 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 04:21:24.501 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-03 04:21:24.959 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 04:21:25.405 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:21:26.373 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:21:27.348 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:21:28.311 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:21:28.779 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-03 04:21:29.240 +08:00 [INF] thr:3<> loader Requires:MATS AA Z 1
2025-07-03 04:21:31.957 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:21:32.414 +08:00 [INF] thr:3<> <>c__DisplayClass25_0::<GetFromStation>b__1() done.
2025-07-03 04:21:32.414 +08:00 [INF] thr:3<> Station:CassettA,SafeCheck:下片完成请求
2025-07-03 04:21:32.414 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM120, errorAddress=DM199, command=4
2025-07-03 04:21:32.924 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:21:32.924 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-03 04:21:37.685 +08:00 [INF] thr:3<> loader Requires:INPUT B 13
2025-07-03 04:21:38.151 +08:00 [INF] thr:3<> <>c__DisplayClass25_0::<GetFromStation>b__4() done.
2025-07-03 04:21:38.151 +08:00 [INF] thr:3<> 开始Unload
2025-07-03 04:21:47.939 +08:00 [INF] thr:3<> CassettA Load RSP:MSG:103 9
2025-07-03 04:21:47.939 +08:00 [INF] thr:3<> MapResult:Normal
2025-07-03 04:21:48.882 +08:00 [INF] thr:3<> 执行Aligner设置初始角度InitialAngle：0
2025-07-03 04:21:48.882 +08:00 [INF] thr:3<> 执行Aligner角度angle：0
2025-07-03 04:21:49.906 +08:00 [INF] thr:3<> PutSubstrateToStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass13_0::<PutToAligner>b__6
2025-07-03 04:21:49.908 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 04:21:49.908 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-03 04:21:50.356 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-03 04:21:50.356 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-03 04:21:53.282 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-03 04:21:53.734 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-03 04:21:55.588 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-03 04:21:58.190 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:21:58.649 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__3() done.
2025-07-03 04:21:58.649 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片水平检查请求
2025-07-03 04:21:58.649 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=11
2025-07-03 04:21:59.158 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:21:59.158 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-03 04:21:59.615 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-03 04:22:02.759 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__4() done.
2025-07-03 04:22:02.759 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片请求
2025-07-03 04:22:02.759 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=1
2025-07-03 04:22:03.278 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:03.278 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 04:22:03.738 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-03 04:22:06.434 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:22:06.886 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__2() done.
2025-07-03 04:22:06.886 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片低位请求
2025-07-03 04:22:06.886 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=14
2025-07-03 04:22:07.394 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:07.394 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 04:22:07.843 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 04:22:08.302 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-03 04:22:08.749 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 04:22:09.196 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-03 04:22:09.651 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 04:22:10.101 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:11.059 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:12.018 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:12.991 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:13.449 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-03 04:22:13.917 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-03 04:22:16.625 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:22:17.082 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__1() done.
2025-07-03 04:22:17.082 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:上片完成请求
2025-07-03 04:22:17.082 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=2
2025-07-03 04:22:17.587 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:17.587 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-03 04:22:22.504 +08:00 [INF] thr:3<> <>c__DisplayClass13_0::<PutToAligner>b__5() done.
2025-07-03 04:22:22.504 +08:00 [INF] thr:3<> 执行Aligner角度angle：900
2025-07-03 04:22:25.072 +08:00 [INF] thr:3<> GetSubstrateFromStation: station=PrealignmentA, DeviceType=NONE, actionWhenSensorDisabled=<>c__DisplayClass12_0::<GetFromAligner>b__6
2025-07-03 04:22:25.076 +08:00 [INF] thr:3<> Component.EfemOperator::IsSafeSensorEnable state：32767
2025-07-03 04:22:25.076 +08:00 [INF] thr:3<> loader Requires:RGRP
2025-07-03 04:22:25.525 +08:00 [INF] thr:3<> CLeanLoader Group Now C
2025-07-03 04:22:25.525 +08:00 [INF] thr:3<> loader Requires:MATS AJ T
2025-07-03 04:22:25.984 +08:00 [INF] thr:3<> loader Requires:SSP Z 4000
2025-07-03 04:22:26.439 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-03 04:22:26.915 +08:00 [INF] thr:3<> loader Requires:MOVR R 226000
2025-07-03 04:22:29.513 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:22:29.972 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__3() done.
2025-07-03 04:22:29.972 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片水平检查请求
2025-07-03 04:22:29.972 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=12
2025-07-03 04:22:30.488 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:30.488 +08:00 [INF] thr:3<> loader Requires:INPUT A 6
2025-07-03 04:22:30.953 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 04:22:31.412 +08:00 [INF] thr:3<> loader Requires:OUTP 16 1
2025-07-03 04:22:31.863 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 04:22:32.316 +08:00 [INF] thr:3<> loader Requires:OUTP 4 1
2025-07-03 04:22:32.778 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 04:22:33.228 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:33.684 +08:00 [INF] thr:3<> loader Requires:MATS AJ R 0
2025-07-03 04:22:36.817 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__4() done.
2025-07-03 04:22:36.817 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片请求
2025-07-03 04:22:36.817 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=3
2025-07-03 04:22:37.336 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:37.336 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 04:22:37.784 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 0
2025-07-03 04:22:40.477 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:22:40.935 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__2() done.
2025-07-03 04:22:40.935 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片低位请求
2025-07-03 04:22:40.935 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=15
2025-07-03 04:22:41.450 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:41.450 +08:00 [INF] thr:3<> loader Requires:SSP Z 1000
2025-07-03 04:22:41.903 +08:00 [INF] thr:3<> loader Requires:OUTP 1 0
2025-07-03 04:22:42.362 +08:00 [INF] thr:3<> loader Requires:OUTP 16 0
2025-07-03 04:22:42.810 +08:00 [INF] thr:3<> loader Requires:OUTP 15 1
2025-07-03 04:22:43.270 +08:00 [INF] thr:3<> loader Requires:OUTP 4 0
2025-07-03 04:22:43.729 +08:00 [INF] thr:3<> loader Requires:OUTP 1 1
2025-07-03 04:22:44.174 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:45.147 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:46.100 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:47.057 +08:00 [INF] thr:3<> loader Requires:INPUT A 4
2025-07-03 04:22:47.521 +08:00 [INF] thr:3<> loader Requires:INPUT A 5
2025-07-03 04:22:47.986 +08:00 [INF] thr:3<> loader Requires:MATS AJ Z 1
2025-07-03 04:22:50.692 +08:00 [INF] thr:3<> loader Requires:SSPP Z 30
2025-07-03 04:22:51.155 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__1() done.
2025-07-03 04:22:51.155 +08:00 [INF] thr:3<> Station:PrealignmentA,SafeCheck:下片完成请求
2025-07-03 04:22:51.155 +08:00 [INF] thr:3<> ExecuteCommand: actionAddress=DM110, errorAddress=DM199, command=4
2025-07-03 04:22:51.677 +08:00 [INF] thr:3<> Safe ExecuteCommand sucess, plc is 0
2025-07-03 04:22:51.677 +08:00 [INF] thr:3<> loader Requires:RETH
2025-07-03 04:22:56.606 +08:00 [INF] thr:3<> <>c__DisplayClass12_0::<GetFromAligner>b__5() done.
2025-07-03 04:22:56.606 +08:00 [INF] thr:3<> AOI is Ready
2025-07-03 04:55:06.937 +08:00 [INF] thr:1<> 连接后接收一个 > 符号
2025-07-03 04:55:08.020 +08:00 [INF] thr:1<> loader Requires:VER
2025-07-03 04:59:22.182 +08:00 [INF] thr:1<> 连接后接收一个 > 符号
2025-07-03 04:59:23.216 +08:00 [INF] thr:1<> loader Requires:VER
2025-07-03 05:03:52.772 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-07-03 05:03:52.796 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-03 05:03:52.796 +08:00 [INF] thr:4<> Start init SafeController
2025-07-03 05:03:52.802 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-03 05:03:52.802 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-03 05:03:52.803 +08:00 [INF] thr:10<> Start init Buffer
2025-07-03 05:03:52.805 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-03 05:03:53.018 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-03 05:03:53.021 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-03 05:03:54.047 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-03 05:03:54.511 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-03 05:03:54.965 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-03 05:03:55.462 +08:00 [INF] thr:4<> PCServiceHost started
2025-07-03 05:05:41.574 +08:00 [INF] thr:4<> workplace:D:\EFEM\EFEM_SVC
2025-07-03 05:05:41.597 +08:00 [INF] thr:4<> Start init AntiStaticRod
2025-07-03 05:05:41.597 +08:00 [INF] thr:4<> Start init SafeController
2025-07-03 05:05:41.603 +08:00 [INF] thr:5<> Start init SelfCheck
2025-07-03 05:05:41.603 +08:00 [INF] thr:8<> Start init BehaviorDecides
2025-07-03 05:05:41.604 +08:00 [INF] thr:9<> Start init ProductModes
2025-07-03 05:05:41.604 +08:00 [INF] thr:10<> Start init Buffer
2025-07-03 05:05:41.719 +08:00 [INF] thr:4<> CleanLoader Init Start
2025-07-03 05:05:41.722 +08:00 [INF] thr:4<> 连接后接收一个 > 符号
2025-07-03 05:05:42.737 +08:00 [INF] thr:4<> loader Requires:RSIO 13
2025-07-03 05:05:43.203 +08:00 [INF] thr:4<> loader Requires:INPUT B 13
2025-07-03 05:05:43.664 +08:00 [INF] thr:4<> loader Requires:REMS
2025-07-03 05:05:44.142 +08:00 [INF] thr:4<> PCServiceHost started