2025-05-29 18:33:54.842 [Thd =1] Info Default DefectPicID:27192fb1-0793-4430-b175-f5ab0d455ae3 2025-05-29 18:33:54.844 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:55.111 [Thd =1] Info Default DefectPicID:27192fb1-0793-4430-b175-f5ab0d455ae3 2025-05-29 18:33:55.111 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:55.386 [Thd =1] Info Default DefectPicID:e656ce53-d868-47bc-9621-2632cea1fd18 2025-05-29 18:33:55.387 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:55.727 [Thd =1] Info Default DefectPicID:e656ce53-d868-47bc-9621-2632cea1fd18 2025-05-29 18:33:55.727 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:56.099 [Thd =1] Info Default DefectPicID:5d876cd9-72dc-41f5-bf1a-5bdb18eff76c 2025-05-29 18:33:56.099 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:56.478 [Thd =1] Info Default DefectPicID:71d252a1-06e6-424a-b7b1-78606b560b33 2025-05-29 18:33:56.479 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:56.858 [Thd =1] Info Default DefectPicID:9463fc2f-f22d-4517-8b16-2de273cb482f 2025-05-29 18:33:56.858 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:57.226 [Thd =1] Info Default DefectPicID:9463fc2f-f22d-4517-8b16-2de273cb482f 2025-05-29 18:33:57.227 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:57.588 [Thd =1] Info Default DefectPicID:fa8686df-51a5-4c21-9bf1-6d87808b41e1 2025-05-29 18:33:57.589 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:57.866 [Thd =1] Info Default DefectPicID:fa8686df-51a5-4c21-9bf1-6d87808b41e1 2025-05-29 18:33:57.867 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:58.147 [Thd =1] Info Default DefectPicID:35dce385-27d5-42f2-9a48-4b55513a63f7 2025-05-29 18:33:58.148 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:58.472 [Thd =1] Info Default DefectPicID:35dce385-27d5-42f2-9a48-4b55513a63f7 2025-05-29 18:33:58.472 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:58.744 [Thd =1] Info Default DefectPicID:0ad55cf2-4571-4a45-9139-9385a05c58b8 2025-05-29 18:33:58.744 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:59.009 [Thd =1] Info Default DefectPicID:0ad55cf2-4571-4a45-9139-9385a05c58b8 2025-05-29 18:33:59.009 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:59.304 [Thd =1] Info Default DefectPicID:593a6247-d1f7-4021-a510-6d239ac68edf 2025-05-29 18:33:59.304 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:59.597 [Thd =1] Info Default DefectPicID:f66627ab-0ed2-43ca-ab7c-6b0e0d1d38a6 2025-05-29 18:33:59.597 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:33:59.918 [Thd =1] Info Default DefectPicID:5a2b7c4b-9c2c-4150-8a68-f392910b2bee 2025-05-29 18:33:59.918 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:00.201 [Thd =1] Info Default DefectPicID:5a2b7c4b-9c2c-4150-8a68-f392910b2bee 2025-05-29 18:34:00.201 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:00.478 [Thd =1] Info Default DefectPicID:5a2b7c4b-9c2c-4150-8a68-f392910b2bee 2025-05-29 18:34:00.478 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:00.738 [Thd =1] Info Default DefectPicID:fe9acc41-a693-46c5-9406-637827f8dc14 2025-05-29 18:34:00.739 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:01.036 [Thd =1] Info Default DefectPicID:7facdd79-edf9-46b4-8c41-747b6c951e2a 2025-05-29 18:34:01.036 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:01.318 [Thd =1] Info Default DefectPicID:3f8486f0-7bc0-4889-a518-d67572db8092 2025-05-29 18:34:01.318 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:01.561 [Thd =1] Info Default DefectPicID:81784e26-1e42-4939-b3f6-6a488a2096f2 2025-05-29 18:34:01.561 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:01.844 [Thd =1] Info Default DefectPicID:b714e5e9-8d96-4fab-b94d-63bf13ec32ff 2025-05-29 18:34:01.844 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:02.131 [Thd =1] Info Default DefectPicID:b714e5e9-8d96-4fab-b94d-63bf13ec32ff 2025-05-29 18:34:02.132 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:02.450 [Thd =1] Info Default DefectPicID:8ac5b442-2a50-42c4-a008-5c5c03c35886 2025-05-29 18:34:02.450 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:03.357 [Thd =1] Info Default DefectPicID:b714e5e9-8d96-4fab-b94d-63bf13ec32ff 2025-05-29 18:34:03.357 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:03.730 [Thd =1] Info Default DefectPicID:b714e5e9-8d96-4fab-b94d-63bf13ec32ff 2025-05-29 18:34:03.730 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:05.377 [Thd =1] Info Default DefectPicID:b714e5e9-8d96-4fab-b94d-63bf13ec32ff 2025-05-29 18:34:05.377 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:06.684 [Thd =1] Info Default DefectPicID:8ac5b442-2a50-42c4-a008-5c5c03c35886 2025-05-29 18:34:06.684 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:07.587 [Thd =1] Info Default DefectPicID:8ac5b442-2a50-42c4-a008-5c5c03c35886 2025-05-29 18:34:07.587 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:08.058 [Thd =1] Info Default DefectPicID:8ac5b442-2a50-42c4-a008-5c5c03c35886 2025-05-29 18:34:08.058 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:08.594 [Thd =1] Info Default DefectPicID:8ac5b442-2a50-42c4-a008-5c5c03c35886 2025-05-29 18:34:08.594 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:41.957 [Thd =1] Info Default DefectPicID:544f552b-db50-4a5a-a6da-1d48a00a5d9b 2025-05-29 18:34:41.957 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:42.945 [Thd =1] Info Default DefectPicID:47fcfac0-2d5f-40c6-b233-48548a6c3df5 2025-05-29 18:34:42.945 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:43.570 [Thd =1] Info Default DefectPicID:02492dfe-a4b9-496e-8815-c0d2d2f7029e 2025-05-29 18:34:43.570 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:44.028 [Thd =1] Info Default DefectPicID:61a726fb-fd65-43b4-ad9e-8b29a6ee80d0 2025-05-29 18:34:44.028 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:44.377 [Thd =1] Info Default DefectPicID:5e7f6c6c-c519-426b-af17-7683fcfae85b 2025-05-29 18:34:44.377 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:44.712 [Thd =1] Info Default DefectPicID:5e7f6c6c-c519-426b-af17-7683fcfae85b 2025-05-29 18:34:44.712 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:44.912 [Thd =1] Info Default DefectPicID:5e7f6c6c-c519-426b-af17-7683fcfae85b 2025-05-29 18:34:44.912 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:45.266 [Thd =1] Info Default DefectPicID:e8971204-4767-488b-824e-020c0442d9ee 2025-05-29 18:34:45.267 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:45.678 [Thd =1] Info Default DefectPicID:e8971204-4767-488b-824e-020c0442d9ee 2025-05-29 18:34:45.679 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:46.063 [Thd =1] Info Default DefectPicID:1b2abd16-f07d-4f27-87d5-388a6690bd37 2025-05-29 18:34:46.064 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:46.377 [Thd =1] Info Default DefectPicID:1b2abd16-f07d-4f27-87d5-388a6690bd37 2025-05-29 18:34:46.378 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:46.727 [Thd =1] Info Default DefectPicID:1f4b1d54-c198-456d-90e0-64cd1fac5838 2025-05-29 18:34:46.727 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:47.037 [Thd =1] Info Default DefectPicID:d15ad5b1-4a0e-4e5b-aab8-0d35e8305e2d 2025-05-29 18:34:47.037 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:47.547 [Thd =1] Info Default DefectPicID:cbc7988e-71d8-4478-a5bb-e71dd55f0a4a 2025-05-29 18:34:47.547 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:47.796 [Thd =1] Info Default DefectPicID:8f4e439f-6366-46f4-b632-484fa767de0d 2025-05-29 18:34:47.797 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:48.025 [Thd =1] Info Default DefectPicID:b910134d-4823-4a65-a58c-69af8c45166a 2025-05-29 18:34:48.025 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:48.311 [Thd =1] Info Default DefectPicID:e1d45c9a-f97c-4179-afff-522445527d4e 2025-05-29 18:34:48.311 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:48.641 [Thd =1] Info Default DefectPicID:93bab9c3-9f99-4ebb-aa79-328ef3af2f7a 2025-05-29 18:34:48.641 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:48.888 [Thd =1] Info Default DefectPicID:ee19e85e-6292-483f-acff-ef93b1946661 2025-05-29 18:34:48.888 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:49.132 [Thd =1] Info Default DefectPicID:ee19e85e-6292-483f-acff-ef93b1946661 2025-05-29 18:34:49.133 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:49.501 [Thd =1] Info Default DefectPicID:4a0430cd-2ae6-462c-8631-092e39e599bf 2025-05-29 18:34:49.501 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:49.706 [Thd =1] Info Default DefectPicID:9151971b-397c-4769-99a1-6bc870c823c1 2025-05-29 18:34:49.706 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:50.070 [Thd =1] Info Default DefectPicID:dddca7ea-c343-4bb6-a489-9e9320ffbdc0 2025-05-29 18:34:50.070 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:50.352 [Thd =1] Info Default DefectPicID:4259494a-84e4-495f-865d-3c5613ee451c 2025-05-29 18:34:50.352 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:50.643 [Thd =1] Info Default DefectPicID:4259494a-84e4-495f-865d-3c5613ee451c 2025-05-29 18:34:50.644 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:50.901 [Thd =1] Info Default DefectPicID:96b8e38f-a94f-4007-8a88-b0f29329873a 2025-05-29 18:34:50.901 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:51.256 [Thd =1] Info Default DefectPicID:a99db789-a471-4a91-bfbf-ef0f67229eac 2025-05-29 18:34:51.257 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:51.559 [Thd =1] Info Default DefectPicID:c56a2b15-29c7-41f8-a1ec-a294b832ea12 2025-05-29 18:34:51.559 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:51.876 [Thd =1] Info Default DefectPicID:61e51f4e-5d08-4d3b-9f0c-82e81625ce93 2025-05-29 18:34:51.876 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:52.219 [Thd =1] Info Default DefectPicID:00e6d438-d809-44b3-8679-439b59698f59 2025-05-29 18:34:52.219 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:52.502 [Thd =1] Info Default DefectPicID:e245d0ba-bf7f-4dfd-ba0b-ab6c5f1e6106 2025-05-29 18:34:52.502 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:52.800 [Thd =1] Info Default DefectPicID:32265c2c-6a75-4e0b-881b-b83865d178a3 2025-05-29 18:34:52.800 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:53.118 [Thd =1] Info Default DefectPicID:95bc035b-b83e-4d86-a306-fc2bb1e00ce0 2025-05-29 18:34:53.118 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:53.401 [Thd =1] Info Default DefectPicID:fbd9d9d5-2825-452d-b2c0-91ac07be6ecd 2025-05-29 18:34:53.401 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:53.690 [Thd =1] Info Default DefectPicID:6dcbb9ff-0d32-47d3-a0d0-d2883f7a723e 2025-05-29 18:34:53.690 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:54.051 [Thd =1] Info Default DefectPicID:6dcbb9ff-0d32-47d3-a0d0-d2883f7a723e 2025-05-29 18:34:54.052 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:54.362 [Thd =1] Info Default DefectPicID:81b31f61-d7ee-4760-af5b-2aac14c304bb 2025-05-29 18:34:54.362 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:54.711 [Thd =1] Info Default DefectPicID:de571f65-4a5c-4273-99c1-e972aa00e850 2025-05-29 18:34:54.711 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:55.056 [Thd =1] Info Default DefectPicID:03366ace-b138-477e-b7a0-138bc4189bf7 2025-05-29 18:34:55.056 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:55.364 [Thd =1] Info Default DefectPicID:d7a73650-80e2-4261-bfbe-c5b96d963026 2025-05-29 18:34:55.364 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:55.657 [Thd =1] Info Default DefectPicID:41785679-f572-436e-8b11-b3c96b8dc2d2 2025-05-29 18:34:55.658 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:55.980 [Thd =1] Info Default DefectPicID:9ae8835d-0e5d-46b4-9ac3-a131c3ca9dcd 2025-05-29 18:34:55.980 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:56.253 [Thd =1] Info Default DefectPicID:87063997-565a-4fd6-a197-9bba314981c4 2025-05-29 18:34:56.253 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:56.564 [Thd =1] Info Default DefectPicID:07399307-1163-422b-baff-aa4da4b184a8 2025-05-29 18:34:56.564 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:56.887 [Thd =1] Info Default DefectPicID:63c4658f-9634-4e10-bef0-220cb661d285 2025-05-29 18:34:56.887 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:57.369 [Thd =1] Info Default DefectPicID:1dd11c8a-b20f-4341-b1c9-916e19649743 2025-05-29 18:34:57.369 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:57.638 [Thd =1] Info Default DefectPicID:58c4008d-1962-435b-a5b0-3aad5bc4243a 2025-05-29 18:34:57.638 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:57.951 [Thd =1] Info Default DefectPicID:58c4008d-1962-435b-a5b0-3aad5bc4243a 2025-05-29 18:34:57.951 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:58.259 [Thd =1] Info Default DefectPicID:5f9db56d-483e-4b1b-89d5-148c60f68cd0 2025-05-29 18:34:58.259 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:34:58.644 [Thd =1] Info Default DefectPicID:5f9db56d-483e-4b1b-89d5-148c60f68cd0 2025-05-29 18:34:58.644 [Thd =1] LogException Default 未将对象引用设置到对象的实例。 在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color) 在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message) 2025-05-29 18:35:12.277 [Thd =1] Info Default DP Name:2396677,recipeName:2396677 2025-05-29 18:35:42.795 [Thd =89] Warn Default 开始移出,移出过程中禁止操作 2025-05-29 18:35:43.796 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:35:44.047 [Thd =67] Info MMSFocus _isStop = true 2025-05-29 18:35:44.051 [Thd =67] Info Default StageOut 000 2025-05-29 18:35:44.061 [Thd =67] Info Default StageOut 111 2025-05-29 18:35:45.687 [Thd =67] Info Default StageOut Z 2025-05-29 18:35:47.981 [Thd =67] Info Default StageOut VectorA XY 2025-05-29 18:35:47.982 [Thd =67] Info Default StageOut SetVelocity XY 2025-05-29 18:35:49.795 [Thd =177] Info Default The Stage is Moved Out and the Alignment State is Reset!SetupName:2396677 2025-05-29 18:35:49.795 [Thd =146] Info Default 移出完成 2025-05-29 18:36:44.873 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:36:44.873 [Thd =184] Warn Default 开始移入,移入过程中禁止操作 2025-05-29 18:36:46.688 [Thd =168] Info Default ChangeLightPath: True! 2025-05-29 18:36:46.688 [Thd =168] Info MMSFocus _isStop = true 2025-05-29 18:36:47.810 [Thd =168] Info Default WindowCommand_Close debugMode:False 2025-05-29 18:36:47.810 [Thd =168] Info Default WindowCommand_Close! 2025-05-29 18:36:47.811 [Thd =168] Info Default StageBack 000 2025-05-29 18:36:47.812 [Thd =168] Info Default StageBack 111 2025-05-29 18:36:47.865 [Thd =168] Info Default StageBack Z 2025-05-29 18:36:50.884 [Thd =168] Info Default StageBack VectorA XY 2025-05-29 18:36:50.885 [Thd =168] Info Default StageBack SetVelocity XY 2025-05-29 18:36:50.903 [Thd =184] Info Default 移入完成 2025-05-29 18:36:50.903 [Thd =67] Info MMSFocus _isStop = true 2025-05-29 18:37:25.993 [Thd =1] Error Default FormSelectJob GetRecipe Start 2025-05-29 18:37:25.993 [Thd =1] Error Default FormSelectJob GetRecipe End 2025-05-29 18:37:26.038 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.Views.UCSetupMainMethodName:SelectProductSetup After Memory usage: 14050.52MB 2025-05-29 18:37:26.150 [Thd =1] Error Default Select Recipe start 2025-05-29 18:37:26.150 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:37:26.150 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:37:26.154 [Thd =1] Error Default Select Recipe end 2025-05-29 18:37:28.668 [Thd =134] Error Default ReadDeviceCmd failed. 2025-05-29 18:37:31.965 [Thd =128] Error Default ReadDeviceCmd failed. 2025-05-29 18:37:32.009 [Thd =136] Info Default m_bIdel 2025-05-29 18:37:33.966 [Thd =172] Info MMSFocus _isStop = true 2025-05-29 18:37:34.018 [Thd =172] Info Default IKAP Start of stream 2025-05-29 18:37:34.018 [Thd =172] Info Default Preview Camera StartSnap 2025-05-29 18:37:34.053 [Thd =172] Info Default IKAP End of stream 2025-05-29 18:37:34.053 [Thd =172] Info Default Preview Camera StopSnap 2025-05-29 18:37:34.090 [Thd =172] Info Default IKAP Start of stream 2025-05-29 18:37:34.090 [Thd =172] Info Default Preview Camera StartSnap 2025-05-29 18:37:34.091 [Thd =172] Info Default camera_line StartTrigger 2025-05-29 18:37:43.043 [Thd =172] Info Default m_focusMapMode：0 2025-05-29 18:37:43.044 [Thd =172] Info Default Axis Y:0,PulseWidth:0.002,TriggerDistance:0.0809527,BeginPoint:-250,EndPoint:-80 2025-05-29 18:37:53.012 [Thd =172] Info Default IKAP End of stream 2025-05-29 18:37:53.012 [Thd =172] Info Default Preview Camera StopSnap 2025-05-29 18:37:57.144 [Thd =172] Info Default RefLamp Rise: True! 2025-05-29 18:38:04.270 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:38:04.270 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:38:07.452 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:38:07.453 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:38:10.832 [Thd =109] Info Default Chuck vacuum close 2025-05-29 18:38:11.833 [Thd =184] Info Default ChuckVac: :False 2025-05-29 18:38:44.347 [Thd =1] Info Default GetMarkPos offsetX:843,offsety:504,bmp.Width:1224,bmp.Height:1024,p.X:756,p.Y:442,p.Width:268,p.Height:214 2025-05-29 18:38:48.672 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:578,p.Y:430,p.Width:182,p.Height:328 2025-05-29 18:38:50.745 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:38:50.745 [Thd =121] Info Default Chuck vacuum close 2025-05-29 18:38:51.746 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:38:57.689 [Thd =101] Info Default Chuck vacuum close 2025-05-29 18:38:58.690 [Thd =178] Info Default ChuckVac: :False 2025-05-29 18:39:10.404 [Thd =1] Info Default GetMarkPos offsetX:438,offsety:369,bmp.Width:1224,bmp.Height:1024,p.X:364,p.Y:286,p.Width:226,p.Height:270 2025-05-29 18:39:13.299 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:576,p.Y:434,p.Width:158,p.Height:270 2025-05-29 18:39:15.872 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:39:15.873 [Thd =91] Info Default Chuck vacuum close 2025-05-29 18:39:16.874 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:39:23.578 [Thd =150] Info Default Chuck vacuum close 2025-05-29 18:39:24.579 [Thd =73] Info Default ChuckVac: :False 2025-05-29 18:39:34.001 [Thd =1] Info Default GetMarkPos offsetX:440,offsety:331,bmp.Width:1224,bmp.Height:1024,p.X:266,p.Y:206,p.Width:510,p.Height:406 2025-05-29 18:39:36.098 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:288,p.Y:172,p.Width:436,p.Height:458 2025-05-29 18:39:37.942 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:456,p.Y:370,p.Width:396,p.Height:422 2025-05-29 18:39:40.552 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:39:40.552 [Thd =60] Info Default Chuck vacuum close 2025-05-29 18:39:41.553 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:39:43.417 [Thd =60] Info Default Alignment ... 2025-05-29 18:39:43.538 [Thd =172] Info Default Chuck vacuum close 2025-05-29 18:39:44.539 [Thd =150] Info Default ChuckVac: :False 2025-05-29 18:39:53.743 [Thd =121] Info Default Switch light... 2025-05-29 18:39:53.743 [Thd =150] Info Default OpenLamp Transmission 2025-05-29 18:39:54.552 [Thd =89] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:39:55.255 [Thd =150] Info Default CloseLamp Reflection 2025-05-29 18:39:57.298 [Thd =150] Info MMSFocus _isStop = true 2025-05-29 18:39:57.298 [Thd =172] Info Default Execute alignment 1/2 2025-05-29 18:40:01.407 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9998021,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:01.407 [Thd =150] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 18:40:01.529 [Thd =150] Info Default Flag:Fine1, Position:62.541637391687,-10.056958695912 2025-05-29 18:40:10.312 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9998783,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:10.312 [Thd =150] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 18:40:10.434 [Thd =150] Info Default Flag:Fine2, Position:-64.456949085296,-9.984763978066 2025-05-29 18:40:14.866 [Thd =149] Info Default Execute alignment 2/2 2025-05-29 18:40:23.251 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9995645,xOffSet:620,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:23.251 [Thd =150] Info Default D2DMatchMark ******** :errorX:8,errorY:147 2025-05-29 18:40:24.938 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.999528,xOffSet:620,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:26.629 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9997997,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:26.750 [Thd =150] Info Default Flag:Fine1, Position:62.5426030280201,-9.94610071211679 2025-05-29 18:40:35.528 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9990357,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:35.528 [Thd =150] Info Default D2DMatchMark ******** :errorX:1,errorY:147 2025-05-29 18:40:37.222 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9991679,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:38.910 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.999738,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:39.032 [Thd =150] Info Default Flag:Fine2, Position:-64.4560039691789,-9.94207194040788 2025-05-29 18:40:41.948 [Thd =55] Info Default Checking Mark ... 2025-05-29 18:40:50.339 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.99943,xOffSet:605,yOffSet:376,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:50.339 [Thd =150] Info Default D2DMatchMark ******** :errorX:-7,errorY:-136 2025-05-29 18:40:52.028 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9996017,xOffSet:605,yOffSet:376,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:53.725 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9998946,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:40:53.847 [Thd =150] Info Default Flag:Fine1, Position:62.6256499190302,-9.93563245641479 2025-05-29 18:41:02.629 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9993755,xOffSet:611,yOffSet:376,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:02.629 [Thd =150] Info Default D2DMatchMark ******** :errorX:-1,errorY:-136 2025-05-29 18:41:04.320 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9993406,xOffSet:611,yOffSet:376,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:06.009 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9993234,xOffSet:613,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:06.130 [Thd =150] Info Default Flag:Fine2, Position:-64.3729571420711,-9.93908569930884 2025-05-29 18:41:14.883 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9992565,xOffSet:614,yOffSet:675,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:14.883 [Thd =150] Info Default D2DMatchMark ******** :errorX:2,errorY:163 2025-05-29 18:41:16.580 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9968409,xOffSet:614,yOffSet:624,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:18.261 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9993868,xOffSet:612,yOffSet:514,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:19.868 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9999321,xOffSet:610,yOffSet:402,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:21.543 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9980657,xOffSet:611,yOffSet:478,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:23.189 [Thd =150] Info Default D2DSearchMark matchResult:0， score:0.9997072,xOffSet:612,yOffSet:510,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:41:23.326 [Thd =150] Info Default Flag:Fine3, Position:-64.4005783531866,-136.175757548424 2025-05-29 18:41:24.327 [Thd =150] Info Default IsAlignAngleOK fine1:62.6256499190302,-9.93563245641479,fine2:-64.3729571420711,-9.93908569930884 2025-05-29 18:41:24.327 [Thd =131] Info Default Height difference : 0.70 um 2025-05-29 18:41:24.327 [Thd =150] Info Default IsAlignAngleOK delta:0.0120000000071119. 2025-05-29 18:41:40.441 [Thd =150] Info MMSFocus _isStop = true 2025-05-29 18:41:40.442 [Thd =55] Info Default Alignment finish 2025-05-29 18:41:40.442 [Thd =96] Info Default Chuck vacuum open 2025-05-29 18:41:41.443 [Thd =150] Info Default ChuckVac: :True 2025-05-29 18:41:42.387 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:42:01.788 [Thd =1] Error Default CheckDPTaskState 检查数据准备数据问题！！ jobName: 2025-05-29 18:42:03.369 [Thd =1] Error Default CheckDPTaskState 检查数据准备数据问题！！ jobName: 2025-05-29 18:42:05.918 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:42:07.140 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:42:07.148 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:42:07.148 [Thd =1] Info Default MaskScaleY:1.00001096814312 2025-05-29 18:42:07.148 [Thd =1] Info Default MaskScaleX:1.00000522154835,Orth_Y_BeforR:-0.752196082836751 2025-05-29 18:42:07.148 [Thd =55] Info Default located_pos:(62.6256499190302, -9.93563245641479) 2025-05-29 18:42:07.148 [Thd =55] Info Default deltax_stage 0, deltay_stage:-126.998607061101. 2025-05-29 18:42:07.149 [Thd =55] Info Default MoveStageForMarkCol102 point (-64.3729571420711, -9.93563245641479), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.149 [Thd =55] Info Default located_pos:(-64.3729571420711, -9.93563245641479) 2025-05-29 18:42:07.149 [Thd =55] Info Default deltax_stage 126.236671849115, deltay_stage:0. 2025-05-29 18:42:07.149 [Thd =55] Info Default MoveStageForMarkCol101 point (62.5980287072535, -136.172307327359), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.149 [Thd =55] Info Default deltax_stage 0, deltay_stage:-126.998606061112. 2025-05-29 18:42:07.149 [Thd =55] Info Default MoveStageForMarkCol102 point (-64.4005773538588, -136.172307327359), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5980287072535, -136.172307327359). 2025-05-29 18:42:07.149 [Thd =55] Info Default located_pos:(-64.4005773538588, -136.172307327359) 2025-05-29 18:42:07.149 [Thd =55] Info Default AliPt:(62.6256499190302, -9.93563245641479), GDS2StagePt:(62.6256499190302, -9.93563245641479), XOffset:5, YOffset:5 2025-05-29 18:42:07.149 [Thd =55] Info Default AliPt:(-64.3729571420711, -9.93908569930884), GDS2StagePt:(-64.3729571420711, -9.93563245641479), XOffset:5, YOffset:5 2025-05-29 18:42:07.149 [Thd =55] Info Default AliPt:(-64.4005783531866, -136.175757548424), GDS2StagePt:(-64.4005773538588, -136.172307327359), XOffset:5, YOffset:5 2025-05-29 18:42:07.155 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:42:07.155 [Thd =1] Info Default MaskScaleY:1.00001096814312 2025-05-29 18:42:07.155 [Thd =1] Info Default MaskScaleX:1.00000522154835,Orth_Y_BeforR:-0.752196082836751 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage -6.47456019277094, deltay_stage:0. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6270665850087, -3.46107210865707), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170197334435. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol102 point (66.458768558353, -3.46107210865707), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6270665850087, -3.46107210865707). 2025-05-29 18:42:07.156 [Thd =1] Info Default located_pos:(66.458768558353, -3.46107210865707) 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 132.465318325936, deltay_stage:0. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5966658484194, -142.40095395328), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.697361460777. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1006956123574, -142.40095395328), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5966658484194, -142.40095395328). 2025-05-29 18:42:07.156 [Thd =1] Info Default located_pos:(-67.1006956123574, -142.40095395328) 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage -0.963571968662381, deltay_stage:0. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6258607533703, -8.97206046468661), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07420821793052. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7000689713008, -8.97206046468661), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6258607533703, -8.97206046468661). 2025-05-29 18:42:07.156 [Thd =1] Info Default located_pos:(63.7000689713008, -8.97206046468661) 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0.240817742558515, deltay_stage:0. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6255972269102, -10.176450204738), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247845281597479. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3777519453127, -10.176450204738), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6255972269102, -10.176450204738). 2025-05-29 18:42:07.156 [Thd =1] Info Default located_pos:(62.3777519453127, -10.176450204738) 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage -1.01635069307572, deltay_stage:0. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6258723016178, -8.91928173900986), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.740860856242. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1149885546239, -8.91928173900986), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6258723016178, -8.91928173900986). 2025-05-29 18:42:07.156 [Thd =1] Info Default located_pos:(-63.1149885546239, -8.91928173900986) 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0.28148253022536, deltay_stage:0. 2025-05-29 18:42:07.156 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6255883292523, -10.2171149933782), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.156 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.211733723498. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5861453942452, -10.2171149933782), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.6255883292523, -10.2171149933782). 2025-05-29 18:42:07.157 [Thd =1] Info Default located_pos:(-64.5861453942452, -10.2171149933782) 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 126.078913672857, deltay_stage:0. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5980632255272, -136.014549147325), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.946782597663. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3487193721353, -136.014549147325), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5980632255272, -136.014549147325). 2025-05-29 18:42:07.157 [Thd =1] Info Default located_pos:(-63.3487193721353, -136.014549147325) 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 127.214086745496, deltay_stage:0. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5978148440119, -137.149722247137), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.158090311866. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5602754678542, -137.149722247137), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5978148440119, -137.149722247137). 2025-05-29 18:42:07.157 [Thd =1] Info Default located_pos:(-64.5602754678542, -137.149722247137) 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 126.020078980065, deltay_stage:0. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5980760988507, -135.955714453124), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06555631282585. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6636324116765, -135.955714453124), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5980760988507, -135.955714453124). 2025-05-29 18:42:07.157 [Thd =1] Info Default located_pos:(63.6636324116765, -135.955714453124) 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 127.205434790672, deltay_stage:0. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5978167371027, -137.141070292107), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:42:07.157 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258228167716498. 2025-05-29 18:42:07.157 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3395885693862, -137.141070292107), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5978167371027, -137.141070292107). 2025-05-29 18:42:07.157 [Thd =1] Info Default located_pos:(62.3395885693862, -137.141070292107) 2025-05-29 18:43:18.808 [Thd =146] Error Default SyncSend recv cmd timeout 2025-05-29 18:44:16.976 [Thd =1] Info Default GetMarkPos offsetX:481,offsety:697,bmp.Width:1224,bmp.Height:1024,p.X:468,p.Y:602,p.Width:292,p.Height:226 2025-05-29 18:44:34.570 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:btnExecute_Click Before Memory usage: 14742.98MB 2025-05-29 18:44:35.849 [Thd =168] Info Default 设置光标定环境中，请等待...... 2025-05-29 18:44:35.849 [Thd =102] Info Default AutoLightInit******************DemarcatePoints Count:1 2025-05-29 18:44:35.850 [Thd =102] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:44:35.850 [Thd =102] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:44:35.851 [Thd =102] Info Default SetDistortionPara disaabled 2025-05-29 18:44:36.246 [Thd =102] Info MMSFocus _isStop = true 2025-05-29 18:44:36.246 [Thd =102] Info Default aSwitchIndex index:2 2025-05-29 18:44:36.246 [Thd =102] Info Default lens from ATF: 2025-05-29 18:44:36.246 [Thd =102] Info Default objCount:3 2025-05-29 18:44:36.246 [Thd =102] Info Default ratio:P200;objId:0 2025-05-29 18:44:36.246 [Thd =102] Info Default ratio:P140;objId:1 2025-05-29 18:44:36.246 [Thd =102] Info Default ratio:P100;objId:2 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:44:36.247 [Thd =102] Info Default lens from system settings: 2025-05-29 18:44:36.247 [Thd =102] Info Default systemlensettings lens count:3 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:P100;objId:0 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:P140;objId:1 2025-05-29 18:44:36.247 [Thd =102] Info Default ratio:P200;objId:2 2025-05-29 18:44:51.356 [Thd =102] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:44:51.356 [Thd =102] Info Default send switch cmd 2025-05-29 18:45:06.464 [Thd =102] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:45:06.464 [Thd =102] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 18:45:06.492 [Thd =102] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 18:45:06.493 [Thd =102] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 18:45:06.493 [Thd =102] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 18:45:06.493 [Thd =102] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 18:45:06.493 [Thd =102] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 18:45:06.493 [Thd =102] Info Default BaseScanObjectLine:------------------ 2025-05-29 18:45:06.493 [Thd =102] Info Default BaseScanObjectLine:***************** 2025-05-29 18:45:06.493 [Thd =102] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 18:45:06.493 [Thd =102] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426791068270479,StepStep:0.423459196471333,CosValueY:1,SinValueY:0 2025-05-29 18:45:06.493 [Thd =102] Info strip vectorBegin:(-31.193174,-7.549087),VectorEnd:(-36.473547,-7.549087),CaptureBegin:(-33.193174,-7.549087)，CaptureEnd：(-34.473547,-7.549087),StepScan:0.426791068270479 2025-05-29 18:45:06.493 [Thd =102] Info Default VectorBegin:(-31.193173824929,-7.54908668851218) 2025-05-29 18:45:07.739 [Thd =177] Info Default 打开光源，亮度：32% 2025-05-29 18:45:07.739 [Thd =54] Info Default OpenLamp Transmission 2025-05-29 18:45:08.340 [Thd =102] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:45:08.340 [Thd =70] Info Default 聚焦Track已关闭 2025-05-29 18:45:08.547 [Thd =100] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:45:08.750 [Thd =54] Info Default CloseLamp Reflection 2025-05-29 18:45:09.267 [Thd =99] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:09.467 [Thd =102] Info MMSFocus _isStop = true 2025-05-29 18:45:10.565 [Thd =54] Info Default PolarizationBaffleControl False: 3! 2025-05-29 18:45:10.669 [Thd =102] Info Default QuerySubstrateMode Line OK 2025-05-29 18:45:10.669 [Thd =180] Info Default 已切换到线阵聚焦模式 2025-05-29 18:45:11.068 [Thd =54] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:45:11.262 [Thd =73] Info Default ChangeLightPath: True! 2025-05-29 18:45:12.271 [Thd =102] Info Default SetFocusTrack OpenTrack OK 2025-05-29 18:45:12.271 [Thd =103] Info Default 聚焦Track已开启 2025-05-29 18:45:12.271 [Thd =102] Info Default CurrentSize:2048,2048 2025-05-29 18:45:12.271 [Thd =102] Info Default Camera size no change 2025-05-29 18:45:12.271 [Thd =100] Info Default 标定中，请等待...... 2025-05-29 18:45:12.272 [Thd =102] Info Default Set camera size success 2025-05-29 18:45:12.272 [Thd =102] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 18:45:13.248 [Thd =102] Info Default Set camera parameter 2025-05-29 18:45:13.251 [Thd =102] Info Default BUFFER_COUNT no change 2025-05-29 18:45:13.254 [Thd =102] Info Default scanStrips:1 2025-05-29 18:45:13.291 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:13.292 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:13.504 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:14.860 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:14.862 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:15.073 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:15.959 [Thd =54] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:16.428 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:16.429 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:16.641 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:17.527 [Thd =168] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:17.576 [Thd =102] Info Default AutoLightReturn:-------DB---------- 2025-05-29 18:45:17.829 [Thd =102] Info Default AutoLightReturn:31,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 18:45:18.249 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:18.250 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:18.465 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:19.350 [Thd =103] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:19.820 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:19.821 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:20.034 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:20.919 [Thd =103] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:21.388 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:21.389 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:21.600 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:22.490 [Thd =70] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:22.535 [Thd =102] Info Default AutoLightReturn:-------DB---------- 2025-05-29 18:45:22.830 [Thd =102] Info Default AutoLightReturn:30,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 18:45:23.252 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:23.254 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:23.465 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:24.366 [Thd =168] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:24.820 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:24.821 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:25.033 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:25.936 [Thd =70] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:26.388 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:26.390 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:26.601 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:27.504 [Thd =100] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:27.538 [Thd =102] Info Default AutoLightReturn:-------DB---------- 2025-05-29 18:45:27.720 [Thd =102] Info Default AutoLightReturn:29,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 18:45:28.141 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:28.142 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:28.354 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:29.249 [Thd =184] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:29.709 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:29.711 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:29.921 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:30.819 [Thd =54] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:31.277 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:45:31.278 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:45:31.490 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:32.377 [Thd =103] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:32.425 [Thd =102] Info Default AutoLightReturn:-------DB---------- 2025-05-29 18:45:32.696 [Thd =102] Info Default AutoLightReturn:29,confirm:0，stripsIndex：0,scanStrips.Count:1 2025-05-29 18:45:32.696 [Thd =102] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:32.696 [Thd =102] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:45:32.898 [Thd =184] Info Default OpenLamp Transmission 2025-05-29 18:45:33.686 [Thd =54] Info MMSFocus _isStop = true 2025-05-29 18:45:33.710 [Thd =155] Info Default PolarizationBaffleControl True: 1! 2025-05-29 18:45:34.215 [Thd =155] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:45:34.719 [Thd =184] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:45:34.719 [Thd =184] Info Default CloseLamp Reflection 2025-05-29 18:45:34.888 [Thd =54] Info Default QuerySubstrateMode Area OK 2025-05-29 18:45:34.888 [Thd =177] Info Default 已切换到面阵聚焦模式 2025-05-29 18:45:35.489 [Thd =54] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:45:35.489 [Thd =54] Info Default 聚焦Track已关闭 2025-05-29 18:45:35.750 [Thd =165] Info Default OpenLamp Transmission 2025-05-29 18:45:36.565 [Thd =151] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:45:36.728 [Thd =100] Info MMSFocus _isStop = true 2025-05-29 18:45:37.253 [Thd =177] Error Default SyncSend recv cmd timeout 2025-05-29 18:45:37.571 [Thd =165] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:45:37.571 [Thd =165] Info Default CloseLamp Reflection 2025-05-29 18:45:37.930 [Thd =100] Info Default QuerySubstrateMode Area OK 2025-05-29 18:45:37.930 [Thd =67] Info Default 已切换到面阵聚焦模式 2025-05-29 18:45:38.531 [Thd =100] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:45:38.531 [Thd =122] Info Default 聚焦Track已关闭 2025-05-29 18:45:38.593 [Thd =103] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:b__29_1 After Memory usage: 14600.25MB 2025-05-29 18:45:38.594 [Thd =70] Info Default 光标定完成！ 2025-05-29 18:46:26.582 [Thd =1] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:46:26.582 [Thd =1] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 18:46:41.869 [Thd =1] Info Default LineCameraStage:10 2025-05-29 18:46:42.787 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.Make0.UCMake0MethodName:Make0Calibration Before Memory usage: 14740.07MB 2025-05-29 18:46:42.795 [Thd =70] Info Default LineCameraStage:10 2025-05-29 18:46:42.795 [Thd =184] Info Default CurrentSize:2048,2048 2025-05-29 18:46:42.796 [Thd =184] Info Default Camera size no change 2025-05-29 18:46:42.796 [Thd =155] Info Default CurrentSize:2048,2048 2025-05-29 18:46:42.796 [Thd =155] Info Default Camera size no change 2025-05-29 18:46:42.797 [Thd =184] Info Default Set camera size success 2025-05-29 18:46:42.797 [Thd =184] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 18:46:43.270 [Thd =155] Info Default Set camera size success 2025-05-29 18:46:43.270 [Thd =155] Info Default Current:TDIStage：TDI128，Target：TDI128 2025-05-29 18:46:43.774 [Thd =184] Info Default Set camera parameter 2025-05-29 18:46:44.253 [Thd =184] Info Default BUFFER_COUNT no change 2025-05-29 18:46:44.754 [Thd =155] Info Default Set camera parameter 2025-05-29 18:46:44.757 [Thd =155] Info Default BUFFER_COUNT no change 2025-05-29 18:46:44.764 [Thd =70] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 18:46:44.764 [Thd =70] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 18:46:44.764 [Thd =70] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 18:46:44.764 [Thd =70] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 18:46:44.764 [Thd =70] Info Default BaseScanObjectLine:------------------ 2025-05-29 18:46:44.764 [Thd =70] Info Default BaseScanObjectLine:***************** 2025-05-29 18:46:44.764 [Thd =70] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 18:46:44.764 [Thd =70] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426791068270479,StepStep:0.423459196471333,CosValueY:1,SinValueY:0 2025-05-29 18:46:44.764 [Thd =70] Info strip vectorBegin:(-31.193174,-7.549087),VectorEnd:(-36.473547,-7.549087),CaptureBegin:(-33.193174,-7.549087)，CaptureEnd：(-34.473547,-7.549087),StepScan:0.426791068270479 2025-05-29 18:46:44.764 [Thd =70] Info Default VectorBegin:(-31.193173824929,-7.54908668851218) 2025-05-29 18:46:45.308 [Thd =100] Info Default 打开光源，亮度：29% 2025-05-29 18:46:45.308 [Thd =103] Info Default OpenLamp Transmission 2025-05-29 18:46:45.638 [Thd =70] Info MMSFocus _isStop = true 2025-05-29 18:46:46.117 [Thd =91] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:46:46.323 [Thd =103] Info Default OpenLamp Reflection 2025-05-29 18:46:46.841 [Thd =67] Error Default SyncSend recv cmd timeout 2025-05-29 18:46:46.841 [Thd =70] Info Default QuerySubstrateMode Line OK 2025-05-29 18:46:46.841 [Thd =151] Info Default 已切换到线阵聚焦模式 2025-05-29 18:46:48.138 [Thd =103] Info Default PolarizationBaffleControl False: 3! 2025-05-29 18:46:48.643 [Thd =103] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:46:48.835 [Thd =122] Info Default ChangeLightPath: True! 2025-05-29 18:46:48.836 [Thd =165] Info Default 设置Make0标定环境中,请等待...... 2025-05-29 18:46:48.836 [Thd =91] Info Default 标定中，请稍等...... 2025-05-29 18:46:50.838 [Thd =70] Info MMSFocus _isStop = true 2025-05-29 18:46:51.960 [Thd =54] Warn Default Optimum:-0.800um 2025-05-29 18:46:54.339 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:46:54.340 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:46:55.552 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:46:55.553 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:46:56.765 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:46:56.766 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:46:57.978 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:46:57.979 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:46:59.195 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:46:59.196 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:00.407 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:47:00.408 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:01.626 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:47:01.627 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:02.840 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:47:02.842 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:04.056 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:47:04.057 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:05.270 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:47:05.272 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:06.482 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 18:47:06.483 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.193173824929,EndPoint:34.4735470297404 2025-05-29 18:47:07.053 [Thd =70] Info Default FitPosition:-0.493507170834714,score:141.335988925076 2025-05-29 18:47:07.053 [Thd =177] Info Default Restore,Please wait...... 2025-05-29 18:47:07.053 [Thd =155] Info MMSFocus _isStop = true 2025-05-29 18:47:07.053 [Thd =54] Info Default OpenLamp Transmission 2025-05-29 18:47:07.865 [Thd =169] Info Default PolarizationBaffleControl True: 1! 2025-05-29 18:47:08.255 [Thd =155] Info Default QuerySubstrateMode Area OK 2025-05-29 18:47:08.255 [Thd =177] Info Default 已切换到面阵聚焦模式 2025-05-29 18:47:08.370 [Thd =169] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:47:08.856 [Thd =155] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:47:08.856 [Thd =177] Info Default 聚焦Track已关闭 2025-05-29 18:47:08.874 [Thd =54] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:47:08.874 [Thd =54] Info Default CloseLamp Reflection 2025-05-29 18:47:09.944 [Thd =177] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.Make0.UCMake0MethodName:b__18_1 End Memory usage: 14611.28MB 2025-05-29 18:47:11.402 [Thd =155] Error Default SyncSend recv cmd timeout 2025-05-29 18:48:07.719 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.Make0.UCMake0MethodName:ButtonMake_Click Before Memory usage: 14110.84MB 2025-05-29 18:48:07.930 [Thd =91] Info MMSFocus _isStop = true 2025-05-29 18:48:20.888 [Thd =91] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.Make0.UCMake0+<>c__DisplayClass28_0MethodName:b__1 End Memory usage: 14151.04MB 2025-05-29 18:48:29.692 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:btnXYCalib_Click Before Memory usage: 14147.09MB 2025-05-29 18:48:29.862 [Thd =169] Info Default 设置RTB 标定环境中,请等待 ...... 2025-05-29 18:48:29.863 [Thd =102] Info Default AutoLightInit******************DemarcatePoints Count:1 2025-05-29 18:48:29.863 [Thd =102] Info Default SetDistortionPara disaabled 2025-05-29 18:48:29.896 [Thd =102] Info MMSFocus _isStop = true 2025-05-29 18:48:29.896 [Thd =102] Info Default aSwitchIndex index:2 2025-05-29 18:48:29.896 [Thd =102] Info Default lens from ATF: 2025-05-29 18:48:29.897 [Thd =102] Info Default objCount:3 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:P200;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:P140;objId:1 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:P100;objId:2 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default lens from system settings: 2025-05-29 18:48:29.897 [Thd =102] Info Default systemlensettings lens count:3 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:P100;objId:0 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:P140;objId:1 2025-05-29 18:48:29.897 [Thd =102] Info Default ratio:P200;objId:2 2025-05-29 18:48:45.010 [Thd =102] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:48:45.010 [Thd =102] Info Default send switch cmd 2025-05-29 18:49:00.119 [Thd =102] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:49:00.119 [Thd =102] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 18:49:00.147 [Thd =102] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 18:49:00.148 [Thd =102] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 18:49:00.148 [Thd =102] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 18:49:00.148 [Thd =102] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 18:49:00.148 [Thd =102] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 18:49:00.148 [Thd =102] Info Default BaseScanObjectLine:------------------ 2025-05-29 18:49:00.148 [Thd =102] Info Default BaseScanObjectLine:***************** 2025-05-29 18:49:00.148 [Thd =102] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 18:49:00.149 [Thd =102] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426791068270479,StepStep:0.423459196471333,CosValueY:1,SinValueY:0 2025-05-29 18:49:00.149 [Thd =102] Info Default deltax_stage -2.37632159192192, deltay_stage:0. 2025-05-29 18:49:00.149 [Thd =102] Info Default MoveStageForMarkCol101 point (62.6261698700157, -7.55931080760894), GDS ref(-63118665, 63056476), gdsObject(-65494999, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:49:00.149 [Thd =102] Info Default deltax_stage 0, deltay_stage:-96.4804177889691. 2025-05-29 18:49:00.149 [Thd =102] Info Default MoveStageForMarkCol102 point (-33.8542479189533, -7.55931080760894), GDS ref(-65494999, 63056476), gdsObject(-65494999, -33425000), stageRef(62.6261698700157, -7.55931080760894). 2025-05-29 18:49:00.149 [Thd =102] Info Default located_pos:(-33.8542479189533, -7.55931080760894) 2025-05-29 18:49:00.149 [Thd =102] Info strip vectorBegin:(-31.223707,-7.540335),VectorEnd:(-36.50408,-7.540335),CaptureBegin:(-33.223707,-7.540335)，CaptureEnd：(-34.50408,-7.540335),StepScan:0.426791068270479 2025-05-29 18:49:00.149 [Thd =102] Info Default VectorBegin:(-31.2237067206828,-7.54033488360894) 2025-05-29 18:49:01.395 [Thd =121] Info Default 打开光源，亮度：29% 2025-05-29 18:49:01.395 [Thd =160] Info Default OpenLamp Transmission 2025-05-29 18:49:01.996 [Thd =102] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:49:01.996 [Thd =180] Info Default 聚焦Track已关闭 2025-05-29 18:49:02.203 [Thd =121] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:49:02.405 [Thd =160] Info Default OpenLamp Reflection 2025-05-29 18:49:02.912 [Thd =67] Error Default SyncSend recv cmd timeout 2025-05-29 18:49:03.122 [Thd =102] Info MMSFocus _isStop = true 2025-05-29 18:49:04.223 [Thd =160] Info Default PolarizationBaffleControl False: 0! 2025-05-29 18:49:04.325 [Thd =102] Info Default QuerySubstrateMode Line OK 2025-05-29 18:49:04.325 [Thd =180] Info Default 已切换到线阵聚焦模式 2025-05-29 18:49:04.727 [Thd =160] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:49:04.918 [Thd =171] Info Default ChangeLightPath: True! 2025-05-29 18:49:05.927 [Thd =102] Info Default SetFocusTrack OpenTrack OK 2025-05-29 18:49:05.927 [Thd =121] Info Default 聚焦Track已开启 2025-05-29 18:49:05.927 [Thd =67] Info Default CurrentSize:2048,2048 2025-05-29 18:49:05.927 [Thd =67] Info Default Camera size no change 2025-05-29 18:49:05.927 [Thd =180] Info Default RTB 标定中,请等待 ...... 2025-05-29 18:49:05.929 [Thd =67] Info Default Set camera size success 2025-05-29 18:49:05.929 [Thd =67] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 18:49:06.906 [Thd =67] Info Default Set camera parameter 2025-05-29 18:49:06.909 [Thd =67] Info Default BUFFER_COUNT no change 2025-05-29 18:49:06.913 [Thd =102] Info Default SetDistortionPara disaabled 2025-05-29 18:49:06.913 [Thd =102] Info Default scanStrips:1 2025-05-29 18:49:06.948 [Thd =102] Info Default m_focusMapMode：0 2025-05-29 18:49:06.950 [Thd =102] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:33.2237067206828,EndPoint:34.5040799254943 2025-05-29 18:49:07.926 [Thd =102] Info Default Get_Tolerance_and_Rounding:******Tolerance******** 2025-05-29 18:49:08.910 [Thd =102] Info Default Get_Tolerance_and_Rounding:-----------Tolerance------------- 2025-05-29 18:49:08.933 [Thd =180] Info Default OpenLamp Transmission 2025-05-29 18:49:09.330 [Thd =73] Info MMSFocus _isStop = true 2025-05-29 18:49:09.741 [Thd =121] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:49:10.532 [Thd =73] Info Default QuerySubstrateMode Area OK 2025-05-29 18:49:10.532 [Thd =143] Info Default 已切换到面阵聚焦模式 2025-05-29 18:49:10.757 [Thd =180] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:49:10.757 [Thd =180] Info Default CloseLamp Reflection 2025-05-29 18:49:11.133 [Thd =73] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:49:11.133 [Thd =73] Info Default 聚焦Track已关闭 2025-05-29 18:49:11.764 [Thd =73] Info Default 公差标定完成 2025-05-29 18:49:11.783 [Thd =102] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:b__22_1 Before Memory usage: 14031.54MB 2025-05-29 18:49:13.280 [Thd =160] Error Default SyncSend recv cmd timeout 2025-05-29 18:50:00.862 [Thd =1] Info Default GetMarkPos offsetX:529,offsety:334,bmp.Width:1224,bmp.Height:1024,p.X:482,p.Y:222,p.Width:250,p.Height:228 2025-05-29 18:50:11.687 [Thd =1] Info Default GetMarkPos offsetX:881,offsety:465,bmp.Width:1224,bmp.Height:1024,p.X:382,p.Y:364,p.Width:568,p.Height:394 2025-05-29 18:50:16.535 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:btnFlatfield_Click Before Memory usage: 14032.26MB 2025-05-29 18:50:16.589 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:btnFlatfield_Click End Memory usage: 14046.29MB 2025-05-29 18:50:18.104 [Thd =148] Info Default Flatfield Corrention Init****************** 2025-05-29 18:50:18.105 [Thd =102] Info Default 设置平场校正环境中...... 2025-05-29 18:50:18.821 [Thd =148] Info MMSFocus _isStop = true 2025-05-29 18:50:18.821 [Thd =148] Info Default aSwitchIndex index:2 2025-05-29 18:50:18.821 [Thd =148] Info Default lens from ATF: 2025-05-29 18:50:18.822 [Thd =148] Info Default objCount:3 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:P200;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:P140;objId:1 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:P100;objId:2 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default lens from system settings: 2025-05-29 18:50:18.822 [Thd =148] Info Default systemlensettings lens count:3 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:P100;objId:0 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:P140;objId:1 2025-05-29 18:50:18.822 [Thd =148] Info Default ratio:P200;objId:2 2025-05-29 18:50:33.929 [Thd =148] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:50:33.929 [Thd =148] Info Default send switch cmd 2025-05-29 18:50:49.038 [Thd =148] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:50:49.038 [Thd =148] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 18:50:49.066 [Thd =148] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 18:50:49.067 [Thd =148] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 18:50:49.067 [Thd =148] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 18:50:49.067 [Thd =148] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 18:50:49.068 [Thd =148] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 18:50:49.068 [Thd =148] Info Default BaseScanObjectLine:------------------ 2025-05-29 18:50:49.068 [Thd =148] Info Default BaseScanObjectLine:***************** 2025-05-29 18:50:49.068 [Thd =148] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 18:50:49.068 [Thd =148] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426791068270479,StepStep:0.423459196471333,CosValueY:1,SinValueY:0 2025-05-29 18:50:49.068 [Thd =148] Info strip vectorBegin:(-4.639149,-5.59259),VectorEnd:(-9.919522,-5.59259),CaptureBegin:(-6.639149,-5.59259)，CaptureEnd：(-7.919522,-5.59259),StepScan:0.426791068270479 2025-05-29 18:50:49.770 [Thd =173] Info Default 打开光源，亮度：29% 2025-05-29 18:50:49.770 [Thd =155] Info Default OpenLamp Transmission 2025-05-29 18:50:50.371 [Thd =148] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:50:50.371 [Thd =173] Info Default 聚焦Track已关闭 2025-05-29 18:50:50.584 [Thd =119] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:50:50.776 [Thd =155] Info Default OpenLamp Reflection 2025-05-29 18:50:51.040 [Thd =148] Info MMSFocus _isStop = true 2025-05-29 18:50:51.302 [Thd =146] Error Default SyncSend recv cmd timeout 2025-05-29 18:50:52.243 [Thd =148] Info Default QuerySubstrateMode Line OK 2025-05-29 18:50:52.243 [Thd =173] Info Default 已切换到线阵聚焦模式 2025-05-29 18:50:52.594 [Thd =155] Info Default PolarizationBaffleControl False: 3! 2025-05-29 18:50:53.096 [Thd =155] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:50:53.291 [Thd =70] Info Default ChangeLightPath: True! 2025-05-29 18:50:53.845 [Thd =148] Info Default SetFocusTrack OpenTrack OK 2025-05-29 18:50:53.845 [Thd =148] Info Default OpenLamp Transmission 2025-05-29 18:50:53.845 [Thd =155] Info Default Open lamp，Power:29% 2025-05-29 18:50:53.845 [Thd =173] Info Default 聚焦Track已开启 2025-05-29 18:50:54.654 [Thd =146] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:50:54.856 [Thd =148] Info Default CloseLamp Reflection 2025-05-29 18:50:56.670 [Thd =148] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:50:56.672 [Thd =70] Info Default 平场校正中,请等待 ...... 2025-05-29 18:50:56.672 [Thd =148] Info Default FlatfieldCorrention SetCameraParam.ImageSize:2032,2048,Stages:256 2025-05-29 18:50:56.672 [Thd =148] Info Default CurrentSize:2048,2048 2025-05-29 18:50:56.672 [Thd =148] Info Default Camera size no change 2025-05-29 18:50:56.673 [Thd =146] Info Default 扫描图片...... 2025-05-29 18:50:56.673 [Thd =148] Info Default Set camera size success 2025-05-29 18:50:56.673 [Thd =148] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 18:50:57.650 [Thd =148] Info Default Set camera parameter 2025-05-29 18:50:57.653 [Thd =148] Info Default BUFFER_COUNT no change 2025-05-29 18:51:02.656 [Thd =148] Info Default FlatfieldCorrention scanStrips:1,Intensity:29 2025-05-29 18:51:02.656 [Thd =148] Info Default FlatfieldCorrention stripsIndex:0,lightIndex:0,Light:29 2025-05-29 18:51:02.656 [Thd =148] Info Default FlatfieldCorrention strip.VectorBegin.X:-4.63914865661927,strip.VectorBegin.Y:-5.59259022386639 2025-05-29 18:51:03.000 [Thd =148] Info Default m_focusMapMode：0 2025-05-29 18:51:03.001 [Thd =148] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:6.63914865661927,EndPoint:7.91952186143071 2025-05-29 18:51:03.001 [Thd =148] Info Default FlatfieldCorrention strip.VectorBegin.X:-9.91952186143071,strip.VectorBegin.Y:-5.59259022386639 2025-05-29 18:51:03.213 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\Flatfield 2025-05-29 18:51:14.047 [Thd =148] Info Default FlatfieldCorrention stripsIndex:0,lightIndex:1,Light:28 2025-05-29 18:51:14.047 [Thd =148] Info Default FlatfieldCorrention strip.VectorBegin.X:-4.63914865661927,strip.VectorBegin.Y:-5.59259022386639 2025-05-29 18:51:14.470 [Thd =148] Info Default m_focusMapMode：0 2025-05-29 18:51:14.471 [Thd =148] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:6.63914865661927,EndPoint:7.91952186143071 2025-05-29 18:51:14.471 [Thd =148] Info Default FlatfieldCorrention strip.VectorBegin.X:-9.91952186143071,strip.VectorBegin.Y:-5.59259022386639 2025-05-29 18:51:14.683 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\Flatfield 2025-05-29 18:51:15.564 [Thd =70] Error Default SyncSend recv cmd timeout 2025-05-29 18:51:25.517 [Thd =148] Info Default FlatfieldCorrention stripsIndex:0,lightIndex:2,Light:29 2025-05-29 18:51:25.517 [Thd =148] Info Default FlatfieldCorrention strip.VectorBegin.X:-4.63914865661927,strip.VectorBegin.Y:-5.59259022386639 2025-05-29 18:51:25.940 [Thd =148] Info Default m_focusMapMode：0 2025-05-29 18:51:25.941 [Thd =148] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:6.63914865661927,EndPoint:7.91952186143071 2025-05-29 18:51:25.941 [Thd =148] Info Default FlatfieldCorrention strip.VectorBegin.X:-9.91952186143071,strip.VectorBegin.Y:-5.59259022386639 2025-05-29 18:51:26.154 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\Flatfield 2025-05-29 18:51:27.050 [Thd =102] Error Default SyncSend recv cmd timeout 2025-05-29 18:51:37.188 [Thd =119] Info Default OpenLamp Transmission 2025-05-29 18:51:37.280 [Thd =146] Info MMSFocus _isStop = true 2025-05-29 18:51:37.997 [Thd =155] Info Default PolarizationBaffleControl True: 1! 2025-05-29 18:51:38.482 [Thd =146] Info Default QuerySubstrateMode Area OK 2025-05-29 18:51:38.482 [Thd =70] Info Default 已切换到面阵聚焦模式 2025-05-29 18:51:38.502 [Thd =155] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:51:39.013 [Thd =119] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:51:39.013 [Thd =119] Info Default CloseLamp Reflection 2025-05-29 18:51:39.083 [Thd =146] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:51:39.083 [Thd =146] Info Default 聚焦Track已关闭 2025-05-29 18:51:40.021 [Thd =146] Info Default 平场校正中,请等待 ...... 2025-05-29 18:51:40.474 [Thd =130] Info Default 校正完成 2025-05-29 18:51:41.537 [Thd =70] Error Default SyncSend recv cmd timeout 2025-05-29 18:52:03.136 [Thd =1] Info Default CDdefectResolution is 5 2025-05-29 18:52:03.136 [Thd =1] Info Default PHdefectResolution is 0.5 2025-05-29 18:52:03.136 [Thd =1] Info Default CDdefectResolutionBil is 0.5 2025-05-29 18:52:10.957 [Thd =1] Info Default Licensed has techLevel count:3 2025-05-29 18:52:10.958 [Thd =1] Info Default MultiInspect:ContinueScanStrip:0 2025-05-29 18:52:10.958 [Thd =1] Info Default ######################################Start inspect################################################# 2025-05-29 18:52:10.958 [Thd =180] Info Default 开始检查！ 2025-05-29 18:52:12.182 [Thd =1] Info Default Computed strip0Starting point GDS coordinates，StarPoint.X:-69593259,66888220 ，GDSStep:2016，stripNo:0，PixelX_line:0.208396362 2025-05-29 18:52:12.182 [Thd =103] Info Default 初始化插件 2025-05-29 18:52:12.182 [Thd =148] Info Default CurrentSize:2048,2048 2025-05-29 18:52:12.182 [Thd =148] Info Default Camera size no change 2025-05-29 18:52:12.182 [Thd =1] Info Default CheckSkipAlignment Check that the alignment is valid! IsFinished:True 2025-05-29 18:52:12.182 [Thd =1] Info Default CheckSkipAlignment Check that the alignment is valid! IsFinished:True 2025-05-29 18:52:12.183 [Thd =170] Info Default 设置 TDI 相机参数... 2025-05-29 18:52:12.183 [Thd =148] Info Default Set camera size success 2025-05-29 18:52:12.183 [Thd =148] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 18:52:12.183 [Thd =155] Info Default Start [1/1] 2025-05-29 18:52:12.185 [Thd =73] Info Default 初始化DB目录 2025-05-29 18:52:12.220 [Thd =122] Info Default m_bIdel 2025-05-29 18:52:12.304 [Thd =1] Info Default deltax_stage -6.47456019277094, deltay_stage:0. 2025-05-29 18:52:12.304 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6270665850087, -3.46107210865707), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:52:12.304 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170197334435. 2025-05-29 18:52:12.304 [Thd =1] Info Default MoveStageForMarkCol102 point (66.458768558353, -3.46107210865707), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6270665850087, -3.46107210865707). 2025-05-29 18:52:12.304 [Thd =1] Info Default located_pos:(66.458768558353, -3.46107210865707) 2025-05-29 18:52:12.304 [Thd =1] Info Default deltax_stage 0, deltay_stage:-126.998607061101. 2025-05-29 18:52:12.304 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.3729571420711, -9.93563245641479), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6256499190302, -9.93563245641479). 2025-05-29 18:52:12.304 [Thd =1] Info Default located_pos:(-64.3729571420711, -9.93563245641479) 2025-05-29 18:52:12.304 [Thd =146] Info Default Measuring the height difference of inspection area 2025-05-29 18:52:13.160 [Thd =148] Info Default Set camera parameter 2025-05-29 18:52:13.163 [Thd =148] Info Default BUFFER_COUNT no change 2025-05-29 18:52:13.164 [Thd =148] Info Default Camera 9e3fbb4c-fa98-4ba5-a2be-ebc277141c09 Parameter setting completed 2025-05-29 18:52:13.218 [Thd =39] Error Default ReadDeviceCmd failed. 2025-05-29 18:52:20.402 [Thd =168] Info Default 初始化DPU服务器！ 2025-05-29 18:52:20.402 [Thd =102] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 18:52:22.798 [Thd =94] Error Default ReadDeviceCmd failed. 2025-05-29 18:52:25.812 [Thd =119] Error Default The DPU online and offline message was received！{"KeepTimeStamp":633917,"ServiceStartTime":"2025\/5\/29 18:30:25","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:52:25.812 [Thd =170] Error Default The DPU online and offline message was received！{"KeepTimeStamp":633917,"ServiceStartTime":"2025\/5\/29 18:30:37","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:52:26.319 [Thd =103] Error Default The DPU online and offline message was received！{"KeepTimeStamp":633921,"ServiceStartTime":"2025\/5\/29 18:50:19","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:52:26.368 [Thd =148] Error Default The DPU online and offline message was received！{"KeepTimeStamp":633921,"ServiceStartTime":"2025\/5\/29 18:50:07","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:52:26.813 [Thd =102] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 18:52:26.829 [Thd =1] Info Default Register inspect event！ 2025-05-29 18:52:26.855 [Thd =1] Info Default initial*****Light_intensity:29, min:10, max:220 2025-05-29 18:52:26.855 [Thd =119] Info Default 初始化检测数据 2025-05-29 18:52:26.856 [Thd =1] Info Default ***gds clip thread num is 6 2025-05-29 18:52:26.856 [Thd =1] Info ********************corePlug version is {0} **************** 3.0SPC200 2025-05-29 18:52:26.856 [Thd =1] Info Default Positioning parameters: the reference point GDS_X: -63118665, reference point GDS_Y: -63943524, reference point Stage_X: -64.3729571420711, reference point Stage_Y: -9.93563245641479, starting point GDS_X: -69593259, starting point GDS_Y: 66888220 2025-05-29 18:52:26.856 [Thd =73] Info Default Use Positive film 2025-05-29 18:52:26.856 [Thd =73] Info Default m_start_strip_no:0 2025-05-29 18:52:26.856 [Thd =73] Info Default BINING TEST 0802 jMInspectPara.m_bin:1 2025-05-29 18:52:26.856 [Thd =73] Info Default Parameters passed to Core SetDie2DBPara:{"m_gdsPath":"Z:\\design2\\M0201Z_100.gds","m_layerMode":0,"m_layerNo":26,"m_layerNo2":0,"m_bMirrorX":true,"m_org_img_width":2048,"m_width":520,"m_height":512,"m_pixelSizeX":0.208396362,"m_pixelSizeY":0.208396362,"m_pixelSizeX_Len":0.208396362,"m_pixelSizeY_Len":0.208396362,"m_gridlen":1,"m_channel":4,"m_overlay_width":28,"m_overlay_height":28,"m_OpticalSourceType":0,"m_Scale":1.0,"m_Rotate":0.0,"m_row":1323,"m_col":1292,"m_algV":2,"m_CDprecisionMode":0,"m_ParprecisionMode":1,"m_batchNum":20,"m_fillPath":null,"m_bCPUFill":false,"m_scanMode":0,"m_min_optical":10,"m_max_optical":220,"m_bAreaInspection":true,"m_beginX":-69593259,"m_beginY":66888220,"m_endX":69347346,"m_endY":-66642308,"m_noInspectArea":"-64082243,64130696,-62877846,62808628|-64135022,-62685765,-62837180,-64156653|62960908,-62891689,64096087,-64103009|62902072,64122044,64087434,62798245","m_Resolution_Defect":1,"m_Combine_defect_distance":40,"m_grid_path":"c:/grid","m_bsave_grid":false,"m_inspect_OverlayX":16,"m_inspect_OverlayY":16,"m_mask_inspection_mode":0,"m_unpattern_mask_inspect_size":0,"m_left_thrd":0,"m_right_thrd":0,"FilterKernelNum":1,"m_gray_threshold":0,"iBlackOffset":0,"caliDustThd":0,"m_Resolution_IntSec_Defect":0,"m_GrayDiffThd":120,"m_PinholeThd":20,"m_IslandThd":20,"m_DefectAreaThrd":0.0,"m_rowColScan":1,"m_mask_pattern_mode_mask":3103,"m_AL":1,"m_lcol":1252,"m_tolerance_mode":0,"m_x_tolerance":-0.086,"m_y_tolerance":-0.075,"m_CD_Defect_resolution":5.0,"m_pinhole_Defect_resolution":0.5,"m_degreeThrd":44,"m_cornerThrd":1,"m_Lens_multiplex":24,"m_offsetX":0,"m_DefectCombine":1,"m_DPPath":"\\dp\\2396678\\data","m_bUseDP":true,"m_pyramid_factor":1,"m_gds_clip_thread_num":6,"m_total_strip":331,"m_strip_nos":null,"m_resultPath":"\\result\\MaskDefectImages\\2025-05-29\\rcp_DB_1/","m_line_camera_ud_offset":-20,"m_line_camera_lr_offset":4,"m_start_strip_no":0,"m_bin":1,"m_picPath":"\\result\\MaskAllImages\\2025-05-29\\rcp_DB_1/","m_optical_head_total":0,"m_inner_round":0.35,"m_optical_head_id":0,"m_outer_round":0.35,"m_compensate":0.0,"m_row_die":0,"m_adjust_org_img_width":0,"m_adjust_flag":0,"m_adjust_u0":0.0,"m_adjust_a":0.0,"m_adjust_b":0.0,"m_adjustLeft_shift":0,"m_adjustRight_shift":0,"m_rough_reg_gray_Thrd":0,"m_fine_reg_gray_Thrd":0,"m_DPU_correction":0,"m_pinhole_range":0,"die_count":0,"m_CNT_width":5.0,"m_CNT_thrd":20.0,"m_CD2_Defect_resolution":0.5,"m_DD_Alg":0,"m_LineThrd_minX":0,"m_LineThrd_minY":0,"m_LineThrd_maxX":0,"m_LineThrd_maxY":0,"m_turbo_alg":false,"m_PSM":false,"m_CellShift_real_physical_distance":3.52,"m_CellShift_subthrd_mask_mode":2,"m_DD_range_max":0,"m_DD_range_min":0,"m_DD_min_gay_diff":0,"m_DD_range_ra":0,"m_T_collect":[220,225,0,0,1130102784,1065353216,1065353216,0,0,10],"m_R_collect":[200,150,90,1128792064,1128792064,1065353216,1065353216,0,0,0],"m_simple_gray_defect_sum_thrd_DD":30,"m_simple_gray_defect_DD":false,"m_die_phy_width":0.0,"m_die_phy_height":0.0,"m_die_cycle_phy_width":0.0,"m_die_cycle_phy_height":0.0,"m_normal_vector_level":1,"m_gray_diff_level":1,"m_edge_defect_level":2,"m_line_camera_ud_offset_f":-20.0,"m_mask_inspection_mode_ex":0,"m_CS_x_use":0,"m_CS_y_use":0,"m_CS_y_real_physical_distance":0.0,"m_CS_y_subthrd_mask_mode":2,"m_Edge_1_thrd_mode":2,"m_Edge_2_thrd_mode":1,"m_Gray_thrd_mode":2,"m_line_camera_lr_offset_f":4.5,"SL_Edge_switch":2,"SL_Edge2_switch":0,"crDrop_switch":0,"ud_decimal_right":-20.0,"lr_decimal_right":4.5} 2025-05-29 18:52:26.857 [Thd =73] Info Default m_line_camera_cols:313 2025-05-29 18:52:26.857 [Thd =73] Info Default AllocHGlobal img mem pic_count:313, img_w:2032, img_h:2048 2025-05-29 18:52:26.857 [Thd =73] Info Default Set distortion correction parameters Star,org_img_width:2048,MaskInspectMode:Pattern 2025-05-29 18:52:26.859 [Thd =73] Info Default SetDistortionPara disaabled 2025-05-29 18:52:26.859 [Thd =73] Info Default Set distortion correction parameters End 2025-05-29 18:52:26.859 [Thd =73] Info Default InitDie2DBRes Argument： width:520, height:2048, strip_sum(Grid.Rows):1323,pic_count(Grid2.Cols):1252,pic_count_pack(Grid.Cols):1292,max_batch:20,mode:0,m_channel:4 2025-05-29 18:52:27.766 [Thd =73] Info Default InitDie2DBRes Success!!!! 2025-05-29 18:52:29.485 [Thd =91] Info Default DemarcateInspectZ:-4.09999862313271 2025-05-29 18:52:36.280 [Thd =91] Info Default DemarcateInspectZ:-4.90000145509839 2025-05-29 18:52:43.281 [Thd =91] Info Default DemarcateInspectZ:-5.49999997019768 2025-05-29 18:52:50.062 [Thd =91] Info Default DemarcateInspectZ:-5.40000153705478 2025-05-29 18:52:50.064 [Thd =91] Info Default MarkHeightDifference:1.40000134706497 2025-05-29 18:52:50.064 [Thd =155] Info Default Difference of the Inspection Area1.40μm 2025-05-29 18:53:14.324 [Thd =1] Info Default Successful alignment！ 2025-05-29 18:53:14.325 [Thd =130] Info Default 对准完成！ 2025-05-29 18:53:14.325 [Thd =170] Info Default 稍等！设置相机参数中 2025-05-29 18:53:14.325 [Thd =180] Info Default 注册相机取图 2025-05-29 18:53:14.325 [Thd =1] Info Default Register camera capture events！DB/DD 2025-05-29 18:53:14.325 [Thd =102] Info Default 移动到起始点位 2025-05-29 18:53:14.839 [Thd =91] Info MMSFocus _isStop = true 2025-05-29 18:53:15.041 [Thd =91] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426791068270479,StepStep:0.423459196471333,CosValueY:1,SinValueY:0 2025-05-29 18:53:15.041 [Thd =168] Info Default 打开光源，亮度：29% 2025-05-29 18:53:15.041 [Thd =170] Info Default OpenLamp Transmission 2025-05-29 18:53:15.642 [Thd =180] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:53:15.659 [Thd =103] Info Default 聚焦Track已关闭 2025-05-29 18:53:15.857 [Thd =168] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:53:15.944 [Thd =180] Info MMSFocus _isStop = true 2025-05-29 18:53:16.053 [Thd =170] Info Default OpenLamp Reflection 2025-05-29 18:53:16.577 [Thd =102] Error Default SyncSend recv cmd timeout 2025-05-29 18:53:17.146 [Thd =180] Info Default QuerySubstrateMode Line OK 2025-05-29 18:53:17.146 [Thd =102] Info Default 已切换到线阵聚焦模式 2025-05-29 18:53:17.747 [Thd =180] Info Default SetFocusTrack OpenTrack OK 2025-05-29 18:53:17.747 [Thd =180] Info Default 聚焦Track已开启 2025-05-29 18:53:17.871 [Thd =170] Info Default PolarizationBaffleControl False: 0! 2025-05-29 18:53:18.374 [Thd =170] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:53:18.568 [Thd =130] Info Default ChangeLightPath: True! 2025-05-29 18:53:38.254 [Thd =91] Error Default SnakeScanLine: Paddle Rotate fault! 2025-05-29 18:53:38.254 [Thd =91] Info Default CurrentSize:2048,2048 2025-05-29 18:53:38.254 [Thd =91] Info Default Camera size no change 2025-05-29 18:53:38.254 [Thd =130] Info Default 执行MarkOffSet...... 2025-05-29 18:53:38.254 [Thd =91] Info Default Set camera size success 2025-05-29 18:53:38.254 [Thd =91] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 18:53:39.231 [Thd =91] Info Default Set camera parameter 2025-05-29 18:53:39.234 [Thd =91] Info Default BUFFER_COUNT no change 2025-05-29 18:53:39.237 [Thd =91] Info strip vectorBegin:(60.028959,-9.916657),VectorEnd:(65.309332,-9.916657),CaptureBegin:(62.028959,-9.916657)，CaptureEnd：(63.309332,-9.916657),StepScan:0.426791068270479 2025-05-29 18:53:41.221 [Thd =91] Info Default m_focusMapMode：0 2025-05-29 18:53:41.223 [Thd =91] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:-0.000208394076303945,BeginPoint:-62.0289589847992,EndPoint:-63.3093321896107 2025-05-29 18:53:41.417 [Thd =37] Info Default mage not received in scan state! Direct abandonment！cam_idx:0,Cur_strip_status:FinishOK 2025-05-29 18:53:41.433 [Thd =37] Info Default mage not received in scan state! Direct abandonment！cam_idx:0,Cur_strip_status:FinishOK 2025-05-29 18:53:41.481 [Thd =37] Info Default mage not received in scan state! Direct abandonment！cam_idx:0,Cur_strip_status:FinishOK 2025-05-29 18:53:42.258 [Thd =91] Info MMSFocus _isStop = true 2025-05-29 18:53:42.781 [Thd =73] Info MMSFocus _isStop = true 2025-05-29 18:53:42.782 [Thd =180] Info Default OpenLamp Transmission 2025-05-29 18:53:43.591 [Thd =171] Info Default PolarizationBaffleControl True: 1! 2025-05-29 18:53:43.984 [Thd =73] Info Default QuerySubstrateMode Area OK 2025-05-29 18:53:43.984 [Thd =161] Info Default 已切换到面阵聚焦模式 2025-05-29 18:53:44.095 [Thd =171] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:53:44.585 [Thd =73] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:53:44.585 [Thd =171] Info Default 聚焦Track已关闭 2025-05-29 18:53:44.600 [Thd =180] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:53:44.600 [Thd =180] Info Default CloseLamp Reflection 2025-05-29 18:53:46.229 [Thd =1] Info Default Move to the inspect start point，Starting point coordinates：X:66.458768558353,Y:-3.46107210865707,OffSet.X:0,OffSet.Y:0 2025-05-29 18:53:46.229 [Thd =161] Warn Default 标记偏移点X:0，Y:0 2025-05-29 18:53:47.142 [Thd =109] Error Default SyncSend recv cmd timeout 2025-05-29 18:53:48.263 [Thd =91] Info Default Wait! Setting camera parameters 2025-05-29 18:53:48.268 [Thd =1] Info Default SetSystemStatus:WR DM0 2 2025-05-29 18:53:48.272 [Thd =1] Info Default SetSystemStatus Success 2025-05-29 18:53:50.054 [Thd =1] Info AutoWorkerHelper::SaveTask2DB() finished. Task={0} 1178 2025-05-29 18:53:50.054 [Thd =109] Info Default 检测线程启动！ 2025-05-29 18:53:50.054 [Thd =73] Info Default 结果处理线程启动！ 2025-05-29 18:53:50.059 [Thd =100] Info Default SetSystemStatus:WR DM0 2 2025-05-29 18:53:50.062 [Thd =100] Info Default SetSystemStatus Success 2025-05-29 18:53:50.233 [Thd =100] Info MMSFocus _isStop = true 2025-05-29 18:53:50.233 [Thd =100] Info Default aSwitchIndex index:2 2025-05-29 18:53:50.233 [Thd =100] Info Default lens from ATF: 2025-05-29 18:53:50.233 [Thd =100] Info Default objCount:3 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:P200;objId:0 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:P140;objId:1 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:P100;objId:2 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:;objId:0 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:;objId:0 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:;objId:0 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:;objId:0 2025-05-29 18:53:50.233 [Thd =100] Info Default ratio:;objId:0 2025-05-29 18:53:50.233 [Thd =100] Info Default lens from system settings: 2025-05-29 18:53:50.234 [Thd =100] Info Default systemlensettings lens count:3 2025-05-29 18:53:50.234 [Thd =100] Info Default ratio:P100;objId:0 2025-05-29 18:53:50.234 [Thd =100] Info Default ratio:P140;objId:1 2025-05-29 18:53:50.234 [Thd =100] Info Default ratio:P200;objId:2 2025-05-29 18:54:05.344 [Thd =100] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:54:05.344 [Thd =100] Info Default send switch cmd 2025-05-29 18:54:20.451 [Thd =100] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 18:54:20.451 [Thd =100] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 18:54:20.479 [Thd =100] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 18:54:20.479 [Thd =100] Info Default defectData.RecivePicCount:0 2025-05-29 18:54:20.479 [Thd =100] Info Default start inspect task pic_count of one strip:313, big_strip_count:331. 2025-05-29 18:54:20.479 [Thd =100] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 18:54:20.479 [Thd =100] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 18:54:20.479 [Thd =100] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 18:54:20.479 [Thd =100] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 18:54:20.479 [Thd =100] Info Default BaseScanObjectLine:------------------ 2025-05-29 18:54:20.479 [Thd =100] Info Default BaseScanObjectLine:***************** 2025-05-29 18:54:20.479 [Thd =100] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 18:54:20.479 [Thd =100] Info Default scaleX: 1.00000522154835, scaleY:1.00001096814312 2025-05-29 18:54:20.479 [Thd =100] Info Default Orth_Y_BeforR: -0.752196082836751,StageScaleX:1.00000522154835,Y:1.00001096814312 2025-05-29 18:54:20.479 [Thd =100] Info Default LengthOfAccelerationAndDeceleration: 2 2025-05-29 18:54:21.081 [Thd =100] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:54:21.081 [Thd =169] Info Default 聚焦Track已关闭 2025-05-29 18:54:21.081 [Thd =161] Info Default 正在切换线阵相机光路 2025-05-29 18:54:24.602 [Thd =100] Info Default ChangeLightPath: True! 2025-05-29 18:54:24.602 [Thd =100] Info Default SnakeScanLine: Paddle Rotate angle is 0 ! 2025-05-29 18:54:26.443 [Thd =100] Info Default InspectOverlayX: 16, InspectOverlayY:16 2025-05-29 18:54:26.447 [Thd =100] Info Default OpenLamp Transmission 2025-05-29 18:54:26.447 [Thd =161] Info Default 正在打开透射光源，亮度 29% 2025-05-29 18:54:27.254 [Thd =73] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:54:27.456 [Thd =100] Info Default CloseLamp Reflection 2025-05-29 18:54:29.270 [Thd =100] Info Default PolarizationBaffleControl False: 3! 2025-05-29 18:54:29.777 [Thd =100] Info Default PolarizationBaffleControl False: 2! 2025-05-29 18:54:29.777 [Thd =161] Info Default 正在启用实时聚焦 2025-05-29 18:54:29.989 [Thd =103] Error Default SyncSend recv cmd timeout 2025-05-29 18:54:30.459 [Thd =100] Info MMSFocus _isStop = true 2025-05-29 18:54:31.661 [Thd =100] Info Default QuerySubstrateMode Line OK 2025-05-29 18:54:31.661 [Thd =103] Info Default 已切换到线阵聚焦模式 2025-05-29 18:54:32.662 [Thd =171] Info Default 正在设置扫描控制参数 2025-05-29 18:54:32.662 [Thd =100] Info Default GetParameter: stepCompX is 0.000208394076303945 2025-05-29 18:54:33.465 [Thd =100] Info Default Allocate resources! 2025-05-29 18:54:33.465 [Thd =100] Info Default EnumMaskInspectMode === Pattern 2025-05-29 18:54:34.066 [Thd =100] Info Default SetFocusTrack OpenTrack OK 2025-05-29 18:54:34.066 [Thd =100] Info Default Start scanning; Start strip number: 0, total strip number: 331 2025-05-29 18:54:34.066 [Thd =161] Info Default 聚焦Track已开启 2025-05-29 18:54:34.066 [Thd =73] Info Default 开始扫描条带； [0/331] 2025-05-29 18:54:34.068 [Thd =100] Info Default ScanDirection is Positive 2025-05-29 18:54:34.069 [Thd =100] Info Default CaptureBeginX: 66.87008, CaptureBeginY:-3.65966, CaptureEndX:-67.18500, CaptureEndY:-3.65966, VectorBeginX:68.44329, VectorBeginY:-3.65966, VectorEndX:-69.14232, VectorEndY:-3.65966, PrepareDistanceScan:2.00000, PrepareDistanceStep:0.00000, StepScan:0.427, CosValueY:1.00000, SinValueY:0.00000 2025-05-29 18:54:34.069 [Thd =100] Info Default ***row:0, vectorBeginX:68.443, vectorBeginY:-3.660, captureBeginX:66.870, captureBeginY:-3.660, captureEndX:-67.185, captureEndY:-3.660, vectorEndX:-69.142, vectorEndY:-3.660 2025-05-29 18:54:34.069 [Thd =100] Info Default m_focusMapMode：0 2025-05-29 18:54:34.071 [Thd =100] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:-66.8700791243523,EndPoint:67.1849954194053 2025-05-29 18:54:39.036 [Thd =37] Info Default Stripes are collected for data processing！strip_no:0 2025-05-29 18:54:39.036 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:0,source_light_Type:A_SourceLightType 2025-05-29 18:54:39.036 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：0,A_SourceLightType 2025-05-29 18:54:39.213 [Thd =100] Info Default Strip scanning complete, waiting for collection... ;0/331, 2025-05-29 18:54:39.223 [Thd =100] Warn Default No corresponding strip number found!stripNo:-1,InspStrips:0,1,2,3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20,21,22,23,24,25,26,27,28,29,30,31,32,33,34,35,36,37,38,39,40,41,42,43,44,45,46,47,48,49,50,51,52,53,54,55,56,57,58,59,60,61,62,63,64,65,66,67,68,69,70,71,72,73,74,75,76,77,78,79,80,81,82,83,84,85,86,87,88,89,90,91,92,93,94,95,96,97,98,99,100,101,102,103,104,105,106,107,108,109,110,111,112,113,114,115,116,117,118,119,120,121,122,123,124,125,126,127,128,129,130,131,132,133,134,135,136,137,138,139,140,141,142,143,144,145,146,147,148,149,150,151,152,153,154,155,156,157,158,159,160,161,162,163,164,165,166,167,168,169,170,171,172,173,174,175,176,177,178,179,180,181,182,183,184,185,186,187,188,189,190,191,192,193,194,195,196,197,198,199,200,201,202,203,204,205,206,207,208,209,210,211,212,213,214,215,216,217,218,219,220,221,222,223,224,225,226,227,228,229,230,231,232,233,234,235,236,237,238,239,240,241,242,243,244,245,246,247,248,249,250,251,252,253,254,255,256,257,258,259,260,261,262,263,264,265,266,267,268,269,270,271,272,273,274,275,276,277,278,279,280,281,282,283,284,285,286,287,288,289,290,291,292,293,294,295,296,297,298,299,300,301,302,303,304,305,306,307,308,309,310,311,312,313,314,315,316,317,318,319,320,321,322,323,324,325,326,327,328,329,330 2025-05-29 18:54:39.287 [Thd =100] Info Default singleAixsScan Testing 2 2025-05-29 18:54:39.317 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 18:54:39.340 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":0,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_0_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 18:54:39.604 [Thd =103] Info Default 开始扫描条带； [1/331] 2025-05-29 18:54:39.606 [Thd =100] Info Default ScanDirection is Negative 2025-05-29 18:54:39.608 [Thd =100] Info Default ***row:1, vectorBeginX:-69.142, vectorBeginY:-4.080, captureBeginX:-67.516, captureBeginY:-4.080, captureEndX:66.539, captureEndY:-4.080, vectorEndX:68.443, vectorEndY:-4.080 2025-05-29 18:54:39.608 [Thd =100] Info Default m_focusMapMode：0 2025-05-29 18:54:39.609 [Thd =100] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:-0.000208394076303945,BeginPoint:67.5160582339507,EndPoint:-66.5390163098069 2025-05-29 18:54:44.606 [Thd =37] Info Default Stripes are collected for data processing！strip_no:1 2025-05-29 18:54:44.606 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:1,source_light_Type:A_SourceLightType 2025-05-29 18:54:44.606 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：1,A_SourceLightType 2025-05-29 18:54:44.752 [Thd =100] Info Default Strip scanning complete, waiting for collection... ;1/331, 2025-05-29 18:54:44.882 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 18:54:44.904 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":1,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_1_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 18:54:44.904 [Thd =100] Info Default singleAixsScan Testing 2 2025-05-29 18:54:45.221 [Thd =170] Info Default 开始扫描条带； [2/331] 2025-05-29 18:54:45.223 [Thd =100] Info Default ScanDirection is Positive 2025-05-29 18:54:45.224 [Thd =100] Info Default CaptureBeginX: 66.86990, CaptureBeginY:-4.49991, CaptureEndX:-67.18518, CaptureEndY:-4.49991, VectorBeginX:68.44310, VectorBeginY:-4.49991, VectorEndX:-69.14250, VectorEndY:-4.49991, PrepareDistanceScan:2.00000, PrepareDistanceStep:0.00000, StepScan:0.427, CosValueY:1.00000, SinValueY:0.00000 2025-05-29 18:54:45.224 [Thd =100] Info Default ***row:2, vectorBeginX:68.443, vectorBeginY:-4.500, captureBeginX:66.870, captureBeginY:-4.500, captureEndX:-67.185, captureEndY:-4.500, vectorEndX:-69.143, vectorEndY:-4.500 2025-05-29 18:54:45.224 [Thd =100] Info Default m_focusMapMode：0 2025-05-29 18:54:45.226 [Thd =100] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:-66.8698952735283,EndPoint:67.1851792702292 2025-05-29 18:54:50.196 [Thd =37] Info Default Stripes are collected for data processing！strip_no:2 2025-05-29 18:54:50.196 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:2,source_light_Type:A_SourceLightType 2025-05-29 18:54:50.196 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：2,A_SourceLightType 2025-05-29 18:54:50.369 [Thd =100] Info Default Strip scanning complete, waiting for collection... ;2/331, 2025-05-29 18:54:50.427 [Thd =100] Info Default singleAixsScan Testing 2 2025-05-29 18:54:50.472 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 18:54:50.474 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":2,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_2_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 18:54:50.744 [Thd =102] Info Default 开始扫描条带； [3/331] 2025-05-29 18:54:50.746 [Thd =100] Info Default ScanDirection is Negative 2025-05-29 18:54:50.748 [Thd =100] Info Default ***row:3, vectorBeginX:-69.143, vectorBeginY:-4.920, captureBeginX:-67.516, captureBeginY:-4.920, captureEndX:66.539, captureEndY:-4.920, vectorEndX:68.443, vectorEndY:-4.920 2025-05-29 18:54:50.748 [Thd =100] Info Default m_focusMapMode：0 2025-05-29 18:54:50.749 [Thd =100] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:-0.000208394076303945,BeginPoint:67.5162420847746,EndPoint:-66.5388324589829 2025-05-29 18:54:55.716 [Thd =37] Info Default Stripes are collected for data processing！strip_no:3 2025-05-29 18:54:55.716 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:3,source_light_Type:A_SourceLightType 2025-05-29 18:54:55.716 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：3,A_SourceLightType 2025-05-29 18:54:55.891 [Thd =100] Info Default Strip scanning complete, waiting for collection... ;3/331, 2025-05-29 18:54:55.997 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 18:54:56.000 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":3,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_3_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 18:54:56.037 [Thd =100] Info Default singleAixsScan Testing 2 2025-05-29 18:54:56.354 [Thd =170] Info Default 开始扫描条带； [4/331] 2025-05-29 18:54:56.360 [Thd =100] Info Default ScanDirection is Positive 2025-05-29 18:54:56.361 [Thd =100] Info Default CaptureBeginX: 66.86971, CaptureBeginY:-5.34016, CaptureEndX:-67.18536, CaptureEndY:-5.34016, VectorBeginX:68.44292, VectorBeginY:-5.34016, VectorEndX:-69.14268, VectorEndY:-5.34016, PrepareDistanceScan:2.00000, PrepareDistanceStep:0.00000, StepScan:0.427, CosValueY:1.00000, SinValueY:0.00000 2025-05-29 18:54:56.361 [Thd =100] Info Default ***row:4, vectorBeginX:68.443, vectorBeginY:-5.340, captureBeginX:66.870, captureBeginY:-5.340, captureEndX:-67.185, captureEndY:-5.340, vectorEndX:-69.143, vectorEndY:-5.340 2025-05-29 18:54:56.361 [Thd =100] Info Default m_focusMapMode：0 2025-05-29 18:54:56.362 [Thd =100] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394076303945,BeginPoint:-66.8697114227044,EndPoint:67.1853631210532 2025-05-29 18:55:00.377 [Thd =1] Info Default VerifyModule.StopInspect() Stop ! 2025-05-29 18:55:01.327 [Thd =37] Info Default Stripes are collected for data processing！strip_no:4 2025-05-29 18:55:01.327 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:4,source_light_Type:A_SourceLightType 2025-05-29 18:55:01.327 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：4,A_SourceLightType 2025-05-29 18:55:01.505 [Thd =100] Info Default Strip scanning complete, waiting for collection... ;4/331, 2025-05-29 18:55:01.611 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 18:55:01.613 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":4,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_4_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 18:55:01.619 [Thd =99] Info Default RecordCompleteStripNo begin:2025-05-29 18:55:01 2025-05-29 18:55:01.627 [Thd =100] Info Default singleAixsScan Testing 2 2025-05-29 18:55:01.660 [Thd =99] Info Default RecordCompleteStripNo end:2025-05-29 18:55:01 2025-05-29 18:55:01.707 [Thd =1] Info Default SetSystemStatus:WR DM0 2 2025-05-29 18:55:01.710 [Thd =1] Info Default SetSystemStatus Success 2025-05-29 18:55:01.717 [Thd =1] Info Default SetSystemStatus:WR DM0 2 2025-05-29 18:55:01.720 [Thd =1] Info Default SetSystemStatus Success 2025-05-29 18:55:01.944 [Thd =109] Info Default 开始扫描条带； [5/331] 2025-05-29 18:55:03.166 [Thd =100] Info Default ***********Task finished.************** 2025-05-29 18:55:03.166 [Thd =100] Info Default Stop the detection thread; 2025-05-29 18:55:03.168 [Thd =103] Info Default 结果处理全部完成！ 2025-05-29 18:55:03.254 [Thd =100] Info PLCKeyence ParseStrResult m_strValue is null 2025-05-29 18:55:03.257 [Thd =67] Info Default m_bIdel 2025-05-29 18:55:04.254 [Thd =99] Error Default WriteDeviceCmd failed. 2025-05-29 18:55:04.254 [Thd =99] Error Default dev:TowerLedR, status:DeviceOpen error 2025-05-29 18:55:04.322 [Thd =99] Info Default SetSystemStatus:WR DM0 1 2025-05-29 18:55:04.339 [Thd =99] Info Default SetSystemStatus Success 2025-05-29 18:55:06.411 [Thd =99] Info Default AutoWorkerHelper::ResultHandling: Inspection task is completed, Result handing thread is shuted down. 2025-05-29 18:55:06.411 [Thd =99] Info Default *********Reset2********** 2025-05-29 18:55:06.411 [Thd =160] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 18:55:06.411 [Thd =121] Info Default 检测完成！ 2025-05-29 18:55:07.170 [Thd =100] Info MMSFocus _isStop = true 2025-05-29 18:55:08.574 [Thd =100] Info Default QuerySubstrateMode Area OK 2025-05-29 18:55:08.574 [Thd =170] Info Default 已切换到面阵聚焦模式 2025-05-29 18:55:09.175 [Thd =100] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:55:09.175 [Thd =171] Info Default 聚焦Track已关闭 2025-05-29 18:55:09.377 [Thd =100] Info Default Finally Over！ 2025-05-29 18:55:09.377 [Thd =100] Error Default Scanning thread error!System.Threading.ThreadAbortException: 正在中止线程。 在 AT.Logging.Log.Write(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message, Object[] args) 在 AT.Logging.Log.Info(Object sender, String message, Object[] args) 在 Storm.Defect.AutoWorkerHelper.AutoInspecting() 位置 E:\software\Go-Agent-21.4.0\pipelines\Storm_V4_Build\Storm.Common\Defect\Worker\AutoWorkerHelper.cs:行号 730 2025-05-29 18:55:09.379 [Thd =1] Info Default AutoWorkerHelper.Stop() Abort() Complate 2025-05-29 18:55:09.379 [Thd =1] Info Default AutoWorkerHelper.Stop() DOUBLEMODE 2025-05-29 18:55:09.480 [Thd =1] Info Default AutoWorkerHelper.Stop() Camera Stop Complate ! 2025-05-29 18:55:09.480 [Thd =1] Info Default AutoWorkerHelper::Stop():Waiting for Result Thread exit...1 second. 2025-05-29 18:55:10.484 [Thd =1] Info Default Stop End! 2025-05-29 18:55:10.484 [Thd =1] Info Default release timer --begin 2025-05-29 18:55:11.485 [Thd =1] Info Default release timer --end 2025-05-29 18:55:11.680 [Thd =161] Error Default The DPU online and offline message was received！{"KeepTimeStamp":634027,"ServiceStartTime":"2025\/5\/29 18:50:07","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":25,"mem_size":130963,"ramdisk_percent":4,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":11,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":44,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":9,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":38,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:55:11.680 [Thd =20] Error Default The DPU online and offline message was received！{"KeepTimeStamp":634027,"ServiceStartTime":"2025\/5\/29 18:50:19","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":35,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":37,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":40,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":37,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":41,"utilization_mem":1}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:55:12.086 [Thd =1] Info Default SetFocusTrack CloseTrack OK 2025-05-29 18:55:12.086 [Thd =187] Info Default 聚焦Track已关闭 2025-05-29 18:55:12.196 [Thd =54] Error Default The DPU online and offline message was received！{"KeepTimeStamp":634031,"ServiceStartTime":"2025\/5\/29 18:53:05","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:55:12.218 [Thd =73] Info Default Chuck vacuum close 2025-05-29 18:55:12.235 [Thd =54] Error Default The DPU online and offline message was received！{"KeepTimeStamp":634031,"ServiceStartTime":"2025\/5\/29 18:52:53","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 18:55:12.429 [Thd =160] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 18:55:13.218 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:55:13.220 [Thd =161] Info Default Chuck vacuum close 2025-05-29 18:55:14.221 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:55:14.224 [Thd =103] Info Default Chuck vacuum close 2025-05-29 18:55:15.225 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:55:15.225 [Thd =143] Info Default Inspection Stop! 2025-05-29 18:55:16.038 [Thd =1] Info Default PolarizationBaffleControl True: 1! 2025-05-29 18:55:16.542 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:55:19.206 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:55:19.206 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:55:24.298 [Thd =109] Info Default Chuck vacuum close 2025-05-29 18:55:25.299 [Thd =143] Info Default ChuckVac: :False 2025-05-29 18:55:32.705 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:514,bmp.Width:1224,bmp.Height:1024,p.X:558,p.Y:470,p.Width:186,p.Height:172 2025-05-29 18:55:34.303 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:55:34.304 [Thd =73] Info Default Chuck vacuum close 2025-05-29 18:55:35.305 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:55:40.197 [Thd =187] Info Default Chuck vacuum close 2025-05-29 18:55:41.198 [Thd =121] Info Default ChuckVac: :False 2025-05-29 18:55:50.027 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:514,p.Y:382,p.Width:190,p.Height:298 2025-05-29 18:55:52.142 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:55:52.143 [Thd =187] Info Default Chuck vacuum close 2025-05-29 18:55:53.144 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:55:57.870 [Thd =168] Info Default Chuck vacuum close 2025-05-29 18:55:58.871 [Thd =73] Info Default ChuckVac: :False 2025-05-29 18:56:01.595 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:462,p.Y:356,p.Width:442,p.Height:452 2025-05-29 18:56:03.222 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:56:03.222 [Thd =54] Info Default Chuck vacuum close 2025-05-29 18:56:04.222 [Thd =1] Info Default ChuckVac: :False 2025-05-29 18:56:04.470 [Thd =169] Info Default Alignment ... 2025-05-29 18:56:04.591 [Thd =143] Info Default Chuck vacuum close 2025-05-29 18:56:05.592 [Thd =20] Info Default ChuckVac: :False 2025-05-29 18:56:28.223 [Thd =169] Info Default Switch light... 2025-05-29 18:56:28.223 [Thd =20] Info Default OpenLamp Transmission 2025-05-29 18:56:29.031 [Thd =183] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:56:29.734 [Thd =20] Info Default CloseLamp Reflection 2025-05-29 18:56:32.244 [Thd =20] Info MMSFocus _isStop = true 2025-05-29 18:56:32.244 [Thd =161] Info Default Execute alignment 1/2 2025-05-29 18:56:36.352 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9998332,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:56:36.352 [Thd =20] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 18:56:36.474 [Thd =20] Info Default Flag:Fine1, Position:62.541061851205,-10.056670925671 2025-05-29 18:56:45.246 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9992933,xOffSet:611,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:56:45.247 [Thd =20] Info Default D2DMatchMark ******** :errorX:-1,errorY:0 2025-05-29 18:56:45.368 [Thd =20] Info Default Flag:Fine2, Position:-64.457236855537,-9.984476207825 2025-05-29 18:56:49.800 [Thd =122] Info Default Execute alignment 2/2 2025-05-29 18:56:58.189 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9994903,xOffSet:621,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:56:58.189 [Thd =20] Info Default D2DMatchMark ******** :errorX:9,errorY:147 2025-05-29 18:56:59.896 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9994706,xOffSet:621,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:01.584 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9990726,xOffSet:602,yOffSet:367,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:03.273 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9992996,xOffSet:602,yOffSet:367,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:04.962 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9998434,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:05.083 [Thd =20] Info Default Flag:Fine1, Position:62.6254808877545,-9.94063314305899 2025-05-29 18:57:13.868 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9999078,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:13.868 [Thd =20] Info Default D2DMatchMark ******** :errorX:1,errorY:147 2025-05-29 18:57:15.559 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9998811,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:17.249 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9997115,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:17.371 [Thd =20] Info Default Flag:Fine2, Position:-64.45629170914,-9.94178423568814 2025-05-29 18:57:20.153 [Thd =161] Info Default Checking Mark ... 2025-05-29 18:57:28.540 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9997054,xOffSet:620,yOffSet:652,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:28.540 [Thd =20] Info Default D2DMatchMark ******** :errorX:8,errorY:140 2025-05-29 18:57:30.230 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9995451,xOffSet:620,yOffSet:652,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:31.923 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9998266,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:32.045 [Thd =20] Info Default Flag:Fine1, Position:62.5435422826522,-9.94707680338905 2025-05-29 18:57:40.830 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9988887,xOffSet:609,yOffSet:364,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:40.830 [Thd =20] Info Default D2DMatchMark ******** :errorX:-3,errorY:-148 2025-05-29 18:57:42.520 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9987854,xOffSet:609,yOffSet:364,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:44.212 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9998765,xOffSet:613,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:44.334 [Thd =20] Info Default Flag:Fine2, Position:-64.3724746606396,-9.94074585808702 2025-05-29 18:57:53.086 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.888845,xOffSet:770,yOffSet:922,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:53.087 [Thd =20] Info Default D2DMatchMark ******** :errorX:158,errorY:410 2025-05-29 18:57:54.839 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9994746,xOffSet:613,yOffSet:701,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:56.540 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9997329,xOffSet:612,yOffSet:697,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:58.243 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9996462,xOffSet:610,yOffSet:509,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:57:59.861 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9940566,xOffSet:610,yOffSet:325,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:58:01.561 [Thd =20] Info Default D2DSearchMark matchResult:0， score:0.9943107,xOffSet:612,yOffSet:328,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:58:01.682 [Thd =20] Info Default Flag:Fine3, Position:-64.4167343105629,-136.177691202566 2025-05-29 18:58:02.683 [Thd =20] Info Default IsAlignAngleOK fine1:62.5435422826522,-9.94707680338905,fine2:-64.3724746606396,-9.94074585808702 2025-05-29 18:58:02.683 [Thd =118] Info Default Height difference : 0.80 um 2025-05-29 18:58:02.683 [Thd =20] Info Default IsAlignAngleOK delta:-0.0220000000001002. 2025-05-29 18:58:19.401 [Thd =20] Info MMSFocus _isStop = true 2025-05-29 18:58:19.401 [Thd =184] Info Default Alignment finish 2025-05-29 18:58:19.401 [Thd =180] Info Default Chuck vacuum open 2025-05-29 18:58:20.402 [Thd =20] Info Default ChuckVac: :True 2025-05-29 18:58:21.347 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:58:32.386 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:58:32.386 [Thd =1] Info Default MaskScaleY:1.00066172149687 2025-05-29 18:58:32.386 [Thd =1] Info Default MaskScaleX:1.0000030550131,Orth_Y_BeforR:-1.20530064556041 2025-05-29 18:58:35.106 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:58:35.106 [Thd =1] Info Default MaskScaleY:1.00066172149687 2025-05-29 18:58:35.106 [Thd =1] Info Default MaskScaleX:1.0000030550131,Orth_Y_BeforR:-1.20530064556041 2025-05-29 18:58:38.473 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:58:42.515 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:58:42.523 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:58:42.523 [Thd =1] Info Default MaskScaleY:1.00066172149687 2025-05-29 18:58:42.523 [Thd =1] Info Default MaskScaleX:1.0000030550131,Orth_Y_BeforR:-1.20530064556041 2025-05-29 18:58:42.524 [Thd =160] Info Default located_pos:(62.5435422826522, -9.94707680338905) 2025-05-29 18:58:42.524 [Thd =160] Info Default deltax_stage 0, deltay_stage:-126.916016943292. 2025-05-29 18:58:42.524 [Thd =160] Info Default MoveStageForMarkCol102 point (-64.3724746606396, -9.94707680338905), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.524 [Thd =160] Info Default located_pos:(-64.3724746606396, -9.94707680338905) 2025-05-29 18:58:42.524 [Thd =160] Info Default deltax_stage 126.236945344479, deltay_stage:0. 2025-05-29 18:58:42.524 [Thd =160] Info Default MoveStageForMarkCol101 point (62.4992826300085, -136.184029906756), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.524 [Thd =160] Info Default deltax_stage 0, deltay_stage:-126.916015943953. 2025-05-29 18:58:42.524 [Thd =160] Info Default MoveStageForMarkCol102 point (-64.4167333139445, -136.184029906756), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4992826300085, -136.184029906756). 2025-05-29 18:58:42.524 [Thd =160] Info Default located_pos:(-64.4167333139445, -136.184029906756) 2025-05-29 18:58:42.524 [Thd =160] Info Default AliPt:(62.5435422826522, -9.94707680338905), GDS2StagePt:(62.5435422826522, -9.94707680338905), XOffset:5, YOffset:5 2025-05-29 18:58:42.524 [Thd =160] Info Default AliPt:(-64.3724746606396, -9.94074585808702), GDS2StagePt:(-64.3724746606396, -9.94707680338905), XOffset:5, YOffset:5 2025-05-29 18:58:42.524 [Thd =160] Info Default AliPt:(-64.4167343105629, -136.177691202566), GDS2StagePt:(-64.4167333139445, -136.184029906756), XOffset:5, YOffset:5 2025-05-29 18:58:42.532 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 18:58:42.532 [Thd =1] Info Default MaskScaleY:1.00066172149687 2025-05-29 18:58:42.532 [Thd =1] Info Default MaskScaleX:1.0000030550131,Orth_Y_BeforR:-1.20530064556041 2025-05-29 18:58:42.532 [Thd =1] Info Default deltax_stage -6.47457422009096, deltay_stage:0. 2025-05-29 18:58:42.532 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5458123186168, -3.47250218535199), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.532 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82921012934139. 2025-05-29 18:58:42.532 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3750224479582, -3.47250218535199), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5458123186168, -3.47250218535199). 2025-05-29 18:58:42.532 [Thd =1] Info Default located_pos:(66.3750224479582, -3.47250218535199) 2025-05-29 18:58:42.532 [Thd =1] Info Default deltax_stage 132.465605315841, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4970988134878, -142.41269026095), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.613016280853. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1159174673652, -142.41269026095), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4970988134878, -142.41269026095). 2025-05-29 18:58:42.533 [Thd =1] Info Default located_pos:(-67.1159174673652, -142.41269026095) 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage -0.963574056268638, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5438801191937, -8.98350268789636), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07350963559703. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6173897547907, -8.98350268789636), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5438801191937, -8.98350268789636). 2025-05-29 18:58:42.533 [Thd =1] Info Default located_pos:(63.6173897547907, -8.98350268789636) 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0.240818264297049, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5434578499, -10.1878950824875), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247684102105205. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2957737477948, -10.1878950824875), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5434578499, -10.1878950824875). 2025-05-29 18:58:42.533 [Thd =1] Info Default located_pos:(62.2957737477948, -10.1878950824875) 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage -1.01635289502859, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5438986238641, -8.93072384589246), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.659088679744. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1151900558796, -8.93072384589246), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5438986238641, -8.93072384589246). 2025-05-29 18:58:42.533 [Thd =1] Info Default located_pos:(-63.1151900558796, -8.93072384589246) 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0.281483140065321, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.543443592479, -10.2285599607551), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.129005004513. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5855614120341, -10.2285599607551), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.543443592479, -10.2285599607551). 2025-05-29 18:58:42.533 [Thd =1] Info Default located_pos:(-64.5855614120341, -10.2285599607551) 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 126.079186826433, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4993379413692, -136.026271379014), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.864876505516. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3655385641465, -136.026271379014), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4993379413692, -136.026271379014). 2025-05-29 18:58:42.533 [Thd =1] Info Default located_pos:(-63.3655385641465, -136.026271379014) 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 127.214362358457, deltay_stage:0. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4989399400186, -137.161446980809), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.533 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.075396478427. 2025-05-29 18:58:42.533 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5764565384086, -137.161446980809), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4989399400186, -137.161446980809). 2025-05-29 18:58:42.534 [Thd =1] Info Default located_pos:(-64.5764565384086, -137.161446980809) 2025-05-29 18:58:42.534 [Thd =1] Info Default deltax_stage 126.020352006174, deltay_stage:0. 2025-05-29 18:58:42.534 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4993585693137, -135.967436555139), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.534 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06486335702543. 2025-05-29 18:58:42.534 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5642219263391, -135.967436555139), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4993585693137, -135.967436555139). 2025-05-29 18:58:42.534 [Thd =1] Info Default located_pos:(63.5642219263391, -135.967436555139) 2025-05-29 18:58:42.534 [Thd =1] Info Default deltax_stage 127.205710384889, deltay_stage:0. 2025-05-29 18:58:42.534 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4989429734677, -137.15279500671), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5435422826522, -9.94707680338905). 2025-05-29 18:58:42.534 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258060235994356. 2025-05-29 18:58:42.534 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2408827374733, -137.15279500671), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4989429734677, -137.15279500671). 2025-05-29 18:58:42.534 [Thd =1] Info Default located_pos:(62.2408827374733, -137.15279500671) 2025-05-29 18:58:44.554 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:58:44.554 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 18:58:45.681 [Thd =160] Info Default Alignment ... 2025-05-29 18:58:45.802 [Thd =177] Info Default Chuck vacuum close 2025-05-29 18:58:46.803 [Thd =130] Info Default ChuckVac: :False 2025-05-29 18:59:04.794 [Thd =177] Info Default Switch light... 2025-05-29 18:59:04.794 [Thd =130] Info Default OpenLamp Transmission 2025-05-29 18:59:05.603 [Thd =70] Info Default PolarizationBaffleControl True: 3! 2025-05-29 18:59:06.306 [Thd =130] Info Default CloseLamp Reflection 2025-05-29 18:59:08.166 [Thd =130] Info MMSFocus _isStop = true 2025-05-29 18:59:08.166 [Thd =148] Info Default Execute alignment 1/2 2025-05-29 18:59:12.279 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9995973,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:12.279 [Thd =130] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 18:59:12.401 [Thd =130] Info Default Flag:Fine1, Position:62.541061851205,-10.056670925671 2025-05-29 18:59:21.175 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9992266,xOffSet:611,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:21.175 [Thd =130] Info Default D2DMatchMark ******** :errorX:-1,errorY:-1 2025-05-29 18:59:21.297 [Thd =130] Info Default Flag:Fine2, Position:-64.457236855537,-9.984476207825 2025-05-29 18:59:25.729 [Thd =183] Info Default Execute alignment 2/2 2025-05-29 18:59:34.114 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9996855,xOffSet:621,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:34.114 [Thd =130] Info Default D2DMatchMark ******** :errorX:9,errorY:147 2025-05-29 18:59:35.808 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9994782,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:35.930 [Thd =130] Info Default Flag:Fine1, Position:62.5843297432915,-9.94379861570999 2025-05-29 18:59:44.701 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9997932,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:44.702 [Thd =130] Info Default D2DMatchMark ******** :errorX:1,errorY:147 2025-05-29 18:59:46.394 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9998257,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:48.084 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9964412,xOffSet:611,yOffSet:447,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:49.759 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.998613,xOffSet:611,yOffSet:366,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:51.447 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9998463,xOffSet:612,yOffSet:431,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:53.113 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.999352,xOffSet:613,yOffSet:576,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 18:59:53.235 [Thd =130] Info Default Flag:Fine2, Position:-64.372262798768,-9.94120869520614 2025-05-29 18:59:56.093 [Thd =117] Info Default Checking Mark ... 2025-05-29 19:00:04.465 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9993809,xOffSet:613,yOffSet:519,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:04.465 [Thd =130] Info Default D2DMatchMark ******** :errorX:1,errorY:7 2025-05-29 19:00:06.076 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9994948,xOffSet:613,yOffSet:518,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:07.692 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9995832,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:07.814 [Thd =130] Info Default Flag:Fine1, Position:62.5836583221414,-9.94023233301851 2025-05-29 19:00:16.589 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9996729,xOffSet:614,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:16.589 [Thd =130] Info Default D2DMatchMark ******** :errorX:2,errorY:151 2025-05-29 19:00:18.281 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9997548,xOffSet:614,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:19.971 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9995045,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:20.092 [Thd =130] Info Default Flag:Fine2, Position:-64.4560998459844,-9.94080787350105 2025-05-29 19:00:28.844 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9996798,xOffSet:614,yOffSet:673,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:28.844 [Thd =130] Info Default D2DMatchMark ******** :errorX:2,errorY:161 2025-05-29 19:00:30.546 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9996755,xOffSet:614,yOffSet:672,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:32.247 [Thd =130] Info Default D2DSearchMark matchResult:0， score:0.9996235,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:00:32.369 [Thd =130] Info Default Flag:Fine3, Position:-64.4580998370946,-136.177194739688 2025-05-29 19:00:33.369 [Thd =130] Info Default IsAlignAngleOK fine1:62.5836583221414,-9.94023233301851,fine2:-64.4560998459844,-9.94080787350105 2025-05-29 19:00:33.369 [Thd =130] Info Default IsAlignAngleOK delta:0.00200000000187667. 2025-05-29 19:00:33.369 [Thd =155] Info Default Height difference : 0.70 um 2025-05-29 19:00:50.309 [Thd =130] Info MMSFocus _isStop = true 2025-05-29 19:00:50.309 [Thd =119] Info Default Alignment finish 2025-05-29 19:00:50.310 [Thd =180] Info Default Chuck vacuum open 2025-05-29 19:00:51.311 [Thd =130] Info Default ChuckVac: :True 2025-05-29 19:00:52.246 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:00:55.298 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:00:55.298 [Thd =1] Info Default MaskScaleY:0.99968704153173 2025-05-29 19:00:55.298 [Thd =1] Info Default MaskScaleX:1.00000747909407,Orth_Y_BeforR:-0.0544649855057352 2025-05-29 19:01:03.423 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:01:03.423 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:01:10.794 [Thd =83] Info Default Chuck vacuum close 2025-05-29 19:01:11.794 [Thd =121] Info Default ChuckVac: :False 2025-05-29 19:01:19.091 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:480,p.Y:368,p.Width:308,p.Height:388 2025-05-29 19:01:20.637 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:01:20.637 [Thd =160] Info Default Chuck vacuum close 2025-05-29 19:01:21.638 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:01:25.276 [Thd =177] Info Default Chuck vacuum close 2025-05-29 19:01:26.280 [Thd =123] Info Default ChuckVac: :False 2025-05-29 19:01:29.715 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:458,p.Y:354,p.Width:310,p.Height:322 2025-05-29 19:01:35.960 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:01:35.960 [Thd =121] Info Default Chuck vacuum close 2025-05-29 19:01:36.962 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:01:42.265 [Thd =123] Info Default Chuck vacuum close 2025-05-29 19:01:43.266 [Thd =177] Info Default ChuckVac: :False 2025-05-29 19:01:49.705 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:01:49.706 [Thd =160] Info Default Chuck vacuum close 2025-05-29 19:01:50.707 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:01:52.034 [Thd =130] Info Default Alignment ... 2025-05-29 19:01:52.155 [Thd =174] Info Default Chuck vacuum close 2025-05-29 19:01:53.156 [Thd =160] Info Default ChuckVac: :False 2025-05-29 19:02:15.787 [Thd =123] Info Default Switch light... 2025-05-29 19:02:15.787 [Thd =160] Info Default OpenLamp Transmission 2025-05-29 19:02:16.593 [Thd =121] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:02:17.297 [Thd =160] Info Default CloseLamp Reflection 2025-05-29 19:02:19.316 [Thd =160] Info MMSFocus _isStop = true 2025-05-29 19:02:19.316 [Thd =123] Info Default Execute alignment 1/2 2025-05-29 19:02:23.424 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9993582,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:23.424 [Thd =160] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:02:23.546 [Thd =160] Info Default Flag:Fine1, Position:62.541349621446,-10.056670925671 2025-05-29 19:02:32.341 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9992742,xOffSet:611,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:32.342 [Thd =160] Info Default D2DMatchMark ******** :errorX:-1,errorY:0 2025-05-29 19:02:32.463 [Thd =160] Info Default Flag:Fine2, Position:-64.457236855537,-9.984476207825 2025-05-29 19:02:36.894 [Thd =165] Info Default Execute alignment 2/2 2025-05-29 19:02:45.277 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9996845,xOffSet:621,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:45.277 [Thd =160] Info Default D2DMatchMark ******** :errorX:9,errorY:147 2025-05-29 19:02:46.966 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9997372,xOffSet:621,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:48.654 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9992077,xOffSet:602,yOffSet:368,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:50.343 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9991176,xOffSet:602,yOffSet:368,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:52.032 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9994702,xOffSet:612,yOffSet:510,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:53.633 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9998122,xOffSet:623,yOffSet:653,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:02:53.755 [Thd =160] Info Default Flag:Fine1, Position:62.6257684641273,-9.94063324126558 2025-05-29 19:03:02.532 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9995086,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:02.532 [Thd =160] Info Default D2DMatchMark ******** :errorX:1,errorY:147 2025-05-29 19:03:04.221 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9993549,xOffSet:613,yOffSet:659,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:05.910 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9999517,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:06.032 [Thd =160] Info Default Flag:Fine2, Position:-64.4562919029617,-9.94178433389467 2025-05-29 19:03:08.814 [Thd =81] Info Default Checking Mark ... 2025-05-29 19:03:17.198 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.999756,xOffSet:620,yOffSet:652,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:17.198 [Thd =160] Info Default D2DMatchMark ******** :errorX:8,errorY:140 2025-05-29 19:03:18.888 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9975174,xOffSet:614,yOffSet:546,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:20.540 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9999086,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:20.662 [Thd =160] Info Default Flag:Fine1, Position:62.5743335076564,-9.94535027858934 2025-05-29 19:03:29.437 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9991931,xOffSet:610,yOffSet:364,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:29.437 [Thd =160] Info Default D2DMatchMark ******** :errorX:-2,errorY:-148 2025-05-29 19:03:31.128 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.997736,xOffSet:610,yOffSet:387,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:32.816 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9998953,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:32.938 [Thd =160] Info Default Flag:Fine2, Position:-64.3790935669188,-9.94132149521531 2025-05-29 19:03:41.690 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9452715,xOffSet:765,yOffSet:903,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:41.690 [Thd =160] Info Default D2DMatchMark ******** :errorX:153,errorY:391 2025-05-29 19:03:43.435 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9996535,xOffSet:611,yOffSet:517,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:45.064 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9996764,xOffSet:611,yOffSet:517,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:46.677 [Thd =160] Info Default D2DSearchMark matchResult:0， score:0.9995472,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:03:46.799 [Thd =160] Info Default Flag:Fine3, Position:-64.4187156756739,-136.178009587297 2025-05-29 19:03:47.800 [Thd =160] Info Default IsAlignAngleOK fine1:62.5743335076564,-9.94535027858934,fine2:-64.3790935669188,-9.94132149521531 2025-05-29 19:03:47.800 [Thd =96] Info Default Height difference : 0.80 um 2025-05-29 19:03:47.800 [Thd =160] Info Default IsAlignAngleOK delta:-0.0140000000000997. 2025-05-29 19:04:04.467 [Thd =160] Info MMSFocus _isStop = true 2025-05-29 19:04:04.467 [Thd =54] Info Default Alignment finish 2025-05-29 19:04:04.467 [Thd =96] Info Default Chuck vacuum open 2025-05-29 19:04:05.468 [Thd =160] Info Default ChuckVac: :True 2025-05-29 19:04:06.410 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:04:10.285 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:04:10.285 [Thd =1] Info Default MaskScaleY:1.00036685047815 2025-05-29 19:04:10.285 [Thd =1] Info Default MaskScaleX:1.00000509287695,Orth_Y_BeforR:-1.07901102856444 2025-05-29 19:04:13.516 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:04:15.600 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:04:15.608 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:04:15.608 [Thd =1] Info Default MaskScaleY:1.00036685047815 2025-05-29 19:04:15.608 [Thd =1] Info Default MaskScaleX:1.00000509287695,Orth_Y_BeforR:-1.07901102856444 2025-05-29 19:04:15.609 [Thd =119] Info Default located_pos:(62.5743335076564, -9.94535027858934) 2025-05-29 19:04:15.609 [Thd =119] Info Default deltax_stage 0, deltay_stage:-126.953427074575. 2025-05-29 19:04:15.609 [Thd =119] Info Default MoveStageForMarkCol102 point (-64.3790935669188, -9.94535027858934), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.609 [Thd =119] Info Default located_pos:(-64.3790935669188, -9.94535027858934) 2025-05-29 19:04:15.609 [Thd =119] Info Default deltax_stage 126.236688092081, deltay_stage:0. 2025-05-29 19:04:15.609 [Thd =119] Info Default MoveStageForMarkCol101 point (62.5347113969497, -136.182044588798), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.609 [Thd =119] Info Default deltax_stage 0, deltay_stage:-126.953426074942. 2025-05-29 19:04:15.609 [Thd =119] Info Default MoveStageForMarkCol102 point (-64.4187146779923, -136.182044588798), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5347113969497, -136.182044588798). 2025-05-29 19:04:15.609 [Thd =119] Info Default located_pos:(-64.4187146779923, -136.182044588798) 2025-05-29 19:04:15.609 [Thd =119] Info Default AliPt:(62.5743335076564, -9.94535027858934), GDS2StagePt:(62.5743335076564, -9.94535027858934), XOffset:5, YOffset:5 2025-05-29 19:04:15.609 [Thd =119] Info Default AliPt:(-64.3790935669188, -9.94132149521531), GDS2StagePt:(-64.3790935669188, -9.94535027858934), XOffset:5, YOffset:5 2025-05-29 19:04:15.609 [Thd =119] Info Default AliPt:(-64.4187156756739, -136.178009587297), GDS2StagePt:(-64.4187146779923, -136.182044588798), XOffset:5, YOffset:5 2025-05-29 19:04:15.616 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:04:15.616 [Thd =1] Info Default MaskScaleY:1.00036685047815 2025-05-29 19:04:15.624 [Thd =1] Info Default MaskScaleX:1.00000509287695,Orth_Y_BeforR:-1.07901102856444 2025-05-29 19:04:15.624 [Thd =1] Info Default deltax_stage -6.47456102585741, deltay_stage:0. 2025-05-29 19:04:15.624 [Thd =1] Info Default MoveStageForMarkCol101 point (62.576365688456, -3.47078893381003), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83033883836568. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4067045268217, -3.47078893381003), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.576365688456, -3.47078893381003). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(66.4067045268217, -3.47078893381003) 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 132.465335370347, deltay_stage:0. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5327564014904, -142.410692173873), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.651221387442. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1184649859512, -142.410692173873), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5327564014904, -142.410692173873). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(-67.1184649859512, -142.410692173873) 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage -0.963572092645902, deltay_stage:0. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5746359455665, -8.98177813848011), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.0738260663941. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6484620119606, -8.98177813848011), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5746359455665, -8.98177813848011). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(63.6484620119606, -8.98177813848011) 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0.240817773544713, deltay_stage:0. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5742579217976, -10.1861680639962), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247757110185664. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3265008116119, -10.1861680639962), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5742579217976, -10.1861680639962). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(62.3265008116119, -10.1861680639962) 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage -1.01635082385032, deltay_stage:0. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5746525113111, -8.92899940467593), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.696128315226. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1214758039152, -8.92899940467593), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5746525113111, -8.92899940467593). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(-63.1214758039152, -8.92899940467593) 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0.281482566443926, deltay_stage:0. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5742451582742, -10.2268328588984), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.166477916772. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5922327584977, -10.2268328588984), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5742451582742, -10.2268328588984). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(-64.5922327584977, -10.2268328588984) 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 126.078929895524, deltay_stage:0. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5347609127665, -136.02428638447), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.901976799611. 2025-05-29 19:04:15.625 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3672158868448, -136.02428638447), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5347609127665, -136.02428638447). 2025-05-29 19:04:15.625 [Thd =1] Info Default located_pos:(-63.3672158868448, -136.02428638447) 2025-05-29 19:04:15.626 [Thd =1] Info Default deltax_stage 127.214103114227, deltay_stage:0. 2025-05-29 19:04:15.626 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5344046141372, -137.159459659089), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.626 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.112853588882. 2025-05-29 19:04:15.626 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.578448974745, -137.159459659089), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5344046141372, -137.159459659089). 2025-05-29 19:04:15.626 [Thd =1] Info Default located_pos:(-64.578448974745, -137.159459659089) 2025-05-29 19:04:15.626 [Thd =1] Info Default deltax_stage 126.020095195162, deltay_stage:0. 2025-05-29 19:04:15.626 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5347793793078, -135.96545168121), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.626 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06517723922048. 2025-05-29 19:04:15.626 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5999566185283, -135.96545168121), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5347793793078, -135.96545168121). 2025-05-29 19:04:15.626 [Thd =1] Info Default located_pos:(63.5999566185283, -135.96545168121) 2025-05-29 19:04:15.626 [Thd =1] Info Default deltax_stage 127.20545115829, deltay_stage:0. 2025-05-29 19:04:15.626 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5344073297404, -137.150807702726), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5743335076564, -9.94535027858934). 2025-05-29 19:04:15.626 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258136302573973. 2025-05-29 19:04:15.626 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2762710271664, -137.150807702726), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5344073297404, -137.150807702726). 2025-05-29 19:04:15.626 [Thd =1] Info Default located_pos:(62.2762710271664, -137.150807702726) 2025-05-29 19:06:18.715 [Thd =117] Warn Default 开始移出,移出过程中禁止操作 2025-05-29 19:06:19.716 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:06:19.805 [Thd =136] Info MMSFocus _isStop = true 2025-05-29 19:06:19.809 [Thd =136] Info Default StageOut 000 2025-05-29 19:06:19.816 [Thd =136] Info Default StageOut 111 2025-05-29 19:06:21.750 [Thd =136] Info Default StageOut Z 2025-05-29 19:06:26.365 [Thd =136] Info Default StageOut VectorA XY 2025-05-29 19:06:26.366 [Thd =136] Info Default StageOut SetVelocity XY 2025-05-29 19:06:28.191 [Thd =184] Info Default The Stage is Moved Out and the Alignment State is Reset!SetupName:2396678 2025-05-29 19:06:28.191 [Thd =117] Info Default 移出完成 2025-05-29 19:06:35.861 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:06:35.861 [Thd =121] Warn Default 开始移入,移入过程中禁止操作 2025-05-29 19:06:37.674 [Thd =60] Info Default ChangeLightPath: True! 2025-05-29 19:06:37.674 [Thd =60] Info MMSFocus _isStop = true 2025-05-29 19:06:38.796 [Thd =60] Info Default WindowCommand_Close debugMode:False 2025-05-29 19:06:38.796 [Thd =60] Info Default WindowCommand_Close! 2025-05-29 19:06:38.801 [Thd =60] Info Default StageBack 000 2025-05-29 19:06:38.802 [Thd =60] Info Default StageBack 111 2025-05-29 19:06:38.854 [Thd =60] Info Default StageBack Z 2025-05-29 19:06:41.875 [Thd =60] Info Default StageBack VectorA XY 2025-05-29 19:06:41.877 [Thd =60] Info Default StageBack SetVelocity XY 2025-05-29 19:06:41.890 [Thd =60] Info Default 移入完成 2025-05-29 19:06:41.892 [Thd =184] Info MMSFocus _isStop = true 2025-05-29 19:10:49.970 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:10:49.971 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:11:00.593 [Thd =173] Info Default Chuck vacuum close 2025-05-29 19:11:01.594 [Thd =187] Info Default ChuckVac: :False 2025-05-29 19:11:04.013 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:11:04.013 [Thd =151] Info Default Chuck vacuum close 2025-05-29 19:11:05.014 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:11:08.016 [Thd =1] Info Default GetMarkPos offsetX:615,offsety:509,bmp.Width:1224,bmp.Height:1024,p.X:538,p.Y:420,p.Width:160,p.Height:218 2025-05-29 19:11:10.365 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:554,p.Y:374,p.Width:158,p.Height:330 2025-05-29 19:11:11.750 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:11:11.750 [Thd =151] Info Default Chuck vacuum close 2025-05-29 19:11:12.751 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:11:18.086 [Thd =184] Info Default Chuck vacuum close 2025-05-29 19:11:19.086 [Thd =136] Info Default ChuckVac: :False 2025-05-29 19:11:21.456 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:508,bmp.Width:1224,bmp.Height:1024,p.X:532,p.Y:404,p.Width:224,p.Height:338 2025-05-29 19:11:24.071 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:538,p.Y:376,p.Width:232,p.Height:360 2025-05-29 19:11:26.072 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:11:26.072 [Thd =184] Info Default Chuck vacuum close 2025-05-29 19:11:27.073 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:11:33.150 [Thd =180] Info Default Chuck vacuum close 2025-05-29 19:11:34.151 [Thd =161] Info Default ChuckVac: :False 2025-05-29 19:11:36.442 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:420,p.Y:446,p.Width:406,p.Height:232 2025-05-29 19:11:38.656 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:448,p.Y:402,p.Width:398,p.Height:342 2025-05-29 19:11:40.606 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:11:40.606 [Thd =168] Info Default Chuck vacuum close 2025-05-29 19:11:41.607 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:11:45.180 [Thd =161] Info Default Alignment ... 2025-05-29 19:11:45.301 [Thd =81] Info Default Chuck vacuum close 2025-05-29 19:11:46.302 [Thd =168] Info Default ChuckVac: :False 2025-05-29 19:12:08.932 [Thd =54] Info Default Switch light... 2025-05-29 19:12:08.932 [Thd =168] Info Default OpenLamp Transmission 2025-05-29 19:12:09.739 [Thd =122] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:12:10.443 [Thd =168] Info Default CloseLamp Reflection 2025-05-29 19:12:12.014 [Thd =168] Info MMSFocus _isStop = true 2025-05-29 19:12:12.014 [Thd =187] Info Default Execute alignment 1/2 2025-05-29 19:12:16.120 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9999344,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:16.120 [Thd =168] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:12:16.242 [Thd =168] Info Default Flag:Fine1, Position:62.54250070241,-10.057534236394 2025-05-29 19:12:25.013 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9999135,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:25.014 [Thd =168] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:12:25.135 [Thd =168] Info Default Flag:Fine2, Position:-64.456085774573,-9.984188437584 2025-05-29 19:12:29.600 [Thd =81] Info Default Execute alignment 2/2 2025-05-29 19:12:37.989 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9994055,xOffSet:621,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:37.989 [Thd =168] Info Default D2DMatchMark ******** :errorX:9,errorY:150 2025-05-29 19:12:39.680 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9993348,xOffSet:621,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:41.370 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9996201,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:41.491 [Thd =168] Info Default Flag:Fine1, Position:62.5431038572343,-9.94540916860353 2025-05-29 19:12:50.265 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9999374,xOffSet:614,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:50.265 [Thd =168] Info Default D2DMatchMark ******** :errorX:2,errorY:150 2025-05-29 19:12:51.955 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9961033,xOffSet:613,yOffSet:566,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:53.610 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9994798,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:12:53.732 [Thd =168] Info Default Flag:Fine2, Position:-64.4278778563987,-9.94109262722055 2025-05-29 19:12:56.648 [Thd =187] Info Default Checking Mark ... 2025-05-29 19:13:05.023 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.999087,xOffSet:603,yOffSet:372,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:05.023 [Thd =168] Info Default D2DMatchMark ******** :errorX:-9,errorY:-140 2025-05-29 19:13:06.712 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9991469,xOffSet:603,yOffSet:372,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:08.401 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9992574,xOffSet:613,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:08.523 [Thd =168] Info Default Flag:Fine1, Position:62.6287949479734,-9.93332833361334 2025-05-29 19:13:17.309 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9998063,xOffSet:611,yOffSet:468,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:17.309 [Thd =168] Info Default D2DMatchMark ******** :errorX:-1,errorY:-44 2025-05-29 19:13:18.966 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9994466,xOffSet:611,yOffSet:477,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:20.614 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9998304,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:20.735 [Thd =168] Info Default Flag:Fine2, Position:-64.4000286574737,-9.93793265747181 2025-05-29 19:13:29.490 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.999459,xOffSet:615,yOffSet:678,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:29.490 [Thd =168] Info Default D2DMatchMark ******** :errorX:3,errorY:166 2025-05-29 19:13:31.190 [Thd =168] Info Default D2DSearchMark matchResult:0， score:0.9995502,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:13:31.312 [Thd =168] Info Default Flag:Fine3, Position:-64.4069381247638,-136.174892105729 2025-05-29 19:13:32.313 [Thd =168] Info Default IsAlignAngleOK fine1:62.6287949479734,-9.93332833361334,fine2:-64.4000286574737,-9.93793265747181 2025-05-29 19:13:32.313 [Thd =73] Info Default Height difference : 0.40 um 2025-05-29 19:13:32.313 [Thd =168] Info Default IsAlignAngleOK delta:0.0160000000085936. 2025-05-29 19:13:49.145 [Thd =168] Info MMSFocus _isStop = true 2025-05-29 19:13:49.145 [Thd =118] Info Default Alignment finish 2025-05-29 19:13:49.145 [Thd =187] Info Default Chuck vacuum open 2025-05-29 19:13:50.145 [Thd =168] Info Default ChuckVac: :True 2025-05-29 19:13:51.086 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:14:03.158 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:14:03.158 [Thd =1] Info Default MaskScaleY:0.999773093974824 2025-05-29 19:14:03.158 [Thd =1] Info Default MaskScaleX:1.00000294328812,Orth_Y_BeforR:-0.188162000889975 2025-05-29 19:14:11.187 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:14:11.187 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:14:24.359 [Thd =186] Info Default Chuck vacuum close 2025-05-29 19:14:25.360 [Thd =180] Info Default ChuckVac: :False 2025-05-29 19:14:33.650 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:540,p.Y:338,p.Width:218,p.Height:408 2025-05-29 19:14:36.071 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:528,p.Y:406,p.Width:192,p.Height:294 2025-05-29 19:14:37.317 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:14:37.318 [Thd =187] Info Default Chuck vacuum close 2025-05-29 19:14:38.318 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:14:41.107 [Thd =186] Info Default Chuck vacuum close 2025-05-29 19:14:42.108 [Thd =173] Info Default ChuckVac: :False 2025-05-29 19:14:46.909 [Thd =184] Info Default Chuck vacuum close 2025-05-29 19:14:47.910 [Thd =187] Info Default ChuckVac: :False 2025-05-29 19:14:51.198 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:512,p.Y:390,p.Width:188,p.Height:276 2025-05-29 19:14:53.465 [Thd =1] Info Default GetMarkPos offsetX:503,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:450,p.Y:352,p.Width:462,p.Height:384 2025-05-29 19:14:55.245 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:14:55.245 [Thd =122] Info Default Chuck vacuum close 2025-05-29 19:14:56.246 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:14:59.483 [Thd =1] Info Default GetMarkPos offsetX:721,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:654,p.Y:402,p.Width:138,p.Height:260 2025-05-29 19:15:03.157 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:574,p.Y:430,p.Width:156,p.Height:292 2025-05-29 19:15:05.564 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:540,p.Y:402,p.Width:192,p.Height:314 2025-05-29 19:15:09.337 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:588,p.Y:426,p.Width:140,p.Height:246 2025-05-29 19:15:10.604 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:15:10.605 [Thd =91] Info Default Chuck vacuum close 2025-05-29 19:15:11.606 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:15:18.281 [Thd =184] Info Default Chuck vacuum close 2025-05-29 19:15:19.282 [Thd =121] Info Default ChuckVac: :False 2025-05-29 19:15:22.659 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:518,p.Y:390,p.Width:296,p.Height:288 2025-05-29 19:15:24.455 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:450,p.Y:368,p.Width:390,p.Height:348 2025-05-29 19:15:25.454 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:15:25.454 [Thd =91] Info Default Chuck vacuum close 2025-05-29 19:15:26.455 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:15:31.048 [Thd =54] Info Default Alignment ... 2025-05-29 19:15:31.169 [Thd =54] Info Default Chuck vacuum close 2025-05-29 19:15:32.170 [Thd =173] Info Default ChuckVac: :False 2025-05-29 19:15:54.800 [Thd =54] Info Default Switch light... 2025-05-29 19:15:54.800 [Thd =173] Info Default OpenLamp Transmission 2025-05-29 19:15:55.605 [Thd =149] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:15:56.308 [Thd =173] Info Default CloseLamp Reflection 2025-05-29 19:15:58.197 [Thd =173] Info MMSFocus _isStop = true 2025-05-29 19:15:58.197 [Thd =91] Info Default Execute alignment 1/2 2025-05-29 19:16:02.309 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9997139,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:02.309 [Thd =173] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:16:02.430 [Thd =173] Info Default Flag:Fine1, Position:62.54250070241,-10.057534236394 2025-05-29 19:16:11.225 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9995325,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:11.225 [Thd =173] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:16:11.347 [Thd =173] Info Default Flag:Fine2, Position:-64.455798004332,-9.984188437584 2025-05-29 19:16:15.811 [Thd =81] Info Default Execute alignment 2/2 2025-05-29 19:16:24.200 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9993976,xOffSet:621,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:24.200 [Thd =173] Info Default D2DMatchMark ******** :errorX:9,errorY:150 2025-05-29 19:16:25.888 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.999306,xOffSet:622,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:27.577 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9998079,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:27.699 [Thd =173] Info Default Flag:Fine1, Position:62.5431040541451,-9.94569667286832 2025-05-29 19:16:36.471 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9996486,xOffSet:614,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:36.471 [Thd =173] Info Default D2DMatchMark ******** :errorX:2,errorY:150 2025-05-29 19:16:38.162 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9983241,xOffSet:612,yOffSet:531,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:39.797 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9989997,xOffSet:611,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:39.918 [Thd =173] Info Default Flag:Fine2, Position:-64.4175179308599,-9.94080459100342 2025-05-29 19:16:42.853 [Thd =121] Info Default Checking Mark ... 2025-05-29 19:16:51.227 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9994828,xOffSet:602,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:51.227 [Thd =173] Info Default D2DMatchMark ******** :errorX:-10,errorY:-139 2025-05-29 19:16:52.917 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9995733,xOffSet:602,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:54.606 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9989662,xOffSet:613,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:16:54.728 [Thd =173] Info Default Flag:Fine1, Position:62.6289021291704,-9.93211948772666 2025-05-29 19:17:03.512 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9991552,xOffSet:612,yOffSet:504,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:03.512 [Thd =173] Info Default D2DMatchMark ******** :errorX:0,errorY:-8 2025-05-29 19:17:05.133 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.999299,xOffSet:612,yOffSet:504,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:06.751 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9991601,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:06.873 [Thd =173] Info Default Flag:Fine2, Position:-64.4071157532281,-9.9378748925503 2025-05-29 19:17:15.624 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9993209,xOffSet:614,yOffSet:679,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:15.624 [Thd =173] Info Default D2DMatchMark ******** :errorX:2,errorY:167 2025-05-29 19:17:17.327 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9993021,xOffSet:614,yOffSet:679,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:19.030 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9983274,xOffSet:612,yOffSet:496,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:20.664 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9981001,xOffSet:610,yOffSet:347,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:22.364 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9996697,xOffSet:610,yOffSet:363,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:24.056 [Thd =173] Info Default D2DSearchMark matchResult:0， score:0.9999072,xOffSet:612,yOffSet:527,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:17:24.178 [Thd =173] Info Default Flag:Fine3, Position:-64.3590636877161,-136.173971263824 2025-05-29 19:17:25.180 [Thd =173] Info Default IsAlignAngleOK fine1:62.6289021291704,-9.93211948772666,fine2:-64.4071157532281,-9.9378748925503 2025-05-29 19:17:25.180 [Thd =186] Info Default Height difference : 0.40 um 2025-05-29 19:17:25.180 [Thd =173] Info Default IsAlignAngleOK delta:0.0200000000126432. 2025-05-29 19:17:41.340 [Thd =173] Info MMSFocus _isStop = true 2025-05-29 19:17:41.340 [Thd =138] Info Default Alignment finish 2025-05-29 19:17:41.340 [Thd =70] Info Default Chuck vacuum open 2025-05-29 19:17:42.342 [Thd =173] Info Default ChuckVac: :True 2025-05-29 19:17:43.278 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:18:21.063 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:18:21.063 [Thd =1] Info Default MaskScaleY:0.999716475035987 2025-05-29 19:18:21.063 [Thd =1] Info Default MaskScaleX:1.00000978031452,Orth_Y_BeforR:1.30858638520372 2025-05-29 19:25:51.524 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:25:51.524 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:25:52.869 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:25:52.869 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:25:59.964 [Thd =161] Info Default Chuck vacuum close 2025-05-29 19:26:00.965 [Thd =70] Info Default ChuckVac: :False 2025-05-29 19:26:06.691 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:540,p.Y:430,p.Width:120,p.Height:322 2025-05-29 19:26:10.970 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:26:10.970 [Thd =155] Info Default Chuck vacuum close 2025-05-29 19:26:11.971 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:26:17.921 [Thd =177] Info Default Chuck vacuum close 2025-05-29 19:26:18.921 [Thd =118] Info Default ChuckVac: :False 2025-05-29 19:26:21.824 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:546,p.Y:388,p.Width:136,p.Height:284 2025-05-29 19:26:24.190 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:540,p.Y:414,p.Width:146,p.Height:290 2025-05-29 19:26:28.626 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:26:28.626 [Thd =168] Info Default Chuck vacuum close 2025-05-29 19:26:29.627 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:27:22.394 [Thd =186] Info Default Chuck vacuum close 2025-05-29 19:27:23.395 [Thd =118] Info Default ChuckVac: :False 2025-05-29 19:27:26.573 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:446,p.Y:430,p.Width:214,p.Height:274 2025-05-29 19:27:28.409 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:452,p.Y:328,p.Width:404,p.Height:688 2025-05-29 19:27:29.929 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:27:29.929 [Thd =155] Info Default Chuck vacuum close 2025-05-29 19:27:30.931 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:27:33.380 [Thd =161] Info Default Alignment ... 2025-05-29 19:27:33.501 [Thd =143] Info Default Chuck vacuum close 2025-05-29 19:27:34.502 [Thd =177] Info Default ChuckVac: :False 2025-05-29 19:27:57.134 [Thd =177] Info Default OpenLamp Transmission 2025-05-29 19:27:57.134 [Thd =149] Info Default Switch light... 2025-05-29 19:27:57.942 [Thd =161] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:27:58.645 [Thd =177] Info Default CloseLamp Reflection 2025-05-29 19:28:00.810 [Thd =177] Info MMSFocus _isStop = true 2025-05-29 19:28:00.811 [Thd =173] Info Default Execute alignment 1/2 2025-05-29 19:28:04.925 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9993359,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:04.925 [Thd =177] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:28:05.047 [Thd =177] Info Default Flag:Fine1, Position:62.542788472651,-10.057822006635 2025-05-29 19:28:13.824 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9994065,xOffSet:611,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:13.825 [Thd =177] Info Default D2DMatchMark ******** :errorX:-1,errorY:0 2025-05-29 19:28:13.946 [Thd =177] Info Default Flag:Fine2, Position:-64.455510234091,-9.984763978066 2025-05-29 19:28:18.399 [Thd =70] Info Default Execute alignment 2/2 2025-05-29 19:28:26.787 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.999885,xOffSet:621,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:26.788 [Thd =177] Info Default D2DMatchMark ******** :errorX:9,errorY:149 2025-05-29 19:28:28.479 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9999015,xOffSet:621,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:30.169 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9985555,xOffSet:602,yOffSet:365,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:31.874 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9968994,xOffSet:606,yOffSet:413,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:33.550 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9995442,xOffSet:613,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:33.672 [Thd =177] Info Default Flag:Fine1, Position:62.6144180572197,-9.9415527212017 2025-05-29 19:28:42.445 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9996826,xOffSet:613,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:42.445 [Thd =177] Info Default D2DMatchMark ******** :errorX:1,errorY:149 2025-05-29 19:28:44.134 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9995261,xOffSet:613,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:45.824 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9998878,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:45.945 [Thd =177] Info Default Flag:Fine2, Position:-64.4546931427713,-9.94155273329036 2025-05-29 19:28:48.474 [Thd =173] Info Default Checking Mark ... 2025-05-29 19:28:56.861 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9997739,xOffSet:619,yOffSet:609,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:28:56.861 [Thd =177] Info Default D2DMatchMark ******** :errorX:7,errorY:97 2025-05-29 19:28:58.538 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9996307,xOffSet:619,yOffSet:609,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:00.218 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9995212,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:00.354 [Thd =177] Info Default Flag:Fine1, Position:62.5585906161508,-9.94558152389331 2025-05-29 19:29:09.138 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9985431,xOffSet:611,yOffSet:364,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:09.139 [Thd =177] Info Default D2DMatchMark ******** :errorX:-1,errorY:-148 2025-05-29 19:29:10.829 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9987963,xOffSet:611,yOffSet:364,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:12.520 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9997357,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:12.642 [Thd =177] Info Default Flag:Fine2, Position:-64.3695131657501,-9.94097720003731 2025-05-29 19:29:21.393 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.999562,xOffSet:614,yOffSet:669,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:21.393 [Thd =177] Info Default D2DMatchMark ******** :errorX:2,errorY:157 2025-05-29 19:29:23.084 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.9972143,xOffSet:614,yOffSet:631,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:24.774 [Thd =177] Info Default D2DSearchMark matchResult:0， score:0.999502,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:29:24.896 [Thd =177] Info Default Flag:Fine3, Position:-64.448050693821,-136.178226984193 2025-05-29 19:29:25.897 [Thd =177] Info Default IsAlignAngleOK fine1:62.5585906161508,-9.94558152389331,fine2:-64.3695131657501,-9.94097720003731 2025-05-29 19:29:25.897 [Thd =177] Info Default IsAlignAngleOK delta:-0.016000000000001. 2025-05-29 19:29:25.897 [Thd =122] Info Default Height difference : 0.40 um 2025-05-29 19:29:41.952 [Thd =177] Info MMSFocus _isStop = true 2025-05-29 19:29:41.953 [Thd =170] Info Default Alignment finish 2025-05-29 19:29:41.953 [Thd =130] Info Default Chuck vacuum open 2025-05-29 19:29:42.953 [Thd =177] Info Default ChuckVac: :True 2025-05-29 19:29:43.882 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:30:15.246 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:30:15.246 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:30:15.246 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:01.711 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:01.719 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:01.719 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:01.719 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:01.719 [Thd =70] Info Default located_pos:(62.5585906161508, -9.94558152389331) 2025-05-29 19:33:01.719 [Thd =70] Info Default deltax_stage 0, deltay_stage:-126.928103781901. 2025-05-29 19:33:01.720 [Thd =70] Info Default MoveStageForMarkCol102 point (-64.3695131657501, -9.94558152389331), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.720 [Thd =70] Info Default located_pos:(-64.3695131657501, -9.94558152389331) 2025-05-29 19:33:01.720 [Thd =70] Info Default deltax_stage 126.237249784156, deltay_stage:0. 2025-05-29 19:33:01.720 [Thd =70] Info Default MoveStageForMarkCol101 point (62.4800530728805, -136.182855738814), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.720 [Thd =70] Info Default deltax_stage 0, deltay_stage:-126.928102782467. 2025-05-29 19:33:01.720 [Thd =70] Info Default MoveStageForMarkCol102 point (-64.4480497095866, -136.182855738814), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4800530728805, -136.182855738814). 2025-05-29 19:33:01.720 [Thd =70] Info Default located_pos:(-64.4480497095866, -136.182855738814) 2025-05-29 19:33:01.720 [Thd =70] Info Default AliPt:(62.5585906161508, -9.94558152389331), GDS2StagePt:(62.5585906161508, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:01.720 [Thd =70] Info Default AliPt:(-64.3695131657501, -9.94097720003731), GDS2StagePt:(-64.3695131657501, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:01.720 [Thd =70] Info Default AliPt:(-64.448050693821, -136.178226984193), GDS2StagePt:(-64.4480497095866, -136.182855738814), XOffset:5, YOffset:5 2025-05-29 19:33:01.728 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:01.728 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:01.728 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:01.729 [Thd =1] Info Default deltax_stage -6.47458983451571, deltay_stage:0. 2025-05-29 19:33:01.729 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5626187328926, -3.47099043634665), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.729 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82957480391871. 2025-05-29 19:33:01.729 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3921935368113, -3.47099043634665), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5626187328926, -3.47099043634665). 2025-05-29 19:33:01.729 [Thd =1] Info Default located_pos:(66.3921935368113, -3.47099043634665) 2025-05-29 19:33:01.729 [Thd =1] Info Default deltax_stage 132.465924776883, deltay_stage:0. 2025-05-29 19:33:01.729 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4761779501842, -142.41153193698), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.729 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.625359968019. 2025-05-29 19:33:01.729 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1491820178343, -142.41153193698), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4761779501842, -142.41153193698). 2025-05-29 19:33:01.729 [Thd =1] Info Default located_pos:(-67.1491820178343, -142.41153193698) 2025-05-29 19:33:01.730 [Thd =1] Info Default deltax_stage -0.963576380074665, deltay_stage:0. 2025-05-29 19:33:01.730 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5591900978551, -8.98200495733718), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.730 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07361187121727. 2025-05-29 19:33:01.730 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6328019690724, -8.98200495733718), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5591900978551, -8.98200495733718). 2025-05-29 19:33:01.730 [Thd =1] Info Default located_pos:(63.6328019690724, -8.98200495733718) 2025-05-29 19:33:01.730 [Thd =1] Info Default deltax_stage 0.240818845067079, deltay_stage:0. 2025-05-29 19:33:01.730 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584407925409, -10.1864004155662), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.730 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.24770769028454. 2025-05-29 19:33:01.730 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3107331022564, -10.1864004155662), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5584407925409, -10.1864004155662). 2025-05-29 19:33:01.730 [Thd =1] Info Default located_pos:(62.3107331022564, -10.1864004155662) 2025-05-29 19:33:01.730 [Thd =1] Info Default deltax_stage -1.01635534611885, deltay_stage:0. 2025-05-29 19:33:01.730 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5592229338868, -8.92922598107865), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.730 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.671055814872. 2025-05-29 19:33:01.731 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1118328809849, -8.92922598107865), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5592229338868, -8.92922598107865). 2025-05-29 19:33:01.731 [Thd =1] Info Default located_pos:(-63.1118328809849, -8.92922598107865) 2025-05-29 19:33:01.731 [Thd =1] Info Default deltax_stage 0.281483818904911, deltay_stage:0. 2025-05-29 19:33:01.731 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584154931373, -10.2270653972739), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.731 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.141112127026. 2025-05-29 19:33:01.731 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5826966338892, -10.2270653972739), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5584154931373, -10.2270653972739). 2025-05-29 19:33:01.731 [Thd =1] Info Default located_pos:(-64.5826966338892, -10.2270653972739) 2025-05-29 19:33:01.731 [Thd =1] Info Default deltax_stage 126.079490885651, deltay_stage:0. 2025-05-29 19:33:01.731 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801512213774, -136.025096809778), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.731 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.876863238834. 2025-05-29 19:33:01.731 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3967120174563, -136.025096809778), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4801512213774, -136.025096809778). 2025-05-29 19:33:01.731 [Thd =1] Info Default located_pos:(-63.3967120174563, -136.025096809778) 2025-05-29 19:33:01.731 [Thd =1] Info Default deltax_stage 127.214669155324, deltay_stage:0. 2025-05-29 19:33:01.731 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794449788648, -137.160275299143), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.732 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.087498495536. 2025-05-29 19:33:01.732 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6080535166713, -137.160275299143), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4794449788648, -137.160275299143). 2025-05-29 19:33:01.732 [Thd =1] Info Default located_pos:(-64.6080535166713, -137.160275299143) 2025-05-29 19:33:01.732 [Thd =1] Info Default deltax_stage 126.020655923503, deltay_stage:0. 2025-05-29 19:33:01.732 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801878251009, -135.966261836244), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.732 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06496476921789. 2025-05-29 19:33:01.732 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5451525943188, -135.966261836244), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4801878251009, -135.966261836244). 2025-05-29 19:33:01.732 [Thd =1] Info Default located_pos:(63.5451525943188, -135.966261836244) 2025-05-29 19:33:01.732 [Thd =1] Info Default deltax_stage 127.206017160891, deltay_stage:0. 2025-05-29 19:33:01.732 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794503616372, -137.151623303035), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:01.732 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258084812344127. 2025-05-29 19:33:01.732 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2213655492931, -137.151623303035), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4794503616372, -137.151623303035). 2025-05-29 19:33:01.732 [Thd =1] Info Default located_pos:(62.2213655492931, -137.151623303035) 2025-05-29 19:33:02.217 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.225 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.225 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.225 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.226 [Thd =83] Info Default located_pos:(62.5585906161508, -9.94558152389331) 2025-05-29 19:33:02.226 [Thd =83] Info Default deltax_stage 0, deltay_stage:-126.928103781901. 2025-05-29 19:33:02.226 [Thd =83] Info Default MoveStageForMarkCol102 point (-64.3695131657501, -9.94558152389331), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.226 [Thd =83] Info Default located_pos:(-64.3695131657501, -9.94558152389331) 2025-05-29 19:33:02.226 [Thd =83] Info Default deltax_stage 126.237249784156, deltay_stage:0. 2025-05-29 19:33:02.226 [Thd =83] Info Default MoveStageForMarkCol101 point (62.4800530728805, -136.182855738814), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.226 [Thd =83] Info Default deltax_stage 0, deltay_stage:-126.928102782467. 2025-05-29 19:33:02.226 [Thd =83] Info Default MoveStageForMarkCol102 point (-64.4480497095866, -136.182855738814), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4800530728805, -136.182855738814). 2025-05-29 19:33:02.226 [Thd =83] Info Default located_pos:(-64.4480497095866, -136.182855738814) 2025-05-29 19:33:02.226 [Thd =83] Info Default AliPt:(62.5585906161508, -9.94558152389331), GDS2StagePt:(62.5585906161508, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.226 [Thd =83] Info Default AliPt:(-64.3695131657501, -9.94097720003731), GDS2StagePt:(-64.3695131657501, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.226 [Thd =83] Info Default AliPt:(-64.448050693821, -136.178226984193), GDS2StagePt:(-64.4480497095866, -136.182855738814), XOffset:5, YOffset:5 2025-05-29 19:33:02.233 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.233 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.233 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage -6.47458983451571, deltay_stage:0. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5626187328926, -3.47099043634665), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82957480391871. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3921935368113, -3.47099043634665), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5626187328926, -3.47099043634665). 2025-05-29 19:33:02.234 [Thd =1] Info Default located_pos:(66.3921935368113, -3.47099043634665) 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 132.465924776883, deltay_stage:0. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4761779501842, -142.41153193698), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.625359968019. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1491820178343, -142.41153193698), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4761779501842, -142.41153193698). 2025-05-29 19:33:02.234 [Thd =1] Info Default located_pos:(-67.1491820178343, -142.41153193698) 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage -0.963576380074665, deltay_stage:0. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5591900978551, -8.98200495733718), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07361187121727. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6328019690724, -8.98200495733718), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5591900978551, -8.98200495733718). 2025-05-29 19:33:02.234 [Thd =1] Info Default located_pos:(63.6328019690724, -8.98200495733718) 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0.240818845067079, deltay_stage:0. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584407925409, -10.1864004155662), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.24770769028454. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3107331022564, -10.1864004155662), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5584407925409, -10.1864004155662). 2025-05-29 19:33:02.234 [Thd =1] Info Default located_pos:(62.3107331022564, -10.1864004155662) 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage -1.01635534611885, deltay_stage:0. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5592229338868, -8.92922598107865), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.671055814872. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1118328809849, -8.92922598107865), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5592229338868, -8.92922598107865). 2025-05-29 19:33:02.234 [Thd =1] Info Default located_pos:(-63.1118328809849, -8.92922598107865) 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0.281483818904911, deltay_stage:0. 2025-05-29 19:33:02.234 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584154931373, -10.2270653972739), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.234 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.141112127026. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5826966338892, -10.2270653972739), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5584154931373, -10.2270653972739). 2025-05-29 19:33:02.235 [Thd =1] Info Default located_pos:(-64.5826966338892, -10.2270653972739) 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 126.079490885651, deltay_stage:0. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801512213774, -136.025096809778), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.876863238834. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3967120174563, -136.025096809778), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4801512213774, -136.025096809778). 2025-05-29 19:33:02.235 [Thd =1] Info Default located_pos:(-63.3967120174563, -136.025096809778) 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 127.214669155324, deltay_stage:0. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794449788648, -137.160275299143), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.087498495536. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6080535166713, -137.160275299143), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4794449788648, -137.160275299143). 2025-05-29 19:33:02.235 [Thd =1] Info Default located_pos:(-64.6080535166713, -137.160275299143) 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 126.020655923503, deltay_stage:0. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801878251009, -135.966261836244), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06496476921789. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5451525943188, -135.966261836244), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4801878251009, -135.966261836244). 2025-05-29 19:33:02.235 [Thd =1] Info Default located_pos:(63.5451525943188, -135.966261836244) 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 127.206017160891, deltay_stage:0. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794503616372, -137.151623303035), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.235 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258084812344127. 2025-05-29 19:33:02.235 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2213655492931, -137.151623303035), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4794503616372, -137.151623303035). 2025-05-29 19:33:02.235 [Thd =1] Info Default located_pos:(62.2213655492931, -137.151623303035) 2025-05-29 19:33:02.415 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.423 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.423 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.423 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.423 [Thd =136] Info Default located_pos:(62.5585906161508, -9.94558152389331) 2025-05-29 19:33:02.423 [Thd =136] Info Default deltax_stage 0, deltay_stage:-126.928103781901. 2025-05-29 19:33:02.424 [Thd =136] Info Default MoveStageForMarkCol102 point (-64.3695131657501, -9.94558152389331), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.424 [Thd =136] Info Default located_pos:(-64.3695131657501, -9.94558152389331) 2025-05-29 19:33:02.424 [Thd =136] Info Default deltax_stage 126.237249784156, deltay_stage:0. 2025-05-29 19:33:02.424 [Thd =136] Info Default MoveStageForMarkCol101 point (62.4800530728805, -136.182855738814), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.424 [Thd =136] Info Default deltax_stage 0, deltay_stage:-126.928102782467. 2025-05-29 19:33:02.424 [Thd =136] Info Default MoveStageForMarkCol102 point (-64.4480497095866, -136.182855738814), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4800530728805, -136.182855738814). 2025-05-29 19:33:02.424 [Thd =136] Info Default located_pos:(-64.4480497095866, -136.182855738814) 2025-05-29 19:33:02.424 [Thd =136] Info Default AliPt:(62.5585906161508, -9.94558152389331), GDS2StagePt:(62.5585906161508, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.424 [Thd =136] Info Default AliPt:(-64.3695131657501, -9.94097720003731), GDS2StagePt:(-64.3695131657501, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.424 [Thd =136] Info Default AliPt:(-64.448050693821, -136.178226984193), GDS2StagePt:(-64.4480497095866, -136.182855738814), XOffset:5, YOffset:5 2025-05-29 19:33:02.430 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.431 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.431 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage -6.47458983451571, deltay_stage:0. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5626187328926, -3.47099043634665), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82957480391871. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3921935368113, -3.47099043634665), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5626187328926, -3.47099043634665). 2025-05-29 19:33:02.431 [Thd =1] Info Default located_pos:(66.3921935368113, -3.47099043634665) 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage 132.465924776883, deltay_stage:0. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4761779501842, -142.41153193698), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.625359968019. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1491820178343, -142.41153193698), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4761779501842, -142.41153193698). 2025-05-29 19:33:02.431 [Thd =1] Info Default located_pos:(-67.1491820178343, -142.41153193698) 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage -0.963576380074665, deltay_stage:0. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5591900978551, -8.98200495733718), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07361187121727. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6328019690724, -8.98200495733718), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5591900978551, -8.98200495733718). 2025-05-29 19:33:02.431 [Thd =1] Info Default located_pos:(63.6328019690724, -8.98200495733718) 2025-05-29 19:33:02.431 [Thd =1] Info Default deltax_stage 0.240818845067079, deltay_stage:0. 2025-05-29 19:33:02.431 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584407925409, -10.1864004155662), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.24770769028454. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3107331022564, -10.1864004155662), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5584407925409, -10.1864004155662). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(62.3107331022564, -10.1864004155662) 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage -1.01635534611885, deltay_stage:0. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5592229338868, -8.92922598107865), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.671055814872. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1118328809849, -8.92922598107865), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5592229338868, -8.92922598107865). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(-63.1118328809849, -8.92922598107865) 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0.281483818904911, deltay_stage:0. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584154931373, -10.2270653972739), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.141112127026. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5826966338892, -10.2270653972739), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5584154931373, -10.2270653972739). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(-64.5826966338892, -10.2270653972739) 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 126.079490885651, deltay_stage:0. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801512213774, -136.025096809778), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.876863238834. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3967120174563, -136.025096809778), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4801512213774, -136.025096809778). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(-63.3967120174563, -136.025096809778) 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 127.214669155324, deltay_stage:0. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794449788648, -137.160275299143), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.087498495536. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6080535166713, -137.160275299143), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4794449788648, -137.160275299143). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(-64.6080535166713, -137.160275299143) 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 126.020655923503, deltay_stage:0. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801878251009, -135.966261836244), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06496476921789. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5451525943188, -135.966261836244), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4801878251009, -135.966261836244). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(63.5451525943188, -135.966261836244) 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 127.206017160891, deltay_stage:0. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794503616372, -137.151623303035), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.432 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258084812344127. 2025-05-29 19:33:02.432 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2213655492931, -137.151623303035), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4794503616372, -137.151623303035). 2025-05-29 19:33:02.432 [Thd =1] Info Default located_pos:(62.2213655492931, -137.151623303035) 2025-05-29 19:33:02.604 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.611 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.611 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.611 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.611 [Thd =130] Info Default located_pos:(62.5585906161508, -9.94558152389331) 2025-05-29 19:33:02.611 [Thd =130] Info Default deltax_stage 0, deltay_stage:-126.928103781901. 2025-05-29 19:33:02.611 [Thd =130] Info Default MoveStageForMarkCol102 point (-64.3695131657501, -9.94558152389331), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.611 [Thd =130] Info Default located_pos:(-64.3695131657501, -9.94558152389331) 2025-05-29 19:33:02.612 [Thd =130] Info Default deltax_stage 126.237249784156, deltay_stage:0. 2025-05-29 19:33:02.612 [Thd =130] Info Default MoveStageForMarkCol101 point (62.4800530728805, -136.182855738814), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.612 [Thd =130] Info Default deltax_stage 0, deltay_stage:-126.928102782467. 2025-05-29 19:33:02.612 [Thd =130] Info Default MoveStageForMarkCol102 point (-64.4480497095866, -136.182855738814), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4800530728805, -136.182855738814). 2025-05-29 19:33:02.612 [Thd =130] Info Default located_pos:(-64.4480497095866, -136.182855738814) 2025-05-29 19:33:02.612 [Thd =130] Info Default AliPt:(62.5585906161508, -9.94558152389331), GDS2StagePt:(62.5585906161508, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.612 [Thd =130] Info Default AliPt:(-64.3695131657501, -9.94097720003731), GDS2StagePt:(-64.3695131657501, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.612 [Thd =130] Info Default AliPt:(-64.448050693821, -136.178226984193), GDS2StagePt:(-64.4480497095866, -136.182855738814), XOffset:5, YOffset:5 2025-05-29 19:33:02.618 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.618 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.618 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage -6.47458983451571, deltay_stage:0. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5626187328926, -3.47099043634665), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82957480391871. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3921935368113, -3.47099043634665), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5626187328926, -3.47099043634665). 2025-05-29 19:33:02.619 [Thd =1] Info Default located_pos:(66.3921935368113, -3.47099043634665) 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage 132.465924776883, deltay_stage:0. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4761779501842, -142.41153193698), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.625359968019. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1491820178343, -142.41153193698), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4761779501842, -142.41153193698). 2025-05-29 19:33:02.619 [Thd =1] Info Default located_pos:(-67.1491820178343, -142.41153193698) 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage -0.963576380074665, deltay_stage:0. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5591900978551, -8.98200495733718), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07361187121727. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6328019690724, -8.98200495733718), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5591900978551, -8.98200495733718). 2025-05-29 19:33:02.619 [Thd =1] Info Default located_pos:(63.6328019690724, -8.98200495733718) 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage 0.240818845067079, deltay_stage:0. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584407925409, -10.1864004155662), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.619 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.24770769028454. 2025-05-29 19:33:02.619 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3107331022564, -10.1864004155662), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5584407925409, -10.1864004155662). 2025-05-29 19:33:02.624 [Thd =1] Info Default located_pos:(62.3107331022564, -10.1864004155662) 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage -1.01635534611885, deltay_stage:0. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5592229338868, -8.92922598107865), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.671055814872. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1118328809849, -8.92922598107865), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5592229338868, -8.92922598107865). 2025-05-29 19:33:02.624 [Thd =1] Info Default located_pos:(-63.1118328809849, -8.92922598107865) 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 0.281483818904911, deltay_stage:0. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584154931373, -10.2270653972739), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.141112127026. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5826966338892, -10.2270653972739), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5584154931373, -10.2270653972739). 2025-05-29 19:33:02.624 [Thd =1] Info Default located_pos:(-64.5826966338892, -10.2270653972739) 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 126.079490885651, deltay_stage:0. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801512213774, -136.025096809778), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.876863238834. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3967120174563, -136.025096809778), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4801512213774, -136.025096809778). 2025-05-29 19:33:02.624 [Thd =1] Info Default located_pos:(-63.3967120174563, -136.025096809778) 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 127.214669155324, deltay_stage:0. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794449788648, -137.160275299143), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.087498495536. 2025-05-29 19:33:02.624 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6080535166713, -137.160275299143), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4794449788648, -137.160275299143). 2025-05-29 19:33:02.624 [Thd =1] Info Default located_pos:(-64.6080535166713, -137.160275299143) 2025-05-29 19:33:02.624 [Thd =1] Info Default deltax_stage 126.020655923503, deltay_stage:0. 2025-05-29 19:33:02.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801878251009, -135.966261836244), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06496476921789. 2025-05-29 19:33:02.625 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5451525943188, -135.966261836244), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4801878251009, -135.966261836244). 2025-05-29 19:33:02.625 [Thd =1] Info Default located_pos:(63.5451525943188, -135.966261836244) 2025-05-29 19:33:02.625 [Thd =1] Info Default deltax_stage 127.206017160891, deltay_stage:0. 2025-05-29 19:33:02.625 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794503616372, -137.151623303035), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.625 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258084812344127. 2025-05-29 19:33:02.625 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2213655492931, -137.151623303035), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4794503616372, -137.151623303035). 2025-05-29 19:33:02.625 [Thd =1] Info Default located_pos:(62.2213655492931, -137.151623303035) 2025-05-29 19:33:02.746 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.754 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.754 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.754 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.755 [Thd =168] Info Default located_pos:(62.5585906161508, -9.94558152389331) 2025-05-29 19:33:02.755 [Thd =168] Info Default deltax_stage 0, deltay_stage:-126.928103781901. 2025-05-29 19:33:02.755 [Thd =168] Info Default MoveStageForMarkCol102 point (-64.3695131657501, -9.94558152389331), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.755 [Thd =168] Info Default located_pos:(-64.3695131657501, -9.94558152389331) 2025-05-29 19:33:02.755 [Thd =168] Info Default deltax_stage 126.237249784156, deltay_stage:0. 2025-05-29 19:33:02.755 [Thd =168] Info Default MoveStageForMarkCol101 point (62.4800530728805, -136.182855738814), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.755 [Thd =168] Info Default deltax_stage 0, deltay_stage:-126.928102782467. 2025-05-29 19:33:02.755 [Thd =168] Info Default MoveStageForMarkCol102 point (-64.4480497095866, -136.182855738814), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4800530728805, -136.182855738814). 2025-05-29 19:33:02.755 [Thd =168] Info Default located_pos:(-64.4480497095866, -136.182855738814) 2025-05-29 19:33:02.755 [Thd =168] Info Default AliPt:(62.5585906161508, -9.94558152389331), GDS2StagePt:(62.5585906161508, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.755 [Thd =168] Info Default AliPt:(-64.3695131657501, -9.94097720003731), GDS2StagePt:(-64.3695131657501, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.755 [Thd =168] Info Default AliPt:(-64.448050693821, -136.178226984193), GDS2StagePt:(-64.4480497095866, -136.182855738814), XOffset:5, YOffset:5 2025-05-29 19:33:02.771 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.771 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.771 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage -6.47458983451571, deltay_stage:0. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5626187328926, -3.47099043634665), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82957480391871. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3921935368113, -3.47099043634665), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5626187328926, -3.47099043634665). 2025-05-29 19:33:02.772 [Thd =1] Info Default located_pos:(66.3921935368113, -3.47099043634665) 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 132.465924776883, deltay_stage:0. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4761779501842, -142.41153193698), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.625359968019. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1491820178343, -142.41153193698), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4761779501842, -142.41153193698). 2025-05-29 19:33:02.772 [Thd =1] Info Default located_pos:(-67.1491820178343, -142.41153193698) 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage -0.963576380074665, deltay_stage:0. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5591900978551, -8.98200495733718), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07361187121727. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6328019690724, -8.98200495733718), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5591900978551, -8.98200495733718). 2025-05-29 19:33:02.772 [Thd =1] Info Default located_pos:(63.6328019690724, -8.98200495733718) 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 0.240818845067079, deltay_stage:0. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584407925409, -10.1864004155662), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.24770769028454. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3107331022564, -10.1864004155662), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5584407925409, -10.1864004155662). 2025-05-29 19:33:02.772 [Thd =1] Info Default located_pos:(62.3107331022564, -10.1864004155662) 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage -1.01635534611885, deltay_stage:0. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5592229338868, -8.92922598107865), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.671055814872. 2025-05-29 19:33:02.772 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1118328809849, -8.92922598107865), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5592229338868, -8.92922598107865). 2025-05-29 19:33:02.772 [Thd =1] Info Default located_pos:(-63.1118328809849, -8.92922598107865) 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 0.281483818904911, deltay_stage:0. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584154931373, -10.2270653972739), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.141112127026. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5826966338892, -10.2270653972739), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5584154931373, -10.2270653972739). 2025-05-29 19:33:02.773 [Thd =1] Info Default located_pos:(-64.5826966338892, -10.2270653972739) 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 126.079490885651, deltay_stage:0. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801512213774, -136.025096809778), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.876863238834. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3967120174563, -136.025096809778), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4801512213774, -136.025096809778). 2025-05-29 19:33:02.773 [Thd =1] Info Default located_pos:(-63.3967120174563, -136.025096809778) 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 127.214669155324, deltay_stage:0. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794449788648, -137.160275299143), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.087498495536. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6080535166713, -137.160275299143), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4794449788648, -137.160275299143). 2025-05-29 19:33:02.773 [Thd =1] Info Default located_pos:(-64.6080535166713, -137.160275299143) 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 126.020655923503, deltay_stage:0. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801878251009, -135.966261836244), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06496476921789. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5451525943188, -135.966261836244), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4801878251009, -135.966261836244). 2025-05-29 19:33:02.773 [Thd =1] Info Default located_pos:(63.5451525943188, -135.966261836244) 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 127.206017160891, deltay_stage:0. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794503616372, -137.151623303035), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258084812344127. 2025-05-29 19:33:02.773 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2213655492931, -137.151623303035), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4794503616372, -137.151623303035). 2025-05-29 19:33:02.773 [Thd =1] Info Default located_pos:(62.2213655492931, -137.151623303035) 2025-05-29 19:33:02.932 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.944 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.944 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.944 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.945 [Thd =67] Info Default located_pos:(62.5585906161508, -9.94558152389331) 2025-05-29 19:33:02.945 [Thd =67] Info Default deltax_stage 0, deltay_stage:-126.928103781901. 2025-05-29 19:33:02.945 [Thd =67] Info Default MoveStageForMarkCol102 point (-64.3695131657501, -9.94558152389331), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.945 [Thd =67] Info Default located_pos:(-64.3695131657501, -9.94558152389331) 2025-05-29 19:33:02.945 [Thd =67] Info Default deltax_stage 126.237249784156, deltay_stage:0. 2025-05-29 19:33:02.945 [Thd =67] Info Default MoveStageForMarkCol101 point (62.4800530728805, -136.182855738814), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.945 [Thd =67] Info Default deltax_stage 0, deltay_stage:-126.928102782467. 2025-05-29 19:33:02.945 [Thd =67] Info Default MoveStageForMarkCol102 point (-64.4480497095866, -136.182855738814), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.4800530728805, -136.182855738814). 2025-05-29 19:33:02.945 [Thd =67] Info Default located_pos:(-64.4480497095866, -136.182855738814) 2025-05-29 19:33:02.945 [Thd =67] Info Default AliPt:(62.5585906161508, -9.94558152389331), GDS2StagePt:(62.5585906161508, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.945 [Thd =67] Info Default AliPt:(-64.3695131657501, -9.94097720003731), GDS2StagePt:(-64.3695131657501, -9.94558152389331), XOffset:5, YOffset:5 2025-05-29 19:33:02.945 [Thd =67] Info Default AliPt:(-64.448050693821, -136.178226984193), GDS2StagePt:(-64.4480497095866, -136.182855738814), XOffset:5, YOffset:5 2025-05-29 19:33:02.952 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:33:02.952 [Thd =1] Info Default MaskScaleY:1.00056643261781 2025-05-29 19:33:02.952 [Thd =1] Info Default MaskScaleX:1.00000064335879,Orth_Y_BeforR:-2.13876768853952 2025-05-29 19:33:02.952 [Thd =1] Info Default deltax_stage -6.47458983451571, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5626187328926, -3.47099043634665), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82957480391871. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3921935368113, -3.47099043634665), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5626187328926, -3.47099043634665). 2025-05-29 19:33:02.953 [Thd =1] Info Default located_pos:(66.3921935368113, -3.47099043634665) 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 132.465924776883, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4761779501842, -142.41153193698), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.625359968019. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1491820178343, -142.41153193698), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.4761779501842, -142.41153193698). 2025-05-29 19:33:02.953 [Thd =1] Info Default located_pos:(-67.1491820178343, -142.41153193698) 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage -0.963576380074665, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5591900978551, -8.98200495733718), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07361187121727. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6328019690724, -8.98200495733718), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5591900978551, -8.98200495733718). 2025-05-29 19:33:02.953 [Thd =1] Info Default located_pos:(63.6328019690724, -8.98200495733718) 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0.240818845067079, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584407925409, -10.1864004155662), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.24770769028454. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3107331022564, -10.1864004155662), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.5584407925409, -10.1864004155662). 2025-05-29 19:33:02.953 [Thd =1] Info Default located_pos:(62.3107331022564, -10.1864004155662) 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage -1.01635534611885, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5592229338868, -8.92922598107865), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.671055814872. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1118328809849, -8.92922598107865), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5592229338868, -8.92922598107865). 2025-05-29 19:33:02.953 [Thd =1] Info Default located_pos:(-63.1118328809849, -8.92922598107865) 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0.281483818904911, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5584154931373, -10.2270653972739), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.141112127026. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5826966338892, -10.2270653972739), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5584154931373, -10.2270653972739). 2025-05-29 19:33:02.953 [Thd =1] Info Default located_pos:(-64.5826966338892, -10.2270653972739) 2025-05-29 19:33:02.953 [Thd =1] Info Default deltax_stage 126.079490885651, deltay_stage:0. 2025-05-29 19:33:02.953 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801512213774, -136.025096809778), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.876863238834. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3967120174563, -136.025096809778), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.4801512213774, -136.025096809778). 2025-05-29 19:33:02.954 [Thd =1] Info Default located_pos:(-63.3967120174563, -136.025096809778) 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 127.214669155324, deltay_stage:0. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794449788648, -137.160275299143), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.087498495536. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6080535166713, -137.160275299143), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.4794449788648, -137.160275299143). 2025-05-29 19:33:02.954 [Thd =1] Info Default located_pos:(-64.6080535166713, -137.160275299143) 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 126.020655923503, deltay_stage:0. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4801878251009, -135.966261836244), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06496476921789. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5451525943188, -135.966261836244), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.4801878251009, -135.966261836244). 2025-05-29 19:33:02.954 [Thd =1] Info Default located_pos:(63.5451525943188, -135.966261836244) 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 127.206017160891, deltay_stage:0. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol101 point (62.4794503616372, -137.151623303035), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5585906161508, -9.94558152389331). 2025-05-29 19:33:02.954 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258084812344127. 2025-05-29 19:33:02.954 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2213655492931, -137.151623303035), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.4794503616372, -137.151623303035). 2025-05-29 19:33:02.954 [Thd =1] Info Default located_pos:(62.2213655492931, -137.151623303035) 2025-05-29 19:33:04.811 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:33:04.811 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:33:06.674 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:33:06.675 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:33:30.028 [Thd =161] Info Default Chuck vacuum close 2025-05-29 19:33:31.029 [Thd =187] Info Default ChuckVac: :False 2025-05-29 19:33:36.744 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:578,p.Y:430,p.Width:122,p.Height:220 2025-05-29 19:33:39.191 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:534,p.Y:436,p.Width:180,p.Height:212 2025-05-29 19:33:40.615 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:33:40.615 [Thd =54] Info Default Chuck vacuum close 2025-05-29 19:33:41.616 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:33:47.581 [Thd =155] Info Default Chuck vacuum close 2025-05-29 19:33:48.582 [Thd =173] Info Default ChuckVac: :False 2025-05-29 19:33:51.824 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:540,p.Y:444,p.Width:226,p.Height:268 2025-05-29 19:33:54.112 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:556,p.Y:412,p.Width:202,p.Height:298 2025-05-29 19:33:55.542 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:33:55.543 [Thd =73] Info Default Chuck vacuum close 2025-05-29 19:33:56.544 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:34:02.388 [Thd =20] Info Default Chuck vacuum close 2025-05-29 19:34:03.388 [Thd =146] Info Default ChuckVac: :False 2025-05-29 19:34:05.000 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:492,p.Y:416,p.Width:290,p.Height:314 2025-05-29 19:34:06.719 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:562,p.Y:416,p.Width:172,p.Height:250 2025-05-29 19:34:07.638 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:34:07.638 [Thd =173] Info Default Chuck vacuum close 2025-05-29 19:34:08.639 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:34:11.282 [Thd =73] Info Default Alignment ... 2025-05-29 19:34:11.403 [Thd =170] Info Default Chuck vacuum close 2025-05-29 19:34:12.403 [Thd =155] Info Default ChuckVac: :False 2025-05-29 19:34:35.035 [Thd =184] Info Default Switch light... 2025-05-29 19:34:35.035 [Thd =155] Info Default OpenLamp Transmission 2025-05-29 19:34:35.843 [Thd =171] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:34:36.545 [Thd =155] Info Default CloseLamp Reflection 2025-05-29 19:34:38.137 [Thd =155] Info MMSFocus _isStop = true 2025-05-29 19:34:38.137 [Thd =165] Info Default Execute alignment 1/2 2025-05-29 19:34:42.251 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9998831,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:34:42.251 [Thd =155] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:34:42.373 [Thd =155] Info Default Flag:Fine1, Position:62.542788472651,-10.057822006635 2025-05-29 19:34:51.159 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.999687,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:34:51.159 [Thd =155] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:34:51.280 [Thd =155] Info Default Flag:Fine2, Position:-64.455510234091,-9.984476207825 2025-05-29 19:34:55.743 [Thd =119] Info Default Execute alignment 2/2 2025-05-29 19:35:04.131 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9997718,xOffSet:621,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:04.131 [Thd =155] Info Default D2DMatchMark ******** :errorX:9,errorY:150 2025-05-29 19:35:05.817 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9997384,xOffSet:621,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:07.506 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9998491,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:07.628 [Thd =155] Info Default Flag:Fine1, Position:62.5433919905351,-9.94569650652741 2025-05-29 19:35:16.403 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.999642,xOffSet:614,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:16.404 [Thd =155] Info Default D2DMatchMark ******** :errorX:2,errorY:150 2025-05-29 19:35:18.098 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9964582,xOffSet:612,yOffSet:572,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:19.756 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9997225,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:19.878 [Thd =155] Info Default Flag:Fine2, Position:-64.4290285743509,-9.94109219490346 2025-05-29 19:35:22.802 [Thd =54] Info Default Checking Mark ... 2025-05-29 19:35:31.187 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9996878,xOffSet:603,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:31.187 [Thd =155] Info Default D2DMatchMark ******** :errorX:-9,errorY:-139 2025-05-29 19:35:32.877 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9996276,xOffSet:603,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:34.566 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9992879,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:34.688 [Thd =155] Info Default Flag:Fine1, Position:62.6288485102225,-9.93315565994408 2025-05-29 19:35:43.475 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9993991,xOffSet:611,yOffSet:463,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:43.475 [Thd =155] Info Default D2DMatchMark ******** :errorX:-1,errorY:-49 2025-05-29 19:35:45.133 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9994819,xOffSet:611,yOffSet:463,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:46.792 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9994461,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:46.914 [Thd =155] Info Default Flag:Fine2, Position:-64.3953707815248,-9.93775998380309 2025-05-29 19:35:55.668 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9997038,xOffSet:614,yOffSet:679,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:55.668 [Thd =155] Info Default D2DMatchMark ******** :errorX:2,errorY:167 2025-05-29 19:35:57.370 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9997388,xOffSet:614,yOffSet:679,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:35:59.070 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9982514,xOffSet:610,yOffSet:348,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:36:00.772 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9984567,xOffSet:610,yOffSet:348,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:36:02.477 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9996108,xOffSet:612,yOffSet:510,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:36:04.077 [Thd =155] Info Default D2DSearchMark matchResult:0， score:0.9997737,xOffSet:614,yOffSet:673,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:36:04.199 [Thd =155] Info Default Flag:Fine3, Position:-64.3591160791408,-136.174431434332 2025-05-29 19:36:05.201 [Thd =155] Info Default IsAlignAngleOK fine1:62.6288485102225,-9.93315565994408,fine2:-64.3953707815248,-9.93775998380309 2025-05-29 19:36:05.201 [Thd =155] Info Default IsAlignAngleOK delta:0.0160000000104701. 2025-05-29 19:36:05.201 [Thd =67] Info Default Height difference : 0.40 um 2025-05-29 19:36:21.277 [Thd =155] Info MMSFocus _isStop = true 2025-05-29 19:36:21.277 [Thd =20] Info Default Alignment finish 2025-05-29 19:36:21.277 [Thd =173] Info Default Chuck vacuum open 2025-05-29 19:36:22.278 [Thd =155] Info Default ChuckVac: :True 2025-05-29 19:36:23.221 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:37:30.866 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:30.866 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:30.866 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:34.547 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:35.736 [Thd =39] Error Default ReadDeviceCmd failed. 2025-05-29 19:37:36.282 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:36.290 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:36.290 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:36.291 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:36.291 [Thd =119] Info Default located_pos:(62.6288485102225, -9.93315565994408) 2025-05-29 19:37:36.291 [Thd =119] Info Default deltax_stage 0, deltay_stage:-127.024219291747. 2025-05-29 19:37:36.291 [Thd =119] Info Default MoveStageForMarkCol102 point (-64.3953707815248, -9.93315565994408), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.291 [Thd =119] Info Default located_pos:(-64.3953707815248, -9.93315565994408) 2025-05-29 19:37:36.291 [Thd =119] Info Default deltax_stage 126.236671450529, deltay_stage:0. 2025-05-29 19:37:36.291 [Thd =119] Info Default MoveStageForMarkCol101 point (62.6651032141017, -136.169832316581), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.291 [Thd =119] Info Default deltax_stage 0, deltay_stage:-127.024218291557. 2025-05-29 19:37:36.291 [Thd =119] Info Default MoveStageForMarkCol102 point (-64.359115077455, -136.169832316581), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.6651032141017, -136.169832316581). 2025-05-29 19:37:36.291 [Thd =119] Info Default located_pos:(-64.359115077455, -136.169832316581) 2025-05-29 19:37:36.291 [Thd =119] Info Default AliPt:(62.6288485102225, -9.93315565994408), GDS2StagePt:(62.6288485102225, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:36.291 [Thd =119] Info Default AliPt:(-64.3953707815248, -9.93775998380309), GDS2StagePt:(-64.3953707815248, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:36.291 [Thd =119] Info Default AliPt:(-64.3591160791408, -136.174431434332), GDS2StagePt:(-64.359115077455, -136.169832316581), XOffset:5, YOffset:5 2025-05-29 19:37:36.299 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:36.299 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:36.299 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:36.300 [Thd =1] Info Default deltax_stage -6.47456017232784, deltay_stage:0. 2025-05-29 19:37:36.300 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6269890405526, -3.45859522059985), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.300 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83247472540029. 2025-05-29 19:37:36.300 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4594637659529, -3.45859522059985), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6269890405526, -3.45859522059985). 2025-05-29 19:37:36.300 [Thd =1] Info Default located_pos:(66.4594637659529, -3.45859522059985) 2025-05-29 19:37:36.300 [Thd =1] Info Default deltax_stage 132.465317907684, deltay_stage:0. 2025-05-29 19:37:36.300 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6668920582646, -142.398479030611), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.300 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.723517958181. 2025-05-29 19:37:36.300 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.0566258999162, -142.398479030611), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.6668920582646, -142.398479030611). 2025-05-29 19:37:36.300 [Thd =1] Info Default located_pos:(-67.0566258999162, -142.398479030611) 2025-05-29 19:37:36.300 [Thd =1] Info Default deltax_stage -0.963571965619952, deltay_stage:0. 2025-05-29 19:37:36.300 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285717759275, -8.9695836545856), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.300 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07442485706757. 2025-05-29 19:37:36.300 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7029966329951, -8.9695836545856), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6285717759275, -8.9695836545856). 2025-05-29 19:37:36.300 [Thd =1] Info Default located_pos:(63.7029966329951, -8.9695836545856) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0.240817741798145, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6289176721849, -10.1739734116738), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247895265378118. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3810224068067, -10.1739734116738), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6289176721849, -10.1739734116738). 2025-05-29 19:37:36.301 [Thd =1] Info Default located_pos:(62.3810224068067, -10.1739734116738) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage -1.01635068986664, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285566180736, -8.91680492816227), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.766219433036. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.137662814962, -8.91680492816227), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6285566180736, -8.91680492816227). 2025-05-29 19:37:36.301 [Thd =1] Info Default located_pos:(-63.137662814962, -8.91680492816227) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0.281482529336593, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.628929350961, -10.2146382008893), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.237388936105. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.608459585144, -10.2146382008893), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.628929350961, -10.2146382008893). 2025-05-29 19:37:36.301 [Thd =1] Info Default located_pos:(-64.608459585144, -10.2146382008893) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 126.078913274769, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650579065387, -136.012074134315), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.972182703378. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.307124796839, -136.012074134315), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.6650579065387, -136.012074134315). 2025-05-29 19:37:36.301 [Thd =1] Info Default located_pos:(-63.307124796839, -136.012074134315) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 127.214086343824, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653839240342, -137.147247250186), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.183734706029. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5183507819946, -137.147247250186), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.6653839240342, -137.147247250186). 2025-05-29 19:37:36.301 [Thd =1] Info Default located_pos:(-64.5183507819946, -137.147247250186) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 126.020078582163, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650410094332, -135.953239439283), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06577120710448. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7308122165376, -135.953239439283), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.6650410094332, -135.953239439283). 2025-05-29 19:37:36.301 [Thd =1] Info Default located_pos:(63.7308122165376, -135.953239439283) 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 127.205434389028, deltay_stage:0. 2025-05-29 19:37:36.301 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653814392249, -137.138595295033), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:36.301 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258280245448246. 2025-05-29 19:37:36.302 [Thd =1] Info Default MoveStageForMarkCol102 point (62.4071011937766, -137.138595295033), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.6653814392249, -137.138595295033). 2025-05-29 19:37:36.302 [Thd =1] Info Default located_pos:(62.4071011937766, -137.138595295033) 2025-05-29 19:37:37.861 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:37.870 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:37.870 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:37.870 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:37.870 [Thd =180] Info Default located_pos:(62.6288485102225, -9.93315565994408) 2025-05-29 19:37:37.870 [Thd =180] Info Default deltax_stage 0, deltay_stage:-127.024219291747. 2025-05-29 19:37:37.870 [Thd =180] Info Default MoveStageForMarkCol102 point (-64.3953707815248, -9.93315565994408), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.870 [Thd =180] Info Default located_pos:(-64.3953707815248, -9.93315565994408) 2025-05-29 19:37:37.870 [Thd =180] Info Default deltax_stage 126.236671450529, deltay_stage:0. 2025-05-29 19:37:37.870 [Thd =180] Info Default MoveStageForMarkCol101 point (62.6651032141017, -136.169832316581), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.871 [Thd =180] Info Default deltax_stage 0, deltay_stage:-127.024218291557. 2025-05-29 19:37:37.871 [Thd =180] Info Default MoveStageForMarkCol102 point (-64.359115077455, -136.169832316581), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.6651032141017, -136.169832316581). 2025-05-29 19:37:37.871 [Thd =180] Info Default located_pos:(-64.359115077455, -136.169832316581) 2025-05-29 19:37:37.871 [Thd =180] Info Default AliPt:(62.6288485102225, -9.93315565994408), GDS2StagePt:(62.6288485102225, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:37.871 [Thd =180] Info Default AliPt:(-64.3953707815248, -9.93775998380309), GDS2StagePt:(-64.3953707815248, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:37.871 [Thd =180] Info Default AliPt:(-64.3591160791408, -136.174431434332), GDS2StagePt:(-64.359115077455, -136.169832316581), XOffset:5, YOffset:5 2025-05-29 19:37:37.882 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:37.882 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:37.882 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:37.882 [Thd =1] Info Default deltax_stage -6.47456017232784, deltay_stage:0. 2025-05-29 19:37:37.882 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6269890405526, -3.45859522059985), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.882 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83247472540029. 2025-05-29 19:37:37.882 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4594637659529, -3.45859522059985), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6269890405526, -3.45859522059985). 2025-05-29 19:37:37.882 [Thd =1] Info Default located_pos:(66.4594637659529, -3.45859522059985) 2025-05-29 19:37:37.882 [Thd =1] Info Default deltax_stage 132.465317907684, deltay_stage:0. 2025-05-29 19:37:37.882 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6668920582646, -142.398479030611), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.882 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.723517958181. 2025-05-29 19:37:37.882 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.0566258999162, -142.398479030611), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.6668920582646, -142.398479030611). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(-67.0566258999162, -142.398479030611) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage -0.963571965619952, deltay_stage:0. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285717759275, -8.9695836545856), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07442485706757. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7029966329951, -8.9695836545856), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6285717759275, -8.9695836545856). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(63.7029966329951, -8.9695836545856) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0.240817741798145, deltay_stage:0. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6289176721849, -10.1739734116738), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247895265378118. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3810224068067, -10.1739734116738), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6289176721849, -10.1739734116738). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(62.3810224068067, -10.1739734116738) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage -1.01635068986664, deltay_stage:0. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285566180736, -8.91680492816227), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.766219433036. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.137662814962, -8.91680492816227), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6285566180736, -8.91680492816227). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(-63.137662814962, -8.91680492816227) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0.281482529336593, deltay_stage:0. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol101 point (62.628929350961, -10.2146382008893), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.237388936105. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.608459585144, -10.2146382008893), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.628929350961, -10.2146382008893). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(-64.608459585144, -10.2146382008893) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 126.078913274769, deltay_stage:0. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650579065387, -136.012074134315), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.972182703378. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.307124796839, -136.012074134315), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.6650579065387, -136.012074134315). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(-63.307124796839, -136.012074134315) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 127.214086343824, deltay_stage:0. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653839240342, -137.147247250186), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.183734706029. 2025-05-29 19:37:37.883 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5183507819946, -137.147247250186), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.6653839240342, -137.147247250186). 2025-05-29 19:37:37.883 [Thd =1] Info Default located_pos:(-64.5183507819946, -137.147247250186) 2025-05-29 19:37:37.883 [Thd =1] Info Default deltax_stage 126.020078582163, deltay_stage:0. 2025-05-29 19:37:37.884 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650410094332, -135.953239439283), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.884 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06577120710448. 2025-05-29 19:37:37.884 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7308122165376, -135.953239439283), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.6650410094332, -135.953239439283). 2025-05-29 19:37:37.884 [Thd =1] Info Default located_pos:(63.7308122165376, -135.953239439283) 2025-05-29 19:37:37.884 [Thd =1] Info Default deltax_stage 127.205434389028, deltay_stage:0. 2025-05-29 19:37:37.884 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653814392249, -137.138595295033), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:37.884 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258280245448246. 2025-05-29 19:37:37.884 [Thd =1] Info Default MoveStageForMarkCol102 point (62.4071011937766, -137.138595295033), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.6653814392249, -137.138595295033). 2025-05-29 19:37:37.884 [Thd =1] Info Default located_pos:(62.4071011937766, -137.138595295033) 2025-05-29 19:37:38.258 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.266 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.267 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:38.267 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:38.267 [Thd =118] Info Default located_pos:(62.6288485102225, -9.93315565994408) 2025-05-29 19:37:38.267 [Thd =118] Info Default deltax_stage 0, deltay_stage:-127.024219291747. 2025-05-29 19:37:38.267 [Thd =118] Info Default MoveStageForMarkCol102 point (-64.3953707815248, -9.93315565994408), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.267 [Thd =118] Info Default located_pos:(-64.3953707815248, -9.93315565994408) 2025-05-29 19:37:38.267 [Thd =118] Info Default deltax_stage 126.236671450529, deltay_stage:0. 2025-05-29 19:37:38.267 [Thd =118] Info Default MoveStageForMarkCol101 point (62.6651032141017, -136.169832316581), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.267 [Thd =118] Info Default deltax_stage 0, deltay_stage:-127.024218291557. 2025-05-29 19:37:38.267 [Thd =118] Info Default MoveStageForMarkCol102 point (-64.359115077455, -136.169832316581), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.6651032141017, -136.169832316581). 2025-05-29 19:37:38.268 [Thd =118] Info Default located_pos:(-64.359115077455, -136.169832316581) 2025-05-29 19:37:38.268 [Thd =118] Info Default AliPt:(62.6288485102225, -9.93315565994408), GDS2StagePt:(62.6288485102225, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:38.268 [Thd =118] Info Default AliPt:(-64.3953707815248, -9.93775998380309), GDS2StagePt:(-64.3953707815248, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:38.268 [Thd =118] Info Default AliPt:(-64.3591160791408, -136.174431434332), GDS2StagePt:(-64.359115077455, -136.169832316581), XOffset:5, YOffset:5 2025-05-29 19:37:38.274 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.274 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:38.274 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:38.274 [Thd =1] Info Default deltax_stage -6.47456017232784, deltay_stage:0. 2025-05-29 19:37:38.274 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6269890405526, -3.45859522059985), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.274 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83247472540029. 2025-05-29 19:37:38.274 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4594637659529, -3.45859522059985), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6269890405526, -3.45859522059985). 2025-05-29 19:37:38.274 [Thd =1] Info Default located_pos:(66.4594637659529, -3.45859522059985) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 132.465317907684, deltay_stage:0. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6668920582646, -142.398479030611), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.723517958181. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.0566258999162, -142.398479030611), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.6668920582646, -142.398479030611). 2025-05-29 19:37:38.275 [Thd =1] Info Default located_pos:(-67.0566258999162, -142.398479030611) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage -0.963571965619952, deltay_stage:0. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285717759275, -8.9695836545856), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07442485706757. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7029966329951, -8.9695836545856), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6285717759275, -8.9695836545856). 2025-05-29 19:37:38.275 [Thd =1] Info Default located_pos:(63.7029966329951, -8.9695836545856) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0.240817741798145, deltay_stage:0. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6289176721849, -10.1739734116738), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247895265378118. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3810224068067, -10.1739734116738), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6289176721849, -10.1739734116738). 2025-05-29 19:37:38.275 [Thd =1] Info Default located_pos:(62.3810224068067, -10.1739734116738) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage -1.01635068986664, deltay_stage:0. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285566180736, -8.91680492816227), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.766219433036. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.137662814962, -8.91680492816227), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6285566180736, -8.91680492816227). 2025-05-29 19:37:38.275 [Thd =1] Info Default located_pos:(-63.137662814962, -8.91680492816227) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0.281482529336593, deltay_stage:0. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol101 point (62.628929350961, -10.2146382008893), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.237388936105. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.608459585144, -10.2146382008893), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.628929350961, -10.2146382008893). 2025-05-29 19:37:38.275 [Thd =1] Info Default located_pos:(-64.608459585144, -10.2146382008893) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 126.078913274769, deltay_stage:0. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650579065387, -136.012074134315), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.972182703378. 2025-05-29 19:37:38.275 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.307124796839, -136.012074134315), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.6650579065387, -136.012074134315). 2025-05-29 19:37:38.275 [Thd =1] Info Default located_pos:(-63.307124796839, -136.012074134315) 2025-05-29 19:37:38.275 [Thd =1] Info Default deltax_stage 127.214086343824, deltay_stage:0. 2025-05-29 19:37:38.276 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653839240342, -137.147247250186), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.276 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.183734706029. 2025-05-29 19:37:38.276 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5183507819946, -137.147247250186), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.6653839240342, -137.147247250186). 2025-05-29 19:37:38.276 [Thd =1] Info Default located_pos:(-64.5183507819946, -137.147247250186) 2025-05-29 19:37:38.276 [Thd =1] Info Default deltax_stage 126.020078582163, deltay_stage:0. 2025-05-29 19:37:38.276 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650410094332, -135.953239439283), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.276 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06577120710448. 2025-05-29 19:37:38.276 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7308122165376, -135.953239439283), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.6650410094332, -135.953239439283). 2025-05-29 19:37:38.276 [Thd =1] Info Default located_pos:(63.7308122165376, -135.953239439283) 2025-05-29 19:37:38.276 [Thd =1] Info Default deltax_stage 127.205434389028, deltay_stage:0. 2025-05-29 19:37:38.276 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653814392249, -137.138595295033), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.276 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258280245448246. 2025-05-29 19:37:38.276 [Thd =1] Info Default MoveStageForMarkCol102 point (62.4071011937766, -137.138595295033), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.6653814392249, -137.138595295033). 2025-05-29 19:37:38.276 [Thd =1] Info Default located_pos:(62.4071011937766, -137.138595295033) 2025-05-29 19:37:38.394 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.402 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.402 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:38.402 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:38.402 [Thd =180] Info Default located_pos:(62.6288485102225, -9.93315565994408) 2025-05-29 19:37:38.402 [Thd =180] Info Default deltax_stage 0, deltay_stage:-127.024219291747. 2025-05-29 19:37:38.403 [Thd =180] Info Default MoveStageForMarkCol102 point (-64.3953707815248, -9.93315565994408), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.403 [Thd =180] Info Default located_pos:(-64.3953707815248, -9.93315565994408) 2025-05-29 19:37:38.403 [Thd =180] Info Default deltax_stage 126.236671450529, deltay_stage:0. 2025-05-29 19:37:38.403 [Thd =180] Info Default MoveStageForMarkCol101 point (62.6651032141017, -136.169832316581), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.403 [Thd =180] Info Default deltax_stage 0, deltay_stage:-127.024218291557. 2025-05-29 19:37:38.403 [Thd =180] Info Default MoveStageForMarkCol102 point (-64.359115077455, -136.169832316581), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.6651032141017, -136.169832316581). 2025-05-29 19:37:38.403 [Thd =180] Info Default located_pos:(-64.359115077455, -136.169832316581) 2025-05-29 19:37:38.403 [Thd =180] Info Default AliPt:(62.6288485102225, -9.93315565994408), GDS2StagePt:(62.6288485102225, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:38.403 [Thd =180] Info Default AliPt:(-64.3953707815248, -9.93775998380309), GDS2StagePt:(-64.3953707815248, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:38.403 [Thd =180] Info Default AliPt:(-64.3591160791408, -136.174431434332), GDS2StagePt:(-64.359115077455, -136.169832316581), XOffset:5, YOffset:5 2025-05-29 19:37:38.409 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.409 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:38.409 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage -6.47456017232784, deltay_stage:0. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6269890405526, -3.45859522059985), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83247472540029. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4594637659529, -3.45859522059985), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6269890405526, -3.45859522059985). 2025-05-29 19:37:38.410 [Thd =1] Info Default located_pos:(66.4594637659529, -3.45859522059985) 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 132.465317907684, deltay_stage:0. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6668920582646, -142.398479030611), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.723517958181. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.0566258999162, -142.398479030611), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.6668920582646, -142.398479030611). 2025-05-29 19:37:38.410 [Thd =1] Info Default located_pos:(-67.0566258999162, -142.398479030611) 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage -0.963571965619952, deltay_stage:0. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285717759275, -8.9695836545856), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07442485706757. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7029966329951, -8.9695836545856), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6285717759275, -8.9695836545856). 2025-05-29 19:37:38.410 [Thd =1] Info Default located_pos:(63.7029966329951, -8.9695836545856) 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0.240817741798145, deltay_stage:0. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6289176721849, -10.1739734116738), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247895265378118. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3810224068067, -10.1739734116738), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6289176721849, -10.1739734116738). 2025-05-29 19:37:38.410 [Thd =1] Info Default located_pos:(62.3810224068067, -10.1739734116738) 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage -1.01635068986664, deltay_stage:0. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285566180736, -8.91680492816227), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.766219433036. 2025-05-29 19:37:38.410 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.137662814962, -8.91680492816227), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6285566180736, -8.91680492816227). 2025-05-29 19:37:38.410 [Thd =1] Info Default located_pos:(-63.137662814962, -8.91680492816227) 2025-05-29 19:37:38.410 [Thd =1] Info Default deltax_stage 0.281482529336593, deltay_stage:0. 2025-05-29 19:37:38.411 [Thd =1] Info Default MoveStageForMarkCol101 point (62.628929350961, -10.2146382008893), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.411 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.237388936105. 2025-05-29 19:37:38.411 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.608459585144, -10.2146382008893), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.628929350961, -10.2146382008893). 2025-05-29 19:37:38.411 [Thd =1] Info Default located_pos:(-64.608459585144, -10.2146382008893) 2025-05-29 19:37:38.411 [Thd =1] Info Default deltax_stage 126.078913274769, deltay_stage:0. 2025-05-29 19:37:38.411 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650579065387, -136.012074134315), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.415 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.972182703378. 2025-05-29 19:37:38.415 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.307124796839, -136.012074134315), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.6650579065387, -136.012074134315). 2025-05-29 19:37:38.415 [Thd =1] Info Default located_pos:(-63.307124796839, -136.012074134315) 2025-05-29 19:37:38.415 [Thd =1] Info Default deltax_stage 127.214086343824, deltay_stage:0. 2025-05-29 19:37:38.415 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653839240342, -137.147247250186), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.415 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.183734706029. 2025-05-29 19:37:38.415 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5183507819946, -137.147247250186), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.6653839240342, -137.147247250186). 2025-05-29 19:37:38.415 [Thd =1] Info Default located_pos:(-64.5183507819946, -137.147247250186) 2025-05-29 19:37:38.416 [Thd =1] Info Default deltax_stage 126.020078582163, deltay_stage:0. 2025-05-29 19:37:38.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650410094332, -135.953239439283), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06577120710448. 2025-05-29 19:37:38.416 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7308122165376, -135.953239439283), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.6650410094332, -135.953239439283). 2025-05-29 19:37:38.416 [Thd =1] Info Default located_pos:(63.7308122165376, -135.953239439283) 2025-05-29 19:37:38.416 [Thd =1] Info Default deltax_stage 127.205434389028, deltay_stage:0. 2025-05-29 19:37:38.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653814392249, -137.138595295033), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258280245448246. 2025-05-29 19:37:38.416 [Thd =1] Info Default MoveStageForMarkCol102 point (62.4071011937766, -137.138595295033), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.6653814392249, -137.138595295033). 2025-05-29 19:37:38.416 [Thd =1] Info Default located_pos:(62.4071011937766, -137.138595295033) 2025-05-29 19:37:38.573 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.580 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.580 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:38.580 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:38.580 [Thd =96] Info Default located_pos:(62.6288485102225, -9.93315565994408) 2025-05-29 19:37:38.580 [Thd =96] Info Default deltax_stage 0, deltay_stage:-127.024219291747. 2025-05-29 19:37:38.581 [Thd =96] Info Default MoveStageForMarkCol102 point (-64.3953707815248, -9.93315565994408), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.581 [Thd =96] Info Default located_pos:(-64.3953707815248, -9.93315565994408) 2025-05-29 19:37:38.581 [Thd =96] Info Default deltax_stage 126.236671450529, deltay_stage:0. 2025-05-29 19:37:38.581 [Thd =96] Info Default MoveStageForMarkCol101 point (62.6651032141017, -136.169832316581), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.581 [Thd =96] Info Default deltax_stage 0, deltay_stage:-127.024218291557. 2025-05-29 19:37:38.581 [Thd =96] Info Default MoveStageForMarkCol102 point (-64.359115077455, -136.169832316581), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.6651032141017, -136.169832316581). 2025-05-29 19:37:38.581 [Thd =96] Info Default located_pos:(-64.359115077455, -136.169832316581) 2025-05-29 19:37:38.581 [Thd =96] Info Default AliPt:(62.6288485102225, -9.93315565994408), GDS2StagePt:(62.6288485102225, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:38.581 [Thd =96] Info Default AliPt:(-64.3953707815248, -9.93775998380309), GDS2StagePt:(-64.3953707815248, -9.93315565994408), XOffset:5, YOffset:5 2025-05-29 19:37:38.581 [Thd =96] Info Default AliPt:(-64.3591160791408, -136.174431434332), GDS2StagePt:(-64.359115077455, -136.169832316581), XOffset:5, YOffset:5 2025-05-29 19:37:38.587 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:37:38.587 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:37:38.587 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:37:38.587 [Thd =1] Info Default deltax_stage -6.47456017232784, deltay_stage:0. 2025-05-29 19:37:38.587 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6269890405526, -3.45859522059985), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83247472540029. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4594637659529, -3.45859522059985), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6269890405526, -3.45859522059985). 2025-05-29 19:37:38.588 [Thd =1] Info Default located_pos:(66.4594637659529, -3.45859522059985) 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage 132.465317907684, deltay_stage:0. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6668920582646, -142.398479030611), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.723517958181. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.0566258999162, -142.398479030611), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.6668920582646, -142.398479030611). 2025-05-29 19:37:38.588 [Thd =1] Info Default located_pos:(-67.0566258999162, -142.398479030611) 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage -0.963571965619952, deltay_stage:0. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285717759275, -8.9695836545856), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07442485706757. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7029966329951, -8.9695836545856), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6285717759275, -8.9695836545856). 2025-05-29 19:37:38.588 [Thd =1] Info Default located_pos:(63.7029966329951, -8.9695836545856) 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage 0.240817741798145, deltay_stage:0. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6289176721849, -10.1739734116738), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247895265378118. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3810224068067, -10.1739734116738), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6289176721849, -10.1739734116738). 2025-05-29 19:37:38.588 [Thd =1] Info Default located_pos:(62.3810224068067, -10.1739734116738) 2025-05-29 19:37:38.588 [Thd =1] Info Default deltax_stage -1.01635068986664, deltay_stage:0. 2025-05-29 19:37:38.588 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6285566180736, -8.91680492816227), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.593 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.766219433036. 2025-05-29 19:37:38.593 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.137662814962, -8.91680492816227), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6285566180736, -8.91680492816227). 2025-05-29 19:37:38.593 [Thd =1] Info Default located_pos:(-63.137662814962, -8.91680492816227) 2025-05-29 19:37:38.593 [Thd =1] Info Default deltax_stage 0.281482529336593, deltay_stage:0. 2025-05-29 19:37:38.593 [Thd =1] Info Default MoveStageForMarkCol101 point (62.628929350961, -10.2146382008893), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.593 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.237388936105. 2025-05-29 19:37:38.593 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.608459585144, -10.2146382008893), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.628929350961, -10.2146382008893). 2025-05-29 19:37:38.593 [Thd =1] Info Default located_pos:(-64.608459585144, -10.2146382008893) 2025-05-29 19:37:38.593 [Thd =1] Info Default deltax_stage 126.078913274769, deltay_stage:0. 2025-05-29 19:37:38.593 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650579065387, -136.012074134315), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.593 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.972182703378. 2025-05-29 19:37:38.593 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.307124796839, -136.012074134315), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.6650579065387, -136.012074134315). 2025-05-29 19:37:38.593 [Thd =1] Info Default located_pos:(-63.307124796839, -136.012074134315) 2025-05-29 19:37:38.594 [Thd =1] Info Default deltax_stage 127.214086343824, deltay_stage:0. 2025-05-29 19:37:38.594 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653839240342, -137.147247250186), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.594 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.183734706029. 2025-05-29 19:37:38.594 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5183507819946, -137.147247250186), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.6653839240342, -137.147247250186). 2025-05-29 19:37:38.594 [Thd =1] Info Default located_pos:(-64.5183507819946, -137.147247250186) 2025-05-29 19:37:38.594 [Thd =1] Info Default deltax_stage 126.020078582163, deltay_stage:0. 2025-05-29 19:37:38.594 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6650410094332, -135.953239439283), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.594 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06577120710448. 2025-05-29 19:37:38.594 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7308122165376, -135.953239439283), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.6650410094332, -135.953239439283). 2025-05-29 19:37:38.594 [Thd =1] Info Default located_pos:(63.7308122165376, -135.953239439283) 2025-05-29 19:37:38.594 [Thd =1] Info Default deltax_stage 127.205434389028, deltay_stage:0. 2025-05-29 19:37:38.594 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6653814392249, -137.138595295033), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:37:38.594 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258280245448246. 2025-05-29 19:37:38.594 [Thd =1] Info Default MoveStageForMarkCol102 point (62.4071011937766, -137.138595295033), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.6653814392249, -137.138595295033). 2025-05-29 19:37:38.594 [Thd =1] Info Default located_pos:(62.4071011937766, -137.138595295033) 2025-05-29 19:37:40.833 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:37:40.833 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:39:11.660 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:39:11.661 [Thd =1] Info Default MaskScaleY:0.999809333276108 2025-05-29 19:39:11.661 [Thd =1] Info Default MaskScaleX:1.00000522470581,Orth_Y_BeforR:0.987308096194529 2025-05-29 19:39:15.985 [Thd =1] Info Default Licensed has techLevel count:3 2025-05-29 19:39:15.986 [Thd =1] Info Default MultiInspect:ContinueScanStrip:0 2025-05-29 19:39:15.986 [Thd =1] Info Default ######################################Start inspect################################################# 2025-05-29 19:39:15.986 [Thd =183] Info Default 开始检查！ 2025-05-29 19:39:15.986 [Thd =155] Info Default Start [1/1] 2025-05-29 19:39:17.405 [Thd =1] Info Default Computed strip0Starting point GDS coordinates，StarPoint.X:-69593259,66888220 ，GDSStep:2016，stripNo:0，PixelX_line:0.208396362 2025-05-29 19:39:17.406 [Thd =96] Info Default 初始化插件 2025-05-29 19:39:17.406 [Thd =151] Info Default 初始化DB目录 2025-05-29 19:39:17.406 [Thd =1] Info Default CheckSkipAlignment Check that the alignment is valid! IsFinished:True 2025-05-29 19:39:17.406 [Thd =1] Info Default CheckSkipAlignment Check that the alignment is valid! IsFinished:True 2025-05-29 19:39:17.406 [Thd =169] Info Default CurrentSize:2048,2048 2025-05-29 19:39:17.406 [Thd =169] Info Default Camera size no change 2025-05-29 19:39:17.407 [Thd =119] Info Default 设置 TDI 相机参数... 2025-05-29 19:39:17.408 [Thd =169] Info Default Set camera size success 2025-05-29 19:39:17.408 [Thd =169] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 19:39:17.528 [Thd =1] Info Default deltax_stage -6.47456017232784, deltay_stage:0. 2025-05-29 19:39:17.528 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6269890405526, -3.45859522059985), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:39:17.528 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83247472540029. 2025-05-29 19:39:17.528 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4594637659529, -3.45859522059985), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6269890405526, -3.45859522059985). 2025-05-29 19:39:17.528 [Thd =1] Info Default located_pos:(66.4594637659529, -3.45859522059985) 2025-05-29 19:39:17.528 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.024219291747. 2025-05-29 19:39:17.528 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.3953707815248, -9.93315565994408), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6288485102225, -9.93315565994408). 2025-05-29 19:39:17.528 [Thd =1] Info Default located_pos:(-64.3953707815248, -9.93315565994408) 2025-05-29 19:39:17.528 [Thd =184] Info Default 初始化DPU服务器！ 2025-05-29 19:39:17.529 [Thd =73] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 19:39:19.798 [Thd =156] Error Default ReadDeviceCmd failed. 2025-05-29 19:39:19.799 [Thd =169] Info Default Set camera parameter 2025-05-29 19:39:19.802 [Thd =169] Info Default BUFFER_COUNT no change 2025-05-29 19:39:19.802 [Thd =169] Info Default Camera 9e3fbb4c-fa98-4ba5-a2be-ebc277141c09 Parameter setting completed 2025-05-29 19:39:21.897 [Thd =183] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635785,"ServiceStartTime":"2025\/5\/29 18:52:53","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":1}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:39:21.897 [Thd =118] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635785,"ServiceStartTime":"2025\/5\/29 18:53:05","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":4},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:39:22.413 [Thd =173] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635789,"ServiceStartTime":"2025\/5\/29 19:37:16","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:39:22.477 [Thd =155] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635789,"ServiceStartTime":"2025\/5\/29 19:37:03","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:39:22.822 [Thd =73] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 19:39:22.839 [Thd =1] Info Default Register inspect event！ 2025-05-29 19:39:22.866 [Thd =1] Info Default initial*****Light_intensity:29, min:10, max:220 2025-05-29 19:39:22.866 [Thd =174] Info Default 初始化检测数据 2025-05-29 19:39:22.866 [Thd =1] Info Default ***gds clip thread num is 6 2025-05-29 19:39:22.866 [Thd =1] Info ********************corePlug version is {0} **************** 3.0SPC200 2025-05-29 19:39:22.866 [Thd =1] Info Default Positioning parameters: the reference point GDS_X: -63118665, reference point GDS_Y: -63943524, reference point Stage_X: -64.3953707815248, reference point Stage_Y: -9.93315565994408, starting point GDS_X: -69593259, starting point GDS_Y: 66888220 2025-05-29 19:39:22.866 [Thd =52] Info Default Use Positive film 2025-05-29 19:39:22.866 [Thd =52] Info Default m_start_strip_no:0 2025-05-29 19:39:22.866 [Thd =52] Info Default BINING TEST 0802 jMInspectPara.m_bin:1 2025-05-29 19:39:22.867 [Thd =52] Info Default Parameters passed to Core SetDie2DBPara:{"m_gdsPath":"Z:\\design2\\M0201Z_100.gds","m_layerMode":0,"m_layerNo":26,"m_layerNo2":0,"m_bMirrorX":true,"m_org_img_width":2048,"m_width":520,"m_height":512,"m_pixelSizeX":0.208396362,"m_pixelSizeY":0.208396362,"m_pixelSizeX_Len":0.208396362,"m_pixelSizeY_Len":0.208396362,"m_gridlen":1,"m_channel":4,"m_overlay_width":28,"m_overlay_height":28,"m_OpticalSourceType":0,"m_Scale":1.0,"m_Rotate":0.0,"m_row":1323,"m_col":1292,"m_algV":2,"m_CDprecisionMode":0,"m_ParprecisionMode":1,"m_batchNum":20,"m_fillPath":null,"m_bCPUFill":false,"m_scanMode":0,"m_min_optical":10,"m_max_optical":220,"m_bAreaInspection":true,"m_beginX":-69593259,"m_beginY":66888220,"m_endX":69347346,"m_endY":-66642308,"m_noInspectArea":"-64082243,64130696,-62877846,62808628|-64135022,-62685765,-62837180,-64156653|62960908,-62891689,64096087,-64103009|62902072,64122044,64087434,62798245","m_Resolution_Defect":1,"m_Combine_defect_distance":40,"m_grid_path":"c:/grid","m_bsave_grid":false,"m_inspect_OverlayX":16,"m_inspect_OverlayY":16,"m_mask_inspection_mode":0,"m_unpattern_mask_inspect_size":0,"m_left_thrd":0,"m_right_thrd":0,"FilterKernelNum":1,"m_gray_threshold":0,"iBlackOffset":0,"caliDustThd":0,"m_Resolution_IntSec_Defect":0,"m_GrayDiffThd":120,"m_PinholeThd":20,"m_IslandThd":20,"m_DefectAreaThrd":0.0,"m_rowColScan":1,"m_mask_pattern_mode_mask":3103,"m_AL":1,"m_lcol":1252,"m_tolerance_mode":0,"m_x_tolerance":-0.086,"m_y_tolerance":-0.075,"m_CD_Defect_resolution":5.0,"m_pinhole_Defect_resolution":0.5,"m_degreeThrd":44,"m_cornerThrd":1,"m_Lens_multiplex":24,"m_offsetX":0,"m_DefectCombine":1,"m_DPPath":"\\dp\\2396678\\data","m_bUseDP":true,"m_pyramid_factor":1,"m_gds_clip_thread_num":6,"m_total_strip":331,"m_strip_nos":null,"m_resultPath":"\\result\\MaskDefectImages\\2025-05-29\\rcp_DB_1/","m_line_camera_ud_offset":-20,"m_line_camera_lr_offset":4,"m_start_strip_no":0,"m_bin":1,"m_picPath":"\\result\\MaskAllImages\\2025-05-29\\rcp_DB_1/","m_optical_head_total":0,"m_inner_round":0.35,"m_optical_head_id":0,"m_outer_round":0.35,"m_compensate":0.0,"m_row_die":0,"m_adjust_org_img_width":0,"m_adjust_flag":0,"m_adjust_u0":0.0,"m_adjust_a":0.0,"m_adjust_b":0.0,"m_adjustLeft_shift":0,"m_adjustRight_shift":0,"m_rough_reg_gray_Thrd":0,"m_fine_reg_gray_Thrd":0,"m_DPU_correction":0,"m_pinhole_range":0,"die_count":0,"m_CNT_width":5.0,"m_CNT_thrd":20.0,"m_CD2_Defect_resolution":0.5,"m_DD_Alg":0,"m_LineThrd_minX":0,"m_LineThrd_minY":0,"m_LineThrd_maxX":0,"m_LineThrd_maxY":0,"m_turbo_alg":false,"m_PSM":false,"m_CellShift_real_physical_distance":3.52,"m_CellShift_subthrd_mask_mode":2,"m_DD_range_max":0,"m_DD_range_min":0,"m_DD_min_gay_diff":0,"m_DD_range_ra":0,"m_T_collect":[220,225,0,0,1130102784,1065353216,1065353216,0,0,10],"m_R_collect":[200,150,90,1128792064,1128792064,1065353216,1065353216,0,0,0],"m_simple_gray_defect_sum_thrd_DD":30,"m_simple_gray_defect_DD":false,"m_die_phy_width":0.0,"m_die_phy_height":0.0,"m_die_cycle_phy_width":0.0,"m_die_cycle_phy_height":0.0,"m_normal_vector_level":1,"m_gray_diff_level":1,"m_edge_defect_level":2,"m_line_camera_ud_offset_f":-20.0,"m_mask_inspection_mode_ex":0,"m_CS_x_use":0,"m_CS_y_use":0,"m_CS_y_real_physical_distance":0.0,"m_CS_y_subthrd_mask_mode":2,"m_Edge_1_thrd_mode":2,"m_Edge_2_thrd_mode":1,"m_Gray_thrd_mode":2,"m_line_camera_lr_offset_f":4.5,"SL_Edge_switch":2,"SL_Edge2_switch":0,"crDrop_switch":0,"ud_decimal_right":-20.0,"lr_decimal_right":4.5} 2025-05-29 19:39:22.868 [Thd =52] Info Default m_line_camera_cols:313 2025-05-29 19:39:22.868 [Thd =52] Info Default AllocHGlobal img mem pic_count:313, img_w:2032, img_h:2048 2025-05-29 19:39:22.868 [Thd =52] Info Default Set distortion correction parameters Star,org_img_width:2048,MaskInspectMode:Pattern 2025-05-29 19:39:22.870 [Thd =52] Info Default SetDistortionPara disaabled 2025-05-29 19:39:22.870 [Thd =52] Info Default Set distortion correction parameters End 2025-05-29 19:39:22.871 [Thd =52] Info Default InitDie2DBRes Argument： width:520, height:2048, strip_sum(Grid.Rows):1323,pic_count(Grid2.Cols):1252,pic_count_pack(Grid.Cols):1292,max_batch:20,mode:0,m_channel:4 2025-05-29 19:39:24.045 [Thd =52] Info Default InitDie2DBRes Success!!!! 2025-05-29 19:39:27.214 [Thd =1] Info Default Successful alignment！ 2025-05-29 19:39:27.214 [Thd =91] Info Default 对准完成！ 2025-05-29 19:39:27.214 [Thd =119] Info Default 稍等！设置相机参数中 2025-05-29 19:39:27.214 [Thd =183] Info Default 注册相机取图 2025-05-29 19:39:27.215 [Thd =1] Info Default Register camera capture events！DB/DD 2025-05-29 19:39:27.215 [Thd =155] Info Default 移动到起始点位 2025-05-29 19:39:27.807 [Thd =70] Info MMSFocus _isStop = true 2025-05-29 19:39:28.020 [Thd =70] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426877140641911,StepStep:0.423459195134282,CosValueY:1,SinValueY:0 2025-05-29 19:39:28.020 [Thd =118] Info Default OpenLamp Transmission 2025-05-29 19:39:28.020 [Thd =148] Info Default 打开光源，亮度：29% 2025-05-29 19:39:28.621 [Thd =52] Info Default SetFocusTrack CloseTrack OK 2025-05-29 19:39:28.621 [Thd =91] Info Default 聚焦Track已关闭 2025-05-29 19:39:28.834 [Thd =54] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:39:28.923 [Thd =52] Info MMSFocus _isStop = true 2025-05-29 19:39:29.036 [Thd =118] Info Default CloseLamp Reflection 2025-05-29 19:39:30.125 [Thd =52] Info Default QuerySubstrateMode Line OK 2025-05-29 19:39:30.125 [Thd =148] Info Default 已切换到线阵聚焦模式 2025-05-29 19:39:30.726 [Thd =52] Info Default SetFocusTrack OpenTrack OK 2025-05-29 19:39:30.726 [Thd =52] Info Default 聚焦Track已开启 2025-05-29 19:39:30.850 [Thd =118] Info Default PolarizationBaffleControl False: 3! 2025-05-29 19:39:31.353 [Thd =118] Info Default PolarizationBaffleControl False: 2! 2025-05-29 19:39:31.552 [Thd =119] Info Default ChangeLightPath: True! 2025-05-29 19:39:51.248 [Thd =70] Error Default SnakeScanLine: Paddle Rotate fault! 2025-05-29 19:39:51.248 [Thd =148] Info Default 执行MarkOffSet...... 2025-05-29 19:39:51.248 [Thd =70] Info Default CurrentSize:2048,2048 2025-05-29 19:39:51.248 [Thd =70] Info Default Camera size no change 2025-05-29 19:39:51.248 [Thd =70] Info Default Set camera size success 2025-05-29 19:39:51.248 [Thd =70] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 19:39:52.225 [Thd =70] Info Default Set camera parameter 2025-05-29 19:39:52.228 [Thd =70] Info Default BUFFER_COUNT no change 2025-05-29 19:39:52.231 [Thd =70] Info strip vectorBegin:(60.031985,-9.91418),VectorEnd:(65.312617,-9.91418),CaptureBegin:(62.031985,-9.91418)，CaptureEnd：(63.312617,-9.91418),StepScan:0.426877140641911 2025-05-29 19:39:58.350 [Thd =70] Info Default m_focusMapMode：0 2025-05-29 19:39:58.351 [Thd =70] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:-0.000208436103829058,BeginPoint:-62.0319854312487,EndPoint:-63.3126168531744 2025-05-29 19:39:58.546 [Thd =37] Info Default mage not received in scan state! Direct abandonment！cam_idx:0,Cur_strip_status:FinishOK 2025-05-29 19:39:58.561 [Thd =37] Info Default mage not received in scan state! Direct abandonment！cam_idx:0,Cur_strip_status:FinishOK 2025-05-29 19:39:58.596 [Thd =37] Info Default mage not received in scan state! Direct abandonment！cam_idx:0,Cur_strip_status:FinishOK 2025-05-29 19:39:59.254 [Thd =70] Info MMSFocus _isStop = true 2025-05-29 19:39:59.778 [Thd =52] Info Default OpenLamp Transmission 2025-05-29 19:39:59.778 [Thd =119] Info MMSFocus _isStop = true 2025-05-29 19:40:00.589 [Thd =67] Info Default PolarizationBaffleControl True: 1! 2025-05-29 19:40:00.980 [Thd =119] Info Default QuerySubstrateMode Area OK 2025-05-29 19:40:00.980 [Thd =148] Info Default 已切换到面阵聚焦模式 2025-05-29 19:40:01.093 [Thd =67] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:40:01.581 [Thd =119] Info Default SetFocusTrack CloseTrack OK 2025-05-29 19:40:01.581 [Thd =119] Info Default 聚焦Track已关闭 2025-05-29 19:40:01.601 [Thd =52] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:40:01.601 [Thd =52] Info Default CloseLamp Reflection 2025-05-29 19:40:16.837 [Thd =1] Info Default Move to the inspect start point，Starting point coordinates：X:66.4594637659529,Y:-3.45859522059985,OffSet.X:0,OffSet.Y:0 2025-05-29 19:40:16.837 [Thd =138] Warn Default 标记偏移点X:0，Y:0 2025-05-29 19:40:35.600 [Thd =151] Info Default Wait! Setting camera parameters 2025-05-29 19:40:35.607 [Thd =1] Info Default SetSystemStatus:WR DM0 2 2025-05-29 19:40:35.611 [Thd =1] Info Default SetSystemStatus Success 2025-05-29 19:40:37.164 [Thd =1] Info AutoWorkerHelper::SaveTask2DB() finished. Task={0} 1179 2025-05-29 19:40:37.165 [Thd =180] Info Default 检测线程启动！ 2025-05-29 19:40:37.165 [Thd =70] Info Default 结果处理线程启动！ 2025-05-29 19:40:37.170 [Thd =146] Info Default SetSystemStatus:WR DM0 2 2025-05-29 19:40:37.174 [Thd =146] Info Default SetSystemStatus Success 2025-05-29 19:40:37.854 [Thd =146] Info MMSFocus _isStop = true 2025-05-29 19:40:37.854 [Thd =146] Info Default aSwitchIndex index:2 2025-05-29 19:40:37.855 [Thd =146] Info Default lens from ATF: 2025-05-29 19:40:37.855 [Thd =146] Info Default objCount:3 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:P200;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:P140;objId:1 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:P100;objId:2 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default lens from system settings: 2025-05-29 19:40:37.855 [Thd =146] Info Default systemlensettings lens count:3 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:P100;objId:0 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:P140;objId:1 2025-05-29 19:40:37.855 [Thd =146] Info Default ratio:P200;objId:2 2025-05-29 19:40:52.965 [Thd =146] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 19:40:52.965 [Thd =146] Info Default send switch cmd 2025-05-29 19:41:08.085 [Thd =146] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 19:41:08.085 [Thd =146] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 19:41:08.113 [Thd =146] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 19:41:08.113 [Thd =146] Info Default defectData.RecivePicCount:0 2025-05-29 19:41:08.113 [Thd =146] Info Default start inspect task pic_count of one strip:313, big_strip_count:331. 2025-05-29 19:41:08.113 [Thd =146] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 19:41:08.113 [Thd =146] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 19:41:08.113 [Thd =146] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 19:41:08.114 [Thd =146] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 19:41:08.114 [Thd =146] Info Default BaseScanObjectLine:------------------ 2025-05-29 19:41:08.114 [Thd =146] Info Default BaseScanObjectLine:***************** 2025-05-29 19:41:08.114 [Thd =146] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 19:41:08.114 [Thd =146] Info Default scaleX: 1.00000522470581, scaleY:0.999809333276108 2025-05-29 19:41:08.114 [Thd =146] Info Default Orth_Y_BeforR: 0.987308096194529,StageScaleX:1.00000522470581,Y:0.999809333276108 2025-05-29 19:41:08.114 [Thd =146] Info Default LengthOfAccelerationAndDeceleration: 2 2025-05-29 19:41:08.715 [Thd =146] Info Default SetFocusTrack CloseTrack OK 2025-05-29 19:41:08.715 [Thd =96] Info Default 聚焦Track已关闭 2025-05-29 19:41:08.715 [Thd =67] Info Default 正在切换线阵相机光路 2025-05-29 19:41:12.235 [Thd =146] Info Default ChangeLightPath: True! 2025-05-29 19:41:12.235 [Thd =146] Info Default SnakeScanLine: Paddle Rotate angle is 0 ! 2025-05-29 19:41:14.072 [Thd =146] Info Default InspectOverlayX: 16, InspectOverlayY:16 2025-05-29 19:41:14.077 [Thd =180] Info Default 正在打开透射光源，亮度 29% 2025-05-29 19:41:14.078 [Thd =146] Info Default OpenLamp Transmission 2025-05-29 19:41:14.884 [Thd =52] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:41:15.086 [Thd =146] Info Default CloseLamp Reflection 2025-05-29 19:41:16.899 [Thd =146] Info Default PolarizationBaffleControl False: 3! 2025-05-29 19:41:17.403 [Thd =146] Info Default PolarizationBaffleControl False: 2! 2025-05-29 19:41:17.403 [Thd =148] Info Default 正在启用实时聚焦 2025-05-29 19:41:18.093 [Thd =146] Info MMSFocus _isStop = true 2025-05-29 19:41:19.296 [Thd =146] Info Default QuerySubstrateMode Line OK 2025-05-29 19:41:19.296 [Thd =148] Info Default 已切换到线阵聚焦模式 2025-05-29 19:41:20.297 [Thd =151] Info Default 正在设置扫描控制参数 2025-05-29 19:41:20.297 [Thd =146] Info Default GetParameter: stepCompX is 0.000208436103829058 2025-05-29 19:41:21.100 [Thd =146] Info Default Allocate resources! 2025-05-29 19:41:21.100 [Thd =146] Info Default EnumMaskInspectMode === Pattern 2025-05-29 19:41:21.700 [Thd =146] Info Default SetFocusTrack OpenTrack OK 2025-05-29 19:41:21.700 [Thd =146] Info Default Start scanning; Start strip number: 0, total strip number: 331 2025-05-29 19:41:21.700 [Thd =54] Info Default 聚焦Track已开启 2025-05-29 19:41:21.700 [Thd =67] Info Default 开始扫描条带； [0/331] 2025-05-29 19:41:21.703 [Thd =146] Info Default ScanDirection is Positive 2025-05-29 19:41:21.704 [Thd =146] Info Default CaptureBeginX: 66.87082, CaptureBeginY:-3.65718, CaptureEndX:-67.21129, CaptureEndY:-3.65718, VectorBeginX:68.44394, VectorBeginY:-3.65718, VectorEndX:-69.16860, VectorEndY:-3.65718, PrepareDistanceScan:2.00000, PrepareDistanceStep:0.00000, StepScan:0.427, CosValueY:1.00000, SinValueY:0.00000 2025-05-29 19:41:21.704 [Thd =146] Info Default ***row:0, vectorBeginX:68.444, vectorBeginY:-3.657, captureBeginX:66.871, captureBeginY:-3.657, captureEndX:-67.211, captureEndY:-3.657, vectorEndX:-69.169, vectorEndY:-3.657 2025-05-29 19:41:21.704 [Thd =146] Info Default m_focusMapMode：0 2025-05-29 19:41:21.705 [Thd =146] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208436103829058,BeginPoint:-66.8708173681378,EndPoint:67.2112925074864 2025-05-29 19:41:26.671 [Thd =37] Info Default Stripes are collected for data processing！strip_no:0 2025-05-29 19:41:26.672 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:0,source_light_Type:A_SourceLightType 2025-05-29 19:41:26.672 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：0,A_SourceLightType 2025-05-29 19:41:26.859 [Thd =146] Info Default Strip scanning complete, waiting for collection... ;0/331, 2025-05-29 19:41:26.869 [Thd =146] Warn Default No corresponding strip number found!stripNo:-1,InspStrips:0,1,2,3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20,21,22,23,24,25,26,27,28,29,30,31,32,33,34,35,36,37,38,39,40,41,42,43,44,45,46,47,48,49,50,51,52,53,54,55,56,57,58,59,60,61,62,63,64,65,66,67,68,69,70,71,72,73,74,75,76,77,78,79,80,81,82,83,84,85,86,87,88,89,90,91,92,93,94,95,96,97,98,99,100,101,102,103,104,105,106,107,108,109,110,111,112,113,114,115,116,117,118,119,120,121,122,123,124,125,126,127,128,129,130,131,132,133,134,135,136,137,138,139,140,141,142,143,144,145,146,147,148,149,150,151,152,153,154,155,156,157,158,159,160,161,162,163,164,165,166,167,168,169,170,171,172,173,174,175,176,177,178,179,180,181,182,183,184,185,186,187,188,189,190,191,192,193,194,195,196,197,198,199,200,201,202,203,204,205,206,207,208,209,210,211,212,213,214,215,216,217,218,219,220,221,222,223,224,225,226,227,228,229,230,231,232,233,234,235,236,237,238,239,240,241,242,243,244,245,246,247,248,249,250,251,252,253,254,255,256,257,258,259,260,261,262,263,264,265,266,267,268,269,270,271,272,273,274,275,276,277,278,279,280,281,282,283,284,285,286,287,288,289,290,291,292,293,294,295,296,297,298,299,300,301,302,303,304,305,306,307,308,309,310,311,312,313,314,315,316,317,318,319,320,321,322,323,324,325,326,327,328,329,330 2025-05-29 19:41:26.907 [Thd =146] Info Default singleAixsScan Testing 2 2025-05-29 19:41:26.949 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 19:41:26.972 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":0,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_0_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 19:41:27.225 [Thd =155] Info Default 开始扫描条带； [1/331] 2025-05-29 19:41:27.227 [Thd =146] Info Default ScanDirection is Negative 2025-05-29 19:41:27.229 [Thd =146] Info Default ***row:1, vectorBeginX:-69.168, vectorBeginY:-4.077, captureBeginX:-67.542, captureBeginY:-4.077, captureEndX:66.540, captureEndY:-4.077, vectorEndX:68.444, vectorEndY:-4.077 2025-05-29 19:41:27.229 [Thd =146] Info Default m_focusMapMode：0 2025-05-29 19:41:27.230 [Thd =146] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:-0.000208436103829058,BeginPoint:67.5422202034493,EndPoint:-66.5398896721749 2025-05-29 19:41:32.209 [Thd =37] Info Default Stripes are collected for data processing！strip_no:1 2025-05-29 19:41:32.209 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:1,source_light_Type:A_SourceLightType 2025-05-29 19:41:32.209 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：1,A_SourceLightType 2025-05-29 19:41:32.374 [Thd =146] Info Default Strip scanning complete, waiting for collection... ;1/331, 2025-05-29 19:41:32.447 [Thd =146] Info Default singleAixsScan Testing 2 2025-05-29 19:41:32.481 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 19:41:32.510 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":1,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_1_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 19:41:32.764 [Thd =184] Info Default 开始扫描条带； [2/331] 2025-05-29 19:41:32.766 [Thd =146] Info Default ScanDirection is Positive 2025-05-29 19:41:32.767 [Thd =146] Info Default CaptureBeginX: 66.87106, CaptureBeginY:-4.49743, CaptureEndX:-67.21105, CaptureEndY:-4.49743, VectorBeginX:68.44418, VectorBeginY:-4.49743, VectorEndX:-69.16836, VectorEndY:-4.49743, PrepareDistanceScan:2.00000, PrepareDistanceStep:0.00000, StepScan:0.427, CosValueY:1.00000, SinValueY:0.00000 2025-05-29 19:41:32.767 [Thd =146] Info Default ***row:2, vectorBeginX:68.444, vectorBeginY:-4.497, captureBeginX:66.871, captureBeginY:-4.497, captureEndX:-67.211, captureEndY:-4.497, vectorEndX:-69.168, vectorEndY:-4.497 2025-05-29 19:41:32.767 [Thd =146] Info Default m_focusMapMode：0 2025-05-29 19:41:32.768 [Thd =146] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208436103829058,BeginPoint:-66.8710586847474,EndPoint:67.2110511908767 2025-05-29 19:41:37.735 [Thd =37] Info Default Stripes are collected for data processing！strip_no:2 2025-05-29 19:41:37.735 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:2,source_light_Type:A_SourceLightType 2025-05-29 19:41:37.735 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：2,A_SourceLightType 2025-05-29 19:41:37.921 [Thd =146] Info Default Strip scanning complete, waiting for collection... ;2/331, 2025-05-29 19:41:38.004 [Thd =146] Info Default singleAixsScan Testing 2 2025-05-29 19:41:38.019 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 19:41:38.021 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":2,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_2_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 19:41:38.320 [Thd =52] Info Default 开始扫描条带； [3/331] 2025-05-29 19:41:38.322 [Thd =146] Info Default ScanDirection is Negative 2025-05-29 19:41:38.323 [Thd =146] Info Default ***row:3, vectorBeginX:-69.168, vectorBeginY:-4.918, captureBeginX:-67.542, captureBeginY:-4.918, captureEndX:66.540, captureEndY:-4.918, vectorEndX:68.444, vectorEndY:-4.918 2025-05-29 19:41:38.323 [Thd =146] Info Default m_focusMapMode：0 2025-05-29 19:41:38.324 [Thd =146] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:-0.000208436103829058,BeginPoint:67.5419788868397,EndPoint:-66.5401309887845 2025-05-29 19:41:42.276 [Thd =1] Info Default VerifyModule.StopInspect() Stop ! 2025-05-29 19:41:43.295 [Thd =37] Info Default Stripes are collected for data processing！strip_no:3 2025-05-29 19:41:43.295 [Thd =37] Info Default Singleton.addTask DB Add to m_RevImg_pool,m_strip_idx:3,source_light_Type:A_SourceLightType 2025-05-29 19:41:43.295 [Thd =25] Info Default The data goes to the m_CollectImg_pool thread pool,strip_idx：3,A_SourceLightType 2025-05-29 19:41:43.474 [Thd =146] Info Default Strip scanning complete, waiting for collection... ;3/331, 2025-05-29 19:41:43.567 [Thd =146] Info Default singleAixsScan Testing 2 2025-05-29 19:41:43.576 [Thd =69] Info Default --source_light_Type:0,count:1 2025-05-29 19:41:43.578 [Thd =69] Info Default Sending data to the MCU,stripInfo:{"strip_no":3,"substrip_no":0,"source_light_type":0,"width":2032,"height":2048,"count":313,"count_pack":1292,"die_width":0,"die_height":0,"die_count":0,"die_begin_pos":0,"die_cycle_width":0,"die_cycle_height":0,"die_inter_X_len":0,"isRotate":1,"stripCount4Die":0,"subStripNo4Die":0,"die_col":0,"die_row_item":[],"paths":["2025-05-29\\rcp_DB_1\\StripData\\org_img_3_data.dat"],"info_total":1,"optical_head_id":0,"die_begin_pos_X":0} 2025-05-29 19:41:43.884 [Thd =136] Info Default 开始扫描条带； [4/331] 2025-05-29 19:41:43.886 [Thd =146] Info Default ScanDirection is Positive 2025-05-29 19:41:43.887 [Thd =146] Info Default CaptureBeginX: 66.87130, CaptureBeginY:-5.33768, CaptureEndX:-67.21081, CaptureEndY:-5.33768, VectorBeginX:68.44442, VectorBeginY:-5.33768, VectorEndX:-69.16812, VectorEndY:-5.33768, PrepareDistanceScan:2.00000, PrepareDistanceStep:0.00000, StepScan:0.427, CosValueY:1.00000, SinValueY:0.00000 2025-05-29 19:41:43.887 [Thd =146] Info Default ***row:4, vectorBeginX:68.444, vectorBeginY:-5.338, captureBeginX:66.871, captureBeginY:-5.338, captureEndX:-67.211, captureEndY:-5.338, vectorEndX:-69.168, vectorEndY:-5.338 2025-05-29 19:41:43.887 [Thd =146] Info Default m_focusMapMode：0 2025-05-29 19:41:43.888 [Thd =146] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208436103829058,BeginPoint:-66.8713000013571,EndPoint:67.2108098742671 2025-05-29 19:41:44.563 [Thd =1] Info Default SetSystemStatus:WR DM0 2 2025-05-29 19:41:44.566 [Thd =1] Info Default SetSystemStatus Success 2025-05-29 19:41:44.572 [Thd =1] Info Default SetSystemStatus:WR DM0 2 2025-05-29 19:41:44.576 [Thd =1] Info Default SetSystemStatus Success 2025-05-29 19:41:44.972 [Thd =169] Info Default 结果处理全部完成！ 2025-05-29 19:41:44.988 [Thd =171] Info Default SetSystemStatus:WR DM0 1 2025-05-29 19:41:44.994 [Thd =171] Info Default SetSystemStatus Success 2025-05-29 19:41:46.631 [Thd =1] Info Default AutoWorkerHelper.Stop() Abort() Complate 2025-05-29 19:41:46.632 [Thd =1] Info Default AutoWorkerHelper.Stop() DOUBLEMODE 2025-05-29 19:41:46.735 [Thd =1] Info Default AutoWorkerHelper.Stop() Camera Stop Complate ! 2025-05-29 19:41:46.735 [Thd =1] Info Default AutoWorkerHelper::Stop():Waiting for Result Thread exit...1 second. 2025-05-29 19:41:47.091 [Thd =171] Info Default AutoWorkerHelper::ResultHandling: Inspection task is completed, Result handing thread is shuted down. 2025-05-29 19:41:47.091 [Thd =171] Info Default *********Reset2********** 2025-05-29 19:41:47.091 [Thd =161] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 19:41:47.091 [Thd =180] Info Default 检测完成！ 2025-05-29 19:41:49.032 [Thd =146] Error SnakeScanLine failed. {0} System.Exception: VectorA error,msg:正在中止线程。 在 Plugins.WaferStage.Standard.ACS.StandardMotionStage.VectorA(PointD point) 在 Plugins.WaferStage.Standard.ACS.StandardACS.VectorA(PointD point) 在 Storm.Defect.AutoWorkerHelper.SnakeScanLine() 位置 E:\software\Go-Agent-21.4.0\pipelines\Storm_V4_Build\Storm.Common\Defect\Worker\AutoWorkerHelper.cs:行号 1536 2025-05-29 19:41:50.187 [Thd =146] Info Default ***********Task finished.************** 2025-05-29 19:41:50.188 [Thd =146] Info Default Stop the detection thread; 2025-05-29 19:41:50.270 [Thd =1] Info Default Stop End! 2025-05-29 19:41:50.271 [Thd =1] Info Default release timer --begin 2025-05-29 19:41:51.098 [Thd =138] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635884,"ServiceStartTime":"2025\/5\/29 19:37:03","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":24,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":9,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":22,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":26,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":13,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:41:51.098 [Thd =54] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635884,"ServiceStartTime":"2025\/5\/29 19:37:16","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":36,"mem_size":130963,"ramdisk_percent":4,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":38,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":38,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":38,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":39,"utilization_mem":1}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:41:51.189 [Thd =146] Info MMSFocus _isStop = true 2025-05-29 19:41:51.272 [Thd =1] Info Default release timer --end 2025-05-29 19:41:51.623 [Thd =184] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635888,"ServiceStartTime":"2025\/5\/29 19:39:45","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:41:51.639 [Thd =73] Error Default The DPU online and offline message was received！{"KeepTimeStamp":635888,"ServiceStartTime":"2025\/5\/29 19:39:32","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 19:41:51.694 [Thd =161] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 19:41:51.873 [Thd =1] Info Default SetFocusTrack CloseTrack OK 2025-05-29 19:41:51.873 [Thd =151] Info Default 聚焦Track已关闭 2025-05-29 19:41:52.005 [Thd =180] Info Default Chuck vacuum close 2025-05-29 19:41:52.593 [Thd =146] Info Default QuerySubstrateMode Area OK 2025-05-29 19:41:52.593 [Thd =183] Info Default 已切换到面阵聚焦模式 2025-05-29 19:41:53.006 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:41:53.009 [Thd =169] Info Default Chuck vacuum close 2025-05-29 19:41:53.195 [Thd =146] Info Default SetFocusTrack CloseTrack OK 2025-05-29 19:41:53.195 [Thd =130] Info Default 聚焦Track已关闭 2025-05-29 19:41:53.396 [Thd =146] Info Default Finally Over！ 2025-05-29 19:41:53.397 [Thd =146] Error Default Scanning thread error!System.Threading.ThreadAbortException: 正在中止线程。 在 Storm.Defect.AutoWorkerHelper.SnakeScanLine() 位置 E:\software\Go-Agent-21.4.0\pipelines\Storm_V4_Build\Storm.Common\Defect\Worker\AutoWorkerHelper.cs:行号 1680 在 Storm.Defect.AutoWorkerHelper.AutoInspecting() 位置 E:\software\Go-Agent-21.4.0\pipelines\Storm_V4_Build\Storm.Common\Defect\Worker\AutoWorkerHelper.cs:行号 729 2025-05-29 19:41:54.010 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:41:54.012 [Thd =119] Info Default Chuck vacuum close 2025-05-29 19:41:55.012 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:41:55.012 [Thd =161] Info Default Inspection Stop! 2025-05-29 19:41:55.825 [Thd =1] Info Default PolarizationBaffleControl True: 1! 2025-05-29 19:41:56.332 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:41:59.087 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:41:59.088 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:42:03.661 [Thd =118] Info Default Alignment ... 2025-05-29 19:42:03.782 [Thd =109] Info Default Chuck vacuum close 2025-05-29 19:42:04.782 [Thd =136] Info Default ChuckVac: :False 2025-05-29 19:42:23.542 [Thd =96] Info Default Switch light... 2025-05-29 19:42:23.542 [Thd =136] Info Default OpenLamp Transmission 2025-05-29 19:42:24.350 [Thd =168] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:42:25.053 [Thd =136] Info Default CloseLamp Reflection 2025-05-29 19:42:27.300 [Thd =136] Info MMSFocus _isStop = true 2025-05-29 19:42:27.300 [Thd =67] Info Default Execute alignment 1/2 2025-05-29 19:42:31.408 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9996767,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:42:31.408 [Thd =136] Info Default D2DMatchMark ******** :errorX:0,errorY:1 2025-05-29 19:42:31.541 [Thd =136] Info Default Flag:Fine1, Position:62.542788472651,-10.057822006635 2025-05-29 19:42:40.316 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9995784,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:42:40.316 [Thd =136] Info Default D2DMatchMark ******** :errorX:0,errorY:1 2025-05-29 19:42:40.437 [Thd =136] Info Default Flag:Fine2, Position:-64.455510234091,-9.984476207825 2025-05-29 19:42:44.902 [Thd =122] Info Default Execute alignment 2/2 2025-05-29 19:42:53.288 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9997714,xOffSet:622,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:42:53.288 [Thd =136] Info Default D2DMatchMark ******** :errorX:10,errorY:151 2025-05-29 19:42:54.979 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9980412,xOffSet:620,yOffSet:642,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:42:56.680 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9990286,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:42:56.802 [Thd =136] Info Default Flag:Fine1, Position:62.5488596251141,-9.94569650652741 2025-05-29 19:43:05.583 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9998694,xOffSet:614,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:05.584 [Thd =136] Info Default D2DMatchMark ******** :errorX:2,errorY:151 2025-05-29 19:43:07.274 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9996426,xOffSet:614,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:08.965 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9998742,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:09.089 [Thd =136] Info Default Flag:Fine2, Position:-64.4555034365229,-9.94166773538546 2025-05-29 19:43:12.004 [Thd =67] Info Default Checking Mark ... 2025-05-29 19:43:20.381 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.99967,xOffSet:604,yOffSet:392,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:20.382 [Thd =136] Info Default D2DMatchMark ******** :errorX:-8,errorY:-120 2025-05-29 19:43:22.062 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9996647,xOffSet:604,yOffSet:392,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:23.755 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9971554,xOffSet:618,yOffSet:592,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:25.420 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9996807,xOffSet:620,yOffSet:631,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:27.112 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9999519,xOffSet:614,yOffSet:551,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:28.762 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.999689,xOffSet:606,yOffSet:433,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:28.884 [Thd =136] Info Default Flag:Fine1, Position:62.5542083212236,-9.93925712849617 2025-05-29 19:43:37.658 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9991032,xOffSet:610,yOffSet:371,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:37.659 [Thd =136] Info Default D2DMatchMark ******** :errorX:-2,errorY:-141 2025-05-29 19:43:39.350 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.999384,xOffSet:610,yOffSet:371,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:41.038 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.999413,xOffSet:614,yOffSet:652,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:42.727 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9991623,xOffSet:612,yOffSet:520,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:44.351 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9995469,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:44.473 [Thd =136] Info Default Flag:Fine2, Position:-64.4121691325007,-9.93868158801618 2025-05-29 19:43:53.230 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9997578,xOffSet:615,yOffSet:679,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:53.230 [Thd =136] Info Default D2DMatchMark ******** :errorX:3,errorY:167 2025-05-29 19:43:54.930 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.999708,xOffSet:615,yOffSet:679,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:56.630 [Thd =136] Info Default D2DSearchMark matchResult:0， score:0.9996292,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:43:56.752 [Thd =136] Info Default Flag:Fine3, Position:-64.4553367046805,-136.176503615263 2025-05-29 19:43:57.753 [Thd =136] Info Default IsAlignAngleOK fine1:62.5542083212236,-9.93925712849617,fine2:-64.4121691325007,-9.93868158801618 2025-05-29 19:43:57.753 [Thd =173] Info Default Height difference : 0.40 um 2025-05-29 19:43:57.753 [Thd =136] Info Default IsAlignAngleOK delta:-0.00199999999298779. 2025-05-29 19:44:14.451 [Thd =136] Info MMSFocus _isStop = true 2025-05-29 19:44:14.451 [Thd =183] Info Default Alignment finish 2025-05-29 19:44:14.451 [Thd =52] Info Default Chuck vacuum open 2025-05-29 19:44:15.452 [Thd =136] Info Default ChuckVac: :True 2025-05-29 19:44:16.381 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:44:26.603 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:44:26.603 [Thd =1] Info Default MaskScaleY:1.00026481456705 2025-05-29 19:44:26.603 [Thd =1] Info Default MaskScaleX:0.999996110300075,Orth_Y_BeforR:-1.17555248001364 2025-05-29 19:44:32.469 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:44:32.469 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:44:39.556 [Thd =168] Info Default Chuck vacuum close 2025-05-29 19:44:40.557 [Thd =177] Info Default ChuckVac: :False 2025-05-29 19:44:49.864 [Thd =183] Error Default SyncSend recv cmd timeout 2025-05-29 19:44:55.822 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:416,p.Y:364,p.Width:420,p.Height:406 2025-05-29 19:44:57.505 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:44:57.506 [Thd =20] Info Default Chuck vacuum close 2025-05-29 19:44:58.507 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:45:04.261 [Thd =20] Info Default Chuck vacuum close 2025-05-29 19:45:05.262 [Thd =177] Info Default ChuckVac: :False 2025-05-29 19:45:09.578 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:514,bmp.Width:1224,bmp.Height:1024,p.X:456,p.Y:350,p.Width:356,p.Height:372 2025-05-29 19:45:10.548 [Thd =1] Info Default GetMarkPos offsetX:613,offsety:514,bmp.Width:1224,bmp.Height:1024,p.X:436,p.Y:308,p.Width:416,p.Height:396 2025-05-29 19:45:11.982 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:45:11.982 [Thd =148] Info Default Chuck vacuum close 2025-05-29 19:45:12.983 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:45:16.601 [Thd =102] Info Default Chuck vacuum close 2025-05-29 19:45:17.602 [Thd =52] Info Default ChuckVac: :False 2025-05-29 19:45:19.633 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:514,bmp.Width:1224,bmp.Height:1024,p.X:456,p.Y:396,p.Width:446,p.Height:378 2025-05-29 19:45:22.216 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:290,p.Y:104,p.Width:606,p.Height:878 2025-05-29 19:45:23.429 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:45:23.429 [Thd =99] Info Default Chuck vacuum close 2025-05-29 19:45:24.431 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:45:25.599 [Thd =168] Info Default Alignment ... 2025-05-29 19:45:25.720 [Thd =99] Info Default Chuck vacuum close 2025-05-29 19:45:26.721 [Thd =81] Info Default ChuckVac: :False 2025-05-29 19:45:49.356 [Thd =148] Info Default Switch light... 2025-05-29 19:45:49.356 [Thd =81] Info Default OpenLamp Transmission 2025-05-29 19:45:50.164 [Thd =109] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:45:50.867 [Thd =81] Info Default CloseLamp Reflection 2025-05-29 19:45:52.468 [Thd =81] Info MMSFocus _isStop = true 2025-05-29 19:45:52.468 [Thd =161] Info Default Execute alignment 1/2 2025-05-29 19:45:56.579 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9995152,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:45:56.579 [Thd =81] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:45:56.700 [Thd =81] Info Default Flag:Fine1, Position:62.54250070241,-10.057822006635 2025-05-29 19:46:05.473 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9993734,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:05.473 [Thd =81] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:46:05.594 [Thd =81] Info Default Flag:Fine2, Position:-64.456661315055,-9.985051748307 2025-05-29 19:46:10.036 [Thd =123] Info Default Execute alignment 2/2 2025-05-29 19:46:18.424 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9993823,xOffSet:621,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:18.424 [Thd =81] Info Default D2DMatchMark ******** :errorX:9,errorY:149 2025-05-29 19:46:20.122 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.999395,xOffSet:621,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:21.817 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9990692,xOffSet:611,yOffSet:506,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:23.429 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9969631,xOffSet:603,yOffSet:365,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:25.120 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9973823,xOffSet:604,yOffSet:371,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:26.809 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9992716,xOffSet:613,yOffSet:517,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:26.930 [Thd =81] Info Default Flag:Fine1, Position:62.6276017183681,-9.94143867348265 2025-05-29 19:46:35.715 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9989683,xOffSet:614,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:35.715 [Thd =81] Info Default D2DMatchMark ******** :errorX:2,errorY:149 2025-05-29 19:46:37.403 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9979143,xOffSet:613,yOffSet:644,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:39.091 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9994557,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:39.216 [Thd =81] Info Default Flag:Fine2, Position:-64.4512935044563,-9.94230199615186 2025-05-29 19:46:41.976 [Thd =121] Info Default Checking Mark ... 2025-05-29 19:46:50.367 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.999429,xOffSet:619,yOffSet:655,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:50.367 [Thd =81] Info Default D2DMatchMark ******** :errorX:7,errorY:143 2025-05-29 19:46:52.056 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9994282,xOffSet:619,yOffSet:655,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:53.748 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9992244,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:46:53.870 [Thd =81] Info Default Flag:Fine1, Position:62.5442771953836,-9.94684701343664 2025-05-29 19:47:02.643 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9978346,xOffSet:609,yOffSet:379,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:02.643 [Thd =81] Info Default D2DMatchMark ******** :errorX:-3,errorY:-133 2025-05-29 19:47:04.330 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9977963,xOffSet:609,yOffSet:379,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:06.020 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9994343,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:06.142 [Thd =81] Info Default Flag:Fine2, Position:-64.3757688573412,-9.94109160861661 2025-05-29 19:47:14.895 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9438022,xOffSet:768,yOffSet:915,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:14.895 [Thd =81] Info Default D2DMatchMark ******** :errorX:156,errorY:403 2025-05-29 19:47:16.638 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.979628,xOffSet:737,yOffSet:834,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:18.371 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9994411,xOffSet:612,yOffSet:517,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:19.984 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.8889897,xOffSet:487,yOffSet:200,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:21.717 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9994244,xOffSet:612,yOffSet:502,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:23.352 [Thd =81] Info Default D2DSearchMark matchResult:0， score:0.9993036,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:47:23.474 [Thd =81] Info Default Flag:Fine3, Position:-64.4160878091412,-136.178237077732 2025-05-29 19:47:24.474 [Thd =81] Info Default IsAlignAngleOK fine1:62.5442771953836,-9.94684701343664,fine2:-64.3757688573412,-9.94109160861661 2025-05-29 19:47:24.474 [Thd =20] Info Default Height difference : 0.40 um 2025-05-29 19:47:24.474 [Thd =81] Info Default IsAlignAngleOK delta:-0.0200000000001. 2025-05-29 19:47:40.612 [Thd =81] Info MMSFocus _isStop = true 2025-05-29 19:47:40.612 [Thd =102] Info Default Alignment finish 2025-05-29 19:47:40.612 [Thd =121] Info Default Chuck vacuum open 2025-05-29 19:47:41.613 [Thd =81] Info Default ChuckVac: :True 2025-05-29 19:47:42.549 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:47:56.765 [Thd =67] Info Default m_bIdel 2025-05-29 19:47:57.466 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:47:57.466 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:47:57.466 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:47:57.764 [Thd =65] Error Default ReadDeviceCmd failed. 2025-05-29 19:48:00.522 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:00.531 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:00.531 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:00.531 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:00.532 [Thd =151] Info Default located_pos:(62.5442771953836, -9.94684701343664) 2025-05-29 19:48:00.532 [Thd =151] Info Default deltax_stage 0, deltay_stage:-126.920046052725. 2025-05-29 19:48:00.532 [Thd =151] Info Default MoveStageForMarkCol102 point (-64.3757688573412, -9.94684701343664), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.532 [Thd =151] Info Default located_pos:(-64.3757688573412, -9.94684701343664) 2025-05-29 19:48:00.532 [Thd =151] Info Default deltax_stage 126.237145469116, deltay_stage:0. 2025-05-29 19:48:00.532 [Thd =151] Info Default MoveStageForMarkCol101 point (62.5039582415272, -136.183998921299), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.532 [Thd =151] Info Default deltax_stage 0, deltay_stage:-126.920045053354. 2025-05-29 19:48:00.532 [Thd =151] Info Default MoveStageForMarkCol102 point (-64.4160868118273, -136.183998921299), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5039582415272, -136.183998921299). 2025-05-29 19:48:00.532 [Thd =151] Info Default located_pos:(-64.4160868118273, -136.183998921299) 2025-05-29 19:48:00.532 [Thd =151] Info Default AliPt:(62.5442771953836, -9.94684701343664), GDS2StagePt:(62.5442771953836, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:00.532 [Thd =151] Info Default AliPt:(-64.3757688573412, -9.94109160861661), GDS2StagePt:(-64.3757688573412, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:00.533 [Thd =151] Info Default AliPt:(-64.4160878091412, -136.178237077732), GDS2StagePt:(-64.4160868118273, -136.183998921299), XOffset:5, YOffset:5 2025-05-29 19:48:00.539 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:00.539 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:00.539 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:00.539 [Thd =1] Info Default deltax_stage -6.4745844842954, deltay_stage:0. 2025-05-29 19:48:00.539 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5463451166131, -3.47226219890398), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.539 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82933169245868. 2025-05-29 19:48:00.539 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3756768090718, -3.47226219890398), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5463451166131, -3.47226219890398). 2025-05-29 19:48:00.539 [Thd =1] Info Default located_pos:(66.3756768090718, -3.47226219890398) 2025-05-29 19:48:00.539 [Thd =1] Info Default deltax_stage 132.465815314832, deltay_stage:0. 2025-05-29 19:48:00.539 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5019688631143, -142.41266908471), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.539 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.61713100994. 2025-05-29 19:48:00.539 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.115162146826, -142.41266908471), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5019688631143, -142.41266908471). 2025-05-29 19:48:00.539 [Thd =1] Info Default located_pos:(-67.115162146826, -142.41266908471) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage -0.963575583831806, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5445849523387, -8.9832713804575), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07354371551778. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6181286678565, -8.9832713804575), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5445849523387, -8.9832713804575). 2025-05-29 19:48:00.540 [Thd =1] Info Default located_pos:(63.6181286678565, -8.9832713804575) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0.240818646068546, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.544200280179, -10.1876656717882), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247691965150203. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2965083150288, -10.1876656717882), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.544200280179, -10.1876656717882). 2025-05-29 19:48:00.540 [Thd =1] Info Default located_pos:(62.2965083150288, -10.1876656717882) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage -1.01635450626256, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5446018094288, -8.93049245533475), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.6630778864. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1184760769711, -8.93049245533475), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5446018094288, -8.93049245533475). 2025-05-29 19:48:00.540 [Thd =1] Info Default located_pos:(-63.1184760769711, -8.93049245533475) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0.281483586303235, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5441872921805, -10.228330614097), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.133040875521. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5888535833409, -10.228330614097), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5441872921805, -10.228330614097). 2025-05-29 19:48:00.540 [Thd =1] Info Default located_pos:(-64.5888535833409, -10.228330614097) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 126.079386700974, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.50400862819, -136.026240145111), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.868872245166. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3648636169764, -136.026240145111), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.50400862819, -136.026240145111). 2025-05-29 19:48:00.540 [Thd =1] Info Default located_pos:(-63.3648636169764, -136.026240145111) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 127.214564032602, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.503646063255, -137.161417534639), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.079430647565. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5757845843102, -137.161417534639), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.503646063255, -137.161417534639). 2025-05-29 19:48:00.540 [Thd =1] Info Default located_pos:(-64.5757845843102, -137.161417534639) 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 126.020551787444, deltay_stage:0. 2025-05-29 19:48:00.540 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5040274195066, -135.967405228579), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.540 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06489716245913. 2025-05-29 19:48:00.541 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5689245819657, -135.967405228579), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5040274195066, -135.967405228579). 2025-05-29 19:48:00.541 [Thd =1] Info Default located_pos:(63.5689245819657, -135.967405228579) 2025-05-29 19:48:00.541 [Thd =1] Info Default deltax_stage 127.205912045318, deltay_stage:0. 2025-05-29 19:48:00.541 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5036488266181, -137.152765546914), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:00.541 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258068428442844. 2025-05-29 19:48:00.541 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2455803981753, -137.152765546914), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5036488266181, -137.152765546914). 2025-05-29 19:48:00.541 [Thd =1] Info Default located_pos:(62.2455803981753, -137.152765546914) 2025-05-29 19:48:03.703 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:07.588 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:07.597 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:07.597 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:07.597 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:07.598 [Thd =20] Info Default located_pos:(62.5442771953836, -9.94684701343664) 2025-05-29 19:48:07.598 [Thd =20] Info Default deltax_stage 0, deltay_stage:-126.920046052725. 2025-05-29 19:48:07.598 [Thd =20] Info Default MoveStageForMarkCol102 point (-64.3757688573412, -9.94684701343664), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.598 [Thd =20] Info Default located_pos:(-64.3757688573412, -9.94684701343664) 2025-05-29 19:48:07.598 [Thd =20] Info Default deltax_stage 126.237145469116, deltay_stage:0. 2025-05-29 19:48:07.598 [Thd =20] Info Default MoveStageForMarkCol101 point (62.5039582415272, -136.183998921299), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.598 [Thd =20] Info Default deltax_stage 0, deltay_stage:-126.920045053354. 2025-05-29 19:48:07.598 [Thd =20] Info Default MoveStageForMarkCol102 point (-64.4160868118273, -136.183998921299), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5039582415272, -136.183998921299). 2025-05-29 19:48:07.598 [Thd =20] Info Default located_pos:(-64.4160868118273, -136.183998921299) 2025-05-29 19:48:07.598 [Thd =20] Info Default AliPt:(62.5442771953836, -9.94684701343664), GDS2StagePt:(62.5442771953836, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:07.598 [Thd =20] Info Default AliPt:(-64.3757688573412, -9.94109160861661), GDS2StagePt:(-64.3757688573412, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:07.598 [Thd =20] Info Default AliPt:(-64.4160878091412, -136.178237077732), GDS2StagePt:(-64.4160868118273, -136.183998921299), XOffset:5, YOffset:5 2025-05-29 19:48:07.605 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:07.605 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:07.605 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage -6.4745844842954, deltay_stage:0. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5463451166131, -3.47226219890398), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82933169245868. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3756768090718, -3.47226219890398), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5463451166131, -3.47226219890398). 2025-05-29 19:48:07.606 [Thd =1] Info Default located_pos:(66.3756768090718, -3.47226219890398) 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 132.465815314832, deltay_stage:0. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5019688631143, -142.41266908471), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.61713100994. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.115162146826, -142.41266908471), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5019688631143, -142.41266908471). 2025-05-29 19:48:07.606 [Thd =1] Info Default located_pos:(-67.115162146826, -142.41266908471) 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage -0.963575583831806, deltay_stage:0. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5445849523387, -8.9832713804575), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07354371551778. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6181286678565, -8.9832713804575), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5445849523387, -8.9832713804575). 2025-05-29 19:48:07.606 [Thd =1] Info Default located_pos:(63.6181286678565, -8.9832713804575) 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0.240818646068546, deltay_stage:0. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol101 point (62.544200280179, -10.1876656717882), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247691965150203. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2965083150288, -10.1876656717882), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.544200280179, -10.1876656717882). 2025-05-29 19:48:07.606 [Thd =1] Info Default located_pos:(62.2965083150288, -10.1876656717882) 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage -1.01635450626256, deltay_stage:0. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5446018094288, -8.93049245533475), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.6630778864. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1184760769711, -8.93049245533475), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5446018094288, -8.93049245533475). 2025-05-29 19:48:07.606 [Thd =1] Info Default located_pos:(-63.1184760769711, -8.93049245533475) 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0.281483586303235, deltay_stage:0. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5441872921805, -10.228330614097), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.606 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.133040875521. 2025-05-29 19:48:07.606 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5888535833409, -10.228330614097), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5441872921805, -10.228330614097). 2025-05-29 19:48:07.606 [Thd =1] Info Default located_pos:(-64.5888535833409, -10.228330614097) 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 126.079386700974, deltay_stage:0. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol101 point (62.50400862819, -136.026240145111), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.868872245166. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3648636169764, -136.026240145111), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.50400862819, -136.026240145111). 2025-05-29 19:48:07.607 [Thd =1] Info Default located_pos:(-63.3648636169764, -136.026240145111) 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 127.214564032602, deltay_stage:0. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol101 point (62.503646063255, -137.161417534639), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.079430647565. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5757845843102, -137.161417534639), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.503646063255, -137.161417534639). 2025-05-29 19:48:07.607 [Thd =1] Info Default located_pos:(-64.5757845843102, -137.161417534639) 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 126.020551787444, deltay_stage:0. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5040274195066, -135.967405228579), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06489716245913. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5689245819657, -135.967405228579), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5040274195066, -135.967405228579). 2025-05-29 19:48:07.607 [Thd =1] Info Default located_pos:(63.5689245819657, -135.967405228579) 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 127.205912045318, deltay_stage:0. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5036488266181, -137.152765546914), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:07.607 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258068428442844. 2025-05-29 19:48:07.607 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2455803981753, -137.152765546914), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5036488266181, -137.152765546914). 2025-05-29 19:48:07.607 [Thd =1] Info Default located_pos:(62.2455803981753, -137.152765546914) 2025-05-29 19:48:09.399 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:09.407 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:09.407 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:09.407 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:09.407 [Thd =151] Info Default located_pos:(62.5442771953836, -9.94684701343664) 2025-05-29 19:48:09.407 [Thd =151] Info Default deltax_stage 0, deltay_stage:-126.920046052725. 2025-05-29 19:48:09.407 [Thd =151] Info Default MoveStageForMarkCol102 point (-64.3757688573412, -9.94684701343664), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.408 [Thd =151] Info Default located_pos:(-64.3757688573412, -9.94684701343664) 2025-05-29 19:48:09.408 [Thd =151] Info Default deltax_stage 126.237145469116, deltay_stage:0. 2025-05-29 19:48:09.408 [Thd =151] Info Default MoveStageForMarkCol101 point (62.5039582415272, -136.183998921299), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.408 [Thd =151] Info Default deltax_stage 0, deltay_stage:-126.920045053354. 2025-05-29 19:48:09.408 [Thd =151] Info Default MoveStageForMarkCol102 point (-64.4160868118273, -136.183998921299), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5039582415272, -136.183998921299). 2025-05-29 19:48:09.408 [Thd =151] Info Default located_pos:(-64.4160868118273, -136.183998921299) 2025-05-29 19:48:09.408 [Thd =151] Info Default AliPt:(62.5442771953836, -9.94684701343664), GDS2StagePt:(62.5442771953836, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:09.408 [Thd =151] Info Default AliPt:(-64.3757688573412, -9.94109160861661), GDS2StagePt:(-64.3757688573412, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:09.408 [Thd =151] Info Default AliPt:(-64.4160878091412, -136.178237077732), GDS2StagePt:(-64.4160868118273, -136.183998921299), XOffset:5, YOffset:5 2025-05-29 19:48:09.414 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:09.415 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:09.415 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage -6.4745844842954, deltay_stage:0. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5463451166131, -3.47226219890398), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82933169245868. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3756768090718, -3.47226219890398), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5463451166131, -3.47226219890398). 2025-05-29 19:48:09.415 [Thd =1] Info Default located_pos:(66.3756768090718, -3.47226219890398) 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage 132.465815314832, deltay_stage:0. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5019688631143, -142.41266908471), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.61713100994. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.115162146826, -142.41266908471), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5019688631143, -142.41266908471). 2025-05-29 19:48:09.415 [Thd =1] Info Default located_pos:(-67.115162146826, -142.41266908471) 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage -0.963575583831806, deltay_stage:0. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5445849523387, -8.9832713804575), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07354371551778. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6181286678565, -8.9832713804575), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5445849523387, -8.9832713804575). 2025-05-29 19:48:09.415 [Thd =1] Info Default located_pos:(63.6181286678565, -8.9832713804575) 2025-05-29 19:48:09.415 [Thd =1] Info Default deltax_stage 0.240818646068546, deltay_stage:0. 2025-05-29 19:48:09.415 [Thd =1] Info Default MoveStageForMarkCol101 point (62.544200280179, -10.1876656717882), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247691965150203. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2965083150288, -10.1876656717882), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.544200280179, -10.1876656717882). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(62.2965083150288, -10.1876656717882) 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage -1.01635450626256, deltay_stage:0. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5446018094288, -8.93049245533475), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.6630778864. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1184760769711, -8.93049245533475), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5446018094288, -8.93049245533475). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(-63.1184760769711, -8.93049245533475) 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0.281483586303235, deltay_stage:0. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5441872921805, -10.228330614097), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.133040875521. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5888535833409, -10.228330614097), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5441872921805, -10.228330614097). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(-64.5888535833409, -10.228330614097) 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 126.079386700974, deltay_stage:0. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.50400862819, -136.026240145111), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.868872245166. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3648636169764, -136.026240145111), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.50400862819, -136.026240145111). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(-63.3648636169764, -136.026240145111) 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 127.214564032602, deltay_stage:0. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.503646063255, -137.161417534639), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.079430647565. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5757845843102, -137.161417534639), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.503646063255, -137.161417534639). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(-64.5757845843102, -137.161417534639) 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 126.020551787444, deltay_stage:0. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5040274195066, -135.967405228579), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06489716245913. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5689245819657, -135.967405228579), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5040274195066, -135.967405228579). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(63.5689245819657, -135.967405228579) 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 127.205912045318, deltay_stage:0. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5036488266181, -137.152765546914), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.416 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258068428442844. 2025-05-29 19:48:09.416 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2455803981753, -137.152765546914), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5036488266181, -137.152765546914). 2025-05-29 19:48:09.416 [Thd =1] Info Default located_pos:(62.2455803981753, -137.152765546914) 2025-05-29 19:48:09.742 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:09.750 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:09.750 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:09.750 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:09.750 [Thd =73] Info Default located_pos:(62.5442771953836, -9.94684701343664) 2025-05-29 19:48:09.751 [Thd =73] Info Default deltax_stage 0, deltay_stage:-126.920046052725. 2025-05-29 19:48:09.751 [Thd =73] Info Default MoveStageForMarkCol102 point (-64.3757688573412, -9.94684701343664), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.751 [Thd =73] Info Default located_pos:(-64.3757688573412, -9.94684701343664) 2025-05-29 19:48:09.751 [Thd =73] Info Default deltax_stage 126.237145469116, deltay_stage:0. 2025-05-29 19:48:09.751 [Thd =73] Info Default MoveStageForMarkCol101 point (62.5039582415272, -136.183998921299), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.751 [Thd =73] Info Default deltax_stage 0, deltay_stage:-126.920045053354. 2025-05-29 19:48:09.751 [Thd =73] Info Default MoveStageForMarkCol102 point (-64.4160868118273, -136.183998921299), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5039582415272, -136.183998921299). 2025-05-29 19:48:09.751 [Thd =73] Info Default located_pos:(-64.4160868118273, -136.183998921299) 2025-05-29 19:48:09.751 [Thd =73] Info Default AliPt:(62.5442771953836, -9.94684701343664), GDS2StagePt:(62.5442771953836, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:09.751 [Thd =73] Info Default AliPt:(-64.3757688573412, -9.94109160861661), GDS2StagePt:(-64.3757688573412, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:09.751 [Thd =73] Info Default AliPt:(-64.4160878091412, -136.178237077732), GDS2StagePt:(-64.4160868118273, -136.183998921299), XOffset:5, YOffset:5 2025-05-29 19:48:09.757 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:09.757 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:09.757 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:09.787 [Thd =1] Info Default deltax_stage -6.4745844842954, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5463451166131, -3.47226219890398), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82933169245868. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3756768090718, -3.47226219890398), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5463451166131, -3.47226219890398). 2025-05-29 19:48:09.788 [Thd =1] Info Default located_pos:(66.3756768090718, -3.47226219890398) 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 132.465815314832, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5019688631143, -142.41266908471), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.61713100994. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.115162146826, -142.41266908471), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5019688631143, -142.41266908471). 2025-05-29 19:48:09.788 [Thd =1] Info Default located_pos:(-67.115162146826, -142.41266908471) 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage -0.963575583831806, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5445849523387, -8.9832713804575), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07354371551778. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6181286678565, -8.9832713804575), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5445849523387, -8.9832713804575). 2025-05-29 19:48:09.788 [Thd =1] Info Default located_pos:(63.6181286678565, -8.9832713804575) 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0.240818646068546, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.544200280179, -10.1876656717882), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247691965150203. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2965083150288, -10.1876656717882), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.544200280179, -10.1876656717882). 2025-05-29 19:48:09.788 [Thd =1] Info Default located_pos:(62.2965083150288, -10.1876656717882) 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage -1.01635450626256, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5446018094288, -8.93049245533475), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.6630778864. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1184760769711, -8.93049245533475), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5446018094288, -8.93049245533475). 2025-05-29 19:48:09.788 [Thd =1] Info Default located_pos:(-63.1184760769711, -8.93049245533475) 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0.281483586303235, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5441872921805, -10.228330614097), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.133040875521. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5888535833409, -10.228330614097), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5441872921805, -10.228330614097). 2025-05-29 19:48:09.788 [Thd =1] Info Default located_pos:(-64.5888535833409, -10.228330614097) 2025-05-29 19:48:09.788 [Thd =1] Info Default deltax_stage 126.079386700974, deltay_stage:0. 2025-05-29 19:48:09.788 [Thd =1] Info Default MoveStageForMarkCol101 point (62.50400862819, -136.026240145111), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.789 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.868872245166. 2025-05-29 19:48:09.789 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3648636169764, -136.026240145111), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.50400862819, -136.026240145111). 2025-05-29 19:48:09.789 [Thd =1] Info Default located_pos:(-63.3648636169764, -136.026240145111) 2025-05-29 19:48:09.789 [Thd =1] Info Default deltax_stage 127.214564032602, deltay_stage:0. 2025-05-29 19:48:09.789 [Thd =1] Info Default MoveStageForMarkCol101 point (62.503646063255, -137.161417534639), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.789 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.079430647565. 2025-05-29 19:48:09.789 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5757845843102, -137.161417534639), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.503646063255, -137.161417534639). 2025-05-29 19:48:09.789 [Thd =1] Info Default located_pos:(-64.5757845843102, -137.161417534639) 2025-05-29 19:48:09.789 [Thd =1] Info Default deltax_stage 126.020551787444, deltay_stage:0. 2025-05-29 19:48:09.789 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5040274195066, -135.967405228579), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.789 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06489716245913. 2025-05-29 19:48:09.789 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5689245819657, -135.967405228579), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5040274195066, -135.967405228579). 2025-05-29 19:48:09.789 [Thd =1] Info Default located_pos:(63.5689245819657, -135.967405228579) 2025-05-29 19:48:09.789 [Thd =1] Info Default deltax_stage 127.205912045318, deltay_stage:0. 2025-05-29 19:48:09.797 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5036488266181, -137.152765546914), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:09.797 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258068428442844. 2025-05-29 19:48:09.797 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2455803981753, -137.152765546914), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5036488266181, -137.152765546914). 2025-05-29 19:48:09.797 [Thd =1] Info Default located_pos:(62.2455803981753, -137.152765546914) 2025-05-29 19:48:10.006 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:10.022 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:10.022 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:10.022 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:10.022 [Thd =73] Info Default located_pos:(62.5442771953836, -9.94684701343664) 2025-05-29 19:48:10.022 [Thd =73] Info Default deltax_stage 0, deltay_stage:-126.920046052725. 2025-05-29 19:48:10.022 [Thd =73] Info Default MoveStageForMarkCol102 point (-64.3757688573412, -9.94684701343664), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.022 [Thd =73] Info Default located_pos:(-64.3757688573412, -9.94684701343664) 2025-05-29 19:48:10.023 [Thd =73] Info Default deltax_stage 126.237145469116, deltay_stage:0. 2025-05-29 19:48:10.023 [Thd =73] Info Default MoveStageForMarkCol101 point (62.5039582415272, -136.183998921299), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.023 [Thd =73] Info Default deltax_stage 0, deltay_stage:-126.920045053354. 2025-05-29 19:48:10.023 [Thd =73] Info Default MoveStageForMarkCol102 point (-64.4160868118273, -136.183998921299), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5039582415272, -136.183998921299). 2025-05-29 19:48:10.023 [Thd =73] Info Default located_pos:(-64.4160868118273, -136.183998921299) 2025-05-29 19:48:10.023 [Thd =73] Info Default AliPt:(62.5442771953836, -9.94684701343664), GDS2StagePt:(62.5442771953836, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:10.023 [Thd =73] Info Default AliPt:(-64.3757688573412, -9.94109160861661), GDS2StagePt:(-64.3757688573412, -9.94684701343664), XOffset:5, YOffset:5 2025-05-29 19:48:10.023 [Thd =73] Info Default AliPt:(-64.4160878091412, -136.178237077732), GDS2StagePt:(-64.4160868118273, -136.183998921299), XOffset:5, YOffset:5 2025-05-29 19:48:10.030 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:48:10.030 [Thd =1] Info Default MaskScaleY:1.00062995523372 2025-05-29 19:48:10.030 [Thd =1] Info Default MaskScaleX:1.0000014697012,Orth_Y_BeforR:-1.09798386357208 2025-05-29 19:48:10.030 [Thd =1] Info Default deltax_stage -6.4745844842954, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5463451166131, -3.47226219890398), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.82933169245868. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol102 point (66.3756768090718, -3.47226219890398), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5463451166131, -3.47226219890398). 2025-05-29 19:48:10.031 [Thd =1] Info Default located_pos:(66.3756768090718, -3.47226219890398) 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 132.465815314832, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5019688631143, -142.41266908471), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.61713100994. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.115162146826, -142.41266908471), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5019688631143, -142.41266908471). 2025-05-29 19:48:10.031 [Thd =1] Info Default located_pos:(-67.115162146826, -142.41266908471) 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage -0.963575583831806, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5445849523387, -8.9832713804575), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07354371551778. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6181286678565, -8.9832713804575), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.5445849523387, -8.9832713804575). 2025-05-29 19:48:10.031 [Thd =1] Info Default located_pos:(63.6181286678565, -8.9832713804575) 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0.240818646068546, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.544200280179, -10.1876656717882), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247691965150203. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2965083150288, -10.1876656717882), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.544200280179, -10.1876656717882). 2025-05-29 19:48:10.031 [Thd =1] Info Default located_pos:(62.2965083150288, -10.1876656717882) 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage -1.01635450626256, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5446018094288, -8.93049245533475), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.6630778864. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1184760769711, -8.93049245533475), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.5446018094288, -8.93049245533475). 2025-05-29 19:48:10.031 [Thd =1] Info Default located_pos:(-63.1184760769711, -8.93049245533475) 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0.281483586303235, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5441872921805, -10.228330614097), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.133040875521. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5888535833409, -10.228330614097), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.5441872921805, -10.228330614097). 2025-05-29 19:48:10.031 [Thd =1] Info Default located_pos:(-64.5888535833409, -10.228330614097) 2025-05-29 19:48:10.031 [Thd =1] Info Default deltax_stage 126.079386700974, deltay_stage:0. 2025-05-29 19:48:10.031 [Thd =1] Info Default MoveStageForMarkCol101 point (62.50400862819, -136.026240145111), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.868872245166. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3648636169764, -136.026240145111), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.50400862819, -136.026240145111). 2025-05-29 19:48:10.032 [Thd =1] Info Default located_pos:(-63.3648636169764, -136.026240145111) 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 127.214564032602, deltay_stage:0. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol101 point (62.503646063255, -137.161417534639), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.079430647565. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5757845843102, -137.161417534639), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.503646063255, -137.161417534639). 2025-05-29 19:48:10.032 [Thd =1] Info Default located_pos:(-64.5757845843102, -137.161417534639) 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 126.020551787444, deltay_stage:0. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5040274195066, -135.967405228579), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06489716245913. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol102 point (63.5689245819657, -135.967405228579), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.5040274195066, -135.967405228579). 2025-05-29 19:48:10.032 [Thd =1] Info Default located_pos:(63.5689245819657, -135.967405228579) 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 127.205912045318, deltay_stage:0. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5036488266181, -137.152765546914), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.5442771953836, -9.94684701343664). 2025-05-29 19:48:10.032 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258068428442844. 2025-05-29 19:48:10.032 [Thd =1] Info Default MoveStageForMarkCol102 point (62.2455803981753, -137.152765546914), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5036488266181, -137.152765546914). 2025-05-29 19:48:10.032 [Thd =1] Info Default located_pos:(62.2455803981753, -137.152765546914) 2025-05-29 19:48:11.026 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:48:11.026 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:48:40.073 [Thd =1] Error Default FormSelectJob GetRecipe Start 2025-05-29 19:48:40.074 [Thd =1] Error Default FormSelectJob GetRecipe End 2025-05-29 19:48:40.113 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.Views.UCSetupMainMethodName:SelectProductSetup After Memory usage: 16753.84MB 2025-05-29 19:48:40.179 [Thd =1] Error Default Select Recipe start 2025-05-29 19:48:40.183 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:48:40.183 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:48:40.184 [Thd =1] Error Default Select Recipe end 2025-05-29 19:48:44.626 [Thd =49] Error Default ReadDeviceCmd failed. 2025-05-29 19:48:46.628 [Thd =187] Info MMSFocus _isStop = true 2025-05-29 19:48:46.665 [Thd =187] Info Default IKAP Start of stream 2025-05-29 19:48:46.666 [Thd =187] Info Default Preview Camera StartSnap 2025-05-29 19:48:46.700 [Thd =187] Info Default IKAP End of stream 2025-05-29 19:48:46.700 [Thd =187] Info Default Preview Camera StopSnap 2025-05-29 19:48:46.737 [Thd =187] Info Default IKAP Start of stream 2025-05-29 19:48:46.737 [Thd =187] Info Default Preview Camera StartSnap 2025-05-29 19:48:46.738 [Thd =187] Info Default camera_line StartTrigger 2025-05-29 19:49:01.518 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 19:49:01.520 [Thd =187] Info Default Axis Y:0,PulseWidth:0.002,TriggerDistance:0.0809527,BeginPoint:-250,EndPoint:-80 2025-05-29 19:49:11.488 [Thd =187] Info Default IKAP End of stream 2025-05-29 19:49:11.488 [Thd =187] Info Default Preview Camera StopSnap 2025-05-29 19:49:15.621 [Thd =187] Info Default RefLamp Rise: True! 2025-05-29 19:49:19.361 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:49:19.361 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:49:50.091 [Thd =1] Info Default GetMarkPos offsetX:402,offsety:365,bmp.Width:1224,bmp.Height:1024,p.X:256,p.Y:202,p.Width:460,p.Height:486 2025-05-29 19:49:52.665 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:264,p.Y:260,p.Width:680,p.Height:498 2025-05-29 19:49:54.754 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:49:57.089 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:49:57.089 [Thd =99] Info Default Chuck vacuum close 2025-05-29 19:49:58.090 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:50:16.482 [Thd =1] Info Default GetMarkPos offsetX:570,offsety:258,bmp.Width:1224,bmp.Height:1024,p.X:518,p.Y:198,p.Width:194,p.Height:160 2025-05-29 19:50:19.730 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:510,bmp.Width:1224,bmp.Height:1024,p.X:526,p.Y:404,p.Width:346,p.Height:370 2025-05-29 19:50:22.336 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:50:22.337 [Thd =173] Info Default Chuck vacuum close 2025-05-29 19:50:23.338 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:50:52.970 [Thd =1] Info Default GetMarkPos offsetX:580,offsety:447,bmp.Width:1224,bmp.Height:1024,p.X:464,p.Y:318,p.Width:284,p.Height:202 2025-05-29 19:50:56.306 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:476,p.Y:416,p.Width:462,p.Height:318 2025-05-29 19:50:58.481 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:50:58.481 [Thd =123] Info Default Chuck vacuum close 2025-05-29 19:50:59.482 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:51:01.480 [Thd =151] Info Default Alignment ... 2025-05-29 19:51:01.601 [Thd =102] Info Default Chuck vacuum close 2025-05-29 19:51:02.602 [Thd =148] Info Default ChuckVac: :False 2025-05-29 19:51:08.026 [Thd =119] Info Default Switch light... 2025-05-29 19:51:08.026 [Thd =148] Info Default OpenLamp Transmission 2025-05-29 19:51:08.836 [Thd =123] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:51:09.535 [Thd =148] Info Default CloseLamp Reflection 2025-05-29 19:51:11.780 [Thd =148] Info MMSFocus _isStop = true 2025-05-29 19:51:11.780 [Thd =70] Info Default Execute alignment 1/2 2025-05-29 19:51:15.888 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9991977,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:15.888 [Thd =148] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:51:16.009 [Thd =148] Info Default Flag:Fine1, Position:36.4980385522628,-36.9340017424771 2025-05-29 19:51:22.672 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9995447,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:22.672 [Thd =148] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:51:22.794 [Thd =148] Info Default Flag:Fine2, Position:-37.5561457392324,-36.8910705582994 2025-05-29 19:51:27.258 [Thd =173] Info Default Execute alignment 2/2 2025-05-29 19:51:33.523 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.997511,xOffSet:620,yOffSet:665,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:33.523 [Thd =148] Info Default D2DMatchMark ******** :errorX:8,errorY:153 2025-05-29 19:51:35.212 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9957647,xOffSet:616,yOffSet:597,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:36.880 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9993972,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:37.002 [Thd =148] Info Default Flag:Fine1, Position:36.53239900468,-36.8347891984764 2025-05-29 19:51:43.662 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9988783,xOffSet:615,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:43.662 [Thd =148] Info Default D2DMatchMark ******** :errorX:3,errorY:152 2025-05-29 19:51:45.351 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9988346,xOffSet:615,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:47.053 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9994758,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:47.180 [Thd =148] Info Default Flag:Fine2, Position:-37.540790566896,-36.8330625842446 2025-05-29 19:51:50.049 [Thd =58] Info Default Checking Mark ... 2025-05-29 19:51:56.313 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9989783,xOffSet:608,yOffSet:435,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:56.313 [Thd =148] Info Default D2DMatchMark ******** :errorX:-4,errorY:-77 2025-05-29 19:51:57.980 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9989468,xOffSet:612,yOffSet:502,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:59.603 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9994819,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:51:59.725 [Thd =148] Info Default Flag:Fine1, Position:36.5615692207508,-36.8295127957389 2025-05-29 19:52:06.386 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9972579,xOffSet:609,yOffSet:369,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:06.386 [Thd =148] Info Default D2DMatchMark ******** :errorX:-3,errorY:-143 2025-05-29 19:52:08.076 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9972187,xOffSet:609,yOffSet:369,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:09.767 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9994473,xOffSet:613,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:09.893 [Thd =148] Info Default Flag:Fine2, Position:-37.4543540929896,-36.8289372552574 2025-05-29 19:52:16.490 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9987078,xOffSet:616,yOffSet:676,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:16.490 [Thd =148] Info Default D2DMatchMark ******** :errorX:4,errorY:164 2025-05-29 19:52:18.190 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9986525,xOffSet:616,yOffSet:676,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:19.891 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9953101,xOffSet:608,yOffSet:349,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:21.590 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9953409,xOffSet:608,yOffSet:349,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:23.291 [Thd =148] Info Default D2DSearchMark matchResult:0， score:0.9993215,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:52:23.413 [Thd =148] Info Default Flag:Fine3, Position:-37.4478288633702,-109.283210108556 2025-05-29 19:52:24.414 [Thd =148] Info Default IsAlignAngleOK fine1:36.5615692207508,-36.8295127957389,fine2:-37.4543540929896,-36.8289372552574 2025-05-29 19:52:24.414 [Thd =52] Info Default Height difference : 0.30 um 2025-05-29 19:52:24.414 [Thd =148] Info Default IsAlignAngleOK delta:-0.00199999999830877. 2025-05-29 19:52:33.901 [Thd =148] Info MMSFocus _isStop = true 2025-05-29 19:52:33.901 [Thd =52] Info Default Alignment finish 2025-05-29 19:52:33.901 [Thd =118] Info Default Chuck vacuum open 2025-05-29 19:52:34.902 [Thd =148] Info Default ChuckVac: :True 2025-05-29 19:52:35.848 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:53:01.038 [Thd =1] Error Default CheckDPTaskState 检查数据准备数据问题！！ jobName: 2025-05-29 19:53:02.522 [Thd =1] Error Default CheckDPTaskState 检查数据准备数据问题！！ jobName: 2025-05-29 19:53:04.808 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:53:04.808 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:53:11.065 [Thd =168] Info Default Chuck vacuum close 2025-05-29 19:53:12.066 [Thd =52] Info Default ChuckVac: :False 2025-05-29 19:53:20.306 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:404,p.Y:240,p.Width:500,p.Height:512 2025-05-29 19:53:22.701 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:490,p.Y:418,p.Width:346,p.Height:274 2025-05-29 19:53:23.848 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:53:23.848 [Thd =173] Info Default Chuck vacuum close 2025-05-29 19:53:24.849 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:53:29.447 [Thd =99] Info Default Chuck vacuum close 2025-05-29 19:53:30.448 [Thd =136] Info Default ChuckVac: :False 2025-05-29 19:53:32.871 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:424,p.Y:376,p.Width:490,p.Height:374 2025-05-29 19:53:34.495 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:434,p.Y:234,p.Width:514,p.Height:546 2025-05-29 19:53:35.520 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:53:35.520 [Thd =186] Info Default Chuck vacuum close 2025-05-29 19:53:36.521 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:53:50.029 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:448,p.Y:392,p.Width:408,p.Height:346 2025-05-29 19:53:51.726 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:438,p.Y:464,p.Width:608,p.Height:298 2025-05-29 19:53:53.015 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:53:53.015 [Thd =119] Info Default Chuck vacuum close 2025-05-29 19:53:54.016 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:54:08.282 [Thd =187] Info Default Chuck vacuum close 2025-05-29 19:54:09.283 [Thd =180] Info Default ChuckVac: :False 2025-05-29 19:54:11.794 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:466,p.Y:416,p.Width:314,p.Height:248 2025-05-29 19:54:13.656 [Thd =1] Info Default GetMarkPos offsetX:611,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:450,p.Y:398,p.Width:516,p.Height:314 2025-05-29 19:54:15.124 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:54:15.124 [Thd =123] Info Default Chuck vacuum close 2025-05-29 19:54:16.126 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:54:22.301 [Thd =99] Info Default Chuck vacuum close 2025-05-29 19:54:23.302 [Thd =58] Info Default ChuckVac: :False 2025-05-29 19:54:28.929 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:513,bmp.Width:1224,bmp.Height:1024,p.X:390,p.Y:382,p.Width:572,p.Height:384 2025-05-29 19:54:30.641 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:302,p.Y:366,p.Width:854,p.Height:490 2025-05-29 19:54:32.447 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:54:32.448 [Thd =102] Info Default Chuck vacuum close 2025-05-29 19:54:33.448 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:54:38.838 [Thd =100] Info Default Chuck vacuum close 2025-05-29 19:54:39.839 [Thd =143] Info Default ChuckVac: :False 2025-05-29 19:54:41.953 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:514,bmp.Width:1224,bmp.Height:1024,p.X:532,p.Y:376,p.Width:368,p.Height:304 2025-05-29 19:54:43.730 [Thd =1] Info Default GetMarkPos offsetX:612,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:404,p.Y:350,p.Width:528,p.Height:390 2025-05-29 19:54:45.015 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:54:45.015 [Thd =173] Info Default Chuck vacuum close 2025-05-29 19:54:46.017 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:54:52.310 [Thd =102] Info Default Alignment ... 2025-05-29 19:54:52.431 [Thd =186] Info Default Chuck vacuum close 2025-05-29 19:54:53.432 [Thd =123] Info Default ChuckVac: :False 2025-05-29 19:55:06.627 [Thd =187] Info Default Switch light... 2025-05-29 19:55:06.627 [Thd =123] Info Default OpenLamp Transmission 2025-05-29 19:55:07.437 [Thd =186] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:55:08.137 [Thd =123] Info Default CloseLamp Reflection 2025-05-29 19:55:10.596 [Thd =123] Info MMSFocus _isStop = true 2025-05-29 19:55:10.597 [Thd =151] Info Default Execute alignment 1/2 2025-05-29 19:55:14.709 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9995316,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:14.709 [Thd =123] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:55:14.830 [Thd =123] Info Default Flag:Fine1, Position:36.4977507820218,-36.9337139722361 2025-05-29 19:55:21.491 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9996271,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:21.492 [Thd =123] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:55:21.617 [Thd =123] Info Default Flag:Fine2, Position:-37.5564335094734,-36.8910705582994 2025-05-29 19:55:26.070 [Thd =151] Info Default Execute alignment 2/2 2025-05-29 19:55:32.347 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9972053,xOffSet:620,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:32.347 [Thd =123] Info Default D2DMatchMark ******** :errorX:8,errorY:152 2025-05-29 19:55:34.037 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9972478,xOffSet:620,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:35.733 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.999177,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:35.855 [Thd =123] Info Default Flag:Fine1, Position:36.5124290230388,-36.8363414450305 2025-05-29 19:55:42.521 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9990774,xOffSet:615,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:42.521 [Thd =123] Info Default D2DMatchMark ******** :errorX:3,errorY:151 2025-05-29 19:55:44.209 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9976617,xOffSet:612,yOffSet:533,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:45.844 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9995713,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:45.965 [Thd =123] Info Default Flag:Fine2, Position:-37.5037818745502,-36.8326004389676 2025-05-29 19:55:48.944 [Thd =168] Info Default Checking Mark ... 2025-05-29 19:55:55.210 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9989724,xOffSet:603,yOffSet:374,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:55.210 [Thd =123] Info Default D2DMatchMark ******** :errorX:-9,errorY:-138 2025-05-29 19:55:56.900 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9989946,xOffSet:603,yOffSet:374,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:58.591 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.999474,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:55:58.713 [Thd =123] Info Default Flag:Fine1, Position:36.6008179266938,-36.8222171254585 2025-05-29 19:56:05.370 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9993466,xOffSet:612,yOffSet:505,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:56:05.370 [Thd =123] Info Default D2DMatchMark ******** :errorX:0,errorY:-7 2025-05-29 19:56:06.981 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.999616,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:56:07.103 [Thd =123] Info Default Flag:Fine2, Position:-37.4928032602652,-36.8273969898013 2025-05-29 19:56:13.696 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9985678,xOffSet:615,yOffSet:681,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:56:13.696 [Thd =123] Info Default D2DMatchMark ******** :errorX:3,errorY:169 2025-05-29 19:56:15.395 [Thd =123] Info Default D2DSearchMark matchResult:0， score:0.9995682,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:56:15.517 [Thd =123] Info Default Flag:Fine3, Position:-37.4906295791448,-109.281669675856 2025-05-29 19:56:16.518 [Thd =123] Info Default IsAlignAngleOK fine1:36.6008179266938,-36.8222171254585,fine2:-37.4928032602652,-36.8273969898013 2025-05-29 19:56:16.518 [Thd =70] Info Default Height difference : 0.20 um 2025-05-29 19:56:16.518 [Thd =123] Info Default IsAlignAngleOK delta:0.0180000000166061. 2025-05-29 19:56:26.710 [Thd =123] Info MMSFocus _isStop = true 2025-05-29 19:56:26.710 [Thd =173] Info Default Alignment finish 2025-05-29 19:56:26.710 [Thd =119] Info Default Chuck vacuum open 2025-05-29 19:56:27.711 [Thd =123] Info Default ChuckVac: :True 2025-05-29 19:56:28.654 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:56:31.978 [Thd =1] Error Default CheckDPTaskState 检查数据准备数据问题！！ jobName: 2025-05-29 19:56:34.815 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:56:36.680 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:56:36.687 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:56:36.687 [Thd =1] Info Default MaskScaleY:0.999478751526241 2025-05-29 19:56:36.687 [Thd =1] Info Default MaskScaleX:1.00001003824783,Orth_Y_BeforR:0.103134914981926 2025-05-29 19:56:36.688 [Thd =96] Info Default located_pos:(36.6008179266938, -36.8222171254585) 2025-05-29 19:56:36.688 [Thd =96] Info Default deltax_stage 0, deltay_stage:-74.093621186959. 2025-05-29 19:56:36.688 [Thd =96] Info Default MoveStageForMarkCol102 point (-37.4928032602652, -36.8222171254585), GDS ref(-36227500, 37027500), gdsObject(-36227500, -37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.688 [Thd =96] Info Default located_pos:(-37.4928032602652, -36.8222171254585) 2025-05-29 19:56:36.688 [Thd =96] Info Default deltax_stage 72.4542726860544, deltay_stage:0. 2025-05-29 19:56:36.688 [Thd =96] Info Default MoveStageForMarkCol101 point (36.6029916078152, -109.276489844119), GDS ref(-36227500, 37027500), gdsObject(36227500, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.688 [Thd =96] Info Default deltax_stage 0, deltay_stage:-74.093621186959. 2025-05-29 19:56:36.688 [Thd =96] Info Default MoveStageForMarkCol102 point (-37.4906295791438, -109.276489844119), GDS ref(36227500, 37027500), gdsObject(36227500, -37027500), stageRef(36.6029916078152, -109.276489844119). 2025-05-29 19:56:36.688 [Thd =96] Info Default located_pos:(-37.4906295791438, -109.276489844119) 2025-05-29 19:56:36.688 [Thd =96] Info Default AliPt:(36.6008179266938, -36.8222171254585), GDS2StagePt:(36.6008179266938, -36.8222171254585), XOffset:5, YOffset:5 2025-05-29 19:56:36.688 [Thd =96] Info Default AliPt:(-37.4928032602652, -36.8273969898013), GDS2StagePt:(-37.4928032602652, -36.8222171254585), XOffset:5, YOffset:5 2025-05-29 19:56:36.689 [Thd =96] Info Default AliPt:(-37.4906295791448, -109.281669675856), GDS2StagePt:(-37.4906295791438, -109.276489844119), XOffset:5, YOffset:5 2025-05-29 19:56:36.695 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:56:36.695 [Thd =1] Info Default MaskScaleY:0.999478751526241 2025-05-29 19:56:36.695 [Thd =1] Info Default MaskScaleX:1.00001003824783,Orth_Y_BeforR:0.103134914981926 2025-05-29 19:56:36.695 [Thd =1] Info Default deltax_stage -33.3654240696042, deltay_stage:0. 2025-05-29 19:56:36.695 [Thd =1] Info Default MoveStageForMarkCol101 point (36.5998169395923, -3.45679304083908), GDS ref(-36227500, 37027500), gdsObject(-69593259, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.695 [Thd =1] Info Default deltax_stage 0, deltay_stage:29.8762929721133. 2025-05-29 19:56:36.695 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4761099117056, -3.45679304083908), GDS ref(-69593259, 37027500), gdsObject(-69593259, 66888220), stageRef(36.5998169395923, -3.45679304083908). 2025-05-29 19:56:36.695 [Thd =1] Info Default located_pos:(66.4761099117056, -3.45679304083908) 2025-05-29 19:56:36.695 [Thd =1] Info Default deltax_stage 105.57378622417, deltay_stage:0. 2025-05-29 19:56:36.695 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6039852174211, -142.396003397138), GDS ref(-36227500, 37027500), gdsObject(69347346, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.695 [Thd =1] Info Default deltax_stage 0, deltay_stage:-103.723873910969. 2025-05-29 19:56:36.695 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1198886935474, -142.396003397138), GDS ref(69347346, 37027500), gdsObject(69347346, -66642308), stageRef(36.6039852174211, -142.396003397138). 2025-05-29 19:56:36.695 [Thd =1] Info Default located_pos:(-67.1198886935474, -142.396003397138) 2025-05-29 19:56:36.695 [Thd =1] Info Default deltax_stage -27.8544623900033, deltay_stage:0. 2025-05-29 19:56:36.695 [Thd =1] Info Default MoveStageForMarkCol101 point (36.5999822724694, -8.96775472292001), GDS ref(-36227500, 37027500), gdsObject(-64082242, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 0, deltay_stage:27.117330867327. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7173131397965, -8.96775472292001), GDS ref(-64082242, 37027500), gdsObject(-64082242, 64130696), stageRef(36.5999822724694, -8.96775472292001). 2025-05-29 19:56:36.696 [Thd =1] Info Default located_pos:(63.7173131397965, -8.96775472292001) 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage -26.6500784799075, deltay_stage:0. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6000184048668, -10.1721386335578), GDS ref(-36227500, 37027500), gdsObject(-62877846, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 0, deltay_stage:25.7945733820066. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3945917868734, -10.1721386335578), GDS ref(-62877846, 37027500), gdsObject(-62877846, 62808628), stageRef(36.6000184048668, -10.1721386335578). 2025-05-29 19:56:36.696 [Thd =1] Info Default located_pos:(62.3945917868734, -10.1721386335578) 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage -27.9072418601899, deltay_stage:0. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol101 point (36.5999806890468, -8.91497525270966), GDS ref(-36227500, 37027500), gdsObject(-64135022, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 0, deltay_stage:-99.7652664928936. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1652858038468, -8.91497525270966), GDS ref(-64135022, 37027500), gdsObject(-64135022, -62685764), stageRef(36.5999806890468, -8.91497525270966). 2025-05-29 19:56:36.696 [Thd =1] Info Default located_pos:(-63.1652858038468, -8.91497525270966) 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage -26.6094128881188, deltay_stage:0. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6000196248642, -10.2128042253648), GDS ref(-36227500, 37027500), gdsObject(-62837180, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 0, deltay_stage:-101.236921590867. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6369019660031, -10.2128042253648), GDS ref(-62837180, 37027500), gdsObject(-62837180, -64156652), stageRef(36.6000196248642, -10.2128042253648). 2025-05-29 19:56:36.696 [Thd =1] Info Default located_pos:(-64.6369019660031, -10.2128042253648) 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 99.1874113321834, deltay_stage:0. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6037936215079, -136.009628502278), GDS ref(-36227500, 37027500), gdsObject(62960907, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 0, deltay_stage:-99.9712988869646. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.3675052654567, -136.009628502278), GDS ref(62960907, 37027500), gdsObject(62960907, -62891689), stageRef(36.6037936215079, -136.009628502278). 2025-05-29 19:56:36.696 [Thd =1] Info Default located_pos:(-63.3675052654567, -136.009628502278) 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 100.32257893709, deltay_stage:0. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6038276773655, -137.144796107695), GDS ref(-36227500, 37027500), gdsObject(64096086, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 0, deltay_stage:-101.183250614953. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5794229375875, -137.144796107695), GDS ref(64096086, 37027500), gdsObject(64096086, -64103009), stageRef(36.6038276773655, -137.144796107695). 2025-05-29 19:56:36.696 [Thd =1] Info Default located_pos:(-64.5794229375875, -137.144796107695) 2025-05-29 19:56:36.696 [Thd =1] Info Default deltax_stage 99.1285769227778, deltay_stage:0. 2025-05-29 19:56:36.696 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6037918564327, -135.950794092846), GDS ref(-36227500, 37027500), gdsObject(62902072, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.697 [Thd =1] Info Default deltax_stage 0, deltay_stage:27.1086743551333. 2025-05-29 19:56:36.697 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7124662115659, -135.950794092846), GDS ref(62902072, 37027500), gdsObject(62902072, 64122044), stageRef(36.6037918564327, -135.950794092846). 2025-05-29 19:56:36.697 [Thd =1] Info Default located_pos:(63.7124662115659, -135.950794092846) 2025-05-29 19:56:36.697 [Thd =1] Info Default deltax_stage 100.31392702394, deltay_stage:0. 2025-05-29 19:56:36.697 [Thd =1] Info Default MoveStageForMarkCol101 point (36.6038274178018, -137.136144194542), GDS ref(-36227500, 37027500), gdsObject(64087434, 37027500), stageRef(36.6008179266938, -36.8222171254585). 2025-05-29 19:56:36.697 [Thd =1] Info Default deltax_stage 0, deltay_stage:25.7841849670612. 2025-05-29 19:56:36.697 [Thd =1] Info Default MoveStageForMarkCol102 point (62.388012384863, -137.136144194542), GDS ref(64087434, 37027500), gdsObject(64087434, 62798245), stageRef(36.6038274178018, -137.136144194542). 2025-05-29 19:56:36.697 [Thd =1] Info Default located_pos:(62.388012384863, -137.136144194542) 2025-05-29 19:56:42.902 [Thd =100] Warn Default 开始移出,移出过程中禁止操作 2025-05-29 19:56:43.903 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:56:43.980 [Thd =168] Info MMSFocus _isStop = true 2025-05-29 19:56:43.982 [Thd =168] Info Default StageOut 000 2025-05-29 19:56:43.982 [Thd =168] Info Default StageOut 111 2025-05-29 19:56:46.103 [Thd =168] Info Default StageOut Z 2025-05-29 19:56:50.069 [Thd =168] Info Default StageOut VectorA XY 2025-05-29 19:56:50.071 [Thd =168] Info Default StageOut SetVelocity XY 2025-05-29 19:56:51.886 [Thd =70] Info Default The Stage is Moved Out and the Alignment State is Reset!SetupName:2396678-1 2025-05-29 19:56:51.886 [Thd =136] Info Default 移出完成 2025-05-29 19:56:55.065 [Thd =1] Info Default ChuckVac: :False 2025-05-29 19:56:55.065 [Thd =151] Warn Default 开始移入,移入过程中禁止操作 2025-05-29 19:56:56.881 [Thd =173] Info Default ChangeLightPath: True! 2025-05-29 19:56:56.881 [Thd =173] Info MMSFocus _isStop = true 2025-05-29 19:56:58.004 [Thd =173] Info Default WindowCommand_Close debugMode:False 2025-05-29 19:56:58.004 [Thd =173] Info Default WindowCommand_Close! 2025-05-29 19:56:58.005 [Thd =173] Info Default StageBack 000 2025-05-29 19:56:58.006 [Thd =173] Info Default StageBack 111 2025-05-29 19:56:58.059 [Thd =173] Info Default StageBack Z 2025-05-29 19:57:01.079 [Thd =173] Info Default StageBack VectorA XY 2025-05-29 19:57:01.080 [Thd =173] Info Default StageBack SetVelocity XY 2025-05-29 19:57:01.093 [Thd =173] Info Default 移入完成 2025-05-29 19:57:01.093 [Thd =91] Info MMSFocus _isStop = true 2025-05-29 19:57:03.735 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:57:03.735 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:57:05.895 [Thd =54] Info Default Alignment ... 2025-05-29 19:57:06.016 [Thd =119] Info Default Chuck vacuum close 2025-05-29 19:57:07.017 [Thd =96] Info Default ChuckVac: :False 2025-05-29 19:57:14.321 [Thd =96] Info Default OpenLamp Transmission 2025-05-29 19:57:14.322 [Thd =70] Info Default Switch light... 2025-05-29 19:57:15.131 [Thd =54] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:57:15.834 [Thd =96] Info Default CloseLamp Reflection 2025-05-29 19:57:17.930 [Thd =96] Info MMSFocus _isStop = true 2025-05-29 19:57:17.930 [Thd =161] Info Default Execute alignment 1/2 2025-05-29 19:57:22.040 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9993166,xOffSet:613,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:22.041 [Thd =96] Info Default D2DMatchMark ******** :errorX:1,errorY:1 2025-05-29 19:57:22.162 [Thd =96] Info Default Flag:Fine1, Position:36.4977507820218,-36.9337139722361 2025-05-29 19:57:28.827 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9995546,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:28.827 [Thd =96] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 19:57:28.949 [Thd =96] Info Default Flag:Fine2, Position:-37.5564335094734,-36.8910705582994 2025-05-29 19:57:33.402 [Thd =173] Info Default Execute alignment 2/2 2025-05-29 19:57:39.664 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9974284,xOffSet:621,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:39.664 [Thd =96] Info Default D2DMatchMark ******** :errorX:9,errorY:152 2025-05-29 19:57:41.353 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9974778,xOffSet:621,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:43.042 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9991534,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:43.164 [Thd =96] Info Default Flag:Fine1, Position:36.5124290230388,-36.8369169855125 2025-05-29 19:57:49.838 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.998827,xOffSet:615,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:49.838 [Thd =96] Info Default D2DMatchMark ******** :errorX:3,errorY:151 2025-05-29 19:57:51.529 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.999026,xOffSet:615,yOffSet:663,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:53.218 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9995489,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:57:53.340 [Thd =96] Info Default Flag:Fine2, Position:-37.5411920058802,-36.8334637496906 2025-05-29 19:57:56.309 [Thd =143] Info Default Checking Mark ... 2025-05-29 19:58:02.579 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9991412,xOffSet:602,yOffSet:374,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:02.579 [Thd =96] Info Default D2DMatchMark ******** :errorX:-10,errorY:-138 2025-05-29 19:58:04.268 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9969826,xOffSet:604,yOffSet:403,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:05.948 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9995862,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:06.070 [Thd =96] Info Default Flag:Fine1, Position:36.591778888314,-36.8234849217274 2025-05-29 19:58:12.733 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9977828,xOffSet:609,yOffSet:375,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:12.733 [Thd =96] Info Default D2DMatchMark ******** :errorX:-3,errorY:-137 2025-05-29 19:58:14.420 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9977451,xOffSet:609,yOffSet:375,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:16.114 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9996083,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:16.236 [Thd =96] Info Default Flag:Fine2, Position:-37.4540724246129,-36.8269381646232 2025-05-29 19:58:22.839 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9985446,xOffSet:615,yOffSet:681,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:22.840 [Thd =96] Info Default D2DMatchMark ******** :errorX:3,errorY:169 2025-05-29 19:58:24.539 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9984525,xOffSet:615,yOffSet:680,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:26.239 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9952238,xOffSet:610,yOffSet:377,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:27.928 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9948762,xOffSet:609,yOffSet:346,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:29.628 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9988922,xOffSet:611,yOffSet:480,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:31.274 [Thd =96] Info Default D2DSearchMark matchResult:0， score:0.9989805,xOffSet:614,yOffSet:645,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 19:58:31.396 [Thd =96] Info Default Flag:Fine3, Position:-37.4441246188719,-109.281209339783 2025-05-29 19:58:32.397 [Thd =96] Info Default IsAlignAngleOK fine1:36.591778888314,-36.8234849217274,fine2:-37.4540724246129,-36.8269381646232 2025-05-29 19:58:32.397 [Thd =177] Info Default Height difference : 0.20 um 2025-05-29 19:58:32.397 [Thd =96] Info Default IsAlignAngleOK delta:0.0120000000130378. 2025-05-29 19:58:42.065 [Thd =96] Info MMSFocus _isStop = true 2025-05-29 19:58:42.065 [Thd =91] Info Default Alignment finish 2025-05-29 19:58:42.066 [Thd =151] Info Default Chuck vacuum open 2025-05-29 19:58:43.066 [Thd =96] Info Default ChuckVac: :True 2025-05-29 19:58:44.010 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 19:58:55.146 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 19:58:55.146 [Thd =1] Info Default MaskScaleY:1.00012355435059 2025-05-29 19:58:55.146 [Thd =1] Info Default MaskScaleX:1.00001005910111,Orth_Y_BeforR:0.471994771534367 2025-05-29 19:59:46.497 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:59:46.498 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:59:52.866 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:59:52.866 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 19:59:59.847 [Thd =186] Info Default Chuck vacuum close 2025-05-29 20:00:00.848 [Thd =173] Info Default ChuckVac: :False 2025-05-29 20:00:57.012 [Thd =1] Info Default GetMarkPos offsetX:657,offsety:351,bmp.Width:1224,bmp.Height:1024,p.X:590,p.Y:170,p.Width:210,p.Height:358 2025-05-29 20:01:34.216 [Thd =1] Info Default GetMarkPos offsetX:399,offsety:559,bmp.Width:1224,bmp.Height:1024,p.X:360,p.Y:336,p.Width:580,p.Height:442 2025-05-29 20:01:35.661 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:01:35.661 [Thd =58] Info Default Chuck vacuum close 2025-05-29 20:01:36.662 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:01:40.331 [Thd =1] Info Default GetMarkPos offsetX:638,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:614,p.Y:288,p.Width:458,p.Height:434 2025-05-29 20:01:46.771 [Thd =1] Info Default GetMarkPos offsetX:798,offsety:512,bmp.Width:1224,bmp.Height:1024,p.X:664,p.Y:440,p.Width:328,p.Height:216 2025-05-29 20:01:50.592 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:01:50.593 [Thd =70] Info Default Chuck vacuum close 2025-05-29 20:01:51.594 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:01:56.331 [Thd =184] Info Default Chuck vacuum close 2025-05-29 20:01:57.332 [Thd =20] Info Default ChuckVac: :False 2025-05-29 20:02:16.979 [Thd =1] Info Default GetMarkPos offsetX:437,offsety:715,bmp.Width:1224,bmp.Height:1024,p.X:178,p.Y:484,p.Width:472,p.Height:470 2025-05-29 20:02:20.262 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:02:20.262 [Thd =118] Info Default Chuck vacuum close 2025-05-29 20:02:21.264 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:02:26.406 [Thd =123] Info Default Chuck vacuum close 2025-05-29 20:02:27.407 [Thd =187] Info Default ChuckVac: :False 2025-05-29 20:02:57.955 [Thd =1] Info Default GetMarkPos offsetX:439,offsety:603,bmp.Width:1224,bmp.Height:1024,p.X:212,p.Y:348,p.Width:574,p.Height:492 2025-05-29 20:03:01.421 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:03:01.421 [Thd =184] Info Default Chuck vacuum close 2025-05-29 20:03:02.422 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:03:02.669 [Thd =118] Info Default Alignment ... 2025-05-29 20:03:02.790 [Thd =102] Info Default Chuck vacuum close 2025-05-29 20:03:03.791 [Thd =186] Info Default ChuckVac: :False 2025-05-29 20:03:26.416 [Thd =20] Info Default Switch light... 2025-05-29 20:03:26.416 [Thd =186] Info Default OpenLamp Transmission 2025-05-29 20:03:27.222 [Thd =130] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:03:27.925 [Thd =186] Info Default CloseLamp Reflection 2025-05-29 20:03:30.286 [Thd =186] Info MMSFocus _isStop = true 2025-05-29 20:03:30.286 [Thd =136] Info Default Execute alignment 1/2 2025-05-29 20:03:34.395 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9996873,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:03:34.395 [Thd =186] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 20:03:34.516 [Thd =186] Info Default Flag:Fine1, Position:62.5418514411993,-10.0577041224959 2025-05-29 20:03:43.291 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9996019,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:03:43.291 [Thd =186] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 20:03:43.413 [Thd =186] Info Default Flag:Fine2, Position:-64.456805358923,-9.984476207825 2025-05-29 20:03:47.867 [Thd =151] Info Default Execute alignment 2/2 2025-05-29 20:03:56.256 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.998786,xOffSet:621,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:03:56.256 [Thd =186] Info Default D2DMatchMark ******** :errorX:9,errorY:149 2025-05-29 20:03:57.949 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9989302,xOffSet:621,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:03:59.638 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9972033,xOffSet:603,yOffSet:366,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:01.330 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9976317,xOffSet:603,yOffSet:370,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:03.018 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9993746,xOffSet:612,yOffSet:510,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:04.619 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9989031,xOffSet:621,yOffSet:652,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:04.744 [Thd =186] Info Default Flag:Fine1, Position:62.626343886811,-9.94058828723044 2025-05-29 20:04:13.518 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9991382,xOffSet:614,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:13.519 [Thd =186] Info Default D2DMatchMark ******** :errorX:2,errorY:150 2025-05-29 20:04:15.206 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9990516,xOffSet:614,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:16.895 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9992109,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:17.017 [Thd =186] Info Default Flag:Fine2, Position:-64.4563629354304,-9.94173938036754 2025-05-29 20:04:19.808 [Thd =119] Info Default Checking Mark ... 2025-05-29 20:04:28.219 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.999491,xOffSet:619,yOffSet:651,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:28.219 [Thd =186] Info Default D2DMatchMark ******** :errorX:7,errorY:139 2025-05-29 20:04:29.908 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9994559,xOffSet:619,yOffSet:651,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:31.605 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9991778,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:31.727 [Thd =186] Info Default Flag:Fine1, Position:62.5449808320149,-9.94645640218565 2025-05-29 20:04:40.501 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9965569,xOffSet:608,yOffSet:360,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:40.501 [Thd =186] Info Default D2DMatchMark ******** :errorX:-4,errorY:-152 2025-05-29 20:04:42.191 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.9965516,xOffSet:608,yOffSet:360,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:43.884 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.999112,xOffSet:613,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:44.005 [Thd =186] Info Default Flag:Fine2, Position:-64.3702437151776,-9.94012545688359 2025-05-29 20:04:50.314 [Thd =186] Info Default D2DSearchMark matchResult:0， score:0.01289511,xOffSet:635,yOffSet:818,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:04:50.314 [Thd =186] Info Default D2DMatchMark ******** :errorX:23,errorY:306 2025-05-29 20:04:50.314 [Thd =186] Error Default score too low, mark:Fine3, score:0.7, need:0.0128951128572226 2025-05-29 20:04:50.314 [Thd =186] Error Default Alignment Error ! System.Exception: Alignment score too low! 在 Module.Setups_Storm.Common.MarkAlignment.<>c__DisplayClass29_0.b__0(Alignment_Pattern fine) 在 System.Collections.Generic.List`1.ForEach(Action`1 action) 在 Module.Setups_Storm.Common.MarkAlignment.AlignmentPosition(Boolean postion3) 在 Module.Setups_Storm.Common.MarkAlignment.PerformAlignment(Double score) 2025-05-29 20:04:55.395 [Thd =143] Error Default 对准失败！ 2025-05-29 20:04:56.206 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:04:59.183 [Thd =123] Info Default Alignment ... 2025-05-29 20:04:59.304 [Thd =187] Info Default Chuck vacuum close 2025-05-29 20:05:00.305 [Thd =118] Info Default ChuckVac: :False 2025-05-29 20:05:10.366 [Thd =143] Info Default Switch light... 2025-05-29 20:05:10.366 [Thd =118] Info Default OpenLamp Transmission 2025-05-29 20:05:11.175 [Thd =180] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:05:11.877 [Thd =118] Info Default CloseLamp Reflection 2025-05-29 20:05:13.441 [Thd =118] Info MMSFocus _isStop = true 2025-05-29 20:05:13.441 [Thd =173] Info Default Execute alignment 1/2 2025-05-29 20:05:17.552 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.999671,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:17.552 [Thd =118] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 20:05:17.673 [Thd =118] Info Default Flag:Fine1, Position:62.5418514411993,-10.0577041224959 2025-05-29 20:05:26.454 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9995739,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:26.454 [Thd =118] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 20:05:26.576 [Thd =118] Info Default Flag:Fine2, Position:-64.456805358923,-9.984476207825 2025-05-29 20:05:31.029 [Thd =70] Info Default Execute alignment 2/2 2025-05-29 20:05:39.418 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.998604,xOffSet:622,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:39.418 [Thd =118] Info Default D2DMatchMark ******** :errorX:10,errorY:149 2025-05-29 20:05:41.108 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9987113,xOffSet:621,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:42.801 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9994867,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:42.923 [Thd =118] Info Default Flag:Fine1, Position:62.54260274668,-9.94605592180944 2025-05-29 20:05:51.706 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9991291,xOffSet:614,yOffSet:662,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:51.706 [Thd =118] Info Default D2DMatchMark ******** :errorX:2,errorY:150 2025-05-29 20:05:53.397 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9989737,xOffSet:614,yOffSet:661,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:55.100 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9989954,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:05:55.222 [Thd =118] Info Default Flag:Fine2, Position:-64.4560751651894,-9.94173938036754 2025-05-29 20:05:58.136 [Thd =151] Info Default Checking Mark ... 2025-05-29 20:06:06.508 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.99747,xOffSet:603,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:06.508 [Thd =118] Info Default D2DMatchMark ******** :errorX:-9,errorY:-139 2025-05-29 20:06:08.200 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9975026,xOffSet:603,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:09.892 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9993578,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:10.013 [Thd =118] Info Default Flag:Fine1, Position:62.6277172034305,-9.93397660879441 2025-05-29 20:06:18.802 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.997462,xOffSet:610,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:18.802 [Thd =118] Info Default D2DMatchMark ******** :errorX:-2,errorY:-139 2025-05-29 20:06:20.491 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9976119,xOffSet:610,yOffSet:373,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:22.181 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.999417,xOffSet:612,yOffSet:511,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:22.303 [Thd =118] Info Default Flag:Fine2, Position:-64.370960781796,-9.93800539217091 2025-05-29 20:06:31.046 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.99917,xOffSet:615,yOffSet:678,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:31.047 [Thd =118] Info Default D2DMatchMark ******** :errorX:3,errorY:166 2025-05-29 20:06:32.748 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9980781,xOffSet:615,yOffSet:667,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:34.439 [Thd =118] Info Default D2DSearchMark matchResult:0， score:0.9994965,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:06:34.563 [Thd =118] Info Default Flag:Fine3, Position:-64.452869889121,-136.176115345591 2025-05-29 20:06:35.563 [Thd =118] Info Default IsAlignAngleOK fine1:62.6277172034305,-9.93397660879441,fine2:-64.370960781796,-9.93800539217091 2025-05-29 20:06:35.563 [Thd =100] Info Default Height difference : 0.30 um 2025-05-29 20:06:35.563 [Thd =118] Info Default IsAlignAngleOK delta:0.0140000000086922. 2025-05-29 20:06:51.577 [Thd =118] Info MMSFocus _isStop = true 2025-05-29 20:06:51.577 [Thd =180] Info Default Alignment finish 2025-05-29 20:06:51.577 [Thd =187] Info Default Chuck vacuum open 2025-05-29 20:06:52.578 [Thd =118] Info Default ChuckVac: :True 2025-05-29 20:06:53.536 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:07:03.261 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:03.261 [Thd =1] Info Default MaskScaleY:0.583116306207649 2025-05-29 20:07:03.261 [Thd =1] Info Default MaskScaleX:0.573955044373961,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:06.400 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:08.747 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:08.755 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:08.756 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:08.756 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:08.756 [Thd =180] Info Default located_pos:(62.6277172034305, -9.93397660879441) 2025-05-29 20:07:08.756 [Thd =180] Info Default deltax_stage 0, deltay_stage:-126.998677985227. 2025-05-29 20:07:08.756 [Thd =180] Info Default MoveStageForMarkCol102 point (-64.370960781796, -9.93397660879441), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.756 [Thd =180] Info Default located_pos:(-64.370960781796, -9.93397660879441) 2025-05-29 20:07:08.764 [Thd =180] Info Default deltax_stage 126.23810995342, deltay_stage:0. 2025-05-29 20:07:08.764 [Thd =180] Info Default MoveStageForMarkCol101 point (62.5458080788637, -136.172113135426), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.764 [Thd =180] Info Default deltax_stage 0, deltay_stage:-126.998676985237. 2025-05-29 20:07:08.764 [Thd =180] Info Default MoveStageForMarkCol102 point (-64.4528689063733, -136.172113135426), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5458080788637, -136.172113135426). 2025-05-29 20:07:08.764 [Thd =180] Info Default located_pos:(-64.4528689063733, -136.172113135426) 2025-05-29 20:07:08.765 [Thd =180] Info Default AliPt:(62.6277172034305, -9.93397660879441), GDS2StagePt:(62.6277172034305, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:08.765 [Thd =180] Info Default AliPt:(-64.370960781796, -9.93800539217091), GDS2StagePt:(-64.370960781796, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:08.765 [Thd =180] Info Default AliPt:(-64.452869889121, -136.176115345591), GDS2StagePt:(-64.4528689063733, -136.172113135426), XOffset:5, YOffset:5 2025-05-29 20:07:08.771 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:08.771 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:08.771 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage -6.47463395178841, deltay_stage:0. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6319182454065, -3.45934129409098), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170411321121. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4636223586177, -3.45934129409098), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6319182454065, -3.45934129409098). 2025-05-29 20:07:08.772 [Thd =1] Info Default located_pos:(66.4636223586177, -3.45934129409098) 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage 132.466827387778, deltay_stage:0. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5417665988984, -142.400831880933), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.697433892059. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1556672931602, -142.400831880933), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5417665988984, -142.400831880933). 2025-05-29 20:07:08.772 [Thd =1] Info Default located_pos:(-67.1556672931602, -142.400831880933) 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage -0.963582945797438, deltay_stage:0. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283424206139, -8.97039346016208), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07420881783693. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7025512384508, -8.97039346016208), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6283424206139, -8.97039346016208). 2025-05-29 20:07:08.772 [Thd =1] Info Default located_pos:(63.7025512384508, -8.97039346016208) 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage 0.240820485985026, deltay_stage:0. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6275609479607, -10.1747971454723), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247845420010098. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3797155279506, -10.1747971454723), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6275609479607, -10.1747971454723). 2025-05-29 20:07:08.772 [Thd =1] Info Default located_pos:(62.3797155279506, -10.1747971454723) 2025-05-29 20:07:08.772 [Thd =1] Info Default deltax_stage -1.01636227147275, deltay_stage:0. 2025-05-29 20:07:08.772 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283766662816, -8.91761412337668), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.740931077961. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1125544116797, -8.91761412337668), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6283766662816, -8.91761412337668). 2025-05-29 20:07:08.773 [Thd =1] Info Default located_pos:(-63.1125544116797, -8.91761412337668) 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0.281485736910331, deltay_stage:0. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.627534562465, -10.2154624049577), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.211804766646. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5842702041813, -10.2154624049577), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.627534562465, -10.2154624049577). 2025-05-29 20:07:08.773 [Thd =1] Info Default located_pos:(-64.5842702041813, -10.2154624049577) 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 126.08034997996, deltay_stage:0. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5459104408312, -136.014353128758), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.946852934382. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.4009424935507, -136.014353128758), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5459104408312, -136.014353128758). 2025-05-29 20:07:08.773 [Thd =1] Info Default located_pos:(-63.4009424935507, -136.014353128758) 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 127.215535984636, deltay_stage:0. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451738796462, -137.149539372391), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.158161325057. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6129874454109, -137.149539372391), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5451738796462, -137.149539372391). 2025-05-29 20:07:08.773 [Thd =1] Info Default located_pos:(-64.6129874454109, -137.149539372391) 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 126.021514616916, deltay_stage:0. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.545948615936, -135.955517753329), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06555690790049. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6115055238365, -135.955517753329), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.545948615936, -135.955517753329). 2025-05-29 20:07:08.773 [Thd =1] Info Default located_pos:(63.6115055238365, -135.955517753329) 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 127.206883931248, deltay_stage:0. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451794934986, -137.140887317182), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:08.773 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258228311927583. 2025-05-29 20:07:08.773 [Thd =1] Info Default MoveStageForMarkCol102 point (62.286951181571, -137.140887317182), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5451794934986, -137.140887317182). 2025-05-29 20:07:08.773 [Thd =1] Info Default located_pos:(62.286951181571, -137.140887317182) 2025-05-29 20:07:34.913 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:34.913 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:34.913 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:38.264 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:40.052 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:40.062 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:40.062 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:40.062 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:40.062 [Thd =173] Info Default located_pos:(62.6277172034305, -9.93397660879441) 2025-05-29 20:07:40.062 [Thd =173] Info Default deltax_stage 0, deltay_stage:-126.998677985227. 2025-05-29 20:07:40.062 [Thd =173] Info Default MoveStageForMarkCol102 point (-64.370960781796, -9.93397660879441), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.062 [Thd =173] Info Default located_pos:(-64.370960781796, -9.93397660879441) 2025-05-29 20:07:40.063 [Thd =173] Info Default deltax_stage 126.23810995342, deltay_stage:0. 2025-05-29 20:07:40.063 [Thd =173] Info Default MoveStageForMarkCol101 point (62.5458080788637, -136.172113135426), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.063 [Thd =173] Info Default deltax_stage 0, deltay_stage:-126.998676985237. 2025-05-29 20:07:40.063 [Thd =173] Info Default MoveStageForMarkCol102 point (-64.4528689063733, -136.172113135426), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5458080788637, -136.172113135426). 2025-05-29 20:07:40.063 [Thd =173] Info Default located_pos:(-64.4528689063733, -136.172113135426) 2025-05-29 20:07:40.063 [Thd =173] Info Default AliPt:(62.6277172034305, -9.93397660879441), GDS2StagePt:(62.6277172034305, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:40.063 [Thd =173] Info Default AliPt:(-64.370960781796, -9.93800539217091), GDS2StagePt:(-64.370960781796, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:40.063 [Thd =173] Info Default AliPt:(-64.452869889121, -136.176115345591), GDS2StagePt:(-64.4528689063733, -136.172113135426), XOffset:5, YOffset:5 2025-05-29 20:07:40.070 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:40.070 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:40.070 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:40.071 [Thd =1] Info Default deltax_stage -6.47463395178841, deltay_stage:0. 2025-05-29 20:07:40.071 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6319182454065, -3.45934129409098), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.071 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170411321121. 2025-05-29 20:07:40.099 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4636223586177, -3.45934129409098), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6319182454065, -3.45934129409098). 2025-05-29 20:07:40.099 [Thd =1] Info Default located_pos:(66.4636223586177, -3.45934129409098) 2025-05-29 20:07:40.099 [Thd =1] Info Default deltax_stage 132.466827387778, deltay_stage:0. 2025-05-29 20:07:40.099 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5417665988984, -142.400831880933), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.099 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.697433892059. 2025-05-29 20:07:40.099 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1556672931602, -142.400831880933), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5417665988984, -142.400831880933). 2025-05-29 20:07:40.099 [Thd =1] Info Default located_pos:(-67.1556672931602, -142.400831880933) 2025-05-29 20:07:40.099 [Thd =1] Info Default deltax_stage -0.963582945797438, deltay_stage:0. 2025-05-29 20:07:40.099 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283424206139, -8.97039346016208), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.099 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07420881783693. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7025512384508, -8.97039346016208), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6283424206139, -8.97039346016208). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(63.7025512384508, -8.97039346016208) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0.240820485985026, deltay_stage:0. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6275609479607, -10.1747971454723), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247845420010098. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3797155279506, -10.1747971454723), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6275609479607, -10.1747971454723). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(62.3797155279506, -10.1747971454723) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage -1.01636227147275, deltay_stage:0. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283766662816, -8.91761412337668), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.740931077961. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1125544116797, -8.91761412337668), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6283766662816, -8.91761412337668). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(-63.1125544116797, -8.91761412337668) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0.281485736910331, deltay_stage:0. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol101 point (62.627534562465, -10.2154624049577), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.211804766646. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5842702041813, -10.2154624049577), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.627534562465, -10.2154624049577). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(-64.5842702041813, -10.2154624049577) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 126.08034997996, deltay_stage:0. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5459104408312, -136.014353128758), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.946852934382. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.4009424935507, -136.014353128758), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5459104408312, -136.014353128758). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(-63.4009424935507, -136.014353128758) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 127.215535984636, deltay_stage:0. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451738796462, -137.149539372391), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.158161325057. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6129874454109, -137.149539372391), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5451738796462, -137.149539372391). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(-64.6129874454109, -137.149539372391) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 126.021514616916, deltay_stage:0. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol101 point (62.545948615936, -135.955517753329), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06555690790049. 2025-05-29 20:07:40.100 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6115055238365, -135.955517753329), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.545948615936, -135.955517753329). 2025-05-29 20:07:40.100 [Thd =1] Info Default located_pos:(63.6115055238365, -135.955517753329) 2025-05-29 20:07:40.100 [Thd =1] Info Default deltax_stage 127.206883931248, deltay_stage:0. 2025-05-29 20:07:40.101 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451794934986, -137.140887317182), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:40.101 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258228311927583. 2025-05-29 20:07:40.101 [Thd =1] Info Default MoveStageForMarkCol102 point (62.286951181571, -137.140887317182), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5451794934986, -137.140887317182). 2025-05-29 20:07:40.101 [Thd =1] Info Default located_pos:(62.286951181571, -137.140887317182) 2025-05-29 20:07:42.575 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:42.588 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:42.588 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:42.588 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:42.588 [Thd =151] Info Default located_pos:(62.6277172034305, -9.93397660879441) 2025-05-29 20:07:42.588 [Thd =151] Info Default deltax_stage 0, deltay_stage:-126.998677985227. 2025-05-29 20:07:42.588 [Thd =151] Info Default MoveStageForMarkCol102 point (-64.370960781796, -9.93397660879441), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.588 [Thd =151] Info Default located_pos:(-64.370960781796, -9.93397660879441) 2025-05-29 20:07:42.589 [Thd =151] Info Default deltax_stage 126.23810995342, deltay_stage:0. 2025-05-29 20:07:42.589 [Thd =151] Info Default MoveStageForMarkCol101 point (62.5458080788637, -136.172113135426), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.589 [Thd =151] Info Default deltax_stage 0, deltay_stage:-126.998676985237. 2025-05-29 20:07:42.589 [Thd =151] Info Default MoveStageForMarkCol102 point (-64.4528689063733, -136.172113135426), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5458080788637, -136.172113135426). 2025-05-29 20:07:42.589 [Thd =151] Info Default located_pos:(-64.4528689063733, -136.172113135426) 2025-05-29 20:07:42.589 [Thd =151] Info Default AliPt:(62.6277172034305, -9.93397660879441), GDS2StagePt:(62.6277172034305, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:42.589 [Thd =151] Info Default AliPt:(-64.370960781796, -9.93800539217091), GDS2StagePt:(-64.370960781796, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:42.589 [Thd =151] Info Default AliPt:(-64.452869889121, -136.176115345591), GDS2StagePt:(-64.4528689063733, -136.172113135426), XOffset:5, YOffset:5 2025-05-29 20:07:42.595 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:42.595 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:42.595 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:42.595 [Thd =1] Info Default deltax_stage -6.47463395178841, deltay_stage:0. 2025-05-29 20:07:42.595 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6319182454065, -3.45934129409098), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.595 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170411321121. 2025-05-29 20:07:42.595 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4636223586177, -3.45934129409098), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6319182454065, -3.45934129409098). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(66.4636223586177, -3.45934129409098) 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 132.466827387778, deltay_stage:0. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5417665988984, -142.400831880933), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.697433892059. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1556672931602, -142.400831880933), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5417665988984, -142.400831880933). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(-67.1556672931602, -142.400831880933) 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage -0.963582945797438, deltay_stage:0. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283424206139, -8.97039346016208), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07420881783693. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7025512384508, -8.97039346016208), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6283424206139, -8.97039346016208). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(63.7025512384508, -8.97039346016208) 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0.240820485985026, deltay_stage:0. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6275609479607, -10.1747971454723), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247845420010098. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3797155279506, -10.1747971454723), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6275609479607, -10.1747971454723). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(62.3797155279506, -10.1747971454723) 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage -1.01636227147275, deltay_stage:0. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283766662816, -8.91761412337668), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.740931077961. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1125544116797, -8.91761412337668), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6283766662816, -8.91761412337668). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(-63.1125544116797, -8.91761412337668) 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0.281485736910331, deltay_stage:0. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol101 point (62.627534562465, -10.2154624049577), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.211804766646. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5842702041813, -10.2154624049577), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.627534562465, -10.2154624049577). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(-64.5842702041813, -10.2154624049577) 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 126.08034997996, deltay_stage:0. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5459104408312, -136.014353128758), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.596 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.946852934382. 2025-05-29 20:07:42.596 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.4009424935507, -136.014353128758), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5459104408312, -136.014353128758). 2025-05-29 20:07:42.596 [Thd =1] Info Default located_pos:(-63.4009424935507, -136.014353128758) 2025-05-29 20:07:42.597 [Thd =1] Info Default deltax_stage 127.215535984636, deltay_stage:0. 2025-05-29 20:07:42.597 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451738796462, -137.149539372391), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.597 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.158161325057. 2025-05-29 20:07:42.597 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6129874454109, -137.149539372391), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5451738796462, -137.149539372391). 2025-05-29 20:07:42.597 [Thd =1] Info Default located_pos:(-64.6129874454109, -137.149539372391) 2025-05-29 20:07:42.597 [Thd =1] Info Default deltax_stage 126.021514616916, deltay_stage:0. 2025-05-29 20:07:42.597 [Thd =1] Info Default MoveStageForMarkCol101 point (62.545948615936, -135.955517753329), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.597 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06555690790049. 2025-05-29 20:07:42.597 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6115055238365, -135.955517753329), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.545948615936, -135.955517753329). 2025-05-29 20:07:42.597 [Thd =1] Info Default located_pos:(63.6115055238365, -135.955517753329) 2025-05-29 20:07:42.597 [Thd =1] Info Default deltax_stage 127.206883931248, deltay_stage:0. 2025-05-29 20:07:42.597 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451794934986, -137.140887317182), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:42.597 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258228311927583. 2025-05-29 20:07:42.597 [Thd =1] Info Default MoveStageForMarkCol102 point (62.286951181571, -137.140887317182), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5451794934986, -137.140887317182). 2025-05-29 20:07:42.597 [Thd =1] Info Default located_pos:(62.286951181571, -137.140887317182) 2025-05-29 20:07:46.093 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:48.189 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:48.198 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:48.198 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:48.198 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:48.198 [Thd =143] Info Default located_pos:(62.6277172034305, -9.93397660879441) 2025-05-29 20:07:48.214 [Thd =143] Info Default deltax_stage 0, deltay_stage:-126.998677985227. 2025-05-29 20:07:48.214 [Thd =143] Info Default MoveStageForMarkCol102 point (-64.370960781796, -9.93397660879441), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.214 [Thd =143] Info Default located_pos:(-64.370960781796, -9.93397660879441) 2025-05-29 20:07:48.214 [Thd =143] Info Default deltax_stage 126.23810995342, deltay_stage:0. 2025-05-29 20:07:48.214 [Thd =143] Info Default MoveStageForMarkCol101 point (62.5458080788637, -136.172113135426), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.214 [Thd =143] Info Default deltax_stage 0, deltay_stage:-126.998676985237. 2025-05-29 20:07:48.214 [Thd =143] Info Default MoveStageForMarkCol102 point (-64.4528689063733, -136.172113135426), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5458080788637, -136.172113135426). 2025-05-29 20:07:48.214 [Thd =143] Info Default located_pos:(-64.4528689063733, -136.172113135426) 2025-05-29 20:07:48.214 [Thd =143] Info Default AliPt:(62.6277172034305, -9.93397660879441), GDS2StagePt:(62.6277172034305, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:48.214 [Thd =143] Info Default AliPt:(-64.370960781796, -9.93800539217091), GDS2StagePt:(-64.370960781796, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:48.214 [Thd =143] Info Default AliPt:(-64.452869889121, -136.176115345591), GDS2StagePt:(-64.4528689063733, -136.172113135426), XOffset:5, YOffset:5 2025-05-29 20:07:48.221 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:48.221 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:48.221 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:48.221 [Thd =1] Info Default deltax_stage -6.47463395178841, deltay_stage:0. 2025-05-29 20:07:48.221 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6319182454065, -3.45934129409098), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.221 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170411321121. 2025-05-29 20:07:48.221 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4636223586177, -3.45934129409098), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6319182454065, -3.45934129409098). 2025-05-29 20:07:48.221 [Thd =1] Info Default located_pos:(66.4636223586177, -3.45934129409098) 2025-05-29 20:07:48.221 [Thd =1] Info Default deltax_stage 132.466827387778, deltay_stage:0. 2025-05-29 20:07:48.221 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5417665988984, -142.400831880933), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.221 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.697433892059. 2025-05-29 20:07:48.221 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1556672931602, -142.400831880933), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5417665988984, -142.400831880933). 2025-05-29 20:07:48.221 [Thd =1] Info Default located_pos:(-67.1556672931602, -142.400831880933) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage -0.963582945797438, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283424206139, -8.97039346016208), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07420881783693. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7025512384508, -8.97039346016208), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6283424206139, -8.97039346016208). 2025-05-29 20:07:48.222 [Thd =1] Info Default located_pos:(63.7025512384508, -8.97039346016208) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0.240820485985026, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6275609479607, -10.1747971454723), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247845420010098. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3797155279506, -10.1747971454723), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6275609479607, -10.1747971454723). 2025-05-29 20:07:48.222 [Thd =1] Info Default located_pos:(62.3797155279506, -10.1747971454723) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage -1.01636227147275, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283766662816, -8.91761412337668), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.740931077961. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1125544116797, -8.91761412337668), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6283766662816, -8.91761412337668). 2025-05-29 20:07:48.222 [Thd =1] Info Default located_pos:(-63.1125544116797, -8.91761412337668) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0.281485736910331, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.627534562465, -10.2154624049577), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.211804766646. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5842702041813, -10.2154624049577), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.627534562465, -10.2154624049577). 2025-05-29 20:07:48.222 [Thd =1] Info Default located_pos:(-64.5842702041813, -10.2154624049577) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 126.08034997996, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5459104408312, -136.014353128758), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.946852934382. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.4009424935507, -136.014353128758), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5459104408312, -136.014353128758). 2025-05-29 20:07:48.222 [Thd =1] Info Default located_pos:(-63.4009424935507, -136.014353128758) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 127.215535984636, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451738796462, -137.149539372391), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.158161325057. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6129874454109, -137.149539372391), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5451738796462, -137.149539372391). 2025-05-29 20:07:48.222 [Thd =1] Info Default located_pos:(-64.6129874454109, -137.149539372391) 2025-05-29 20:07:48.222 [Thd =1] Info Default deltax_stage 126.021514616916, deltay_stage:0. 2025-05-29 20:07:48.222 [Thd =1] Info Default MoveStageForMarkCol101 point (62.545948615936, -135.955517753329), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.223 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06555690790049. 2025-05-29 20:07:48.223 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6115055238365, -135.955517753329), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.545948615936, -135.955517753329). 2025-05-29 20:07:48.223 [Thd =1] Info Default located_pos:(63.6115055238365, -135.955517753329) 2025-05-29 20:07:48.223 [Thd =1] Info Default deltax_stage 127.206883931248, deltay_stage:0. 2025-05-29 20:07:48.223 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451794934986, -137.140887317182), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:48.223 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258228311927583. 2025-05-29 20:07:48.223 [Thd =1] Info Default MoveStageForMarkCol102 point (62.286951181571, -137.140887317182), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5451794934986, -137.140887317182). 2025-05-29 20:07:48.223 [Thd =1] Info Default located_pos:(62.286951181571, -137.140887317182) 2025-05-29 20:07:49.245 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:49.253 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:49.253 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:49.253 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:49.253 [Thd =123] Info Default located_pos:(62.6277172034305, -9.93397660879441) 2025-05-29 20:07:49.253 [Thd =123] Info Default deltax_stage 0, deltay_stage:-126.998677985227. 2025-05-29 20:07:49.253 [Thd =123] Info Default MoveStageForMarkCol102 point (-64.370960781796, -9.93397660879441), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.254 [Thd =123] Info Default located_pos:(-64.370960781796, -9.93397660879441) 2025-05-29 20:07:49.254 [Thd =123] Info Default deltax_stage 126.23810995342, deltay_stage:0. 2025-05-29 20:07:49.254 [Thd =123] Info Default MoveStageForMarkCol101 point (62.5458080788637, -136.172113135426), GDS ref(-63118665, 63056476), gdsObject(63118666, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.254 [Thd =123] Info Default deltax_stage 0, deltay_stage:-126.998676985237. 2025-05-29 20:07:49.254 [Thd =123] Info Default MoveStageForMarkCol102 point (-64.4528689063733, -136.172113135426), GDS ref(63118666, 63056476), gdsObject(63118666, -63943523), stageRef(62.5458080788637, -136.172113135426). 2025-05-29 20:07:49.254 [Thd =123] Info Default located_pos:(-64.4528689063733, -136.172113135426) 2025-05-29 20:07:49.254 [Thd =123] Info Default AliPt:(62.6277172034305, -9.93397660879441), GDS2StagePt:(62.6277172034305, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:49.254 [Thd =123] Info Default AliPt:(-64.370960781796, -9.93800539217091), GDS2StagePt:(-64.370960781796, -9.93397660879441), XOffset:5, YOffset:5 2025-05-29 20:07:49.254 [Thd =123] Info Default AliPt:(-64.452869889121, -136.176115345591), GDS2StagePt:(-64.4528689063733, -136.172113135426), XOffset:5, YOffset:5 2025-05-29 20:07:49.260 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:07:49.260 [Thd =1] Info Default MaskScaleY:1.00001040967351 2025-05-29 20:07:49.260 [Thd =1] Info Default MaskScaleX:0.999993829490794,Orth_Y_BeforR:-2.23056879626843 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage -6.47463395178841, deltay_stage:0. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6319182454065, -3.45934129409098), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 0, deltay_stage:3.83170411321121. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol102 point (66.4636223586177, -3.45934129409098), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.6319182454065, -3.45934129409098). 2025-05-29 20:07:49.261 [Thd =1] Info Default located_pos:(66.4636223586177, -3.45934129409098) 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 132.466827387778, deltay_stage:0. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5417665988984, -142.400831880933), GDS ref(-63118665, 63056476), gdsObject(69347345, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 0, deltay_stage:-129.697433892059. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol102 point (-67.1556672931602, -142.400831880933), GDS ref(69347345, 63056476), gdsObject(69347345, -66642308), stageRef(62.5417665988984, -142.400831880933). 2025-05-29 20:07:49.261 [Thd =1] Info Default located_pos:(-67.1556672931602, -142.400831880933) 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage -0.963582945797438, deltay_stage:0. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283424206139, -8.97039346016208), GDS ref(-63118665, 63056476), gdsObject(-64082242, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.07420881783693. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol102 point (63.7025512384508, -8.97039346016208), GDS ref(-64082242, 63056476), gdsObject(-64082242, 64130696), stageRef(62.6283424206139, -8.97039346016208). 2025-05-29 20:07:49.261 [Thd =1] Info Default located_pos:(63.7025512384508, -8.97039346016208) 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 0.240820485985026, deltay_stage:0. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6275609479607, -10.1747971454723), GDS ref(-63118665, 63056476), gdsObject(-62877846, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.247845420010098. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol102 point (62.3797155279506, -10.1747971454723), GDS ref(-62877846, 63056476), gdsObject(-62877846, 62808628), stageRef(62.6275609479607, -10.1747971454723). 2025-05-29 20:07:49.261 [Thd =1] Info Default located_pos:(62.3797155279506, -10.1747971454723) 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage -1.01636227147275, deltay_stage:0. 2025-05-29 20:07:49.261 [Thd =1] Info Default MoveStageForMarkCol101 point (62.6283766662816, -8.91761412337668), GDS ref(-63118665, 63056476), gdsObject(-64135021, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.261 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.740931077961. 2025-05-29 20:07:49.262 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.1125544116797, -8.91761412337668), GDS ref(-64135021, 63056476), gdsObject(-64135021, -62685764), stageRef(62.6283766662816, -8.91761412337668). 2025-05-29 20:07:49.262 [Thd =1] Info Default located_pos:(-63.1125544116797, -8.91761412337668) 2025-05-29 20:07:49.262 [Thd =1] Info Default deltax_stage 0.281485736910331, deltay_stage:0. 2025-05-29 20:07:49.262 [Thd =1] Info Default MoveStageForMarkCol101 point (62.627534562465, -10.2154624049577), GDS ref(-63118665, 63056476), gdsObject(-62837181, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.262 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.211804766646. 2025-05-29 20:07:49.262 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.5842702041813, -10.2154624049577), GDS ref(-62837181, 63056476), gdsObject(-62837181, -64156653), stageRef(62.627534562465, -10.2154624049577). 2025-05-29 20:07:49.262 [Thd =1] Info Default located_pos:(-64.5842702041813, -10.2154624049577) 2025-05-29 20:07:49.262 [Thd =1] Info Default deltax_stage 126.08034997996, deltay_stage:0. 2025-05-29 20:07:49.262 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5459104408312, -136.014353128758), GDS ref(-63118665, 63056476), gdsObject(62960907, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.262 [Thd =1] Info Default deltax_stage 0, deltay_stage:-125.946852934382. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol102 point (-63.4009424935507, -136.014353128758), GDS ref(62960907, 63056476), gdsObject(62960907, -62891688), stageRef(62.5459104408312, -136.014353128758). 2025-05-29 20:07:49.266 [Thd =1] Info Default located_pos:(-63.4009424935507, -136.014353128758) 2025-05-29 20:07:49.266 [Thd =1] Info Default deltax_stage 127.215535984636, deltay_stage:0. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451738796462, -137.149539372391), GDS ref(-63118665, 63056476), gdsObject(64096086, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.266 [Thd =1] Info Default deltax_stage 0, deltay_stage:-127.158161325057. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol102 point (-64.6129874454109, -137.149539372391), GDS ref(64096086, 63056476), gdsObject(64096086, -64103009), stageRef(62.5451738796462, -137.149539372391). 2025-05-29 20:07:49.266 [Thd =1] Info Default located_pos:(-64.6129874454109, -137.149539372391) 2025-05-29 20:07:49.266 [Thd =1] Info Default deltax_stage 126.021514616916, deltay_stage:0. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol101 point (62.545948615936, -135.955517753329), GDS ref(-63118665, 63056476), gdsObject(62902072, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.266 [Thd =1] Info Default deltax_stage 0, deltay_stage:1.06555690790049. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol102 point (63.6115055238365, -135.955517753329), GDS ref(62902072, 63056476), gdsObject(62902072, 64122044), stageRef(62.545948615936, -135.955517753329). 2025-05-29 20:07:49.266 [Thd =1] Info Default located_pos:(63.6115055238365, -135.955517753329) 2025-05-29 20:07:49.266 [Thd =1] Info Default deltax_stage 127.206883931248, deltay_stage:0. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol101 point (62.5451794934986, -137.140887317182), GDS ref(-63118665, 63056476), gdsObject(64087434, 63056476), stageRef(62.6277172034305, -9.93397660879441). 2025-05-29 20:07:49.266 [Thd =1] Info Default deltax_stage 0, deltay_stage:-0.258228311927583. 2025-05-29 20:07:49.266 [Thd =1] Info Default MoveStageForMarkCol102 point (62.286951181571, -137.140887317182), GDS ref(64087434, 63056476), gdsObject(64087434, 62798245), stageRef(62.5451794934986, -137.140887317182). 2025-05-29 20:07:49.266 [Thd =1] Info Default located_pos:(62.286951181571, -137.140887317182) 2025-05-29 20:08:02.667 [Thd =161] Error Default SyncSend recv cmd timeout 2025-05-29 20:09:42.099 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:btnExecute_Click Before Memory usage: 14537.7MB 2025-05-29 20:09:43.257 [Thd =102] Info Default 设置光标定环境中，请等待...... 2025-05-29 20:09:43.257 [Thd =187] Info Default AutoLightInit******************DemarcatePoints Count:1 2025-05-29 20:09:43.257 [Thd =187] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:09:43.258 [Thd =187] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:09:43.259 [Thd =187] Info Default SetDistortionPara disaabled 2025-05-29 20:09:43.341 [Thd =187] Info MMSFocus _isStop = true 2025-05-29 20:09:43.341 [Thd =187] Info Default aSwitchIndex index:2 2025-05-29 20:09:43.341 [Thd =187] Info Default lens from ATF: 2025-05-29 20:09:43.341 [Thd =187] Info Default objCount:3 2025-05-29 20:09:43.341 [Thd =187] Info Default ratio:P200;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:P140;objId:1 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:P100;objId:2 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default lens from system settings: 2025-05-29 20:09:43.342 [Thd =187] Info Default systemlensettings lens count:3 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:P100;objId:0 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:P140;objId:1 2025-05-29 20:09:43.342 [Thd =187] Info Default ratio:P200;objId:2 2025-05-29 20:09:58.447 [Thd =187] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 20:09:58.447 [Thd =187] Info Default send switch cmd 2025-05-29 20:10:13.556 [Thd =187] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 20:10:13.556 [Thd =187] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 20:10:13.584 [Thd =187] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 20:10:13.585 [Thd =187] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 20:10:13.585 [Thd =187] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 20:10:13.585 [Thd =187] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 20:10:13.585 [Thd =187] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 20:10:13.585 [Thd =187] Info Default BaseScanObjectLine:------------------ 2025-05-29 20:10:13.585 [Thd =187] Info Default BaseScanObjectLine:***************** 2025-05-29 20:10:13.585 [Thd =187] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 20:10:13.585 [Thd =187] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426791306617843,StepStep:0.423464020572638,CosValueY:1,SinValueY:0 2025-05-29 20:10:13.585 [Thd =187] Info strip vectorBegin:(1.447824,-130.125649),VectorEnd:(-3.83255,-130.125649),CaptureBegin:(-0.552176,-130.125649)，CaptureEnd：(-1.83255,-130.125649),StepScan:0.426791306617843 2025-05-29 20:10:13.585 [Thd =187] Info Default VectorBegin:(1.4478240192149,-130.1256489844) 2025-05-29 20:10:14.841 [Thd =161] Info Default 打开光源，亮度：32% 2025-05-29 20:10:14.841 [Thd =70] Info Default OpenLamp Transmission 2025-05-29 20:10:15.442 [Thd =187] Info Default SetFocusTrack CloseTrack OK 2025-05-29 20:10:15.442 [Thd =161] Info Default 聚焦Track已关闭 2025-05-29 20:10:15.649 [Thd =118] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:10:15.851 [Thd =70] Info Default CloseLamp Reflection 2025-05-29 20:10:16.376 [Thd =186] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:16.559 [Thd =187] Info MMSFocus _isStop = true 2025-05-29 20:10:17.665 [Thd =70] Info Default PolarizationBaffleControl False: 3! 2025-05-29 20:10:17.760 [Thd =187] Info Default QuerySubstrateMode Line OK 2025-05-29 20:10:17.760 [Thd =183] Info Default 已切换到线阵聚焦模式 2025-05-29 20:10:18.168 [Thd =70] Info Default PolarizationBaffleControl False: 2! 2025-05-29 20:10:18.366 [Thd =173] Info Default ChangeLightPath: True! 2025-05-29 20:10:19.362 [Thd =187] Info Default SetFocusTrack OpenTrack OK 2025-05-29 20:10:19.362 [Thd =102] Info Default 聚焦Track已开启 2025-05-29 20:10:19.362 [Thd =118] Info Default 标定中，请等待...... 2025-05-29 20:10:19.362 [Thd =136] Info Default CurrentSize:2048,2048 2025-05-29 20:10:19.362 [Thd =136] Info Default Camera size no change 2025-05-29 20:10:19.363 [Thd =136] Info Default Set camera size success 2025-05-29 20:10:19.363 [Thd =136] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 20:10:20.340 [Thd =136] Info Default Set camera parameter 2025-05-29 20:10:20.344 [Thd =136] Info Default BUFFER_COUNT no change 2025-05-29 20:10:20.350 [Thd =187] Info Default scanStrips:1 2025-05-29 20:10:20.386 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:20.387 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:20.599 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:21.955 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:21.956 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:22.168 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:23.068 [Thd =180] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:23.527 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:23.528 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:23.740 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:24.628 [Thd =100] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:24.674 [Thd =187] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:10:24.892 [Thd =187] Info Default AutoLightReturn:31,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:10:25.313 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:25.315 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:25.526 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:26.408 [Thd =136] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:26.881 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:26.883 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:27.094 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:27.993 [Thd =102] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:28.460 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:28.462 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:28.673 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:29.564 [Thd =184] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:29.610 [Thd =187] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:10:29.890 [Thd =187] Info Default AutoLightReturn:29,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:10:30.311 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:30.313 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:30.524 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:31.892 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:31.894 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:32.105 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:32.992 [Thd =58] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:33.461 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:33.462 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:33.677 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:34.562 [Thd =173] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:34.609 [Thd =187] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:10:34.777 [Thd =187] Info Default AutoLightReturn:28,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:10:35.198 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:35.199 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:35.410 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:36.289 [Thd =130] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:36.766 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:36.768 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:36.979 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:37.875 [Thd =81] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:38.336 [Thd =187] Info Default m_focusMapMode：0 2025-05-29 20:10:38.337 [Thd =187] Info Default Axis X:2,PulseWidth:0.002,TriggerDistance:0.000208394192684494,BeginPoint:0.552175980785098,EndPoint:1.83254990063863 2025-05-29 20:10:38.549 [Thd =37] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:39.445 [Thd =136] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:39.484 [Thd =187] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:10:39.700 [Thd =187] Info Default AutoLightReturn:28,confirm:0，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:10:39.700 [Thd =187] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:39.700 [Thd =187] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:39.902 [Thd =58] Info Default OpenLamp Transmission 2025-05-29 20:10:40.711 [Thd =183] Info Default PolarizationBaffleControl True: 1! 2025-05-29 20:10:40.779 [Thd =168] Info MMSFocus _isStop = true 2025-05-29 20:10:41.215 [Thd =183] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:10:41.719 [Thd =58] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:10:41.719 [Thd =58] Info Default CloseLamp Reflection 2025-05-29 20:10:41.980 [Thd =168] Info Default QuerySubstrateMode Area OK 2025-05-29 20:10:41.980 [Thd =136] Info Default 已切换到面阵聚焦模式 2025-05-29 20:10:42.581 [Thd =168] Info Default SetFocusTrack CloseTrack OK 2025-05-29 20:10:42.581 [Thd =168] Info Default 聚焦Track已关闭 2025-05-29 20:10:42.750 [Thd =81] Info Default OpenLamp Transmission 2025-05-29 20:10:43.559 [Thd =161] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:10:43.729 [Thd =100] Info MMSFocus _isStop = true 2025-05-29 20:10:44.241 [Thd =70] Error Default SyncSend recv cmd timeout 2025-05-29 20:10:44.570 [Thd =81] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:10:44.570 [Thd =81] Info Default CloseLamp Reflection 2025-05-29 20:10:44.931 [Thd =100] Info Default QuerySubstrateMode Area OK 2025-05-29 20:10:44.931 [Thd =109] Info Default 已切换到面阵聚焦模式 2025-05-29 20:10:45.532 [Thd =100] Info Default SetFocusTrack CloseTrack OK 2025-05-29 20:10:45.532 [Thd =100] Info Default 聚焦Track已关闭 2025-05-29 20:10:45.595 [Thd =58] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:b__29_1 After Memory usage: 14460.42MB 2025-05-29 20:10:45.598 [Thd =118] Info Default 光标定完成！ 2025-05-29 20:10:46.328 [Thd =1] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:10:46.328 [Thd =1] Info DirPath D:\StormData\Work\data\Setups\2396678-1\rcp_DB_1\OpticalCalibration 2025-05-29 20:11:08.796 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:14.679 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:15.137 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.MediaContext.CompleteRender() 在 System.Windows.Interop.HwndTarget.OnResize() 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:15.382 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:15.477 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:15.827 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:16.011 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:16.178 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:16.342 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.MediaContext.CompleteRender() 在 System.Windows.Interop.HwndTarget.OnResize() 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:24.029 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:26.137 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:26.351 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:26.733 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:32.776 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:34.523 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:btnFlatfield_Click Before Memory usage: 14898.18MB 2025-05-29 20:11:35.796 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:37.240 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:38.791 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:39.951 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:39.974 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:btnFlatfield_Click End Memory usage: 15892.03MB 2025-05-29 20:11:42.740 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:49.324 [Thd =1] Error Default Dispatcher not UI thread global exception，System.Runtime.InteropServices.COMException (0x88980406): UCEERR_RENDERTHREADFAILURE (异常来自 HRESULT:0x88980406) 在 System.Windows.Media.Composition.DUCE.Channel.SyncFlush() 在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet) 在 System.Windows.Interop.HwndTarget.UpdateWindowPos(IntPtr lParam) 在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam) 在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) 2025-05-29 20:11:49.333 [Thd =1] Info LensSwitchService Unload Lens Switch Service 2025-05-29 20:11:49.436 [Thd =29] Info VPMMSFocus VPATF_ReadPosition failed: -1 2025-05-29 20:11:49.439 [Thd =121] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =122] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =122] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =122] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =170] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =170] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =122] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =174] Info Default m_bIdel 2025-05-29 20:11:49.439 [Thd =138] Info Default m_bIdel 2025-05-29 20:11:49.440 [Thd =169] Info Default m_bIdel 2025-05-29 20:11:49.440 [Thd =122] Info Default m_bIdel 2025-05-29 20:11:49.440 [Thd =174] Info Default m_bIdel 2025-05-29 20:11:49.440 [Thd =121] Info Default m_bIdel 2025-05-29 20:11:49.442 [Thd =170] Info Default m_bIdel 2025-05-29 20:11:49.624 [Thd =155] Info MMSFocus ATF_ReadPosition failed: -1 2025-05-29 20:11:49.624 [Thd =155] Info MMSFocus ATF_AfStop failed: -1 2025-05-29 20:11:49.730 [Thd =96] Error Default SyncSend tcp object null or not connected 2025-05-29 20:12:01.576 [Thd =21] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:12:01.694 [Thd =21] Info Default InitEnvirment begin time: 2025-05-29 20:12:01.695 [Thd =21] Info Default InitEnvirment end time: 2025-05-29 20:12:01.695 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:12:01.696 [Thd =21] Info Default PluginLoad begin time: 2025-05-29 20:12:01.699 [Thd =21] Info Default PluginLoad end time: 2025-05-29 20:12:04.006 [Thd =18] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:12:05.048 [Thd =18] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:12:05.050 [Thd =18] Info Default SetSystemStatus Success 2025-05-29 20:12:05.051 [Thd =18] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:12:05.051 [Thd =26] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:12:05.052 [Thd =18] Info VPMMSFocus MMS Initialize. 2025-05-29 20:12:05.160 [Thd =18] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:12:05.161 [Thd =18] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:13:08.273 [Thd =18] Error Default Timeout expired 在 Plugins.WaferStage.Standard.ACS.StandardACS.Home() 在 Plugins.WaferStage.Standard.ACS.StandardACS.Initialize() 在 AT.Kernel.PluginProvider.Initialize() 在 Picasso.UI.WPF.login.LoginExtension.Initialize() 2025-05-29 20:13:08.327 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:13:08.649 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:08.649 [Thd =20] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:08.649 [Thd =20] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:13:08.770 [Thd =1] Info Default Initialize System Service 2025-05-29 20:13:08.771 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:13:09.773 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:13:09.774 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:09.805 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:13:09.810 [Thd =25] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:13:10.312 [Thd =27] Info Default initialize MCUHelper！ 2025-05-29 20:13:10.362 [Thd =27] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:13:10.365 [Thd =35] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:13:10.530 [Thd =27] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:13:10.530 [Thd =38] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:13:10.747 [Thd =27] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:13:10.747 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:13:10.748 [Thd =37] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:13:10.775 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:11.197 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:13:11.278 [Thd =1] Error Default InitializePlugins: no area camera device or camera is error. 2025-05-29 20:13:11.323 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:11.776 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:12.777 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:13.780 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:14.780 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:15.423 [Thd =37] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637134,"ServiceStartTime":"2025\/5\/29 19:39:45","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:13:15.424 [Thd =27] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637134,"ServiceStartTime":"2025\/5\/29 19:39:32","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:13:15.781 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:15.948 [Thd =41] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637138,"ServiceStartTime":"2025\/5\/29 20:11:09","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:13:15.998 [Thd =42] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637138,"ServiceStartTime":"2025\/5\/29 20:10:57","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:13:16.401 [Thd =35] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:13:16.782 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:17.783 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:18.783 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:19.784 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:20.784 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:21.785 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:22.786 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:23.787 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:24.788 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:25.789 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:26.790 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:27.791 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:28.792 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:29.792 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:30.793 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:31.794 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:32.795 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:33.796 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:34.796 [Thd =31] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:13:47.876 [Thd =18] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:13:48.147 [Thd =18] Info Default InitEnvirment begin time: 2025-05-29 20:13:48.148 [Thd =18] Info Default InitEnvirment end time: 2025-05-29 20:13:48.148 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:13:48.149 [Thd =18] Info Default PluginLoad begin time: 2025-05-29 20:13:48.152 [Thd =18] Info Default PluginLoad end time: 2025-05-29 20:13:59.474 [Thd =19] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:14:00.518 [Thd =19] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:14:00.520 [Thd =19] Info Default SetSystemStatus Success 2025-05-29 20:14:00.521 [Thd =19] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:14:00.521 [Thd =27] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:14:00.522 [Thd =19] Info VPMMSFocus MMS Initialize. 2025-05-29 20:14:00.627 [Thd =19] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:14:00.628 [Thd =19] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:15:03.717 [Thd =19] Error Default Timeout expired 在 Plugins.WaferStage.Standard.ACS.StandardACS.Home() 在 Plugins.WaferStage.Standard.ACS.StandardACS.Initialize() 在 AT.Kernel.PluginProvider.Initialize() 在 Picasso.UI.WPF.login.LoginExtension.Initialize() 2025-05-29 20:15:03.769 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:15:04.089 [Thd =21] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:04.089 [Thd =21] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:15:04.089 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:04.211 [Thd =1] Info Default Initialize System Service 2025-05-29 20:15:04.212 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:15:05.213 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:15:05.214 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:05.234 [Thd =32] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:15:05.245 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:15:05.743 [Thd =21] Info Default initialize MCUHelper！ 2025-05-29 20:15:05.784 [Thd =21] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:15:05.787 [Thd =36] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:15:05.971 [Thd =39] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:15:05.972 [Thd =21] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:15:06.189 [Thd =38] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:15:06.189 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:15:06.189 [Thd =37] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:15:06.216 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:06.506 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:15:06.604 [Thd =1] Error Default InitializePlugins: no area camera device or camera is error. 2025-05-29 20:15:06.643 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:07.217 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:08.218 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:08.640 [Thd =49] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637209,"ServiceStartTime":"2025\/5\/29 20:10:57","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:15:09.181 [Thd =38] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637213,"ServiceStartTime":"2025\/5\/29 20:12:50","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:15:09.219 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:10.220 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:11.221 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:11.649 [Thd =37] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637211,"ServiceStartTime":"2025\/5\/29 20:11:09","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:15:12.166 [Thd =38] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637215,"ServiceStartTime":"2025\/5\/29 20:13:05","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:15:12.222 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:12.322 [Thd =36] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:15:13.223 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:14.224 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:15.225 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:16.226 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:17.227 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:18.227 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:19.228 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:20.229 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:21.230 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:22.231 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:23.232 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:24.232 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:25.233 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:26.234 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:27.236 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:28.237 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:29.238 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:30.238 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:31.239 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:32.240 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:33.241 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:34.242 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:35.242 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:36.243 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:37.244 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:38.245 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:39.245 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:40.246 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:41.247 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:42.248 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:43.249 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:44.250 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:45.251 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:46.252 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:47.253 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:15:48.255 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:16:10.399 [Thd =21] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:16:10.538 [Thd =21] Info Default InitEnvirment begin time: 2025-05-29 20:16:10.539 [Thd =21] Info Default InitEnvirment end time: 2025-05-29 20:16:10.539 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:16:10.539 [Thd =21] Info Default PluginLoad begin time: 2025-05-29 20:16:10.542 [Thd =21] Info Default PluginLoad end time: 2025-05-29 20:16:13.095 [Thd =20] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:16:14.142 [Thd =20] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:16:14.144 [Thd =20] Info Default SetSystemStatus Success 2025-05-29 20:16:14.145 [Thd =20] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:16:14.145 [Thd =26] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:16:14.146 [Thd =20] Info VPMMSFocus MMS Initialize. 2025-05-29 20:16:14.255 [Thd =20] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:16:14.256 [Thd =20] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:17:17.326 [Thd =20] Error Default Timeout expired 在 Plugins.WaferStage.Standard.ACS.StandardACS.Home() 在 Plugins.WaferStage.Standard.ACS.StandardACS.Initialize() 在 AT.Kernel.PluginProvider.Initialize() 在 Picasso.UI.WPF.login.LoginExtension.Initialize() 2025-05-29 20:17:17.379 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:17:17.698 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:17.698 [Thd =21] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:17.698 [Thd =21] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:17:17.820 [Thd =1] Info Default Initialize System Service 2025-05-29 20:17:17.820 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:17:18.822 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:17:18.823 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:18.857 [Thd =30] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:17:18.859 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:17:19.360 [Thd =20] Info Default initialize MCUHelper！ 2025-05-29 20:17:19.405 [Thd =20] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:17:19.408 [Thd =37] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:17:19.580 [Thd =39] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:17:19.581 [Thd =38] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:17:19.797 [Thd =39] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:17:19.797 [Thd =40] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:17:19.797 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:17:19.824 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:20.107 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:17:20.196 [Thd =1] Error Default InitializePlugins: no area camera device or camera is error. 2025-05-29 20:17:20.242 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:20.825 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:21.826 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:22.781 [Thd =51] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637298,"ServiceStartTime":"2025\/5\/29 20:13:05","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:17:22.827 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:23.320 [Thd =42] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637302,"ServiceStartTime":"2025\/5\/29 20:15:17","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:17:23.828 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:24.287 [Thd =39] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637299,"ServiceStartTime":"2025\/5\/29 20:12:50","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:17:24.829 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:24.866 [Thd =47] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637303,"ServiceStartTime":"2025\/5\/29 20:15:06","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:17:24.939 [Thd =37] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:17:25.830 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:26.830 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:27.831 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:28.832 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:29.833 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:30.834 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:31.835 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:32.835 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:33.836 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:34.837 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:35.838 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:36.839 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:37.840 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:38.840 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:39.841 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:40.842 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:41.843 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:42.844 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:43.845 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:44.846 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:45.846 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:46.847 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:47.848 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:48.849 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:49.849 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:50.850 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:51.851 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:52.852 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:53.853 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:54.854 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:55.855 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:56.855 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:57.856 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:58.857 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:17:59.858 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:00.859 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:01.860 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:02.860 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:03.861 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:04.862 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:05.863 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:06.435 [Thd =1] Error Default FormSelectJob GetRecipe Start 2025-05-29 20:18:06.675 [Thd =1] Error Default FormSelectJob GetRecipe End 2025-05-29 20:18:06.704 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.Views.UCSetupMainMethodName:SelectProductSetup After Memory usage: 1363.773MB 2025-05-29 20:18:10.599 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:11.600 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:12.374 [Thd =44] Error Default not UI thread global exception，System.NullReferenceException: 未将对象引用设置到对象的实例。 在 AT.Result.UCVerify.d__35.MoveNext() 位置 E:\_WorkSpace\Storm3000_3.2.0_Trial\Storm\Modules\Module.Verify_Storm\UCVerify.xaml.cs:行号 861 --- 引发异常的上一位置中堆栈跟踪的末尾 --- 在 System.Runtime.ExceptionServices.ExceptionDispatchInfo.Throw() 在 System.Threading.ExecutionContext.RunInternal(ExecutionContext executionContext, ContextCallback callback, Object state, Boolean preserveSyncCtx) 在 System.Threading.ExecutionContext.Run(ExecutionContext executionContext, ContextCallback callback, Object state, Boolean preserveSyncCtx) 在 System.Threading.QueueUserWorkItemCallback.System.Threading.IThreadPoolWorkItem.ExecuteWorkItem() 在 System.Threading.ThreadPoolWorkQueue.Dispatch() 2025-05-29 20:18:19.331 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:19.340 [Thd =37] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:18:19.340 [Thd =37] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:18:35.589 [Thd =18] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:18:35.797 [Thd =18] Info Default InitEnvirment begin time: 2025-05-29 20:18:35.798 [Thd =18] Info Default InitEnvirment end time: 2025-05-29 20:18:35.798 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:18:35.798 [Thd =18] Info Default PluginLoad begin time: 2025-05-29 20:18:35.802 [Thd =18] Info Default PluginLoad end time: 2025-05-29 20:18:44.378 [Thd =19] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:18:45.425 [Thd =19] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:18:45.429 [Thd =19] Info Default SetSystemStatus Success 2025-05-29 20:18:45.430 [Thd =27] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:18:45.430 [Thd =19] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:18:45.431 [Thd =19] Info VPMMSFocus MMS Initialize. 2025-05-29 20:18:45.536 [Thd =19] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:18:45.538 [Thd =19] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:19:48.636 [Thd =19] Error Default Timeout expired 在 Plugins.WaferStage.Standard.ACS.StandardACS.Home() 在 Plugins.WaferStage.Standard.ACS.StandardACS.Initialize() 在 AT.Kernel.PluginProvider.Initialize() 在 Picasso.UI.WPF.login.LoginExtension.Initialize() 2025-05-29 20:19:48.689 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:19:49.009 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:49.009 [Thd =21] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:49.009 [Thd =21] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:19:49.130 [Thd =1] Info Default Initialize System Service 2025-05-29 20:19:49.131 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:19:50.132 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:19:50.133 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:50.156 [Thd =34] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:19:50.165 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:19:50.647 [Thd =20] Info Default initialize MCUHelper！ 2025-05-29 20:19:50.689 [Thd =20] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:19:50.691 [Thd =36] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:19:50.872 [Thd =38] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:19:50.873 [Thd =37] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:19:51.089 [Thd =39] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:19:51.089 [Thd =20] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:19:51.089 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:19:51.135 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:51.450 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:19:51.537 [Thd =1] Error Default InitializePlugins: no area camera device or camera is error. 2025-05-29 20:19:51.575 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:52.136 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:53.137 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:54.137 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:55.097 [Thd =47] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637399,"ServiceStartTime":"2025\/5\/29 20:15:17","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:19:55.138 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:55.607 [Thd =46] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637403,"ServiceStartTime":"2025\/5\/29 20:17:49","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:19:56.138 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:56.600 [Thd =38] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637400,"ServiceStartTime":"2025\/5\/29 20:15:06","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:19:57.139 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:57.164 [Thd =37] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637404,"ServiceStartTime":"2025\/5\/29 20:17:38","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:19:57.224 [Thd =36] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:19:58.140 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:19:59.141 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:00.142 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:01.143 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:02.143 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:03.144 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:04.144 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:05.145 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:06.146 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:07.147 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:08.147 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:09.148 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:10.149 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:11.149 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:12.150 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:13.151 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:14.152 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:15.153 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:16.154 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:17.154 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:18.155 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:19.156 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:20.156 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:21.157 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:22.158 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:23.159 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:24.159 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:25.160 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:26.161 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:27.161 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:28.162 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:29.163 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:30.164 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:31.165 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:32.166 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:33.167 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:34.168 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:35.168 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:36.169 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:37.170 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:38.171 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:39.172 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:40.173 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:41.174 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:42.174 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:43.175 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:44.176 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:45.177 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:46.178 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:47.179 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:48.180 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:49.005 [Thd =46] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:49.005 [Thd =46] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:20:49.181 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:50.182 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:51.183 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:52.184 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:53.185 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:54.185 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:55.186 [Thd =5] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:55.204 [Thd =1] Info LensSwitchService Unload Lens Switch Service 2025-05-29 20:20:55.204 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:20:55.207 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugin.LaserLamp.Storm3000.LaserLamp_3000.CloseSerialPort() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Lamp Plugins\Plugin.LaserLamp.Storm3000\LaserLampDevice_3000.cs:行号 1140 在 Plugin.LaserLamp.Storm3000.LaserLamp_3000.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Lamp Plugins\Plugin.LaserLamp.Storm3000\LaserLampDevice_3000.cs:行号 472 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:20:55.240 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugins.Camera.Euresys.ProductModel.TDICamera.Dispose() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\ProductModel\TDICameraBase.cs:行号 163 在 Plugins.Camera.Euresys.TDICXP4K7C.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\TDICXP4K7C.cs:行号 558 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:20:55.241 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugins.Camera.Euresys.ProductModel.TDICamera.Dispose() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\ProductModel\TDICameraBase.cs:行号 163 在 Plugins.Camera.Euresys.TDICXP4K7C.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\TDICXP4K7C.cs:行号 558 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:20:55.246 [Thd =1] Error Default 句柄无效。 (异常来自 HRESULT:0x80070006 (E_HANDLE)) 在 System.Runtime.InteropServices.Marshal.ThrowExceptionForHRInternal(Int32 errorCode, IntPtr errorInfo) 在 System.Runtime.InteropServices.Marshal.FreeHGlobal(IntPtr hglobal) 在 Plugins.Camera.IKapC.CloseDevice() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.IKapC\IKapC.cs:行号 1082 在 Plugins.Camera.IKapC.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.IKapC\IKapC.cs:行号 398 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:20:55.246 [Thd =1] Info VPMMSFocus Close laser failed:-1 2025-05-29 20:20:55.246 [Thd =1] Info Default APPLICATION EXITED. 2025-05-29 20:21:14.110 [Thd =20] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:21:14.326 [Thd =20] Info Default InitEnvirment begin time: 2025-05-29 20:21:14.327 [Thd =20] Info Default InitEnvirment end time: 2025-05-29 20:21:14.327 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:21:14.327 [Thd =20] Info Default PluginLoad begin time: 2025-05-29 20:21:14.331 [Thd =20] Info Default PluginLoad end time: 2025-05-29 20:21:16.787 [Thd =21] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:21:17.834 [Thd =21] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:21:17.838 [Thd =21] Info Default SetSystemStatus Success 2025-05-29 20:21:17.839 [Thd =26] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:21:17.839 [Thd =21] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:21:17.840 [Thd =21] Info VPMMSFocus MMS Initialize. 2025-05-29 20:21:17.946 [Thd =21] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:21:17.948 [Thd =21] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:22:21.027 [Thd =21] Error Default Timeout expired 在 Plugins.WaferStage.Standard.ACS.StandardACS.Home() 在 Plugins.WaferStage.Standard.ACS.StandardACS.Initialize() 在 AT.Kernel.PluginProvider.Initialize() 在 Picasso.UI.WPF.login.LoginExtension.Initialize() 2025-05-29 20:22:21.080 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:22:21.406 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:21.406 [Thd =19] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:21.406 [Thd =19] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:22:21.528 [Thd =1] Info Default Initialize System Service 2025-05-29 20:22:21.529 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:22:22.531 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:22:22.532 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:22.560 [Thd =24] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:22:22.561 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:22:23.048 [Thd =18] Info Default initialize MCUHelper！ 2025-05-29 20:22:23.088 [Thd =18] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:22:23.091 [Thd =36] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:22:23.278 [Thd =39] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:22:23.278 [Thd =37] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:22:23.495 [Thd =18] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:22:23.495 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:22:23.495 [Thd =38] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:22:23.534 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:23.854 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:22:23.949 [Thd =1] Error Default InitializePlugins: no area camera device or camera is error. 2025-05-29 20:22:23.987 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:24.535 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:25.536 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:26.537 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:27.225 [Thd =48] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637500,"ServiceStartTime":"2025\/5\/29 20:17:49","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:22:27.537 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:27.748 [Thd =43] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637504,"ServiceStartTime":"2025\/5\/29 20:20:21","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:22:28.538 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:28.726 [Thd =43] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637501,"ServiceStartTime":"2025\/5\/29 20:17:38","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:22:29.301 [Thd =47] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637505,"ServiceStartTime":"2025\/5\/29 20:20:10","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:22:29.539 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:29.624 [Thd =36] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:22:30.540 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:31.541 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:32.542 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:33.543 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:34.544 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:35.545 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:36.546 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:37.547 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:38.548 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:39.549 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:40.550 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:41.550 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:42.551 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:43.553 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:44.553 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:45.555 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:46.556 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:47.556 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:48.557 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:49.558 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:50.559 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:51.560 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:52.561 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:53.561 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:54.562 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:55.564 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:56.564 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:57.565 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:58.566 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:22:59.567 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:00.568 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:01.569 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:02.570 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:03.571 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:04.572 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:05.573 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:06.574 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:07.575 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:08.576 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:09.577 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:10.578 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:11.579 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:12.580 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:13.580 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:14.581 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:15.582 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:16.583 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:17.584 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:18.585 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:19.586 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:20.587 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:21.398 [Thd =39] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:21.398 [Thd =39] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:23:21.588 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:22.589 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:23.589 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:24.591 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:25.591 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:26.592 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:27.593 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:28.594 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:29.595 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:30.596 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:31.597 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:32.597 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:33.598 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:34.599 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:35.601 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:36.602 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:37.602 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:38.603 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:39.604 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:40.605 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:41.605 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:42.606 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:43.607 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:44.608 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:45.610 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:46.611 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:47.611 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:48.612 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:49.613 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:50.614 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:51.615 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:52.615 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:53.616 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:54.617 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:55.618 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:56.618 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:57.619 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:58.620 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:23:59.621 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:00.622 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:01.623 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:02.624 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:03.625 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:04.626 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:05.627 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:06.628 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:07.629 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:08.629 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:09.630 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:10.631 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:11.632 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:12.633 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:13.634 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:14.634 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:15.635 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:16.636 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:17.637 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:18.638 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:19.639 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:20.640 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:21.411 [Thd =45] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:21.411 [Thd =45] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:24:21.641 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:22.642 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:23.642 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:24.643 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:25.644 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:26.645 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:27.646 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:28.647 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:29.647 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:30.648 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:31.649 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:32.650 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:33.650 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:34.651 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:35.653 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:36.654 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:37.655 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:38.655 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:39.656 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:40.657 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:41.658 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:42.659 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:43.660 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:44.662 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:45.662 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:46.663 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:47.664 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:48.665 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:49.665 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:50.666 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:51.667 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:52.668 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:53.668 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:54.669 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:55.670 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:56.671 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:57.671 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:58.672 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:24:59.673 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:00.674 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:01.675 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:02.675 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:03.676 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:04.678 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:05.679 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:06.680 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:07.681 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:08.681 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:09.682 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:10.683 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:11.684 [Thd =25] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:11.862 [Thd =1] Info LensSwitchService Unload Lens Switch Service 2025-05-29 20:25:11.862 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:25:11.866 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugin.LaserLamp.Storm3000.LaserLamp_3000.CloseSerialPort() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Lamp Plugins\Plugin.LaserLamp.Storm3000\LaserLampDevice_3000.cs:行号 1140 在 Plugin.LaserLamp.Storm3000.LaserLamp_3000.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Lamp Plugins\Plugin.LaserLamp.Storm3000\LaserLampDevice_3000.cs:行号 472 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:25:11.888 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugins.Camera.Euresys.ProductModel.TDICamera.Dispose() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\ProductModel\TDICameraBase.cs:行号 163 在 Plugins.Camera.Euresys.TDICXP4K7C.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\TDICXP4K7C.cs:行号 558 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:25:11.888 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugins.Camera.Euresys.ProductModel.TDICamera.Dispose() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\ProductModel\TDICameraBase.cs:行号 163 在 Plugins.Camera.Euresys.TDICXP4K7C.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\TDICXP4K7C.cs:行号 558 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:25:11.892 [Thd =1] Error Default 句柄无效。 (异常来自 HRESULT:0x80070006 (E_HANDLE)) 在 System.Runtime.InteropServices.Marshal.ThrowExceptionForHRInternal(Int32 errorCode, IntPtr errorInfo) 在 System.Runtime.InteropServices.Marshal.FreeHGlobal(IntPtr hglobal) 在 Plugins.Camera.IKapC.CloseDevice() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.IKapC\IKapC.cs:行号 1082 在 Plugins.Camera.IKapC.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.IKapC\IKapC.cs:行号 398 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:25:11.892 [Thd =1] Info VPMMSFocus Close laser failed:-1 2025-05-29 20:25:11.892 [Thd =1] Info Default APPLICATION EXITED. 2025-05-29 20:25:43.152 [Thd =20] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:25:43.367 [Thd =20] Info Default InitEnvirment begin time: 2025-05-29 20:25:43.368 [Thd =20] Info Default InitEnvirment end time: 2025-05-29 20:25:43.368 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:25:43.369 [Thd =20] Info Default PluginLoad begin time: 2025-05-29 20:25:43.373 [Thd =20] Info Default PluginLoad end time: 2025-05-29 20:25:45.901 [Thd =21] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:25:46.947 [Thd =21] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:25:46.949 [Thd =21] Info Default SetSystemStatus Success 2025-05-29 20:25:46.949 [Thd =21] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:25:46.950 [Thd =27] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:25:46.950 [Thd =21] Info VPMMSFocus MMS Initialize. 2025-05-29 20:25:47.056 [Thd =21] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:25:47.057 [Thd =21] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:26:50.152 [Thd =21] Error Default Timeout expired 在 Plugins.WaferStage.Standard.ACS.StandardACS.Home() 在 Plugins.WaferStage.Standard.ACS.StandardACS.Initialize() 在 AT.Kernel.PluginProvider.Initialize() 在 Picasso.UI.WPF.login.LoginExtension.Initialize() 2025-05-29 20:26:50.205 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:26:50.525 [Thd =18] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:50.525 [Thd =18] Error Default Check that the laser brightness is abnormal and no plug-in is obtained！ 2025-05-29 20:26:50.525 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:50.647 [Thd =1] Info Default Initialize System Service 2025-05-29 20:26:50.648 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:26:51.650 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:26:51.651 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:51.679 [Thd =25] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:26:51.679 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:26:52.181 [Thd =23] Info Default initialize MCUHelper！ 2025-05-29 20:26:52.229 [Thd =23] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:26:52.232 [Thd =36] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:26:52.397 [Thd =23] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:26:52.397 [Thd =37] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:26:52.615 [Thd =40] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:26:52.615 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:26:52.615 [Thd =39] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:26:52.652 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:53.011 [Thd =1] Error Default InitializePlugins: no IWaferStage device or inspIWaferStageectStage is error. 2025-05-29 20:26:53.093 [Thd =1] Error Default InitializePlugins: no area camera device or camera is error. 2025-05-29 20:26:53.136 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:53.654 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:54.655 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:55.656 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:56.657 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:56.827 [Thd =38] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637679,"ServiceStartTime":"2025\/5\/29 20:20:10","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":1},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:26:56.828 [Thd =46] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637679,"ServiceStartTime":"2025\/5\/29 20:20:21","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:26:57.345 [Thd =44] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637683,"ServiceStartTime":"2025\/5\/29 20:24:51","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:26:57.378 [Thd =52] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637683,"ServiceStartTime":"2025\/5\/29 20:24:38","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:26:57.658 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:57.765 [Thd =36] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:26:58.659 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:26:59.659 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:00.660 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:01.661 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:02.662 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:03.663 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:04.663 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:05.665 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:06.666 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:07.667 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:08.667 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:09.668 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:10.669 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:11.670 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:12.671 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:13.672 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:14.672 [Thd =29] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:15.220 [Thd =1] Info LensSwitchService Unload Lens Switch Service 2025-05-29 20:27:15.220 [Thd =1] Error Default InitializePlugins:no LampReflex or LampReflex is error. 2025-05-29 20:27:15.222 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugin.LaserLamp.Storm3000.LaserLamp_3000.CloseSerialPort() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Lamp Plugins\Plugin.LaserLamp.Storm3000\LaserLampDevice_3000.cs:行号 1140 在 Plugin.LaserLamp.Storm3000.LaserLamp_3000.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Lamp Plugins\Plugin.LaserLamp.Storm3000\LaserLampDevice_3000.cs:行号 472 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:27:15.242 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugins.Camera.Euresys.ProductModel.TDICamera.Dispose() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\ProductModel\TDICameraBase.cs:行号 163 在 Plugins.Camera.Euresys.TDICXP4K7C.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\TDICXP4K7C.cs:行号 558 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:27:15.242 [Thd =1] Error Default 未将对象引用设置到对象的实例。 在 Plugins.Camera.Euresys.ProductModel.TDICamera.Dispose() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\ProductModel\TDICameraBase.cs:行号 163 在 Plugins.Camera.Euresys.TDICXP4K7C.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.Euresys.VT3K7CXP\TDICXP4K7C.cs:行号 558 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:27:15.246 [Thd =1] Error Default 句柄无效。 (异常来自 HRESULT:0x80070006 (E_HANDLE)) 在 System.Runtime.InteropServices.Marshal.ThrowExceptionForHRInternal(Int32 errorCode, IntPtr errorInfo) 在 System.Runtime.InteropServices.Marshal.FreeHGlobal(IntPtr hglobal) 在 Plugins.Camera.IKapC.CloseDevice() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.IKapC\IKapC.cs:行号 1082 在 Plugins.Camera.IKapC.Release() 位置 E:\software\Go-Agent-21.4.0\pipelines\Plugin4.0\Camera Plugins\Plugins.Camera.IKapC\IKapC.cs:行号 398 在 AT.Kernel.PluginProvider.Exit() 2025-05-29 20:27:15.246 [Thd =1] Info VPMMSFocus Close laser failed:-1 2025-05-29 20:27:15.246 [Thd =1] Info Default APPLICATION EXITED. 2025-05-29 20:27:57.177 [Thd =21] Error Default 这些列当前不具有唯一值。 在 System.Data.ConstraintCollection.AddUniqueConstraint(UniqueConstraint constraint) 在 System.Data.ConstraintCollection.Add(Constraint constraint, Boolean addUniqueWhenAddingForeign) 在 System.Data.DataTable.set_PrimaryKey(DataColumn[] value) 在 AT.Misc.SystemSettingsHelper..ctor(SystemProfile profile) 2025-05-29 20:27:57.378 [Thd =21] Info Default InitEnvirment begin time: 2025-05-29 20:27:57.379 [Thd =21] Info Default InitEnvirment end time: 2025-05-29 20:27:57.379 [Thd =19] Info Default APPLICATION LAUNCHED... 2025-05-29 20:27:57.380 [Thd =21] Info Default PluginLoad begin time: 2025-05-29 20:27:57.383 [Thd =21] Info Default PluginLoad end time: 2025-05-29 20:27:58.810 [Thd =18] Info First found plugin {0} and init it.] PLCStandard 2025-05-29 20:27:59.853 [Thd =18] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:27:59.855 [Thd =18] Info Default SetSystemStatus Success 2025-05-29 20:27:59.856 [Thd =18] Info First found plugin {0} and init it.] VPMMS Focus 2025-05-29 20:27:59.857 [Thd =26] Info Default 缺少机械手插件，停止LOT在位监听线程 2025-05-29 20:27:59.857 [Thd =18] Info VPMMSFocus MMS Initialize. 2025-05-29 20:27:59.965 [Thd =18] Info First found plugin {0} and init it.] StandardACS 2025-05-29 20:27:59.966 [Thd =18] Info Initialize ACS IP:10.0.0.100 2025-05-29 20:29:14.691 [Thd =18] Info Default load Wafer setting :D:\VPTEKCONFIG\ACSStandardConfig.json 2025-05-29 20:29:14.705 [Thd =18] Info Default aSwitchIndex index:0 2025-05-29 20:29:14.706 [Thd =18] Info Default lens from ATF: 2025-05-29 20:29:14.706 [Thd =18] Info Default objCount:3 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:P200;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:P140;objId:1 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:P100;objId:2 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default lens from system settings: 2025-05-29 20:29:14.706 [Thd =18] Info Default systemlensettings lens count:3 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:P100;objId:0 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:P140;objId:1 2025-05-29 20:29:14.706 [Thd =18] Info Default ratio:P200;objId:2 2025-05-29 20:29:14.712 [Thd =18] Info Default VPMicroscope Initialize Success 2025-05-29 20:29:16.450 [Thd =18] Error Default SyncSend recv cmd timeout 2025-05-29 20:29:16.450 [Thd =18] Info Default LaserLamp:matchCode：FI91498,LaserSetting.MatchCode:SXn5AfyEZcU= 2025-05-29 20:29:16.450 [Thd =18] Info Default LaserLamp 2:SXn5AfyEZcU= 2025-05-29 20:29:18.953 [Thd =18] Error Default SyncSend recv cmd timeout 2025-05-29 20:29:18.953 [Thd =18] Info Default LaserLamp 4:2262.79999999997 2025-05-29 20:29:18.954 [Thd =18] Info Default LaserLamp 8:10058 2025-05-29 20:29:18.954 [Thd =18] Info Default LaserLamp 16:300 2025-05-29 20:29:20.758 [Thd =18] Info Default IKAP Camera initialize is true! 2025-05-29 20:29:20.761 [Thd =18] Info Default CurrentBufferCount:50 2025-05-29 20:29:20.775 [Thd =18] Info Default ConfigFile：D:\VPTEKCONFIG\config1_IKAP.js 2025-05-29 20:29:22.752 [Thd =18] Info Default CurrentBufferCount:50 2025-05-29 20:29:22.759 [Thd =18] Info Default ConfigFile：D:\VPTEKCONFIG\config0_IKAP.js 2025-05-29 20:29:24.349 [Thd =18] Info Default Using camera: serial: 2426X086, name: PN2KGV-140KM, interface: GigEVision. 2025-05-29 20:29:24.349 [Thd =18] Info Default Using camera: serial: 1839D008, name: TS5MSGV-36M, interface: GigEVision. 2025-05-29 20:29:26.209 [Thd =1] Info LensSwitchService Initialize Lens Switch Service 2025-05-29 20:29:26.649 [Thd =1] Info Default Initialize System Service 2025-05-29 20:29:26.650 [Thd =1] Info Default D:\StormData\Work\data\DataPrepare 2025-05-29 20:29:27.652 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:29:27.672 [Thd =41] Info Default SystemService::CleanHistoryDPData: 0 2025-05-29 20:29:28.183 [Thd =24] Info Default initialize MCUHelper！ 2025-05-29 20:29:28.225 [Thd =24] Info Default Connecting to the MCU service succeeded! 2025-05-29 20:29:28.228 [Thd =44] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:29:28.410 [Thd =24] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:29:28.410 [Thd =46] Info Default Register MCU message：SUB_RUNNING_EVENT 2025-05-29 20:29:28.627 [Thd =45] Info Default Register MCU message：SUB_DIE_DB_RESULT 2025-05-29 20:29:28.627 [Thd =1] Info Default VPDMgtService:Storm.Common.VPDMgtServiceHelper,VPDMgtSdk: 2025-05-29 20:29:28.627 [Thd =49] Info Default Register MCU message：SUB_DEVICE_STATUS_CHANGE 2025-05-29 20:29:29.081 [Thd =54] Info Default CloseLamp Transmission 2025-05-29 20:29:29.098 [Thd =57] Info Default ChangeLightPath: True! 2025-05-29 20:29:29.523 [Thd =55] Info Default aSwitchIndex index:0 2025-05-29 20:29:29.523 [Thd =55] Info Default lens from ATF: 2025-05-29 20:29:29.523 [Thd =55] Info Default objCount:3 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:P200;objId:0 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:P140;objId:1 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:P100;objId:2 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:;objId:0 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:;objId:0 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:;objId:0 2025-05-29 20:29:29.523 [Thd =55] Info Default ratio:;objId:0 2025-05-29 20:29:29.524 [Thd =55] Info Default ratio:;objId:0 2025-05-29 20:29:29.524 [Thd =55] Info Default lens from system settings: 2025-05-29 20:29:29.524 [Thd =55] Info Default systemlensettings lens count:3 2025-05-29 20:29:29.524 [Thd =55] Info Default ratio:P100;objId:0 2025-05-29 20:29:29.524 [Thd =55] Info Default ratio:P140;objId:1 2025-05-29 20:29:29.524 [Thd =55] Info Default ratio:P200;objId:2 2025-05-29 20:29:29.532 [Thd =55] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 20:29:29.568 [Thd =55] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 20:29:29.893 [Thd =53] Info Default PolarizationBaffleControl False: 3! 2025-05-29 20:29:30.086 [Thd =54] Info Default CloseLamp Reflection 2025-05-29 20:29:30.397 [Thd =53] Info Default PolarizationBaffleControl False: 2! 2025-05-29 20:29:31.096 [Thd =54] Info Default CloseLamp Reflection 2025-05-29 20:29:32.103 [Thd =54] Info Default CloseLamp Transmission 2025-05-29 20:29:32.147 [Thd =45] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637782,"ServiceStartTime":"2025\/5\/29 20:24:38","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:29:32.147 [Thd =58] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637782,"ServiceStartTime":"2025\/5\/29 20:24:51","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:29:32.659 [Thd =52] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637786,"ServiceStartTime":"2025\/5\/29 20:27:26","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:29:32.691 [Thd =55] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637786,"ServiceStartTime":"2025\/5\/29 20:27:13","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:29:32.755 [Thd =44] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:29:34.527 [Thd =59] Info Default OpenLamp Transmission 2025-05-29 20:29:35.335 [Thd =54] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:29:36.063 [Thd =53] Error Default SyncSend recv cmd timeout 2025-05-29 20:30:23.909 [Thd =1] Error Default FormSelectJob GetRecipe Start 2025-05-29 20:30:24.170 [Thd =1] Error Default FormSelectJob GetRecipe End 2025-05-29 20:30:24.193 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.Views.UCSetupMainMethodName:SelectProductSetup After Memory usage: 1576.543MB 2025-05-29 20:30:25.537 [Thd =1] Error Default Select Recipe start 2025-05-29 20:30:25.648 [Thd =1] Error Default Select Recipe end 2025-05-29 20:30:25.750 [Thd =1] Info Default LineCameraStage:10 2025-05-29 20:30:25.975 [Thd =1] Error Default RefreshRecipeSteps start 2025-05-29 20:30:25.984 [Thd =1] Error Default RefreshRecipeSteps end 2025-05-29 20:30:25.984 [Thd =47] Info Default Continue with the Last InComplete Inspect!taskName:1179,2/331 2025-05-29 20:30:25.984 [Thd =52] Info Default aSwitchIndex index:2 2025-05-29 20:30:25.985 [Thd =52] Info Default lens from ATF: 2025-05-29 20:30:25.985 [Thd =52] Info Default objCount:3 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:P200;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:P140;objId:1 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:P100;objId:2 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default lens from system settings: 2025-05-29 20:30:25.985 [Thd =52] Info Default systemlensettings lens count:3 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:P100;objId:0 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:P140;objId:1 2025-05-29 20:30:25.985 [Thd =52] Info Default ratio:P200;objId:2 2025-05-29 20:30:26.152 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:30:26.379 [Thd =47] Info Default ContinueRun12195733 2025-05-29 20:30:26.379 [Thd =47] Info Default InspectProxy.ContinueRun() : dpuNum:0,m_channel:4 2025-05-29 20:30:29.998 [Thd =47] Info Default ContinueScanStrip:0;CurInspectResultTblName:tbl_inspection_result_20250529 2025-05-29 20:30:29.998 [Thd =47] Info Default ContinueRun:ContinueScanStrip:0 2025-05-29 20:30:30.001 [Thd =47] Info Default Computed strip0Starting point GDS coordinates，StarPoint.X:-69593259,66888220 ，GDSStep:2016，stripNo:0，PixelX_line:0.208396362 2025-05-29 20:30:30.002 [Thd =45] Info Default Starts loading the defects！ 2025-05-29 20:30:30.004 [Thd =47] Info Default Licensed has techLevel count:3 2025-05-29 20:30:30.013 [Thd =63] Info Default Start [1/1] 2025-05-29 20:30:30.018 [Thd =47] Info Default ######################################Start inspect################################################# 2025-05-29 20:30:30.018 [Thd =49] Info Default 开始检查！ 2025-05-29 20:30:30.018 [Thd =51] Info Default 初始化插件 2025-05-29 20:30:30.018 [Thd =44] Info Default 设置 TDI 相机参数... 2025-05-29 20:30:30.018 [Thd =47] Info Default CheckSkipAlignment Check that the alignment is valid! IsFinished:False 2025-05-29 20:30:30.019 [Thd =58] Info Default 初始化DB目录 2025-05-29 20:30:30.021 [Thd =27] Info Default CurrentSize:1,1 2025-05-29 20:30:30.031 [Thd =27] Info Default Set camera size success 2025-05-29 20:30:30.031 [Thd =27] Info Default Current:TDIStage：256，Target：TDI256 2025-05-29 20:30:31.012 [Thd =27] Info Default Set camera parameter 2025-05-29 20:30:31.016 [Thd =27] Info Default Set BUFFER_COUNT：50 2025-05-29 20:30:31.024 [Thd =47] Info Default ChuckVac: :False 2025-05-29 20:30:31.024 [Thd =62] Warn Default 开始移入,移入过程中禁止操作 2025-05-29 20:30:32.335 [Thd =24] Info Default ChangeLightPath: True! 2025-05-29 20:30:33.040 [Thd =27] Info Default Camera 9e3fbb4c-fa98-4ba5-a2be-ebc277141c09 Parameter setting completed 2025-05-29 20:30:33.458 [Thd =24] Info Default WindowCommand_Close debugMode:False 2025-05-29 20:30:33.458 [Thd =24] Info Default WindowCommand_Close! 2025-05-29 20:30:35.348 [Thd =62] Info Default 移入完成 2025-05-29 20:30:35.351 [Thd =46] Info Default CheckSkipAlignment Check that the alignment is valid! IsFinished:False 2025-05-29 20:30:35.353 [Thd =49] Info Default 初始化DPU服务器！ 2025-05-29 20:30:35.353 [Thd =47] Info Default MCUHelper.ResetMcu(),Restart service！ 2025-05-29 20:30:35.354 [Thd =59] Info Default Alignment ... 2025-05-29 20:30:35.475 [Thd =45] Info Default Chuck vacuum close 2025-05-29 20:30:36.476 [Thd =27] Info Default ChuckVac: :False 2025-05-29 20:30:38.597 [Thd =59] Info Default Switch light... 2025-05-29 20:30:38.598 [Thd =27] Info Default OpenLamp Transmission 2025-05-29 20:30:39.407 [Thd =44] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:30:39.918 [Thd =58] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637827,"ServiceStartTime":"2025\/5\/29 20:27:13","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":19,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32767,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:30:39.918 [Thd =63] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637827,"ServiceStartTime":"2025\/5\/29 20:27:26","DPUDeviceStatus":1,"DPUDeviceOfflineMsg":1,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":{"mem_percent":31,"mem_size":130963,"ramdisk_percent":0,"ramdisk_size":32766,"msg_count":0,"gpu_num":4,"gpu_info":[{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0},{"name":"NVIDIA GeForce RTX 4080","utilization_core":0,"utilization_mem":0}]},"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:30:40.110 [Thd =27] Info Default CloseLamp Reflection 2025-05-29 20:30:40.436 [Thd =46] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637831,"ServiceStartTime":"2025\/5\/29 20:28:34","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu2","DeviceID":"A000-A69Q-4651","DeviceType":0,"DevIp":"10.0.10.105","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:30:40.468 [Thd =62] Error Default The DPU online and offline message was received！{"KeepTimeStamp":637831,"ServiceStartTime":"2025\/5\/29 20:28:21","DPUDeviceStatus":0,"DPUDeviceOfflineMsg":0,"BaseInfo":{"DeviceName":"dpu1","DeviceID":"A000-A65Q-4651","DeviceType":0,"DevIp":"10.0.10.101","DevPort":18001,"PatchVersion":null},"ResInfo":null,"ServiceVersion":"1.0.0.9784","AlgoVersion":"1.2.3.22.3618.9799.61069"} 2025-05-29 20:30:40.870 [Thd =47] Info Default MCUHelper.ResetMcu(),All Dpus are restarted！ 2025-05-29 20:30:40.888 [Thd =47] Info Default Register inspect event！ 2025-05-29 20:30:40.889 [Thd =44] Info Default 初始化检测数据 2025-05-29 20:30:40.891 [Thd =47] Info Default initial*****Light_intensity:29, min:10, max:220 2025-05-29 20:30:40.891 [Thd =47] Info Default ***gds clip thread num is 6 2025-05-29 20:30:40.900 [Thd =47] Info ********************corePlug version is {0} **************** 3.0SPC200 2025-05-29 20:30:40.900 [Thd =47] Info Default Positioning parameters: the reference point GDS_X: 0, reference point GDS_Y: 0, reference point Stage_X: 0, reference point Stage_Y: 0, starting point GDS_X: -69593259, starting point GDS_Y: 66888220 2025-05-29 20:30:40.908 [Thd =49] Info Default Use Positive film 2025-05-29 20:30:40.909 [Thd =49] Info Default m_start_strip_no:0 2025-05-29 20:30:40.909 [Thd =49] Info Default BINING TEST 0802 jMInspectPara.m_bin:1 2025-05-29 20:30:40.918 [Thd =49] Info Default Parameters passed to Core SetDie2DBPara:{"m_gdsPath":"Z:\\design2\\M0201Z_100.gds","m_layerMode":0,"m_layerNo":26,"m_layerNo2":0,"m_bMirrorX":true,"m_org_img_width":2048,"m_width":520,"m_height":512,"m_pixelSizeX":0.208396362,"m_pixelSizeY":0.208396362,"m_pixelSizeX_Len":0.208396362,"m_pixelSizeY_Len":0.208396362,"m_gridlen":1,"m_channel":4,"m_overlay_width":28,"m_overlay_height":28,"m_OpticalSourceType":0,"m_Scale":1.0,"m_Rotate":0.0,"m_row":1323,"m_col":1292,"m_algV":2,"m_CDprecisionMode":0,"m_ParprecisionMode":1,"m_batchNum":20,"m_fillPath":null,"m_bCPUFill":false,"m_scanMode":0,"m_min_optical":10,"m_max_optical":220,"m_bAreaInspection":true,"m_beginX":-69593259,"m_beginY":66888220,"m_endX":69347346,"m_endY":-66642308,"m_noInspectArea":"-64082243,64130696,-62877846,62808628|-64135022,-62685765,-62837180,-64156653|62960908,-62891689,64096087,-64103009|62902072,64122044,64087434,62798245","m_Resolution_Defect":1,"m_Combine_defect_distance":40,"m_grid_path":"c:/grid","m_bsave_grid":false,"m_inspect_OverlayX":16,"m_inspect_OverlayY":16,"m_mask_inspection_mode":0,"m_unpattern_mask_inspect_size":0,"m_left_thrd":0,"m_right_thrd":0,"FilterKernelNum":1,"m_gray_threshold":0,"iBlackOffset":0,"caliDustThd":0,"m_Resolution_IntSec_Defect":0,"m_GrayDiffThd":120,"m_PinholeThd":20,"m_IslandThd":20,"m_DefectAreaThrd":0.0,"m_rowColScan":1,"m_mask_pattern_mode_mask":3103,"m_AL":1,"m_lcol":1252,"m_tolerance_mode":0,"m_x_tolerance":-0.086,"m_y_tolerance":-0.075,"m_CD_Defect_resolution":5.0,"m_pinhole_Defect_resolution":0.5,"m_degreeThrd":44,"m_cornerThrd":1,"m_Lens_multiplex":24,"m_offsetX":0,"m_DefectCombine":1,"m_DPPath":"\\dp\\2396678\\data","m_bUseDP":true,"m_pyramid_factor":1,"m_gds_clip_thread_num":6,"m_total_strip":331,"m_strip_nos":null,"m_resultPath":"\\result\\MaskDefectImages\\2025-05-29\\rcp_DB_1/","m_line_camera_ud_offset":-20,"m_line_camera_lr_offset":4,"m_start_strip_no":0,"m_bin":1,"m_picPath":"\\result\\MaskAllImages\\2025-05-29\\rcp_DB_1/","m_optical_head_total":0,"m_inner_round":0.35,"m_optical_head_id":0,"m_outer_round":0.35,"m_compensate":0.0,"m_row_die":0,"m_adjust_org_img_width":0,"m_adjust_flag":0,"m_adjust_u0":0.0,"m_adjust_a":0.0,"m_adjust_b":0.0,"m_adjustLeft_shift":0,"m_adjustRight_shift":0,"m_rough_reg_gray_Thrd":0,"m_fine_reg_gray_Thrd":0,"m_DPU_correction":0,"m_pinhole_range":0,"die_count":0,"m_CNT_width":5.0,"m_CNT_thrd":20.0,"m_CD2_Defect_resolution":0.5,"m_DD_Alg":0,"m_LineThrd_minX":0,"m_LineThrd_minY":0,"m_LineThrd_maxX":0,"m_LineThrd_maxY":0,"m_turbo_alg":false,"m_PSM":false,"m_CellShift_real_physical_distance":3.52,"m_CellShift_subthrd_mask_mode":2,"m_DD_range_max":0,"m_DD_range_min":0,"m_DD_min_gay_diff":0,"m_DD_range_ra":0,"m_T_collect":[220,225,0,0,1130102784,1065353216,1065353216,0,0,10],"m_R_collect":[200,150,90,1128792064,1128792064,1065353216,1065353216,0,0,0],"m_simple_gray_defect_sum_thrd_DD":30,"m_simple_gray_defect_DD":false,"m_die_phy_width":0.0,"m_die_phy_height":0.0,"m_die_cycle_phy_width":0.0,"m_die_cycle_phy_height":0.0,"m_normal_vector_level":1,"m_gray_diff_level":1,"m_edge_defect_level":2,"m_line_camera_ud_offset_f":-20.0,"m_mask_inspection_mode_ex":0,"m_CS_x_use":0,"m_CS_y_use":0,"m_CS_y_real_physical_distance":0.0,"m_CS_y_subthrd_mask_mode":2,"m_Edge_1_thrd_mode":2,"m_Edge_2_thrd_mode":1,"m_Gray_thrd_mode":2,"m_line_camera_lr_offset_f":4.5,"SL_Edge_switch":2,"SL_Edge2_switch":0,"crDrop_switch":0,"ud_decimal_right":-20.0,"lr_decimal_right":4.5} 2025-05-29 20:30:40.926 [Thd =49] Info Default m_line_camera_cols:313 2025-05-29 20:30:40.928 [Thd =49] Info Default AllocHGlobal img mem pic_count:313, img_w:2032, img_h:2048 2025-05-29 20:30:40.928 [Thd =49] Info Default Set distortion correction parameters Star,org_img_width:2048,MaskInspectMode:Pattern 2025-05-29 20:30:40.944 [Thd =49] Info Default SetDistortionPara disaabled 2025-05-29 20:30:40.944 [Thd =49] Info Default Set distortion correction parameters End 2025-05-29 20:30:40.944 [Thd =49] Info Default InitDie2DBRes Argument： width:520, height:2048, strip_sum(Grid.Rows):1323,pic_count(Grid2.Cols):1252,pic_count_pack(Grid.Cols):1292,max_batch:20,mode:0,m_channel:4 2025-05-29 20:30:41.093 [Thd =49] Info Default InitDie2DBRes Success!!!! 2025-05-29 20:30:41.098 [Thd =52] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 20:30:41.098 [Thd =52] Info Default send switch cmd 2025-05-29 20:30:41.136 [Thd =24] Error Default SyncSend recv cmd timeout 2025-05-29 20:30:41.620 [Thd =46] Info Default Execute alignment 1/2 2025-05-29 20:30:45.746 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9816689,xOffSet:618,yOffSet:503,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:30:45.747 [Thd =27] Info Default D2DMatchMark ******** :errorX:6,errorY:-9 2025-05-29 20:30:47.368 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9822627,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:30:47.490 [Thd =27] Info Default Flag:Fine1, Position:62.545377932169,-10.059548621446 2025-05-29 20:30:56.204 [Thd =52] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 20:30:56.204 [Thd =52] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 20:30:56.231 [Thd =52] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 20:30:56.280 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9798309,xOffSet:608,yOffSet:506,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:30:56.280 [Thd =27] Info Default D2DMatchMark ******** :errorX:-4,errorY:-6 2025-05-29 20:30:57.889 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9992235,xOffSet:614,yOffSet:518,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:30:59.499 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9992326,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:30:59.621 [Thd =27] Info Default Flag:Fine2, Position:-64.45551,-9.983900459518 2025-05-29 20:31:04.131 [Thd =58] Info Default Execute alignment 2/2 2025-05-29 20:31:12.514 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9988949,xOffSet:617,yOffSet:671,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:12.514 [Thd =27] Info Default D2DMatchMark ******** :errorX:5,errorY:159 2025-05-29 20:31:14.211 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9986696,xOffSet:611,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:14.332 [Thd =27] Info Default Flag:Fine1, Position:62.5892840802438,-9.93999831957982 2025-05-29 20:31:23.118 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9990544,xOffSet:614,yOffSet:665,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:23.118 [Thd =27] Info Default D2DMatchMark ******** :errorX:2,errorY:153 2025-05-29 20:31:24.806 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9989876,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:24.928 [Thd =27] Info Default Flag:Fine2, Position:-64.4098997604157,-9.93913502227678 2025-05-29 20:31:27.687 [Thd =24] Info Default Checking Mark ... 2025-05-29 20:31:36.071 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9984764,xOffSet:612,yOffSet:515,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:36.071 [Thd =27] Info Default D2DMatchMark ******** :errorX:0,errorY:3 2025-05-29 20:31:37.674 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9984155,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:37.795 [Thd =27] Info Default Flag:Fine1, Position:62.5894435959623,-9.93861817729487 2025-05-29 20:31:46.569 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9988963,xOffSet:612,yOffSet:515,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:46.569 [Thd =27] Info Default D2DMatchMark ******** :errorX:0,errorY:3 2025-05-29 20:31:48.175 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9988818,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:48.312 [Thd =27] Info Default Flag:Fine2, Position:-64.4097402476314,-9.9386181772949 2025-05-29 20:31:57.064 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9995311,xOffSet:610,yOffSet:677,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:57.064 [Thd =27] Info Default D2DMatchMark ******** :errorX:-2,errorY:165 2025-05-29 20:31:58.762 [Thd =27] Info Default D2DSearchMark matchResult:0， score:0.9994361,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:31:58.884 [Thd =27] Info Default Flag:Fine3, Position:-64.4085867529825,-136.174714196051 2025-05-29 20:31:59.885 [Thd =27] Info Default IsAlignAngleOK fine1:62.5894435959623,-9.93861817729487,fine2:-64.4097402476314,-9.9386181772949 2025-05-29 20:31:59.885 [Thd =62] Info Default Height difference : 0.40 um 2025-05-29 20:31:59.885 [Thd =27] Info Default IsAlignAngleOK delta:9.87652834832355E-14. 2025-05-29 20:32:16.740 [Thd =27] Info MMSFocus _isStop = true 2025-05-29 20:32:16.740 [Thd =59] Info Default Alignment finish 2025-05-29 20:32:16.740 [Thd =53] Info Default Chuck vacuum open 2025-05-29 20:32:17.742 [Thd =27] Info Default ChuckVac: :True 2025-05-29 20:32:17.744 [Thd =27] Info Default deltax_stage -6.47479749641051, deltay_stage:0. 2025-05-29 20:32:17.744 [Thd =27] Info Default MoveStageForMarkCol101 point (62.5894435959623, -3.46382068088436), GDS ref(-63118665, 63056476), gdsObject(-69593259, 63056476), stageRef(62.5894435959623, -9.93861817729487). 2025-05-29 20:32:17.744 [Thd =27] Info Default deltax_stage 0, deltay_stage:3.831744. 2025-05-29 20:32:17.744 [Thd =27] Info Default MoveStageForMarkCol102 point (66.4211875959623, -3.46382068088436), GDS ref(-69593259, 63056476), gdsObject(-69593259, 66888220), stageRef(62.5894435959623, -3.46382068088436). 2025-05-29 20:32:17.744 [Thd =27] Info Default located_pos:(66.4211875959623, -3.46382068088436) 2025-05-29 20:32:17.744 [Thd =27] Info Default deltax_stage 0, deltay_stage:-127. 2025-05-29 20:32:17.744 [Thd =27] Info Default MoveStageForMarkCol102 point (-64.4105564040377, -9.93861817729487), GDS ref(-63118665, 63056476), gdsObject(-63118665, -63943524), stageRef(62.5894435959623, -9.93861817729487). 2025-05-29 20:32:17.744 [Thd =27] Info Default located_pos:(-64.4105564040377, -9.93861817729487) 2025-05-29 20:32:17.745 [Thd =57] Info Default Measuring the height difference of inspection area 2025-05-29 20:32:25.938 [Thd =57] Info Default DemarcateInspectZ:-5.70000056177378 2025-05-29 20:32:32.718 [Thd =57] Info Default DemarcateInspectZ:-6.20000064373016 2025-05-29 20:32:39.718 [Thd =57] Info Default DemarcateInspectZ:-7.09999864920974 2025-05-29 20:32:46.499 [Thd =57] Info Default DemarcateInspectZ:-9.79999918490648 2025-05-29 20:32:46.509 [Thd =57] Info Default MarkHeightDifference:4.09999862313271 2025-05-29 20:32:46.509 [Thd =63] Info Default Difference of the Inspection Area4.10μm 2025-05-29 20:33:09.058 [Thd =54] Info Default Alignment complete cancel inspect！ 2025-05-29 20:33:09.076 [Thd =54] Info Default SetSystemStatus:WR DM0 1 2025-05-29 20:33:09.084 [Thd =54] Info Default SetSystemStatus Success 2025-05-29 20:33:09.085 [Thd =27] Info Default Chuck vacuum close 2025-05-29 20:33:10.086 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:33:10.086 [Thd =63] Info Default Inspection Cancel! 2025-05-29 20:33:10.898 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:33:10.900 [Thd =1] Error An error occurred in saving the Inspection result Image!{0} System.NullReferenceException: 未将对象引用设置到对象的实例。 在 Module.Setups_Storm.Views.UCSetupMain.SaveResultMapImg(Tuple`3 tuple) 2025-05-29 20:33:15.281 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:33:15.281 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:33:18.833 [Thd =59] Info Default Chuck vacuum close 2025-05-29 20:33:19.834 [Thd =53] Info Default ChuckVac: :False 2025-05-29 20:33:27.019 [Thd =1] Info Default GetMarkPos offsetX:614,offsety:507,bmp.Width:1224,bmp.Height:1024,p.X:518,p.Y:390,p.Width:207,p.Height:263 2025-05-29 20:33:29.512 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:33:29.513 [Thd =45] Info Default Chuck vacuum close 2025-05-29 20:33:30.514 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:33:35.700 [Thd =57] Info Default Chuck vacuum close 2025-05-29 20:33:36.701 [Thd =51] Info Default ChuckVac: :False 2025-05-29 20:33:39.248 [Thd =1] Info Default GetMarkPos offsetX:608,offsety:504,bmp.Width:1224,bmp.Height:1024,p.X:526,p.Y:450,p.Width:251,p.Height:196 2025-05-29 20:33:41.877 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:33:41.877 [Thd =59] Info Default Chuck vacuum close 2025-05-29 20:33:42.878 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:33:47.751 [Thd =62] Info Default Chuck vacuum close 2025-05-29 20:33:48.752 [Thd =45] Info Default ChuckVac: :False 2025-05-29 20:33:54.019 [Thd =1] Info Default GetMarkPos offsetX:608,offsety:511,bmp.Width:1224,bmp.Height:1024,p.X:503,p.Y:405,p.Width:211,p.Height:198 2025-05-29 20:33:56.651 [Thd =1] Info Default CaptureCmd,CanExec:True 2025-05-29 20:33:56.652 [Thd =53] Info Default Chuck vacuum close 2025-05-29 20:33:57.653 [Thd =1] Info Default ChuckVac: :False 2025-05-29 20:33:59.636 [Thd =63] Info Default Alignment ... 2025-05-29 20:33:59.757 [Thd =52] Info Default Chuck vacuum close 2025-05-29 20:34:00.758 [Thd =47] Info Default ChuckVac: :False 2025-05-29 20:34:23.388 [Thd =54] Info Default Switch light... 2025-05-29 20:34:23.388 [Thd =47] Info Default OpenLamp Transmission 2025-05-29 20:34:24.197 [Thd =62] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:34:24.900 [Thd =47] Info Default CloseLamp Reflection 2025-05-29 20:34:27.353 [Thd =47] Info MMSFocus _isStop = true 2025-05-29 20:34:27.353 [Thd =51] Info Default Execute alignment 1/2 2025-05-29 20:34:31.462 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9998049,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:34:31.462 [Thd =47] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 20:34:31.583 [Thd =47] Info Default Flag:Fine1, Position:62.543939851205,-10.058397540482 2025-05-29 20:34:40.354 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9997774,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:34:40.354 [Thd =47] Info Default D2DMatchMark ******** :errorX:0,errorY:0 2025-05-29 20:34:40.476 [Thd =47] Info Default Flag:Fine2, Position:-64.454358838072,-9.983900919036 2025-05-29 20:34:44.962 [Thd =52] Info Default Execute alignment 2/2 2025-05-29 20:34:53.355 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9990946,xOffSet:621,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:34:53.355 [Thd =47] Info Default D2DMatchMark ******** :errorX:9,errorY:152 2025-05-29 20:34:55.044 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9998358,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:34:55.166 [Thd =47] Info Default Flag:Fine1, Position:62.588497198009,-9.9418396686479 2025-05-29 20:35:03.938 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9991544,xOffSet:614,yOffSet:664,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:03.938 [Thd =47] Info Default D2DMatchMark ******** :errorX:2,errorY:152 2025-05-29 20:35:05.631 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9998771,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:05.753 [Thd =47] Info Default Flag:Fine2, Position:-64.4098233409549,-9.93982528977781 2025-05-29 20:35:08.578 [Thd =52] Info Default Checking Mark ... 2025-05-29 20:35:16.966 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9992087,xOffSet:612,yOffSet:517,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:16.966 [Thd =47] Info Default D2DMatchMark ******** :errorX:0,errorY:5 2025-05-29 20:35:18.578 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9991376,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:18.700 [Thd =47] Info Default Flag:Fine1, Position:62.5894449945839,-9.93861926522163 2025-05-29 20:35:27.470 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9994335,xOffSet:612,yOffSet:517,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:27.470 [Thd =47] Info Default D2DMatchMark ******** :errorX:0,errorY:5 2025-05-29 20:35:29.085 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9994015,xOffSet:612,yOffSet:512,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:29.218 [Thd =47] Info Default Flag:Fine2, Position:-64.4088755603555,-9.93861926522189 2025-05-29 20:35:37.968 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9996161,xOffSet:615,yOffSet:676,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:37.968 [Thd =47] Info Default D2DMatchMark ******** :errorX:3,errorY:164 2025-05-29 20:35:39.665 [Thd =47] Info Default D2DSearchMark matchResult:0， score:0.9992415,xOffSet:612,yOffSet:513,AcceptScore:0.7,org_Width:1224,org_height:1024 2025-05-29 20:35:39.787 [Thd =47] Info Default Flag:Fine3, Position:-64.4085855330962,-136.175004393449 2025-05-29 20:35:40.788 [Thd =47] Info Default IsAlignAngleOK fine1:62.5894449945839,-9.93861926522163,fine2:-64.4088755603555,-9.93861926522189 2025-05-29 20:35:40.788 [Thd =63] Info Default Height difference : 0.30 um 2025-05-29 20:35:40.788 [Thd =47] Info Default IsAlignAngleOK delta:8.8888755134912E-13. 2025-05-29 20:35:57.484 [Thd =47] Info MMSFocus _isStop = true 2025-05-29 20:35:57.484 [Thd =62] Info Default Alignment finish 2025-05-29 20:35:57.484 [Thd =27] Info Default Chuck vacuum open 2025-05-29 20:35:58.485 [Thd =47] Info Default ChuckVac: :True 2025-05-29 20:35:59.453 [Thd =1] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:36:06.826 [Thd =1] Info Default Mask_Recipe 100 2025-05-29 20:36:06.830 [Thd =1] Info Default MaskScaleY:1.00001322415173 2025-05-29 20:36:06.830 [Thd =1] Info Default MaskScaleX:1.00000749286168,Orth_Y_BeforR:0.00789820045245972 2025-05-29 20:37:43.907 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:btnExecute_Click Before Memory usage: 2405.949MB 2025-05-29 20:37:46.318 [Thd =27] Info Default 设置光标定环境中，请等待...... 2025-05-29 20:37:46.319 [Thd =53] Info Default AutoLightInit******************DemarcatePoints Count:1 2025-05-29 20:37:46.321 [Thd =53] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:37:46.321 [Thd =53] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:37:46.323 [Thd =53] Info Default SetDistortionPara disaabled 2025-05-29 20:37:46.546 [Thd =53] Info MMSFocus _isStop = true 2025-05-29 20:37:46.546 [Thd =53] Info Default aSwitchIndex index:2 2025-05-29 20:37:46.546 [Thd =53] Info Default lens from ATF: 2025-05-29 20:37:46.546 [Thd =53] Info Default objCount:3 2025-05-29 20:37:46.546 [Thd =53] Info Default ratio:P200;objId:0 2025-05-29 20:37:46.546 [Thd =53] Info Default ratio:P140;objId:1 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:P100;objId:2 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:;objId:0 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:;objId:0 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:;objId:0 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:;objId:0 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:;objId:0 2025-05-29 20:37:46.547 [Thd =53] Info Default lens from system settings: 2025-05-29 20:37:46.547 [Thd =53] Info Default systemlensettings lens count:3 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:P100;objId:0 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:P140;objId:1 2025-05-29 20:37:46.547 [Thd =53] Info Default ratio:P200;objId:2 2025-05-29 20:38:01.652 [Thd =53] Info Default not in position 1, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 20:38:01.652 [Thd =53] Info Default send switch cmd 2025-05-29 20:38:16.753 [Thd =53] Info Default not in position 2, PLCReturnIndex:0, TrySwitchIndex:2 2025-05-29 20:38:16.753 [Thd =53] Info AbstractMicroscope Switch Lens:Broadcast Event 2025-05-29 20:38:16.781 [Thd =53] Info AbstractMicroscope Broadcast Event Finished 2025-05-29 20:38:16.784 [Thd =53] Info Default m_StagePixelSizeX=0.208396362， m_StagePixelSizeY=0.208396362. 2025-05-29 20:38:16.784 [Thd =53] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0 2025-05-29 20:38:16.784 [Thd =53] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative 2025-05-29 20:38:16.784 [Thd =53] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1 2025-05-29 20:38:16.784 [Thd =53] Info Default BaseScanObjectLine:------------------ 2025-05-29 20:38:16.784 [Thd =53] Info Default BaseScanObjectLine:***************** 2025-05-29 20:38:16.784 [Thd =53] Info Default BaseScanObjectLine:0000000000000000 2025-05-29 20:38:16.786 [Thd =53] Info Default StagePixelSizeY:0.208396362,PrepareDistanceScan:2,StepScan:0.426790105438888,StepStep:0.423458234670019,CosValueY:1,SinValueY:0 2025-05-29 20:38:16.787 [Thd =53] Info strip vectorBegin:(1.456877,-130.239727),VectorEnd:(-3.823493,-130.239727),CaptureBegin:(-0.543123,-130.239727)，CaptureEnd：(-1.823493,-130.239727),StepScan:0.426790105438888 2025-05-29 20:38:16.787 [Thd =53] Info Default VectorBegin:(1.4568768585654,-130.239727303189) 2025-05-29 20:38:18.043 [Thd =24] Info Default 打开光源，亮度：33% 2025-05-29 20:38:18.044 [Thd =52] Info Default OpenLamp Transmission 2025-05-29 20:38:18.645 [Thd =53] Info Default SetFocusTrack CloseTrack OK 2025-05-29 20:38:18.645 [Thd =46] Info Default 聚焦Track已关闭 2025-05-29 20:38:18.856 [Thd =49] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:38:19.055 [Thd =52] Info Default CloseLamp Reflection 2025-05-29 20:38:19.572 [Thd =51] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:19.756 [Thd =53] Info MMSFocus _isStop = true 2025-05-29 20:38:20.872 [Thd =52] Info Default PolarizationBaffleControl False: 3! 2025-05-29 20:38:20.958 [Thd =53] Info Default QuerySubstrateMode Line OK 2025-05-29 20:38:20.958 [Thd =51] Info Default 已切换到线阵聚焦模式 2025-05-29 20:38:21.379 [Thd =52] Info Default PolarizationBaffleControl False: 2! 2025-05-29 20:38:21.571 [Thd =57] Info Default ChangeLightPath: True! 2025-05-29 20:38:22.560 [Thd =53] Info Default SetFocusTrack OpenTrack OK 2025-05-29 20:38:22.560 [Thd =45] Info Default 聚焦Track已开启 2025-05-29 20:38:22.560 [Thd =46] Info Default 标定中，请等待...... 2025-05-29 20:38:22.563 [Thd =54] Info Default CurrentSize:2048,2048 2025-05-29 20:38:22.563 [Thd =54] Info Default Camera size no change 2025-05-29 20:38:22.564 [Thd =54] Info Default Set camera size success 2025-05-29 20:38:22.564 [Thd =54] Info Default Current:TDIStage：TDI256，Target：TDI256 2025-05-29 20:38:23.542 [Thd =54] Info Default Set camera parameter 2025-05-29 20:38:23.544 [Thd =54] Info Default BUFFER_COUNT no change 2025-05-29 20:38:23.551 [Thd =53] Info Default scanStrips:1 2025-05-29 20:38:23.588 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:23.802 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:25.160 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:25.375 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:26.264 [Thd =47] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:26.730 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:26.943 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:27.824 [Thd =24] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:27.878 [Thd =53] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:38:28.014 [Thd =53] Info Default AutoLightReturn:32,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:38:28.435 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:28.648 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:29.551 [Thd =63] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:30.004 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:30.217 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:31.121 [Thd =27] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:31.579 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:31.793 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:32.680 [Thd =59] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:32.726 [Thd =53] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:38:32.748 [Thd =53] Info Default AutoLightReturn:31,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:38:33.169 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:33.382 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:34.275 [Thd =54] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:34.737 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:34.951 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:35.836 [Thd =52] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:36.307 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:36.521 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:37.405 [Thd =51] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:37.456 [Thd =53] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:38:37.594 [Thd =53] Info Default AutoLightReturn:30,confirm:-1，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:38:38.015 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:38.228 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:39.106 [Thd =54] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:39.583 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:39.796 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:40.691 [Thd =57] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:41.151 [Thd =53] Info Default m_focusMapMode：0 2025-05-29 20:38:41.365 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\2396678\rcp_DB_1\OpticalCalibration 2025-05-29 20:38:42.262 [Thd =46] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:42.299 [Thd =53] Info Default AutoLightReturn:-------DB---------- 2025-05-29 20:38:42.569 [Thd =53] Info Default AutoLightReturn:255,confirm:-2，stripsIndex：0,scanStrips.Count:1 2025-05-29 20:38:42.570 [Thd =52] Info Default OpenLamp Transmission 2025-05-29 20:38:42.974 [Thd =24] Info MMSFocus _isStop = true 2025-05-29 20:38:43.378 [Thd =59] Info Default PolarizationBaffleControl True: 1! 2025-05-29 20:38:43.882 [Thd =59] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:38:44.176 [Thd =24] Info Default QuerySubstrateMode Area OK 2025-05-29 20:38:44.176 [Thd =57] Info Default 已切换到面阵聚焦模式 2025-05-29 20:38:44.386 [Thd =52] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:38:44.386 [Thd =52] Info Default CloseLamp Reflection 2025-05-29 20:38:44.777 [Thd =24] Info Default SetFocusTrack CloseTrack OK 2025-05-29 20:38:44.777 [Thd =24] Info Default 聚焦Track已关闭 2025-05-29 20:38:45.416 [Thd =24] Info Default OpenLamp Transmission 2025-05-29 20:38:46.228 [Thd =57] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:38:46.394 [Thd =52] Info MMSFocus _isStop = true 2025-05-29 20:38:46.914 [Thd =27] Error Default SyncSend recv cmd timeout 2025-05-29 20:38:47.238 [Thd =24] Info Default PolarizationBaffleControl True: 3! 2025-05-29 20:38:47.238 [Thd =24] Info Default CloseLamp Reflection 2025-05-29 20:38:47.596 [Thd =52] Info Default QuerySubstrateMode Area OK 2025-05-29 20:38:47.596 [Thd =59] Info Default 已切换到面阵聚焦模式 2025-05-29 20:38:48.197 [Thd =52] Info Default SetFocusTrack CloseTrack OK 2025-05-29 20:38:48.197 [Thd =52] Info Default 聚焦Track已关闭 2025-05-29 20:38:48.256 [Thd =53] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:b__29_1 After Memory usage: 2930.301MB