|
2025-06-28 13:14:58.470 [Thd =85] Info Default m_focusMapMode：0
|
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2025-06-28 13:14:58.958 [Thd =92] Error Default SyncSend recv cmd timeout
|
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2025-06-28 13:14:59.013 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
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2025-06-28 13:15:01.264 [Thd =85] Info Default m_focusMapMode：0
|
|
2025-06-28 13:15:01.756 [Thd =71] Error Default SyncSend recv cmd timeout
|
|
2025-06-28 13:15:01.807 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
|
2025-06-28 13:15:03.027 [Thd =85] Info Default AutoLightReturn:-------DB----------
|
|
2025-06-28 13:15:03.227 [Thd =85] Info Default AutoLightReturn:21,confirm:-1，stripsIndex：0,scanStrips.Count:1
|
|
2025-06-28 13:15:04.261 [Thd =85] Info Default m_focusMapMode：0
|
|
2025-06-28 13:15:04.804 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
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2025-06-28 13:15:07.059 [Thd =85] Info Default m_focusMapMode：0
|
|
2025-06-28 13:15:07.560 [Thd =82] Error Default SyncSend recv cmd timeout
|
|
2025-06-28 13:15:07.601 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
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2025-06-28 13:15:09.855 [Thd =85] Info Default m_focusMapMode：0
|
|
2025-06-28 13:15:10.356 [Thd =57] Error Default SyncSend recv cmd timeout
|
|
2025-06-28 13:15:10.396 [Thd =38] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
|
2025-06-28 13:15:11.613 [Thd =85] Info Default AutoLightReturn:-------DB----------
|
|
2025-06-28 13:15:11.982 [Thd =85] Info Default AutoLightReturn:21,confirm:0，stripsIndex：0,scanStrips.Count:1
|
|
2025-06-28 13:15:11.982 [Thd =85] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
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2025-06-28 13:15:11.982 [Thd =85] Info DirPath D:\StormData\Work\data\Setups\S00824335\rcp_DB_1\OpticalCalibration
|
|
2025-06-28 13:15:12.183 [Thd =92] Info Default OpenLamp Transmission
|
|
2025-06-28 13:15:12.420 [Thd =52] Info MMSFocus _isStop = true
|
|
2025-06-28 13:15:12.993 [Thd =39] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:15:14.001 [Thd =92] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:15:14.001 [Thd =92] Info Default CloseLamp Reflection
|
|
2025-06-28 13:15:16.543 [Thd =86] Error Default SyncSend recv cmd timeout
|
|
2025-06-28 13:15:23.623 [Thd =52] Info Default QuerySubstrateMode Area OK
|
|
2025-06-28 13:15:23.623 [Thd =71] Info Default 已切换到面阵聚焦模式
|
|
2025-06-28 13:15:24.197 [Thd =27] Error Default ChangeLightPath: : Switch to area cam fault return:-1!
|
|
2025-06-28 13:15:25.225 [Thd =52] Info Default SetFocusTrack CloseTrack OK
|
|
2025-06-28 13:15:25.225 [Thd =39] Info Default 聚焦Track已关闭
|
|
2025-06-28 13:15:25.248 [Thd =82] Info Default OpenLamp Transmission
|
|
2025-06-28 13:15:26.055 [Thd =78] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:15:26.226 [Thd =86] Info MMSFocus _isStop = true
|
|
2025-06-28 13:15:27.064 [Thd =82] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:15:27.064 [Thd =82] Info Default CloseLamp Reflection
|
|
2025-06-28 13:15:37.263 [Thd =73] Error Default ChangeLightPath: : Switch to area cam fault return:-1!
|
|
2025-06-28 13:15:37.431 [Thd =86] Info Default QuerySubstrateMode Area OK
|
|
2025-06-28 13:15:37.431 [Thd =74] Info Default 已切换到面阵聚焦模式
|
|
2025-06-28 13:15:39.032 [Thd =86] Info Default SetFocusTrack CloseTrack OK
|
|
2025-06-28 13:15:39.032 [Thd =92] Info Default 聚焦Track已关闭
|
|
2025-06-28 13:15:39.044 [Thd =70] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.WindLightCorrentionMethodName:<btnExecute_Click>b__29_1 After Memory usage: 14662.2MB
|
|
2025-06-28 13:15:39.044 [Thd =74] Info Default 光标定完成！
|
|
2025-06-28 13:15:59.124 [Thd =1] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:btnXYCalib_Click Before Memory usage: 14543.14MB
|
|
2025-06-28 13:15:59.265 [Thd =86] Info Default 设置RTB 标定环境中,请等待 ......
|
|
2025-06-28 13:15:59.266 [Thd =82] Info Default AutoLightInit******************DemarcatePoints Count:1
|
|
2025-06-28 13:15:59.266 [Thd =82] Info Default SetDistortionPara disaabled
|
|
2025-06-28 13:16:00.049 [Thd =82] Info MMSFocus _isStop = true
|
|
2025-06-28 13:16:00.049 [Thd =82] Info Default aSwitchIndex index:1
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default lens from ATF:
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default objCount:3
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:P200;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:P140;objId:1
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:P100;objId:2
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default lens from system settings:
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default systemlensettings lens count:3
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:P200;objId:0
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:P140;objId:1
|
|
2025-06-28 13:16:00.050 [Thd =82] Info Default ratio:P100;objId:2
|
|
2025-06-28 13:16:00.058 [Thd =82] Info AbstractMicroscope Switch Lens:Broadcast Event
|
|
2025-06-28 13:16:00.085 [Thd =82] Info AbstractMicroscope Broadcast Event Finished
|
|
2025-06-28 13:16:00.086 [Thd =82] Info Default m_StagePixelSizeX=0.138728324， m_StagePixelSizeY=0.138728324.
|
|
2025-06-28 13:16:00.086 [Thd =82] Info Default singleAixsScan Testing calibrationSetting.OffsetYAL:0
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|
2025-06-28 13:16:00.087 [Thd =82] Info Default offsetYAL Positive and negative sign rule: when XOY is greater than 90 degrees, the mask vertical orthogonal Angle is positive; When XOY is less than 90 degrees, the vertical orthogonal Angle of the mask is negative
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default SinValueX: 0,CosValueX:1,SinValueY:0,CosValueY:1
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default BaseScanObjectLine:------------------
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default BaseScanObjectLine:*****************
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default BaseScanObjectLine:0000000000000000
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default StagePixelSizeY:0.138728324,PrepareDistanceScan:4,StepScan:0.568223726080004,StepStep:0.566009074217628,CosValueY:1,SinValueY:0
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|
2025-06-28 13:16:00.087 [Thd =82] Info Default deltax_stage 75.0106703158465, deltay_stage:0.
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|
2025-06-28 13:16:00.087 [Thd =82] Info Default MoveStageForMarkCol101 point (67.3193444554689, -10.8774041721448), GDS ref(-64500000, 64500000), gdsObject(10511000, 64500000), stageRef(67.3176850162183, 64.1332661620574).
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default deltax_stage 0, deltay_stage:-28.7746207588394.
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default MoveStageForMarkCol102 point (38.5447236966295, -10.8774041721448), GDS ref(10511000, 64500000), gdsObject(10511000, 35725000), stageRef(67.3193444554689, -10.8774041721448).
|
|
2025-06-28 13:16:00.087 [Thd =82] Info Default located_pos:(38.5447236966295, -10.8774041721448)
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|
2025-06-28 13:16:10.806 [Thd =82] Info strip vectorBegin:(43.390404,-11.013497),VectorEnd:(33.685733,-11.013497),CaptureBegin:(39.390404,-11.013497)，CaptureEnd：(37.685733,-11.013497),StepScan:0.568223726080004
|
|
2025-06-28 13:16:10.806 [Thd =82] Info Default VectorBegin:(43.3904040707095,-11.0134966581448)
|
|
2025-06-28 13:16:12.300 [Thd =74] Info Default 打开光源，亮度：21%
|
|
2025-06-28 13:16:12.300 [Thd =71] Info Default OpenLamp Transmission
|
|
2025-06-28 13:16:13.106 [Thd =86] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:16:13.310 [Thd =71] Info Default CloseLamp Reflection
|
|
2025-06-28 13:16:13.818 [Thd =85] Error Default SyncSend recv cmd timeout
|
|
2025-06-28 13:16:13.901 [Thd =82] Info Default SetFocusTrack CloseTrack OK
|
|
2025-06-28 13:16:13.901 [Thd =73] Info Default 聚焦Track已关闭
|
|
2025-06-28 13:16:15.121 [Thd =71] Info Default PolarizationBaffleControl False: 2!
|
|
2025-06-28 13:16:16.069 [Thd =82] Info MMSFocus _isStop = true
|
|
2025-06-28 13:16:24.315 [Thd =52] Error Default ChangeLightPath: : Switch to area cam fault return:-1!
|
|
2025-06-28 13:16:24.315 [Thd =52] Info Default ChangeLightPath: False!
|
|
2025-06-28 13:16:26.273 [Thd =82] Info Default QuerySubstrateMode Line OK
|
|
2025-06-28 13:16:26.273 [Thd =71] Info Default 已切换到线阵聚焦模式
|
|
2025-06-28 13:16:28.875 [Thd =82] Info Default SetFocusTrack OpenTrack OK
|
|
2025-06-28 13:16:28.875 [Thd =78] Info Default 聚焦Track已开启
|
|
2025-06-28 13:16:28.875 [Thd =27] Info Default CurrentSize:4096,4096
|
|
2025-06-28 13:16:28.875 [Thd =27] Info Default Camera size no change
|
|
2025-06-28 13:16:28.875 [Thd =52] Info Default RTB 标定中,请等待 ......
|
|
2025-06-28 13:16:28.876 [Thd =27] Info Default Set camera size success
|
|
2025-06-28 13:16:28.876 [Thd =27] Info Default Current:TDIStage：TDI256，Target：TDI256
|
|
2025-06-28 13:16:29.854 [Thd =27] Info Default Set camera parameter
|
|
2025-06-28 13:16:29.857 [Thd =27] Info Default BUFFER_COUNT no change
|
|
2025-06-28 13:16:29.860 [Thd =82] Info Default SetDistortionPara disaabled
|
|
2025-06-28 13:16:29.860 [Thd =82] Info Default scanStrips:1
|
|
2025-06-28 13:16:29.897 [Thd =82] Info Default m_focusMapMode：0
|
|
2025-06-28 13:16:31.523 [Thd =82] Info Default Get_Tolerance_and_Rounding:******Tolerance********
|
|
2025-06-28 13:16:35.117 [Thd =82] Info Default Get_Tolerance_and_Rounding:-----------Tolerance-------------
|
|
2025-06-28 13:16:35.140 [Thd =86] Info Default OpenLamp Transmission
|
|
2025-06-28 13:16:35.282 [Thd =78] Info MMSFocus _isStop = true
|
|
2025-06-28 13:16:35.946 [Thd =27] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:16:36.956 [Thd =86] Info Default PolarizationBaffleControl True: 3!
|
|
2025-06-28 13:16:36.956 [Thd =86] Info Default CloseLamp Reflection
|
|
2025-06-28 13:16:39.492 [Thd =68] Error Default SyncSend recv cmd timeout
|
|
2025-06-28 13:16:46.486 [Thd =78] Info Default QuerySubstrateMode Area OK
|
|
2025-06-28 13:16:46.486 [Thd =27] Info Default 已切换到面阵聚焦模式
|
|
2025-06-28 13:16:47.153 [Thd =82] Error Default ChangeLightPath: : Switch to area cam fault return:-1!
|
|
2025-06-28 13:16:48.088 [Thd =78] Info Default SetFocusTrack CloseTrack OK
|
|
2025-06-28 13:16:48.088 [Thd =92] Info Default 聚焦Track已关闭
|
|
2025-06-28 13:16:48.088 [Thd =92] Info Default 公差标定完成
|
|
2025-06-28 13:16:48.097 [Thd =74] Info Default CurrentMenthod: ClassName:Module.Setups_Storm.SettingStep.UCCalibrationMethodName:<btnXYCalib_Click>b__27_1 Before Memory usage: 14672.54MB
|
|
2025-06-28 13:17:15.413 [Thd =1] Info Default CDdefectResolution is 0.14
|
|
2025-06-28 13:17:15.413 [Thd =1] Info Default PHdefectResolution is 0.1
|
|
2025-06-28 13:17:15.413 [Thd =1] Info Default CDdefectResolutionBil is 0.16
|
|
2025-06-28 13:24:55.379 [Thd =88] Info Default SystemService::CleanHistoryDPData: 0
|
|
2025-06-28 13:30:15.089 [Thd =1] Info Default DefectPicID:5c4e32af-2bac-4768-adf4-da6d52e019a6
|
|
2025-06-28 13:30:15.089 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
|
2025-06-28 13:30:15.169 [Thd =1] Info Default D:\StormData\Work\data\MaskDefectImages\2025-06-28\20250628113141\InspectObj_overview.bmp
|
|
2025-06-28 13:30:21.324 [Thd =1] Info Default DefectPicID:6d576b69-c594-4bd9-affd-d2bc847a56ae
|
|
2025-06-28 13:30:21.324 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
|
2025-06-28 13:30:25.118 [Thd =1] Info Default DefectPicID:5c4e32af-2bac-4768-adf4-da6d52e019a6
|
|
2025-06-28 13:30:25.118 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
|
2025-06-28 13:38:45.138 [Thd =1] Info Default DefectPicID:dc14a565-f0c5-4a0c-bf21-695ff9c6bea7
|
|
2025-06-28 13:38:45.138 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
|
2025-06-28 13:39:39.505 [Thd =1] Info Default DefectPicID:5c4e32af-2bac-4768-adf4-da6d52e019a6
|
|
2025-06-28 13:39:39.505 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
|
2025-06-28 13:39:43.694 [Thd =1] Info Default DefectPicID:6d576b69-c594-4bd9-affd-d2bc847a56ae
|
|
2025-06-28 13:39:43.694 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
|
2025-06-28 13:39:44.222 [Thd =1] Info Default DefectPicID:c8bf7518-3c53-4039-8ee9-f117c47e99ec
|
|
2025-06-28 13:39:44.222 [Thd =1] LogException Default 未将对象引用设置到对象的实例。
|
|
在 AT.Logging.OutputLogWriter.WriteMessage(LoggingLevel level, Object sender, String catagory, String message, Color color)
|
|
在 AT.Logging.OutputLogWriter.WriteAynsc(Object sender, LoggingLevel level, LogWriterStyle style, String catagory, String message)
|
